A honeycomb CMP polishing skin hole opening device

Abstract

The invention discloses a honeycomb CMP polishing skin hole-making device, which relates to the technical field of punching equipment, and comprises a fixed seat, a bracket fixedly connected to the fixed seat, a hydraulic rod fixedly connected to the bracket, an upper punching mechanism fixedly connected to the output end of the hydraulic rod, a mounting seat fixedly connected to a position of the fixed seat located below the upper punching mechanism, a placement groove provided on the mounting seat, a lower punching mechanism provided in the placement groove, at least three sliding grooves provided in an array of positions close to the lower punching mechanism on the mounting seat, a fixing mechanism for fixing the polishing skin slidably connected in the sliding groove, the upper punching mechanism and the lower punching mechanism provided by the invention perform punching, and the generated waste will fall into the collecting groove, so as to avoid the blockage of the waste affecting the next punching, avoid manual waste processing, and improve the work efficiency, and in the process of moving the lower support plate, the air in the placement groove is discharged from the connecting port, and the waste is blown to the position where the collecting groove is connected with the outside world, so as to facilitate the removal of the waste.

Description

Technical Field

[0001] The invention relates to the technical field of punching equipment, in particular to a honeycomb CMP polishing skin punching device. Background Art

[0002] CMP, or chemical mechanical polishing, is a technology used to flatten surface materials in the process of manufacturing semiconductor devices. Polishing pads are important components in the CMP process and are suitable for polishing the surfaces of precision parts such as metals, optics, glass, ceramics and semiconductor chips. A Chinese patent with publication number "CN218170671U" provides a double-sided polishing pad hole-making device. The application places the polishing pad in a die and presses the polishing pad with a pressure roller, so that the first blade and the second blade make holes in the polishing pad. The application requires manual placement of the polishing pad in the die, and manual cleaning of waste materials after the hole-making is completed, resulting in low work efficiency. Summary of the invention

[0003] The object of the present invention is to provide a honeycomb CMP polishing skin hole opening device to solve the problems raised in the above background technology.

[0004] In order to achieve the above-mentioned invention object, the present invention adopts the following technical scheme:

[0005] The present invention provides a honeycomb CMP polishing skin hole-making device, comprising a fixed seat, a bracket fixedly connected to the fixed seat, a hydraulic rod fixedly connected to the bracket, an upper punching mechanism fixedly connected to the output end of the hydraulic rod, a mounting seat fixedly connected to a position of the fixed seat located below the upper punching mechanism, a placement groove provided on the mounting seat, a lower punching mechanism provided in the placement groove, at least three sliding grooves provided in an array near the lower punching mechanism on the mounting seat, a fixing mechanism for fixing the polishing skin being slidably connected in the sliding groove.

[0006] Furthermore, the upper punching mechanism includes an upper support plate fixedly connected to the output end of the hydraulic rod, a plurality of annular grooves are arranged in an array on the upper support plate, a sliding plate is slidably connected in each of the annular grooves, a fixed frame is fixedly connected to the sliding plate, one end of the sliding plate is fixedly connected to a first spring, the other end of the first spring is fixedly connected to the inner wall of the annular groove, a stamping tool is fixedly connected to the center position of the annular groove, and the stamping tool extends outside the annular groove.

[0007] Furthermore, the fixing mechanism includes a fixed block slidably connected to the sliding groove, a first connecting rod and a second connecting rod are hinged on one side of the fixed block, the first connecting rod and the second connecting rod are cross-arranged, a first pushing rod is slidably connected to the side of the sliding groove away from the fixed block, a first sliding groove is provided at a position of the first pushing rod close to the first connecting rod, an abutting rod is slidably connected in the first sliding groove, the abutting rod is hinged to the first connecting rod, and a second spring is fixedly connected between the abutting rod and the inner wall of the first sliding groove.

[0008] Further, the lower punching mechanism includes a lower support plate slidably connected to the placement groove, the lower support plate is provided with a through hole corresponding to the position of the punching tool, a guide tube is slidably connected in the through hole, a third spring is fixedly connected between the lower support plate and the mounting seat, a collecting groove is provided at a position of the mounting seat below the placement groove, one side of the collecting groove passes through the mounting seat and is connected to the outside, the guide tube extends into the collecting groove and is slidably connected to the mounting seat, a slide plate is slidably connected in the collecting groove, a mounting seat is provided at a position below the collecting groove, a sliding rod is slidably connected in the mounting groove, an end of the sliding rod close to the slide plate is hinged with a push rod, an end of the push rod away from the sliding rod is hinged with the slide plate, an end of the sliding rod away from the push rod is fixedly connected with a conical block, a fourth spring is fixedly connected between the conical block and the inner wall of the mounting groove, a second push rod is abutted on the conical block, the second push rod passes through the mounting groove and extends into the sliding groove, the second push rod is fixedly connected to the first push rod, and the position where the collecting groove is connected to the outside is slidably connected to a closing component for closing the collecting groove.

[0009] Further, the closing assembly includes a fixed rod fixedly connected to the sliding slot near the first pushing rod, the fixed rod is rotatably connected to a rotating disk at a position near the first pushing rod, the rotating disk is fixedly connected to the first rotating rod at a position near the first pushing rod, the rotating disk is fixedly connected to the second rotating rod at a position near the bottom rod, a limiting groove is provided at the position of the second pushing rod and the second rotating rod, the second rotating rod is located in the limiting groove, and one end of the second pushing rod extending into the collecting slot is fixedly connected to a closing plate, the first rotating rod abuts against a pushing plate, one side of the pushing plate is fixedly connected to a connecting rod, the sliding slot is fixedly connected to a first inclined plate near the inner wall of the connecting rod, the sliding slot is fixedly connected to a second inclined plate near the position below the rotating disk, and the connecting rod abuts against the first inclined plate and the second inclined plate.

[0010] Furthermore, the pushing plate is slidably connected to the first pushing rod.

[0011] Furthermore, a telescopic plate is fixedly connected to one side of the slide plate close to the collecting tank and connected to the outside, and the other end of the telescopic plate is fixedly connected to the inner wall of the collecting tank.

[0012] Furthermore, the width of the slide plate gradually decreases toward the side of the collecting tank that is connected to the outside.

[0013] Furthermore, the collecting tank is connected to the placement tank via a communication port, and the communication port is arranged at a position of the mounting seat away from the collecting tank and connected to the outside.

[0014] Furthermore, one end of the guide tube away from the lower support plate is fixedly connected to the mounting seat, and the guide tube is communicated with the collecting tank.

[0015] Compared with the prior art, one or more of the above technical solutions have the following beneficial effects:

[0016] The present invention can move the polishing sheet to the position to be punched by means of the fixed mechanism, automatically move the polishing sheet to the position to be punched, make the punching position of each polishing sheet the same, improve the position accuracy of the punching, save labor and reduce work intensity;

[0017] The upper punching mechanism is provided to support and fix the position of the polished leather to be punched through a fixed frame to prevent the polished leather from being greatly deformed during the punching process, which affects the quality of the punching;

[0018] The upper punching mechanism and the lower punching mechanism are set to punch holes in the polishing sheet. During the punching process, the polishing sheet is pushed upward for easy collection, and the generated waste falls into the collecting tank, so as to avoid the blockage of the waste and affect the next punching, avoid manual processing of the waste, and improve work efficiency. During the movement of the lower support plate, the air in the placement tank is discharged from the connecting port, and the waste is blown to the position where the collection tank is connected to the outside world, so as to facilitate the removal of the waste.

[0019] It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The accompanying drawings in the specification, which constitute a part of the present invention, are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0021] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0022] Figure 2 It is a structural schematic diagram of the upper punching mechanism of the present invention;

[0023] Figure 3 is a side view of the upper punching mechanism of the present invention;

[0024] Figure 4 It is a schematic diagram of the overall structure of the mounting base and the fixing mechanism of the present invention;

[0025] Figure 5 yes Figure 4 Sectional view at AA in the middle;

[0026] Figure 6 The connection structure of the sealing component and the first push rod of the present invention is shown in FIG. Figure 1 ;

[0027] Figure 7 The connection structure of the sealing component and the first push rod of the present invention is shown in FIG. Figure 2 .

[0028] In the figure:

[0029] 1. Fixed seat; 2. Bracket; 3. Hydraulic rod; 4. Upper punching mechanism; 5. Mounting seat; 6. Placement slot; 7. Lower punching mechanism; 8. Sliding slot; 9. Fixed mechanism; 10. Upper support plate; 11. Annular slot; 12. Sliding plate; 13. Fixed frame; 14. First spring; 15. Punching tool; 16. Fixed block; 17. First connecting rod; 18. Second connecting rod; 19. First push rod; 20. First slide slot; 21. Abutment rod; 22. Second spring; 23. Lower support plate; 24. Through hole ; 25. Guide tube; 26. Third spring; 27. Collecting trough; 28. Slide plate; 29. ​​Mounting groove; 30. Sliding rod; 31. Push rod; 32. Conical block; 33. Fourth spring; 34. Second push rod; 35. Closing assembly; 36. Fixed rod; 37. Rotating disk; 38. First rotating rod; 39. Second rotating rod; 40. Limiting groove; 41. Closing plate; 42. Pushing plate; 43. Connecting rod; 44. First inclined plate; 45. Second inclined plate; 46. Telescopic plate; 47. Connecting port. DETAILED DESCRIPTION

[0030] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present application.

[0031] See also Figures 1 to 7The present invention provides a honeycomb CMP polishing skin hole opening device, including a fixed seat 1, a bracket 2 is fixedly connected to the fixed seat 1, a hydraulic rod 3 is fixedly connected to the bracket 2, an upper punching mechanism 4 is fixedly connected to the output end of the hydraulic rod 3, a mounting seat 5 is fixedly connected to the position of the fixed seat 1 below the upper punching mechanism 4, a placement groove 6 is provided on the mounting seat 5, a lower punching mechanism 7 is arranged in the placement groove 6, at least three sliding grooves 8 are provided in an array near the lower punching mechanism 7 on the mounting seat 5, and a fixing mechanism 9 for fixing the polishing skin is slidably connected in the sliding groove 8.

[0032] The polishing sheet is placed on the lower punching mechanism 7, and the polishing sheet is fixed by the fixing mechanism 9. The hydraulic rod 3 is started to drive the upper punching mechanism 4 to move toward the lower punching mechanism 7. The upper punching mechanism 4 cooperates with the lower punching mechanism 7 to make holes in the polishing sheet. The fixing mechanism 9 can move the polishing sheet to the position to be punched. There is no need to manually place the polishing sheet at the position to be punched. The punching position accuracy is relatively large, and labor is saved and work intensity is reduced. In the process of punching by the upper punching mechanism 4 and the lower punching mechanism 7, the waste generated by the punching will fall into the mounting seat 5, so as to avoid the blockage of the waste and affect the next punching process, avoid manual waste processing, and improve work efficiency.

[0033] See also Figure 2 and Figure 3 The upper punching mechanism 4 includes an upper support plate 10 fixedly connected to the output end of the hydraulic rod 3, and a plurality of annular grooves 11 are arranged in an array on the upper support plate 10, and a sliding plate 12 is slidably connected in each of the annular grooves 11, and a fixing frame 13 is fixedly connected to the sliding plate 12, and one end of the sliding plate 12 is fixedly connected to a first spring 14, and the other end of the first spring 14 is fixedly connected to the inner wall of the annular groove 11, and a stamping tool 15 is fixedly connected to the center position of the annular groove 11, and the stamping tool 15 extends outside the annular groove 11.

[0034] When punching, the hydraulic rod 3 drives the upper support plate 10 to move, and the upper support plate 10 drives the punching tool 15 to move to the polished leather. During the movement, the upper support plate 10 drives the sliding plate 12 to move, and the movement of the sliding plate 12 drives the fixed frame 13 to move. The fixed frame 13 supports and fixes the position to be punched to prevent the polished leather from undergoing large deformation during the punching process, which affects the quality of the punching.

[0035] See also Figure 5 and Figure 7The fixing mechanism 9 includes a fixing block 16 slidably connected to the sliding groove 8, a first connecting rod 17 and a second connecting rod 18 are hinged on one side of the fixing block 16, the first connecting rod 17 and the second connecting rod 18 are cross-arranged, a first pushing rod 19 is slidably connected to the side of the sliding groove 8 away from the fixing block 16, a first sliding groove 20 is provided at a position of the first pushing rod 19 close to the first connecting rod 17, an abutting rod 21 is slidably connected in the first sliding groove 20, the abutting rod 21 is hinged to the first connecting rod 17, and a second spring 22 is fixedly connected between the abutting rod 21 and the inner wall of the first sliding groove 20.

[0036] When the upper support plate 10 moves toward the polishing skin, the upper support plate 10 contacts the first push rod 19 and drives the first push rod 19 to move. The first push rod 19 moves and drives the abutment rod 21 to move through the second spring 22. The abutment rod 21 moves and drives one end of the first connecting rod 17 and the second connecting rod 18 to approach each other, so that the two ends of the first connecting rod 17 and the second connecting rod 18 are separated from each other, and then pushes the fixed block 16 to move. The fixed block 16 moves and drives the polishing skin to move. The second spring 22 makes the fixed block 16 no longer move when the upper support plate 10 moves during the punching process. Before punching, the polishing skin moves to the center position of the lower punching mechanism 7. At least three fixed blocks 16 move to the center position of the lower punching mechanism 7, push the polishing skin to the punching position of the lower punching mechanism 7, and automatically move the polishing skin to the position to be punched, so that the punching position of each polishing skin is the same, thereby improving the punching position accuracy.

[0037] See also Figures 5 to 7The lower punching mechanism 7 includes a lower support plate 23 slidably connected to the placement groove 6, and a through hole 24 corresponding to the position of the punching tool 15 is opened on the lower support plate 23. A guide tube 25 is slidably connected in the through hole 24. A third spring 26 is fixedly connected between the lower support plate 23 and the mounting seat 5. A collecting groove 27 is opened at the position of the mounting seat 5 below the placement groove 6. One side of the collecting groove 27 passes through the mounting seat 5 and is connected to the outside. The guide tube 25 extends into the collecting groove 27 and is slidably connected to the mounting seat 5. A slide plate 28 is slidably connected in the collecting groove 27. A mounting groove 29 is opened at the position of the mounting seat 5 below the collecting groove 27. A sliding rod 30 is slidably connected in the mounting groove 29, and a push rod 31 is hinged at one end of the sliding rod 30 close to the slide plate 28, and the push rod 31 is hinged to the slide plate 28 at one end away from the sliding rod 30, and a conical block 32 is fixedly connected to one end of the sliding rod 30 away from the push rod 31, and a fourth spring 33 is fixedly connected between the conical block 32 and the inner wall of the mounting groove 29, and a second push rod 34 is abutted on the conical block 32, and the second push rod 34 passes through the mounting groove 29 and extends into the sliding groove 8, and the second push rod 34 is fixedly connected to the first push rod 19, and the position where the collecting groove 27 is connected to the outside is slidably connected to a closing component 35 for closing the collecting groove 27.

[0038] When the upper support plate 10 moves toward the lower support plate 23, the fixed frame 13 moves and drives the lower support plate 23 to move through the polishing skin. The movement of the lower support plate 23 compresses the third spring 26 to move, thereby compressing the space of the placement groove 6. At the same time, the first push rod 19 moves to drive the second push rod 34 to move. The movement of the second push rod 34 drives the conical block 32 to move. The movement of the conical block 32 drives the sliding rod 30 to move. The movement of the sliding rod 30 drives one end of the push rod 31 to move. The other end of the push rod 31 is hinged to the slide plate 28, so that the slide plate 28 is lifted during the movement of the push rod 31, so that the space in the collecting groove 27 is reduced, and when the first push rod 19 moves, it drives the closing component 35 to move, so that the collecting groove 27 is connected to the outside world, so that the placement groove 6 and the collecting groove 27 are discharged, and the polished leather is punched under the action of the punching tool 15 and the guide tube 25. When the punching is completed, the closing component 35 closes the collecting groove 27 from the outside. When the upper support plate 10 returns, the slide plate 28 moves upward under the action of the third spring 26, and moves the polished leather to the outside of the placement groove 6, so as to facilitate the collection of the polished leather after the punching. Under the action of the fourth spring 33, the conical block 32 returns to the initial position, thereby increasing the space in the placement groove 6 and the collecting groove 27, and the negative pressure increases. Under the action of the negative pressure, the waste under the punching is sucked into the collecting groove 27 by the negative pressure through the guide tube 25, so as to prevent the waste from clogging the lower punching mechanism 7 and affecting the next punching process, avoiding manual processing of waste, and improving work efficiency.

[0039] See also Figure 5 and Figure 6 The closing assembly 35 includes a fixed rod 36 fixedly connected to the sliding groove 8 near the first push rod 19, the fixed rod 36 is rotatably connected to a rotating disk 37 at a position near the first push rod 19, the rotating disk 37 is fixedly connected to a first rotating rod 38 at a position near the first push rod 19, the rotating disk 37 is fixedly connected to a second rotating rod 39 at a position near the bottom rod, a limiting groove 40 is provided at the position of the second push rod 34 and the second rotating rod 39, the second rotating rod 39 is located in the limiting groove 40, and one end of the second push rod 34 extending into the collecting groove 27 is fixedly connected to a closing plate 41, a pushing plate 42 is abutted on the first rotating rod 38, and a connecting rod 43 is fixedly connected to one side of the pushing plate 42, the inner wall of the sliding groove 8 near the connecting rod 43 is fixedly connected to a first inclined plate 44, and the inner wall of the sliding groove 8 near the position below the rotating disk 37 is fixedly connected to a second inclined plate 45, and the connecting rod 43 abuts against the first inclined plate 44 and the second inclined plate 45.

[0040] See also Figure 6 The push plate 42 is slidably connected to the first push rod 19 .

[0041] When the first push rod 19 moves the downward support plate 23, the first push rod 19 drives the push plate 42 to move, and the movement of the push plate 42 drives the first rotating rod 38 to move, and the movement of the first rotating rod 38 drives the rotating disk 37 to rotate, and the rotation of the rotating disk 37 drives the second rotating rod 39 to move, and the movement of the second rotating rod 39 drives the second push rod 34 to move, and the second push rod 34 moves upward to drive the closing plate 41 to move, so that the collecting groove 27 is connected with the outside world, so that the air in the collecting groove 27 and the placement groove 6 is discharged, and when the push plate 42 moves, it drives the connecting rod 43 to move, and the connecting rod 43 abuts against the second inclined plate 45, thereby driving the connecting rod 43 to move away from the rotating disk 37, and then the push plate 42 is separated from the first rotating rod 38, and the rotating disk 37 returns to the initial position under the self-gravity of the second push rod 34, and the closing plate 41 closes the collecting groove 27.

[0042] See also Figure 5 A telescopic plate 46 is fixedly connected to one side of the slide plate 28 that is close to the collecting tank 27 and is connected to the outside world. The other end of the telescopic plate 46 is fixedly connected to the inner wall of the collecting tank 27. The telescopic plate 46 blocks the space between the bottom of the slide plate 28 and the inner wall of the collecting tank 27 during the movement of the slide plate 28, so that the air in the collecting tank 27 can only be discharged from the collecting tank 27 during the movement of the slide plate 28, so that a negative pressure is formed in the collecting tank 27.

[0043] See also Figure 5The width of the slide plate 28 gradually decreases toward the side where the collecting groove 27 is connected to the outside world, so that the waste during punching moves to the position where the collecting groove 27 is connected to the outside world, which is convenient for subsequent removal.

[0044] See also Figure 5 The collecting tank 27 is connected to the placing tank 6 through a connecting port 47, and the connecting port 47 is arranged at a position of the mounting seat 5 away from the collecting tank 27 and connected to the outside world. The connecting port 47 is arranged so that the air in the placing tank 6 is discharged from the connecting port 47 during the downward movement of the lower support plate 23, and the waste on the slide plate 28 is blown to the position where the collecting tank 27 is connected to the outside world, which further facilitates the subsequent removal of the waste.

[0045] See also Figure 5 The end of the guide tube 25 away from the lower support plate 23 is fixedly connected to the mounting seat 5, and the guide tube 25 is connected to the collecting groove 27. When the lower support plate 23 moves to the bottom end of the placement groove 6, the upper end of the guide tube 25 is flush with the upper end of the lower support plate 23, so that the stamping tool 15 and the guide tube 25 punch the polished leather.

[0046] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A honeycomb CMP polishing skin hole opening device, characterized in that: The invention comprises a fixed seat (1), a bracket (2) is fixedly connected to the fixed seat (1), a hydraulic rod (3) is fixedly connected to the bracket (2), an upper punching mechanism (4) is fixedly connected to the output end of the hydraulic rod (3), a mounting seat (5) is fixedly connected to a position of the fixed seat (1) below the upper punching mechanism (4), a placement groove (6) is provided on the mounting seat (5), a lower punching mechanism (7) is provided in the placement groove (6), at least three sliding grooves (8) are provided in an array at a position close to the lower punching mechanism (7) on the mounting seat (5), a fixing mechanism (9) for fixing the polishing leather is slidably connected in the sliding groove (8), and the upper punching mechanism (4) comprises an upper fixedly connected to the output end of the hydraulic rod (3); A support plate (10), wherein a plurality of annular grooves (11) are arranged in an array on the upper support plate (10), each of the annular grooves (11) is slidably connected to a sliding plate (12), the sliding plate (12) is fixedly connected to a fixing frame (13), one end of the sliding plate (12) is fixedly connected to a first spring (14), the other end of the first spring (14) is fixedly connected to the inner wall of the annular groove (11), a punching tool (15) is fixedly connected to the center position of the annular groove (11), the punching tool (15) extends outside the annular groove (11), and the lower punching mechanism (7) comprises a lower support plate (23) slidably connected to the placement groove (6), the lower support plate (23) is provided with a position corresponding to the punching tool (15) A guide tube (25) is slidably connected to the through hole (24) corresponding to the through hole (24); a third spring (26) is fixedly connected between the lower support plate (23) and the mounting seat (5); a collecting groove (27) is provided at a position of the mounting seat (5) below the placement groove (6); one side of the collecting groove (27) passes through the mounting seat (5) and is connected to the outside; the guide tube (25) extends into the collecting groove (27) and is slidably connected to the mounting seat (5); a slide plate (28) is slidably connected to the collecting groove (27); a mounting groove (29) is provided at a position of the mounting seat (5) below the collecting groove (27); a sliding rod (30) is slidably connected to the mounting groove (29); the sliding rod (30) ) is hingedly connected to an end of the sliding plate (28) with a push rod (31), and an end of the push rod (31) away from the sliding rod (30) is hingedly connected to the sliding plate (28). An end of the sliding rod (30) away from the push rod (31) is fixedly connected to a conical block (32), and a fourth spring (33) is fixedly connected between the conical block (32) and the inner wall of the mounting groove (29). A second push rod (34) is abutted against the conical block (32), and the second push rod (34) passes through the mounting groove (29) and extends into the sliding groove (8). The second push rod (34) is fixedly connected to the first push rod (19), and the position where the collecting groove (27) is connected to the outside is slidably connected to a closing component (35) for closing the collecting groove (27).

2. A honeycomb CMP polishing skin hole opening device according to claim 1, characterized in that: The fixing mechanism (9) comprises a fixing block (16) slidably connected to the sliding groove (8); a first connecting rod (17) and a second connecting rod (18) are hingedly connected to one side of the fixing block (16); the first connecting rod (17) and the second connecting rod (18) are cross-arranged; a first pushing rod (19) is slidably connected to the side of the sliding groove (8) away from the fixing block (16); a first sliding groove (20) is provided on the first pushing rod (19) at a position close to the first connecting rod (17); an abutting rod (21) is slidably connected to the first sliding groove (20); the abutting rod (21) is hingedly connected to the first connecting rod (17); a second spring (22) is fixedly connected between the abutting rod (21) and the inner wall of the first sliding groove (20).

3. A honeycomb CMP polishing skin hole opening device according to claim 2, characterized in that: The closing assembly (35) comprises a fixed rod (36) fixedly connected to the sliding groove (8) near the first push rod (19); a rotating disk (37) is rotatably connected to the fixed rod (36) at a position near the first push rod (19); a first rotating rod (38) is fixedly connected to the rotating disk (37) at a position near the first push rod (19); a second rotating rod (39) is fixedly connected to the rotating disk (37) at a position near the valley bottom rod; a limiting groove (40) is provided at the position of the second push rod (34) and the second rotating rod (39); the second rotating rod (39) is fixedly connected to the valley bottom rod (19); a limiting groove (40) is provided at the position of the second push rod (34) and the second rotating rod (39); In the limiting groove (40), one end of the second push rod (34) extending into the collecting groove (27) is fixedly connected to a closing plate (41), the first rotating rod (38) is abutted against a push plate (42), one side of the push plate (42) is fixedly connected to a connecting rod (43), the inner wall of the sliding groove (8) close to the connecting rod (43) is fixedly connected to a first inclined plate (44), the inner wall of the sliding groove (8) close to a position below the rotating disk (37) is fixedly connected to a second inclined plate (45), and the connecting rod (43) is abutted against the first inclined plate (44) and the second inclined plate (45).

4. A honeycomb CMP polishing skin hole opening device according to claim 3, characterized in that: The pushing plate (42) is slidably connected to the first pushing rod (19).

5. The honeycomb CMP polishing skin hole opening device according to claim 3, characterized in that: A telescopic plate (46) is fixedly connected to a side of the slide plate (28) close to the collecting tank (27) and connected to the outside, and the other end of the telescopic plate (46) is fixedly connected to the inner wall of the collecting tank (27).

6. A honeycomb CMP polishing skin hole opening device according to claim 3, characterized in that: The width of the slide plate (28) gradually decreases towards the side of the collecting groove (27) that is connected to the outside.

7. A honeycomb CMP polishing skin hole opening device according to claim 3, characterized in that: The collecting tank (27) and the placement tank (6) are connected via a communication port (47), and the communication port (47) is arranged at a position of the mounting seat (5) away from the collecting tank (27) and connected to the outside.

8. The honeycomb CMP polishing skin hole opening device according to claim 1, characterized in that: One end of the guide tube (25) away from the lower support plate (23) is fixedly connected to the mounting seat (5), and the guide tube (25) is in communication with the collecting tank (27).

Images