A handling robot

Abstract

The present invention discloses a handling robot, comprising: a support part, the support part is used to carry a workpiece; a linear drive mechanism, the linear drive mechanism is connected to the support part, and the linear drive mechanism can drive the support part to move linearly; a tilt monitoring mechanism, the tilt monitoring mechanism is connected to the support part; the tilt monitoring mechanism includes a transmitting sensor and a receiving sensor, the receiving sensor is fixedly connected to the lower surface of the support part, the transmitting sensor is movably connected to the lower surface of the support part, the transmitting sensor can always be in a vertical state, the emitted detection signal is always in a horizontal direction, and the receiving sensor can receive the signal sent by the transmitting sensor. Through the setting of the tilt monitoring mechanism, it is possible to monitor in real time whether the support part is in a horizontal state or a tilted state, so as to avoid collision of wafer boxes due to tilting of the handling robot.

Description

Technical Field

[0001] The present invention relates to the technical field of transport systems, and in particular to a transport robot. Background Art

[0002] During the manufacturing process of semiconductor wafers, the cleanliness requirements of the wafers are very high. The processing and handling of the wafers are all completed in high-cleanliness equipment. In order to prevent the wafers from being oxidized, damp or contaminated during transportation or storage, front-opening wafer transfer boxes (FOUPs) are used to transport or store wafers. The wafers are placed in wafer boxes (FOUPs), and the wafer boxes are usually stored on storage racks.

[0003] As attached Figure 1 As shown in the figure, there are multiple layers of wafer boxes on both sides of the storage rack, and the robot is installed on the travel mechanism in the middle of the rack. The robot can move along the height and length of the storage rack to pick up and place the wafer boxes. The robot is one of the most important operating tools for picking up and placing wafer boxes on the storage rack. The efficiency and accuracy of the robot in picking up and placing wafer boxes determine the processing efficiency of wafers during wafer manufacturing and the breakage rate of wafers during wafer transportation.

[0004] When the robot is taking and placing the wafer box, since the wafer box is very heavy, it is possible that each section of the robot will tilt downward, accumulating on the support part, causing the support part for transporting the wafer box to tilt, which may cause the wafer box to collide. Summary of the invention

[0005] In order to overcome the above-mentioned shortcomings, an object of the present invention is to provide a transport robot that can monitor the horizontal state of a support portion in real time to prevent a wafer box from colliding due to a tilt of the support portion.

[0006] In order to achieve the above purpose, the technical solution adopted by the present invention is:

[0007] A handling robot, comprising:

[0008] A support part, the support part is used to carry a workpiece, and this application takes a wafer box as an example of a workpiece;

[0009] A linear drive mechanism, the linear drive mechanism is connected to the support portion, and the linear drive mechanism can drive the support portion to move linearly;

[0010] A tilt monitoring mechanism, wherein the tilt monitoring mechanism is connected to the support portion;

[0011] The tilt monitoring mechanism includes a transmitting sensor and a receiving sensor. The receiving sensor is fixedly connected to the lower surface of the support part, and the transmitting sensor is movably connected to the lower surface of the support part. The transmitting sensor can always be in a vertical state, and the emitted detection signal is always in a horizontal direction. The receiving sensor can receive the signal emitted by the transmitting sensor.

[0012] The linear drive mechanism is set up to make the support part move linearly and accurately grasp the wafer box. The tilt monitoring mechanism is set up to monitor in real time whether the support part is in a horizontal state or a tilted state, avoiding collision of the wafer box due to tilt of the handling robot.

[0013] The transmitting sensor is movably connected to the lower surface of the support part. The transmitting sensor can always be in a vertical state. Whether the support part is tilted can be determined by whether the receiving sensor can receive the signal from the transmitting sensor. The tilt state of the support part can be monitored in real time, and the monitoring effect is better.

[0014] Furthermore, the receiving sensors are arranged in a plurality and arranged in sequence below the support portion, and the plurality of receiving sensors are arranged in a straight line, and the straight line and the lower surface of the support portion are arranged perpendicularly. By arranging the plurality of receiving sensors in sequence in the vertical direction, it is possible to accurately determine in real time whether the support portion is tilted, and if so, the specific tilt angle.

[0015] Furthermore, the receiving sensor is arranged on a connecting piece connecting the supporting part and the linear driving mechanism, and the transmitting sensor is arranged at an end of the supporting part away from the connecting piece.

[0016] Furthermore, the transmitting sensor and the lower surface of the supporting portion are rotationally connected or hinged.

[0017] Furthermore, the linear drive mechanism includes a first arm, a second arm and a third arm connected in sequence, the first arm is connected to the rotational drive mechanism, the third arm is connected to the support part, and the first arm, the second arm and the third arm interact with each other to drive the support part to move linearly.

[0018] Further, the second arm includes a second arm housing, and a second toothed belt pulley assembly, a second harmonic reducer and a reducer fixing housing arranged in the second arm housing;

[0019] The second harmonic reducer is fixedly connected to the second arm housing, and the second harmonic reducer is fixedly connected to the driving assembly, and the driving assembly can drive the second arm housing to rotate through the second harmonic reducer;

[0020] The reducer fixed housing is fixedly connected to the first arm housing, and the reducer fixed housing is fixedly connected to the second toothed belt wheel assembly;

[0021] The second toothed pulley assembly and the second arm housing are capable of relative rotation.

[0022] Furthermore, the driving assembly includes a second motor fixedly connected to the first arm housing, and a first toothed belt pulley assembly located inside the first arm housing, the second motor and the first toothed belt pulley assembly are fixedly connected, and the first toothed belt pulley assembly drives the second harmonic reducer to rotate through a first shaft.

[0023] Further, the third arm includes a third arm housing, and a third toothed belt pulley assembly arranged inside the third arm housing, the second shaft is fixedly connected to the second arm housing, and the second shaft is connected to the second driven wheel of the second toothed belt pulley assembly through a bearing, so that the second shaft and the second driven wheel generate relative rotation;

[0024] The second driven wheel is fixedly connected to the third arm housing, one end of the second shaft passes through the second arm housing and extends into the third arm housing, and is fixedly connected to the third driving wheel, the third shaft is fixedly connected to the third arm housing, the third driven wheel rotates relative to the third shaft, the third driven wheel is fixedly connected to the support part, and the support part and the third shaft rotate relative to each other.

[0025] Further, the diameter of the second driving wheel is equal to the diameter of the third driven wheel, and the diameter of the second driven wheel is equal to the diameter of the third driving wheel.

[0026] Further, the rotary drive mechanism comprises a first motor and a rotary shaft, the first motor is connected to the rotary shaft through a toothed belt wheel transmission assembly, and the first motor can drive the rotary shaft to rotate;

[0027] The rotating shaft is connected to the input end of the first harmonic reducer, the output end of the first harmonic reducer is connected to the rotating member, the rotating shaft can drive the rotating member to rotate, and the rotating member is fixedly connected to the linear drive mechanism.

[0028] The beneficial effects of the present invention are:

[0029] 1) By setting up the tilt monitoring mechanism, it is possible to monitor in real time whether the support part is in a horizontal state or a tilted state, thereby avoiding collision of the wafer box due to tilt of the handling robot.

[0030] 2) By movably connecting the transmitting sensor and the lower surface of the support part, the transmitting sensor can be always set in a vertical state, and can determine whether the support part is tilted according to whether the receiving sensor can receive the signal of the transmitting sensor, thereby monitoring the tilt state of the support part in real time, and achieving better monitoring effect.

[0031] 3) By arranging a plurality of receiving sensors in sequence in the vertical direction, it is possible to accurately determine in real time whether the support portion is tilted, and if tilted, the specific tilt angle can be determined in real time.

[0032] 4) Through the setting of the linear drive mechanism, the support part moves linearly to accurately grasp the wafer box. In the linear drive mechanism, the diameter D2 of the second driving wheel is equal to the diameter d3 of the third driven wheel, and the diameter d2 of the second driven wheel is equal to the diameter D3 of the third driving wheel, ensuring that the transmission ratio of the second driving wheel and the third driven wheel is 1:1, so that the clamping plate always moves linearly in one direction.

[0033] 5) The rotary drive mechanism drives the support part to rotate around the rotary drive mechanism as the center, changing the position of the support part relative to the wafer box; the linear drive mechanism can drive the support part to move linearly, changing the distance between the support part and the wafer box, and transporting the wafer box; the tilt monitoring mechanism monitors the horizontal rotation of the support part in real time. Therefore, the position of the support part is driven by the rotary drive mechanism, the linear drive mechanism and the tilt monitoring mechanism, and the horizontal state is monitored in real time, which improves the accuracy of the handling robot in picking up and placing the wafer box, improves the processing efficiency of the wafer in the wafer manufacturing process, and reduces the breakage rate of the wafer during the wafer transportation process. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The drawings constituting a part of this application are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0035] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0036] Figure 1 This is a schematic diagram of a robot carrying a wafer box according to an embodiment of the present invention;

[0037] Figure 2 A three-dimensional diagram of a manipulator according to an embodiment of the present invention;

[0038] Figure 3A cross-sectional view of a manipulator according to an embodiment of the present invention;

[0039] Figure 4 for Figure 3 A magnified image of point A;

[0040] Figure 5 for Figure 3 A magnified view of point B;

[0041] Figure 6 This is a schematic diagram of a horizontal state of a support portion according to an embodiment of the present invention;

[0042] Figure 7 This is a schematic diagram of a tilted state of a support portion according to an embodiment of the present invention;

[0043] Figure 8 A schematic diagram of a support portion in an inclined state according to another embodiment of the present invention;

[0044] Fig. 9 A schematic diagram of the connection between a support part and a transmitting sensor according to an embodiment of the present invention;

[0045] Fig.10 FIG. 4 is a three-dimensional diagram of a support portion according to an embodiment of the present invention.

[0046] In the figure:

[0047] 1. Mounting seat;

[0048] 2. Rotation drive mechanism; 21. First motor; 22. Toothed belt drive assembly; 23. Rotation shaft; 24. First harmonic reducer; 25. Rotation member;

[0049] 3. First arm; 31. First arm housing; 32. Second motor; 33. First driving wheel; 34. First driven wheel; 35. First shaft;

[0050] 4. Second arm; 41. Second arm housing; 42. Second harmonic reducer; 43. Connecting plate; 44. Connecting column; 45. Reducer fixing housing; 46. Second driving wheel; 47. Second driven wheel; 48. Second shaft;

[0051] 5. third arm; 51. third arm housing; 52. third driving wheel; 53. third driven wheel; 531. connecting member; 54. third shaft;

[0052] 6. Support part; 61. Clamping plate; 62. Limiting column; 63. Position detection column; 64. Position sensor;

[0053] 7. Wafer box;

[0054] 8. Tilt monitoring mechanism; 81. Transmitting sensor; 82. Receiving sensor; 821. First receiving sensor; 822. Second receiving sensor; 823. Third receiving sensor; 83. Spherical shell; 84. Rolling ball; 85. Connecting rod;

[0055] 9. Travel track; 91. Storage rack. DETAILED DESCRIPTION

[0056] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0057] In addition, the term "and / or" in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article, unless otherwise specified, generally means that the associated objects before and after are in an "or" relationship.

[0058] See attached Figure 1 and attached Figure 2 As shown, a handling robot in this embodiment is used to handle a wafer box 7, and includes a mounting seat 1, a rotating drive mechanism 2, a linear drive mechanism, and a support portion 6 connected in sequence. The mounting seat 1 is connected to the walking mechanism of the storage system, and the walking mechanism drives the mounting seat 1 and the robot to move synchronously along the travel track 9 in the length direction of the storage rack 91. The mounting seat 1 can also drive the robot to move up and down along the height direction of the walking mechanism. The rotating drive mechanism 2 drives the support portion 6 to rotate around the rotating drive mechanism 2 as the center, and changes the orientation of the support portion 6 relative to the wafer box 7. The linear drive mechanism can drive the support portion 6 to move linearly, change the distance between the support portion 6 and the wafer box 7, and carry the wafer box 7.

[0059] See attached Figure 3 and attached Figure 5As shown, in some embodiments, the support part 6 is used to clamp the wafer box 7. In the process of clamping and transporting the wafer box 7, the support part 6 is ideally in a horizontal state. However, since the wafer box 7 is very heavy, it is possible that each section of the manipulator tilts downward, accumulating to the support part 6, causing the support part 6 to tilt; or the support part 6 itself tilts due to the gravity of the wafer box 7, which may cause the wafer box 7 to collide. The present application is provided with a tilt monitoring mechanism 8 below the support part 6. The tilt monitoring mechanism 8 includes a transmitting sensor 81 and a receiving sensor 82 provided below the support part 6. Whether the supporting part 6 is in a horizontal state is determined by whether the receiving sensor 82 can receive the signal sent by the transmitting sensor 81.

[0060] Specifically, the transmitting sensor 81 is movably connected to the lower surface of the support portion 6, and the transmitting sensor 81 can be in a vertical state in real time. A receiving sensor 82 is arranged below the support portion 6, and the receiving sensor 82 is arranged vertically to the lower surface of the support portion 6. Figure 6 As shown, since the transmitting sensor 81 is in a vertical state, the signal emitted by the transmitting sensor 81 is always in the horizontal direction. When the support portion 6 is in a horizontal state, the transmitting sensor 81 and the support portion 6 are vertically arranged, and the signal emitted by the transmitting sensor 81 is parallel to the support portion 6. The transmitting sensor 81 and the receiving sensor 82 are located at the same vertical height, and the receiving sensor 82 can receive the signal emitted by the transmitting sensor 81. The signal received by the receiving sensor 82 is used to determine whether the support portion 6 is in a horizontal state. When the receiving sensor 82 receives the signal from the transmitting sensor 81, it proves that the support portion 6 is in an ideal horizontal state. If the support portion 6 is tilted, as shown in the attached figure Figure 7 As shown, since the transmitting sensor 81 and the lower surface of the support part 6 are movably connected, the signal emitted by the transmitting sensor 81 is still in the horizontal direction. Due to the tilt of the support part 6, the transmitting sensor 81 and the receiving sensor 82 are no longer in the same horizontal plane, and the receiving sensor 82 cannot receive the signal emitted by the transmitting sensor 81, which proves that the support part 6 is tilted. By setting the tilt monitoring mechanism 8, it is possible to monitor in real time whether the support part 6 is in a horizontal state or a tilted state, so as to avoid collision of the wafer box 7 due to the tilt of the handling robot.

[0061] See attached Figure 8As shown, in some embodiments, a plurality of receiving sensors 82 are provided, which are arranged in sequence below the support portion 6 in the vertical direction, and the plurality of receiving sensors 82 are arranged in a straight line, and the straight line is arranged perpendicularly to the lower surface of the support portion 6. When the support portion 6 is tilted, among the plurality of receiving sensors 82, there will be a receiving sensor 82 and the transmitting sensor 81 located on the same horizontal plane, and can receive the monitoring signal emitted by the transmitting sensor 81. According to the position of the receiving sensor 82 that receives the detection signal, the specific tilt angle of the support portion 6 can be determined. For example, a first receiving sensor 821, a second receiving sensor 822 and a third receiving sensor 823 are sequentially arranged on the lower surface of the support portion 6. Since the first receiving sensor 821, the second receiving sensor 822 and the third receiving sensor 823 are all fixedly connected to the lower surface of the support portion 6, the distance between each receiving sensor 82 and the lower surface of the support portion 6 is constant, assumed to be a, and the distances between the first receiving sensor 821, the second receiving sensor 822 and the third receiving sensor 823 and the support portion 6 are a1, a2, and a3, respectively. The distances between the connecting points of the transmitting sensor 81, the receiving sensor 82 and the support portion 6 are constant, assumed to be b, and the inclination angle θ (the inclination angle is the angle between the support portion and the horizontal plane) can be calculated according to the ratio of a to b. For example, if the first receiving sensor 821 detects a transmission signal, it proves that the angle θ is 0 and no tilt occurs. If the second receiving sensor 822 receives a signal, the specific angle of θ can be accurately calculated according to the ratio of a2 and b. Similarly, if the third receiving sensor 823 receives a signal, the value of the tilt angle θ at that time can be calculated according to the ratio of a3 and b. Therefore, the present application sets a plurality of receiving sensors 82 in sequence in the vertical direction, and can accurately determine in real time whether the support portion 6 is tilted, and if tilted, the specific tilt angle. This embodiment takes the setting of three receiving sensors 82 as an example. In actual application, the receiving sensors 82 can be set to 2, 4, 5, 6, etc. This application does not make specific restrictions and can be adjusted according to actual usage.

[0062] In some embodiments, the transmitting sensor 81 is disposed below the support portion 6 and located at an end away from the third arm 5 to increase the distance between the transmitting sensor 81 and the receiving sensor 82 and improve the monitoring accuracy of the tilt angle θ.

[0063] The receiving sensor 82 is arranged on the connecting piece 531 connecting the support part 6 and the third arm 5. One end of the connecting piece 531 is perpendicular to and fixedly connected to the lower surface of the support part 6, and the other end is fixedly connected to the third driven wheel 53 of the third arm 5. By arranging the receiving sensor 82 on the connecting piece 531, on the one hand, the receiving sensor 82 can be arranged as far away from the transmitting sensor 81 as possible to increase the distance between the transmitting sensor 81 and the receiving sensor 82, thereby improving the monitoring accuracy of the tilt angle θ; on the other hand, the receiving sensor 82 is directly arranged on the connecting piece 531, and there is no need to arrange a device for connecting each receiving sensor 82, thereby reducing the components of the tilt monitoring mechanism 8, reducing the manufacturing cost, and reducing the weight borne by the support part 6.

[0064] See attached Fig. 9 As shown, in some embodiments, the transmitting sensor 81 is rotatably connected to the lower surface of the support portion 6. Specifically, the tilt monitoring mechanism 8 also includes a spherical shell 83 arranged on the lower surface of the support portion 6, the spherical shell 83 is fixedly connected to the lower surface of the support portion 6, a rolling ball 84 is arranged inside the spherical shell 83, a connecting hole is arranged directly below the spherical shell 83, a connecting rod 85 is fixedly arranged on the rolling ball 84, one end of the connecting rod 85 is connected to the rolling ball 84, and the other end is connected to the transmitting sensor 81. The rolling ball 84 is arranged in the spherical shell 83. When the support portion 6 tilts, due to the gravity of the transmitting sensor 81, the rolling ball 84 will move in the spherical shell 83, ensuring that the transmitting sensor 81 can be in a vertical rotation state in real time, and the signal emitted by the transmitting sensor 81 is on the horizontal plane. Through the spherical shell 83 and the rolling ball 84 arranged in the spherical shell 83, it can be ensured that the transmitting sensor 81 can be in a vertical state in real time.

[0065] In some embodiments, the transmitting sensor 81 is connected to the lower surface of the support portion 6 via a hinge, one end of the hinge is fixedly connected to the transmitting sensor 81, and the other end is fixedly connected to the lower surface of the support portion 6. When the support portion 6 is tilted, the transmitting sensor 81 can always be in a vertical state due to gravity, ensuring that the signal can be transmitted in the horizontal direction in real time.

[0066] The present application sets up a tilt monitoring mechanism to determine whether the robot arm carrying the wafer box 7 is tilted and the specific tilt angle, thereby avoiding collisions caused by the tilt of the wafer box 7 and improving wafer production efficiency.

[0067] See attached Fig.10As shown, in some embodiments, the support portion 6 includes a clamping plate 61, a limiting column 62, an in-place detection portion and a crystal box detection portion. One end of the clamping plate 61 is fixedly connected to the third driven wheel 53 of the third arm 5, and a plurality of limiting columns 62 and an in-place detection portion are arranged at the end away from the third driven wheel 53. The limiting column 62 is used to limit the horizontal position of the wafer box 7 to ensure that the wafer box 7 is located at a set position. The in-place detection portion includes an in-place detection column 63 and an in-place sensor 64. When the wafer box 7 is placed on the clamping plate 61, the in-place detection column 63 will be pressed downward, and the pressed in-place detection column 63 will trigger the in-place sensor 64 to detect whether the wafer box 7 is in place. The crystal box detection portion is used to detect whether there is a wafer box 7 on the clamping plate 61.

[0068] See attached Figure 2-4 As shown, in some embodiments, the rotation drive mechanism 2 and the mounting seat 1 are detachably connected, and the rotation drive mechanism 2 includes a first motor 21 and a rotation shaft 23. The first motor 21 is arranged on one side of the rotation shaft 23, and the first motor 21 is connected to the rotation shaft 23 through a toothed belt wheel transmission assembly 22. The first motor 21 can drive the rotation shaft 23 to rotate. The first motor 21 drives the rotation shaft 23 through the toothed belt wheel transmission assembly 22, rather than arranging the first motor 21 directly below the rotation shaft 23 to directly drive the rotation shaft 23, which can reduce the vertical height of the handling manipulator and improve the stability of the handling manipulator during the handling process.

[0069] The rotating shaft 23 is connected to the input end of the first harmonic reducer 24, and the output end of the first harmonic reducer 24 is connected to the rotating member 25, so that the rotating shaft 23 can drive the rotating member 25 to rotate. By arranging the first harmonic reducer 24 between the rotating member 25 and the rotating shaft 23, on the one hand, the harmonic reducer has a large triggering speed ratio, which can greatly reduce the rotation speed of the rotating member 25, making it easier to precisely control the rotation speed of the rotating member 25; on the other hand, the harmonic reducer has the characteristics of high load-bearing capacity and high transmission accuracy, which can improve the load-bearing capacity and handling accuracy of the handling manipulator, and also reduce the possibility of the manipulator tilting.

[0070] In some embodiments, the linear drive mechanism includes a first arm 3, a second arm 4, and a third arm 5 connected in sequence, the first arm 3 is connected to the rotary drive mechanism 2, and the third arm 5 is connected to the support portion 6. The first arm 3, the second arm 4, and the third arm 5 interact with each other to drive the support portion 6 to move linearly.

[0071] In some embodiments, one end of the rotating member 25 away from the first harmonic reducer 24 is fixedly connected to the first arm housing 31. The rotating member 25 can drive the first arm housing 31 to rotate synchronously, change the rotation angle of the first arm housing 31, and then the first arm housing 31 drives the support part 6 to rotate through the second arm 4 and the third arm 5, thereby changing the orientation of the support part 6 relative to the wafer box 7.

[0072] In some embodiments, the linear drive mechanism can drive the support part 6 to move linearly, and the linear drive mechanism includes a drive source, and the drive source includes a second motor 32, the second motor 32 is fixedly connected to the first arm housing 31, and the second motor 32 is located in the cavity of the rotating member 25, and the drive shaft of the second motor 32 passes through the first arm housing 31 and is fixedly connected to the first toothed belt wheel assembly located inside the first arm housing 31. Since the second motor 32 is fixedly connected to the first arm housing 31, and the drive shaft of the second motor 32 is fixedly connected to the first toothed belt wheel assembly, when the rotating member 25 drives the first arm housing 31 to rotate, the second motor 32 and the first toothed belt wheel assembly also rotate synchronously with the first arm housing 31, and the second motor 32, the first toothed belt wheel assembly and the first arm housing 31 are in a relatively static state, and the second motor 32 drives the support part 6 to move linearly more smoothly.

[0073] The first toothed pulley assembly includes a first driving wheel 33 and a first driven wheel 34. The first driving wheel 33 is fixedly connected to the driving shaft of the second motor 32. The second motor 32 can drive the first driving wheel 33 to rotate. The first driving wheel 33 drives the first driven wheel 34 to rotate through the transmission belt. Therefore, the first driving wheel 33, the first driven wheel 34 and the first arm housing 31 rotate relatively.

[0074] See attached Figure 4 As shown, in some embodiments, the first driven wheel 34 is fixedly connected to one end of the first shaft 35, and the other end of the first shaft 35 passes upward from the first arm housing 31 and is fixedly connected to the second harmonic reducer 42, and the second harmonic reducer 42 and the first shaft 35 rotate synchronously with the first driven wheel 34.

[0075] In the second arm housing 41, a second gear pulley assembly, a second harmonic reducer 42 and a reducer fixed shell 45 are arranged. The outer circumferential surface of the second harmonic reducer 42 is sleeved in the reducer fixed shell 45, and one end of the reducer fixed shell 45 is fixedly connected to the second driving wheel 46 of the second gear pulley assembly. The second harmonic reducer 42 is located within the inner ring of the second driving wheel 46, and the end face of the second harmonic reducer 42 is higher than the end face of the second driving wheel 46. The reduction output end of the second harmonic reducer 42 is fixedly connected to a connecting plate 43, and the connecting plate 43 is connected to the inner wall of the second arm housing 41 through a connecting column 44. Based on the working principle of the reducer, the first driven wheel 34 is connected to the second harmonic reducer 42 with the first shaft 35. After the second harmonic reducer 42 is decelerated, its reduction output end drives the connecting plate 43. Since the connecting plate 43 is fixedly connected to the second arm housing 41, the first driven wheel 34 drives the second arm housing 41 to rotate.

[0076] By setting up the second harmonic reducer 42, the rotation speed of the first shaft 35 is slowed down, that is, the rotation speed of the second arm shell 41 is slowed down, thereby improving the accuracy of the second arm 4 rotation angle control, and also improving the second arm 4 The carrying capacity and handling accuracy are improved.

[0077] In some embodiments, the reducer fixed housing 45 and the second driving wheel 46 are an integrated structure, which improves the connection strength between the reducer fixed housing 45 and the second driving wheel 46. The reducer fixed housing 45 and the second driving wheel 46 can also be a split structure to improve the flexibility during installation.

[0078] In some embodiments, the reducer fixed housing 45 is fixedly connected to the first arm housing 31. The reducer fixed housing 45 does not rotate relative to the first arm housing 31, that is, the second driving wheel 46 does not rotate relative to the first arm housing 31. The second arm housing 41 will rotate relative to the second driving wheel 46 under the action of the second harmonic reducer 42, so the second toothed belt pulley assembly will generate transmission.

[0079] See attached Figure 3 As shown, in some embodiments, one end of the second shaft 48 is fixed to the bottom of the inner side of the second arm housing 41. And inside the second arm housing 41, the second shaft 48 is connected to the second driven wheel 47 of the second toothed belt pulley assembly through a bearing. Since the second shaft 48 and the second arm housing 41 are fixedly connected, the second arm housing 41 and the second driving wheel 46 rotate relative to each other, so the second shaft 48 and the second driven wheel 47 generate relative rotation.

[0080] The second driven wheel 47 is fixedly connected to the third arm housing 51, one end of the second shaft 48 passes through the second arm housing 41 and extends into the third arm housing 51, and the end thereof is fixedly connected to the third driving wheel 52. Similarly, in the third toothed pulley assembly, the third shaft 54 ​​is fixed to the third arm housing 51, the third driven wheel 53 rotates relative to the third shaft 54, and the third driven wheel 53 is fixedly connected to the support part 6, and the support part 6 rotates relative to the third shaft 54.

[0081] In some embodiments, the diameter D2 of the second driving wheel 46 is equal to the diameter d3 of the third driven wheel 53, and the diameter d2 of the second driven wheel 47 is equal to the diameter D3 of the third driving wheel 52, ensuring that the transmission ratio of the second driving wheel 46 and the third driven wheel 53 is 1:1, so that the clamping plate 61 always moves in a straight line in one direction.

[0082] In the description of the present invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0083] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0084] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0085] The above implementation modes are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A handling robot, characterized in that: include: A support portion (6), wherein the support portion (6) is used to carry a workpiece; A linear drive mechanism, the linear drive mechanism being connected to the support portion (6), and the linear drive mechanism being capable of driving the support portion (6) to move linearly; A tilt monitoring mechanism (8), the tilt monitoring mechanism (8) being connected to the support portion (6); The tilt monitoring mechanism (8) comprises a transmitting sensor (81) and a receiving sensor (82), wherein the receiving sensor (82) is fixedly connected to the lower surface of the support portion (6), and the transmitting sensor (81) is movably connected to the lower surface of the support portion (6). The transmitting sensor (81) can always be in a vertical state, and the detection signal emitted is always in a horizontal direction. The receiving sensor (82) can receive the signal emitted by the transmitting sensor (81); A plurality of the receiving sensors (82) are provided and arranged in sequence below the support portion (6); the plurality of receiving sensors (82) are arranged on a straight line, and the straight line and the lower surface of the support portion (6) are arranged perpendicularly; The receiving sensor (82) is arranged on a connecting member (531) connecting the support portion (6) and the linear drive mechanism, and the transmitting sensor (81) is arranged at an end of the support portion (6) away from the connecting member (531).

2. The handling robot according to claim 1, characterized in that: The transmitting sensor (81) and the lower surface of the supporting portion (6) are rotationally connected or hinged.

3. The handling robot according to claim 1, characterized in that: The linear drive mechanism comprises a first arm (3), a second arm (4) and a third arm (5) which are connected in sequence, the first arm (3) is connected to the rotary drive mechanism (2), the third arm (5) is connected to the support portion (6), and the first arm (3), the second arm (4) and the third arm (5) interact with each other to drive the support portion (6) to move linearly.

4. The handling robot according to claim 3, characterized in that: The second arm (4) comprises a second arm housing (41), and a second toothed belt wheel assembly, a second harmonic reducer (42) and a reducer fixing housing (45) arranged in the second arm housing (41); The second harmonic reducer (42) and the second arm housing (41) are fixedly connected, and the second harmonic reducer (42) and the drive assembly are fixedly connected, and the drive assembly can drive the second arm housing (41) to rotate through the second harmonic reducer (42); The reducer fixed housing (45) is fixedly connected to the first arm housing (31), and the reducer fixed housing (45) is fixedly connected to the second toothed belt wheel assembly; The second toothed belt wheel assembly and the second arm housing (41) are capable of relative rotation.

5. The handling robot according to claim 4, characterized in that: The driving assembly comprises a second motor (32) fixedly connected to the first arm housing (31), and a first toothed belt wheel assembly located inside the first arm housing (31), the second motor (32) and the first toothed belt wheel assembly being fixedly connected, and the first toothed belt wheel assembly driving the second harmonic reducer (42) to rotate via a first shaft (35).

6. The handling robot according to claim 4, characterized in that: The third arm (5) comprises a third arm housing (51) and a third toothed belt wheel assembly arranged inside the third arm housing (51); the second shaft (48) and the second arm housing (41) are fixedly connected, and the second shaft (48) is connected to the second driven wheel (47) of the second toothed belt wheel assembly via a bearing, so that the second shaft (48) and the second driven wheel (47) generate relative rotation; The second driven wheel (47) is fixedly connected to the third arm housing (51); one end of the second shaft (48) passes through the second arm housing (41) and extends into the third arm housing (51), and is fixedly connected to the third driving wheel (52); the third shaft (54) is fixedly connected to the third arm housing (51); the third driven wheel (53) rotates relative to the third shaft (54); the third driven wheel (53) is fixedly connected to the support portion (6); and the support portion (6) and the third shaft (54) rotate relative to each other.

7. The handling robot according to claim 6, characterized in that: The diameter of the second driving wheel (46) is equal to the diameter of the third driven wheel (53), and the diameter of the second driven wheel (47) is equal to the diameter of the third driving wheel (52).

8. The handling robot according to any one of claims 3 to 7, characterized in that: The rotary drive mechanism (2) comprises a first motor (21) and a rotary shaft (23); the first motor (21) is connected to the rotary shaft (23) via a toothed belt wheel transmission assembly (22); the first motor (21) can drive the rotary shaft (23) to rotate; The rotating shaft (23) is connected to the input end of the first harmonic reducer (24), and the output end of the first harmonic reducer (24) is connected to the rotating member (25). The rotating shaft (23) can drive the rotating member (25) to rotate, and the rotating member (25) is fixedly connected to the linear drive mechanism.

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