A micro-nano robot driving device and a preparation method thereof

Abstract

The application discloses a kind of micro-nano robot driving control devices, it is related to micro-nano robot driving control technical field, including multiple ultrasonic drive units, multiple ultrasonic drive units are arranged around a drive cavity, micro-nano robot is placed in drive cavity, each ultrasonic drive unit can radiate ultrasonic wave to drive cavity and can act on micro-nano robot.The micro-nano robot driving control device provided by the application is convenient for driving control to micro-nano robot.The application further provides a kind of preparation method of micro-nano robot driving control device.

Description

Technical Field

[0001] This invention relates to the field of micro-nano robot drive and control technology, and in particular to a micro-nano robot drive and control device and its preparation method. Background Technology

[0002] With advancements in micro- and nano-manufacturing and operating systems, various micro- and nano-robots have emerged. These robots convert external energy into their own kinetic energy by consuming fuel in the surrounding medium or by utilizing external energy sources such as light, electric fields, magnetic fields, or combinations thereof.

[0003] The commonly used method is to modify the surface of micro- and nano-robots with magnetic materials and control the direction of the micro- and nano-robots by applying an external magnetic field. However, this method requires the micro- and nano-robots to be magnetic and a rotating magnetic field to be set, which makes driving and control inconvenient. Summary of the Invention

[0004] The purpose of this invention is to provide a micro / nano robot drive and control device and its preparation method to solve the problems existing in the prior art and facilitate the drive and control of micro / nano robots.

[0005] To achieve the above objectives, the present invention provides the following solution:

[0006] The present invention provides a micro-nano robot drive and control device, including multiple ultrasonic drive units, the multiple ultrasonic drive units surrounding a drive cavity, the drive cavity being used to place micro-nano robots, and each of the ultrasonic drive units being able to radiate ultrasonic waves into the drive cavity and act on the micro-nano robots.

[0007] Preferably, the plurality of ultrasonic driving units are arranged in a circular shape.

[0008] Preferably, each of the ultrasonic driving units is configured as a piezoelectric ultrasonic transducer.

[0009] Preferably, each of the ultrasonic driving units includes an inner electrode layer, a piezoelectric layer, and an outer electrode layer arranged sequentially away from the driving cavity in the thickness direction; the piezoelectric layer is electrically connected to the inner electrode layer and the outer electrode layer, and the inner electrode layer and the outer electrode layer are used for electrical connection to an external power supply.

[0010] Preferably, the multiple inner electrode layers of the multiple ultrasonic driving units are integrally formed in the circumferential direction; the multiple piezoelectric layers of the multiple ultrasonic driving units are integrally formed in the circumferential direction; and there is a gap between the ends of two adjacent outer electrode layers in the circumferential direction.

[0011] Preferably, the plurality of piezoelectric layers form a piezoelectric ring, each piezoelectric ring comprising an annular frame and a plurality of piezoelectric single crystal particles fixedly distributed within the annular frame, each piezoelectric single crystal particle being electrically connected to the corresponding inner electrode layer and the outer electrode layer.

[0012] Preferably, it also includes a substrate, on which a plurality of the ultrasonic driving units are fixedly disposed.

[0013] Preferably, it further includes an acoustically transparent sealing layer, which is wrapped around each of the ultrasonic drive units.

[0014] The present invention also provides a method for fabricating a micro / nano robot control device, comprising the following steps:

[0015] Fabrication: Multiple ultrasonic driving units are fabricated and can be arranged to form a driving cavity;

[0016] Fixing: Fixing multiple ultrasonic drive units so that micro-nano robots can be placed within multiple drive cavities.

[0017] Preferably, each of the ultrasonic driving units is configured as a piezoelectric ultrasonic transducer, and the plurality of ultrasonic driving units are fixedly disposed on the substrate, and the plurality of ultrasonic driving units are covered with an acoustically transparent sealing layer; each of the ultrasonic driving units includes an inner electrode layer, a piezoelectric layer and an outer electrode layer arranged sequentially along the thickness direction away from the driving cavity, and the piezoelectric layer is electrically connected to the inner electrode layer and the outer electrode layer; the plurality of inner electrode layers are integrally formed in the circumferential direction; the plurality of piezoelectric layers are integrally formed in the circumferential direction; there is a gap between the ends of two adjacent outer electrode layers in the circumferential direction; the plurality of piezoelectric layers form a piezoelectric ring, and each piezoelectric ring includes an annular frame and a plurality of piezoelectric single crystal particles fixedly distributed in the annular frame, and each piezoelectric single crystal particle is electrically connected to the corresponding inner electrode layer and outer electrode layer;

[0018] In the preparation process: multiple piezoelectric single crystal particles are fixed by an annular frame to form the piezoelectric ring, and electrode paste is fixed on the inner and outer circumferential surfaces of the piezoelectric ring. The inner electrode layer is formed on the inner circumferential surface of the piezoelectric ring, and multiple outer electrode layers are divided on the outer circumferential surface of the piezoelectric ring. Then, the sound-permeable sealing layer is wrapped around the outer circumference of the piezoelectric ring.

[0019] During the fixation process, the ultrasonic driving unit is fixed onto the substrate.

[0020] The present invention achieves the following technical effects compared to the prior art:

[0021] The micro-nano robot driving and control device provided by the present invention is equipped with multiple ultrasonic driving units to drive the micro-nano robot in the circumferential direction. The multiple ultrasonic driving units can radiate ultrasonic waves into the driving cavity in different directions, thereby driving and controlling the micro-nano robot in different directions. Furthermore, the micro-nano robot can be controlled by controlling the frequency, phase and other information of the ultrasonic waves radiated by the ultrasonic driving units, thus facilitating flexible driving and control of the micro-nano robot.

[0022] The method for fabricating a micro / nano robot drive and control device provided by the present invention includes setting up multiple ultrasonic drive units. These multiple ultrasonic drive units can radiate ultrasonic waves into the drive cavity in different directions, thereby driving and controlling the micro / nano robot in different directions, which facilitates flexible driving and control of the micro / nano robot. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the micro / nano robot drive and control device provided in Example 1;

[0025] Figure 2 This is an exploded structural diagram of the micro / nano robot control device provided in Example 1;

[0026] Figure 3 This is a schematic diagram of the piezoelectric ring provided in Example 1;

[0027] Figure 4 This is an overall schematic diagram of the multiple ultrasound units provided in Embodiment 1.

[0028] In the figure: 1-Micro-nano robot drive and control device; 11-Ultrasonic drive unit; 12-Drive cavity; 13-Inner electrode layer; 14-Outer electrode layer; 15-Piezoelectric ring; 151-Piezoelectric single crystal particle; 152-Ring frame; 16-Substrate; 17-Sound-permeable sealing layer; 18-Lead wire. Detailed Implementation

[0029] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0030] The purpose of this invention is to provide a micro / nano robot drive and control device and its preparation method to solve the problems existing in the prior art and facilitate the drive and control of micro / nano robots.

[0031] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0032] Example 1

[0033] This embodiment provides a micro / nano robot control device 1. Please refer to [link / reference]. Figure 1 and Figure 2 It includes multiple ultrasonic driving units 11, and the multiple ultrasonic driving units 11 surround a driving cavity 12. The driving cavity 12 is used to place micro-nano robots. Each ultrasonic driving unit 11 can radiate ultrasonic waves into the driving cavity 12 and can act on the micro-nano robots.

[0034] Multiple ultrasonic driving units 11 are set up to drive the micro-nano robot in the circumferential direction. The multiple ultrasonic driving units 11 can radiate ultrasonic waves into the driving cavity 12 in different directions, thereby driving and controlling the micro-nano robot in different directions. Furthermore, the micro-nano robot can be controlled by controlling the frequency, phase and other information of the ultrasonic waves radiated by the ultrasonic driving units 11, which facilitates flexible driving and control of the micro-nano robot.

[0035] In the optional scheme of this embodiment, more preferably, multiple ultrasonic driving units 11 are arranged in a ring shape. By setting them in a ring shape, the driving cavity 12 is correspondingly set in a cylindrical shape. There are no gaps in the circumferential direction, which is convenient for focusing control. Moreover, the cylindrical driving cavity 12 makes the distance between the micro-nano robot and each ultrasonic driving unit 11 after it is placed in the driving cavity 12 the same, which is convenient for precise control. The ultrasonic driving unit 11 can be set to four.

[0036] In addition, the shape of the drive cavity 12 can be set to other shapes as needed, such as rectangular shape.

[0037] In the optional scheme of this embodiment, it is more preferred that each ultrasonic driving unit 11 is configured as a piezoelectric ultrasonic transducer. By configuring it as a piezoelectric ultrasonic transducer, the voltage information of the external power supply can be controlled to control the information of the radiated ultrasonic waves, thereby driving and controlling the micro-nano robot.

[0038] In the optional scheme of this embodiment, more preferably, each ultrasonic driving unit 11 includes an inner electrode layer 13, a piezoelectric layer, and an outer electrode layer 14 arranged sequentially along the thickness direction away from the driving cavity 12; the piezoelectric layer is electrically connected to the inner electrode layer 13 and the outer electrode layer 14, and the inner electrode layer 13 and the outer electrode layer 14 are electrically connected to an external power supply through leads 18. Each ultrasonic driving unit 11 is equivalent to a small focusing transducer. Each transducer is individually controlled by a signal source, and multiple signal sources are adjusted to generate AC signals with different frequencies, phases, and amplitudes, and are individually connected to the positive and negative leads of multiple transducer array elements. Due to the inverse piezoelectric effect of a single ultrasonic driving unit 11, the piezoelectric layer generates ultrasonic waves with the same frequency as the electrical signal. The sound waves radiate directly centripetally, forming an ultrasonic sound field focused on the center of the driving cavity 12, and acting on the micro-nano robot to form the power of the micro-nano robot.

[0039] In the optional embodiments of this example, more preferably, the multiple inner electrode layers 13 of the multiple ultrasonic driving units 11 are integrally formed in the circumferential direction to improve the overall integrity; the multiple piezoelectric layers of the multiple ultrasonic driving units 11 are integrally formed in the circumferential direction to improve the overall integrity; there is a gap between the ends of two adjacent outer electrode layers 14 in the circumferential direction, so that the whole is divided into multiple ultrasonic driving units 11 in the circumferential direction, and each ultrasonic driving unit 11 can be controlled individually; wherein the inner electrode layer 11 can have only one lead wire 18, and the multiple outer electrode layers 14 can each have a lead wire 18.

[0040] In the optional solutions of this embodiment, a more preferred option is described in the following description: Figure 3 and Figure 4 Multiple piezoelectric layers form a piezoelectric ring 15. Each piezoelectric ring 15 includes an annular frame 152 and multiple piezoelectric single crystal particles 151 fixedly distributed within the annular frame 152. Each piezoelectric single crystal particle 151 is electrically connected to the corresponding inner electrode layer 13 and outer electrode layer 14 to achieve electrical conduction. The annular frame 152 is made of epoxy resin, and each piezoelectric single crystal particle 151 is fixedly embedded in the annular frame 152 at intervals. The piezoelectric single crystal particles 151 are arranged in multiple layers in the axial direction, and multiple particles are distributed in the circumferential direction in each layer.

[0041] In the optional embodiments of this example, more preferably, the micro-nano robot drive and control device 1 provided in this example also includes a substrate 16, and a plurality of ultrasonic drive units 11 are fixedly disposed on the substrate 16. The substrate 16 is configured as a circular silicon wafer, and the ultrasonic drive units 11 are bonded and fixed to the substrate 16 by epoxy resin. The substrate 16 facilitates connection with the whole and other components.

[0042] In the optional solutions of this embodiment, more preferably, the micro-nano robot drive and control device 1 provided in this embodiment also includes an acoustically transparent sealing layer 17, which is wrapped around each ultrasonic drive unit 11. The acoustically transparent sealing layer 17 is formed by curing a polyurethane mixture, which encapsulates and protects the whole without affecting the transmission of ultrasonic waves. The acoustically transparent sealing layer 17 can also use other ultrasonic transmission media, and is not limited to the above-mentioned materials.

[0043] Example 2

[0044] This embodiment provides a method for fabricating a micro / nano robot control device as provided in Embodiment 1, comprising the following steps:

[0045] Preparation: Multiple ultrasonic driving units 11 are prepared and can form a driving cavity 12; multiple piezoelectric single crystal particles 151 are fixed by an annular frame 152 to form a piezoelectric ring 15, and electrode paste is fixed on the inner and outer peripheral surfaces of the piezoelectric ring 15. An inner electrode layer 13 is formed on the inner peripheral surface of the piezoelectric ring 15, and multiple outer electrode layers 14 are divided on the outer peripheral surface of the piezoelectric ring 15; then an acoustically permeable sealing layer 17 is wrapped around the outer periphery of the piezoelectric ring 15.

[0046] Fixing: The ultrasonic driving unit 11 is fixed on the substrate 16, and the micro-nano robot can be placed in multiple driving cavities 12.

[0047] More specifically, the preparation method includes the following steps:

[0048] Prepare piezoelectric single crystal wafers and cut them into piezoelectric single crystal particles using a cutting machine;

[0049] Piezoelectric single-crystal particles are fixed around a circular mold. An epoxy resin mixture is poured into the mold, and the mold is placed in a vacuum chamber for vacuum extraction. This allows the epoxy resin mixture to penetrate into the pores between the piezoelectric single-crystal particles. After the epoxy resin cures, the mold is removed to form a piezoelectric ring 15. Figure 3 As shown; the circular mold can be configured to be a closed circular mold formed by two rings that can be disassembled and fastened together. One of the rings has multiple piezoelectric single crystal particle placement grooves on its inner wall and is fastened and closed by the other ring. The circular mold is provided with a potting hole.

[0050] A thin layer of silver paste is plated onto the inner and outer surfaces of the piezoelectric ring 15 to form inner and outer electrode surfaces. The outer electrode surface is divided into four equal parts to form a U-shaped four-element piezoelectric ring. Electrode leads are then welded on, with one electrode lead leading out for each inner electrode and one electrode lead leading out for each element in the outer electrode. Figure 4 As shown;

[0051] The piezoelectric ring 15 with the welded electrode leads is fixed into the potting mold, and then a polyurethane mixture is potted. The polyurethane mixture can be acoustically matched with the piezoelectric composite material, allowing sound waves to radiate into the medium better. After the polyurethane mixture cures, a sound-permeable sealing layer 17 is formed, and then the mold is demolded. The potting mold can be set as a closed ring mold formed by two rings that can be disassembled and snapped together, and the ring mold is provided with a potting hole.

[0052] The substrate 16 is cleaned, and then the ultrasonic driving unit 11 and the substrate 16 are bonded together with epoxy resin. Each ultrasonic driving unit 11 is controlled by a signal generator to form a centripetal radiating ultrasonic sound field controlled by four array elements. The prepared micro-nano robot is placed in the middle of the sound field, thereby completing the preparation of the micro-nano robot driving and control device for centripetal focusing and radiating ultrasonic waves.

[0053] Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this invention. Furthermore, those skilled in the art will recognize that, based on the ideas of this invention, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this invention.

Claims

1. A micro / nano robot control device, characterized in that: The device includes multiple ultrasonic driving units (11), which surround a driving cavity (12) in a circular shape. The driving cavity (12) is cylindrical with no gaps in the circumferential direction. The driving cavity (12) is used to place micro-nano robots, and the distance between the micro-nano robots and each ultrasonic driving unit (11) is the same. Each ultrasonic driving unit (11) can radiate ultrasonic waves into the driving cavity (12) to form an ultrasonic sound field focused on the center of the driving cavity (12) and can act on the micro-nano robots. The multiple ultrasonic driving units (11) can radiate ultrasonic waves into the driving cavity (12) in different directions, thereby driving and controlling the micro-nano robots in different directions.

2. The micro / nano robot control device according to claim 1, characterized in that: Each of the ultrasonic drive units (11) is configured as a piezoelectric ultrasonic transducer.

3. The micro / nano robot control device according to claim 2, characterized in that: Each of the ultrasonic driving units (11) includes an inner electrode layer (13), a piezoelectric layer and an outer electrode layer (14) arranged sequentially along the direction away from the driving cavity (12) in the thickness direction; the piezoelectric layer is electrically connected to the inner electrode layer (13) and the outer electrode layer (14), and the inner electrode layer (13) and the outer electrode layer (14) are used to be electrically connected to an external power supply.

4. The micro / nano robot control device according to claim 3, characterized in that: The multiple inner electrode layers (13) of the multiple ultrasonic driving units (11) are integrally formed in the circumferential direction; the multiple piezoelectric layers of the multiple ultrasonic driving units (11) are integrally formed in the circumferential direction; there is a gap between the ends of two adjacent outer electrode layers (14) in the circumferential direction.

5. The micro / nano robot control device according to claim 4, characterized in that: Multiple piezoelectric layers form a piezoelectric ring (15), each piezoelectric ring (15) includes an annular frame (152) and multiple piezoelectric single crystal particles (151) fixedly distributed within the annular frame (152). Each piezoelectric single crystal particle (151) is electrically connected to the corresponding inner electrode layer (13) and outer electrode layer (14).

6. The micro / nano robot control device according to claim 1, characterized in that: It also includes a substrate (16), on which multiple ultrasonic driving units (11) are fixedly disposed.

7. The micro / nano robot control device according to claim 1, characterized in that: It also includes an acoustically transparent sealing layer (17), which is wrapped around each of the ultrasonic drive units (11).

8. A method for fabricating a micro / nano robot control device as described in any one of claims 1-7, characterized in that: Includes the following steps: Preparation: Multiple ultrasonic driving units (11) are prepared and can be arranged to form a driving cavity (12). Fixing: Fixing multiple ultrasonic drive units (11) so that micro-nano robots can be placed within multiple drive cavities (12).

9. The preparation method according to claim 8, characterized in that: Each of the ultrasonic driving units (11) is configured as a piezoelectric ultrasonic transducer. Multiple ultrasonic driving units (11) are fixedly mounted on a substrate (16), and each ultrasonic driving unit (11) is covered with a sound-permeable sealing layer (17). Each ultrasonic driving unit (11) includes, in the thickness direction, an inner electrode layer (13), a piezoelectric layer, and an outer electrode layer (14) arranged sequentially away from the driving cavity (12). The piezoelectric layer is electrically connected to the inner electrode layer (13) and the outer electrode layer (14). The inner electrode layers (13) are integrally formed in the circumferential direction; the piezoelectric layers are integrally formed in the circumferential direction; there is a gap between the ends of two adjacent outer electrode layers (14) in the circumferential direction; the piezoelectric layers form a piezoelectric ring (15), each piezoelectric ring (15) includes an annular frame (152) and a plurality of piezoelectric single crystal particles (151) fixedly distributed in the annular frame (152), each piezoelectric single crystal particle (151) is electrically connected to the corresponding inner electrode layer (13) and the outer electrode layer (14); In the preparation process: multiple piezoelectric single crystal particles (151) are fixed by an annular frame (152) to form the piezoelectric ring (15), and electrode paste is fixed on the inner and outer circumferential surfaces of the piezoelectric ring (15). The inner electrode layer (13) is formed on the inner circumferential surface of the piezoelectric ring (15), and the outer circumferential surface of the piezoelectric ring (15) is divided into multiple outer electrode layers (14). Then, the sound-permeable sealing layer (17) is wrapped around the outer circumference of the piezoelectric ring (15). During the fixation process, the ultrasonic drive unit (11) is fixed onto the substrate (16).

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