EBSD in-situ observation device

Abstract

The invention relates to a material performance testing device, in particular to an EBSD in-situ observation device which comprises a base and two sliding assemblies connected in a sliding groove of the base in a sliding mode. Each sliding assembly comprises a ball screw and a sliding block which is correspondingly connected with a thread on the outer wall of the ball screw in a matched mode, and the ball screws can rotate around the axes of the ball screws and drive the sliding blocks to do circulating reciprocating motion in the sliding grooves of the base. A clamping groove correspondingly matched with the end part of the sample is formed in the surface of one side, deviating from the base, of the sliding block. The device is simple in structure, the loading state in the experiment process can be kept, and the microstructure change of a sample in the compression experiment process can be observed in situ.

Description

Technical Field

[0001] The invention relates to a material performance testing device, in particular to an EBSD in-situ observation device. Background Art

[0002] Electron backscatter diffraction (EBSD) is an important characterization method in the study of metal materials. Its test results contain rich crystallographic information and organizational information, and are widely used in the study of metal deformation behavior. Uniaxial tension is the most basic and important mechanical property test experiment for metal components. Quasi-in-situ stretching of materials is an important link in realizing the "organization-strain-performance-characterization" relationship. However, the components of in-situ equipment are complex, expensive, and not conducive to operation. Most conventional quasi-in-situ tensile tests separate stretching from characterization, that is, the sample is first loaded to a certain strain, and then characterized after unloading. This actually changes the stress state of the material during real-time observation, and it is extremely inconvenient to re-determine the corresponding area, which makes it difficult to meet the needs of flexible experiments and precise observations. Summary of the invention

[0003] The purpose of the present invention is to provide an EBSD in-situ observation device, which has a simple structure and can maintain the loading state during the experiment and in-situ observe the microstructure changes of the sample during the compression experiment.

[0004] In order to achieve the above object, the technical solution adopted by the present invention is as follows: An EBSD in-situ observation device comprises a base and two sliding components slidably connected in a slide groove of the base; a single sliding component comprises a ball screw and a slider correspondingly connected to a thread on an outer wall of the ball screw, the ball screw can rotate around its axis to drive the slider to perform a cyclic reciprocating motion in the slide groove of the base; a clamping groove corresponding to an end of a sample is provided on a surface of the slider facing away from the base.

[0005] Furthermore, two ends of the base in the length direction are connected to fixed seats, the first end of the ball screw is clamped and fixed on the fixed seat, and the second end of the ball screw is opposite to the second end of the ball screw of another sliding component.

[0006] Furthermore, the fixed seat includes a base plate and a plurality of side plates vertically connected to the base plate, the base plate and the side plates together form an installation cavity into which the end of the base in the length direction extends; the base plate is provided with a first through hole adapted to the first end of the ball screw, and the side plate is provided with a second through hole for a set screw to pass through; the ball screw includes a head and a rod, the position of the head serves as the first end of the ball screw, and the free end of the rod serves as the second end of the ball screw, a thread corresponding to the slider is provided on the outer wall of the rod, the outer diameter of the head is larger than the outer diameter of the rod, and the axial movement of the head of the ball screw is limited by screwing the set screw into the installation cavity of the fixed seat.

[0007] Furthermore, the first end of the ball screw is provided with a groove adapted to the rotating tool.

[0008] Furthermore, it also includes a positioning member arranged between the two sliding components, and a radial positioning hole corresponding to the ball screw is provided in the middle of the positioning member.

[0009] Furthermore, the outer wall of the positioning member is fitted with a sliding clearance with the inner wall of the slide groove of the base.

[0010] Furthermore, the base is connected with a pin body which matches the hole position on the sample chamber of the electron microscope.

[0011] The present invention has the following unexpected beneficial effects: 1. The present invention sets two sliding components in the slide groove of the base, and a single sliding component includes a ball screw and a slider corresponding to the thread on the outer wall of the ball screw. When the ball screw rotates, it can drive the slider to make a circular reciprocating motion along the slide groove of the base, so that the two sliders are close to or away from each other. When used specifically, the two ends of the sample are placed in the clamping groove of the slider and fixed, and then the ball screw of the single sliding component or the two sliding components is driven to rotate to perform tensile loading on the sample. After loading is completed, the EBSD in-situ observation device is clamped and fixed in the sample chamber of the electron microscope while maintaining the loading state, and the sample is analyzed. The EBSD in-situ observation device has a simple structure and a small size, and is suitable for experiments in the narrow sample chamber of the scanning electron microscope.

[0012] 2. In the present invention, two sliding components are arranged in the slide groove of the base. In conventional bolt unidirectional loading equipment, as the tensile strain increases, a large reaction force will be generated between the threaded nut to balance the tensile force on the sample, which is prone to locking. The present invention adopts a bidirectional loadable design, which can use another sliding component to load after one sliding component is loaded and locked, avoiding the problem of difficulty in loading the sample after locking, and facilitating the removal of the sample after the experiment is completed.

[0013] 3. Among the parts used in the EBSD in-situ observation device of the present invention, the only consumable part is the ball screw, which is easy to replenish and has a low cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 The schematic diagram of the structure of the EBSD in-situ observation device of the present invention is shown; Figure 2 A front view of the EBSD in-situ observation device of the present invention is shown; Figure 3 A side view of the EBSD in-situ observation device of the present invention is shown.

[0015] In the figure, 1 is a base, 11 is a slide groove, 2 is a ball screw, 3 is a slider, 31 is a clamping groove, 4 is a fixed seat, 41 is a bottom plate, 42 is a side plate, 43 is a first through hole, 5 is a positioning member, 6 is a pin body, and 7 is a set screw. DETAILED DESCRIPTION

[0016] The following will describe the embodiments of the present invention with reference to the accompanying drawings and preferred embodiments. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be understood that the preferred embodiments are only for illustrating the present invention, not for limiting the scope of protection of the present invention.

[0017] In one embodiment, an EBSD in-situ observation device, see Figures 1 to 3 As shown, the device includes a base 1 and two sliding components slidably connected to the slide groove 11 of the base 1; a single sliding component includes a ball screw 2 and a slider 3 correspondingly connected to the thread on the outer wall of the ball screw 2, and the ball screw 2 can rotate around its axis to drive the slider 3 to perform a cyclic reciprocating motion in the slide groove 11 of the base 1. The side surface of the slider 3 facing away from the base 1 is provided with a clamping groove 31 corresponding to the end of the sample.

[0018] The base 1 is the supporting structure of the entire device, providing a stable foundation so that other components can move and adjust accurately on this basis. The base 1 is designed with a slide groove 11, which is used to guide and limit the movement trajectory of the sliding component to ensure that the sliding component can reciprocate along a predetermined path.

[0019] The sliding assembly is a key component for realizing sample movement in the device. Each sliding assembly includes two parts: a ball screw 2 and a slider 3. The ball screw 2 is a precision transmission element that can convert rotational motion into linear motion. A thread is designed on the outer wall of the ball screw 2, and the thread corresponds to the thread inside the slider 3. When the ball screw 2 rotates, it can drive the slider 3 to move linearly along the trajectory of the thread. The slider 3 is the part of the sliding assembly that cooperates with the ball screw 2. The interior is designed with a thread corresponding to the thread of the ball screw 2, so that the slider 3 can reciprocate along the slide groove 11 driven by the ball screw 2. A clamping groove 31 is also provided on the side surface of the slider 3 that is away from the base 1, which is used to clamp the end of the sample, so that when the two sliding assemblies are away from each other, the sample can be tensile loaded.

[0020] The structural design of the EBSD in-situ observation device of the present invention is ingenious. The slide groove 11 is set in the base 1, and the sliding assembly is constructed by using the cooperation of the ball screw 2 and the slider 3. When the ball screw 2 rotates, based on the principle of thread transmission, it can accurately drive the slider 3 to perform cyclic reciprocating motion in the slide groove 11, and the clamping groove 31 on the slider 3 provides a reliable connection part for fixing the sample. In actual use, this transmission and connection method can effectively apply tensile loading force to the sample, and after loading is completed, it can be transferred to the electron microscope sample chamber with the loading state, which is convenient for the subsequent use of EBSD technology to observe and analyze the microstructure of the sample under stress in situ, which is helpful for a more in-depth study of the changes in related characteristics of the sample during the stress process.

[0021] In a preferred embodiment, see Figure 1 and Figure 2 As shown, the two ends of the base 1 in the length direction are connected to a fixed seat 4, the first end of the ball screw 2 is clamped and fixed on the fixed seat 4, and the second end of the ball screw 2 is opposite to the second end of the ball screw 2 of another sliding component.

[0022] By connecting the fixing seat 4 at the two ends in the length direction of the base 1, a stable clamping and fixing position is provided for the ball screw 2. On the one hand, the installation position of the ball screw 2 on the base 1 can be accurately determined, and its unnecessary displacement in the axial direction and other directions can be limited, so that the ball screw 2 can maintain a stable working state when rotating around the axis, thereby ensuring the accuracy and stability of the reciprocating motion of the slider 3 in the slide groove 11 of the base 1. On the other hand, making the second ends of the ball screws 2 of the two sliding components relative to each other helps to make the overall structural layout more regular and symmetrical. From a mechanical point of view, when the sample is subsequently subjected to tensile loading operations, the force distribution can be made more uniform and reasonable, avoiding adverse effects such as additional eccentric force due to structural asymmetry, ensuring that the tensile loading process can apply force to the sample uniformly as expected, and improving the reliability of the test data.

[0023] The existence of the fixed seat 4 is equivalent to providing a clear standard assembly position for the ball screw 2. When assembling the entire EBSD in-situ observation device, the operator can complete the installation of the ball screw more conveniently and accurately based on the structural characteristics of the fixed seat 4 and the matching relationship with the ball screw 2, thereby improving the assembly efficiency and assembly quality and reducing the possibility of problems in the subsequent operation of the device due to assembly errors.

[0024] If the ball screw 2 fails after long-term use or needs maintenance operations such as debugging or replacement, the setting of the fixed seat 4 makes it relatively easy to disassemble and reinstall it. The maintenance personnel can quickly locate and remove the ball screw 2 from the fixed seat 4 for corresponding processing. After the processing is completed, it can also be accurately installed according to the position of the fixed seat 4, ensuring that the entire device can be restored to normal working state quickly, reducing the maintenance difficulty and maintenance cost of the device.

[0025] This preferred embodiment improves the performance of the device as a whole. The stable ball screw installation structure helps to improve the movement accuracy of the slider, so that the displacement, force and other parameters of the sample can be more accurately controlled and measured during the tensile loading process after clamping and fixing, so that the data such as the microstructure change of the sample obtained by EBSD analysis can more accurately correspond to the applied tensile force and other conditions. At the same time, the uniform and reasonable force distribution is also conducive to extending the service life of the device, reducing problems such as excessive local wear of the structure caused by uneven force, ensuring that the device can operate stably and reliably during multiple tests, and continuously providing high-quality in-situ observation conditions for scientific research and other related work.

[0026] In a preferred embodiment, see Figures 1 to 3 As shown, the fixed seat 4 includes a bottom plate 41 and a plurality of side plates 42 vertically connected to the bottom plate 41. The bottom plate 41 and the side plates 42 together form a mounting cavity into which the end of the base 1 in the length direction extends; the bottom plate 41 is provided with a first through hole 43 adapted to the first end of the ball screw 2, and the side plates 42 are provided with a second through hole through which the set screw 7 passes. The ball screw 2 includes a head and a rod, with the position of the head as the first end of the ball screw 2, and the free end of the rod as the second end of the ball screw 2. The outer wall of the rod is provided with a thread corresponding to the slider 3. The outer diameter of the head is larger than the outer diameter of the rod. The set screw 7 is screwed into the mounting cavity of the fixed seat 4 to limit the axial movement of the head of the ball screw 2.

[0027] The fixing seat 4 is composed of a bottom plate 41 and a plurality of vertically connected side plates 42, which enclose a mounting cavity to accommodate the end of the base 1 in the length direction. This arrangement allows the fixing seat 4 and the base 1 to be tightly and stably combined. On the one hand, the multiple side plates 42 increase the overall structural strength of the fixing seat 1, so that it can better withstand the forces generated during the operation of the ball screw 2 and the tensile loading of the specimen, thereby ensuring the stability of the entire device structure. On the other hand, the form of the mounting cavity facilitates the accurate embedding of the end of the base 1, realizes positioning installation, and helps to improve the assembly accuracy of the entire device during assembly.

[0028] The first through hole 43 provided on the bottom plate 41 is adapted to the head of the ball screw 2, providing an accurate installation positioning point for the first end of the ball screw 2, ensuring that the initial position of the ball screw 2 in the axial direction is accurate. The second through hole on the side plate 43 is used to pass the set screw 7. Combined with the characteristic that the outer diameter of the head of the ball screw 2 is larger than the outer diameter of the rod, the axial movement of the head of the ball screw 2 can be effectively limited by screwing in the set screw 7. This matching method cleverly utilizes a simple mechanical structure to achieve reliable fixation of the axial position of the ball screw 2, ensuring that the ball screw 2 will not move axially when rotating around its own axis, so that the slider 3 connected thereto can perform a stable and accurate reciprocating motion in the slide groove 11 of the base 1 as expected, laying a foundation for stable tensile loading of the specimen.

[0029] The outer wall of the rod of the ball screw 2 is provided with a thread corresponding to the slider 3. This threaded connection method not only ensures reliable power transmission between the slider 3 and the ball screw 2, so that the rotational motion of the ball screw 2 can be accurately converted into the linear reciprocating motion of the slider 3, but also facilitates the adjustment of the position of the slider 3 according to actual needs and subsequent possible disassembly and maintenance operations. It is easy to operate and the connection is firm.

[0030] Due to the strict restriction of the axial movement of the ball screw 2 by the fixed seat 4 and the precise threaded connection between the ball screw 2 and the slider 3, the accuracy of the movement of the slider 3 in the slide groove 11 of the base 1 is greatly improved. When the sample is subjected to tensile loading, the slider 3 can move accurately according to the set stroke and speed, so that the tensile force, loading rate and other parameters of the sample can be more accurately controlled, thereby ensuring that the data such as the microstructure changes of the sample at different loading stages obtained by EBSD in-situ observation are more accurate and reliable, which helps researchers to conduct more in-depth and detailed material performance analysis.

[0031] The structure of the fixing seat 4 and its stable cooperation with the ball screw 2 enhance the stability of the entire device during operation. Whether in a single test or when the device is used for a long time, it can effectively resist adverse effects such as vibration and deviation caused by factors such as sample force and rotation of the ball screw 2, reduce the possibility of test errors and structural damage caused by device instability, extend the service life of the device, reduce maintenance costs during use, and ensure that the device can continuously and stably provide reliable sample loading conditions for EBSD in-situ observation.

[0032] During the assembly process, first insert the end of the base 1 into the installation cavity of the fixing seat 4 to achieve the preliminary positioning of the base 1 and the fixing seat 4, then pass the head of the ball screw 2 through the first through hole 43 of the bottom plate 41, and use the set screw 7 to pass through the second through hole of the side plate 43 to fix the ball screw 2. The operation process is clear and simple, and the positioning and connection methods between the various components are clear, which is convenient for the assemblers to quickly and accurately complete the assembly work of the device, thereby improving the assembly efficiency.

[0033] After the device has been running for a period of time, if the ball screw 2 needs to be maintained, replaced, or the connection between it and the fixed seat 4 needs to be checked and adjusted, the ball screw 2 can be easily removed from the fixed seat 4 by simply unscrewing the set screw 7, and the relevant parts can be repaired or replaced. As for the fixed seat 4 itself, since its structure is relatively simple and the connection relationship with the base 1 and other parts is clear, it is also easy to check and repair, which reduces the difficulty of maintenance of the device in the later stage as a whole, and is conducive to the long-term normal use of the device.

[0034] In a preferred embodiment, see Figure 3 As shown, the first end of the ball screw 2 is provided with a groove adapted to the rotating tool, so that the operator can apply external force to drive the ball screw 2 to rotate. Under normal circumstances, it may be difficult to rotate the ball screw 2 directly by hand and it is difficult to accurately control the parameters such as the angle and speed of rotation. However, due to the provision of the groove, a suitable rotating tool can be selected, such as an Allen wrench, a screwdriver (depending on the shape of the groove), etc., and inserted therein. With the help of the lever principle of the tool, the ball screw can be easily applied with a suitable torque, so that the operator can drive the ball screw 2 to rotate around its axis more labor-saving and efficiently, thereby driving the slider 3 to reciprocate in the slide groove 11 of the base 1, and realizing the tensile loading operation of the sample.

[0035] Compared with manual rotation, the rotation angle and speed of the ball screw 2 can be more accurately controlled by using a suitable rotating tool in combination with the groove. In some test scenarios that have strict requirements on the tensile loading of the sample, such as the need to stretch the sample at a specific loading rate and within a precise stroke range, the rotating tool can accurately control the rotation amount of the ball screw 2 each time, thereby ensuring that the distance and speed of the slider movement meet the preset test parameter requirements, improving the accuracy of the entire sample loading process, and ensuring that the data obtained by the subsequent EBSD in-situ observation can accurately reflect the true characteristics of the sample under the corresponding loading state.

[0036] Since the ball screw 2 can be rotated more conveniently and labor-savingly with the help of a rotating tool, the preliminary preparation work of tensile loading of the specimen can be completed quickly. The operator does not need to spend too much time and energy on driving the ball screw 2 to rotate, and can devote more energy to subsequent device clamping, electron microscope debugging, and attention to the results of specimen analysis, which speeds up the pace of the test and improves the test efficiency as a whole. Especially in test tasks that require repeated loading and observation of similar specimens, the advantage of this efficiency improvement will be more obvious.

[0037] The precise operation is due to the cooperation between the rotating tool and the groove, which means that each time different samples or multiple tests are performed on the same sample, as long as the same operating specifications are followed, the same rotating tool is used and the same rotation parameters are controlled, the rotation of the ball screw 2 can be basically consistent each time, and the tensile loading state of the slider 3 on the sample can also maintain a high degree of repeatability. In this way, the test results obtained by EBSD in-situ observation are more comparable, which is conducive to more rigorous comparative analysis and in-depth research on the microstructure change law of the sample under specific loading conditions.

[0038] In practical applications, different types of rotation tools can be flexibly selected according to different test requirements and site conditions. For example, for ball screw rotation that requires a large torque, a wrench-like tool with a suitable size and a long lever arm can be inserted into the groove to provide sufficient rotational force; and in some scenarios where the accuracy requirements are extremely high and the rotation angle needs to be finely controlled, tools such as special screwdrivers with scales can be used to facilitate the precise adjustment of the rotation angle of the ball screw 2. This flexibility enables the device to better adapt to the diverse scientific research test requirements and expands the scope of application of the device.

[0039] In a preferred embodiment, see Figure 1 and Figure 2 As shown, the device further comprises a positioning member 5 arranged between the two sliding components, and a radial positioning hole corresponding to the ball screw 2 is provided in the middle of the positioning member 5 .

[0040] The core function of the positioning member 5 disposed between the two sliding components is to accurately radially position the ball screw 2. The radial positioning hole in the middle portion corresponds to the ball screw 2 and can limit the displacement of the ball screw in the radial direction, further ensuring that the ball screw 2 always maintains an accurate and stable radial position during the process of rotating around its own axis and driving the slider 3 to reciprocate.

[0041] The positioning member 5 works in coordination with the aforementioned fixed seat 4 and other structures. The fixed seat 4 mainly fixes and positions the ball screw 2 from one end, while the positioning member 5 provides support and radial constraints between the two sliding components, so that the ball screw 2 can be effectively limited in the entire length direction, making its operation more stable and reliable. When the two sliding components work at the same time to perform tensile loading on the sample, its advantages can be particularly reflected, and it can ensure that the two ball screws 2 are consistent in radial direction and movement coordination, avoiding the situation where the sample is unevenly stressed due to the position deviation of a single ball screw 2, ensuring that the sample can be evenly subjected to tensile force, meeting the requirements of the test for loading accuracy.

[0042] Furthermore, the outer wall of the positioning member 5 is matched with the inner wall of the slide groove 11 of the base 1 in a sliding clearance. This matching mode is designed by comprehensively considering the positioning function of the positioning member 5 and its flexibility requirements during the operation of the device. On the one hand, the existence of the gap enables the positioning member 5 to move relatively smoothly in the slide groove 11, and will not generate excessive friction due to interference fit, thereby improving the assembly convenience of the positioning member. On the other hand, although there is a gap, it can still maintain a relative position relationship with the inner wall of the slide groove 11 within a reasonable design range, ensuring that there will be no excessive shaking, detachment from the slide groove, and other situations that affect its positioning function.

[0043] In a preferred embodiment, see Figures 1 to 3 As shown, the base 11 is fixedly connected with a pin body 6 that matches the hole position on the sample chamber of the electron microscope, so as to realize the accurate positioning of the EBSD in-situ observation device on the electron microscope sample stage. When the device is clamped and fixed to the sample chamber of the electron microscope, the pin body 6 can be accurately inserted into the corresponding hole position, just like a mortise and tenon structure. Through this mechanical matching method, the position of the device in the sample chamber is strictly limited from a physical level, avoiding the random movement and offset of the device in the horizontal direction (including the front and back, left and right dimensions) and to a certain extent in the vertical direction, so that the device can be in the same and accurate position every time it is installed on the sample chamber of the electron microscope.

[0044] This precise positioning is crucial for subsequent EBSD in-situ observations. Because only when the position of the device in the electron microscope is fixed and accurate can the observation angle, observation area and other parameters of the electron microscope be relatively stable and consistent each time the sample is observed. For example, if the operator needs to observe and compare a specific microstructure area on the sample multiple times, or analyze samples from different batches at the same position, the matching of the pin body and the hole position can ensure that the data obtained from each observation is comparable, and minimize the observation error caused by the difference in the installation position of the device, thereby providing a reliable basis for accurately analyzing the microstructure changes of the sample under different conditions.

[0045] Through the matching positioning of the pin body 6 and the hole of the electron microscope sample chamber, the electron microscope can focus more accurately on the target area of ​​the sample during EBSD in-situ observation, avoiding the need to frequently adjust the electron microscope parameters and re-search the observation area due to inaccurate device position. In this way, the observed microstructure image of the sample is clearer and more accurate, and the corresponding crystallographic information (such as grain orientation, grain boundary characteristics, etc.) is more reliable, which helps researchers to conduct in-depth research on the microscopic characteristics of materials and their changing laws under conditions such as force, and improves the quality of the entire scientific research analysis.

[0046] In actual operation, each time the EBSD in-situ observation device is installed on the electron microscope sample chamber, the operator no longer needs to spend a lot of time to manually calibrate the position of the device. It only needs to align the pin body 6 with the corresponding hole position for installation. The operation process is simple and fast, which greatly saves the time of clamping and fixing the device. Moreover, due to the accurate position fixation, subsequent electron microscope debugging and other related operations can also be carried out more smoothly, reducing the tedious steps of repeated debugging and confirmation due to the uncertainty of the device position, and improving the overall efficiency of the test operation. Especially when a large number of sample observations and analyses are required, the advantage of this efficiency improvement will be more obvious.

[0047] For electron microscopes of different models or specifications, as long as the hole position on the sample chamber can be matched with the pin body 6 on the base of the device, the EBSD in-situ observation device can be used on it more conveniently, without the need to carry out complex modification or redesign of the installation structure for each electron microscope. This versatility and compatibility enable the device to be used in a wider range of scientific research scenarios, expand its scope of application, and facilitate different scientific research teams to use the device to carry out EBSD in-situ observation work according to their own electron microscope equipment conditions.

[0048] The above embodiments are only preferred embodiments for fully illustrating the present invention, and the protection scope of the present invention is not limited thereto. Any equivalent substitution or change made by a person skilled in the art based on the present invention is within the protection scope of the present invention.

Claims

1. An EBSD in-situ observation device, characterized in that: It comprises a base (1) and two sliding components slidably connected to a sliding groove (11) of the base (1); A single sliding assembly comprises a ball screw (2) and a sliding block (3) correspondingly connected to a thread on an outer wall of the ball screw (2); the ball screw (2) is capable of rotating about its axis, driving the sliding block (3) to perform a cyclic reciprocating motion in a sliding groove (11) of the base (1); A clamping groove (31) corresponding to the end of the sample is provided on a surface of the sliding block (3) facing away from the base (1).

2. The EBSD in-situ observation device according to claim 1, characterized in that: Two ends of the base (1) in the length direction are connected to a fixed seat (4), a first end of the ball screw (2) is clamped and fixed on the fixed seat (4), and a second end of the ball screw (2) is located opposite to a second end of a ball screw (2) of another sliding assembly.

3. The EBSD in-situ observation device according to claim 2, characterized in that: The fixing seat (4) comprises a bottom plate (41) and a plurality of side plates (42) vertically connected to the bottom plate (41), wherein the bottom plate (41) and the side plates (42) together form a mounting cavity into which the end of the base (1) in the length direction extends; The bottom plate (41) is provided with a first through hole (43) adapted to the first end of the ball screw (2), and the side plate (42) is provided with a second through hole for allowing the set screw (7) to pass through; The ball screw (2) comprises a head and a rod, the head serves as the first end of the ball screw (2), and the free end of the rod serves as the second end of the ball screw (2). The outer wall of the rod is provided with a thread corresponding to the slider (3). The outer diameter of the head is greater than the outer diameter of the rod. By screwing a set screw (7) into the mounting cavity of the fixing seat (4), the axial movement of the head of the ball screw (2) is restricted.

4. The EBSD in-situ observation device according to claim 2, characterized in that: The first end of the ball screw (2) is provided with a groove adapted to the rotating tool.

5. The EBSD in-situ observation device according to claim 1, characterized in that: It also comprises a positioning member (5) arranged between the two sliding assemblies, wherein a radial positioning hole corresponding to the ball screw (2) is provided in the middle of the positioning member (5).

6. The EBSD in-situ observation device according to claim 5, characterized in that: The outer wall of the positioning member (5) and the inner wall of the sliding groove (11) of the base (1) are matched with each other in a sliding clearance.

7. The EBSD in-situ observation device according to claim 1, characterized in that: The base (1) is connected to a pin (6) which matches a hole on a sample chamber of an electron microscope.

Images