Method for eliminating abnormal sound of double-side polishing of quartz ring

Abstract

The application provides a method for eliminating abnormal sound of double-side polishing of quartz rings, comprising the following steps: S1. preliminary polishing, installing a planet wheel and a quartz ring workpiece; discharging polishing liquid; gradually increasing pressure while the device is rotating, if the polishing process produces collision and friction sound of the quartz ring workpiece, the following measurement and installation adjustment can be carried out, even the precision machining of the parts is improved and the parts are reinstalled to eliminate the abnormal sound; S2. preparation work before measuring the gap, stopping the device; installing a dial gauge; S3. measuring the gap value, using the same planet wheel at four positions with an angle of 90 degrees; pushing the planet wheel to move forward and backward along the forward and backward pushing direction, and using the dial gauge to measure the gap value of the four positions. The application measures the pushing and moving gap in the range of 0.15m-0.25m, m is the gear modulus, and eliminates the abnormal sound of double-side polishing of the quartz ring type larger and thicker parts.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of precision machining, in particular to a method for eliminating abnormal sound of double-sided polishing of quartz rings. BACKGROUND

[0002] Double-sided polishing is a kind of machining process for simultaneously polishing upper and lower planes of sheet parts, which can realize mirror surface machining. This process is to load workpieces by a wandering star wheel carrier, the wandering star wheel is engaged with the sun gear and the outer gear ring, and under the rotation of them, the wandering star wheel realizes revolution and rotation, the upper and lower planes realize mechanical polishing and chemical corrosion under the action of the pressure of the upper and lower polishing disc polyurethane polishing pad and the polishing liquid, so as to realize high-precision plane machining. In the double-sided polishing process of quartz ring parts used in the semiconductor field, since the quartz ring has a diameter of 300 mm or more and a thickness in the range of 8-15 mm with various specifications, due to the different tolerances of the sun gear, the wandering star wheel and the outer gear ring of the equipment of various manufacturers and the different installation accuracies, the finally matched clearances are different, and the following technical defects exist: the actual wandering clearance is different in the use process, abnormal sound appears in the polishing process of the quartz ring, and the ring-shaped and thick parts are prone to impact and friction during the machining process. Due to different processes and different sound sizes, the frequency is high, and it is difficult to distinguish whether it is a main equipment failure or an abnormality of the workpiece processing position. In serious cases, the processed workpiece will be scrapped and cannot continue to be processed. The traditional method is to measure the accuracy of the sun gear, the outer gear ring and the jump after installation, and only the wandering star wheel is checked as a part, and the actual clearance after installation cannot be understood.

[0003] Therefore, how to design a method for eliminating abnormal sound in the double-sided machining process of large-size ring-shaped parts and improving machining precision and qualification rate to eliminate abnormal sound of double-sided polishing of quartz rings has become an urgent problem to be solved. SUMMARY

[0004] In view of the problems in the prior art, the present application provides a method for eliminating abnormal sound of double-sided polishing of quartz rings to solve at least one of the above technical problems.

[0005] The technical scheme of the present application is: a method for eliminating abnormal sound of double-sided polishing of quartz rings, comprising the following steps:

[0006] S1. polishing,

[0007] ① installing the wandering star wheel and the quartz ring workpiece,

[0008] The quartz ring workpiece is placed in the wandering star wheel, the wandering star wheel is placed on the lower fixed disc and located between the sun gear and the outer gear ring;

[0009] ② releasing the polishing liquid,

[0010] Polishing liquid is released into the hole of the upper fixed plate;

[0011] ③The upper and lower fixed plates are pressurized and the equipment starts to rotate.

[0012] Lower the upper platen to the contact position with the quartz ring workpiece, and control the pressure according to the process requirements, while the lower platen pressurizes the quartz ring workpiece;

[0013] The planetary wheel realizes revolution and rotation under the rotation of the sun gear and outer ring gear, and polishes the upper and lower surfaces of the quartz ring workpiece simultaneously; the upper and lower surfaces of the quartz ring are polished simultaneously to achieve uniform thickness and mirror surface effect; if the quartz ring workpiece collides and rubs during the polishing process, subsequent measurement and installation adjustments can be carried out, and even the parts can be processed to improve precision and reinstalled to eliminate the abnormal noise;

[0014] S2. Preparation before measuring the gap,

[0015] ①The equipment stops,

[0016] The upper platen rises, the polishing fluid is turned off, and the lower platen stops rotating;

[0017] ②Installation of dial indicator,

[0018] Fix the dial indicator on the meter stand, which is fixed on the machine frame. The dial indicator is located on the outer ring of the outer gear ring.

[0019] S3. Measure the gap value,

[0020] ① Use the same planetary wheel in four directions with an angle of 90° as four working positions;

[0021] ② Push the planetary gear to move forward and backward along the forward and backward pushing direction at the four workstations. Use a dial indicator to measure the clearance value at the four workstations. The measured pushing clearance is within the range of 0.15m~0.25m, where m is the gear module.

[0022] ③ Assume that the thickness of the quartz ring workpiece is t, the height of the planetary wheel is h, and the height size control range of the planetary wheel is .

[0023] The present invention measures the clearances in four directions on the planetary wheel and the matching sun gear and outer ring gear of the double-sided polishing machine. The inspection result accumulates the dimensional tolerances, processing accuracy and installation accuracy of the components of the sun gear, outer ring gear and planetary wheel. The measured driving clearance is 0.15m~0.25m, eliminating the problem of abnormal noise during double-sided polishing of larger and thicker quartz ring parts. The closer the thickness of the planetary wheel carrier is to the thickness of the workpiece, the better. The height h of the planetary wheel carrier is 0.7t~0.95t, which is conducive to the lubrication of the polishing liquid and improves the polishing processing accuracy and yield rate of large-sized annular parts. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the processing area structure of the double-sided polishing machine of the present invention.

[0025] Figure 2 Schematic diagram of the running clearance measurement of the present invention.

[0026] Figure 3 This is a schematic diagram of the positions of the planetary wheel and quartz ring workpieces of the present invention.

[0027] In the figure: 1. Polishing liquid; 2. Upper fixed plate; 3. Sun gear; 4. Quartz ring workpiece; 5. Lower fixed plate; 6. Planetary gear; 7. Outer ring gear; 8. Four workstations; 9. Forward and backward push direction; 10. Dial indicator. DETAILED DESCRIPTION

[0028] The present invention will be further described below with reference to the accompanying drawings.

[0029] See Figure 1-3 The structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read. They are not used to limit the conditions for the implementation of the present invention, so they have no substantial technical significance. Any modification of the structure, change in the proportional relationship or adjustment of the size should still fall within the scope of the technical content disclosed by the present invention without affecting the efficacy and purpose that can be achieved by the present invention. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description and are not used to limit the scope of the implementation of the present invention. Changes or adjustments in their relative relationships should also be regarded as the scope of the implementation of the present invention without substantially changing the technical content.

[0030] Example 1: A method for eliminating abnormal noise during double-sided polishing of a quartz ring, referring to Figure 1 、 Figure 2 、 Figure 3 , including the following steps:

[0031] S1. Polishing,

[0032] ①Install the planetary wheel and quartz ring workpiece,

[0033] The quartz ring workpiece 4 is placed inside the planetary gear 6, which is placed on the lower fixed plate 5 and located between the sun gear 3 and the outer ring gear 7;

[0034] ② Release the polishing liquid,

[0035] Polishing liquid 1 is released from the hole of the upper fixed plate 2;

[0036] ③The upper and lower fixed plates are pressurized and the equipment starts to rotate.

[0037] Lower the upper platen 2 to the contact position with the quartz ring workpiece 4, and control the pressure according to the process requirements, while the lower platen 5 pressurizes the quartz ring workpiece 4;

[0038] The planetary wheel 6 realizes revolution and rotation under the rotation of the sun gear 3 and the outer ring gear 7, and polishes the upper and lower surfaces of the quartz ring workpiece 4 simultaneously; the upper and lower surfaces of the quartz ring are polished simultaneously to achieve uniform thickness and mirror surface effect; if the quartz ring workpiece 4 collides and rubs during the polishing process, subsequent measurements and installation adjustments can be carried out, and even the parts can be processed to improve precision and reinstalled to eliminate the abnormal noise;

[0039] S2. Preparation before measuring the gap,

[0040] ①The equipment stops,

[0041] The upper plate 2 rises, the polishing liquid 1 is turned off, and the lower plate 5 stops rotating;

[0042] ②Installation of dial indicator,

[0043] Fix the dial indicator 10 on the meter stand, which is fixed on the machine frame. The dial indicator 10 is located on the outer ring of the outer gear ring 7.

[0044] S3. Measure the gap value,

[0045] ① Using the same planetary wheel 6 in four directions with an angle of 90° as four workstations 8;

[0046] ② Push the planetary wheel 6 to move forward and backward along the forward and backward pushing direction 9 on the four workstations 8. Use a dial indicator 10 to measure the clearance value of the four workstations 8. The measured pushing clearance is within the range of 0.15m~0.25m, where m is the gear module.

[0047] ③ Assume that the thickness of the quartz ring workpiece 4 is t, the height of the planetary wheel 6 is h, and the height dimension control range of the planetary wheel 6 is The present application adopts four-direction gap measurement of the sun gear, the outer gear ring and the planet wheel of the double-sided polishing machine, and the checking result accumulates the dimensional tolerance, machining precision and installation precision of the sun gear, the outer gear ring and the planet wheel, the movable gap is 0.15m-0.25m, and the double-sided polishing abnormal sound problem of the large and thick quartz ring parts is eliminated.

[0048] In the embodiment two, the gap values measured by the same planet wheel 6 at the four work stations 8 are δ1, δ2, δ3 and δ4, and the gear modulus of the planet wheel 6 is m; if the following conditions are met, the collision and friction abnormal sound will not occur in the polishing process. The present application adopts four-direction gap measurement of the sun gear, the outer gear ring and the planet wheel of the double-sided polishing machine, and the checking result accumulates the dimensional tolerance, machining precision and installation precision of the sun gear, the outer gear ring and the planet wheel, the movable gap is 0.15m-0.25m, and the double-sided polishing abnormal sound problem of the large and thick quartz ring parts is eliminated.

[0049] In the embodiment three, the gap values measured by the same planet wheel 6 at the four work stations 8 are not in the range of 0.15m-0.25m, and the installation adjustment or the dimensional tolerance or precision adjustment of the parts is needed; the dimensional tolerance or precision adjustment of the parts includes repeating steps S2-S3. The present application adopts the steps of polishing the parts with the gap values not in the range of 0.15m-0.25m, preparing for measuring the gap and measuring the gap value, and adjusting the dimensional tolerance or precision until the gap values measured by the same planet wheel at the four work stations are in the range of 0.15m-0.25m, and the double-sided polishing abnormal sound problem of the large and thick quartz ring parts is eliminated.

[0050] The present application adopts the above only preferred embodiments of the present application, and it should be noted that the ordinary skilled in the art can make several improvements and refinements without departing from the principles of the present application, and these improvements and refinements should be regarded as the protection scope of the present application.

Claims

1. A method for eliminating abnormal noise during double-sided polishing of a quartz ring, characterized by: The following steps are involved: S1. Polishing, ①Install the planetary wheel and quartz ring workpiece, The quartz ring workpiece (4) is placed inside the planetary wheel (6), and the planetary wheel (6) is placed on the lower fixed plate (5) and is located between the sun gear (3) and the outer ring gear (7); ② Release the polishing liquid, Polishing liquid (1) is released into the hole of the upper fixed plate (2); ③The upper and lower fixed plates are pressurized and the equipment starts to rotate. The upper fixed plate (2) is lowered to a position where it contacts the quartz ring workpiece (4), and the pressure is controlled according to process requirements, while the lower fixed plate (5) is used to pressurize the quartz ring workpiece (4); The planetary wheel (6) realizes revolution and rotation under the rotation of the sun wheel (3) and the outer ring gear (7), and polishes the upper and lower surfaces of the quartz ring workpiece (4) simultaneously; If the quartz ring workpiece (4) collides and rubs during the polishing process, subsequent measurements and installation adjustments can be made, and even precision machining and reinstallation of the parts can be performed to eliminate the abnormal noise. S2. Preparation before measuring the gap, ①The equipment stops, The upper fixed plate (2) rises, the polishing liquid (1) is turned off, and the lower fixed plate (5) stops rotating; ②Installation of dial indicator, Fix the dial indicator (10) on the table frame, the table frame is fixed on the frame, and the dial indicator (10) is located on the outer ring of the outer gear ring (7); S3. Measure the gap value, ① Using the same planetary wheel (6) to position four workstations (8) in four directions with an angle of 90°; ② Push the planetary wheel (6) to move forward and backward along the forward and backward pushing direction (9) on the four workstations (8), and use the dial indicator (10) to measure the clearance value of the four workstations (8) in the front and back directions. The measured pushing clearance is within the range of 0.15m~0.25m, where m is the gear module; ③ Assume that the thickness of the quartz ring workpiece (4) is t, the height of the planetary wheel (6) is h, and the height dimension control range of the planetary wheel (6) is .

2. The method for eliminating abnormal noise during double-sided polishing of a quartz ring according to claim 1, characterized in that: In the process of measuring the gap value in step S3, the gap values ​​measured by using the same planetary wheel (6) at four workstations (8) are δ1, δ2, δ3 and δ4 respectively, and the gear module of the planetary wheel (6) is m; If the following conditions are met, , then there will be no abnormal noise of collision and friction during the polishing process.

3. The method for eliminating abnormal noise during double-sided polishing of a quartz ring according to claim 2, characterized in that: The gap values ​​measured using the same planetary wheel (6) at the four workstations (8) are not within the range of 0.15m to 0.25m, requiring installation adjustment or trimming of the dimensional tolerance or precision of the components.

4. The method for eliminating abnormal noise during double-sided polishing of a quartz ring according to claim 3, characterized in that: The step of adjusting the dimensional tolerance or precision of the component includes repeating steps S2 to S3.

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