View field consistency detection system and method of optical structure

Abstract

The invention discloses a view field consistency detection system and method for an optical structure, and the system comprises a collimator, an adjusting support, and a data synchronization control collection device, the collimator is used for transmitting parallel light beams to a to-be-detected device, the adjusting support is used for bearing the to-be-detected device and is assembled to drive the to-be-detected device to rotate and translate, and the data synchronization control collection device is used for collecting the to-be-detected device. The angle and the position of the optical axis of the to-be-measured equipment are changed, so that the incident channel and the incident angle of the parallel light beams are changed; the data synchronous control acquisition device is used for acquiring two-dimensional view field measuring point data of each channel of the to-be-detected equipment under parallel light beams incident at different angles and performing view field consistency detection between the channels of the to-be-detected equipment according to the two-dimensional view field measuring point data of each channel. According to the method, the consistency is judged more accurately according to the area coincidence degree of the view fields between the channels in the two-dimensional angle space, and the method can be applied to an off-axis optical system and has high adaptability to an instrument adopting an unconventional optical structure.

Description

Technical Field

[0001] The present invention belongs to the field of optical measurement and metrology, and in particular relates to a system and method for detecting the consistency of a field of view of an optical structure. Background Art

[0002] Clustered multi-channel optical systems are a common design architecture for optical measurement instruments. This approach allows for intuitive acquisition of multi-channel information with diverse characteristics, conveniently integrating acquisition channels of varying properties, and boasts simplicity and flexibility. However, a major technical challenge facing this type of optical system is the difficulty in ensuring consistent field of view between channels. This can introduce significant errors when using inter-channel data for computational inversion, impacting the final results.

[0003] The traditional solution is to solve it by measuring the consistency of the optical axis and the field of view. Among them, the consistency of the optical axis depends on the reflection of the vertex of the curvature of the lens, and the line connecting the center points of the lenses is considered to be the optical axis. After measuring the pointing angle of the optical axis of each channel, the size of the field of view is tested channel by channel. Usually, a field of view curve passing through the center point of the optical axis is measured to calculate the half-height width of the field of view, which is considered to be the field of view diameter of a single channel. Finally, the consistency of the optical axis pointing and the half-height width of the field of view curve between channels are compared to determine the consistency of the field of view of the optical system.

[0004] This method has the following disadvantages:

[0005] 1. Assuming that the field of view is centrally symmetrical, in fact the field of view of the optical system may not be centrally symmetrical;

[0006] 2. Using only the shape of a single field of view curve and its half-height width to judge consistency is not accurate enough;

[0007] 3. It is divided into two steps: optical axis consistency detection and field of view size detection, and the process is relatively complicated;

[0008] 4. Ineffective for off-axis optical systems. Summary of the Invention

[0009] The purpose of the present invention is to provide a field of view consistency detection system and method for optical structures. By judging the field of view consistency based on the area overlap of the field of view between channels of the device to be tested in a two-dimensional angular space, the technical problems of insufficient accuracy of field of view consistency detection in existing optical systems and a relatively complex detection process are solved.

[0010] In order to solve the above technical problems, the present invention is implemented through the following technical solutions:

[0011] The present invention provides a field of view consistency detection system for an optical structure, which comprises: a collimator, an adjustment bracket, and a data synchronization control and acquisition device;

[0012] The collimator is provided on one side of the adjustment bracket and is used to emit a parallel light beam to the device under test;

[0013] The adjustment bracket has a carrying platform, the carrying platform is used to carry the device under test, and the adjustment bracket is configured to drive the device under test to rotate and translate, so as to change the angle and position of the optical axis of the device under test, thereby changing the channel and incident angle of the parallel light beam;

[0014] The data synchronization control and acquisition device is arranged on the other side of the adjustment bracket, and is used to collect two-dimensional field of view measurement point data of each channel of the device under test under parallel light beams incident at different angles, and perform field of view consistency detection between the channels of the device under test based on the two-dimensional field of view measurement point data of each channel.

[0015] In one embodiment of the present invention, a flat crystal is further included, and the flat crystal is used to perform self-collimation on the collimator before measurement, so that the output light of the collimator is substantially consistent with the optical axis of the device under test.

[0016] In one embodiment of the present invention, the collimator uses a flat crystal to perform self-collimation, which includes:

[0017] Placing the flat crystal on the surface of one end of the device under test close to the collimator;

[0018] The self-collimation function of the collimator is used to make the emergent light of the collimator perpendicular to the surface of the flat crystal.

[0019] In one embodiment of the present invention, the adjustment bracket is configured to drive the device under test to rotate along a first axis and a second axis, wherein the first axis is a vertical axis and the second axis is a horizontal axis, and the second axis is perpendicular to the optical axis of the device under test.

[0020] In one embodiment of the present invention, the adjustment bracket is configured to drive the device under test to translate along a first direction and a second direction, wherein the first direction is a vertical direction and the second direction is a horizontal direction perpendicular to the optical axis of the device under test.

[0021] In one embodiment of the present invention, performing field of view consistency detection between channels of the device under test based on the two-dimensional field of view measurement point data of each channel includes:

[0022] Performing mean filtering on the two-dimensional field of view data of each channel and then fitting the two-dimensional field of view data to obtain a two-dimensional field of view image of each channel;

[0023] The consistency of the field of view is determined based on the area overlap of the two-dimensional field of view images between the channels of the device under test.

[0024] In one embodiment of the present invention, the divergence angle of the collimator is less than 10% of the field of view consistency requirement of the device under test.

[0025] In one embodiment of the present invention, the field of view sampled by the data synchronization control acquisition device is larger than the field of view of the device under test.

[0026] Based on the same inventive concept, the present invention also provides a method for detecting the consistency of the field of view of an optical structure, comprising:

[0027] Obtain two-dimensional field of view measurement point data for each channel of the device under test under parallel light beams incident at different angles;

[0028] The consistency of the field of view between the channels of the device under test is judged based on the two-dimensional field of view measurement point data.

[0029] In one embodiment of the present invention, judging the consistency of the field of view between channels of the device under test based on the two-dimensional field of view measurement point data includes:

[0030] The two-dimensional field of view measurement point data is mean filtered and then fitted to obtain interpolation data of sub-pixel positions between the measurement points;

[0031] Acquire a two-dimensional field of view image of each channel of the device under test according to the fitting result;

[0032] The consistency of the field of view is determined based on the degree of area overlap of the two-dimensional field of view images between the channels of the device under test.

[0033] The present invention provides an optical structure field of view consistency detection system comprising a collimator, an adjustment bracket, and a data synchronization control acquisition device, wherein the collimator is located on one side of the device to be tested and is used to emit a parallel light beam to the device to be tested, the device to be tested is mounted on the adjustment bracket, and the adjustment bracket is configured to drive the device to be tested to rotate and translate to change the angle and position of the optical axis of the device to be tested, the data synchronization control acquisition device is used to collect two-dimensional field of view measurement point data of each channel of the device to be tested under parallel light beams incident at different angles, the two-dimensional field of view measurement point data is processed by software, and the field of view consistency between the channels of the device to be tested is judged based on the processing results. The optical structure field of view consistency detection system provided by the present invention can comprehensively detect the field of view shape, and can obtain accurate field of view area information even if the field of view to be tested is not centrally symmetrical. In addition, the consistency is judged by the degree of area overlap of the field of view between channels in the two-dimensional angular space, which is more accurate than the curve method. Secondly, the field of view consistency result can be obtained by a one-step detection method and can be applied to off-axis optical systems, which has strong adaptability to instruments using unconventional optical structures. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0035] Figure 1 A schematic structural diagram of a field of view consistency detection system for an optical structure provided as an exemplary embodiment of the present application.

[0036] Figure 2 A schematic diagram of the distribution of measurement points in a two-dimensional angular space for a single channel of a field of view consistency detection system of an optical structure provided by an exemplary embodiment of the present application.

[0037] Figure 3 A schematic diagram of the field of view of a channel of a device under test of a field of view consistency detection system for an optical structure provided by an exemplary embodiment of the present application.

[0038] Figure 4 A schematic diagram of the field of view of another channel of a device under test of a field of view consistency detection system of an optical structure provided by an exemplary embodiment of the present application.

[0039] Figure 5 A schematic diagram of non-overlapping areas of the fields of view of two channels of a device under test in an optical structure field of view consistency detection system provided by an exemplary embodiment of the present application.

[0040] Figure 6 A schematic diagram of the overlapping areas of the fields of view of two channels of a device under test in an optical structure field of view consistency detection system provided by an exemplary embodiment of the present application.

[0041] Figure 7 A schematic flow chart of a method for detecting the consistency of field of view of an optical structure provided by an exemplary embodiment of the present application.

[0042] The reference numerals are as follows:

[0043] 1 collimator

[0044] 2 flat crystal

[0045] 3 Device under test

[0046] 4 Adjust the bracket

[0047] 5 Data synchronization control acquisition device

[0048] 41 horizontal translation stage

[0049] 42 vertical lift platform

[0050] 43 longitudinal rotation table

[0051] 44 Horizontal Rotating Stage

[0052] 10 Field of view of a single channel of the device under test

[0053] 20 rotation measuring points DETAILED DESCRIPTION

[0054] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts shall fall within the scope of protection of the present invention.

[0055] In order to solve the technical problems of insufficient accuracy of field consistency detection of existing optical systems and relatively complicated detection process, the present invention provides a field consistency detection system for optical structures, please refer to Figure 1 As shown, the collimator 1 includes a collimator 1, an adjustment bracket 4, and a data synchronization control and acquisition device 5. The collimator 1 is arranged on one side of the adjustment bracket 4 and is used to emit a parallel light beam to the device under test 3. The adjustment bracket 4 has a carrier platform, which is used to support the device under test 3. The adjustment bracket 4 is equipped to drive the device under test 3 to rotate and translate, so as to change the angle and position of the optical axis of the device under test 3, thereby changing the channel and incident angle of the parallel light beam. The data synchronization control and acquisition device 5 is arranged on the other side of the adjustment bracket 4 and is used to collect two-dimensional field of view measurement point data of each channel of the device under test 3 under parallel light beams incident at different angles. The two-dimensional field of view measurement point data is processed by software, and the field of view consistency test between the channels of the device under test 3 is performed based on the processing results. These embodiments will be discussed in detail below.

[0056] In an exemplary embodiment of the present application, see Figure 1 As shown, the collimator 1 is a self-collimating collimator and an off-axis reflective collimator. The self-collimating collimator includes a light source, a collimating lens, and an aperture. The light source is used to generate light, the collimating lens is responsible for collimating the light emitted by the light source into a parallel beam, and the aperture is used to limit the diameter and shape of the beam to obtain the desired beam characteristics. When the light emitted by the light source passes through the collimating lens, the lens focuses the light to a single point, namely the focal point. The focused light is refracted by the lens and ultimately emitted as a parallel beam. In addition, by adjusting the position and parameters of the collimating lens, the collimation and divergence angle of the parallel beam can be controlled.

[0057] It should be noted that the divergence angle of the collimator 1 should be less than 10% of the field of view consistency requirement of the device under test 3. For example, if the field of view consistency requirement of the device under test 3 is better than 90% between channels, converted into an angle deviation of no more than 0.5 degrees, the divergence angle of the collimator 1 should be less than 0.05 degrees. In this embodiment, the power of the collimator 1 is 50W, a halogen tungsten lamp is used as the light source, and the divergence angle of the output light is 10 seconds. The device under test 3 is an 18-channel multi-spectral aperture simultaneous detection radiometer, and the field of view range of each channel is approximately ±0.7 degrees.

[0058] In an exemplary embodiment of the present application, see Figure 1 As shown, the adjustment bracket 4 includes a horizontal translation stage 41, a vertical lifting stage 42, a longitudinal rotation stage 43, and a transverse rotation stage 44. In this embodiment, the transverse rotation stage 44 serves as a base, the longitudinal rotation stage 43 is mounted on the transverse rotation stage 44, the vertical lifting stage 42 is mounted on the longitudinal rotation stage 43, the horizontal translation stage 41 is stacked on the vertical lifting stage 42, and the device under test 3 is placed vertically on the supporting surface of the horizontal translation stage 41, that is, the optical axis of the device under test 3 is perpendicular to the moving direction of the horizontal translation stage 41. It should be noted that the installation positions of the horizontal translation stage 41, the vertical lifting stage 42, the longitudinal rotation stage 43, and the transverse rotation stage 44 can be freely combined.

[0059] Furthermore, after the device to be tested 3 is placed vertically on the supporting surface of the horizontal translation stage 41, it is necessary to adjust the optical axis of the device to be tested 3 to be parallel to the base through a level bubble. The level bubble is a measuring tool that determines whether the device or object is in a horizontal state by observing the position of the bubble in the liquid. The level bubble uses the balance principle of liquid surface tension and gravity to judge the horizontality. When the device or object is in a horizontal state, the bubble will be located in the center of the tube. If the device or object is not horizontal, the bubble will be biased to one side. Specifically, place the level bubble on the object to be measured, press until the tube is filled with gas, observe the position of the bubble, if the bubble is in the center, it means that the surface of the object is horizontal, if it deviates from the center, the orientation needs to be adjusted, determine the unbalanced part according to the position of the bubble, and take corresponding measures to adjust it so that the bubble is in the center.

[0060] In an exemplary embodiment of the present application, see Figure 1 As shown, the adjustment bracket 4 is configured to drive the device under test 3 to translate along a first direction and a second direction, wherein the first direction is a vertical direction and the second direction is a horizontal direction perpendicular to the optical axis of the device under test.

[0061] Specifically, the horizontal translation stage 41 and the vertical lifting stage 42 are used to drive the device under test 3 to switch the test channels, so as to realize the automated testing of the device under test 3. The horizontal translation stage 41 can drive the device under test 3 to translate along the second direction, and the vertical lifting stage 42 can drive the device under test 3 to translate along the first direction. The vertical lifting stage 42 is a telescopic structure.

[0062] In an exemplary embodiment of the present application, see Figure 1 As shown, the adjustment bracket 4 is assembled to be able to drive the device under test 3 to rotate along a first axis and a second axis, the first axis is a vertical axis, the second axis is a horizontal axis, and the second axis is perpendicular to the optical axis of the device under test 3.

[0063] Specifically, the longitudinal rotation stage 43 and the transverse rotation stage 44 are used to drive the angular transformation of the optical axis of the test channel of the device under test 3, so that the data synchronization control acquisition device 5 can subsequently collect two-dimensional field of view measurement point data of the device under test 3 under parallel light beams incident at different angles. The longitudinal rotation stage 43 can drive the device under test 3 to rotate along a first axis, and the transverse rotation stage 44 can drive the device under test 3 to rotate along a second axis. It should be noted that the rotational positioning accuracy of the longitudinal rotation stage 43 and the transverse rotation stage 44 should be better than 5% of the field of view consistency requirement of the device under test 3. For example, if the field of view consistency requirement of the device under test 3 is better than 90% between channels, converted into an angle deviation of no more than 0.5 degrees, the rotational positioning accuracy of the longitudinal rotation stage 43 and the transverse rotation stage 44 should be better than 0.025 degrees. In addition, both the longitudinal rotation stage 43 and the transverse rotation stage 44 are marked with scales. In the initial state, both the longitudinal rotation stage 43 and the transverse rotation stage 44 are at the zero scale position.

[0064] In an exemplary embodiment of the present application, see Figure 1 As shown, the field of view consistency detection system of the optical structure further includes a flat crystal 2, which is used to self-collimate the collimator 1 before measurement to ensure that the output light of the collimator 1 is substantially consistent with the optical axis of the device under test.

[0065] Specifically, before measuring the device under test 3, the flat crystal 2 is placed on one end surface of the device under test 3 close to the collimator 1, and the self-collimation function of the collimator 1 is used to make the output light of the collimator 1 perpendicular to the surface of the flat crystal 2. It should be noted that the flat crystal is a standard measuring plate with two parallel surfaces made of optical glass. When the flat crystal 2 is placed on the surface of the device under test 3, the two surfaces of the flat crystal 2 are perpendicular to the optical axis of the device under test 3. That is to say, when the output light of the collimator 1 is perpendicular to the surface of the flat crystal 2, the output light of the collimator 1 is basically consistent with the optical axis of the device under test 3.

[0066] The principle of the self-collimation function of the collimator 1 includes the following: since the collimator 1 also includes a reticle with crosshairs on it, when the outgoing light of the collimator 1 is reflected back into the collimator 1 through the flat crystal 2, the self-collimation of the collimator 1 is achieved by adjusting the reflected crosshairs to coincide with the image of the crosshairs on the reticle. That is, the optical axis of the collimator 1 and the device under test 3 are basically consistent.

[0067] In an exemplary embodiment of the present application, see Figure 1 As shown, the data synchronization control acquisition device 5 is used to acquire two-dimensional field of view measurement point data of each channel of the device under test 3 under parallel light beams incident at different angles.

[0068] Specifically, when the device to be tested 3 is ready for measurement, the flat crystal 2 is removed from the surface of the device to be tested 3, the horizontal translation stage 41 and the vertical lifting stage 42 are adjusted so that the first channel to be tested of the device to be tested 3 is at the center of the light spot of the output light of the parallel light tube 1, the data synchronization control acquisition device 5 is turned on to enter the working state, the longitudinal rotation stage 43 and the transverse rotation stage 44 are adjusted to drive the turntable at preset angle intervals, and synchronous sampling is performed at each angle interval. It should be noted that the field of view sampled by the data synchronization control acquisition device 5 is larger than the field of view of the device to be tested 3. In this embodiment, the sampling field of view of the data synchronization control acquisition device 5 is ±3 degrees. In addition, the preset angle interval is 0.05 degrees, that is, the longitudinal rotation stage 43 and the transverse rotation stage 44 adjust the turntable at an angle interval of 0.05 degrees each time, and the data synchronization control acquisition device 5 performs synchronous sampling at each angle interval. The data synchronization control acquisition device 5 measures the two-dimensional field of view point data within the field of view of ±3 degrees by two-dimensional scanning, please refer to Figure 2 As shown, Figure 2A schematic diagram illustrates the distribution of measurement points for a single channel of the device under test 3 in a two-dimensional angular space. The data synchronization control and acquisition device 5 controls the acquisition of two-dimensional field-of-view measurement point data for each channel of the device under test 3 under parallel light beams incident at different angles. It should be noted that in this embodiment, the data synchronization control and acquisition device includes, but is not limited to, multiple components such as a data collector, a data transmission line, and a controller.

[0069] In an exemplary embodiment of this application, please refer to Figure 1 As shown, the two-dimensional field of view measurement point data is processed by software, and the field of view consistency test between the three channels of the device under test is performed according to the processing results.

[0070] Specifically, software performs mean filtering on the two-dimensional field of view measurement point data. Mean filtering refers to replacing the current pixel value with the mean of the N×N pixel values ​​surrounding the current pixel. This method is used to traverse and process each pixel in the image, completing mean filtering for the entire image. In this embodiment, the mean filtering can be performed on a 3×3 to 5×5 dot matrix depending on the actual situation. After the two-dimensional field of view measurement point data is mean filtered, fitting is performed to obtain interpolated data for sub-pixel positions between the measurement points. The fitting method can be a quartic polynomial fit or a spline fit, depending on the situation. In this embodiment, a cubic spline fit is used to fit the measurement point values. Of course, other fitting methods can also be used in other embodiments. Based on the fitting results, field of view analysis calculations are performed, using the half-height width as the field of view criterion to obtain a two-dimensional channel field of view image of the current measurement channel of the device under test 3. It should be noted that the software includes but is not limited to Matlab, Zemax, or other software capable of performing optical field of view analysis calculations.

[0071] In an exemplary embodiment of the present application, the field of view consistency between channels of the device under test 3 is determined based on the degree of area overlap of two-dimensional channel field of view images between channels in a two-dimensional angular space.

[0072] For details, please refer to Figure 3 and Figure 4 As shown, Figure 3 The channel field of view of one channel of the device under test 3 is measured, Figure 4 To measure the channel field of view of another channel of the device under test 3, the channel fields of view of the two channels are compared by overlapping the areas in the two-dimensional angular space. Figure 5 As shown, Figure 5 This is a schematic diagram of the non-overlapping area after the area overlap comparison of the channel fields of view of the two channels, where the white part is the non-overlapping area of ​​the channel fields of view of the two channels. Figure 6 As shown, Figure 6This is a schematic diagram of the overlapping area after comparing the channel fields of view of two channels. The white portion represents the overlapping area of ​​the channel fields of view of the two channels. The field of view consistency of the two channels is determined based on the degree of area overlap of the channel fields of view of the two channels in two-dimensional angular space.

[0073] In summary, the present invention provides a field of view consistency detection system for an optical structure. The collimator 1 serves as a light source, and the adjustment bracket 4 is configured to drive the device under test 3 to rotate and translate to change the angle and position of the optical axis of the device under test 3. The device under test 3 is mounted on the adjustment bracket 4. The flat crystal 2 is used to self-collimate the collimator 1 before measurement to ensure that the output light from the collimator 1 is substantially consistent with the optical axis of the device under test 3. A data synchronization control acquisition device 5 collects two-dimensional field of view measurement point data, and field of view consistency detection results between channels of the device under test 3 are obtained through field of view analysis and calculation. The field of view consistency detection system for an optical structure provided by the present invention can comprehensively detect the field of view shape, and can obtain accurate field of view area information even if the field of view to be measured is not centrally symmetrical. In addition, consistency is determined by the degree of area overlap between the fields of view between channels in two-dimensional angular space, which is more accurate than the curve method. Furthermore, the field of view consistency result can be obtained through a one-step detection method and can be applied to off-axis optical systems, showing strong adaptability to instruments using unconventional optical structures.

[0074] Based on the same inventive concept, the present invention also provides a method for detecting the consistency of the field of view of an optical structure, see Figure 7 As shown, the following steps are included:

[0075] S100: Acquire two-dimensional field of view measurement point data of each channel of the device under test under parallel light beams incident at different angles;

[0076] S200: performing mean filtering and fitting on the two-dimensional field of view measurement point data to obtain interpolation data of sub-pixel positions between the measurement points;

[0077] S300: Acquire a two-dimensional field of view image of each channel of the device under test according to the fitting result;

[0078] S400: Performing field of view consistency judgment based on the degree of area overlap of the two-dimensional field of view images between the channels of the device under test.

[0079] Since the field of view consistency detection method for an optical structure provided in this embodiment belongs to the same inventive concept as the field of view consistency detection system for the optical structure provided in any of the above-mentioned embodiments, it has at least the same beneficial effects and will not be described in detail here.

[0080] The above description is only a preferred embodiment of the present application and an explanation of the technical principles used. Those skilled in the art should understand that the scope involved in the present application is not limited to the technical solutions formed by a specific combination of the above-mentioned technical features, but should also cover other technical solutions formed by any combination of the above-mentioned technical features or their equivalent features without departing from the inventive concept, such as the technical solutions formed by replacing the above-mentioned features with (but not limited to) technical features with similar functions disclosed in this application.

[0081] Except for the technical features described in the specification, the remaining technical features are known technologies to those skilled in the art. In order to highlight the innovative features of the present invention, the remaining technical features will not be described here in detail.

Claims

1. A field of view consistency detection system for an optical structure, characterized in that: include: Collimator, adjustment bracket, data synchronization control and acquisition device; The collimator is arranged on one side of the adjustment bracket and is used to emit a parallel light beam to the device under test; The adjustment bracket has a bearing platform, the bearing platform is used to bear the device under test, and the adjustment bracket is configured to drive the device under test to rotate and translate, so as to change the angle and position of the optical axis of the device under test, thereby changing the channel and incident angle of the parallel light beam; The data synchronization control acquisition device is arranged on the other side of the adjustment bracket, and is used to collect two-dimensional field of view measurement point data of each channel of the device under test under parallel light beams incident at different angles, and perform field of view consistency detection between channels of the device under test based on the two-dimensional field of view measurement point data of each channel.

2. The field of view consistency detection system of the optical structure according to claim 1, characterized in that: It also includes a flat crystal, which is used for self-collimation of the collimator before measurement, so as to ensure that the output light of the collimator is substantially consistent with the optical axis of the device to be measured.

3. The field of view consistency detection system of the optical structure according to claim 2, characterized in that: The collimator uses a flat crystal to perform self-collimation, which includes: Placing the flat crystal on a surface of the device under test at one end close to the collimator; The self-collimation function of the collimator is used to make the emergent light of the collimator perpendicular to the surface of the flat crystal.

4. The field of view consistency detection system of an optical structure according to claim 1, characterized in that: The adjustment bracket is configured to drive the device under test to rotate along a first axis and a second axis, wherein the first axis is a vertical axis, the second axis is a horizontal axis, and the second axis is perpendicular to the optical axis of the device under test.

5. The field of view consistency detection system of an optical structure according to claim 1, characterized in that: The adjustment bracket is configured to drive the device under test to translate along a first direction and a second direction, wherein the first direction is a vertical direction and the second direction is a horizontal direction perpendicular to the optical axis of the device under test.

6. The field of view consistency detection system for an optical structure according to claim 1, characterized in that: Performing field of view consistency detection between channels of the device under test according to the two-dimensional field of view measurement point data of each channel includes: The two-dimensional field of view data of each channel is mean filtered and then fitted to obtain a two-dimensional field of view image of each channel; The consistency of the field of view is judged according to the area overlap of the two-dimensional field of view images between the channels of the device under test.

7. The field of view consistency detection system of an optical structure according to claim 1, characterized in that: The divergence angle of the collimator is less than 10% of the field of view consistency requirement of the device under test.

8. The field of view consistency detection system for an optical structure according to claim 1, wherein the field of view range sampled by the data synchronization control acquisition device is larger than the field of view range of the device to be tested.

9. A method for detecting the consistency of the field of view of an optical structure, characterized in that: include: Obtain the two-dimensional field of view measurement point data of each channel of the device under test under parallel light beams incident at different angles; The consistency of the field of view between the channels of the device under test is judged according to the two-dimensional field of view measurement point data.

10. The method for detecting the consistency of the field of view of an optical structure according to claim 9, characterized in that: The determination of the consistency of the field of view between the channels of the device under test according to the two-dimensional field of view measurement point data includes: The two-dimensional field of view measurement point data is mean filtered and then fitted to obtain interpolation data of sub-pixel positions between the measurement points; Acquire a two-dimensional field of view image of each channel of the device under test according to the fitting result; The consistency of the field of view is judged according to the degree of area overlap of the two-dimensional field of view images between the channels of the device under test.

Images