Optical debugging method and optical debugging device

Abstract

The present invention provides an optical debugging method and an optical debugging device, comprising a light source, a narrowband filter module, an optical fiber, a spectrum acquisition module and a posture debugging module; firstly, the light source sends out an optical signal which passes through the narrowband filter module and then is transmitted to the spectrum acquisition module through the optical fiber, at which time the wavelength of the optical signal obtained by the spectrum acquisition module is a calibrated wavelength value, and the posture debugging module records the position of the spectrum acquisition module at this time, sets it as a reference position and establishes a coordinate system; secondly, the light source sends out an optical signal which is reflected by a device to be tested and then is transmitted to the spectrum acquisition module through the narrowband filter module, at which time the posture debugging module debugs the position of the spectrum acquisition module according to the coordinate system, so that the light intensity and wavelength of the optical signal received by the spectrum acquisition module are within preset values, so the present invention can obtain a light signal to be tested with maximum light intensity and accurate wavelength, and by using a light signal with light intensity and wavelength within ideal values, the present invention can obtain rich and accurate information on the device to be tested.

Description

Technical Field

[0001] The present invention relates to the field of optical measurement, and in particular to an optical debugging method and an optical debugging device. Background Art

[0002] In the field of device measurement, optical instruments can accurately measure the structure, thickness and surface flatness of devices. During the measurement process, the thickness of the device can be detected by analyzing the polarization direction of the light signal, and the surface morphology of the device can be detected by analyzing the refractive index of the light signal. That is, by analyzing the light field information of the light signal received by the detection module, detailed data of the device to be tested can be obtained. In this measurement method, whether the detection module accurately receives the reflected light signal directly affects the measurement result. Therefore, when installing the detection module to the equipment, the detection module needs to be debugged to the best posture to ensure the accuracy of the machine instrument.

[0003] The spectrum acquisition module is one of the core components of optical equipment. Due to its sensitivity to light, the position and posture of the spectrum acquisition module in the equipment directly affect the final measurement and detection results of the equipment. In order to pursue the best state of the equipment, complex and tedious optical debugging is usually carried out during the equipment assembly process. During the debugging of the spectrum acquisition module, the posture of the spectrum acquisition module is generally determined by the change of the light intensity value, and the posture of the spectrum acquisition module at the maximum light intensity is used as the best posture for subsequent optical measurement or detection. However, the method of using the maximum light intensity to find the best posture of the spectrum acquisition module still makes the measurement and detection results of the optical equipment uncertain.

[0004] Therefore, how to adjust the optimal position of the spectrum acquisition module to improve the quality of optical measurement results has become one of the problems that technicians in this field need to solve urgently.

[0005] It should be noted that the above introduction to the technical background is only for the convenience of providing a clear and complete description of the technical solutions of the present invention and for the convenience of understanding by those skilled in the art. It cannot be considered that the above technical solutions are well known to those skilled in the art simply because these solutions are described in the background technology section of the present invention. Summary of the invention

[0006] In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide an optical debugging method and an optical debugging device, which are used to solve the problem in the prior art that it is difficult to debug the optimal position of the spectrum acquisition module to improve the quality of optical measurement results.

[0007] To achieve the above-mentioned purpose and other related purposes, the present invention provides an optical debugging method, an optical debugging method, the optical debugging method at least comprising the following steps: S1: a light source sends an input optical signal, the input optical signal is filtered into a calibration optical signal and then transmitted to a spectrum acquisition module via an optical fiber, the spectrum acquisition module obtains the nominal wavelength value of the calibration optical signal; S2: a light source sends an input optical signal; the input optical signal is output as a reflected optical signal by a device to be tested, the reflected optical signal is filtered into a measured optical signal and transmitted to the spectrum acquisition module; the position of the spectrum acquisition module is adjusted so that the light intensity of the optical signal received by the spectrum acquisition module reaches a maximum light intensity range, and the position of the spectrum acquisition module is adjusted again so that the difference between the wavelength of the optical signal received by the spectrum acquisition module and the nominal wavelength value is within a target range; wherein the wavelength of the reflected optical signal after filtering is consistent with the wavelength of the input optical signal after filtering.

[0008] Optionally, in step S2, the lighting plane is rotated around the X-axis or Y-axis to adjust the position of the spectrum acquisition module; and / or the coordinates of the center point of the lighting plane are translated on the X-axis, Y-axis or Z-axis to adjust the position of the spectrum acquisition module; wherein the lighting plane is the planar area where the spectrum acquisition module receives light signals, the lighting plane in step S1 is a reference lighting plane, any point on the reference lighting plane is the coordinate origin, the normal of the reference lighting plane is parallel to the Z-axis, and any two vertical lines in the reference lighting plane are parallel to the X-axis and the Y-axis, respectively.

[0009] Optionally, the target range is 0 nm to 2 nm.

[0010] Optionally, the maximum light intensity range is 60%-80% of the maximum light intensity value that the spectrum acquisition module can withstand.

[0011] Optionally, the optical debugging method further includes step S3, in which the wavelength value of the input optical signal after filtering and the wavelength value of the reflected optical signal after filtering are changed, and steps S1 and S2 are repeated.

[0012] To achieve the above-mentioned purpose and other related purposes, the present invention provides an optical debugging device, which at least includes: a light source, which is used to provide an output optical signal; a narrowband filter module, which is arranged on the optical path behind the light source, and is used to filter the wavelength of the output optical signal and then output a calibration optical signal; or is arranged on the optical path behind the device to be tested, the device to be tested receives the optical signal output by the light source and reflects it, and the narrowband filter module filters the optical signal reflected by the device to be tested and then outputs the optical signal to be tested; an optical fiber, which is arranged on the optical path of the calibration optical signal behind the narrowband filter module, and is used to transmit the calibration optical signal; a spectrum acquisition module, which is arranged on the optical path of the calibration optical signal behind the optical fiber, and is used to collect the calibration optical signal and convert the calibration optical signal into an electrical signal; or is arranged on the optical path of the optical signal to be tested behind the narrowband filter module, and is used to collect the optical signal to be tested and convert the optical signal to be tested into an electrical signal; a posture adjustment module, which is connected to the spectrum acquisition module, and adjusts the position of the spectrum acquisition module by rotating the spectrum acquisition module and translating the spectrum acquisition module.

[0013] Optionally, the wavelength range of the optical signal emitted by the light source is 200nm-900nm.

[0014] Optionally, the narrowband filter module is composed of n narrowband filters, the wavelengths of the n narrowband filters are different, and the narrowband filter module has at most one narrowband filter arranged on the optical path, wherein n is a natural number greater than or equal to 2.

[0015] More optionally, the narrowband filter module is arranged on a narrowband filter wheel, n narrowband filters are located in the same plane and arranged around the center of the narrowband filter wheel, and the narrowband filter wheel arranges the narrowband filters on the light path in sequence by rotating.

[0016] More optionally, the narrow-band filter module further comprises an empty hole, the distance between the empty hole and the n narrow-band filters and the center of the narrow-band filter wheel are all equal, and the empty hole is used to be arranged in the optical path after the optical debugging is completed.

[0017] As described above, the optical debugging method and optical debugging device of the present invention have the following beneficial effects:

[0018] 1. The present invention obtains the maximum light intensity position of the light signal reflected by the device under test received on the spectrum acquisition module, and performs wavelength calibration on the light signal reflected by the device under test by introducing a calibration wavelength value. Therefore, the present invention can obtain the reflected light signal of the device under test with maximum light intensity and accurate wavelength, and obtain rich and accurate information about the device under test.

[0019] 2. The present invention obtains and records the position where the light intensity of the optical signal received by the spectrum acquisition module at different wavelengths is the largest and the wavelength is accurate. The present invention can obtain rich and accurate information about the device to be tested in different application scenarios. Therefore, the present invention has the advantages of wide application range and strong reproducibility. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram showing the effect of a light intensity testing method.

[0021] Figure 2 Shown is a schematic structural diagram of the optical debugging device of the present invention.

[0022] Figure 3 Shown is a calibration light path diagram of the optical debugging device of the present invention.

[0023] Figure 4 Shown is a light path diagram of the light to be tested of the optical debugging device of the present invention.

[0024] Figure 5 Shown is a schematic structural diagram of the narrow-band filter module of the present invention.

[0025] Figure 6 Displayed is a three-dimensional coordinate diagram of the lighting plane of the present invention.

[0026] Figure 7 Shown is a debugging diagram of the Y-axis coordinate of the optical debugging method of the present invention.

[0027] Component number description

[0028] 1 Light Source

[0029] 2 Narrowband Filter Module

[0030] 3 Fiber Optics

[0031] 4 Spectrum acquisition module

[0032] 5. Attitude Adjustment Module

[0033] 14 Attitude adjustment module

[0034] 2a First narrowband filter

[0035] 2b Second narrowband filter

[0036] 2c Third narrowband filter

[0037] 2d Hole

[0038] 2e Narrowband Filter Wheel Center DETAILED DESCRIPTION

[0039] The following describes the embodiments of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0040] See also Figure 1-Figure 7 It should be noted that the illustrations provided in this embodiment are only used to illustrate the basic concept of the present invention in a schematic manner, and the illustrations only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0041] like Figure 1 As shown, there is a light intensity test method that can obtain the full spectrum data of the light intensity of the light signal changing with the wavelength, and then select the maximum light intensity position corresponding to each wavelength. However, due to the poor readability of the spectrum acquisition module for the wavelength, the correspondence between the maximum light intensity and the wavelength obtained by the light intensity test method is not accurate. The present invention obtains a calibration wavelength value before detecting the device to be tested, and uses the calibration wavelength value to calibrate the wavelength of the light signal reflected by the device to be tested. The present invention can enable the spectrum acquisition module to select a detection position with accurate wavelength in the maximum light intensity position. Therefore, the present invention can realize device detection with rich light signal information and accurate wavelength. The specific scheme of the present invention is as follows:

[0042] Embodiment 1

[0043] like Figure 2 As shown, this embodiment provides an optical debugging device, which includes: a light source 1, a narrow-band filter module 2, an optical fiber 3, a spectrum acquisition module 4 and a posture adjustment module 5.

[0044] like Figure 2 As shown, the light source 1 is used to provide an output light signal.

[0045] Specifically, in this embodiment, the wavelength range of the light source 1 is full spectrum, so the wavelength range of the light source 1 can be 200nm to 900nm, including but not limited to 300nm, 400nm, 500nm, 600nm, 700nm, 800nm, that is, the light signal emitted by the light source 1 can be ultraviolet light, visible light or near-infrared light; further, the light source 1 can adopt any one of a halogen lamp, a xenon lamp, a laser or an LED light source, or a combination of two or more.

[0046] like Figure 2As shown, the narrowband filter module 2 is arranged on the optical path behind the light source 1, and is used to filter the wavelength of the output optical signal and then output a calibration optical signal; or the narrowband filter module 2 is arranged on the optical path behind the device to be tested, the device to be tested receives the optical signal output by the light source and reflects it, and the narrowband filter module filters the optical signal reflected by the device to be tested and then outputs the optical signal to be tested.

[0047] Specifically, in this embodiment, the narrowband filter module 2 is arranged on both the optical path of the calibration optical signal and the optical path of the optical signal to be measured: first, Figure 3 As shown, the narrowband filter module 2 directly filters the optical signal of the light source 1 and transmits it to the spectrum acquisition module 4 through the optical fiber 3, and the spectrum acquisition module 4 obtains the calibrated wavelength value; then, as shown in Figure 4 As shown, the device to be tested is added to the optical path, the optical fiber 3 is withdrawn from the optical path, the narrowband filter module 2 filters the optical signal reflected by the device to be tested and transmits it to the spectrum acquisition module 4, and the spectrum acquisition module 4 obtains the optical signal to be tested. The spectrum acquisition module 4 can calibrate the wavelength of the optical signal to be tested by using the calibrated wavelength value.

[0048] Specifically, in this embodiment, the narrowband filter module 4 is composed of n narrowband filters, the wavelengths of the n narrowband filters are different, and the narrowband filter module 4 has at most one narrowband filter arranged on the optical path, wherein n is a natural number greater than or equal to 2, and the wavelength of the optical signal after filtering can be adjusted by replacing different narrowband filters. As an example, Figure 5 As shown, the narrowband filter module 4 is arranged on a narrowband filter wheel, and n narrowband filters are located in the same plane and arranged around the center of the narrowband filter wheel. The narrowband filter wheel arranges the narrowband filters in the optical path in sequence by rotation, so as to facilitate the replacement of different narrowband filters; further, the narrowband filter module 4 also includes an empty hole, and the distance from the empty hole to the center of the narrowband filter wheel is equal to that of the n narrowband filters, so that it is convenient to be arranged in the optical path after debugging, so that the optical signal reflected by the device to be tested can directly enter the spectrum acquisition module.

[0049] like Figure 2 As shown, the optical fiber 3 is arranged on the optical path of the calibration optical signal after the narrow-band filter module 2, and is used to transmit the calibration optical signal.

[0050] Specifically, in this embodiment, the optical fiber 3 is arranged in the optical path of the calibration light signal, and the narrowband filter module 4 needs to be as close to the light source as possible. The optical fiber 3 needs to be as close to the narrowband filter module 4 as possible. This is because the light will cause errors to the spectrum acquisition module 4 during the transmission process in space, so it is necessary to minimize the transmission of the optical signal in space.

[0051] like Figure 2As shown, the spectrum acquisition module 4 is arranged on the calibration light path behind the optical fiber 3, and is used to collect the calibration light signal and convert the calibration light signal into an electrical signal; or the spectrum acquisition module 4 is arranged on the optical path of the light signal to be measured behind the narrow-band filter module 2, and is used to collect the light signal to be measured and convert the light signal to be measured into an electrical signal.

[0052] Specifically, in this embodiment, the spectrum acquisition module 4 is both on the optical path of the calibration optical signal and on the optical path of the optical signal to be measured: Figure 3 As shown, when the spectrum acquisition module 4 is on the optical path of the calibration light signal, the calibration light path sequentially includes a light source 1, a narrowband filter module 2, an optical fiber 3, a spectrum acquisition module 4 and a posture debugging module 5; Figure 4 As shown, when the spectrum acquisition module 4 is on the optical path of the light signal to be measured, the optical path of the light to be measured includes a light source 1, a device to be measured, a narrowband filter module 2, a spectrum acquisition module 4 and a posture debugging module 5 in sequence.

[0053] like Figure 2 As shown, the posture adjustment module 5 is connected to the spectrum collection module 4, and adjusts the position of the spectrum collection module 4 by rotating the spectrum collection module 4 and translating the spectrum collection module 4.

[0054] Specifically, in this embodiment, the rotation and translation of the spectrum acquisition module 4 essentially refers to the rotation and translation of the lighting plane. The lighting plane refers to the plane area where the spectrum acquisition module 4 receives the light signal. The lighting plane has a real physical boundary. When the position of the lighting plane changes, the light signal received by the spectrum acquisition module 4 will also change. As an example, Figure 6 As shown, the light entrance slit of the spectrum acquisition module 4 is rectangular, so the rectangular light entrance slit can be used to represent the lighting plane, the center point of the rectangular light entrance slit represents the coordinate origin, the short side of the rectangular light entrance slit is parallel to the X-axis, the long side of the rectangular light entrance slit is parallel to the Y-axis, and the normal of the rectangular light entrance slit is parallel to the Z-axis, wherein the directions of the X-axis, Y-axis and Z-axis can be set arbitrarily; when the posture adjustment module 5 rotates the light entrance slit around the X-axis or Y-axis, the incident angle of the light signal to the lighting plane will change; when the posture adjustment module 5 moves the center point of the lighting plane on the three-dimensional coordinate, the distance from the light signal to the center point of the lighting plane will change. In practical applications, the lighting plane and the three-dimensional coordinate system in which the lighting plane is located are defined as needed, not limited to this embodiment.

[0055] Embodiment 2

[0056] like Figure 2 As shown, this embodiment provides an optical debugging method, and the steps of the optical debugging method include:

[0057] like Figure 3As shown, in step S1, the light source 1 sends an input optical signal, the input optical signal is filtered into a calibration optical signal and then transmitted to the spectrum acquisition module 4 via the optical fiber 3, and the spectrum acquisition module 4 obtains the nominal wavelength value of the calibration optical signal.

[0058] Specifically, in this embodiment, the spectrum acquisition module 4 needs to obtain the nominal wavelength value first, so that this embodiment can use the nominal wavelength value to calibrate the wavelength of the optical signal reflected by the device under test; further, in step S1, the calibration optical signal is directly transmitted to the spectrum acquisition module 4 by the optical fiber 3, with the purpose of using optical fiber transmission instead of spatial transmission to avoid the influence of spatial light transmission on the spectrum acquisition module 4, so that the spectrum acquisition module 4 can obtain the accurate wavelength of the optical signal.

[0059] Specifically, in this embodiment, the plane area where the spectrum acquisition module 4 receives the light signal is defined as the lighting plane. The lighting plane has a clear physical boundary, and the position of the spectrum acquisition module 4 is essentially the position of the lighting plane; further, when the spectrum acquisition module 4 obtains the nominal wavelength value, the position of the lighting plane at this time is recorded and defined as the reference lighting plane; further, any point on the reference lighting plane is taken as the origin of the coordinates, the normal of the reference lighting plane is parallel to the Z axis, and any two vertical lines in the reference lighting plane are parallel to the X axis and the Y axis respectively, wherein the directions of the X axis, the Y axis and the Z axis can be set arbitrarily. As an example, Figure 6 As shown, when the lighting plane is a rectangular light entrance slit of the spectrum acquisition module 4, the center point of the lighting plane is the coordinate origin, the X-axis is parallel to the short side of the rectangular slit, the Y-axis is parallel to the long side of the rectangular slit, and the Z-axis is parallel to the normal of the rectangular slit. In practical applications, the lighting plane and the three-dimensional coordinate system in which the lighting plane is located are defined as needed, and are not limited to this embodiment.

[0060] like Figure 4 As shown, the light source 1 sends out an input light signal; the input light signal outputs a reflected light signal through the device to be tested, and the reflected light signal is filtered to be the light signal to be tested and transmitted to the spectrum acquisition module 4; the position of the spectrum acquisition module 4 is adjusted so that the light intensity of the light signal received by the spectrum acquisition module 4 reaches the maximum light intensity range, and the position of the spectrum acquisition module 4 is adjusted again so that the difference between the wavelength of the light signal received by the spectrum acquisition module 4 and the nominal wavelength value is within the target range; wherein the wavelength of the reflected light signal after filtering is consistent with the wavelength of the input light signal after filtering.

[0061] Specifically, in this embodiment, the optical device for filtering the output optical signal in step S1 and the optical device for filtering the reflected optical signal in step S2 have the same filtering performance, that is, the wavelengths obtained by the two optical devices for filtering wavelengths after receiving the same optical signal are the same.

[0062] Specifically, in this embodiment, when the position of the lighting plane changes, the light signal received by the spectrum acquisition module 4 will also change, for example, the intensity and wavelength of the light signal may change. Therefore, by adjusting the position of the spectrum acquisition module 4, the light intensity and wavelength of the light signal to be measured on the spectrum acquisition module can reach the preset value, so that the spectrum acquisition module 4 can obtain the light signal to be measured with maximum light intensity and accurate wavelength. Among them, the maximum light intensity range of the light intensity refers to 60%-80% of the maximum light intensity value that the spectrum acquisition module 4 can withstand, including but not limited to 65%, 70%, 75%, and the target range of the wavelength refers to the difference between the wavelength of the light to be measured and the wavelength of the calibration light within 2nm, including but not limited to 0.05nm, 0.1nm, 0.15nm, 0.2nm, 0.5nm, 1nm, 1.5nm.

[0063] Specifically, in this embodiment, the three-dimensional coordinate system defined in step S1 is used, and the lighting plane is rotated around the X-axis or the Y-axis to adjust the position of the spectrum acquisition module 4, such as Figure 6 As shown, the incident angle of the light signal entering the lighting plane will change, so the light signal obtained by the spectrum acquisition module 4 will be different; and / or the coordinates of the center point of the lighting plane are translated on the X-axis, Y-axis or Z-axis to adjust the position of the spectrum acquisition module 4, such as Figure 6 As shown, the distance between the optical signal and the center point of the lighting plane will change, so the optical signal obtained by the spectrum acquisition module 4 will also be different. In actual applications, the specific method of adjusting the position of the lighting plane is selected according to needs, and is not limited to this embodiment.

[0064] Specifically, in this embodiment, the spectrum acquisition module 4 has multiple receiving positions that meet both the ideal light intensity value and the ideal wavelength value. The maximum light intensity position or the minimum wavelength difference position among the multiple receiving positions can be selected as the receiving position during the formal detection of the device under test (that is, after the debugging is completed, the narrowband filter module is removed from the optical path so that the spectrum acquisition module directly receives the optical signal reflected by the device under test). In actual applications, the receiving position of the spectrum acquisition module 4 is selected as needed, which is not limited to this embodiment. As an example, Figure 7As shown, the Y-axis is the long side direction of the rectangular light entrance slit of the spectrum acquisition module. The maximum light intensity that the spectrum acquisition module 4 can withstand is 200,000 counts. The filtering optical device can use a 420nm filter, and the calibrated wavelength value is 419.844nm. Therefore, when the spectrum acquisition module 4 is translated on the Y-axis, the receiving positions that meet the ideal light intensity value and the ideal wavelength value include 5.08mm, 5.10mm, 5.12mm, 5.14mm, 5.16mm, 5.18mm, and 5.20mm; when the maximum light intensity position is required, the coordinate of the spectrum acquisition module 4 when translated on the Y-axis is set to 5.12mm or 5.14mm, and when the most accurate wavelength position is required, the coordinate of the spectrum acquisition module 4 when translated on the Y-axis is set to 5.12mm or 5.14mm. The coordinate selection of the optimal receiving position when the spectrum acquisition module 4 translates on the X-axis and Z-axis, and the angle selection of the optimal receiving position when the spectrum acquisition module 4 rotates around the X-axis and Y-axis are similar to the coordinate selection of the optimal receiving position when the spectrum acquisition module 4 translates on the Y-axis, and will not be repeated here.

[0065] Specifically, in this embodiment, the optical debugging method also includes step S3, in which the wavelength of the input light signal after filtering and the wavelength of the reflected light signal after filtering are changed, and the wavelength of the input light signal after filtering is consistent with the wavelength of the reflected light signal after filtering; and steps S1 and S2 are repeated in order to obtain the posture position of the spectrum acquisition module 4 with optimal light intensity and wavelength calibration under different filtering.

[0066] In this embodiment, this embodiment can be implemented based on the device of Embodiment 1. In actual applications, the device for implementing this embodiment is selected as needed, and is not limited to this embodiment.

[0067] In summary, the optical debugging method and the optical debugging device of the present invention include a light source, a narrowband filter module, an optical fiber, a spectrum acquisition module and a posture debugging module; the present invention first establishes a calibration light path: the light source emits a light signal, which passes through the narrowband filter module and then is transmitted to the spectrum acquisition module through the optical fiber. At this time, the wavelength of the light signal obtained by the spectrum acquisition module is the calibration wavelength value, and the posture debugging module records the position of the spectrum acquisition module at this time as the reference position, and sets the coordinate system where the spectrum acquisition module is located according to the reference position; the present invention then establishes a light path to be measured: the light source emits a light signal, which is reflected by the device to be measured and then transmitted to the spectrum acquisition module through the narrowband filter module. At this time, the posture debugging module debugs the position of the spectrum acquisition module based on the coordinate system, so that the light signal received by the spectrum acquisition module is within the maximum light intensity range and the ideal wavelength error. Therefore, the present invention can obtain a light signal to be measured with maximum light intensity and accurate wavelength. By using a light signal with both light intensity and wavelength within the ideal value, the present invention can obtain rich and accurate information about the device to be measured. In addition, the present invention also has the advantages of simple structure, wide application range and strong reproducibility. Therefore, the present invention effectively overcomes various shortcomings in the prior art and has a high industrial utilization value.

[0068] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. An optical debugging method, characterized in that: The optical debugging method comprises at least the following steps: S1: A light source sends an input optical signal, the input optical signal is filtered into a calibration optical signal and then transmitted to a spectrum acquisition module via an optical fiber, and the spectrum acquisition module obtains a nominal wavelength value of the calibration optical signal; S2: The light source sends an input light signal; the input light signal outputs a reflected light signal through the device under test, the reflected light signal is filtered into a light signal under test and transmitted to the spectrum acquisition module; the position of the spectrum acquisition module is adjusted so that the light intensity of the light signal received by the spectrum acquisition module reaches the maximum light intensity range, and the position of the spectrum acquisition module is adjusted again so that the difference between the wavelength of the light signal received by the spectrum acquisition module and the nominal wavelength value is within the target range; The wavelength of the reflected light signal after filtering is consistent with the wavelength of the input light signal after filtering.

2. The optical debugging method according to claim 1, characterized in that: In step S2, the lighting plane is rotated around the X-axis or the Y-axis to adjust the position of the spectrum acquisition module; and / or the coordinates of the center point of the lighting plane are translated on the X-axis, the Y-axis or the Z-axis to adjust the position of the spectrum acquisition module; Among them, the lighting plane is the planar area where the spectrum acquisition module receives light signals, the lighting plane in step S1 is the reference lighting plane, any point on the reference lighting plane is the coordinate origin, the normal of the reference lighting plane is parallel to the Z axis, and any two vertical lines in the reference lighting plane are parallel to the X axis and the Y axis respectively.

3. The optical debugging method according to claim 1 or 2, characterized in that: The target range is 0 nm to 2 nm.

4. The optical debugging method according to claim 1 or 2, characterized in that: The maximum light intensity range is 60%-80% of the maximum light intensity value that the spectrum acquisition module can withstand.

5. The optical debugging method according to claim 1, characterized in that: The optical debugging method further includes step S3, in which the wavelength value of the input optical signal after filtering and the wavelength value of the reflected optical signal after filtering are changed, and steps S1 and S2 are repeated.

6. An optical debugging device, characterized in that: The optical debugging device at least comprises: A light source, for providing an output light signal; A narrowband filter module is arranged on the optical path behind the light source, and is used to filter the wavelength of the output optical signal and then output a calibration optical signal; or is arranged on the optical path behind the device to be tested, the device to be tested receives the optical signal output by the light source and reflects it, and the narrowband filter module filters the optical signal reflected by the device to be tested and then outputs the optical signal to be tested; An optical fiber, arranged on the optical path of the calibration optical signal after the narrow-band filter module, and used for transmitting the calibration optical signal; A spectrum acquisition module, arranged on the optical path of the calibration optical signal after the optical fiber, for collecting the calibration optical signal and converting the calibration optical signal into an electrical signal; or arranged on the optical path of the optical signal to be measured after the narrow-band filter module, for collecting the optical signal to be measured and converting the optical signal to be measured into an electrical signal; The posture adjustment module is connected to the spectrum collection module and is used to adjust the position of the spectrum collection module by rotating and translating the spectrum collection module.

7. The optical debugging device according to claim 6, characterized in that: The wavelength range of the optical signal emitted by the light source is 200nm-900nm.

8. The optical debugging device according to claim 6, characterized in that: The narrowband filter module is composed of n narrowband filters, the wavelengths of the n narrowband filters are different, and the narrowband filter module has at most one narrowband filter arranged on the optical path, wherein n is a natural number greater than or equal to 2.

9. The optical debugging device according to claim 8, characterized in that: The narrowband filter module is arranged on a narrowband filter wheel, n narrowband filters are located in the same plane and arranged around the center of the narrowband filter wheel, and the narrowband filter wheel arranges the narrowband filters on the light path in sequence by rotating.

10. The optical debugging device according to claim 9, characterized in that: The narrowband filter module further comprises an empty hole, the distance between the empty hole and the center of the narrowband filter wheel is equal to that of the n narrowband filters, and the empty hole is used to be arranged in the optical path after the optical debugging is completed.

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