A component configuration detection device and a gallium nitride production furnace accessories detection system

Abstract

The present invention relates to the field of component configuration detection, and specifically to a component configuration detection device and a gallium nitride production furnace accessory detection system. The component configuration detection device includes: a detection column, a detection needle, a support mechanism, a pressure detection mechanism, a displacement detection mechanism and a controller. The detection column has a guide cavity. A sliding part is slidably matched in the guide cavity, and an elastic part is abutted between the inner end wall of the guide cavity and the sliding part. The detection needle is fixedly connected to the sliding part. The support mechanism is arranged on the first end wall. The pressure detection mechanism detects the load of the support mechanism. The displacement detection mechanism is used to detect the extension length of the detection needle. The controller determines the turning angle of the component to be detected according to the extension length of the detection needle. It can effectively detect the structural regularity of components with corners and inner side surfaces of the corners, and the detection efficiency is higher. It is also applicable to the case where the angle between the inner side surfaces on both sides of the corner is small.

Description

Technical Field

[0001] The present invention relates to the field of component configuration detection, and in particular to a component configuration detection device and an accessories detection system in a gallium nitride production furnace. Background Art

[0002] In industrial production activities, it is necessary to regularly inspect the accessories and components of the equipment to ensure that the corresponding accessories and components meet the corresponding usage requirements.

[0003] Generally, for flat, columnar, and block-shaped accessories and components, the difficulty of inspection is relatively low and the inspection is easy to carry out. However, for accessories and components with corner structures (including but not limited to: V-shaped parts), if the corner has an inner side surface (for V-shaped parts, it refers to the inner side surface of its V-shaped corner), the inspection difficulty of the inner side surface (especially the part of the inner side surface near the corner) and the corner will increase significantly. If the angle between the inner side surfaces on both sides of the corner is smaller, the space between the inner side surfaces on both sides will be smaller, and the inspection difficulty will be further increased.

[0004] In view of this, this application is hereby filed. Summary of the invention

[0005] The first object of the present invention is to provide a component configuration detection device, which can effectively detect the structural regularity of a component having a corner and an inner side surface of the corner, with higher detection efficiency, and is also applicable to the situation where the angle between the inner side surfaces on both sides of the corner is small.

[0006] The second object of the present invention is to provide a gallium nitride production furnace accessories detection system, which can effectively detect the structural regularity of components with corners and inner side surfaces, with higher detection efficiency, and is also applicable to situations where the angle between the inner side surfaces on both sides of the corner is small.

[0007] The embodiment of the present invention is achieved as follows: A component configuration detection device comprises: a detection column, a detection needle, a supporting mechanism, a pressure detection mechanism, a displacement detection mechanism and a controller.

[0008] The two end walls of the detection column are respectively recorded as the first end wall and the second end wall. The detection column has a guide inner cavity arranged along its axial direction, and the inner end wall of the guide inner cavity close to the first end wall is provided with a matching through hole penetrating to the first end wall, and the matching through hole is arranged along the axial direction of the detection column.

[0009] A sliding piece is slidably matched in the guide inner cavity, and an elastic piece is abutted between the inner end wall of the guide inner cavity away from the first end wall and the sliding piece. The detection needle is slidably matched in the matching through hole, and the detection needle is arranged along the axial direction of the detection column and fixedly connected to the sliding piece.

[0010] The supporting mechanism is arranged on the first end wall, and the supporting mechanisms are arranged on opposite sides of the detection needle. The detection needle is located at the middle position of the gap between the supporting mechanisms on the two sides.

[0011] The pressure detection mechanism is installed between the support mechanism and the detection column to detect the load borne by the support mechanism. The displacement detection mechanism is used to detect the extension length of the detection needle. The pressure detection mechanism and the displacement detection mechanism are both electrically connected to the controller.

[0012] During the test, the tip of the detection needle is used to abut against the corner of the component to be tested, and the support mechanisms on both sides are used to abut against the two sides of the corner respectively. When the pressure detection mechanism detects that the loads of the support mechanisms on both sides are the same, the controller determines that it is in the detection position state, and the controller determines the corner angle of the component to be tested based on the extended length of the detection needle.

[0013] Furthermore, the supporting mechanism is a rolling mechanism. The component configuration detection device also includes: a moving mechanism.

[0014] When the controller determines that it is in the detection position state, the moving mechanism is used to move the detection column along the length direction of the corner of the component to be detected. When the pressure detection mechanism detects that the load borne by the supporting mechanism has changed, the controller marks the position of the supporting mechanism when the load changes as a defective position, and / or when the displacement detection mechanism detects that the extended length of the detection needle has changed, the controller marks the position of the tip of the detection needle when the extended length changes as a defective position.

[0015] Furthermore, the supporting mechanism includes: a rolling ball and a protective cover. A receiving groove is provided at the edge of the first end wall, and a mounting groove is provided at a groove wall on one side of the receiving groove close to the second end wall, and the pressure detection mechanism is installed in the mounting groove.

[0016] The protective cover is arranged in the containing groove and is fixedly connected to the pressure detection surface of the pressure detection mechanism, and there is a gap between the protective cover and the groove wall of the containing groove.

[0017] The inner side wall of the protective cover is in the shape of a spherical surface. The diameter of the spherical surface corresponding to the inner side wall of the protective cover is matched with the diameter of the rolling ball. The rolling ball can be universally rotatably matched in the protective cover.

[0018] Furthermore, a sliding seal is formed between the sliding member and the inner wall of the guide cavity.

[0019] The detection column also has a conductive inner cavity arranged along its axial direction, the conductive inner cavity is arranged at intervals from the guide inner cavity, and at least one accommodating groove is communicated with the conductive inner cavity.

[0020] The component configuration detection device also includes: a matching seat, an adjusting column, a first tube body, a second tube body and a third tube body.

[0021] The rolling ball has a first magnetic module, which is fixedly matched with the rolling ball. The matching seat is fitted with the outer wall of the protective cover, and the matching seat has a second magnetic module, which is rotatably matched with the matching seat.

[0022] The adjusting column is fixedly connected to the matching seat, and the adjusting column has a conveying inner cavity. The second magnetic module is fixedly connected to a transmission shaft, and the transmission shaft extends into the conveying inner cavity. The transmission shaft is fixedly connected to a booster blade, and the booster blade is located in the conveying inner cavity.

[0023] The first tube body and the second tube body are both fixedly connected to the adjustment column and communicated with the delivery inner cavity, and the third tube body is located at the end of the guide inner cavity away from the first end wall and connects the guide inner cavity with the conduction inner cavity. The end of the first tube body away from the adjustment column is connected to the external atmosphere, and the second tube body and the third tube body are connected by a connecting pipe.

[0024] The first magnetic module and the second magnetic module are magnetically coupled so that when the moving mechanism moves the detection column along the corner length direction of the component to be detected, the first magnetic module can drive the second magnetic module to rotate, so that the booster fan blade can transport the gas in the first tube body to the second tube body.

[0025] Furthermore, the outer wall of the protective cover is also spherical, and the fitting seat has a fitting surface for fitting with the outer wall of the protective cover, and the fitting surface is adapted to the outer wall of the protective cover so that the fitting seat can move along the outer wall of the protective cover.

[0026] The component configuration detection device also includes: a position adjustment mechanism. The position adjustment mechanism cooperates with the matching seat to drive the matching seat to move along the outer side wall of the protective cover to adjust the position of the matching seat at the protective cover.

[0027] The controller is also used to determine the contact point of the rolling ball according to the turning angle and the extension length of the detection needle. The contact point is the point on the rolling ball that contacts the corresponding side surface when the rolling ball abuts against the side surface of the component to be detected.

[0028] The controller is also used to perform a calibration process, which includes: taking the line between the contact point and the center of the rolling ball as the first reference line, establishing a second reference line extending along the length direction of the corner of the component to be detected, and taking the plane where the first reference line and the second reference line are located as the reference surface. Keeping the angle of the reference surface unchanged, the position of the matching seat relative to the protective cover is adjusted by the position adjustment mechanism so that the rotation axis of the second magnetic module is perpendicular to the reference surface.

[0029] Furthermore, the first end wall has a protruding portion, and the conductive inner cavity extends to the protruding portion to provide a space for the matching seat to move along the protective cover.

[0030] Furthermore, the moving mechanism is also used to control the detection column to approach and move away from the component to be detected, so as to adjust the detection column to a detection position state.

[0031] A gallium nitride production furnace accessories detection system comprises: the above-mentioned component configuration detection device.

[0032] The beneficial effects of the technical solution of the embodiment of the present invention include: During use of the component configuration detection device provided by the embodiment of the present invention, when the support mechanisms on both sides are respectively in contact with the two side surfaces of the corner, a stable structure is formed. At this time, a corresponding geometric relationship is formed between the position point where the tip of the detection needle is located and the position point where the support mechanisms on both sides fit the side surfaces of the component to be detected. In this state, since the spacing between the support mechanisms on both sides is constant, the extension length of the detection needle is only related to the angle of the corner of the component to be detected. Therefore, the extension length of the detection needle in the above state can be used to determine the angle of the corner of the component to be detected. If the angle of the corner of the component to be detected determined by the extension length of the detection needle is different from the design angle of the corner of the component to be detected, it means that the component to be detected has been deformed.

[0033] Through this design, the component to be inspected can be inspected efficiently and intuitively, helping to determine whether there is deformation at the corner position of the component to be inspected.

[0034] In general, the component configuration detection device provided in the embodiment of the present invention can effectively detect the structural regularity of components having corners and inner side surfaces, with higher detection efficiency, and is also applicable to situations where the angle between the inner side surfaces on both sides of the corner is small.

[0035] The gallium nitride production furnace accessories detection system provided by the embodiment of the present invention can effectively detect the structural regularity of components with corners and inner side surfaces, with higher detection efficiency, and is also applicable to the situation where the angle between the inner side surfaces on both sides of the corner is small. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0037] Figure 1 Schematic diagram of the internal structure of the detection column of the component configuration detection device provided by the embodiment of the present invention (corresponding to Figure 4 A1-B1 cross-sectional view); Figure 2 for Figure 1 A schematic diagram of the structure of the support organization; Figure 3 Schematic diagram of the internal structure of the detection column of the component configuration detection device provided by the embodiment of the present invention (corresponding to Figure 4 A2-B2 cross-sectional view); Figure 4 It is a schematic diagram of the end surface structure of the end where the second end wall of the detection column is located; Figure 5 It is a schematic diagram of the matching state between the detection column and the component to be detected during the detection process; Figure 6 A schematic diagram for confirming the rotation angle of the component to be detected; Figure 7 A schematic diagram of the length direction of the corner of the component to be detected; Figure 8 A schematic diagram of the state when the contact point is confirmed; Fig. 9 This is a schematic diagram for adjusting the mating seat.

[0038] Description of reference numerals: Detection column 100; first end wall 110; second end wall 120; guiding inner cavity 130; vent hole 131; sliding member 150; elastic member 160; accommodating groove 170; conductive inner cavity 180; protrusion 190; detection needle 200; supporting mechanism 300; rolling ball 310; first magnetic module 311; protective cover 320; pressure detection mechanism 400; reference point D; matching seat 500; second magnetic module 510; transmission shaft 520; booster blade 530; adjustment column 600; first tube body 710; second tube body 720; third tube body 730; component to be detected 2000. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0040] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0041] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0042] The terms “first”, “second”, “third”, etc. are only used for distinguishing descriptions and should not be understood as indicating or implying relative importance.

[0043] In addition, the terms "parallel", "vertical", etc. do not mean that the components must be absolutely parallel or vertical, but can be slightly tilted. For example, "parallel" only means that its direction is more parallel than "vertical", and does not mean that the structure must be completely parallel, but can be slightly tilted.

[0044] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting", "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a communication between the two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0045] In order to overcome the shortcomings of the prior art, please refer to Figure 1-Figure 4 The present embodiment provides a component configuration detection device, which includes: a detection column 100, a detection needle 200, a support mechanism 300, a pressure detection mechanism 400, a displacement detection mechanism (not shown in the figure) and a controller (not shown in the figure).

[0046] For ease of description, the end walls of the detection column 100 are respectively recorded as the first end wall 110 and the second end wall 120. The detection column 100 has a guide inner cavity 130 arranged along its axial direction, and the inner end wall of the guide inner cavity 130 close to the first end wall 110 is provided with a matching through hole penetrating to the first end wall 110, and the matching through hole is arranged along the axial direction of the detection column 100. In this embodiment, the detection column 100 is a regular quadrangular prism, and the guide inner cavity 130 and the matching through hole are both arranged coaxially with the detection column 100.

[0047] It should be noted that the shape of the detection column 100 is not fixed and can be flexibly selected according to actual needs. The present application does not impose any specific restrictions on the specific shape of the detection column 100.

[0048] A sliding member 150 is slidably fitted in the guide inner cavity 130 , and an elastic member 160 is abutted between the inner end wall of the guide inner cavity 130 at one end away from the first end wall 110 and the sliding member 150 .

[0049] The detection needle 200 is slidably fitted in the matching through hole, and the detection needle 200 is arranged along the axial direction of the detection column 100 and is fixedly connected to the sliding member 150. In this embodiment, the detection needle 200 is coaxially arranged with the detection column 100. In the natural state, under the elastic force of the elastic member 160, the detection needle 200 will be fully pushed out of the detection column 100.

[0050] The supporting mechanism 300 is disposed on the first end wall 110 , and supporting mechanisms 300 are disposed on opposite sides of the detection needle 200 . The detection needle 200 is located in the middle position of the gap between the supporting mechanisms 300 on the two sides. In other words, the distance between the detection needle 200 and the supporting mechanisms 300 on the two sides is the same.

[0051] Optionally, four supporting mechanisms 300 may be provided, that is, two supporting mechanisms 300 are provided on each side. Further, optionally, four supporting mechanisms 300 are provided at four corners of the first end wall 110 of the detection column 100 .

[0052] The pressure detection mechanism 400 is installed between the support mechanism 300 and the detection column 100 to detect the load borne by the support mechanism 300, that is, to determine the size of the load borne by the support mechanism 300 by detecting the pressure between the support mechanism 300 and the detection column 100.

[0053] The displacement detection mechanism is used to detect the extension length of the detection needle 200, that is, to detect the length of the detection needle 200 extending out of the matching through hole.

[0054] The pressure detection mechanism 400 and the displacement detection mechanism are both electrically connected to the controller.

[0055] When testing the component 2000 to be tested (taking a V-shaped component as an example), the tip of the testing needle 200 may be firstly abutted against the corner of the component 2000 to be tested. More specifically, the tip of the testing needle 200 may be abutted against the inner side of the corner of the component 2000 to be tested. Figure 5 As shown, the detection column 100 can then be gradually approached to the corner of the component 2000 to be detected. During this process, the detection needle 200 gradually moves into the inside of the detection column 100, and the detection needle 200 pushes the sliding member 150 to squeeze the elastic member 160 until the supporting mechanism 300 of the detection column 100 respectively abuts against the two side surfaces of the corner.

[0056] When the supporting mechanisms 300 on both sides are respectively in contact with the two sides of the corner, a stable structure is formed. At this time, a corresponding geometric relationship is formed between the position point where the tip of the detection needle 200 is located and the position point where the supporting mechanisms 300 on both sides fit the sides of the component to be detected 2000. In this state, since the spacing between the supporting mechanisms 300 on both sides is constant, the extension length of the detection needle 200 is only related to the angle of the corner of the component to be detected 2000. Therefore, the extension length of the detection needle 200 in the above state can be used to determine the angle of the corner of the component to be detected 2000. If the angle of the corner of the component to be detected 2000 determined by the extension length of the detection needle 200 is different from the design angle of the corner of the component to be detected 2000, it means that the component to be detected 2000 has been deformed.

[0057] When the pressure detection mechanism 400 detects that the loads on the supporting mechanisms 300 on both sides are the same, that is, when the pressure detection mechanism 400 detects that the pressures on the supporting mechanisms 300 on both sides are the same, the controller determines that the detection column 100 is in the detection position state, and the controller determines the rotation angle of the component 2000 to be detected based on the extended length of the detection needle 200 in this state.

[0058] Specifically, the point corresponding to the tip of the detection needle 200 can be used as the reference point D, such as Figure 6 As shown in FIG. 1 , based on the reference point D and the extension length of the detection needle 200, the position of the first end wall 110 of the detection column 100 can be determined, and the position of the support mechanism 300 can be determined according to the position of the first end wall 110, thereby determining the relative position relationship between the reference point D and each support mechanism 300. With the reference point D as the endpoint, the tangent line between the support part of each support mechanism 300 can be determined, as shown in FIG. Figure 6 The tangent lines p1 and p2 shown in (due to the viewing angle, Figure 6 Only two tangent lines are shown in the figure), and the angle of the rotation angle of the component 2000 to be detected can be determined based on these tangent lines.

[0059] Through this design, the component to be detected 2000 can be detected efficiently and intuitively, helping to determine whether there is deformation at the corner position of the component to be detected 2000.

[0060] In general, the component configuration detection device provided in this embodiment can effectively detect the structural regularity of components having corners and inner side surfaces, with higher detection efficiency, and is also applicable to situations where the angle between the inner side surfaces on both sides of the corner is small.

[0061] It should be noted that the specific model and specification of the displacement detection mechanism can be flexibly selected according to actual needs, and this application does not impose any specific restrictions.

[0062] In this embodiment, the supporting mechanism 300 is a rolling mechanism, that is, the supporting mechanism 300 not only has a supporting function, but also enables the detection column 100 to move relative to the detection mechanism.

[0063] The component configuration detection device further includes: a moving mechanism (not shown in the figure). The moving mechanism is used to move the detection column 100. The moving mechanism can be a mechanical arm, but is not limited thereto. The moving mechanism can be flexibly selected according to actual needs, and this application does not make specific restrictions. The moving mechanism is electrically connected to the controller.

[0064] When the controller determines that the detection column 100 is in the detection position state, the controller can control the moving mechanism to move the detection column 100 along the length direction of the corner of the component 2000 to be detected.

[0065] It should be noted that, in the present application, the length direction of the corner of the component to be detected 2000 refers to Figure 7 The K1 direction or K2 direction is the direction of the intersection line parallel to the side surfaces on both sides of the corner.

[0066] If the structure of the component 2000 to be detected is a standard V-shaped part, then the side surfaces on both sides of the corner should be standard planes. When the detection column 100 is moved along the length direction of the corner of the component 2000 to be detected, the load borne by the support mechanism 300 detected by the pressure detection mechanism 400 and the extended length of the detection needle 200 detected by the displacement detection mechanism should both remain unchanged.

[0067] When the pressure detection mechanism 400 detects that the load borne by the supporting mechanism 300 has changed, that is, the load (pressure) is not constant during the movement, it means that the corresponding position of the component 2000 to be detected has been deformed, and the controller marks the position of the supporting mechanism 300 when the load changes as a defective position.

[0068] In addition to the processing, when the displacement detection mechanism detects that the extension length of the detection needle 200 changes, that is, the extension length of the detection needle 200 does not remain constant during the movement, it means that there is a structural defect at the corner (specifically, the intersection of the two sides of the corner), and the controller marks the position of the tip of the detection needle 200 when the extension length changes as the defect position. More specifically, during the movement, if the extension length of the detection needle 200 is detected to be longer, it means that there may be a depression at the position where the tip of the detection needle 200 is located, and if the extension length of the detection needle 200 is detected to be shorter, it means that there may be a bulge at the position where the tip of the detection needle 200 is located.

[0069] The above two situations may occur only one at a time, or they may occur at the same time.

[0070] Optionally, when marking the defect position, the controller can determine the specific position of each defect position on the component to be inspected 2000 according to the starting position when the detection column 100 starts to move, the movement speed of the detection column 100 and the time when the defect position appears, and is not limited to this.

[0071] Furthermore, the supporting mechanism 300 includes a rolling ball 310 and a protective cover 320 .

[0072] An accommodating groove 170 is formed at the edge of the first end wall 110 , and an installation groove is formed on a groove wall of the accommodating groove 170 close to the second end wall 120 , and the pressure detection mechanism 400 is installed in the installation groove.

[0073] Specifically, in this embodiment, the receiving groove 170 is opened at the four corners of the first end wall 110. When the axis of the detection column 100 is arranged along the vertical direction and the first end wall 110 is placed below the second end wall 120, the installation groove is located at the top of the receiving groove 170, that is, when the pressure detection mechanism 400 is installed in the installation groove, the pressure detection mechanism 400 is located directly above the receiving groove 170.

[0074] The protective cover 320 is disposed in the receiving groove 170 and fixedly connected to the pressure detection surface of the pressure detection mechanism 400. A gap is left between the protective cover 320 and the groove wall of the receiving groove 170, so that the pressure detection mechanism 400 can more accurately detect the load of the support mechanism 300.

[0075] The inner side wall of the protective cover 320 is spherical, and the rolling ball 310 is spherical. The diameter of the spherical surface corresponding to the inner side wall of the protective cover 320 is matched with the diameter of the rolling ball 310. The rolling ball 310 can be universally rotatably fitted in the protective cover 320. In this embodiment, the shape of the protective cover 320 as a whole can be regarded as a spherical shell with an opening.

[0076] Through this design, the supporting mechanism 300 fits with the side of the corner of the component 2000 to be detected through the rolling ball 310. Since the rolling ball 310 fits with the side of the corner in a "point contact" form, it is beneficial to more accurately determine the tangent, thereby further improving the detection accuracy of the corner angle.

[0077] Furthermore, the sliding member 150 is in contact with the inner wall of the guiding inner cavity 130 , and a sliding seal is formed between the sliding member 150 and the inner wall of the guiding inner cavity 130 . In other words, the sliding member 150 is equivalent to a “piston”.

[0078] The diameter of the detection needle 200 is adapted to the aperture of the matching through hole, and the inner end wall of the guiding cavity 130 close to the first end wall 110 is also provided with a vent hole 131 that penetrates the first end wall 110 to achieve air pressure balance on the side of the sliding member 150 in the guiding cavity 130 close to the first end wall 110.

[0079] The detection column 100 further has a conductive inner cavity 180 arranged along its axial direction, the conductive inner cavity 180 is spaced apart from the guide inner cavity 130, and at least one receiving groove 170 is connected to the conductive inner cavity 180. In this embodiment, the number of the conductive inner cavity 180 is one, and only one receiving groove 170 is connected to the conductive inner cavity 180.

[0080] The component configuration detection device further includes: a matching seat 500 , an adjustment column 600 , a first tube body 710 , a second tube body 720 and a third tube body 730 .

[0081] The rolling ball 310 has a first magnetic module 311 therein, and the first magnetic module 311 is fixedly matched with the rolling ball 310 .

[0082] The matching seat 500 is in contact with the outer wall of the protection cover 320 . The matching seat 500 has a second magnetic module 510 therein. The second magnetic module 510 is rotatably matched in the matching seat 500 .

[0083] The adjusting column 600 is fixedly connected to the matching seat 500, and the adjusting column 600 has a conveying inner cavity. The second magnetic module 510 is fixedly connected to a transmission shaft 520, which passes through the matching seat 500 and the adjusting column 600 and extends into the conveying inner cavity. The transmission shaft 520 is fixedly connected to a booster blade 530, and the booster blade 530 is located in the conveying inner cavity.

[0084] The first tube body 710 and the second tube body 720 are both fixedly connected to the adjustment column 600 and communicated with the conveying cavity, and the booster blade 530 is located between the first tube body 710 and the second tube body 720. The third tube body 730 is located at one end of the guide cavity 130 away from the first end wall 110 and communicates the guide cavity 130 with the conduction cavity 180.

[0085] One end of the first tube body 710 away from the adjustment column 600 is connected to the external atmosphere. Optionally, the first tube body 710 can be connected to the external atmosphere through a flexible extension tube (not shown in the figure), which passes through the inner wall of the conductive cavity 180 and extends outside the detection column 100, but is not limited to this.

[0086] The second tube body 720 and the third tube body 730 are connected by a flexible connecting tube (not shown in the figure), and the connecting tube is disposed in the conductive inner cavity 180 .

[0087] Among them, the second magnetic module 510 is coaxially arranged with the transmission shaft 520, and the first magnetic module 311 and the second magnetic module 510 are magnetically coupled, so that when the moving mechanism moves the detection column 100 along the corner length direction of the component 2000 to be detected, the rolling ball 310 can drive the second magnetic module 510 to rotate through the first magnetic module 311 when it rotates, so that the transmission shaft 520 is used to drive the booster blades 530, so that the booster blades 530 transport the gas in the first tube body 710 to the second tube body 720, thereby increasing the air pressure in the space on the side of the sliding member 150 in the guide cavity 130 away from the first end wall 110, and forming an air pressure difference on both sides of the sliding member 150. Under the joint action of the air pressure difference and the elastic member 160, the force acting on the sliding member 150 toward the side where the matching through hole is located is increased, thereby ensuring that the tip of the detection needle 200 is fully in contact with the corner.

[0088] With this design, when the detection column 100 moves along the length direction of the corner, the greater the speed of movement, the greater the pressure difference on both sides of the sliding member 150, and the greater the force on the sliding member 150 toward the side where the matching through hole is located, which is more conducive to the tip of the detection needle 200 fully fitting with the corner. In this way, even if the tip of the detection needle 200 encounters a protrusion, after the detection needle 200 "crosses" the protrusion, it can ensure that the detection needle 200 quickly rebounds and quickly re-fits with the corner, thereby ensuring the accuracy of the detection.

[0089] If the "boost" method is not adopted, when the speed of the detection column 100 moving along the length direction of the corner is too fast, if the tip of the detection needle 200 encounters a protrusion during the movement, after the detection needle 200 "crosses" the protrusion, if the rebound force is small, the rebound of the detection needle 200 will be relatively slow. At this time, if the movement speed of the detection column 100 is too fast, the detection needle 200 will move a greater distance before it re-fits the corner, which will cause the length of the protrusion in the length direction of the corner in the detection result to be too large.

[0090] The above design can achieve automatic adaptation between the pressurization amplitude and the movement speed of the detection column 100 (the rotation speed of the rolling ball 310). When the movement speed is high, the pressurization amplitude is large, and when the movement speed is low, the pressurization amplitude is small.

[0091] In this way, the elastic force of the elastic member 160 can be designed to be relatively smaller, which can reduce the wear of the detection needle 200 and the wear of the component to be detected 2000 on the one hand, and on the other hand, when the moving speed of the detection column 100 is unexpectedly too fast, the credibility of the detection result can still be guaranteed and the probability of repeated inspection can be reduced.

[0092] Specifically, in this embodiment, the first magnetic module 311 is coaxially disposed with the rolling ball 310 , and the axis of the second magnetic module 510 passes through the center of the rolling ball 310 .

[0093] The outer wall of the protective cover 320 is also spherical, and the mating seat 500 has a mating surface for fitting with the outer wall of the protective cover 320. The mating surface is adapted to the outer wall of the protective cover 320. The mating seat 500 is always fitted with the protective cover 320 through the mating surface. The mating seat 500 can move along the outer wall of the protective cover 320 in a fitting manner. During the movement, the mating seat 500 is always fitted with the protective cover 320 through the mating surface, and the axis of the transmission shaft 520 always passes through the center of the rolling ball 310.

[0094] The component configuration detection device also includes: a position adjustment mechanism.

[0095] The position adjustment mechanism cooperates with the matching seat 500 to drive the matching seat 500 to move along the outer side wall of the protective cover 320 to adjust the position of the matching seat 500 at the protective cover 320 .

[0096] In this embodiment, the centers of the rolling balls 310 of the four supporting mechanisms 300 are all located in the same plane, and the plane is set perpendicular to the axis of the detection column 100. When the position adjustment mechanism drives the matching seat 500 to move, the movement range of the matching seat 500 is located in the same movement plane, which is perpendicular to the plane where the centers of the four rolling balls 310 are located, and the movement plane is also perpendicular to the length direction of the corner of the component 2000 to be detected.

[0097] The controller is also used to determine the contact point of the rolling ball 310 according to the detected rotation angle of the component 2000 to be detected and the extension length of the detection needle 200. The contact point is the point on the rolling ball 310 that contacts the corresponding side surface when the rolling ball 310 abuts against the side surface of the component 2000 to be detected.

[0098] The controller is also used to perform a calibration process, which includes: when the controller just determines that the detection column 100 is in the detection position state, determining the contact point (such as Figure 8 As shown in point Q in FIG. 1 ), the line between the contact point and the center of the rolling ball 310 is used as the first reference line (as shown in FIG. Figure 8As shown by the line L1 in the figure), a second reference line (not shown in the figure) extending along the length direction of the corner of the component to be detected 2000 is established, and the plane where the first reference line and the second reference line are located is used as the reference plane. At this time, the detection column 100 can be driven a short distance along its axial direction in the direction away from the component to be detected 2000, and the detection column 100 and the component to be detected 2000 can be temporarily separated. Even if the rolling ball 310 is temporarily separated from the side of the corner of the component to be detected 2000, the angle of the reference plane is kept unchanged, and the position of the matching seat 500 relative to the protective cover 320 is adjusted by the position adjustment mechanism so that the rotation axis of the second magnetic module 510 is perpendicular to the reference plane determined above, as shown in FIG. Fig. 9 As shown, since the first magnetic module 311 and the second magnetic module 510 are magnetically coupled, under the action of the second magnetic module 510, the rolling ball 310 will also rotate synchronously, so that the first magnetic module 311 and the second magnetic module 510 always maintain a coupled state. Then, the detection column 100 can be reset to the position corresponding to the detection in place state. Next, the detection work can be carried out normally.

[0099] With this design, when the detection column 100 moves along the length direction of the corner of the component to be detected 2000, it can ensure that the first magnetic module 311 and the second magnetic module 510 can efficiently and accurately perform magnetic coupling transmission to ensure smooth pressurization.

[0100] Furthermore, the first end wall 110 may not be a plane wall, but may be configured to protrude outward along the axial direction of the detection column 100, that is, a protrusion 190 is formed at one end of the detection column 100 away from the second end wall 120. The conductive inner cavity 180 also extends to the protrusion 190 to provide a larger clearance space for the matching seat 500 to move along the protective cover 320.

[0101] In this way, the maximum rotation angle that can be detected by the component configuration detection device can also be changed, and the protruding distance of the protrusion 190 can be flexibly adjusted according to actual use needs.

[0102] In this embodiment, the moving mechanism is also used to control the detection column 100 to approach and move away from the component to be detected 2000, so as to adjust the detection column 100 to a detection position state.

[0103] Optionally, in order to ensure that the moving mechanism can more accurately adjust the detection column 100 to the detection position, a visual mechanism can also be provided to identify the configuration of the component 2000 to be detected and the position of the corner, so as to accurately match the detection column 100 with the corner.

[0104] This embodiment also provides a gallium nitride production furnace accessories detection system, which includes: the above-mentioned component configuration detection device and accessories fixing mechanism (not shown in the figure).

[0105] The accessory fixing mechanism is used to fix the in-furnace accessories in the gallium nitride production furnace, and the component configuration detection device is used to detect the rotation angle of the in-furnace accessories fixed on the accessory fixing mechanism.

[0106] In summary, the component configuration detection device provided in the embodiment of the present invention can effectively detect the structural regularity of components having corners and inner side surfaces, with higher detection efficiency, and is also applicable to situations where the angle between the inner side surfaces on both sides of the corner is small.

[0107] The gallium nitride production furnace accessories detection system provided by the embodiment of the present invention can effectively detect the structural regularity of components with corners and inner side surfaces, with higher detection efficiency, and is also applicable to the situation where the angle between the inner side surfaces on both sides of the corner is small.

[0108] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A component configuration detection device, characterized in that: include: A detection column, a detection needle, a supporting mechanism, a pressure detection mechanism, a displacement detection mechanism and a controller; The end walls at both ends of the detection column are respectively recorded as the first end wall and the second end wall; the detection column has a guide inner cavity arranged along its axial direction, and the inner end wall of the guide inner cavity close to the first end wall is provided with a matching through hole penetrating to the first end wall, and the matching through hole is arranged along the axial direction of the detection column; A sliding member is slidably fitted in the guide inner cavity, and an elastic member is abutted between the inner end wall of the guide inner cavity away from the first end wall and the sliding member; the detection needle is slidably fitted in the matching through hole, and the detection needle is arranged along the axial direction of the detection column and fixedly connected to the sliding member; The supporting mechanism is arranged on the first end wall, and the supporting mechanism is arranged on opposite sides of the detection needle, and the detection needle is located in the middle position of the gap between the supporting mechanisms on the two sides; The pressure detection mechanism is installed between the support mechanism and the detection column to detect the load borne by the support mechanism; the displacement detection mechanism is used to detect the extension length of the detection needle; the pressure detection mechanism and the displacement detection mechanism are both electrically connected to the controller; During detection, the tip of the detection needle is used to abut the corner of the component to be detected, and the supporting mechanisms on both sides are used to abut the two side surfaces of the corner respectively; when the pressure detection mechanism detects that the loads of the supporting mechanisms on both sides are the same, the controller determines that it is in the detection position state, and the controller determines the corner angle of the component to be detected based on the extended length of the detection needle.

2. The component configuration detection device according to claim 1, characterized in that: The supporting mechanism is a rolling mechanism; the component configuration detection device further includes: a moving mechanism; When the controller determines that it is in the detection position state, the moving mechanism is used to move the detection column along the length direction of the corner of the component to be detected. When the pressure detection mechanism detects that the load borne by the supporting mechanism changes, the controller marks the position of the supporting mechanism when the load changes as a defective position, and / or when the displacement detection mechanism detects that the extended length of the detection needle changes, the controller marks the position of the tip of the detection needle when the extended length changes as a defective position.

3. The component configuration detection device according to claim 2, characterized in that: The supporting mechanism includes: a rolling ball and a protective cover; a receiving groove is provided at the edge of the first end wall, a mounting groove is provided on a side of the receiving groove close to the second end wall, and the pressure detection mechanism is installed in the mounting groove; The protective cover is arranged in the receiving groove and is fixedly connected to the pressure detection surface of the pressure detection mechanism, and there is a gap between the protective cover and the groove wall of the receiving groove; The inner side wall of the protective cover is in a spherical shape. The diameter of the spherical surface corresponding to the inner side wall of the protective cover is matched with the diameter of the rolling ball. The rolling ball can be universally rotatably matched in the protective cover.

4. The component configuration detection device according to claim 3, characterized in that: A sliding seal is formed between the sliding member and the inner wall of the guide cavity; The detection column also has a conductive inner cavity arranged along its axial direction, the conductive inner cavity is spaced apart from the guide inner cavity, and at least one of the accommodating grooves is connected to the conductive inner cavity; The component configuration detection device also includes: a matching seat, an adjustment column, a first tube body, a second tube body and a third tube body; The rolling ball has a first magnetic module in it, and the first magnetic module is fixedly matched with the rolling ball; the matching seat is in contact with the outer wall of the protective cover, and the matching seat has a second magnetic module in it, and the second magnetic module is rotatably matched with the matching seat; The adjusting column is fixedly connected to the matching seat, and the adjusting column has a conveying inner cavity; the second magnetic module is fixedly connected to a transmission shaft, and the transmission shaft extends into the conveying inner cavity, and the transmission shaft is fixedly connected to a booster blade, and the booster blade is located in the conveying inner cavity; The first tube body and the second tube body are both fixedly connected to the adjusting column and communicated with the conveying inner cavity; the third tube body is located at one end of the guiding inner cavity away from the first end wall and communicates the guiding inner cavity with the conducting inner cavity; one end of the first tube body away from the adjusting column is communicated with the external atmosphere, and the second tube body and the third tube body are communicated with each other by a connecting pipe; The first magnetic module and the second magnetic module are magnetically coupled so that when the moving mechanism moves the detection column along the angular length direction of the component to be detected, the first magnetic module can drive the second magnetic module to rotate, so that the booster fan blade can transport the gas in the first tube body to the second tube body.

5. The component configuration detection device according to claim 4, characterized in that: The outer wall of the protective cover is also spherical, and the matching seat has a matching surface for fitting with the outer wall of the protective cover, and the matching surface is adapted to the outer wall of the protective cover so that the matching seat can move along the outer wall of the protective cover in a fitting manner; The component configuration detection device further includes: a position adjustment mechanism; the position adjustment mechanism cooperates with the matching seat to drive the matching seat to move along the outer side wall of the protective cover to adjust the position of the matching seat on the protective cover; The controller is also used to determine the contact point of the rolling ball according to the rotation angle and the extension length of the detection needle; the contact point is the point on the rolling ball that is used to contact the corresponding side surface when the rolling ball abuts against the side surface of the component to be detected; The controller is also used to execute a calibration process, which includes: taking the line between the contact point and the center of the rolling ball as a first reference line, establishing a second reference line extending along the length direction of the corner of the component to be detected, and taking the plane where the first reference line and the second reference line are located as a reference plane; keeping the angle of the reference plane unchanged, and using the position adjustment mechanism to adjust the position of the mating seat relative to the protective cover so that the rotation axis of the second magnetic module is perpendicular to the reference plane.

6. The component configuration detection device according to claim 5, characterized in that: The first end wall has a protrusion, and the conductive inner cavity extends to the protrusion to provide a space for the matching seat to move along the protective cover.

7. The component configuration detection device according to claim 2, characterized in that: The moving mechanism is also used to control the detection column to approach and move away from the component to be detected, so as to adjust the detection column to the detection position state.

8. A gallium nitride production furnace accessories detection system, characterized in that: include: A component configuration detection device as described in any one of claims 1 to 7.

Images