Electric field sensor assembly and electric field detection method

Abstract

The present invention provides an electric field sensor assembly and electric field detection method, comprising an electric field sensor and a data processing unit. The electric field sensor comprises a substrate, and first and second sensing electrodes of identical structure and switchable configurations. The substrate comprises a physical region and a charge sensing region, the first portions of the first and second sensing electrodes are attached to the physical region, and the second portions of the first and second sensing electrodes are located on the charge sensing region. The first sensing electrode can generate and output a direct current signal or an alternating current signal in response to an excitation signal. The first sensing electrode can generate and output an alternating current signal or a direct current signal in response to an excitation signal. The present invention can simultaneously obtain direct current and alternating current signals, and can also switch the first and second sensing electrodes of identical structure as needed to increase adaptability.

Description

Technical Field

[0001] The present invention relates to an electric field sensor, in particular to an electric field sensor component and an electric field detection method. Background Art

[0002] As a key component for measuring electric field strength, electric field sensors are widely used in many fields such as aerospace, smart grid, electrostatic protection, lightning warning, scientific research, etc.

[0003] In recent years, with the development of MEMS and micro-nanofabrication technologies, MEMS electric field sensors based on charge sensing principles have become a hot topic in research and application due to their advantages such as small size, low cost, easy integration, and mass production. Existing MEMS electric field sensors operate based on resonance or vibration, mostly driven by electrostatics or piezoelectrics. Through periodic vibration, the sensor modulates the induced charge on the sensing electrode placed in the measured electric field environment, thereby generating an induced current proportional to the magnitude of the electric field to detect the measured electric field.

[0004] However, existing MEMS electric field sensors can usually only sense one type of electrical signal, resulting in a narrow detection frequency band of the MEMS electric field sensor and reduced sensitivity to electric field detection. Summary of the Invention

[0005] To address the shortcomings of the above problems, the present invention provides an electric field sensor assembly and electric field detection method that can simultaneously obtain a DC current signal and an AC current signal, and can also switch between a first sensing electrode and a second sensing electrode of the same structure as needed to increase adaptability.

[0006] To achieve the above objectives, in a first aspect, the present invention provides an electric field sensor assembly, comprising an electric field sensor and at least one data processing unit connected thereto, wherein:

[0007] The electric field sensor includes a substrate, and a first sensing electrode and a second sensing electrode having the same structure and being switchable, wherein:

[0008] The substrate includes a physical region and a charge sensing region, wherein the first portion of the first sensing electrode and the first portion of the second sensing electrode are both attached to the physical region, and the second portion of the first sensing electrode and the second portion of the second sensing electrode are both located on the charge sensing region;

[0009] The first sensing electrode includes a first signal generating component for generating a direct current signal or an alternating current signal according to an excitation signal, a first signal output component for outputting the direct current signal or the alternating current signal, and a first charge sensing component for sensing charge in a current electric field, wherein the first charge sensing component is connected to the first signal output component via the first signal generating component, and the first charge sensing component is connected to the first signal output component;

[0010] The second sensing electrode includes a second signal generating component for generating a direct current signal or an alternating current signal according to the excitation signal, a second signal output component for outputting the direct current signal or the alternating current signal, and a second charge sensing component for sensing charge in the current electric field, wherein the second charge sensing component is connected to the second signal output component via the second signal generating component, and the second charge sensing component is connected to the second signal output component;

[0011] The data processing part receives the DC current signal and the AC current signal respectively with the first signal output component and the second signal output component, and obtains the DC voltage value and the AC voltage value respectively, and determines the current electric field type based on the comparison result of the DC voltage value and the AC voltage value.

[0012] In one embodiment, the first signal generating component and the first signal output component are both a part of the first charge sensing component;

[0013] The second signal generating component and the second signal output component are both parts of the second charge induction component.

[0014] In one embodiment, the first charge induction component and the second charge induction component each include a base portion and a metal electrode, wherein a first region of the base portion is attached to the solid portion, a second region of the base portion is located on the charge induction region, and the metal electrode is attached to the second region;

[0015] The first signal generating component includes a piezoelectric upper electrode a, a piezoelectric upper electrode b, a piezoelectric layer a, a piezoelectric lower electrode a, and a piezoelectric lower electrode b, wherein the piezoelectric lower electrode a and the piezoelectric lower electrode b are arranged side by side and are both attached to a portion of the first region and a portion of the second region, the piezoelectric upper electrode a and the piezoelectric upper electrode b are arranged side by side, the piezoelectric upper electrode a is attached to at least a portion of the piezoelectric lower electrode a, the piezoelectric upper electrode b is attached to at least a portion of the piezoelectric lower electrode b, and the piezoelectric layer a is sandwiched between the piezoelectric upper electrode a, the piezoelectric upper electrode b, the piezoelectric lower electrode a, and the piezoelectric lower electrode b;

[0016] The second signal generating component includes a piezoelectric upper electrode c, a piezoelectric upper electrode d, a piezoelectric layer b, a piezoelectric lower electrode c and a piezoelectric lower electrode d, wherein the piezoelectric lower electrode c and the piezoelectric lower electrode d are arranged side by side and are both attached to part of the first area and part of the second area, the piezoelectric upper electrode c and the piezoelectric upper electrode d are arranged side by side, the piezoelectric upper electrode c is attached to at least part of the piezoelectric lower electrode c, the piezoelectric upper electrode d is attached to at least part of the piezoelectric lower electrode d, and the piezoelectric layer b is sandwiched between the piezoelectric upper electrode c, the piezoelectric upper electrode d, the piezoelectric lower electrode c and the piezoelectric lower electrode d.

[0017] In one embodiment, a shielding electrode is further included between the first sensing electrode and the second sensing electrode, wherein both ends of the shielding electrode are attached to the physical portion and are arranged above the charge sensing region.

[0018] In one embodiment, the DC current signal includes a DC current signal in the current electric field obtained according to a set sensing time point, or each DC current signal in the current electric field obtained according to a set sensing time period;

[0019] The AC current signal includes an AC current signal in the current electric field obtained according to a set sensing time point, or each AC current signal in the current electric field obtained according to a set sensing time period.

[0020] In one embodiment, the frequency of the electric field detected by the first sensing electrode is less than 50% of the self-resonant frequency of the broadband electric field sensor;

[0021] The electric field frequency detected by the second sensing electrode is greater than 50% of the self-resonant frequency of the broadband electric field sensor;

[0022] The alternating current signal detected by the static induction electrode is an alternating current signal greater than, equal to, or less than 50% of the self-resonant frequency of the electric field sensor.

[0023] In one embodiment, the data processing portion includes at least an excitation module, a first calculation module, a second calculation module, and a third calculation module, wherein:

[0024] The excitation module is connected to the first signal generating component or the second signal generating component, inputs the excitation signal thereto to drive the first signal generating component or the second signal generating component to vibrate, and receives the generated vibration signal;

[0025] The first calculation module is connected to the first signal output component or the second signal output component, receives the input DC current signal or AC current signal, and converts the DC current signal into a DC voltage value, or converts the AC current signal into an AC voltage value;

[0026] The second calculation module is connected to the first signal output component or the second signal output component, receives the input DC current signal or AC current signal, and converts the DC current signal into a DC voltage value, or converts the AC current signal into an AC voltage value;

[0027] The third calculation module compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

[0028] In one embodiment, the data processing portion includes a first data processing component, a second data processing component, and a third data processing component, wherein the first data processing component and the second data processing component are both connected to the third data processing component, wherein:

[0029] The first data processing component includes an excitation module and a first calculation module, wherein:

[0030] The excitation module is connected to the first signal generating component or the second signal generating component, inputs the excitation signal thereto to drive the first signal generating component or the second signal generating component to vibrate, and receives the generated vibration signal;

[0031] The first calculation module is connected to the first signal output component or the second signal output component, receives the input DC current signal or AC current signal, and converts the DC current signal into a DC voltage value, or converts the AC current signal into an AC voltage value;

[0032] The second data processing component includes an excitation module and a second calculation module, wherein:

[0033] The excitation module is connected to the first signal generating component or the second signal generating component, inputs the excitation signal thereto to drive the first signal generating component or the second signal generating component to vibrate, and receives the generated vibration signal;

[0034] The second calculation module is connected to the first signal output component or the second signal output component, receives the input DC current signal or AC current signal, and converts the DC current signal into a DC voltage value, or converts the AC current signal into an AC voltage value;

[0035] The third data processing component includes a third computing module, wherein:

[0036] The third calculation module receives the DC voltage value and the AC voltage value, and determines the current electric field type according to a comparison result of the DC voltage value and the AC voltage value.

[0037] In a second aspect, the present invention further provides an electric field detection method, applied to the electric field sensor assembly according to any one of claims 1 to 8, characterized in that it comprises the following steps:

[0038] The first sensing electrode and the second sensing electrode respectively obtain a direct current signal and at least one alternating current signal of the current electric field;

[0039] Obtaining a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal respectively;

[0040] The DC voltage value is compared with the AC voltage value, and the current electric field type is determined based on the comparison result.

[0041] Compared with the prior art, the present invention has one of the following advantages:

[0042] The first sensing electrode and the second sensing electrode can simultaneously obtain a DC current signal and an AC current signal. Compared with existing MEMS electric field sensors that can only obtain one current signal, this can achieve good detection of DC and AC electric fields, improve the sensitivity of electric field detection, and broaden the detection frequency band of the electric field sensor.

[0043] Since the first sensing electrode and the second sensing electrode have the same structure, they can be switched as needed to increase adaptability;

[0044] By comparing the DC current value with the AC current value, the electric field can be detected and the type of the current electric field can be accurately determined. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1Schematic diagram of the structure of the first embodiment of the electric field sensor assembly in the present invention;

[0046] Figure 2 for Figure 1 A structural diagram of a first embodiment of a medium electric field sensor;

[0047] Figure 3 for Figure 2 sectional view of

[0048] Figure 4 for Figure 1 Schematic diagram of the structure of the excitation module;

[0049] Figure 5 for Figure 1 A schematic diagram of the structure of the first calculation module;

[0050] Figure 6 for Figure 1 A schematic diagram of the structure of the second computing module;

[0051] Figure 7 2 is a structural diagram of a second embodiment of the electric field sensor of the present invention;

[0052] Figure 8 Schematic diagram of the structure of the second embodiment of the electric field sensor assembly in the present invention;

[0053] Figure 9 Flowchart of the electric field detection method of the present invention.

[0054] The main reference numerals are as follows:

[0055] 1-electric field sensor; 2-substrate; 200-insulating layer a; 201-substrate layer; 202-charge sensing region;

[0056] 3-dynamic induction electrode; 300-piezoelectric upper electrode a; 301-piezoelectric layer a; 302-piezoelectric lower electrode a; 303-extraction electrode a; 304-insulating layer b; 305-piezoelectric upper electrode b; 306-piezoelectric lower electrode b; 4-static induction electrode; 400-piezoelectric upper electrode c; 401-piezoelectric lower electrode c; 402-extraction electrode b; 403-piezoelectric upper electrode d; 404-piezoelectric lower electrode d; 5-base layer; 6-first region; 7-second part a; 8-second part b; 9-metal electrode; 10-shielding electrode; 11-data processing part; 1101-excitation module; 1102-first calculation module; 1103-second calculation module; 1104-third calculation module; 12-first data processing part; 13-second data processing part; 14-third data processing part. DETAILED DESCRIPTION

[0057] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0058] In the description of the present invention, it should be understood that the terms "upper", "lower", "top surface", "bottom surface", "inside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a centrally arranged component at the same time. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0059] Example 1

[0060] like Figures 1 to 6 As shown, this embodiment provides an electric field sensor assembly, including an electric field sensor 1 and a data processing unit 11 connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic sensing electrode 3 (i.e., a first sensing electrode), and a static sensing electrode 4 (i.e., a second sensing electrode). The substrate 2 includes a solid portion and a charge sensing region 202, and the dynamic sensing electrode 3 and the static sensing electrode 4 are fixed to the left and right sides of the substrate 2, respectively. The first portion of the dynamic sensing electrode 3 is attached to the solid portion, and the second portion of the dynamic sensing electrode 3 is located on the charge sensing region 202, and is used to obtain a DC current signal of the current electric field based on an excitation signal. The first portion of the static sensing electrode 4 is attached to the solid portion, and the second portion of the static sensing electrode 4 is located on the charge sensing region 202, and is used to sense the charge in the current electric field and output an AC current signal based on the sensed charge.

[0061] Specifically, the charge induction region 202 is formed by a local area of the top end surface of the substrate 2 being recessed toward the bottom end surface thereof, and the solid portion surrounds the outer side of the charge induction region 202 to form a frame-like structure.

[0062] Preferably, the shape of the substrate 2 , the shape of the charge induction region 202 , and the shape of the entity portion are all square structures.

[0063] Furthermore, the physical portion is composed of a stacked insulating layer a200 and a substrate layer 201. The insulating layer a200 is used to isolate signals, and the material of the insulating layer a200 is not limited to silicon dioxide, silicon nitride, and composite materials of silicon dioxide and silicon nitride. The substrate layer 201 can be made of dielectric materials such as silicon-based materials, glass, ceramics, or organic materials, or metals and metal alloys.

[0064] Specifically, the dynamic sensing electrode 3 includes a piezoelectric electrode assembly a (i.e., a first signal generating assembly) that generates a DC current signal based on an excitation signal, an extraction electrode a (i.e., a first signal output assembly) for outputting the DC current signal, and a sensing electrode assembly a (i.e., a first charge sensing assembly) for sensing the charge in the current electric field. The piezoelectric electrode assembly a and the extraction electrode a are both attached to a portion of the sensing electrode assembly a. The sensing electrode assembly a is connected to the piezoelectric electrode assembly a and the extraction electrode a, respectively, and the piezoelectric electrode assembly a is connected to the extraction electrode a. Part of the sensing electrode assembly a is attached to the physical portion, and the other part is located above the charge sensing region 202. The piezoelectric electrode assembly a is attached to a portion of the sensing electrode assembly a, and the extraction electrode a is attached to a portion of the sensing electrode assembly a.

[0065] Furthermore, the DC current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a according to the excitation signal, and the DC current signal is connected to the first calculation module 1102 in the data processing part 11 through the lead-out electrode a303 and the transmission line.

[0066] Specifically, the static sensing electrode 4 includes a sensing electrode assembly b (i.e., a second charge sensing assembly), a piezoelectric electrode assembly b (i.e., a second signal generating assembly), and an extraction electrode b402 (i.e., a second signal output assembly). The sensing electrode assembly b is used to sense the charge in the current electric field. The extraction electrode b402 outputs an AC current signal based on the induced charge. The piezoelectric electrode assembly b receives the displacement of the sensing electrode assembly b when sensing the charge in the current electric field and converts the displacement into an AC current signal. The sensing electrode assembly b is connected to the extraction electrode b402, and the sensing electrode assembly b is connected to the extraction electrode b402 via the piezoelectric electrode assembly b. A portion of the sensing electrode assembly b is attached to the solid portion, while another portion is located above the charge sensing region 202. The piezoelectric electrode assembly b is attached to a portion of the sensing electrode assembly b, and the extraction electrode b402 is attached to a portion of the sensing electrode assembly b.

[0067] Furthermore, the AC current signal is obtained by the sensing electrode assembly b according to the charge conversion induced in the current electric field, and the AC current signal is connected to the second calculation module 1103 in the data processing part 11 through the extraction electrode b402 via the transmission line.

[0068] In this embodiment, both the sensing electrode assembly a and the sensing electrode assembly b include a base portion 5 and a metal electrode 9. The first region 6 of the base portion 5 is attached to the top end surface of the insulating layer a200. The second region of the base portion 5 is located above the charge sensing region 202. The metal electrode 9 is attached to a portion of the second region.

[0069] Furthermore, the piezoelectric electrode assembly a is connected to the extraction electrode a303 through the first region 6. The piezoelectric electrode assembly a includes a piezoelectric upper electrode a300, a piezoelectric upper electrode b305, a piezoelectric layer a301, a piezoelectric lower electrode a302, and a piezoelectric lower electrode b306, wherein the piezoelectric lower electrode a302 and the piezoelectric lower electrode b306 are arranged side by side and are both attached to a portion of the first region 6 and a portion of the second region, the piezoelectric upper electrode a300 and the piezoelectric upper electrode b305 are arranged side by side, the piezoelectric upper electrode a300 is attached to at least a portion of the piezoelectric lower electrode a302, the piezoelectric upper electrode b305 is attached to at least a portion of the piezoelectric lower electrode b306, and the piezoelectric layer a301 is sandwiched between the piezoelectric upper electrode a300, the piezoelectric upper electrode b305, the piezoelectric lower electrode a302, and the piezoelectric lower electrode b306.

[0070] In the above embodiment, further, the second region includes a second portion a7 and a second portion b8, wherein the second portion b8 is farther away from the first region 6 than the second portion a7, and the metal electrode 9 is attached to the second portion b8.

[0071] In this embodiment, further, the piezoelectric upper electrode a300 and the piezoelectric lower electrode a302 constitute the input end of the excitation signal, and are connected to the excitation module 1101 in the data processing part 11 through a transmission line, and the piezoelectric upper electrode b305 and the piezoelectric lower electrode b306 constitute the output end of the vibration signal, and are connected to the excitation module 1101 in the data processing part 11 through a transmission line.

[0072] The extraction electrode a303 is connected to the first calculation module 1102 in the data processing part 11 through a transmission line, and the extraction electrode b402 is connected to the second calculation module 1103 in the data processing part 11 through a transmission line.

[0073] In this embodiment, further, the piezoelectric electrode assembly b includes a piezoelectric upper electrode c400, a piezoelectric layer b, a piezoelectric lower electrode c401, a piezoelectric upper electrode d403 and a piezoelectric lower electrode d404, wherein the piezoelectric lower electrode c401 and the piezoelectric lower electrode d404 are arranged side by side and are both attached to part of the first area and part of the second area, the piezoelectric upper electrode c400 and the piezoelectric upper electrode d403 are arranged side by side, the piezoelectric upper electrode c400 is attached to a part of the piezoelectric lower electrode c401, the piezoelectric upper electrode d403 is attached to a part of the piezoelectric lower electrode d404, and the piezoelectric layer b is sandwiched between the piezoelectric upper electrode c400, the piezoelectric upper electrode d403, the piezoelectric lower electrode c401 and the piezoelectric lower electrode d404.

[0074] In this embodiment, the upper piezoelectric electrode d403 and the lower piezoelectric electrode d404 further constitute the input terminal for the excitation signal and are connected to the excitation module in the data processing unit 11 via a transmission line. The upper piezoelectric electrode c400 and the lower piezoelectric electrode c401 constitute the signal output terminal, which is connected to the extraction electrode b402. This allows the AC current signal obtained by the static induction electrode 4 to be input to the second calculation module of the data processing unit 11 via the extraction electrode b402 and the transmission line, and the second calculation module converts the AC current signal into a corresponding AC voltage value.

[0075] Furthermore, the alternating current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when the piezoelectric electrode assembly b receives the induced charge in the current electric field.

[0076] In this embodiment, since the dynamic induction electrodes and the static induction electrodes have the same structure, they can be switched as needed.

[0077] Illustratively, when sensing a DC current signal, the sensing electrode assembly a in the dynamic induction electrode 2 does not generate vibration, and the DC current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a according to the excitation signal. At this time, if the sensing electrode assembly b in the static induction electrode 3 is damaged, the dynamic induction electrode 2 and the static induction electrode 3 can be switched, so that the DC current signal is generated by the piezoelectric electrode assembly b in the static induction electrode 3 according to the excitation signal, and the AC current signal is generated by the charge induced by the sensing electrode assembly a in the current electric field, so as to realize the switching between the dynamic induction electrode 2 and the static induction electrode 3.

[0078] Optionally, the piezoelectric electrode assembly a and the piezoelectric electrode assembly b further include an insulating layer b304, which is sandwiched between the piezoelectric lower electrode a302 and the base portion 5, the piezoelectric lower electrode b306 and the base portion 5, the piezoelectric lower electrode c401 and the base portion 5, and the piezoelectric lower electrode d404 and the base portion 5, for signal isolation. The material of the insulating layer b304 is not limited to silicon dioxide, silicon nitride, and a composite material made of silicon dioxide and silicon nitride.

[0079] Alternatively, the metal electrode 9 can be made of a metal or alloy such as Ti, Pt, Al, Ag, Cr, Cu, Au, or Mo. The base portion 5 can be made of dielectric materials such as silicon-based materials, glass, ceramics, metals, or organic materials, or metal and metal alloy materials. The piezoelectric layer can be made of lead zirconate titanate, aluminum nitride, zinc oxide, lead titanate, barium titanate, or modified lead titanate. The base portion 5 can be shaped in a straight beam, a folded beam, a U-shaped beam, a serpentine beam, a crab beam, or the like.

[0080] In this embodiment, when the base layer 5 is made of a highly conductive silicon-based material, signal transmission between the metal electrode 9 and the lead-out electrode a303, the piezoelectric electrode assembly a and the lead-out electrode a303, and the metal electrode 9 and the lead-out electrode b402 can be achieved without setting up a transmission line.

[0081] In another embodiment, when the base layer 5 is made of a non-highly conductive material, a transmission line is embedded in the base layer 5, the piezoelectric electrode is connected to the lead-out electrode through the transmission line, and the metal electrode 9 is connected to the lead-out electrode through the transmission line, thereby realizing signal transmission between the metal electrode 9 and the lead-out electrode a303, the piezoelectric electrode assembly a and the lead-out electrode a303, and the metal electrode 9 and the lead-out electrode b402.

[0082] In addition, in the electric field sensor 1 provided in this embodiment, the metal electrode 9 serves as the core component of the electric field sensor 1 and is responsible for at least receiving and sensing the charge signal in the current electric field. The base portion 5 has a certain degree of elasticity. After the metal electrode 9 is attached to the top surface of the base portion 5, when the current electric field changes drastically, the metal electrode 9 can not only sense the charge in the current electric field, but also, under the influence of the current electric field, the metal electrode 9 can move back and forth in the upper position of the charge sensing region 202 and the interior of the charge sensing region 202 in the up and down directions. Among them, when the metal electrode 9 is located above the charge sensing region 202, the amount of charge sensed on the surface of the metal electrode 9 is greater than the amount of charge sensed on the surface of the metal electrode 9 when the metal electrode 9 is located inside the charge sensing region 202. At the same time, when the metal electrode 9 is located above the charge sensing region 202, the electric field value obtained is also greater than the electric field value obtained when the metal electrode 9 is located inside the charge sensing region 202.

[0083] Specifically, the data processing part 11 receives the DC current signal and the AC current signal, and obtains the DC voltage value and the AC voltage value respectively, and determines the current electric field type according to the comparison result of the DC voltage value and the AC voltage value.

[0084] Furthermore, the data processing unit 11 is connected to the extraction electrode a303 and the extraction electrode b402 via transmission lines. The data processing unit 11 is also connected to the input end of the excitation signal formed by the piezoelectric upper electrode a300 and the piezoelectric lower electrode a302, and the output end of the vibration signal formed by the piezoelectric upper electrode b305 and the piezoelectric lower electrode b306 via transmission lines. The data processing unit 11 includes an excitation module 1101, a first calculation module 1102, a second calculation module 1103, and a third calculation module 1104, wherein:

[0085] The excitation module 1101 inputs an excitation signal to the piezoelectric electrode assembly a to drive the piezoelectric electrode assembly a to vibrate;

[0086] The first calculation module 1102 receives the DC current signal input from the electrode a303 and obtains a DC voltage value;

[0087] The second calculation module 1103 receives the AC current signal input from the extraction electrode b402 and obtains the AC voltage value;

[0088] The third calculation module 1104 compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

[0089] Furthermore, the excitation module 1101 is used to input an excitation signal to the piezoelectric electrode assembly a and receive a vibration signal generated by the piezoelectric electrode assembly a.

[0090] Furthermore, the excitation module 1101 includes an excitation signal generating unit, a phase shift filter, a signal amplifier, and a vibration signal receiver. The excitation signal generating unit inputs an excitation signal to the piezoelectric electrode assembly a, which then vibrates and outputs a vibration signal based on the excitation signal. The vibration signal receiver receives the vibration signal output by the piezoelectric electrode assembly a, and the phase shift filter and the signal amplifier process the vibration signal accordingly to determine whether the piezoelectric electrode assembly a generates maximum vibration.

[0091] Exemplarily, the excitation signal generating unit is connected to the piezoelectric upper electrode a300 through a transmission line, and the vibration signal receiver is connected to the piezoelectric lower electrode a302 through a transmission line.

[0092] Furthermore, the first calculation module 1102 includes an I / V conversion unit, an amplification unit, a phase shift filter, and a coherent demodulator, wherein:

[0093] The I / V conversion unit converts the DC current signal into a DC voltage signal;

[0094] The amplifying unit removes interference signals from the DC voltage signal and amplifies the DC voltage signal;

[0095] The phase shift filter receives the vibration signal amplified by the piezoelectric electrode assembly a, filters the vibration signal, and converts the vibration signal into a specified waveform;

[0096] The coherent demodulator demodulates the received vibration signal of the specified waveform and the amplified DC voltage signal to obtain a DC voltage value.

[0097] Optionally, the phase shift filter can convert the vibration signal into a square wave signal, a half wave signal or a full wave signal according to the setting.

[0098] Furthermore, the second calculation module 1103 includes an I / V conversion unit, an amplification unit, a filter, and an amplitude extraction unit. The AC current signal is converted by the sensing electrode assembly b based on the charge induced in the current electric field and input into the second calculation module 1103 via the extraction electrode b402 and the transmission line, wherein:

[0099] The I / V conversion unit converts the AC current signal into an AC voltage signal;

[0100] The amplifying unit removes interference signals from the AC voltage signal and amplifies the AC voltage signal;

[0101] The filter filters the AC voltage signal and converts the AC voltage signal into a specified waveform;

[0102] The amplitude extraction unit obtains an AC voltage value according to the AC voltage signal.

[0103] Optionally, the phase-shift filter may convert the AC voltage signal into a square wave signal, a half-wave signal, or a full-wave signal according to settings.

[0104] Furthermore, the third calculation module 1104 compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

[0105] In addition, in this embodiment, the frequency of the electric field detected by the dynamic sensing electrode is less than 50% of the self-resonant frequency of the electric field sensor.

[0106] Exemplarily, assuming that the resonant frequency of the electric field sensor is f1, the frequency of the electric field detected by the dynamic induction electrode is f≤0.5×f1.

[0107] The frequency of the electric field detected by the static sensing electrode is greater than 50% of the self-resonant frequency of the electric field sensor.

[0108] Exemplarily, assuming that the resonant frequency of the electric field sensor is f1, the frequency of the electric field detected by the static induction electrode is f≥0.5×f1.

[0109] The alternating current signal detected by the static sensing electrode is an alternating current signal greater than 50% of the self-resonant frequency of the electric field sensor.

[0110] Exemplarily, assuming that the resonant frequency of the broadband electric field sensor is f1, the AC current signal f detected by the static induction electrode is: f≥0.5×f1.

[0111] The alternating current signal detected by the static sensing electrode is an alternating current signal equal to 50% of the self-resonant frequency of the electric field sensor.

[0112] Exemplarily, assuming that the resonant frequency of the broadband electric field sensor is f1, the AC current signal f detected by the static induction electrode is: f=0.5×f1.

[0113] The alternating current signal detected by the static sensing electrode is an alternating current signal having a frequency less than 50% of the self-resonant frequency of the electric field sensor.

[0114] Exemplarily, assuming that the resonant frequency of the broadband electric field sensor is f1, the AC current signal f detected by the static induction electrode is: f≤0.5×f1.

[0115] Example 2

[0116] like Figure 7 As shown, this embodiment provides an electric field sensor, wherein the electric field sensor 1 in this embodiment differs from the electric field sensor 1 in the first embodiment in that:

[0117] The electric field sensor 1 includes a substrate, a dynamic sensing electrode 3 (i.e., the first sensing electrode), a static sensing electrode 4 (i.e., the second sensing electrode), and a shielding electrode 10. The shielding electrode 10 is located between the dynamic sensing electrode 3 and the static sensing electrode 4, separating them and spaced apart from each other. Both ends of the shielding electrode 10 are attached to the physical portion and are positioned above the charge sensing region 202. The shielding electrode 10 faces the top of the electric field sensor 1 to shield interference signals.

[0118] In this embodiment, further, the shielding electrode 10 is composed of a base layer, or a base layer and a metal electrode covering the base layer.

[0119] When sensing electrode assembly a reciprocates up and down under the influence of the current electric field, sensing electrode assembly a and shielding electrode 10 are not in the same plane, generating differential induction between the two, thereby outputting a differential signal. When sensing electrode assembly a is stationary, the top end surface of sensing electrode assembly a and the top end surface of shielding electrode 10 are in the same plane.

[0120] For example, when the base layer is made of a highly conductive silicon-based material, the base layer can achieve a signal shielding effect. When the base layer is made of a non-highly conductive silicon-based material, the metal electrode 9 covering it can achieve a signal shielding effect.

[0121] By providing a shielding electrode toward the top of the electric field sensor between the dynamic sensing electrode and the static sensing electrode to shield interference signals, the defect of inaccurate detection caused by interference between the electric field frequency and the sensing electrode frequency can be solved when sensing AC current signals.

[0122] When the electric field sensor 1 in this embodiment is connected to the data processing part recorded in Example 1, the data processing part can also receive DC current signals and AC current signals, and obtain DC voltage values and AC voltage values respectively, as well as determine the current electric field type based on the comparison results of the DC voltage value and the AC voltage value.

[0123] Example 3

[0124] like Figure 8 As shown, this embodiment provides an electric field sensor assembly, including the electric field sensor 1 in the above-mentioned embodiment 2, a first data processing part 12 and a second data processing part 13 connected to the electric field sensor 1, and a third data processing part 14 connected to the first data processing part 12 and the second data processing part 13 respectively.

[0125] Specifically, the first data processing component 12 includes an excitation module and a first calculation module, wherein:

[0126] The excitation module is connected to the first signal generating component or the second signal generating component, inputs an excitation signal thereto to drive the first signal generating component or the second signal generating component to vibrate, and receives the generated vibration signal;

[0127] The first calculation module is connected to the first signal output component or the second signal output component, receives an input DC current signal or AC current signal, and converts the DC current signal into a DC voltage value, or converts the AC current signal into an AC voltage value.

[0128] The second data processing component 13 includes an excitation module and a second calculation module, wherein:

[0129] The excitation module is connected to the first signal generating component or the second signal generating component, inputs an excitation signal thereto to drive the first signal generating component or the second signal generating component to vibrate, and receives the generated vibration signal;

[0130] The second calculation module is connected to the first signal output component or the second signal output component, receives the input DC current signal or AC current signal, and converts the DC current signal into a DC voltage value, or converts the AC current signal into an AC voltage value.

[0131] The third data processing component 14 includes a third calculation module, wherein:

[0132] The third calculation module receives the DC voltage value and the AC voltage value, and determines the current electric field type according to a comparison result of the DC voltage value and the AC voltage value.

[0133] In one example, when the dynamic induction electrode 3 is selected to generate a DC current signal and the static induction electrode 4 is selected to generate an AC current signal, the first data processing unit 12 is connected to the piezoelectric electrode assembly a in the dynamic induction electrode 3 via a transmission line, and is used to input an excitation signal to the piezoelectric electrode assembly a and receive the vibration signal output by the piezoelectric electrode assembly a. The first data processing unit 12 is also connected to the lead electrode a in the dynamic induction electrode 3 via a transmission line, and is used to receive the DC current signal output by the dynamic induction electrode 3 and obtain a DC voltage value.

[0134] The second data processing unit 13 is connected to the lead-out electrode b in the static induction electrode 4 via a transmission line, receiving the AC current signal output by the static induction electrode 4 and obtaining the AC voltage value. Furthermore, when the dynamic induction electrode 3 switches between the static induction electrode 4 and the dynamic induction electrode 3, the second data processing unit 13 is connected to the piezoelectric electrode assembly b in the static induction electrode 4 via a transmission line, inputting an excitation signal to the piezoelectric electrode assembly b and receiving the vibration signal output by the piezoelectric electrode assembly b.

[0135] The third data processing part 14 is connected to the first data processing part 12 and the second data processing part 13 through a transmission line, and is used to compare the DC voltage value with the AC voltage value and determine the current electric field type according to the comparison result.

[0136] In another example, when the dynamic induction electrode 3 is selected to generate an AC current signal and the static induction electrode 4 is selected to generate a DC current signal, the first data processing unit 12 is connected to the lead-out electrode a in the dynamic induction electrode 3 via a transmission line, receives the AC current signal output by the dynamic induction electrode 3, and obtains an AC voltage value.

[0137] The first data processing unit 12 is connected to the piezoelectric electrode assembly a via a transmission line and is used to input an excitation signal to the piezoelectric electrode assembly a and receive the vibration signal output by the piezoelectric electrode assembly a. The first data processing unit 12 is connected to the lead electrode a of the dynamic sensing electrode 3 via a transmission line and is used to receive the DC current signal output by the dynamic sensing electrode 3 and obtain a DC voltage value.

[0138] The second data processing unit 13 is connected to the piezoelectric electrode assembly b in the static sensing electrode 4 via a transmission line. It is used to input an excitation signal to the piezoelectric electrode assembly b and receive the vibration signal output by the piezoelectric electrode assembly b. The second data processing unit 13 is also connected to the lead-out electrode b via a transmission line. It is used to receive the DC current signal output by the static sensing electrode 4 and obtain a DC voltage value.

[0139] The third data processing part 14 is connected to the first data processing part 12 and the second data processing part 13 through a transmission line, and is used to compare the DC voltage value with the AC voltage value and determine the current electric field type according to the comparison result.

[0140] The structures and principles of the excitation module, the first calculation module, the second calculation module, and the third calculation module in this embodiment are the same as those in the first embodiment.

[0141] In the above embodiment, the first data processing part 12 , the second data processing part 13 and the third data processing part 14 may also be solidified on the same circuit board.

[0142] For example, in Examples 1 to 3, when the third calculation module determines that the DC voltage value is greater than the AC voltage value, the electric field type at the current sensing time point is a DC electric field. When the third calculation module determines that the DC voltage value is less than the AC voltage value, the electric field type at the current sensing time point is an AC electric field.

[0143] In another embodiment, after the first calculation module and the second calculation module respectively input multiple DC voltage values and AC voltage values at the same sensing time point to the third calculation module, the third calculation module determines the electric field type at each sensing time point based on the comparison results of the DC voltage values and AC voltage values at the same sensing time point.

[0144] If the electric field type corresponding to the multiple sensing time points is a DC electric field, determining that the current electric field in the sensing time period is a DC electric field;

[0145] If the electric field type corresponding to the multiple sensing time points is an AC electric field, determining that the current electric field in the sensing time period is an AC electric field;

[0146] If the electric field types corresponding to the multiple sensing time points are AC electric fields or DC electric fields, it is determined that the current electric field in the sensing time period is a changing electric field in which AC electric fields and DC fields switch between each other.

[0147] Furthermore, in Examples 1 through 3, when the current electric field undergoes a dramatic change, the metal electrodes in both the dynamic induction electrode 3 and the static induction electrode 4 sense the charge in the current electric field, generating a charge signal. This charge signal is input via the extraction electrode into the data processing unit, or the first data processing unit 12 and the second data processing unit 13, thereby obtaining the corresponding electric field value.

[0148] Example 4

[0149] like Figure 9 As shown, this embodiment provides an electric field detection method, which is applied to the electric field sensor assembly described in the first and third embodiments, and includes the following steps:

[0150] S101. Setting the induction time of the current electric field.

[0151] Optionally, according to actual needs, the induction time of the current electric field is set as an induction time period, and corresponding induction time points are set in the set induction time period, so as to obtain a DC current signal and an AC current signal corresponding to each induction time point in the induction time period.

[0152] Optionally, the induction time of the current electric field is set to the current induction time according to actual needs, so as to obtain a direct current signal and an alternating current signal corresponding to the current induction time point.

[0153] S102 : driving the piezoelectric electrode assembly a in the piezoelectric electrode assembly a to vibrate.

[0154] Specifically, an excitation signal can be input to the piezoelectric electrode assembly a through the excitation module in the data processing part in Examples 1 to 6 to drive the piezoelectric electrode assembly a to vibrate and receive the vibration signal; or an excitation signal can be input to the piezoelectric electrode assembly a through the excitation module in the first data processing part in Example 3 to drive the piezoelectric electrode assembly a to vibrate and receive the vibration signal.

[0155] S103: Obtain a direct current signal and an alternating current signal of the current electric field.

[0156] Specifically, the direct current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a in response to the excitation signal. The alternating current signal is obtained by converting the charge induced by the sensing electrode assembly b in the current electric field. Alternatively, the alternating current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when receiving the charge induced by the sensing electrode assembly b in the current electric field.

[0157] Optionally, the DC current signal includes a DC current signal in the current electric field obtained at a set sensing time point, or each DC current signal in the current electric field obtained during a set sensing time period. The AC current signal includes an AC current signal in the current electric field obtained at a set sensing time point, or each AC current signal in the current electric field obtained during a set sensing time period.

[0158] S104 , obtaining a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal respectively.

[0159] Specifically, the first calculation module and the second calculation module in Example 1 and Example 2 respectively receive the DC current signal and the AC current signal, and obtain the DC voltage value and the AC voltage value; or the first calculation module in the first data processing part in Example 3 receives the DC current signal or the AC current signal, and obtains the DC voltage value or the AC voltage value, and the second calculation module in the second data processing part receives the AC current signal or the DC current signal, and obtains the AC voltage value or the DC voltage value.

[0160] Optionally, the DC voltage value includes a DC current value in the current electric field obtained at a set sensing time point, or each DC current value in the current electric field obtained during a set sensing time period. The AC voltage value includes an AC voltage value in the current electric field obtained at a set sensing time point, or each AC voltage value in the current electric field obtained during a set sensing time period.

[0161] S105 . Determine the current electric field type according to the comparison result between the DC voltage value and the AC voltage value.

[0162] Specifically, the DC voltage value and the AC voltage value are compared by the third calculation module in the first to third embodiments, and the current electric field type is determined according to the comparison result.

[0163] For example, in Examples 1 to 3, when the third calculation module determines that the DC voltage value is greater than the AC voltage value, the electric field type at the current sensing time point is a DC electric field. When the third calculation module determines that the DC voltage value is less than the AC voltage value, the electric field type at the current sensing time point is an AC electric field.

[0164] For example, in Examples 1 to 3, after the first and second calculation modules respectively input multiple DC voltage values and AC voltage values at the same sensing time point to the third calculation module, the third calculation module determines the electric field type at each sensing time point based on the comparison results of the DC voltage values and AC voltage values at the same sensing time point. Here,

[0165] If the electric field type corresponding to the multiple sensing time points is a DC electric field, determining that the current electric field in the sensing time period is a DC electric field;

[0166] If the electric field type corresponding to the multiple sensing time points is an AC electric field, determining that the current electric field in the sensing time period is an AC electric field;

[0167] If the electric field types corresponding to the multiple sensing time points are AC electric fields or DC electric fields, it is determined that the current electric field in the sensing time period is a changing electric field in which AC electric fields and DC fields switch between each other.

[0168] The above description is merely a preferred embodiment of the present invention and is intended to be illustrative rather than restrictive of the present invention. Those skilled in the art will appreciate that many changes, modifications, and even equivalents may be made to the present invention within the spirit and scope of the claims, all of which fall within the scope of protection of the present invention.

Claims

1. An electric field sensor assembly, characterized in that: The device comprises an electric field sensor and at least one data processing part connected thereto, wherein: The electric field sensor includes a substrate, and a first sensing electrode and a second sensing electrode having the same structure and being switchable, wherein: The substrate includes a physical region and a charge sensing region, wherein the first portion of the first sensing electrode and the first portion of the second sensing electrode are both attached to the physical region, and the second portion of the first sensing electrode and the second portion of the second sensing electrode are both located on the charge sensing region; The first sensing electrode includes a first signal generating component for generating a direct current signal or an alternating current signal according to an excitation signal, a first signal output component for outputting the direct current signal or the alternating current signal, and a first charge sensing component for sensing charge in a current electric field, wherein the first charge sensing component is connected to the first signal output component via the first signal generating component, and the first charge sensing component is connected to the first signal output component; The first signal generating component and the first signal output component are both attached to a portion of the first charge sensing component. When sensing a DC current signal, the first charge sensing component does not generate vibration, and the DC current signal is obtained by converting the vibration generated by the first signal generating component according to the excitation signal. The second sensing electrode includes a second signal generating component for generating a direct current signal or an alternating current signal according to the excitation signal, a second signal output component for outputting the direct current signal or the alternating current signal, and a second charge sensing component for sensing charge in the current electric field, wherein the second charge sensing component is connected to the second signal output component via the second signal generating component, and the second charge sensing component is connected to the second signal output component; The second signal generating component and the second signal output component are both attached to a portion of the second charge sensing component, and the AC current signal is obtained by converting the displacement generated by the reciprocating motion of the second charge sensing component when the second signal generating component senses charges in the current electric field into the AC current signal; The first sensing electrode and the second sensing electrode simultaneously obtain a DC current signal and an AC current signal. The data processing unit is connected to the first signal output component and the second signal output component, respectively, receives the DC current signal and the AC current signal, and obtains a DC voltage value and an AC voltage value, respectively, and determines the current electric field type based on a comparison result of the DC voltage value and the AC voltage value.

2. The electric field sensor assembly according to claim 1, wherein: The first charge induction component and the second charge induction component each include a base portion and a metal electrode, wherein a first region of the base portion is attached to the solid portion, a second region of the base portion is located on the charge induction region, and the metal electrode is attached to the second region of the base portion; The first signal generating component includes a piezoelectric upper electrode a, a piezoelectric upper electrode b, a piezoelectric layer a, a piezoelectric lower electrode a, and a piezoelectric lower electrode b, wherein the piezoelectric lower electrode a and the piezoelectric lower electrode b are arranged side by side and are both attached to a portion of the first area of the base portion and a portion of the second area of the base portion, the piezoelectric upper electrode a and the piezoelectric upper electrode b are arranged side by side, the piezoelectric upper electrode a is attached to at least a portion of the piezoelectric lower electrode a, the piezoelectric upper electrode b is attached to at least a portion of the piezoelectric lower electrode b, and the piezoelectric layer a is sandwiched between the piezoelectric upper electrode a, the piezoelectric upper electrode b, the piezoelectric lower electrode a, and the piezoelectric lower electrode b; The second signal generating component includes a piezoelectric upper electrode c, a piezoelectric upper electrode d, a piezoelectric layer b, a piezoelectric lower electrode c and a piezoelectric lower electrode d, wherein the piezoelectric lower electrode c and the piezoelectric lower electrode d are arranged side by side and are both attached to a portion of the first area of the base portion and a portion of the second area of the base portion, the piezoelectric upper electrode c and the piezoelectric upper electrode d are arranged side by side, the piezoelectric upper electrode c is attached to at least a portion of the piezoelectric lower electrode c, the piezoelectric upper electrode d is attached to at least a portion of the piezoelectric lower electrode d, and the piezoelectric layer b is sandwiched between the piezoelectric upper electrode c, the piezoelectric upper electrode d, the piezoelectric lower electrode c and the piezoelectric lower electrode d.

3. The electric field sensor assembly according to claim 1 or 2, characterized in that: The invention further comprises a shielding electrode disposed between the first sensing electrode and the second sensing electrode, wherein both ends of the shielding electrode are attached to the physical portion and are arranged above the charge sensing region.

4. The electric field sensor assembly according to claim 3, wherein: The DC current signal includes a DC current signal in the current electric field obtained according to a set sensing time point, or each DC current signal in the current electric field obtained according to a set sensing time period; The AC current signal includes an AC current signal in the current electric field obtained according to a set sensing time point, or each AC current signal in the current electric field obtained according to a set sensing time period.

5. The electric field sensor assembly according to claim 1, wherein: The electric field frequency detected by the first sensing electrode is less than 50% of the self-resonant frequency of the electric field sensor; The electric field frequency detected by the second sensing electrode is greater than 50% of the self-resonant frequency of the electric field sensor.

6. The electric field sensor assembly according to claim 1, wherein: The data processing part includes at least an excitation module, a first calculation module, a second calculation module and a third calculation module, wherein: The excitation module is connected to the first signal generating component or the second signal generating component, inputs the excitation signal thereto to drive the first signal generating component or the second signal generating component to vibrate, and receives the generated vibration signal; The first calculation module is connected to the first signal output component or the second signal output component, receives the input DC current signal or AC current signal, and converts the DC current signal into a DC voltage value, or converts the AC current signal into an AC voltage value; The second calculation module is connected to the first signal output component or the second signal output component, receives the input DC current signal or AC current signal, and converts the DC current signal into a DC voltage value, or converts the AC current signal into an AC voltage value; The third calculation module compares the DC voltage value with the AC voltage value and determines the current electric field type according to the comparison result.

7. The electric field sensor assembly according to claim 1, wherein: The data processing part includes a first data processing component, a second data processing component and a third data processing component, wherein the first data processing component and the second data processing component are both connected to the third data processing component, wherein: The first data processing component includes an excitation module and a first calculation module, wherein: The excitation module is connected to the first signal generating component or the second signal generating component, inputs the excitation signal thereto to drive the first signal generating component or the second signal generating component to vibrate, and receives the generated vibration signal; The first calculation module is connected to the first signal output component or the second signal output component, receives the input DC current signal or AC current signal, and converts the DC current signal into a DC voltage value, or converts the AC current signal into an AC voltage value; The second data processing component includes an excitation module and a second calculation module, wherein: The excitation module is connected to the first signal generating component or the second signal generating component, inputs the excitation signal thereto to drive the first signal generating component or the second signal generating component to vibrate, and receives the generated vibration signal; The second calculation module is connected to the first signal output component or the second signal output component, receives the input DC current signal or AC current signal, and converts the DC current signal into a DC voltage value, or converts the AC current signal into an AC voltage value; The third data processing component includes a third computing module, wherein: The third calculation module receives the DC voltage value and the AC voltage value, and determines the current electric field type according to a comparison result of the DC voltage value and the AC voltage value.

8. An electric field detection method, applied to the electric field sensor assembly according to any one of claims 1 to 7, characterized in that: The following steps are involved: The first sensing electrode and the second sensing electrode respectively obtain a direct current signal and at least one alternating current signal of the current electric field; Obtaining a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal respectively; The DC voltage value is compared with the AC voltage value, and the current electric field type is determined based on the comparison result.

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