A tail gas purification device for etching liquid production
By designing a movable sealing cover and fan housing structure, combined with the cooperation of the push trigger rod and the force-bearing inclined groove, the cumbersome disassembly problem in the existing equipment is solved, and efficient maintenance and replacement of the etching solution exhaust gas purification equipment is achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- 安瑞森(宿迁)电子材料有限公司
- Filing Date
- 2025-01-02
- Publication Date
- 2026-06-16
AI Technical Summary
Existing etching solution exhaust gas purification equipment requires a cumbersome step-by-step disassembly process when replacing and maintaining filter components and fan components, resulting in low efficiency.
A purification device was designed in which the movable sealing cover and the movable fan housing can be moved left and right by rotating the transmission screw to separate them from the fixed parts, which facilitates the replacement and maintenance of the activated carbon filter and the suction turbine. Combined with the cooperation of the push trigger rod and the force-bearing inclined groove, the disassembly process of the motor mounting base is simplified.
It improves the ease of replacement and maintenance of filter and fan components, simplifies the operation process, and enhances equipment maintenance efficiency.
Smart Images

Figure CN119793133B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of exhaust gas purification technology, and in particular to an exhaust gas purification device for etching solution production. Background Technology
[0002] The exhaust gas produced by etching solution usually contains a variety of harmful substances, which may have a negative impact on the environment and human health. In order to avoid the emission of etching solution exhaust gas from harming the environment and human health, purification equipment is usually required to purify the etching solution exhaust gas before emission.
[0003] In order to ensure the good operation and extend the service life of existing etching solution exhaust gas purification equipment, it is necessary to disassemble and replace or maintain the filter components and fan components of the purification equipment regularly. However, since the disassembly of filter components and fan components in existing purification equipment is mostly carried out in steps, tedious disassembly work needs to be completed before replacement and maintenance, which reduces the efficiency of equipment replacement and maintenance of filter components and fan components. Summary of the Invention
[0004] This disclosure relates to an embodiment of an etching solution production exhaust gas purification device. It connects a connecting pipe to the exhaust gas outlet of the etching solution production equipment, and then starts a fan motor to drive a suction turbine. The suction turbine extracts the exhaust gas by rotating. During the extraction process, the etching solution exhaust gas will preferentially flow through an activated carbon filter, which will purify the exhaust gas. Finally, the purified etching solution exhaust gas will be discharged, thus completing the treatment of the etching solution exhaust gas.
[0005] In a first aspect, this disclosure provides a tail gas purification device for etching solution production, specifically comprising: a purification base, wherein a transmission screw is rotatably mounted at the center of the purification base; a connecting pipe is fixedly mounted on the top left side of the purification base; a telescopic pipe is connected to the right end of the connecting pipe; a mounting slide is slidably mounted on the top left side of the purification base; a connecting pipe is fixedly mounted on the mounting slide; a movable sealing cover is fixedly mounted on the right side of the connecting pipe; a fixed sealing cover is fixedly mounted on the top of the purification base; an activated carbon filter is installed inside both the movable sealing cover and the fixed sealing cover; a fixed fan housing is fixedly mounted on the right side of the fixed sealing cover; a push trigger rod is fixedly mounted on the right side of the purification base; and a telescopic pipe is slidably mounted on the top right side of the purification base. The device includes an opening and closing sliding seat; a movable fan housing is fixedly installed on the left side of the opening and closing sliding seat; a motor mounting seat is placed on the top of the opening and closing sliding seat; limit insertion holes are opened on the front and rear sides of the motor mounting seat; a fan motor is fixedly installed on the top of the motor mounting seat; a docking groove is opened on the left side of the motor mounting seat; docking protrusions are fixedly installed on the front and rear sides of the top of the motor mounting seat; the docking groove is connected to the limit insertion hole; a limit insertion slider is slidably installed inside the docking protrusion; the outer end of the limit insertion slider is also inserted into the inside of the limit insertion hole; a force-bearing inclined groove is opened on the right side of the limit insertion slider; the inner end of the force-bearing inclined groove has an inclined structure; an embedded baffle is fixedly installed on the top of the limit insertion slider; and a push-through hole is opened on the right side of the motor mounting seat.
[0006] In at least some embodiments, the transmission screw has two opposite threads symmetrically arranged; the left end of the connecting pipe should be connected to the exhaust port of the etching solution production equipment; the mounting slide is connected to the thread on the left side of the transmission screw.
[0007] In at least some embodiments, the left end of the connecting pipe is connected to the right end of the telescopic pipe; the left end of the fixed sealing cover is connected to the right end of the movable sealing cover; and the opening and closing sliding seat is connected to the thread on the right side of the transmission screw.
[0008] In at least some embodiments, a suction turbine is rotatably mounted inside the movable fan housing; the output shaft of the fan motor is connected to the suction turbine inside the movable fan housing via a spline; and the docking protrusion is also slidably connected to the motor mounting base via a docking groove.
[0009] In at least some embodiments, one end of the restoring spring is embedded in the outer side of the mounting baffle; the other end of the restoring spring is embedded in the interior of the mating protrusion; and the pushing through hole is connected to the force-bearing groove.
[0010] In at least some embodiments, when the transmission screw rotates, the transmission screw uses two opposite threads to drive the mounting slide and the opening / closing slide to slide outwards relative to each other.
[0011] In at least some embodiments, when the mounting slide slides to the left, it also moves the connecting pipe and the movable sealing cover to the left; after the movable sealing cover moves to the left, the activated carbon filter element is exposed from the inside of the fixed sealing cover.
[0012] In at least some embodiments, when the opening and closing sliding seat moves to the right, the left end of the push trigger rod passes through the push through hole and inserts into the interior of the force-bearing inclined groove.
[0013] In at least some embodiments, after the left end of the push trigger rod enters the interior of the force-bearing inclined groove, the left end of the push trigger rod will push against the inclined surface of the force-bearing inclined groove.
[0014] In at least some embodiments, the inclined surface of the force-bearing groove will move inward along with the limiting plug slider after being pushed; after the limiting plug slider moves inward, the outer end of the limiting plug slider will disengage from the inside of the limiting plug hole.
[0015] This invention provides a tail gas purification device for etching solution production, which has the following beneficial effects:
[0016] 1. This purification equipment features a movable sealing cover and a movable fan housing. By simply rotating the operating screw, the operator can control the relative left and right movement of the movable sealing cover and the movable fan housing. The movable sealing cover separates from the fixed sealing cover by moving to the left, making it easy for the operator to remove and replace the activated carbon filter inside the fixed sealing cover. At the same time, the movable fan housing separates from the fixed fan housing by moving to the right, exposing the suction turbine inside the movable fan housing for easy inspection and maintenance.
[0017] 2. During the process of the movable fan casing moving to the right and separating itself from the fixed fan casing, the push trigger rod will also cooperate with the force-bearing inclined groove to disengage the limit plug slider from the inside of the limit plug hole. This eliminates the rigid connection between the motor mounting base and the opening and closing sliding seat, making it easier for staff to disassemble the motor mounting base and the fan motor on it. This facilitates the disassembly, replacement, or maintenance of the fan motor, improving the ease of maintenance for the fan components.
[0018] 3. This purification equipment combines the opening of the movable sealing cover with the opening of the movable fan casing, achieving simultaneous operation and improving the ease of operation for these two periodic tasks. Attached Figure Description
[0019] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings of the embodiments will be briefly described below.
[0020] The accompanying drawings described below are only related to some embodiments of the invention and are not intended to limit the invention.
[0021] In the attached diagram:
[0022] Figure 1 This diagram shows the structure of the movable sealing cover and movable fan housing in the closed state of this application;
[0023] Figure 2 This application shows Figure 1 Enlarged structural diagram of section A;
[0024] Figure 3 This paper shows a schematic diagram of the structure of the movable sealing cover and the movable fan housing in the open state of this application;
[0025] Figure 4 This application shows Figure 1 Another perspective structural diagram;
[0026] Figure 5 This paper shows a half-sectional schematic diagram of the movable sealing cover and the fixed sealing cover of this application;
[0027] Figure 6 A schematic diagram of the opening and closing sliding seat and the fan motor structure of this application is shown;
[0028] Figure 7 This invention relates to a schematic diagram showing the disassembled structure of the active fan housing and motor mounting base.
[0029] Figure 8 A schematic diagram of a half-section of the motor mounting bracket of this application is shown;
[0030] List of reference numerals
[0031] 1. Purification base; 2. Drive screw; 3. Connecting pipe; 4. Telescopic pipe; 5. Mounting slide; 6. Connecting pipe; 7. Movable sealing cover; 8. Fixed sealing cover; 9. Activated carbon filter element; 10. Fixed fan casing;
[0032] 11. Push trigger rod; 12. Opening and closing sliding seat; 13. Movable fan housing; 14. Motor mounting base; 15. Limiting insertion hole; 16. Fan motor; 17. Connecting slide groove; 18. Connecting protrusion; 19. Limiting insertion slider; 20. Force-bearing inclined groove;
[0033] 21. Embedded baffle; 22. Restoring spring; 23. Push-pull perforation. Detailed Implementation
[0034] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the described embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0035] Please refer to Figures 1 to 8 : Example 1:
[0036] This invention proposes a tail gas purification device for etching solution production, comprising: a purification base 1, a transmission screw 2 rotatably mounted at the center of the purification base 1; a connecting pipe 3 fixedly mounted on the top left side of the purification base 1; a telescopic pipe 4 connected to the right end of the connecting pipe 3; a mounting slide 5 slidably mounted on the top left side of the purification base 1; a connecting pipe 6 fixedly mounted on the mounting slide 5; a movable sealing cover 7 fixedly mounted on the right side of the connecting pipe 6; a fixed sealing cover 8 fixedly mounted on the top of the purification base 1; an activated carbon filter 9 jointly installed inside the movable sealing cover 7 and the fixed sealing cover 8; a fixed fan housing 10 fixedly mounted on the right side of the fixed sealing cover 8; a push trigger rod 11 fixedly mounted on the right side of the purification base 1; and an opening and closing sliding seat 12 slidably mounted on the top right side of the purification base 1. A movable fan housing 13 is fixedly installed on the left side of the 2; a motor mounting base 14 is placed on the top of the opening and closing sliding seat 12; limit insertion holes 15 are opened on the front and rear sides of the motor mounting base 14; a fan motor 16 is fixedly installed on the top of the motor mounting base 14; a docking groove 17 is opened on the left side of the motor mounting base 14; docking protrusions 18 are fixedly installed on the front and rear sides of the top of the motor mounting base 14; the docking groove 17 is connected to the limit insertion hole 15; a limit insertion slider 19 is slidably installed inside the docking protrusion 18; the outer end of the limit insertion slider 19 is also inserted into the inside of the limit insertion hole 15; a force-bearing inclined groove 20 is opened on the right side of the limit insertion slider 19; the inner end of the force-bearing inclined groove 20 is inclined; an embedded baffle 21 is fixedly installed on the top of the limit insertion slider 19; a push-through hole 23 is opened on the right side of the motor mounting base 14.
[0037] By connecting the connecting pipe 3 to the exhaust port of the etching solution production equipment, and then starting the fan motor 16, the fan motor 16 drives the suction turbine to run, and the suction turbine extracts the exhaust gas by rotating. During the extraction process, the exhaust gas of the etching solution will first flow through the activated carbon filter 9, so that the activated carbon filter 9 will purify the exhaust gas of the etching solution. Finally, the purified exhaust gas of the etching solution will be discharged, thus completing the treatment of the exhaust gas of the etching solution.
[0038] In Example 2, based on Example 1, two opposite threads are symmetrically arranged on the transmission screw 2; the left end of the connecting pipe 3 should be connected to the exhaust port of the etching solution production equipment; the mounting slide 5 is connected to the thread on the left side of the transmission screw 2; the left end of the connecting pipe 6 is connected to the right end of the telescopic pipe 4; the left end of the fixed sealing cover 8 is connected to the right end of the movable sealing cover 7; the opening and closing sliding seat 12 is connected to the thread on the right side of the transmission screw 2; a suction turbine is rotatably installed inside the movable fan housing 13; the output shaft of the fan motor 16 is connected to the suction turbine inside the movable fan housing 13 through a spline; the docking protrusion 18 is also slidably connected to the motor mounting seat 14 through the docking groove 17; one end of the restoring spring 22 is embedded in the outer side of the embedded baffle 21; the other end of the restoring spring 22 is embedded in the inside of the docking protrusion 18; the pushing through hole 23 is connected to the force-bearing inclined groove 20.
[0039] When the activated carbon filter element 9 needs to be replaced, the transmission screw 2 is manually rotated, causing the mounting slide 5, connecting pipe 6 and movable sealing cover 7 to move to the left under the action of the left thread. This causes the movable sealing cover 7 to separate from the fixed sealing cover 8, thereby exposing the activated carbon filter element 9 inside the fixed sealing cover 8, making it easier for staff to remove and replace the activated carbon filter element 9.
[0040] In Example 3, based on Example 2, when the transmission screw 2 rotates, it uses two opposite threads to slide the mounting slide 5 and the opening / closing slide 12 outwards relative to each other. When the mounting slide 5 slides to the left, it also moves the connecting pipe 6 and the movable sealing cover 7 to the left. After the movable sealing cover 7 moves to the left, the activated carbon filter 9 is exposed from the inside of the fixed sealing cover 8. When the opening / closing slide 12 moves to the right, the left end of the push trigger rod 11 passes through the push through hole 23 and inserts into the inside of the force-receiving inclined groove 20. After the left end of the push trigger rod 11 enters the inside of the force-receiving inclined groove 20, it pushes the inclined surface of the force-receiving inclined groove 20. After being pushed, the inclined surface of the force-receiving inclined groove 20 moves inwards along with the limiting insertion slider 19. After the limiting insertion slider 19 moves inwards, the outer end of the limiting insertion slider 19 disengages from the inside of the limiting insertion hole 15.
[0041] When the transmission screw 2 rotates, it also uses the threads on its right side to move the opening and closing sliding seat 12 and the movable fan housing 13 to the right. This allows the movable fan housing 13 to separate from the fixed fan housing 10, facilitating the inspection and maintenance of the suction turbine inside the fixed fan housing 10. After the opening and closing sliding seat 12 moves to a certain position to the right, the push trigger rod 11 passes through the push through hole 23 and inserts into the inner cavity of the force-bearing inclined groove 20. This push trigger rod 11 pushes against the inclined surface of the force-bearing inclined groove 20, causing the force-bearing inclined groove 20 to move inward along with the limit insertion slider 19. This causes the limit insertion slider 19 to disengage from the inside of the limit insertion hole 15, thus removing its positioning of the motor mounting seat 14. This facilitates the disassembly, replacement, or maintenance of the fan motor 16.
[0042] The working principle of this embodiment:
[0043] In use, the connecting pipe 3 is connected to the exhaust port of the etching solution production equipment. Then, the blower motor 16 is started, causing the blower motor 16 to drive the suction turbine. The suction turbine extracts the exhaust gas by rotating. During the extraction process, the exhaust gas of the etching solution will preferentially flow through the activated carbon filter 9, which purifies the exhaust gas. Finally, the purified exhaust gas is discharged, thus completing the treatment of the etching solution exhaust gas. When the activated carbon filter 9 needs to be replaced, the transmission screw 2 is manually rotated, causing it to move the mounting slide 5, connecting pipe 6, and movable sealing cover 7 to the left under the action of the left thread. This causes the movable sealing cover 7 to separate from the fixed sealing cover 8, exposing the activated carbon filter 9 inside the fixed sealing cover 8, making it easier for the staff to remove the activated carbon filter 9. When the transmission screw 2 rotates, it will also use the right-side threads to move the opening and closing sliding seat 12 and the movable fan housing 13 to the right, so that the movable fan housing 13 can be separated from the fixed fan housing 10 by moving to the right. This makes it easier for the staff to inspect and maintain the suction turbine inside the fixed fan housing 10. After the opening and closing sliding seat 12 moves to a certain position to the right, the push trigger rod 11 will pass through the push through hole 23 and insert into the inner cavity of the force-bearing inclined groove 20. This push trigger rod 11 will push against the inclined surface of the force-bearing inclined groove 20, causing the force-bearing inclined groove 20 to move inward with the limit insertion slider 19. This will cause the limit insertion slider 19 to disengage from the inside of the limit insertion hole 15, thus canceling the positioning of the limit insertion slider 19 on the motor mounting seat 14. This makes it easier for the staff to disassemble the fan motor 16 and facilitate the replacement or maintenance of the fan motor 16.
[0044] The following points should be noted in this article:
[0045] 1. The accompanying drawings of the embodiments disclosed herein only relate to the structures involved in the embodiments disclosed herein; other structures can be referred to in general design.
[0046] 2. Where there is no conflict, the embodiments of this disclosure and the features in the embodiments can be combined with each other to obtain new embodiments.
[0047] The above are merely specific embodiments of this disclosure, but the scope of protection of this disclosure is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this disclosure should be included within the scope of protection of this disclosure. Therefore, the scope of protection of this disclosure should be determined by the scope of the claims.
Claims
1. A tail gas purification device for etching solution production, comprising: A purification base (1) is provided, with a transmission screw (2) rotatably mounted in the center of the interior of the purification base (1); a connecting pipe (3) is fixedly mounted on the top left side of the purification base (1); a telescopic pipe (4) is connected to the right end of the connecting pipe (3); characterized in that a mounting slide (5) is slidably mounted on the top left side of the purification base (1); a connecting pipe (6) is fixedly mounted on the mounting slide (5); a movable sealing cover (7) is fixedly mounted on the right side of the connecting pipe (6); a fixed sealing cover (8) is fixedly mounted on the top of the purification base (1); activated carbon filter elements (9) are installed inside both the movable sealing cover (7) and the fixed sealing cover (8); and a telescopic pipe (4) is fixedly mounted on the right side of the fixed sealing cover (8). A fixed fan housing (10) is provided; a push trigger rod (11) is fixedly installed on the right side of the purification base (1); an opening and closing sliding seat (12) is slidably installed on the top right side of the purification base (1); a movable fan housing (13) is fixedly installed on the left side of the opening and closing sliding seat (12); a motor mounting seat (14) is placed on the top of the opening and closing sliding seat (12); limit insertion holes (15) are opened on the front and rear sides of the motor mounting seat (14); a fan motor (16) is fixedly installed on the top of the motor mounting seat (14); a docking groove (17) is opened on the left side of the motor mounting seat (14); docking protrusions (18) are fixedly installed on the front and rear sides of the top of the motor mounting seat (14); the docking groove (17) and The limiting insertion hole (15) is connected; the limiting insertion slider (19) is slidably installed inside the docking protrusion (18); the outer end of the limiting insertion slider (19) is also inserted into the limiting insertion hole (15); a force-bearing groove (20) is opened on the right side of the limiting insertion slider (19); the inner end of the force-bearing groove (20) is inclined; an embedded baffle (21) is fixedly installed on the top of the limiting insertion slider (19); a push-through hole (23) is opened on the right side of the motor mounting base (14); two opposite threads are symmetrically opened on the transmission screw (2); the left end of the connecting pipe (3) should be connected to the exhaust port of the etching solution production equipment; the mounting slide (5) and the threads on the left side of the transmission screw (2) The left end of the connecting pipe (6) is connected to the right end of the telescopic pipe (4); the left end of the fixed sealing cover (8) is connected to the right end of the movable sealing cover (7); the opening and closing sliding seat (12) is connected to the thread on the right side of the transmission screw (2); the suction turbine is rotatably installed inside the movable fan housing (13); the output shaft of the fan motor (16) is connected to the suction turbine inside the movable fan housing (13) through a spline; the docking protrusion (18) is also slidably connected to the motor mounting seat (14) through the docking groove (17); one end of the restoring spring (22) is embedded in the outer side of the embedded baffle (21); the other end of the restoring spring (22) is embedded in the inside of the docking protrusion (18);The push-through hole (23) is connected to the force-receiving inclined groove (20); when the transmission screw (2) rotates, the transmission screw (2) will use two opposite threads to carry the mounting slide (5) and the opening and closing slide (12) to slide outwards relative to each other; when the mounting slide (5) slides to the left, it will also carry the connecting pipe (6) and the movable sealing cover (7) to the left; after the movable sealing cover (7) moves to the left, the activated carbon filter (9) will be exposed from the inside of the fixed sealing cover (8); when the opening and closing slide (12) moves to the right, the left end of the push-trigger rod (11) will pass through the push-through hole (23) and insert into the inside of the force-receiving inclined groove (20); after the left end of the push-trigger rod (11) enters the inside of the force-receiving inclined groove (20), the left end of the push-trigger rod (11) will push against the inclined surface of the force-receiving inclined groove (20).
2. The tail gas purification equipment for etching solution production according to claim 1, characterized in that, When the inclined surface of the force-bearing groove (20) is pushed, it will move inward along with the limiting plug-in slider (19); after the limiting plug-in slider (19) moves inward, the outer end of the limiting plug-in slider (19) will disengage from the inside of the limiting plug hole (15).