A high resolution spectrometer optical system for raman spectroscopic probing

Abstract

The application discloses a high-resolution spectrometer optical system for Raman spectrum detection, and solves the problems of high cost, complex structure and low utilization rate of image enhancement target surface of an existing spectrometer optical system, and specifically comprises a slit, a collimating mirror group, a spectroscope group, a focusing mirror group and an image sensor which are sequentially arranged along an outgoing direction of the slit on a light path of to-be-detected light; the slit is used for receiving the to-be-detected light and limiting the spot size of the to-be-detected light in a spectral dimension; the collimating mirror group is used for collimating the to-be-detected light passing through the slit into parallel light; the spectroscope group is used for dispersing the collimated parallel light according to wavelengths; the focusing mirror group is used for focusing the dispersed to-be-detected light to the image sensor; a target surface of the image sensor is located at a focal point of the focusing mirror group to receive the focused to-be-detected light; a distance TTL from the slit to the target surface of the image sensor satisfies 0.3<=f / TTL<=0.6, wherein f is a focal length of the focusing mirror group.

Description

[0001] High-resolution spectrometer optical system for Raman spectrum detection TECHNICAL FIELD

[0002] The present application relates to a spectrometer optical system, in particular to a high-resolution spectrometer optical system for Raman spectrum detection. BACKGROUND

[0003] There is a contradiction between the wide spectral range and the effective size of the detector in the spectrometer system, that is, under the condition of constant spectral resolution, a wider spectral range requires a larger detector size. In order to obtain a wide-band high-spectral-resolution ultraviolet spectrometer, the prior art usually adopts a detector splicing, multi-channel combination and other methods, but these methods have some shortcomings: the use of detector splicing will lead to an increase in system cost, and the use of multi-channel combination will increase the complexity of the whole system, and the overall light path volume is large, which is not suitable for scenes with high requirements for compactness and economy.

[0004] The Raman spectrometer obtains sample information through Raman scattered light, but because the Raman scattering intensity is extremely weak, generally only 10 -6 ~10 -12 Therefore, the Raman spectrometer needs to increase an image intensifier in front of the CCD to amplify the weak signal, and the target surface of the image intensifier is a circular area, while the traditional spectrometer only uses a linear array CCD, resulting in too low utilization rate of the image intensifier target surface. SUMMARY

[0005] In order to solve the technical problems of high cost, complex structure and too low utilization rate of the image intensifier target surface of the existing spectrometer optical system, the present application provides a high-resolution spectrometer optical system for Raman spectrum detection.

[0006] In order to achieve the above purpose, the present application adopts the following technical scheme:

[0007] A high-resolution spectrometer optical system for Raman spectrum detection, characterized in that it comprises a slit, a collimating mirror group, a spectrometer group, a focusing mirror group and an image sensor arranged in the light path of the light to be detected in sequence along the outgoing direction thereof.

[0008] The slit is used to receive the light to be detected and limit the size of the light spot in the spectral dimension.

[0009] The collimating mirror group is used to collimate the light to be detected passing through the slit into parallel light.

[0010] The spectrometer group is used to disperse the collimated parallel light according to wavelength.

[0011] The focusing mirror group is used to focus the dispersed light to be detected to the image sensor.

[0012] The target surface of the image sensor is located at the focal point of the focusing lens group to receive the focused to-be-detected light;

[0013] The distance TTL from the slit to the target surface of the image sensor satisfies 0.3 ≤ f / TTL ≤ 0.6, where f is the focal length of the focusing lens group.

[0014] Further, the light splitting lens group comprises a dichroic mirror F1, a reflecting mirror M1 and a grating G;

[0015] The dichroic mirror F1 is used to split the collimated parallel light by wavelength to form transmitted light and reflected light;

[0016] The reflecting mirror M1 is arranged on the light path of the reflected light, and the reflecting mirror M1 is capable of rotating around the X axis to perform multi-angle reflection on the reflected light; the X axis is perpendicular to the light path of the parallel light;

[0017] The grating G is arranged on the light path of the transmitted light and the reflected light reflected by the reflecting mirror M1 again.

[0018] Further, the wavelength range of the transmitted light is 260 nm - 330 nm;

[0019] The wavelength range of the reflected light is 330 nm - 400 nm.

[0020] Further, the collimating lens group comprises a negative power lens L1, a negative power lens L2 and a positive power lens L3 arranged in sequence along the outgoing direction of the collimating lens group on the light path of the to-be-detected light;

[0021] The focusing lens group comprises a negative power lens E1, a positive power lens E2, a positive power lens E3, a negative power lens E4, a negative power lens E5 and a positive power lens E6 arranged in sequence along the outgoing direction of the focusing lens group on the light path of the to-be-detected light.

[0022] Further, the curvature radius R1 of the proximate object surface S1 of the negative power lens L1 and the curvature radius R2 of the proximate image surface S2 satisfy: -4 < (R1+R2) / (R1-R2) < 0.4;

[0023] The curvature radius R3 of the proximate object surface S3 of the negative power lens L2 and the curvature radius R4 of the proximate image surface S4 satisfy: 2 < (R3+R4) / (R3-R4) < 6;

[0024] The curvature radius R5 of the proximate object surface S5 of the positive power lens L3 and the curvature radius R6 of the proximate image surface S6 satisfy: -1 < (R5+R6) / (R5-R6) < 1;

[0025] The negative power lens E1 satisfies: 0 < (R9 + R10) / (R9 - R10) < 6, where R9 is the radius of curvature of the object side surface S9 of the lens E1, and R10 is the radius of curvature of the image side surface S10 of the lens E1.

[0026] The positive power lens E2 satisfies: -3 < (R11 + R12) / (R11 - R12) < 0, where R11 is the radius of curvature of the object side surface S11 of the lens E2, and R12 is the radius of curvature of the image side surface S12 of the lens E2.

[0027] The positive power lens E3 satisfies: -2 < (R13 + R14) / (R13 - R14) < 0, where R13 is the radius of curvature of the object side surface S13 of the lens E3, and R14 is the radius of curvature of the image side surface S14 of the lens E3.

[0028] The negative power lens E4 satisfies: -5 < (R15 + R16) / (R15 - R16) < -2, where R15 is the radius of curvature of the object side surface S15 of the lens E4, and R16 is the radius of curvature of the image side surface S16 of the lens E4.

[0029] The negative power lens E5 satisfies: -10 < (R17 + R18) / (R17 - R18) < -5, where R17 is the radius of curvature of the object side surface S17 of the lens E5, and R18 is the radius of curvature of the image side surface S18 of the lens E5.

[0030] The positive power lens E6 satisfies: -1 < (R19 + R20) / (R19 - R20) < 1, where R19 is the radius of curvature of the object side surface S19 of the lens E6, and R20 is the radius of curvature of the image side surface S20 of the lens E6.

[0031] Further, the R1 = -3.738 mm, R2 = -8.457 mm; R3 = 36.620 mm, R4 = 24.165 mm; R5 = 4147.889 mm, R6 = -26.632 mm; R7 = INF, R8 = INF; R9 = 68.798 mm, R10 = 44.492 mm; R11 = 38.055 mm, R12 = 167.152 mm; R13 = 65.878 mm, R14 = 3969.037 mm; R15 = -36.666 mm, R16 = -63.804 mm; R17 = -21.628 mm, R18 = -27.199 mm; R19 = 20.734 mm, R20 = -197.931 mm.

[0032] Further, the negative power lens L1, the positive power lens L3, the negative power lens E1, the positive power lens E2, the positive power lens E3, the negative power lens E5, the positive power lens E6 are all glass materials, and the d-line Abbe number is greater than 90.

[0033] The negative power lens L2 and the positive power lens E4 are both glass materials, and the d-line Abbe number is less than 35.

[0034] Further, the refractive index of the negative power lens L1 is 1.44, and the d-line Abbe number is 91.6;

[0035] The refractive index of the negative power lens L2 is 1.56, and the d-line Abbe number is 32.0;

[0036] The refractive index of the positive power lens L3 is 1.43, and the d-line Abbe number is 95.2;

[0037] The refractive index of the dichroic mirror F1 is 1.38, and the d-line Abbe number is 106.2;

[0038] The refractive index of the negative power lens E1 is 1.38, and the d-line Abbe number is 106.2;

[0039] The refractive index of the positive power lens E2 is 1.43, and the d-line Abbe number is 95.0;

[0040] The refractive index of the positive power lens E3 is 1.38, and the d-line Abbe number is 106.2;

[0041] The refractive index of the negative power lens E4 is 1.56, and the d-line Abbe number is 32.0;

[0042] The refractive index of the negative power lens E5 is 1.38, and the d-line Abbe number is 106.2;

[0043] The refractive index of the positive power lens E6 is 1.38, and the d-line Abbe number is 106.2.

[0044] Further, the center distance between the near object plane S1 and the near image plane S2 is 9.232 mm;

[0045] The center distance between the near image plane S2 and the near object plane S3 is 15.219 mm;

[0046] The center distance between the near object plane S3 and the near image plane S4 is 10.124 mm;

[0047] The center distance between the near image plane S4 and the near object plane S5 is 9.690 mm;

[0048] The center distance between the object plane S5 and the image plane S6 is 20.266 mm;

[0049] The center distance between the image plane S6 and the object plane S7 of the dichroic mirror F1 is 15.000 mm;

[0050] The center distance between the object plane S7 of the dichroic mirror F1 and the image plane S8 thereof is 5.000 mm;

[0051] The center distance between the image plane S8 of the dichroic mirror F1 and the object plane S9 is 16.000 mm;

[0052] The center distance between the object plane S9 and the image plane S10 is 37.001 mm;

[0053] The center distance between the image plane S10 and the object plane S11 is 2.999 mm;

[0054] The center distance between the object plane S11 and the image plane S12 is 17.980 mm;

[0055] The center distance between the image plane S12 and the object plane S13 is 3.581 mm;

[0056] The center distance between the object plane S13 and the image plane S14 is 20.642 mm;

[0057] The center distance between the image plane S14 and the object plane S15 is 9.458 mm;

[0058] The center distance between the object plane S15 and the image plane S16 is 25.002 mm;

[0059] The center distance between the image plane S16 and the object plane S17 is 45.001 mm;

[0060] The center distance between the object plane S17 and the image plane S18 is 6.999 mm;

[0061] The center distance between the image plane S18 and the object plane S19 is 3.000 mm;

[0062] The center distance between the object plane S19 and the image plane S20 is 7.000 mm;

[0063] The center distance between the image plane S20 and the target surface of the image sensor is 16.973 mm.

[0064] Further, the image sensor is a CCD image sensor or a CMOS image sensor, an effective size of which is 14.4mm*14.4mm, a numerical aperture is 0.125, and a magnification is 1; and an image intensifier is arranged in front of a target surface of the CCD image sensor or the CMOS image sensor.

[0065] The size of the slit is 0.6mm*20μm.

[0066] The present application has the following beneficial effects:

[0067] 1. The high-resolution spectrometer optical system for Raman spectrum detection provided by the present application is provided with a beam splitter, which can disperse light according to the wavelength of the to-be-detected light, so that light of different wavebands is focused to different positions of a surface array image sensor, thereby enhancing the utilization rate of the target surface.

[0068] 2. The high-resolution spectrometer optical system for Raman spectrum detection provided by the present application adopts a dichroic mirror F1 to split the to-be-detected light in the wavelength ranges of 260nm~330nm and 330nm~400nm, reflects the reflected light to a grating G through a mirror M1, and then focuses the light through a focusing lens group, thereby realizing a spectral resolution of better than 0.1nm in the wavelength range of 260nm~400nm; compared with the optical system of 260nm~330nm, the spectral range is doubled without reducing the spectral resolution.

[0069] 3. The high-resolution spectrometer optical system for Raman spectrum detection provided by the present application only needs to increase a dichroic mirror for splitting and a mirror, so that two light paths pass through the same grating and are focused to the same detector, thereby expanding the spectral range, simplifying the optical path, reducing the volume, and lowering the cost. BRIEF DESCRIPTION OF DRAWINGS

[0070] Figure 1 is a structural schematic view of an embodiment of the high-resolution spectrometer optical system for Raman spectrum detection of the present application; wherein (a) is a structural schematic view along the YZ plane, and (b) is a structural schematic view along the XZ plane;

[0071] Figure 2 is a light trace diagram received by the image sensor in the embodiment of the present application;

[0072] Figure 3 is an MTF (260-330nm) of a wavelength of 260nm in the embodiment of the present application;

[0073] Figure 4 is an MTF (260-330nm) of a wavelength of 295nm in the embodiment of the present application;

[0074] Figure 5 is the MTF of 330 nm in the embodiment of the present application (260-330 nm);

[0075] Figure 6 is the MTF of 330 nm in the embodiment of the present application (330-400 nm);

[0076] Figure 7 is the MTF of 365 nm in the embodiment of the present application (330-400 nm);

[0077] Figure 8 is the MTF of 400 nm in the embodiment of the present application (330-400 nm). DETAILED DESCRIPTION

[0078] The technical solutions of the present application will be described clearly and completely below in conjunction with the drawings and embodiments. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0079] The embodiment of the present application provides a high-resolution spectrometer optical system for Raman spectrum detection, which can simultaneously cover two waveband ranges of 260-330 nm and 330-400 nm, and realizes spectrum splitting by using a shared grating. The optical system has a spectral resolution better than 0.1 nm, and its composition includes 9 lenses, 1 dichroic mirror, 1 plane mirror and 1 grating.

[0080] As shown in Figure 1 , the spectrometer optical system specifically includes a slit, a collimating lens group, a splitting lens group, a focusing lens group and an image sensor, which are sequentially arranged in the light path of the to-be-detected light in the emission direction.

[0081] The size of the slit is 0.6 mm x 20 µm, which is used to receive the to-be-detected light and limit the spot size in the spectral dimension.

[0082] The collimating lens group includes a negative focal length lens L1, a negative focal length lens L2 and a positive focal length lens L3, which are sequentially arranged in the light path of the to-be-detected light in the emission direction. The collimating lens group is used to collimate the to-be-detected light passing through the slit into parallel light.

[0083] The spectroscopic lens set comprises a dichroic mirror F1, a mirror M1 and a grating G; the dichroic mirror F1 is used for wavelength dispersion of the collimated parallel light to form transmitted light and reflected light; the mirror M1 is arranged on the light path of the reflected light, and the mirror M1 can rotate around the X axis to reflect the reflected light at multiple angles; the X axis is perpendicular to the light path of the parallel light; the grating G is arranged on the light path of the transmitted light and the reflected light reflected by the mirror M1 again.

[0084] The focusing lens set comprises, in sequence along the outgoing direction thereof, a negative-power lens E1, a positive-power lens E2, a positive-power lens E3, a negative-power lens E4, a negative-power lens E5 and a positive-power lens E6 arranged on the light path of the to-be-detected light, and is used for focusing the dispersed to-be-detected light to the image sensor.

[0085] The image sensor is a CCD image sensor or a CMOS image sensor, has an effective size of 14.4 mm x 14.4 mm, a numerical aperture of 0.125 and a magnification of 1; and an image intensifier is arranged in front of the target surface of the CCD image sensor or the CMOS image sensor.

[0086] After the to-be-detected light with a wavelength range of 260 nm - 400 nm is emitted through the slit, it is first collimated into parallel light by the collimating lens set, and then is incident to the dichroic mirror F1; for the to-be-detected light with a wavelength range of 260 nm - 330 nm, the dichroic mirror F1 transmits all the light, and the transmitted light is incident to the grating G; for the to-be-detected light with a wavelength range of 330 nm - 400 nm, the dichroic mirror F1 reflects all the light, and the reflected light is incident to the same grating G after passing through the mirror M1, and the two light beams are dispersed by the grating G and then focused to the image sensor by the focusing lens set.

[0087] The mirror M1 rotates around the x axis (vertically into the paper) Figure 1 (b) by a suitable angle, so as to change the position and incident angle of the light with a wavelength range of 330 nm - 400 nm incident to the grating G, and then affect the position focused on the image sensor. The focusing effect after rotation is shown in Figure 2 By adjusting the rotation angle of the mirror around the x axis, the spectral range can be extended to twice the original range without changing the size of the target surface of the image sensor, and the utilization rate of the detection target surface is improved.

[0088] The total optical length of the optical system of the high-resolution spectrometer for Raman spectrum detection, i.e. the distance from the slit to the target surface of the image sensor, satisfies the relationship: 0.3 ≤ f / TTL ≤ 0.6, where f is the focal length of the focusing lens set. The focal length of the collimating lens set is approximately equal to the focal length of the focusing lens set.

[0089] The negative-power lens L1 satisfies: -4 < (R1+R2) / (R1-R2) < 0.4, -0.5 ≤ f1 / f ≤ -0.1;

[0090] The negative-power lens L2 satisfies: 2 < (R3+R4) / (R3-R4) < 6;

[0091] The positive-power lens L3 satisfies: -1 < (R5+R6) / (R5-R6) < 1;

[0092] The negative-power lens E1 satisfies: 0 < (R9+R10) / (R9-R10) < 6;

[0093] The positive-power lens E2 satisfies: -3 < (R11+R12) / (R11-R12) < 0;

[0094] The positive-power lens E3 satisfies: -2 < (R13+R14) / (R13-R14) < 0;

[0095] The negative-power lens E4 satisfies: -5 < (R15+R16) / (R15-R16) < -2;

[0096] The negative-power lens E5 satisfies: -10 < (R17+R18) / (R17-R18) < -5;

[0097] The positive-power lens E6 satisfies: -1 < (R19+R20) / (R19-R20) < 1;

[0098] The glass material of the negative-power lens L1, the positive-power lens L3, the negative-power lens E1, the positive-power lens E2, the positive-power lens E3, the negative-power lens E5, and the positive-power lens E6 has a d-line Abbe number greater than 90; the glass material of the negative-power lens L2 and the positive-power lens E4 has a d-line Abbe number less than 35.

[0099] The specific parameters of each lens in the 260 nm - 330 nm transmission light path in the embodiment are shown in the following table:

[0100]

[0101] A negative number in the radius of curvature indicates that the bending direction is toward the image side. For the positive and negative values of the center distance, the sign convention of geometrical optics stipulates that the position of the intersection of the light ray and the principal axis is calculated from the vertex, and the one on the right of the vertex is positive, and the one on the left of the vertex is negative.

[0102] Figures 3-5The MTF (modulation transfer function) curves of the Raman spectrometer at 260 nm, 295 nm and 330 nm are shown in the figure. It can be seen that the MTF curves of the Raman spectrometer at various wavelengths are greater than 0.5, and the imaging quality is good.

[0103] Figures 6-8 The MTF (modulation transfer function) curves of the Raman spectrometer at 330 nm, 365 nm and 400 nm are shown in the figure. It can be seen that the MTF curves of the Raman spectrometer at various wavelengths are greater than 0.6, and the imaging quality is good.

[0104] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto, any change or replacement within the technical scope disclosed in the present application should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A high resolution spectrometer optical system for Raman spectroscopic detection, characterized by: The slit, the collimating lens group, the light splitting lens group, the focusing lens group and the image sensor are sequentially arranged along the exit direction of the slit in the light path of the light to be detected; The slit is used for receiving the light to be detected and limiting the spot size of the light to be detected in the spectral dimension; The collimating lens group is used for collimating the light to be detected passing through the slit into parallel light; The light splitting lens group is used for dispersing the collimated parallel light according to wavelength; The focusing lens group is used for focusing the dispersed light to be detected to the image sensor; The target surface of the image sensor is located at the focal point of the focusing lens group to receive the focused light to be detected; The distance TTL from the slit to the target surface of the image sensor satisfies 0.3 ≤ f / TTL ≤ 0.6, wherein f is the focal length of the focusing lens group; The light splitting lens group comprises a dichroic mirror F1, a mirror M1 and a grating G; The dichroic mirror F1 is used for splitting the collimated parallel light according to wavelength to form transmitted light and reflected light; The mirror M1 is arranged in the light path of the reflected light and can rotate around the X axis to reflect the reflected light at multiple angles; the X axis is perpendicular to the light path of the parallel light; The grating G is arranged in the light path of the transmitted light and the reflected light reflected by the mirror M1 again.

2. The high resolution spectrometer optical system for Raman spectroscopic detection of claim 1, wherein: The wavelength range of the transmitted light is 260 nm - 330 nm; The wavelength range of the reflected light is 330 nm - 400 nm.

3. The high resolution spectrometer optical system for Raman spectroscopic detection of claim 2, wherein: The collimating lens group comprises a negative focal length lens L1, a negative focal length lens L2 and a positive focal length lens L3 sequentially arranged along the exit direction of the collimating lens group in the light path of the light to be detected; The focusing lens group comprises a negative focal length lens E1, a positive focal length lens E2, a positive focal length lens E3, a negative focal length lens E4, a negative focal length lens E5 and a positive focal length lens E6 sequentially arranged along the exit direction of the focusing lens group in the light path of the light to be detected.

4. The high resolution spectrometer optical system for Raman spectroscopic detection of claim 3, wherein: The curvature radius R1 of the near object surface S1 of the negative focal length lens L1 and the curvature radius R2 of the near image surface S2 satisfy: -4 < (R1+R2) / (R1-R2) < 0.4; The curvature radius R3 of the near object surface S3 of the negative focal length lens L2 and the curvature radius R4 of the near image surface S4 satisfy: 2 < (R3+R4) / (R3-R4) < 6; The curvature radius R5 of the near object surface S5 of the positive focal length lens L3 and the curvature radius R6 of the near image surface S6 satisfy: -1 < (R5+R6) / (R5-R6) < 1; The curvature radius R9 of the near object surface S9 of the negative focal length lens E1 and the curvature radius R10 of the near image surface S10 satisfy: 0 < (R9+R10) / (R9-R10) < 6; The curvature radius R11 of the near object surface S11 of the positive focal length lens E2 and the curvature radius R12 of the near image surface S12 satisfy: -3 < (R11+R12) / (R11-R12) < 0; The curvature radius R13 of the near object surface S13 of the positive focal length lens E3 and the curvature radius R14 of the near image surface S14 satisfy: -2 < (R13+R14) / (R13-R14) < 0; The negative power lens E4 satisfies: -5 < (R15 + R16) / (R15 - R16) < -2, where R15 is the radius of curvature of the object side surface S15 of the negative power lens E4, and R16 is the radius of curvature of the image side surface S16 of the negative power lens E4. The negative power lens E5 satisfies: -10 < (R17 + R18) / (R17 - R18) < -5, where R17 is the radius of curvature of the object side surface S17 of the negative power lens E5, and R18 is the radius of curvature of the image side surface S18 of the negative power lens E5. The positive power lens E6 satisfies: -1 < (R19 + R20) / (R19 - R20) < 1, where R19 is the radius of curvature of the object side surface S19 of the positive power lens E6, and R20 is the radius of curvature of the image side surface S20 of the positive power lens E6.

5. The high resolution spectrometer optical system for Raman spectroscopic detection of claim 4, wherein: R1 = -3.738 mm, R2 = -8.457 mm; R3 = 36.620 mm, R4 = 24.165 mm; R5 = 4147.889 mm, R6 = -26.632 mm; R9 = 68.798 mm, R10 = 44.492 mm; R11 = 38.055 mm, R12 = 167.152 mm; R13 = 65.878 mm, R14 = 3969.037 mm; R15 = -36.666 mm, R16 = -63.804 mm; R17 = -21.628 mm, R18 = -27.199 mm; R19 = 20.734 mm, R20 = -197.931 mm.

6. The high resolution spectrometer optical system for Raman spectroscopic detection of claim 5, wherein: The negative power lens L1, the positive power lens L3, the negative power lens E1, the positive power lens E2, the positive power lens E3, the negative power lens E5, and the positive power lens E6 are all glass materials, and the d-line Abbe number of each of them is greater than 90. The negative power lens L2 and the positive power lens E4 are both glass materials, and the d-line Abbe number of each of them is less than 35.

7. The high resolution spectrometer optical system for Raman spectroscopic detection of claim 6, wherein: The refractive index of the negative power lens L1 is 1.44, and the d-line Abbe number thereof is 91.

6. The refractive index of the negative power lens L2 is 1.56, and the d-line Abbe number thereof is 32.

0. The refractive index of the positive power lens L3 is 1.43, and the d-line Abbe number thereof is 95.

2. The refractive index of the dichroic mirror F1 is 1.38, and the d-line Abbe number thereof is 106.

2. The refractive index of the negative power lens E1 is 1.38, and the d-line Abbe number thereof is 106.

2. The refractive index of the positive power lens E2 is 1.43, and the d-line Abbe number thereof is 95.

0. The refractive index of the positive power lens E3 is 1.38, and the d-line Abbe number thereof is 106.

2. The refractive index of the negative power lens E4 is 1.56, and the d-line Abbe number thereof is 32.

0. The refractive index of the negative power lens E5 is 1.38, and the d-line Abbe number thereof is 106.

2. The refractive index of the positive power lens E6 is 1.38, and the d-line Abbe number thereof is 106.

2.

8. The high resolution spectrometer optical system for Raman spectroscopic detection of claim 7, wherein: The center distance between the object side surface S1 and the image side surface S2 is 9.232 mm. The center distance between the near object plane S3 and the near image plane S4 is 10.124 mm; The center distance between the near object plane S3 and the near image plane S4 is 10.124 mm; The center distance between the near object plane S5 and the near image plane S6 is 20.266 mm; The center distance between the near object plane S5 and the near image plane S6 is 20.266 mm; The center distance between the near object plane S5 and the near image plane S6 is 20.266 mm; The center distance between the near object plane S7 of the dichroic mirror F1 and its near image plane S8 is 5.000 mm; The center distance between the near object plane S7 of the dichroic mirror F1 and its near image plane S8 is 5.000 mm; The center distance between the near object plane S9 and the near image plane S10 is 37.001 mm; The center distance between the near object plane S9 and the near image plane S10 is 37.001 mm; The center distance between the near object plane S11 and the near image plane S12 is 17.980 mm; The center distance between the near object plane S13 and the near image plane S14 is 20.642 mm; The center distance between the near object plane S13 and the near image plane S14 is 20.642 mm; The center distance between the near object plane S15 and the near image plane S16 is 25.002 mm; The center distance between the near object plane S15 and the near image plane S16 is 25.002 mm; The center distance between the near object plane S17 and the near image plane S18 is 6.999 mm; The center distance between the near object plane S19 and the near image plane S20 is 7.000 mm; The center distance between the near object plane S19 and the near image plane S20 is 7.000 mm; The center distance between the near object plane S19 and the near image plane S20 is 7.000 mm; The center distance between the near object plane S19 and the near image plane S20 is 7.000 mm; 9. The high resolution spectrometer optical system for Raman spectroscopic detection of claim 7, wherein: The center distance between the near object plane S19 and the near image plane S20 is 7.000 mm; The image sensor is a CCD image sensor or a CMOS image sensor, with an effective size of 14.4 mm x 14.4 mm, a numerical aperture of 0.125, and a magnification of 1; an image intensifier is arranged in front of the target surface of the CCD image sensor or the CMOS image sensor; The size of the slit is 0.6 mm x 20 µm.

Images