Basket slicer for quartz boat loading

Abstract

The application relates to the technical field of silicon wafer loading, in particular to a wafer basket separating machine applied to quartz boat loading, which comprises a rack, a plurality of groups of vertical plates one, a plurality of groups of vertical plates two and a plurality of groups of guide plates are symmetrically fixedly installed on the inner wall top of the rack, a material conveying plate one and a material conveying plate two are arranged in the rack, an electric push rod is fixedly installed on the top of the rack, a plugging assembly is arranged below the rack, the plugging assembly comprises a connecting rod and a turnover frame, a support is fixedly connected to one side of the bottom of the rack, one end of the turnover frame is rotationally connected with the support, and the output end of the electric push rod arranged in the rack is rotationally connected with the connecting rod; compared with the prior art, the alternating transportation is realized through the up-and-down alternating operation of the material conveying plate one and the material conveying plate two, the silicon wafer continuous separation and conveying are realized, the separation speed and the whole production process efficiency are improved, and the process consistency from the silicon wafer separation to the quartz boat loading can be ensured in cooperation with the subsequent assembly.

Description

Technical Field

[0001] This invention relates to the field of silicon wafer loading technology, specifically to a basket slicing machine for loading quartz boats. Background Technology

[0002] In the semiconductor manufacturing field, quartz boats are key equipment for carrying and transporting silicon wafers. The process of loading silicon wafers has a crucial impact on the efficiency and quality of the entire production process. However, the traditional silicon wafer separation process often relies on a single mechanical structure or a simple adsorption method to process silicon wafers one by one. Each operation requires waiting for the previous silicon wafer to complete the separation, transfer and subsequent processes before the next operation can be carried out, which cannot meet the demand for rapid supply of silicon wafers in large-scale production.

[0003] Regarding the continuity of the workflow, the connection between each link is not smooth and there are obvious time gaps. For example, in the process of silicon wafers being separated and transferred to subsequent components, continuous operation cannot be achieved and the equipment is frequently in a waiting state. This not only reduces the overall utilization rate of the equipment, but may also cause secondary contamination or position displacement of the silicon wafers during the waiting process due to process interruptions and stagnation, further affecting the accuracy and stability of subsequent processes.

[0004] To address the aforementioned technical shortcomings, a solution is proposed. Summary of the Invention

[0005] The purpose of this invention is to provide a basket divider for use in quartz boat loading, in order to overcome the technical deficiencies mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a flower basket slicing machine for loading quartz boats, comprising a frame, wherein multiple sets of vertical plates I, multiple sets of vertical plates II and multiple sets of guide plates are symmetrically fixedly installed on the top of the inner wall of the frame, material conveying plate I and material conveying plate II are provided inside the frame, an electric push rod is fixedly installed on the top of the frame, and an insertion assembly is provided below the frame;

[0007] The mounting assembly includes a connecting rod and a tilting frame. A bracket is fixedly connected to one side of the bottom of the frame. One end of the tilting frame is rotatably connected to the bracket. The output end of an electric push rod located inside the frame is rotatably connected to the connecting rod. The end of the connecting rod away from the electric push rod is rotatably connected to the tilting frame. An electric lifting plate is provided on one side of the tilting frame.

[0008] Furthermore, a sliding groove is provided on one side wall of the tilting frame, and one end of the electric lifting plate cooperates with the sliding groove.

[0009] Furthermore, a sliding plate is provided above the second conveyor plate, and multiple sets of pneumatic suction cups are fixedly installed on the bottom of the first and second conveyor plates and the outer side of the electric lifting plate. Multiple sets of positioning plates are fixedly installed on the side walls of the first and second conveyor plates.

[0010] Furthermore, multiple sets of limiting slide rods are fixedly connected to both sides of the top of the second conveyor plate, and a linkage rod is fixedly connected to the midpoint of the top of the second conveyor plate. The top end of the linkage rod is movably connected to a rotating shaft through a bearing, and linkage rollers are fixedly connected to both ends of the rotating shaft. Guide grooves that cooperate with the linkage rollers are opened on the adjacent side walls of the two guide plates.

[0011] Furthermore, guide blocks are fixedly installed on the top of the slide plate and on both sides of the linkage rod, and the two guide blocks are respectively provided with threaded grooves and sliding holes.

[0012] Furthermore, through slots are provided on both sides of the top of the slide plate and at the midpoint. Sleeve 1 and Sleeve 2 are fixedly installed in the through slots, and the limiting slide rod and the linkage rod are slidably connected in the corresponding sleeve 1 and sleeve 2.

[0013] Furthermore, both the bottom ends of the first vertical plate and the second vertical plate are fixedly connected to I-shaped tracks, and I-shaped sliders are symmetrically fixedly installed on both sides of the top of the slide plate. The I-shaped sliders are slidably connected in the I-shaped tracks, and electric slides are fixedly installed on both sides of the top of the first material conveying plate. The electric slides are slidably connected in the corresponding I-shaped tracks.

[0014] This invention also proposes an operating method for a flower basket divider applied to a quartz boat, comprising the following steps:

[0015] Step 1: Material conveyor drive and coordination: The slide plate, material conveyor one and material conveyor two slide back and forth along the I-shaped track under external drive. Through the cooperation of the guide groove and the linkage roller, material conveyor one and material conveyor two pass alternately and continuously feed materials.

[0016] Step 2: Insertion of the silicon wafer into the assembly: When the conveyor plate 1 or conveyor plate 2 brings the silicon wafer close to the assembly, the electric push rod drives the connecting rod to rotate the flipping frame 90 degrees. The pneumatic suction cup on the outside of the electric lifting plate adsorbs the bottom of the silicon wafer, and the pneumatic suction cup on the top releases the adsorption. After the flipping frame deflects in the opposite direction, the electric lifting plate descends and places the silicon wafer into the quartz boat slot. The conveyor plate and the assembly work together, combined with the continuous movement of the quartz boat, to achieve continuous wafer slicing and precise placement.

[0017] Compared with the prior art, the beneficial effects of the present invention are:

[0018] 1. In use, this invention employs alternating transport, where conveyor plate one and conveyor plate two move up and down alternately. This overcomes the inefficiency of traditional single-method silicon wafer separation. The alternating transport of this invention operates simultaneously at two different locations. For example, while conveyor plate one rises to adsorb a silicon wafer, conveyor plate two descends to release the previously adsorbed wafer, achieving continuous separation and transport of silicon wafers. This significantly increases the speed of silicon wafer separation and effectively improves the efficiency of the entire production process. This alternating transport method ensures close integration of the silicon wafer separation, adsorption, and transport stages. While one conveyor plate completes adsorption and begins moving the silicon wafer, the other conveyor plate is already prepared for the next adsorption, reducing equipment waiting time, improving overall equipment efficiency, and better coordinating with subsequent component insertion and electric lifting plate operations. This ensures the continuity of the entire process from silicon wafer separation to quartz boat loading.

[0019] 2. In use, this invention utilizes a mounting assembly to precisely deflect the silicon wafers fed by conveyor plates one and two by 90 degrees, effectively solving the problem of poor compatibility between silicon wafers and quartz boats caused by a lack of precise angle adjustment. This significantly improves the accuracy of silicon wafer placement, ensuring that the silicon wafers accurately correspond to the internal structure of the quartz boat. Furthermore, the electric lifting plate precisely places the silicon wafers into the quartz boat, further ensuring the positional accuracy of the silicon wafers within the quartz boat. This effectively avoids defects such as silicon wafer collisions and misalignment caused by inaccurate placement, significantly reducing the defect rate in subsequent processes due to silicon wafer loading issues. Attached Figure Description

[0020] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to the accompanying drawings;

[0021] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0022] Figure 2 This is a schematic diagram of the structure of conveyor plate one and conveyor plate two of the present invention;

[0023] Figure 3 This is a schematic diagram of the connecting rod structure in this invention;

[0024] Figure 4 This is a schematic diagram of the flipping frame structure in the present invention;

[0025] Figure 5 This is a schematic diagram of the skateboard structure in this invention;

[0026] Figure 6 This is a schematic diagram of the linkage roller structure in this invention;

[0027] Figure 7 This is a schematic diagram of the pneumatic suction cup structure in this invention;

[0028] Figure 8 This is a schematic diagram of the guide groove structure in this invention.

[0029] Reference numerals in the attached drawings: 1. Frame; 201. Vertical plate one; 202. Vertical plate two; 3. Guide plate; 401. Connecting rod; 402. Tilting frame; 403. Electric lifting plate; 404. Positioning plate; 501. Pneumatic suction cup; 6. Bracket; 7. Guide groove; 8. Electric push rod; 901. Material conveying plate one; 902. Material conveying plate two; 903. Slide plate; 11. Limiting slide rod; 12. Linkage rod; 13. Linkage roller; 14. Guide block. Detailed Implementation

[0030] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0031] Example 1: As Figures 1-8 As shown, the flower basket splitting machine applied to quartz boat loading includes a frame 1. Multiple sets of vertical plates 1 201, multiple sets of vertical plates 202 and multiple sets of guide plates 3 are symmetrically fixedly installed on the top of the inner wall of the frame 1. Material conveying plate 1 901 and material conveying plate 2 902 are provided inside the frame 1. An electric push rod 8 is fixedly installed on the top of the frame 1.

[0032] like Figure 1 As shown, an operating table is set below the frame 1. The top of one end of the operating table near the support 6 is used to place the quartz boat horizontally, while the top of the other end of the operating table is used to place the flower basket. A large number of silicon wafers are placed in the flower basket in a stacked state. It should be explained here that the quartz boat is an existing device used to place silicon wafers at intervals, increase the spacing between adjacent silicon wafers, and enhance air circulation and uniform heating between adjacent silicon wafers.

[0033] A sliding plate 903 is provided above the second conveyor plate 902. Multiple sets of pneumatic suction cups 501 are fixedly installed on the bottom of the first conveyor plate 901 and the second conveyor plate 902, as well as on the outside of the electric lifting plate 403. Multiple sets of positioning plates 404 are fixedly installed on the side walls of the first conveyor plate 901 and the second conveyor plate 902.

[0034] Both vertical plate 1 201 and vertical plate 2 202 are fixedly connected to I-shaped rails at their bottom ends. I-shaped sliders are symmetrically fixedly installed on both sides of the top of the slide plate 903. The I-shaped sliders are slidably connected in the I-shaped rails. Both sides of the top of the conveying plate 1 901 are fixedly installed with electric slides. The electric slides are slidably connected in the corresponding I-shaped rails. It should be explained here that the electric slides are existing equipment used to drive the conveying plate 1 901 to perform continuous reciprocating horizontal movement.

[0035] Multiple sets of limiting slide rods 11 are fixedly connected to both sides of the top of the conveyor plate 2 902. A linkage rod 12 is fixedly connected to the midpoint of the top of the conveyor plate 2 902. The top of the linkage rod 12 is movably connected to a rotating shaft via a bearing. Both ends of the rotating shaft are fixedly connected to linkage rollers 13. The adjacent side walls of the two guide plates 3 are provided with guide grooves 7 that cooperate with the linkage rollers 13. The guide grooves 7 are as follows: Figure 8 As shown, the coordinated movement of the linkage roller 13 and the linkage rod 12 enables the regular lifting and lowering of the material conveying plate 2 902 and its alternating material conveying with the material conveying plate 1 901.

[0036] Guide blocks 14 are fixedly installed on the top of the slide plate 903 and on both sides of the linkage rod 12. The two guide blocks 14 are respectively provided with threaded grooves and sliding holes. Two support frames are fixed on the top of the inner wall of the frame 1. A threaded rod and a long rod are provided between the two support frames. A motor for driving the threaded rod to rotate is provided on the outside of the support frame. The motor drives the threaded rod and cooperates with the threaded grooves on the outside of the guide blocks 14 to drive the slide plate 903 to slide horizontally along the I-shaped track.

[0037] The top two sides and the midpoint of the slide plate 903 are all provided with through slots. Sleeve 1 and Sleeve 2 are fixedly installed in the through slots. The limiting slide rod 11 and the linkage rod 12 are respectively slidably connected in the corresponding sleeve 1 and sleeve 2.

[0038] In the specific configuration, slide plate 903, conveyor plate one 901, and conveyor plate two 902, under the action of an external drive device, reciprocate horizontally along the corresponding I-beam track. Slide plate 903 drives the linkage roller 13 to slide within the guide groove 7 via linkage rod 12. Guide groove 7 is as follows: Figure 8 As shown, the guide groove 7 consists of two flat grooves and two inclined grooves;

[0039] As the linkage roller 13 moves from the flat groove to the inclined groove, the linkage rod 12 drives the material conveying plate 902 to rise synchronously under the action of the linkage roller 13. During the rise of the material conveying plate 902, the limiting slide rod 11 and the linkage rod 12 rise synchronously in the corresponding sleeve one and sleeve two. When the material conveying plate 902 rises to the highest point, the material conveying plate 901 passes under the material conveying plate 902 and transports the silicon wafer to the position of the quartz boat.

[0040] Through the cooperation of the guide groove 7 and the linkage roller 13, the alternating passage and continuous feeding of the conveyor plate 1 901 and the conveyor plate 2 902 are realized. It should be noted that when the conveyor plate 1 901 and the conveyor plate 2 902 are at their lowest positions, the height of the pneumatic suction cup 501 at the bottom of the two is the same.

[0041] As the second conveyor plate 902 moves from its highest position to its lowest position and gradually approaches the basket, the positioning plate 404 contacts the side wall of the silicon wafer to be removed inside the basket. The positioning plate 404 corrects the position of the silicon wafer inside the basket. Then, the pneumatic suction cup 501 adsorbs and fixes the top of the silicon wafer. Subsequently, the second conveyor plate 902 drives the silicon wafer to move in the opposite direction and alternates with the first conveyor plate 901 again, so as to achieve continuous and precise feeding of silicon wafers in the basket.

[0042] Example 2: A mounting assembly is provided below the frame 1. The mounting assembly includes a connecting rod 401 and a flipping frame 402. A bracket 6 is fixedly connected to one side of the bottom of the frame 1. One end of the flipping frame 402 is rotatably connected to the bracket 6. The output end of the electric push rod 8 located inside the frame 1 is rotatably connected to the connecting rod 401. The end of the connecting rod 401 away from the electric push rod 8 is rotatably connected to the flipping frame 402.

[0043] An electric lifting plate 403 is provided on one side of the tilting frame 402. A sliding groove is provided on one side wall of the tilting frame 402. One end of the electric lifting plate 403 is matched with the sliding groove. It should be explained here that the electric lifting plate 403 is an existing device that moves up and down within the sliding groove provided on the side wall of the tilting frame 402.

[0044] In a specific setting, when the first conveyor plate 901 or the second conveyor plate 902 carries the silicon wafer to the vicinity of the insertion component via the pneumatic suction cup 501, the electric push rod 8 drives the connecting rod 401 to move downward and further drives the flipping frame 402 to flip. The flipping frame 402 flips 90 degrees under the action of the electric push rod 8 and the connecting rod 401.

[0045] The pneumatic suction cup 501 on the outside of the electric lifting plate 403 contacts and adsorbs the bottom of the silicon wafer. The pneumatic suction cup 501 at the bottom of the conveyor plate 1 901 or conveyor plate 2 902 located on the top of the silicon wafer then releases its adsorption on the silicon wafer. Subsequently, the flipping frame 402 deflects in the opposite direction and drives the silicon wafer to deflect synchronously by 90 degrees. The electric lifting plate 403 drives the silicon wafer to descend and places the silicon wafer in the corresponding slot inside the quartz boat. The coordinated cooperation of conveyor plate 1 901, conveyor plate 2 902 and the insertion component, along with the continuous movement of the quartz boat, enables continuous slicing and continuous precise placement of the silicon wafer.

[0046] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to any specific implementation. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A basket divider for use in quartz boat loading, comprising a frame (1), characterized in that, The inner wall of the frame (1) is symmetrically fixedly installed with multiple sets of vertical plates (201), multiple sets of vertical plates (202) and multiple sets of guide plates (3). The frame (1) is provided with material conveying plate (901) and material conveying plate (902). The top of the frame (1) is fixedly installed with an electric push rod (8). The bottom of the frame (1) is provided with a mounting assembly. The mounting assembly includes a connecting rod (401) and a tilting frame (402). A bracket (6) is fixedly connected to one side of the bottom of the frame (1). One end of the tilting frame (402) is rotatably connected to the bracket (6). The output end of the electric push rod (8) located inside the frame (1) is rotatably connected to the connecting rod (401). The end of the connecting rod (401) away from the electric push rod (8) is rotatably connected to the tilting frame (402). An electric lifting plate (403) is provided on one side of the tilting frame (402). A sliding plate (903) is provided above the second conveyor plate (902). Multiple sets of pneumatic suction cups (501) are fixedly installed on the bottom of the first conveyor plate (901) and the second conveyor plate (902) and on the outside of the electric lifting plate (403). Multiple sets of positioning plates (404) are fixedly installed on the side walls of the first conveyor plate (901) and the second conveyor plate (902). Multiple sets of limiting slide rods (11) are fixedly connected to both sides of the top of the second conveyor plate (902). A linkage rod (12) is fixedly connected to the midpoint of the top of the second conveyor plate (902). The top of the linkage rod (12) is movably connected to a rotating shaft through a bearing. Both ends of the rotating shaft are fixedly connected to linkage rollers (13). The adjacent side walls of the two guide plates (3) are provided with guide grooves (7) that cooperate with the linkage rollers (13). The bottom ends of the first vertical plate (201) and the second vertical plate (202) are both fixedly connected to I-shaped rails. I-shaped sliders are symmetrically fixedly installed on both sides of the top of the slide plate (903). The I-shaped sliders are slidably connected in the I-shaped rails. Electric slides are fixedly installed on both sides of the top of the first material conveying plate (901). The electric slides are slidably connected in the corresponding I-shaped rails.

2. The basket-splitting machine for use in quartz boat loading according to claim 1, characterized in that, The tilting frame (402) has a sliding groove on one side wall, and one end of the electric lifting plate (403) is engaged with the sliding groove.

3. The basket divider for use in a quartz boat as described in claim 1, characterized in that, Guide blocks (14) are fixedly installed on the top of the slide plate (903) and on both sides of the linkage rod (12). The two guide blocks (14) are respectively provided with threaded grooves and sliding holes.

4. The basket divider for use in a quartz boat as described in claim 3, characterized in that, The top two sides and the midpoint of the slide plate (903) are all provided with through slots, and sleeve one and sleeve two are fixedly installed in the through slots. The limiting slide rod (11) and the linkage rod (12) are respectively slidably connected in the corresponding sleeve one and sleeve two.

5. An operating method for a basket divider mounted on a quartz boat, as described in any one of claims 1-4, characterized in that... Includes the following steps: Step 1: Material conveyor drive and coordination: The slide plate (903), material conveyor one (901) and material conveyor two (902) slide back and forth along the I-shaped track under external drive. Through the guide groove (7) and the linkage roller (13), material conveyor one (901) and material conveyor two (902) alternately pass through and continuously feed materials. Step 2: Insertion of the component wafer: When the material conveyor plate 1 (901) or material conveyor plate 2 (902) brings the silicon wafer close to the insertion component, the electric push rod (8) drives the connecting rod (401) to rotate the flipping frame (402) 90 degrees. The pneumatic suction cup (501) on the outside of the electric lifting plate (403) adsorbs the bottom of the silicon wafer. The pneumatic suction cup (501) on the top releases the adsorption. After the flipping frame (402) deflects in the opposite direction, the electric lifting plate (403) descends and puts the silicon wafer into the quartz boat slot. The material conveyor plate and the insertion component work together, combined with the continuous movement of the quartz boat, to realize the continuous slicing and precise placement of the silicon wafer.

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