Circulating liquid supply device, liquid level control method thereof, temperature control system and integrated circuit process system

Abstract

The application provides a circulating liquid supply device, a liquid level regulation method thereof, a temperature control system and an integrated circuit process system. The circulating liquid supply device comprises a liquid tank, a liquid supplementing and regulating valve, a main path electromagnetic valve, a control device and at least two liquid level detectors. The liquid tank is provided with a first liquid inlet and a liquid outlet. The liquid tank is used for containing circulating liquid. The liquid outlet is connected to an external system to discharge the circulating liquid from the liquid tank to the external system. The liquid level detectors are sequentially arranged in the liquid tank according to different preset heights, detect the liquid level of the circulating liquid in the liquid tank and output liquid level signals. One end of the liquid supplementing and regulating valve is communicated with the first liquid inlet. The main path electromagnetic valve is arranged outside the liquid tank. One end of the main path electromagnetic valve is communicated with the other end of the liquid supplementing and regulating valve, and the other end of the main path electromagnetic valve is communicated with an external liquid supply system to receive the circulating liquid delivered by the external liquid supply system. The control device controls the opening and closing states of the liquid supplementing and regulating valve and the main path electromagnetic valve according to the liquid level signals to regulate the liquid level of the liquid tank.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor process, in particular to a circulating liquid supply device and a liquid level control method thereof, a temperature control system and an integrated circuit process system. BACKGROUND

[0002] The temperature control system dedicated to the field of semiconductor process is a system for providing circulating liquid with constant temperature and constant flow. The temperature control system can be applied to the process of integrated circuit manufacturing to take away the heat generated in the process by the circulating liquid, thereby meeting the temperature control requirements of the semiconductor main process equipment.

[0003] In order to provide stable and continuous circulating liquid, a circulating liquid supply device is usually arranged in the temperature control system. The circulating liquid supply device includes a liquid tank in which the circulating liquid is stored to provide the circulating liquid for subsequent devices. As the circulating liquid in the liquid tank is continuously delivered to the subsequent devices, the circulating liquid in the liquid tank will be continuously reduced, so that the circulating liquid supply device will supplement new circulating liquid into the liquid tank in real time.

[0004] The liquid tank in the prior art is provided with a float ball valve. The float ball valve includes a float and a connecting rod, and the float is connected to one end of the connecting rod. The float floats on the liquid surface of the circulating liquid. In the case that the liquid level of the circulating liquid in the liquid tank rises, the float will also rise, thereby driving the connecting rod to rise. In the case that the connecting rod rises to a certain position, the connecting rod will lift a rubber piston pad to close the valve to block the liquid source. That is, the new circulating liquid cannot be delivered into the liquid tank. In the case that the liquid level drops, the float will also drop, and the connecting rod will drive the piston pad to open. The liquid tank is automatically replenished by setting the float ball valve.

[0005] However, the inventors have found that in the prior art, the circulating liquid supply device automatically replenishes the liquid tank by using the float ball valve. Since the closing force of the float ball valve on the valve comes from the buoyancy, the buoyancy is small, and the problem of circulating liquid overflow may occur when the float ball valve is not tightly sealed in the case of high liquid level. SUMMARY

[0006] The present application aims to provide a circulating liquid supply device and a liquid level control method thereof, a temperature control system and an integrated circuit process system.

[0007] According to an aspect of the present application, a circulating liquid supply device applied to a temperature control system is provided. The circulating liquid supply device comprises a liquid tank, a liquid supplementing regulating valve, a main path electromagnetic valve, a control device and at least two liquid level detectors. The liquid tank is provided with a first liquid inlet and a liquid outlet. The liquid tank is used for containing circulating liquid. The liquid outlet is connected to an external system to discharge the circulating liquid from the liquid tank to the external system. The at least two liquid level detectors are arranged in the liquid tank in sequence according to different preset heights, detect the liquid level of the circulating liquid in the liquid tank, and output a liquid level signal. The liquid supplementing regulating valve is arranged outside the liquid tank, and one end of the liquid supplementing regulating valve is communicated with the first liquid inlet. The main path electromagnetic valve is arranged outside the liquid tank, one end of the main path electromagnetic valve is communicated with the other end of the liquid supplementing regulating valve, and the other end of the main path electromagnetic valve is communicated with an external liquid supply system to receive the circulating liquid delivered by the external liquid supply system. The control device is electrically connected with the at least two liquid level detectors, the liquid supplementing regulating valve and the main path electromagnetic valve, and controls the opening and closing states of the liquid supplementing regulating valve and the main path electromagnetic valve according to the liquid level signal to regulate the liquid level of the liquid tank.

[0008] According to another aspect of the present application, a temperature control system is provided. The temperature control system specifically comprises the circulating liquid supply device described in the above aspect, and an external system. The external system specifically can comprise a temperature regulating device. The temperature regulating device is communicated with the liquid outlet of the temperature control system to receive and regulate the temperature of the circulating liquid.

[0009] According to still another aspect of the present application, an integrated circuit process system is provided. The integrated circuit process system comprises the temperature control system described in the above another aspect and a semiconductor process device. The semiconductor process device is communicated with the temperature regulating device of the temperature control system to receive the temperature-regulated circulating liquid to manufacture the semiconductor process.

[0010] According to still another aspect of the present application, a liquid level regulation method of a circulating liquid supply device is provided. The liquid level regulation method can be specifically applied to the circulating liquid supply device described in the above aspect. The liquid level regulation method specifically can comprise controlling the opening and closing devices of the liquid supplementing regulating valve and the main path electromagnetic valve according to the liquid level signal to regulate the liquid level height in the liquid tank.

[0011] Advantages

[0012] The circulating liquid supply device of the present application can accelerate the supplement when the liquid level of the circulating liquid in the liquid tank is low, and can stop the supplement in time when the liquid level of the circulating liquid in the liquid tank is high, so that the liquid level of the circulating liquid in the liquid tank can be always kept in a normal range. In this way, the probability of the overflow of the circulating liquid due to the reduced reliability of the float valve can be reduced. BRIEF DESCRIPTION OF DRAWINGS

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed in the embodiment description. Obviously, the drawings in the following description only show some embodiments of the present application, and for those skilled in the art, other drawings can be obtained without creative effort based on these drawings.

[0014] Figure 1 Fig. 1 is a structural schematic diagram of a temperature control system according to an embodiment of the present application;

[0015] Figure 2 Fig. 2 is a structural schematic diagram of a circulating liquid supply device according to an embodiment of the present application.

[0016] Explanation of reference signs:

[0017] 1, circulating liquid supply device; 11, liquid tank; 12, at least two liquid level detectors; 121, first liquid level detector; 122, second liquid level detector; 123, third liquid level detector; 124, fourth liquid level detector; 125, fifth liquid level detector; 13, liquid supplement adjusting valve; 14, main road electromagnetic valve; 15, standby electromagnetic valve; 2, external system; 21, temperature adjusting device; 211, refrigerating device; 212, heater; 22, liquid pump; 23, pressure adjusting device; 24, pressure detecting device. DETAILED DESCRIPTION

[0018] Example embodiments now will be described more fully hereinafter with reference to the accompanying drawings. Example embodiments, however, can be implemented in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of example embodiments to those skilled in the art. Like reference numerals refer to like elements throughout the figures, and descriptions of the same or similar elements can be not be repeated.

[0019] The described features, structures, or characteristics can be combined in one or more embodiments. In the following description, numerous specific details are provided to give a thorough understanding of embodiments of the disclosure. One skilled in the relevant art will recognize, however, that the techniques described can be practiced without one or more of the specific details, or with other methods, components, materials, and so forth. In these instances, well-known structures, methods, devices, implementations, materials, and so forth can not be described in detail.

[0020] Furthermore, the terms "comprise", "comprising", "include", "including", and "has", "having", their variants and / or the like means "including but not limited to", and are not intended to (and do not) exclude other moieties, additives, components, etc.

[0021] The terms "first", "second", and the like in the description and in the claims of the present application and above drawings are used for distinguishing between similar objects talking about the technical scheme of the present application and are not necessarily used to describe a particular sequential order.

[0022] The technical scheme of the present application will be described clearly and completely in the following with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are part of, but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of the present application.

[0023] According to an aspect of the present application, an embodiment of the present application provides a circulating liquid supply device 1 applied to a temperature control system. The temperature control system is specifically used for providing a circulating liquid for temperature adjustment to a semiconductor process manufacturing equipment. The temperature control system can be specifically an open system. In the open system, the temperature control system delivers the circulating liquid to the semiconductor process manufacturing equipment, and the used circulating liquid of the semiconductor process manufacturing equipment will not be recycled.

[0024] Figure 1 The system structure of the temperature control system is shown. Referring to Figure 1 The temperature control system can specifically include the circulating liquid supply device 1 and a temperature adjustment device 21. The circulating liquid supply device 1 is in communication with an external liquid supply system and also in communication with the temperature adjustment device 21. The circulating liquid supply device 1 receives the circulating liquid delivered by the external liquid supply system for storage, and continuously delivers the internally stored circulating liquid to the temperature adjustment device 21.

[0025] Figure 2 The structure schematic diagram of the circulating liquid supply device 1 is shown. Referring to Figure 2 The circulating liquid supply device 1 can specifically include a liquid tank 11, a liquid supplement adjustment valve 13, a main path electromagnetic valve 14, a control device, and at least two liquid level detectors 12.

[0026] According to an example embodiment, the liquid tank 11 is used for containing the circulating liquid. The liquid tank 11 is provided with a first liquid inlet and a liquid outlet. The liquid outlet is connected to an external system 2 to discharge the circulating liquid from the liquid tank 11 to the external system 2.

[0027] The at least two liquid level detectors 12 are arranged at different preset heights in the liquid tank 11. The at least two liquid level detectors 12 can be arranged on the inner wall of the liquid tank 11, or can be arranged in the liquid tank 11 by means of a rope suspension.

[0028] Exemplarily, the circulating liquid supply device 1 can include five liquid level detectors 12, which are arranged in sequence from top to bottom.

[0029] It is worth noting that in the case where the circulating liquid supply device 1 includes at least three liquid level detectors 12, the height difference between each two liquid level detectors 12 can be the same or different, i.e., the liquid level detectors 12 can be arranged at equal intervals or at unequal intervals, which is not limited herein.

[0030] According to some embodiments, the at least two liquid level detectors 12 can be arranged on the same vertical line or on different vertical lines, which is not limited herein.

[0031] According to an example embodiment, the liquid supplement adjusting valve 13 and the main path electromagnetic valve 14 are arranged outside the liquid tank 11. One end of the liquid supplement adjusting valve 13 is in communication with the first liquid inlet. The other end of the liquid supplement adjusting valve 13 is in communication with one end of the main path electromagnetic valve 14. The other end of the main path electromagnetic valve 14 is used to connect an external liquid supply system to receive circulating liquid delivered from the external liquid supply system.

[0032] According to an example embodiment, the liquid supplement adjusting valve 13 can be an electrically adjustable valve, and the opening degree thereof is adjustable. In the case where the opening degree of the liquid supplement adjusting valve 13 is larger, the liquid flow of the circulating liquid flowing through the liquid supplement adjusting valve 13 in the same time is more, and the circulating liquid flowing into the liquid tank 11 is more.

[0033] The main path electromagnetic valve 14 is an electromagnetic valve, which is in a first state when powered on and is in a second state when not powered on. For example, in the case where the main path electromagnetic valve 14 is powered on, the main path electromagnetic valve 14 is opened, and the circulating liquid delivered from the external liquid supply system can flow through the main path electromagnetic valve 14. In the case where the main path electromagnetic valve 14 is not powered on, the main path electromagnetic valve 14 is closed, and the circulating liquid delivered from the external liquid supply system cannot flow through the main path electromagnetic valve 14.

[0034] The at least two liquid level detectors 12 are used to detect the liquid level of the circulating liquid in the liquid tank 11 and output a liquid level signal. Optionally, the liquid level detector 12 can be a float switch.

[0035] The control device is electrically connected with the at least two liquid level detectors 12, respectively, and is also electrically connected with the main path electromagnetic valve 14 and the liquid supplement adjusting valve 13, respectively.

[0036] The control device controls the opening and closing state of the liquid supplementing regulating valve 13 and the main path electromagnetic valve 14 according to the liquid level signals output by the at least two liquid level detectors 12, so as to adjust the liquid level of the liquid tank 11.

[0037] According to an example embodiment, the opening and closing state of the liquid supplementing regulating valve 13 can be used to describe the opening degree of the liquid supplementing regulating valve 13. For example, when the opening and closing state of the liquid supplementing regulating valve 13 is 0% opening degree state, it indicates that the liquid supplementing regulating valve 13 is closed, and the circulating liquid cannot flow through the liquid supplementing regulating valve 13. When the opening and closing state of the liquid supplementing regulating valve 13 is 100% opening degree state, it indicates that the liquid supplementing regulating valve 13 is fully open. When the opening and closing state of the liquid supplementing regulating valve 13 is 50% opening degree state, the liquid supplementing regulating valve 13 is open and the opening degree is 50%.

[0038] The opening and closing state of the main path electromagnetic valve 14 can specifically include the main path electromagnetic valve 14 open state and the main path electromagnetic valve 14 closed state.

[0039] According to an example embodiment, the control device can specifically determine the liquid level interval to which the liquid level of the liquid tank 11 belongs according to the liquid level signals output by the at least two liquid level detectors 12. Then the control device can adjust the opening degree of the liquid supplementing regulating valve 13 and the opening and closing of the main path electromagnetic valve 14 according to the liquid level interval to which the liquid level of the liquid tank 11 belongs, so as to adjust the liquid level of the liquid tank 11.

[0040] For example, two liquid level detectors 12 are used for illustration. The control device can receive the liquid level signals output by the two liquid level detectors 12, and determine whether the liquid level of the liquid tank 11 is between the two liquid level detectors 12. When the liquid level of the liquid tank 11 is higher than the position of the upper liquid level detector 12, the control device can control the main path electromagnetic valve 14 to be closed and the liquid supplementing regulating valve 13 to be closed. In this way, the circulating liquid transported by the external liquid supply system cannot flow into the liquid tank 11, so as to prevent the liquid level from being too high and overflowing.

[0041] When the liquid level of the liquid tank 11 is between the two liquid level detectors 12, the control device can control the main path electromagnetic valve 14 to be open, the liquid supplementing regulating valve 13 to be open, and the opening degree of the liquid supplementing regulating valve 13 to be a preset opening degree. In this way, the circulating liquid transported by the external liquid supply system can flow into the liquid tank 11 through the main path electromagnetic valve 14 and the liquid supplementing regulating valve 13, so as to keep the liquid level of the liquid tank 11 within a normal range.

[0042] In the case that the liquid level in the liquid tank 11 is lower than the lower liquid level detector 12, the control device can control the main path electromagnetic valve 14 to open and control the make-up liquid regulating valve 13 to open, and control the opening degree of the make-up liquid regulating valve 13 to be the maximum opening degree that it can achieve. In this way, the circulating liquid delivered by the external liquid supply system can flow through the main path electromagnetic valve 14 and the make-up liquid regulating valve 13 at the maximum flow rate, and thus the make-up liquid can be accelerated.

[0043] Through the above embodiment, the circulating liquid supply device 1 of the present application is provided with a control device, a make-up liquid regulating valve 13, a main path electromagnetic valve 14, and at least two liquid level detectors 12, and the opening and closing states of the make-up liquid regulating valve 13 and the main path electromagnetic valve 14 are adjusted by the control device according to the liquid level signals output by the liquid level detectors 12. In this way, the make-up liquid can be accelerated when the liquid level of the circulating liquid in the liquid tank 11 is low, and the make-up liquid can be stopped in time when the liquid level of the circulating liquid in the liquid tank 11 is high, so that the liquid level of the circulating liquid in the liquid tank 11 can always be kept within the normal range. In this way, the probability of the circulating liquid overflowing due to the reduced reliability of the float valve is also reduced.

[0044] According to some embodiments, the liquid tank 11 is also provided with a second liquid inlet. The circulating liquid supply device 1 further comprises a standby electromagnetic valve 15.

[0045] The standby electromagnetic valve 15 is arranged outside the liquid tank 11, and one end of the standby electromagnetic valve 15 is in communication with the second liquid inlet of the liquid tank 11, and the other end of the standby electromagnetic valve 15 is in communication with one end of the main path electromagnetic valve 14, i.e. the other end of the standby electromagnetic valve 15 is in communication with the end of the main path electromagnetic valve 14 connected to the make-up liquid regulating valve 13.

[0046] According to an example embodiment, the circulating liquid delivered by the external liquid supply system first flows through the main path electromagnetic valve 14. After the circulating liquid flows through the main path electromagnetic valve 14, it is divided into two paths, one of which flows into the liquid tank 11 through the make-up liquid regulating valve 13 and the first liquid inlet, and the other of which flows into the liquid tank 11 through the standby electromagnetic valve 15 and the second liquid inlet.

[0047] According to an example embodiment, the standby electromagnetic valve 15 is also an electromagnetic valve. The opening and closing states of the standby electromagnetic valve 15 include an open state of the standby electromagnetic valve 15 and a closed state of the standby electromagnetic valve 15. In the open state of the standby electromagnetic valve 15, the standby electromagnetic valve 15 is in an open state, and the circulating liquid can flow. In the closed state of the standby electromagnetic valve 15, the standby electromagnetic valve 15 is in a closed state, and the circulating liquid cannot flow.

[0048] According to an example embodiment, when the backup solenoid valve 15 is energized, the switching state of the backup solenoid valve 15 is switched to an open state of the backup solenoid valve 15, and the circulating liquid can flow through the backup solenoid valve 15. When the backup solenoid valve 15 is not energized, the switching state of the backup solenoid valve 15 is switched to a closed state of the backup solenoid valve 15, i.e., the circulating liquid cannot flow through the backup solenoid valve 15.

[0049] According to an example embodiment, the control device is also electrically connected with the backup solenoid valve 15.

[0050] The control device can control the switching state of the backup solenoid valve 15 in addition to the switching state of the liquid supplementing regulating valve 13 and the main path solenoid valve 14 according to the liquid level signals output by the at least two liquid level detectors 12. In this way, the flow rate of the circulating liquid flowing into the liquid tank 11 can be adjusted by controlling the switching of the liquid supplementing regulating valve 13, the main path solenoid valve 14 and the backup solenoid valve 15, and the liquid level of the circulating liquid in the liquid tank 11 can be adjusted.

[0051] For example, when the liquid level is low, the control device can control the backup solenoid valve 15 to be open while controlling the liquid supplementing regulating valve 13 to be fully open and the main path solenoid valve 14 to be open, so as to further accelerate the flow rate of the circulating liquid flowing into the liquid tank 11, thereby facilitating the adjustment of the liquid level of the circulating liquid in the liquid tank 11.

[0052] According to some embodiments, the at least two liquid level detectors 12 can specifically include a first liquid level detector 121, a second liquid level detector 122 and a third liquid level detector 123.

[0053] The first liquid level detector 121 is located at a first preset height of the liquid tank 11. The second liquid level detector 122 is located at a second preset height of the liquid tank 11, and the third liquid level detector 123 is located at a third preset height of the liquid tank 11.

[0054] The first preset height is lower than the second preset height, and the second preset height is lower than the third preset height. That is, the first liquid level detector 121, the second liquid level detector 122 and the third liquid level detector 123 are arranged in order from bottom to top.

[0055] For any liquid level detector, when the liquid level is above the liquid level detector, the liquid level detector will output a high liquid level signal, for example, output a high level. When the liquid level does not submerge the liquid level detector, the liquid level detector will output a low liquid level signal, for example, output a low level.

[0056] That is, in the case that the liquid level of the circulating liquid is higher than the first preset height, the first liquid level detector 121 is submerged by the circulating liquid, and thus the first liquid level detector 121 generates a first high liquid level signal. In the case that the liquid level of the circulating liquid is lower than the first preset height, the first liquid level detector 121 is not submerged by the circulating liquid, and thus the first liquid level detector 121 generates a first low liquid level signal.

[0057] Similarly, in the case that the liquid level of the circulating liquid is higher than the second preset height, the second liquid level detector 122 generates a second high liquid level signal. In the case that the liquid level of the circulating liquid is lower than the second preset height, the second liquid level detector 122 generates a second low liquid level signal.

[0058] Similarly, in the case that the liquid level of the circulating liquid is higher than the third preset height, the third liquid level detector 123 generates a third high liquid level signal. In the case that the liquid level of the circulating liquid is lower than the third preset height, the third liquid level detector 123 generates a third low liquid level signal.

[0059] According to an example embodiment, the control device controls the opening and closing states of the liquid supplementing regulating valve 13, the main circuit electromagnetic valve 14 and the standby electromagnetic valve 15 according to the liquid level signals generated by the first liquid level detector 121, the second liquid level detector 122 and the third liquid level detector 123, so as to regulate the liquid level of the circulating liquid in the liquid tank 11.

[0060] Exemplarily, the control device can determine the liquid level height interval in which the liquid level of the circulating liquid is located according to the liquid level signals generated by each liquid level detector.

[0061] Exemplarily, in the case that the liquid level is below the first preset height, the control device receives the first low liquid level signal, the second low liquid level signal and the third low liquid level signal.

[0062] In the case that the liquid level is between the first preset height and the second preset height, the control device receives the first high liquid level signal, the second low liquid level signal and the third low liquid level signal.

[0063] In the case that the liquid level is between the second preset height and the third preset height, the control device receives the first high liquid level signal, the second high liquid level signal and the third low liquid level signal.

[0064] In the case that the liquid level is above the third preset height, the control device receives the first high liquid level signal, the second high liquid level signal and the third high liquid level signal.

[0065] Therefore, the control device can determine the liquid level height interval of the circulating liquid according to the received liquid level signals, and control the main electromagnetic valve 14, the standby electromagnetic valve 15 and the liquid supplementing valve 13 according to the liquid level height interval of the circulating liquid to adjust the water level.

[0066] For example, when the control device determines that the liquid level is below the first preset height, the control device can control the main electromagnetic valve 14 to open, control the liquid supplementing valve 13 to open at full opening degree, and control the standby electromagnetic valve 15 to open, so as to supplement the liquid at the maximum liquid supplementing flow.

[0067] For example, when the control device determines that the liquid level is between the first preset height and the second preset height, the control device can control the main electromagnetic valve 14 to open, control the liquid supplementing valve 13 to open at the first preset opening degree, and control the standby electromagnetic valve 15 to close, so as to supplement the circulating liquid in the liquid tank 11.

[0068] For example, when the control device determines that the liquid level is between the second preset height and the third preset height, the control device can control the main electromagnetic valve 14 to open, control the liquid supplementing valve 13 to open at the second preset opening degree, and control the standby electromagnetic valve 15 to close, so as to supplement the circulating liquid in the liquid tank 11.

[0069] For example, when the control device determines that the liquid level is above the third preset height, the control device can control the main electromagnetic valve 14, the standby electromagnetic valve 15 and the liquid supplementing valve 13 to close, so as to stop supplementing the liquid in time and reduce the probability of overflow of the circulating liquid in the liquid tank 11.

[0070] According to some embodiments, the at least two liquid level detectors 12 can include not only the first liquid level detector 121, the second liquid level detector 122 and the third liquid level detector 123, but also a fourth liquid level detector 124 and a fifth liquid level detector 125.

[0071] The fourth liquid level detector 124 is located at a fourth preset height of the liquid tank 11, and the fifth liquid level detector 125 is located at a fifth preset height of the liquid tank 11.

[0072] The fourth preset height is lower than the first preset height. The fifth preset height is higher than the third preset height. That is, the fourth preset height is lower than the first preset height, which is lower than the second preset height, which is lower than the third preset height, which is lower than the fifth preset height.

[0073] That is, the preset heights are in the order of the fourth preset height, the first preset height, the second preset height, the third preset height and the fifth preset height from low to high.

[0074] Exemplarily, the liquid level detectors are arranged in sequence from bottom to top as the fourth liquid level detector 124, the first liquid level detector 121, the second liquid level detector 122, the third liquid level detector 123, and the fifth liquid level detector 125.

[0075] According to an example embodiment, the fourth liquid level detector 124 generates a fourth high liquid level signal in a case where the liquid level of the circulating liquid is higher than a fourth preset height. The fourth liquid level detector 124 generates a fourth low liquid level signal in a case where the liquid level of the circulating liquid is lower than the fourth preset height.

[0076] According to an example embodiment, the fifth liquid level detector 125 generates a fifth high liquid level signal in a case where the liquid level of the circulating liquid is higher than a fifth preset height. The fifth liquid level detector 125 generates a fifth low liquid level signal in a case where the liquid level of the circulating liquid is lower than the fifth preset height.

[0077] According to an example embodiment, the control device can determine the height interval of the current liquid level of the circulating liquid according to the liquid level signals generated by the first liquid level detector 121, the second liquid level detector 122, the third liquid level detector 123, the fourth liquid level detector 124, and the fifth liquid level detector 125. And the control device can adjust the opening and closing states of the liquid supplementing regulating valve 13, the main path electromagnetic valve 14, and the standby electromagnetic valve 15 according to the height interval of the liquid level, so as to adjust the liquid level of the circulating liquid in the liquid tank 11.

[0078] According to some embodiments, the control device can control the main path electromagnetic valve 14, the standby electromagnetic valve 15, and the liquid supplementing regulating valve 13 to be closed in a case where the received liquid level signals satisfy a first preset condition, and the control device also outputs a shutdown alarm instruction.

[0079] The first preset condition includes that the control device receives a first low liquid level signal, a second low liquid level signal, a third low liquid level signal, a fourth low liquid level signal, and a fifth low liquid level signal.

[0080] According to an example embodiment, the first liquid level detector 121 outputs a first low liquid level signal, the second liquid level detector outputs a second low liquid level signal, the third liquid level detector 123 outputs a third low liquid level signal, the fourth liquid level detector 124 outputs a fourth low liquid level signal, and the fifth liquid level detector 125 outputs a fifth low liquid level signal in a case where the liquid level of the circulating liquid in the liquid tank 11 is below the fourth liquid level detector 124.

[0081] That is, in a case where the received liquid level signals satisfy the first preset condition, it indicates that the liquid level of the circulating liquid in the liquid tank 11 is lower than the height of the fourth liquid level detector 124, that is, lower than the fourth preset height.

[0082] Since the circulating liquid supply device 1 is used to supply circulating liquid to the external system 2, the external system 2 usually uses the liquid pump 22 to draw the circulating liquid from the circulating liquid supply device 1, and thus in the case that the liquid level of the circulating liquid is too low, each device (for example, the liquid pump 22) needs to be shut down in time, otherwise the liquid pump 22 will draw a large amount of air when drawing the circulating liquid, and thus there will be a risk of causing the liquid pump 22 and other subsequent devices to malfunction.

[0083] In addition, in the case that the liquid level of the circulating liquid is lower than the fourth preset height, it is indicated that there is damage to the components (for example, damage to the main road electromagnetic valve 14 or damage to the pipeline, etc.) or that the external liquid supply system has an abnormal liquid supply, and thus each device needs to be shut down for maintenance.

[0084] Therefore, in the embodiment of the present application, in the case that the liquid level of the circulating liquid in the liquid tank 11 is lower than the fourth preset height, that is, in the case that the liquid level signal received by the control device satisfies the first preset condition, the control device controls the main road electromagnetic valve 14, the standby electromagnetic valve 15 and the liquid supplement regulating valve 13 to be all closed, and outputs a shutdown alarm instruction, so that the user shuts down each device for maintenance, thereby reducing the probability of causing other devices to malfunction.

[0085] According to some embodiments, the fourth preset height can be set by the user according to the lowest safe liquid level, and in the case that the liquid level is lower than the lowest safe liquid level, it is indicated that the user needs to shut down for maintenance.

[0086] According to some embodiments, in the case that the received liquid level signal satisfies the second preset condition, the control device controls the main road electromagnetic valve 14 and the standby electromagnetic valve 15 to be opened, and controls the opening degree of the liquid supplement regulating valve 13 to be a preset maximum opening degree, that is, controls the opening degree of the liquid supplement regulating valve 13 to be 100%.

[0087] According to an example embodiment, the second preset condition includes that the control device receives a fourth high liquid level signal, a first low liquid level signal, a second low liquid level signal, a third low liquid level signal and a fifth low liquid level signal.

[0088] According to an example embodiment, in the case that the liquid level of the circulating liquid in the liquid tank 11 is between the fourth liquid level detector 124 and the first liquid level detector 121, the fourth liquid level detector 124 outputs a fourth high liquid level signal, the first liquid level detector 121 outputs a first low liquid level signal, the second liquid level detector 122 outputs a second low liquid level signal, the third liquid level detector 123 outputs a third low liquid level signal, and the fifth liquid level detector 125 outputs a fifth low liquid level signal.

[0089] That is, in the case that the received liquid level signal satisfies the second preset condition, that is, the liquid level of the circulating liquid in the liquid tank 11 is higher than the height of the fourth liquid level detector 124 and lower than the height of the first liquid level detector 121. That is, the liquid level of the circulating liquid is between the fourth preset height and the first preset height.

[0090] According to the example embodiment, in the case that the liquid level of the circulating liquid in the liquid tank 11 is between the fourth preset height and the first preset height, it is indicated that the current liquid level of the circulating liquid in the liquid tank 11 is low, and the liquid supplement needs to be accelerated. In the current state, it is difficult to achieve good liquid supplement effect by only using the main electromagnetic valve 14 and the liquid supplement regulating valve 13.

[0091] Therefore, in the case that the liquid level signal satisfies the second preset condition, the control device not only controls the main electromagnetic valve 14 to be opened, but also controls the opening degree of the liquid supplement regulating valve 13 to be 100%, and controls the standby electromagnetic valve 15 to be opened.

[0092] In addition, in the case that the liquid level is lower than the first preset height, it is also possible that the liquid supplement regulating valve 13 is damaged. Because in the normal state, the circulating liquid in the liquid tank 11 not only flows out from the liquid outlet, but also supplements the liquid tank 11 through the liquid supplement regulating valve 13, and the circulating liquid in the liquid tank 11 is in a dynamic balance state, and the liquid level of the circulating liquid in the liquid tank 11 is continuously in a normal range. If the liquid supplement regulating valve 13 is damaged, the liquid supplement is less than the liquid outflow, and the liquid level is lower than the first preset height.

[0093] Therefore, in the example embodiment, in the case that the liquid level of the circulating liquid is between the fourth preset height and the first preset height, the control device not only controls the opening degree of the liquid supplement regulating valve 13 to be 100%, but also controls the standby electromagnetic valve 15 to be opened, so as to reduce the probability of affecting the liquid supplement due to the damage of the liquid supplement regulating valve 13, and effectively raise the liquid level of the circulating liquid, so as to achieve timely liquid supplement.

[0094] According to some embodiments, the first preset height can be set by the user according to the actual situation, for example, the user sets the minimum liquid level of the circulating liquid in the liquid tank 11 during normal operation of the temperature control system. For example, during operation, the minimum liquid level of the circulating liquid cannot be less than 5, and the first preset height can be set to 5.

[0095] According to some embodiments, in the case that the received liquid level signal satisfies the third preset condition, the control device can control the main electromagnetic valve 14 to be opened.

[0096] And, in the case that the third preset condition is met, the control device can further determine the current opening interval according to the outlet flow value of the circulating liquid supply device 1. And the control device determines the current opening value according to the maximum opening value of the current opening interval, and controls the opening of the liquid supplementing valve 13 to be the current opening value.

[0097] And in the case that the third preset condition is met, the control device can further determine whether the duration reaches a preset duration, and in the case that the duration reaches the preset duration, control the standby electromagnetic valve 15 to be closed; in the case that the duration does not reach the preset duration, control the standby electromagnetic valve 15 to be opened.

[0098] According to an example embodiment, the third preset condition includes that the control device receives a fourth high liquid level signal, a first high liquid level signal, a second low liquid level signal, a third low liquid level signal, and a fifth low liquid level signal.

[0099] According to an example embodiment, in the case that the liquid level of the circulating liquid in the liquid tank 11 is between the first liquid level detector 121 and the second liquid level detector 122, the fourth liquid level detector 124 outputs the fourth high liquid level signal, the first liquid level detector 121 outputs the first high liquid level signal, the second liquid level detector 122 outputs the second low liquid level signal, the third liquid level detector 123 outputs the third low liquid level signal, and the fifth liquid level detector 125 outputs the fifth low liquid level signal.

[0100] That is, in the case that the received liquid level signals meet the third preset condition, it means that the liquid level of the circulating liquid in the liquid tank 11 is higher than the height of the first liquid level detector 121 and lower than the height of the second liquid level detector 122. That is, the liquid level of the circulating liquid is between the first preset height and the second preset height.

[0101] According to an example embodiment, in the case that the liquid level of the circulating liquid is between the first preset height and the second preset height, the control device controls the main electromagnetic valve 14 to be opened, and also controls the liquid supplementing valve 13 to be opened for liquid supplementing.

[0102] For the standby electromagnetic valve 15, after the liquid level of the circulating liquid is higher than the first preset height, the standby electromagnetic valve 15 can not be directly controlled to be closed. Instead, in the case that the liquid level of the circulating liquid is higher than the first preset height, and the state of being higher than the first preset height lasts for a preset duration, the control device controls the standby electromagnetic valve 15 to be closed.

[0103] Therefore, in the case that the received liquid level signals meet the third preset condition, the control device further determines whether the duration reaches a preset duration.

[0104] According to an example embodiment, the duration is the duration that the control device receives the first high liquid level signal, that is, the duration that the liquid level of the circulating liquid is higher than the first preset height.

[0105] And in the case where the duration does not reach the preset duration, the control device controls the standby solenoid valve 15 to remain in the open state. In the case where the duration reaches the preset duration (for example, the duration is greater than or equal to the preset duration), the control device can control the standby solenoid valve 15 to close.

[0106] Exemplarily, in the case where the main solenoid valve 14, the makeup regulating valve 13 and the standby solenoid valve 15 are all open, the liquid level of the circulating liquid in the liquid tank 11 continuously rises. In the case where the liquid level of the circulating liquid rises to a first preset height, timing starts. The duration of timing is the duration. In the case where the duration is equal to or greater than the preset duration, the control device controls the standby solenoid valve 15 to close, so that the liquid level of the circulating liquid is regulated by the main solenoid valve 14 and the makeup regulating valve 13.

[0107] According to an example embodiment, in the case where the liquid level signal meets the third preset condition, the control device can regulate the opening degree of the makeup regulating valve 13, so as to regulate the makeup speed. According to an example embodiment, in the case where the liquid level signal meets the third preset condition, the control device determines the current opening degree interval according to the outlet flow value of the circulating liquid supply device 1.

[0108] The outlet flow value of the circulating liquid supply device 1 can be specifically the flow value of the circulating liquid delivered to the external liquid system. For example, the outlet of the circulating liquid supply device 1 is connected with a water pump, and the water pump is further connected with a temperature regulating device 21. The temperature regulating device 21 is connected with the external liquid system. The water pump draws the circulating liquid from the circulating liquid supply device 1 and delivers the circulating liquid to the temperature regulating device 21. The temperature regulating device 21 delivers the circulating liquid to the external liquid system after regulating the temperature of the circulating liquid. The outlet flow value can be the flow value of the temperature regulating device 21 delivered to the external liquid system.

[0109] The higher the flow value of the external liquid system is, the greater the outlet flow value of the circulating liquid supply device 1 is, and the higher the circulating liquid inlet flow value in the liquid tank 11 of the circulating liquid supply device 1 is, so that the liquid level of the circulating liquid in the liquid tank 11 at least does not decrease, and the lower the circulating liquid inlet flow value in the liquid tank 11 of the circulating liquid supply device 1 is, so that the liquid level of the circulating liquid in the liquid tank 11 at least does not increase.

[0110] And the circulating liquid inlet flow value is limited by the opening degree of the makeup regulating valve 13 and the supply flow of the external liquid supply system.

[0111] Therefore, different opening degree intervals can be preset for different outlet flow values.

[0112] In the embodiments of the present application, the outlet flow value is divided into intervals, for example, each 4 L / min is divided into an interval, for example, 0-4 L / min is an interval, 4-8 L / min is an interval, and so on.

[0113] A corresponding opening interval is set for each outlet flow interval. In the case of setting each opening interval, the maximum value of the opening interval needs to meet a first preset opening condition. The minimum value of the opening interval needs to meet a second preset opening condition.

[0114] The first preset opening condition includes that, in the case that the opening of the liquid supplementing regulating valve 13 is the maximum value of the opening interval and the supply flow of the external liquid supply system is the minimum, the inlet flow value of the circulating liquid is equal to the maximum value of the interval of the outlet flow interval, so as to ensure that, in the case of minimum supply and maximum demand, the liquid level can be ensured to at least not descend.

[0115] The second preset opening condition includes that, in the case that the opening of the liquid supplementing regulating valve 13 is the minimum value of the opening interval and the supply flow of the external liquid supply system is the maximum, the inlet flow value of the circulating liquid is equal to the minimum value of the interval of the outlet flow interval, so as to ensure that, in the case of maximum supply and minimum demand, the liquid level can be ensured to at least not ascend.

[0116] Exemplarily, the correspondence between different outlet flow values and opening intervals can be as follows

[0117] as shown in Table 1.

[0118]

[0119] Table 1

[0120] According to the example embodiments, in the case that the control device detects that the third preset condition is met, the control device determines the current opening interval according to the outlet flow value, and then determines the maximum opening value in the current opening interval as the current opening value, and controls the opening of the liquid supplementing regulating valve 13 to be the current opening value, so that the liquid supplementing regulating valve 13 supplements liquid at the current opening value.

[0121] According to the example embodiments, the maximum opening value in the current opening interval is equivalent to the upper limit value Hest of the opening interval. In the case that the liquid level in the liquid tank 11 is in the interval between the first preset height and the second preset height, the opening of the liquid supplementing regulating valve 13 is the maximum opening value in the current opening interval. In this way, in the case of the current outlet flow value, no matter what the supply flow value of the external liquid supply system is, the liquid level of the circulating liquid in the liquid tank 11 can not descend, or even ascend.

[0122] According to some embodiments, when the liquid level signal received by the control device satisfies a fourth preset condition, the control device controls the main electromagnetic valve 14 to open, controls the standby electromagnetic valve 15 to close, and controls the opening degree of the liquid supplementing valve 13 to remain unchanged.

[0123] According to example embodiments, the fourth preset condition includes that the control device receives a fourth high liquid level signal, a first high liquid level signal, a second high liquid level signal, a third low liquid level signal, and a fifth low liquid level signal. That is, the liquid level of the circulating liquid in the liquid tank 11 is between the second preset height and the third preset height.

[0124] In this case, the liquid level of the circulating liquid is in a reasonable range, which can meet the demand of the external liquid system for the amount of circulating liquid. Therefore, in this case, the control device can keep the main electromagnetic valve 14 open and the standby electromagnetic valve 15 closed. And the control device can control the opening degree of the liquid supplementing valve 13 to remain unchanged, that is, the opening degree of the liquid supplementing valve 13 at the current time is the same as the opening degree of the liquid supplementing valve 13 at the last time.

[0125] In this way, when the liquid level of the circulating liquid is between the second preset height and the third preset height, the liquid supplementing valve 13 can be controlled to supplement liquid into the liquid tank 11 through the main electromagnetic valve 14 and the liquid supplementing valve 13, and the opening degree of the liquid supplementing valve 13 remains unchanged, so that the supplementing speed of the circulating liquid remains unchanged, so as to keep the liquid level of the circulating liquid between the second preset height and the third preset height.

[0126] According to some embodiments, when the liquid level signal received by the control device satisfies a fifth preset condition, the control device controls the main electromagnetic valve 14 to open and controls the standby electromagnetic valve 15 to close.

[0127] The fifth preset condition includes that the control device receives a fourth high liquid level signal, a first high liquid level signal, a second high liquid level signal, a third high liquid level signal, and a fifth low liquid level signal. That is, the liquid level of the circulating liquid in the liquid tank 11 is between the third preset height and the fifth preset height.

[0128] When the liquid level is between the third preset height and the fifth preset height, the liquid level of the circulating liquid in the liquid tank 11 is at a higher level, and the supplementing speed needs to be reduced to prevent the circulating liquid in the liquid tank 11 from overflowing.

[0129] Therefore, when the liquid level is between the third preset height and the fifth preset height, the control device can control the main electromagnetic valve 14 to open and the standby electromagnetic valve 15 to close while adjusting the opening degree of the liquid supplementing valve 13 to reduce the supplementing speed, so that the liquid level of the circulating liquid does not need to be raised at least.

[0130] According to the example embodiment, in the case that the liquid level signal satisfies the fifth preset condition, the control device can specifically determine the current opening degree interval according to the current outlet flow value of the circulating liquid supply device 1, and determine the minimum opening degree value in the current opening degree interval as the current opening degree value. And the control device further adjusts the opening degree of the liquid supplement regulating valve 13 to the current opening degree value.

[0131] Exemplarily, the control device can determine the outlet flow interval corresponding to the current outlet flow value according to the current outlet flow value. Then the control device determines the opening degree interval corresponding to the outlet flow interval according to the outlet flow interval. Then the control device can determine the lower limit value Lest of the current opening degree interval as the current opening degree value. And the control device further adjusts the opening degree of the liquid supplement regulating valve 13 to the lower limit value Lest of the current opening degree interval.

[0132] Since in the case that the opening degree of the liquid supplement regulating valve 13 is the lower limit value Lest of the opening degree interval, the liquid level of the circulating liquid in the liquid tank 11 can be kept from rising even in the case that the liquid supply flow of the external liquid supply system is maximum and the current outlet flow value is the maximum value of the outlet flow interval. Therefore, the control device sets the opening degree of the liquid supplement regulating valve 13 to the lower limit value Lest of the opening degree interval, so that the liquid level of the circulating liquid in the liquid tank 11 can be kept from rising or even lowered, no matter how the liquid supply flow of the external liquid supply system changes within the liquid supply flow range and how the outlet flow changes within the outlet flow interval.

[0133] In the example embodiment, in the case that the control device receives the liquid level signal satisfying the fifth preset condition, the control device can control the main electromagnetic valve 14 to open, control the standby electromagnetic valve 15 to close, and determine the opening degree of the liquid supplement regulating valve 13 according to the outlet flow value, so as to adjust the opening degree of the liquid supplement regulating valve 13, so that the liquid level of the circulating liquid in the liquid tank 11 is at least kept from rising, thereby reducing the probability of overflow due to too high liquid level.

[0134] According to some embodiments, in the case that the control device receives the liquid level signal satisfying the sixth preset condition, the control device controls the main electromagnetic valve 14 to close, controls the standby electromagnetic valve 15 to close, and controls the liquid supplement regulating valve 13 to close, and the control device further outputs a high liquid level alarm signal.

[0135] According to the example embodiment, the sixth preset condition includes that the control device receives a first high liquid level signal, a second high liquid level signal, a third high liquid level signal, a fourth high liquid level signal, and a fifth high liquid level signal. That is, the liquid level of the circulating liquid in the liquid tank 11 is higher than the fifth preset height.

[0136] When the liquid level in the liquid tank 11 is higher than the fifth preset height, the circulating liquid in the liquid tank 11 is about to overflow, and thus the control device can control the main electromagnetic valve 14, the standby electromagnetic valve 15 and the liquid supplementing regulating valve 13 to be closed to stop supplementing the liquid tank 11. In addition, the control device can output a high liquid level alarm signal to perform a high liquid level alarm and reduce the risk of overflow of the circulating liquid.

[0137] It should be clearly understood that the present application describes how to form and use specific examples, but the present application is not limited to any details of these examples. Instead, based on the teachings of the disclosure of the present application, these principles can be applied to many other embodiments.

[0138] According to another aspect of the present application, the embodiments of the present application provide a temperature control system. Referring to Figure 1 and Figure 2 , the temperature control system can specifically include the circulating liquid supply device 1 described in the above embodiments and an external system 2.

[0139] The external system 2 includes a temperature regulating device 21, which is in communication with the liquid outlet of the temperature control system and receives and adjusts the temperature of the circulating liquid.

[0140] In the embodiments of the present application, the circulating liquid supply device 1 of the temperature control system automatically controls the flow of the circulating liquid flowing into the liquid tank 11 to supplement the liquid tank 11. In addition, the temperature regulating device 21 adjusts the temperature of the circulating liquid drawn from the liquid tank 11, and the adjusted circulating liquid can be output to the external liquid using device, so that the external liquid using device can use the adjusted circulating liquid for temperature adjustment.

[0141] The temperature control system of the present application can accelerate the supplement when the liquid level of the circulating liquid in the liquid tank 11 is low, and stop supplementing in time when the liquid level of the circulating liquid in the liquid tank 11 is high, so that the liquid level of the circulating liquid in the liquid tank 11 can always be within a normal range. In this way, the probability of overflow of the circulating liquid due to the reduced reliability of the float valve is also reduced.

[0142] According to some embodiments, the external system 2 can further include a liquid pump 22, a pressure regulating device 23 and a pressure detection device 24.

[0143] The liquid pump 22 includes an input end and an output end. The temperature regulating device 21 includes a temperature regulating input end and a temperature regulating output end. The input end of the liquid pump 22 is in communication with the liquid outlet of the liquid tank 11 of the circulating liquid supply device 1, and the output end of the liquid pump 22 is connected to the temperature regulating input end of the temperature regulating device 21. The temperature regulating output end of the temperature regulating device 21 is used to connect the external liquid using device.

[0144] The liquid pump 22 draws the circulating liquid from the liquid tank 11 and outputs to the temperature adjusting device 21. The temperature adjusting device 21 adjusts the temperature of the circulating liquid, and the temperature-adjusted circulating liquid can be output to the external liquid device. The external liquid device can use the temperature-adjusted circulating liquid to adjust the temperature and thus perform corresponding work.

[0145] According to some embodiments, the temperature adjusting device 21 can include a cooler 211 and a heater 212. The cooler 211 is used to lower the temperature of the circulating liquid, and the heater 212 is used to raise the temperature of the circulating liquid.

[0146] Exemplarily, the circulating liquid can be water, and the liquid pump 22 can be a water pump. The circulating liquid can also be oil or other cooling liquids, which are not described here.

[0147] According to an example embodiment, one end of the pressure adjusting device 23 is also connected to the temperature adjusting output end of the temperature adjusting device 21, and the other end of the pressure adjusting device 23 is connected to the liquid tank 11 of the circulating liquid supply device 1.

[0148] Exemplarily, part of the temperature-adjusted circulating liquid after the temperature adjusting device 21 flows into the external liquid device to be used by the external liquid device, and the temperature-adjusted circulating liquid not used by the external liquid device can be circulated into the liquid tank 11 of the circulating liquid supply device 1 through the pressure adjusting device 23, so that the circulating liquid not used by the external liquid system can continue to be used, reducing waste.

[0149] Exemplarily, the pressure adjusting device 23 can be a pressure regulating valve, and adjusting the opening of the pressure regulating valve can adjust the circulating liquid flow per unit time flowing through the pressure adjusting device 23. The greater the opening, the greater the flow.

[0150] According to an example embodiment, the pressure detecting device 24 is arranged at the temperature adjusting output end of the temperature adjusting device 21, for detecting the pressure of the circulating liquid at the temperature adjusting output end to output system pressure data.

[0151] Exemplarily, the pressure detecting device 24 can specifically include a pressure sensor.

[0152] According to some embodiments, the pressure detecting device 24 can also include a temperature sensor to measure the temperature of the circulating liquid at the temperature adjusting output end to output circulating liquid temperature data, which is not limited here.

[0153] According to some embodiments, the pressure detecting device 24 can also include a flow sensor to measure the flow of the circulating liquid output to the external liquid device by the temperature adjusting output end.

[0154] According to the example embodiment, the control device is also electrically connected with the pressure detection device 24, the pressure regulating device 23 and the liquid pump 22 respectively, so as to regulate the opening of the pressure regulating valve and the working frequency of the liquid pump 22 according to the system pressure data measured by the pressure detection device 24, thereby regulating the pressure of the circulating liquid in the temperature control system.

[0155] For example, when the pressure of the circulating liquid in the current temperature control system is greater than the first preset upper pressure limit value and less than the second preset upper pressure limit value (wherein the second preset upper pressure limit value is greater than the first preset upper pressure limit value), the control device can increase the opening of the pressure regulating valve to accelerate the circulation of the circulating liquid, thereby relieving the pressure of the circulating liquid in the temperature control system.

[0156] When the pressure of the circulating liquid in the current temperature control system is greater than the second preset upper pressure limit value, the control device controls the opening of the pressure regulating valve to be increased and controls the working frequency of the liquid pump 22 to be reduced by the first preset frequency value per second, so as to increase the relieving degree of the pressure of the circulating liquid in the temperature control system by simultaneously controlling the opening of the pressure regulating valve and the working frequency of the liquid pump 22.

[0157] When the pressure of the circulating liquid in the current temperature control system is less than the first preset lower pressure limit value and greater than the second preset lower pressure limit value (wherein the second preset lower pressure limit value is less than the first preset lower pressure limit value, which is less than the first preset upper pressure limit value, which is less than the second preset upper pressure limit value), the control device can decrease the opening of the pressure regulating valve to reduce the circulation speed of the circulating liquid, thereby appropriately increasing the pressure of the circulating liquid in the temperature control system.

[0158] When the pressure of the circulating liquid in the current temperature control system is less than the second preset lower pressure limit value, the control device controls the opening of the pressure regulating valve to be decreased and controls the working frequency of the liquid pump 22 to be increased by the second preset frequency value per second, so as to appropriately increase the pressure of the circulating liquid in the temperature control system by simultaneously controlling the opening of the pressure regulating valve and the working frequency of the liquid pump 22.

[0159] When the pressure of the circulating liquid in the current temperature control system is between the second preset upper pressure limit value and the second preset lower pressure limit value, the control device controls the working frequency of the liquid pump 22 to be adjusted by the third preset frequency value per second until the working frequency of the liquid pump 22 changes to the preset working frequency, so that the liquid pump 22 can work normally when the pressure of the circulating liquid is normal.

[0160] And, the first preset frequency value is greater than the third preset frequency value. The second preset frequency value is greater than the third preset frequency value. In the case of pressure anomaly, the frequency of the fast regulating liquid pump 22 is adjusted to quickly relieve the system pressure. In the case of normal pressure, the frequency of the slow regulating liquid pump 22 is adjusted to prevent the system circulating liquid pressure from being abnormal again due to sudden change of the liquid pump 22 frequency.

[0161] According to yet another aspect of the present application, the embodiments of the present application provide an integrated circuit process system. The integrated circuit process system can specifically include the temperature control system described in the above embodiments, and further include a semiconductor process device.

[0162] The semiconductor process device is in communication with the temperature adjusting device of the temperature control system, and receives the temperature-adjusted circulating liquid to perform semiconductor process manufacturing.

[0163] The temperature control system of the semiconductor process device of the present application can accelerate the replenishment when the liquid level of the circulating liquid in the liquid tank is low, and stop the liquid replenishment in time when the liquid level of the circulating liquid in the liquid tank is high, so that the liquid level of the circulating liquid in the liquid tank can always be within the normal range. In this way, the probability of circulating liquid overflow due to reduced reliability of the float valve is also reduced.

[0164] According to yet another aspect of the present application, the embodiments of the present application provide a liquid level control method of a circulating liquid supply device, which is applied to the circulating liquid supply device described in the above embodiments. The liquid level control method can be specifically executed by the control device in the circulating liquid supply device, and can specifically include controlling the opening and closing states of the liquid replenishment adjusting valve and the main road electromagnetic valve according to the liquid level signal to adjust the liquid level height in the liquid tank.

[0165] The specific implementation details of the liquid level control method can refer to the above embodiments, which will not be repeated here.

[0166] Finally, it should be noted that the above is only the preferred embodiments of the present application, and is not intended to limit the present application. Although the foregoing embodiments of the present application are described in detail, those skilled in the art can still modify the technical solutions of the foregoing embodiments, or make equivalent replacements to some technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A circulating fluid supply device for use in a temperature control system, characterized in that, The circulating liquid supply device comprises: a liquid tank provided with a first liquid inlet, a second liquid inlet and a liquid outlet, and containing circulating liquid, the liquid outlet being connected to an external system to discharge the circulating liquid from the liquid tank to the external system; at least two liquid level detectors arranged in the liquid tank in sequence according to different preset heights, detecting the liquid level of the circulating liquid in the liquid tank, and outputting a liquid level signal; a liquid supplementing adjusting valve arranged outside the liquid tank, one end of the liquid supplementing adjusting valve being in communication with the first liquid inlet; a main path electromagnetic valve arranged outside the liquid tank, one end of the main path electromagnetic valve being in communication with the other end of the liquid supplementing adjusting valve, and the other end of the main path electromagnetic valve being in communication with an external liquid supply system to receive circulating liquid delivered by the external liquid supply system; a control device electrically connected to the at least two liquid level detectors, the liquid supplementing adjusting valve and the main path electromagnetic valve, and controlling the opening and closing states of the liquid supplementing adjusting valve and the main path electromagnetic valve according to the liquid level signal to adjust the liquid level of the liquid tank; a standby electromagnetic valve arranged outside the liquid tank, one end of the standby electromagnetic valve being in communication with the second liquid inlet, and the other end of the standby electromagnetic valve being in communication with one end of the main path electromagnetic valve; the control device is further electrically connected to the standby electromagnetic valve, and controls the opening and closing states of the liquid supplementing adjusting valve, the main path electromagnetic valve and the standby electromagnetic valve according to the liquid level signal output by the at least two liquid level detectors to adjust the liquid level of the liquid tank; the at least two liquid level detectors comprise: a first liquid level detector located at a first preset height of the liquid tank, the first liquid level detector generating a first high liquid level signal when the liquid level of the circulating liquid is higher than the first preset height, and generating a first low liquid level signal when the liquid level of the circulating liquid is lower than the first preset height; a second liquid level detector located at a second preset height of the liquid tank, the second liquid level detector generating a second high liquid level signal when the liquid level of the circulating liquid is higher than the second preset height, and generating a second low liquid level signal when the liquid level of the circulating liquid is lower than the second preset height; a third liquid level detector located at a third preset height of the liquid tank, the third liquid level detector generating a third high liquid level signal when the liquid level of the circulating liquid is higher than the third preset height, and generating a third low liquid level signal when the liquid level of the circulating liquid is lower than the third preset height; the control device controls the opening and closing states of the liquid supplementing adjusting valve, the main path electromagnetic valve and the standby electromagnetic valve according to the liquid level signals generated by the first liquid level detector, the second liquid level detector and the third liquid level detector to adjust the liquid level of the circulating liquid in the liquid tank; wherein the first preset height is lower than the second preset height, and the second preset height is lower than the third preset height. a fourth liquid level detector located at a fourth preset height of the liquid tank, the fourth liquid level detector generating a fourth high liquid level signal when the liquid level of the circulating liquid is higher than the fourth preset height, and generating a fourth low liquid level signal when the liquid level of the circulating liquid is lower than the fourth preset height; a fifth liquid level detector located at a fifth preset height of the liquid tank, the fifth liquid level detector generating a fifth high liquid level signal when the liquid level of the circulating liquid is higher than the fifth preset height, and generating a fifth low liquid level signal when the liquid level of the circulating liquid is lower than the fifth preset height; the control device controls the opening and closing states of the liquid supplementing regulating valve, the main path electromagnetic valve and the standby electromagnetic valve according to the received liquid level signals generated by the first liquid level detector, the second liquid level detector, the third liquid level detector, the fourth liquid level detector and the fifth liquid level detector, so as to adjust the liquid level of the circulating liquid in the liquid tank; wherein the fourth preset height is lower than the first preset height, the first preset height is lower than the second preset height, the second preset height is lower than the third preset height, and the third preset height is lower than the fifth preset height; the control device controls the main path electromagnetic valve to open when the received liquid level signals satisfy a third preset condition; the control device determines a current opening degree interval according to the outlet flow value of the circulating liquid supply device; the control device determines a maximum opening degree value in the current opening degree interval as a current opening degree value; the control device controls the opening degree of the liquid supplementing regulating valve to be the current opening degree value; when the received liquid level signals satisfy the third preset condition, the control device determines whether a duration reaches a preset duration, wherein the duration is a duration when the control device receives the first high liquid level signal; the control device controls the standby electromagnetic valve to close when the duration reaches the preset duration; the control device controls the standby electromagnetic valve to open when the duration does not reach the preset duration; wherein the third preset condition comprises: the control device receives the fourth high liquid level signal, the first high liquid level signal, the second low liquid level signal, the third low liquid level signal and the fifth low liquid level signal.

2. The circulating liquid supply device according to claim 1, wherein: the control device controls the main path electromagnetic valve, the standby electromagnetic valve and the liquid supplementing regulating valve to close when the received liquid level signals satisfy a first preset condition, and the control device outputs a shutdown alarm instruction; wherein the first preset condition comprises: the control device receives the first low liquid level signal, the second low liquid level signal, the third low liquid level signal, the fourth low liquid level signal and the fifth low liquid level signal.

3. The circulating liquid supply device according to claim 1, wherein: The control device controls the main path electromagnetic valve and the standby electromagnetic valve to open and controls the opening degree of the liquid supplementing adjusting valve to be the preset maximum opening degree when the received liquid level signal meets a second preset condition. The second preset condition comprises: The control device receives the fourth high liquid level signal, the first low liquid level signal, the second low liquid level signal, the third low liquid level signal and the fifth low liquid level signal.

4. The circulating liquid supply device according to claim 1, wherein: The control device controls the main path adjusting valve to open, controls the standby electromagnetic valve to close and controls the opening degree of the liquid supplementing adjusting valve to remain unchanged when the received liquid level signal meets a fourth preset condition. The fourth preset condition comprises: The control device receives the fourth high liquid level signal, the first high liquid level signal, the second high liquid level signal, the third low liquid level signal and the fifth low liquid level signal.

5. The circulating liquid supply device according to claim 1, wherein: The control device controls the main path electromagnetic valve to open and controls the standby electromagnetic valve to close when the received liquid level signal meets a fifth preset condition. The control device determines a current opening degree interval according to a current outlet flow value of the circulating liquid supply device. The control device determines a minimum opening degree value in the current opening degree interval as a current opening degree value. The control device adjusts the opening degree of the liquid supplementing adjusting valve to the current opening degree value. The fifth preset condition comprises: The control device receives the fourth high liquid level signal, the first high liquid level signal, the second high liquid level signal, the third high liquid level signal and the fifth low liquid level signal.

6. The circulating liquid supply device according to claim 1, wherein: The control device controls the main path electromagnetic valve, the standby electromagnetic valve and the liquid supplementing adjusting valve to close when the received liquid level signal meets a sixth preset condition, and the control device outputs a high liquid level alarm signal. The sixth preset condition comprises: The control device receives the first high liquid level signal, the second high liquid level signal, the third high liquid level signal, the fourth high liquid level signal and the fifth high liquid level signal.

7. A temperature control system, characterized by, The temperature control system comprises the circulating liquid supply device according to any one of claims 1-6 and an external system, and the external system comprises: A temperature adjusting device which is in communication with the liquid outlet of the temperature control system and receives and adjusts the temperature of the circulating liquid.

8. An integrated circuit process system, comprising: The integrated circuit process system comprises: The temperature control system and the semiconductor process equipment according to claim 7; The semiconductor process equipment is in communication with the temperature adjusting device of the temperature control system and receives the temperature-adjusted circulating liquid to manufacture the semiconductor process.

9. A liquid level control method for a circulating liquid supply device, characterized by, The liquid level control method is applied to the circulating liquid supply device according to any one of claims 1-6. The liquid level control method comprises: According to the liquid level signal, the opening and closing states of the liquid supplementing adjusting valve and the main path electromagnetic valve are controlled to adjust the liquid level height in the liquid tank.

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