High power capacity DMS filter and communication device

Abstract

The invention relates to the technical field of communication, in particular to a high-power-capacity DMS filter and communication equipment. The communication equipment comprises the DMS filter with the high power capacity, the high performance of the DMS filter can be ensured by cascading at least two DMS dual-mode coupled filters, the density of the DMS filter can be reduced, the power capacity of the DMS filter can be improved, the heat dissipation area of the DMS filter can be increased, and the heat dissipation efficiency can be improved, so that the application range of the DMS filter can be expanded; and the method can also be used outside a receiving link.

Description

Technical Field

[0001] The present invention relates to the field of communication technology, and in particular to a DMS filter with high power capacity and communication equipment. Background Art

[0002] The dual-mode SAW (DMS) filter structure has the advantages of miniaturization and high stability, and is widely used in various communication equipment (such as duplexers).

[0003] However, the DMS filter provided by the related art has a small power capacity and a narrow application range and can usually only be used in a receiving link (RX). Summary of the invention

[0004] The purpose of the present invention includes providing a high-power capacity DMS filter and a communication device. The high-power capacity DMS filter can be used in various communication devices, has good performance, and can reduce power density and improve power capacity. At the same time, the high-power capacity DMS filter can also increase the heat dissipation area and improve stability, so as to expand the application scope of the DMS filter and enable it to be used outside the receiving link.

[0005] The embodiments of the present invention can be implemented as follows: In a first aspect, the present invention provides a DMS filter with high power capacity, comprising: Piezoelectric substrate; At least two DMS dual-mode coupling filters are formed on a piezoelectric substrate; wherein, The DMS dual-mode coupling filter comprises a first reflection grating, a second reflection grating and a plurality of interdigital transducers, wherein the plurality of interdigital transducers are distributed between the first reflection grating and the second reflection grating, and the plurality of interdigital transducers are distributed in sequence and spaced apart along the direction of the first set axis; The first reflection grating of a DMS dual-mode coupling filter is cascaded with the first reflection grating of another DMS dual-mode coupling filter, the second reflection grating of a DMS dual-mode coupling filter is cascaded with the second reflection grating of another DMS dual-mode coupling filter, and the multiple interdigital transducers of one DMS dual-mode coupling filter are cascaded one by one with the multiple interdigital transducers of another DMS dual-mode coupling filter.

[0006] In an optional embodiment, the interdigital transducers distributed at the head and tail ends along the first set axis in at least one DMS dual-mode coupled filter are symmetrically distributed along the second set axis, and the first set axis and the second set axis are arranged at an angle.

[0007] In an optional embodiment, the multiple interdigital transducers in at least one DMS dual-mode coupled filter include a first interdigital transducer, a second interdigital transducer and a third interdigital transducer, the first interdigital transducer and the third interdigital transducer are symmetrically distributed along a second set axis, and the first set axis is perpendicular to the second set axis.

[0008] In an optional embodiment, at least one interdigital transducer includes a plurality of first pseudo-finger electrodes, a plurality of first interdigital electrodes, a plurality of second interdigital electrodes and a plurality of second pseudo-finger electrodes, the plurality of first pseudo-finger electrodes and the plurality of first interdigital electrodes being alternately distributed in sequence along the direction of a first set axis and being cascaded with each other; the plurality of second interdigital electrodes and the plurality of second pseudo-finger electrodes being alternately distributed in sequence along the direction of the first set axis and being cascaded with each other; the first pseudo-finger electrodes, the first interdigital electrodes, the second interdigital electrodes and the second pseudo-finger electrodes all extend in the direction of the second set axis, and the first pseudo-finger electrodes and the second interdigital electrodes are spaced one-to-one in correspondence with each other in the direction of the second set axis, and the first interdigital electrodes and the second pseudo-finger electrodes are spaced one-to-one in correspondence with each other in the direction of the second set axis; the first set axis is set at an angle to the second set axis.

[0009] In an optional embodiment, at least one interdigital transducer comprises a first interdigital electrode group, a second interdigital electrode group and a third interdigital electrode group distributed along a first set axis; wherein, The first interdigital electrode group, the second interdigital electrode group and the third interdigital electrode group each include at least one first dummy finger electrode, at least one first interdigital electrode, at least one second interdigital electrode and at least one second dummy finger electrode; The width of at least one of the first pseudo-finger electrode, the first interdigitated electrode, the second interdigitated electrode and the second pseudo-finger electrode in the first interdigitated electrode group is greater than the width of at least one of the first pseudo-finger electrode, the first interdigitated electrode, the second interdigitated electrode and the second pseudo-finger electrode in the second interdigitated electrode group; the width of at least one of the first pseudo-finger electrode, the first interdigitated electrode, the second interdigitated electrode and the second pseudo-finger electrode in the second interdigitated electrode group is greater than the width of at least one of the first pseudo-finger electrode, the first interdigitated electrode, the second interdigitated electrode and the second pseudo-finger electrode in the third interdigitated electrode group; or, The width of at least one of the first pseudo-finger electrode, the first interdigitated electrode, the second interdigitated electrode and the second pseudo-finger electrode in the first interdigitated electrode group is greater than the width of at least one of the first pseudo-finger electrode, the first interdigitated electrode, the second interdigitated electrode and the second pseudo-finger electrode in the second interdigitated electrode group; the width of at least one of the first pseudo-finger electrode, the first interdigitated electrode, the second interdigitated electrode and the second pseudo-finger electrode in the second interdigitated electrode group is less than the width of at least one of the first pseudo-finger electrode, the first interdigitated electrode, the second interdigitated electrode and the second pseudo-finger electrode in the third interdigitated electrode group; or, The width of at least one of the first pseudo-finger electrode, the first interdigitated electrode, the second interdigitated electrode and the second pseudo-finger electrode in the first interdigitated electrode group is smaller than the width of at least one of the first pseudo-finger electrode, the first interdigitated electrode, the second interdigitated electrode and the second pseudo-finger electrode in the second interdigitated electrode group; the width of at least one of the first pseudo-finger electrode, the first interdigitated electrode, the second interdigitated electrode and the second pseudo-finger electrode in the second interdigitated electrode group is larger than the width of at least one of the first pseudo-finger electrode, the first interdigitated electrode, the second interdigitated electrode and the second pseudo-finger electrode in the third interdigitated electrode group; or, The widths of the first pseudo-finger electrode, the first interdigital electrode, the second interdigital electrode and the second pseudo-finger electrode of at least one IDT are all equal.

[0010] In an optional embodiment, at least one interdigital transducer includes a first interdigital electrode group, a second interdigital electrode group, a third interdigital electrode group, a fourth interdigital electrode group and a fifth interdigital electrode group distributed along a first set axis; wherein, The first interdigital electrode group, the second interdigital electrode group, the third interdigital electrode group, the fourth interdigital electrode group and the fifth interdigital electrode group each include at least one first dummy finger electrode, at least one first interdigital electrode, at least one second interdigital electrode and at least one second dummy finger electrode; The width of at least one of the first dummy finger electrode, the first interdigital electrode, the second interdigital electrode and the second dummy finger electrode in the first interdigital electrode group is smaller than the width of at least one of the first dummy finger electrode, the first interdigital electrode, the second interdigital electrode and the second dummy finger electrode in the second interdigital electrode group; The width of at least one of the first pseudo-finger electrode, the first interdigital electrode, the second interdigital electrode, and the second pseudo-finger electrode in the second interdigital electrode group is smaller than the width of at least one of the first pseudo-finger electrode, the first interdigital electrode, the second interdigital electrode, and the second pseudo-finger electrode in the third interdigital electrode group; The width of at least one of the first dummy electrode, the first interdigital electrode, the second interdigital electrode, and the second dummy electrode in the third interdigital electrode group is greater than the width of at least one of the first dummy electrode, the first interdigital electrode, the second interdigital electrode, and the second dummy electrode in the fourth interdigital electrode group; The width of at least one of the first pseudo-finger electrode, the first interdigitated electrode, the second interdigitated electrode and the second pseudo-finger electrode in the fourth interdigitated electrode group is greater than the width of at least one of the first pseudo-finger electrode, the first interdigitated electrode, the second interdigitated electrode and the second pseudo-finger electrode in the fifth interdigitated electrode group.

[0011] In an optional embodiment, at least one of the first pseudo-finger electrode, the first interdigitated electrode, the second interdigitated electrode and the second pseudo-finger electrode has a width of 2.300-2.600 μm; The thickness of at least one of the first dummy electrode, the first interdigital electrode, the second interdigital electrode and the second dummy electrode is 180-455 nm.

[0012] In an optional embodiment, the lengths of the first interdigital electrode and the second interdigital electrode along the direction of the second set axis are both greater than the length of either the first dummy electrode or the second dummy electrode along the direction of the second set axis; The overlapping area of ​​the first interdigital electrode and the second interdigital electrode is an active area.

[0013] In an optional embodiment, the active regions of at least two IDTs have the same width along the direction of the second set axis; the width of the active regions along the direction of the second set axis is 50.0-190.0 μm.

[0014] In a second aspect, the present invention further provides a communication device, comprising: the aforementioned DMS filter with high power capacity.

[0015] The beneficial effects of the high-power capacity DMS filter of the embodiment of the present invention include: the high-power capacity DMS filter provided by the embodiment of the present invention includes at least two DMS dual-mode coupling filters arranged on a piezoelectric substrate, the DMS dual-mode coupling filter includes a first reflection grating, a second reflection grating and a plurality of interdigital transducers, the plurality of interdigital transducers are distributed between the first reflection grating and the second reflection grating, and the plurality of interdigital transducers are distributed in sequence along the direction of the first set axis; the first reflection grating of one DMS dual-mode coupling filter is cascaded with the first reflection grating of another DMS dual-mode coupling filter, the second reflection grating of one DMS dual-mode coupling filter is cascaded with the second reflection grating of another DMS dual-mode coupling filter, and the plurality of interdigital transducers of one DMS dual-mode coupling filter are cascaded one-to-one with the plurality of interdigital transducers of another DMS dual-mode coupling filter. By configuring in this way, the high performance of the DMS filter can be ensured by cascading at least two DMS dual-mode coupled filters, while the density of the DMS filter can be reduced, its power capacity can be improved, and the heat dissipation area of ​​the DMS filter can be increased, thereby improving the heat dissipation efficiency, so as to expand the application scope of the DMS filter and enable it to be used outside the receiving link.

[0016] The communication device of the embodiment of the present invention includes all the beneficial effects of the aforementioned high power capacity DMS filter, for example: having high performance, and being able to reduce the density of the DMS filter, improve its power capacity, and increase the heat dissipation area of ​​the DMS filter, thereby improving heat dissipation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 Schematic diagram of the structure of a DMS filter with high power capacity according to an embodiment of the present invention; Figure 2 Schematic diagram of the structure of the DMS filter in Comparative Example 1 of the present invention; Figure 3 is a performance curve diagram of the DMS filter in Comparative Example 1 of the present invention; Figure 4 is a power density diagram of the DMS filter in Comparative Example 1 of the present invention; Figure 5 A performance curve diagram of a high power capacity DMS filter according to an embodiment of the present invention and a DMS filter according to Comparative Example 1; Figure 6 A power density diagram of a DMS filter with high power capacity according to an embodiment of the present invention and a DMS filter according to Comparative Example 1; Figure 7 is a performance curve diagram of the DMS filter of Comparative Example 2 of the present invention; Figure 8 is a power density diagram of the DMS filter in Comparative Example 2 of the present invention; Fig. 9 A performance curve diagram of a DMS filter with high power capacity according to another embodiment of the present invention and a DMS filter according to Comparative Example 2; Fig.10 A power density diagram of a DMS filter with high power capacity according to another embodiment of the present invention and a DMS filter according to Comparative Example 2; Fig.11 The following are performance curves of a DMS filter with high power capacity according to another embodiment of the present invention and a DMS filter with high power capacity according to yet another embodiment of the present invention.

[0019] Icon: 010-high power capacity DMS filter; 100-piezoelectric substrate; 200-DMS dual-mode coupled filter; 211-first reflection grating; 212-second reflection grating; 220-first interdigital transducer; 230-second interdigital transducer; 240-third interdigital transducer; 251-first pseudo-finger electrode; 252-first interdigital electrode; 253-second interdigital electrode; 254-second pseudo-finger electrode; 255-first bus bar; 256-second bus bar; 261-first interdigital electrode group; 262-second interdigital electrode group; 263-third interdigital electrode group; 264-fourth interdigital electrode group; 265-fifth interdigital electrode group; a-first set axis; b-second set axis; A-active area. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0021] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0023] In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear to indicate an orientation or position relationship, they are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the product of the invention is usually placed when used. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0024] In addition, the terms “first”, “second”, etc., if used, are merely used to distinguish between the descriptions and should not be understood as indicating or implying relative importance.

[0025] It should be noted that, in the absence of conflict, the features in the embodiments of the present invention may be combined with each other.

[0026] The present invention provides a communication device, which may refer to a duplexer. Of course, in other embodiments, the communication device may also refer to other types of communication terminals, which are not specifically limited here.

[0027] The communication device includes a transmission filter and a reception filter, at least one of which is a DMS filter 010 with a high power capacity (eg, Figure 1 as shown).

[0028] Please refer to Figure 1 The high-power capacity DMS filter 010 includes a piezoelectric substrate 100 and two DMS dual-mode coupling filters 200, and the two DMS dual-mode coupling filters 200 are formed on the piezoelectric substrate 100; wherein the DMS dual-mode coupling filter 200 includes a first reflection grating 211, a second reflection grating 212 and a plurality of interdigital transducers, the plurality of interdigital transducers are distributed between the first reflection grating 211 and the second reflection grating 212, and the plurality of interdigital transducers are distributed in sequence along the direction of the first set axis a; the first reflection grating 211 of one DMS dual-mode coupling filter 200 is cascaded with the first reflection grating 211 of another DMS dual-mode coupling filter 200, the second reflection grating 212 of one DMS dual-mode coupling filter 200 is cascaded with the second reflection grating 212 of another DMS dual-mode coupling filter 200, and the plurality of interdigital transducers of one DMS dual-mode coupling filter 200 are cascaded one by one with the plurality of interdigital transducers of another DMS dual-mode coupling filter 200. With such an arrangement, the high performance of the DMS filter can be ensured by cascading two DMS dual-mode coupled filters 200 , while the density of the DMS filter can be reduced, its power capacity can be increased, and the heat dissipation area of ​​the DMS filter can be increased, thereby improving the heat dissipation efficiency.

[0029] It should be noted that the first reflection grating 211, the second reflection grating 212 and the interdigital transducer can be formed on the piezoelectric substrate 100 by methods such as photolithography; the preparation materials of the first reflection grating 211, the second reflection grating 212 and the interdigital transducer include but are not limited to at least one of Al, Au, Cu, Ti, Pt, and Cr.

[0030] It should be understood that in other embodiments, the number of DMS dual-mode coupled filters 200 of the high power capacity DMS filter 010 can also be three, four, etc., which is not specifically limited here. For the purpose of illustration, the implementation method in which the number of DMS dual-mode coupled filters 200 is three, the first reflection gratings 211 of the three DMS dual-mode coupled filters 200 are cascaded in sequence, the second reflection gratings 212 of the three DMS dual-mode coupled filters 200 are cascaded in sequence, and the interdigital transducers of the three DMS dual-mode coupled filters 200 are cascaded one by one.

[0031] Optionally, the interdigital transducers distributed at the head and tail ends along the first setting axis a in at least one DMS dual-mode coupled filter 200 are symmetrically distributed along the second setting axis b, wherein the first setting axis a and the second setting axis b are arranged at an angle.

[0032] For example, please refer to Figure 1 The multiple IDTs of any one of the DMS dual-mode coupled filters 200 of this embodiment include a first IDT 220, a second IDT 230 and a third IDT 240. The first IDT 220 and the third IDT 240 are symmetrically distributed along the second set axis b. The first IDT 220 of one DMS dual-mode coupled filter 200 is cascaded with the first IDT 220 of another DMS dual-mode coupled filter 200. The second interdigital transducer 230 of one DMS dual-mode coupling filter 200 is cascaded with the second interdigital transducer 230 of another DMS dual-mode coupling filter 200, and the third interdigital transducer 240 of one DMS dual-mode coupling filter 200 is cascaded with the third interdigital transducer 240 of another DMS dual-mode coupling filter 200, that is, the order of the DMS dual-mode coupling filter 200 of this embodiment is 3rd order; the first set axis a is perpendicular to the second set axis b.

[0033] The symmetrical distribution of the first IDT 220 and the third IDT 240 along the second set axis b may mean that the shapes and sizes of the first IDT 220 and the third IDT 240 are symmetrically distributed along the second set axis b.

[0034] Further, the first IDT 220 has a first end and a second end that are relatively distributed, the second end of one first IDT 220 is cascaded with the second end of another first IDT 220, the first end of one first IDT 220 is connected to the signal input (indicated by In in the figure), and the first end of the other first IDT 220 is grounded (indicated by G in the figure); the second IDT 230 has a third end and a fourth end that are relatively distributed, the fourth end of one second IDT 230 is connected to the first end of another second IDT 230 The four terminals are cascaded, the third terminal of a second interdigital transducer 230 is grounded (indicated by G in the figure), and the third terminal of another second interdigital transducer 230 is connected to the signal output (indicated by Out in the figure); the third interdigital transducer 240 includes a fifth terminal and a sixth terminal that are relatively distributed, the sixth terminal of a third interdigital transducer 240 is cascaded with the sixth terminal of another third interdigital transducer 240, the fifth terminal of a third interdigital transducer 240 is connected to the signal input (indicated by In in the figure), and the fifth terminal of another third interdigital transducer 240 is grounded (indicated by G in the figure).

[0035] Of course, in other embodiments, the angle between the first setting axis a and the second setting axis b can also be 88°, 90.5°, etc., which is not specifically limited here.

[0036] In other embodiments, the order of the DMS dual-mode coupling filter 200 can also be 5th order, 7th order, 9th order, etc., which is not specifically limited here. Taking the implementation method with the order of 5th order as an example, the multiple interdigital transducers of the DMS dual-mode coupling filter 200 include the first interdigital transducer 220, the second interdigital transducer 230, the third interdigital transducer 240, the fourth interdigital transducer and the fifth interdigital transducer. The first interdigital transducer 220 of one DMS dual-mode coupling filter 200 is cascaded with the first interdigital transducer 220 of another DMS dual-mode coupling filter 200, and the second interdigital transducer 230 of one DMS dual-mode coupling filter 200 is cascaded with the second interdigital transducer 230 of another DMS dual-mode coupling filter 200. The second interdigital transducer 230 of the coupling filter 200 is cascaded, the third interdigital transducer 240 of one DMS dual-mode coupling filter 200 is cascaded with the third interdigital transducer 240 of another DMS dual-mode coupling filter 200, the fourth interdigital transducer of one DMS dual-mode coupling filter 200 is cascaded with the fourth interdigital transducer of another DMS dual-mode coupling filter 200, and the fifth interdigital transducer of one DMS dual-mode coupling filter 200 is cascaded with the fifth interdigital transducer of another DMS dual-mode coupling filter 200.

[0037] Please refer to Figure 1 The structures of the first interdigital transducer 220, the second interdigital transducer 230 and the third interdigital transducer 240 are similar, any one of which includes a plurality of first pseudo-finger electrodes 251, a plurality of first interdigital electrodes 252, a plurality of second interdigital electrodes 253 and a plurality of second pseudo-finger electrodes 254, the plurality of first pseudo-finger electrodes 251 and the plurality of first interdigital electrodes 252 are alternately distributed in sequence along the direction of the first set axis a and are cascaded with each other; the plurality of second interdigital electrodes 253 and the plurality of second pseudo-finger electrodes 254 are alternately distributed in sequence along the direction of the first set axis a and are cascaded with each other; the first pseudo-finger electrodes 251, the first interdigital electrodes 252, the second interdigital electrodes 253 and the second pseudo-finger electrodes 254 all extend in the direction of the second set axis b, and the first pseudo-finger electrodes 251 and the second interdigital electrodes 253 are spaced and distributed one-to-one in the direction of the second set axis b, and the first interdigital electrodes 252 and the second pseudo-finger electrodes 254 are spaced and distributed one-to-one in the direction of the second set axis b.

[0038] Optionally, multiple first pseudo-finger electrodes 251 and multiple first interdigitated electrodes 252 are cascaded through a first bus bar 255, and multiple second interdigitated electrodes 253 and multiple second pseudo-finger electrodes 254 are cascaded through a second bus bar 256; the second bus bar 256 of the interdigitated transducer in one DMS dual-mode coupling filter 200 is connected to the second bus bar 256 of the interdigitated transducer of another DMS dual-mode coupling filter 200, so that the interdigitated transducer of one DMS dual-mode coupling filter 200 can be cascaded with the interdigitated transducer of another DMS dual-mode coupling filter 200, and the two DMS dual-mode coupling filters 200 are stacked and distributed along the first set axis a.

[0039] The width of each interdigital electrode in the first IDT 220 , the second IDT 230 , and the third IDT 240 can be set as required.

[0040] Please continue to refer to Figure 1 Optionally, the plurality of interdigital electrodes of the first interdigital transducer 220 can be divided into a first interdigital electrode group 261, a second interdigital electrode group 262 and a third interdigital electrode group 263 which are sequentially distributed along the direction of the first set axis a; wherein the first interdigital electrode group 261, the second interdigital electrode group 262 and the third interdigital electrode group 263 each include at least one first pseudo-finger electrode 251, at least one first interdigital electrode 252, at least one second interdigital electrode 253 and at least one second pseudo-finger electrode 254; the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the third interdigital electrode group 263 in the first interdigital electrode group 261 The width of at least one of the second pseudo-finger electrodes 254 is greater than the width of at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 in the second interdigitated electrode group 262; the width of at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 in the second interdigitated electrode group 262 is greater than the width of at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 in the third interdigitated electrode group 263.

[0041] Alternatively, in other embodiments, the width of at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 in the first interdigitated electrode group 261 is greater than the width of at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 in the second interdigitated electrode group 262; the width of at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 in the second interdigitated electrode group 262 is less than the width of at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 in the third interdigitated electrode group 263.

[0042] Alternatively, in other embodiments, the width of at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 in the first interdigitated electrode group 261 is smaller than the width of at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 in the second interdigitated electrode group 262; the width of at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 in the second interdigitated electrode group 262 is larger than the width of at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 in the third interdigitated electrode group 263.

[0043] Alternatively, in other embodiments, the widths of the first pseudo-finger electrode 251 , the first interdigital electrode 252 , the second interdigital electrode 253 , and the second pseudo-finger electrode 254 of at least one IDT are all equal.

[0044] Optionally, the plurality of interdigital electrodes of the second interdigital transducer 230 can be divided into a first interdigital electrode group 261, a second interdigital electrode group 262, a third interdigital electrode group 263, a fourth interdigital electrode group 264 and a fifth interdigital electrode group 265, which are sequentially distributed along the direction of the first set axis a; wherein the first interdigital electrode group 261, the second interdigital electrode group 262, the third interdigital electrode group 263, the fourth interdigital electrode group 264 and the fifth interdigital electrode group 265 each include at least one first pseudo-finger electrode 251, at least one first interdigital electrode The first interdigitated electrode group 261 includes at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254; the width of at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 in the first interdigitated electrode group 261 is smaller than the width of at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 in the second interdigitated electrode group 262; the first pseudo-finger electrode 25 1. The width of at least one of the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 is smaller than the width of at least one of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263; the width of at least one of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 is larger than the width of at least one of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the fourth interdigital electrode group 263. 4; the width of at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 in the fourth interdigitated electrode group 264 is greater than the width of at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 in the fifth interdigitated electrode group 265.

[0045] Optionally, the width W of at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 is 2.300~2.600μm, for example: 2.300μm, 2.350μm, 2.400μm, 2.450μm, 2.500μm, 2.550μm, 2.600μm, etc., which is not specifically limited here.

[0046] Optionally, the thickness of at least one of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 is 180~455nm, for example: 180nm, 200nm, 240nm, 280nm, 320nm, 355nm, 388nm, 412nm, 445nm, 448nm, 450nm, 453nm, 455nm, etc., which is not specifically limited here.

[0047] Please continue to refer to Figure 1 In this embodiment, the lengths of the first interdigitated electrode 252 and the second interdigitated electrode 253 along the direction of the second set axis b are both greater than the length of either the first fake finger electrode 251 or the second fake finger electrode 254 along the direction of the second set axis b; the overlapping area of ​​the first interdigitated electrode 252 and the second interdigitated electrode 253 is the active area A, also called the effective aperture area.

[0048] Optionally, the active areas A of at least two interdigital transducers have the same width along the direction of the second set axis b; the width of the active area A along the direction of the second set axis b is 50.0~190.0μm, for example: 50.0μm, 60.0μm, 70.4μm, 80.3μm, 90.0μm, 100.2μm, 121.0μm, 130.0μm, 142.0μm, 150.0μm, 160.0μm, 175.0μm, 188.0μm, 188.5μm, 189.0μm, 189.5μm, 190.0μm, etc., which is not specifically limited here.

[0049] Exemplarily, in one embodiment, the first interdigital transducer 220 of any DMS dual-mode coupled filter 200 includes 64 interdigital electrodes, wherein the number of first pseudo-finger electrodes 251, first interdigital electrodes 252, second interdigital electrodes 253 and second pseudo-finger electrodes 254 are all 16, and along the direction of the first set axis a, the number of first pseudo-finger electrodes 251 and second interdigital electrodes 253 distributed in pairs, and the number of first pseudo-finger electrodes 252 and second pseudo-finger electrodes 254 distributed in pairs are 32 pairs. The plurality of interdigitated electrodes are divided into a first interdigitated electrode group 261, a second interdigitated electrode group 262 and a third interdigitated electrode group 263. The first interdigitated electrode group 261 includes 11 first pseudo-finger electrodes 251 and 11 first interdigitated electrodes 252 (a total of 22), and also includes a corresponding number of second interdigitated electrodes 253 and second pseudo-finger electrodes 254; the second interdigitated electrode group 262 includes 4 first pseudo-finger electrodes 251 and 4 first interdigitated electrodes 252 (a total of 8), and also includes a corresponding number of second interdigitated electrodes 253 and second pseudo-finger electrodes 254; the third interdigitated electrode group 263 includes 1 first pseudo-finger electrode 251 and 1 first interdigitated electrode 252 (a total of 2), and also includes a corresponding number of second interdigitated electrodes 253 and second pseudo-finger electrodes 254. The widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the first interdigital transducer 220 are all 2.565 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 are all 2.482 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 are all 2.415 μm.

[0050] In this embodiment, the second interdigital transducer 230 of any DMS dual-mode coupled filter 200 includes 80 interdigital electrodes, wherein the number of first pseudo-finger electrodes 251, first interdigital electrodes 252, second interdigital electrodes 253 and second pseudo-finger electrodes 254 are all 20, and along the direction of the first set axis a, the number of first pseudo-finger electrodes 251 and second interdigital electrodes 253 distributed in pairs, and the number of first interdigital electrodes 252 and second pseudo-finger electrodes 254 distributed in pairs are 40 pairs. The plurality of interdigitated electrodes are divided into a first interdigitated electrode group 261, a second interdigitated electrode group 262, a third interdigitated electrode group 263, a fourth interdigitated electrode group 264 and a fifth interdigitated electrode group 265. The first interdigitated electrode group 261 includes one first pseudo-finger electrode 251 and one first interdigitated electrode 252 (a total of two), and also includes a corresponding number of second interdigitated electrodes 253 and second pseudo-finger electrodes 254; the second interdigitated electrode group 262 includes four first pseudo-finger electrodes 251 and four first interdigitated electrodes 252 (a total of eight), and also includes a corresponding number of second interdigitated electrodes 253 and second pseudo-finger electrodes 254; the third interdigitated electrode group 263 includes four first pseudo-finger electrodes 251 and four first interdigitated electrodes 252 (a total of eight), and also includes a corresponding number of second interdigitated electrodes 253 and second pseudo-finger electrodes 254; The electrode group 263 includes 10 first pseudo-finger electrodes 251 and 10 first interdigitated electrodes 252 (a total of 20), and also includes a corresponding number of second interdigitated electrodes 253 and second pseudo-finger electrodes 254; the fourth interdigitated electrode group 264 includes 4 first pseudo-finger electrodes 251 and 4 first interdigitated electrodes 252 (a total of 8), and also includes a corresponding number of second interdigitated electrodes 253 and second pseudo-finger electrodes 254; the fifth interdigitated electrode group 265 includes 1 first pseudo-finger electrode 251 and 1 first interdigitated electrode 252 (a total of 2), and also includes a corresponding number of second interdigitated electrodes 253 and second pseudo-finger electrodes 254. The widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the first interdigital transducer 220 are all 2.305 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 are all 2.433 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 are all 2.433 μm. The width of electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 are all 2.561 μm; the width of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 in the fourth interdigitated electrode group 264 are all 2.433 μm; the width of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 in the fifth interdigitated electrode group 265 are all 2.305 μm.

[0051] In this embodiment, the third interdigital transducer 240 of any DMS dual-mode coupled filter 200 includes 64 interdigital electrodes, wherein the number of first pseudo-finger electrodes 251, first interdigital electrodes 252, second interdigital electrodes 253 and second pseudo-finger electrodes 254 are all 16, and along the direction of the first set axis a, the number of first pseudo-finger electrodes 251 and second interdigital electrodes 253 distributed in pairs, and the number of first interdigital electrodes 252 and second pseudo-finger electrodes 254 distributed in pairs are 32 pairs. The plurality of interdigitated electrodes are divided into a first interdigitated electrode group 261, a second interdigitated electrode group 262 and a third interdigitated electrode group 263. The first interdigitated electrode group 261 includes one first pseudo-finger electrode 251 and one first interdigitated electrode 252 (a total of 2 electrodes), and also includes a corresponding number of second interdigitated electrodes 253 and second pseudo-finger electrodes 254; the second interdigitated electrode group 262 includes four first pseudo-finger electrodes 251 and four first interdigitated electrodes 252 (a total of 8 electrodes), and also includes a corresponding number of second interdigitated electrodes 253 and second pseudo-finger electrodes 254; the third interdigitated electrode group 263 includes 11 first pseudo-finger electrodes 251 and 11 first interdigitated electrodes 252 (a total of 22 electrodes), and also includes a corresponding number of second interdigitated electrodes 253 and second pseudo-finger electrodes 254. The widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the first interdigital transducer 220 are all 2.415 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 are all 2.482 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 are all 2.565 μm.

[0052] It should be noted that in order to simplify the drawings, Figure 1 The total number of interdigital electrodes is not shown. Figure 1 The number of interdigital electrodes of each interdigital transducer shown in the figure is less than the number described in the above embodiments.

[0053] Please refer to Figure 1 In this embodiment, the width of the active area A along the direction of the second set axis b is 189.6 μm; the materials of the first pseudo-finger electrode 251, the first interdigitated electrode 252, the second interdigitated electrode 253 and the second pseudo-finger electrode 254 are all Al, and the thickness is 450 nm.

[0054] The performance of the high power capacity DMS filter 010 of the above embodiment of the present invention and the DMS filter of comparative example 1 were tested by software (ADS, Advanced Design System) simulation. Figure 2~Figure 6 .in, Figure 2 The structure of the filter of Comparative Example 1 is shown, and the DMS filter of Comparative Example 1 includes a DMS dual-mode coupled filter 200, the number of interdigital transducers and the width and thickness of the corresponding interdigital electrodes of the DMS dual-mode coupled filter 200 are the same as those of the interdigital transducers in the high-power capacity DMS filter 010 of the above-mentioned embodiment.

[0055] according to Figure 2~Figure 6 It can be seen that the performance of the high power capacity DMS filter 010 of the above embodiment is not much different from that of the DMS filter of Comparative Example 1, and the power density of the above embodiment is lower than that of the DMS filter of Comparative Example 1.

[0056] Optionally, the structure and shape of the first reflection grating 211 and the second reflection grating 212 are similar to those in the related art, and the cascading method of the first reflection grating 211 of the two DMS dual-mode coupling filters 200 and the cascading method of the second reflection grating 212 of the two DMS dual-mode coupling filters 200 are similar to the cascading method of the interdigital transducers of the two DMS dual-mode coupling filters 200, and are not repeated here.

[0057] Exemplarily, in another embodiment, the high power capacity DMS filter 010 includes two DMS dual-mode coupled filters 200, and any one of the DMS dual-mode coupled filters 200 includes five interdigital transducers, and the number of interdigital electrodes of the five interdigital transducers from left to right is 98, 50, 38, 50, and 98, respectively; wherein the widths of the interdigital electrodes of each interdigital transducer of the two DMS dual-mode coupled filters 200 are different.

[0058] Specifically, the first interdigital transducer (i.e., the first interdigital transducer 220) from left to right in the first DMS dual-mode coupled filter 200 includes 25 first pseudo-finger electrodes 251, 25 second pseudo-finger electrodes 253, 24 second pseudo-finger electrodes 254 and 24 first interdigital electrodes 252. Along the direction of the first set axis a, the number of the first pseudo-finger electrodes 251 and the second interdigital electrodes 253 distributed in pairs is 25 pairs, and the number of the first interdigital electrodes 252 and the second pseudo-finger electrodes 254 distributed in pairs is 24 pairs. The multiple interdigital electrodes of the first interdigital transducer 220 are divided into a first interdigital electrode group 261, a second interdigital electrode group 262 and a third interdigital electrode group 263. The first interdigital electrode group 261 includes 15 first pseudo-finger electrodes 251 and 14 first interdigital electrodes 252 (a total of 29), and also includes a corresponding number of second interdigital electrodes 253 and second pseudo-finger electrodes 254; the second interdigital electrode group 262 includes 9 first pseudo-finger electrodes 251 and 8 first interdigital electrodes 252 (a total of 17), and also includes a corresponding number of second interdigital electrodes 253 and second pseudo-finger electrodes 254; the third interdigital electrode group 263 includes 2 first pseudo-finger electrodes 251 and 1 first interdigital electrode 252 (a total of 3), and also includes a corresponding number of second interdigital electrodes 253 and second pseudo-finger electrodes 254. The widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the first interdigital transducer 220 are all 0.569 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 are all 0.558 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 are all 0.505 μm.

[0059] The second interdigital transducer (i.e., the second interdigital transducer 230) from left to right in the first DMS dual-mode coupled filter 200 includes 13 first pseudo-finger electrodes 251, 13 second pseudo-finger electrodes 253, 12 second pseudo-finger electrodes 254 and 12 first interdigital electrodes 252. Along the direction of the first set axis a, the number of the first pseudo-finger electrodes 251 and the second interdigital electrodes 253 distributed in pairs is 13 pairs, and the number of the first pseudo-finger electrodes 252 and the second pseudo-finger electrodes 254 distributed in pairs is 12 pairs. The multiple interdigital electrodes of the second interdigital transducer 230 are divided into a first interdigital electrode group 261, a second interdigital electrode group 262 and a third interdigital electrode group 263. The first interdigital electrode group 261 includes 3 first pseudo-finger electrodes 251 and 2 first interdigital electrodes 252 (a total of 5), and also includes a corresponding number of second interdigital electrodes 253 and second pseudo-finger electrodes 254; the second interdigital electrode group 262 includes 8 first pseudo-finger electrodes 251 and 7 first interdigital electrodes 252 (a total of 15), and also includes a corresponding number of second interdigital electrodes 253 and second pseudo-finger electrodes 254; the third interdigital electrode group 263 includes 3 first pseudo-finger electrodes 251 and 2 first interdigital electrodes 252 (a total of 5), and also includes a corresponding number of second interdigital electrodes 253 and second pseudo-finger electrodes 254. The widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the second interdigital transducer 230 are all 0.560 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 are all 0.552 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 are all 0.569 μm.

[0060] The third interdigital transducer (i.e., the third interdigital transducer 240) from left to right in the first DMS dual-mode coupled filter 200 includes 10 first pseudo-finger electrodes 251, 10 second pseudo-finger electrodes 253, 9 second pseudo-finger electrodes 254 and 9 first interdigital electrodes 252. Along the direction of the first set axis a, the number of the first pseudo-finger electrodes 251 and the second interdigital electrodes 253 distributed in pairs is 10 pairs, and the number of the first pseudo-finger electrodes 252 and the second pseudo-finger electrodes 254 distributed in pairs is 9 pairs. The multiple interdigital electrodes of the third interdigital transducer 240 are divided into a first interdigital electrode group 261, a second interdigital electrode group 262 and a third interdigital electrode group 263. The first interdigital electrode group 261 includes 2 first pseudo-finger electrodes 251 and 1 first interdigital electrode 252 (3 in total), and also includes a corresponding number of second interdigital electrodes 253 and second pseudo-finger electrodes 254; the second interdigital electrode group 262 includes 7 first pseudo-finger electrodes 251 and 6 first interdigital electrodes 252 (13 in total), and also includes a corresponding number of second interdigital electrodes 253 and second pseudo-finger electrodes 254; the third interdigital electrode group 263 includes 2 first pseudo-finger electrodes 251 and 1 first interdigital electrode 252 (3 in total), and also includes a corresponding number of second interdigital electrodes 253 and second pseudo-finger electrodes 254. The widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the third interdigital transducer 240 are all 0.513 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 are all 0.557 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 are all 0.513 μm.

[0061] The fourth interdigital transducer (i.e., the fourth interdigital transducer) from left to right in the first DMS dual-mode coupled filter 200 includes 13 first pseudo-finger electrodes 251, 13 second pseudo-finger electrodes 253, 12 second pseudo-finger electrodes 254 and 12 first interdigital electrodes 252. Along the direction of the first set axis a, the number of the first pseudo-finger electrodes 251 and the second interdigital electrodes 253 distributed in pairs is 13 pairs, and the number of the first pseudo-finger electrodes 252 and the second pseudo-finger electrodes 254 distributed in pairs is 12 pairs. The multiple interdigital electrodes of the fourth interdigital transducer are divided into a first interdigital electrode group 261, a second interdigital electrode group 262 and a third interdigital electrode group 263. The first interdigital electrode group 261 includes 3 first pseudo-finger electrodes 251 and 2 first interdigital electrodes 252 (a total of 5), and also includes a corresponding number of second interdigital electrodes 253 and second pseudo-finger electrodes 254; the second interdigital electrode group 262 includes 8 first pseudo-finger electrodes 251 and 7 first interdigital electrodes 252 (a total of 15), and also includes a corresponding number of second interdigital electrodes 253 and second pseudo-finger electrodes 254; the third interdigital electrode group 263 includes 3 first pseudo-finger electrodes 251 and 2 first interdigital electrodes 252 (a total of 5), and also includes a corresponding number of second interdigital electrodes 253 and second pseudo-finger electrodes 254. The widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the fourth interdigital transducer are all 0.569 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 are all 0.552 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 are all 0.560 μm.

[0062] The fifth interdigital transducer (i.e., the fifth interdigital transducer) from left to right in the first DMS dual-mode coupled filter 200 includes 25 first pseudo-finger electrodes 251, 25 second pseudo-finger electrodes 253, 24 second pseudo-finger electrodes 254, and 24 first interdigital electrodes 252. Along the direction of the first set axis a, the number of the first pseudo-finger electrodes 251 and the second interdigital electrodes 253 distributed in pairs is 25 pairs, and the number of the first interdigital electrodes 252 and the second pseudo-finger electrodes 254 distributed in pairs is 24 pairs. The multiple interdigital electrodes of the fifth interdigital transducer are divided into a first interdigital electrode group 261, a second interdigital electrode group 262 and a third interdigital electrode group 263. The first interdigital electrode group 261 includes 2 first pseudo-finger electrodes 251 and 1 first interdigital electrode 252 (3 in total), and also includes a corresponding number of second interdigital electrodes 253 and second pseudo-finger electrodes 254; the second interdigital electrode group 262 includes 9 first pseudo-finger electrodes 251 and 8 first interdigital electrodes 252 (17 in total), and also includes a corresponding number of second interdigital electrodes 253 and second pseudo-finger electrodes 254; the third interdigital electrode group 263 includes 15 first pseudo-finger electrodes 251 and 14 first interdigital electrodes 252 (29 in total), and also includes a corresponding number of second interdigital electrodes 253 and second pseudo-finger electrodes 254. The widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the fifth interdigital transducer are all 0.505 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 are all 0.558 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 are all 0.569 μm.

[0063] In the first DMS dual-mode coupling filter 200, the width of the active region A along the direction of the second set axis b is 77.124 μm.

[0064] In this embodiment, the structure of each IDT in the second DMS dual-mode coupling filter 200 is similar to the structure of each IDT in the first DMS dual-mode coupling filter 200, and only the differences are described below.

[0065] The widths of the first pseudo-finger electrode 251, the first pseudo-finger electrode 252, the second pseudo-finger electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the first interdigital transducer 220 in the second DMS dual-mode coupled filter 200 are all 0.572 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 are all 0.558 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 are all 0.503 μm.

[0066] The widths of the first pseudo-finger electrode 251, the first pseudo-finger electrode 252, the second pseudo-finger electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the second interdigital transducer 230 in the second DMS dual-mode coupled filter 200 are all 0.556 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 are all 0.555 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 are all 0.568 μm.

[0067] The widths of the first pseudo-finger electrode 251, the first pseudo-finger electrode 252, the second pseudo-finger electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the third interdigital transducer 240 in the second DMS dual-mode coupled filter 200 are all 0.496 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 are all 0.557 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 are all 0.496 μm.

[0068] The widths of the first pseudo-finger electrode 251, the first pseudo-finger electrode 252, the second pseudo-finger electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the fourth interdigital transducer in the second DMS dual-mode coupled filter 200 are all 0.568 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 are all 0.555 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 are all 0.556 μm.

[0069] The widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the fifth interdigital transducer in the second DMS dual-mode coupled filter 200 are all 0.503 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 are all 0.558 μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 are all 0.572 μm.

[0070] In the second DMS dual-mode coupling filter 200, the width of the active region A along the direction of the second set axis b is 77.0753 μm.

[0071] Comparative Example 2 The high power capacity DMS filter 010 of comparative example 2 includes only one DMS dual-mode coupled filter 200, and its structure is similar to the structure of the first DMS dual-mode coupled filter 200 in the high power capacity DMS filter 010 of another embodiment described above, except that the electrode width of each interdigital transducer and the width of the active area along the direction of the second set axis b; wherein the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the first interdigital transducer 220 are all 0.568 μm; the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 are all 0.568 μm; The width of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 is 0.567 μm; the width of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 is 0.489 μm; the width of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the second interdigital transducer 230 is 0.558 μm; the width of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 is 0.555μm; the width of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 is 0.596μm; the width of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the third interdigital transducer 240 is 0.487μm; the width of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 is 0.558μm; the width of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 is 0.596μm; the width of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the third interdigital transducer 240 is 0.487μm The width of the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 are all 0.487 μm; the width of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the fourth interdigital transducer are all 0.596 μm; the width of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 are all 0.555 μm; the width of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 are all 0.558μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the first interdigital electrode group 261 of the fifth interdigital transducer are all 0.489μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the second interdigital electrode group 262 are all 0.567μm; the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 in the third interdigital electrode group 263 are all 0.568μm.

[0072] In the second DMS dual-mode coupling filter 200, the width of the active region A along the direction of the second set axis b is 59.6924 μm.

[0073] The performance of the DMS filter 010 with high power capacity in another embodiment of the present invention and the DMS filter in comparative example 2 were tested by software (ADS, Advanced Design System) simulation. Figure 7~Figure 10 .

[0074] according to Figure 7~Figure 10 It can be seen that the performance of the high power capacity DMS filter 010 of the above another embodiment is not much different from the performance of the DMS filter of Comparative Example 2, and the power density of the above embodiment is lower than the power density of the DMS filter of Comparative Example 2.

[0075] Exemplarily, in another embodiment, the high power capacity DMS filter 010 includes two DMS dual-mode coupled filters 200, and any one of the DMS dual-mode coupled filters 200 includes five interdigital transducers, and the numbers of interdigital electrodes of the five interdigital transducers from left to right are 98, 50, 38, 50, and 98, respectively; wherein, the widths of the interdigital electrodes of each interdigital transducer of the two DMS dual-mode coupled filters 200 are different, and the structure of the interdigital transducer of the DMS dual-mode coupled filter 200 of this embodiment is similar to the structure in the above-mentioned other embodiment, with only a difference in size, which will be introduced below.

[0076] In the first DMS dual-mode coupled filter 200, the width of all the first pseudo-finger electrodes 251, the first interdigital electrodes 252, the second interdigital electrodes 253 and the second pseudo-finger electrodes 254 of the first interdigital transducer 220 is 0.558 μm; the width of all the first pseudo-finger electrodes 251, the first interdigital electrodes 252, the second interdigital electrodes 253 and the second pseudo-finger electrodes 254 of the second interdigital transducer 230 is 0.552 μm; the width of all the first pseudo-finger electrodes 251, the first interdigital electrodes 252, the second interdigital electrodes 253 and the second pseudo-finger electrodes 254 of the third interdigital transducer 240 is 0.550 μm. The width of the binary finger electrode 253 and the second pseudo-finger electrode 254 is 0.557 μm; the width of all the first pseudo-finger electrodes 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 of the fourth interdigital transducer is 0.552 μm; the width of all the first pseudo-finger electrodes 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 of the fifth interdigital transducer is 0.568 μm; the width of the active area A along the direction of the second set axis b is 77.124 μm.

[0077] In the second DMS dual-mode coupled filter 200, the width of all the first pseudo-finger electrodes 251, the first interdigital electrodes 252, the second interdigital electrodes 253 and the second pseudo-finger electrodes 254 of the first interdigital transducer 220 is 0.558 μm; the width of all the first pseudo-finger electrodes 251, the first interdigital electrodes 252, the second interdigital electrodes 253 and the second pseudo-finger electrodes 254 of the second interdigital transducer 230 is 0.555 μm; the width of all the first pseudo-finger electrodes 251, the first interdigital electrodes 252, the second interdigital electrodes 253 and the second pseudo-finger electrodes 254 of the third interdigital transducer 240 is 0.556 μm. The width of the binary finger electrode 253 and the second pseudo-finger electrode 254 is 0.557 μm; the width of all the first pseudo-finger electrodes 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 of the fourth interdigital transducer is 0.555 μm; the width of all the first pseudo-finger electrodes 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 of the fifth interdigital transducer is 0.568 μm; the width of the active area A along the direction of the second set axis b is 77.0753 μm.

[0078] The performance of the DMS filter 010 with high power capacity in the above-mentioned embodiment and the DMS filter 010 with high power capacity in the above-mentioned another embodiment of the present invention is tested by software (ADS, Advanced Design System) simulation, and the test results are as follows: Fig.11 .

[0079] according to Fig.11It can be seen that optimizing the width of each interdigital electrode of the IDT so that the widths of the first pseudo-finger electrode 251, the first interdigital electrode 252, the second interdigital electrode 253 and the second pseudo-finger electrode 254 of each IDT are not completely the same can improve the insertion loss.

[0080] In summary, the high power capacity DMS filter 010 of the present invention can be used in various communication devices, has good performance, and can reduce power density and improve power capacity. At the same time, the high power capacity DMS filter 010 can also increase the heat dissipation area and improve stability.

[0081] The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by a technician familiar with the technical field within the technical scope disclosed by the present invention should be covered within the protection scope of the present invention.

Claims

1. A DMS filter with high power capacity, characterized in that: include: A piezoelectric substrate (100); At least two DMS dual-mode coupling filters (200), wherein at least two of the DMS dual-mode coupling filters (200) are formed on the piezoelectric substrate (100); wherein: The DMS dual-mode coupling filter (200) comprises a first reflection grating (211), a second reflection grating (212) and a plurality of interdigital transducers, wherein the plurality of interdigital transducers are distributed between the first reflection grating (211) and the second reflection grating (212), and the plurality of interdigital transducers are distributed in sequence and at intervals along the direction of a first set axis (a); The first reflection grating (211) of one DMS dual-mode coupling filter (200) is cascaded with the first reflection grating (211) of another DMS dual-mode coupling filter (200), the second reflection grating (212) of one DMS dual-mode coupling filter (200) is cascaded with the second reflection grating (212) of another DMS dual-mode coupling filter (200), and the plurality of interdigital transducers of one DMS dual-mode coupling filter (200) are cascaded in a one-to-one correspondence with the plurality of interdigital transducers of another DMS dual-mode coupling filter (200).

2. The high power capacity DMS filter according to claim 1, characterized in that: The interdigital transducers distributed at the head and tail ends along the first setting axis (a) in at least one of the DMS dual-mode coupling filters (200) are symmetrically distributed along the second setting axis (b), and the first setting axis (a) and the second setting axis (b) are arranged at an angle.

3. The high power capacity DMS filter according to claim 2, characterized in that: The plurality of interdigital transducers in at least one of the DMS dual-mode coupled filters (200) include a first interdigital transducer (220), a second interdigital transducer (230) and a third interdigital transducer (240), wherein the first interdigital transducer (220) and the third interdigital transducer (240) are symmetrically distributed along the second set axis (b), and the first set axis (a) is perpendicular to the second set axis (b).

4. The high power capacity DMS filter according to claim 1, characterized in that: At least one of the interdigital transducers comprises a plurality of first pseudo-finger electrodes (251), a plurality of first interdigital electrodes (252), a plurality of second interdigital electrodes (253) and a plurality of second pseudo-finger electrodes (254); the plurality of first pseudo-finger electrodes (251) and the plurality of first interdigital electrodes (252) are alternately distributed in sequence along the direction of the first set axis (a) and are cascaded with each other; the plurality of second interdigital electrodes (253) and the plurality of second pseudo-finger electrodes (254) are alternately distributed in sequence along the direction of the first set axis (a) and are cascaded with each other; the first pseudo-finger electrodes ( 251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second dummy electrode (254) all extend in the direction of a second set axis (b), and the first dummy electrode (251) and the second interdigitated electrode (253) are spaced and distributed in a one-to-one correspondence along the direction of the second set axis (b), and the first interdigitated electrode (252) and the second dummy electrode (254) are spaced and distributed in a one-to-one correspondence along the direction of the second set axis (b); the first set axis (a) and the second set axis (b) are arranged at an angle.

5. The high power capacity DMS filter according to claim 4, characterized in that: At least one of the interdigital transducers comprises a first interdigital electrode group (261), a second interdigital electrode group (262) and a third interdigital electrode group (263) distributed along the first set axis (a); wherein, The first interdigitated electrode group (261), the second interdigitated electrode group (262) and the third interdigitated electrode group (263) each comprise at least one of the first dummy electrodes (251), at least one of the first interdigitated electrodes (252), at least one of the second interdigitated electrodes (253) and at least one of the second dummy electrodes (254); The width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the first interdigitated electrode group (261) is greater than the width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the second interdigitated electrode group (262); the width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the second interdigitated electrode group (262) is greater than the width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the third interdigitated electrode group (263); or, The width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the first interdigitated electrode group (261) is greater than the width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the second interdigitated electrode group (262); the width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the second interdigitated electrode group (262) is less than the width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the third interdigitated electrode group (263); or, The width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the first interdigitated electrode group (261) is smaller than the width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the second interdigitated electrode group (262); the width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the second interdigitated electrode group (262) is larger than the width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the third interdigitated electrode group (263); or, The widths of the first pseudo-finger electrode (251), the first interdigital electrode (252), the second interdigital electrode (253) and the second pseudo-finger electrode (254) of at least one of the interdigital transducers are all equal.

6. The high power capacity DMS filter according to claim 4, characterized in that: At least one of the interdigital transducers comprises a first interdigital electrode group (261), a second interdigital electrode group (262), a third interdigital electrode group (263), a fourth interdigital electrode group (264) and a fifth interdigital electrode group (265) distributed along the first set axis (a); wherein, The first interdigitated electrode group (261), the second interdigitated electrode group (262), the third interdigitated electrode group (263), the fourth interdigitated electrode group (264) and the fifth interdigitated electrode group (265) each include at least one of the first pseudo-finger electrodes (251), at least one of the first interdigitated electrodes (252), at least one of the second interdigitated electrodes (253) and at least one of the second pseudo-finger electrodes (254); The width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the first interdigitated electrode group (261) is smaller than the width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the second interdigitated electrode group (262); The width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the second interdigitated electrode group (262) is smaller than the width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the third interdigitated electrode group (263); The width of at least one of the first pseudo-finger electrode (251), the first pseudo-finger electrode (252), the second pseudo-finger electrode (253) and the second pseudo-finger electrode (254) in the third pseudo-finger electrode group (263) is greater than the width of at least one of the first pseudo-finger electrode (251), the first pseudo-finger electrode (252), the second pseudo-finger electrode (253) and the second pseudo-finger electrode (254) in the fourth pseudo-finger electrode group (264); The width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the fourth interdigitated electrode group (264) is greater than the width of at least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) in the fifth interdigitated electrode group (265).

7. The high power capacity DMS filter according to claim 4, characterized in that: The width of at least one of the first dummy electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second dummy electrode (254) is 2.300-2.600 μm; At least one of the first pseudo-finger electrode (251), the first interdigitated electrode (252), the second interdigitated electrode (253) and the second pseudo-finger electrode (254) has a thickness of 180-455 nm.

8. The high power capacity DMS filter according to claim 4, characterized in that: The lengths of the first interdigitated electrode (252) and the second interdigitated electrode (253) along the direction of the second set axis (b) are both greater than the length of any one of the first dummy electrode (251) and the second dummy electrode (254) along the direction of the second set axis (b); The overlapping area of ​​the first interdigitated electrode (252) and the second interdigitated electrode (253) is an active area (A).

9. The high power handling DMS filter according to claim 8, characterized in that: The active areas (A) of at least two of the IDTs have the same width along the direction of the second set axis (b); the width of the active area (A) along the direction of the second set axis (b) is 50.0-190.0 μm.

10. A communication device, characterized in that: A DMS filter with high power capacity comprising the method described in any one of claims 1 to 9.

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