Luminous flux detector

Abstract

The present invention relates to a light flux detector, comprising a cavity, wherein the cavity has an inner cavity, and an inlet, an outlet and an air filling port are arranged on the cavity, wherein the air filling port is used to introduce a preset gas into the inner cavity; a first plate assembly and a first electron multiplier are arranged in the inner cavity, wherein the inlet, the first plate assembly and the outlet are arranged in sequence along the X-ray transmission direction; the first plate assembly comprises a first voltage plate and a first signal collection plate, both of which are located in a plane parallel to a horizontal plane and are arranged relatively along the Z direction; a positive voltage is applied to the first voltage plate to form an electric field between the first voltage plate and the first signal collection plate; the first signal collection plate comprises a first sawtooth plate and a second sawtooth plate, which are matched with each other and formed into a square plate, and the first sawtooth plate and the second sawtooth plate are insulated; the first electron multiplier is connected to the first sawtooth plate and the second sawtooth plate respectively, and is connected to a negative voltage; a signal collection and analysis device is arranged outside the cavity, which is connected to the first electron multiplier.

Description

Technical Field

[0001] The present invention relates to the technical field of X-ray light flux detection, and more specifically to a light flux detector. Background Art

[0002] In many fields where X-rays are used, such as soft X-ray free electron lasers, medical imaging, material science research, industrial non-destructive testing, and safety inspections, the detection of luminous flux is crucial. Luminous flux is one of the key indicators for measuring the luminous ability of a light source. It reflects the part of the radiation energy emitted by the X-ray source per unit time that can be sensed by the human eye or detector.

[0003] However, due to the special properties of X-rays, the measurement of their light flux is relatively complex. Traditional measurement methods often have problems such as insufficient accuracy and cumbersome operation, which cannot meet the needs of modern medical and industrial testing fields for high-precision and high-efficiency measurement. Summary of the invention

[0004] The object of the present invention is to provide a luminous flux detector to achieve high-precision and high-efficiency measurement of the luminous flux of X-rays.

[0005] Based on the above purpose, the present invention provides a light flux detector, including a cavity, the cavity has an inner cavity, and the cavity is provided with an inlet, an outlet and a gas filling port, the inlet is used for X-rays to be incident into the inner cavity, the outlet is used for X-rays to be emitted from the inner cavity, and the gas filling port is used to introduce a preset gas into the inner cavity; a first plate assembly and a first electron multiplier are provided in the inner cavity, and the inlet, the first plate assembly and the outlet are arranged in sequence along the X-ray transmission direction; the first plate assembly includes a first voltage plate and a first signal collection plate, and the first voltage plate and the first signal collection plate are both located The first signal collecting plate comprises a first sawtooth plate and a second sawtooth plate, the first sawtooth plate and the second sawtooth plate are matched with each other and formed into a square plate, and the first sawtooth plate and the second sawtooth plate are insulated from each other; the first electron multiplier is connected to the first sawtooth plate and the second sawtooth plate respectively, and is connected to a negative voltage; a signal collecting and analyzing device is provided outside the cavity, and the signal collecting and analyzing device is connected to the first electron multiplier;

[0006] The preset gas is used to ionize with X-rays to generate charged particles. The charged particles move to the first serrated plate and the second serrated plate under the action of the electric field between the first voltage plate and the first signal collection plate. The charged particles on the first serrated plate form a first current signal, and the charged particles on the second serrated plate form a second current signal. The first electron multiplier is used to perform original amplification on the first current signal and the second current signal. The signal collection and analysis device is used to collect the amplified first current signal and the amplified second current signal, and calculate the luminous flux of the X-rays.

[0007] Furthermore, the luminous flux of the X-ray satisfies the following relationship:

[0008]

[0009] Wherein, Ic is the sum of the first current signal and the second current signal, Flux is the luminous flux, μ is the linear absorption coefficient of the preset gas, is the length of the first signal collection electrode, E0 is the incident photon energy, which can be obtained in advance, w is the average ionization energy, For transformation efficiency.

[0010] Furthermore, the center line of the incident port is aligned with the center line of the first electrode plate assembly, and the signal acquisition and analysis device is also configured to determine a deviation value of the X-ray from the center line of the first electrode plate assembly along the X direction based on the amplified first current signal and the amplified second current signal.

[0011] Furthermore, the deviation value of the X-ray from the center line of the first electrode assembly along the X direction satisfies the following relationship:

[0012]

[0013]

[0014] Among them, x is the deviation value of the X-ray from the center line of the first electrode assembly along the X direction, B1 is the width of the first signal collection electrode, K1 is the first proportional coefficient, I1 is the amplified first current signal, and I2 is the amplified second current signal.

[0015] Furthermore, a second plate assembly and a second electron multiplier are also provided in the inner cavity, the signal acquisition and analysis device is connected to the second electron multiplier, and the center line of the second plate assembly is aligned with the center line of the first plate assembly; the second plate assembly is located between the first plate assembly and the exit; the second plate assembly includes a second voltage plate and a second signal acquisition plate, the second voltage plate and the second signal acquisition plate are both located in a plane perpendicular to the horizontal plane, a voltage is applied to the second voltage plate to form an electric field between the second voltage plate and the second signal acquisition plate; the second signal acquisition plate includes a third sawtooth plate and a fourth sawtooth plate, the third sawtooth plate and the fourth sawtooth plate are matched with each other and formed into a square plate, the third sawtooth plate and the fourth sawtooth plate are insulated, and the second electron multiplier is connected to the third sawtooth plate and the fourth sawtooth plate, respectively, and connected to a negative voltage;

[0016] The charged particles generated by the interaction between the preset gas and the X-rays move to the third serrated plate and the fourth serrated plate under the action of the electric field between the second voltage plate and the second signal collection plate, and form a third current signal on the third serrated plate, and a fourth current signal on the fourth serrated plate; the second electron multiplier is used to amplify the third current signal and the fourth current signal, and the signal collection and analysis device is used to collect the amplified third current signal and the amplified fourth current signal, and calculate the deviation value of the X-ray from the center line of the second plate assembly along the Z direction.

[0017] Furthermore, the deviation value of the X-ray from the center line of the second electrode assembly along the Z direction satisfies the following relationship:

[0018]

[0019]

[0020] Among them, z is the deviation value of the X-ray from the center line of the second electrode assembly along the Z direction, B2 is the width of the second signal collection electrode, K2 is the second proportional coefficient, I3 is the amplified third current signal, and I4 is the amplified fourth current signal.

[0021] Furthermore, a first adjustment mechanism and a second adjustment mechanism are further provided in the inner cavity, and the first adjustment mechanism is connected to the first voltage electrode plate and the first signal collection electrode plate, and is used to adjust the distance between the first voltage electrode plate and the first signal collection electrode plate;

[0022] The second adjustment mechanism is connected to the second voltage plate and the second signal collection plate, and is used to adjust the distance between the second voltage plate and the second signal collection plate.

[0023] Furthermore, in the process of adjusting the spacing, the center line of the first electrode plate assembly and the center line of the second electrode plate assembly remain unchanged.

[0024] Furthermore, the cavity is provided with a vacuum hole and a vacuum gauge.

[0025] Furthermore, the preset gas is nitrogen, argon, helium or xenon.

[0026] The light flux detector of the present invention can detect the light flux and position of X-rays online, and has the advantages of high detection accuracy, fast response time and high signal-to-noise ratio. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 is a schematic structural diagram of a light flux detector according to an embodiment of the present invention;

[0028] Figure 2 is a schematic structural diagram of a first electrode plate assembly of a light flux detector according to an embodiment of the present invention;

[0029] Figure 3 Schematic diagram of the structure of the second electrode plate assembly of the light flux detector according to an embodiment of the present invention. DETAILED DESCRIPTION

[0030] The preferred embodiments of the present invention are given below in conjunction with the accompanying drawings and described in detail.

[0031] In the present invention, the X direction is a direction in a horizontal plane perpendicular to the X-ray transmission direction, the Y direction is a direction in a horizontal plane parallel to the X-ray transmission direction, and the Z direction is a direction perpendicular to the horizontal plane.

[0032] like Figure 1As shown, an embodiment of the present invention provides a light flux detector, including a cavity 100, the cavity 100 has an inner cavity 110, and the cavity 100 is provided with an inlet 120, an outlet 130 and a gas filling port 140, the inlet 120 is used for X-rays to be incident into the inner cavity 110, the outlet 130 is used for X-rays to be emitted from the inner cavity 110, and the gas filling port 140 is used to pass a preset gas (such as nitrogen N2, argon Ar, helium He, xenon Xe, etc.) into the inner cavity 110, and a first electrode plate assembly 200 and a first electron multiplier assembly 200 are provided in the inner cavity 110. The amplifier 300, the incident port 120, the first electrode plate assembly 200 and the exit port 130 are sequentially arranged along the X-ray transmission direction, the first electrode plate assembly 200 includes a first voltage electrode plate 210 and a first signal collection electrode plate 220 of the same shape and size, the first voltage electrode plate 210 and the first signal collection electrode plate 220 are both located in a plane parallel to the horizontal plane (i.e., the XY plane), and the two are arranged opposite to each other along the Z direction, and a positive voltage is applied to the first voltage electrode plate 210 to form an electric field between the first voltage electrode plate 210 and the first signal collection electrode plate 220; Figure 2 As shown, the first signal collection plate 220 includes a first sawtooth plate 221 and a second sawtooth plate 222, the first sawtooth plate 221 and the second sawtooth plate 222 match each other and form a square plate, the first sawtooth plate 221 and the second sawtooth plate 222 are insulated, the first electron multiplier 300 is respectively connected to the first sawtooth plate 221 and the second sawtooth plate 222, and connected to a negative voltage, a signal collection and analysis device 400 is provided outside the cavity 100, and the signal collection and analysis device 400 is connected to the first electron multiplier 300; during measurement, the X-ray can enter the inner cavity 110 from the incident port 120, pass between the first voltage plate 210 and the first signal collection plate 220, and then exit from the outlet The X-rays are emitted from the nozzle 130, and in the inner cavity 110, the preset gas will interact with the X-rays to produce ionization. The charged particles move to the first signal collection plate 220 under the action of the electric field between the first voltage plate 210 and the first signal collection plate 220. The charged particles moving on the first serrated plate 221 form a first current signal, and the charged particles moving on the second serrated plate 222 form a second current signal. The first electron multiplier 300 is used to amplify the first current signal and the second current signal. The signal collection and analysis device 400 can be a picoammeter measuring device, which is used to collect the amplified first current signal and the amplified second current signal, and calculate the luminous flux of the X-rays based on them.

[0033] The detector of the present invention can be applied to a soft X-ray free electron laser device and used for measuring the light flux of the soft X-ray free electron laser.

[0034] In some embodiments, the luminous flux satisfies the following relationship:

[0035] (1)

[0036] Where, Ic is the sum of the first current signal and the second current signal. For the selected electron multiplier, its magnification is known. Therefore, the sum of the first current signal and the second current signal can be obtained by dividing the sum of the amplified first current signal and the second current signal by the magnification. e is the electron charge, N is the number of electrons passing through a unit cross section per unit time, Flux is the luminous flux, μ(cm -1 ) is the linear absorption coefficient of the preset gas, l is the length of the first signal collection electrode 220, E0 is the incident photon energy, which can be obtained in advance, w is the average ionization energy, is the conversion efficiency (which is an empirical value, for example, can be taken as 10%).

[0037] According to formula (1), the calculation formula of luminous flux Flux can be obtained:

[0038] (2)

[0039] The linear absorption coefficient μ satisfies the following relationship:

[0040] (3)

[0041] Among them, μ m (cm 2 / g) is the mass absorption coefficient of the preset gas, R is the gas constant, T is the temperature, P is the gas pressure, and M is the gas molar mass.

[0042] When the photon energy E0 is 137.8eV, the mass absorption coefficient μ of N2, Ar, He, and Xe m , linear absorption coefficient μ, and average ionization energy w are shown in Table 1 below:

[0043] Table 1: Mass absorption coefficient μ of each gas m , linear absorption coefficient μ and average ionization energy w

[0044] .

[0045] In some embodiments, the center line of the incident port 130 is aligned with the center line of the first electrode plate assembly 200 (the center line is parallel to the Y direction and is located between the first voltage electrode plate 210 and the first signal collection electrode plate 220), and the signal collection and analysis device 400 can also be configured to determine the deviation value x of the X-ray from the center line of the first electrode plate assembly 200 along the X direction according to the amplified first current signal and the amplified second current signal, and the calculation formula is as follows:

[0046] (4)

[0047] Wherein, B1 is the width of the first signal collection electrode plate 220, K1 is the first proportionality coefficient, and the expression of K1 is as follows:

[0048] (5)

[0049] Among them, I1 is the amplified first current signal, I2 is the amplified second current signal, when I1=I2, x=0, indicating that the X-ray does not deviate from the center line of the first electrode plate assembly 200 along the X-direction, when I1>I2, x>0, indicating that the X-ray deviates from the center line of the first electrode plate assembly 200 along the X-direction and is closer to the first serrated plate 221, when I1<I2, x<0, indicating that the X-ray deviates from the center line of the first electrode plate assembly 200 along the X-direction and is closer to the second serrated plate 222.

[0050] In some embodiments, a second electrode plate assembly 500 and a second electron multiplier 600 may also be provided in the inner cavity 110, the second electron multiplier 600 is connected to the second electrode plate assembly 500, the signal acquisition and analysis device 400 is connected to the second electron multiplier 600, and the center line of the second electrode plate assembly 500 (the center line is located in the middle of the second voltage electrode plate 510 and the second signal acquisition electrode plate 520) is aligned with the center line of the first electrode plate assembly 200. The second electrode plate assembly 500 is located between the first electrode plate assembly 200 and the emission port 130. After passing through the first electrode plate assembly 200, the X-ray passes through the second electrode plate assembly 500 and is emitted from the emission port 130. The second electrode plate assembly 500 includes a second voltage electrode plate 510 and a second signal collection electrode plate 520 of the same shape and size. The second voltage electrode plate 510 and the second signal collection electrode plate 520 are both located in a plane perpendicular to the horizontal plane. A positive voltage is applied to the second voltage electrode plate 510 to form an electric field between the second voltage electrode plate 510 and the second signal collection electrode plate 520. Figure 3As shown, the second signal collection plate 520 includes a third sawtooth plate 521 and a fourth sawtooth plate 522, the third sawtooth plate 521 and the fourth sawtooth plate 522 match each other and form a square plate, and the third sawtooth plate 521 and the fourth sawtooth plate 522 are insulated; the second electron multiplier 600 is connected to the third sawtooth plate 521 and the fourth sawtooth plate 522 respectively, and connected to a negative voltage; the charged particles generated by the interaction between the preset gas and the X-ray will move to the second signal collection plate 520 under the action of the electric field between the second voltage plate 510 and the second signal collection plate 520, the charged particles moving on the third sawtooth plate 521 form a third current signal, and the charged particles moving on the fourth sawtooth plate 522 form a fourth current signal, the second electron multiplier 300 is used to amplify the third current signal and the fourth current signal, and the signal collection and analysis device 400 is used to collect the amplified third current signal and the fourth current signal, and calculate the deviation value z of the X-ray from the center line of the second plate assembly along the Z direction according to them, and the calculation formula is as follows:

[0051] (6)

[0052] Wherein, B2 is the width of the second signal collection electrode 520, K2 is the second proportional coefficient, and the expression of K2 is as follows:

[0053] (7)

[0054] Among them, I3 is the amplified first current signal, I4 is the amplified second current signal, when I3=I4, z=0, indicating that the X-ray does not deviate from the center line of the second electrode plate assembly 500 along the Z direction, when I3>I4, z>0, indicating that the X-ray deviates from the center line of the second electrode plate assembly 500 along the Z direction and is closer to the third serrated plate 521, when I3<I4, z<0, indicating that the X-ray deviates from the center line of the second electrode plate assembly 500 along the Z direction and is closer to the fourth serrated plate 522.

[0055] When x and z are determined, the position of the X-ray can also be determined. That is to say, the light flux detector of the present invention can detect the position of the X-ray in addition to the light flux of the X-ray.

[0056] The first electron multiplier 300 and the second electron multiplier 600 can both use existing electron multipliers. Electron multipliers usually include multiple parallel sensitive electrodes. After charged particles enter the electron multiplier, primary electrons are emitted. Then, after multiple emission stages (realized by each sensitive electrode), the multiplied electrons finally obtained are amplified geometrically as output signals. Due to the multi-stage electron emission multiplication, about 10 5 ~10 6It has a magnification of times and provides extremely high sensitivity, fast response and very low environmental noise signal compared to other photosensitive devices currently used to detect in the ultraviolet, visible and near-infrared regions, thereby realizing high-precision online detection of X-rays to determine light flux and position.

[0057] In some embodiments, the light flux detector may further include a first adjustment mechanism and a second adjustment mechanism, which are located in the inner cavity 110, and the first adjustment mechanism is connected to the first voltage plate 210 and the first signal collection plate 220, and is used to adjust the distance between the first voltage plate 210 and the first signal collection plate 220. When adjusting the distance, the center line of the first plate assembly 200 remains unchanged. For example, the first adjustment mechanism may include two first motion mechanisms, and the two first motion mechanisms are respectively connected to the first voltage plate 210 and the first signal collection plate 220, and respectively move the first voltage plate 210 and the first signal collection plate 220 along the Z direction, so as to adjust the distance between the first voltage plate 210 and the first signal collection plate 220. During the adjustment process, the two first motion mechanisms make the first voltage plate 210 and the first signal collection plate 220 approach or move away from each other, and the movement distance remains the same, so that the center line of the first plate assembly 200 can remain unchanged. The second adjustment mechanism is connected to the second voltage plate 510 and the second signal collection plate 520, and is used to adjust the distance between the second voltage plate 510 and the second signal collection plate 520. When adjusting the distance, the center line of the second plate assembly 500 remains unchanged. For example, the second adjustment mechanism may include two second motion mechanisms, which are respectively connected to the second voltage plate 510 and the second signal collection plate 520, and respectively move the second voltage plate 510 and the second signal collection plate 520 along the Z direction, so as to adjust the distance between the second voltage plate 510 and the second signal collection plate 520. During the adjustment process, the two second motion mechanisms move the second voltage plate 510 and the second signal collection plate 520 closer to or farther from each other, and the movement distance remains the same, so that the center line of the second plate assembly 500 can remain unchanged.

[0058] In some embodiments, the cavity 100 may be provided with a vacuum hole 150 , through which the inner cavity 110 may be evacuated. For example, a molecular pump may be connected to the vacuum hole 150 to evacuate the inner cavity 110 through the molecular pump.

[0059] In some embodiments, the incident port 120 and the incident port 130 may each be connected to a bellows as a transmission channel for X-rays, which can ensure both the transmission of X-rays and the vacuum environment of the inner cavity 110.

[0060] In some embodiments, the cavity 100 may be provided with an electronic interface, through which the first electrode plate assembly 200 and / or the second electrode plate assembly 500 can be connected to an external power source, thereby applying voltage to the first voltage plate 210 and / or the second voltage plate 510 .

[0061] In some embodiments, a vacuum gauge 160 may be further disposed on the cavity 100 , and the vacuum gauge 160 is used to measure the vacuum degree of the inner cavity 110 .

[0062] The light flux detector of the embodiment of the present invention can detect the light flux and position of X-rays (such as soft X-ray free electron laser) online (that is, when X-rays are emitted normally, the detection of the detector will not affect the normal operation of X-rays), and has the advantages of high detection accuracy, fast response time and high signal-to-noise ratio.

[0063] The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. The above embodiment of the present invention can also be modified in various ways. That is, all simple, equivalent changes and modifications made according to the claims and the description of the present invention fall within the scope of protection of the claims of the present invention. The contents not described in detail in the present invention are all conventional technical contents.

Claims

1. A light flux detector, characterized in that: The cavity comprises a cavity, the cavity has an inner cavity, an inlet, an outlet and a gas filling port are arranged on the cavity, the inlet is used for X-rays to enter the inner cavity, the outlet is used for X-rays to be emitted from the inner cavity, and the gas filling port is used to introduce a preset gas into the inner cavity; a first plate assembly and a first electron multiplier are arranged in the inner cavity, the inlet, the first plate assembly and the outlet are arranged in sequence along the X-ray transmission direction; the first plate assembly comprises a first voltage plate and a first signal collection plate, and the first voltage plate and the first signal collection plate are both located on a plane parallel to the horizontal plane The first signal collecting plate comprises a first sawtooth plate and a second sawtooth plate, the first sawtooth plate and the second sawtooth plate are matched with each other and formed into a square plate, and the first sawtooth plate and the second sawtooth plate are insulated from each other; the first electron multiplier is respectively connected to the first sawtooth plate and the second sawtooth plate, and is connected to a negative voltage; a signal collecting and analyzing device is provided outside the cavity, and the signal collecting and analyzing device is connected to the first electron multiplier; The preset gas is used to ionize with X-rays to generate charged particles. The charged particles move to the first serrated plate and the second serrated plate under the action of the electric field between the first voltage plate and the first signal collection plate. The charged particles on the first serrated plate form a first current signal, and the charged particles on the second serrated plate form a second current signal. The first electron multiplier is used to perform original amplification on the first current signal and the second current signal. The signal collection and analysis device is used to collect the amplified first current signal and the amplified second current signal, and calculate the luminous flux of the X-rays.

2. The light flux detector according to claim 1, characterized in that: The luminous flux of the X-ray satisfies the following relationship: ， Wherein, Ic is the sum of the first current signal and the second current signal, Flux is the luminous flux, μ is the linear absorption coefficient of the preset gas, is the length of the first signal collection electrode, E0 is the incident photon energy, which can be obtained in advance, w is the average ionization energy, For transformation efficiency.

3. The light flux detector according to claim 1, characterized in that: The center line of the incident port is aligned with the center line of the first electrode plate assembly, and the signal acquisition and analysis device is also configured to determine a deviation value of the X-ray from the center line of the first electrode plate assembly along the X direction based on the amplified first current signal and the amplified second current signal.

4. The light flux detector according to claim 3, characterized in that: The deviation value of the X-ray from the center line of the first electrode assembly along the X direction satisfies the following relationship: ， ， Among them, x is the deviation value of the X-ray from the center line of the first electrode assembly along the X direction, B1 is the width of the first signal collection electrode, K1 is the first proportional coefficient, I1 is the amplified first current signal, and I2 is the amplified second current signal.

5. The light flux detector according to claim 3, characterized in that: A second electrode plate assembly and a second electron multiplier are also provided in the inner cavity, the signal acquisition and analysis device is connected to the second electron multiplier, and the center line of the second electrode plate assembly is aligned with the center line of the first electrode plate assembly; The second electrode plate assembly is located between the first electrode plate assembly and the emission port; the second electrode plate assembly includes a second voltage electrode plate and a second signal collection electrode plate, the second voltage electrode plate and the second signal collection electrode plate are both located in a plane perpendicular to the horizontal plane, a voltage is applied to the second voltage electrode plate to form an electric field between the second voltage electrode plate and the second signal collection electrode plate; the second signal collection electrode plate includes a third sawtooth plate and a fourth sawtooth plate, the third sawtooth plate and the fourth sawtooth plate are matched with each other and formed into a square electrode plate, the third sawtooth plate and the fourth sawtooth plate are insulated, and the second electron multiplier is connected to the third sawtooth plate and the fourth sawtooth plate, respectively, and connected to a negative voltage; The charged particles generated by the interaction between the preset gas and the X-rays move to the third serrated plate and the fourth serrated plate under the action of the electric field between the second voltage plate and the second signal collection plate, and form a third current signal on the third serrated plate, and a fourth current signal on the fourth serrated plate; the second electron multiplier is used to amplify the third current signal and the fourth current signal, and the signal collection and analysis device is used to collect the amplified third current signal and the amplified fourth current signal, and calculate the deviation value of the X-ray from the center line of the second plate assembly along the Z direction.

6. The light flux detector according to claim 5, characterized in that: The deviation value of the X-ray from the center line of the second electrode assembly along the Z direction satisfies the following relationship: ， ， Among them, z is the deviation value of the X-ray from the center line of the second electrode assembly along the Z direction, B2 is the width of the second signal collection electrode, K2 is the second proportional coefficient, I3 is the amplified third current signal, and I4 is the amplified fourth current signal.

7. The light flux detector according to claim 5, characterized in that: The inner cavity is further provided with a first adjustment mechanism and a second adjustment mechanism, wherein the first adjustment mechanism is connected to the first voltage electrode plate and the first signal collection electrode plate and is used to adjust the distance between the first voltage electrode plate and the first signal collection electrode plate; The second adjustment mechanism is connected to the second voltage plate and the second signal collection plate, and is used to adjust the distance between the second voltage plate and the second signal collection plate.

8. The light flux detector according to claim 7, characterized in that: During the process of adjusting the spacing, the center line of the first electrode plate assembly and the center line of the second electrode plate assembly remain unchanged.

9. The light flux detector according to claim 1, characterized in that: The cavity is provided with a vacuum hole and a vacuum gauge.

10. The light flux detector according to claim 1, characterized in that: The preset gas is nitrogen, argon, helium or xenon.

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