Vibration isolation platform frame

Abstract

The invention discloses a vibration isolation platform frame. A vibration isolation platform (30) of the vibration isolation platform frame is assembled to a support (20) through an air spring (22). The platform adjustment assembly comprises a sensor device (12) and a trigger (13). The sensor device is assembled on the support and comprises a first sensor arranged at a first height position and a second sensor arranged at a second height position in sequence from low to high in the height direction. The triggering piece is assembled on the vibration isolation platform and can move along with the vibration isolation platform, when the triggering piece reaches a first height position, the triggering piece can trigger the first sensor in a non-contact mode to output a first triggering signal for controlling air inflation of the air spring, and when the triggering piece reaches a second height position, the triggering piece outputs a second triggering signal. The triggering piece can trigger the second sensor in a non-contact mode to output a second triggering signal for controlling the air spring to stop inflating. The working condition of the air spring is fed back in a non-contact mode, it can be guaranteed that the air spring works stably, and the service life is prolonged.

Description

Technical Field

[0001] The present application relates to a vibration isolation device, and in particular to a vibration isolation platform frame. Background Art

[0002] The vibration isolation platform is a device that can isolate vibrations and is widely used in various fields, especially in some technical fields that require precise measurements, such as the technical field of electron microscopy. It is necessary to avoid slight vibrations caused by any reason as much as possible to avoid affecting the observed data or images.

[0003] In the prior art, the vibration isolation platform frame includes a bracket, a vibration isolation platform and an air spring. The vibration isolation platform is assembled to the bracket through the air spring, and the inflated air spring is used to achieve the vibration isolation effect on the vibration isolation platform. However, in order to accurately and quickly control the air intake of the air spring, some mechanical structures are usually required to be designed in the prior art to obtain the working condition of the air spring, which will inevitably cause rigid contact between the vibration isolation platform and the bracket, thereby causing undesirable vibration effects on the equipment on the vibration isolation platform.

[0004] In addition, in some special cases, such as when an air spring leaks, if emergency measures cannot be implemented quickly, rigid contact between the vibration isolation platform and the bracket may occur after the air spring leaks, and the vibration isolation effect of the vibration isolation platform cannot be ensured. This is especially true when continuous observation using an electron microscope is required, which will inevitably cause unexpected vibration effects on the observation data and images. Summary of the invention

[0005] In response to the above problems, the present application discloses a vibration isolation platform frame, which uses a non-contact method to feedback the working condition of the air spring, thereby avoiding the vibration caused by direct rigid contact, and can ensure the stable operation of the air spring and increase the service life of the air spring.

[0006] In order to achieve the above objectives, this application adopts the following technical solutions:

[0007] The present application provides a vibration isolation platform frame, which includes a bracket, a vibration isolation platform and a platform adjustment assembly. The bracket is provided with a plurality of air springs and a control valve connected to the air circuit input end of each air spring. The control valve can conduct the air circuit input end when a first trigger signal is obtained, and can block the air circuit input end when a second trigger signal is obtained. The vibration isolation platform is assembled to the bracket through the air spring, and the relative height between the vibration isolation platform and the bracket is changed based on the air spring. The platform adjustment assembly includes a sensor device and a trigger member. The sensor device is assembled to the bracket, and the sensor device includes a first sensor arranged at a first height position from low to high in the height direction and a second sensor arranged at a second height position. The trigger member is assembled to the vibration isolation platform and can move with the vibration isolation platform. The trigger member reaching the first height position can trigger the first sensor non-contactly so that the first sensor outputs a first trigger signal, and the trigger member reaching the second height position can trigger the second sensor non-contactly so that the second sensor outputs a second trigger signal.

[0008] After adopting the above structure, the air pressure in the air spring can be monitored at all times, so that the supporting force generated by the air pressure in the air spring and the gravity it bears can always be kept in a balanced state, thereby ensuring the vibration isolation effect of the air spring. During the whole process, since the triggering member triggers the touch sensor device in a non-contact manner, the direct rigid contact between the vibration isolation platform and the bracket can be completely avoided, and the vibration caused by direct rigid contact can be completely avoided. In addition, after setting two trigger positions, the trigger position at a lower height can ensure that the air spring always maintains a basic amount of air inflation, and even after the air spring leaks, a certain amount of air inflation can still be maintained in the air spring. The trigger position at a higher height can be used to control the air spring to be in a better working position, thereby avoiding problems such as unstable operation and reduced life of the air spring due to the air spring rising to an excessively high position.

[0009] In an exemplary embodiment of the vibration isolation platform frame, the platform adjustment assembly also includes an initial height adjustment member, which can be assembled to the vibration isolation platform, and the trigger member is assembled to the vibration isolation platform through the initial height adjustment member, and the trigger member is movably arranged on the initial height adjustment member to be able to adjust the initial height distance of the trigger member relative to the second height position.

[0010] This design can be used to limit the floating height of the air spring to control the air spring within an optimal working range, and in the case of multiple platform adjustment components and multiple air springs, it can be used to make the floating heights of each air spring consistent to ensure that the working plane of the vibration isolation platform remains in a horizontal state.

[0011] In an exemplary embodiment of the vibration isolation platform frame, the initial height adjustment member includes a fixed seat, which can be assembled to the vibration isolation platform. One of the fixed seat or the trigger member is provided with a track, and the other of the fixed seat or the trigger member can be connected to the track and move relative to the track. The above structure is simple, reliable and easy to operate.

[0012] In an exemplary embodiment of the vibration isolation platform frame, the fixing seat is provided with a track, the track is a long hole arranged along the height direction, and the triggering member is provided with a sliding part that can be penetrated and connected to the long hole.

[0013] In an exemplary embodiment of the vibration isolation platform frame, the initial height adjustment member also includes a positioning member arranged on the fixing seat, and an adjustment bolt passing through the positioning member, and the adjustment bolt can also be threadedly connected to the trigger member, and the trigger member can be driven to move along the track by rotating the adjustment bolt. The above design makes the overall structure simple and stable, and the trigger member can be driven to rise or fall to any position along the track by rotating the adjustment bolt.

[0014] In an exemplary embodiment of the vibration isolation platform frame, the first sensor and the second sensor are photoelectric sensors.

[0015] In an exemplary embodiment of the vibration isolation platform frame, the first sensor includes a first signal transmitter and a first signal receiver arranged at the same height. The second sensor includes a second signal transmitter and a second signal receiver arranged at the same height. The triggering member is a shielding sheet, and when the shielding sheet blocks the first signal transmitter and the first signal receiver, the first sensor is triggered to output a first trigger signal, and when the shielding sheet blocks the second signal transmitter and the second signal receiver, the second sensor is triggered to output a second trigger signal.

[0016] In a schematic embodiment of a vibration isolation platform frame, the vibration isolation platform frame includes four air springs, and the installation positions of the four air springs constitute the four vertices of a rectangle. The vibration isolation platform frame includes three platform adjustment components, one of which is arranged in the middle position of two adjacent air springs, and the control valves of the two air springs can obtain the first trigger signal or the second trigger signal output by the platform adjustment component, and the other two platform adjustment components are respectively arranged corresponding to the other two air springs, and the control valves of the other two air springs can respectively obtain the first trigger signal or the second trigger signal output by the corresponding platform adjustment components. The above structure can ensure that the floating heights of the four air springs remain consistent, making the operation of the vibration isolation platform frame more stable.

[0017] In an exemplary embodiment of the vibration isolation platform frame, the installation positions of the three platform adjustment components form three vertices of an isosceles triangle. The above structure can further ensure that the floating heights of the four air springs remain consistent.

[0018] In an exemplary embodiment of the vibration isolation platform frame, the vibration isolation platform frame also includes a monitoring device, which can count the number of times each platform adjustment component outputs the second trigger signal, and the monitoring device outputs an alarm signal when the number of outputs counted by the monitoring device within a preset time period is greater than a preset value. The above structure can help users quickly know that the vibration isolation platform frame has a fault and the location of the fault. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present application. Also, the same reference symbols are used throughout the accompanying drawings to represent the same components. In the accompanying drawings:

[0020] Figure 1 A schematic diagram of an exploded structure for illustrating an exemplary embodiment of a vibration isolation platform frame.

[0021] Figure 2 To illustrate Figure 1 A top view of the assembled vibration isolation platform frame is shown.

[0022] Figure 3 A structural schematic diagram for illustrating an exemplary implementation of a platform adjustment assembly of a vibration isolation platform frame.

[0023] Figure 4 yes Figure 3 Schematic diagram of the exploded structure of the initial height adjustment component and the trigger component.

[0024] 10 Platform adjustment components

[0025] 12 Sensor device

[0026] 122 First Sensor

[0027] 123 Second signal transmitter

[0028] 124 Second sensor

[0029] 125 Second signal receiver

[0030] 13 Trigger

[0031] 136 Sliding part

[0032] 16 Initial height adjustment

[0033] 162 Fixed seat

[0034] 163 Track

[0035] 164 Positioning parts

[0036] 165 Adjusting bolt

[0037] 20 Bracket

[0038] 22 Air spring

[0039] 24 Control valve

[0040] 26 Monitoring Devices

[0041] 30 Vibration Isolation Platform DETAILED DESCRIPTION

[0042] In order to make the purpose, technical solution and advantages of the present application clearer, the technical solution of the present application will be clearly and completely described below in conjunction with the specific embodiments of the present application and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present application.

[0043] In this document, “exemplary” means “serving as an example, instance or illustration”, and any diagram or implementation described in this document as “exemplary” should not be interpreted as a more preferred or more advantageous technical solution.

[0044] In order to simplify the drawings, only the parts related to the present application are schematically shown in each figure, and they do not represent the actual structure of the product. In addition, in order to simplify the drawings and facilitate understanding, in some figures, only one of the parts with the same structure or function is schematically drawn or marked.

[0045] The technical solutions provided by various embodiments of the present application are described in detail below in conjunction with the accompanying drawings.

[0046] Figure 1 A schematic diagram of an exploded structure for illustrating an exemplary embodiment of a vibration isolation platform frame. Figure 2 To illustrate Figure 1 The top view of the vibration isolation platform frame after assembly is shown. Figure 1 and Figure 2 As shown, the vibration isolation platform frame includes a bracket 20, a vibration isolation platform 30 and a platform adjustment assembly 10. Among them, a plurality of air springs 22 and a control valve 24 connected to the air path input end of each air spring 22 are arranged on the bracket 20. The control valve 24 can control the conduction and closing of the air supply path of the air spring 22. The vibration isolation platform 30 can be assembled to the bracket 20 through the air spring 22, and the relative height between the vibration isolation platform 30 and the bracket 20 can be changed based on the air spring 22, and the vibration isolation effect of the vibration isolation platform can be achieved through the air spring 22.

[0047] exist Figure 1 and Figure 2 The vibration isolation platform frame shown in the figure is also provided with a platform adjustment assembly 10, which includes a sensor device 12 and a trigger 13. The sensor device 12 is assembled on the bracket 20 and is usually in a fixed state; and the trigger 13 is assembled on the vibration isolation platform 30. When the vibration isolation platform 30 moves relative to the bracket 20 based on the air spring 22, the trigger 13 moves with the vibration isolation platform.

[0048] To better understand the specific structure of the sensor device 12 and the trigger member 13, please also refer to Figure 3 , Figure 3 A schematic diagram of a structure for illustrating an exemplary implementation of a platform adjustment component. Figure 3 As shown, the sensor device 12 includes a first sensor 122 and a second sensor 124, and the first sensor 122 and the second sensor 124 are arranged in sequence from low to high, wherein the first sensor 122 is arranged at a first height position which is relatively low, and the second sensor 124 is arranged at a second height position which is relatively high. The first sensor 122 and the second sensor 124 are respectively connected to the control valve 24 signal at the air circuit input end of the air spring 22.

[0049] When the trigger member 13 moves with the vibration isolation platform 30 (the structure of the vibration isolation platform is shown in FIG. Figure 1 and Figure 2 )along Figure 3 When the trigger member 13 moves downward or upward in the direction indicated by the middle arrow, it is possible that the trigger member 13 reaches a lower first height position, at which time the trigger member 13 triggers the first sensor 122 non-contactly, so that the first sensor 122 outputs a first trigger signal, and the first trigger signal is output to the air spring 22 (see Figure 1 and Figure 2 ) control valve 24, after obtaining the first trigger signal, the control valve 24 will control the air path input end of the air spring 22 to be connected, so that the air spring 22 is inflated. After the air spring 22 is inflated, it will drive the vibration isolation platform 30 to rise until it reaches a higher second height position. At this time, the trigger member 13 will non-contactly trigger the second sensor 124, so that the second sensor 124 outputs a second trigger signal, and the second trigger signal will also be output to the air spring 22 (see Figure 1 and Figure 2 ) of the control valve 24, which controls the air path input end of the air spring 22 to be blocked after obtaining the second trigger signal, so that the air spring 22 stops inflating.

[0050] After adopting the above structure, the air pressure in the air spring can be always monitored, so that the supporting force generated by the air pressure in the air spring and the gravity it bears can always be kept in a balanced state, ensuring the vibration isolation effect of the air spring. In the whole process, since the triggering member 13 triggers the touch sensor device 12 in a non-contact manner, the direct rigid contact between the vibration isolation platform 30 and the bracket 20 can be completely avoided, and the vibration caused by the direct rigid contact can be completely avoided.

[0051] In addition, the present application controls the inflation or stopping of inflation of the air spring 22 through two trigger positions, which can make the air spring 22 work more stably. The trigger position at a lower height (the first height position) can ensure that the air spring always maintains a basic amount of inflation. Even after the air spring 22 leaks, the trigger member 13 reaches the first height position to trigger the inflation of the air spring 22, so a certain amount of inflation can still be maintained in the air spring, keeping the vibration isolation platform in a stable working state. The trigger position at a higher height (the second height position) can be used to control the air spring to be in a better working position, avoiding problems such as unstable operation and reduced life of the air spring due to the air spring rising to an excessively high position.

[0052] exist Figure 3 In the embodiment shown in , the first sensor 122 and the second sensor 124 can be photoelectric sensors, for example, the first sensor 11 is composed of a first signal transmitter and a first signal receiver (blocked in the figure), and the second sensor 124 is composed of a second signal transmitter 123 and a second signal receiver 125. In the working state, the photoelectric signal emitted by the first signal transmitter will be directly received by the first signal receiver, and the photoelectric signal emitted by the second signal transmitter 123 will be directly received by the second signal receiver. The corresponding triggering member can be a shielding plate. When the shielding plate moves to the first height position to block the first signal receiver from obtaining the photoelectric signal emitted by the first signal transmitter, the first sensor 122 is triggered to output the first trigger signal. When the shielding plate moves to the second height position to block the second signal receiver from obtaining the photoelectric signal emitted by the second signal transmitter, the second sensor 124 is triggered to output the second trigger signal. Of course, according to different design requirements, the first sensor 122 and the second sensor 124 can also adopt other types of non-contact sensors.

[0053] exist Figures 1 to 3In the illustrated embodiment, the platform adjustment assembly 10 further includes an initial height adjustment member 16, which can be assembled to the vibration isolation platform 30, and the trigger member 13 is assembled to the vibration isolation platform 30 through the initial height adjustment member 16, and the trigger member 13 is movably arranged on the initial height adjustment member 16, that is, the position of the trigger member 13 relative to the vibration isolation platform 30 can be changed. After the entire vibration isolation platform frame is assembled and before the air spring 22 is inflated, the platform adjustment assembly 10 with this function can limit the positional relationship between the trigger member 13 and the first sensor 122 and the second sensor 124 by adjusting the position of the trigger member 13, and in particular, can adjust the initial height distance between the second height position where the trigger member 13 and the second sensor 124 are located. This height distance (the distance between the trigger member 13 and the second height position) can be used to limit the floating height of the air spring and control the air spring 22 to be within a better working range.

[0054] In addition, when the vibration isolation platform frame is provided with a plurality of platform adjustment components 10, such as Figure 2 As shown, different platform adjustment components 10 can correspond to control valves of different air springs 22 respectively. After assembly is completed, the initial height of each corresponding trigger member 13 is adjusted by the initial height adjustment member 16, so that the floating height of each air spring 22 can be consistent, ensuring that the working plane of the vibration isolation platform remains in a horizontal state.

[0055] exist Figure 3 In the illustrated embodiment, the initial height adjustment member 16 includes a fixing seat 162, which can be assembled to the vibration isolation platform 30 and can be simultaneously referred to as Figure 4 , Figure 4 yes Figure 3 Schematic diagram of the exploded structure of the initial height adjustment member 16 and the trigger member 13. Figure 4 As shown, the fixing seat 162 is provided with a track 163, and the trigger member 13 can be connected to the track 163 and can move relative to the track. Specifically, Figure 4 The track 163 is a long hole arranged in the height direction on the fixing seat 162, and the trigger member 13 is correspondingly provided with a sliding portion 136 which can be penetrated and connected to the long hole. The above structure is simple and reliable, and is easy to operate.

[0056] Of course, for those skilled in the art, according to different design requirements, the track 163 of the fixing seat 162 of the initial height adjustment member 16 is not limited to the long hole structure. In addition, the connection structure between the initial height adjustment member 16 and the trigger member can also be completely different. For example, a track structure can also be set on the trigger member 13 so that the fixing seat 162 can be connected to the track and move relative to the track.

[0057] exist Figure 4In the illustrated embodiment, the initial height adjustment member 16 further includes a positioning member 164 and an adjusting bolt 165. The positioning member 164 is disposed on the fixing seat 162, and can be integrally connected to the fixing seat 162 or detachably connected thereto. The adjusting bolt 165 is passed through the positioning member 164, and the adjusting bolt 165 can also be threadedly connected to the trigger member 13 along the dotted line in the figure, and the trigger member 13 can be driven to move along the track 163 by rotating the adjusting bolt 165.

[0058] The above structure is combined with the design of the track 163 to make the overall structure simple and stable. By rotating the adjusting bolt 165, the trigger member 13 can be driven to rise or fall to any position along the track 163. In actual use, additional fastening bolts can be used to help position the trigger member 13 to the adjusted position.

[0059] exist Figure 1 and Figure 2 In the embodiment shown, the vibration isolation platform frame includes four air springs 22, four control valves 24 and three platform adjustment assemblies 10. The installation positions of the four air springs 22 constitute the four vertices of a rectangle, see Figure 2 , Figure 2 The platform adjustment component 10 at the top in the middle figure is arranged in the middle position of the two adjacent air springs 22 at the top in the figure, and the control valve 24 of the two air springs 22 can obtain the first trigger signal or the second trigger signal output by the platform adjustment component 10 at the top in the figure, and thereby control the inflation or stopping of the two air springs 22 at the top in the figure. The platform adjustment component 10 at the bottom left in the figure corresponds to the setting of the air spring 22 at the bottom left in the figure, and the control valve 24 of the air spring 22 at the bottom left in the figure can obtain the first trigger signal or the second trigger signal output by the platform adjustment component 10 at the bottom left in the figure, and can control the inflation or stopping of the air spring 22. The platform adjustment component 10 at the bottom right in the figure corresponds to the setting of the air spring 22 at the bottom right in the figure, and the control valve 24 of the air spring 22 at the bottom right in the figure can obtain the first trigger signal or the second trigger signal output by the platform adjustment component 10 at the bottom right in the figure, and can control the inflation or stopping of the air spring 22. Figure 2 In the illustrated embodiment, the installation positions of the three platform adjustment assemblies 10 form three vertices of an isosceles triangle.

[0060] The above structure can ensure that the floating heights of the four air springs 22 remain consistent, making the vibration isolation platform frame work more stably.

[0061] exist Figure 2In the illustrated embodiment, the vibration isolation platform frame further includes a monitoring device 26, which can count the number of times each platform adjustment component 10 outputs the second trigger signal. When the number of outputs counted by the monitoring device 26 within a preset time period is greater than a preset value, an alarm signal will be output. The alarm signal can be in a variety of forms that can be understood by those skilled in the art, such as an alarm signal sent to a mobile communication device, or a sound signal, a light signal, etc. Once the user obtains the alarm signal, it means that the corresponding air spring 22 has a fault such as air leakage, and needs to be shut down for maintenance, so as to help the user quickly know that the vibration isolation platform frame has a fault and the location of the fault.

[0062] The above is only a specific implementation of the present application. Under the above teachings of the present application, those skilled in the art can make other improvements or modifications based on the above embodiments. Those skilled in the art should understand that the above specific description is only to better explain the purpose of the present application, and the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. Vibration isolation platform frame, characterized in that: The vibration isolation platform frame comprises: A bracket (20), the bracket (20) being provided with a plurality of air springs (22), and a control valve (24) connected to an air path input end of each of the air springs (22), the control valve (24) being capable of conducting the air path input end when a first trigger signal is obtained, and being capable of blocking the air path input end when a second trigger signal is obtained; a vibration isolation platform (30) which is assembled to the bracket (20) via the air spring (22) and changes the relative height between the vibration isolation platform (30) and the bracket (20) based on the air spring (22); and A platform adjustment component (10), the platform adjustment component (10) comprising: A sensor device (12) is assembled on the bracket (20), the sensor device (12) comprising a first sensor (122) arranged at a first height position and a second sensor (124) arranged at a second height position in order from low to high in the height direction, and A triggering member (13), the triggering member (13) being assembled on the vibration isolation platform (30) and being capable of moving along with the vibration isolation platform (30); the triggering member (13) reaching the first height position being capable of non-contact triggering the first sensor (122), so that the first sensor (122) outputs the first triggering signal; and the triggering member (13) reaching the second height position being capable of non-contact triggering the second sensor (124), so that the second sensor (124) outputs the second triggering signal.

2. The vibration isolation platform frame according to claim 1, characterized in that: The platform adjustment component (10) further comprises: An initial height adjustment member (16) is capable of being assembled to the vibration isolation platform (30); the trigger member (13) is assembled to the vibration isolation platform (30) via the initial height adjustment member (16); and the trigger member (13) is movably arranged on the initial height adjustment member (16) so as to be able to adjust the initial height distance of the trigger member (13) relative to the second height position.

3. The vibration isolation platform frame according to claim 2, characterized in that: The initial height adjustment member (16) comprises a fixing seat (162), and the fixing seat (162) can be assembled to the vibration isolation platform (30). One of the fixing seat (162) or the trigger member (13) is provided with a track (163), and the other of the fixing seat (162) or the trigger member (13) can be connected to the track (163) and move relative to the track.

4. The vibration isolation platform frame according to claim 3, characterized in that: The fixing seat (162) is provided with the track (163), and the track (163) is a long hole arranged along the height direction. The trigger member (13) is provided with a sliding portion (136) capable of penetrating and connecting to the long hole.

5. The vibration isolation platform frame according to claim 3, characterized in that: The initial height adjustment member (16) further comprises: A positioning member (164) disposed on the fixing seat (162): and An adjusting bolt (165) is inserted through the positioning member (164), and the adjusting bolt (165) can also be threadedly connected to the trigger member (13). By rotating the adjusting bolt (165), the trigger member (13) can be driven to move along the track (163).

6. The vibration isolation platform frame according to claim 1, characterized in that: The first sensor (122) and the second sensor (124) are photoelectric sensors.

7. The vibration isolation platform frame according to claim 6, characterized in that: The first sensor (122) comprises a first signal transmitter and a first signal receiver which are arranged at the same height; The second sensor (124) comprises a second signal transmitter (123) and a second signal receiver (125) which are arranged at the same height; The triggering member (13) is a shielding sheet, which triggers the first sensor (122) to output the first trigger signal when the shielding sheet blocks the first signal transmitter and the first signal receiver, and triggers the second sensor (124) to output the second trigger signal when the shielding sheet blocks the second signal transmitter and the second signal receiver.

8. The vibration isolation platform frame according to claim 1, characterized in that: The vibration isolation platform frame comprises four air springs (22), and the installation positions of the four air springs (22) form four vertices of a rectangle; The vibration isolation platform frame comprises three platform adjustment components (10), wherein one of the platform adjustment components (10) is arranged at a middle position between two adjacent air springs (22), and the control valves (24) of the two air springs (22) can obtain the first trigger signal or the second trigger signal output by the platform adjustment component (10); the other two platform adjustment components (10) are respectively arranged corresponding to the other two air springs (22), and the control valves (24) of the other two air springs (22) can respectively obtain the first trigger signal or the second trigger signal output by the corresponding platform adjustment components (10).

9. The vibration isolation platform frame according to claim 8, characterized in that: The installation positions of the three platform adjustment components (10) form three vertices of an isosceles triangle.

10. The vibration isolation platform frame according to claim 8, characterized in that: The vibration isolation platform frame also includes a monitoring device (26) capable of counting the number of times each platform adjustment component (10) outputs the second trigger signal, and the monitoring device (26) outputs an alarm signal when the number of outputs counted within a preset time period is greater than a preset value.

Images