A method for splitting a glass substrate by a robotic arm

Abstract

The present application provides a method for splitting a glass substrate by a robotic arm, which relates to the technical field of robotic arm control and is used to improve the splitting efficiency of the glass substrate. The method mainly includes: obtaining the corner position coordinates of the glass substrate placed on the glass substrate placement platform; an adsorption pad is closely attached to the bottom of the glass substrate; determining the movement path of the wedge-shaped peeling head at the end of the six-axis main robotic arm according to the corner position coordinates, and the end point in the movement path is the position where the corner position coordinates are located; when controlling the six-axis main robotic arm to run to the corner position coordinates according to the movement path, controlling the wedge-shaped peeling head arranged at the end of the six-axis main robotic arm to be inserted between the glass substrate and the adsorption pad; controlling the six-axis main robotic arm to split the glass substrate and the adsorption pad by the obtained six-dimensional force sensor data.

Description

Technical Field

[0001] This application relates to the technical field of robotic arm control, and particularly to a method for splitting a glass substrate by a robotic arm. Background Art

[0002] The glass substrate is one of the most important basic materials for electronic product displays, and its thinning process is an important process to make the glass substrate thinner, lighter, and smoother. The glass substrate polishing machine is an engineering equipment that realizes glass thinning through chemical mechanical polishing process. During the polishing process, the glass substrate is located between the upper fixed disk and the lower fixed disk. The two disks perform relative rotation and translation movements and interact with the chemically polished liquid covering and circulating, so as to achieve the process objectives.

[0003] This process has high requirements for clamping the glass substrate to prevent damage such as scratches and cracks to the glass substrate during the polishing process. Currently, a polyurethane foam pad with a thickness of about 1 mm (referred to as an adsorption pad) is generally used for vacuum adsorption. The adsorption pad is pasted on a rigid workbench, and the glass substrate is placed flat on the adsorption pad. Through external force compaction, the air in the micro pores in the adsorption pad is discharged, so that the glass substrate is closely attached to the adsorption pad. After the thinning is completed, it is necessary to separate the glass substrate from the adsorption pad to realize the splitting operation of the glass substrate.

[0004] Currently, the splitting of the glass substrate is still mainly completed manually, relying on manual "picking" with fingers to lift the glass upwards. The manual splitting method not only has low production efficiency, but also the operation process is prone to cause the glass substrate to break. Summary of the Invention

[0005] An embodiment of this application provides a method for splitting a glass substrate by a robotic arm to improve the splitting efficiency of the glass substrate.

[0006] An embodiment of the present invention provides a method for splitting a glass substrate by a robotic arm. The method is applied to a robotic arm control system, and the robotic arm control system includes: a robotic arm controller, a six-axis main robotic arm, a six-axis auxiliary robotic arm, and a glass substrate placement platform; a wedge-shaped peeling head is provided at the end of the six-axis main robotic arm, a vibrator is provided inside the wedge-shaped peeling head, and a nitrogen discharge port is provided at the end of the six-axis auxiliary robotic arm; the robotic arm controller is respectively connected to the six-axis main robotic arm and the six-axis auxiliary robotic arm, and the robotic arm controller is used to execute the following method:

[0007] Obtain the corner position coordinates of the glass substrate placed on the glass substrate placement platform; an adsorption pad is closely attached to the bottom of the glass substrate;

[0008] Determine the movement path of the wedge-shaped peeling head at the end of the six-axis main robotic arm according to the corner position coordinates, and the end point in the movement path is the position where the corner position coordinates are located;

[0009] When controlling the six-axis main robotic arm to run to the corner position coordinates according to the described movement path, control the wedge-shaped peeling head arranged at the end of the six-axis main robotic arm to insert between the glass substrate and the adsorption pad;

[0010] Control the six-axis main robotic arm to split the glass substrate and the adsorption pad by using the six-dimensional force sensor data obtained.

[0011] An embodiment of the present invention provides a robotic arm controller, which is applied to a robotic arm control system. The robotic arm controller includes:

[0012] An acquisition module, configured to acquire the corner position coordinates of a glass substrate placed on the glass substrate placement platform; an adsorption pad is closely attached to the bottom of the glass substrate;

[0013] A determination module, configured to determine the movement path of the wedge-shaped peeling head at the end of the six-axis main robotic arm according to the corner position coordinates, and the end point in the movement path is the position where the corner position coordinates are located;

[0014] A control module, configured to, when controlling the six-axis main robotic arm to run to the corner position coordinates according to the movement path, control the wedge-shaped peeling head arranged at the end of the six-axis main robotic arm to insert between the glass substrate and the adsorption pad;

[0015] A splitting module, configured to control the six-axis main robotic arm to split the glass substrate and the adsorption pad by using the six-dimensional force sensor data obtained.

[0016] A computer program product, the computer program product includes a computer program, and when the computer program is executed by a processor, it implements the above method for splitting a glass substrate by a robotic arm.

[0017] The present invention provides a method for splitting a glass substrate by a robotic arm. This method is applied to a robotic arm control system, which includes a robotic arm controller, a six-axis main robotic arm, a six-axis auxiliary robotic arm, and a glass substrate placement platform. Among them, a wedge-shaped peeling head is provided at the end of the six-axis main robotic arm, a vibrator is provided inside the wedge-shaped peeling head, and a nitrogen discharge port is provided at the end of the six-axis auxiliary robotic arm; the robotic arm controller is respectively connected to the six-axis main robotic arm and the six-axis auxiliary robotic arm, and the robotic arm controller is used to execute the following method: First, obtain the corner position coordinates of the glass substrate placed on the glass substrate placement platform; an adsorption pad is closely attached to the bottom of the glass substrate; then determine the movement path of the wedge-shaped peeling head provided at the end of the six-axis main robotic arm according to the corner position coordinates, and the end point in the movement path is the position where the corner position coordinates are located; then when controlling the six-axis main robotic arm to run to the corner position coordinates according to the movement path, control the wedge-shaped peeling head provided at the end of the six-axis main robotic arm to insert between the glass substrate and the adsorption pad; finally, control the six-axis main robotic arm to split the glass substrate and the adsorption pad according to the six-dimensional force sensor data obtained. Compared with the existing splitting of glass substrates which is still mainly completed manually, in this application, first insert the wedge-shaped peeling head provided at the end of the six-axis main robotic arm between the glass substrate and the adsorption pad, and then control the six-axis auxiliary robotic arm to autonomously split the glass substrate and the adsorption pad according to the six-dimensional force sensor data, so that the splitting efficiency of the glass substrate can be improved through this application. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a flowchart of a method for splitting a glass substrate by a robotic arm provided by this application;

[0019] Figure 2 It is a flowchart of splitting a glass substrate by a six-axis main robotic arm provided by this application;

[0020] Figure 3 It is a schematic structural diagram of a robotic arm controller provided by this application;

[0021] Figure 4 It is a schematic diagram of a computer device provided by this application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] In order to better understand the above technical solutions, the technical solutions of the embodiments of this application will be described in detail below through the drawings and specific embodiments. It should be understood that the specific features in the embodiments of this application and the embodiments are detailed descriptions of the technical solutions of the embodiments of this application, rather than limitations on the technical solutions of this application. Without conflict, the technical features in the embodiments of this application and the embodiments can be combined with each other.

[0023] A method for splitting a glass substrate by a robotic arm provided by an embodiment of the present invention is applied to a robotic arm control system. The robotic arm control system includes: a robotic arm controller, a six-axis main robotic arm, a six-axis auxiliary robotic arm, a glass substrate placement platform, and a laser displacement sensor. Among them, the glass substrate placement platform is used to place the glass substrate to be split, and the laser displacement sensor is used to detect the distance between the glass substrate and the adsorption pad in real time. A wedge-shaped peeling head is provided at the end of the six-axis main robotic arm, and a vacuum chuck fixture is equipped to monitor the separation force in real time through a force feedback sensor. A vibrator is provided inside the wedge-shaped peeling head, and a nitrogen discharge port is provided at the end of the six-axis auxiliary robotic arm, through which nitrogen can be discharged.

[0024] Please refer to Figure 1 , this embodiment provides a method for splitting a glass substrate by a robotic arm. The robotic arm controller is respectively connected to the six-axis main robotic arm and the six-axis auxiliary robotic arm, and the robotic arm controller is used to execute the following method:

[0025] S101, obtain the corner position coordinates of the glass substrate placed on the glass substrate placement platform.

[0026] Among them, an adsorption pad is closely attached to the bottom of the glass substrate, and the corner position coordinates can be the position coordinates of the 4 right-angle points of the glass substrate, or the position coordinates of any one corner point specified by the user.

[0027] S102, determine the movement path of the wedge-shaped peeling head at the end of the six-axis main robotic arm according to the corner position coordinates, and the end point in the movement path is the position where the corner position coordinates are located.

[0028] Among them, the movement path is the trajectory path between the initial position of the wedge-shaped peeling head at the end of the six-axis main robotic arm and the corner position coordinates.

[0029] S103, when controlling the six-axis main robotic arm to run to the corner position coordinates according to the movement path, control the wedge-shaped peeling head provided at the end of the six-axis main robotic arm to insert between the glass substrate and the adsorption pad.

[0030] In this embodiment, controlling the wedge-shaped peeling head provided at the end of the six-axis main robotic arm to insert between the glass substrate and the adsorption pad includes: controlling the lower surface of the wedge-shaped peeling head to fit the adsorption pad, and inserting the wedge-shaped peeling head provided at the end of the six-axis main robotic arm between the glass substrate and the adsorption pad at a preset speed, so that the area of the lower surface of the wedge-shaped peeling head between the glass substrate and the adsorption pad is greater than a preset proportion. Wherein, the preset proportion is the ratio of the area of the lower surface of the wedge-shaped peeling head between the glass substrate and the adsorption pad to the total area of the lower surface of the wedge-shaped peeling head, and this ratio can be set according to requirements. For example, this ratio is three-fourths, five-sixths, etc., and this embodiment does not limit this.

[0031] Specifically, in this embodiment, the insertion of the wedge-shaped peeling head at the end of the six-axis main robotic arm between the glass substrate and the adsorption pad can be controlled by a progressive spiral trajectory. This progressive spiral trajectory is the progressive spiral trajectory that the wedge-shaped peeling head at the end of the six-axis main robotic arm needs to follow along the corner position coordinates, and the progressive spiral trajectory can be determined by the following formula:

[0032] ,

[0033] Wherein, is the spiral radius expansion rate , is the spiral angular velocity , is the vertical separation displacement, is the initial height, = 0.1mm / s, t is the time variable (unit: second).

[0034] It should be noted that when controlling the wedge-shaped peeling head at the end of the six-axis main robotic arm to insert between the glass substrate and the adsorption pad in this embodiment, in addition to the progressive spiral trajectory, it is also necessary to determine the robotic arm joint angle vector, joint torque vector, and end force command corresponding to each time node in the progressive spiral trajectory, and then control the wedge-shaped peeling head provided at the end of the six-axis main robotic arm to insert between the glass substrate and the adsorption pad according to the progressive spiral trajectory, robotic arm joint angle vector, joint torque vector, and end force command.

[0035] Wherein, Calculate the robotic arm joint angle vector through the formula, is the robotic arm joint angle vector, is the end effector pose matrix (4×4 homogeneous transformation matrix), is the inverse kinematics solution function (based on the D-H parameter model).

[0036] Calculate the joint torque vector through the formula, , is a 6×6 mass matrix (unit: kg·m²), is the Coriolis force / centripetal force term (unit: N·m), is the gravity term (unit: N·m); is the mapping of the external force at the end to the joint space , unit: N·m). is the six-dimensional force sensor data, is the force along the X-axis of the sensor, is the force along the Y-axis of the sensor, is the force along the Z-axis of the sensor, is the torque about the X-axis of the sensor, is the torque about the Y-axis of the sensor, is the torque about the Z-axis of the sensor.

[0037] Calculate through the impedance control equation Calculate the end force command, is the end force command (unit: N), K is the stiffness matrix (unit: N·m), D is the damping matrix (unit: N·s / m), is the desired position, is the desired velocity, x is the actual position, is the actual velocity.

[0038] S104. Control the six-axis main robotic arm to split the glass substrate and the adsorption pad by using the obtained six-dimensional force sensor data.

[0039] In this embodiment, during the process of controlling the wedge-shaped peeling head arranged at the end of the six-axis main robotic arm to insert between the glass substrate and the adsorption pad, first obtain the six-dimensional force sensor data according to the force feedback sensor per unit time, and then dynamically control the six-axis main robotic arm with the obtained six-dimensional force sensor data to realize the splitting of the glass substrate and the adsorption pad. For example, if the force along the Z-axis of the sensor is detected , then reduce the vertical velocity by 20%; if the tangential force is detected , then reduce the helical angular velocity by 30%.

[0040] As Figure 2 shown, in an optional embodiment provided by the present application, the controlling the six-axis main robotic arm to split the glass substrate and the adsorption pad by using the obtained six-dimensional force sensor data includes:

[0041] S1041. Input the n groups of six-dimensional force sensor data measured most recently in time into the six-dimensional force prediction model to obtain the predicted six-dimensional force sensor data at the next time point.

[0042] Among them, the six-dimensional force prediction model is a time prediction model trained based on sample data. Through the trained six-dimensional force prediction model, the predicted data of the six-dimensional force sensor at the next time point can be obtained, so as to control the six-axis main robotic arm to split the glass substrate and the adsorption pad according to the predicted data of the six-dimensional force sensor in the subsequent steps.

[0043] S1042, determine the joint torque vector at the end of the six-axis main robotic arm at the next time point through the predicted data of the six-dimensional force sensor at the next time point.

[0044] In this embodiment, after obtaining the predicted data of the six-dimensional force sensor at the next time point, it is first necessary to determine whether the predicted data of the six-dimensional force sensor at the next time point is within the safe range. If it is not within the safe range, the predicted data of the six-dimensional force sensor needs to be modified to obtain the predicted data of the six-dimensional force sensor within the safe range, and then based on the predicted data of the six-dimensional force sensor within the safe range, determine the joint torque vector at the end of the six-axis main robotic arm at the next time point. Specifically, through Determine the joint torque vector.

[0045] It should be noted that the allowable stress of the glass substrate is determined according to the fracture strength of the glass substrate and the stress area of the glass substrate (the contact area between the wedge-shaped peeling head of the six-axis main robotic arm and the glass substrate). For example, for a 0.5 mm thick soda-lime glass (σ fracture = 50 MPa, safety factor is taken as 2, contact area is 10 mm²): then the allowable stress = 50 / 2×10 = 250 N. Determining whether the predicted data of the six-dimensional force sensor is within the safe range can determine whether the in the predicted data of the six-dimensional force sensor is less than or equal to . For example, controlling the vertical separation force is usually limited to prevent crushing the glass substrate.

[0046] Then this embodiment can also determine the local stress concentration coefficient k (usually k = 2 - 3) through finite element simulation or experimental data to dynamically adjust the safety threshold , then the separation speed can be determined by the formula , is the safety threshold, is the initial separation speed (such as 0.1 mm / s). When is close to , reduce the separation speed to reduce stress. If = 10 N, = 8 N, then = 0.1*(1 - 8 / 10) = 0.02 mm / s.

[0047] S1043, control the wedge-shaped peeling head at the end of the six-axis auxiliary robotic arm through the joint torque vector of the six-axis main robotic arm at the next time point, and obtain the six-dimensional force sensor data at the current time point.

[0048] In this embodiment, after obtaining the six-dimensional force sensor data at the current time point, jump to step S1041 and continue to execute the step of inputting the n groups of six-dimensional force sensor data with the most recent time into the six-dimensional force prediction model to obtain the predicted six-dimensional force sensor data at the next time point, and continue to execute until the six-axis auxiliary robotic arm completes the splitting of the glass substrate and the adsorption pad.

[0049] Further, before controlling the operation of the wedge-shaped peeling head at the end of the six-axis auxiliary robotic arm through the joint torque vector of the six-axis main robotic arm at the next time point, the method further includes: calculating the vibration parameters of the vibrator at the next time point through the predicted six-dimensional force sensor data at the next time point, and calculating the nitrogen pressure of the nitrogen discharge port at the next time point through the separation gap between the glass substrate and the adsorption pad at the current time point; correspondingly, while controlling the wedge-shaped peeling head at the end of the six-axis auxiliary robotic arm through the joint torque vector of the six-axis main robotic arm at the next time point, controlling the vibration of the vibrator according to the vibration parameters, and controlling the nitrogen discharge of the nitrogen discharge port according to the nitrogen pressure.

[0050] Specifically, calculating the vibration parameters of the vibrator at the next time point through the predicted six-dimensional force sensor data at the next time point in this embodiment includes:

[0051] Calculate the frequency of the vibrator at the next time point through the formula ;

[0052] Calculate the amplitude of the vibrator at the next time point through the formula ;

[0053] where is the vibration frequency base value, is the amplitude base value, is the amplitude-torque coefficient, is the force along the Z-axis direction of the sensor in the six-dimensional force sensor, is the torque around the Z-axis of the sensor in the six-dimensional force sensor, is the constant coefficient.

[0054] It should be noted that there can be multiple six-axis auxiliary robotic arms in this embodiment, and each six-axis auxiliary robotic arm is provided with a corresponding nitrogen discharge port. Preferably, two six-axis auxiliary robotic arms are provided in this embodiment. During the disassembly of the glass substrate and the adsorption pad by the six-axis main robotic arm, the two six-axis auxiliary robotic arms can cooperate to discharge nitrogen, so as to achieve zonal control of the nitrogen pressure, gradually expand the separation gap, and reduce the mechanical contact stress. In this embodiment, the adsorption pad is divided into a central area (Zone 1) and a peripheral area (Zone 2), and each area is provided with an independent gas path control valve. When the laser distance sensor detects the separation gap when it is, the vacuum in the central area is turned off, and the nitrogen injection of the corresponding six-axis auxiliary robotic arm in this area is synchronously turned on; when the gap expands to , the vacuum in the peripheral area is turned off, and the nitrogen injection of the corresponding six-axis auxiliary robotic arm in this area is turned on.

[0055] Specifically, calculating the nitrogen pressure of the nitrogen discharge port at the next time point through the separation gap between the glass substrate and the adsorption pad at the current time point in this embodiment includes:

[0056] Calculating the nitrogen pressure of the nitrogen discharge port at the next time point through the following formula:

[0057] ,

[0058] wherein, is the separation gap between the adsorption pads at the current time point, is the minimum nitrogen pressure, is the maximum nitrogen pressure, is the pressure-gap response coefficient, is the gap value corresponding to the midpoint of the pressure change.

[0059] In this embodiment, the nitrogen pressure distribution can also be dynamically adjusted through the monitoring torque in the predicted data of the six-dimensional force sensor at the next time point to suppress the warping of the glass substrate. If (the substrate warps on the right side), the pressure of the nitrogen nozzle on the right side is increased by 10%; if (the substrate warps on the left side), the pressure of the nitrogen nozzle on the left side is increased by 10%.

[0060] After controlling the operation of the wedge-shaped peeling head at the end of the six-axis auxiliary robotic arm through the joint torque vector of the six-axis main robotic arm at the next time point, the method further includes: determining whether there is an adhesion force mutation phenomenon according to the measured six-dimensional force sensor and the vibration of the vibrator at the current time point; if the adhesion force mutation phenomenon occurs, an obstacle avoidance path is generated.

[0061] This embodiment provides a method for splitting a glass substrate by a robotic arm. This method is applied to a robotic arm control system, which includes: a robotic arm controller, a six-axis main robotic arm, a six-axis auxiliary robotic arm, and a glass substrate placement platform. Among them, a wedge-shaped peeling head is provided at the end of the six-axis main robotic arm, a vibrator is provided inside the wedge-shaped peeling head, and a nitrogen discharge port is provided at the end of the six-axis auxiliary robotic arm; the robotic arm controller is respectively connected to the six-axis main robotic arm and the six-axis auxiliary robotic arm, and the robotic arm controller is used to execute the following method: First, obtain the corner position coordinates of the glass substrate placed on the glass substrate placement platform; an adsorption pad is closely attached to the bottom of the glass substrate; then, determine the movement path of the wedge-shaped peeling head at the end of the six-axis main robotic arm according to the corner position coordinates, and the end point in the movement path is the position where the corner position coordinates are located; then, when controlling the six-axis main robotic arm to run to the corner position coordinates according to the movement path, control the wedge-shaped peeling head provided at the end of the six-axis main robotic arm to insert between the glass substrate and the adsorption pad; finally, control the six-axis main robotic arm to split the glass substrate and the adsorption pad according to the obtained six-dimensional force sensor data. Compared with the existing glass substrate splitting which is still mainly completed manually, in this application, first insert the wedge-shaped peeling head provided at the end of the six-axis main robotic arm between the glass substrate and the adsorption pad, and then control the six-axis auxiliary robotic arm to autonomously split the glass substrate and the adsorption pad according to the six-dimensional force sensor data, so that the splitting efficiency of the glass substrate can be improved through this application.

[0062] It should be understood that the magnitudes of the sequence numbers of the steps in the above embodiments do not mean the order of execution. The execution order of each process should be determined according to its function and internal logic, and should not constitute any limitation to the implementation process of the embodiments of the present invention.

[0063] In one embodiment, a robotic arm controller is provided, which corresponds one-to-one with the method for splitting a glass substrate by a robotic arm in the above embodiment. As Figure 3 shown, the detailed description of each functional module of the robotic arm controller is as follows:

[0064] An acquisition module 31, which is used to acquire the corner position coordinates of the glass substrate placed on the glass substrate placement platform; an adsorption pad is closely attached to the bottom of the glass substrate;

[0065] A determination module 32, which is used to determine the movement path of the wedge-shaped peeling head at the end of the six-axis main robotic arm according to the corner position coordinates, and the end point in the movement path is the position where the corner position coordinates are located;

[0066] The control module 33 is configured to control the six-axis main robotic arm to run to the corner position coordinates according to the motion path, and control the wedge-shaped peeling head provided at the end of the six-axis main robotic arm to insert between the glass substrate and the adsorption pad;

[0067] The splitting module 34 is configured to control the six-axis main robotic arm to split the glass substrate and the adsorption pad by using the six-dimensional force sensor data obtained.

[0068] In an optional embodiment, the control module 33 is specifically configured to:

[0069] Control the lower surface of the wedge-shaped peeling head to fit the adsorption pad, and insert the wedge-shaped peeling head at the end of the six-axis main robotic arm between the glass substrate and the adsorption pad at a preset speed, so that the area of the lower surface of the wedge-shaped peeling head between the glass substrate and the adsorption pad is greater than a preset ratio.

[0070] In an optional embodiment, the splitting module 34 is specifically configured to:

[0071] Input the n groups of six-dimensional force sensor data measured most recently in time into the six-dimensional force prediction model to obtain the six-dimensional force sensor prediction data at the next time point;

[0072] Determine the joint torque vector of the six-axis main robotic arm at the next time point through the six-dimensional force sensor prediction data at the next time point;

[0073] Control the operation of the wedge-shaped peeling head at the end of the six-axis auxiliary robotic arm through the joint torque vector of the six-axis main robotic arm at the next time point, obtain the six-dimensional force sensor data at the current time point, and jump to the step of inputting the n groups of six-dimensional force sensor data measured most recently in time into the six-dimensional force prediction model to obtain the six-dimensional force sensor prediction data at the next time point and continue to execute until the six-axis auxiliary robotic arm completes the splitting of the glass substrate and the adsorption pad.

[0074] In an optional embodiment, the determination module 32 is further configured to calculate the vibration parameters of the vibrator at the next time point through the six-dimensional force sensor prediction data at the next time point, and calculate the nitrogen pressure of the nitrogen discharge port at the next time point through the separation gap between the glass substrate and the adsorption pad at the current time point;

[0075] The control module 33 is further configured to control the operation of the wedge-shaped peeling head at the end of the six-axis auxiliary robotic arm through the joint torque vector of the six-axis main robotic arm at the next time point, and control the vibration of the vibrator according to the vibration parameters and control the nitrogen discharge of the nitrogen discharge port according to the nitrogen pressure.

[0076] In an alternative embodiment, the determining module 32 is specifically configured to:

[0077] Calculate the frequency of the vibrator at the next time point through the formula ;

[0078] Calculate the amplitude of the vibrator at the next time point through the formula ;

[0079] where is the vibration frequency base value, is the amplitude base value, is the amplitude-moment coefficient, is the force in the direction of the Z-axis of the six-dimensional force sensor, is the moment about the Z-axis of the six-dimensional force sensor, is a constant coefficient.

[0080] In an alternative embodiment, the determining module 32 is specifically configured to:

[0081] Calculate the nitrogen pressure at the nitrogen discharge port at the next time point through the following formula:

[0082] ,

[0083] where is the separation gap between the adsorption pads at the current time point, is the minimum nitrogen pressure, is the maximum nitrogen pressure, is the pressure-gap response coefficient, is the gap value corresponding to the midpoint of the pressure change.

[0084] In an alternative embodiment, the determining module 32 is further configured to:

[0085] Determine whether an adhesion force mutation phenomenon occurs according to the measured six-dimensional force sensor and the vibration of the vibrator at the current time point;

[0086] If the adhesion force mutation phenomenon occurs, generate an obstacle avoidance path.

[0087] For the specific limitations of the robotic arm controller, reference can be made to the limitations on the method of splitting the glass substrate by the robotic arm in the foregoing text, which will not be elaborated here. Each module in the above device can be implemented in whole or in part by software, hardware, and their combination. The above modules can be embedded in the processor of the computer device in hardware form or independent of it, or stored in the memory of the computer device in software form, so that the processor can call and execute the operations corresponding to the above modules.

[0088] In one embodiment, a computer device is provided. The computer device may be a server, and its internal structural diagram may be as shown in Figure 4 . The computer device includes a processor, a memory, a network interface, and a database connected through a system bus. Among them, the processor of the computer device is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system, a computer program, and a database. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The network interface of the computer device is used to communicate with an external terminal through a network connection. When the computer program is executed by the processor, it implements a method for splitting a glass substrate by a robotic arm.

[0089] In one embodiment, a computer device is provided, including a memory, a processor, and a computer program stored on the memory and executable on the processor. When the processor executes the computer program, the following steps are implemented:

[0090] Obtain the corner position coordinates of the glass substrate placed on the glass substrate placement platform; an adsorption pad is closely attached to the bottom of the glass substrate;

[0091] Determine the movement path of the wedge-shaped peeling head at the end of the six-axis main robotic arm according to the corner position coordinates, and the end point in the movement path is the position where the corner position coordinates are located;

[0092] When controlling the six-axis main robotic arm to run to the corner position coordinates according to the movement path, control the wedge-shaped peeling head provided at the end of the six-axis main robotic arm to insert between the glass substrate and the adsorption pad;

[0093] Control the six-axis main robotic arm to split the glass substrate and the adsorption pad through the obtained six-dimensional force sensor data.

[0094] In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed by the processor, the following steps are implemented:

[0095] Obtain the corner position coordinates of the glass substrate placed on the glass substrate placement platform; an adsorption pad is closely attached to the bottom of the glass substrate;

[0096] Determine the movement path of the wedge-shaped peeling head at the end of the six-axis main robotic arm according to the corner position coordinates, and the end point in the movement path is the position where the corner position coordinates are located;

[0097] When controlling the six-axis main robotic arm to move to the corner position coordinates according to the movement path, control the wedge-shaped peeling head arranged at the end of the six-axis main robotic arm to insert between the glass substrate and the adsorption pad;

[0098] Control the six-axis main robotic arm to split the glass substrate and the adsorption pad by using the six-dimensional force sensor data obtained.

[0099] In one embodiment, a computer program product is provided. The computer program product includes a computer program, and when the computer program is executed by a processor, the following steps are implemented:

[0100] Obtain the corner position coordinates of the glass substrate placed on the glass substrate placement platform; an adsorption pad is closely attached to the bottom of the glass substrate;

[0101] Determine the movement path of the wedge-shaped peeling head at the end of the six-axis main robotic arm according to the corner position coordinates, and the end point in the movement path is the position where the corner position coordinates are located;

[0102] When controlling the six-axis main robotic arm to move to the corner position coordinates according to the movement path, control the wedge-shaped peeling head arranged at the end of the six-axis main robotic arm to insert between the glass substrate and the adsorption pad;

[0103] Control the six-axis main robotic arm to split the glass substrate and the adsorption pad by using the six-dimensional force sensor data obtained.

[0104] Those of ordinary skill in the art can understand that all or part of the processes in the methods of the above embodiments can be completed by instructing relevant hardware through a computer program. The computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above methods. Among them, any reference to a memory, storage, database, or other medium used in the embodiments provided in the present application can include non-volatile and / or volatile memories. Non-volatile memories can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), or flash memory. Volatile memories can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDR SDRAM), enhanced SDRAM (ESDRAM), synchronous link DRAM (SLDRAM), Rambus direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and Rambus dynamic RAM (RDRAM), etc.

[0105] Those skilled in the art can clearly understand that, for the convenience and brevity of description, only the above division of each functional unit and module is used as an example. In actual applications, the above functions can be allocated to different functional units and modules according to needs, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above.

[0106] The above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. These modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention, and should all be included in the protection scope of the present invention.

Claims

1. A method for splitting a glass substrate by a robotic arm, characterized in that, The method is applied to a robotic arm control system, which includes: a robotic arm controller, a six-axis main robotic arm, a six-axis auxiliary robotic arm, and a glass substrate placement platform; a wedge-shaped peeling head is provided at the end of the six-axis main robotic arm, a vibrator is provided inside the wedge-shaped peeling head, and a nitrogen discharge port is provided at the end of the six-axis auxiliary robotic arm; the robotic arm controller is respectively connected to the six-axis main robotic arm and the six-axis auxiliary robotic arm, and the robotic arm controller is used to execute the following method: Obtain the corner position coordinates of the glass substrate placed on the glass substrate placement platform; an adsorption pad is closely attached to the bottom of the glass substrate; Determine the movement path of the wedge-shaped peeling head at the end of the six-axis main robotic arm according to the corner position coordinates, and the end point in the movement path is the position where the corner position coordinates are located; When controlling the six-axis main robotic arm to run to the corner position coordinates according to the movement path, control the wedge-shaped peeling head provided at the end of the six-axis main robotic arm to insert between the glass substrate and the adsorption pad; Control the six-axis main robotic arm to split the glass substrate and the adsorption pad by using the six-dimensional force sensor data obtained; The controlling the six-axis main robotic arm to split the glass substrate and the adsorption pad by using the six-dimensional force sensor data obtained includes: Input the n groups of six-dimensional force sensor data measured most recently in time into a six-dimensional force prediction model to obtain the six-dimensional force sensor prediction data at the next time point; Determine the joint torque vector of the six-axis main robotic arm at the next time point according to the six-dimensional force sensor prediction data at the next time point; Before controlling the operation of the wedge-shaped peeling head at the end of the six-axis auxiliary robotic arm by using the joint torque vector of the six-axis main robotic arm at the next time point, the method further includes:

2. The method according to claim 1, wherein Calculate the vibration parameters of the vibrator at the next time point according to the six-dimensional force sensor prediction data at the next time point, and calculate the nitrogen pressure of the nitrogen discharge port at the next time point according to the separation gap between the glass substrate and the adsorption pad at the current time point; Control the lower surface of the wedge-shaped peeling head to fit the adsorption pad, and insert the wedge-shaped peeling head provided at the end of the six-axis main robotic arm between the glass substrate and the adsorption pad at a preset speed, so that the area of the lower surface of the wedge-shaped peeling head between the glass substrate and the adsorption pad is greater than a preset ratio.

3. The method according to claim 1, wherein Before controlling the operation of the wedge-shaped peeling head at the end of the six-axis auxiliary robotic arm by using the joint torque vector of the six-axis main robotic arm at the next time point, the method further includes: Control the operation of the wedge-shaped peeling head at the end of the six-axis auxiliary robotic arm by using the joint torque vector of the six-axis main robotic arm at the next time point, obtain the six-dimensional force sensor data at the current time point, and jump to the step of inputting the n groups of six-dimensional force sensor data measured most recently in time into the six-dimensional force prediction model to obtain the six-dimensional force sensor prediction data at the next time point and continue to execute until the six-axis auxiliary robotic arm completes the splitting of the glass substrate and the adsorption pad. While controlling the operation of the wedge-shaped peeling head at the end of the six-axis auxiliary robotic arm through the joint torque vector of the six-axis main robotic arm at the next time point, controlling the vibration of the vibrator according to the vibration parameters, and controlling the nitrogen gas discharge at the nitrogen gas discharge port according to the nitrogen gas pressure.

4. The method according to claim 3, wherein Calculating the vibration parameters of the vibrator at the next time point through the predicted data of the six-axis force sensor at the next time point includes: Calculate the frequency of the vibrator at the next time point through the formula ​ Through the formula calculate the amplitude of the vibrator at the next time point; Among them, is the vibration frequency base value, is the amplitude base value, is the amplitude-moment coefficient, is the force in the direction of the Z-axis of the six-axis force sensor, is the moment about the Z-axis of the six-axis force sensor, is the constant coefficient.

5. The method according to claim 3, characterized in that, Calculating the nitrogen gas pressure at the nitrogen gas discharge port at the next time point through the separation gap between the glass substrate and the adsorption pad at the current time point includes: Calculating the nitrogen gas pressure at the nitrogen gas discharge port at the next time point through the following formula: ， wherein, is the separation gap between the adsorption pads at the current time point, is the minimum nitrogen pressure, is the maximum nitrogen pressure, is the pressure-gap response coefficient, is the gap value corresponding to the midpoint of the pressure change.

6. The method according to any one of claims 3 to 5, characterized in that, After controlling the operation of the wedge-shaped peeling head at the end of the six-axis auxiliary robotic arm through the joint torque vector of the six-axis main robotic arm at the next time point, the method further includes: Determining whether there is an adhesion force mutation phenomenon according to the measured six-axis force sensor and the vibration of the vibrator at the current time point; If the adhesion force mutation phenomenon occurs, generating an obstacle avoidance path.

7. A robotic arm controller, characterized in that, The robotic arm controller is applied to execute the method for splitting a glass substrate by a robotic arm according to any one of claims 1 to 6. The robotic arm controller includes: An acquisition module for acquiring the corner position coordinates of the glass substrate placed on the glass substrate placement platform; an adsorption pad is closely attached to the bottom of the glass substrate; A determination module for determining the movement path of the wedge-shaped peeling head at the end of the six-axis main robotic arm according to the corner position coordinates, and the end point in the movement path is the position where the corner position coordinates are located; A control module for controlling the six-axis main robotic arm to run to the corner position coordinates according to the movement path, and controlling the wedge-shaped peeling head provided at the end of the six-axis main robotic arm to insert between the glass substrate and the adsorption pad; A splitting module for inputting the n groups of six-axis force sensor data measured most recently in time into a six-axis force prediction model to obtain the predicted data of the six-axis force sensor at the next time point; determining the joint torque vector of the six-axis main robotic arm at the next time point through the predicted data of the six-axis force sensor at the next time point; controlling the operation of the wedge-shaped peeling head at the end of the six-axis auxiliary robotic arm through the joint torque vector of the six-axis main robotic arm at the next time point, and acquiring the six-axis force sensor data at the current time point, and jumping to the step of inputting the n groups of six-axis force sensor data measured most recently in time into the six-axis force prediction model to obtain the predicted data of the six-axis force sensor at the next time point and continue to execute until the six-axis auxiliary robotic arm completes the splitting of the glass substrate and the adsorption pad.

8. A computer device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the computer program, it implements the method for splitting a glass substrate by a robotic arm according to any one of claims 1 to 6.

9. A computer-readable storage medium storing a computer program, characterized in that, When the computer program is executed by the processor, it implements the method for splitting a glass substrate by a robotic arm according to any one of claims 1 to 6.

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