Self-adaptive laser methane sensor based on MEMS optical system

Abstract

The invention relates to the technical field of laser methane sensors, in particular to a self-adaptive laser methane sensor based on an MEMS (Micro Electro Mechanical System) optical system, which comprises a main controller, a shell, a laser component and a receiver, the air purifier further comprises a plurality of reflectors, an air inlet cover, an air inlet notch and an air filter element, the transmitting end of the laser assembly and the receiving end of the receiver extend into the two ends of the shell respectively, the section of an air chamber of the shell is in a regular polygon shape, the reflectors are installed on the inner wall of the air chamber respectively, the laser assembly transmits laser beams to the reflectors, and the air inlet cover covers the air inlet notch. A laser beam is emitted to the receiver in a spiral shape among the multiple reflectors, the air inlet cover is installed on an air inlet of the shell, an air inlet notch is formed in the air inlet cover and is close to the outer wall of the shell, an air filter element is installed on an opening of the air inlet notch, and the air inlet notch and the air inlet cover are communicated with the air chamber through the air inlet of the shell; a broken line spiral light path is adopted, so that the light path of a laser beam is greatly increased, and the methane detection precision is improved.

Description

Technical Field

[0001] The invention relates to the technical field of laser methane sensors, and in particular to an adaptive laser methane sensor based on a MEMS optical system. Background Art

[0002] MEMS optical system is a system that realizes optical functions through tiny mechanical movements. It combines microelectronics technology, micro-nano processing technology and mechanical engineering principles, and uses batch manufacturing technology in the semiconductor industry to achieve miniaturization, extraordinary precision and reliability.

[0003] Laser methane sensor is a sensor that uses laser spectroscopy technology to achieve high-precision gas detection. In the technical field of methane concentration detection, MEMS optical systems are widely used to achieve self-adaptation of detection equipment and improve the detection accuracy of methane. For example, the Chinese invention patent application with publication number CN115508283A proposes a laser methane telemeter based on a VCM motor. The laser methane telemeter adjusts the position of the VCM motor based on the distance parameter to keep the output spot of the collimating lens at the optimal size, and can achieve the best detection effect regardless of the distance of the detection object.

[0004] A variety of compact laser methane sensors have also been proposed in the prior art. For example, a compact long-path laser methane sensor is proposed in the Chinese utility model patent with publication number CN218917183U. The laser methane sensor uses four laser reflective lenses to form a folded reflective light path, obtain a long light path, and improve the detection sensitivity and accuracy of the laser methane sensor.

[0005] However, the optical path formed by the laser of the above-mentioned laser methane sensor being reflected between multiple reflectors is on a plane, and each reflector only reflects the laser beam once, resulting in an increased structural complexity but no significant increase in the optical path of the laser beam, which is not conducive to improving the detection accuracy of methane. Summary of the invention

[0006] In order to solve the above technical problems, the present invention provides an adaptive laser methane sensor based on a MEMS optical system which adopts a broken-line spiral optical path to greatly increase the optical path of the laser beam and improve the detection accuracy of methane.

[0007] The invention discloses an adaptive laser methane sensor based on a MEMS optical system, comprising a main controller, a shell, a laser component and a receiver, wherein the shell is mounted on the main controller, and the laser component and the receiver are both mounted on the shell; the invention also comprises a plurality of reflectors, an air intake cover, an air intake slot and an air filter element, wherein an air chamber is arranged on the shell along an axis, an air intake is arranged on the end of the shell away from the main controller, and an air outlet is arranged on the end of the shell close to the main controller, an emitting end of the laser component and a receiving end of the receiver respectively extend into the two ends of the air chamber, the cross section of the air chamber is a regular polygon, a plurality of reflectors are respectively mounted on the inner wall of the air chamber, the laser component emits a laser beam to the reflector, the laser beam is reflected between the plurality of reflectors, so that the laser beam is spirally emitted toward the receiver between the plurality of reflectors, the air intake cover is mounted on the air intake port of the shell, an air intake slot is mounted on the air intake cover, the air intake slot is close to the outer wall of the shell, an air filter element is mounted on the opening of the air intake slot, and the air intake slot and the air intake cover are connected with the air chamber through the air intake port of the shell; when working, the gas passes through the air After filtering by the filter element, the gas passes through the air inlet slot, the air inlet cover and the air inlet of the shell into the inner air chamber. After passing through the air chamber, the gas is discharged through the air outlet. The main controller controls the laser component to turn on, and the laser component emits a laser beam to the reflector. After being reflected by multiple reflectors, the laser beam is emitted to the receiver in a zigzag spiral shape. By adjusting the angle between the laser emitted by the laser component and the axis of the air chamber of the shell, the number of levels of the laser beam between the laser component and the receiver can be adjusted. The smaller the angle, the more levels, and the longer the optical path length. By adjusting the focus of the laser emitted by the laser component, the size of the spot of the laser beam reflected on the reflector can be adjusted. Since the laser beam diffuses once each time it is reflected, the more laser reflection levels, the smaller the spot adjustment, so that the size of the laser spot received by the receiver is appropriate, and self-adaptation is achieved. Compared with the prior art, the optical path formed by the reflection of the laser beam between multiple reflectors is not on the same plane, and each reflector reflects the laser beam multiple times, thereby greatly increasing the optical path of the laser beam under limited structural changes and improving the detection accuracy of methane.

[0008] Preferably, the laser assembly includes an angle-adjustable micromotor, a laser transmitter and a VCM motor, the angle-adjustable micromotor is mounted on the housing, the laser transmitter is mounted on the movable end of the angle-adjustable micromotor, the VCM motor is mounted on the transmitting head of the laser transmitter, and a collimating lens is mounted on the movable end of the VCM motor; the movable end of the angle-adjustable micromotor drives the laser transmitter to swing, thereby adjusting the angle between the laser beam and the axis of the air chamber of the housing, thereby adjusting the number of reflection layers of the laser beam, and realizing adaptive adjustment of the optical path length, which is suitable for measurement requirements of different accuracies; the movable end of the VCM motor telescopes to drive the collimating lens to approach or move away from the transmitting head of the laser transmitter, thereby adjusting the focal position of the laser beam, and then adjusting the size of the laser spot on the reflector and the receiver, so that the size of the spot received on the receiver is optimal, and the methane concentration in the air chamber is detected by comparing the intensity of the laser emitted by the laser transmitter and the spectral changes of the laser received on the receiver, thereby realizing an adaptive effect.

[0009] Preferably, the cross-section of the air chamber of the shell is a regular triangle, a regular quadrilateral or a regular pentagon, and the number of the reflectors matches the number of side walls of the air chamber of the shell.

[0010] Preferably, it also includes a motor and an impeller, wherein the motor is installed inside the air chamber of the shell, the motor is located at the air outlet of the air chamber, and the impeller is installed on the output shaft of the motor; the motor drives the impeller to rotate, discharges the gas in the air chamber of the shell through the air outlet, and filters the external gas through the air filter element and then sucked into the air chamber of the shell through the air inlet slot and the air inlet hood, thereby improving the air intake efficiency and thereby improving the detection efficiency.

[0011] Preferably, it also includes a mounting seat 1 and a mounting seat 2. The mounting seat 1 is arranged at one end of the shell near the air inlet, and a mounting port 1 is arranged at the outer end of the mounting seat 1. The mounting seat 1 is used to install the laser component. The mounting seat 2 is arranged at one end of the shell near the air outlet, and a mounting port 2 is arranged at the outer end of the mounting seat 2. The mounting seat 2 is used to install the receiver. By arranging the mounting seat 1 and the mounting seat 2, it is convenient to disassemble and assemble the laser component and the receiver, and the practicality is good.

[0012] Preferably, it also includes a sub-controller and an electric turntable, the stator of the electric turntable is installed on the sub-controller, the main controller is installed on the rotor of the electric turntable, and the sub-controller is electrically connected to the electric turntable; the sub-controller controls the operation of the electric turntable, and the rotor of the electric turntable drives the main controller to rotate, thereby rotating the shell, the air intake hood and the air intake slot, so as to inhale the gas in different directions of the shell to detect the methane concentration.

[0013] Preferably, it also includes a flange plate, which is installed at the bottom of the sub-controller and has mounting holes. The flange plate is installed on a designated bracket or a designated position through the mounting holes to facilitate installation and disassembly.

[0014] Preferably, an electric slip ring is further included, which is mounted on the rotor end of the electric turntable, the cable of the sub-controller is electrically connected to the outer ring of the electric slip ring, and the cable of the main controller is electrically connected to the inner ring of the electric slip ring; by providing the electric slip ring, the cables between the main controller and the sub-controller will not be entangled due to the rotation of the main controller, thereby avoiding cable damage and improving reliability.

[0015] Preferably, it also includes an air guide cover, multiple metal sheets and multiple contacts, the air guide cover is sleeved on the outer wall of the shell, the air guide cover is provided with a slot to avoid the air inlet slot, and multiple air inlet slots are provided on the circumference of the outer wall of the air guide cover, the multiple metal sheets are located between the air guide cover and the outer wall of the shell, the two ends of the multiple metal sheets are not connected to the inner wall of the air guide cover, the multiple metal sheets are respectively arranged on both sides of the multiple air inlet slots of the air guide cover, and contacts are installed in the middle of the opposite surfaces of two metal sheets located on both sides of the same air inlet slot, the multiple metal sheets located on the left side of the multiple air inlet slots are electrically connected to one end of the signal cable, the multiple metal sheets located on the right side of the multiple air inlet slots are electrically connected to the other end of the signal cable, and the signal cable is electrically connected to the main controller; when the airflow passes through the air guide cover, the airflow is blown through the multiple air inlet slots on the windward surface of the air guide cover Passing through the corresponding multiple pairs of metal sheets, since the air flow speed between the two metal sheets is faster than the air flow speed outside the two metal sheets, a pressure difference is generated, and the pressure difference brings the two relatively metal sheets closer together, so that the two contacts on the two metal sheets touch, so that the signal cable is connected to generate a signal, the main controller receives the signal and sends it to the sub-controller through the cable and the electric slip ring, the sub-controller controls the operation of the electric turntable, so that the shell drives the air guide cover to start rotating, and when the air inlet slot rotates to the windward side, since the air guide cover is provided with an avoidance slot at the air inlet slot, the air flow no longer enters the inside of the air guide cover, so that the signal disappears, the electric turntable stops, and the air inlet slot can automatically face the direction of the air flow, so that the methane in the air flow can enter the shell for detection more efficiently, thereby improving the reliability of the detection.

[0016] Preferably, the multiple metal sheets are divided into two groups, a left group and a right group. The multiple metal sheets located on the left side of the middle plane of the air inlet slot are arranged as the left group, and the multiple metal sheets located on the right side of the middle plane of the air inlet slot are arranged as the right group. The left and right groups of metal sheets are respectively connected to the left signal cable and the right signal cable, and the left signal cable and the right signal cable are electrically connected to the main controller. When the airflow blows to the left part of the air guide cover, the multiple metal sheets of the left group approach and drive the multiple contacts thereon to contact, so that the left signal cable is connected to generate a left signal. The main controller sends the left signal to the sub-controller through the cable and the electric slip ring. The sub-controller controls the rotor of the electric turntable to rotate to the left. Similarly, when the airflow blows to the right part of the air guide cover, the rotor of the electric turntable rotates to the right, so that the air inlet slot is more quickly toward the direction of the airflow, thereby improving the detection efficiency.

[0017] Compared with the prior art, the beneficial effects of the present invention are as follows: since the optical path formed by the reflection of the laser beam between multiple reflectors is not on the same plane, each reflector reflects the laser beam multiple times, thereby greatly increasing the optical path of the laser beam with limited structural changes, thereby improving the detection accuracy of methane. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the axonometric partial cross-sectional structure of the present invention; Figure 2 It is a front cross-sectional structural schematic diagram of the present invention; Figure 3 It is a schematic diagram of the side section structure of the present invention; Figure 4 is a schematic diagram of the reflection route of the light path of the present invention; Figure 5 It is a schematic diagram of the axonometric structure of the present invention; Figure 6 It is a schematic structural diagram of the present invention in a decomposed state; Figure 7 It is a schematic diagram of the structure of the housing, motor 1 and impeller; Figure 8 It is a schematic diagram of the structure of the laser assembly, receiver, reflector, etc.; Fig. 9 It is a schematic diagram of the structure of the air intake cover, the air intake slot and the air filter element; Fig.10 It is a schematic diagram of the structure of the air guide cover, metal sheet, contact and other structures.

[0019] Markings in the attached figure: 1. main controller; 2. housing; 3. laser assembly; 4. receiver; 5. reflector; 6. air intake hood; 7. air intake slot; 8. air filter; 9. angle adjustment micromotor; 10. laser transmitter; 11. VCM motor; 12. motor one; 13. impeller; 14. mounting seat one; 15. mounting seat two; 16. sub-controller; 17. electric turntable; 18. flange plate; 19. electric slip ring; 20. air guide hood; 21. metal sheet; 22. contact. DETAILED DESCRIPTION

[0020] In order to facilitate understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. The present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive. Example 1

[0021] like Figures 1 to 9As shown, an adaptive laser methane sensor based on a MEMS optical system includes a main controller 1, a housing 2, a laser component 3 and a receiver 4, wherein the housing 2 is mounted on the main controller 1, and the laser component 3 and the receiver 4 are both mounted on the housing 2; the sensor also includes a plurality of reflectors 5, an air intake cover 6, an air intake slot 7 and an air filter element 8, wherein the housing 2 is provided with an air chamber along an axis, wherein an air inlet is provided at an end of the housing 2 away from the main controller 1, and an air outlet is provided at an end of the housing 2 close to the main controller 1, and an emitting end of the laser component 3 and a receiving end of the laser component 3 are connected to each other. The receiving ends of the receiver 4 extend into the two ends of the air chamber respectively. The cross section of the air chamber is a regular polygon. A plurality of reflectors 5 are respectively installed on the inner wall of the air chamber. The laser assembly 3 emits a laser beam to the reflector 5. The laser beam is reflected between the plurality of reflectors 5 so that the laser beam is spirally emitted to the receiver 4 between the plurality of reflectors 5. The air intake cover 6 is installed on the air intake port of the housing 2. The air intake notch 7 is installed on the air intake cover 6. The air intake notch 7 is close to the outer wall of the housing 2. An air filter element 8 is installed on the opening of the air intake notch 7. The air intake notch 7 and the air intake cover 6 pass through the air intake notch 7. The air inlet of the shell 2 is connected to the air chamber; the laser assembly 3 includes an angle adjustment micromotor 9, a laser emitter 10 and a VCM motor 11, the angle adjustment micromotor 9 is installed on the shell 2, the laser emitter 10 is installed on the active end of the angle adjustment micromotor 9, the VCM motor 11 is installed on the emission head of the laser emitter, and a collimating lens is installed on the active end of the VCM motor 11; the cross section of the air chamber of the shell 2 is a regular triangle, a regular quadrilateral or a regular pentagon, and the number of the reflectors 5 matches the number of side walls of the air chamber of the shell 2; and it also includes Motor 12 and impeller 13, motor 12 is installed inside the air chamber of shell 2, motor 12 is located at the air outlet of the air chamber, and the output shaft of motor 12 is installed with impeller 13; it also includes mounting seat 14 and mounting seat 2 15, mounting seat 14 is arranged at one end of shell 2 close to the air inlet, mounting opening 1 is arranged at the outer end of mounting seat 14, mounting seat 14 is used to install laser assembly 3, mounting seat 2 15 is arranged at one end of shell 2 close to the air outlet, mounting opening 2 is arranged at the outer end of mounting seat 2 15, and mounting seat 2 15 is used to install receiver 4.

[0022] During operation, the motor 12 drives the impeller 13 to rotate, and the gas in the air chamber of the shell 2 is discharged through the air outlet, and the external gas is filtered by the air filter 8 and then sucked into the air chamber of the shell 2 through the air inlet slot 7 and the air inlet cover 6. The gas passes through the air chamber and is discharged through the air outlet. The main controller 1 controls the laser transmitter 10 to turn on, and the laser transmitter 10 emits a laser beam. The laser beam is reflected by multiple reflectors 5 and then emitted to the receiver 4 in a broken line spiral shape. The active end of the angle adjustment micromotor 9 drives the laser transmitter 10 to swing, thereby adjusting the angle between the laser beam and the axis of the air chamber of the shell 2, and can adjust the number of levels of the laser beam between the laser component 3 and the receiver 4. The smaller the angle, the more the number of levels, and the longer the optical path length. The active end of the VCM motor 11 is retractable. The collimating lens is moved closer to or away from the transmitting head of the laser transmitter 10, so as to adjust the focal position of the laser beam, and then adjust the size of the laser spot on the reflector 5 and the receiver 4. Since the laser spot diffuses each time the laser beam is reflected, the more laser reflection levels there are, the smaller the spot is adjusted, so that the size of the laser spot received by the receiver 4 is appropriate. By comparing the intensity of the laser emitted by the laser transmitter 10 and the spectral changes of the laser received on the receiver 4, the methane concentration in the gas chamber is detected, and an adaptive effect is achieved. Compared with the prior art, the optical path formed by the reflection of the laser beam between multiple reflectors 5 is not in the same plane, and each reflector 5 reflects the laser beam multiple times, thereby greatly increasing the optical path of the laser beam with limited structural changes, thereby improving the detection accuracy of methane. Example 2

[0023] like Figure 1 , Figure 2 , Figure 5 and Figure 6 As shown, on the basis of Example 1, it also includes a sub-controller 16 and an electric turntable 17, the stator of the electric turntable 17 is installed on the sub-controller 16, the main controller 1 is installed on the rotor of the electric turntable 17, and the sub-controller 16 is electrically connected to the electric turntable 17; it also includes a flange plate 18, the flange plate 18 is installed at the bottom of the sub-controller 16, and the flange plate 18 is provided with a mounting hole; it also includes an electric slip ring 19, the electric slip ring 19 is sleeved on the rotor end of the electric turntable 17, the cable of the sub-controller 16 is electrically connected to the outer ring of the electric slip ring 19, and the cable of the main controller 1 is electrically connected to the inner ring of the electric slip ring 19.

[0024] The flange plate 18 is installed on the designated bracket or designated position through the mounting hole to facilitate installation and disassembly. The sub-controller 16 controls the operation of the electric turntable 17. The rotor of the electric turntable 17 drives the main controller 1 to rotate, thereby rotating the shell 2, the air intake cover 6 and the air intake slot 7, so as to inhale the gas in different directions of the shell 2 to detect the methane concentration. By setting the electric slip ring 19, the cable between the main controller 1 and the sub-controller 16 will not be entangled due to the rotation of the main controller 1, thereby avoiding cable damage and improving reliability. Example 3

[0025] like Figure 6 and Fig.10 As shown, on the basis of Example 2, it also includes an air guide cover 20, a plurality of metal sheets 21 and a plurality of contacts 22, the air guide cover 20 is sleeved on the outer wall of the shell 2, the air guide cover 20 is provided with a slot to avoid the air inlet slot 7, a plurality of air inlet slots are arranged on the circumference of the outer wall of the air guide cover 20, a plurality of metal sheets 21 are located between the air guide cover 20 and the outer wall of the shell 2, the two ends of the plurality of metal sheets 21 are not connected to the inner wall of the air guide cover 20, the plurality of metal sheets 21 are respectively arranged on both sides of the plurality of air inlet slots of the air guide cover 20, the middle parts of the opposite surfaces of the two metal sheets 21 located on both sides of the same air inlet slot are both installed with contacts 22, and the contacts 22 located on the plurality of metal sheets 21 are respectively arranged on both sides of the plurality of air inlet slots of the air guide cover 20. The multiple metal sheets 21 on the left side of the air inlet slot are electrically connected to one end of the signal cable, and the multiple metal sheets 21 on the right side of the multiple air inlet slots are electrically connected to the other end of the signal cable, and the signal cable is electrically connected to the main controller 1; the multiple metal sheets 21 are divided into two groups, the multiple metal sheets 21 on the left side of the middle plane of the air inlet slot 7 are arranged as the left group, and the multiple metal sheets 21 on the right side of the middle plane of the air inlet slot 7 are arranged as the right group, the left and right groups of metal sheets 21 are respectively connected to the left signal cable and the right signal cable, and the left signal cable and the right signal cable are evenly electrically connected to the main controller 1.

[0026] When the airflow blows to the left part of the air guide cover 20, the airflow blows between the corresponding multiple pairs of metal sheets 21 through the plurality of air inlet slots on the windward surface of the left part of the air guide cover 20. Since the airflow speed between the two metal sheets 21 is faster than the airflow speed outside the two metal sheets 21, a pressure difference is generated. The pressure difference brings the two opposite metal sheets 21 closer together, so that the two contacts 22 on the two metal sheets 21 are in contact, so that the left signal cable is connected to generate a left signal. The main controller 1 receives the left signal and sends it to the sub-controller 16 through the cable and the electric slip ring 19. The sub-controller 16 controls the electric turntable 1 7 is running, so that the shell 2 drives the air guide cover 20 to start to rotate to the left. When the air inlet slot 7 rotates to the windward side, the air guide cover 20 is provided with an avoidance slot at the air inlet slot 7, so that the airflow no longer enters the inner side of the air guide cover 20, so that the signal disappears, and the electric turntable 17 stops, so that the air inlet slot 7 can automatically turn to the direction of the airflow, so that the methane in the airflow can more efficiently enter the shell 2 for detection, thereby improving the reliability of the detection. Similarly, when the airflow blows to the right part of the air guide cover 20, the rotor of the electric turntable 17 rotates to the right, so that the air inlet slot 7 is more quickly turned to the direction of the airflow, thereby improving the detection efficiency.

[0027] like Figures 1 to 10As shown, an adaptive laser methane sensor based on a MEMS optical system of the present invention, when working, firstly installs the sensor to a designated position through a flange plate 18, when the airflow blows to the left part of the air guide cover 20, the airflow blows through a plurality of pairs of metal sheets 21 on the left part through a plurality of air inlet slots on the left windward surface of the air guide cover 20, and the plurality of metal sheets 21 of the left group approach to drive the plurality of contacts 22 thereon to contact, so that the left signal cable is connected to generate a left signal, and then the main controller 1 receives the left signal and transmits The signal is sent to the sub-controller 16 through the cable and the electric slip ring 19. The sub-controller 16 controls the electric turntable 17 to operate, so that the shell 2 drives the air guide cover 20 to rotate to the left. When the air inlet slot 7 rotates to the windward side, the air guide cover 20 is provided with an avoidance slot at the air inlet slot 7 so that the air flow no longer enters the inner side of the air guide cover 20, so that the signal disappears, the electric turntable 17 stops, so that the air inlet slot 7 can automatically face the direction of the air flow, and then the motor 12 drives the impeller 13 to rotate, and the gas in the air chamber of the shell 2 is The gas is discharged through the air outlet, and the external gas is filtered through the air filter 8 and then sucked into the air chamber of the housing 2 through the air inlet slot 7 and the air inlet cover 6. The main controller 1 controls the laser emitter 10 to turn on, and the laser emitter 10 emits a laser beam to the reflector 5. The laser beam is reflected by multiple reflectors 5 and then emitted to the receiver 4 in a broken line spiral shape. The angle between the laser emitter 10 and the axis of the air chamber of the housing 2 is adjusted by the angle adjustment micromotor 9, so that the number of levels of the laser beam between the laser component 3 and the receiver 4 can be adjusted. The smaller the angle, the more levels, and the longer the optical path length. The focus of the laser emitted by the laser emitter 10 can be adjusted by the VCM motor 11. The spot size of the laser beam reflected on the reflector 5 can be adjusted. Since the laser beam diffuses once each time it is reflected, the more laser reflection levels, the smaller the spot adjustment, so that the size of the laser spot received by the receiver 4 is appropriate. Finally, the methane concentration in the air chamber can be detected by comparing the intensity of the laser emitted by the laser emitter 10 and the spectrum change of the laser received on the receiver 4.

[0028] The main functions achieved by the present invention are: 1. The use of a broken line spiral optical path greatly increases the optical path of the laser beam with limited structural changes, thereby improving the detection accuracy of methane; 2. Adaptive adjustment of laser beam angle and laser beam focus is achieved through MEMS optical system; 3. Improve methane detection efficiency through active gas extraction; 4. The direction of the air inlet slot 7 can be automatically adjusted so that the air inlet slot 7 faces the direction of the airflow, thereby improving the detection accuracy.

[0029] The adaptive laser methane sensor based on MEMS optical system of the present invention has common mechanical installation, connection or setting methods, which can be implemented as long as the beneficial effects can be achieved; the adaptive laser methane sensor based on MEMS optical system of the present invention includes a main controller 1, a housing 2, a laser assembly 3, a receiver 4, a reflector 5, an air filter element 8, an angle adjustment micromotor 9, a laser transmitter 10, a VCM motor 11, a motor 12, an impeller 13, a sub-controller 16, an electric turntable 17, an electric slip ring 19, a metal sheet 21, a contact 22, cables and a signal cable, which are purchased on the market, and technicians in the industry only need to install and operate according to the accompanying instruction manual, without the need for creative labor by technicians in this field.

[0030] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. An adaptive laser methane sensor based on a MEMS optical system, comprising a main controller (1), a housing (2), a laser component (3) and a receiver (4), wherein the housing (2) is mounted on the main controller (1), and the laser component (3) and the receiver (4) are both mounted on the housing (2); characterized in that: The invention also comprises a plurality of reflectors (5), an air intake cover (6), an air intake slot (7) and an air filter element (8); an air chamber is arranged along the axis of the housing (2); an air intake is arranged at an end of the housing (2) away from the main controller (1); an air outlet is arranged at an end of the housing (2) close to the main controller (1); a transmitting end of the laser component (3) and a receiving end of the receiver (4) extend into two ends of the air chamber respectively; the cross section of the air chamber is a regular polygon; a plurality of reflectors (5) are respectively mounted on the inner wall of the air chamber; and the laser component (3) is arranged on the inner wall of the air chamber. (3) emitting a laser beam toward the reflector (5), wherein the laser beam is reflected between the plurality of reflectors (5), so that the laser beam is emitted toward the receiver (4) in a spiral shape between the plurality of reflectors (5); an air intake cover (6) is mounted on the air intake port of the housing (2); an air intake slot (7) is mounted on the air intake cover (6); the air intake slot (7) is close to the outer wall of the housing (2); an air filter element (8) is mounted on the opening of the air intake slot (7); the air intake slot (7) and the air intake cover (6) are connected to the air chamber through the air intake port of the housing (2); The laser assembly (3) comprises an angle-adjusting micromotor (9), a laser emitter (10) and a VCM motor (11); the angle-adjusting micromotor (9) is mounted on the housing (2); the laser emitter (10) is mounted on the movable end of the angle-adjusting micromotor (9); the VCM motor (11) is mounted on the emitter head of the laser emitter; and a collimating lens is mounted on the movable end of the VCM motor (11).

2. The adaptive laser methane sensor based on MEMS optical system according to claim 1, characterized in that: The cross section of the air chamber of the shell (2) is a regular triangle, a regular quadrilateral or a regular pentagon, and the number of the reflectors (5) matches the number of side walls of the air chamber of the shell (2).

3. The adaptive laser methane sensor based on MEMS optical system according to claim 1, characterized in that: It also includes a motor 1 (12) and an impeller (13), wherein the motor 1 (12) is mounted inside the air chamber of the housing (2), the motor 1 (12) is located at the air outlet of the air chamber, and the impeller (13) is mounted on the output shaft of the motor 1 (12).

4. The adaptive laser methane sensor based on MEMS optical system according to claim 1, characterized in that: The invention also comprises a mounting seat 1 (14) and a mounting seat 2 (15), wherein the mounting seat 1 (14) is arranged at one end of the housing (2) close to the air inlet, and a mounting opening 1 is arranged at the outer end of the mounting seat 1 (14), and the mounting seat 1 (14) is used to mount the laser assembly (3); the mounting seat 2 (15) is arranged at one end of the housing (2) close to the air outlet, and a mounting opening 2 is arranged at the outer end of the mounting seat 2 (15), and the mounting seat 2 (15) is used to mount the receiver (4).

5. The adaptive laser methane sensor based on MEMS optical system according to claim 1, characterized in that: It also includes a sub-controller (16) and an electric turntable (17), wherein the stator of the electric turntable (17) is mounted on the sub-controller (16), the main controller (1) is mounted on the rotor of the electric turntable (17), and the sub-controller (16) is electrically connected to the electric turntable (17).

6. The adaptive laser methane sensor based on MEMS optical system as claimed in claim 5, characterized in that: It also includes a flange plate (18), which is mounted on the bottom of the auxiliary controller (16), and the flange plate (18) is provided with a mounting hole.

7. The adaptive laser methane sensor based on MEMS optical system as claimed in claim 5, characterized in that: It also includes an electric slip ring (19), which is mounted on the rotor end of the electric turntable (17), the cable of the auxiliary controller (16) is electrically connected to the outer ring of the electric slip ring (19), and the cable of the main controller (1) is electrically connected to the inner ring of the electric slip ring (19).

8. The adaptive laser methane sensor based on MEMS optical system as claimed in claim 7, characterized in that: The invention also comprises an air guide cover (20), a plurality of metal sheets (21) and a plurality of contacts (22); the air guide cover (20) is sleeved on the outer wall of the shell (2); the air guide cover (20) is provided with a slot for avoiding the air inlet slot (7); a plurality of air inlet slots are provided on the circumference of the outer wall of the air guide cover (20); the plurality of metal sheets (21) are located between the air guide cover (20) and the outer wall of the shell (2); the two ends of the plurality of metal sheets (21) are not connected to the inner wall of the air guide cover (20); and the plurality of metal sheets (21) are connected to the inner wall of the air guide cover (20). The sheets (21) are respectively arranged on both sides of the multiple air inlet slots of the air guide cover (20), and contacts (22) are installed in the middle of the opposite surfaces of the two metal sheets (21) located on both sides of the same air inlet slot. The multiple metal sheets (21) located on the left side of the multiple air inlet slots are electrically connected to one end of the signal cable, and the multiple metal sheets (21) located on the right side of the multiple air inlet slots are electrically connected to the other end of the signal cable, and the signal cable is electrically connected to the main controller (1).

9. The adaptive laser methane sensor based on MEMS optical system as claimed in claim 8, characterized in that: The plurality of metal sheets (21) are divided into two groups, the left and right groups. The plurality of metal sheets (21) located on the left side of the middle plane of the air inlet slot (7) are the left group, and the plurality of metal sheets (21) located on the right side of the middle plane of the air inlet slot (7) are the right group. The left and right groups of metal sheets (21) are respectively connected to a left signal cable and a right signal cable, and the left signal cable and the right signal cable are electrically connected to the main controller (1).

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