A negative pressure driven actuator based on electromagnetic change and its preparation method

Abstract

The present invention provides a negative pressure driven actuator based on electromagnetic changes and a preparation method thereof, wherein the negative pressure driven actuator comprises: an actuator body that has been magnetized and a coil substrate nested at one end of the actuator body, a vent hole is provided on one side of the actuator body, an airway that is connected to the vent hole is provided inside the actuator body, and a plurality of mutually interpenetrating cavities are provided at intervals along the direction away from the vent hole in the airway, the vent hole is used to communicate with an external air pump to extract the air in the cavity to make it present a negative pressure, a plurality of polygonal bosses that are compatible with the cavity are provided at intervals at one end of the actuator body away from the coil, the coil is connected to an electromagnetic measuring device, and the voltage change and magnetic flux change caused by the deformation of the actuator body are measured by the electromagnetic measuring device. The negative pressure driven actuator provided by the present application can sense deformation adaptively and has strong applicability.

Description

Technical Field

[0001] The present invention relates to the technical field of flexible driving devices, and in particular to a negative pressure driving actuator based on electromagnetic changes and a preparation method thereof. Background Art

[0002] Soft actuators have broad application prospects in the fields of bionic robots, flexible grasping and medical rehabilitation. Bending, as one of the most basic forms of movement of soft actuators, plays a vital role in both biological and mechanical systems. According to different bending drive methods, soft actuators can be divided into gas drive, voltage drive, magnetic field drive, bio-hybrid drive, etc.

[0003] Compared with soft actuators with other driving modes, pneumatic soft actuators have simple structure, low manufacturing cost, high driving efficiency, fast response speed and no pollution. The existing pneumatic soft actuator structures are mostly driven by inflation mode to achieve deformation and require a large inflation pressure, such as a multi-curvature flexible manipulator based on a segmented variable stiffness structure and its preparation method disclosed in CN118288325A, a soft robot actuator and a gripper disclosed in CN108698285A, etc., the cross-section of its internal cavity is an elongated pleated structure. Under the action of inflation positive pressure, the pressure inside the cavity increases, causing the side wall of the trapezoidal cavity to expand outward, generating asymmetric stress distribution, causing the actuator pleats to expand and bend inward for flexible grasping.

[0004] However, when driven by higher inflation pressure, the actuator cavity may explode. In addition, due to the influence of manufacturing process, materials, etc., most of the existing pneumatic soft actuators do not have perception capabilities. Some pneumatic soft actuators achieve perception capabilities through integrated sensors, but traditional rigid sensors have insufficient sensing bandwidth, and after being integrated into the soft actuator body, they will limit the deformation of the actuator, affecting its use. Summary of the invention

[0005] Based on this, the purpose of the present invention is to provide a negative pressure driven actuator based on electromagnetic changes and a preparation method thereof, so as to solve the technical problems existing in the prior art.

[0006] The present invention proposes a negative pressure driven actuator based on electromagnetic changes, comprising an actuator body that has been magnetized and a coil substrate embedded in one end of the actuator body, wherein one end of the actuator body is a plane, and the coil in the coil substrate deforms with the actuator body, and one side of the actuator body is provided with a vent hole connected to an external air pump, and the internal interval of the actuator body is provided with a plurality of cavities that are interconnected and have a polygonal cross-section, and the polygonal cavity includes at least two oppositely arranged inner angles, and the connecting line between the two oppositely arranged inner angles is parallel to the plane end of the actuator body, and the air in the cavity is extracted through the vent hole to make the cavity present a negative pressure, and through the two oppositely arranged inner angles, when the cavity is under negative pressure, the actuator body bends toward the direction close to the plane end of the actuator body, and the coil is connected to an electromagnetic measuring device, and the voltage change and magnetic flux change caused by the deformation of the actuator body are measured by the electromagnetic measuring device, so that the negative pressure driven actuator can detect its deformation based on a preset measurement method.

[0007] Preferably, the plurality of cavities are interconnected through an air channel, one end of the air channel is connected to the vent hole, and a plurality of polygonal bosses matching the cavities are provided at intervals at one end of the actuator body away from the plane end.

[0008] Preferably, the cross-sectional shapes of the plurality of cavities arranged at intervals are the same and are located on the same side of the airway, and the cross-sectional shape of the cavities is a hexagon.

[0009] Preferably, the two oppositely disposed inner angles The angle range is: .

[0010] Preferably, the wall thickness of the end of the actuator body where the polygonal boss is located is greater than the wall thickness of the plane end.

[0011] Preferably, a slot structure is provided on the actuator body, the slot structure is arranged close to the vent hole, and the slot structure is used to install the negative pressure driven actuator.

[0012] Preferably, the coil is a square spiral structure, and the diameter of the coil is 0.15 mm-0.2 mm.

[0013] Preferably, the step of detecting deformation based on a preset measurement method comprises:

[0014] Acquiring a voltage signal of the coil when the negative pressure driven actuator is deformed, and performing denoising processing on the voltage signal to obtain a corrected voltage signal;

[0015] Integrating the correction voltage signal to obtain a change in magnetic flux of the coil when the negative pressure driven actuator is deformed;

[0016] The change in magnetic flux is fitted with the deformation of the negative pressure driven actuator to measure the deformation of the negative pressure driven actuator according to the change in magnetic flux.

[0017] The present invention also provides a method for preparing a negative pressure driven actuator based on electromagnetic changes, comprising:

[0018] Select the main mold, auxiliary mold, lower mold, coil mold, side mold, coil, and rubber-coated aluminum wire;

[0019] The mixed material is prepared by stirring silica gel and magnetic powder in a preset mass ratio;

[0020] Winding the coil in the coil mold according to a preset path, pouring the mixed material into the coil mold after the coil is wound and curing it, and demoulding the coil mold to obtain a coil matrix;

[0021] The main mold, the auxiliary mold, the lower mold and the rubber-coated aluminum wire are assembled, the coil substrate is placed in the gap between the auxiliary mold and the lower mold, the auxiliary mold is provided with a plurality of columns adapted to the cavity, and the outer diameter of the rubber-coated aluminum wire is adapted to the inner diameter of the vent hole;

[0022] Pour the mixed material into the assembled mold cavity and solidify it, demould the main mold, the auxiliary mold, the lower mold and the rubber-coated aluminum wire to obtain an open actuator matrix, which includes a plurality of cavities and vents arranged at intervals;

[0023] Pour the mixed material into the side mold, place the opening of the actuator base on the side mold for curing, demould the side mold to obtain the actuator body, and the coil base is embedded in the actuator body;

[0024] After magnetizing the actuator body and the coil substrate, a negative pressure driven actuator based on electromagnetic changes is obtained.

[0025] Compared with the prior art, the present invention has the following beneficial effects: the negative pressure driven actuator based on electromagnetic change provided by the present application comprises a magnetized actuator body and a coil substrate embedded in one end of the actuator body, one end of the actuator body is a plane, the coil in the coil substrate can be deformed freely with the actuator body, one side of the actuator body is provided with an air vent connected to an external air pump, the internal interval of the actuator body is provided with a plurality of interconnected cavities with a polygonal cross section, the polygonal cavity comprises at least two oppositely arranged inner angles, and the connecting line between the two oppositely arranged inner angles is parallel to the plane end of the actuator body; the air vent is used to connect to the external air pump to extract The air in the cavity makes it present a negative pressure. Through the two relatively set internal angles, the actuator body bends in the direction close to the plane end of the actuator body when the cavity is under negative pressure. The coil is connected to the electromagnetic measuring device, and the voltage change and magnetic flux change caused by the deformation of the actuator body are measured by the electromagnetic measuring device. The present application causes the actuator body to deform through negative pressure, and the pressure is flexibly controllable, safe and reliable. The actuator body is magnetized, and the coil is nested at the bottom of the actuator body. The deformation of the actuator can be adaptively sensed by measuring the voltage change of the coil. The coil is nested inside the actuator body to reduce the deformation effect on the actuator. It is suitable for large-scale promotion.

[0026] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 is a schematic structural diagram of the negative pressure driven actuator in the first embodiment;

[0028] Figure 2 is a schematic structural diagram of a cross section of a negative pressure driven actuator in Embodiment 1;

[0029] Figure 3 It is a schematic diagram of the structure of a single cavity under tensile deformation;

[0030] Figure 4 A schematic diagram of a structure in which multiple cavities are bent and deformed;

[0031] Figure 5 It is the structural schematic diagram of the coil;

[0032] Figure 6 for Figure 1 A schematic diagram of the structure of a coil in another optional embodiment;

[0033] Figure 7 Schematic diagram of the process of preparing the negative pressure driven actuator in Example 2;

[0034] Figure 8This is a schematic diagram of the structure of the mold assembly for preparing the negative pressure driven actuator in Example 2;

[0035] Fig. 9 for Figure 8 Schematic diagram of the explosion structure;

[0036] Fig.10 for Fig. 9 Schematic diagram of the explosion structure from another perspective;

[0037] Fig.11 Schematic diagram of coil mold structure;

[0038] Fig.12 It is a schematic diagram of the side mold structure;

[0039] Fig.13 Schematic diagram of the flow of the method for measuring the negative pressure driven actuator in Example 3.

[0040] Description of main component symbols:

[0041] 10. Actuator body; 11. Vent; 12. Airway; 13. Cavity; 14. Polygonal boss; 15. Slot structure; 20. Coil; 31. Main mold; 311. Polygonal groove; 32. Sub-mold; 321. Column; 322. Clamping boss; 33. Lower mold; 34. Coil mold; 35. Side mold; 36. Rubber-coated aluminum wire.

[0042] The following specific implementation manner will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0043] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0044] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which the present invention belongs. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0045] Embodiment 1

[0046] Specifically, Figures 1 to 6As shown, an embodiment of the present invention provides a negative pressure driven actuator based on electromagnetic change, including a magnetized actuator body 10 and a coil substrate nested in one end of the actuator body, the coil substrate is a thin sheet, the coil substrate contains a coil of a preset shape, and the base material of the coil substrate is consistent with the material of the actuator body; the coil 20 in the coil substrate can be deformed freely with the actuator body 10, the bottom surface of the actuator body is a plane, and when in use, it contacts the object to be grasped through the bottom plane, a vent hole 11 is provided on one side of the actuator body 10, and an air duct 12 communicated with the vent hole 11 is provided in the internal interval of the actuator body 10, and the air The channel 12 is provided with a plurality of mutually interpenetrating cavities 13 with polygonal cross-sections at intervals along a direction away from the vent hole 11. Preferably, the number of sides of the polygon is not less than five. The polygonal cavity 13 includes at least two oppositely arranged inner angles. The line between the two oppositely arranged inner angles is parallel to the plane end of the actuator body. The vent hole 11 is used to communicate with an external air pump to extract the air in the cavity 13 to make it present a negative pressure. Through the two oppositely arranged inner angles, the cavity is caused to collapse cooperatively under the action of negative pressure, thereby generating bending deformation. The coil 20 is connected to an electromagnetic measuring device, and the voltage change and magnetic flux change caused by the deformation of the actuator body are measured by the electromagnetic measuring device.

[0047] Indicatively, Figure 1As shown, the present application is explained with the top of the actuator body 10 as a boss and the bottom as a plane; a plurality of polygonal bosses 14 adapted to the cavity are arranged at intervals at one end of the actuator body 10 away from the coil, and the actuator body 10 is made of a deformable elastic material and is a soft structure as a whole; the coil 20 is nested at the bottom of the actuator body 10, the vent 11 is arranged at the lower left side of the actuator body 10, the airway 12 is connected to the vent 11, and the airway 12 is arranged at intervals from left to right with a plurality of cavities 13, and the number of cavities is 5. The vent 11 is connected to an external air pump through a silicone hose, and the air pump is used to evacuate air so that a negative pressure is formed inside the actuator body 10, and the actuator body 10 is bent downward and deformed under the action of the negative pressure; the actuator of the present application can be used to grasp objects, and when in use, the bottom surface of the actuator body 10 begins to contact the surface of the object to be grasped, and grasps the object when it is bent downward and deformed; Since the actuator body 10 is magnetized, the coil nested under the actuator body 10 will generate a voltage signal when the actuator body 10 is deformed. The coil 20 is connected to the electromagnetic measuring device, and the change in the voltage signal of the coil 20 when the actuator body 10 is deformed is measured by the electromagnetic measuring device, and converted into a change in magnetic flux; the magnetic flux change and the deformation state data of the actuator body 10 are fitted, and the magnetic flux change and the deformation state data show a strong linear correlation, so a linear function is used for fitting, which is simple, convenient and fast; the actuator body 10 is deformed by negative pressure, and the pressure size is flexible and controllable, safe and reliable; the actuator body 10 is magnetized, and the coil 20 is nested at the bottom of the actuator body 10. The deformation of the actuator can be sensed by measuring the voltage change of the coil. The coil is nested inside the actuator body 10 to reduce the deformation effect on the actuator.

[0048] Optionally, the cavity 13 is located above the airway 12 as a whole, and the cross-sectional shapes of the plurality of cavities arranged at intervals are the same and are all hexagonal, and each polygonal boss 14 corresponds to a hexagonal cavity; Figure 2 As shown, the cavity includes two oppositely disposed inner corners , the two opposite inner angles are the same and parallel to the length direction of the airway, and the angles of the other four inner angles are also the same. By setting the two opposite inner angles parallel to the airway, the cavity 13 in the actuator body 10 is flat, which can reduce the resistance of the actuator deformation. By changing the angles in the hexagonal cavity, the bending performance and bending direction of the negative pressure driven actuator can be changed. Preferably, , for a single chamber, the pressure component in the longitudinal direction is 2P (cos / 2), the pressure component in the height direction is 2P (sin / 2). When <90°, 2P(cos / 2) is less than 2P (sin / 2), the chamber will collapse in the height direction, causing it to bend clockwise and fit the object for grasping. >90°, 2P (cos / 2) is greater than 2P (sin / 2), the chamber will collapse in the height direction, resulting in a counterclockwise bend and separation from the object.

[0049] Optionally, in the present application, the negative pressure driven actuators with different relative inner angle structures are simulated by simulation software, and a negative pressure of -100 kPa is applied in the cavity. The simulation results are shown in Table 1.

[0050] Table 1

[0051]

[0052] From Table 1, we can see that when the internal angle is , as the relative internal angle increases, the corresponding cavity bending angle per unit length increases accordingly. The bending angle per unit length can effectively characterize the bending deformation degree of the structure within the unit length. or equal to When the bending deformation effect is general, when the inner angle , a reverse bend will occur, and the bending angle per unit length is the ratio of the bending angle of a single cavity to the length of the cavity.

[0053] It can be understood that, in some optional embodiments, the cross-sectional shape of the cavity may also be a pentagon or other shapes that meet the requirements.

[0054] Optionally, the wall thickness of the end where the polygonal boss 14 is located in the actuator body 10 is greater than the wall thickness of the end where the coil 20 is located, that is, the wall thickness of the top of the actuator body 10 is greater than the wall thickness of the bottom. The thick-top and thin-bottom structure is conducive to the downward deformation of the negative pressure driven actuator in this example. Optionally, the wall thickness of the top of the actuator body 10 is 2mm-2.5mm, and the wall thickness of the bottom is 1.5mm-2mm. A slot structure 15 is provided on the actuator body 10. The slot structure 15 is arranged near the vent 11 and is used to install the negative pressure driven actuator. Optionally, there are two slot structures 15, which are symmetrically arranged on the front and rear end surfaces on the left side of the actuator body 10. Optionally, the slot structure is a dovetail structure. Furthermore, the coil can be made of copper wire with a diameter of 0.2mm, and the coil can undergo reversible deformation along with the movement of the actuator body. Furthermore, the coil is a square vortex structure, such as Figure 5 As shown, the coil is a square spiral coil with gradually decreasing dimensions; in some optional embodiments, such as Figure 6 As shown, the coil may also be a small spiral coil comprising several arrays.

[0055] In summary, the negative pressure driven actuator based on electromagnetic change provided by the present application includes a magnetized actuator body 10 and a coil 20 nested at one end of the actuator body, the coil 20 can be deformed freely with the actuator body 10, a vent hole 11 is provided on one side of the actuator body 10, an air passage 12 connected to the vent hole 11 and a plurality of spaced cavities 13 are provided inside the actuator body 10, the vent hole 11 is used to communicate with an external air pump to extract the air in the cavity 13 to make it present a negative pressure, so that the actuator body The body 10 is deformed under the action of negative pressure, and the coil 20 is connected to the electromagnetic measuring device, through which the voltage change and magnetic flux change caused by the deformation of the actuator body are measured; the actuator body 10 is deformed by the negative pressure, and the pressure is flexibly controllable, safe and reliable; the actuator body 10 is magnetized, and the coil 20 is nested at the bottom of the actuator body 10. The deformation of the actuator can be adaptively sensed by measuring the voltage change of the coil. The coil is nested inside the actuator body 10 to reduce the deformation effect on the actuator.

[0056] Embodiment 2

[0057] See also Figure 7 This embodiment provides a method for preparing the negative pressure driven actuator based on electromagnetic change in the first embodiment, and the preparation method specifically includes steps S11-S17;

[0058] S11, selecting a main mold, a sub-mold, a lower mold, a coil mold, a side mold, a coil, and a rubber-coated aluminum wire;

[0059] Optional, such as Figures 8 to 12 As shown, the main mold 31, the auxiliary mold 32, the lower mold 33, the coil mold 34, and the side mold 35 can be generated using 3D printing technology.

[0060] S12, stirring silica gel and magnetic powder in a preset mass ratio to prepare a mixed material;

[0061] Optionally, according to the magnetic requirements of the negative pressure driven actuator, the mass ratio of silica gel to magnetic powder is 7:3-3:7. The higher the mass ratio of magnetic powder, the greater the magnetic properties of the generated negative pressure driven actuator.

[0062] S13, winding the coil in the coil mold according to a preset path, pouring the mixed material into the coil mold after the coil is wound and solidifying it, and demolding the coil mold to obtain a coil matrix;

[0063] Optionally, as shown in FIG. 11 , the coil is wound according to the final shape, and then the mixed material is injected and solidified to obtain a coil matrix, which is relatively thin and is used to pre-fix the shape of the coil winding.

[0064] S14, assembling the main mold, the auxiliary mold, the lower mold and the rubber-coated aluminum wire, placing the coil substrate in the gap between the auxiliary mold and the lower mold, the auxiliary mold is provided with a plurality of columns adapted to the cavity, and the outer diameter of the rubber-coated aluminum wire is adapted to the inner diameter of the vent hole;

[0065] Optionally, the main mold 31 is provided with a plurality of polygonal grooves 311 adapted to the polygonal bosses, the auxiliary mold 32 is provided with columns 321 adapted to the cavity and clamping bosses 322 adapted to the slot structure, and the shape of the rubber-coated aluminum wire 36 is adapted to the shape of the vent hole and the airway; first, the main mold, the auxiliary mold and the rubber-coated aluminum wire 36 are assembled, and then the coil substrate is placed above the plurality of cylinders, and then the lower mold is covered on the coil substrate to complete the assembly.

[0066] S15, pouring the mixed material into the assembled mold cavity and curing it, demolding the main mold, the auxiliary mold, the lower mold and the rubber-coated aluminum wire to obtain an open actuator matrix, which includes a plurality of cavities and vents arranged at intervals;

[0067] S16, pouring the mixed material into the side mold, placing the opening of the actuator base on the side mold for curing, demoulding the side mold to obtain the actuator body, and the coil base is embedded in the actuator body;

[0068] S17, magnetizing the actuator body and the coil substrate to obtain a negative pressure driven actuator based on electromagnetic changes.

[0069] Optionally, the actuator substrate obtained in step S15 is a substrate with side openings, such as Fig.12 As shown, the mixed material is poured into the side mold 35, and then the actuator base is placed on the side mold 35 with the mixed material poured into it. Finally, the mixed material in the side mold 35 is solidified and combined with the actuator base, and the opening of the actuator base is sealed to obtain a negative pressure driven actuator, and finally the negative pressure driven actuator is magnetized.

[0070] Embodiment 3

[0071] This embodiment provides a deformation measurement method of the negative pressure driven actuator based on electromagnetic change in the first embodiment. Fig.13 As shown, the measuring method specifically includes steps S21-S23;

[0072] S21, acquiring a voltage signal of the coil when the negative pressure driven actuator is deformed, and performing denoising processing on the voltage signal to obtain a corrected voltage signal;

[0073] Optionally, a detection device is used to test a voltage signal of a negative pressure driven actuator, and a relationship between a feedback voltage and time of the negative pressure driven actuator under different deformation states is recorded; the voltage signal is denoised, firstly the collected feedback signal is subjected to median filtering to obtain a baseline noise, then the baseline noise is subtracted from the voltage signal to obtain a signal with baseline drift removed, and finally low-frequency environmental noise is eliminated by wavelet denoising to obtain a denoised corrected voltage signal;

[0074] S22, integrating the correction voltage signal to obtain a change in magnetic flux of the coil when the negative pressure driven actuator is deformed;

[0075] Alternatively, the expression for the change in magnetic flux is:

[0076]

[0077] Where: is the change in magnetic flux through the coil, To correct the voltage signal;

[0078] S23, fitting the change in magnetic flux and the deformation of the negative pressure driven actuator to measure the deformation of the negative pressure driven actuator according to the change in magnetic flux.

[0079] Optionally, the change in magnetic flux and the deformation state data show a strong linear correlation, so a linear function is used for fitting, and linear fitting has the advantages of being simple, convenient and fast in fitting speed.

[0080] Furthermore, in this example, the root mean square error is used to evaluate the accuracy of the linear fitting.

[0081]

[0082] In the formula, is the number of annotation points for linear fitting, is the measured value of deformation, is the predicted value of deformation;

[0083] Before performing deformation measurement, the deformation measurement method provided in this embodiment further includes calibrating the detection equipment. The calibration method includes:

[0084] The air pump and the overflow valve jointly set an initial air pressure for the actuator, so that the actuator can produce a certain bending angle. The voltage value u of the corresponding angle can be obtained through the correlation between voltage and time. The voltage value u is compared with the expected voltage value u. sBy comparison, if the absolute value of the difference between the two is less than the preset value, the measured voltage is recorded and output, and the preset value can be set to different values ​​according to different test scenarios. If it is greater than this preset value, the voltage value is input into the PID controller. According to the input voltage value, the PID controller outputs the corresponding current to the electric actuator through proportional calculation, and then adjusts the opening of the overflow valve to control the air pressure and adjust the angle of the actuator. Subsequently, the angle is measured again using the angle detection device, corresponding to the voltage value. If the interpolated absolute value of the measured voltage value and the expected voltage value is still greater than the set value, the above process will be repeated. This cycle will continue until the absolute value of the difference between the measured voltage and the expected voltage is less than the preset value, and the calibration is completed.

[0085] It should be noted that the above implementation process is only to illustrate the feasibility of the present application, but this does not mean that the negative pressure driven actuator based on electromagnetic changes of the present application is only implemented by the above-mentioned few processes. On the contrary, as long as the negative pressure driven actuator based on electromagnetic changes of the present application can be implemented, it can be included in the feasible implementation plan of the present application.

[0086] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0087] The above embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present invention. It should be pointed out that, for a person of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention patent shall be subject to the attached claims.

Claims

1. A negative pressure driven actuator based on electromagnetic changes, characterized in that: The invention comprises an actuator body which has been magnetized and a coil substrate which is embedded in one end of the actuator body, wherein the one end of the actuator body is a plane, and the coil in the coil substrate is deformed along with the actuator body, and a vent hole which is connected to an external air pump is provided on one side of the actuator body, and a plurality of cavities which are interconnected and have a polygonal cross section are provided inside the actuator body, and the polygonal cavity comprises at least two oppositely arranged inner angles, and the line between the two oppositely arranged inner angles is parallel to the plane end of the actuator body, and the air in the cavity is extracted through the vent hole so that the inside of the cavity presents a negative pressure, and the two oppositely arranged inner angles make the actuator body bend in a direction close to the plane end of the actuator body when the inside of the cavity is under negative pressure, and the coil is connected to an electromagnetic measuring device, and the voltage change and magnetic flux change caused by the deformation of the actuator body are measured by the electromagnetic measuring device, so that the negative pressure driven actuator can detect its deformation based on a preset measurement method.

2. The negative pressure driven actuator based on electromagnetic change according to claim 1, characterized in that: A plurality of cavities are interconnected through an air channel, one end of the air channel is connected to the vent hole, and a plurality of polygonal bosses matching the cavities are arranged at intervals at one end of the actuator body away from the plane end.

3. The negative pressure driven actuator based on electromagnetic change according to claim 2, characterized in that: The cross-sectional shapes of the plurality of cavities arranged at intervals are the same and are located on the same side of the airway, and the cross-sectional shape of the cavities is a hexagon.

4. The negative pressure driven actuator based on electromagnetic change according to claim 1, characterized in that: Two opposite interior angles The angle range is: .

5. The negative pressure driven actuator based on electromagnetic change according to claim 2, characterized in that: The wall thickness of the end of the actuator body where the polygonal boss is located is greater than the wall thickness of the plane end.

6. The negative pressure driven actuator based on electromagnetic change according to claim 1, characterized in that: The actuator body is provided with a slot structure, the slot structure is arranged close to the vent hole, and the slot structure is used to install the negative pressure driven actuator.

7. The negative pressure driven actuator based on electromagnetic change according to claim 1, characterized in that: The coil is a square spiral structure, and the diameter of the coil is 0.15 mm-0.2 mm.

8. The negative pressure driven actuator based on electromagnetic change according to claim 1, characterized in that: The step of detecting deformation based on a preset measurement method comprises: Acquiring a voltage signal of the coil when the negative pressure driven actuator is deformed, and performing denoising processing on the voltage signal to obtain a corrected voltage signal; Integrating the correction voltage signal to obtain a change in magnetic flux of the coil when the negative pressure driven actuator is deformed; The change in magnetic flux is fitted with the deformation of the negative pressure driven actuator to measure the deformation of the negative pressure driven actuator according to the change in magnetic flux.

9. The method for preparing the negative pressure driven actuator based on electromagnetic change according to any one of claims 1 to 8, characterized in that: include: Select the main mold, auxiliary mold, lower mold, coil mold, side mold, coil, and rubber-coated aluminum wire; The mixed material is prepared by stirring silica gel and magnetic powder in a preset mass ratio; Winding the coil in the coil mold according to a preset path, pouring the mixed material into the coil mold after the coil is wound and curing it, and demoulding the coil mold to obtain a coil matrix; The main mold, the auxiliary mold, the lower mold and the rubber-coated aluminum wire are assembled, the coil substrate is placed in the gap between the auxiliary mold and the lower mold, the auxiliary mold is provided with a plurality of columns adapted to the cavity, and the outer diameter of the rubber-coated aluminum wire is adapted to the inner diameter of the vent hole; Pour the mixed material into the assembled mold cavity and solidify it, demould the main mold, the auxiliary mold, the lower mold and the rubber-coated aluminum wire to obtain an open actuator matrix, which includes a plurality of cavities and vents arranged at intervals; Pour the mixed material into the side mold, place the opening of the actuator base on the side mold for curing, demould the side mold to obtain the actuator body, and the coil base is embedded in the actuator body; After magnetizing the actuator body and the coil substrate, a negative pressure driven actuator based on electromagnetic changes is obtained.

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