Sample transfer device and sample transfer method for ultrahigh vacuum magnetic microscope

Abstract

The invention provides a sample transfer device and a sample transfer method for an ultrahigh vacuum magnetic force microscope. The sample transfer device comprises a working box body, a transition box body, a sample feeding assembly, a sample transfer assembly, a sample storage assembly and a switch structure. The working box body can be vacuumized to a set vacuum degree, a test position, a transfer position and a temporary storage position are arranged in the working box body, the test position is used for placing a sample support and a needle point support, the transfer position is used for taking and placing the sample support and the needle point support on the sample conveying assembly and the sample storage assembly by the sample transferring assembly, and the temporary storage position is used for temporarily storing the sample support and the needle point support. Compared with the operation of frequently opening the working box body in the prior art, the vacuum degree of the working box body is not influenced in the whole working process, the established ultrahigh vacuum environment is not damaged, the whole operation process is simple and rapid, and the sample conveying is convenient. Different sample supports or needle point supports can be replaced at the testing position in the working box body, the working box body does not need to be opened, and the stability of the vacuum degree of the working box body in the sample transferring process is guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of scanning probe microscopes, and in particular to a sample transfer device and a sample transfer method for an ultra-high vacuum magnetic force microscope. Background Art

[0002] With the rapid development of nanotechnology and materials science, scanning probe microscopy has become an indispensable tool for exploring surface science. However, when conducting magnetic force microscopy experiments under ultra-high vacuum conditions, the transmission and installation of samples has become a key technical bottleneck that restricts the efficiency and accuracy of the experiment.

[0003] Traditional sample transmission methods are often inefficient, which is mainly reflected in the need to frequently open and close the vacuum chamber during the transmission process, which is not only time-consuming, but also very easy to destroy the established ultra-high vacuum environment. In addition, traditional transmission methods also have obvious deficiencies in accuracy. Due to the lack of a precise positioning mechanism, it is often difficult to accurately align the sample and the needle tip during the transmission process, which not only affects the reliability of the experimental results, but also limits the application of magnetic force microscopy under higher precision requirements. Summary of the invention

[0004] In view of this, an embodiment of the present invention provides a sample transfer device and a sample transfer method for an ultra-high vacuum magnetic force microscope to eliminate or improve one or more defects existing in the prior art.

[0005] The first aspect of the present invention provides a sample transfer device for an ultra-high vacuum magnetic force microscope, comprising: a working box, a transition box, a sample delivery component, a sample transfer component, a sample storage component and a switch structure;

[0006] The working box can be evacuated to a set vacuum degree, and has a test position, a transfer position and a temporary storage position in the working box. The test position is used to place a sample holder and a needle tip holder, the transfer position is used for the sample transfer component to take and place the sample holder and the needle tip holder on the sample delivery component and the sample storage component, and the temporary storage position is used to temporarily store the sample holder and the needle tip holder;

[0007] The transition box is arranged on one side of the working box and can be evacuated to a set vacuum degree. The transition box is used to install the sample holder and the needle tip holder on the sample delivery assembly under the external environment;

[0008] The switch structure is arranged at the connection part between the transition box and the working box, and is used to control the opening and closing of the connection part when the transition box is evacuated to the same set vacuum degree as the working box;

[0009] The sample delivery assembly includes a first storage member disposed inside the transition box, the first storage member can reciprocate between the transition box and the test position, and the first storage member is used to install a sample holder and a needle tip holder;

[0010] The sample transfer assembly includes a gripper disposed inside the working box, the gripper being movable between the test position and the transfer position, and being used to remove the sample holder or needle tip holder stored on the first storage member under a vacuum environment and then install it at the test position of the working box, or to remove the sample holder or needle tip holder at the test position and then install it on the first storage member under a vacuum environment. The gripper is used to take and place the sample holder and needle tip holder, and to disassemble and install the sample holder and needle tip holder at the test position;

[0011] The sample storage component includes a second storage component arranged inside the working box, and the second storage component can reciprocate between the transfer position and the temporary storage position. The second storage component is used to temporarily store sample holders and needle tip holders; the sample transfer component is also used to remove the sample holder or needle tip holder stored on the second storage component under a vacuum environment and install it in the test position of the working box, or to remove the sample holder or needle tip holder at the test position under a vacuum environment and install it on the second storage component.

[0012] In some embodiments of the present invention, the sample delivery assembly further comprises a sample delivery rod, the first storage element is arranged at one end of the sample delivery rod, an end of the sample delivery rod close to the first storage element is arranged inside the transition box, and the sample delivery rod can translate along its axis and rotate around its axis;

[0013] The sample transfer assembly further comprises a sample transfer rod, the gripper is arranged at one end of the sample transfer rod, and the end of the sample transfer rod close to the gripper is arranged inside the working box, the sample transfer rod can translate along its axis and rotate around its axis, and the gripper can grab and release the sample holder and the needle tip holder;

[0014] The sample storage assembly further comprises a sample storage rod, the second storage element is arranged at one end of the sample storage rod, and one end of the sample storage rod close to the second storage element is arranged inside the working box.

[0015] In some embodiments of the present invention, the transition box has a box door and a vacuum pump connection joint, the box door is used for taking and placing the sample holder and the needle tip holder, and the box door is provided with a first observation window.

[0016] In some embodiments of the present invention, a scanning head is disposed inside the working box, and the scanning head has the testing position; a second observation window is disposed on the working box, and the second observation window corresponds to the position of the gripper moving path.

[0017] In some embodiments of the present invention, both the first storage member and the second storage member are flower bar structures, and the flower bar structure includes a supporting plate, a first mounting portion, and a second mounting portion;

[0018] Wherein, one end of the supporting plate is fixedly connected to the end of the sample delivery rod or the sample storage rod, and the first mounting portion and the second mounting portion are both arranged on the supporting plate;

[0019] The first mounting portion comprises an internal thread sleeve, and the internal thread sleeve is fixedly arranged on the support plate and used for mounting the needle tip support;

[0020] The second mounting portion includes a mounting hole, an annular groove and a spring sheet arranged on the support plate. The annular groove is coaxial with the mounting hole and is arranged at the edge of the mounting hole. The spring sheet is fixedly mounted on the support plate. The elastic portion of the spring sheet corresponds to the position of the annular groove and is used to install the sample holder.

[0021] In some embodiments of the present invention, the sample delivery rod, the sample transfer rod and the sample storage rod are all magnetic rods, and the magnetic rod includes an operating part and a working part, the operating part is arranged outside the working box or the transition box, and the working part is arranged inside the working box or the transition box;

[0022] The switch structure is a gate valve;

[0023] The working box is a partial structure of the ultra-high vacuum magnetic force microscope. The working box is detachably connected to the transition box. The working box has a test cavity, a transfer cavity, a transition box connecting cavity, a sample sending component installation cavity and a sample transfer component installation cavity. The test cavity and the transfer cavity are interconnected. The transfer cavity, the transition box connecting cavity, the sample sending component installation cavity and the sample transfer component installation cavity are interconnected.

[0024] A second aspect of the present invention provides a sample transfer method for an ultra-high vacuum magnetic force microscope. Based on the above-mentioned sample transfer device for an ultra-high vacuum magnetic force microscope, the sample transfer method comprises the following steps:

[0025] Vacuuming step: after the sample holder and the needle tip holder are mounted on the first storage member of the sample delivery assembly in the transition box, the first vacuum device is controlled to evacuate the transition box while the transition box remains sealed, so that the transition box is maintained at the same set vacuum degree as the working box;

[0026] Connecting step: controlling the switch structure to open so that the internal cavities of the working box and the transition box are connected;

[0027] Sample delivery step: controlling the sample delivery component to move the first storage element to the transfer position of the working box;

[0028] Tip holder sample transfer step: controlling the gripper of the sample transfer assembly to take the tip holder from the first storage element of the sample delivery assembly and install it on the scanning head of the microscope located at the test position;

[0029] Sample tray transfer step: control the gripper of the sample transfer component to take the sample tray from the first storage component of the sample delivery component and install it on the scanning head of the microscope located at the test position.

[0030] In some embodiments of the present invention, the step of controlling the gripper of the sample transfer assembly to remove the needle tip holder from the first storage element of the sample delivery assembly and install it on the scanning head of the microscope located at the test position includes:

[0031] Controlling the sample transfer component to move its gripper from a first initial position to a transfer position of the working box and obtain the needle tip support;

[0032] After acquiring the needle tip support, controlling the first storage component of the sample delivery assembly to exit the transfer position;

[0033] Control the sample transfer component so that the gripper for obtaining the needle tip holder moves to the test position;

[0034] Controlling the sample transfer assembly so that its gripper mounts the needle tip holder on the scanning head of the microscope located at the test position;

[0035] Control the sample transfer component to return to the first initial position.

[0036] In some embodiments of the present invention, the step of controlling the gripper of the sample transfer assembly to take the sample holder from the first storage element of the sample delivery assembly and install it on the scanning head of the microscope located at the test position includes:

[0037] Controlling the sample transfer component to move the gripper from the first initial position to the transfer position of the working box and obtain the sample tray;

[0038] After acquiring the sample tray, controlling the first storage component of the sample delivery assembly to exit the transfer position;

[0039] Controlling the sample transfer component so that the gripper for obtaining the sample tray moves to the test position;

[0040] Controlling the sample transfer assembly so that its gripper mounts the sample holder on the scanning head of the microscope located at the test position;

[0041] Control the sample transfer component to return to the first initial position.

[0042] In some embodiments of the present invention, the sample transfer method further comprises:

[0043] Sample tray temporary storage steps:

[0044] Controlling the sample transfer component to move its gripper from a first initial position to a test position;

[0045] Control the sample transfer component so that its gripper removes the sample holder installed on the scanning head;

[0046] Control the sample transfer component to move its gripper and sample holder from the test position to the transfer position;

[0047] Controlling the sample storage assembly to move its second storage element from the temporary storage position to the transfer position;

[0048] Controlling the sample transfer component so that its gripper installs the sample tray on the second storage component;

[0049] Controlling the sample transfer component to move its gripper from the intermediate position to the first initial position;

[0050] Controlling the sample storage component to move the second storage element and the sample holder from the transfer position to the temporary storage position;

[0051] Needle tip holder temporary storage steps:

[0052] Controlling the sample transfer component to move its gripper from a first initial position to a test position;

[0053] Control the sample transfer assembly so that its gripper removes the needle tip support installed on the scanning head;

[0054] Control the sample transfer assembly to move its gripper and needle tip support from the test position to the transfer position;

[0055] Controlling the sample storage assembly to move its second storage element from the temporary storage position to the transfer position;

[0056] Controlling the sample transfer component so that its gripper installs the needle tip support on the second storage component;

[0057] Controlling the sample transfer component to move its gripper from the intermediate position to the first initial position;

[0058] The sample storage component is controlled to move its second storage element and the needle tip support from the transfer position to the temporary storage position.

[0059] In the sample transfer device and sample transfer method for an ultra-high vacuum magnetic force microscope of the present invention, compared with the operation of frequently opening the working box in the prior art, the entire working process will not affect the vacuum degree of the working box, will not destroy the established ultra-high vacuum environment, the entire operation process is simple and fast, and the sample transfer is convenient. Different sample holders or needle tip holders can be replaced at the test position inside the working box without opening the working box, which ensures the stability of the vacuum degree of the working box during the sample transfer process.

[0060] Additional advantages, purposes, and features of the present invention will be described in part in the following description, and will become apparent to those skilled in the art after studying the following, or may be learned from the practice of the present invention. The purposes and other advantages of the present invention may be achieved and obtained by the structures specifically indicated in the specification and the accompanying drawings.

[0061] Those skilled in the art will appreciate that the objectives and advantages that can be achieved with the present invention are not limited to the above specific description, and the above and other objectives that can be achieved by the present invention will be more clearly understood from the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0062] The drawings described herein are used to provide a further understanding of the present invention, constitute a part of this application, and do not constitute a limitation of the present invention. The components in the drawings are not drawn to scale, but are only for illustrating the principles of the present invention. In order to facilitate the illustration and description of some parts of the present invention, the corresponding parts in the drawings may be enlarged, that is, they may become larger relative to other components in the exemplary device actually manufactured according to the present invention. In the drawings:

[0063] Figure 1 It is a front view of a sample transfer device for an ultra-high vacuum magnetic force microscope in one embodiment of the present invention.

[0064] Figure 2 It is a left view of a sample transfer device for an ultra-high vacuum magnetic force microscope in one embodiment of the present invention.

[0065] Figure 3 FIG. 1 is a top view of a sample transfer device for an ultra-high vacuum magnetic force microscope in one embodiment of the present invention.

[0066] Figure 4 The figure is a schematic diagram of the three-dimensional structure of a sample transfer device for an ultra-high vacuum magnetic force microscope in one embodiment of the present invention.

[0067] Figure 5 Schematic diagram of a flower fence structure in one embodiment of the present invention.

[0068] Figure 6 Schematic diagram of the structure of a gripper in one embodiment of the present invention.

[0069] Figure 7 The present invention is a flow chart of a sample transfer method for an ultra-high vacuum magnetic force microscope according to an embodiment of the present invention.

[0070] Figure numerals: 1, working box; 11, scanning head; 111, position one; 112, position two; 2, transition box; 21, box door; 31, sample delivery rod; 32, first storage component; 321, supporting plate; 322, internal threaded sleeve; 323, mounting hole; 324, annular groove; 325, spring piece; 41, sample transfer rod; 42, gripper; 51, sample storage rod; 52, second storage component. DETAILED DESCRIPTION

[0071] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the embodiments and the accompanying drawings. Here, the illustrative embodiments of the present invention and their descriptions are used to explain the present invention, but are not intended to limit the present invention.

[0072] It should also be noted that, in order to avoid obscuring the present invention due to unnecessary details, only structures and / or processing steps closely related to the solutions according to the present invention are shown in the accompanying drawings, while other details that are not closely related to the present invention are omitted.

[0073] It should be emphasized that the term “include / comprises” when used herein refers to the presence of features, elements, steps or components, but does not exclude the presence or addition of one or more other features, elements, steps or components.

[0074] It should also be noted that, unless otherwise specified, the term “connection” herein may refer not only to a direct connection but also to an indirect connection involving an intermediate.

[0075] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the accompanying drawings, the same reference numerals represent the same or similar components, or the same or similar steps.

[0076] In order to solve the technical problem in the prior art that the vacuum chamber needs to be frequently opened and closed when placing the sample into a scanning probe microscope, which is time-consuming and easily destroys the vacuum environment, an embodiment of the present invention provides a sample transfer device for an ultra-high vacuum magnetic force microscope. Through the sample transfer device, the sample transfer operation can be performed without destroying the vacuum chamber, which is simple and quick.

[0077] Reference Figures 1 to 3 A first aspect of an embodiment of the present invention provides a sample transfer device for an ultra-high vacuum magnetic force microscope, comprising: a working box 1, a transition box 2, a sample delivery component, a sample transfer component, a sample storage component and a switch structure.

[0078] Scanning probe microscope (SPM) is a general term for scanning tunneling microscope and various new probe microscopes developed on the basis of scanning tunneling microscope (atomic force microscope, electrostatic force microscope, magnetic force microscope, scanning ion conductivity microscope, scanning electrochemical microscope, etc.). It is a surface analysis instrument developed in recent years in the world. It is a high-tech product integrating light, machine and electricity by comprehensively utilizing modern scientific and technological achievements such as optoelectronic technology, laser technology, weak signal detection technology, precision mechanical design and processing, automatic control technology, digital signal processing technology, applied optical technology, computer high-speed acquisition and control and high-resolution image processing technology. The basic working principle of scanning probe microscope is to utilize the interaction between the probe and the atoms and molecules on the sample surface, that is, the various physical fields of interaction formed when the probe and the sample surface are close to the nanometer scale, and obtain the sample surface morphology by detecting the corresponding physical quantities. The scanning probe microscope is mainly composed of five parts: probe, scanner, displacement sensor, controller, detection system and image system. The sample transmission device of this embodiment is related to the working principle and process of the probe and scanner.

[0079] Among them, the working box 1 can be evacuated to a set vacuum degree, and the working box 1 has a test position, a transfer position and a temporary storage position. The test position is used to place the sample holder and the needle tip holder, the transfer position is used for the sample transfer component to take and place the sample holder and the needle tip holder on the sample delivery component and the sample storage component, and the temporary storage position is used to temporarily store the sample holder and the needle tip holder. The working box 1 has a sealing function, which can be connected to the vacuum pumping equipment through a joint to evacuate the cavity inside it to a set vacuum degree. The vacuum pumping equipment can be selected from a mechanical pump, an oil diffusion pump and a turbomolecular pump. Different vacuum pumping equipment combinations are selected for different probes for filtration. The vacuum degree inside the working box 1 is extremely high to prevent dust and other impurities in the air from affecting the imaging and experimental results.

[0080] The transition box 2 is arranged on one side of the working box 1 and can be evacuated to a set vacuum degree. The transition box 2 is used to install the sample holder and the needle tip holder on the sample delivery assembly under the external environment. The transition box 2 is a columnar structure and is connected to the working box 1 through a flange structure to ensure the sealing of the connection part. Similarly, the transition box 2 is connected to the vacuum pumping equipment through a joint. When the sample holder and the needle tip holder are placed inside the transition box 2, the transition box 2 can be evacuated to the same vacuum degree as the set vacuum degree of the working box 1.

[0081] The switch structure is arranged at the connection part between the transition box 2 and the working box 1, and is used to control the opening and closing of the connection part when the transition box 2 is evacuated to the same set vacuum degree as the working box 1. The switch structure can be opened and closed by automatic or manual control. When the switch structure is opened, the first storage element 32 can pass through the connection part between the transition box 2 and the working box 1; when the switch structure is closed, the connection part between the transition box 2 and the working box 1 is closed to ensure the sealing of the working box 1.

[0082] The sample delivery assembly includes a first storage member 32 disposed inside the transition box 2. The first storage member 32 can reciprocate between the transition box 2 and the test position. The first storage member 32 is used to install a sample holder and a needle tip holder. The first storage member 32 is driven by a linear drive mechanism. The first storage member 32 can install at least one sample holder and one needle tip holder.

[0083] The sample transfer assembly includes a gripper 42 disposed inside the working box 1. The gripper 42 can move between a test position and a transfer position. The gripper 42 is used to remove a sample holder or a needle tip holder stored on the first storage element 32 in a vacuum environment and then install it in the test position of the working box 1, or to remove a sample holder or a needle tip holder at the test position in a vacuum environment and then install it on the first storage element 32. The gripper 42 is used to take and place the sample holder and the needle tip holder, and to disassemble and assemble the sample holder and the needle tip holder at the test position. The sample transfer assembly can control the gripper 42 to rotate and move in a straight line. The gripper 42 can grab the sample holder or the needle tip holder through its own rotation. Figure 6 The end of the gripper 42 has two symmetrically arranged L-shaped slots, which can be matched with the holder on the sample holder or the needle tip holder so that the holder is inserted into the L-shaped slots to grab the sample holder or the needle tip holder.

[0084] The sample storage component includes a second storage element 52 disposed inside the working box 1. The second storage element 52 can reciprocate between the transfer position and the temporary storage position. The second storage element 52 is used to temporarily store sample holders and needle tip holders. Frequently used sample holders and needle tip holders can be temporarily stored on the second storage element 52, so that they can be easily installed on the scanning head at any time, avoiding frequent opening of the switch structure. The sample transfer component is also used to remove the sample holder or needle tip holder stored on the second storage element 52 in a vacuum environment and then install it in the test position of the working box 1, or to remove the sample holder or needle tip holder at the test position in a vacuum environment and then install it on the second storage element 52.

[0085] Specifically in the above embodiment, the sample holder and the needle tip holder can be installed on the first storage member 32. The sample holder is used to place the sample, and the needle tip holder is used to place the probe. The sample holder or the needle tip holder can be installed on the first storage member 32 alone, or the sample holder and the needle tip holder can be installed at the same time, or other objects to be transported to the inside of the working box 1 can be installed. When it is necessary to transport the sample holder or the needle tip holder and other objects to be transported to the working box 1, the switch structure is first controlled to be in a closed state, so that the working box 1 and the transition box 2 are completely isolated to prevent the transition box 2 from affecting the vacuum degree of the working box 1 after it is opened. Secondly, the sample holder or the needle tip holder is placed on the first storage member 32, the transition box 2 is closed, and the transition box 2 is evacuated so that the vacuum degree of the transition box 2 is the same as the vacuum degree set in the working box 1. Then, the switch structure is opened to connect the working box 1 and the transition box 2, so that the sample delivery component drives the first storage member 32 to move to the transfer position. Then the gripper 42 of the sample transfer assembly moves to the transfer position to grab the sample holder or the needle tip holder, and installs the sample holder or the needle tip holder at the test position. Finally, the sample delivery assembly drives the first storage element 32 to leave the transfer position, return to the transition box 2, close the switch structure, and complete the sample transfer. After the test is completed, the sample holder or the needle tip holder in the working box 1 can be transferred back to the transition box 2 by reverse operation, and finally moved out of the system.

[0086] Compared with the operation of frequently opening the working box 1 in the prior art, the entire working process of this embodiment will not affect the vacuum degree of the working box 1, will not destroy the ultra-high vacuum environment that has been established, the entire operation process is simple and fast, and it is convenient for the transfer of samples. In addition, the second storage component 52 of the sample storage assembly can temporarily store the sample holder or needle tip holder in the working box 1. For example, the gripper 42 can store the sample holder or needle tip holder grabbed from the first storage component 32 on the second storage component 52. Or the sample holder or needle tip holder removed from the test position can be stored on the second storage component 52. The replacement of different sample holders or needle tip holders at the test position can be completed inside the working box 1 without opening the working box 1, thereby ensuring the stability of the vacuum degree of the working box 1 during the sample transfer process.

[0087] In some embodiments, the sample delivery assembly further includes a sample delivery rod 31, a first storage component 32 is disposed at one end of the sample delivery rod 31, an end of the sample delivery rod 31 close to the first storage component 32 is disposed inside the transition box 2, and the sample delivery rod 31 can translate along its axis and rotate around its axis. The sample transfer assembly further includes a sample transfer rod 41, a gripper 42 is disposed at one end of the sample transfer rod 41, an end of the sample transfer rod 41 close to the gripper 42 is disposed inside the working box 1, the sample transfer rod 41 can translate along its axis and rotate around its axis, and the gripper 42 can grab and release the sample holder and the needle tip holder. The sample storage assembly further includes a sample storage rod 51, a second storage component 52 is disposed at one end of the sample storage rod 51, and an end of the sample storage rod 51 close to the second storage component 52 is disposed inside the working box 1.

[0088] In the above embodiment, referring to Figure 4 The sample delivery rod 31 and the sample transfer rod 41 can be arranged horizontally, and the sample delivery rod 31 and the sample transfer rod 41 are perpendicular to each other and located in the same plane. The sample storage rod 51 can be arranged vertically and perpendicular to the sample delivery rod 31 and the sample transfer rod 41, and the sample storage rod 51 and the sample transfer rod 41 are located in the same plane. The side away from the working box 1 is the front end, and the side close to the working box 1 is the rear end. The intersection of the sample storage rod 51 and the extension line of the sample transfer rod 41 is located at the rear side of the intersection of the extension line of the sample delivery rod 31 and the sample transfer rod 41, and the extension line of the sample transfer rod 41 is opposite to the position of the scanning head. The sample delivery rod 31 can translate along its axis and rotate around its axis, thereby driving the first storage component 32 to transfer between the transition box 2 and the working box 1, and at the same time, it can drive the first storage component 32 to rotate at different angles, which is convenient for the placement and grasping of the sample holder and the needle tip holder. The sample transfer rod 41 can translate along its axis and rotate around its axis, so as to drive the gripper 42 to move between the test position, the transfer position and the temporary storage position, and at the same time drive the gripper 42 to rotate, so as to complete the installation of the sample holder and the needle tip holder. The sample storage rod 51 can at least move along its axis and can also rotate along its axis, so as to facilitate moving the second storage member 52 to the temporary storage position, so as to facilitate the gripper 42 to temporarily store the sample holder and the needle tip holder on the second storage member 52.

[0089] It should be noted that the gripper 42 has a slot, and the sample holder and the needle tip holder have a socket, the slot is adapted to the socket, and after the slot and the socket are engaged, the gripper can drive the sample holder or the needle tip holder to rotate so as to install it on the scanning head 11.

[0090] In some embodiments, reference Figure 1 The transition box 2 has a door 21 and a vacuum pump connection joint. The door 21 is used for taking and placing the sample holder and the needle tip holder. The door 21 is provided with a first observation window. Specifically, the door 21 can be arranged toward the top of the transition box 2. A sealing ring can be provided between the door 21 and the transition box 2 to maintain the sealing between the transition box 2 and the door 21. A locking mechanism can be provided between the door 21 and the transition box 2 to control the opening and closing of the door 21. The first observation window can facilitate the operator to observe the position and state of the sample holder and the needle tip holder on the first storage unit 32.

[0091] In some embodiments, reference Figure 2 and Figure 3, a scanning head 11 is arranged inside the working box 1, and a test position is arranged on the scanning head 11. Specifically, position 111 is used to install the needle tip holder, and position 2 112 is used to install the sample holder. A second observation window is arranged on the working box 1, and the second observation window corresponds to the position of the moving path of the gripper 42. There is a certain angle between the plane where the second observation window is located and the horizontal plane, which is convenient for the operator to observe the situation at the intersection of the sample delivery component, the sample transfer component and the sample storage component, and helps the operator to manually or automatically complete the transmission and installation of the sample holder and the needle tip holder.

[0092] In some embodiments, reference Figure 5 The first storage element 32 and the second storage element 52 are both of a flower fence structure, and the flower fence structure includes a support plate 321, a first mounting portion, and a second mounting portion. The second storage element 52 is always located in a closed cavity inside the working box 1 and is not in contact with the external environment. When the switch structure is kept closed, the sample holder or the needle tip holder can be transferred to the scanning head through the gripper 42, and the transfer process ensures that the vacuum degree in the working box 1 remains unchanged; the first storage element 32 is located in the transition box 2 and when the door of the transition box 2 is opened, the first storage element 32 is in contact with the external environment. After the sample holder or the needle tip holder is installed on the first storage element 32, the door is closed to evacuate the transition box 2 to the same vacuum degree as the set vacuum degree in the working box 1, and the switch structure is opened, and the sample holder or the needle tip holder on the first storage element 32 can be installed on the scanning head through the gripper 42, which maximizes the guarantee that the vacuum environment in the working box 1 is not affected.

[0093] One end of the support plate 321 of the flower bar structure is fixedly connected to the end of the sample delivery rod 31 or the sample storage rod 51, and the first mounting portion and the second mounting portion are both arranged on the support plate 321. The first mounting portion includes an internal threaded sleeve 322, which is fixedly arranged on the support plate 321 and is used to install the needle tip holder. The second mounting portion includes a mounting hole 323, an annular groove 324 and a spring piece 325 arranged on the support plate 321, the annular groove 324 is coaxial with the mounting hole 323 and is arranged at the edge of the mounting hole 323, the spring piece 325 is fixedly installed on the support plate 321, and the elastic part of the spring piece 325 corresponds to the position of the annular groove 324, which is used to install the sample holder.

[0094] In the above embodiment, the first mounting portion is used to mount the needle tip holder, and the second mounting portion is used to mount the sample holder. The needle tip holder has an external thread that can be screwed into the internal thread sleeve 322 to achieve the installation of the needle tip holder. The sample holder has a holder that can be inserted into the annular groove 324, and the spring 325 can press the holder in the annular groove 324 to achieve the installation and fixation of the sample holder. The spring 325 can be made of a copper sheet, and the spring 325 can be fixed to the support plate 321 by screws.

[0095] In some embodiments, the sample delivery rod 31, the sample transfer rod 41 and the sample storage rod 51 are all magnetic rods, and the magnetic rod includes an operating part and a working part, the operating part is arranged outside the working box 1 or the transition box 2, and the working part is arranged inside the working box 1 or the transition box 2; the operating part and the working part of the magnetic rod are connected by magnetic transmission, and the action of the operating part can control the working part to make corresponding actions. The use of the magnetic rod can facilitate manual operation and maintain the vacuum environment in the box. The switch structure is a plug valve, and the opening and closing of the plug valve can be controlled manually or automatically. Alternatively, the motor can be used to drive the magnetic rod to move, thereby improving the automation of the experimental process, saving manpower, and improving accuracy.

[0096] It should be noted that the working box 1 is a partial structure of the ultra-high vacuum magnetic force microscope. The working box 1 is detachably connected to the transition box 2. The working box 1 has a test cavity, a transfer cavity, a transition box connection cavity, a sample storage component installation cavity and a sample transfer component installation cavity. The test cavity and the transfer cavity are interconnected. The transfer cavity, the transition box connection cavity, the storage component installation cavity and the sample transfer component installation cavity are interconnected. Figure 4 , the transfer chamber is located at the front end of the test chamber, the transition box connection chamber is located on the right side of the transfer chamber, the sample delivery component installation chamber is located at the front end of the transfer chamber, and the sample storage component installation chamber is located at the top of the transfer chamber; the side of the transition box 2 close to the working box 1 has a connection structure for connecting with the transition box connection chamber, and the side of the transition box 2 away from the working box 1 has a sample delivery component installation chamber for installing the sample delivery component. When conducting a detection experiment requiring ultra-high vacuum, the working box 1 and the transition box 2 are connected together, and when conducting a detection experiment that does not require ultra-high vacuum, the working box 1 and the transition box 2 can be separated. The transfer chamber, transition box connection chamber, sample storage component installation chamber and sample transmission component installation chamber of the working box 1 can be isolated from the external environment to ensure the sealing of the working box 1.

[0097] The sample transfer device for ultra-high vacuum magnetic force microscope according to the embodiment of the present invention has the following advantages and technical effects:

[0098] 1. High efficiency: It reduces the vacuum loss during the transmission process and improves the experimental efficiency.

[0099] 2. Easy operation: The manual control method is simple and intuitive, easy for operators to master.

[0100] 3. High precision: The design of magnetic rod and card slot holder improves the accuracy of sample and needle tip during transmission.

[0101] 4. Versatility: The device supports the transmission of a variety of tip holders and sample holders, and is suitable for a variety of scanning probe microscopy (SPM) experimental requirements.

[0102] Reference Figure 7A second aspect of an embodiment of the present invention provides a sample transfer method for an ultra-high vacuum magnetic force microscope. Based on a sample transfer device for an ultra-high vacuum magnetic force microscope, the sample transfer method comprises the following steps:

[0103] S1, vacuuming step: after the sample holder and the needle tip holder are mounted on the first storage member of the sample delivery assembly in the transition box, the first vacuum device is controlled to vacuum the transition box while the transition box remains sealed, so that the transition box is maintained at the same set vacuum degree as the working box;

[0104] S2, connecting step: controlling the switch structure to open so that the internal cavities of the working box and the transition box are connected;

[0105] S3, sample delivery step: controlling the sample delivery component to move its first storage element to a transfer position of the working box;

[0106] S4, needle tip holder sample transfer step: controlling the gripper of the sample transfer component to take the needle tip holder from the first storage component of the sample delivery component and install it on the scanning head of the microscope located at the test position;

[0107] S5, sample tray transfer step: control the gripper of the sample transfer component to take the sample tray from the first storage component of the sample delivery component and install it on the scanning head of the microscope located at the test position.

[0108] The sample transfer method in the above embodiment can transfer the sample holder and the needle tip holder to the inside of the working box 1 without destroying the original vacuum environment of the working box 1, and enable the sample delivery component to transfer the sample holder and the needle tip holder transmitted from the external environment to the test position for installation, thereby realizing the transfer and installation of the sample holder and the needle tip holder. The vacuum degree of the working box 1 is maintained throughout the whole process, and the operation is simple and quick.

[0109] In some embodiments, the step of controlling the gripper of the sample transfer component to remove the needle tip holder from the first storage component of the sample delivery component and install it on the scanning head of the microscope located at the test position includes: controlling the sample transfer component to move its gripper from the first initial position (located in the sample transfer component installation cavity) to the transfer position of the working box and obtain the needle tip holder; after obtaining the needle tip holder, controlling the first storage component of the sample delivery component to exit the transfer position; controlling the sample transfer component to move the gripper that obtains the needle tip holder to the test position; controlling the sample transfer component to install the needle tip holder on the scanning head of the microscope located at the test position; and controlling the sample transfer component to return to the first initial position. In the above embodiment, the needle tip holder has a threaded section and a seat section, and the L-shaped slot on the gripper is controlled to be aligned with the seat section first, and the gripper is controlled to move in a direction close to the needle tip holder, and then the gripper is controlled to rotate so that the L-shaped slot is engaged with the seat section, and the gripper is controlled to rotate continuously, so that the needle tip holder can be removed from the first storage component, and the step of installing the needle tip holder on the scanning head is the opposite of the above step process.

[0110] In some embodiments, the step of controlling the gripper of the sample transfer component to remove the sample holder from the first storage component of the sample delivery component and install it on the scanning head of the microscope located at the test position includes: controlling the sample transfer component so that its gripper moves from the first initial position to the transfer position of the working box and acquires the sample holder; after acquiring the sample holder, controlling the first storage component of the sample delivery component to exit the transfer position; controlling the sample transfer component so that its gripper that acquires the sample holder moves to the test position; controlling the sample transfer component so that its gripper installs the sample holder on the scanning head of the microscope located at the test position; and controlling the sample transfer component to return to the first initial position.

[0111] In the above embodiment, the sample holder has a first holder section and a second holder section. The L-shaped slot on the control gripper is first aligned with the first holder section, the control gripper is moved in a direction close to the sample holder, and then the control gripper is rotated to engage the L-shaped slot with the first holder section. The control gripper is rotated continuously to remove the sample holder from the first storage element. The steps of installing the needle tip holder on the scanning head are opposite to the above steps. Specifically, the operator can push the sample delivery rod 31 manually or by a motor to make the first storage element 32 reach the transfer position. The vacuum environment in the working box 1 will not be damaged during the entire operation process.

[0112] In some embodiments, the sample transfer method further includes a sample holder temporary storage step and a needle tip holder temporary storage step.

[0113] Among them, the sample holder temporary storage step includes: controlling the sample transfer component to move its gripper from the first initial position to the test position; controlling the sample transfer component to remove the sample holder installed on the scanning head; controlling the sample transfer component to move its gripper and the sample holder from the test position to the transfer position; controlling the sample storage component to move its second storage component from the temporary storage position (located in the sample storage component installation cavity) to the transfer position; controlling the sample transfer component to install the sample holder on the second storage component; controlling the sample transfer component to move its gripper from the transfer position to the first initial position; controlling the sample storage component to move its second storage component and the sample holder from the transfer position to the temporary storage position.

[0114] Among them, the needle tip support temporary storage step includes: controlling the sample transfer component to move its gripper from the first initial position to the test position; controlling the sample transfer component to remove the needle tip support installed on the scanning head; controlling the sample transfer component to move its gripper and the needle tip support from the test position to the transfer position; controlling the sample storage component to move its second storage component from the temporary storage position to the transfer position; controlling the sample transfer component to install the needle tip support on the second storage component; controlling the sample transfer component to move its gripper from the transfer position to the first initial position; controlling the sample storage component to move its second storage component and the needle tip support from the transfer position to the temporary storage position.

[0115] Specifically, the operator can manually or through a motor drive the sample storage rod 51 to drive the second storage component 52 to move to the transfer position, and then control the sample transfer rod 41 to drive the gripper 42 to move to the transfer position; rotate the sample transfer rod 41, so that the sample transfer rod 41 drives the gripper 42 to rotate and install the sample holder and the needle tip holder on the second storage component 52; finally move the sample storage rod 51 to drive the second storage component 52 out of the temporary storage position to prevent interference with the movement path of the gripper 42. The sample transfer method of the above embodiment will not destroy the original vacuum environment of the working box 1, and the sample storage component can temporarily store frequently used sample holders and needle tip holders, and different sample holders and needle tip holders can be installed at the test position, and experiments of multiple samples or various types of scanning probe microscope (SPM) experiments can be completed without frequently opening the switch structure on the working box 1.

[0116] It should be clear that the present invention is not limited to the specific configuration and processing described above and shown in the figures. For the sake of simplicity, a detailed description of the known method is omitted here. In the above embodiments, several specific steps are described and shown as examples. However, the method process of the present invention is not limited to the specific steps described and shown, and those skilled in the art can make various changes, modifications and additions, or change the order between the steps after understanding the spirit of the present invention.

[0117] In the present invention, features described and / or illustrated for one embodiment may be used in the same or similar manner in one or more other embodiments, and / or combined with features of other embodiments or replace features of other embodiments.

[0118] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the embodiments of the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A sample transfer device for an ultra-high vacuum magnetic force microscope, characterized in that: include: A working box (1), a transition box (2), a sample delivery component, a sample transmission component, a sample storage component and a switch structure; The working box (1) can be evacuated to a set vacuum degree, and the working box (1) has a test position, a transfer position and a temporary storage position, the test position is used to place a sample holder and a needle tip holder, the transfer position is used for the sample transfer component to take and place the sample holder and the needle tip holder on the sample delivery component and the sample storage component, and the temporary storage position is used to temporarily store the sample holder and the needle tip holder; The transition box (2) is arranged on one side of the working box (1) and can be evacuated to a set vacuum degree. The transition box (2) is used to install the sample holder and the needle tip holder on the sample delivery component under the external environment; The switch structure is arranged at the connection part between the transition box (2) and the working box (1), and is used to control the opening and closing of the connection part when the transition box (2) is evacuated to the same set vacuum degree as the working box (1); The sample delivery assembly comprises a first storage member (32) arranged inside the transition box (2), the first storage member (32) being capable of reciprocating between the transition box (2) and the test position, and the first storage member (32) being used for installing a sample holder and a needle tip holder; The sample transfer assembly comprises a gripper (42) arranged inside the working box (1), and the gripper (42) can move between the test position and the transfer position, and is used to remove the sample holder or needle tip holder stored on the first storage element (32) under a vacuum environment and then install it on the test position of the working box (1), or to remove the sample holder or needle tip holder at the test position under a vacuum environment and then install it on the first storage element (32); The sample storage component comprises a second storage element (52) arranged inside the working box (1), the second storage element (52) can move back and forth between the transfer position and the temporary storage position, and the second storage element (52) is used to temporarily store sample holders and needle tip holders; the sample transfer component is also used to remove the sample holder or needle tip holder stored on the second storage element (52) in a vacuum environment and install it in the test position of the working box (1), or to remove the sample holder or needle tip holder at the test position in a vacuum environment and install it on the second storage element (52).

2. The sample transfer device for ultra-high vacuum magnetic force microscope according to claim 1, characterized in that: The sample delivery assembly further comprises a sample delivery rod (31), the first storage element (32) being arranged at one end of the sample delivery rod (31), an end of the sample delivery rod (31) close to the first storage element (32) being arranged inside the transition box (2), and the sample delivery rod (31) being capable of translational movement along its axis and rotation around its axis; The sample transfer assembly further comprises a sample transfer rod (41), the gripper (42) is arranged at one end of the sample transfer rod (41), and the end of the sample transfer rod (41) close to the gripper (42) is arranged inside the working box (1), the sample transfer rod (41) can translate along its axis and rotate around its axis, and the gripper (42) can grasp and release the sample holder and the needle tip holder; The sample storage assembly further comprises a sample storage rod (51), the second storage element (52) being arranged at one end of the sample storage rod (51), and an end of the sample storage rod (51) close to the second storage element (52) being arranged inside the working box (1).

3. The sample transfer device for ultra-high vacuum magnetic force microscope according to claim 1, characterized in that: The transition box (2) comprises a box door (21) and a vacuum pump connection joint. The box door (21) is used for taking in and placing a sample holder and a needle tip holder. The box door (21) is provided with a first observation window.

4. The sample transfer device for ultra-high vacuum magnetic force microscope according to claim 1, characterized in that: A scanning head (11) is arranged inside the working box (1), and the scanning head (11) has the testing position; a second observation window is arranged on the working box (1), and the second observation window corresponds to the position of the moving path of the gripper (42).

5. The sample transfer device for ultra-high vacuum magnetic force microscope according to claim 2, characterized in that: The first storage element (32) and the second storage element (52) are both flower bar structures, and the flower bar structure comprises a supporting plate (321), a first mounting portion and a second mounting portion; Wherein, one end of the supporting plate (321) is fixedly connected to the end of the sample delivery rod (31) or the sample storage rod (51), and the first mounting portion and the second mounting portion are both arranged on the supporting plate (321); The first mounting portion comprises an internal thread sleeve (322), and the internal thread sleeve (322) is fixedly arranged on the support plate (321) and is used for mounting the needle tip support; The second mounting portion comprises a mounting hole (323), an annular groove (324) and a spring sheet (325) arranged on the supporting plate (321); the annular groove (324) is coaxial with the mounting hole (323) and is arranged at the edge of the mounting hole (323); the spring sheet (325) is fixedly mounted on the supporting plate (321); the elastic portion of the spring sheet (325) corresponds to the position of the annular groove (324) and is used for mounting a sample holder.

6. The sample transfer device for ultra-high vacuum magnetic force microscope according to claim 2, characterized in that: The sample delivery rod (31), the sample transfer rod (41) and the sample storage rod (51) are all magnetic rods, and the magnetic rods include an operating part and a working part, the operating part is arranged outside the working box (1) or the transition box (2), and the working part is arranged inside the working box (1) or the transition box (2); The switch structure is a gate valve; The working box (1) is a partial structure of an ultra-high vacuum magnetic force microscope. The working box (1) is detachably connected to the transition box (2). The working box (1) comprises a test cavity, a transfer cavity, a transition box connecting cavity, a sample delivery component installation cavity and a sample transfer component installation cavity. The test cavity and the transfer cavity are interconnected. The transfer cavity, the transition box connecting cavity, the sample delivery component installation cavity and the sample transfer component installation cavity are interconnected.

7. A sample transfer method for an ultra-high vacuum magnetic force microscope, based on the sample transfer device for an ultra-high vacuum magnetic force microscope according to any one of claims 1 to 6, characterized in that: The sample transfer method comprises the following steps: Vacuuming step: after the sample holder and the needle tip holder are mounted on the first storage member of the sample delivery assembly in the transition box, the first vacuum device is controlled to evacuate the transition box while the transition box remains sealed, so that the transition box is maintained at the same set vacuum degree as the working box; Connecting step: controlling the switch structure to open so that the internal cavities of the working box and the transition box are connected; Sample delivery step: controlling the sample delivery component to move the first storage element to the transfer position of the working box; Tip holder sample transfer step: controlling the gripper of the sample transfer assembly to take the tip holder from the first storage element of the sample delivery assembly and install it on the scanning head of the microscope located at the test position; Sample tray transfer step: control the gripper of the sample transfer component to take the sample tray from the first storage component of the sample delivery component and install it on the scanning head of the microscope located at the test position.

8. The sample transfer method for ultra-high vacuum magnetic force microscope according to claim 7, characterized in that: The step of controlling the gripper of the sample transfer assembly to take the needle tip holder from the first storage member of the sample delivery assembly and install it on the scanning head of the microscope located at the test position comprises: Controlling the sample transfer component to move its gripper from a first initial position to a transfer position of the working box and obtain the needle tip support; After acquiring the needle tip support, controlling the first storage component of the sample delivery assembly to exit the transfer position; Control the sample transfer component so that the gripper for obtaining the needle tip holder moves to the test position; Controlling the sample transfer assembly so that its gripper mounts the needle tip holder on the scanning head of the microscope located at the test position; Control the sample transfer component to return to the first initial position.

9. The sample transfer method for ultra-high vacuum magnetic force microscope according to claim 7, characterized in that: The step of controlling the gripper of the sample transfer component to take the sample holder from the first storage component of the sample delivery component and install it on the scanning head of the microscope located at the test position includes: Controlling the sample transfer component to move the gripper from the first initial position to the transfer position of the working box and obtain the sample tray; After acquiring the sample tray, controlling the first storage component of the sample delivery assembly to exit the transfer position; Controlling the sample transfer component to move the gripper for obtaining the sample tray to a test position; Controlling the sample transfer assembly so that its gripper mounts the sample holder on the scanning head of the microscope located at the test position; Control the sample transfer component to return to the first initial position.

10. The sample transfer method for ultra-high vacuum magnetic force microscope according to claim 7, characterized in that: The sample transfer method further comprises: Sample tray temporary storage steps: Controlling the sample transfer component to move its gripper from a first initial position to a test position; Control the sample transfer component so that its gripper removes the sample holder installed on the scanning head; Control the sample transfer component to move its gripper and sample holder from the test position to the transfer position; Controlling the sample storage assembly to move its second storage element from the temporary storage position to the transfer position; Controlling the sample transfer component so that its gripper installs the sample tray on the second storage component; Controlling the sample transfer component to move its gripper from the intermediate position to the first initial position; Control the sample storage component to move the second storage element and the sample holder from the transfer position to the temporary storage position; needle tip holder temporary storage steps: Controlling the sample transfer component to move its gripper from a first initial position to a test position; Control the sample transfer assembly so that its gripper removes the needle tip support installed on the scanning head; Control the sample transfer assembly to move its gripper and needle tip support from the test position to the transfer position; Controlling the sample storage assembly to move its second storage element from the temporary storage position to the transfer position; Controlling the sample transfer component so that its gripper installs the needle tip support on the second storage component; Controlling the sample transfer component to move its gripper from the intermediate position to the first initial position; The sample storage component is controlled to move its second storage element and the needle tip support from the transfer position to the temporary storage position.

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