Laser gas waste gas recovery device

Abstract

The invention discloses a laser gas waste gas recovery device, and relates to the technical field of filtration. The cleaning effect problem is solved. The device specifically comprises a filtering channel; at least one group of filtering mechanism is arranged on the inner side of the filtering channel, and a self-driving lifting part is arranged on the outer wall, above the filtering mechanism, of the filtering channel; the self-driven lifting part comprises a fixing frame, a filter element and a plurality of arc-shaped elastic pieces located at the downstream of the gas flow direction, the fixing frame is fixed to the inner wall of the filter channel, and the periphery of the filter element is fixed to the inner wall of the fixing frame. By utilizing the flexibility of the filter element and the elastic force of the arc-shaped elastic piece, the filter element can be in a dense state in a filtering state, the filtering reliability is ensured, in a non-filtering state, the filter element can be opened by utilizing the limiting of the arc-shaped elastic piece, and then vibration cleaning is performed, so that impurities existing in the filter element or at wrinkles can be cleaned; the cleaning effect is improved.

Description

Technical Field

[0001] The invention relates to the field of filtering technology, and in particular to a laser gas waste gas recovery device. Background Art

[0002] After the use of the lithography machine, the laser gas is enriched with not only neon, krypton, xenon, and argon, but also some hydrogen, depending on the type of laser gas. However, there is almost no loss of neon during the use of the lithography machine, so recycling and separation becomes an option for chip factories.

[0003] When recovering and separating laser gas, distillation is used for separation. However, since the gas contains a large amount of particulate smoke during the lithography process of the lithography machine, the gas needs to be filtered first when recovering it.

[0004] After searching, the Chinese patent publication number CN118649492B discloses a gas dust removal filter, including: a box body, which has a horizontal plate constructed therein, and a plurality of pipes are arranged on the top of the horizontal plate, and an air inlet pipe is installed on the box body, and the ends of the pipes all pass through the horizontal plate and are connected to the air inlet pipe; a cleaning port, which is opened at the bottom of the box body and is equipped with an outer cover for closing the cleaning port; a circular plate, which is arranged at the end of the pipe and has a through hole, and a baffle and a mounting frame are respectively arranged on both sides of the through hole, and the mounting frame is connected to the end of the pipe, and the baffle is connected to the mounting frame through a first tension spring.

[0005] The above patent has the following shortcomings: it uses a cleaning piece to clean the filter, but since the filter mostly uses a multi-pleated cotton filter element when filtering small gas particles, some particulate impurities will enter the interior or pleats of the cotton filter element, rather than just on the surface, so reliable cleaning cannot be performed. Summary of the invention

[0006] The purpose of the present invention is to solve the shortcomings of the prior art and to propose a laser gas waste gas recovery device.

[0007] In order to achieve the above object, the present invention adopts the following technical solutions: A laser gas waste gas recovery device includes a filter channel; At least one set of filtering mechanisms is arranged inside the filtering channel, and a self-driving lifting part is arranged on the outer wall of the filtering channel above the filtering mechanism; The self-driven lifting part includes a fixing frame, a filter element and a plurality of arc-shaped spring pieces located downstream of the gas flow, wherein the fixing frame is fixed to the inner wall of the filter channel, the periphery of the filter element is fixed to the inner wall of the fixing frame, the bottoms of the plurality of arc-shaped spring pieces are fixed to the inner side wall of the bottom of the fixing frame through a fixing sheet, and the tops of the plurality of arc-shaped spring pieces are fixed with a same sliding sheet; The self-driven lifting part includes a lifting rod and a self-driven lifting assembly that drives the lifting rod to move up and down. The lifting rod is slidably connected to the filter channel and the inner wall of the fixed frame, and the bottom end of the lifting rod is fixed to the top outer wall of the sliding sheet.

[0008] Preferably: the self-driven lifting assembly includes a sliding block, a drum and a limiting shell, the inner wall of the drum is fixed with a rotating shaft, the rotating shaft is rotatably connected to the top of the filter channel through a support plate, the limiting shell is fixed to the top outer wall of the filter channel by bolts, the sliding block is slidably connected to the inner wall of the limiting shell, the lifting rod passes through the inner wall of the sliding block, and the lifting rod is located on the outer walls of the top and bottom of the sliding block, and limiting bosses are fixed, and the distance between the two limiting bosses is greater than the thickness of the sliding block.

[0009] Furthermore: a spring 1 is buckled on the top of the sliding block, the other end of the spring 1 is buckled on the top lower surface of the limiting shell, a twisted rope is wound on the outer wall of the drum, and the other end of the twisted rope is fixed to the top of the sliding block.

[0010] On the basis of the above scheme: a rotating rod is fixed on one side of the reel, waist-shaped holes are opened on the inner walls on both sides of the rotating rod, the inner walls of the waist-shaped holes are movably limited and matched with limiting columns, and one end of the limiting column is fixed with a telescopic component arranged on the outer wall of the top of the filter channel.

[0011] A better solution among the above solutions is that the sliding block is a hollow structure, and a plurality of elastic balls are accommodated in the hollow part of the sliding block.

[0012] As a further solution of the present invention: the telescopic assembly includes a piston, a piston rod and a cylinder body, the cylinder body is fixed to the top outer wall of the filter channel, the piston is slidably connected to the inner wall of the cylinder body, the inner wall of the filter channel is provided with a connecting hole for connecting the filter channel and the inner cavity of the cylinder body, and the two connecting holes in the same group are respectively located on both sides of the filter mechanism.

[0013] At the same time, the outer wall of the rotating shaft is provided with a plurality of teeth, the inner wall of the support plate is slidably connected to a slider through a sliding groove, the top of the slider is slidably connected to a ratchet that cooperates with the teeth, the ratchet is connected to the slider through a spring, and one of the opposite sides of the teeth and the ratchet is an inclined surface, and the other side is a plane.

[0014] As a preferred embodiment of the present invention: the bottom outer wall of the slider is buckled with spring 2, the other side of spring 2 is buckled with the inner wall of the support plate, the inner wall of the support plate is fixed with a telescope by bolts, and the telescopic end of the telescope is fixed to the bottom outer wall of the slider by bolts.

[0015] At the same time, the telescopic device is a pneumatic telescopic rod, and the rodless cavity of the telescopic device is connected to the inner cavity of the filtering channel.

[0016] As a better solution of the present invention: a cooling mechanism is provided at the air inlet side end of the filter channel, and the cooling mechanism includes a heat exchange tube, a heat exchanger and a fluid pump. The heat exchange tube is installed on the inner side of the filter channel, and both sides of the heat exchange tube are fixed to the heat exchanger after passing through the filter channel. The fluid pump is connected between the heat exchange tube and the heat exchanger, and heat exchange medium is provided in the heat exchange tube and the heat exchanger.

[0017] The beneficial effects of the present invention are: 1. The present invention utilizes the flexibility of the filter element and the elastic force of the arc-shaped spring piece so that the filter element is in a "dense" state in the filtering state, thereby ensuring the reliability of filtering. In the non-filtering state, the filter element can be opened by utilizing the limiting energy of the arc-shaped spring piece, and then vibration cleaning is performed, so that impurities existing in the filter element or in the folds can be cleaned, thereby improving the cleaning effect.

[0018] 2. The present invention utilizes the collision between the sliding block and the limiting boss to achieve vibration cleaning, and at the same time, the sliding block is set to a hollow structure, so that the collision between the sliding block and the limiting boss and the inertia of the sliding block movement can cause multiple elastic collisions between the elastic balls and the elastic balls, and between the elastic balls and the inner wall of the sliding block, thereby generating multiple small secondary vibrations after one vibration, further increasing the cleaning effect.

[0019] 3. The present invention, through targeted setting of the telescopic component, can, on the one hand, make the filtering state and the reset state of the filtering mechanism related to the air pressure in the inner cavity of the filtering channel, thereby reducing the drive and simplifying the control; on the other hand, it can also adaptively adjust the rebound energy storage size according to the pressure difference on both sides of the filtering mechanism, thereby achieving the function that the higher the blockage degree, the greater the rebound cleaning energy.

[0020] 4. The present invention, by setting teeth and ratchets and combining them with the pneumatic design of the telescope, can, on the one hand, enable the rotating shaft to rebound quickly only and only when the air pressure in the inner cavity of the filter channel dissipates, thereby increasing the rebound speed and thus increasing the vibration cleaning effect; on the other hand, the engagement and separation of the teeth and ratchets are automatically controlled by the air pressure in the inner cavity of the filter channel, saving power layout and control logic settings, thereby saving costs.

[0021] 5. The present invention provides a cooling mechanism, and the fluid pump can direct the heat exchange medium in the heat exchange tube and the heat exchanger to flow, thereby taking away the heat of the laser gas and cooling it, thereby preventing the high-temperature laser gas from damaging the filter mechanism and increasing the service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the overall structure of a laser gas waste gas recovery device proposed by the present invention; Figure 2 A schematic diagram of the filtering mechanism structure of a laser gas waste gas recovery device proposed by the present invention; Figure 3 This is a schematic diagram of the structure of a self-driven lifting part of a laser gas waste gas recovery device proposed by the present invention; Figure 4 This is a schematic diagram of the structure of a self-driven lifting component of a laser gas waste gas recovery device proposed by the present invention; Figure 5 A schematic cross-sectional view of the telescopic assembly of a laser gas waste gas recovery device proposed by the present invention; Figure 6 This is a schematic structural diagram of the reverse locking portion of the rotating shaft of a laser gas waste gas recovery device proposed by the present invention; Figure 7 This is a cross-sectional structural diagram of the reverse locking portion of the rotating shaft of a laser gas waste gas recovery device proposed by the present invention; Figure 8 This is a schematic diagram of the cooling mechanism structure of a laser gas waste gas recovery device proposed by the present invention.

[0023] In the figure: 1. filtration channel; 2. self-driven lifting part; 3. filtration mechanism; 4. cooling mechanism; 5. lifting rod; 6. self-driven lifting assembly; 7. fixing frame; 8. filter element; 9. arc-shaped spring piece; 10. fixing plate; 11. sliding plate; 12. limiting boss; 13. sliding block; 14. supporting plate; 15. rotating shaft; 16. reel; 17. twisted rope; 18. spring one; 19. limiting shell; 20. limiting column; 21. rotating rod; 22. waist-shaped hole; 23. telescopic assembly; 24. connecting hole; 25. piston; 26. piston rod; 27. cylinder body; 28. teeth; 29. ​​ratchet; 30. slider; 31. slide groove; 32. spring two; 33. telescope; 34. spring three; 35. heat exchange tube; 36. heat exchanger; 37. fluid pump. DETAILED DESCRIPTION

[0024] The technical solution of the present invention is further described in detail below in conjunction with specific implementation methods.

[0025] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0026] Embodiment 1: A laser gas waste gas recovery device, such as Figure 1-Figure 8 As shown, it includes a filtering channel 1 , at least one set of filtering mechanisms 3 is arranged on the inner side of the filtering channel 1 , and a self-driven lifting part 2 is arranged on the outer wall of the filtering channel 1 above the filtering mechanism 3 .

[0027] The self-driven lifting part 2 includes a fixing frame 7, a filter element 8 and a plurality of arc-shaped spring pieces 9 located downstream of the gas flow, wherein the fixing frame 7 is fixed to the inner wall of the filter channel 1, and the filter element 8 is fixed to the inner wall of the fixing frame 7 on all sides, and the bottoms of the plurality of arc-shaped spring pieces 9 are fixed to the bottom inner wall of the fixing frame 7 through a fixing sheet 10, and the tops of the plurality of arc-shaped spring pieces 9 are fixed with the same sliding sheet 11.

[0028] The self-driven lifting part 2 includes a lifting rod 5 and a self-driven lifting assembly 6 that drives the lifting rod 5 to move up and down. The lifting rod 5 is slidably connected to the inner wall of the filter channel 1 and the fixed frame 7, and the bottom end of the lifting rod 5 is fixed to the top outer wall of the sliding sheet 11.

[0029] When the device is in use, gas enters from one side of the filter channel 1, is filtered by the filter element 8 and then discharged. During the filtering process, the self-driven lifting assembly 6 will pull the lifting rod 5 upward, thereby pulling the sliding piece 11 upward. Due to the elastic effect of the arc-shaped spring piece 9, the curvature of the arc-shaped spring piece 9 is small, and the filter element 8 is not limited. After the filtering is completed, the self-driven lifting assembly 6 quickly moves the lifting rod 5 downward, thereby moving the sliding piece 11 downward, and the arc-shaped spring piece 9 is squeezed, and the curvature increases, thereby causing the middle part of the filter element 8 to bulge toward the air intake side, so that the filter element 8 is in an open state. At the same time, the self-driven lifting assembly 6 will also apply vibration to the lifting rod 5, thereby cleaning the opened filter element 8 through vibration.

[0030] This device utilizes the flexibility of the filter element 8 and the elastic force of the arc-shaped spring piece 9, so that the filter element 8 is in a "dense" state in the filtering state, thereby ensuring the reliability of the filtration. In the non-filtering state, the filter element 8 can be opened by utilizing the limiting energy of the arc-shaped spring piece 9, and then vibration cleaning is performed, so that impurities existing inside the filter element 8 or in the folds can be cleaned, thereby improving the cleaning effect.

[0031] To solve the vibration problem; Figure 3 As shown, the self-driven lifting assembly 6 includes a sliding block 13, a drum 16 and a limiting shell 19, the inner wall of the drum 16 is fixed with a rotating shaft 15, the rotating shaft 15 is rotatably connected to the top of the filter channel 1 through a support plate 14, the limiting shell 19 is fixed to the top outer wall of the filter channel 1 by bolts, the sliding block 13 is slidably connected to the inner wall of the limiting shell 19, the lifting rod 5 passes through the inner wall of the sliding block 13, and the lifting rod 5 is located at the outer wall of the top and bottom of the sliding block 13, and the limiting boss 12 is fixed, and the distance between the two limiting bosses 12 is greater than the thickness of the sliding block 13.

[0032] The top of the sliding block 13 is buckled with a spring 18 , the other end of the spring 18 is buckled with the top lower surface of the limiting shell 19 , the outer wall of the drum 16 is wound with a twisted rope 17 , the other end of the twisted rope 17 is fixed to the top of the sliding block 13 .

[0033] A rotating rod 21 is fixed to one side of the reel 16, and waist-shaped holes 22 are opened on the inner walls of both sides of the rotating rod 21. The inner wall of the waist-shaped hole 22 is movably limited to cooperate with a limiting column 20, and a telescopic component 23 arranged on the top outer wall of the filter channel 1 is fixed to one end of the limiting column 20.

[0034] When in the filtering state, the two telescopic components 23 are extended and retracted to different degrees, so that the rotating rod 21 drives the reel 16 to rotate, thereby pulling the sliding block 13 upward through the twisted rope 17, and the sliding block 13 contacts and limits with the top limiting boss 12, driving the lifting rod 5 to move upward. When the filtering is completed, the reel 16 loses drive, the filtering channel 1 is released, the sliding block 13 moves downward, and the lifting rod 5 loses its limit, thereby combining the elastic force of the arc-shaped spring piece 9 to push the filter element 8 out and open it. At the same time, the sliding block 13 will also be moved downward by the elastic force of the spring 18, thereby hitting the limiting boss 12 at the bottom, causing the lifting rod 5 to vibrate, and the lifting rod 5 transmits the vibration to the arc-shaped spring piece 9 through the sliding piece 11, and then to the filter element 8 for cleaning.

[0035] The sliding block 13 is a hollow structure, and a plurality of elastic balls are accommodated in the hollow part of the sliding block 13 .

[0036] The present device utilizes the collision between the sliding block 13 and the limiting boss 12 to achieve vibration cleaning. At the same time, the sliding block 13 is set to a hollow structure, so that the collision between the sliding block 13 and the limiting boss 12 and the inertia of the movement of the sliding block 13 can cause multiple elastic collisions between the elastic balls and between the elastic balls and the inner wall of the sliding block 13, thereby generating multiple small secondary vibrations after one vibration, further increasing the cleaning effect.

[0037] In order to solve the self-driving problem; Figure 5 As shown, the telescopic assembly 23 includes a piston 25, a piston rod 26 and a cylinder body 27. The cylinder body 27 is fixed to the top outer wall of the filter channel 1, and the piston 25 is slidably connected to the inner wall of the cylinder body 27. The inner wall of the filter channel 1 is provided with a connecting hole 24 for connecting the filter channel 1 and the inner cavity of the cylinder body 27, and the two connecting holes 24 in the same group are respectively located on both sides of the filter mechanism 3.

[0038] When in the filtering state, there is air pressure in the inner cavities of the filter channel 1 on both sides of the filter mechanism 3, so the air pressure is transmitted to the inner cavity of the cylinder body 27 through the connecting hole 24, and the piston 25 moves under the action of the air pressure. Since there will be pressure loss during the filtering of the filter mechanism 3, the pressure on the air inlet side of the filter mechanism 3 is greater than the pressure on the air outlet side, so that the piston 25 on the air inlet side moves with a large amplitude, and the piston 25 on the air outlet side moves with a small amplitude, so that the piston rod 26 rotates. Moreover, the greater the blockage degree of the filter mechanism 3, the greater the gas pressure difference on both sides of the filter mechanism 3, the greater the position difference of the pistons 25 on both sides, the greater the rotation angle of the piston rod 26, and the greater the rebound energy.

[0039] The present device, through targeted setting of the telescopic component 23, can, on the one hand, make the filtering state and the reset state of the filtering mechanism 3 related to the air pressure in the inner cavity of the filtering channel 1, thereby reducing the drive and simplifying the control; on the other hand, it can also adaptively adjust the rebound energy storage size according to the pressure difference on both sides of the filtering mechanism 3, thereby achieving the function that the higher the blockage degree, the greater the rebound cleaning energy.

[0040] Even if the power source driven by the laser gas stops, the pressure in the inner cavity of the filter channel 1 continues to dissipate slowly, which makes the rebound of the lifting rod 5 slow, so the vibration energy is small and the cleaning effect is poor. Therefore, in order to solve the cleaning effect problem; Figure 6 , Figure 7 As shown, the outer wall of the rotating shaft 15 is provided with a plurality of teeth 28, the inner wall of the support plate 14 is slidably connected with a slider 30 via a slide groove 31, the top of the slider 30 is slidably connected with a ratchet 29 that cooperates with the teeth 28, and the ratchet 29 is connected to the slider 30 via a spring 34.

[0041] One of the opposite sides of the tooth 28 and the ratchet tooth 29 is an inclined surface, and the other side is a flat surface.

[0042] A spring 2 32 is buckled on the bottom outer wall of the slider 30 , and the other side of the spring 2 32 is buckled on the inner wall of the support plate 14 . A retractor 33 is fixed to the inner wall of the support plate 14 by bolts, and the retractable end of the retractor 33 is fixed to the bottom outer wall of the slider 30 by bolts.

[0043] The telescopic device 33 is a pneumatic telescopic rod, and the rodless cavity of the telescopic device 33 is connected to the inner cavity of the filtering channel 1 .

[0044] When in the filtering state, there is air pressure in the inner cavity of the filter channel 1 which is transmitted to the retractor 33, so that the retractor 33 drives the slider 30 to overcome the pulling force of the spring 2 32 and move upward, so that the ratchet 29 is engaged with the tooth 28, and at this time, when the shaft 15 drives the reel 16 to rotate to reel in the twisted rope 17, the tooth 28 in this rotation direction cooperates with the inclined surface of the ratchet 29, so that the ratchet 29 allows the tooth 28 to rotate. When the filtration is finished and the machine is stopped, the pressure in the inner cavity of the filter channel 1 has not completely dissipated, and the shaft 15 has a rotational force, so that the tooth 28 contacts the plane of the ratchet 29 and generates contact pressure and friction. At this time, the shaft 15 does not rotate in the opposite direction until the pressure in the inner cavity of the filter channel 1 is completely dissipated, and the spring 2 32 overcomes the friction and pulls the slider 30 downward, so that the tooth 28 is separated from the ratchet 29, and the shaft 15 rebounds quickly.

[0045] This device, by providing teeth 28 and ratchets 29, combined with the pneumatic design of the retractor 33, can, on the one hand, enable the rotating shaft 15 to rebound quickly only and only when the air pressure in the inner cavity of the filter channel 1 dissipates, thereby increasing the rebound speed and thus increasing the vibration cleaning effect; on the other hand, the engagement and separation of the teeth 28 and the ratchets 29 rely on the automatic control of the air pressure in the inner cavity of the filter channel 1, saving power layout and control logic settings, thereby saving costs.

[0046] When the present embodiment is in use, gas enters from one side of the filter channel 1, is filtered by the filter element 8 and then discharged. During the filtering process, the self-driven lifting assembly 6 will pull the lifting rod 5 upward, thereby pulling the sliding piece 11 upward. Due to the elastic effect of the arc-shaped spring piece 9, the curvature of the arc-shaped spring piece 9 is small, and the filter element 8 is not limited. After the filtering is completed, the self-driven lifting assembly 6 quickly moves the lifting rod 5 downward, thereby moving the sliding piece 11 downward, and the arc-shaped spring piece 9 is squeezed, and the curvature increases, thereby causing the middle part of the filter element 8 to bulge toward the air inlet side, so that the filter element 8 is in an open state. At the same time, the self-driven lifting assembly 6 will also apply vibration to the lifting rod 5, so that the opened filter element 8 is cleaned by vibration, and when in the filtering state, the two telescopic The different degrees of expansion and contraction of the component 23 make the rotating rod 21 drive the reel 16 to rotate, thereby pulling the sliding block 13 upward through the twisted rope 17, and the sliding block 13 contacts and limits with the top limiting boss 12, driving the lifting rod 5 to move upward. When the filtration is completed, the reel 16 loses drive, the filter channel 1 is released, the sliding block 13 moves downward, and the lifting rod 5 loses its limit, thereby combining the elastic force of the arc-shaped spring piece 9 to push the filter element 8 out and open. At the same time, the sliding block 13 is also moved downward by the elastic force of the spring 18, thereby hitting the limiting boss 12 at the bottom, causing the lifting rod 5 to vibrate. The lifting rod 5 transmits the vibration to the arc-shaped spring piece 9 through the sliding piece 11, and then to the filter element 8 for cleaning. At the same time, when it is in the filtering state, the filter channel 1 The inner cavities on both sides of the filter mechanism 3 have air pressure, so the air pressure is transmitted to the inner cavity of the cylinder body 27 through the connecting hole 24, and the piston 25 moves under the action of the air pressure. Since there will be pressure loss during the filtration of the filter mechanism 3, the pressure on the air inlet side of the filter mechanism 3 is greater than the pressure on the air outlet side, so that the piston 25 on the air inlet side moves with a large amplitude, and the piston 25 on the air outlet side moves with a small amplitude, so that the piston rod 26 rotates. In addition, when the degree of blockage of the filter mechanism 3 is greater, the gas pressure difference on both sides of the filter mechanism 3 is greater, the position difference of the pistons 25 on both sides is greater, the rotation angle of the piston rod 26 is greater, and the rebound energy is greater. Finally, when in the filtering state, the air pressure in the inner cavity of the filter channel 1 is transmitted to the telescope 33, so that the telescope 33 is brought The movable slider 30 overcomes the pulling force of the second spring 32 and moves upward, so that the ratchet 29 is engaged with the tooth 28, and at this time, when the rotating shaft 15 drives the reel 16 to rotate to reel in the twisted rope 17, the tooth 28 in this rotation direction cooperates with the inclined surface of the ratchet 29, so that the ratchet 29 allows the tooth 28 to rotate. When the filtration is stopped and the pressure in the inner cavity of the filter channel 1 is not completely dissipated, the rotating shaft 15 has a rotational force, so that the tooth 28 contacts the plane of the ratchet 29 and generates contact pressure and friction. At this time, the rotating shaft 15 will not rotate in the opposite direction until the pressure in the inner cavity of the filter channel 1 is completely dissipated. The second spring 32 overcomes the friction force and pulls the slider 30 downward, so that the tooth 28 is separated from the ratchet 29, and the rotating shaft 15 rebounds quickly.

[0047] Embodiment 2: A laser gas waste gas recovery device, such as Figure 1 , Figure 8 As shown, in order to solve the cooling problem; this embodiment makes the following improvements on the basis of embodiment 1: a cooling mechanism 4 is provided at the air inlet side end of the filter channel 1, and the cooling mechanism 4 includes a heat exchange tube 35, a heat exchanger 36 and a fluid pump 37. The heat exchange tube 35 is installed on the inner side of the filter channel 1, and both sides of the heat exchange tube 35 pass through the filter channel 1 and are fixed to the heat exchanger 36. The fluid pump 37 is connected between the heat exchange tube 35 and the heat exchanger 36, and heat exchange medium is provided in the heat exchange tube 35 and the heat exchanger 36.

[0048] In this embodiment, by providing a cooling mechanism 4, the fluid pump 37 can direct the flow of the heat exchange medium in the heat exchange tube 35 and the heat exchanger 36, thereby taking away the heat of the laser gas and cooling it, thereby preventing the high-temperature laser gas from damaging the filter mechanism 3 and increasing its service life.

[0049] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A laser gas waste gas recovery device, comprising a filter channel (1), characterized in that: At least one set of filtering mechanisms (3) is arranged on the inner side of the filtering channel (1), and a self-driven lifting portion (2) is arranged on the outer wall of the filtering channel (1) above the filtering mechanism (3); The self-driven lifting part (2) comprises a fixing frame (7), a filter element (8) and a plurality of arc-shaped spring pieces (9) located downstream of the gas flow direction, the fixing frame (7) is fixed to the inner wall of the filter channel (1), the periphery of the filter element (8) is fixed to the inner wall of the fixing frame (7), the bottoms of the plurality of arc-shaped spring pieces (9) are fixed to the inner side wall of the bottom of the fixing frame (7) via a fixing sheet (10), and the tops of the plurality of arc-shaped spring pieces (9) are fixed with a same sliding sheet (11); The self-driven lifting part (2) comprises a lifting rod (5) and a self-driven lifting assembly (6) for driving the lifting rod (5) to move up and down, the lifting rod (5) being slidably connected to the filter channel (1) and the inner wall of the fixing frame (7), and the bottom end of the lifting rod (5) is fixed to the top outer wall of the sliding sheet (11).

2. The laser gas waste gas recovery device according to claim 1, characterized in that: The self-driven lifting assembly (6) comprises a sliding block (13), a drum (16) and a limiting shell (19); a rotating shaft (15) is fixed to the inner wall of the drum (16); the rotating shaft (15) is rotatably connected to the top of the filter channel (1) through a support plate (14); the limiting shell (19) is fixed to the top outer wall of the filter channel (1) through bolts; the sliding block (13) is slidably connected to the inner wall of the limiting shell (19); the lifting rod (5) passes through the inner wall of the sliding block (13); and limiting bosses (12) are fixed to the outer walls of the top and bottom of the sliding block (13) where the lifting rod (5) is located; and the spacing between the two limiting bosses (12) is greater than the thickness of the sliding block (13).

3. The laser gas waste gas recovery device according to claim 2, characterized in that: The top of the sliding block (13) is buckled with a spring 1 (18), the other end of the spring 1 (18) is buckled with the top lower surface of the limiting shell (19), the outer wall of the winding drum (16) is wound with a twisted rope (17), the other end of the twisted rope (17) is fixed to the top of the sliding block (13).

4. The laser gas waste gas recovery device according to claim 3, characterized in that: A rotating rod (21) is fixed to one side of the reel (16), waist-shaped holes (22) are provided on the inner walls of both sides of the rotating rod (21), the inner walls of the waist-shaped holes (22) are movably limited to cooperate with the limiting posts (20), and a telescopic component (23) arranged on the outer wall of the top of the filtering channel (1) is fixed to one end of the limiting post (20).

5. The laser gas waste gas recovery device according to claim 2, characterized in that: The sliding block (13) is a hollow structure, and a plurality of elastic balls are accommodated in the hollow portion of the sliding block (13).

6. The laser gas waste gas recovery device according to claim 4, characterized in that: The telescopic assembly (23) comprises a piston (25), a piston rod (26) and a cylinder body (27); the cylinder body (27) is fixed to the top outer wall of the filter channel (1); the piston (25) is slidably connected to the inner wall of the cylinder body (27); the inner wall of the filter channel (1) is provided with a connecting hole (24) for connecting the filter channel (1) and the inner cavity of the cylinder body (27); and the two connecting holes (24) in the same group are respectively located on two sides of the filter mechanism (3).

7. The laser gas waste gas recovery device according to claim 2, characterized in that: The outer wall of the rotating shaft (15) is provided with a plurality of teeth (28); the inner wall of the support plate (14) is slidably connected to a slider (30) via a slide groove (31); a ratchet (29) cooperating with the teeth (28) is slidably connected to the top of the slider (30); the ratchet (29) is connected to the slider (30) via a spring three (34); one of the opposite sides of the teeth (28) and the ratchet (29) is an inclined surface, and the other side is a plane.

8. The laser gas waste gas recovery device according to claim 7, characterized in that: A second spring (32) is buckled on the bottom outer wall of the slider (30), the other side of the second spring (32) is buckled on the inner wall of the support plate (14), a telescopic device (33) is fixed to the inner wall of the support plate (14) by bolts, and the telescopic end of the telescopic device (33) is fixed to the bottom outer wall of the slider (30) by bolts.

9. The laser gas waste gas recovery device according to claim 8, characterized in that: The telescopic device (33) is a pneumatic telescopic rod, and the rodless cavity of the telescopic device (33) is connected to the inner cavity of the filtering channel (1).

10. The laser gas waste gas recovery device according to claim 1, characterized in that: A cooling mechanism (4) is provided at the air inlet side end of the filter channel (1), the cooling mechanism (4) comprising a heat exchange tube (35), a heat exchanger (36) and a fluid pump (37); the heat exchange tube (35) is installed on the inner side of the filter channel (1), and both sides of the heat exchange tube (35) penetrate the filter channel (1) and are fixed to the heat exchanger (36); the fluid pump (37) is connected between the heat exchange tube (35) and the heat exchanger (36); and heat exchange medium is provided in the heat exchange tube (35) and the heat exchanger (36).

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