Heating device of vacuum evaporator

Abstract

The heating device comprises a cavity, the cavity is defined by a top plate, a surrounding plate and a bottom plate, a side wall anti-sticking plate is arranged on the inner side of the surrounding plate and surrounds the upper portion of the cavity by a circle, a first anti-sticking plate is arranged below the top plate, and the outer edge of the first anti-sticking plate is connected with the top of the side wall anti-sticking plate; a heating device is arranged on the first protective plate and the side wall protective plate and comprises a plurality of first heating wires and a plurality of second heating wires, the first heating wires are uniformly and densely distributed on the bottom surface of the first protective plate, the second heating wires are uniformly and densely distributed on the inner wall of the side wall protective plate, and positive and negative electrodes of the same heating wire are connected with positive and negative electrodes of a group of wiring terminals; a plurality of groups of wiring terminals are arranged at the top of the first anti-adhesion plate, and the first heating wire and the second heating wire are heated to a certain temperature to generate heat radiation so as to heat the substrate, so that the heating is more uniform while light pollution is avoided, and the detection of the light transmittance of the substrate is not influenced.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum evaporation machines, and more specifically, to a heating device for a vacuum evaporation machine. Background Art

[0002] A vacuum evaporator is a device that evaporates materials by heating in a relatively high vacuum environment, so that the evaporated materials are used to coat the surface of a wafer substrate. During coating, the substrate needs to reach a certain temperature to achieve a good coating effect.

[0003] There are still some problems in the use of vacuum coating machines currently on the market. For example, the prior art CN118374774A discloses a vacuum coating machine with uniform material distribution. Heating lamps are installed on the anti-fouling plates on the inner walls of the left and right sides of the coating cavity. The position of the heating lamps can be adjusted up and down, but the heating range of the heating lamps in this solution is prone to unevenness, and optical inspection is required during the coating process to detect the transmittance of the substrate. The use of heating lamps will cause light pollution and affect the transmittance.

[0004] Therefore, a replacement device for a heating lamp is needed, which can heat evenly without generating light pollution. Summary of the invention

[0005] In view of this, in order to solve the problem in the prior art that the heating range of the heating lamp is easily uneven, and optical inspection is required during the coating process to detect the transmittance of the substrate, and the use of the heating lamp will cause light pollution and affect the transmittance, the present invention proposes a heating device for a vacuum evaporator, which avoids light pollution by generating thermal radiation heating through the heating wire, and at the same time, the heating wires are evenly distributed to make the heating more uniform, and does not affect the upper optical inspection of the substrate transmittance.

[0006] A heating device for a vacuum evaporation machine, comprising a cavity, wherein the cavity is surrounded by a top plate 11, a surrounding plate 12, and a bottom plate 13, wherein a side wall anti-fog plate 3 is provided on the inner side of the surrounding plate 12, wherein the side wall anti-fog plate 3 is arranged around the upper part of the cavity, wherein a first anti-fog plate 2 is provided below the top plate 11, wherein the outer edge of the first anti-fog plate 2 is connected to the top of the side wall anti-fog plate 3, wherein the first anti-fog plate 2 and the side wall anti-fog plate 3 are provided with a heating device, wherein the heating device comprises a plurality of first heating wires 22 and a plurality of second heating wires 31, wherein the first heating wires 22 are evenly and densely distributed. On the bottom surface of the first anti-fouling plate 2, the second heating wires 31 are evenly and densely distributed on the inner wall of the side wall anti-fouling plate 3. Each of the first heating wires 22 and the second heating wires 31 is a continuous S-shaped one end of which is a positive pole and the other end is a negative pole. The positive and negative poles of the same heating wire are connected to the positive and negative poles of a group of wiring terminals 5. A plurality of groups of wiring terminals 5 are provided on the top of the first anti-fouling plate 2. The first heating wires 22 and the second heating wires 31 are heated to a certain temperature to generate heat radiation, thereby heating the substrate, avoiding light pollution and making the heating more uniform without affecting the detection of the light transmittance of the substrate.

[0007] Furthermore, the first anti-scratch plate 2 and the side wall anti-scratch plate 3 are an integrally formed structure.

[0008] Furthermore, the multiple first heating wires 22 are evenly divided into a plurality of fan-shaped arrangements centered on the center of the first anti-adhesion plate 2, and the S-shape of each first heating wire 22 is an equally divided fan-shaped arrangement. A first wiring hole 23 is provided on the first anti-adhesion plate 2 near the positive pole of each first heating wire 22, and a second wiring hole 24 is provided near the negative pole of each first heating wire 22. The positive and negative poles of the first heating wire 22 pass through the first wiring hole 23 and the second wiring hole 24 to connect to the corresponding wiring terminals 5.

[0009] In some embodiments, the multiple first heating wires 22 are arranged in an S shape as a whole. Except for the first and last first heating wires 22, the starting end of each first heating wire 22 is close to but not connected to the ending end of the adjacent first heating wire 22. A first wiring hole 23 is provided near the positive pole of each first heating wire 22, and a second wiring hole 24 is provided near the negative pole of each first heating wire 22. The positive and negative poles of the first heating wire 22 pass through the first wiring hole 23 and the second wiring hole 24 to connect to the corresponding wiring terminals 5.

[0010] Furthermore, the S-shape of the multiple second heating wires 31 is a rectangle with equal width at the top and bottom, and a third wiring hole 32 is provided on the side wall anti-attachment plate 3 near the positive pole of the second heating wire 31, and a fourth wiring hole 33 is provided on the side wall anti-attachment plate 3 near the negative pole of the second heating wire 31. The positive and negative poles of the second heating wire 31 pass through the third wiring hole 32 and the fourth wiring hole 33 to connect to the corresponding wiring terminals 5.

[0011] Furthermore, a plurality of heating wire fixing plates 34 are evenly spaced apart on the two upper and lower adjacent rows of second heating wires 31 , and the heating wire fixing plates 34 are connected to the side wall anti-slip plate 3 by screws.

[0012] Furthermore, two to three second heating wires 31 constitute a heating area, and at least three heating areas are provided on the side wall anti-sticking plate 3 to enclose a circular heating area. The longitudinal coverage range of the circular heating area completely covers the plating pot from the top to the bottom of the plating pot, so as to make full use of the space and maximize the heating efficiency.

[0013] Furthermore, an upward folded edge 21 is provided on the edge of the first anti-slip plate 2 to increase the rigidity of the first anti-slip plate 2 .

[0014] Furthermore, a second anti-deposition plate 4 is provided above the first anti-deposition plate 2 to prevent the film material from reversely settling and contaminating the material during the evaporation process.

[0015] Furthermore, at least three groups of upper and lower corresponding through holes are provided on the top plate 11 and the second anti-fouling plate 4 for the connection terminals 5 to pass through. Preferably, each heating area corresponds to a group of through holes to ensure uniform heating.

[0016] Furthermore, each through hole on the top plate 11 is connected to a flange 6, a circle of pressing blocks 61 is arranged above the flange 6, each pressing block 61 is connected to the positive or negative pole of a heating wire, an annular water channel is arranged in the middle of the flange 6, and a first cooling pipe 7 is arranged above the middle of the flange 6, and cooling water is passed through the first cooling pipe 7 to cool the terminal 5.

[0017] Furthermore, a second cooling pipe 8 is disposed outside the top plate 11, and a third cooling pipe 9 is disposed outside the enclosure 12, so as to quickly cool the cavity when the temperature of the cavity is too high.

[0018] Furthermore, the area of ​​the first heating wire 22 is smaller than that of the second heating wire 31 , and the density is increased, thereby enhancing the heating efficiency and compensating for the large temperature difference at the top of the cavity caused by water cooling.

[0019] Furthermore, a middle portion of the first anti-slip plate 2 and the second anti-slip plate 4 is provided with an avoidance opening 10 for avoiding the upper optical detection structure.

[0020] Beneficial effects of the present invention: The present invention proposes a heating device for a vacuum evaporation machine, comprising a cavity, wherein the cavity is surrounded by a top plate 11, a surrounding plate 12, and a bottom plate 13, wherein a side wall anti-fog plate 3 is arranged on the inner side of the surrounding plate 12, wherein the side wall anti-fog plate 3 is arranged around the upper part of the cavity, wherein a first anti-fog plate 2 is arranged below the top plate 11, wherein the outer edge of the first anti-fog plate 2 is connected to the top of the side wall anti-fog plate 3, wherein a heating device is arranged on the first anti-fog plate 2 and the side wall anti-fog plate 3, wherein the heating device comprises a plurality of first heating wires 22 and a plurality of second heating wires 31, wherein the first heating wires 22 The first anti-fouling plate 2 is evenly and densely distributed on the bottom surface of the second heating wire 31, and the side wall anti-fouling plate 3 is evenly and densely distributed on the inner wall of the side wall anti-fouling plate 3. Each of the first heating wire 22 and the second heating wire 31 is a continuous S-shaped one end of which is positive and the other end is negative. The positive and negative poles of the same heating wire are connected to the positive and negative poles of a group of wiring terminals 5. A plurality of groups of wiring terminals 5 are provided on the top of the first anti-fouling plate 2. The first heating wire 22 and the second heating wire 31 are heated to a certain temperature to generate heat radiation to heat the substrate, thereby avoiding light pollution and making the heating more uniform without affecting the detection of the light transmittance of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a cross-sectional view of the chamber of the vacuum evaporation machine of the present invention.

[0022] Figure 2 This is a partial exploded structural diagram of the heating device of the vacuum evaporation machine of the present invention.

[0023] Figure 3 It is a partial exploded view of the heating device of the vacuum evaporation machine of the present invention.

[0024] Figure 4 It is an upper cross-sectional view of the heating device of the vacuum evaporation machine of the present invention.

[0025] Figure 5 This is the first heating wire arrangement diagram of Example 1 of the present invention.

[0026] Figure 6 This is the first heating wire arrangement diagram of Example 2 of the present invention.

[0027] Figure 7 This is an external structural diagram of the heating device of the vacuum evaporation machine of the present invention.

[0028] Main component symbols

[0029] Top plate 11, enclosure 12, bottom plate 13, first anti-stick plate 2, folded edge 21, first heating wire 22, first wiring hole 23, second wiring hole 24, side wall anti-stick plate 3, second heating wire 31, third wiring hole 32, fourth wiring hole 33, heating wire fixing plate 34, second anti-stick plate 4, wiring terminal 5, flange 6, pressing block 61, first cooling tube 7, second cooling tube 8, third cooling tube 9, avoidance opening 10.

[0030] The following specific implementation manner will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION Embodiment 1:

[0031] A heating device for a vacuum evaporation machine, comprising a cavity, wherein the cavity is surrounded by a top plate 11, a surrounding plate 12, and a bottom plate 13, wherein a side wall anti-fog plate 3 is provided on the inner side of the surrounding plate 12, wherein the side wall anti-fog plate 3 is arranged around the upper part of the cavity, wherein a first anti-fog plate 2 is provided below the top plate 11, wherein the outer edge of the first anti-fog plate 2 is connected to the top of the side wall anti-fog plate 3, wherein the first anti-fog plate 2 and the side wall anti-fog plate 3 are provided with a heating device, wherein the heating device comprises a plurality of first heating wires 22 and a plurality of second heating wires 31, wherein the first heating wires 22 are evenly and densely distributed. On the bottom surface of the first anti-fouling plate 2, the second heating wires 31 are evenly and densely distributed on the inner wall of the side wall anti-fouling plate 3. Each of the first heating wires 22 and the second heating wires 31 is a continuous S-shaped one end of which is a positive pole and the other end is a negative pole. The positive and negative poles of the same heating wire are connected to the positive and negative poles of a group of wiring terminals 5. A plurality of groups of wiring terminals 5 are provided on the top of the first anti-fouling plate 2. The first heating wires 22 and the second heating wires 31 are heated to a certain temperature to generate heat radiation, thereby heating the substrate, avoiding light pollution and making the heating more uniform without affecting the detection of the light transmittance of the substrate.

[0032] The first anti-slip plate 2 and the side wall anti-slip plate 3 are an integrally formed structure.

[0033] The multiple first heating wires 22 are evenly divided into a plurality of fan-shaped arrangements with the center of the first anti-adhesion plate 2 as the center. The S-shape of each first heating wire 22 is an equally divided fan-shaped arrangement. The area of ​​the first heating wire 22 is smaller than that of the second heating wire 31, and the density is enhanced to compensate for the larger temperature difference at the top of the cavity. A first wiring hole 23 is provided on the first anti-adhesion plate 2 near the positive pole of each first heating wire 22, and a second wiring hole 24 is provided near the negative pole of each first heating wire 22. The positive and negative poles of the first heating wire 22 pass through the first wiring hole 23 and the second wiring hole 24 to connect to the corresponding wiring terminals 5.

[0034] The S-shape of the plurality of second heating wires 31 is a rectangle with equal width at the top and bottom. A third wiring hole 32 is provided on the side wall anti-attachment plate 3 near the positive pole of the second heating wire 31, and a fourth wiring hole 33 is provided on the side wall anti-attachment plate 3 near the negative pole of the second heating wire 31. The positive and negative poles of the second heating wire 31 pass through the third wiring hole 32 and the fourth wiring hole 33 to connect to the corresponding wiring terminals 5.

[0035] A plurality of heating wire fixing plates 34 are evenly spaced on the two upper and lower adjacent rows of second heating wires 31 , and the heating wire fixing plates 34 are connected to the side wall anti-slip plate 3 by screws.

[0036] Two to three second heating wires 31 form a heating area, and at least three heating areas are provided on the side wall anti-sticking plate 3 to enclose a circular heating area. The longitudinal coverage range of the circular heating area completely covers the plating pot from the top to the bottom of the plating pot, so as to make full use of the space and maximize the heating efficiency.

[0037] An upward folded edge 21 is provided on the edge of the first anti-slip plate 2 to increase the rigidity of the first anti-slip plate 2 .

[0038] A second anti-deposition plate 4 is provided above the first anti-deposition plate 2 to prevent the film material from reversely settling and contaminating the material during the evaporation process.

[0039] The top plate 11 and the second anti-fouling plate 4 are provided with at least two groups of upper and lower corresponding through holes for the connection terminals 5 to pass through. Preferably, each heating area corresponds to a group of through holes to ensure uniform heating.

[0040] Each through hole on the top plate 11 is connected to a flange 6, a circle of pressing blocks 61 is arranged above the flange 6, each pressing block 61 is connected to the positive or negative pole of a heating wire, an annular water channel is arranged in the middle of the flange 6, and a first cooling pipe 7 is arranged above the middle of the flange 6, and cooling water is passed through the first cooling pipe 7 to cool the terminal 5.

[0041] A second cooling pipe 8 is disposed outside the top plate 11 , and a third cooling pipe 9 is disposed outside the enclosure 12 , so as to quickly cool the cavity when the temperature of the cavity is too high.

[0042] The area of ​​the first heating wire 22 is smaller than that of the second heating wire 31 , and the density is increased, so that the heating efficiency is enhanced to compensate for the large temperature difference caused by water cooling at the top of the cavity.

[0043] The first anti-slip plate 2 and the second anti-slip plate 4 are provided with avoidance openings 10 in the middle thereof for avoiding the upper optical detection structure.

[0044] Beneficial effects of the present invention: The present invention proposes a heating device for a vacuum evaporation machine, comprising a cavity, wherein the cavity is surrounded by a top plate 11, a surrounding plate 12, and a bottom plate 13, wherein a side wall anti-fog plate 3 is arranged on the inner side of the surrounding plate 12, wherein the side wall anti-fog plate 3 is arranged around the upper part of the cavity, wherein a first anti-fog plate 2 is arranged below the top plate 11, wherein the outer edge of the first anti-fog plate 2 is connected to the top of the side wall anti-fog plate 3, wherein a heating device is arranged on the first anti-fog plate 2 and the side wall anti-fog plate 3, wherein the heating device comprises a plurality of first heating wires 22 and a plurality of second heating wires 31, wherein the first heating wires 22 The first anti-fouling plate 2 is evenly and densely distributed on the bottom surface of the second heating wire 31, and the side wall anti-fouling plate 3 is evenly and densely distributed on the inner wall of the side wall anti-fouling plate 3. Each of the first heating wire 22 and the second heating wire 31 is a continuous S-shaped one end of which is positive and the other end is negative. The positive and negative poles of the same heating wire are connected to the positive and negative poles of a group of wiring terminals 5. A plurality of groups of wiring terminals 5 are provided on the top of the first anti-fouling plate 2. The first heating wire 22 and the second heating wire 31 are heated to a certain temperature to generate heat radiation to heat the substrate, thereby avoiding light pollution and making the heating more uniform without affecting the detection of the light transmittance of the substrate. Embodiment 2:

[0045] A heating device for a vacuum evaporation machine, comprising a cavity, wherein the cavity is surrounded by a top plate 11, a surrounding plate 12, and a bottom plate 13, wherein a side wall anti-fog plate 3 is provided on the inner side of the surrounding plate 12, wherein the side wall anti-fog plate 3 is arranged around the upper part of the cavity, wherein a first anti-fog plate 2 is provided below the top plate 11, wherein the outer edge of the first anti-fog plate 2 is connected to the top of the side wall anti-fog plate 3, wherein the first anti-fog plate 2 and the side wall anti-fog plate 3 are provided with a heating device, wherein the heating device comprises a plurality of first heating wires 22 and a plurality of second heating wires 31, wherein the first heating wires 22 are evenly and densely distributed. On the bottom surface of the first anti-fouling plate 2, the second heating wires 31 are evenly and densely distributed on the inner wall of the side wall anti-fouling plate 3. Each of the first heating wires 22 and the second heating wires 31 is a continuous S-shaped one end of which is a positive pole and the other end is a negative pole. The positive and negative poles of the same heating wire are connected to the positive and negative poles of a group of wiring terminals 5. A plurality of groups of wiring terminals 5 are provided on the top of the first anti-fouling plate 2. The first heating wires 22 and the second heating wires 31 are heated to a certain temperature to generate heat radiation, thereby heating the substrate, avoiding light pollution and making the heating more uniform without affecting the detection of the light transmittance of the substrate.

[0046] The first anti-slip plate 2 and the side wall anti-slip plate 3 are an integrally formed structure.

[0047] The plurality of first heating wires 22 are arranged in an S shape as a whole. Except for the first and last first heating wires 22, the starting end of each first heating wire 22 is close to but not connected to the ending end of the adjacent first heating wire 22. A first wiring hole 23 is provided near the positive pole of each first heating wire 22, and a second wiring hole 24 is provided near the negative pole of each first heating wire 22. The positive pole and the negative pole of the first heating wire 22 pass through the first wiring hole 23 and the second wiring hole 24 to connect to the corresponding wiring terminals 5.

[0048] The S-shape of the plurality of second heating wires 31 is a rectangle with equal width at the top and bottom. A third wiring hole 32 is provided on the side wall anti-attachment plate 3 near the positive pole of the second heating wire 31, and a fourth wiring hole 33 is provided on the side wall anti-attachment plate 3 near the negative pole of the second heating wire 31. The positive and negative poles of the second heating wire 31 pass through the third wiring hole 32 and the fourth wiring hole 33 to connect to the corresponding wiring terminals 5.

[0049] A plurality of heating wire fixing plates 34 are evenly spaced on the two upper and lower adjacent rows of second heating wires 31 , and the heating wire fixing plates 34 are connected to the side wall anti-slip plate 3 by screws.

[0050] Two to three second heating wires 31 form a heating area, and at least three heating areas are provided on the side wall anti-sticking plate 3 to enclose a circular heating area. The longitudinal coverage range of the circular heating area completely covers the plating pot from the top to the bottom of the plating pot, so as to make full use of the space and maximize the heating efficiency.

[0051] An upward folded edge 21 is provided on the edge of the first anti-slip plate 2 to increase the rigidity of the first anti-slip plate 2 .

[0052] A second anti-deposition plate 4 is provided above the first anti-deposition plate 2 to prevent the film material from reversely settling and contaminating the material during the evaporation process.

[0053] The top plate 11 and the second anti-fouling plate 4 are provided with at least two groups of upper and lower corresponding through holes for the connection terminals 5 to pass through. Preferably, each heating area corresponds to a group of through holes to ensure uniform heating.

[0054] Each through hole on the top plate 11 is connected to a flange 6, a circle of pressing blocks 61 is arranged above the flange 6, each pressing block 61 is connected to the positive or negative pole of a heating wire, an annular water channel is arranged in the middle of the flange 6, and a first cooling pipe 7 is arranged above the middle of the flange 6, and cooling water is passed through the first cooling pipe 7 to cool the terminal 5.

[0055] A second cooling pipe 8 is disposed outside the top plate 11 , and a third cooling pipe 9 is disposed outside the enclosure 12 , so as to quickly cool the cavity when the temperature of the cavity is too high.

[0056] The area of ​​the first heating wire 22 is smaller than that of the second heating wire 31 , and the density is increased, so that the heating efficiency is enhanced to compensate for the large temperature difference caused by water cooling at the top of the cavity.

[0057] The first anti-slip plate 2 and the second anti-slip plate 4 are provided with avoidance openings 10 in the middle thereof for avoiding the upper optical detection structure.

[0058] Beneficial effects of the present invention: The present invention proposes a heating device for a vacuum evaporation machine, comprising a cavity, wherein the cavity is surrounded by a top plate 11, a surrounding plate 12, and a bottom plate 13, wherein a side wall anti-fog plate 3 is arranged on the inner side of the surrounding plate 12, wherein the side wall anti-fog plate 3 is arranged around the upper part of the cavity, wherein a first anti-fog plate 2 is arranged below the top plate 11, wherein the outer edge of the first anti-fog plate 2 is connected to the top of the side wall anti-fog plate 3, wherein a heating device is arranged on the first anti-fog plate 2 and the side wall anti-fog plate 3, wherein the heating device comprises a plurality of first heating wires 22 and a plurality of second heating wires 31, wherein the first heating wires 22 The first anti-fouling plate 2 is evenly and densely distributed on the bottom surface of the second heating wire 31, and the side wall anti-fouling plate 3 is evenly and densely distributed on the inner wall of the side wall anti-fouling plate 3. Each of the first heating wire 22 and the second heating wire 31 is a continuous S-shaped one end of which is positive and the other end is negative. The positive and negative poles of the same heating wire are connected to the positive and negative poles of a group of wiring terminals 5. A plurality of groups of wiring terminals 5 are provided on the top of the first anti-fouling plate 2. The first heating wire 22 and the second heating wire 31 are heated to a certain temperature to generate heat radiation to heat the substrate, thereby avoiding light pollution and making the heating more uniform without affecting the detection of the light transmittance of the substrate.

[0059] The above-mentioned embodiments only express several implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the present invention. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A heating device for a vacuum evaporation machine, comprising a cavity, wherein the cavity is surrounded by a top plate (11), a surrounding plate (12), and a bottom plate (13), wherein a side wall anti-fog plate (3) is provided inside the surrounding plate (12), wherein the side wall anti-fog plate (3) is arranged around the upper part of the cavity, wherein a first anti-fog plate (2) is provided below the top plate (11), wherein the outer edge of the first anti-fog plate (2) is connected to the top of the side wall anti-fog plate (3), wherein the first anti-fog plate (2) is connected to the top of the side wall anti-fog plate (3), wherein the first anti-fog plate (2) is provided with a first anti-fog plate (2 ... The first anti-fog plate (2) and the side wall anti-fog plate (3) are provided with a heating device, the heating device comprising a plurality of first heating wires (22) and a plurality of second heating wires (31), the first heating wires (22) being evenly and densely distributed on the bottom surface of the first anti-fog plate (2), and the second heating wires (31) being evenly and densely distributed on the inner wall of the side wall anti-fog plate (3), each of the first heating wires (22) and the second heating wires (31) being in a continuous S-shape with one end being a positive pole and the other end being a negative pole, the positive and negative poles of the same heating wire being connected to the positive and negative poles of a group of wiring terminals (5), the top of the first anti-fog plate (2) being provided with a plurality of groups of wiring terminals (5), the first heating wires (22) and the second heating wires (31) being heated to a certain temperature to generate heat radiation, thereby heating the substrate, avoiding light pollution while making the heating more uniform, and not affecting the detection of the light transmittance of the substrate.

2. The heating device of the vacuum evaporation machine according to claim 1, characterized in that: The plurality of first heating wires (22) are evenly divided into a plurality of fan-shaped arrangements centered on the center of the first anti-adhesion plate (2); the S-shape of each first heating wire (22) is an equally divided fan-shaped arrangement; the area of ​​the first heating wire (22) is smaller than that of the second heating wire (31); the density is enhanced, and is used to compensate for the large temperature difference at the top of the cavity; a first wiring hole (23) is provided on the first anti-adhesion plate (2) near the positive pole of each first heating wire (22); and a second wiring hole (24) is provided near the negative pole of each first heating wire (22); the positive pole and the negative pole of the first heating wire (22) pass through the first wiring hole (23) and the second wiring hole (24) to connect to corresponding wiring terminals (5).

3. The heating device of the vacuum evaporation machine according to claim 1, characterized in that: The plurality of first heating wires (22) are arranged in an S-shape as a whole. Except for the first and last first heating wires (22), the starting end of each first heating wire (22) is close to but not connected to the ending end of an adjacent first heating wire (22). A first wiring hole (23) is provided near the positive pole of each first heating wire (22), and a second wiring hole (24) is provided near the negative pole of each first heating wire (22). The positive pole and the negative pole of the first heating wire (22) pass through the first wiring hole (23) and the second wiring hole (24) to connect to corresponding wiring terminals (5).

4. The heating device of the vacuum evaporation machine according to claim 1, characterized in that: The S-shape of the plurality of second heating wires (31) is generally a rectangle with equal width at the top and bottom, a third wiring hole (32) is provided on the side wall anti-attachment plate (3) near the positive electrode of the second heating wire (31), and a fourth wiring hole (33) is provided on the side wall anti-attachment plate (3) near the negative electrode of the second heating wire (31), and the positive electrode and the negative electrode of the second heating wire (31) pass through the third wiring hole (32) and the fourth wiring hole (33) to connect to corresponding wiring terminals (5).

5. The heating device of the vacuum evaporation machine according to claim 1, characterized in that: A plurality of heating wire fixing plates (34) are evenly spaced apart on two upper and lower adjacent rows of second heating wires (31), and the heating wire fixing plates (34) are connected to the side wall anti-slip plate (3) via screws.

6. The heating device of the vacuum evaporation machine according to claim 1, characterized in that: The edge of the first anti-slip plate (2) is provided with an upward folded edge (21).

7. The heating device of the vacuum evaporation machine according to claim 1, characterized in that: A second anti-slip plate (4) is provided above the first anti-slip plate (2).

8. The heating device of the vacuum evaporation machine according to claim 1, characterized in that: Each through hole on the top plate (11) is connected to a flange (6), a circle of pressing blocks (61) is arranged above the flange (6), each pressing block (61) is connected to the positive electrode or the negative electrode of a heating wire, a ring-shaped water channel is arranged in the middle of the flange (6), and a first cooling pipe (7) is arranged above the middle of the flange (6), and cooling water is passed through the first cooling pipe (7) to cool the terminal (5).

9. The heating device of the vacuum evaporation machine according to claim 1, characterized in that: A second cooling pipe (8) is provided outside the top plate (11), and a third cooling pipe (9) is provided outside the enclosure plate (12), for quickly cooling the cavity when the temperature of the cavity is too high.

10. The heating device of the vacuum evaporation machine according to claim 1, characterized in that: The area of ​​the first heating wire (22) is smaller than that of the second heating wire (31), and the density is increased, thereby enhancing the heating efficiency and compensating for the large temperature difference caused by water cooling at the top of the cavity.

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