Loudspeaker structure

Abstract

The application relates to the field of acoustoelectric technology and discloses a loudspeaker structure which comprises a base, a diaphragm, a driving component, a first transmission component and a second transmission component. The driving component comprises a first driving part and a second driving part. The first driving part extends from a first end to a second end of the base, and at least part of the first driving part is located above a cavity. The second driving part extends from the second end to the first end, and at least part of the second driving part is located above the cavity. The first driving part and the second driving part located above the cavity are arranged to cross each other. The first transmission component is in contact with the first driving part and the diaphragm respectively. The second transmission component is in contact with the second driving part and the diaphragm respectively.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of acoustoelectric technology, in particular to a loudspeaker structure. BACKGROUND

[0002] A loudspeaker is a transducer that converts electrical signals into sound. The principle of the loudspeaker is that the audio electrical energy is converted into mechanical energy through electromagnetic, piezoelectric or electrostatic effect, and the cone or diaphragm is vibrated and resonates with the surrounding air to produce sound.

[0003] Sound is formed by the fluctuation of air pressure, and the loudspeaker pushes a certain amount of air to cause pressure changes and thus emits a certain amount of sound (sound pressure). At present, based on the structure design of miniaturization, the vibration amplitude of the diaphragm in the loudspeaker is limited, and thus the sound pressure level of the loudspeaker is limited. SUMMARY

[0004] In view of the above problems, the main purpose of the present application is to provide a loudspeaker structure, which does not change the existing miniaturization, and makes the length of the driving component in the loudspeaker structure longer, and thus the vibration amplitude is larger, and the vibration amplitude of the diaphragm is also larger, thereby improving the sound pressure level.

[0005] To achieve the above purpose, the technical scheme of the present application provides a loudspeaker structure, which comprises: a substrate, the substrate has a first surface and a second surface arranged oppositely, and the substrate has a first end and a second end arranged oppositely along a first direction; a diaphragm, the diaphragm is fixed to the first surface of the substrate, and the diaphragm and the substrate form a cavity; a driving component, the driving component is located on the second surface, and the driving component drives the diaphragm to vibrate; the driving component comprises a first driving part and a second driving part, the first driving part extends from the first end to the second end, and at least part of the first driving part is located above the cavity, the second driving part extends from the second end to the first end, and at least part of the second driving part is located above the cavity, wherein the first driving part and the second driving part located above the cavity are arranged intersectingly; a first transmission component, the first transmission component is located in the cavity, the first transmission component corresponds to the first driving part, one end of the first transmission component is in contact with the first driving part, and the other end is in contact with the diaphragm; a second transmission component, the second transmission component is located in the cavity, the second transmission component corresponds to the second driving part, one end of the second transmission component is in contact with the second driving part, and the other end is in contact with the diaphragm.

[0006] Preferably, the first driving part comprises a first fixed part in contact with the first end, a plurality of first suspension parts arranged at intervals, one end of each of the first suspension parts being connected to the first fixed part, and the other end of each of the first suspension parts being in contact with the first transmission part; the second driving part comprises a second fixed part in contact with the second end, a plurality of second suspension parts arranged at intervals, one end of each of the second suspension parts being connected to the second fixed part, and the other end of each of the second suspension parts being in contact with the second transmission part; and the plurality of first suspension parts and the plurality of second suspension parts are arranged in a cross manner.

[0007] Preferably, the first transmission part is in contact with the end of the first suspension part away from the first end; and the second transmission part is in contact with the end of the second suspension part away from the second end.

[0008] Preferably, the orthographic projection of the first suspension part on the diaphragm has a first preset range from the second end; and the orthographic projection of the second suspension part on the diaphragm has a second preset range from the first end.

[0009] Preferably, the diaphragm comprises a first part, a second part and a third part connected in sequence, the first part is located on the first surface, the third part is in contact with the first transmission part and the second transmission part, and the second part is located between the first part and the third part; the second part is convex from the first part towards the first driving part or is convex from the first part away from the first driving part.

[0010] Preferably, the first part, the second part and the third part are integrally formed organic films.

[0011] Preferably, at least one of the first part and the second part is an organic film, and the third part is a rigid film.

[0012] Preferably, the diaphragm further comprises a reinforcing diaphragm located on the side of the third part away from the cavity.

[0013] Preferably, the first driving part comprises a support layer, a bottom electrode layer, a piezoelectric layer, a top electrode layer and a protective layer arranged in layers.

[0014] The loudspeaker structure of the present application has the beneficial effect that the driving component indirectly contacts the diaphragm, the driving component comprises a first driving part and a second driving part, and the first driving part and the second driving part are arranged in a cross manner above the cavity, so that the limited length of the first driving part and the second driving part is longer in the limited area, i.e. the cantilevered end of the first driving part and the cantilevered end of the second driving part can have a larger up-down movement amplitude by maximizing the length of the cantilevered beam, thus the chip of the same size can push a larger volume of air to generate a higher sound pressure level. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the following embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative effort based on these drawings.

[0016] Figure 1 is a structural schematic diagram of the loudspeaker structure of the first embodiment of the present application;

[0017] Figure 2 is a top view of the loudspeaker structure shown in Figure 1

[0018] Figure 3 is a bottom view of the loudspeaker structure shown in Figure 1

[0019] Figure 4 is a partial sectional view of the first driving part in the loudspeaker structure shown in Figure 1

[0020] Figure 5 is a sectional view of the vibration state in the loudspeaker structure shown in Figure 1

[0021] Figure 6 is a bottom view of the loudspeaker structure of the second embodiment of the present application;

[0022] Figure 7 is a sectional perspective view of the loudspeaker structure shown in Figure 6 DETAILED DESCRIPTION

[0023] ​​​​​In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the various embodiments of the present application will be described in detail below with reference to the drawings. However, those skilled in the art can understand that, in the various embodiments of the present application, many technical details are presented in order to make the readers better understand the present application. However, the technical solutions claimed by the present application can be implemented even without these technical details and various changes and modifications based on the following various embodiments.

[0024] In the embodiments of the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0025] In addition, in addition to being used to indicate the orientation or positional relationship, the above-mentioned partial terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain dependent relationship or connection relationship in some cases. For those skilled in the art, the specific meaning of these terms in the present application can be understood according to the specific situation.

[0026] In addition, the terms "mount", "set", "provided with", "open", "connect", "connect" should be broadly understood. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above-mentioned terms in the present application can be understood according to the specific situation.

[0027] In addition, the terms "first", "second", and the like are mainly used to distinguish different devices, elements or components (the specific types and structures can be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise stated, the meaning of "multiple" is two or more.

[0028] The various embodiments of the present application will be described in detail below with reference to the drawings. However, those skilled in the art can understand that, in the various embodiments of the present application, many technical details are presented in order to make the readers better understand the present application. However, the technical solutions claimed by the present application can be implemented even without these technical details and various changes and modifications based on the following various embodiments.

[0029] Combined with reference Figures 1-5The first embodiment of the present application provides a loudspeaker structure, the loudspeaker structure 100 comprises: a substrate 103, the substrate 103 has a first surface (not marked) and a second surface (not marked) arranged oppositely, the substrate 103 has a first end 1031 and a second end 1032 arranged oppositely along a first direction X; a diaphragm 101, the diaphragm 101 is fixed to the first surface of the substrate 103, and the diaphragm 101 and the substrate 103 form a cavity 104; a driving component 110, the driving component 110 is located on the second surface, and the driving component 110 drives the diaphragm 101 to vibrate; the driving component 110 comprises a first driving part 111 and a second driving part 112, the first driving part 111 extends from the first end 1031 to the second end 1032, and at least part of the first driving part 111 is located above the cavity 104, the second driving part 112 extends from the second end 1032 to the first end 1031, and at least part of the second driving part 112 is located above the cavity 104, wherein the first driving part 111 and the second driving part 112 located above the cavity 104 are arranged intersectingly; a first transmission component 105, the first transmission component 105 is located in the cavity 104, the first transmission component 105 corresponds to the first driving part 111, one end of the first transmission component 105 is in contact with the first driving part 111, and the other end is in contact with the diaphragm 101; a second transmission component 106, the second transmission component 106 is located in the cavity 104, the second transmission component 106 corresponds to the second driving part 112, one end of the second transmission component 106 is in contact with the second driving part 112, and the other end is in contact with the diaphragm 101.

[0030] The substrate 103 of the loudspeaker structure 100 of the embodiment is arranged in a square ring shape, the diaphragm 101 and the substrate 103 form a cavity 104, the cavity 104 penetrates through the substrate 103, and serves as a vibration space of the loudspeaker structure 100. Optionally, the substrate 103 can be a single crystal silicon substrate or other substrate meeting design requirements.

[0031] The inner side and the connecting part of the substrate 103 are arranged as chamfers, especially circular chamfers, when the substrate 103 is arranged in a square ring shape, which can reduce sharp structures inside the loudspeaker structure 100, which is beneficial to the assembly of the product, and can avoid that the sharp structures on the substrate 103 contact and damage other internal devices of the loudspeaker structure 100.

[0032] The first driving part 111 comprises a first fixed part 1111 in contact with the first end 1031, and a plurality of first suspension parts 1112 arranged at intervals along the second direction Y, one end of each first suspension part 1112 being connected to the first fixed part 1111, and the other end of each first suspension part 1112 being in contact with the first transmission part 105. A plurality of first suspension parts 1112 are provided, each of which can serve as a deformation region of a first driving part 111, driving the first transmission part 105 and causing the diaphragm 101 to deform. The plurality of first suspension parts 1112 provide a force to multiple regions of the diaphragm 101, and the cumulative force generated is large, so that the vibration amplitude of the diaphragm 101 is large, and the sound produced is loud. Under the limited vibration area, the effective amplitude can be increased to increase the sound pressure level.

[0033] The second driving part 112 comprises a second fixed part 1121 in contact with the second end 1032, a plurality of second suspension parts 1122 arranged at intervals, one end of each second suspension part 1122 being connected to the second fixed part 1121, and the other end of each second suspension part 1122 being in contact with the second transmission part 106; and the plurality of first suspension parts 1112 and the plurality of second suspension parts 1122 are arranged in a cross manner. Based on the cross arrangement of the first suspension parts 1112 and the second suspension parts 1122, the length of the first driving part 111 and the second driving part 112 is long within the limited area, and the vibration amplitude of the first driving part 111 and the second driving part 112 is large, thereby increasing the vibration amplitude of the diaphragm 101 and improving the sound pressure level.

[0034] The first transmission part 105 is in contact with the end of the first suspension part 1112 away from the first end 1031. In this way, the vibration force arm of the driving of the first driving part 111 is the length of the first driving part 111, and the resulting vibration amplitude is large, thereby causing the diaphragm 101 to deform greatly, and further pushing the air to provide a high sound pressure.

[0035] The second transmission part 106 is in contact with the end of the second suspension part 1122 away from the second end 1032. The vibration force arm of the second driving part 112 is also the length of the second driving part 112, which can improve the sound pressure level performance.

[0036] The orthographic projection of the first suspension part 1112 on the diaphragm 101 has a first predetermined range L1 from the second end 1032. In this way, the first suspension part 1112 has a certain gap from the base 103, which can prevent the first suspension part 1112 from contacting the base 103, thereby generating noise and causing errors in the sound emitted.

[0037] The first preset range L1 is 10-2000 μm. Alternatively, the first preset range L1 can be 50-1000 μm. Further, the first preset range L1 can be 50 μm, 100 μm, 200 μm, 300 μm, 400 μm, 500 μm, 600 μm, 700 μm, 800 μm, 900 μm or 1000 μm.

[0038] The normal projection of the second suspension portion 1122 on the diaphragm 101 has a second preset range L2 from the first end 1031. The second preset range L2 can improve the accuracy of sound.

[0039] The second preset range L2 is 10-2000 μm. Alternatively, the second preset range L2 can be 50-1000 μm. Further, the second preset range L2 can be 50 μm, 80 μm, 130 μm, 250 μm, 410 μm, 520 μm, 610 μm, 710 μm, 820 μm, 910 μm or 1000 μm.

[0040] Alternatively, the distance between the normal projection of the first suspension portion 1112 on the diaphragm 101 and the second end 1032 is equal to the distance between the normal projection of the second suspension portion 1122 on the diaphragm 101 and the first end 1031.

[0041] Alternatively, the first suspension portion 1112 and the base 103 can be fixed by a spring structure to avoid large movement amplitude of the first suspension portion 1112. The second suspension portion 1122 and the base 103 can be fixed by a spring structure to avoid large movement amplitude of the second suspension portion 1122.

[0042] The diaphragm 101 comprises a first portion 1011, a second portion 1012 and a third portion 1013 connected in sequence, the first portion 1011 is located on the first surface, the third portion 1013 is in contact with the first transmission member 105 and the second transmission member 106, and the second portion 1012 is located between the first portion 1011 and the third portion 1013; the second portion 1012 is convex in the direction from the first portion 1011 to the first driving portion 111 or in the direction away from the first driving portion 111. Thus, since the second portion 1012 is convex in the direction from the first portion 1011 to the first driving portion 111 or in the direction away from the first driving portion 111, i.e., the cross section of the second portion 1012 is an arched folded ring with a longer circumference, the arched deformation is larger than flat deformation under the same Poisson's ratio, so that the first suspension portion 1112 is more free, a larger amplitude can be obtained, and thus the diaphragm 101 can push more volume of air to generate a higher sound pressure level.

[0043] The first portion 1011, the second portion 1012 and the third portion 1013 are integrally formed organic films. The organic films can be made of polydimethylsiloxane (PDMS) or polyimide, etc.

[0044] Optionally, the third portion 1013 further has a reinforcing diaphragm 1014 on the side away from the cavity 104. The reinforcing diaphragm 1014 is fixedly connected to the portion of the third portion 1013 that overlaps with the reinforcing diaphragm 1014. The yield strength of the reinforcing diaphragm 1014 is greater than that of the third portion 1013, thereby improving the mechanical strength of the diaphragm 101 and prolonging the service life of the diaphragm 101.

[0045] Reference Figure 4 The first driving portion 111 includes a support layer 125, a bottom electrode layer 124, a piezoelectric layer 123, a top electrode layer 122 and a protective layer 121 which are stacked. The material of the support layer 125 can be SOI (Silicon On Insulato, insulating material of crystalline silicon). The material of the support layer 125 can be silicon dioxide or other insulating materials. The material of the bottom electrode layer 124 can be platinum.

[0046] The material of the piezoelectric layer 123 can be PZT (Lead Zirconate Titanate, lead zirconate titanate). The PZT thin film has a high piezoelectric constant, thereby improving the electromechanical conversion efficiency and improving the driving speed of the loudspeaker. The material of the top electrode layer 122 can be gold and platinum alloy. The material of the protective layer 121 can be silicon nitride.

[0047] The first driving portion 111 and the substrate 103 further have an insulating layer 109 therebetween. The material of the insulating layer 109 is silicon dioxide, which can make the parasitic capacitance between the first driving portion 111 and the substrate 103 less than that of a structure without the insulating layer.

[0048] The second driving portion can also include a support layer, a bottom electrode layer, a piezoelectric layer, a top electrode layer and a protective layer which are stacked. The second driving portion and the substrate also have an insulating layer therebetween. The stacked structure of the second driving portion is the same as that of the first driving portion, which will not be described here. For details, please refer to the stacked structure of the first driving portion.

[0049] Reference Figure 5 Under the driving of the audio signal, the first driving portion 111 drives the cantilever on which the first suspension portion 1112 is located to move up and down, thereby driving the first transmission member 105 to vibrate. The diaphragm 101 connected to the first transmission member 105 also moves, thereby generating sound pressure.

[0050] The second driving part 112 is driven by the audio signal, the cantilever part where the second suspension part 1122 is located moves up and down, and then drives the second transmission part 106, and the diaphragm 101 connected with the second transmission part 106 also moves, so as to generate sound pressure. The beam length of the cantilever part is maximally extended, the end of the cantilever part can obtain a larger up and down movement amplitude, so that the chip of the same size can push a larger volume of air to generate a higher sound pressure level.

[0051] The loudspeaker structure 100 provided by the present application is provided with the driving part 110 in indirect contact with the diaphragm 101, the driving part 110 includes the first driving part 111 and the second driving part 112, and the first driving part 111 and the second driving part 112 are arranged in a cross manner above the cavity 104, so that the limited length of the first driving part 111 and the second driving part 112 is longer in the limited area, that is, the beam length of the cantilever part is maximally extended, the end of the cantilever part of the first driving part 111 and the end of the cantilever part of the second driving part 112 can obtain a larger up and down movement amplitude, so that the chip of the same size can push a larger volume of air to generate a higher sound pressure level.

[0052] Meanwhile, referring to Figures 6-7 The second embodiment of the present application provides a loudspeaker structure, which is different from the first embodiment in that the materials of the first part, the second part and the third part of the diaphragm in the first embodiment are the same, while the material of the third part of the diaphragm in the second embodiment is different from the materials of the first part and the second part, and other features are the same. The same parts as the above embodiments will not be described here.

[0053] It should be noted that, since the first embodiment and the second embodiment are only different in the diaphragm, the structure diagram and the top view of the loudspeaker structure are not shown, only the bottom view and the sectional perspective view of the loudspeaker structure are shown. The features not shown in the loudspeaker structure provided by the second embodiment can be referred to the first embodiment.

[0054] Reference Figures 6-7The loudspeaker structure 200 comprises: a substrate 203 having a first surface (not labeled) and a second surface (not labeled) oppositely arranged, the substrate 203 having a first end and a second end oppositely arranged along a first direction; a diaphragm 201 fixed to the first surface of the substrate 203, the diaphragm 201 and the substrate 203 surrounding a cavity 204; a driving component on the second surface, the driving component driving the diaphragm 201 to vibrate; the driving component comprising a first driving part 211 extending from the first end to the second end, and at least part of the first driving part 211 being above the cavity 204, and a second driving part extending from the second end to the first end, and at least part of the second driving part being above the cavity 204, wherein the first driving part 211 and the second driving part above the cavity 204 are arranged to intersect each other; a first transmission component 205 in the cavity 204, the first transmission component 205 corresponding to the first driving part, one end of the first transmission component 205 being in contact with the first driving part 211, and the other end being in contact with the diaphragm 201; and a second transmission component in the cavity 204, the second transmission component corresponding to the second driving part, one end of the second transmission component being in contact with the second driving part, and the other end being in contact with the diaphragm 201.

[0055] The diaphragm 201 comprises a first part 2011, a second part 2012 and a third part 2013 connected in sequence, the first part 2011 being on the third surface, the third part 2013 being in contact with the first transmission component 205 and the second transmission component, and the second part 2012 being between the first part 2011 and the third part 2013; the second part 2012 being protruded from the first part 2011 towards the direction of the first driving part 211 or being protruded from the first part 2011 towards the direction away from the first driving part 211.

[0056] At least one of the first part 2011 and the second part 2012 is an organic film, and the third part 2013 is a rigid film; the third part 2013 and the second part 2012 are fixedly connected to each other. The rigidity of the third part 2013 is greater than that of the organic film, so that the diaphragm area corresponding to the third part 2013 can move up and down as a whole, without other vibration shapes.

[0057] The loudspeaker structure 200 provided by the present application is provided with a driving component in indirect contact with the diaphragm 201, the driving component comprises a first driving part 211 and a second driving part, and the first driving part 211 above the cavity 204 is arranged in cross with the second driving part, so that in a limited area, the limited length of the first driving part 211 and the second driving part is longer, that is, by maximizing the length of the beam of the cantilever part, the cantilever end of the first driving part 211 and the cantilever end of the second driving part can obtain a larger up-down movement amplitude, so that the chip of the same size can push a larger volume of air to generate a higher sound pressure level.

[0058] Those skilled in the art can understand that the above-mentioned embodiments are specific embodiments for realizing the present application, and in actual application, various changes can be made in form and details without departing from the spirit and scope of the present application.

Claims

1. A loudspeaker structure, characterized by The application relates to a loudspeaker, comprising: a base having a first face and a second face arranged oppositely, the base having a first end and a second end arranged oppositely along a first direction; a diaphragm fixed to the first face of the base, the diaphragm and the base forming a cavity; a driving component on the second face, the driving component driving the diaphragm to vibrate; the driving component comprising a first driving part extending from the first end to the second end, at least part of the first driving part being above the cavity, and a second driving part extending from the second end to the first end, at least part of the second driving part being above the cavity, wherein the first driving part and the second driving part above the cavity are arranged to intersect each other; a first transmission component in the cavity, the first transmission component corresponding to the first driving part, one end of the first transmission component being in contact with the first driving part, and the other end being in contact with the diaphragm; a second transmission component in the cavity, the second transmission component corresponding to the second driving part, one end of the second transmission component being in contact with the second driving part, and the other end being in contact with the diaphragm.

2. The loudspeaker structure of claim 1, wherein, The first driving part comprises a first fixed part in contact with the first end, and a plurality of first suspension parts arranged at intervals, one end of each first suspension part being connected to the first fixed part, and the other end being in contact with the first transmission component; The second driving part comprises a second fixed part in contact with the second end, a plurality of second suspension parts arranged at intervals, one end of each second suspension part being connected to the second fixed part, and the other end being in contact with the second transmission component; and the first suspension parts and the second suspension parts are arranged to intersect each other.

3. The loudspeaker structure of claim 2, wherein, The first transmission component is in contact with the end of the first suspension part away from the first end; and the second transmission component is in contact with the end of the second suspension part away from the second end.

4. The loudspeaker structure of claim 2, wherein, The orthographic projection of the first suspension part on the diaphragm has a first preset range with the second end; and the orthographic projection of the second suspension part on the diaphragm has a second preset range with the first end.

5. The loudspeaker structure of claim 4, wherein, The first preset range is 10-2000 um; and the second preset range is 10-2000 um.

6. The loudspeaker structure of claim 1, wherein, The diaphragm comprises a first part, a second part and a third part connected in sequence, the first part being on the first face, the third part being in contact with the first transmission component and the second transmission component, and the second part being between the first part and the third part; the second part is convex from the first part towards the direction of the first driving part or away from the direction of the first driving part.

7. The loudspeaker structure of claim 6, wherein, The first part, the second part and the third part are integrally formed organic films.

8. The loudspeaker structure of claim 6, wherein, At least one of the first portion and the second portion is an organic film, and the third portion is a rigid film.

9. The loudspeaker structure of claim 6, wherein, Also included are: A stiffening diaphragm on a side of the third portion distal from the cavity.

10. The loudspeaker structure of claim 1, wherein, The first driving portion includes a support layer, a bottom electrode layer, a piezoelectric layer, a top electrode layer, and a protective layer.

Images