Sensitivity-tunable modal localization inductive electric field sensor and electric field detection method

Abstract

This disclosure provides a sensitivity-tunable modal localization inductive electric field sensor and electric field detection method, which can be applied to the field of electric field sensor technology. The modal localization inductive electric field sensor and electric field detection method include: a substrate for supporting a resonator array unit, an electrode unit, and a stiffness-adjusting electrode unit; a resonator array unit disposed above the center of the substrate for driving resonator vibration, wherein the resonator array unit includes a resonator and a comb structure connected to the resonator; an electrode unit, wherein the electrode unit and the comb structure connected to the resonator are arranged alternately for generating an output signal in response to the resonator vibration; and stiffness-adjusting electrode units disposed on both sides of the resonator array unit for adjusting the stiffness difference and common mode error of the resonator to enable the resonator to satisfy modal localization, thereby adjusting the sensitivity of the sensitivity-tunable modal localization inductive electric field sensor.

Description

Technical Field

[0001] This disclosure relates to the field of electric field sensor technology, and more specifically to a sensitivity-adjustable modal localization inductive electric field sensor and an electric field detection method. Background Technology

[0002] Electric field sensors are widely used in various fields, such as aerospace, meteorology, power, and industrial production. Currently, electric field sensors developed using microelectromechanical systems (MEMS) are characterized by their small size, light weight, and low cost, making them an important development direction in the field of electric field detection. However, common charge-inductive electric field sensors suffer from limited sensitivity and lack of adjustability, failing to meet the increasing demands for large dynamic range and high-sensitivity electric field detection. With the improvement of modal localization theory, electric field sensors based on the modal localization principle have attracted increasing attention due to their high sensitivity. However, existing modal localization electric field sensors suffer from sensitivity nonlinearity, limiting their measurement range.

[0003] In the process of realizing the above-mentioned inventive concept, the inventors discovered that: in the related technologies, due to the imperfection of the manufacturing process, common mode error is introduced during the preparation of electric field sensors, resulting in a large amount of environmental noise in the process of detecting the electric field to be measured. In addition, the measurement results output by the existing modal localization electric field sensors have nonlinear defects, and there is a technical problem that the test sensitivity of the electric field sensor cannot be adjusted. Summary of the Invention

[0004] In view of the above problems, this disclosure provides a sensitivity-adjustable modal localization inductive electric field sensor and an electric field detection method.

[0005] According to a first aspect of this disclosure, a sensitivity-tunable modal localization electric field sensor is provided, comprising: a substrate for supporting a resonator array unit, an electrode unit, and a stiffness-adjusting electrode unit, wherein anchor points are disposed on the surface of the substrate; a resonator array unit disposed above the center of the substrate for driving a resonator to vibrate, wherein the resonator array unit includes a resonator and a comb structure connected to the resonator; an electrode unit, wherein the electrode unit and the comb structure connected to the resonator are arranged alternately for generating an output signal in response to the vibration of the resonator; and stiffness-adjusting electrode units disposed on both sides of the resonator array unit for adjusting the stiffness difference and common mode error of the resonator so as to enable the resonator to satisfy modal localization, thereby adjusting the sensitivity of the sensitivity-tunable modal localization inductive electric field sensor.

[0006] According to embodiments of this disclosure, the comb structure connected to the resonator includes a first comb structure and a second comb structure. The electrode unit includes an electric field induction electrode unit and a reference output electrode unit. The first comb structure is disposed on one side of the electric field induction electrode unit and is differentially staggered with the electric field induction electrode unit. It is used to generate and output an induction signal in response to the vibration of the resonator, based on the principle of charge induction. The second comb structure is disposed on one side of the reference output electrode unit and is staggered with the reference output electrode unit. It is used to change the capacitance between the reference electrode and the second comb structure in response to the vibration of the resonator, and generate and output a reference signal based on the change in capacitance.

[0007] According to embodiments of this disclosure, the resonator array unit includes at least two resonators. The resonator array unit further includes: a driving structure disposed on both sides of the resonators for driving the resonators to generate vibration; a coupling structure disposed between multiple resonators for coupling the multiple resonators to form a weak coupling between the multiple resonators; and a support beam disposed on both sides of the driving structure for connecting the resonator array unit and the substrate. The support beam is one or a combination of a straight beam, a folded beam, and a curved beam.

[0008] According to embodiments of this disclosure, tuning electrode units are disposed on both sides of the resonator to eliminate the common mode error of the resonator array, so that the resonator array can satisfy mode localization.

[0009] According to embodiments of this disclosure, the driving method of the driving structure includes at least one of the following: electrostatic comb driving, electrostatic plate driving, piezoelectric driving, magnetic driving, and thermal driving.

[0010] According to embodiments of this disclosure, the coupling structure includes one of the following: an electrostatic coupling structure, a mechanical coupling structure, or a hybrid mechanical-electrostatic coupling structure.

[0011] A second aspect of this disclosure provides an electric field detection method, comprising: applying a driving voltage excitation to a driving electrode driving structure; based on the modal localization principle, a first comb structure and a second comb structure generate amplitudes with a constant amplitude ratio to facilitate resonator vibration; adjusting the voltage of a stiffness adjustment electrode unit to change the amplitude ratio of the resonator, thereby obtaining a resonator with a predetermined sensitivity; responding to the vibration of the first comb structure of the resonator, based on the modal localization principle and the charge induction principle, an electric field sensing electrode unit outputs an induction signal; responding to the vibration of the second comb structure, based on the modal localization principle and according to the capacitance change between a reference electrode and the resonator, a reference output electrode unit outputs a reference signal; and based on the large amplitude ratio characteristic of modal localization, by comparing the induction signal and the reference signal, the electric field strength of the electric field to be measured is obtained.

[0012] According to embodiments of this disclosure, a sensitivity-adjustable modal localization inductive electric field sensor includes two stiffness adjustment electrode units. The first stiffness adjustment electrode unit is located inside or outside a resonator array unit on one side of the electric field induction electrode unit, and the second stiffness adjustment electrode unit is located inside or outside a resonator array unit on one side of the reference output electrode unit. Adjusting the voltage of the stiffness adjustment electrode unit to change the amplitude ratio of the resonator and obtain the resonator with a predetermined sensitivity includes: applying a first adjustment voltage to the first stiffness adjustment electrode unit and applying a second adjustment voltage to the second stiffness adjustment electrode unit to eliminate stiffness errors caused by manufacturing errors, thereby obtaining multiple resonators that satisfy modal localization, wherein the first adjustment voltage and the second adjustment voltage are voltages of different magnitudes; applying a third adjustment voltage to the first stiffness adjustment electrode unit and a fourth adjustment voltage to the second stiffness adjustment electrode unit to adjust the sensitivity of the sensitivity-adjustable modal localization electric field sensor, thereby obtaining a modal localization inductive electric field sensor that satisfies a preset accuracy, wherein the third adjustment voltage and the fourth adjustment voltage are voltages of different magnitudes.

[0013] A third aspect of this disclosure provides an electric field sensor, comprising: a sensitivity-tunable modal localization electric field sensor as claimed in any one of claims 1 to 8.

[0014] According to embodiments of this disclosure, the electric field sensor further includes a two-dimensional or three-dimensional electric field sensor composed of a plurality of modally localized electric field sensors with adjustable sensitivity, for measuring two-dimensional or three-dimensional electric fields or voltages.

[0015] According to the sensitivity-tunable modal localization inductive electric field sensor and electric field detection method disclosed herein, the sensitivity-tunable modal localization inductive electric field sensor includes a substrate, a resonator array unit, an electrode unit, and a stiffness-adjusting electrode unit. The resonator array unit is disposed above the center of the substrate, the electrode unit is arranged alternately with the comb structure in the resonator array unit, and the stiffness-adjusting electrode unit is disposed on both sides of the resonator array unit. By applying a driving voltage to the driving structure of the resonator array unit, the resonators within the resonator array unit and the comb structure connected to the resonators vibrate, causing the electrode unit to vibrate in response to the resonators. Based on the principle of charge induction and capacitance change, an output signal can be generated. Simultaneously, by applying an adjustment voltage to the stiffness adjustment electrode unit, the stiffness difference and common mode error among the multiple resonators in the resonator array unit are adjusted. This achieves mode localization of the resonator array unit through the stiffness adjustment electrode unit, adjusting the sensitivity of the mode localization inductive electric field sensor. Thus, the sensitivity of the mode localization inductive electric field sensor can be adjusted according to different measurement accuracy requirements, making the output detection result of the mode localization inductive electric field sensor linear when detecting the electric field under test, increasing the measurement range. Furthermore, since the common mode error of the resonator array unit is eliminated by the stiffness adjustment electrode unit, environmental noise is reduced, and the accuracy of the output signal is improved. Attached Figure Description

[0016] The foregoing contents, as well as other objects, features, and advantages of this disclosure, will become clearer from the following description of embodiments with reference to the accompanying drawings, in which:

[0017] Figure 1 A schematic diagram of the structure of a sensitivity-adjustable modal localization inductive electric field sensor according to an embodiment of the present disclosure is shown.

[0018] Figure 2 This schematically illustrates the structure of a resonator array unit of a sensitivity-adjustable modal localization inductive electric field sensor according to an embodiment of the present disclosure.

[0019] Figure 3 A schematic diagram of the structure of a sensitivity-adjustable modal localization inductive electric field sensor according to another embodiment of the present disclosure is shown.

[0020] Figure 4 A flowchart illustrating an electric field detection method according to an embodiment of the present disclosure is shown schematically.

[0021] Figure label:

[0022] Substrate 101, resonator array unit 102, electric field sensing electrode unit 103, reference output electrode unit 104, tuning electrode unit 105, stiffness adjustment electrode unit 106, first resonator 201, second resonator 202, third resonator 203, first comb structure 204, second comb structure 205, first driving structure 206, second driving structure 207, third driving structure 208, fourth driving structure 209, fifth driving structure 210, sixth driving structure 211, seventh driving structure 212, eighth driving structure 213, first coupling structure 214, second coupling structure 215, third coupling structure 216, fourth coupling structure 217, first support beam 218, second support beam 219, third support beam 220, fourth support beam 221, fourth resonator 301, fifth resonator 302. Detailed Implementation

[0023] The embodiments of the present disclosure will now be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the disclosure. In the following detailed description, numerous specific details are set forth to provide a thorough understanding of the embodiments of the present disclosure for ease of explanation. However, it will be apparent that one or more embodiments may be practiced without these specific details. Furthermore, descriptions of well-known structures and techniques are omitted in the following description to avoid unnecessarily obscuring the concepts of the present disclosure.

[0024] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit this disclosure. The terms “comprising,” “including,” etc., as used herein indicate the presence of the stated features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0025] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.

[0026] When expressions such as "at least one of A, B, and C, etc." are used, they should generally be interpreted in accordance with the meaning commonly understood by those skilled in the art (for example, "a system having at least one of A, B, and C" should include but is not limited to a system having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, C, etc.).

[0027] In the technical solution of this invention, the user information (including but not limited to user personal information, user image information, user device information, such as location information) and data (including but not limited to data used for analysis, stored data, displayed data, etc.) involved are all information and data authorized by the user or fully authorized by all parties. Furthermore, the collection, storage, use, processing, transmission, provision, disclosure, and application of related data all comply with relevant laws, regulations, and standards, take necessary confidentiality measures, do not violate public order and good morals, and provide corresponding operation entry points for users to choose to authorize or refuse.

[0028] With the development of electric field detection technology, electric field detection has been applied in many fields, such as aerospace, meteorology, power, hazardous chemicals, and industrial production. Although electric field sensors fabricated using microelectromechanical systems (MEMS) have the advantages of small size, light weight, and low cost, imperfections in the fabrication process can introduce common mode errors, leading to inaccuracies in the measurement results obtained when detecting the electric field under test.

[0029] However, with the development of the technology industry, the demand for electric field sensors with large dynamic range and high sensitivity is increasing. During the research and development process, researchers discovered that in related technologies, imperfections in the fabrication process of electric field sensors can introduce common mode errors, leading to significant environmental noise during the detection of the electric field. Furthermore, existing modally localized electric field sensors exhibit nonlinear measurement results, and there is a technical problem with the inability to adjust the test sensitivity of electric field sensors.

[0030] In view of this, embodiments of the present disclosure provide a sensitivity-adjustable modal localization inductive electric field sensor, comprising: a substrate for supporting a resonator array unit, an electrode unit, and a stiffness-adjusting electrode unit, wherein anchor points are provided on the surface of the substrate; a resonator array unit disposed above the center of the substrate for driving a resonator to vibrate, wherein the resonator array unit includes a resonator and a comb structure connected to the resonator; an electrode unit, wherein the electrode unit and the comb structure connected to the resonator are arranged alternately for generating an output signal in response to the vibration of the resonator; and stiffness-adjusting electrode units disposed on both sides of the resonator array unit for adjusting the stiffness difference and common mode error of the resonator so as to enable the resonator to satisfy modal localization, thereby adjusting the sensitivity of the sensitivity-adjustable modal localization inductive electric field sensor.

[0031] The following will be through Figures 1-3 A detailed description is provided of the sensitivity-adjustable modal localization inductive electric field sensor according to the disclosed embodiments.

[0032] According to embodiments of this disclosure, the sensitivity-tunable modal localization inductive electric field sensor includes a substrate, a resonator array unit, an electrode unit, and a stiffness-adjustable electrode unit.

[0033] According to embodiments of this disclosure, a substrate is used to support a resonator array unit, an electrode unit, and a stiffness adjustment electrode unit, and anchor points are provided on the surface of the substrate.

[0034] According to embodiments of this disclosure, a plurality of anchor points may be provided on the substrate surface.

[0035] According to an embodiment of this disclosure, a resonator array unit is disposed above the center of a substrate for driving resonator vibration.

[0036] According to embodiments of this disclosure, the resonator array unit includes a resonator and a comb structure connected to the resonator.

[0037] According to embodiments of this disclosure, when a driving voltage is applied to the driving structure of the resonator array unit, the resonator can generate an amplitude with a predetermined amplitude ratio, thereby driving the resonator to vibrate.

[0038] According to embodiments of this disclosure, the resonator array unit includes at least two resonators.

[0039] According to embodiments of this disclosure, the resonator array unit may include two resonators or three resonators.

[0040] According to embodiments of this disclosure, the arrangement of resonators may include: horizontal arrangement, vertical arrangement, and other shapes.

[0041] According to embodiments of this disclosure, electrode units and comb-tooth structures connected to a resonator are arranged alternately to generate an output signal in response to resonator vibration.

[0042] According to embodiments of this disclosure, the electrode unit is fixedly connected to the substrate via anchor points.

[0043] According to embodiments of this disclosure, when the resonator vibrates, it drives the comb structure connected to the resonator to vibrate, thereby enabling the electrode unit to generate and output signals.

[0044] According to embodiments of this disclosure, stiffness adjustment electrode units are disposed on both sides of the resonator array unit to adjust the stiffness difference and common mode error of the resonator so as to enable the resonator to meet mode localization and adjust the sensitivity of the mode localization inductive electric field sensor with adjustable sensitivity.

[0045] According to embodiments of this disclosure, the stiffness adjustment electrode unit is fixedly connected to the substrate via anchor points.

[0046] According to embodiments of this disclosure, at least two stiffness-adjusting electrode units are included.

[0047] According to embodiments of this disclosure, different adjustment voltages can be applied to two stiffness adjustment electrode units to cause the resonator array unit to vibrate, thereby making the stiffness of multiple resonators in the resonator array unit consistent and achieving the effect of eliminating the common mode error of the resonator array unit.

[0048] According to embodiments of this disclosure, different adjustment voltages can also be applied to two stiffness adjustment electrode units to cause the resonator array unit to vibrate, thereby generating a stiffness difference between multiple resonators within the resonator array unit, achieving the effect of adjusting the sensitivity of the modal localization inductive electric field sensor.

[0049] According to embodiments of this disclosure, the shape of the stiffness adjustment electrode unit may include any of the following: cuboid, cube, frustum, prism, cylinder, cone, or irregular body.

[0050] According to embodiments of this disclosure, a sensitivity-adjustable modal localization inductive electric field sensor includes a substrate, a resonator array unit, an electrode unit, and a stiffness-adjusting electrode unit. The resonator array unit is disposed above the center of the substrate, the electrode unit is arranged alternately with the comb structure in the resonator array unit, and the stiffness-adjusting electrode unit is disposed on both sides of the resonator array unit. By applying a driving voltage to the driving structure of the resonator array unit, the resonators within the resonator array unit and the comb structure connected to the resonators vibrate, causing the electrode unit to vibrate in response to the resonators. Based on the principle of charge induction and capacitance change, an output signal can be generated. Simultaneously, by applying an adjustment voltage to the stiffness adjustment electrode unit, the stiffness difference and common mode error among the multiple resonators in the resonator array unit are adjusted. This achieves mode localization of the resonator array unit through the stiffness adjustment electrode unit, adjusting the sensitivity of the mode localization inductive electric field sensor. Thus, the sensitivity of the mode localization inductive electric field sensor can be adjusted according to different measurement accuracy requirements, making the detection result of the mode localization inductive electric field sensor linear when detecting the electric field under test, further increasing the measurement range. Furthermore, since the common mode error of the resonator array unit is eliminated by the stiffness adjustment electrode unit, environmental noise is reduced, and the accuracy of the output signal is improved.

[0051] According to embodiments of this disclosure, the resonator array unit includes at least two resonators, and the resonator array unit includes:

[0052] According to an embodiment of this disclosure, a driving structure is disposed on both sides of a resonator for driving the resonator to vibrate when a driving voltage is applied to the driving structure.

[0053] According to embodiments of this disclosure, the driving structure can be disposed on both sides of each resonator, or on one side of each resonator. For example, in the case of a sensitivity-adjustable modal localization electric field sensor containing two resonators, there can be four driving structures: the first driving structure is disposed on the left side of the first resonator, the second driving structure is disposed on the right side of the first resonator, the third driving structure is disposed on the left side of the second resonator, and the fourth driving structure is disposed on the right side of the second resonator. In the case of a modal localization electric field sensor containing three resonators, there can also be four driving structures: the first driving structure is disposed on the left side of the first resonator, the second driving structure is disposed between the first and second resonators, the third driving structure is disposed between the second and third resonators, and the fourth driving structure is disposed on the right side of the third resonator.

[0054] According to embodiments of this disclosure, the driving method of the driving structure includes at least one of the following: electrostatic comb driving, electrostatic plate driving, piezoelectric driving, magnetic driving, and thermal driving.

[0055] According to embodiments of this disclosure, by applying a driving voltage to the driving structure, multiple resonators are caused to vibrate with a predetermined amplitude ratio, thereby enabling the electrode unit to output a signal in response to the vibrations with the predetermined amplitude ratio generated by the multiple resonators. The predetermined amplitude ratio is constant, meaning the resonators produce vibrations with a constant amplitude ratio.

[0056] According to embodiments of this disclosure, a coupling structure is disposed between multiple resonators for coupling the multiple resonators to form a weak coupling between the multiple resonators.

[0057] According to embodiments of this disclosure, the resonators are coupled to each other through a coupling structure, and the resonator array unit includes at least one coupling structure.

[0058] According to embodiments of this disclosure, the coupling structure includes one of the following: an electrostatic coupling structure, a mechanical coupling structure, or a hybrid mechanical-electrostatic coupling structure.

[0059] According to an embodiment of this disclosure, support beams are disposed on both sides of the drive structure for connecting the resonator array unit and the substrate.

[0060] According to embodiments of this disclosure, resonators are disposed on a substrate via support beams. A support beam is disposed on both sides of each resonator, and the support beams are connected to the resonators. The support beams can be located on one side or both sides of the driving structure. For example, in the case of a modal localization electric field sensor containing two resonators, there can be four support beams. The left side of the first resonator is connected to the first support beam, and the left side of the first support beam is connected to the first driving structure. The right side of the first resonator is connected to the second support beam, and the right side of the second support beam is connected to the second driving structure. The left side of the second resonator is connected to the third support beam, and the left side of the third support beam is connected to the second driving structure. The right side of the second resonator is connected to the fourth support beam, and the right side of the fourth support beam is connected to the fourth driving structure. In modal localization... In the case of an electric field sensor containing three resonators, there can also be four support beams. The first driving structure is located to the left of the first resonator, and the first support beam is located to the left of the first driving structure. The first support beam is connected to the first resonator. The second driving structure is located to the right of the first resonator, and the second support beam is located to the right of the second driving structure. The second support beam is connected to the second resonator through a coupling structure. The second resonator is connected to the third support beam through a coupling structure. The third driving structure is located to the left of the third resonator, and the third support beam is located to the left of the third driving structure. The third support beam is connected to the third resonator. The fourth driving structure is located to the right of the third resonator, and the fourth support beam is located to the right of the fourth driving structure. The fourth support beam is connected to the third resonator.

[0061] According to embodiments of this disclosure, the support beam can be one or a combination of a straight beam, a folded beam, a curved beam, or a combination thereof.

[0062] According to embodiments of this disclosure, the resonator array unit includes a resonator, a driving structure, a coupling structure, and a support beam. The resonator is disposed on the substrate through the support beam. Multiple resonators are weakly coupled to each other through the coupling structure. The driving structure is located on one or both sides of the resonator. By applying a driving voltage to the driving structures on both sides of the resonator, the resonator and the comb structure connected to the resonator are made to vibrate, thereby modulating the electric field so that the electrode unit can generate a signal.

[0063] According to embodiments of this disclosure, the comb structure connected to the resonator includes a first comb structure and a second comb structure, and the electrode unit includes an electric field sensing electrode unit and a reference output electrode unit.

[0064] According to embodiments of this disclosure, the resonator array unit includes a resonator, a comb structure connected to the resonator, a driving structure, a coupling structure, and a support beam.

[0065] According to embodiments of this disclosure, since the resonator array unit includes multiple resonators, the comb structure connected to the first resonator is a first comb structure, and the comb structure connected to the second resonator is a second comb structure.

[0066] According to an embodiment of this disclosure, a first comb structure is disposed on one side of the electric field sensing electrode unit and is differentially staggered with the electric field sensing electrode unit. It is used to generate and output the sensing signal in response to the vibration of the resonator, based on the principle of charge induction. The comb structure can increase the sensing area to enhance the output sensing signal.

[0067] According to embodiments of this disclosure, the structural shape of the sensing electrode may include at least one of the following: a strip structure, a comb structure, an irregular shape structure, or a combination thereof.

[0068] According to embodiments of this disclosure, the first comb tooth structure includes a first upper comb tooth structure and a first lower comb tooth structure. Corresponding to the first upper comb tooth structure and the first lower comb tooth structure, the sensitivity-adjustable modal localization electric field sensor may include two electric field sensing electrode units. The electrode comb teeth of the first electric field sensing electrode unit are differentially staggered with the first upper comb tooth structure, and the electrode comb teeth of the second electric field sensing electrode unit are differentially staggered with the first lower comb tooth structure.

[0069] According to embodiments of this disclosure, the output sensing signal can also be enhanced by differentially interleaving the electrode comb teeth and comb tooth structure of the electric field sensing electrode unit.

[0070] According to embodiments of this disclosure, the electric field sensing electrode unit is fixed to the substrate by anchor points.

[0071] According to embodiments of this disclosure, by applying a first driving voltage to a driving structure connected to a resonator on one side of the electric field sensing electrode unit, the resonator on one side of the electric field sensing electrode unit vibrates at a predetermined amplitude, thereby causing the electric field sensing electrode unit to output an induced signal. According to embodiments of this disclosure, a second comb-tooth structure is disposed on one side of the reference output electrode unit and is arranged alternately with the reference output electrode unit. It is used to change the capacitance between the reference electrode and the second comb-tooth structure in response to the vibration of the resonator, and to generate and output the reference signal based on the change in capacitance.

[0072] According to an embodiment of this disclosure, by applying a second driving voltage to the driving structure connected to the resonator on one side of the reference output electrode unit, the resonator on one side of the reference output electrode unit vibrates at a predetermined amplitude, thereby causing the reference output electrode unit to output an induced signal.

[0073] According to embodiments of this disclosure, the reference output electrode unit is fixed to the substrate by anchor points.

[0074] According to embodiments of this disclosure, the structural shape of the reference electrode may include at least one of the following: a strip structure, a comb structure, an irregular shape structure, or a combination thereof.

[0075] According to embodiments of this disclosure, the second comb structure includes a second upper comb structure and a second lower comb structure. Corresponding to the second upper comb structure and the second lower comb structure, the sensitivity-adjustable modal localization electric field sensor may include two reference output electrode units. The electrode combs of the first reference output electrode unit are arranged alternately with the second upper comb structure, and the electrode combs of the second reference output electrode unit are arranged alternately with the second lower comb structure.

[0076] According to embodiments of this disclosure, the first driving voltage and the second driving voltage can be voltages of different magnitudes. By applying the first driving voltage and the second driving voltage of different magnitudes to the driving structure on one side of the electric field sensing electrode unit and the driving structure on the other side of the reference output electrode unit, the resonators on the electric field sensing electrode unit and the resonators on the other side of the reference output electrode unit vibrate at different amplitudes, so that the electric field sensing electrode unit outputs an induced signal and the reference output electrode unit outputs a reference signal.

[0077] According to embodiments of this disclosure, a first comb structure connected to a resonator and an electric field induction electrode unit are differentially and alternately arranged, and a second comb structure connected to another resonator and a reference output electrode unit are alternately arranged. By applying different magnitudes of first and second driving voltages to the driving structures on both sides, the resonators on both sides generate vibrations with different amplitudes. Based on the principle of charge induction and capacitance change, the two sides generate and output induced signals and reference signals respectively. At the same time, the first comb structure on one side of the electric field induction electrode unit can increase the induction area to make the electric field induction electrode unit output a larger induced current, i.e., an induced signal. The second comb structure on one side of the reference output electrode unit can increase the capacitance value between itself and the resonator on that side to make the reference output electrode unit output a larger reference current, i.e., a reference signal, based on the capacitance change. This allows the induced signal and reference signal to be compared and output according to the modal localization principle when detecting the electric field under test, thereby obtaining a detection result of the electric field strength of the electric field under test with reduced environmental noise during measurement.

[0078] According to embodiments of this disclosure, the sensitivity-adjustable mode-localized electric field sensor may further include: a tuning electrode unit disposed on both sides of the resonator for eliminating common-mode error of the resonator array so that the resonator array can satisfy mode localization.

[0079] According to embodiments of this disclosure, a sensitivity-adjustable modal localization electric field sensor may include one or two tuning electrode units. The tuning electrode units may be disposed on both sides of a resonator or on one side of a resonator. An adjustment voltage may be applied to the tuning electrode units, and multiple resonators may vibrate through a support beam, thereby making the stiffness difference between the multiple resonators zero and eliminating the common mode error between the multiple resonators.

[0080] According to embodiments of this disclosure, the tuning electrode unit is fixedly connected to the substrate via anchor points.

[0081] According to embodiments of this disclosure, the structural shape of the tuning electrode unit may include any of the following: cuboid, cube, frustum, prism, cylinder, cone, or irregular body.

[0082] According to embodiments of this disclosure, by applying an adjustment voltage to the tuning electrode unit to cause the support beam to vibrate, thereby driving the resonator to vibrate, the stiffness difference between multiple resonators is adjusted, the common mode error between multiple resonators is eliminated, and the environmental noise that affects the electric field under test is reduced during testing.

[0083] According to embodiments of this disclosure, the electric field sensor also includes a two-dimensional or three-dimensional electric field sensor composed of a plurality of modally localized electric field sensors with adjustable sensitivity, which can be used to measure two-dimensional or three-dimensional electric fields or voltages.

[0084] Figure 1 A schematic diagram of the structure of a sensitivity-adjustable modal localization inductive electric field sensor according to an embodiment of the present disclosure is shown.

[0085] like Figure 1 As shown, Figure 1The structure of a sensitivity-tunable modal localization electric field sensor is shown. The sensor includes a substrate 101, a resonator array unit 102, an electric field sensing electrode unit 103, a reference output electrode unit 104, a tuning electrode unit 105, and a stiffness adjustment electrode unit 106. All of these components are located on the substrate 101. The sensor, connected to the substrate 101 via anchor points, is a mode-localized electric field sensor with adjustable sensitivity. It includes three resonators, two electric field sensing electrode units 103, two reference output electrode units 104, two tuning electrode units 105, and two stiffness adjustment electrode units 106. The electrode combs of the two electric field sensing electrode units 103 are differentially interleaved with the first comb structure of the resonator array unit. The electrode combs of the two reference output electrode units 104 are interleaved with the second comb structure of the resonator array unit. The tuning electrode units 105 are located on both sides of the second resonator in the resonator array unit 102. By applying driving excitation to the driving structure in the resonator array unit 102, the resonator generates vibration with a constant amplitude ratio, thereby causing the electric field sensing electrode unit 103 to output an induced signal and the reference output electrode unit 104 to output a reference signal. By applying different adjustment voltages to the two tuning electrode units 105, the stiffness difference between the resonator on one side of the electric field sensing electrode unit 103 and the resonator on the side of the reference output electrode unit 104 is made zero. Then, according to the sensitivity required for the test, different adjustment voltages are applied to the two stiffness adjustment electrode units 106 to generate a stiffness difference between the resonator on one side of the electric field sensing electrode unit 103 and the resonator on the side of the reference output electrode unit 104, thereby achieving the technical effect of adjusting the sensitivity of the modal localization electric field sensor. Then, the electric field to be measured is detected at the predetermined sensitivity, and the detection result that meets the predetermined sensitivity is obtained by comparing the induced signal and the reference signal.

[0086] Figure 2 The diagram illustrates the structure of a resonator array unit of a sensitivity-adjustable modal localization inductive electric field sensor according to an embodiment of the present disclosure.

[0087] like Figure 2 As shown above, Figure 1Taking a sensitivity-tunable modal localized electric field sensor as an example, the resonator array unit includes resonators, a comb structure, a driving structure, a coupling structure, and a support beam. The resonators include a first resonator 201, a second resonator 202, and a third resonator 203. The comb structure includes a first comb structure 204 and a second comb structure 205. The driving structure includes a first driving structure 206, a second driving structure 207, a third driving structure 208, a fourth driving structure 209, a fifth driving structure 210, a sixth driving structure 211, a seventh driving structure 212, and an eighth driving structure. Structure 213 includes a coupling structure comprising a first coupling structure 214, a second coupling structure 215, a third coupling structure 216, and a fourth coupling structure 217. Support beams include a first support beam 218, a second support beam 219, a third support beam 220, and a fourth support beam 221. A first comb structure 204 is connected to a first resonator 201. A first driving structure 206, a second driving structure 207, a third driving structure 208, and a fourth driving structure 209 are provided on both sides of the first resonator 201. A drive structure 209 is provided on the left side of the first driving structure 206 and the second driving structure 207. A first support beam 218 is provided. A second support beam 219 is provided on the right side of the third drive structure 208 and the fourth drive structure 209. The second support beam 219 is connected to the second resonator 202 through a first coupling structure 214 and a second coupling structure 215. The second resonator 202 is connected to the third support beam 220 through a third coupling structure 216 and a fourth coupling structure 217. A fifth drive structure 210, a sixth drive structure 211, a seventh drive structure 212, and an eighth drive structure 213 are provided on both sides of the third resonator 203. The fifth drive structure... A third support beam 220 is provided on the left side of the sixth drive structure 210 and the sixth drive structure 211, and a fourth support beam 221 is provided on the right side of the seventh drive structure 212 and the eighth drive structure 213. By applying a first drive voltage to the first drive structure 206, the second drive structure 207, the third drive structure 208 and the fourth drive structure 209, the first resonator 201 vibrates. By applying a second drive voltage to the fifth drive structure 210, the sixth drive structure 211, the seventh drive structure 212 and the eighth drive structure 213, the third resonator 203 vibrates.

[0088] Figure 3 A schematic diagram of the structure of a sensitivity-adjustable modal localization inductive electric field sensor according to another embodiment of the present disclosure is shown.

[0089] like Figure 3 As shown, Figure 3The structure of another sensitivity-tunable modal localization electric field sensor is shown. This sensor includes a substrate 101, a resonator array unit 102, an electric field sensing electrode unit 103, a reference output electrode unit 104, and a stiffness adjustment electrode unit 106. All units are located above the substrate 101 and connected to it via anchor points. The sensor also includes a fourth resonator 301, a fifth resonator 302, two electric field sensing electrode units 103, two reference output electrode units 104, and two stiffness adjustment electrode units 106. The electrode combs of the two electric field sensing electrode units 103 are differentially staggered with the first comb structure of the resonator array unit, and the electrode combs of the two reference output electrode units 104 are staggered with the second comb structure of the resonator array unit. The fourth resonator 301... Support beams are provided on both the left and right sides, and a driving structure is provided on the outer side of the support beams. The fifth resonator 302 is supported by support beams on both the left and right sides, and a driving structure is provided on the outer side of the support beams. By applying a driving voltage to the driving structure in the resonator array unit 102, the resonator vibrates, causing the electric field sensing electrode unit 103 to output a sense signal and the reference output electrode unit 104 to output a reference signal. By applying different adjustment voltages to the two stiffness adjustment electrode units 106, the stiffness difference between the fourth resonator 301 and the fifth resonator 302 is made zero. Then, according to the required sensitivity for the test, different adjustment voltages are applied to the two stiffness adjustment electrode units 106 to create a stiffness difference between the fourth resonator 301 and the fifth resonator 302, thereby achieving the technical effect of adjusting the sensitivity of the modal localized electric field sensor. Then, the electric field to be measured is detected at the predetermined sensitivity, and the detection result that meets the predetermined sensitivity is obtained by comparing the sense signal and the reference signal.

[0090] Figure 4 A flowchart illustrating an electric field detection method according to an embodiment of the present disclosure is shown schematically.

[0091] like Figure 4 As shown, the electric field detection method of this embodiment includes operations S410 to S460.

[0092] In operation S410, the electric field sensing electrode unit of the modally localized inductive electric field sensor with adjustable sensitivity is exposed to the electric field to be measured.

[0093] In operation S420, an excitation is applied to the drive structure, and based on the modal localization principle, the first comb structure and the second comb structure generate amplitudes with a constant amplitude ratio.

[0094] According to embodiments of this disclosure, different excitations are applied to the driving structure on the electric field sensing electrode unit side and the driving structure on the reference output electrode unit side, so that the resonators on the electric field sensing electrode unit side and the resonators on the reference output electrode unit side vibrate according to the modal localization principle.

[0095] In operation S430, the voltage of the stiffness adjustment electrode unit is adjusted to change the amplitude ratio of the resonator, thereby obtaining a resonator with a predetermined sensitivity.

[0096] According to embodiments of this disclosure, the test sensitivity is determined based on test requirements, thereby adjusting the resonator to obtain a resonator with a predetermined sensitivity, so that the detection result obtained after detecting the electric field under test meets the test requirements.

[0097] In operation S440, in response to the vibration of the first comb tooth structure, the electric field sensing electrode unit outputs a sensing signal based on the principle of charge induction.

[0098] According to the embodiments of this disclosure, when the resonator on one side of the electric field sensing electrode unit vibrates, the comb structure on one side of the electric field sensing electrode unit is differentially staggered, thereby further increasing the sensing area. According to the principle of charge induction, the electric field sensing electrode unit can output a larger induced current corresponding to the electric field to be measured, that is, an induced signal.

[0099] According to embodiments of this disclosure, by combining the principle of charge induction and the principle of modal localization, the obtained induction signal is a linear detection result corresponding to the electric field strength.

[0100] In operation S450, in response to the vibration of the second comb structure, the reference output electrode unit outputs a reference signal based on the capacitance change between the reference electrode and the resonator.

[0101] According to an embodiment of this disclosure, when the resonator on one side of the reference output electrode unit vibrates, the comb structure on one side of the reference output electrode unit is staggered, thereby further increasing the capacitance change between the reference output electrode unit and the resonator. Based on the modal localization principle and the capacitance change, the reference output electrode unit can output a reference current corresponding to the electric field to be measured, i.e., a reference signal.

[0102] In operation S460, based on the modal localization large amplitude ratio characteristic, the induced signal and the reference signal are compared to obtain the electric field strength of the electric field to be measured.

[0103] According to embodiments of this disclosure, based on the modal localization large amplitude ratio characteristic, the inductive signal and the reference signal are compared and output to reduce the influence of manufacturing errors on the detection result of the electric field under test, improve the measurement range of the modal localization inductive electric field sensor with adjustable sensitivity, and obtain the ratio result, which is the electric field strength of the electric field under test, wherein the inductive signal is the numerator and the reference signal is the denominator. According to embodiments of this disclosure, the output results of existing modal localization electric field sensors are all nonlinear measurement results, resulting in no corresponding correlation between the measurement results and the measurement sensitivity. Consequently, it is impossible to specifically adjust the sensitivity of the electric field sensor, improve the measurement range of the modal localization electric field sensor, or reduce the impact introduced by manufacturing errors. This application, however, exposes the electric field sensing electrode unit of a sensitivity-adjustable modal localization inductive electric field sensor to the electric field to be measured, allowing the electric field sensing electrode unit to detect the electric field. Then, based on the modal localization principle, an excitation is applied to the driving electrode, causing the resonator to vibrate with a predetermined amplitude ratio. By adjusting the voltage of the stiffness adjustment electrode unit, the amplitude ratio of the resonator is changed, resulting in a resonator with a predetermined sensitivity. Based on the charge induction principle, the electric field sensing electrode unit outputs an induced signal. Based on the capacitance change between the reference electrode and the resonator, the reference output electrode unit outputs... Finally, based on the large amplitude ratio characteristic of modal localization, the induced signal and the reference signal are compared and output to obtain the electric field strength of the electric field to be measured. This achieves a detection result that is linearly correlated with the electric field strength by combining the principle of charge induction and the principle of modal localization, eliminating the nonlinearity defect of sensitivity and improving the measurement range of the sensitivity-adjustable modal localization inductive electric field sensor. The comparison of the output of the induced signal and the reference signal based on the principle of modal localization reduces the influence of manufacturing error and common mode error, eliminates common mode error such as temperature and humidity in the test environment, reduces environmental noise during testing, obtains accurate detection results, and improves the accuracy of detection. At the same time, due to the setting of the stiffness adjustment electrode unit, the amplitude ratio of the resonator can be changed by adjusting the stiffness adjustment electrode unit, realizing the adjustment of the sensitivity of the sensitivity-adjustable modal localization inductive electric field sensor, improving the measurement range and measurement sensitivity.

[0104] According to embodiments of this disclosure, a modal localization inductive electric field sensor includes two stiffness adjustment electrode units. The first stiffness adjustment electrode unit is located inside or outside the resonator array unit on one side of the electric field induction electrode unit, and the second stiffness adjustment electrode unit is located inside or outside the resonator array unit on one side of the reference output electrode unit.

[0105] According to embodiments of this disclosure, adjusting the voltage of the stiffness adjustment electrode unit changes the amplitude ratio of the resonator to obtain a resonator with a predetermined sensitivity, including:

[0106] According to embodiments of this disclosure, a first adjustment voltage is applied to a first stiffness adjustment electrode unit and a second adjustment voltage is applied to a second stiffness adjustment electrode unit to eliminate stiffness errors caused by manufacturing errors, thereby obtaining multiple resonators that satisfy modal localization.

[0107] According to embodiments of this disclosure, the first adjustment voltage and the second adjustment voltage are voltages of different magnitudes.

[0108] According to embodiments of this disclosure, by applying different adjustment voltages to two stiffness adjustment electrode units, the stiffness between the two resonators is made consistent, eliminating common mode errors such as temperature and humidity in the test environment, reducing environmental noise during testing, and thus facilitating accurate test results.

[0109] According to embodiments of this disclosure, when the modal localization electric field sensor includes a tuning electrode unit, an adjustment voltage can be applied to the tuning electrode unit to make the stiffness of the two resonators consistent, thereby obtaining multiple resonators that satisfy modal localization.

[0110] According to embodiments of this disclosure, a third adjustment voltage is applied to the first stiffness adjustment electrode unit, and a fourth adjustment voltage is applied to the second stiffness adjustment electrode unit to adjust the sensitivity of the modal localization electric field sensor with adjustable sensitivity, thereby obtaining a modal localization inductive electric field sensor that meets a preset accuracy.

[0111] According to embodiments of this disclosure, the third adjustment voltage and the fourth adjustment voltage are voltages of different magnitudes.

[0112] According to embodiments of this disclosure, by applying different magnitudes of adjustment voltage to two stiffness adjustment electrode units to cause the two resonators to vibrate, thereby changing the stiffness, the sensitivity of the resonators can be adjusted by amplitude to adapt to different detection requirements, thus improving the measurement range of the electric field sensor.

[0113] According to embodiments of this disclosure, by applying adjustment voltages of different magnitudes to the first stiffness adjustment electrode unit and the second stiffness adjustment electrode unit, multiple resonators satisfying modal localization are obtained. Then, by applying another set of adjustment voltages of different magnitudes to the first stiffness adjustment electrode unit and the second stiffness adjustment electrode unit, a modal localization inductive electric field sensor that meets the preset accuracy is obtained. This eliminates common mode errors such as temperature and humidity in the test environment, reduces environmental noise during testing, obtains accurate detection results, and improves detection accuracy. At the same time, the test sensitivity of the modal localization electric field sensor can be flexibly adjusted according to the detection sensitivity requirements, realizing the sensitivity adjustability of the modal localization electric field sensor.

[0114] According to embodiments of this disclosure, the electric field sensor may include the above-described sensitivity-tunable modal localization electric field sensor.

[0115] According to embodiments of this disclosure, an electric field sensor may include a two-dimensional or three-dimensional electric field sensor composed of a plurality of modally localized electric field sensors with adjustable sensitivity, for measuring two-dimensional or three-dimensional electric fields or voltages.

[0116] Those skilled in the art will understand that the features described in the various embodiments and / or claims of this disclosure can be combined or combined in various ways, even if such combinations or combinations are not explicitly described in this disclosure. In particular, the features described in the various embodiments and / or claims of this disclosure can be combined or combined in various ways without departing from the spirit and teachings of this disclosure. All such combinations and / or combinations fall within the scope of this disclosure.

[0117] The above specific embodiments further illustrate the purpose, technical solutions and beneficial effects of this disclosure. It should be understood that the above are only specific embodiments of this disclosure and are not intended to limit this disclosure. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this disclosure should be included within the protection scope of this disclosure.

Claims

1. A sensitivity-adjustable modal localization inductive electric field sensor, comprising: A substrate is used to support the resonator array unit, the electrode unit, and the stiffness adjustment electrode unit, and anchor points are provided on the surface of the substrate. A resonator array unit is disposed above the center of the substrate for driving the resonator to vibrate, wherein the resonator array unit includes the resonator and a comb structure connected to the resonator; An electrode unit, comprising an alternating arrangement of the electrode unit and a comb-tooth structure connected to the resonator, is used to generate an output signal in response to the vibration of the resonator. The comb-tooth structure connected to the resonator includes a first comb-tooth structure and a second comb-tooth structure. The electrode unit includes an electric field induction electrode unit and a reference output electrode unit. The first comb-tooth structure is disposed on one side of the electric field induction electrode unit and is differentially alternating with the electric field induction electrode unit. It is used to generate and output an induction signal in response to the vibration of the resonator, based on the principle of charge induction. The second comb-tooth structure is disposed on one side of the reference output electrode unit and is alternating with the reference output electrode unit. It is used to change the capacitance between the reference electrode and the second comb-tooth structure in response to the vibration of the resonator, and generate and output a reference signal based on the change in capacitance. Stiffness adjustment electrode units are disposed on both sides of the resonator array unit to adjust the stiffness difference and common mode error of the resonator so as to enable the resonator to meet mode localization and adjust the sensitivity of the sensitivity-adjustable mode localization inductive electric field sensor.

2. The sensor according to claim 1, characterized in that, The resonator array unit includes at least two resonators, and the resonator array unit further includes: A driving structure is disposed on both sides of the resonator for driving the resonator to vibrate; A coupling structure is disposed between multiple resonators to couple the multiple resonators so that weak coupling is formed between the multiple resonators; Support beams are disposed on both sides of the driving structure for connecting the resonator array unit and the substrate, wherein the support beams are one or a combination of straight beams, folded beams, and curved beams.

3. The sensor according to claim 1, characterized in that, Also includes: Tuning electrode units are disposed on both sides of the resonator to eliminate the common mode error of the resonator array, so that the resonator array can satisfy mode localization.

4. The sensor according to claim 1, characterized in that, The driving method of the drive structure includes at least one of the following: electrostatic comb drive, electrostatic flat plate drive, piezoelectric drive, magnetic drive, and thermal drive.

5. The sensor according to claim 1, characterized in that, The coupling structure includes one of the following: electrostatic coupling structure, mechanical coupling structure, and mechanical-electrostatic hybrid coupling structure.

6. A method for detecting an electric field using a sensitivity-adjustable modal localization inductive electric field sensor according to any one of claims 1 to 5, comprising: The electric field sensing electrode unit of the aforementioned sensitivity-adjustable modal localization inductive electric field sensor is exposed to the electric field to be measured. Excitation is applied to the driving structure, and based on the modal localization principle, the first comb structure and the second comb structure generate amplitudes with a constant amplitude ratio. Adjusting the voltage of the stiffness adjustment electrode unit changes the amplitude ratio of the resonator, thus obtaining the resonator with the predetermined sensitivity; In response to the vibration of the first comb tooth structure, the electric field sensing electrode unit outputs a sensing signal based on the principle of charge induction; In response to the vibration of the second comb structure, the reference output electrode unit outputs a reference signal based on the capacitance change between the reference electrode and the resonator. Based on the modal localization large amplitude ratio characteristic, the induced signal and the reference signal are compared to obtain the electric field strength of the electric field to be measured.

7. The method according to claim 6, characterized in that, The modal localization inductive electric field sensor includes two stiffness adjustment electrode units. The first stiffness adjustment electrode unit is located inside or outside the resonator array unit on one side of the electric field sensing electrode unit, and the second stiffness adjustment electrode unit is located inside or outside the resonator array unit on one side of the reference output electrode unit. Adjusting the voltage of the stiffness adjustment electrode unit to change the amplitude ratio of the resonator to obtain a resonator with a predetermined sensitivity includes: A first adjustment voltage is applied to the first stiffness adjustment electrode unit, and a second adjustment voltage is applied to the second stiffness adjustment electrode unit to eliminate stiffness errors caused by manufacturing errors, thereby obtaining multiple resonators that satisfy modal localization. The first adjustment voltage and the second adjustment voltage are voltages of different magnitudes. A third adjustment voltage is applied to the first stiffness adjustment electrode unit, and a fourth adjustment voltage is applied to the second stiffness adjustment electrode unit to adjust the sensitivity of the modal localization electric field sensor, thereby obtaining a modal localization inductive electric field sensor that meets a preset accuracy. The third adjustment voltage and the fourth adjustment voltage are voltages of different magnitudes.

8. An electric field sensor, comprising: The sensitivity-adjustable modal localization inductive electric field sensor as described in any one of claims 1 to 5, or the sensitivity-adjustable modal localization inductive electric field sensor obtained by the electric field detection method as described in claim 6.

9. The electric field sensor according to claim 8, characterized in that, The electric field sensor also includes a two-dimensional or three-dimensional electric field sensor composed of multiple electric field-sensitive structures, used to measure two-dimensional or three-dimensional electric fields or voltages.

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