Corrugated diaphragm and manufacturing method thereof

Abstract

The invention relates to the technical field of pressure sensors, and discloses a corrugated diaphragm and a manufacturing method thereof.The corrugated diaphragm comprises an outer edge, a transition part and a central part which are integrally formed and sequentially annularly connected from outside to inside, and the two sides of the transition part are connected with a pressing ring and a base of an oil-filled pressure core in an attached mode respectively; the installation of the corrugated diaphragm and the oil-filled pressure core body is completed; the central pressure sensing area and the central part are coaxially arranged, and the edge pressure sensing areas are distributed at intervals in a surrounding mode in the circumferential direction of the central part; the edge pressure sensing area is provided with a first arc-shaped corrugation which is concentric with the edge pressure sensing area, so that the axial stress can be buffered, the mechanical strength of the corrugated diaphragm is increased, and the sensitivity of the corrugated diaphragm is improved; second arc-shaped ripples are arranged between two adjacent edge pressure sensing areas and are concentric with the central pressure sensing area, so that radial stress can be buffered, extrusion deformation in the manufacturing process is avoided, and the machining yield and the product performance are improved; the stress and strength of the corrugated diaphragm are improved, and the application pressure range of the corrugated diaphragm is optimized.

Description

Technical Field

[0001] The present invention relates to the technical field of pressure sensors, and in particular to a corrugated diaphragm and a manufacturing method thereof. Background Art

[0002] The oil-filled pressure core is a core component of the pressure sensor. It is a sealed cavity structure filled with oil. It contains a sensitive element, the pressure chip, which transmits the pressure felt from the outside to the inside through the diaphragm. The oil inside has the characteristics of low viscosity, high thermal stability, low volatility and chemical inertness, and plays the role of transmitting pressure between the diaphragm and the pressure chip.

[0003] When external pressure acts on the oil-filled pressure core, the pressure is first transmitted to the oil in the cavity. Since the oil is almost incompressible, it will immediately and evenly transmit the pressure to the sensitive element. The sensitive element will deform after sensing the pressure, and this deformation will produce a change in the pressure signal. The element that transmits pressure in the oil-filled pressure core can be selected as a diaphragm, which will deform when subjected to external pressure. The degree of deformation is proportional to the applied pressure, playing the role of transmitting pressure and isolating the medium.

[0004] The current conventional design is to form one or more concentric ring structures with a certain interval on the surface of the diaphragm. In order to improve the sensitivity of the diaphragm, the thickness of the diaphragm needs to be reduced. However, this design cannot take into account the strength and reliability of the diaphragm, resulting in problems such as easy deformation of the diaphragm and unstable structure. Summary of the invention

[0005] The object of the present invention is to provide a corrugated diaphragm and a method for manufacturing the same, which improves the axial and radial pressure resistance, improves the strength, and improves the durability and reliability; effectively reduces the mechanical stress, and improves the processing yield and product performance.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] A corrugated diaphragm is used for an oil-filled pressure core, the corrugated diaphragm includes an outer edge, a transition part and a central part which are integrally formed and sequentially connected from the outside to the inside, the two sides of the transition part are respectively connected to the pressure ring and the base of the oil-filled pressure core; the central part includes a central pressure-sensitive area and multiple edge pressure-sensitive areas, the central pressure-sensitive area is coaxially arranged with the central part, and the edge pressure-sensitive areas are arranged at a preset distance along the circumference of the central part; the edge pressure-sensitive areas are provided with a first arc-shaped corrugation, and a second arc-shaped corrugation is provided between two adjacent edge pressure-sensitive areas, the first arc-shaped corrugation is concentrically arranged with the edge pressure-sensitive area, and the second arc-shaped corrugation is concentrically arranged with the central pressure-sensitive area.

[0008] As an optional technical solution for the corrugated diaphragm, the number of the edge pressure-sensitive areas is greater than three.

[0009] As an optional technical solution for the corrugated diaphragm, the bending directions of the first arc-shaped corrugations and the second arc-shaped corrugations are opposite.

[0010] As an optional technical solution for the corrugated diaphragm, one or more first arc-shaped corrugations are provided, the plurality of first arc-shaped corrugations are distributed in an envelope shape, and the intervals between two adjacent first arc-shaped corrugations are equal.

[0011] As an optional technical solution for the corrugated diaphragm, one or more second arc-shaped corrugations are provided, the plurality of second arc-shaped corrugations are distributed in an envelope shape, and the intervals between two adjacent second arc-shaped corrugations are equal.

[0012] As an optional technical solution for the corrugated diaphragm, the central pressure-sensitive area and the edge pressure-sensitive area are in the same horizontal plane and are convexly arranged on the plane where the transition portion is located.

[0013] As an optional technical solution for the corrugated diaphragm, the central pressure-sensitive area and the edge pressure-sensitive area are on the same horizontal plane as the transition portion.

[0014] As an optional technical solution of the corrugated diaphragm, the second arc-shaped corrugation includes a circumferential corrugation, and the circumferential corrugation surrounds the outer periphery of the central pressure-sensitive area.

[0015] As an optional technical solution for the corrugated diaphragm, the diameter of the outer edge is greater than or equal to 6 mm.

[0016] A method for manufacturing a corrugated diaphragm as described in any one of the above, the manufacturing method comprising:

[0017] Determine the required size of the corrugated diaphragm according to the specifications of the oil-filled pressure core;

[0018] Determine the material of the corrugated diaphragm, and process the punch and die of the stamping die according to the stretching amount of the material and the preset corrugation pattern;

[0019] Putting the raw material sheet into the punching die for punching and forming;

[0020] The outer edge is cut out along a preset outer diameter of the corrugated diaphragm.

[0021] Beneficial effects of the present invention:

[0022] The corrugated diaphragm provided by the present invention is used for an oil-filled pressure core, including an outer edge, a transition part and a central part that are integrally formed and sequentially connected from the outside to the inside, and the inner ring and the outer ring of the transition part are connected to the central part and the outer edge respectively. The two sides of the transition part are respectively connected to the pressure ring and the base of the oil-filled pressure core to complete the installation of the corrugated diaphragm and the oil-filled pressure core. The central part includes a central pressure-sensitive area and a plurality of edge pressure-sensitive areas. The central pressure-sensitive area is coaxially arranged with the central part, and the edge pressure-sensitive areas are arranged at a preset distance along the circumference of the central part, and are distributed around the central pressure-sensitive area to disperse the sensing pressure. The edge pressure-sensitive area is provided with a first arc-shaped corrugation, and the first arc-shaped corrugation is concentrically arranged with the edge pressure-sensitive area, which can play a buffering role for the axial stress on the corrugated diaphragm, and at the same time increase the mechanical strength of the corrugated diaphragm and improve the sensitivity of the corrugated diaphragm. A second arc-shaped corrugation is arranged between two adjacent edge pressure-sensing areas. The second arc-shaped corrugation is arranged concentrically with the central pressure-sensing area, which can buffer the radial stress on the corrugated diaphragm and avoid the corrugated diaphragm from being squeezed and deformed due to stress during the manufacturing process. The corrugated diaphragm has improved axial and radial pressure resistance, and can appropriately reduce thickness and mechanical stress while ensuring strength, thereby optimizing the application pressure range, sensitivity, repeatability, nonlinearity, hysteresis and other properties of the corrugated diaphragm. By improving the stress and strength of the corrugated diaphragm, it has higher durability and reliability.

[0023] The present invention provides a manufacturing method for the above-mentioned corrugated diaphragm, firstly determining the required size of the corrugated diaphragm according to the specifications of the oil-filled pressure core; then determining the material of the corrugated diaphragm, and processing the punch and die of the stamping die according to the stretching amount of the material and the preset corrugation pattern; placing the raw material sheet into the stamping die for stamping and forming, and obtaining the first arc-shaped corrugation and the second arc-shaped corrugation of the central part; finally cutting out the outer edge along the preset outer diameter size of the corrugated diaphragm, thereby improving the processing yield and product performance, and optimizing the size specifications of the corrugated diaphragm. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a structural schematic diagram of one embodiment of a corrugated diaphragm provided in a specific embodiment of the present invention;

[0025] Figure 2 It is an axonometric view of one embodiment of the corrugated diaphragm provided in a specific embodiment of the present invention;

[0026] Figure 3 It is a structural schematic diagram of another embodiment of the corrugated diaphragm provided in a specific embodiment of the present invention;

[0027] Figure 4 It is an axonometric view of another embodiment of the corrugated diaphragm provided in a specific embodiment of the present invention.

[0028] In the figure:

[0029] 1. Outer edge; 2. Transition part; 3. Central part; 41. Central pressure-sensitive area; 42. Edge pressure-sensitive area; 51. First arc-shaped corrugation; 52. Second arc-shaped corrugation. DETAILED DESCRIPTION

[0030] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0031] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0033] In the description of this embodiment, the terms "upper", "lower", "right", "left" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operate in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0034] like Figures 1 to 4As shown, the present invention discloses a corrugated diaphragm for an oil-filled pressure core, including an outer edge 1, a transition portion 2 and a central portion 3 that are integrally formed and sequentially connected from the outside to the inside, and the inner ring and the outer ring of the transition portion 2 are respectively connected to the central portion 3 and the outer edge 1. The two sides of the transition portion 2 are respectively connected to the pressure ring and the base of the oil-filled pressure core, mainly to complete the installation of the corrugated diaphragm and the oil-filled pressure core. Exemplarily, the material of the corrugated diaphragm can be combined with a variety of metal materials, and all of them need to have excellent corrosion resistance, such as stainless steel, titanium, tantalum, etc.

[0035] In this embodiment, the pressure ring and base of the oil-filled pressure core are welded together with the corrugated diaphragm at the outer edge 1. The shape of the outer edge 1 is circular. According to different application scenarios, the outer edge 1 can be designed to have different diameters, such as φ8mm, φ10mm, φ12mm, etc., corresponding to the specifications of the oil-filled pressure core. The diameter of the outer edge 1 can be as small as φ6mm. Different from conventional diaphragms, which are limited by factors such as thickness and stress and cannot make the diaphragm diameter very small, the corrugated diaphragm can further reduce the external dimensions and realize more miniaturized applications.

[0036] Specifically, the central part 3 is used to sense external pressure. The central part 3 includes a central pressure-sensing area and multiple edge pressure-sensing areas. The central pressure-sensing area is coaxially arranged with the central part 3. The edge pressure-sensing areas are arranged at a preset distance along the circumference of the central part 3 and are evenly distributed around the central pressure-sensing area to disperse the sensing pressure. Exemplarily, the number of edge pressure-sensing areas should be greater than 3, and the edge pressure-sensing areas can be arranged in a symmetrical form of central radiation to further improve the stability of the corrugated diaphragm.

[0037] In this embodiment, the edge pressure-sensing area is provided with a first arc-shaped corrugation 51, which is concentrically arranged with the edge pressure-sensing area, and can buffer the axial stress on the corrugated diaphragm, while increasing the mechanical strength of the corrugated diaphragm and improving the sensitivity of the corrugated diaphragm. Exemplarily, the number of the first arc-shaped corrugations 51 can be designed to be at least one or more according to the overall size of the corrugated diaphragm, and the multiple first arc-shaped corrugations 51 are distributed in an envelope-shaped spring structure, and the spacing between two adjacent first arc-shaped corrugations 51 is equal.

[0038] It is understandable that a second arc-shaped corrugation 52 is provided between two adjacent edge pressure-sensing areas, and the second arc-shaped corrugation 52 is provided concentrically with the central pressure-sensing area, which can buffer the radial stress on the corrugated diaphragm, avoid the stress in the manufacturing process causing the corrugated diaphragm to produce extrusion deformation, and improve the processing yield and product performance. Similarly, the number of the second arc-shaped corrugations 52 can be designed to be at least one or more according to the overall size of the corrugated diaphragm, and the multiple second arc-shaped corrugations 52 are distributed in an envelope-shaped spring structure, and the spacing between two adjacent second arc-shaped corrugations 52 is equal.

[0039] The first arc-shaped corrugations 51 and the second arc-shaped corrugations 52 are evenly distributed in the circumferential direction of the corrugated diaphragm, and can play a buffering role. When the corrugated diaphragm is subjected to severe vibration caused by high-pressure shock or falling, the first arc-shaped corrugations 51 and the second arc-shaped corrugations 52 can be driven by the diaphragm to release the stress toward the edge of the corrugated diaphragm, thereby reducing the possibility of the corrugated diaphragm rupture.

[0040] Furthermore, the bending directions of the first arc-shaped corrugation 51 and the second arc-shaped corrugation 52 are opposite, and while maintaining the deformation amplitude of the central pressure-sensitive area in response to external pressure, the structural stability of the edge pressure-sensitive area can be maintained, thereby improving the reliability of the product.

[0041] The corrugated diaphragm has improved axial and radial pressure resistance, and can appropriately reduce thickness and mechanical stress while ensuring strength, thereby optimizing the application pressure range, sensitivity, repeatability, nonlinearity, hysteresis and other performance of the corrugated diaphragm. By improving the stress and strength of the corrugated diaphragm, it has higher durability and reliability.

[0042] In one implementation of this embodiment, specifically, Figure 1 and Figure 2 As shown in FIG. 1 , the central pressure-sensitive area and the edge pressure-sensitive area are in the same horizontal plane, but both are relatively protruded from the plane where the transition portion 2 is located.

[0043] In another implementation of this embodiment, specifically as follows Figure 3 and Figure 4 As shown, the central pressure-sensitive area and the edge pressure-sensitive area are on the same horizontal plane as the transition portion 2. At the same time, the second arc-shaped corrugation 52 includes a circumferential corrugation, which surrounds the outer periphery of the central pressure-sensitive area. Compared with the previous embodiment, there is one more circumferential corrugation in the central pressure-sensitive area. However, the two specific embodiments are the same in terms of functional characteristics, but with two different corrugation pattern designs.

[0044] The present invention also provides a manufacturing method for the above-mentioned corrugated diaphragm, firstly, determining the required size of the corrugated diaphragm according to the specifications of the oil-filled pressure core; then determining the material of the corrugated diaphragm, and processing the punch and die of the stamping die according to the stretching amount of the material and the preset corrugation pattern; placing the raw material sheet into the punching die for stamping and forming, to obtain the first arc-shaped corrugation 51 and the second arc-shaped corrugation 52 of the central part 3; finally, cutting out the outer edge 1 along the preset outer diameter size of the corrugated diaphragm to form a complete corrugated diaphragm, which effectively improves the processing yield and product performance, and optimizes the size specifications of the corrugated diaphragm.

[0045] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. Corrugated diaphragm, used for oil-filled pressure core, characterized in that: The corrugated diaphragm comprises an outer edge (1), a transition portion (2) and a central portion (3) which are integrally formed and sequentially connected from the outside to the inside, the two sides of the transition portion (2) are respectively connected to the pressure ring and the base of the oil-filled pressure core; the central portion (3) comprises a central pressure-sensitive area (41) and a plurality of edge pressure-sensitive areas (42), the central pressure-sensitive area (41) is coaxially arranged with the central portion (3), and the edge pressure-sensitive areas (42) are arranged at a preset distance along the circumference of the central portion (3); the edge pressure-sensitive areas (42) are provided with a first arc-shaped corrugation (51), and a second arc-shaped corrugation (52) is provided between two adjacent edge pressure-sensitive areas (42), the first arc-shaped corrugation (51) is concentrically arranged with the edge pressure-sensitive area (42), and the second arc-shaped corrugation (52) is concentrically arranged with the central pressure-sensitive area (41).

2. The corrugated diaphragm according to claim 1, characterized in that: The number of the edge pressure-sensing areas (42) is greater than 3.

3. The corrugated diaphragm according to claim 1, characterized in that: The bending directions of the first arc-shaped corrugation (51) and the second arc-shaped corrugation (52) are opposite.

4. The corrugated diaphragm according to claim 1, characterized in that: One or more first arc-shaped corrugations (51) are provided, and the plurality of first arc-shaped corrugations (51) are distributed in an envelope shape, and the spacing between two adjacent first arc-shaped corrugations (51) is equal.

5. The corrugated diaphragm according to claim 1, characterized in that: One or more second arc-shaped corrugations (52) are provided, and the plurality of second arc-shaped corrugations (52) are distributed in an envelope shape, and the spacing between two adjacent second arc-shaped corrugations (52) is equal.

6. The corrugated diaphragm according to claim 1, characterized in that: The central pressure-sensitive area (41) and the edge pressure-sensitive area (42) are located in the same horizontal plane and are convexly arranged on the plane where the transition portion (2) is located.

7. The corrugated diaphragm according to claim 1, characterized in that: The central pressure-sensitive area (41) and the edge pressure-sensitive area (42) are located on the same horizontal plane as the transition portion (2).

8. The corrugated diaphragm according to claim 7, characterized in that: The second arc-shaped corrugations (52) include circumferential corrugations, and the circumferential corrugations surround the outer circumference of the central pressure-sensing area (41).

9. The corrugated diaphragm according to any one of claims 1 to 8, characterized in that: The diameter of the outer edge (1) is greater than or equal to 6 mm.

10. The method for manufacturing a corrugated diaphragm according to any one of claims 1 to 9, characterized in that: The manufacturing method comprises: Determine the required size of the corrugated diaphragm according to the specifications of the oil-filled pressure core; Determine the material of the corrugated diaphragm, and process the punch and die of the stamping die according to the stretching amount of the material and the preset corrugation pattern; Putting the raw material sheet into the punching die for punching and forming; The outer edge (1) is cut out along a preset outer diameter of the corrugated diaphragm.

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