A combined seed separation apparatus

Abstract

The application discloses a combined seed crystal separation device, which comprises a support frame, a support, a suspension unit installed on the support frame and used for bearing a combination of a crucible cover and a seed crystal and suspending the combination, and an automatic knocking unit installed on the support and capable of automatically knocking the upper end of the crucible cover. The device can automatically knock the combination in the suspended state, which is favorable for rapidly destroying the bonding interface, accelerating the separation of the seed crystal and the crucible cover, and reducing labor intensity and improving work efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, in particular to a combined seed crystal separation device. BACKGROUND

[0002] Silicon carbide (SiC) single crystal has excellent semiconductor physical properties such as high thermal conductivity, high breakdown voltage, extremely high carrier mobility, and high chemical stability, and can be made into high-frequency and high-power electronic and optoelectronic devices that work under high temperature and strong radiation conditions, which has great application value in the fields of national defense, high technology, industrial production, power supply, and power transformation, and is considered as a third-generation wide-bandgap semiconductor material with great development prospects.

[0003] At present, in the preparation of silicon carbide crystals, a seed crystal is usually needed as a starting crystal to provide a template for the growth of a new crystal, and in actual installation, most of the seed crystals are bonded to the crucible cover by high-temperature glue. After the crystal preparation is completed, a knocking method is generally used to knock the crucible cover to break the bonding layer and separate the seed crystal from the crucible cover.

[0004] When the seed crystal is separated from the crucible cover by the knocking method, a bearing frame (used to bear the combination of the seed crystal and the crucible cover) and a knocking rod are needed. Since the bearing frame is placed on the installation table, when the knocking rod knocks the crucible cover on the bearing frame, part of the energy is lost due to the effect of vibration conduction (contact between the crucible cover and the bearing frame), which reduces the damage effect of knocking on the bonding layer, and is not conducive to the rapid separation of the seed crystal from the crucible cover. At the same time, manually knocking the combination with the knocking rod has high labor intensity and low work efficiency. Therefore, the present application provides a bearing frame for seed crystal separation to meet the needs, and therefore provides a combined seed crystal separation device to meet the needs. SUMMARY

[0005] The present application aims to provide a combined seed crystal separation device to solve the technical problems raised in the above background.

[0006] To achieve the above-mentioned purpose, the present application provides the following technical solution: a combined seed crystal separation device, comprising a support frame and a support, further comprising a suspension unit installed on the support frame, used to bear the combination of the crucible cover and the seed crystal and make the combination suspended; an automatic knocking unit installed on the support, the automatic knocking unit can automatically knock the upper end of the crucible cover.

[0007] As a preferred embodiment in the embodiment, the suspending unit comprises upper and lower outer rings arranged on the support frame in an up-down manner and upper and lower inner rings arranged correspondingly to the upper and lower outer rings, and the upper ends of the upper and lower outer rings and the upper and lower inner rings are oppositely provided with arc-shaped baffles, and the upper ends of the arc-shaped baffles of the upper and lower outer rings are fixed with limiting blocks;

[0008] The lower end of the upper inner ring is provided with a second magnetic ring, and the upper end of the upper outer ring is provided with a first magnetic ring, and the opposite end magnetic poles of the first magnetic ring and the second magnetic ring are the same;

[0009] The upper end of the lower outer ring is circumferentially provided with a plurality of first magnetic blocks, and the lower end of the lower inner ring is correspondingly provided with a plurality of second magnetic blocks, and the opposite end magnetic poles of the plurality of first magnetic blocks and the corresponding second magnetic blocks are the same;

[0010] The inner walls of the two arc-shaped baffles on the upper and lower outer rings are circumferentially provided with no less than two first limiting magnets, and the inner walls of the two arc-shaped baffles on the upper and lower inner rings are circumferentially provided with no less than two second limiting magnets, and the plurality of second limiting magnets and the plurality of first limiting magnets are one-to-one corresponding and have the same opposite end magnetic poles;

[0011] The automatic knocking unit comprises a mounting disc mounted on the support frame, an adjusting screw rod threadedly connected to the support frame, a rotary motor mounted on the mounting disc, and a gear ring;

[0012] The inner cavity of the mounting disc is circumferentially provided with a plurality of U-shaped plates, and a reciprocating screw rod is rotatably arranged on each of the plurality of U-shaped plates, and a ball nut is threadedly sleeved on the reciprocating screw rod, and the two side ends of the ball nut are fixed with side plates, one of the side plates is slidably penetrated by a rod body mounted on the U-shaped plate, and the other side plate is slidably penetrated by an L-shaped rod, and a roller is rotatably arranged at the upper end of the L-shaped rod, and an elastic impact ball is mounted at the lower end of the L-shaped rod, and a mounting ring is fixed on the L-shaped rod, and the mounting ring and the side plate are connected by a compression spring;

[0013] A driving strip in a wave structure is mounted on the U-shaped plate, and the driving strip is located above the reciprocating screw rod, and the two ends of the driving strip are provided with plane rods with horizontal upper ends, and the upper end faces of the plane rods are located between the wave crest and wave trough faces of the driving strip;

[0014] The gear ring is rotatably arranged in the inner cavity of the mounting disc, and the gear ring is in toothed connection with a gear on the output shaft of the rotary motor and a plurality of rotary gears arranged on one end of the reciprocating screw rod;

[0015] The lower end of the adjusting screw is rotationally connected with the upper end of the mounting disc, the upper end of the mounting disc is connected with the telescopic rod through a rotary bearing, and the telescopic rod is mounted on the support;

[0016] The lower end of the support is slidingly arranged on the slide rail.

[0017] As a preferred embodiment in the present embodiment, an automatic adjusting unit is further included, which can automatically adapt to the suspension separation of the seed crystal and the crucible cover with different lengths.

[0018] Since the length of the seed crystal generated during the production of the seed crystal varies according to the actual situation, the length of the seed crystal produced by the company varies in the range of 12 to 21 cm, in order to ensure that the present support can be applicable to the suspension support of the combination of seed crystals and crucible covers with different lengths, an automatic adjusting unit is arranged, which can change the distance between the upper outer ring 2 and the lower outer ring 3.

[0019] As a preferred embodiment in the present embodiment, the automatic adjusting unit includes two sliding sleeves slidingly arranged on the support frame, two transverse plates mounted on the outer wall of the lower outer ring, and two pulley blocks arranged at the upper end of the support frame, and the two sliding sleeves are fixedly arranged at the ends of the corresponding transverse plates.

[0020] The upper end of each of the two transverse plates is connected with a pull rope, and the two pull ropes are assembled on the corresponding pulley blocks, one end of the pull rope away from the transverse plate penetrates the support frame and is connected with a weight, and a blocking ring is fixedly arranged on each of the two pull ropes. At the beginning, under the action of the gravity of the weight, the blocking ring is in contact with the support frame to form a block.

[0021] As a preferred embodiment in the present embodiment, a blocking and slowing unit is further included, which blocks and slows the downward movement of the lower outer ring carrying the separated seed crystal.

[0022] As a preferred embodiment in the present embodiment, the blocking and slowing unit includes a cylinder with an elastic sealing diaphragm inside, an umbrella-shaped gear rotatably arranged on a plate body through a rotating shaft, and a toothed rod slidingly arranged in a U-shaped groove.

[0023] The toothed rod is in toothed connection with the umbrella-shaped gear through a transmission gear rotatably arranged on the plate body, an elastic extrusion column is rotatably arranged on the end of the toothed rod close to the sliding sleeve, and the elastic extrusion column is located in an open inner cavity provided on the sliding sleeve, and the U-shaped groove is fixedly connected with the transverse plate.

[0024] The upper end of the bevel gear is provided with a long strip-shaped vertical rod, and a push rod is rotationally arranged on the front end of the vertical rod, and the end of the push rod is located in the cavity of a long strip-shaped driving ring, the side end of the driving ring is fixed with a movable rod, and the end of the movable rod away from the driving ring is sealingly and slidingly arranged in the inner cavity of a hollow tube which is communicated with the inner cavity of the cylinder;

[0025] The cylinder is mounted on the lower end of the lower outer ring, the upper end of the elastic sealing diaphragm is fixed with a pressing column, and the upper end of the pressing column slidingly penetrates the lower outer ring, and the outer wall of the arc-shaped baffle on the lower inner ring is provided with a contact plate matched with the pressing column;

[0026] The plate body is fixed on the transverse plate.

[0027] As a preferred embodiment in the present embodiment, a magnetic shielding structure is further included, which is used for shielding the magnetic field action between the first magnetic block and the second magnetic block when the separated seed crystal is carried on the lower inner ring, so that the weight of the seed crystal acts on the pressing column.

[0028] As a preferred embodiment in the present embodiment, the magnetic shielding structure includes two arc-shaped rods connected by a connecting rod and circumferentially arranged, and a pressing rod arranged on the outer wall of the arc-shaped baffle on the lower inner ring;

[0029] The lower end of one of the arc-shaped rods is provided with an arc-shaped sliding block which is slidingly arranged in an arc-shaped groove arranged on the upper end of the lower outer ring, and the inner wall of the arc-shaped groove and the arc-shaped sliding block are connected by a reset spring in an arc-shaped structure, and a plurality of magnetic shielding plates are arranged on each of the two arc-shaped rods;

[0030] One of the arc-shaped rods is provided with a block body with a driving slope, and the block body is located below the pressing rod.

[0031] As a preferred embodiment in the present embodiment, a knocking intensity self-changing unit is further included, which can automatically change the knocking intensity of the impact ball and the crucible cover according to the needs of the knocking part during the knocking process.

[0032] As a preferred embodiment in the present embodiment, the knocking intensity self-changing unit includes a first gradual change area L1, a constant area L2 and a second gradual change area L3 arranged in sequence on the driving bar;

[0033] The wave peaks in the first gradual change area L1 are continuously higher from right to left;

[0034] The wave peaks and wave troughs in the constant area L2 remain unchanged, and the wave peak height of the constant area L2 is the highest wave peak height of the first gradual change area L1;

[0035] The wave peak height in the second gradual change region L3 gradually decreases;

[0036] The distance between each wave peak and wave trough in the first gradual change region L1, the constant region L2 and the second gradual change region L3 is consistent, and the height of each wave trough in the first gradual change region L1, the constant region L2 and the second gradual change region L3 is consistent.

[0037] In summary, the technical effects and advantages of the present application are:

[0038] 1、The present application has reasonable structure, and the equipment can automatically knock the combination in a suspended state, which is beneficial to quickly destroy the bonding interface, speeds up the separation of the seed crystal and the crucible cover, and reduces labor intensity and improves work efficiency.

[0039] 2、In the present application, an automatic adjusting unit is arranged, so that the bearing frame can be suitable for the suspension bearing of the seed crystal and the crucible cover combination of different lengths.

[0040] 3、In the present application, a resistance and delay unit is arranged, which can automatically resist and delay the seed crystal 42 of different lengths to a certain extent, and form good protection for the seed crystal.

[0041] 4、In the present application, a magnetic shielding structure is arranged, which can shield the first magnetic block, and the weight of the seed crystal will be basically completely borne on the two extrusion columns, thereby increasing the friction force between the elastic extrusion column and the support frame, and enhancing the resistance and delay effect on the lower outer ring. BRIEF DESCRIPTION OF DRAWINGS

[0042] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0043] Figure 1 It is a front view of the structure of the present application.

[0044] Figure 2 It is Figure 1 a schematic view of the bearing frame structure in the present application.

[0045] Figure 3 It is Figure 2 a schematic view of the local split structure of the bearing frame in the present application.

[0046] Figure 4 It is Figure 3 a schematic view of the structure of the upper inner ring and the lower inner ring in the present application.

[0047] Figure 5 It is Figure 3 a schematic view of the resistance and delay unit structure in the present application.

[0048] Figure 6 for Figure 5 the middle gas cylinder cross-sectional structure schematic diagram;

[0049] Figure 7 for Figure 2 the middle shielding structure schematic diagram;

[0050] Figure 8 for Figure 1 the middle mounting disc bottom view structure schematic diagram;

[0051] Figure 9 for Figure 8 the middle U-shaped plate structure structure schematic diagram;

[0052] Figure 10 for Figure 9 the middle A enlarged structure schematic diagram;

[0053] Figure 11 for Figure 9 the middle drive bar front view structure schematic diagram.

[0054] In the figure: 1, support frame; 2, upper outer ring; 3, lower outer ring; 4, upper inner ring; 401, arc baffle; 5, lower inner ring; 51, contact plate; 6, limit block; 7, first limit magnet; 8, second limit magnet; 9, first magnetic ring; 10, second magnetic ring; 11, first magnetic block; 12, second magnetic block; 13, cross plate; 14, sliding sleeve; 15, opening; 16, pulley block; 17, pull rope; 18, weight; 19, blocking ring; 20, plate body; 21, vertical rod; 22, umbrella gear; 23, push rod; 24, drive ring; 25, transmission gear; 26, U-shaped groove; 27, toothed rod; 28, elastic extrusion column; 29, movable rod; 30, hollow tube; 31, cylinder; 32, extrusion column; 33, elastic sealing diaphragm; 34, arc rod; 35, block; 36, drive inclined plane; 37, shielding plate; 38, arc-shaped sliding block; 39, return spring; 40, pressing rod; 41, crucible cover; 42, seed crystal;

[0055] 101, support; 102, mounting disc; 103, rotary bearing; 104, telescopic rod; 105, adjusting screw; 106, rotary motor; 107, toothed ring; 108, U-shaped plate; 109, rod body; 110, drive bar; 111, back-and-forth screw; 112, rotary gear; 113, flat rod; 114, ball nut; 115, L-shaped rod; 116, roller; 117, compression spring; 118, mounting ring; 119, impact ball. DETAILED DESCRIPTION

[0056] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments of the present application, all the other embodiments obtained by a person of ordinary skill in the art without creative effort belong to the scope of the present application.

[0057] Embodiment: Reference Figure 1 The combined seed crystal separation device shown in the figure comprises a support frame 1 and a support 101, further comprises a suspension unit installed on the support frame 1, which is used to carry the combination of the crucible cover 41 and the seed crystal 42 and make the combination suspended; an automatic knocking unit installed on the support 101, which can automatically knock the upper end of the crucible cover 41.

[0058] By setting the suspension unit, the seed crystal can be in a suspended state, and the vibration generated by the knocking can directly act on the bonding interface when the seed crystal is knocked, so that the impact force is more concentrated, which is beneficial to the rapid separation of the crucible cover 41 and the seed crystal 42.

[0059] The automatic knocking unit can automatically knock the crucible cover 41, without manual knocking.

[0060] As a preferred embodiment in the present embodiment, as shown in Figures 1-4 The suspension unit comprises an upper outer ring 2 and a lower outer ring 3 arranged on the support frame 1 in an up-down manner, and an upper inner ring 4 and a lower inner ring 5 arranged corresponding to the upper outer ring 2 and the lower outer ring 3, respectively, and the upper ends of the upper outer ring 2, the lower outer ring 3, the upper inner ring 4 and the lower inner ring 5 are relatively provided with arc-shaped baffles 401, and the upper ends of the arc-shaped baffles 401 of the upper outer ring 2 and the lower outer ring 3 are fixed with limit blocks 6.

[0061] The lower end of the upper inner ring 4 is installed with a second magnetic ring 10, and the upper end of the upper outer ring 2 is installed with a first magnetic ring 9, and the opposite end magnetic poles of the first magnetic ring 9 and the second magnetic ring 10 are the same.

[0062] The upper end of the lower outer ring 3 is circumferentially provided with a plurality of first magnetic blocks 11, and the lower end of the lower inner ring 5 is correspondingly provided with a plurality of second magnetic blocks 12, and the opposite end magnetic poles of the plurality of first magnetic blocks 11 and the corresponding second magnetic blocks 12 are the same.

[0063] The inner walls of the two arc-shaped baffles 401 on the upper outer ring 2 and the lower outer ring 3 are circumferentially provided with not less than two first limit magnets 7, and the inner walls of the two arc-shaped baffles 401 on the upper inner ring 4 and the lower inner ring 5 are circumferentially provided with not less than two second limit magnets 8, and the plurality of second limit magnets 8 are one-to-one corresponding to the plurality of first limit magnets 7, and the opposite end magnetic poles are the same.

[0064] In use, the seed crystal of the combination is inserted from top to bottom, so that the lower end of the crucible cover 41 contacts the upper end of the upper inner ring 4 to form a support, and the upper end of the seed crystal contacts the upper end of the lower inner ring 5, most of the weight acts on the upper inner ring 4 (at this time the upper inner ring 4 is suspended in the inner cavity of the upper outer ring 2 and does not contact the limiting block 6), and a small part of the weight acts on the lower inner ring 5 (at this time the lower inner ring 5 is suspended in the inner cavity of the lower outer ring 3 and does not contact the limiting block 6), so that the seed crystal forms an integral whole with the upper inner ring 4 and the lower inner ring 5 and is suspended (which is suspended by the repulsive force between the first magnetic ring 9 and the second magnetic ring 10 and the repulsive force between the first magnetic block 11 and the second magnetic block 12, and the upper inner ring 4 and the lower inner ring 5 are limited by the repulsive force between the first limiting magnet 7 and the second limiting magnet 8), at this time the upper end of the crucible cover 41 is knocked by the knocking device, which can effectively reduce the energy damage caused by vibration conduction, is conducive to the destruction of the bonding interface, and speeds up the separation of the crucible cover 41 and the seed crystal 42, and when the separation, the seed crystal 42 will automatically fall onto the lower inner ring 5 by the action of gravity.

[0065] It should be noted that, first, most of the weight acts on the upper inner ring 4, and a small part of the weight acts on the lower inner ring 5, so that the gravity of the seed crystal 42 is very small, and the seed crystal 42 has a downward force on the bonding interface, which is conducive to speeding up the separation of the crucible cover 41 and the seed crystal 42; second, when the seed crystal 42 falls, the repulsive force between the first magnetic block 11 and the second magnetic block 12 can slow down the falling speed, prevent the seed crystal 42 from being damaged by relatively violent collision, and finally make the lower inner ring 5 contact the lower outer ring 3 under the action of the gravity of the seed crystal 42, and an elastic pad can be provided on the upper end of the lower outer ring 3 to further reduce the buffer; third, the arc-shaped baffle 401 can ensure that the crucible cover 41 and the seed crystal 42 can be stably stopped on the corresponding upper inner ring 4 and lower inner ring 5 respectively; fourth, the limiting block 6 can prevent the upper inner ring 4 and the lower inner ring 5 from moving out of the inner cavities of the upper outer ring 2 and the lower outer ring 5 under the action of the repulsive force; fifth, two notches can be provided on the upper inner ring 4 and the lower inner ring 5, and the notches are not provided on the side with the arc-shaped baffle 401, which is to facilitate the taking and placing of the crucible cover 41 or the seed crystal 42.

[0066] The automatic knocking unit includes a mounting disc 102 mounted on a bracket 101, an adjusting screw 105 threadedly connected to the bracket 101, a rotary motor 106 mounted on the mounting disc 102, and a gear ring 107;

[0067] The inner cavity of the mounting disc 102 is circumferentially provided with a plurality of U-shaped plates 108, each of which is rotatably provided with a reciprocating screw rod 111, and the reciprocating screw rod 111 is threadedly sleeved with a ball nut 114, the two side ends of the ball nut 114 are fixedly provided with side plates, one of the side plates is slidably penetrated by a rod body 109 mounted on the U-shaped plate 108, and the other side plate is slidably penetrated by an L-shaped rod 115, the upper end of the L-shaped rod 115 is rotatably provided with a roller 116, the lower end of the L-shaped rod 115 is provided with an elastic impact ball 119, the L-shaped rod 115 is fixedly provided with a mounting ring 118, and the mounting ring 118 is connected with the side plate through a compression spring 117;

[0068] The U-shaped plate 108 is provided with a wave-shaped driving strip 110, and the driving strip 110 is located above the reciprocating screw rod 111, and the two ends of the driving strip 110 are provided with a horizontal plane rod 113 with the upper end, and the upper end surface of the plane rod 113 is located between the wave crest surface and the wave trough surface of the driving strip 110;

[0069] The tooth ring 107 is rotatably arranged in the inner cavity of the mounting disc 102, and the tooth ring 107 is in gear connection with the gear on the output shaft of the rotating motor 106 and the rotating gear 112 provided on one end of the plurality of reciprocating screw rods 111;

[0070] The lower end of the adjusting screw rod 105 is rotatably connected with the upper end of the mounting disc 102, the upper end of the mounting disc 102 is connected with the telescopic rod 104 through the rotating bearing 103, and the telescopic rod 104 is mounted on the support 101;

[0071] The lower end of the support 101 is slidably arranged on the slide rail.

[0072] In use, the mounting disc 102 is moved (the bottom of the support 101 is provided with a slide rail, the slide rail is mounted on the mounting surface, and the support 101 can slide on the slide rail) to the upper side of the combination body and aligned with it, the adjusting screw rod 105 is rotated to make the mounting disc 102 move downward, and the lower end of the impact ball 119 is in contact with the upper end of the crucible cover 31, the rotating motor 106 is controlled to work, the plurality of rotating gears 112 are driven to rotate through the tooth ring 107, and then the plurality of reciprocating screw rods 111 are simultaneously driven to rotate, so that the plurality of ball nuts 11 drive the L-shaped rod 115 to move linearly outward along the axis of the crucible cover 41, in the process of movement, the roller 116 is in contact with the protruding part on the driving strip 110 to make the L-shaped rod 115 move upward, and the compression spring 117 is stretched, when the roller 116 passes the protruding part, the L-shaped rod 115 is made to move downward to restore the original position through the compression spring 117, and the impact ball 119 is in contact with the upper end of the crucible cover 41 and collides through the elastic force of the compression spring 117 and the effect of the inertia of movement, thereby breaking the adhesive layer, finally separating the crucible cover from the seed crystal, automatically performing the knocking operation, which is convenient and simple to operate, low in labor intensity and high in working efficiency.

[0073] It should be noted that, firstly, the wafer produced by our company is mainly 12 inches and 8 inches, and the corresponding crucible cover required for the production of the seed crystal is 14 inches and 10 inches, respectively. When knocking on the upper end of the 14-inch and 10-inch crucible cover, the corresponding number of reciprocating lead screws 111 is generally not less than eight groups and not less than six groups; secondly, during the entire knocking process, the rollers 116 are not in contact with the valley concave surface of the driving strip 110, that is, the protrusion height of the highest protrusion part on the driving strip 110 is less than the depth of the valley, so as to avoid the collision between the roller 116 and the valley surface, which leads to the failure to better transmit the impact force to the crucible cover 41.

[0074] As a preferred embodiment in this embodiment, it further includes an automatic adjusting unit, which can automatically adapt to the suspension separation of seed crystals 42 and crucible covers 41 of different lengths.

[0075] Since the length of the seed crystal produced may vary according to actual conditions, the length of the seed crystal produced by our company varies in the range of 12 to 21 cm. In order to ensure that the carrier frame can be applicable to the suspension bearing of the combination of seed crystals and crucible covers of different lengths, an automatic adjusting unit is provided to change the distance between the upper outer ring 2 and the lower outer ring 3.

[0076] As a preferred embodiment in this embodiment, as shown in Figures 1-4 The automatic adjusting unit includes two sliding sleeves 14 slidingly arranged on the support frame 1, two horizontal plates 13 installed on the outer wall of the lower outer ring 3, and two pulley sets 16 arranged at the upper end of the support frame 1. The two sliding sleeves 14 are fixedly arranged at the ends of the corresponding horizontal plates 13, respectively.

[0077] The upper end of each of the two horizontal plates 13 is connected with a pull rope 17, and the two pull ropes 17 are assembled on the corresponding pulley sets 16. The end of the pull rope 17 away from the horizontal plate 13 penetrates through the support frame 1 and is connected with a weight 18. The two pull ropes 17 are each fixedly provided with a blocking ring 19. Initially, under the action of the gravity of the weight 18, the blocking ring 19 is in contact with the support frame 1 to form a blockage.

[0078] In the initial state, the lower outer ring 3 is kept at a certain height by the contact between the blocking ring 19 and the support frame 1 (the lower outer ring 3 has a tendency to move upward, i.e. when the blocking ring 19 is removed, the lower outer ring 3 moves upward), the seed crystal of the combination is inserted from top to bottom, the lower end of the seed crystal 42 contacts the upper end of the lower inner ring 5, and as the seed crystal 42 continues to move downward, the repulsive force between the magnetic blocks will make the lower outer ring 3 overcome the gravitational force of the weight 18 and finally make the crucible cover 41 contact the upper end of the upper inner ring 4, at this time the combination is in a suspended state (at this time the upper inner ring 4 and the lower inner ring 5 are not in contact with the limiting block 6, and they are in a suspended state), and at this time the lower outer ring 3 remains stationary, when the seed crystal 42 is separated and falls, the seed crystal 42 drives the lower inner ring 5 to move downward and contact the upper end of the lower outer ring 3, at this time the entire gravitational force of the seed crystal acts on the lower outer ring 3, which can drive the lower outer ring 3 to move downward, and when the upper end of the weight 18 contacts the support frame 1, the lower outer ring 3 stops moving, at this time the seed crystal 42 can be removed, after the seed crystal 42 is removed, the gravitational force of the weight 18 drives the lower outer ring 3 to move upward to restore the original position (the lower inner ring 5 is also automatically reset under the action of the magnetic force), the automatic adjusting unit can automatically adjust the distance between the upper outer ring 2 and the lower outer ring 3 according to the length of the seed crystal 42 to adapt to different lengths of the seed crystal 42 and the suspension separation of the crucible cover 41, and also has an automatic reset function.

[0079] It should be noted that, first, the sum of the gravitational forces of the weights is greater than the sum of the total gravitational forces of the sliding sleeve 14, the horizontal plate 13 and the lower outer ring 3 (including the components thereon) and the frictional resistance suffered by the movement of the sliding sleeve 14; second, the present structure (due to its downward movement) can provide sufficient operating space to remove the seed crystal 42 from the lower outer ring 3.

[0080] As a preferred embodiment in the present embodiment, a blocking and slowing unit is further included to block and slow the lower outer ring 3 carrying the separated seed crystal and moving downward.

[0081] When the seed crystal 42 drives the lower outer ring 3 to move downward, it accelerates, and after the weight 18 contacts the support frame 1 to form a block, the lower outer ring 3 will suddenly stop, causing a great impact on the seed crystal (and after the collision, the seed crystal 42 is easy to be unstable and fall), which can easily damage the seed crystal 42 and is not conducive to the stability of the seed crystal 42 on the lower outer ring 3.

[0082] As a preferred embodiment in the present embodiment, as shown in Figures 3-6 the blocking and slowing unit includes a cylinder 31 with an elastic sealing diaphragm 33 inside, an umbrella-shaped gear 22 rotatably arranged on the plate body 20 through a rotating shaft, and a toothed rod 27 slidingly arranged in a U-shaped groove 26.

[0083] The tooth bar 27 is toothed with the umbrella gear 22 through the transmission gear 25 arranged on the plate body 20, the elastic extrusion column 28 is arranged on the end of the tooth bar 27 close to the sleeve 14, and the elastic extrusion column 28 is located in the inner cavity of the opening 15 arranged on the sleeve 14, and the U-shaped groove 26 is fixedly connected with the horizontal plate 13;

[0084] The upper end of the umbrella gear 22 is provided with the long strip-shaped stand 21, the front end of the stand 21 is provided with the push rod 23, the end of the push rod 23 is located in the cavity of the long strip-shaped drive ring 24, the side end of the drive ring 24 is fixedly provided with the movable rod 29, the end of the movable rod 29 away from the drive ring 24 is sealingly and slidingly arranged in the inner cavity of the hollow pipe 30, and the hollow pipe 30 is communicated with the inner cavity of the cylinder 31;

[0085] The cylinder 31 is arranged on the lower end of the lower outer ring 3, the upper end of the elastic sealing diaphragm 33 is fixedly provided with the extrusion column 32, the upper end of the extrusion column 32 is slidingly penetrated through the lower outer ring 3, and the outer wall of the arc-shaped baffle 401 on the lower inner ring 5 is provided with the contact plate 51 matched with the extrusion column 32;

[0086] The plate body 20 is fixedly arranged on the horizontal plate 13.

[0087] When the combination is in a suspended state, the lower inner ring 5 is not in contact with the upper end of the lower outer ring 3, when the seed crystal 42 is separated from the crucible cover 41, the contact plate 51 on the lower inner ring 5 is in contact with the extrusion column 31, the extrusion column 32 is driven to move downward, the elastic sealing diaphragm 33 is deformed and moves downward, the gas in the cylinder 31 is extruded, the movable rod 29 drives the drive ring 24 to move outward, the push rod 23 is driven to move, the umbrella gear 22 is rotated around the shaft, the tooth bar 27 is driven to move outward through the transmission gear 25, the elastic extrusion column 28 is in close contact with the outer wall of the support frame 1, the frictional resistance is increased, and the descending speed of the lower outer ring 3 is reduced, in the above process, due to the blocking of the elastic sealing diaphragm 33, the lower end of the lower inner ring 5 is always not in contact with the upper end of the lower outer ring 3, so that the blocking and slowing unit can automatically block and slow down the seed crystal 42 with different lengths to different degrees (that is, the blocking and slowing effect is proportional to the weight of the seed crystal 42), when the seed crystal 42 is removed, the elastic sealing diaphragm 33 drives the movable rod 29 to return to the original position, and finally the elastic extrusion column 28 is in contact with the support frame 1, under the action of the gravity of the weight 18, the lower outer ring 3 moves upward to return to the original position.

[0088] It should be noted that the length of the plate body 20 is greater than the radius of the umbrella gear 22, thereby forming a labor-saving lever, which is beneficial to further improve the blocking and slowing effect on the lower outer ring 3.

[0089] As a preferred embodiment in the present embodiment, a magnetic shielding structure is further included, which is used to shield the magnetic field between the first magnetic block 11 and the second magnetic block 12 when the separated seed crystal is carried on the lower inner ring 5, so that the weight of the seed crystal acts on the extrusion column 32.

[0090] Due to the magnetic repulsion, the weight of the seed crystal 42 cannot completely act on the extrusion column 32, and the damping effect on the lower outer ring 3 is weakened, so the magnetic shielding mechanism is set to solve this problem.

[0091] As a preferred embodiment in the present embodiment, as shown in Figure 3 and Figure 7 the magnetic shielding structure includes two arc-shaped rods 34 connected by a connecting rod and arranged circumferentially, and a pressing rod 40 arranged on the outer wall of the arc-shaped baffle 401 on the lower inner ring 5;

[0092] The lower end of one of the arc-shaped rods 34 is provided with an arc-shaped sliding block 38, which is slidingly arranged in an arc-shaped groove arranged on the upper end of the lower outer ring 3. The inner wall of the arc-shaped groove is connected with the arc-shaped sliding block 38 through a reset spring 39 with an arc-shaped structure. A plurality of magnetic shielding plates 37 are arranged on each of the two arc-shaped rods 34.

[0093] One of the arc-shaped rods 34 is provided with a block 35 with a driving slope 36, and the block 35 is located below the pressing rod 40.

[0094] When the seed crystal 42 is separated and falls to the upper and lower inner rings 5 and drives the lower inner ring 5 to move downward, the pressing rod 40 will contact and press the upper end driving slope 36 of the block 35, and make the arc-shaped rod 34 rotate circumferentially around the axis of the lower outer ring 3 and shield the first magnetic block 11 through the magnetic shielding plate 37. Finally, the pressing rod 40 will be separated from the driving slope 36. At this time, as the lower inner ring 5 continues to move downward, the weight of the seed crystal 42 will be basically completely borne on the two extrusion columns 32, thereby increasing the friction between the elastic extrusion column 28 and the support frame 1, enhancing the damping effect. After the seed crystal 42 is taken off, the arc-shaped rod 34 is automatically restored to the original position (the magnetic shielding plate 37 is removed from the blocking of the first magnetic block 11) through the elastic force of the reset spring 39.

[0095] It should be noted that the magnetic shielding plate 37 is a magnetic shielding material.

[0096] As a preferred embodiment in the present embodiment, a knocking strength self-changing unit is further included, which can automatically change the knocking strength of the impact ball 119 and the crucible cover 41 according to the needs of the knocking part during the knocking process.

[0097] As a preferred embodiment in the present embodiment, as shown in Figure 11 the knocking strength self-changing unit includes a first gradual change area L1, a constant area L2 and a second gradual change area L3 arranged in sequence on the driving bar 110.

[0098] The wave peaks in the first gradual change region L1 gradually increase in height from right to left;

[0099] The wave peaks and wave troughs in the constant region L2 remain unchanged, and the wave peak height of the constant region L2 is the highest wave peak height of the first gradual change region L1;

[0100] The wave peak height in the second gradual change region L3 gradually decreases;

[0101] The spacing between each wave peak and wave trough in the first gradual change region L1, the constant region L2 and the second gradual change region L3 is consistent, and the height of each wave trough in the first gradual change region L1, the constant region L2 and the second gradual change region L3 is consistent.

[0102] When the roller 116 moves on the first gradual change region L1, the impact strength of the L-shaped rod 115 of the roller 116 on the crucible cover gradually increases, and the gradually increasing impact strength can provide a gradual adaptation process for the bonding surface between the seed crystal and the crucible cover, thereby reducing the risk of stress concentration and breakage caused by sudden large impact; the impact in this stage is not strong, but has already begun to act on the bonding surface between the seed crystal and the crucible cover, which is helpful for subsequent separation;

[0103] When the roller 116 moves on the constant region L2, the impact strength of the L-shaped rod 115 of the roller 116 on the crucible cover remains unchanged, and the stable maximum impact strength is continuously applied, which can continuously act on the bonding surface between the seed crystal and the crucible cover, thereby accelerating the destruction and separation of the bonding surface; compared with the gradual increase in the first stage, the stable impact strength in this stage can more effectively promote the separation and improve the separation efficiency;

[0104] When the roller 116 moves on the second gradual change region L2, the impact strength of the L-shaped rod 115 of the roller 116 on the crucible cover gradually decreases, and when the seed crystal is about to be or has been separated from the crucible cover, reducing the impact strength can avoid causing damage to the seed crystal or the crucible cover that has been loosened due to excessive impact, and the gradually decreasing impact strength is helpful for stably ending the impact process and ensuring the smooth separation of the seed crystal.

[0105] The first gradual change region L1, the constant region L2 and the second gradual change region L3 can accelerate the stable separation of the seed crystal and the crucible cover without damaging the crucible cover and the seed crystal.

[0106] Finally, it should be noted that: the above only describes the preferred embodiments of the present application and is not used to limit the present application, although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent replacement for some technical features, and any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A combined seed crystal separation apparatus comprising a support frame (1) and a holder (101), characterized in that: The suspension unit is installed on the support frame (1) and used for bearing and suspending the combination of the crucible cover (41) and the seed crystal (42); the automatic knocking unit is installed on the support frame (101) and used for automatically knocking the upper end of the crucible cover (41). The suspension unit comprises an upper outer ring (2) and a lower outer ring (3) arranged on the support frame (1) in a top-to-bottom manner, and an upper inner ring (4) and a lower inner ring (5) arranged correspondingly to the upper outer ring (2) and the lower outer ring (3), respectively; the upper ends of the upper outer ring (2), the lower outer ring (3), the upper inner ring (4) and the lower inner ring (5) are relatively provided with arc-shaped baffles (401); the upper ends of the arc-shaped baffles (401) of the upper outer ring (2) and the lower outer ring (3) are fixed with limit blocks (6). The lower end of the upper inner ring (4) is provided with a second magnetic ring (10), and the upper end of the upper outer ring (2) is provided with a first magnetic ring (9); the opposite end magnetic poles of the first magnetic ring (9) and the second magnetic ring (10) are the same. The upper end of the lower outer ring (3) is circumferentially provided with a plurality of first magnetic blocks (11), and the lower end of the lower inner ring (5) is correspondingly provided with a plurality of second magnetic blocks (12); the opposite end magnetic poles of the plurality of first magnetic blocks (11) and the corresponding second magnetic blocks (12) are the same. The inner walls of the two arc-shaped baffles (401) on the upper outer ring (2) and the lower outer ring (3) are circumferentially provided with no less than two first limit magnets (7), and the inner walls of the two arc-shaped baffles (401) on the upper inner ring (4) and the lower inner ring (5) are circumferentially provided with no less than two second limit magnets (8); the plurality of second limit magnets (8) and the plurality of first limit magnets (7) are one-to-one corresponding and have the same opposite end magnetic poles. The automatic knocking unit comprises a mounting disc (102) installed on the support frame (101), an adjusting screw rod (105) threadedly connected to the support frame (101), a rotary motor (106) installed on the mounting disc (102), and a tooth ring (107). The inner cavity of the mounting disc (102) is circumferentially provided with a plurality of U-shaped plates (108); the plurality of U-shaped plates (108) are rotationally provided with reciprocating screw rods (111) thereon, and the reciprocating screw rods (111) are threadedly sleeved with ball nuts (114); the two side ends of the ball nuts (114) are fixed with side plates; one side plate is slidingly penetrated by a rod body (109) installed on the U-shaped plate (108), and the other side plate is slidingly penetrated by an L-shaped rod (115); the upper end of the L-shaped rod (115) is rotationally provided with a roller (116); the lower end of the L-shaped rod (115) is installed with an elastic impact ball (119); the L-shaped rod (115) is fixed with a mounting ring (118); and the mounting ring (118) and the side plate are connected through a compression spring (117). The U-shaped plate (108) is provided with a wave-shaped driving bar (110) above the reciprocating screw rod (111), and the two ends of the driving bar (110) are provided with horizontal plane rods (113) with upper ends, and the upper end surface of the plane rod (113) is located between the wave peak surface and the wave valley surface of the driving bar (110); The tooth ring (107) is rotationally arranged in the inner cavity of the mounting disc (102), and the tooth ring (107) is in gear connection with the gear on the output shaft of the rotary motor (106) and the rotating gear (112) arranged on one end of the reciprocating screw rod (111); The lower end of the adjusting screw rod (105) is rotationally connected with the upper end of the mounting disc (102), the upper end of the mounting disc (102) is connected with the telescopic rod (104) through the rotary bearing (103), and the telescopic rod (104) is arranged on the support (101); The lower end of the support (101) is slidingly arranged on the slide rail.

2. A combined seed separation apparatus according to claim 1, characterized in that An automatic adjusting unit is further included, which can automatically adapt to the suspension separation of the seed crystal (42) and the crucible cover (41) with different lengths.

3. A combined seed separation apparatus according to claim 2, characterized in that: The automatic adjusting unit includes two sliding sleeves (14) slidingly arranged on the support frame (1), two cross plates (13) arranged on the outer wall of the lower outer ring (3), and two pulley blocks (16) arranged on the upper end of the support frame (1), and the two sliding sleeves (14) are fixedly arranged at the ends of the corresponding cross plates (13); The upper end of each of the two cross plates (13) is connected with a pull rope (17), the two pull ropes (17) are arranged on the corresponding pulley blocks (16), one end of the pull rope (17) away from the cross plate (13) penetrates the support frame (1) and is connected with a weight (18), and a blocking ring (19) is fixedly arranged on each of the two pull ropes (17). Initially, under the action of the gravity of the weight (18), the blocking ring (19) is in contact with the support frame (1) to form a blockage.

4. A combined seed separation apparatus according to claim 3, characterized in that: A blocking and slowing unit is further included, which blocks and slows the downward movement of the lower outer ring (3) carrying the separated seed crystal.

5. A combined seed separation apparatus according to claim 4, characterized in that: The blocking and slowing unit includes a cylinder (31) internally provided with an elastic sealing diaphragm (33), an umbrella-shaped gear (22) rotationally arranged on a plate body (20) through a rotating shaft, and a toothed rod (27) slidingly arranged in a U-shaped groove (26); The toothed rod (27) is in gear connection with the umbrella-shaped gear (22) through a transmission gear (25) rotationally arranged on the plate body (20), an elastic extrusion column (28) is rotationally arranged on the end of the toothed rod (27) close to the sliding sleeve (14), the elastic extrusion column (28) is located in the inner cavity of the opening (15) provided on the sliding sleeve (14), and the U-shaped groove (26) is fixedly connected with the cross plate (13). The upper end of the bevel gear (22) is provided with a long strip-shaped vertical rod (21), and the front end of the vertical rod (21) is rotatably provided with a push rod (23), and the end of the push rod (23) is located in the cavity of a long strip-shaped drive ring (24), the side end of the drive ring (24) is fixed with a movable rod (29), and the end of the movable rod (29) away from the drive ring (24) is sealingly and slidingly arranged in the inner cavity of a hollow tube (30), and the hollow tube (30) is communicated with the inner cavity of a cylinder (31); The cylinder (31) is installed at the lower end of the lower outer ring (3), the upper end of the elastic sealing diaphragm (33) is fixed with a extrusion column (32), and the upper end of the extrusion column (32) slidingly penetrates the lower outer ring (3), and the outer wall of the arc-shaped baffle (401) on the lower inner ring (5) is provided with a contact plate (51) matched with the extrusion column (32); The plate body (20) is fixed on the cross plate (13).

6. A combined seed separation apparatus according to claim 5, characterized in that: Further comprising a magnetic shielding structure, when the separated seed crystal is carried on the lower inner ring (5), the magnetic shielding structure is used for shielding the magnetic field action between the first magnetic block (11) and the second magnetic block (12), so that the weight of the seed crystal acts on the extrusion column (32).

7. A combined seed separation apparatus according to claim 6, characterized in that: The magnetic shielding structure comprises two arc-shaped rods (34) connected by a connecting rod and circumferentially arranged, and a pressing rod (40) arranged on the outer wall of the arc-shaped baffle (401) on the lower inner ring (5); The lower end of one of the arc-shaped rods (34) is provided with an arc-shaped sliding block (38), and the arc-shaped sliding block (38) is slidingly arranged in an arc-shaped groove provided at the upper end of the lower outer ring (3), and the inner wall of the arc-shaped groove is connected with the arc-shaped sliding block (38) through an arc-shaped reset spring (39), and a plurality of magnetic shielding plates (37) are arranged on the two arc-shaped rods (34); One of the arc-shaped rods (34) is provided with a block (35) with a driving slope (36), and the block (35) is located below the pressing rod (40).

8. A combined seed separation apparatus according to claim 6, characterized in that: Further comprising a knocking strength self-changing unit, which can automatically change the knocking strength of the impact ball (119) and the crucible cover (41) during the knocking process according to the needs of the knocking part.

9. A combined seed separation apparatus according to claim 8, characterized in that: The knocking strength self-changing unit comprises a first gradual change area L1, a constant area L2 and a second gradual change area L3 arranged in sequence on the driving bar (110); The wave peaks in the first gradual change area L1 are continuously higher from right to left; The wave peaks and troughs in the constant area L2 remain unchanged, and the wave peak height of the constant area L2 is the highest wave peak height of the first gradual change area L1; The wave peak height in the second gradual change area L3 gradually decreases; The spacing between each wave peak and trough in the first gradual change area L1, the constant area L2 and the second gradual change area L3 is consistent, and the height of each trough in the first gradual change area L1, the constant area L2 and the second gradual change area L3 is consistent.

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