Detection device and detection method

Abstract

The invention relates to the technical field of detection, and provides a detection device and a detection method.The detection device comprises a first light source, a first polarizer, a second polarizer, a third polarizer, a first detector assembly, a second detector assembly and a processor. The first light source is used for providing first light for a first surface of a to-be-detected object; the first polarizer is used for converting the first light into first polarized light, the first polarized light is transmitted by an object to be measured to form first transmission signal light, and the first polarized light is returned by the first surface to form first return light; the first return light forms first signal light through the second polarizer, and the first transmission signal light forms second signal light through the third polarizer; the first detection assembly is used for receiving first signal light; the second detection assembly is used for receiving second signal light; and the processor detects the to-be-detected object according to the first signal light and the second signal light. The embodiment of the invention at least can improve the practicability of the detection device.

Description

Technical Field

[0001] The present application relates to the field of detection technology, and in particular to a detection device and a detection method. Background Art

[0002] In the semiconductor manufacturing process, in order to ensure the quality of semiconductor devices, defect detection needs to be performed at each stage of the semiconductor process. Semiconductor materials often have multiple types of defects, and detection devices often require multiple detection modes to detect multiple types of defects.

[0003] In the related art, the detection mode of the detection device is single, for example, it only includes a single detection light source to detect a single type of defect, resulting in missed detection of defects in the object to be detected, making the detection device less practical. And because the detection mode of the detection device is single, the inspector needs to replace the detection device to complete defect detection under different light sources, which makes the efficiency of defect detection low, resulting in low practicality of the detection device. Therefore, the detection device in the related art has low practicality. Summary of the invention

[0004] The embodiment of the present application provides a detection device, which at least improves the practicability of the detection device.

[0005] According to some embodiments of the present application, on the one hand, the embodiments of the present application provide a detection device, which includes: a first light source, the first light source is used to provide a first light to the first surface of the object to be tested; a first polarizer, the first polarizer is used to convert the first light into a first polarized light, the first polarized light is transmitted through the object to be tested to form a first transmitted signal light, and the first polarized light is returned through the first surface to form a first return light; a second polarizer, the first return light passes through the second polarizer to form a first signal light, and the polarization direction of the second polarizer is not perpendicular to the polarization direction of the first polarizer; a third polarizer, the polarization direction of the third polarizer is perpendicular to the polarization direction of the first polarizer, and the first transmitted signal light passes through the third polarizer to form a second signal light; a first detection component, the first detection component is used to receive the first signal light; a second detection component, the second detection component is used to receive the second signal light; and a processor is used to detect the object to be tested based on the first signal light and the second signal light.

[0006] In some embodiments, the detection device also includes: a first rotating component, the first rotating component is connected to the second polarizer, the first rotating component is used to drive the second polarizer to rotate around a first rotation axis, the first rotation axis is not parallel to the polarization direction of the second polarizer, so that the angle between the polarization direction of the second polarizer and the polarization direction of the first polarizer is adjustable, or, the first rotating component is respectively connected to the first polarizer and the third polarizer, the first rotating component is used to drive the third polarizer to rotate around the second rotation axis, and at the same time drive the first polarizer to rotate synchronously around the second rotation axis, the second rotation axis is not parallel to the polarization direction of the first polarizer, so that the angle between the polarization direction of the second polarizer and the polarization direction of the first polarizer is adjustable; wherein, the first detection component is also used to generate a first image based on the first signal light, and the second detection component is also used to generate a second image based on the second signal light.

[0007] In some embodiments, the first light source is a coaxial light source, and the detection device further includes: a first beam splitter, the first beam splitter is used to reflect the first polarized light to the object to be measured, and transmit the first return light to the second polarizer, or the first beam splitter is used to transmit the first polarized light to the object to be measured, and reflect the first return light to the second polarizer; wherein the first polarizer is located on the optical path between the first beam splitter and the first light source, and the second polarizer is located on the optical path between the first beam splitter and the first detection component.

[0008] In some embodiments, the detection device also includes: a second light source, the second light source is used to provide a second light to the second surface of the object to be detected; a fourth polarizer, the fourth polarizer is used to convert the second light into the second polarized light, the second polarized light returns through the second surface to form a second return light, the second return light passes through the third polarizer to form a third signal light, the second polarized light is transmitted through the object to be detected to form a second transmitted signal light, the second transmitted signal light passes through the second polarizer to form a fourth signal light, the polarization direction of the fourth polarizer is perpendicular to the polarization direction of the second polarizer; the polarization direction of the fourth polarizer is not perpendicular to the polarization direction of the third polarizer; wherein the second detection component is also used to receive the third signal light and generate a third image based on the third signal light, and the first detection component is also used to receive the fourth signal light and generate a fourth image based on the fourth signal light.

[0009] In some embodiments, the detection device also includes: a second rotating component, the second rotating component is connected to the third polarizer, the second rotating component is used to drive the third polarizer to rotate around a third rotation axis, the third rotation axis is not parallel to the polarization direction of the third polarizer, so that the angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer is variable, or, the second rotating component is connected to the second polarizer and the fourth polarizer respectively, the second rotating component is used to drive the second polarizer to rotate around the fourth rotation axis, and at the same time drive the fourth polarizer to rotate synchronously around the fourth rotation axis, the fourth rotation axis is not parallel to the polarization direction of the second polarizer, so that the angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer is adjustable.

[0010] In some embodiments, the second light source is a coaxial light source, and the detection device further includes: a second beam splitter, the second beam splitter is used to reflect the second polarized light to the object to be tested, and to transmit the first transmitted signal light and the second return light to the third polarizer, or the second beam splitter is used to transmit the second polarized light to the object to be tested, and to reflect the first transmitted signal light and the second return light to the third polarizer; wherein the third polarizer is located on the optical path between the second beam splitter and the second detection component, and the fourth polarizer is located on the optical path between the second beam splitter and the second light source.

[0011] In some embodiments, the detection device also includes a dark field light source component, and the dark field light source component includes at least one of a first dark field light source and a second dark field light source: the first dark field light source is used to provide a first dark field light to the object to be tested, and the first dark field light is scattered by the first surface of the object to be tested to form a first dark field signal light; the second dark field light source is used to provide a second dark field light to the object to be tested, and the second dark field light is scattered by the second surface of the object to be tested to form a second dark field signal light; the first detection component is used to receive the first dark field signal light and generate a first dark field image based on the first dark field signal light; the second detection component is used to receive the second dark field signal light and generate a second dark field image based on the second dark field signal light.

[0012] In some embodiments, the first dark field light source is a bar light source, and / or the second dark field light source is a bar light source; the detection device further includes: a rotating table, which is used to drive the object to be detected and the dark field light source assembly to rotate relative to each other.

[0013] In some embodiments, the first detection assembly includes a plurality of first detectors, and the plurality of first detectors are arranged in a strip shape in the field of view of the first surface, and the fields of view of adjacent first detectors are partially overlapped or staggered; the second detection assembly includes a plurality of second detectors, and the plurality of second detectors are arranged in a strip shape in the field of view of the second surface, and the fields of view of adjacent second detectors are partially overlapped or staggered; the first dark field light source is a strip light source, and the first dark field light source is arranged parallel to the arrangement direction of the field of view of the first detector; the second dark field light source is a strip light source, and the second dark field light source is arranged parallel to the arrangement direction of the field of view of the second detector.

[0014] In some embodiments, the first polarized light is reflected by the first surface to form the first return light, and the angle between the incident direction of the first polarized light and the first surface is an acute angle, or the first polarized light is scattered by the first surface to form the first return light; the second polarized light is reflected by the second surface to form the second return light, and the angle between the incident direction of the second polarized light and the second surface is an acute angle, or the second polarized light is scattered by the second surface to form the second return light.

[0015] In some embodiments, the first surface is conjugate with the photosensitive surface of the first detection component, and the second surface is conjugate with the photosensitive surface of the second detection component.

[0016] According to some embodiments of the present application, on the other hand, the embodiments of the present application provide a detection method based on the detection device described in the above embodiments, the detection method includes detection processing, and the detection processing includes: providing first light to the first surface of the object to be detected by a first light source; a first polarizer converts the first light into a first polarized light, the first polarized light is transmitted through the object to be detected to form a first transmitted signal light, and the first polarized light is returned through the first surface to form a first return light; a second polarizer makes the first return light form a first signal light, and the polarization direction of the second polarizer is not perpendicular to the polarization direction of the first polarizer; the polarization direction of the third polarizer is perpendicular to the polarization direction of the first polarizer, and the first transmitted signal light forms a second signal light through the third polarizer; the first signal light is received by a first detection component; the second signal light is received by a second detection component; the object to be detected is detected according to the first signal light, and the signal light includes one or more combinations of the first signal light and the second signal light.

[0017] In some embodiments, before detecting the object to be detected according to the signal light, the detection process further includes: adjusting the angle between the polarization direction of the second polarizer and the polarization direction of the first polarizer to adjust the intensity of the first signal light.

[0018] In some embodiments, if the detection device also includes: a second light source, the second light source is used to provide a second light to the second surface of the object to be detected; a fourth polarizer, the fourth polarizer converts the second light into a second polarized light, the second polarized light returns through the second surface to form a second return light, the second return light passes through the third polarizer to form a third signal light, the second polarized light is transmitted through the object to be detected to form a second transmitted signal light, the second transmitted signal light passes through the second polarizer to form a fourth signal light, the polarization direction of the fourth polarizer is perpendicular to the polarization direction of the second polarizer; the polarization direction of the fourth polarizer is not perpendicular to the polarization direction of the third polarizer; the detection process also includes: detecting the object to be detected according to the third signal light and the fourth signal light; before detecting the object to be detected according to the third signal light and the fourth signal light, the detection process also includes: adjusting the angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer to adjust the intensity of the second signal light.

[0019] In some embodiments, if the detection device also includes: a first rotating component, the first rotating component is connected to the second polarizer, or the first rotating component is respectively connected to the first polarizer and the third polarizer; adjusting the angle between the polarization direction of the second polarizer and the polarization direction of the first polarizer includes: controlling the first rotating component to drive the second polarizer to rotate around the first rotation axis, the first rotation axis is not parallel to the polarization direction of the second polarizer, or, driving the third polarizer to rotate around the second rotation axis by controlling the first rotating component, and at the same time driving the first polarizer to rotate synchronously around the second rotation axis to ensure that the polarization direction of the first polarizer is perpendicular to the polarization direction of the third polarizer, and the second rotation axis is not parallel to the polarization direction of the first polarizer. line; and / or, if the detection device also includes a second rotating component, the second rotating component is connected to the third polarizer, or the second rotating component is respectively connected to the second polarizer and the fourth polarizer; adjusting the angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer, including: controlling the second rotating component to drive the third polarizer to rotate around a third rotation axis, the third rotation axis is not parallel to the polarization direction of the third polarizer, or controlling the second rotating component to drive the second polarizer to rotate around a fourth rotation axis, and at the same time drive the fourth polarizer to rotate synchronously around the fourth rotation axis to ensure that the polarization direction of the second polarizer is perpendicular to the polarization direction of the fourth polarizer, and the fourth rotation axis is not parallel to the polarization direction of the second polarizer.

[0020] In some embodiments, the object to be tested is detected according to the signal light, including: respectively acquiring detection images according to different signal lights received by the first detection component and the second detection component; and detecting and classifying the target to be tested according to each of the detection images, the detection target including defects.

[0021] In some embodiments, the detection device includes: a dark field light source assembly, the dark field light source assembly includes at least one of a first dark field light source and a second dark field light source; the first dark field light source is used to provide a first dark field light to the object to be tested, the first dark field light is scattered by the first surface of the object to be tested to form a first dark field signal light, the second dark field light source is used to provide a second dark field light to the object to be tested, the second dark field light is scattered by the second surface of the object to be tested to form a second dark field signal light; the detection process also includes: receiving the first dark field signal light by the first detection assembly, receiving the second dark field signal light by the second detection assembly, the signal light also includes one or a combination of the first dark field signal light and the second dark field signal light.

[0022] In some embodiments, the detection method also includes: controlling the dark field light source assembly to perform the detection processing on the object to be detected multiple times, and rotating the object to be detected relative to the dark field light source assembly by a preset angle between adjacent detection processings, and the dark field light source assembly includes one or a combination of the first dark field light source and the second dark field light source; the first dark field light source is a bar light source, and / or the second dark field light source is a bar light source.

[0023] In some embodiments, detecting the object to be tested according to the signal light includes: controlling each light source to flash in sequence, and controlling the first detection component and the second detection component to simultaneously collect the signal light image at a preset frequency; the preset frequency is greater than or equal to the flashing frequency of each light source, and each light source includes one or a combination of the first light source and the dark field light source component.

[0024] In some embodiments, controlling each light source to flash in sequence includes: controlling the first dark field light source and the second dark field light source to flash simultaneously, and controlling the first detection component and the second detection component to collect the signal light simultaneously at the preset frequency; the preset frequency is greater than or equal to the flashing frequency of the first dark field light source and the second dark field light source.

[0025] The technical solution provided by the embodiments of the present application has at least the following advantages: In the technical solution of the detection device provided in the embodiment of the present application, the detection device includes a first light source, which is used to provide a first light to a first surface of the object to be detected; a first polarizer, which is used to convert the first light into a first polarized light, the first polarized light is transmitted through the object to be detected to form a first transmitted signal light, and the first polarized light is returned through the first surface to form a first return light; a second polarizer, the first return light passes through the second polarizer to form a first signal light, and the polarization direction of the second polarizer is not perpendicular to the polarization direction of the first polarizer; a third polarizer, the polarization direction of the third polarizer is perpendicular to the polarization direction of the first polarizer, and the first transmitted signal light passes through the third polarizer to form a second signal light; a first detection component, which is used to receive the first signal light; a second detection component, which is used to receive the second signal light; and a processor, which is used to detect the object to be detected according to the first signal light and the second signal light.

[0026] In the detection device provided in the embodiment of the present application, the first light emitted by the first light source can pass through the first polarizer, the object to be tested, and the second polarizer in sequence to form a first signal light. The first light emitted by the first light source can also pass through the first polarizer, the object to be tested, and the third polarizer in sequence to form a second signal light. The processor can detect the object to be tested based on the first signal light and the second signal light. That is, using this detection device, two types of defect detection can be completed by using one light source, which can avoid missing defect types and improve detection efficiency while improving the practicality of the detection device.

[0027] In addition, the detection device of the embodiment of the present application can complete two types of defect detection, so that the inspector can complete the defect detection of the object to be tested under different types of light without changing the detection device, thereby improving the detection efficiency and the practicality of the detection device. In addition, by comparing the manifestations of the defects of the object to be tested detected by different signal lights, more accurate defect classification can be achieved, which is conducive to improving the practicality of the detection device. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] One or more embodiments are exemplarily illustrated by the pictures in the corresponding drawings. These exemplified descriptions do not constitute a limitation on the embodiments. Unless otherwise specified, the pictures in the drawings do not constitute a scale limitation. In order to more clearly illustrate the embodiments of the present application or the technical solutions in the traditional technology, the drawings required for use in the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 A schematic diagram of a structure of a detection device for detecting an object to be detected provided in the first embodiment of the present application; Figure 2for Figure 1 a top view of the field of view of a first detector in a first detection assembly and a first dark field light source; Figure 3 for Figure 1 A bottom view of the field of view of a first detector in the first detection assembly and a second dark field light source; Figure 4 for Figure 1 a top view of the field of view of a second detector in the second detection assembly and a first dark field light source; Figure 5 for Figure 1 a bottom view of the field of view of a second detector in the second detection assembly and a second dark field light source; Figure 6 A schematic diagram of a structure of a detection device for detecting an object to be detected provided in the second embodiment of the present application; Figure 7 A schematic diagram of a structure of a detection device for detecting an object to be detected provided in the third embodiment of the present application; Figure 8 A schematic diagram of a structure of a detection device for detecting an object to be detected provided in the fourth embodiment of the present application; Fig. 9 A schematic diagram of a structure of a detection device for detecting an object to be detected provided in the fifth embodiment of the present application; Fig.10 A flowchart of the first detection method provided in the embodiment of the present application; Fig.11 A flowchart of the second detection method provided in an embodiment of the present application. DETAILED DESCRIPTION

[0030] It can be seen from the background technology that the practicability of the detection device in the related technology needs to be improved.

[0031] The embodiment of the present application provides a detection device, in which the first light emitted by the first light source can pass through the first polarizer, the object to be tested, and the second polarizer in sequence to form a first signal light, and the first light emitted by the first light source can also pass through the first polarizer, the object to be tested, and the third polarizer in sequence to form a second signal light. The processor can detect the object to be tested based on the first signal light and the second signal light, that is, the use of this detection device can complete two types of defect detection through one light source, which can avoid missing the type of defects and improve the detection efficiency, thereby improving the practicality of the detection device. In addition, the detection device of the embodiment of the present application can complete two types of defect detection, so that the detector can complete the defect detection of the object to be tested under different types of light without changing the detection device, thereby improving the detection efficiency and the practicality of the detection device. In addition, by comparing the manifestations of the defects of the object to be tested detected by different signal lights, more accurate defect classification can be achieved, which is conducive to improving the practicality of the detection device.

[0032] The following will describe the various embodiments of the present application in detail with reference to the accompanying drawings. However, it will be appreciated by those skilled in the art that in the various embodiments of the present application, many technical details are provided in order to enable the reader to better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solution claimed in the present application can be implemented.

[0033] Figure 1 A schematic diagram of the structure of a detection device for detecting an object to be detected provided in the first embodiment of the present application.

[0034] refer to Figure 1 The detection device includes a first light source 100, a first polarizer 101, a second polarizer 102, a third polarizer 103, a first detection component 104, a second detection component 105 and a processor (not shown), wherein the first light source 100 is used to provide a first light to the first surface 12 of the object to be detected 11; the first polarizer 101 is used to convert the first light into a first polarized light, the first polarized light is transmitted through the object to be detected 11 to form a first transmitted signal light, and the first polarized light is returned through the first surface 12 to form a first returned light; the first returned light passes through the second polarizer 102 to form a first signal light, and the polarization direction of the second polarizer 102 is not perpendicular to the polarization direction of the first polarizer 101; the polarization direction of the third polarizer 103 is perpendicular to the polarization direction of the first polarizer 101, and the first transmitted signal light passes through the third polarizer 103 to form a second signal light; the first detection component 104 is used to receive the first signal light; the second detection component 105 is used to receive the second signal light; and the processor is used to detect the object to be detected 11 according to the first signal light and the second signal light.

[0035] The detection device is used to detect the target to be detected of the object to be detected 11, and the target to be detected includes defects.

[0036] The material of the object to be tested 11 is a uniaxial crystal or a multiaxial crystal. Uniaxial crystals and biaxial crystals are two types of anisotropic materials. Due to their anisotropic properties, uniaxial crystals and biaxial crystals will show polarization effects when light passes through them. The detection device provides the first polarized light to the object to be tested 11, and can detect defects with polarization effects in the object to be tested 11 under polarized light. In other embodiments of the present application, the object to be tested 11 can also be a non-crystalline material.

[0037] Specifically, in this embodiment, the object to be tested 11 is a silicon carbide substrate. In other embodiments of the present application, the object to be tested 11 can be a transparent substrate such as a glass substrate, a plastic substrate, or a transparent wafer such as a sapphire wafer or a diamond wafer.

[0038] The object to be tested 11 has a first surface 12 and a second surface 13 relative to each other, the first surface 12 is conjugate with the photosensitive surface of the first detection component 104, and the second surface 13 is conjugate with the photosensitive surface of the second detection component 105. Such an arrangement is conducive to the first detection component 104 to better receive the signal light emitted by the object to be tested 11 and generate a clearer image, and is conducive to the second detection component 105 to better receive the signal light emitted by the object to be tested 11 and generate a clearer image, which is conducive to improving the practicality of the detection device.

[0039] The first light source 100 is used to provide the first light. In this embodiment, the first light source 100 is a coaxial light source. In other embodiments of the present application, the first light source 100 can be a dark field light source.

[0040] The first polarizer 101 is used to convert the first light into first polarized light.

[0041] The first polarized light is transmitted through the object to be measured 11 to form a first transmission signal light, and the first polarized light is returned through the first surface 12 to form a first return light. In this embodiment, the first polarized light is reflected through the first surface 12 to form the first return light, and the incident direction of the first polarized light is perpendicular to the first surface 12. In other embodiments of the present application, the first polarized light can be scattered through the first surface 12 to form the first return light, or the first polarized light is reflected to form the first return light, but the incident direction of the first polarized light is an acute angle with the first surface 12.

[0042] The polarization direction of the second polarizer 102 is not perpendicular to the polarization direction of the first polarizer 101 , and the first return light is transformed into the first signal light through the second polarizer 102 .

[0043] The polarization direction of the third polarizer 103 is perpendicular to the polarization direction of the first polarizer 101 , and the first transmitted signal light is transformed into the second signal light through the third polarizer 103 .

[0044] The first detection component 104 receives the first signal light and generates a first image according to the first signal light, and the second detection component 105 receives the second signal light and generates a second image according to the second signal light.

[0045] In this embodiment, the detection device further includes a first beam splitter 106, which is a semi-transparent and semi-reflective mirror, and the first beam splitter 106 reflects the first polarized light to the object to be detected 11, and transmits the first return light to the second polarizer 102. The first polarizer 101 is located on the optical path between the first beam splitter 106 and the first light source 100, and the second polarizer 102 is located on the optical path between the first beam splitter 106 and the first detection component 104.

[0046] The detection device also includes a first rotating component (not shown), which is connected to the second polarizer 102. The first rotating component is used to drive the second polarizer 102 to rotate around a first rotating axis. The first rotating axis is not parallel to the polarization direction of the second polarizer 102, so that the angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101 is adjustable, or the first rotating component is connected to the first polarizer 101 and the third polarizer 103 respectively. The first rotating component is used to drive the third polarizer 103 to rotate around the second rotating axis, and at the same time drive the first polarizer 101 to rotate synchronously around the second rotating axis. The second rotating axis is not parallel to the polarization direction of the first polarizer 101, so that the angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101 is adjustable.

[0047] In other words, the first rotating component is used to adjust the angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101. According to Malus's law, the intensity of the first signal light received by the first detection component 104 is related to the angle between the polarization direction of the first polarizer 101 and the polarization direction of the second polarizer 102 in the optical path of the first light source 100 and the first detection component 104. Therefore, by adjusting the angle between the polarization direction of the first polarizer 101 and the polarization direction of the second polarizer 102, while ensuring that the first signal light has sufficient intensity, overexposure of the first detection component 104 caused by excessive intensity of the first signal light can be avoided, thereby improving the reliability of the detection device.

[0048] The first rotating assembly drives the first polarizer 101 and the third polarizer 103 to rotate synchronously in order to ensure that the polarization direction of the first polarizer 101 and the polarization direction of the third polarizer 103 are always perpendicular during the detection process.

[0049] The detection device also includes a dark field light source assembly, which includes a first dark field light source 117 and a second dark field light source 127. The first dark field light source 117 is used to provide a first dark field light to the object to be tested 11, and the first dark field light is scattered by the first surface 12 of the object to be tested 11 to form a first dark field signal light. The second dark field light source 127 is used to provide a second dark field light to the object to be tested 11, and the second dark field light is scattered by the second surface 13 of the object to be tested 11 to form a second dark field signal light. The first detection assembly 104 is used to receive the first dark field signal light and generate a first dark field image according to the first dark field signal light; the second detection assembly 105 is used to receive the second dark field signal light and generate a second dark field image according to the second dark field signal light. The first beam splitter 106 is also used to transmit the first dark field signal light to the first detection assembly 104.

[0050] In other embodiments of the present application, the dark field light source assembly may also include only one of the first dark field light source 117 and the second dark field light source 127 , or the detection device may not include the first dark field light source 117 and the second dark field light source 127 .

[0051] In this embodiment, the first dark field light is scattered and transmitted by the object to be detected 11 to form a third dark field signal light. The second detection component 105 is also used to receive the third dark field signal light and generate a third dark field image according to the third dark field signal light.

[0052] It should be noted that when there are defects inside the object to be tested 11, the first dark field light will be scattered inside the object to be tested 11, and the scattered light will be transmitted to form the third dark field signal light. Therefore, in this embodiment, the first dark field light is transmitted through the object to be tested 11 to form the third dark field signal light, which is used to detect defects inside the object to be tested 11 to improve the practicality of the detection device. When there are no defects inside the object to be tested 11, the first dark field light will not form the third dark field signal light through the object to be tested 11. Therefore, in other embodiments of the present application, the first dark field light may not form the third dark field signal light after being scattered and transmitted through the object to be tested 11.

[0053] In this embodiment, the second dark field light is scattered and transmitted by the object to be detected 11 to form a fourth dark field signal light. The first detection component 104 is further used to receive the fourth dark field signal light and generate a fourth dark field image according to the fourth dark field signal light.

[0054] It should be noted that when there are defects inside the object to be tested 11, the second dark field light will be scattered inside the object to be tested 11, and the scattered light will be transmitted to form the fourth dark field signal light. Therefore, in this embodiment, the second dark field light is transmitted through the object to be tested 11 to form the fourth dark field signal light, which is used to detect defects inside the object to be tested 11 to improve the practicality of the detection device. When there are no defects inside the object to be tested 11, the second dark field light will not form the fourth dark field signal light through the object to be tested 11. Therefore, in other embodiments of the present application, the second dark field light may not form the fourth dark field signal light after being scattered and transmitted through the object to be tested 11.

[0055] The incident direction of the first dark field light source 117 and the optical axis direction of the first detection component 104 are asymmetric about the first surface 12. Specifically, there is a non-zero angle between the incident direction of the first dark field light source 117 and the optical axis direction of the first detection component 104, the optical axis of the first detection component 104 is perpendicular to the first surface 12, and there is an acute angle between the incident direction of the first dark field light source 117 and the normal of the first surface 12.

[0056] The incident direction of the second dark field light source 127 and the optical axis direction of the second detection assembly 105 are asymmetric about the second surface 13. Specifically, there is a non-zero angle between the incident direction of the second dark field light source 127 and the optical axis direction of the second detection assembly 105, the optical axis of the second detection assembly 105 is perpendicular to the second surface 13, and there is an acute angle between the incident direction of the second dark field light source 127 and the normal of the second surface 13.

[0057] In this embodiment, the first dark field light source 117 is a bar light source, and the second dark field light source 127 is a bar light source. In other embodiments of the present application, the first dark field light source 117 can also be a ring light source, a surface light source, or a bowl-shaped light source. The second dark field light source 127 can also be a ring light source, a surface light source, or a bowl-shaped light source.

[0058] The detection device also includes a rotating table (not shown), which is used to rotate the object to be detected 11 relative to the dark field light source assembly. The setting of the rotating table allows the detection device to capture corresponding images of the corresponding signal light under the first dark field light and the second dark field light at multiple angles, thereby improving the practicality of the detection device.

[0059] In this embodiment, the light beam emitted by the first dark field light source 117 is blue light; the light beam emitted by the second dark field light source 127 is blue light. The wavelength of blue light is shorter, and the scattering of short-wavelength light by defects is stronger, which is beneficial to the imaging of the first detection component 104 and the second detection component 105, thereby improving the practicality of the detection device. In addition, the wavelength of blue light is shorter, which is beneficial to the detection of defects such as small particles, and can improve the sensitivity of the detection device. In other embodiments of the present application, the light beam emitted by the first dark field light source 117 can be white light, and the light beam emitted by the second dark field light source 127 can also be white light.

[0060] Figure 2 for Figure 1 A top view of the field of view of the first detector in the first detection assembly and the first dark field light source, Figure 3 for Figure 1 A bottom view of the field of view of the first detector in the first detection assembly and the second dark field light source, Figure 4 for Figure 1 A top view of the field of view of the second detector in the second detection assembly and the first dark field light source, Figure 5 for Figure 1 The bottom view of the field of view of the second detector in the second detection assembly and the second dark field light source. It should be noted that, Figures 2 to 5 For the sake of convenience, only the fields of view 1041 of three first detectors and the fields of view 1051 of three second detectors are illustrated. In fact, the number of first detectors and second detectors can be other values ​​except 3, and the embodiment of the present application does not limit the number of first detectors and second detectors.

[0061] Combined with reference Figures 1 to 5 The first detection assembly 104 includes a plurality of first detectors, and the plurality of first detectors are arranged in a strip shape in the field of view 1041 of the first surface 12, and the fields of view 1041 of adjacent first detectors are partially overlapped or staggered; the second detection assembly 105 includes a plurality of second detectors, and the plurality of second detectors are arranged in a strip shape in the field of view 1051 of the second surface 13, and the fields of view 1051 of adjacent second detectors are partially overlapped or staggered; the first dark field light source 117 is a strip light source, and the first dark field light source 117 is arranged in parallel with the arrangement direction of the field of view 1041 of the first detector; the second dark field light source 127 is a strip light source, and the second dark field light source 127 is arranged in parallel with the arrangement direction of the field of view 1051 of the second detector. With such an arrangement, the first detection assembly 104 and the second detection assembly 105 have a larger field of view, thereby improving the practicality of the detection device.

[0062] The detection device further includes a first objective lens 108 and a second objective lens 109. The first objective lens 108 is located in the optical path between the first surface 12 and the first detection component 104, and is used to gather the signal light emitted by the object to be detected 11 to the first detection component 104. The second objective lens 109 is located in the optical path between the second surface 13 and the second detection component 105, and is used to gather the signal light emitted by the object to be detected 11 to the second detection component 105. Such an arrangement can make the imaging effect of the first detection component 104 and the second detection component 105 better, which is conducive to improving the practicality of the detection device.

[0063] In this embodiment, the processor is used to obtain detection images according to different signal lights received by the first detection component 104 and the second detection component 105, and detect and classify the target to be detected according to each detection image, and the target to be detected includes defects. The signal light includes a first signal light, a second signal light, a first dark field signal light, and a second dark field light. The detection image includes a first image, a second image, and a first dark field image and a second dark field image.

[0064] The second embodiment of the present application also provides a detection device, which is substantially the same as the detection device provided in the first embodiment. The main difference between the detection device and the detection device provided in the first embodiment is that the positions of the first detection component and the first light source in the detection device provided in the second embodiment are different from those in the first embodiment. The detection device will be described in detail below in conjunction with the accompanying drawings. It should be noted that the features that are the same or corresponding to the first embodiment will not be described in detail below to avoid redundancy. In the absence of contradiction, the corresponding description of the first embodiment is also applicable to the corresponding features of the second embodiment.

[0065] Figure 6 A schematic diagram of the structure of a detection device for detecting an object to be detected provided in the second embodiment of the present application.

[0066] refer to Figure 6 The detection device includes: a first light source 200, a first polarizer 201, a second polarizer 202, a third polarizer 203, a first detection component 204, a second detection component 205 and a processor (not shown), wherein the first light source 200 is used to provide a first light to the first surface 12 of the object to be detected 11; the first polarizer 201 is used to convert the first light into a first polarized light, the first polarized light is transmitted through the object to be detected 11 to form a first transmitted signal light, and the first polarized light is returned through the first surface 12 to form a first returned light; the first returned light passes through the second polarizer 202 to form a first signal light, and the polarization direction of the second polarizer 202 is not perpendicular to the polarization direction of the first polarizer 201; the polarization direction of the third polarizer 203 is perpendicular to the polarization direction of the first polarizer 201, and the first transmitted signal light passes through the third polarizer 203 to form a second signal light; the first detection component 204 is used to receive the first signal light; the second detection component 205 is used to receive the second signal light; and the processor is used to detect the object to be detected 11 according to the first signal light and the second signal light.

[0067] It should be noted that the dark field light source assembly, the first dark field light source 217, the second dark field light source 227, the first objective lens 208 and the second objective lens 209 in this embodiment can refer to the corresponding descriptions of the dark field light source assembly, the first dark field light source 117, the second dark field light source 127, the first objective lens 108 and the second objective lens 109 in the first embodiment, and will not be repeated here.

[0068] In this embodiment, the detection device further includes a first beam splitter 206 , which is used to transmit the first polarized light to the object to be detected 11 and reflect the first return light to the second polarizer 202 .

[0069] The first beam splitter 206 is further configured to reflect the first dark field signal light to the first detection assembly 204 .

[0070] The third embodiment of the present application also provides a detection device, which is substantially the same as the detection device provided in the first embodiment, and the main difference is that the detection device provided in the third embodiment further includes a second light source and a fourth polarizer. The detection device will be described in detail below in conjunction with the accompanying drawings. It should be noted that the features that are the same or corresponding to the first embodiment will not be described in detail below to avoid redundancy. In the absence of contradiction, the corresponding description of the first embodiment is also applicable to the corresponding features of the third embodiment.

[0071] Figure 7 A schematic diagram of the structure of a detection device for detecting an object to be detected provided in the third embodiment of the present application.

[0072] refer to Figure 7 The detection device includes a first light source 300, a first polarizer 301, a second polarizer 302, a third polarizer 303, a first detection component 304, a second detection component 305 and a processor (not shown), wherein the first light source 300 is used to provide a first light to the first surface 12 of the object to be detected 11; the first polarizer 301 is used to convert the first light into a first polarized light, the first polarized light is transmitted through the object to be detected 11 to form a first transmitted signal light, and the first polarized light is returned through the first surface 12 to form a first returned light; the first returned light passes through the second polarizer 302 to form a first signal light, and the polarization direction of the second polarizer 302 is not perpendicular to the polarization direction of the first polarizer 301; the polarization direction of the third polarizer 303 is perpendicular to the polarization direction of the first polarizer 301, and the first transmitted signal light passes through the third polarizer 303 to form a second signal light; the first detection component 304 is used to receive the first signal light; the second detection component 305 is used to receive the second signal light; and the processor is used to detect the object to be detected 11 according to the first signal light and the second signal light.

[0073] It should be noted that the first beam splitter 306, dark field light source assembly, first dark field light source 317, second dark field light source 327, first objective lens 308 and second objective lens 309 in this embodiment can refer to the corresponding description of the first beam splitter 106, dark field light source assembly, first dark field light source 117, second dark field light source 127, first objective lens 108 and second objective lens 109 in the first embodiment, and will not be repeated here.

[0074] The detection device also includes a second light source 310 and a fourth polarizer 311. The second light source 310 is used to provide a second light to the second surface 13 of the object to be detected 11; the fourth polarizer 311 is used to convert the second light into a second polarized light. The second polarized light returns through the second surface 13 to form a second return light. The second return light passes through the third polarizer 303 to form a third signal light. The second polarized light is transmitted through the object to be detected 11 to form a second transmitted signal light. The second transmitted signal light passes through the second polarizer to form a fourth signal light. The polarization direction of the fourth polarizer 311 is perpendicular to the polarization direction of the second polarizer 302. The polarization direction of the fourth polarizer 311 is not perpendicular to the polarization direction of the third polarizer 303. The second detection component is also used to receive the third signal light and generate a third image based on the third signal light. The first detection component is also used to receive the fourth signal light and generate a fourth image based on the fourth signal light.

[0075] In this embodiment, the second light source 310 is a coaxial light source. In other embodiments of the present application, the second light source 310 may be a dark field light source.

[0076] The second light source 310 is used to provide a second light. In this embodiment, the second light source 310 is a coaxial light source. In other embodiments of the present application, the second light source 310 can be a dark field light source.

[0077] The fourth polarizer 311 is used to convert the second light into the second polarized light. In this embodiment, the second polarized light is reflected by the second surface 13 to form the second return light, and the incident direction of the second polarized light is perpendicular to the second surface 13. In other embodiments of the present application, the second polarized light can be scattered by the second surface 13 to form the second return light, or the second polarized light is reflected to form the second return light, but the incident direction of the second polarized light is an acute angle with the second surface 13.

[0078] The detection device also includes a second rotating component (not shown), which is connected to the third polarizer 303. The second rotating component is used to drive the third polarizer 303 to rotate around a third rotating axis. The third rotating axis is not parallel to the polarization direction of the third polarizer 303, so that the angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311 is variable, or the second rotating component is connected to the second polarizer 302 and the fourth polarizer 311 respectively, and the second rotating component is used to drive the second polarizer 302 to rotate around the fourth rotating axis, and at the same time drive the fourth polarizer 311 to rotate synchronously around the fourth rotating axis. The fourth rotating axis is not parallel to the polarization direction of the second polarizer 302, so that the angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311 is adjustable.

[0079] In other words, the second rotating component is used to adjust the angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311. According to Malus's law, the intensity of the third signal light received by the second detection component 305 is related to the angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311 on the optical path of the second light source 310 and the second detection component. Therefore, by adjusting the angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311, while ensuring that the third signal light has sufficient light intensity, the overexposure phenomenon of the second detection component 305 caused by the excessive light intensity of the third signal light can be avoided, thereby improving the reliability of the detection device.

[0080] The second rotating assembly drives the second polarizer 302 and the fourth polarizer 311 to rotate synchronously to ensure that the polarization direction of the second polarizer 302 is always perpendicular to the polarization direction of the fourth polarizer 311 .

[0081] The detection device further includes a second beam splitter 312, which is a semi-transparent and semi-reflective mirror, and is used to reflect the second polarized light to the object to be detected 11, and to transmit the first transmission signal light and the second return light to the third polarizer 303. The third polarizer 303 is located on the optical path between the second beam splitter 312 and the second detection component, and the fourth polarizer 311 is located on the optical path between the second beam splitter 312 and the second light source 310.

[0082] The fourth embodiment of the present application also provides a detection device, which is substantially the same as the detection device provided in the third embodiment, and the main difference is that the positions of the second detection component and the second coaxial light source in the detection device provided in the fourth embodiment are different from those in the first embodiment. The detection device will be described in detail below in conjunction with the accompanying drawings. It should be noted that the features that are the same or corresponding to the third embodiment will not be described in detail below to avoid redundancy. In the absence of contradiction, the corresponding description of the third embodiment is also applicable to the corresponding features of the fourth embodiment.

[0083] Figure 8 A schematic diagram of the structure of a detection device for detecting an object to be detected provided in the fourth embodiment of the present application.

[0084] refer to Figure 8The detection device includes a first light source 400, a first polarizer 401, a second polarizer 402, a third polarizer 403, a first detection component 404, a second detection component 405 and a processor (not shown), wherein the first light source 400 is used to provide a first light to the first surface 12 of the object to be detected 11; the first polarizer 401 is used to convert the first light into a first polarized light, the first polarized light is transmitted through the object to be detected 11 to form a first transmitted signal light, and the first polarized light is returned through the first surface 12 to form a first returned light; the first returned light passes through the second polarizer 402 to form a first signal light, and the polarization direction of the second polarizer 402 is not perpendicular to the polarization direction of the first polarizer 401; the polarization direction of the third polarizer 403 is perpendicular to the polarization direction of the first polarizer 401, and the first transmitted signal light passes through the third polarizer 403 to form a second signal light; the first detection component 404 is used to receive the first signal light; the second detection component 405 is used to receive the second signal light; and the processor is used to detect the object to be detected 11 according to the first signal light and the second signal light.

[0085] It should be noted that, the first beam splitter 406, the dark field light source assembly, the first dark field light source 417, the second dark field light source 427, the first objective lens 408, the second objective lens 409, the second light source 410 and the fourth polarizer 411 in this embodiment can refer to the corresponding description of the first beam splitter 306, the dark field light source assembly, the first dark field light source 317, the second dark field light source 327, the first objective lens 308, the second objective lens 309, the second light source 310 and the fourth polarizer 311 in the third embodiment, and will not be repeated here.

[0086] In this embodiment, the detection device further includes a second beam splitter 412 , which is a semi-transparent and semi-reflective mirror for transmitting the second polarized light to the object under test 11 and for reflecting the first transmitted signal light and the second return light to the third polarizer 403 .

[0087] The fifth embodiment of the present application also provides a detection device, which is substantially the same as the detection device provided in the third embodiment, and the main difference is that the first light source and the second light source in the detection device provided in the fifth embodiment are both dark field light sources. The detection device will be described in detail below in conjunction with the accompanying drawings. It should be noted that the features that are the same or corresponding to the third embodiment will not be described in detail below to avoid redundancy. In the absence of contradiction, the corresponding description of the third embodiment is also applicable to the corresponding features of the fifth embodiment.

[0088] Fig. 9 A schematic diagram of the structure of a detection device for detecting an object to be detected provided in the fifth embodiment of the present application.

[0089] refer to Fig. 9The detection device includes a first light source 500, a first polarizer 501, a second polarizer 502, a third polarizer 503, a first detection component 504, a second detection component 505 and a processor (not shown), wherein the first light source 500 is used to provide a first light to the first surface 12 of the object to be detected 11; the first polarizer 501 is used to convert the first light into a first polarized light, the first polarized light is transmitted through the object to be detected 11 to form a first transmitted signal light, and the first polarized light is returned through the first surface 12 to form a first returned light; the first returned light passes through the second polarizer 502 to form a first signal light, and the polarization direction of the second polarizer 502 is not perpendicular to the polarization direction of the first polarizer 501; the polarization direction of the third polarizer 503 is perpendicular to the polarization direction of the first polarizer 501, and the first transmitted signal light passes through the third polarizer 503 to form a second signal light; the first detection component 504 is used to receive the first signal light; the second detection component 505 is used to receive the second signal light; and the processor is used to detect the object to be detected 11 according to the first signal light and the second signal light.

[0090] The detection device also includes a second light source 510 and a fourth polarizer 511. The second light source 510 is used to provide a second light to the second surface 13 of the object to be detected 11; the fourth polarizer 511 is used to convert the second light into a second polarized light. The second polarized light returns through the second surface 13 to form a second return light. The second return light passes through the third polarizer 503 to form a third signal light. The second polarized light is transmitted through the object to be detected 11 to form a second transmitted signal light. The second transmitted signal light passes through the second polarizer to form a fourth signal light. The polarization direction of the fourth polarizer 511 is perpendicular to the polarization direction of the second polarizer 502. The polarization direction of the fourth polarizer 511 is not perpendicular to the polarization direction of the third polarizer 503. The second detection component 505 is also used to receive the third signal light and generate a third image based on the third signal light. The first detection component 504 is also used to receive the fourth signal light and generate a fourth image based on the fourth signal light.

[0091] In this embodiment, the first light source 500 is a dark field light source. In other embodiments of the present application, the first light source may also be a bright field light source.

[0092] In this embodiment, the second light source 510 is a dark field light source. In other embodiments of the present application, the second light source may also be a bright field light source.

[0093] In this embodiment, the first polarized light is scattered by the first surface 12 to form the first return light, and the second polarized light is scattered by the second surface 13 to form the second return light. In other embodiments of the present application, the first polarized light can be reflected by the first surface 12 to form the first return light, and the angle between the incident direction of the first polarized light and the first surface 12 is an acute angle, and the second polarized light is reflected by the second surface 13 to form the second return light, and the angle between the incident direction of the second polarized light and the second surface 13 is an acute angle.

[0094] In the detection device provided above, the first light emitted by the first light source can pass through the first polarizer, the object to be tested, and the second polarizer in sequence to form a first signal light. The first light emitted by the first light source can also pass through the first polarizer, the object to be tested, and the third polarizer in sequence to form a second signal light. The processor can detect the object to be tested based on the first signal light and the second signal light. That is, the use of this detection device can complete two types of defect detection through one light source, which can avoid missing the type of defects and improve the detection efficiency, thereby improving the practicality of the detection device. In addition, the detection device of the embodiment of the present application can complete two types of defect detection, so that the detector can complete the defect detection of the object to be tested under different types of light without changing the detection device, thereby improving the detection efficiency and the practicality of the detection device. In addition, by comparing the manifestations of the defects of the object to be tested detected by different signal lights, more accurate defect classification can be achieved, which is conducive to improving the practicality of the detection device.

[0095] According to some embodiments of the present application, another aspect of the present application provides a detection method based on the detection device of any of the above embodiments. For the parts that are the same or corresponding to the previous embodiment, reference may be made to the corresponding description of the previous embodiment, and will not be described in detail below.

[0096] refer to Figure 1 The detection device includes a first light source 100, a first polarizer 101, a second polarizer 102, a third polarizer 103, a first detection component 104, and a second detection component 105. The first light source 100 is used to provide a first light to the first surface 12 of the object to be detected 11; the first polarizer 101 is used to convert the first light into a first polarized light, the first polarized light is transmitted through the object to be detected 11 to form a first transmitted signal light, and the first polarized light is returned through the first surface 12 to form a first returned light; the first returned light passes through the second polarizer 102 to form a first signal light, and the polarization direction of the second polarizer 102 is not perpendicular to the polarization direction of the first polarizer 101; the polarization direction of the third polarizer 103 is perpendicular to the polarization direction of the first polarizer 101, and the first transmitted signal light passes through the third polarizer 103 to form a second signal light; the first detection component 104 is used to receive the first signal light; and the second detection component 105 is used to receive the second signal light.

[0097] Fig.10 A flowchart of the first detection method provided in an embodiment of the present application.

[0098] The first detection method provided in the present application includes a detection process, wherein the steps of the detection process include: Combined with reference Figure 1 and Fig.10, a first light source 100 is used to provide a first light to a first surface 12 of the object to be measured 11; a first polarizer 101 converts the first light into a first polarized light, the first polarized light is transmitted through the object to be measured 11 to form a first transmitted signal light, and the first polarized light is returned through the first surface 12 to form a first returned light; a second polarizer 102 is used to make the first returned light form a first signal light, the polarization direction of the second polarizer 102 is not perpendicular to the polarization direction of the first polarizer 101, the polarization direction of the third polarizer 103 is perpendicular to the polarization direction of the first polarizer 101, and the first transmitted signal light is formed into a second signal light through the third polarizer 103; the first signal light is received through a first detection component 104; the second signal light is received through a second detection component 105; the object to be measured 11 is detected according to the signal light, and the signal light includes one or more combinations of the first signal light and the second signal light.

[0099] Among them, detecting the object to be detected 11 according to the signal light includes: acquiring detection images according to different signal lights received by the first detection component 104 and the second detection component 105 respectively; detecting and classifying the target to be detected according to each detection image, and the detection target includes defects.

[0100] Before detecting the object to be detected according to the signal light, the method further includes: adjusting the angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101 to adjust the light intensity of the first signal light.

[0101] According to Malus's law, the intensity of the first signal light is related to the angle between the polarization direction of the first polarizer 101 and the polarization direction of the second polarizer 102. Therefore, the intensity of the first signal light can be adjusted by adjusting the angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101, so as to ensure that the first signal light has sufficient intensity while preventing the first detection component 104 from being overexposed, thereby improving the reliability of detection.

[0102] Specifically, in this embodiment, the detection device further includes: a first rotating component (not shown), the first rotating component is connected to the second polarizer 102, and adjusting the angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101 includes: controlling the first rotating component to drive the second polarizer 102 to rotate around the first rotation axis. The first rotation axis is not parallel to the polarization direction of the second polarizer 102.

[0103] In other embodiments of the present application, the first rotating component may also be connected to the first polarizer 101 and the third polarizer 103 respectively, and adjusting the angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101 includes: driving the third polarizer 103 to rotate around the second rotation axis by controlling the first rotating component, and driving the first polarizer 101 to rotate synchronously around the second rotation axis, so as to ensure that the polarization direction of the first polarizer 101 is perpendicular to the polarization direction of the third polarizer 103. The second rotation axis is not parallel to the polarization direction of the first polarizer 101.

[0104] The detection device also includes a dark field light source assembly, which includes a first dark field light source 117 and a second dark field light source 127. The first dark field light source 117 is used to provide a first dark field light to the object to be tested 11, and the first dark field light is scattered by the first surface 12 of the object to be tested 11 to form a first dark field signal light, and the second dark field light source 127 is used to provide a second dark field light to the object to be tested 11, and the second dark field light is scattered by the second surface 13 of the object to be tested 11 to form a second dark field signal light.

[0105] In this embodiment, the dark field light source assembly includes a first dark field light source 117 and a second dark field light source 127. In other embodiments of the present application, the dark field light source assembly may include only one of the first dark field light source and the second dark field light source, and when the object to be detected is detected according to the signal light, the detection may be performed only by one of the first dark field signal light and the second dark field signal light.

[0106] The detection method also includes: controlling the dark field light source assembly to perform multiple detection processes on the object to be detected 11, and rotating the object to be detected 11 relative to the dark field light source assembly by a preset angle between adjacent detection processes, the dark field light source assembly includes one or a combination of a first dark field light source 117 and a second dark field light source 127; the first dark field light source is a bar light source, and / or the second dark field light source is a bar light source. With such a configuration, the detection device can collect corresponding signal light under the first dark field light and / or the second dark field light at multiple angles, thereby improving the accuracy and comprehensiveness of the detection.

[0107] Combined with reference Figure 1 and Fig.10In step S101 and step S102, before detecting the object to be detected 11 according to the signal light, the detection process also includes: controlling each light source to flash in sequence, and controlling the first detection component 104 and the second detection component 105 to collect the signal light at a preset frequency at the same time; the preset frequency is greater than or equal to the flashing frequency of each light source, and each light source includes one or a combination of the first light source 100 and the dark field light source component. The signal light includes one or more combinations of the first signal light, the second signal light, the first dark field signal light and the second dark field signal light. Each light source is controlled to flash in sequence, so that the object to be tested 11 can complete the defect detection under the corresponding light source in sequence under different light sources. Such a setting can detect various types of defects of the object to be tested 11, thereby reducing the missed detection of defect types and improving the practicality of the detection device. By controlling each light source to flash in sequence, the inspector can complete the defect detection of the object to be tested 11 under various light sources without changing the detection device, thereby reducing the detection time and improving the practicality of the detection device. Some defects of the object to be tested 11 can be measured under multiple light sources. By comparing the manifestations of defects under different light sources, more accurate defect classification can be achieved, which is conducive to improving the practicality of the detection device. In addition, the preset frequency is greater than or equal to the flashing frequency of the light source, which can ensure that the signal light emitted by each object to be tested 11 under the flashing of the corresponding light source is collected by the first detection component 104 and the second detection component 105, which can improve the reliability of the detection device.

[0108] Controlling each light source to flash in sequence includes: controlling the first dark field light source 117 and the second dark field light source 127 to flash simultaneously, and controlling the first detection component 104 and the second detection component 105 to collect signal light simultaneously at a preset frequency; the preset frequency is greater than or equal to the flashing frequency of the first dark field light source 117 and the second dark field light source 127.

[0109] The first dark field light source 117 and the second dark field light source 127 flash at the same time, which can save test time and improve test efficiency. The preset frequency is greater than or equal to the flashing frequency of the first dark field light source 117 and the second dark field light source 127, which can ensure that the signal light emitted by each object to be tested 11 under the flashing of the first dark field light source 117 and the second dark field light source 127 is collected by the first detection component 104 and the second detection component 105, which can improve the reliability of the detection device.

[0110] In other embodiments of the present application, the first dark-field light source 117 and the second dark-field light source 127 may not flash at the same time.

[0111] Before the detection process, the detection method also includes: performing a first pre-detection on the detection device to determine a first matching angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101; the pre-detection includes: continuously adjusting the first angle to be measured between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101, and acquiring the first signal light through the first detection component 104; acquiring the first angle to be measured that is not overexposed and reaches a preset sensitivity of the first detection component 104 as the first matching angle. Adjusting the angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101 to adjust the light intensity of the first signal light includes: making the angle between the polarization direction of the second polarizer 102 and the polarization direction of the first polarizer 101 the first matching angle.

[0112] Specifically, refer to Fig.10 , the first detection method provided in this embodiment includes: Step S100, adjusting the angle between the polarization direction of the first polarizer and the polarization direction of the second polarizer.

[0113] Step S101, controlling the first light source and the dark field light source assembly to flash in sequence, so as to provide the first light to the first surface of the object to be measured through the first light source, the first polarizer converts the first light into the first polarized light, the first polarized light returns through the first surface to form the first return light, the second polarizer makes the first return light form the first signal light, the first polarized light is transmitted through the object to be measured to form the first transmitted signal light, and the first transmitted signal light is formed through the third polarizer to form the second signal light; the first dark field light is provided to the object to be measured through the first dark field light source in the dark field light source assembly, the first dark field light is scattered by the object to be measured to form the first dark field signal light, and the second dark field light is provided to the object to be measured through the second dark field light source in the dark field light source assembly, and the second dark field light is scattered by the object to be measured to form the second dark field signal light.

[0114] Step S102, controlling the first detection component and the second detection component to simultaneously collect signal light at a preset frequency, where the preset frequency is greater than or equal to the flickering frequency of the first light source and the light source of the dark field light source component.

[0115] Step S103: detecting the object to be detected according to the signal light.

[0116] The present application also provides a second detection method, which is substantially the same as the first detection method, with the main difference being that the detection device corresponding to the second detection method further includes a second light source and a fourth polarizer, and the second detection method also detects the object to be detected based on the third signal light and the fourth signal light, and adjusts the light intensity of the third signal light before detecting the object to be detected. The detection device will be described in detail below in conjunction with the accompanying drawings. It should be noted that the features that are the same or corresponding to the first detection method will not be described in detail below to avoid redundancy, and in the absence of contradiction, the corresponding description of the first detection method is also applicable to the corresponding features of the second detection method.

[0117] Fig.11 A flowchart of the second detection method provided in an embodiment of the present application.

[0118] The second detection method provided in the present application includes detection processing, and the steps of the detection processing include: Combined with reference Figure 7 and Fig.11 , a first light source 300 is used to provide a first light to the first surface 12 of the object to be measured 11; the first polarizer 301 converts the first light into a first polarized light, the first polarized light is transmitted through the object to be measured 11 to form a first transmitted signal light, and the first polarized light is returned through the first surface 12 to form a first returned light; the second polarizer 302 makes the first returned light form a first signal light, and the polarization direction of the second polarizer 302 is not perpendicular to the polarization direction of the first polarizer 301; the polarization direction of the third polarizer 303 is perpendicular to the polarization direction of the first polarizer 301, and the first transmitted signal light is formed into a second signal light through the third polarizer 303; the first signal light is received through the first detection component 304; the second signal light is received through the second detection component 305; the object to be measured 11 is detected according to the signal light, and the signal light includes one or more combinations of the first signal light and the second signal light.

[0119] Before detecting the object to be detected according to the signal light, the detection process further includes: adjusting the angle between the polarization direction of the second polarizer 302 and the polarization direction of the first polarizer 301 to adjust the light intensity of the first signal light.

[0120] According to Malus's law, the intensity of the first signal light is related to the angle between the polarization direction of the first polarizer 301 and the polarization direction of the second polarizer 302. Therefore, the intensity of the first signal light can be adjusted by adjusting the angle between the polarization direction of the second polarizer 302 and the polarization direction of the first polarizer 301, so as to ensure that the first signal light has sufficient intensity while preventing the first detection component 304 from being overexposed, thereby improving the reliability of the detection device.

[0121] Specifically, in this embodiment, the detection device further includes: a first rotating component (not shown), the first rotating component is connected to the second polarizer 302, and adjusting the angle between the polarization direction of the second polarizer 302 and the polarization direction of the first polarizer 301 includes: controlling the first rotating component to drive the second polarizer 302 to rotate around the first rotating axis. The first rotating axis is not parallel to the polarization direction of the second polarizer 302.

[0122] In other embodiments of the present application, the first rotating component may also be connected to the first polarizer 301 and the third polarizer 303 respectively, and adjusting the angle between the polarization direction of the second polarizer 302 and the polarization direction of the first polarizer 301 includes: driving the third polarizer 303 to rotate around the second rotation axis by controlling the first rotating component, and driving the first polarizer 301 to rotate synchronously around the second rotation axis, so as to ensure that the polarization direction of the first polarizer 301 is perpendicular to the polarization direction of the third polarizer 303. The second rotation axis is not parallel to the polarization direction of the first polarizer 301.

[0123] The detection device also includes a second light source 310 and a fourth polarizer 311. The second light source 310 is used to provide a second light to the second surface 13 of the object to be measured 11; the fourth polarizer 311 converts the second light into a second polarized light, the second polarized light returns through the second surface 13 to form a second return light, the second return light passes through the third polarizer 303 to form a third signal light, the second polarized light is transmitted through the object to be measured 11 to form a second transmitted signal light, the second transmitted signal light passes through the second polarizer 302 to form a fourth signal light, the polarization direction of the fourth polarizer 311 is perpendicular to the polarization direction of the second polarizer 302; the polarization direction of the fourth polarizer 311 is not perpendicular to the polarization direction of the third polarizer 303.

[0124] The detection process also includes: detecting the object to be detected 11 according to the third signal light and the fourth signal light; before detecting the object to be detected 11 according to the third signal light and the fourth signal light, the detection process also includes: adjusting the angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311 to adjust the intensity of the second signal light.

[0125] According to Malus's law, the intensity of the second signal light is related to the angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311. Therefore, the intensity of the second signal light can be adjusted by adjusting the angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311, so as to ensure that the second signal light has sufficient intensity and prevent the second detection component 305 from being overexposed, thereby improving the reliability of detection.

[0126] Specifically, in this embodiment, the detection device further includes: a second rotating component (not shown), the second rotating component is connected to the third polarizer 303, and adjusting the angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311 includes: controlling the second rotating component to drive the third polarizer 303 to rotate around a third rotation axis. The third rotation axis is not parallel to the polarization direction of the third polarizer 303.

[0127] In other embodiments of the present application, the second rotating assembly is connected to the second polarizer 302 and the fourth polarizer 311 respectively; the second rotating assembly is controlled to drive the second polarizer 302 to rotate around the fourth rotation axis, and at the same time drive the fourth polarizer 311 to rotate synchronously around the fourth rotation axis to ensure that the polarization direction of the second polarizer 302 is perpendicular to the polarization direction of the fourth polarizer 311. The fourth rotation axis is not parallel to the polarization direction of the second polarizer 302.

[0128] Detecting the object to be detected 11 according to the signal light includes: acquiring detection images according to different signal lights received by the first detection component 304 and the second detection component 305 respectively; and detecting and classifying the target to be detected according to each detection image, and the detection target includes defects.

[0129] The detection device also includes a dark field light source component, and the dark field light source component includes a first dark field light source 317 and a second dark field light source 327. The first dark field light source 317 is used to provide a first dark field light to the object to be tested 11, and the first dark field light is scattered by the first surface 12 of the object to be tested 11 to form a first dark field signal light. The second dark field light source 327 is used to provide a second dark field light to the object to be tested 11, and the second dark field light is scattered by the second surface 13 of the object to be tested 11 to form a second dark field signal light. The detection process also includes: receiving the first dark field signal light through the first detection component 304, and receiving the second dark field signal light through the second detection component 305, and the signal light also includes one or a combination of the first dark field signal light and the second dark field signal light.

[0130] In this embodiment, the dark field light source assembly includes a first dark field light source 317 and a second dark field light source 327. In other embodiments of the present application, the dark field light source assembly may include only one of the first dark field light source and the second dark field light source, and when the object to be detected is detected according to the signal light, the detection may be performed only by one of the first dark field signal light and the second dark field signal light.

[0131] The detection method also includes: controlling the dark field light source assembly to perform multiple detection processes on the object to be detected 11, and rotating the object to be detected 11 relative to the dark field light source assembly by a preset angle between adjacent detection processes; the dark field light source assembly includes one or a combination of a first dark field light source 317 and a second dark field light source 327; the first dark field light source 317 is a bar light source, and / or the second dark field light source 327 is a bar light source. With such a configuration, the detection device can collect corresponding signal light under the first dark field light and / or the second dark field light at multiple angles to improve the reliability of the test.

[0132] Combined with reference Figure 7 and Fig.11 Steps S201 and S202 in the method include: controlling each light source to flash in sequence, and controlling the first detection component 304 and the second detection component 305 to simultaneously collect signal light at a preset frequency; the preset frequency is greater than or equal to the flashing frequency of each light source, and each light source includes one or more combinations of the first light source 300, the second light source 310, and the dark field light source component. The signal light includes one or more combinations of the first signal light, the second signal light, the third signal light, the fourth signal light, the first dark field signal light, and the second dark field signal light. Each light source is controlled to flash in sequence, so that the object to be tested 11 can complete the defect detection under the corresponding light source in sequence under different light sources. Such a setting can detect various types of defects of the object to be tested 11, thereby reducing the missed detection of defect types and improving the practicality of the detection device. By controlling each light source to flash in sequence, the inspector can complete the defect detection of the object to be tested 11 under various light sources without changing the detection device, thereby reducing the detection time and improving the practicality of the detection device. Some defects of the object to be tested 11 can be measured under multiple light sources. By comparing the manifestations of defects under different light sources, more accurate defect classification can be achieved, which is conducive to improving the practicality of the detection device. In addition, the preset frequency is greater than or equal to the flashing frequency of the light source, which can ensure that the signal light emitted by each object to be tested 11 under the flashing of the corresponding light source is collected by the first detection component 304 and the second detection component 305, which can improve the reliability of the detection.

[0133] Controlling each light source to flash in sequence includes: controlling the first dark field light source 317 and the second dark field light source 327 to flash simultaneously, and controlling the first detection component 304 and the second detection component 305 to collect signal light simultaneously at a preset frequency; the preset frequency is greater than or equal to the flashing frequency of the first dark field light source 317 and the second dark field light source 327. Such a setting can save test time and improve test efficiency.

[0134] In other embodiments of the present application, the first dark field light source 317 and the second dark field light source 327 may not flash at the same time.

[0135] Before the detection process, the detection method further includes: performing a second pre-detection on the detection device to determine a second matching angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311; the pre-detection includes: continuously adjusting the second angle to be measured between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311, and obtaining the second signal light through the second detection component 305; obtaining the second angle to be measured at which the second detection component 305 is not overexposed and reaches a preset sensitivity as the second matching angle. Adjusting the angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311 to adjust the light intensity of the second signal light includes: making the angle between the polarization direction of the third polarizer 303 and the polarization direction of the fourth polarizer 311 the second matching angle.

[0136] Specifically, refer to Fig.11 The second detection method provided in the embodiment of the present application includes: Step S200, adjusting the angle between the polarization direction of the first polarizer and the polarization direction of the second polarizer, and adjusting the angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer.

[0137] Step S201, controlling the first light source, the second light source and the dark field light source assembly to flash in sequence, so as to provide the first light to the first surface of the object to be measured through the first light source, the first polarizer converts the first light into the first polarized light, the first polarized light returns through the first surface to form the first return light, the second polarizer makes the first return light form the first signal light, the first polarized light is transmitted through the object to be measured to form the first transmitted signal light, and the first transmitted signal light is formed through the third polarizer to form the second signal light; providing the second light to the second surface of the object to be measured through the second light source, the fourth polarizer converts the second light into the second polarized light, the second polarized light returns through the second surface to form the second return light, the second return light is formed through the third polarizer to form the third signal light, the second polarized light is transmitted through the object to be measured to form the second transmitted signal light, and the second transmitted signal light is formed through the second polarizer to form the fourth signal light; providing the first dark field light to the object to be measured through the first dark field light source in the dark field light source assembly, the first dark field light is scattered by the object to be measured to form the first dark field signal light, providing the second dark field light to the object to be measured through the second dark field light source in the dark field light source assembly, and the second dark field light is scattered by the object to be measured to form the second dark field signal light.

[0138] Step S202, controlling the first detection component and the second detection component to simultaneously collect signal light at a preset frequency, where the preset frequency is greater than or equal to the flickering frequency of the first light source, the second light source, and the light source of the dark field light source component.

[0139] Step S203: detecting the object to be detected according to the signal light.

[0140] Those skilled in the art will appreciate that the above-mentioned embodiments are specific examples for implementing the present application, and in practical applications, various changes may be made to the embodiments in form and detail without departing from the spirit and scope of the present application. Any person skilled in the art may make various changes and modifications without departing from the spirit and scope of the present application, and therefore the scope of protection of the present application shall be subject to the scope defined in the claims.

Claims

1. A detection device for detecting an object to be detected, wherein the object to be detected comprises a first surface and a second surface opposite to each other, characterized in that: The detection device comprises: A first light source, the first light source is used to provide a first light to the first surface of the object to be measured; A first polarizer, the first polarizer is used to convert the first light into a first polarized light, the first polarized light is transmitted through the object to be measured to form a first transmitted signal light, and the first polarized light is returned through the first surface to form a first return light; a second polarizer, wherein the first return light passes through the second polarizer to form a first signal light, and a polarization direction of the second polarizer is not perpendicular to a polarization direction of the first polarizer; a third polarizer, wherein the polarization direction of the third polarizer is perpendicular to the polarization direction of the first polarizer, and the first transmitted signal light is transformed into a second signal light through the third polarizer; a first detection component, the first detection component is used to receive the first signal light; a second detection component, the second detection component is used to receive the second signal light; A processor is used to detect the object to be detected according to the first signal light and the second signal light.

2. The detection device according to claim 1, characterized in that: The detection device also includes: a first rotating assembly, wherein the first rotating assembly is connected to the second polarizer, and the first rotating assembly is used to drive the second polarizer to rotate around a first rotating axis, the first rotating axis is not parallel to the polarization direction of the second polarizer, so that the angle between the polarization direction of the second polarizer and the polarization direction of the first polarizer is adjustable; or, the first rotating assembly is connected to the first polarizer and the third polarizer respectively, and the first rotating assembly is used to drive the third polarizer to rotate around a second rotating axis, and at the same time drive the first polarizer to rotate synchronously around the second rotating axis, the second rotating axis is not parallel to the polarization direction of the first polarizer, so that the angle between the polarization direction of the second polarizer and the polarization direction of the first polarizer is adjustable; The first detection component is further used to generate a first image according to the first signal light, and the second detection component is further used to generate a second image according to the second signal light.

3. The detection device according to claim 2, characterized in that: The first light source is a coaxial light source, and the detection device further includes: a first beam splitter, the first beam splitter is used to reflect the first polarized light to the object to be measured and transmit the first return light to the second polarizer, or the first beam splitter is used to transmit the first polarized light to the object to be measured and reflect the first return light to the second polarizer; The first polarizer is located on the optical path between the first beam splitter and the first light source, and the second polarizer is located on the optical path between the first beam splitter and the first detection component.

4. The detection device according to any one of claims 1 to 3, characterized in that: The detection device also includes: a second light source, the second light source being used to provide a second light to the second surface of the object to be measured; a fourth polarizer, the fourth polarizer being used to convert the second light into the second polarized light, the second polarized light is returned through the second surface to form a second return light, the second return light is passed through the third polarizer to form a third signal light, the second polarized light is transmitted through the object to be measured to form a second transmitted signal light, the second transmitted signal light is passed through the second polarizer to form a fourth signal light, the polarization direction of the fourth polarizer is perpendicular to the polarization direction of the second polarizer; the polarization direction of the fourth polarizer is not perpendicular to the polarization direction of the third polarizer; The second detection component is further used to receive the third signal light and generate a third image according to the third signal light, and the first detection component is further used to receive the fourth signal light and generate a fourth image according to the fourth signal light.

5. The detection device according to claim 4, characterized in that: The detection device also includes: A second rotating component, wherein the second rotating component is connected to the third polarizer, and the second rotating component is used to drive the third polarizer to rotate around a third rotating axis, wherein the third rotating axis is not parallel to the polarization direction of the third polarizer, so that the angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer is variable, or the second rotating component is connected to the second polarizer and the fourth polarizer respectively, and the second rotating component is used to drive the second polarizer to rotate around a fourth rotating axis, and at the same time drive the fourth polarizer to rotate synchronously around the fourth rotating axis, wherein the fourth rotating axis is not parallel to the polarization direction of the second polarizer, so that the angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer is adjustable.

6. The detection device according to claim 5, characterized in that: The second light source is a coaxial light source, and the detection device further includes: a second beam splitter, the second beam splitter is used to reflect the second polarized light to the object to be measured, and to transmit the first transmission signal light and the second return light to the third polarizer, or the second beam splitter is used to transmit the second polarized light to the object to be measured, and to reflect the first transmission signal light and the second return light to the third polarizer; Wherein, the third polarizer is located on the optical path between the second beam splitter and the second detection assembly, and the fourth polarizer is located on the optical path between the second beam splitter and the second light source.

7. The detection device according to claim 1, characterized in that: The detection device further includes a dark field light source assembly, wherein the dark field light source assembly includes at least one of a first dark field light source and a second dark field light source: The first dark field light source is used to provide a first dark field light to the object to be measured, and the first dark field light is scattered by the first surface of the object to be measured to form a first dark field signal light. The second dark field light source is used to provide a second dark field light to the object to be measured, and the second dark field light is scattered by the second surface of the object to be measured to form a second dark field signal light. The first detection component is used to receive the first dark field signal light and generate a first dark field image according to the first dark field signal light; the second detection component is used to receive the second dark field signal light and generate a second dark field image according to the second dark field signal light.

8. The detection device according to claim 7, characterized in that: The first dark field light source is a bar light source, and / or the second dark field light source is a bar light source; the detection device further comprises: a rotating table, and the rotating table is used to drive the object to be detected and the dark field light source assembly to rotate relative to each other.

9. The detection device according to claim 8, characterized in that: The first detection assembly includes a plurality of first detectors, wherein the plurality of first detectors are arranged in a strip shape in the first surface field of view, and the fields of view of adjacent first detectors are partially overlapped or staggered; The second detection assembly includes a plurality of second detectors, wherein the plurality of second detectors are arranged in a strip shape in the field of view of the second surface, and the fields of view of adjacent second detectors are partially overlapped or staggered; The first dark field light source is a bar light source, and the first dark field light source is arranged in parallel with the arrangement direction of the first detector field of view; the second dark field light source is a bar light source, and the second dark field light source is arranged in parallel with the arrangement direction of the second detector field of view.

10. The detection device according to claim 4, characterized in that: The first polarized light is reflected by the first surface to form the first returning light, and the incident direction of the first polarized light and the first surface form an acute angle, or the first polarized light is scattered by the first surface to form the first returning light; The second polarized light is reflected by the second surface to form the second returning light, and the incident direction of the second polarized light forms an acute angle with the second surface, or the second polarized light is scattered by the second surface to form the second returning light.

11. The detection device according to claim 1, characterized in that: The first surface is conjugate with the photosensitive surface of the first detection component, and the second surface is conjugate with the photosensitive surface of the second detection component.

12. A detection method based on the detection device according to any one of claims 1 to 11, used for detecting an object to be detected, wherein the object to be detected comprises a first surface and a second surface opposite to each other, characterized in that: The detection method includes a detection process, and the detection process includes: Providing a first light to the first surface of the object to be measured by a first light source; The first polarizer converts the first light into a first polarized light, the first polarized light is transmitted through the object to be measured to form a first transmitted signal light, and the first polarized light is returned through the first surface to form a first returned light; The second polarizer makes the first return light form the first signal light, and the polarization direction of the second polarizer is not perpendicular to the polarization direction of the first polarizer; the polarization direction of the third polarizer is perpendicular to the polarization direction of the first polarizer, and the first transmission signal light forms the second signal light through the third polarizer; Receiving the first signal light through a first detection component; receiving the second signal light by a second detection component; The object to be detected is detected according to the signal light, where the signal light includes one or more combinations of the first signal light and the second signal light.

13. The detection method according to claim 12, characterized in that: Before detecting the object to be detected according to the signal light, the detection process further includes: The angle between the polarization direction of the second polarizer and the polarization direction of the first polarizer is adjusted to adjust the light intensity of the first signal light.

14. The detection method according to claim 12, characterized in that: If the detection device further includes: a second light source, the second light source is used to provide a second light to the second surface of the object to be detected; a fourth polarizer, the fourth polarizer converts the second light into a second polarized light, the second polarized light returns through the second surface to form a second return light, the second return light passes through the third polarizer to form a third signal light, the second polarized light is transmitted through the object to be detected to form a second transmitted signal light, the second transmitted signal light passes through the second polarizer to form a fourth signal light, the polarization direction of the fourth polarizer is perpendicular to the polarization direction of the second polarizer; the polarization direction of the fourth polarizer is not perpendicular to the polarization direction of the third polarizer; The detection process further includes: detecting the object to be detected according to the third signal light and the fourth signal light; Before detecting the object to be detected according to the third signal light and the fourth signal light, the detection process further includes: adjusting the angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer to adjust the light intensity of the second signal light.

15. The detection method according to claim 14, characterized in that: If the detection device further comprises: a first rotating component, the first rotating component is connected to the second polarizer, or the first rotating component is connected to the first polarizer and the third polarizer respectively; Adjusting the angle between the polarization direction of the second polarizer and the polarization direction of the first polarizer, comprising: controlling the first rotating component to drive the second polarizer to rotate around a first rotating axis, wherein the first rotating axis is not parallel to the polarization direction of the second polarizer, or controlling the first rotating component to drive the third polarizer to rotate around a second rotating axis, and at the same time drive the first polarizer to rotate synchronously around the second rotating axis to ensure that the polarization direction of the first polarizer is perpendicular to the polarization direction of the third polarizer, and the second rotating axis is not parallel to the polarization direction of the first polarizer; And / or, if the detection device further includes a second rotating component, the second rotating component is connected to the third polarizer, or the second rotating component is connected to the second polarizer and the fourth polarizer respectively; Adjusting the angle between the polarization direction of the third polarizer and the polarization direction of the fourth polarizer includes: controlling the second rotating component to drive the third polarizer to rotate around a third rotation axis, wherein the third rotation axis is not parallel to the polarization direction of the third polarizer, or controlling the second rotating component to drive the second polarizer to rotate around a fourth rotation axis, and at the same time drive the fourth polarizer to rotate synchronously around the fourth rotation axis to ensure that the polarization direction of the second polarizer is perpendicular to the polarization direction of the fourth polarizer, and the fourth rotation axis is not parallel to the polarization direction of the second polarizer.

16. The detection method according to claim 12, characterized in that: The object to be detected is detected according to the signal light, including: respectively acquiring detection images according to different signal lights received by the first detection component and the second detection component; and detecting and classifying the object to be detected according to each of the detection images, wherein the object to be detected includes defects.

17. The detection method according to claim 12 or 14, characterized in that: The detection device includes: a dark field light source component, the dark field light source component includes at least one of a first dark field light source and a second dark field light source; the first dark field light source provides a first dark field light to the object to be tested, the first dark field light is scattered by the first surface of the object to be tested to form a first dark field signal light, the second dark field light source provides a second dark field light to the object to be tested, the second dark field light is scattered by the second surface of the object to be tested to form a second dark field signal light; the detection process also includes: receiving the first dark field signal light through the first detection component, receiving the second dark field signal light through the second detection component, the signal light also includes one or a combination of the first dark field signal light and the second dark field signal light.

18. The detection method according to claim 17, characterized in that: The detection method also includes: controlling the dark field light source assembly to perform the detection processing on the object to be detected multiple times, and rotating the object to be detected relative to the dark field light source assembly by a preset angle between adjacent detection processings, the dark field light source assembly includes one or a combination of the first dark field light source and the second dark field light source; the first dark field light source is a bar light source, and / or the second dark field light source is a bar light source.

19. The detection method according to claim 17, characterized in that: Before detecting the object to be tested according to the signal light, it includes: controlling each light source to flash in sequence, and controlling the first detection component and the second detection component to simultaneously collect the signal light at a preset frequency; the preset frequency is greater than or equal to the flashing frequency of each light source, and each light source includes one or a combination of the first light source and the dark field light source component.

20. The detection method according to claim 19, characterized in that: Controlling each light source to flash in sequence includes: controlling the first dark field light source and the second dark field light source to flash simultaneously, and controlling the first detection component and the second detection component to collect the signal light simultaneously at the preset frequency; the preset frequency is greater than or equal to the flashing frequency of the first dark field light source and the second dark field light source.

Images