Cascaded X-ray light source system and small-angle X-ray scattering measurement device

Abstract

The invention discloses a cascade type X-ray light source system and a small-angle X-ray scattering measuring device, the cascade type X-ray light source system comprises a plurality of light source modules emitting X-rays, X-ray light paths emitted by the plurality of light source modules are coaxial, each light source module comprises an X-ray optical device, the X-ray optical device is arranged on the axis where the X-ray light path is located, and the X-ray optical device is arranged on the axis where the X-ray light path is located. The X-ray optical devices are configured to focus and monochromatize the X-rays emitted by the corresponding light source modules, and the X-rays focused by all the X-ray optical devices coincide at the target focus to form high-brightness X-rays. According to the invention, the brightness of the emitted X-rays is higher through the plurality of cascaded light source modules, so that the measurement efficiency is improved.

Description

Technical Field

[0001] The present application relates to the technical field of critical dimension measurement of nano gratings or nano field effect tubes, and in particular to a cascade X-ray light source system and a small-angle X-ray scattering measurement device. Background Art

[0002] With the advancement of microelectronics technology, memory chips have developed from 2D to 3D, and the structure of chips has become more and more complex. The factors affecting the performance and yield of memory devices have become more complex, and the accurate measurement of high aspect ratio (HAR) structures has become increasingly important. Traditional measurement technologies such as optical critical dimension measurement (OCD) are limited by the long wavelength of visible light, and their measurement accuracy for HAR structures is limited, especially in the middle and bottom areas of the stack structure; critical dimension scanning electron microscope (CD-SEM) and transmission electron microscope (TEM) have high measurement accuracy, but as surface analysis technologies, they need to be combined with focused ion beam (FIB) destructive testing to obtain deep structural information. This makes it difficult for semiconductor factories to quickly and accurately measure HAR structures and improve processes, thereby increasing costs and process complexity, and leading to delays in technology iteration cycles.

[0003] The critical dimension small angle X-ray scattering device (CD-SAXS device) usually uses X-rays with a wavelength less than 0.1nm as an excitation source. When X-rays are irradiated to the sample to be tested, scattering occurs within a small angle range. The intensity of the X-rays scattered from the sample at different angles is analyzed by rotating the angle between the sample and the light beam, and the scattered signal is reversely solved using a model method to obtain information about the three-dimensional geometric structure of the sample in the nanoscale range (1 to 100nm), such as critical dimensions, inclination angles, overlay errors, etc. The X-ray small angle scattering technology has the characteristics of non-contact, non-destructive, and statistical averaging. Unlike optical scattering technology, the scattering signal intensity of the small angle X-ray scattering instrument increases with the increase in the number of 3D structure layers, and is expected to play an increasingly important role in the measurement of structures such as HAR in the future.

[0004] However, due to the constraints of physical principles, the scattering interface of matter for X-rays is very small, and the scattering signal of SAXS is weak, which leads to low measurement efficiency of CD-SAXS device. In the process of X-ray generation, the electrons escaping from the cathode are accelerated by the high-voltage electric field and focused by the electron optical system (such as electromagnetic lens, electrostatic lens, etc.) before bombarding the surface of the anode target. About 1% of the electron energy is converted into X-rays (mainly bremsstrahlung and characteristic radiation), of which the useful characteristic X-ray energy accounts for an even lower proportion, and more than 99% of the energy is released in the form of heat. The continuous bombardment of the metal target by the high-power electron beam will cause the temperature of the target surface to rise sharply, resulting in ablation or melting of the target surface, which in turn causes damage to the anode target, limiting the further improvement of the brightness of the X-ray source. Therefore, how to improve the brightness of X-rays has become an urgent problem to be solved in order to improve the measurement efficiency of the CD-SAXS device. Summary of the invention

[0005] In view of this, the present application provides a cascade X-ray light source system and a small-angle X-ray scattering measurement device to solve the problem of low brightness of existing X-ray sources, and solve the problem of low measurement efficiency of existing small-angle X-ray scattering measurement devices by improving the brightness of X-ray sources.

[0006] In order to solve the above technical problems, a technical solution adopted in the present application is: to provide a cascade X-ray light source system, which includes: multiple light source modules that emit X-rays, the X-ray light paths emitted by the multiple light source modules are coaxial, each light source module includes an X-ray optical device, the X-ray optical device is arranged on the axis where the X-ray light path is located, the X-ray optical device is configured to focus and monochromatize the X-rays emitted by the corresponding light source module, and the X-rays focused by all X-ray optical devices overlap at the target focus to form high-brightness X-rays.

[0007] As a further improvement of the present application, the light source module also includes an anode and an electron gun, the anode is arranged on the axis of the X-ray optical path, the electron gun is configured to emit an electron stream to the anode, the electron stream bombards the anode to generate X-rays emitted in multiple directions, and the X-ray optical device is configured to focus and monochromatize the X-rays emitted in multiple directions, and focus the obtained X-rays to the target focus.

[0008] As a further improvement of the present application, the anode includes a liquid metal pumping system, a nozzle, a liquid metal circulation system and a liquid metal anode. The liquid metal anode is arranged on the axis of the X-ray optical path. The liquid metal pumping system is connected to the nozzle. The liquid metal pumping system is configured to generate high-pressure liquid metal, which is sprayed through the nozzle to form a liquid metal anode. The liquid metal circulation system is configured to recover and recycle the liquid metal anode.

[0009] As a further improvement of the present application, the light source module further includes a first displacement platform, the nozzle is disposed on the first displacement platform, and the first displacement platform is configured to drive the nozzle to move.

[0010] As a further improvement of the present application, the diameter of the liquid metal anode is configured to be on the order of hundreds of microns.

[0011] As a further improvement of the present application, the light source module further includes a second translation platform, the X-ray optical device is disposed on the second translation platform, and the second translation platform is configured to drive the X-ray optical device to move.

[0012] As a further improvement of the present application, the X-ray optical device includes one of an ellipsoidal optical device or a parabolic optical device.

[0013] As a further improvement of the present application, the light source system further includes a vacuum chamber, and all the light source modules are arranged in the vacuum chamber.

[0014] In order to solve the above technical problems, another technical solution adopted by the present application is: to provide a small-angle X-ray scattering measurement device, which includes one of the above-mentioned cascade X-ray light source systems, a third translation stage and a detection system; the X-ray light path emitted by the cascade X-ray light source system is coaxial and focused at the target intersection to form high-brightness X-rays; the third translation stage is arranged on the axis where the X-ray light path is located, and is configured to support the sample, and adjust the spatial position of the sample and / or the angle between the sample and the X-ray light path, and the sample is irradiated by high-brightness X-rays to generate a scattering signal; the detection system is arranged on the axis where the X-ray light path is located, and is configured to collect the scattering signal.

[0015] As a further improvement of the present application, it also includes a first vacuum tube, a second vacuum tube and a beam collimation system, the first vacuum tube is arranged between the light source system and the third displacement stage, and the X-ray optical path passes through the first vacuum tube, the second vacuum tube is arranged between the third displacement stage and the detection system, and the scattered signal passes through the second vacuum tube to irradiate the detection system, the beam collimation system is arranged between the light source system and the third displacement stage, and the X-ray optical path passes through the beam collimation system.

[0016] The beneficial effect of the present application is that the cascaded X-ray light source system of the present application arranges multiple light source modules in sequence along the axis of the X-ray optical path, and then focuses the X-rays generated by each light source module at the same focal point through the X-ray optical device arranged in each light source module, thereby performing near-linear superposition of the X-rays emitted by the multiple light source modules to obtain high-brightness X-rays, which greatly improves the brightness of the X-rays finally output by the light source system, so that the intensity of the scattered signal formed by the cascaded X-ray light source system irradiating the sample is higher, thereby improving the measurement efficiency of the small-angle X-ray scattering measurement device using the cascaded X-ray light source system. In addition, the multiple cascaded light source modules all use liquid metal anodes, and the target material of the liquid metal anode is liquid, so there is no problem of solid anodes being liquefied by electron beam bombardment, and the liquid metal anode itself has no water cooling structure, and the size of the liquid metal anode is on the order of hundreds of microns, and the structure is more compact, so that the loss of X-rays when passing through is smaller, ensuring that the brightness of the X-rays finally emitted is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic structural diagram of a cascade X-ray light source system according to an embodiment of the present invention;

[0018] Figure 2 is a schematic structural diagram of an example of a cascade X-ray light source system according to an embodiment of the present invention;

[0019] Figure 3 is a schematic diagram of the focusing principle of an ellipsoidal optical device of an example of a cascade X-ray light source system according to an embodiment of the present invention;

[0020] Figure 4 is a structural schematic diagram of a light source module of a cascade X-ray light source system according to an embodiment of the present invention;

[0021] Figure 5 Schematic diagram of the structure of a small-angle X-ray scattering measurement device according to an embodiment of the present invention. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0023] The terms "first", "second", "third" in this application are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Thus, the features defined as "first", "second", "third" can expressly or implicitly include at least one of the features. In the description of this application, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined. In the embodiments of this application, all directional indications (such as up, down, left, right, front, back ...) are only used to explain the relative spatial position, movement, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication also changes accordingly. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device comprising a series of steps or units is not limited to the steps or units listed, but optionally also includes steps or units that are not listed, or optionally also includes other steps or units inherent to these processes, methods, products or devices.

[0024] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0025] Figure 1 Schematic diagram of the structure of the cascade X-ray light source system according to an embodiment of the present invention. Figure 1As shown, the cascade X-ray light source system includes: a plurality of light source modules 11 emitting X-rays, and the X-ray optical paths emitted by the plurality of light source modules 11 are coaxial, wherein the X-ray optical path refers to the optical path formed by the X-rays emitted by each light source module 11, and the X-ray optical paths emitted by the plurality of light source modules 11 are coaxial, that is, the X-rays emitted by the plurality of light source modules 11 overlap to form an X-ray optical path. It should be noted that the number of the light source modules 11 can be preset according to the requirements, and the present embodiment does not limit the number of the light source modules 11, for example, two or three light source modules 11 are arranged in sequence on the axis where the X-ray optical path is located. Each light source module 11 includes an X-ray optical device 111, and the X-ray optical device 111 is arranged on the axis where the X-ray optical path is located, and the X-ray optical device 111 is configured to focus and monochromatize the X-rays emitted by the corresponding light source module 11, and the X-rays focused by all the X-ray optical devices 111 overlap at the target focus to form high-brightness X-rays. It can be understood that in order to enhance the brightness of the X-rays ultimately output by the light source system 1, the present embodiment forms a plurality of X-rays by cascading a plurality of light source modules 11, and then superimposes and focuses the plurality of X-rays on a target focal point to form high-brightness X-rays. Therefore, each light source module 11 does not need to increase the power of the electron beam, and high-brightness X-rays can be obtained without ablating or melting the anode target.

[0026] Specifically, for ease of understanding, this embodiment is described by taking the light source system including two light source modules 11 as an example. Figure 2 , the light source system 1 includes a first light source module 11A and a second light source module 11B, the first light source module 11A and the second light source module 11B are sequentially arranged on the axis where the X-ray optical path is located, the first X-ray optical device 111A collects the X-rays generated by the first light source module 11A, and the second X-ray optical device 111B collects the X-rays generated by the second light source module 11B. The positions of the first light source module 11A and the second light source module 11B are adjusted so that the X-rays focused by the first X-ray optical device 111A and the X-rays focused by the second X-ray optical device 111B overlap at the focal point B. Specifically, assuming that the first X-ray optical device 111A and the second X-ray optical device 111B are both ellipsoidal monochromators, in order to enable both to focus on the target focal point B, please refer to Figure 3 , the focal length f1 of the first X-ray optical device 111A should be greater than the focal length f2 of the second X-ray optical device 111B, and then the spatial position between the first X-ray optical device 111A and the second X-ray optical device 111B is adjusted so that the focal points of the first X-ray optical device 111A and the second X-ray optical device 111B coincide with each other, and the coincident focus is the target focus.

[0027] The cascade X-ray light source system of this embodiment arranges multiple light source modules 11 in sequence along the axis of the X-ray optical path, and then focuses the X-rays generated by each light source module 11 at the same focal point through the X-ray optical device 111 arranged in each light source module 11, thereby performing nearly linear superposition of the X-rays emitted by the multiple light source modules 11 to obtain high-brightness X-rays, which greatly improves the brightness of the X-rays ultimately output by the light source system 1, thereby making the intensity of the scattered signal formed by the cascade X-ray light source system irradiating the sample higher, thereby improving the ultimate measurement efficiency of the small-angle X-ray scattering measurement device using the cascade X-ray light source system.

[0028] Further, based on the above embodiments, in other embodiments, please refer to Figure 4 The light source module 11 also includes an anode 12 and an electron gun 13. The anode 12 is arranged on the axis of the X-ray optical path. The electron gun 13 is configured to emit an electron flow to the anode 12. The electron flow bombards the anode 12 to generate X-rays emitted in multiple directions. The X-ray optical device 111 is configured to focus and monochromatize the X-rays emitted in multiple directions, and focus the obtained X-rays to the target focus.

[0029] Specifically, in this embodiment, the electron gun 13 is used to generate an electron beam, and the electron beam is accelerated, focused, deflected, and finally guided to the anode 12 through the electron optical system built into the electron gun 13. The electron beam bombards the surface of the anode 12, and generates X-rays emitted in all directions through bremsstrahlung and characteristic radiation. The X-ray optical device 111 and the anode 12 are located on the axis of the X-ray optical path, and are used to collect and monochromatize the X-rays, and then focus the processed X-rays to the target focus.

[0030] Furthermore, in order to further simplify the equipment and improve the measurement efficiency, based on the above embodiments, in other embodiments, please refer to Figure 4 The anode 12 includes a liquid metal pumping system 121, a nozzle 122, a liquid metal circulation system 123 and a liquid metal anode 124. The liquid metal anode 124 is arranged on the axis of the X-ray optical path. The liquid metal pumping system 121 is connected to the nozzle 122. The liquid metal pumping system 121 is configured to generate high-pressure liquid metal, which is sprayed through the nozzle 122 to form the liquid metal anode 124. The liquid metal circulation system 123 is configured to recover and recycle the liquid metal anode 124.

[0031] Specifically, the liquid metal material is in a liquid state, and will not liquefy under the cyclic thermal stress caused by the periodic bombardment of the electron beam. The surface of the liquid metal material is effectively self-repairing, which is a significant advantage over the solid anode 12 material. By eliminating the problem of surface liquefaction, the overall power load on the liquid metal anode 124 material can be increased, so the power of the electron beam can be increased to produce brighter X-rays. Moreover, the liquid metal anode 124 itself does not require a water cooling structure, so that the overall radiation measurement equipment is more streamlined.

[0032] Furthermore, the light source module 11 further includes a first displacement stage 14 , and the nozzle 122 is disposed on the first displacement stage 14 . The first displacement stage 14 is configured to drive the nozzle 122 to move.

[0033] Specifically, the first displacement stage 14 is used to drive the nozzle 122 to move so as to adjust the position of the nozzle 122 to achieve focusing of the electron gun 13 and the liquid metal anode 124 .

[0034] Furthermore, the diameter of the liquid metal anode 124 is configured to be on the order of hundreds of microns.

[0035] Specifically, the diameter of the liquid metal anode 124 is configured to be on the order of hundreds of microns, and the diameter of the liquid metal anode 124 can also be adjusted by adjusting the outlet size of the nozzle 122 .

[0036] It should be noted that, since multiple light source modules 11 are on the same axis, part of the X-ray beam generated by the light source module 11 that is farther from the target focus will inevitably pass through the liquid metal anode 124 of the light source module 11 that is closer to the target focus before reaching the target focus. However, it is understandable that the X-rays generated by the light source module 11 form a circular spot after being focused by the X-ray optical device 111, and its diameter is much larger than the order of hundreds of microns. The amount of X-rays passing through the liquid metal anode 124 is small, so the amount of X-rays absorbed and attenuated is small. Most of the X-rays do not pass through the liquid metal anode 124 but are directly focused on the target focus. Therefore, the light intensity attenuation of the X-rays caused by the cascade is very limited, and the brightness of the spot at the target focus can be regarded as a nearly linear superposition of the X-rays generated by all light source modules 11.

[0037] For further information, see Figure 4 The light source module 11 further includes a second translation stage 15 , on which the X-ray optical device 111 is disposed. The second translation stage 15 is configured to drive the X-ray optical device 111 to move.

[0038] Specifically, the second translation stage 15 is used to drive the X-ray optical device 111 to move, thereby adjusting the light collection efficiency of the X-ray optical device 111 and adjusting the distance between the X-ray optical device 111 and the anode 12 to maximize the light collection efficiency of the X-ray optical device 111.

[0039] Further, the X-ray optical device 111 includes an ellipsoidal optical device or a parabolic optical device, which is not limited in this embodiment.

[0040] Furthermore, the light source system further includes a vacuum chamber 16 , and all the light source modules 11 are disposed in the vacuum chamber 16 .

[0041] Specifically, by providing the vacuum chamber 16 , it is possible to prevent the atmosphere from attenuating and interfering with the X-rays generated by the light source module 11 .

[0042] Figure 5 Schematic diagram of the structure of a small-angle X-ray scattering measurement device according to an embodiment of the present invention. Figure 5 As shown, the cascade X-ray light source system comprises: the cascade X-ray light source system 1 described in one of the above embodiments, a third translation stage 2 and a detection system 3.

[0043] Among them, the light source system 1 includes a plurality of light source modules 11 that emit X-rays, and the X-ray optical paths emitted by the plurality of light source modules 11 are coaxial, wherein the X-ray optical path refers to the optical path formed by the X-rays emitted by each light source module 11, and the X-ray optical paths emitted by the plurality of light source modules 11 are coaxial, that is, the X-rays emitted by the plurality of light source modules 11 overlap to form an X-ray optical path. It should be noted that the number of the light source modules 11 can be preset according to the needs, and the present embodiment does not limit the number of the light source modules 11, for example, two or three light source modules 11 are arranged in sequence on the axis where the X-ray optical path is located. Each light source module 11 includes an X-ray optical device 111, and the X-ray optical device 111 is arranged on the axis where the X-ray optical path is located, and the X-ray optical device 111 is configured to focus and monochromatize the X-rays emitted by the corresponding light source module 11, and the X-rays focused by all the X-ray optical devices 111 overlap at the target focus to form high-brightness X-rays. It can be understood that in order to enhance the brightness of the X-rays ultimately output by the light source system 1, this embodiment forms a plurality of X-rays by cascading a plurality of light source modules 11, and then superimposes the plurality of X-rays to form high-brightness X-rays. Therefore, each light source module 11 does not need to increase the power of the electron beam, and high-brightness X-rays can be obtained without ablating or melting the anode 12 target.

[0044] The third translation stage 2 is disposed on the axis of the X-ray optical path, and is configured to support the sample 7 and adjust the spatial position of the sample 7 and / or the angle between the sample 7 and the X-ray optical path. The sample 7 is irradiated by high-brightness X-rays to generate a scattered signal. Specifically, the third translation stage 2 adjusts the spatial position of the sample 7 to the target focus.

[0045] The detection system 3 is disposed on the axis of the X-ray optical path, and is configured to collect scattered signals, process and analyze the scattered signals, and obtain the measurement results of the sample 7.

[0046] The small-angle X-ray scattering measurement device of this embodiment arranges multiple light source modules 11 in sequence along the axis where the X-ray optical path is located, and then focuses the X-rays generated by each light source module 11 at the same focal point through the X-ray optical device 111 arranged in each light source module 11, so as to perform nearly linear superposition of the X-rays emitted by the multiple light source modules 11 to obtain high-brightness X-rays, and then use the high-brightness X-rays to irradiate the sample 7 to form a scattering signal, which is detected and analyzed by the detection system 3, which greatly improves the brightness of the X-rays finally output by the light source system 1, thereby making the intensity of the scattering signal formed by irradiating the sample 7 higher, thereby improving the final measurement efficiency of the small-angle X-ray scattering measurement device.

[0047] Furthermore, the small-angle X-ray scattering measurement device also includes a first vacuum tube 4 and a second vacuum tube 5. The first vacuum tube 4 is arranged between the light source system 1 and the third translation stage 2, and the X-ray optical path passes through the first vacuum tube 4. The second vacuum tube 5 is arranged between the third translation stage 2 and the detection system 3, and the scattering signal passes through the second vacuum tube 5 to irradiate the detection system 3.

[0048] Specifically, the first vacuum tube 4 is used to reduce the attenuation and interference of the atmosphere on the propagation path to the X-rays, and the second vacuum tube 5 is used to reduce the attenuation and interference of the atmosphere on the propagation path to the scattered signals.

[0049] Furthermore, the small-angle X-ray scattering measurement device further includes a beam collimation system 6 , which is disposed between the light source system 1 and the third translation stage 2 , and the X-ray optical path passes through the beam collimation system 6 .

[0050] Specifically, the beam collimation system 6 is used to control the spot size of the X-rays from the X-ray optical device 111 .

[0051] The above are only implementation methods of the present application, and are not intended to limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A cascade X-ray light source system, characterized in that: It includes: A plurality of light source modules emitting X-rays, wherein the X-ray optical paths emitted by the plurality of light source modules are coaxial, each light source module comprises an X-ray optical device, and the X-ray optical device is arranged on the axis where the X-ray optical path is located, and the X-ray optical device is configured to focus and monochromatize the X-rays emitted by the corresponding light source module, and the X-rays focused by all the X-ray optical devices overlap at a target focus to form high-brightness X-rays.

2. The cascade X-ray light source system according to claim 1, characterized in that: The light source module also includes an anode and an electron gun, wherein the anode is arranged on the axis of the X-ray optical path, and the electron gun is configured to emit an electron flow to the anode, and the electron flow bombards the anode to generate X-rays emitted in multiple directions, and the X-ray optical device is configured to focus and monochromatize the X-rays emitted in multiple directions, and focus the obtained X-rays to the target focus.

3. The cascade X-ray light source system according to claim 2, characterized in that: The anode includes a liquid metal pumping system, a nozzle, a liquid metal circulation system and a liquid metal anode. The liquid metal anode is arranged on the axis of the X-ray optical path. The liquid metal pumping system is connected to the nozzle. The liquid metal pumping system is configured to generate high-pressure liquid metal, which is sprayed through the nozzle to form the liquid metal anode. The liquid metal circulation system is configured to recover and recycle the liquid metal anode.

4. The cascade X-ray light source system according to claim 2, characterized in that: The light source module further includes a first displacement platform, the nozzle is disposed on the first displacement platform, and the first displacement platform is configured to drive the nozzle to move.

5. The cascade X-ray light source system according to claim 3, characterized in that: The diameter of the liquid metal anode is configured to be on the order of hundreds of microns.

6. The cascade X-ray light source system according to claim 1, characterized in that: The light source module further includes a second translation stage, the X-ray optical device is disposed on the second translation stage, and the second translation stage is configured to drive the X-ray optical device to move.

7. The cascade X-ray light source system according to claim 1, characterized in that: The X-ray optics include one of ellipsoidal optics or parabolic optics.

8. The cascade X-ray light source system according to claim 1, characterized in that: The light source system further comprises a vacuum chamber, and all the light source modules are arranged in the vacuum chamber.

9. A small-angle X-ray scattering measurement device, characterized in that: It comprises the cascade X-ray light source system, the third translation stage and the detection system as claimed in any one of claims 1 to 8; The X-ray light paths emitted by the cascade X-ray light source system are coaxial and focused at the target intersection, forming high-brightness X-rays; The third translation stage is disposed on the axis of the X-ray optical path, and is configured to support a sample and adjust a spatial position of the sample and / or an angle between the sample and the X-ray optical path. The sample is irradiated by the high-brightness X-ray to generate a scattering signal. The detection system is disposed on the axis of the X-ray optical path and is configured to collect the scattered signal.

10. The small-angle X-ray scattering measurement device according to claim 9, characterized in that: It also includes a first vacuum tube, a second vacuum tube and a beam collimation system, the first vacuum tube is arranged between the light source system and the third translation stage, and the X-ray optical path passes through the first vacuum tube, the second vacuum tube is arranged between the third translation stage and the detection system, and the scattered signal passes through the second vacuum tube to irradiate the detection system, and the beam collimation system is arranged between the light source system and the third translation stage, and the X-ray optical path passes through the beam collimation system.

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