A temperature control method, device and electronic equipment

Abstract

The application provides a temperature control method and device and electronic equipment. The system comprises a refrigeration device and a circulating device. The refrigeration device comprises a compressor, a heat accumulator, an evaporator and a cooling device. The method comprises: collecting a first circulating temperature of an inlet end of a second heat exchange channel in the evaporator; adjusting a first opening degree of a first channel and a second opening degree of a second channel in a three-way valve according to the first circulating temperature, so that circulating liquid flowing out of an outlet end of the circulating device flows through the first channel and a second heat exchange channel in the heat accumulator according to a first proportion, and mixes with circulating liquid flowing through the second channel according to a second proportion, and then flows into the second heat exchange channel in the evaporator, so that the circulating liquid with the first proportion accumulates heat energy for the heat accumulator, and the heat energy is used for heating the circulating liquid according to a temperature rising instruction. In this way, the waiting time for temperature rising and falling can be reduced, the production efficiency can be improved, energy consumption can be reduced, the production cost of the equipment can be reduced, and the miniaturization of the equipment is facilitated.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of control, in particular to a temperature control method and device and electronic equipment. BACKGROUND

[0002] As an important equipment in the process of semiconductor integrated circuit manufacturing, the semiconductor temperature control device is required to provide the required temperature output for controlling the temperature of the etching device process cavity in the etching process of integrated circuit manufacturing. The semiconductor temperature control device accurately controls the temperature through the refrigeration and heating links in actual use. The etching device process cavity needs different temperatures in the whole process to meet the production process, and the temperature is generally switched periodically within-20℃ to 90℃. Therefore, the semiconductor temperature control device needs to switch different temperatures according to the process requirements, and the corresponding process production can be carried out only when the process cavity temperature reaches the target value. In the temperature rising and falling process, there will be a waiting time. The waiting time is relatively long when using the traditional temperature control device to switch from high temperature to low temperature or from low temperature to high temperature, which affects the production efficiency. SUMMARY

[0003] Therefore, the purpose of the present application is to provide a temperature control method and device and electronic equipment to solve the problem of long waiting time in temperature rising and falling of the existing temperature control equipment, which affects the production efficiency.

[0004] The embodiment of the present application provides a temperature control method, which is applied to a temperature control system; the system comprises a refrigeration device and a circulating device; the refrigeration device comprises a compressor, a heat accumulator, an evaporator and a cooling device; the outlet end of a first heat exchange channel in the evaporator is connected to the inlet end of the compressor; the outlet end of the compressor comprises two paths, the first path is connected to the inlet end of the first heat exchange channel in the heat accumulator, and the second path is connected to the inlet end of the first heat exchange channel in the evaporator and the inlet end of the cooling device together; the outlet end of the cooling device is connected to the inlet end of the first heat exchange channel in the evaporator; the outlet end of a second heat exchange channel in the evaporator is connected to the inlet end of the circulating device, a three-way valve is installed at the outlet end of the circulating device, the first channel of the three-way valve is connected to the inlet end of the second heat exchange channel in the heat accumulator, and the second channel is connected to the inlet end of the second heat exchange channel in the evaporator together with the outlet end of the second heat exchange channel in the heat accumulator; the method comprises the following steps:

[0005] Collecting the first circulating temperature of the inlet end of the second heat exchange channel in the evaporator;

[0006] According to the first circulating temperature, the first opening degree of the first channel and the second opening degree of the second channel in the three-way valve are adjusted, so that the circulating fluid flowing out of the outlet end of the circulating device flows through the first channel and the second heat exchange channel in the heat accumulator according to a first proportion, and mixes with the circulating fluid flowing through the second channel according to a second proportion, and then flows into the second heat exchange channel in the evaporator, so as to accumulate heat energy in the heat accumulator by the circulating fluid according to the first proportion; wherein the heat energy stored in the heat accumulator is used to heat the circulating fluid according to the temperature rising instruction; and the load device is temperature controlled by the circulating fluid.

[0007] Further, according to the first circulating temperature, the first opening degree of the first channel and the second opening degree of the second channel in the three-way valve are adjusted, including:

[0008] When the first circulating temperature is greater than a preset temperature threshold, the first opening degree of the first channel is increased and / or the second opening degree of the second channel is decreased.

[0009] Further, the method further includes:

[0010] When it is determined that the heat accumulator can no longer accumulate heat energy by the circulating fluid, the first channel is closed and the second channel is opened.

[0011] Further, the heat accumulator can no longer accumulate heat energy by the circulating fluid is determined by:

[0012] The second circulating temperature of the outlet end of the circulating device and the third circulating temperature of the outlet end of the second heat exchange channel in the heat accumulator are collected;

[0013] The temperature difference between the second circulating temperature and the third circulating temperature is determined;

[0014] When the temperature difference is less than a preset threshold, it is determined that the heat accumulator can no longer accumulate heat energy by the circulating fluid.

[0015] Further, the cooling device comprises a condenser and a sub-cooling reservoir; an outlet end of the first heat exchange channel in the evaporator is connected to an inlet end of the compressor; an outlet end of the compressor comprises two paths, a first path is connected to an inlet end of the first heat exchange channel in the heat accumulator through a first valve; a second path is connected to an inlet end of the second heat exchange channel in the condenser through a second valve and an outlet end of the first heat exchange channel in the heat accumulator through a third valve; an outlet end of the second heat exchange channel in the condenser is connected to an inlet end of the sub-cooling reservoir, an inlet end of an external cooling pipeline of the sub-cooling reservoir through a fifth valve, and an inlet end of the first heat exchange channel in the evaporator through a sixth valve; an outlet end of the sub-cooling reservoir is connected to an inlet end of the first heat exchange channel in the evaporator through a fourth valve; an outlet end of the external cooling pipeline is connected to an inlet end of the compressor; the method further comprises:

[0016] According to the received temperature rising instruction, the first valve, the fourth valve, the second channel of the three-way valve and the sixth valve are closed, and the second valve, the third valve and the first channel of the three-way valve are opened.

[0017] When it is determined that the temperature of the circulating liquid is increased to satisfy a preset condition, the first channel of the three-way valve is closed and the second channel of the three-way valve is opened; wherein the preset condition refers to that a temperature difference between a third circulating temperature of the outlet end of the second heat exchange channel in the heat accumulator and a second circulating temperature of the outlet end of the circulating device is less than a preset threshold.

[0018] Further, the method further comprises:

[0019] According to the received temperature lowering instruction, the second valve, the third valve, the first channel of the three-way valve and the sixth valve are closed, and the first valve, the second channel of the three-way valve and the fourth valve are opened.

[0020] Further, the method further comprises:

[0021] After the temperature control system is started, a temperature control preparation stage is entered and lasts for a predetermined time length, so that the heat accumulator stores heating energy, and the sub-cooling reservoir performs sub-cooling treatment on the refrigerant and stores the refrigerant.

[0022] In the temperature control preparation stage, the second valve, the third valve, the first channel of the three-way valve and the fourth valve are closed, and the first valve and the second channel of the three-way valve are opened; the opening degree of the sixth valve is adjusted according to a fourth circulating temperature of the inlet end of the circulating device.

[0023] Further, the method further comprises:

[0024] collecting a first refrigeration temperature of an inlet end of the compressor and a first refrigeration pressure of an outlet end of the first heat exchange channel in the evaporator;

[0025] determining a superheat difference between an actual superheat value and a preset superheat value according to the first refrigeration temperature and the first refrigeration pressure;

[0026] adjusting the opening degree of the fifth valve according to the superheat difference.

[0027] The embodiment of the present application also provides a temperature control device, which is applied to a temperature control system; the system comprises a refrigeration device and a circulating device; the refrigeration device comprises a compressor, a heat accumulator, an evaporator and a cooling device; an outlet end of a first heat exchange channel in the evaporator is connected to an inlet end of the compressor; an outlet end of the compressor comprises two paths, a first path is connected to an inlet end of a first heat exchange channel in the heat accumulator, and a second path is connected to an outlet end of the first heat exchange channel in the heat accumulator, an inlet end of the cooling device and an inlet end of the first heat exchange channel in the evaporator; an outlet end of the cooling device is connected to the inlet end of the first heat exchange channel in the evaporator; an outlet end of a second heat exchange channel in the evaporator is connected to an inlet end of the circulating device, an outlet end of the circulating device is provided with a three-way valve, a first channel of the three-way valve is connected to an inlet end of a second heat exchange channel in the heat accumulator, and a second channel of the three-way valve is connected to an outlet end of the second heat exchange channel in the heat accumulator, an inlet end of the second heat exchange channel in the evaporator; the device comprises:

[0028] a collecting module, configured to collect a first circulating temperature of an inlet end of the second heat exchange channel in the evaporator;

[0029] an adjusting module, configured to adjust a first opening degree of the first channel and a second opening degree of the second channel in the three-way valve according to the first circulating temperature, so that circulating liquid flowing out of the outlet end of the circulating device flows through the first channel and the second heat exchange channel in the heat accumulator in a first proportion, and then mixes with circulating liquid flowing through the second channel in a second proportion, and then flows into the second heat exchange channel in the evaporator, so that the circulating liquid in the first proportion is used to accumulate heat energy for the heat accumulator; the heat energy stored in the heat accumulator is used to heat the circulating liquid according to a temperature rising instruction; and the circulating liquid is used to control the temperature of a load device.

[0030] The embodiment of the present application also provides an electronic device, comprising a processor, a memory and a bus, the memory stores machine readable instructions executable by the processor, when the electronic device is running, the processor and the memory communicate through the bus, and the machine readable instructions are executed by the processor to perform the steps of the temperature control method.

[0031] The embodiment of the present application further provides a computer readable storage medium, which stores a computer program, and the computer program is run by a processor to execute steps of the temperature control method.

[0032] The temperature control method, device and electronic equipment provided by the embodiment of the present application can store heat energy in the heat accumulator, heat the circulating liquid according to the temperature rising instruction to improve the temperature rising speed, and cool the refrigerant by the cooling device to improve the temperature falling speed, so that the waiting time for temperature rising and falling is reduced, the production efficiency is improved, energy is saved, consumption is reduced, the production cost of the equipment is reduced, and the miniaturization of the equipment is facilitated. In addition, the circulating liquid flowing out of the outlet end of the circulating device flows through the second heat exchange channel to accumulate heat energy in the heat accumulator by adjusting the opening degree of the three-way valve, so that energy is recycled, energy is further saved, and consumption is reduced.

[0033] In order to make the above objectives, characteristics and advantages of the present application more apparent, clear and easy to understand, the following preferred embodiments are specifically described below, and the accompanying drawings are referred to, and the detailed description is as follows. BRIEF DESCRIPTION OF DRAWINGS

[0034] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation to the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0035] Figure 1 A flow chart of a temperature control method provided by the embodiment of the present application is shown;

[0036] Figure 2 A structural schematic diagram of a temperature control system provided by the embodiment of the present application is shown;

[0037] Figure 3 A structural schematic diagram of a temperature control device provided by the embodiment of the present application is shown;

[0038] Figure 4 A structural schematic diagram of an electronic equipment provided by the embodiment of the present application is shown. DETAILED DESCRIPTION

[0039] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. Based on the embodiments of this application, every other embodiment obtained by those skilled in the art without inventive effort falls within the scope of protection of this application.

[0040] Research has shown that semiconductor temperature control devices, as crucial equipment in the semiconductor integrated circuit manufacturing process, are required to provide the necessary temperature output to control the temperature of the etching equipment's process chamber during the etching process. In practical use, semiconductor temperature control devices precisely control the temperature through cooling and heating processes. The etching equipment's process chamber requires different temperatures throughout the entire process to meet production needs, typically switching periodically between -20℃ and 90℃. This necessitates the semiconductor temperature control device switching temperatures according to process requirements. Production can only proceed when the process chamber temperature reaches the target value. This involves waiting time during the heating and cooling processes. Traditional temperature control devices experience long waiting times when switching from high to low temperatures or vice versa, impacting production efficiency.

[0041] Based on this, the present application provides a temperature control method to solve the problem that the existing temperature control equipment has a long waiting time for heating and cooling, which affects production efficiency.

[0042] Please see Figure 1 and Figure 2 , Figure 1 A flowchart illustrating a temperature control method provided in an embodiment of this application; Figure 2 This is a schematic diagram of a temperature control system provided in an embodiment of this application. Figure 1 and Figure 2 As shown in the embodiments of this application, the temperature control method is applied to a temperature control system, specifically a controller in the temperature control system. Figure 2 (Not shown in the image). The temperature control system also includes a refrigeration unit 100 and a circulation unit 200; the refrigeration unit 100 includes a compressor 112, a heat accumulator 111, an evaporator 115, and a cooling device 117. The controller, through communicative connection with each component in the temperature control system, can obtain the current operating parameters of each component and send control commands to each component to adjust the operating parameters of each component.

[0043] The refrigeration device 100 contains refrigerant (cooling medium), and the temperature of the refrigerant can be controlled by controlling the refrigerant to flow through each component in the refrigeration device 100 to rise and fall in temperature. The circulating device 200 contains circulating liquid, and the circulating liquid continuously circulates in the circulating device 200 to rise and fall in temperature, so as to control the load equipment 300. By controlling the heat exchange between the refrigerant in the refrigeration device 100 and the circulating liquid in the circulating device 200, the temperature of the circulating liquid can be adjusted, and the temperature of the load equipment 300 can be controlled.

[0044] Specifically, the outlet end of the first heat exchange channel in the evaporator 115 is connected to the inlet end of the compressor 112; the outlet end of the compressor 112 includes two paths, the first path is connected to the inlet end of the first heat exchange channel in the heat accumulator 111, and the second path is connected to the inlet end of the cooling device 117 and the inlet end of the first heat exchange channel in the evaporator 115 together with the outlet end of the first heat exchange channel in the heat accumulator 111; the outlet end of the cooling device 117 is connected to the inlet end of the first heat exchange channel in the evaporator 115. The compressor 112 sucks the low-temperature and low-pressure gaseous refrigerant in the evaporator 115 by mechanical energy, and then compresses it into high-temperature and high-pressure gaseous refrigerant. This process increases the pressure and temperature of the refrigerant, so that it can effectively release heat.

[0045] The outlet end of the second heat exchange channel in the evaporator 115 is connected to the inlet end of the circulating device 200, the outlet end of the circulating device 200 is provided with a three-way valve 201, the first channel (i.e., channel 1-2) of the three-way valve 201 is connected to the inlet end of the second heat exchange channel in the heat accumulator 111, and the second channel (i.e., channel 1-3) is connected to the inlet end of the second heat exchange channel in the evaporator 115 together with the outlet end of the second heat exchange channel in the heat accumulator 111.

[0046] The temperature control method provided by the embodiment of the present application specifically includes:

[0047] S101, collecting the first circulating temperature of the inlet end of the second heat exchange channel in the evaporator 115.

[0048] In this step, the first circulating temperature T202 of the circulating liquid can be collected by the temperature sensor 202 installed at the inlet end of the second heat exchange channel in the evaporator 115, that is, the temperature of the circulating liquid entering the second heat exchange channel of the evaporator 115.

[0049] S102, adjust the first opening degree of the first channel and the second opening degree of the second channel in the three-way valve 201 according to the first circulating temperature, so that the circulating fluid flowing out of the outlet end of the circulating device 200 flows through the first channel and the second heat exchange channel in the heat accumulator 111 in a first proportion, and mixes with the circulating fluid flowing through the second channel in a second proportion, and then flows into the second heat exchange channel in the evaporator 115, so as to accumulate heating energy in the heat accumulator 111 by the circulating fluid in the first proportion; wherein the heating energy stored in the heat accumulator 111 is used to heat the circulating fluid according to the temperature rising instruction; and the load device 300 is temperature controlled by the circulating fluid.

[0050] It should be noted that the process cavity may generate heat load when running at high temperature, so that the outlet of the load device 300 (i.e. the outlet end of the circulating device 200) flows out high-temperature circulating fluid. Therefore, in this step, the opening degree of the three-way valve 201 can be adjusted according to the temperature set value and the temperature real-time value T202, so that a part of the circulating fluid enters the heat accumulator 111 for heat exchange and cooling through the 1-2 channel, and then mixes with the circulating fluid flowing through the 1-3 channel and flows into the second heat exchange channel in the evaporator 115. Wherein the first opening degree and the second opening degree can be determined according to the temperature set value and the temperature real-time value T202 using existing PID control algorithm; accordingly, the first proportion and the second proportion correspond to the first opening degree and the second opening degree of the three-way valve 201.

[0051] Specifically, when the first circulating temperature is greater than a preset temperature threshold, the first opening degree of the first channel is increased and / or the second opening degree of the second channel is decreased.

[0052] The opening degree of the valve refers to the opening degree of the valve in the pipeline system, which is usually expressed by percentage, i.e. the opening degree of the valve from completely closed to completely opened, which is usually expressed by 0% (completely closed) to 100% (completely opened). By increasing the first opening degree of the first channel and / or decreasing the second opening degree of the second channel, more circulating fluid can enter the second heat exchange channel in the heat accumulator 111 through the 1-2 channel, thereby more effectively accumulating heating energy in the heat accumulator 111.

[0053] In this way, the part of the circulating fluid entering the second heat exchange channel in the heat accumulator 111 through the 1-2 channel can heat the heat storage medium in the heat accumulator 111, thereby accumulating heating energy in the heat accumulator 111. In this way, the high-temperature circulating fluid caused by the heat load of the load device 300 is energy recovered, further realizing energy saving and consumption reduction.

[0054] The heating energy stored in the heat accumulator 111 can be used to heat the circulating liquid according to the subsequent temperature rising instruction when the subsequent temperature rising instruction is received. It is worth noting that the existing temperature control device can only be heated by the hot gas discharged by the compressor and the heater device, and the temperature rising speed is slow. If the temperature rising speed is increased, the installed power of each component must be increased, which leads to the problems of high energy consumption, high cost and being not conducive to the miniaturization of the device. In the embodiment of the present application, the heat accumulator 111 is additionally arranged, and the heat storage medium in the heat accumulator 111 can first heat the circulating liquid once. The circulating liquid heated once by the heat accumulator 111 enters the evaporator 115 for secondary heating, so that the circulating liquid continuously absorbs heat to improve the temperature, thereby improving the temperature rising speed of the circulating liquid.

[0055] Further, the temperature control method further comprises: when it is determined that the heat accumulator 111 can no longer accumulate heating energy through the circulating liquid, closing the first channel and opening the second channel.

[0056] Here, when it is determined that the circulating liquid flowing through the heat accumulator 111 can no longer accumulate heating energy for the heat accumulator 111, the first channel is closed and the second channel is opened, so that the circulating liquid directly enters the evaporator 115, avoiding the circulating liquid being heated again by the heat accumulator 111 in the reverse direction, which leads to unnecessary energy consumption. The determination method can include setting a preset accumulation time and comparing the temperature.

[0057] In a possible implementation, it can be determined that the heat accumulator 111 can no longer accumulate heating energy through the circulating liquid by the following method:

[0058] Step 1, collecting the second circulating temperature of the outlet end of the circulating device 200 and the third circulating temperature of the outlet end of the second heat exchange channel in the heat accumulator 111.

[0059] Step 2, determining the temperature difference between the second circulating temperature and the third circulating temperature.

[0060] Step 3, when the temperature difference is less than a preset threshold, it is determined that the heat accumulator 111 can no longer accumulate heating energy through the circulating liquid.

[0061] Here, the second circulating temperature T204 of the circulating liquid can be collected by the temperature sensor 204 installed at the outlet end of the circulating device 200, and the third circulating temperature T203 of the circulating liquid can be collected by the temperature sensor 203 installed at the outlet end of the second heat exchange channel in the heat accumulator 111; the temperature difference TC=T204-T203 is compared with the preset threshold TD; when TC≥TD, it is determined that the heat accumulator 111 can recover heat from the circulating liquid, and when TC<TD, it is determined that the heat accumulator 111 can no longer accumulate heating energy through the circulating liquid. Here, TD represents a preset threshold, which is an empirical value, such as 10-20℃, and can be set according to different temperature control systems, which is not limited in the present application.

[0062] Further, referring back to Figure 2 The cooling device 117 includes a condenser 113 and a supercooling liquid reservoir 114. If the existing temperature control device wants to improve the cooling speed, the compressor 112 power needs to be increased, at which time the condenser 113 and the evaporator 115 also need to be increased accordingly, at which time the device energy consumption and the size are increased, which will increase the cost of the device. In the embodiment of the present application, by adding the supercooling liquid reservoir 114, the refrigerant cooled by the condenser 113 can be supercooled, and the cooling capacity and the cooling speed can be improved by further cooling the refrigerant, thereby avoiding energy waste.

[0063] The outlet end of the first heat exchange channel in the evaporator 115 is connected to the inlet end of the compressor 112; the outlet end of the compressor 112 includes two paths, the first path is connected to the inlet end of the first heat exchange channel in the heat accumulator 111 through the first valve 101; the second path is connected to the inlet end of the second heat exchange channel in the condenser 113 through the second valve 102 and the outlet end of the first heat exchange channel in the heat accumulator 111, and is connected to the inlet end of the first heat exchange channel in the evaporator 115 through the third valve 103 and the outlet end of the first heat exchange channel in the heat accumulator 111; the outlet end of the second heat exchange channel in the condenser 113 is respectively connected to the inlet end of the supercooling liquid reservoir 114, the inlet end of the external cooling pipeline of the supercooling liquid reservoir 114 through the fifth valve 105, and the inlet end of the first heat exchange channel in the evaporator 115 through the sixth valve 106; the outlet end of the supercooling liquid reservoir 114 is connected to the inlet end of the first heat exchange channel in the evaporator 115 through the fourth valve 104; and the outlet end of the external cooling pipeline is connected to the inlet end of the compressor 112.

[0064] The external cooling pipeline is arranged outside the liquid storage space in the subcooling liquid accumulator 114, and is used to cool the refrigerant stored in the liquid storage space. In this way, the temperature of the refrigerant in the liquid storage space can be further reduced and the refrigeration speed can be increased by cooling the liquid storage space in the subcooling liquid accumulator 114 through the external cooling pipeline, and indirectly, the cooling speed of the circulating liquid can be increased.

[0065] Further, the circulating device 200 comprises a water tank 206, a water pump 207 and a heater 208.

[0066] The inlet end of the water tank 206 serves as the inlet end of the circulating device 200, the outlet end of the water tank 206 is connected to the inlet end of the water pump 207, the outlet end of the water pump 207 is connected to the inlet end of the heater 208, the outlet end of the heater 208 is connected to the corresponding liquid inlet of the load device, and the corresponding liquid outlet of the load device serves as the outlet end of the circulating device 200.

[0067] Under the power of the water pump 207, the circulating liquid is extracted from the water tank 206 and sucked into the water pump 207, and then is discharged from the water pump 207 to the heater 208. The circulating liquid at the outlet of the heater 208 enters the corresponding position of the load device and exchanges heat with the load device. Then, the circulating liquid returns to the water tank 206 or returns to the water tank 206 through the second heat exchange channel of the heat accumulator 111.

[0068] Here, the temperature T205 of the circulating liquid at the inlet end of the water tank 206 can be collected by the temperature sensor 205, and the temperature T209 of the circulating liquid at the corresponding liquid inlet of the load device can be collected by the temperature sensor 209. By comparing T205 and T209, the heater 208 can be controlled to heat the circulating liquid.

[0069] Further, the temperature control method further comprises:

[0070] Step a1, according to the received temperature rising instruction, closing the first valve 101, the fourth valve 104, the second channel of the three-way valve 201 and the sixth valve 106, and opening the second valve 102, the third valve 103 and the first channel of the three-way valve 201.

[0071] When the load device needs high temperature, the temperature control system needs to operate in the temperature rising mode, and at this time, a temperature rising instruction is generated. In the temperature rising instruction, the target value of temperature rising can be set (which can be the temperature target value of the circulating liquid at the corresponding liquid inlet of the load device, i.e. Figure 1 the temperature T209 collected by the temperature sensor 209).

[0072] At this time, the temperature control device is in the heating mode, valves 101, 104, 106 are closed, valves 102, 103 are opened, the three-way valve 201 is in the full-through state of the first channel 1-2 and the second channel 1-3 is closed. The circulating liquid returned from the outlet end of the circulating device 200 enters the second heat exchange channel of the heat accumulator 111 through the valve 201, and the circulating liquid exchanges heat with the heat storage medium in the heat accumulator 111, and the heat storage medium performs the first temperature rising on the circulating liquid.

[0073] The circulating liquid that has been heated once by the heat accumulator 111 enters the second heat exchange channel of the evaporator 115, and the hot gas (high-temperature gaseous refrigerant) discharged by the compressor 112 enters the first heat exchange channel of the evaporator 115 through the valve 103, and the circulating liquid exchanges heat with the hot gas in the evaporator 115, and the hot gas flowing through one side of the evaporator 115 performs the second temperature rising on the circulating liquid. In this way, the circulating liquid continuously absorbs heat through continuous circulation, and the temperature continuously rises.

[0074] Step a2, when it is determined that the temperature of the circulating liquid rises to meet the preset condition, the first channel of the three-way valve 201 is closed, and the second channel of the three-way valve 201 is opened.

[0075] Here, the preset condition refers to that as the heating energy stored in the heat accumulator 111 is released, the temperature of the circulating liquid rises, until the heat accumulator 111 can no longer effectively heat the circulating liquid.

[0076] More specifically, the preset condition is that the temperature difference between the third circulating temperature at the outlet end of the second heat exchange channel of the heat accumulator 111 and the second circulating temperature at the outlet end of the circulating device 200 is less than a preset threshold value. The temperature difference TA=T203-T204, and it is obvious that TA will gradually decrease as the heat of the heat storage medium is released; when TA≤TB, it is considered that the heat of the heat storage medium in the heat accumulator 111 is basically released. Here, TB represents the preset threshold value, which is an empirical value, such as 2-5℃, and can be set according to different temperature control systems, which is not limited in the present application.

[0077] At this time, the channel 1-3 is fully open, and the channel 1-2 is closed, so that the circulating liquid directly enters the evaporator 115 to exchange heat with the high-temperature hot gas discharged by the compressor 112, that is, the first temperature rising process of the circulating liquid by the heat accumulator 111 is cut off.

[0078] It should be noted that when the temperature rises to the target value set by the heating instruction, the heating process is completed. Correspondingly, the temperature control system enters the working mode, and at this time the system only needs a small energy consumption to maintain the current temperature. For example, the system can adjust the valve opening degree and the power of each component according to the target value and the actual detected temperature value by using the existing control algorithm such as PID, so that the system runs in a stable state.

[0079] Further, the temperature control method further comprises:

[0080] Step b, according to the received cooling instruction, closing the second valve 102, the third valve 103, the first channel of the three-way valve 201 and the sixth valve 106, and opening the first valve 101, the second channel of the three-way valve 201 and the fourth valve 104.

[0081] When the load device 300 needs low temperature, the temperature control system needs to operate in cooling mode, at this time, a cooling instruction is generated, and the target value of cooling can be set in the cooling instruction (which can be the temperature target value of the circulating liquid at the liquid inlet of the load device 300, that is, the temperature T209 collected by the temperature sensor 209 in the middle). Figure 1

[0082] At this time, the valves 102, 103 and 106 are closed, the valves 101 and 104 are opened, the channels 1-3 of the three-way valve 201 are all open, and the channel 1-2 is closed. The refrigerant stored in the subcooler and subjected to subcooling treatment enters the evaporator 115 through the valve 104 and enters the first heat exchange channel. At this time, the high-temperature circulating liquid of the circulating system flows through the second heat exchange channel of the evaporator 115 through the channel 1-3 of the three-way valve 201, and the subcooled refrigerant is gasified in the evaporator 115 to absorb heat and rapidly cool the circulating liquid.

[0083] At the same time of cooling, the hot gas discharged by the compressor 112 enters the first heat exchange channel of the heat accumulator 111 through the valve 101 and exchanges heat with the heat storage medium to store heat for the next heating. At this time, the temperature of the heat storage medium increases, and the refrigerant gas also cools down once. After being cooled down twice in the condenser 113, it enters the subcooled liquid accumulator 114 for subcooling treatment. Here, the subcooling degree of the refrigerant is also indirectly improved by heat exchange with the heat storage medium in the heat accumulator 111, the refrigeration capacity is improved, energy waste is avoided, and the energy saving effect is achieved.

[0084] It should be noted that when the temperature decreases to the target value set in the cooling instruction, the cooling process ends. Correspondingly, the temperature control system enters the working mode, at this time, the system only needs small energy consumption to maintain the current temperature. For example, the system can adjust the valve opening degree and the power of each component according to the target value and the actual detection temperature value by using the existing control algorithm such as PID to make the system run in a stable state.

[0085] Further, the temperature control method further comprises:

[0086] Step c, after the temperature control system is started, entering a temperature control preparation stage and lasting for a predetermined time length, so that the heat accumulator 111 stores heat storage energy, and the subcooled liquid accumulator 114 performs subcooling treatment on the refrigerant and stores it.

[0087] ​In this way, after running for a predetermined length of time, the heat accumulator 111 and the supercooling accumulator 114 store sufficient heating energy and cooling energy, and the system can enter the temperature rising and falling mode for the load device. The predetermined length of time can be set according to the energy storage capacity of the heat accumulator 111 and the supercooling accumulator 114, and the present application does not make any limitation in this regard.

[0088] In the temperature control preparation stage, the second valve 102, the third valve 103, the first channel of the three-way valve 201 and the fourth valve 104 are closed, the first valve 101 and the second channel of the three-way valve 201 are opened, and the opening degree of the sixth valve 106 is adjusted according to the fourth circulating temperature at the inlet end of the circulating device 200.

[0089] In the temperature control preparation stage, the temperature control system has been started, and the compressor 112 and the water pump 207 are running. At this time, the system is generally in an idle state. The default temperature T209 can be set as an initial value of 20℃, and the valves 102 and 104 are in a closed state. The channels 1-3 of the three-way valve 201 are all open, and the channel 1-2 is closed.

[0090] At this time, the hot gas discharged by the compressor 112 enters the heat accumulator 111 through the valve 101 to warm the heat storage medium. The initial temperature of the heat storage medium is equivalent to the ambient temperature, while the temperature of the hot gas discharged by the compressor 112 is generally 80-90℃. The high-temperature hot gas is heat-exchanged in the heat accumulator 111, and the temperature of the heat storage medium is increased while the hot gas is cooled down for the first time. The hot gas cooled down for the first time is cooled down for the second time in the condenser 113. The refrigerant cooled down for the second time in the condenser 113 is liquefied after the supercooling treatment in the supercooling accumulator 114 and is stored in the supercooling accumulator 114 in a large amount.

[0091] Here, the fourth circulating temperature T205, i.e. the actual temperature value at the inlet of the water tank 206, can be collected by the temperature sensor 205 installed at the inlet end of the circulating device 200. Then, the opening degree of the sixth valve 106 is adjusted according to the temperature difference between T205 and the target value of T209, so as to maintain the stability of the system.

[0092] Further, the temperature control method further comprises:

[0093] The first refrigeration temperature at the inlet end of the compressor and the first refrigeration pressure at the outlet end of the first heat exchange channel in the evaporator are collected. The superheat difference value between the actual superheat value and the preset superheat value is determined according to the first refrigeration temperature and the first refrigeration pressure. The opening degree of the fifth valve is adjusted according to the superheat difference value.

[0094] In practical implementation, the first refrigeration temperature T109 at the inlet end of the compressor 112 can be collected by the temperature sensor 109, and the first refrigeration pressure P110 at the outlet end of the first heat exchange channel in the evaporator 115 can be collected by the pressure sensor 110.

[0095] Based on the first refrigeration pressure P110 at the outlet of evaporator 115, the saturation temperature of the refrigerant (i.e., the temperature at which the refrigerant completely evaporates under this pressure) is found, and then the actual superheat value is obtained from the refrigerant saturation temperature and the second refrigeration temperature. In this embodiment, the actual superheat value = the first refrigeration temperature (T109) at the inlet of compressor 112 - the refrigerant saturation temperature. Finally, the deviation between the actual superheat value and the preset superheat value is determined and used as the input to the control algorithm.

[0096] The control algorithm determines the opening degree of the fifth valve 105 based on the superheat difference. For example, when the superheat difference is too large (the actual subcooling value is too high), the opening degree of the fifth valve 105 can be increased to remove the heat of the refrigerant in the subcooled liquid receiver 114, thereby reducing the superheat and ensuring the stable operation of the system.

[0097] This application provides a temperature control method in two ways. First, the heat accumulator stores heating energy, and the circulating liquid can be heated according to a heating command to increase the heating rate. Second, the cooling equipment cools the refrigerant to increase the cooling rate. This reduces heating and cooling waiting time without increasing the power of the compressor, condenser, and evaporator, thereby improving production efficiency, saving energy, reducing equipment production costs, and facilitating equipment miniaturization. Third, by adjusting the opening of the three-way valve, the circulating liquid flowing out of the outlet of the circulation device flows through the second heat exchange channel to accumulate heating energy in the heat accumulator, thus achieving energy recovery and further saving energy.

[0098] Please see Figure 3 , Figure 3 This is a schematic diagram of the structure of a temperature control device provided in an embodiment of this application. Figure 3As shown in the above-mentioned method embodiments, the temperature control device provided by the embodiments of the present application is applied to a temperature control system, and can be specifically a controller in the temperature control system. The refrigeration device comprises a compressor, a heat accumulator, an evaporator and a cooling device. An outlet end of a first heat exchange channel in the evaporator is connected to an inlet end of the compressor. An outlet end of the compressor comprises two paths. A first path is connected to an inlet end of a first heat exchange channel in the heat accumulator, and a second path is connected to an inlet end of the cooling device and an inlet end of a first heat exchange channel in the evaporator together with an outlet end of the first heat exchange channel in the heat accumulator. An outlet end of the cooling device is connected to an inlet end of the first heat exchange channel in the evaporator. An outlet end of a second heat exchange channel in the evaporator is connected to an inlet end of the circulating device. A three-way valve is installed at an outlet end of the circulating device. A first channel of the three-way valve is connected to an inlet end of a second heat exchange channel in the heat accumulator, and a second channel of the three-way valve is connected to an inlet end of the second heat exchange channel in the evaporator together with an outlet end of the second heat exchange channel in the heat accumulator. The device 300 comprises:

[0099] The collecting module 310 is configured to collect a first circulating temperature of the inlet end of the second heat exchange channel in the evaporator.

[0100] The adjusting module 320 is configured to adjust a first opening degree of the first channel and a second opening degree of the second channel of the three-way valve according to the first circulating temperature, so that circulating liquid flowing out of the outlet end of the circulating device flows through the first channel and the second heat exchange channel in the heat accumulator in a first proportion, and then mixes with circulating liquid flowing through the second channel in a second proportion and flows into the second heat exchange channel in the evaporator, so that the circulating liquid in the first proportion is used to accumulate heat energy for the heat accumulator. The heat energy stored in the heat accumulator is used to heat the circulating liquid according to a temperature rising instruction, and the temperature of the load device is controlled by the circulating liquid.

[0101] Please refer to Figure 4 , Figure 4 A structural schematic diagram of an electronic device provided by the embodiments of the present application is shown in FIG. 4. Figure 4 As shown in FIG. 4, the electronic device 400 comprises a processor 410, a memory 420 and a bus 430.

[0102] The memory 420 stores machine readable instructions executable by the processor 410. When the electronic device 400 is running, the processor 410 communicates with the memory 420 through the bus 430. When the machine readable instructions are executed by the processor 410, the steps of the temperature control method in the method embodiments shown in the above-mentioned method embodiments can be executed. The specific implementation can be referred to the method embodiments, which will not be described here again. Figure 1

[0103] ​The embodiment of the present application further provides a computer readable storage medium, and the computer readable storage medium stores a computer program. When the computer program is run by a processor, the computer program can execute the method as described above. Figure 1 The steps of the temperature control method in the method embodiment are not repeated here.

[0104] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working process of the system, device and unit described above can refer to the corresponding process in the foregoing method embodiments, and will not be repeated here.

[0105] In several embodiments provided in the present application, it should be understood that the disclosed system, device and method can be implemented by other ways. The device embodiments described above are only schematic, for example, the division of the units is only a logical function division, and there can be another division way in actual implementation, and for example, a plurality of units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the coupling or direct coupling or communication connection between the units shown or discussed can be indirect coupling or communication connection through some communication interfaces, devices or units, and can be electrical, mechanical or other forms.

[0106] The units described as separate components can or can not be physically separate, and the components shown as units can or can not be physical units, that is, they can be located in one place, or can be distributed on a plurality of network units. According to actual needs, part or all of the units can be selected to achieve the purpose of the embodiment scheme.

[0107] In addition, each functional unit in each embodiment of the present application can be integrated in one processing unit, or each unit can exist physically, or two or more units can be integrated in one unit.

[0108] If the functions are realized in the form of software function units and sold or used as independent products, they can be stored in a nonvolatile computer readable storage medium executable by a processor. Based on this understanding, the technical solutions of the present application essentially or the parts of the prior art that make contributions or parts of the technical solutions can be embodied in the form of software products. The computer software product is stored in a storage medium and includes a plurality of instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the method described in the embodiments of the present application. The aforementioned storage medium includes: a U disk, a mobile hard disk, a read-only memory (Read-Only Memory, ROM), a random access memory (Random Access Memory, RAM), a magnetic disk or an optical disk, and various media that can store program codes.

[0109] Finally, it should be noted that: the above-described embodiments are only specific embodiments of the present application, which are used to illustrate the technical solutions of the present application, but not to limit them. The protection scope of the present application is not limited thereto. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can make modifications or easily think of changes to the technical solutions described in the foregoing embodiments within the technical scope disclosed by the present application, or make equivalent replacements to some of the technical features. The modifications, changes or replacements do not make the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A temperature control method, characterized in that, The method is applied to a temperature control system; the system includes a refrigeration device and a circulation device; the refrigeration device includes a compressor, a heat accumulator, an evaporator, and a cooling device; the outlet end of the first heat exchange channel in the evaporator is connected to the inlet end of the compressor; the outlet end of the compressor includes two paths, the first path is connected to the inlet end of the first heat exchange channel in the heat accumulator, and the second path, together with the outlet end of the first heat exchange channel in the heat accumulator, is connected to the inlet end of the cooling device and the inlet end of the first heat exchange channel in the evaporator; the outlet end of the cooling device is connected to the inlet end of the first heat exchange channel in the evaporator; the outlet end of the second heat exchange channel in the evaporator is connected to the inlet end of the circulation device, and a three-way valve is installed at the outlet end of the circulation device, the first channel of the three-way valve is connected to the inlet end of the second heat exchange channel in the heat accumulator, and the second channel, together with the outlet end of the second heat exchange channel in the heat accumulator, is connected to the inlet end of the second heat exchange channel in the evaporator; the method includes: The first circulation temperature at the inlet end of the second heat exchange channel in the evaporator is collected; Based on the first circulating temperature, the first opening of the first channel and the second opening of the second channel in the three-way valve are adjusted so that the circulating liquid flowing out of the outlet of the circulating device flows through the first channel and the second heat exchange channel in the heat accumulator in a first ratio, and mixes with the circulating liquid flowing through the second channel in a second ratio before flowing into the second heat exchange channel in the evaporator, so as to accumulate heating energy for the heat accumulator through the first ratio of circulating liquid; wherein, the heating energy stored in the heat accumulator is used to heat the circulating liquid according to the temperature rise command; and the temperature of the load equipment is controlled through the circulating liquid; The cooling device includes a condenser and a subcooled liquid receiver; the outlet end of the first heat exchange channel in the evaporator is connected to the inlet end of the compressor; the outlet end of the compressor includes two paths: a first path connects to the inlet end of the first heat exchange channel in the heat accumulator via a first valve; a second path connects to the inlet end of the second heat exchange channel in the condenser via a second valve and together with the outlet end of the first heat exchange channel in the heat accumulator, and connects to the inlet end of the first heat exchange channel in the evaporator via a third valve and together with the outlet end of the first heat exchange channel in the heat accumulator; the outlet end of the second heat exchange channel in the condenser is connected to the inlet end of the subcooled liquid receiver, connected to the inlet end of the external cooling pipe of the subcooled liquid receiver via a fifth valve, and connected to the inlet end of the first heat exchange channel in the evaporator via a sixth valve; the outlet end of the subcooled liquid receiver is connected to the inlet end of the first heat exchange channel in the evaporator via a fourth valve; the outlet end of the external cooling pipe is connected to the inlet end of the compressor; the method further includes: According to the received heating command, the first valve, the fourth valve, the second channel of the three-way valve and the sixth valve are closed, and the second valve, the third valve and the first channel of the three-way valve are opened; When it is determined that the temperature of the circulating liquid rises to meet the preset condition, the first channel of the three-way valve is closed and the second channel of the three-way valve is opened; wherein, the preset condition means that the temperature difference between the third circulation temperature at the outlet end of the second heat exchange channel in the heat accumulator and the second circulation temperature at the outlet end of the circulation device is less than a preset threshold.

2. The method according to claim 1, characterized in that, Adjusting the first opening of the first channel and the second opening of the second channel in the three-way valve according to the first circulation temperature includes: When the first cycle temperature is greater than a preset temperature threshold, the first opening of the first channel is increased and / or the second opening of the second channel is decreased.

3. The method according to claim 1 or 2, characterized in that, The method further includes: When it is determined that the heat accumulator can no longer store heat energy through the circulating liquid, the first channel is closed and the second channel is opened.

4. The method according to claim 1 or 2, characterized in that, The following methods were used to determine that the heat accumulator could no longer store heat energy through the circulating liquid: The second circulation temperature at the outlet of the circulation device and the third circulation temperature at the outlet of the second heat exchange channel in the heat accumulator are collected. Determine the temperature difference between the second cycle temperature and the third cycle temperature; When the temperature difference is less than a preset threshold, it is determined that the heat accumulator can no longer store heat energy through the circulating liquid.

5. The method according to claim 1, characterized in that, The method further includes: According to the received cooling command, the second valve, the third valve, the first channel of the three-way valve and the sixth valve are closed, and the first valve, the second channel of the three-way valve and the fourth valve are opened.

6. The method according to claim 1, characterized in that, The method further includes: After the temperature control system is started, it enters the temperature control preparation stage and continues for a predetermined time so that the heat accumulator stores heating energy and the subcooled liquid receiver subcools and stores the refrigerant. During the temperature control preparation phase, the second valve, the third valve, the first channel of the three-way valve, and the fourth valve are closed, while the first valve and the second channel of the three-way valve are opened; the opening degree of the sixth valve is adjusted according to the fourth circulation temperature at the inlet of the circulation device.

7. The method according to claim 1, characterized in that, The method further includes: The first refrigeration temperature at the inlet of the compressor and the first refrigeration pressure at the outlet of the first heat exchange channel in the evaporator are collected. Based on the first refrigeration temperature and the first refrigeration pressure, determine the difference in superheat between the actual superheat value and the preset superheat value; The opening degree of the fifth valve is adjusted according to the superheat difference.

8. A temperature control device, characterized in that, This system is applied to a temperature control system. The system includes a refrigeration unit and a circulation unit. The refrigeration unit includes a compressor, a heat accumulator, an evaporator, and a cooling device. The outlet end of a first heat exchange channel in the evaporator is connected to the inlet end of the compressor. The outlet end of the compressor has two paths: a first path connects to the inlet end of the first heat exchange channel in the heat accumulator, and a second path, together with the outlet end of the first heat exchange channel in the heat accumulator, connects to the inlet end of the cooling device and the inlet end of the first heat exchange channel in the evaporator. The outlet end of the cooling device is connected to the inlet end of the first heat exchange channel in the evaporator. The outlet end of a second heat exchange channel in the evaporator is connected to the inlet end of the circulation unit. A three-way valve is installed at the outlet end of the circulation unit. The first channel of the three-way valve connects to the inlet end of the second heat exchange channel in the heat accumulator, and the second channel, together with the outlet end of the second heat exchange channel in the heat accumulator, connects to the inlet end of the second heat exchange channel in the evaporator. The device includes: The data acquisition module is used to acquire the first circulation temperature at the inlet end of the second heat exchange channel in the evaporator; The regulating module is used to adjust the first opening of the first channel and the second opening of the second channel in the three-way valve according to the first circulating temperature, so that the circulating liquid flowing out of the outlet of the circulating device flows through the first channel and the second heat exchange channel in the heat accumulator in a first ratio, and mixes with the circulating liquid flowing through the second channel in a second ratio before flowing into the second heat exchange channel in the evaporator, so as to accumulate heating energy for the heat accumulator through the first ratio of circulating liquid; wherein, the heat storage energy stored in the heat accumulator is used to heat the circulating liquid according to the temperature rise command; and the temperature of the load equipment is controlled through the circulating liquid; The cooling device includes a condenser and a subcooled liquid receiver; the outlet end of the first heat exchange channel in the evaporator is connected to the inlet end of the compressor; the outlet end of the compressor includes two paths: a first path connects to the inlet end of the first heat exchange channel in the heat accumulator via a first valve; a second path connects to the inlet end of the second heat exchange channel in the condenser via a second valve and the outlet end of the first heat exchange channel in the heat accumulator, and connects to the inlet end of the first heat exchange channel in the evaporator via a third valve and the outlet end of the first heat exchange channel in the heat accumulator; the outlet end of the second heat exchange channel in the condenser is connected to the inlet end of the subcooled liquid receiver, connected to the inlet end of the external cooling pipe of the subcooled liquid receiver via a fifth valve, and connected to the inlet end of the first heat exchange channel in the evaporator via a sixth valve; the outlet end of the subcooled liquid receiver is connected to the inlet end of the first heat exchange channel in the evaporator via a fourth valve; the outlet end of the external cooling pipe is connected to the inlet end of the compressor; the regulating module is further used for: According to the received heating command, the first valve, the fourth valve, the second channel of the three-way valve and the sixth valve are closed, and the second valve, the third valve and the first channel of the three-way valve are opened; When it is determined that the temperature of the circulating liquid rises to meet the preset condition, the first channel of the three-way valve is closed and the second channel of the three-way valve is opened; wherein, the preset condition means that the temperature difference between the third circulation temperature at the outlet end of the second heat exchange channel in the heat accumulator and the second circulation temperature at the outlet end of the circulation device is less than a preset threshold.

9. An electronic device, characterized in that, include: The device includes a processor, a memory, and a bus. The memory stores machine-readable instructions executable by the processor. When the electronic device is running, the processor communicates with the memory via the bus. The machine-readable instructions are executed by the processor to perform the steps of the temperature control method as described in any one of claims 1 to 7.

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