Three-dimensional AOI (Automatic Optic Inspection) equipment for tiny feature structures

Abstract

The invention discloses three-dimensional AOI detection equipment for a tiny feature structure, and relates to the technical field of product detection. The device comprises a base used for supporting the whole detection equipment; the assembled mobile platform comprises an X-axis linear guide rail, a Y-axis linear guide rail adaptively mounted on the upper portion of the X-axis linear guide rail, an adsorption assembly fixed to the upper portion of the Y-axis linear guide rail, and a Z-axis linear guide rail located above the adsorption assembly. A mounting frame is transversely fixed in the hood; the light source module comprises a wavelength-adjustable light source body and a driving motor for adjusting the angle of the light source body; the image recognition camera is provided with a magnifying lens group; and the control unit comprises a master controller and a plurality of slave controllers. According to the invention, the light source module with adjustable wavelength is arranged to adapt to different samples and detection requirements, and the image recognition camera with a plurality of magnification lens groups is arranged to improve the resolution and sensitivity of detection.

Description

Technical Field

[0001] The invention belongs to the technical field of product detection, and in particular relates to a three-dimensional AOI detection device for tiny characteristic structures. Background Art

[0002] With the development of modern industrial technology, especially the increasingly high requirements for product quality in the electronics, semiconductor, precision manufacturing and other industries, the detection of tiny surface features of products has become an important link. Traditional detection methods, such as manual visual inspection and contact measurement, have been unable to meet the needs of high-precision, high-efficiency and non-destructive detection.

[0003] It relies on the operator's experience and technical level, is easily affected by subjective factors, has unstable test results, and is inefficient, and cannot meet the needs of large-scale production; although contact measurement can provide higher measurement accuracy, it may cause damage to the sample being measured, especially for some very fragile or sensitive materials, this method is not applicable; early optical detection equipment can usually only provide two-dimensional images, which is difficult to fully reflect the three-dimensional characteristics of the sample, and the detection accuracy is limited, which cannot meet the requirements of high-precision detection.

[0004] To this end, we provide three-dimensional AOI inspection equipment for tiny feature structures to solve the above problems. Summary of the invention

[0005] In order to solve the above technical problems, the present invention is achieved through the following technical solutions:

[0006] The present invention is a three-dimensional AOI detection device for small feature structures, comprising:

[0007] A base for supporting the entire detection equipment, wherein a shock-absorbing foot pad is provided at the bottom of the base;

[0008] An assembled mobile platform is mounted on the base, and includes an X-axis linear guide, a Y-axis linear guide adapted to be mounted on the upper part of the X-axis linear guide, an adsorption assembly fixed on the upper part of the Y-axis linear guide, and a Z-axis linear guide located above the adsorption assembly;

[0009] A hood is fixed to the upper part of the base, and a mounting frame is transversely fixed inside;

[0010] The light source module is symmetrically mounted on the side of the mounting frame, and includes a light source body with adjustable wavelength and a driving motor for adjusting the angle of the light source body;

[0011] An image recognition camera is adapted to be installed on the moving end of the Z-axis linear guide rail and is equipped with a magnifying glass group, wherein the magnifying glass group has a plurality of lenses with different magnifications built in;

[0012] A control unit includes a main controller and a plurality of slave controllers, wherein the slave controllers are electrically connected to the assembled mobile platform, the light source module and the image recognition camera.

[0013] The present invention is further configured such that the adsorption component includes a suction cup fixed to the moving end of the Y-axis linear guide rail, a plurality of tiny suction holes are evenly distributed on the concave surface of the suction cup, and the suction cup is equipped with a vacuum suction pump.

[0014] The present invention is further configured such that the hood includes a frame and a machine plate embedded and installed between the frames, a machine top is installed on the top of the hood, and heat dissipation grooves are arranged around the machine top.

[0015] The present invention is further configured such that the machine panel located at the front is provided with a machine door, a display module is embedded and installed on the upper part of the machine door, and a control panel is provided on the lower part of the machine door.

[0016] The present invention is further configured such that the display module is connected to a data processing module, wherein the data processing module includes an image processor and a data analyzer, and the data processing module is fixed to the upper part of the base via a vertical plate.

[0017] The present invention is further configured such that the data analyzer is connected to a display screen in a display module, the image processor is connected to an image recognition camera, and an output end of the image processor is connected to an input end of the data analyzer to form an image analysis system.

[0018] The present invention is further configured such that the display module is also connected to the control unit and the vacuum suction pump, and the control unit and the vacuum suction pump are connected to the control panel via internal wires.

[0019] The present invention is further configured such that the data processing module also includes a wireless communication module, and the wireless communication module establishes an interactive communication link with a remote monitoring terminal.

[0020] The present invention is further configured such that the data processing module also includes a storage module, and the storage module includes a local hard disk and a cloud storage interface.

[0021] The present invention is further configured such that the light source body includes an LED lamp and a laser, and a driving motor for adjusting the angle of the light source body is installed on the back of the mounting frame.

[0022] The present invention has the following beneficial effects:

[0023] 1. The present invention realizes the precise positioning of samples in three-dimensional space by setting up an assembled mobile platform with X, Y, and Z three-axis linear guide structures, ensures the accuracy of sample position during the detection process, improves detection efficiency and accuracy, and uses a vacuum suction pump to adsorb samples through tiny suction holes to ensure the stability of samples during the detection process and avoid detection errors caused by sample movement.

[0024] 2. The present invention can flexibly adjust the lighting conditions by setting a wavelength-adjustable light source module to adapt to different samples and detection requirements, thereby improving the flexibility and applicability of detection. The image recognition camera equipped with a lens group of various magnifications can capture subtle structural changes, thereby improving the resolution and sensitivity of detection.

[0025] 3. The present invention simplifies the operation process and improves the automation level of the system by setting a control unit responsible for the operation control of the entire equipment, including the coordination of components such as the mobile platform, the light source module and the image recognition camera. The data processing module of the integrated image processor and the data analyzer performs real-time processing and analysis of the collected data, supports remote monitoring, facilitates data storage and management, and improves detection efficiency and data security.

[0026] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0028] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0029] Figure 2 It is a front schematic diagram of the overall structure of the present invention.

[0030] Figure 3 It is a schematic diagram of the interior of the hood in the present invention.

[0031] Figure 4 It is a top view of the overall internal structure of the present invention.

[0032] Figure 5 It is a front view of the internal structure of the overall structure of the present invention.

[0033] Figure 6 It is a principle block diagram of the present invention.

[0034] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0035] 100, base; 101, shock-absorbing foot pad; 200, assembled mobile platform; 201, X-axis linear guide; 202, Y-axis linear guide; 203, adsorption assembly; 203a, suction cup; 203b, vacuum suction pump; 204, Z-axis linear guide; 300, machine cover; 301, mounting frame; 302, frame; 303, machine board; 304, machine door; 304a, display module; 304b, control panel; 400, light source module; 401 , light source body; 402, driving motor; 500, image recognition camera; 501, magnifying glass group; 600, control unit; 601, main controller; 602, slave controller; 700, top; 701, heat sink; 800, data processing module; 801, image processor; 802, data analyzer; 803, wireless communication module; 804, storage module; 804a, local hard disk; 804b, cloud storage interface; 900, vertical board. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] Example

[0038] See also Figure 1-6 The present invention is a three-dimensional AOI detection device for small feature structures, comprising:

[0039] A base 100 for supporting the entire detection device, wherein a shock-absorbing foot pad 101 is provided at the bottom of the base 100;

[0040] An assembled mobile platform 200 is mounted on the base 100, and includes an X-axis linear guide 201, a Y-axis linear guide 202 adapted to be mounted on the upper part of the X-axis linear guide 201, an adsorption assembly 203 fixed on the upper part of the Y-axis linear guide 202, and a Z-axis linear guide 204 located above the adsorption assembly 203, wherein the adsorption assembly 203 includes a suction cup 203a fixed on the moving end of the Y-axis linear guide 202, wherein a concave surface of the suction cup 203a is uniformly provided with a plurality of tiny suction holes, and the suction cup 203a is equipped with a vacuum suction pump 203b;

[0041] A cover 300 is fixed to the upper part of the base 100, and a mounting frame 301 is transversely fixed inside the cover 300. The cover 300 includes a frame 302 and a machine board 303 embedded and installed between the frames 302. A machine top 700 is installed on the top of the cover 300, and a heat dissipation slot 701 is arranged around the machine top 700. A machine door 304 is arranged on the machine board 303 at the front, and a display module 304a is embedded and installed on the upper part of the machine door 304, and a control panel 304b is arranged on the lower part of the machine door 304;

[0042] The light source module 400 is symmetrically mounted on the side of the mounting frame 301, and includes a light source body 401 with adjustable wavelength, and a driving motor 402 for adjusting the angle of the light source body 401. The light source body 401 includes an LED lamp and a laser. The driving motor 402 for adjusting the angle of the light source body 401 is mounted on the back of the mounting frame 301.

[0043] An image recognition camera 500 is adapted to be installed on the moving end of the Z-axis linear guide rail 204 and is equipped with a magnifying glass set 501, wherein the magnifying glass set 501 has a plurality of lenses with different magnifications built therein;

[0044] The control unit 600 includes a main controller 601 and a plurality of slave controllers 602 . The slave controllers 602 are electrically connected to the assembled mobile platform 200 , the light source module 400 , and the image recognition camera 500 .

[0045] Specifically, the display module 304a is connected to a data processing module 800, and the data processing module 800 includes an image processor 801 and a data analyzer 802. The data processing module 800 is fixed to the upper part of the base 100 via a vertical plate 900. The data analyzer 802 is connected to the display screen in the display module 304a. The image processor 801 is connected to an image recognition camera 500, and the output end of the image processor 801 is connected to the input end of the data analyzer 802 to form an image analysis system. The display module 304a is also connected to the control unit 600 and the vacuum suction pump 203b. The control unit 600 and the vacuum suction pump 203b are connected to the control panel 304b via internal wires.

[0046] Furthermore, the data processing module 800 also includes a wireless communication module 803, which establishes an interactive communication link with the remote monitoring terminal. The data processing module 800 also includes a storage module 804, which includes a local hard disk 804a and a cloud storage interface 804b.

[0047] This technical solution proposes a three-dimensional automatic optical inspection (AOI) device dedicated to tiny feature structures. Through precise mechanical structure, advanced light source adjustment technology, high-resolution image acquisition capability and powerful data processing function, it realizes efficient and accurate detection of tiny feature structures; among which:

[0048] The base 100 is the basic support part of the equipment, and a shock-absorbing foot pad 101 is provided at the bottom thereof, which can effectively reduce the influence of external vibration on the detection accuracy; the assembled mobile platform 200 adopts the X, Y, and Z three-axis linear guide structure to realize the precise positioning of the sample in three-dimensional space, and the adsorption component 203 uses a vacuum suction pump 203b to adsorb the sample through tiny suction holes to ensure the stability of the sample; the machine cover 300 provides a closed operating environment to reduce external interference, and ensures the normal operating temperature of the internal components through the heat dissipation slot 701 on the machine top 700, and the display module 304a and the control panel 304b on the machine door 304 are convenient for users to operate and monitor;

[0049] The light source module 400 uses a wavelength-adjustable light source body 401 in conjunction with a drive motor 402, which can flexibly adjust lighting conditions to adapt to different detection needs; the image recognition camera 500 is equipped with a magnifying glass group 501 with multiple magnifications, which can capture subtle structural changes; the control unit 600 is responsible for the operation control of the entire equipment, including the coordination of components such as the assembled mobile platform 200, the light source module 400 and the image recognition camera 500; the data processing module 800 integrates an image processor 801 and a data analyzer 802, performs real-time processing and analysis of the collected data, supports the wireless communication module 803 to achieve remote monitoring, and has a local hard disk 804a and a cloud storage interface 804b to facilitate data storage and management.

[0050] When the device is started, the control unit 600 first controls the assembled mobile platform 200 to move to the specified position according to the preset detection task, and adjusts the angle and wavelength of the light source module 400 to adapt to the sample characteristics; then, the image recognition camera 500 captures the image of the sample surface at a specified height, and obtains a clear microscopic image through the magnifying glass group 501. These images are then sent to the image processor 801 in the data processing module 800 for processing, such as denoising, contrast enhancement, etc., in order to improve the image quality. The processed images are then analyzed by the data analyzer 802, and possible defects or abnormalities are identified using a specific algorithm; finally, the analysis results are presented to the user through the display module 304a, and can be saved in the storage module 804 as needed; in addition, through the wireless communication module 803, the detection data can also be uploaded to the remote monitoring terminal in real time to achieve remote monitoring and management.

[0051] The specific steps for using the device are:

[0052] 1. Start-up preparation

[0053] Start the device and select the "preheating" mode through the control panel 304b to make the LED lamp and laser of the light source module 400 reach the best working state. The preheating time is usually 1-2 minutes.

[0054] 2. Sample loading

[0055] Carefully place the sample to be tested on the suction cup 203a of the adsorption component 203, ensure that the sample surface is flat without obvious tilt or warping, start the vacuum suction pump 203b through the control panel 304b, and the tiny suction holes on the suction cup 203a will quickly generate negative pressure to firmly adsorb the sample.

[0056] 3. Parameter settings

[0057] Select the appropriate wavelength and intensity of the light source on the control panel 304b. Different light source settings may be required for different types of samples to obtain the best detection effect; select the appropriate camera magnification and focal length, which can be set through the menu on the control panel 304b to ensure that the camera can capture the tiny features of the sample; define the detection area on the control panel 304b to ensure that the camera only focuses on the area of ​​interest during the detection process, thereby improving the detection efficiency and accuracy; if necessary, the system can be calibrated to ensure the positioning accuracy of the assembled mobile platform 200.

[0058] 4. Execute the test

[0059] Select the "Start Detection" option on the control panel 304b, the device will automatically perform detection according to the preset parameters and paths, the control unit 600 will control the assembled mobile platform 200 to adjust the position; the light source module 400 will adjust the wavelength and angle of the light source according to the preset parameters to ensure that the sample surface is evenly illuminated, the image recognition camera 500 will be moved to a suitable position through the Z-axis linear guide 204 to take a high-resolution image of the sample surface, and the magnifying glass group 501 equipped with the camera will help capture tiny features.

[0060] V. Results Analysis

[0061] The image processor 801 will pre-process the collected images, including denoising, contrast enhancement, edge detection, etc., to improve the image quality. The data analyzer 802 will use a specific algorithm to analyze the processed images to identify possible defects or anomalies, such as cracks, scratches, contaminants, etc. The analysis results will be presented to the user through the display screen on the display module 304a. The result display usually includes information such as the type, location, and size of the defect. The user can choose to generate a detailed inspection report, which will include all inspection results and related data.

[0062] 6. Data Management

[0063] After the test is completed, the user can choose to save the results to the local hard disk 804a or upload them to the cloud through the cloud storage interface 804b. The saved data includes the original image, the processed image, the analysis results and the test report. Through the wireless communication module 803, the test data can be transmitted to the remote monitoring terminal in real time. The remote monitoring terminal can be a computer, tablet or other terminal device, which is convenient for users to view and manage the test data at different locations, and regularly back up the stored data to ensure the security and integrity of the data. The automatic backup plan can be set through the control panel 304b.

[0064] 7. Shutdown

[0065] Select the "Close Vacuum" option on the control panel 304b to release the negative pressure on the suction cup 203a and remove the sample. After completing all operations, select the "Shutdown" option through the control panel 304b. The device will automatically shut down all components to ensure safety. Unplug the power plug to completely disconnect the power supply of the device.

[0066] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0067] The preferred embodiments of the present invention disclosed above are only used to help illustrate the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. Three-dimensional AOI inspection equipment for small feature structures, characterized in that: include: A base (100) for supporting the entire detection device, wherein a shock-absorbing foot pad (101) is provided at the bottom of the base (100); An assembled mobile platform (200) is mounted on the base (100), the assembled mobile platform (200) comprising an X-axis linear guide rail (201), a Y-axis linear guide rail (202) adapted to be mounted on the upper part of the X-axis linear guide rail (201), an adsorption assembly (203) fixed on the upper part of the Y-axis linear guide rail (202), and a Z-axis linear guide rail (204) located above the adsorption assembly (203); A hood (300) is fixed to the upper part of the base (100), and a mounting frame (301) is transversely fixed inside the hood; The light source module (400) is symmetrically mounted on a side of the mounting frame (301), and comprises a light source body (401) with adjustable wavelength, and a driving motor (402) for adjusting the angle of the light source body (401); An image recognition camera (500) adapted to be installed on the moving end of the Z-axis linear guide rail (204) and equipped with a magnifying glass group (501), wherein the magnifying glass group (501) has a plurality of lenses with different magnifications built therein; A control unit (600), the control unit (600) comprising a main controller (601) and a plurality of slave controllers (602), the slave controllers (602) being electrically connected to the assembled mobile platform (200), the light source module (400) and the image recognition camera (500).

2. The three-dimensional AOI detection device for micro-feature structures according to claim 1, characterized in that: The adsorption component (203) comprises a suction cup (203a) fixed to the moving end of the Y-axis linear guide rail (202), a plurality of tiny suction holes are evenly distributed on the concave surface of the suction cup (203a), and the suction cup (203a) is equipped with a vacuum suction pump (203b).

3. The three-dimensional AOI detection device for micro-feature structures according to claim 1, characterized in that: The cover (300) comprises a frame (302) and a machine plate (303) embedded and installed between the frames (302); a machine top (700) is installed on the top of the cover (300); and a heat dissipation groove (701) is arranged on the periphery of the machine top (700).

4. The three-dimensional AOI inspection device for micro-feature structures according to claim 3, characterized in that: The machine panel (303) located at the front is provided with a machine door (304), a display module (304a) is embedded and installed on the upper part of the machine door (304), and a control panel (304b) is provided on the lower part of the machine door (304).

5. The three-dimensional AOI inspection device for micro-feature structures according to claim 4, characterized in that: The display module (304a) is connected to a data processing module (800), wherein the data processing module (800) comprises an image processor (801) and a data analyzer (802), and the data processing module (800) is fixed to the upper part of the base (100) via a vertical plate (900).

6. The three-dimensional AOI inspection device for micro-feature structures according to claim 5, characterized in that: The data analyzer (802) is connected to the display screen in the display module (304a), the image processor (801) is connected to the image recognition camera (500), and the output end of the image processor (801) is connected to the input end of the data analyzer (802), forming an image analysis system.

7. The three-dimensional AOI inspection device for micro-feature structures according to claim 4, characterized in that: The display module (304a) is also connected to the control unit (600) and the vacuum suction pump (203b), and the control unit (600) and the vacuum suction pump (203b) are connected to the control panel (304b) via internal wires.

8. The three-dimensional AOI inspection device for micro-feature structures according to claim 5, characterized in that: The data processing module (800) further comprises a wireless communication module (803), and the wireless communication module (803) establishes an interactive communication link with a remote monitoring terminal.

9. The three-dimensional AOI inspection device for micro-feature structures according to claim 5, characterized in that: The data processing module (800) further includes a storage module (804), and the storage module (804) includes a local hard disk (804a) and a cloud storage interface (804b).

10. The three-dimensional AOI inspection device for micro-feature structures according to claim 1, characterized in that: The light source body (401) comprises an LED lamp and a laser, and a driving motor (402) for adjusting the angle of the light source body (401) is installed on the back of the mounting frame (301).

Images