Probe card tip contact judgment system and method

Abstract

The invention provides a probe card tip contact judgment system and method.The probe card tip contact judgment system comprises a fixing mechanism and an adjusting mechanism, and the fixing mechanism is used for fixing a to-be-detected probe card; and the adjusting mechanism is connected with the probe card to be detected and is used for assisting the detection of the probe card to be detected. According to the technical scheme, the fixing mechanism and the adjusting mechanism are arranged, and the fixing mechanism is used for fixing the probe card to be detected; the adjusting mechanism is connected with the probe card to be detected and is used for assisting the detection of the probe card to be detected; and the reliability of judging whether the probe tip has a good contact condition or not is improved.

Description

Background Art

[0002] In wafer testing, the test system is generally composed of a tester, a probe station, various connecting wires and a probe card. The probe station will match the position of the wafer and the probe card, and insert the probe into the PAD of the wafer chip, so that the tester and the chip on the wafer can transmit electrical signals to each other through the probe card to determine whether the chip functions normally. As an important part of this, it is crucial whether the probe has good contact conditions. Poor contact between the probe and the stressed PAD may cause inaccurate or even completely wrong test parameters. If this poor contact problem is not discovered in time during the test process, it may lead to poor test results at best, or even cause batch scrapping of wafers in severe cases, resulting in huge economic losses. Summary of the invention

[0003] The present application provides a probe card needle tip contact judgment system and method for judging whether the probe needle tip has good contact conditions.

[0004] In a first aspect, a probe card needle tip contact judgment system is provided, comprising: a fixing mechanism and an adjusting mechanism, wherein:

[0005] The fixing mechanism is used to fix the probe card to be detected;

[0006] The adjustment mechanism is connected to the probe card to be detected and is used to assist the detection of the probe card to be detected.

[0007] In the above technical solution, a fixing mechanism and an adjusting mechanism are provided, wherein the fixing mechanism is used to fix the probe card to be detected; the adjusting mechanism is connected to the probe card to be detected to assist in the detection of the probe card to be detected; and the reliability of judging whether the probe tip has good contact conditions is improved.

[0008] In a specific implementation scheme, it also includes a power supply, an auxiliary resistor and a voltage measuring mechanism, wherein the power supply, the auxiliary resistor, the probe of the probe card to be detected and the regulating mechanism are connected in series, and the voltage measuring mechanism is connected in parallel with the probe of the probe card to be detected, wherein:

[0009] The power supply is used to supply power to the probes of the probe card to be detected;

[0010] The voltage measuring mechanism is used to detect the voltage value of the probe of the probe card to be detected;

[0011] The auxiliary resistor is used to assist in calculating the current value flowing through the probe of the probe card to be detected.

[0012] In a specific implementation scheme, the adjustment mechanism includes a liftable workbench plate and a special workpiece disposed on the workbench plate, wherein:

[0013] The specially made workpiece abuts against the probe of the probe card to be detected, and the power supply, the auxiliary resistor, the probe of the probe card to be detected and the specially made workpiece are connected in series.

[0014] In a specific implementation scheme, the special workpiece is provided with connecting wires, wherein:

[0015] The connecting wire is used to assist in detecting the voltage value of the probe of the probe card to be detected.

[0016] In a specific implementation manner, the fixing mechanism includes a fixing frame, and the probe card to be detected is detachably connected to the fixing frame.

[0017] In a specific implementation manner, it further includes a workbench, and the fixing frame and the workbench table plate are both arranged on the workbench.

[0018] In a specific implementation manner, the power source is a stabilized voltage source.

[0019] In a specific implementation manner, the voltage measuring mechanism is a multimeter.

[0020] In a specific embodiment, the tailor-made workpiece is a metal sheet.

[0021] In a second aspect, a probe card needle tip contact determination method is provided, comprising the following steps:

[0022] Fixing the probe card to be detected by using a fixing mechanism;

[0023] Using an adjustment mechanism to assist the detection of the probe card to be detected;

[0024] Using a power supply to supply power to the probes of the probe card to be detected;

[0025] Using a voltage measuring mechanism to detect the voltage value of the probe of the probe card to be detected;

[0026] Using an auxiliary resistor to assist in calculating the current value flowing through the probe of the probe card to be detected;

[0027] calculating the contact resistance value of the probe of the probe card to be detected according to the voltage value of the probe of the probe card to be detected and the current value of the probe of the probe card to be detected;

[0028] The contact condition of the probe tip of the probe card to be detected is judged according to the contact resistance value.

[0029] In the above technical scheme, a fixing mechanism is used to fix the probe card to be detected; an adjusting mechanism is used to assist in the detection of the probe card to be detected; a power supply is used to power the probe of the probe card to be detected; a voltage measuring mechanism is used to detect the voltage value of the probe of the probe card to be detected; an auxiliary resistor is used to assist in calculating the current value flowing through the probe of the probe card to be detected; the contact resistance value of the probe of the probe card to be detected is calculated based on the voltage value of the probe of the probe card to be detected and the current value of the probe of the probe card to be detected; the contact condition of the probe tip of the probe card to be detected is judged based on the contact resistance value; and the reliability of judging whether the probe tip has good contact conditions is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 A schematic diagram of the structure of a probe card needle tip contact judgment system provided in an embodiment of the present application;

[0031] Figure 2 A schematic diagram of circuit connection of a probe card needle tip contact judgment system provided in an embodiment of the present application;

[0032] Figure 3 A flowchart of a probe card needle tip contact determination method provided in an embodiment of the present application;

[0033] Figure 4 A specific flow chart of the probe card needle tip contact determination method provided in an embodiment of the present application.

[0034] Among them, 1-probe card to be detected, 2-power supply, 3-auxiliary resistor, 4-voltage measuring mechanism, 5-probe, 6-workbench plate, 7-special workpiece, 8-connecting wire, 9-workbench, 10-welding hole, 11-measuring hole. DETAILED DESCRIPTION

[0035] The present application is further described in detail below through the accompanying drawings and embodiments. Through these descriptions, the characteristics and advantages of the present application will become clearer and more specific.

[0036] The word "exemplary" is used exclusively herein to mean "serving as an example, embodiment, or illustration." Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments. Although various aspects of the embodiments are shown in the drawings, the drawings are not necessarily drawn to scale unless otherwise noted.

[0037] In addition, the technical features involved in different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0038] To facilitate understanding of the probe card needle tip contact judgment system and method provided in the embodiment of the present application, its application scenario is first explained. The probe card needle tip contact judgment system and method provided in the embodiment of the present application are used to judge whether the probe needle tip has good contact conditions. In wafer testing, the test system is generally composed of a tester, a probe station, various connecting wires and a probe card. The probe station will match the position of the wafer and the probe card, and pierce the probe into the pad of the wafer chip, so that the tester and the chip on the wafer can transmit electrical signals to each other through the probe card to judge whether the chip function is normal. As an important part of it, whether the probe has good contact conditions is crucial. Poor contact between the probe and the pressed PAD may cause inaccurate or even completely wrong test parameters. If this poor contact problem cannot be discovered in time during the test process, it will lead to poor test results at the least, and may cause batch scrapping of wafers in severe cases, causing huge economic losses. For this reason, the embodiment of the present application provides a probe card needle tip contact judgment system and method to judge whether the probe needle tip has good contact conditions. The following is a detailed description of the embodiment in conjunction with specific drawings.

[0039] refer to Figures 1 to 4 , Figure 1 A schematic diagram of the structure of a probe card needle tip contact judgment system provided in an embodiment of the present application; Figure 2 A schematic diagram of circuit connection of a probe card needle tip contact judgment system provided in an embodiment of the present application; Figure 3 A flowchart of a probe card needle tip contact determination method provided in an embodiment of the present application; Figure 4 A specific flow chart of the probe card needle tip contact determination method provided in an embodiment of the present application.

[0040] exist Figure 1 and Figure 2 In the embodiment of the present application, a probe card needle tip contact judgment system is provided, comprising: a fixing mechanism and an adjusting mechanism, wherein:

[0041] The fixing mechanism is used to fix the probe card 1 to be detected;

[0042] The adjustment mechanism is connected to the probe card to be detected and is used to assist the detection of the probe card to be detected.

[0043] In the above technical solution, a fixing mechanism and an adjusting mechanism are provided, wherein the fixing mechanism is used to fix the probe card to be detected; the adjusting mechanism is connected to the probe card to be detected to assist in the detection of the probe card to be detected; the reliability of judging whether the probe tip has good contact conditions is improved; the solution is simple and reliable, and can greatly reduce the debugging cost when encountering contact problems.

[0044] In a specific implementation scheme, it also includes a power supply 2, an auxiliary resistor 3 and a voltage measuring mechanism 4, wherein the power supply, the auxiliary resistor, the probe 5 of the probe card to be detected and the regulating mechanism are connected in series, and the voltage measuring mechanism is connected in parallel with the probe of the probe card to be detected, wherein:

[0045] The power supply is used to supply power to the probes of the probe card to be detected;

[0046] The voltage measuring mechanism is used to detect the voltage value of the probe of the probe card to be detected;

[0047] The auxiliary resistor is used to assist in calculating the current value flowing through the probe of the probe card to be detected.

[0048] In a specific implementation scheme, the adjustment mechanism includes a liftable workbench plate 6 and a special workpiece 7 arranged on the workbench plate, wherein:

[0049] The specially made workpiece abuts against the probe of the probe card to be detected, and the power supply, the auxiliary resistor, the probe of the probe card to be detected and the specially made workpiece are connected in series.

[0050] In a specific implementation scheme, the special workpiece is provided with a connecting wire 8, wherein:

[0051] The connecting wire is used to assist in detecting the voltage value of the probe of the probe card to be detected.

[0052] In a specific implementation manner, the fixing mechanism includes a fixing frame, and the probe card to be detected is detachably connected to the fixing frame.

[0053] In a specific implementation manner, it further comprises a workbench 9, on which the fixing frame and the workbench plate are both arranged.

[0054] In a specific implementation manner, the power source is a stabilized voltage source.

[0055] In a specific implementation manner, the voltage measuring mechanism is a multimeter.

[0056] In a specific embodiment, the tailor-made workpiece is a metal sheet.

[0057] Specifically, refer to Figure 2 Two connected holes need to be reserved on the probe card, one welding hole 10 is used for welding the probe and connecting the auxiliary resistor, and the other measuring hole 11 is used for measuring the voltage level, so that the probe contact is better and the test value is more stable when the multimeter is used to measure the voltage.

[0058] The special workpiece is in the shape of a metal sheet with a thickness of 200um-1000um, which is processed to achieve a surface flatness of ±10u; a wire is welded on the surface of the upward side for connecting a multimeter; preferably, copper material is used to reduce the risk of bending the needle due to excessive hardness of the material.

[0059] exist Figure 3 and Figure 4 In the embodiment of the present application, a method for determining contact of a probe card needle tip is provided, comprising the following steps:

[0060] Fixing the probe card to be detected by using a fixing mechanism;

[0061] Using an adjustment mechanism to assist the detection of the probe card to be detected;

[0062] Using a power supply to supply power to the probes of the probe card to be detected;

[0063] Using a voltage measuring mechanism to detect the voltage value of the probe of the probe card to be detected;

[0064] Using an auxiliary resistor to assist in calculating the current value flowing through the probe of the probe card to be detected;

[0065] calculating the contact resistance value of the probe of the probe card to be detected according to the voltage value of the probe of the probe card to be detected and the current value of the probe of the probe card to be detected;

[0066] The contact condition of the probe tip of the probe card to be detected is judged according to the contact resistance value.

[0067] In the above technical scheme, a fixing mechanism is used to fix the probe card to be detected; an adjusting mechanism is used to assist in the detection of the probe card to be detected; a power supply is used to power the probe of the probe card to be detected; a voltage measuring mechanism is used to detect the voltage value of the probe of the probe card to be detected; an auxiliary resistor is used to assist in calculating the current value flowing through the probe of the probe card to be detected; the contact resistance value of the probe of the probe card to be detected is calculated based on the voltage value of the probe of the probe card to be detected and the current value of the probe of the probe card to be detected; the contact condition of the probe tip of the probe card to be detected is judged based on the contact resistance value; and the reliability of judging whether the probe tip has good contact conditions is improved.

[0068] Specifically, the specific steps of the probe card needle tip contact judgment method include:

[0069] 1. Remove the protective back cover of the probe card, insert the probe card into the card slot of the probe station (the workbench here takes the probe station as an example), tighten the fixing screws to fix the probe card so that it will not shake under force;

[0070] 2. If Figure 1As shown, take the specially made workpiece and place it on the workbench plate;

[0071] 3. Gradually increase the lifting height of the workbench plate to ensure good contact between the probe and the surface of the special workpiece;

[0072] 4. Such as Figure 2 As shown, take a voltage-stabilized power supply and a multimeter, connect the negative pole of the voltage-stabilized power supply to the ground, then connect the black probe (negative pole -) of the multimeter, and connect the black probe to the special workpiece (lead-out wire); connect the positive pole of the voltage-stabilized power supply to the resistor R1 (auxiliary resistor), and then connect it to the red probe (positive pole +) of the multimeter; try to select thicker wires for the connecting wires to reduce the influence of wire resistance;

[0073] 5. Turn on the voltage-stabilized power supply and adjust it to output the specified voltage at the end of the auxiliary resistor connected to the power supply;

[0074] 6. Use the red test lead of the multimeter to measure the measurement hole at the root of the probe on the probe card, and record the value of the multimeter at the same time;

[0075] 7. Input the multimeter value into the formula to convert the contact resistance value, and determine whether the contact meets the requirements based on the specific situation.

[0076] For example, assuming that the auxiliary resistor is connected to the power supply at a voltage level of 0.2V, and the contact resistance of the probe is R2, then according to the principle of resistance voltage division, the voltage value at the root of the probe is Vz = 0.2*1000*R2 / (R1+R2)mV. If R1 = 10Ω, then the probe's 0.2 ohm contact resistance (R2 = 0.2Ω) will theoretically cause the multimeter to measure 3.921mV at the root of the needle. If the probe's contact resistance is greater than 200 milliohms to determine whether the probe has good contact, Vz must be <= 3.921mV; conversely, if Vz> 3.921mV, it indicates that the probe may have poor contact such as oxidation of the needle tip (the specific judgment criteria can be adjusted according to actual usage).

[0077] Compared with using the ohm range of a multimeter to directly measure the resistance between the needle and the special workpiece, which may result in unstable resistance value test and large deviation, and using a bridge to measure has high requirements on the contacts (the contact area of ​​the contact needs to be larger than the tip contact surface of the bridge clip, but the actual contact area of ​​the pin hole on the pin card PCB is small, which is not convenient for using a bridge to measure. In the case of poor contact, the actual contact resistance of about 100 milliohms may be measured as about 1 ohm). The test method provided by the present invention effectively avoids the problem that the resistance value after measurement and conversion is unstable and has a large deviation from the actual situation; see Table 1 and Table 2 for experimental comparison.

[0078]

[0079] Table 1 Repeat 10 times to measure the voltage at the root of the target probe with a multimeter to convert the resistance table

[0080]

[0081] Table 2 Multimeter and bridge repeat 10 times to measure the root resistance of the target probe

[0082] In the above technical solution, a method is provided to determine whether the probe tip of the probe card has good contact conditions without the test system. Use any workbench (such as a probe table, a needle grinder, etc.) that can fix the probe card and the wafer and adjust the distance between them, a special workpiece, a power supply, a multimeter, etc. to form a system, and judge whether the probe tip has good contact by reading the level conversion resistance value of the multimeter. This method is simple and reliable, and can greatly reduce the debugging cost when encountering contact problems.

[0083] Those skilled in the art will appreciate that the present application may be implemented as a system, method or computer program product.

[0084] Therefore, the present disclosure may be specifically implemented in the following forms, namely: it may be completely hardware, it may be completely software (including firmware, resident software, microcode, etc.), or it may be a combination of hardware and software, generally referred to herein as a "circuit", "module" or "system". In addition, in some embodiments, the present application may also be implemented in the form of a computer program product in one or more computer-readable media, and the computer-readable medium may contain computer-readable program code.

[0085] Any combination of one or more computer-readable media can be used. Computer-readable media can be computer-readable signal media or computer-readable storage media. Computer-readable storage media can be, for example, but not limited to, electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems, devices or devices, or any combination of the above. More specific examples (non-exhaustive list) of computer-readable storage media include: electrical connections with one or more wires, portable computer disks, hard disks, random access memories (RAM), read-only memories (ROM), erasable programmable read-only memories (EPROM or flash memory), optical fibers, portable compact disk read-only memories (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination of the above. In this document, computer-readable storage media can be any tangible medium containing or storing a program, which can be used by an instruction execution system, device or device or used in combination with it.

[0086] Although the embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and cannot be understood as limiting the present application. A person of ordinary skill in the art can change, modify, replace and modify the above embodiments within the scope of the present application. On this basis, a variety of replacements and improvements can be made to the present application, all of which fall within the scope of protection of the present application.

Claims

1. A probe card needle tip contact judgment system, characterized in that: include: A fixing mechanism and an adjusting mechanism, wherein: The fixing mechanism is used to fix the probe card to be detected; The adjustment mechanism is connected to the probe card to be detected and is used to assist the detection of the probe card to be detected.

2. The probe card needle tip contact judgment system according to claim 1, characterized in that: It also includes a power supply, an auxiliary resistor and a voltage measuring mechanism, wherein the power supply, the auxiliary resistor, the probe of the probe card to be detected and the regulating mechanism are connected in series, and the voltage measuring mechanism is connected in parallel with the probe of the probe card to be detected, wherein: The power supply is used to supply power to the probes of the probe card to be detected; The voltage measuring mechanism is used to detect the voltage value of the probe of the probe card to be detected; The auxiliary resistor is used to assist in calculating the current value flowing through the probe of the probe card to be detected.

3. The probe card needle tip contact judgment system according to claim 2, characterized in that: The adjustment mechanism includes a liftable workbench plate and a special workpiece arranged on the workbench plate, wherein: The specially made workpiece abuts against the probe of the probe card to be detected, and the power supply, the auxiliary resistor, the probe of the probe card to be detected and the specially made workpiece are connected in series.

4. The probe card needle tip contact judgment system according to claim 3, characterized in that: The specially made workpiece is provided with connecting wires, wherein: The connecting wire is used to assist in detecting the voltage value of the probe of the probe card to be detected.

5. The probe card needle tip contact judgment system according to claim 4, characterized in that: The fixing mechanism comprises a fixing frame, and the probe card to be detected is detachably connected to the fixing frame.

6. The probe card needle tip contact judgment system according to claim 5, characterized in that: It also includes a workbench, on which the fixing frame and the workbench plate are both arranged.

7. The probe card needle tip contact judgment system according to claim 6, characterized in that: The power supply is a voltage-stabilized source.

8. The probe card needle tip contact judgment system according to claim 7, characterized in that: The voltage measuring mechanism is a multimeter.

9. The probe card needle tip contact judgment system according to claim 8, characterized in that: The special workpiece is a metal sheet.

10. A probe card needle tip contact judgment method, characterized in that: The following steps are involved: Fixing the probe card to be detected by using a fixing mechanism; Using an adjustment mechanism to assist the detection of the probe card to be detected; Using a power supply to supply power to the probes of the probe card to be detected; Using a voltage measuring mechanism to detect the voltage value of the probe of the probe card to be detected; Using an auxiliary resistor to assist in calculating the current value flowing through the probe of the probe card to be detected; calculating the contact resistance value of the probe of the probe card to be detected according to the voltage value of the probe of the probe card to be detected and the current value of the probe of the probe card to be detected; The contact condition of the probe tip of the probe card to be detected is judged according to the contact resistance value.

Images