Device and method for measuring angle of inner surface of optical device in high-speed optical module

Abstract

The invention discloses a device and method for measuring the angle of the inner surface of an optical device in a high-speed optical module, and the device comprises a vibration isolation platform which is provided with a light receiving positioning plate pedestal, an installation pedestal, a visual recognition unit, and a light receiving positioning plate. A laser output head, a telecentric objective lens and a multi-axis adjusting coupling frame used for adjusting the relative position between the laser output head and the telecentric objective lens are arranged on the light receiving positioning plate base, and a multi-axis adjusting unit and a metal piece fixing clamp connected to the displacement end of the multi-axis adjusting unit are arranged on the mounting base; an avoiding hole is formed in the light receiving positioning plate, and light beams emitted by the laser output head are focused through the telecentric objective lens, penetrate through the avoiding hole and then are transmitted to a metal piece located in the metal piece fixing clamp. And the light beam passes through the central hole of the metal piece, is reflected by the surface of the ceramic or glass device in the metal piece and then is received by the light receiving positioning plate. The angle of the inner surface of the optical device is calculated, and meanwhile the positions of the high side and the low side are judged.

Description

Technical Field

[0001] The present invention belongs to the technical field of optical modules, and in particular relates to a device and method for measuring the inner surface angle of an optical device in a high-speed optical module. Background Art

[0002] With the vigorous development of artificial intelligence technology, the demand for computing power in its applications has exploded. Against this background, the construction scale of data centers and supercomputing centers has continued to expand, which has directly promoted the continued expansion of the high-speed optical module market. In recent years, the global demand for high-speed optical modules has risen sharply, and accordingly, the demand for various optical devices as core components of high-speed optical modules has also become increasingly strong.

[0003] In optical devices, the receiver's structural characteristics cause its ferrule to be encapsulated inside a metal part. This special structural design brings about a detection problem: if traditional detection methods such as microscopes are used, it is impossible to effectively observe and measure its end face angle and the position of the high side. In particular, in certain application scenarios, the receiver needs to be docked with the FSI isolator, which requires accurate knowledge of the angle of its internal surface and the high and low side position information to ensure the correctness of the docking direction. However, the industry currently does not have a mature detection device that can reliably measure the angle parameters and high and low side positions of the ferrule inside the metal part of the receiver.

[0004] Therefore, it is urgent to develop a device for measuring the inner surface angle of an optical device in a high-speed optical module to solve the above technical problems. Summary of the invention

[0005] The technical problem to be solved by the present invention is to provide a device and method for measuring the angle of the inner surface of an optical device in a high-speed optical module in response to the technical defects existing in the prior art. The device and method can use the CCD vision to identify the position and angle of reflected light, thereby calculating the angle of the inner surface of the optical device and determining the position of its high side and low side.

[0006] The technical solution adopted by the present invention to solve its technical problems is: the present invention discloses a device for measuring the inner surface angle of an optical device in a high-speed optical module, comprising an isolation platform, on which a light receiving positioning plate base, a mounting base and a visual recognition unit are arranged, a light receiving positioning plate is arranged between the light receiving positioning plate base and the mounting base, and the light receiving positioning plate is located within the imaging range of the visual recognition unit; a laser output head, a telecentric objective lens and a multi-axis adjustment coupling frame for adjusting the relative position between the laser output head and the telecentric objective lens are arranged on the light receiving positioning plate base, a multi-axis adjustment unit and a metal part fixing fixture connected to the displacement end of the multi-axis adjustment unit are arranged on the mounting base; an avoidance hole is arranged on the light receiving positioning plate, a light beam emitted by the laser output head is focused by the telecentric objective lens and passes through the avoidance hole and is then transmitted to the metal part located in the metal part fixing fixture, the light beam passes through the center hole of the metal part and is reflected by the surface of the ceramic or glass device inside the metal part and is received by the light receiving positioning plate.

[0007] In a preferred embodiment of the present invention, the multi-axis adjustment coupling frame includes a base plate, on which is arranged a fixed vertical plate, a first plate connected to the vertical plate and a second plate displaceable along the X-axis, the first plate is provided with the laser output head displaceable along the Z-axis and the Y-axis, the vertical plate is provided with a spiral top rod for realizing the rotation of the first plate around the Z-axis, and the second plate is provided with the telecentric objective lens.

[0008] In a preferred embodiment of the present invention, the multi-axis adjustment unit includes a plate that can be displaced along the axial direction of the metal part, and the plate is provided with an electric rotating table that can rotate around the central axis of the metal part. The electric rotating table is connected to a multi-dimensional adjustment frame, and the movable end of the multi-dimensional adjustment frame is connected to the metal part fixing clamp.

[0009] In a preferred embodiment of the present invention, the multidimensional adjustment frame includes an X-axis linear slide module and / or a Y-axis straight slide module and / or a Z-axis straight slide module and / or an X-axis rotation module and / or a Y-axis rotation module and / or a Z-axis rotation module, and the X-axis is the central axis direction of the optical fiber.

[0010] In a preferred embodiment of the present invention, the metal part fixing fixture includes a base plate for connecting the multi-dimensional adjustment frame and a cover plate connected to the base plate, and the base plate and the cover plate are correspondingly provided with optical fiber semicircular limiting grooves and metal part limiting grooves.

[0011] In a preferred embodiment of the present invention, the base plate and the cover plate are both detachably connected to a positioning block, and the positioning block is provided with a metal limiting groove.

[0012] In a preferred embodiment of the present invention, magnets arranged with corresponding displacements are provided on the base plate and the cover plate.

[0013] In a preferred embodiment of the present invention, a plurality of positioning pins are provided on the base of the light-collecting positioning plate, and positioning holes cooperating with the positioning pins are provided on the light-collecting positioning plate.

[0014] In a preferred embodiment of the present invention, the visual recognition unit includes a CCD and a display, a ring light source is arranged on the lens of the CCD, and the display is connected to the CCD.

[0015] The present invention also discloses a method for using a device for measuring the angle of the inner surface of an optical device in a high-speed optical module, which comprises placing a 0° plane standard device in a metal fixture, and adjusting the reflected light to return to the center of a light-receiving positioning plate through a multi-axis adjustment unit; moving the 0° plane standard device outward along the multi-axis adjustment unit by a preset distance ΔL and adjusting the reflected light to return along the original path, ensuring that the far-field and near-field moving axes of the multi-axis adjustment unit are perpendicular to the plane of the light-receiving positioning plate; rotating the 0° plane standard device 360° and adjusting the multi-axis adjustment unit so that the reflected light spot remains in the center of the light-receiving positioning plate, ensuring that the rotation axis is perpendicular to the plane of the light-receiving positioning plate; placing the optical device to be measured in a calibrated metal fixture; setting the distance L between the inner surface of the optical device to be measured and the light-receiving positioning plate; using a CCD to obtain the position information of the reflected light spot on the light-receiving positioning plate; measuring the distance r from the reflected light spot to the center of the light-receiving positioning plate; and calculating the angle of the inner surface of the optical device based on the preset distance L and the measured distance r. ;

[0016] The azimuth angle of the reflected light spot on the light receiving positioning plate is obtained through the CCD detector; the high side position and the low side position of the inner surface of the optical device are determined according to the azimuth angle of the reflected light spot; the calculated angle value and the high and low side position information are displayed on the display.

[0017] The beneficial effect of the present invention is that the present invention realizes the accurate measurement of the angle of the inner surface of the metal part and the position of the high and low sides in the high-speed optical module by setting up the optical device inner surface angle measurement device based on CCD visual recognition. The device overcomes the technical difficulty that the traditional microscope and other detection methods cannot effectively observe the inner core of the metal part, and provides a reliable detection method for the assembly and quality control of the high-speed optical module.

[0018] The present invention establishes a complete optical path measurement system by arranging a light receiving positioning plate, a multi-axis adjustment unit and a CCD detection system on the isolation platform. The light beam focused by the telecentric objective lens is received by the light receiving positioning plate after being reflected by the inner surface of the metal part. Combined with CCD visual recognition technology, the position information of the reflected light spot can be accurately obtained. This solution can not only accurately calculate the angular parameters of the inner surface of the device, but also determine the high and low side positions by the orientation of the reflected light spot on the light receiving positioning plate, thereby providing accurate directional guidance for the subsequent docking with the FSI isolator.

[0019] In addition, the present invention adopts a combination design of a multi-axis adjustment coupling frame and a multi-dimensional adjustment frame to ensure the precise adjustment of the optical path and the flexible control of the device position during the measurement process. The detachable design of the metal fixture and the magnet positioning structure further improve the convenience and repeatability of the measurement operation. These innovative designs not only improve the measurement accuracy, but also significantly improve the measurement efficiency, meeting the urgent needs of the current high-speed optical module market for optical device detection.

[0020] The present invention not only solves the technical problem that the angle parameters of the core inside the metal part cannot be effectively measured in the prior art, but also provides an accurate, efficient and reliable measurement solution through systematic design, which has important practical significance for promoting the development of the high-speed optical module industry. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The present invention will be further described below with reference to the accompanying drawings and embodiments, in which: Figure 1 It is a schematic diagram of a device for measuring the inner surface angle of an optical device in a high-speed optical module of the present invention; Figure 2 It is a schematic diagram of a multi-axis adjustment coupling frame of a device for measuring the inner surface angle of an optical device in a high-speed optical module of the present invention; Figure 3 It is an enlarged schematic diagram of a multi-axis adjustment coupling frame of a device for measuring the inner surface angle of an optical device in a high-speed optical module of the present invention; Figure 4 It is a schematic diagram of a multi-axis adjustment unit of a device for measuring the inner surface angle of an optical device in a high-speed optical module of the present invention; Figure 5 It is a schematic diagram of a device for measuring the inner surface angle of an optical device in a high-speed optical module and a light receiving positioning plate of the present invention; Figure 6 It is a schematic diagram of a metal fixing fixture of a device for measuring the inner surface angle of an optical device in a high-speed optical module of the present invention; Figure 7 It is a schematic diagram of the optical path of a metal part of a device for measuring the inner surface angle of an optical device in a high-speed optical module of the present invention; Figure 8 It is a schematic diagram of a reflected light spot received by a light receiving positioning plate of a device for measuring the inner surface angle of an optical device in a high-speed optical module of the present invention; Fig. 9 It is a schematic diagram of a metal part in the prior art. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0023] Example 1 The specific embodiments of the present invention are described in detail below to provide a comprehensive understanding of the hollow-core optical fiber and solid-core optical fiber coupling device.

[0024] like Figure 1 As shown, the present invention discloses a device for measuring the inner surface angle of an optical device in a high-speed optical module, and its overall structure is arranged on a seismic isolation platform 2 to ensure that the measurement process is not affected by external vibrations. A light receiving positioning plate base 3, a mounting base 9 and a visual recognition unit are arranged on the seismic isolation platform 2. The light receiving positioning plate base 3 and the mounting base 9 are arranged at intervals along the X-axis direction. The visual recognition unit is located between the light receiving positioning plate base 3 and the mounting base 9, and they together constitute the basic support structure of the device. Among them, a light receiving positioning plate 7 is arranged between the light receiving positioning plate base 3 and the mounting base 9. The light receiving positioning plate 7 is precisely positioned within the imaging range of the visual recognition unit to ensure the accuracy of image acquisition.

[0025] like Figure 2-3 As shown, the present invention configures a laser optical path system on the base 3 of the light receiving positioning plate, including a visible laser source 1, a laser output head 4, and a telecentric objective lens 6. The visible laser source 1 is connected to the laser output head 4. The visible laser source 1 and the laser output head 4 can cooperate to output visible light with a small diameter and high collimation. Since most lasers are parallel light, they need to be focused by a telecentric objective lens 6 to make the spot size smaller and accurately hit the inner surface of the metal part. In order to achieve precise adjustment of the relative position between the laser output head 4 and the telecentric objective lens 6, a multi-axis adjustment coupling frame 5 is set. The structure of the multi-axis adjustment coupling frame 5 includes a base plate 5-1, which is fixed on the light receiving positioning plate base 3. The base plate 5-1 is provided with a fixed vertical plate 5-3, a first plate 5-2 connected to the vertical plate 5-3 and a second plate 5-4 that can be displaced along the X-axis. The vertical plate 5-3 is L-shaped, and the first plate 5-2 is provided with a laser output head 4 that can be displaced along the Z-axis and the Y-axis. The vertical plate 5-3 is provided with a spiral top rod 5-5 for realizing the rotation of the first plate 5-2 around the Z-axis. The spiral top rod 5-5 is provided at both ends of the vertical plate 5-3, and the second plate 5-4 is provided with a telecentric objective lens 6.

[0026] like Figure 4 As shown, a mechanism system for fixing and adjusting the position of the metal part 17 to be tested is provided on the mounting base 9. The system includes a multi-axis adjustment unit, the core component of which is a plate 16 that can be displaced along the axial direction of the metal part 17. An electric rotating table 15 is installed on the plate 16, which can make the metal part 17 rotate around its central axis. The electric rotating table 15 is connected to the multi-dimensional adjustment frame 13, and the multi-dimensional adjustment frame 13 is connected to the metal part fixing fixture 12. The design of the multi-dimensional adjustment frame 13 is very comprehensive, including an X-axis linear slide module, a Y-axis linear slide module, a Z-axis linear slide module and corresponding X-axis rotation modules, Y-axis rotation modules and Z-axis rotation modules. The coordinated use of these modules can realize the precise adjustment of the metal part 17 to be tested in all directions in space.

[0027] like Figure 6 As shown, the metal part fixing fixture 12 is composed of a base plate 12-1 and a cover plate 12-2, both of which are provided with corresponding optical fiber semicircular limiting grooves and metal part limiting grooves for accurately positioning the metal part to be tested. In order to improve the convenience and reliability of clamping, magnets 12-3 arranged corresponding to the displacement are provided on the base plate 12-1 and the cover plate 12-2, and rapid fixation is achieved through magnetic force. At the same time, both the base plate 12-1 and the cover plate 12-2 can be detachably connected with the positioning block 12-4, and the positioning block 12-4 is also provided with corresponding metal part limiting grooves. This design greatly improves the versatility and maintenance convenience of the device.

[0028] like Figure 5 As shown, the present invention is provided with a plurality of positioning pins 3-1 on the base 3 of the light receiving positioning plate, which cooperate with the positioning holes 3-2 on the light receiving positioning plate 7. This positioning method ensures the accuracy and repeatability of the installation position of the light receiving positioning plate 7. An avoidance hole is also provided on the light receiving positioning plate 7, so that the light beam emitted from the laser output head 4 can pass through the avoidance hole after being focused by the telecentric objective lens 6 and reach the metal part to be measured fixed in the metal part fixing fixture 12. The light beam passes through the center hole of the metal part and is reflected by the surface of the ceramic or glass device inside the metal part and is received by the light receiving positioning plate. The surface angle and the high and low side positions of the metal part are judged by the position of the reflected light; the coupling frame is adjusted to adjust the relative position of the laser output head 4 and the telecentric objective lens 6, so that the output light spot is smaller in size within the use distance range.

[0029] like Figure 1 As shown, the image acquisition system of the device is composed of a visual recognition unit, including a CCD 10 and a display 8, which are connected via a data cable. In order to provide good lighting conditions, a ring light source 11 is specially arranged on the lens of the CCD 10. This design can ensure sufficient and uniform lighting during image acquisition. The CCD 10 can be placed on a mounting base 9.

[0030] In the actual measurement process of the present invention, the metal part 17 to be measured (its structure is as follows Fig. 9 The reflected light spot can be accurately placed on the light receiving positioning plate 7 by means of the precise adjustment of the multi-axis adjustment unit. The CCD 10 collects the light spot image on the light receiving positioning plate 7 and transmits the data to the display 8 for real-time display and analysis. By measuring the change in the light spot position and combining it with the pre-calibrated parameters, the angle parameters of the inner surface of the metal part to be measured can be calculated.

[0031] This embodiment fully demonstrates the innovative breakthroughs of the present invention in precision optical alignment and curing technology, and provides a key technical solution for the practical application of hollow-core optical fibers.

[0032] Example 2 The present invention also discloses a method for using the device for measuring the inner surface angle of an optical device in a high-speed optical module. The specific implementation steps of the method are described in detail below.

[0033] The first is the system calibration stage. The primary task of this stage is to establish an accurate measurement reference. In specific operations, first place the 0° plane standard device in the metal fixture 12. The selection of standard devices has an important impact on the subsequent measurement accuracy, so standard devices that have been calibrated and meet the flatness requirements must be selected. After the standard device is placed, by adjusting the various degrees of freedom of the multi-axis adjustment unit (including the moving plate 16, the electric rotating table 15 and the multi-dimensional adjustment frame 13), the light beam reflected from the surface of the standard device can be accurately returned to the center position of the light receiving positioning plate 7. The purpose of this step is to ensure the reference position of the entire optical path system.

[0034] Then perform verticality calibration. The operator needs to move the 0° plane standard device outward by a preset distance ΔL through the multi-axis adjustment unit (moving plate 16 with multi-dimensional adjustment frame 13). The selection of this preset distance needs to take into account the overall size and accuracy requirements of the measurement system. It is usually recommended to select a moderate distance value, which should not be too small to result in an insignificant adjustment effect, nor too large to exceed the measurement range of the system. After the movement is completed, adjust again to return the reflected light to its original path. The purpose of this step is to ensure that the far-field and near-field moving axes of the multi-axis adjustment unit are strictly perpendicular to the plane of the light receiving positioning plate 7.

[0035] Next, the rotation axis is calibrated. The 0° plane standard device is rotated 360° around its central axis by the electric rotating table 15, and the position change of the reflected light spot is observed at the same time. By finely adjusting the various parameters of the multi-axis adjustment unit, the reflected light spot is always kept at the center of the light receiving positioning plate 7 during the entire rotation process. The core purpose of this operation is to ensure that the rotation axis maintains a perpendicular relationship with the plane of the light receiving positioning plate 7, laying the foundation for subsequent angle measurement.

[0036] After completing the system calibration, enter the actual measurement phase. First, place the optical device to be tested in the calibrated metal fixture 12. Pay attention to keep it stable during placement to avoid positional displacement. The piece to be tested is fixed by the substrate 12-1 and the cover plate 12-2, and a stable magnetic clamping force is provided by the magnet 12-3. Then set the distance L between the inner surface of the optical device to be tested and the light receiving positioning plate 7. The selection of this distance is very critical, and it needs to be large enough to ensure the sensitivity of the measurement, so that slight changes in the position of the reflected light spot can be accurately captured.

[0037] During the measurement process, the light beam emitted by the laser output head 4 is focused by the telecentric objective lens 6 and then irradiated onto the surface of the workpiece to be measured through the avoidance hole on the light receiving positioning plate 7. CCD10 is used to collect the position information of the reflected light spot on the light receiving positioning plate 7, wherein the annular light source 11 provides uniform lighting conditions. Through image processing technology, the distance r from the reflected light spot to the center of the light receiving positioning plate 7 is accurately measured. The distance measurement here needs to be combined with the resolution of CCD10 and the shape characteristics of the light spot to ensure the accuracy of the measurement. At the same time, CCD10 also needs to obtain the azimuth angle information of the reflected light spot on the light receiving positioning plate 7.

[0038] In the data processing stage, the system uses the principle of geometric optics to calculate the actual angle of the inner surface of the optical device based on the preset distance L and the measured distance r. By analyzing the azimuth angle of the reflected light spot on the light receiving positioning plate 7, the high side position and low side position of the inner surface of the optical device can be accurately determined. This information is of great guiding significance for the subsequent device installation and debugging.

[0039] Finally, the system displays the calculated angle value and high and low side position information in real time on the display 8. The displayed content should be clear and intuitive, easy for operators to read and record. These data can be used for quality control and production records to ensure product consistency and traceability.

[0040] By executing the above steps, the measuring method of the present invention can realize accurate measurement of the inner surface angle of the optical device in the high-speed optical module, and provide reliable technical support for product quality control. The method has standardized operation, clear steps, good practicality and repeatability.

[0041] The test optical path of the present invention is as follows Figure 7-8 As shown, the distance between the inner surface of the optical device and the light receiving positioning plate is L. L is set to a larger distance to make the change of the distance r from the reflected light spot to the center of the light receiving positioning plate more obvious, making the angle measurement more accurate. n2 is the normal of the inner surface S1 of the device. n2 is perpendicular to S1, and n1 is perpendicular to S2, so

[0042] at the same time

[0043] so

[0044] L is known, r is obtained by measuring the distance from the reflected light spot to the center of the light receiving positioning plate, and the angle of the inner surface S1 of the device can be obtained. .

[0045] Or it can also be calculated by adjusting the change in the distance Δr from the reflected light spot to the center of the light receiving positioning plate when the far and near fields ΔL of the six-dimensional adjustment frame change:

[0046] At the same time by Figure 7 and Figure 8 It can be seen that the orientation of the reflected light on the light receiving positioning plate is consistent with the orientation of the low side, so the angle of the light spot on the light receiving positioning plate can be , obtain the high side position and the low side position of the inner surface of the optical device and mark them.

[0047] The above calculations are performed by CCD detecting the light-receiving positioning plate and the position of the light spot reflected on it, and are automatically calculated after visual recognition and marked on the display.

[0048] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the appended claims of the present invention.

Claims

1. A device for measuring the inner surface angle of an optical device in a high-speed optical module, characterized in that: The invention comprises a vibration isolation platform (2), wherein the vibration isolation platform (2) is provided with a light receiving positioning plate base (3), a mounting base (9) and a visual recognition unit, wherein a light receiving positioning plate (7) is provided between the light receiving positioning plate base (3) and the mounting base (9), and the light receiving positioning plate (7) is located within the imaging range of the visual recognition unit; and wherein the light receiving positioning plate base (3) is provided with a laser output head (4), a telecentric objective lens (6) and a multi-axis axis for adjusting the relative position between the laser output head (4) and the telecentric objective lens (6). The coupling frame (5) is adjusted, the mounting base (9) is provided with a multi-axis adjustment unit and a metal component fixing fixture (12) connected to the displacement end of the multi-axis adjustment unit; the light receiving positioning plate (7) is provided with an avoidance hole, the light beam emitted by the laser output head (4) is focused by the telecentric objective lens (6) and then transmitted to the metal component located in the metal component fixing fixture (12), the light beam passes through the center hole of the metal component and is reflected by the surface of the ceramic or glass device inside the metal component and then received by the light receiving positioning plate.

2. The device for measuring the inner surface angle of an optical device in a high-speed optical module according to claim 1, characterized in that: The multi-axis adjustment coupling frame (5) comprises a bottom plate (5-1), on which a fixed vertical plate (5-3) is arranged, a first plate member (5-2) connected to the vertical plate (5-3) and a second plate member (5-4) displaceable along the X-axis direction, the first plate member (5-2) is provided with the laser output head (4) displaceable along the Z-axis and the Y-axis direction, the vertical plate (5-3) is provided with a spiral top rod (5-5) for realizing the rotation of the first plate member (5-2) around the Z-axis, and the second plate member (5-4) is provided with the telecentric objective lens (6).

3. The device for measuring the inner surface angle of an optical device in a high-speed optical module according to claim 1, characterized in that: The multi-axis adjustment unit comprises a plate (16) that can be displaced along the axial direction of the metal part, the plate (16) is provided with an electric rotating table (15) that can rotate around the central axis of the metal part, the electric rotating table (15) is connected to a multi-dimensional adjustment frame (13), and the movable end of the multi-dimensional adjustment frame (13) is connected to the metal part fixing fixture (12).

4. The device for measuring the inner surface angle of an optical device in a high-speed optical module according to claim 3, characterized in that: The multi-dimensional adjustment frame (13) comprises an X-axis linear slide module and / or a Y-axis straight slide module and / or a Z-axis straight slide module and / or an X-axis rotation module and / or a Y-axis rotation module and / or a Z-axis rotation module.

5. The device for measuring the inner surface angle of an optical device in a high-speed optical module according to claim 3, characterized in that: The metal component fixing fixture (12) comprises a base plate (12-1) for connecting to the multi-dimensional adjustment frame (13) and a cover plate (12-2) connected to the base plate (12-1), and optical fiber semicircular limiting grooves and metal component limiting grooves are correspondingly arranged on the base plate (12-1) and the cover plate (12-2).

6. The device for measuring the inner surface angle of an optical device in a high-speed optical module according to claim 5, characterized in that: The base plate (12-1) and the cover plate (12-2) are both detachably connected to a positioning block (12-4), and a metal part limiting groove is provided on the positioning block (12-4).

7. The device for measuring the inner surface angle of an optical device in a high-speed optical module according to claim 5, characterized in that: Magnets (12-3) arranged in a corresponding manner with respect to displacement are provided on the base plate (12-1) and the cover plate (12-2).

8. The device for measuring the inner surface angle of an optical device in a high-speed optical module according to claim 1, characterized in that: A plurality of positioning pins (3-1) are provided on the light-collecting positioning plate base (3), and positioning holes (3-2) cooperating with the positioning pins (3-1) are provided on the light-collecting positioning plate (7).

9. The device for measuring the inner surface angle of an optical device in a high-speed optical module according to claim 1, characterized in that: The visual recognition unit comprises a CCD (10) and a display (8); a ring-shaped light source (11) is arranged on the lens of the CCD (10); and the display (8) is connected to the CCD (10).

10. A method for using the device for measuring the inner surface angle of an optical device in a high-speed optical module according to any one of claims 1 to 9, characterized in that: Place the 0° plane standard device in a metal fixture (12), and adjust the reflected light to return to the center of the light receiving positioning plate (7) through a multi-axis adjustment unit; move the 0° plane standard device outward by a preset distance ΔL along the multi-axis adjustment unit and adjust the reflected light to return along the original path, ensuring that the far-field and near-field moving axes of the multi-axis adjustment unit are perpendicular to the plane of the light receiving positioning plate; rotate the 0° plane standard device 360° and adjust the multi-axis adjustment unit so that the reflected light spot remains at the center of the light receiving positioning plate (7), ensuring that the rotation axis is perpendicular to the plane of the light receiving positioning plate (7); place the optical device to be tested in a calibrated metal fixture (12); The distance L between the inner surface of the optical device to be measured and the light receiving positioning plate (7) is set; the position information of the reflected light spot on the light receiving positioning plate is obtained by using a CCD; the distance r from the reflected light spot to the center of the light receiving positioning plate is measured; and the angle of the inner surface of the optical device is calculated according to the preset distance L and the measured distance r. ; The azimuth angle of the reflected light spot on the light receiving positioning plate is obtained through the CCD detector; the high side position and the low side position of the inner surface of the optical device are determined according to the azimuth angle of the reflected light spot; the calculated angle value and the high and low side position information are displayed on the display.

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