Scintillator device for electron detector, electron detector and scanning electron microscope

Abstract

The invention discloses a scintillator device for an electronic detector, the electronic detector and a scanning electron microscope. The scintillator device at least comprises a first scintillator, a second scintillator and a power supply unit, the first scintillator and the second scintillator are combined in a specific mode, and the first scintillator is used for generating a first optical signal, so that the electronic detector is modulated into a first working mode; the second scintillator is used for generating a second optical signal, so that the electronic detector is modulated into a second working mode; the power supply unit comprises a first power supply line and a second power supply line, and the power supply unit independently supplies power to the first scintillator or the second scintillator through the first power supply line or the second power supply line, so that the electronic detector is switched between a first working mode and a second working mode. According to the scheme, the working modes can be switched according to detection requirements without changing the structure of the electronic detector, and different detection task requirements are met.

Description

Technical Field

[0001] The present application generally relates to the technical field of electronic detectors, and more specifically to a scintillator device for an electronic detector, an electronic detector and a scanning electron microscope. Background Art

[0002] An electron detector is an electronic detection device that detects and measures electrons based on the interaction between electrons and matter, using parameters such as electron energy, time, and position. Electron detectors are widely used in scientific research and industrial applications, such as imaging in medical diagnosis and non-destructive testing in industrial testing.

[0003] Mainstream electronic detectors are mainly composed of scintillators, phototubes, photomultiplier tubes and amplifiers. Among them, scintillators are the core components of electronic detectors. The scintillators commonly used are not selected at random, but carefully selected according to specific application needs and performance requirements. However, the scintillators in current electronic detectors are all of a single type, and in actual detection work, work requirements may change, and the corresponding type of scintillator needs to be replaced accordingly. This makes it impossible for a single type of scintillator to meet all work requirements, limiting its application range in complex detection tasks. Replacing or adding additional detectors will undoubtedly increase unnecessary workload and costs.

[0004] In view of this, there is an urgent need to provide a solution for a scintillator device for an electronic detector, so that the working mode can be switched according to the detection requirements without changing the structure of the electronic detector to meet the requirements of different detection tasks. Summary of the invention

[0005] In order to at least solve one or more of the above-mentioned technical problems, the present application proposes solutions of a scintillator device for an electron detector in multiple aspects.

[0006] In a first aspect, the present application provides a scintillator device for an electron detector, comprising at least: a first scintillator, a second scintillator and a power supply unit, wherein the first scintillator and the second scintillator are combined in a specific manner, and the first scintillator is used to generate a first light signal after receiving an electron impact, so that the electron detector is modulated into a first operating mode; the second scintillator is used to generate a second light signal after receiving an electron impact, so that the electron detector is modulated into a second operating mode; the power supply unit comprises a first power supply line and a second power supply line, the first power supply line and the second power supply line are respectively connected to the first scintillator and the second scintillator, wherein the power supply unit supplies power to the first scintillator or the second scintillator separately via the first power supply line or the second power supply line, so that the electron detector switches between the first operating mode and the second operating mode.

[0007] In some embodiments, the first scintillator includes a high-brightness scintillator, and the first operating mode is a high-brightness response mode; the second scintillator includes a high-speed scintillator, and the second operating mode is a high-speed response mode.

[0008] In some other embodiments, the specific combination includes at least concentric circle nesting, side by side or four-quadrant type.

[0009] In some other embodiments, when the specific manner is combined into the concentric circle nesting, the first scintillator is nested outside the second scintillator; or, the second scintillator is nested outside the first scintillator.

[0010] In some other embodiments, when the specific mode is combined into the concentric circle nesting, a groove is set at the bottom of the scintillator nested on the outside, and the groove is used to place the first power supply line or the second power supply line to connect the scintillator on the inside.

[0011] In some further embodiments, when the specific combination is a side-by-side arrangement, the first scintillator and the second scintillator are arranged in mirror symmetry.

[0012] In some further embodiments, when the specific manner is combined into the four-quadrant type, the first scintillator and the second scintillator are respectively arranged in diagonal quadrants.

[0013] In some further embodiments, a coating is provided on the surface of the first scintillator and the second scintillator, and the coating is used to connect the first power supply line and the second power supply line so that the power supply unit provides a high voltage.

[0014] In some other embodiments, the connection method for connecting the first power supply line and the second power supply line includes at least one or more of a pressure ring, a probe or a conductive coating.

[0015] In some further embodiments, the method further includes: an isolation layer, wherein the isolation layer is arranged between the first scintillator and the second scintillator to prevent high voltage breakdown.

[0016] In some other embodiments, the isolation layer is made of polymer material, ceramic material or glass material.

[0017] In a second aspect, the present application provides an electronic detector comprising at least: a scintillator device as described in the first aspect; a phototube, a photomultiplier tube and an amplifier, wherein the phototube is used to transmit a first light signal or a second photoelectric signal generated by the scintillator device; the photomultiplier tube is used to convert the first light signal or the second photoelectric signal into a first electrical signal or a second electrical signal respectively; the amplifier is used to amplify the first electrical signal or the second electrical signal so that the electronic detector is modulated into a first operating mode or a second operating mode.

[0018] In a third aspect, the present application provides a scanning electron microscope, comprising: the electron detector described in the aforementioned second aspect.

[0019] Through the scheme of the scintillator device for the electronic detector provided above, the embodiment of the present application combines different types of first scintillators and second scintillators in a specific manner and connects them through different power supply lines, so that under different detection task requirements, the power supply unit can separately power the first scintillator or the second scintillator through different power supply lines, so that the electronic detector can switch between different working modes. Based on this, the embodiment of the present application can achieve the switching of working modes without changing the structure of the electronic detector, thereby meeting the requirements of different detection tasks and reducing the workload and cost of frequent replacement and installation. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] By reading the detailed description below with reference to the accompanying drawings, the above and other purposes, features and advantages of the exemplary embodiments of the present application will become easy to understand. In the accompanying drawings, several embodiments of the present application are shown in an exemplary and non-limiting manner, and the same or corresponding reference numerals represent the same or corresponding parts, wherein:

[0021] Figure 1 is an exemplary schematic diagram showing an existing ET electron detector;

[0022] Figure 2 is an exemplary structural block diagram showing a scintillator device for an electron detector according to an embodiment of the present application;

[0023] Figure 3 is an exemplary schematic diagram showing a concentric circle nested combined scintillator according to an embodiment of the present application;

[0024] Figure 4 is an exemplary schematic diagram showing a side-by-side combined scintillator according to an embodiment of the present application;

[0025] Figure 5 is an exemplary schematic diagram showing a four-quadrant combined scintillator according to an embodiment of the present application;

[0026] Figure 6 is a block diagram showing an exemplary structure of an electronic detector according to an embodiment of the present application;

[0027] Fig. 7A is an exemplary schematic diagram showing a concentric circle nested lower inner side simulation according to an embodiment of the present application;

[0028] Figure 7B is an exemplary schematic diagram showing a concentric circle nested lower outer side simulation according to an embodiment of the present application;

[0029] Figure 8 is an exemplary flowchart showing an electronic detector assembly operation according to an embodiment of the present application;

[0030] Fig. 9 is a block diagram showing an exemplary structure of a scanning electron microscope according to an embodiment of the present application. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0032] It should be understood that the terms "include" and "comprising" used in the specification and claims of the present application indicate the presence of described features, wholes, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or collections thereof.

[0033] It should also be understood that the terms used in this application specification are only for the purpose of describing specific embodiments and are not intended to limit the present application. As used in this application specification and claims, unless the context clearly indicates otherwise, the singular forms of "a", "an" and "the" are intended to include plural forms. It should also be further understood that the term "and / or" used in this application specification and claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes these combinations.

[0034] As used in this specification and claims, the term "if" may be interpreted as "when" or "upon" or "in response to determining" or "in response to detecting," depending on the context. Similarly, the phrase "if it is determined" or "if [described condition or event] is detected" may be interpreted as meaning "upon determination" or "in response to determining" or "upon detection of [described condition or event]" or "in response to detecting [described condition or event]," depending on the context.

[0035] Figure 1 FIG. 1 is an exemplary schematic diagram showing an existing ET electron detector. Figure 1 As shown in , the ET electron detector 100 may include a grid 101, a scintillator 102, a phototube 103, a photomultiplier tube 104 and an amplifier 105 connected in sequence. In the specific detection process, when the electrons interact with the substance to be detected to generate target electrons, the target electrons are first attracted by the grid 101 and enter the scintillator 102, and the scintillator 102 is hit by the target electrons to generate a light signal. Then, the light signal is transmitted to the photomultiplier tube 104 through the phototube 103, converted into an electrical signal and amplified by the photomultiplier tube 104, and then amplified again by the amplifier 105, and finally processed into a target result (for example, generating an image) through the terminal.

[0036] For example, taking the application scenario of a scanning electron microscope as an example, when the electron gun 106 in the scanning electron microscope emits incident electrons to the sample 107, low-energy secondary electrons and high-energy backscattered electrons are generated based on the interaction between the incident electrons and the sample. In this scenario, when the grid of the electron detector is biased with a positive voltage of +300V, the low-energy secondary electrons are attracted by the grid; when the grid bias of the electron detector is -150V, the low-energy secondary electrons are repelled by the grid, while the high-energy backscattered electrons are not affected and can enter the grid. If a high voltage of +10kV is applied to the scintillator, the electrons flying through the grid are accelerated and collide with the scintillator to generate a light signal, which is then converted into an electrical signal and amplified by a photomultiplier tube, and finally transmitted to a computer for processing to generate an image.

[0037] As mentioned above, the scintillators in current electron detectors are all single-type scintillators. For example, the scintillators in the electron detectors are only high-brightness scintillators, or only high-speed scintillators. It can be understood that the high-brightness scintillator has a high luminous efficiency. This feature enables the high-brightness scintillator to capture more signal photons, thereby generating clearer and more detailed images, which are suitable for occasions where the surface details and fine structures of the sample need to be clearly displayed, such as microscopic morphology observation in the fields of life sciences and materials science. High-speed scintillators have a fast response speed. This type of scintillator is the first choice due to its extremely fast response speed and short decay time. It is suitable for occasions where dynamic changes on the sample surface are quickly captured, such as fast scanning imaging, real-time dynamic monitoring, and particle detection in high-energy physics experiments. Generally, scintillators with a photon yield of not less than 15 Photons / keV are called high-brightness scintillators, and scintillators with a decay time of not more than 15ns are called high-speed scintillators.

[0038] However, in actual detection work, work requirements may change. Even when detecting the same sample, sometimes a low electron yield is acceptable but a fast response is required, and sometimes a fast response is not required but high-definition imaging is required. In this case, a single type of scintillator cannot meet all work requirements. If the detector is replaced or additionally installed, it will undoubtedly increase unnecessary workload and cost.

[0039] Based on this, the present application provides a scintillator device for an electronic detector, which combines different types of scintillators in a specific way so that the electronic detector can achieve different working modes and expand the application scope of the electronic detector.

[0040] The specific implementation of the present application is described in detail below with reference to the accompanying drawings.

[0041] Figure 2 FIG. 2 is a block diagram showing an exemplary structure of a scintillator device 200 for an electron detector according to an embodiment of the present application. Figure 2As shown in , the scintillator device 200 may at least include: a first scintillator 201, a second scintillator 202 and a power supply unit 203, wherein the first scintillator 201 and the second scintillator 202 are combined in a specific manner, and the first scintillator 201 is used to generate a first light signal after receiving an electron impact, so that the electronic detector is modulated into a first working mode; the second scintillator 202 is used to generate a second light signal after receiving an electron impact, so that the electronic detector is modulated into a second working mode. The power supply unit 203 includes a first power supply line 204 and a second power supply line 205, and the first power supply line 204 and the second power supply line 205 are respectively connected to the first scintillator 201 and the second scintillator 202, wherein the power supply unit 203 supplies power to the first scintillator 201 or the second scintillator 202 separately via the first power supply line 204 or the second power supply line 205, so that the electronic detector switches between the first working mode and the second working mode.

[0042] In some embodiments, the above-mentioned first scintillator includes a high-brightness scintillator, and the first working mode is a high-brightness response mode. The second scintillator includes a high-speed scintillator, and the second working mode is a high-speed response mode. In other embodiments, the first scintillator may also be a high-speed scintillator, and the corresponding first working mode is a high-speed response mode. The second scintillator is a high-brightness scintillator, and the corresponding second working mode is a high-brightness response mode. That is, the first and second scintillators can be of different types, and the present application does not impose any restrictions in this regard. It can be understood that the aforementioned high-brightness response mode is also a high-photon yield mode. In this mode, more photon signals can be captured, and clearer and more detailed images can be generated, which is suitable for scenes with higher precision requirements. The high-speed response mode has a fast response speed and can quickly capture dynamic changes on the sample surface, which is suitable for scenes with high time accuracy.

[0043] In some embodiments, the above-mentioned specific combination may include but is not limited to concentric circle nesting, side-by-side or four-quadrant. For example, the side-by-side may include horizontal side-by-side or vertical side-by-side. In addition, in addition to the four-quadrant, it may also be a six-quadrant or nine-quadrant type. In some implementation scenarios, the first and second scintillators may be cut and surface treated to achieve the specific combination.

[0044] The first and second scintillators combined in a specific manner are connected respectively through the first power supply line and the second power supply line of the power supply unit. When the power supply unit supplies power to the first scintillator alone via the first power supply line, the electronic detector operates in the first working mode. When the power supply unit supplies power to the second scintillator alone via the second power supply line, the electronic detector switches to the second working mode. In this way, switching of different working modes of the electronic detector can be achieved. In some implementation scenarios, the electronic detector can be of any type, for example, it can be the above-mentioned ET electronic detector, and this application does not limit this.

[0045] Combined with the above description, it can be seen that the embodiment of the present application combines different types of scintillators in a specific way, and can switch the working mode by switching the power supply mode of the scintillator device to control the collision direction of the electrons without changing the structure of the electronic detector. Therefore, the embodiment of the present application solves the problem that the electronic detector with a single scintillator has a narrow application range and is difficult to replace, expands the application range of the electronic detector, and reduces the workload and cost of frequent replacement and installation.

[0046] In some embodiments, when the specific mode is combined into a concentric circle nesting type, the first scintillator is nested on the outside of the second scintillator; or the second scintillator is nested on the outside of the first scintillator. In some embodiments, when the specific mode is combined into a concentric circle nesting type, a groove is set at the bottom of the scintillator nested on the outside, and the groove is used to place the first power supply line or the second power supply line to connect the scintillator on the inside. For example, when the first scintillator is located on the outside, a groove can be opened at the bottom of the first scintillator for placing the second power supply line to connect the second scintillator on the inside. Conversely, when the second scintillator is located on the outside, a groove can be opened at the bottom of the second scintillator for placing the first power supply line to connect the first scintillator on the inside. In some implementation scenarios, the groove faces the center of the concentric circle.

[0047] In some embodiments, when a specific mode is combined into a side-by-side arrangement, the first scintillator and the second scintillator are arranged in a mirror-symmetrical manner. As described above, the side-by-side arrangement may include horizontal side-by-side or vertical side-by-side. For horizontal side-by-side, the first scintillator may be placed on the left and the second scintillator on the right; or the second scintillator may be placed on the left and the first scintillator on the right. For vertical side-by-side, the first scintillator may be placed on the top and the second scintillator on the bottom; or the second scintillator may be placed on the bottom and the first scintillator on the top. The present application does not impose any restrictions in this regard.

[0048] In some embodiments, when a specific method is combined into the four-quadrant type, the first scintillator and the second scintillator are respectively arranged in diagonal quadrants. For example, the first scintillator is placed in the second and fourth quadrants; the second scintillator is placed in the first and third quadrants; or the second scintillator is placed in the second and fourth quadrants; the first scintillator is placed in the first and third quadrants. In other embodiments, the same scintillator can also be placed in adjacent quadrants. For example, the first scintillator is placed in the first and second quadrants; the second scintillator is placed in the third and fourth quadrants. Alternatively, the first scintillator is placed in the second and third quadrants; the second scintillator is placed in the first and fourth quadrants. In some implementation scenarios, if more than two types of scintillators are used, different types of scintillators can be placed in different quadrants, and the present application does not impose any restrictions in this regard.

[0049] In some embodiments, the first scintillator and the second scintillator are provided with a coating on their surfaces, and the coating is used to connect the first power supply line and the second power supply line so that the power supply unit provides a high voltage. In some embodiments, the connection method for connecting the first power supply line and the second power supply line includes at least one or more of a pressure ring, a probe or a conductive coating.

[0050] It should be understood that no matter which specific combination is used, a coating can be formed on the first scintillator and the second scintillator after the combination. In some implementation scenarios, the coating can be made of metal materials, such as aluminum, magnesium, etc. In other implementation scenarios, a coating process such as evaporation coating, chemical vapor deposition, electrochemical coating, sputtering coating, etc. can be used to form a coating on the surface of the first scintillator and the second scintillator.

[0051] In some embodiments, the scintillator device further includes: an isolation layer, which is arranged between the first scintillator and the second scintillator to prevent high voltage breakdown. In some embodiments, the isolation layer is a polymer material, a ceramic material, or a glass material. It can be understood that a gap is left between the first scintillator and the second scintillator after being combined in a specific manner, and the gap between the first scintillator and the second scintillator is filled by using an isolation layer such as a polymer material, a ceramic material, or a glass material to isolate the two scintillators and prevent high voltage breakdown.

[0052] The following will be combined Figure 3-Figure 5 Describe in detail the different specific method combinations.

[0053] Figure 3 FIG. 1 is an exemplary schematic diagram showing a concentric circle nested combination scintillator according to an embodiment of the present application. Figure 3 Figures (a) and (b) in the figure respectively show a top view and a cross-sectional view of the concentric circle nested combination, which exemplarily show that the first scintillator 201 is nested outside the second scintillator 202, and the first scintillator 201 and the second scintillator 202 are respectively connected to the first power supply line 204 and the second power supply line 205. In this scenario, a groove can be opened at the bottom of the first scintillator 201 (corresponding to the position of the second power supply line 205 in the figure) to place the second power supply line 205 to connect the second scintillator 202 inside. In some embodiments, the connection method of the power supply line can adopt, for example, a probe (or a pressure ring) 301.

[0054] Furthermore, a coating 302 is provided on the surface of the first scintillator 201 and the second scintillator 202, and the coating 302 may be, for example, aluminum, magnesium, etc. A power supply line may be connected via the coating 302 to provide a high voltage to the scintillator. An isolation layer 303 is also provided between the first scintillator 201 and the second scintillator 202 to prevent high voltage breakdown when high voltage is applied to the scintillators.

[0055] As an example, the diameter of the first scintillator on the outside can be 6-22mm, the diameter of the second scintillator on the inside can be 2-11mm, and the groove width and depth can be 0.5-6mm and 1mm, respectively. The thickness of the isolation layer can be 0.5-6mm, and the thickness of the coating can be 70-80nm. After the first scintillator and the second scintillator are combined in a concentric circle nested manner, the whole can be a scintillator disk with a diameter of 6-22mm. It should be understood that the aforementioned dimensions are merely exemplary and not restrictive. As can be seen from the foregoing, the second scintillator can also be nested on the outside, with the first scintillator on the inside.

[0056] Figure 4 FIG. 1 is an exemplary schematic diagram showing a side-by-side combination of scintillators according to an embodiment of the present application. Figure 4 exemplarily shows a side-by-side combination of a first scintillator 201 on the left and a second scintillator 202 on the right. The first scintillator 201 and the second scintillator 202 are mirror-symmetrical, and the first scintillator 201 and the second scintillator 202 are connected to a first power supply line 204 and a second power supply line 205, respectively. Similarly, a coating 302 is provided on the surface of the first scintillator 201 and the second scintillator 202 to connect to the power supply line and provide a high voltage for the scintillator. An isolation layer 303 is also provided between the first scintillator 201 and the second scintillator 202 to prevent high voltage breakdown when high voltage is applied to the scintillators.

[0057] As an example, the diameter of the first and second scintillators can be 0-22 mm, the thickness of the isolation layer can be, for example, 0.5-6 mm, and the thickness of the coating can be, for example, 70-80 nm. The whole after the side-by-side combination can be a scintillator disk with a diameter of 0-22 mm. It should be understood that the aforementioned dimensions are only exemplary and not limiting. As can be seen from the foregoing, the left side can also be the second scintillator, and the right side can also be the first scintillator. Alternatively, Figure 4 Flip 90 degrees to form a vertical side-by-side type, with the first scintillator (or the second scintillator) and the second scintillator (or the first scintillator) on the top and bottom respectively.

[0058] Figure 5 is an exemplary schematic diagram showing a four-quadrant combined scintillator according to an embodiment of the present application. Figure 5exemplarily shows that the first scintillator 201 is placed in the second and fourth quadrants, the second scintillator 202 is placed in the first and third quadrants, and the first scintillator 201 and the second scintillator 202 are respectively connected to the first power supply line 204 and the second power supply line 205. Similarly, a coating 302 is provided on the surface of the first scintillator 201 and the second scintillator 202 to connect with the power supply line and provide a high voltage for the scintillator. An isolation layer 303 is also provided between the first scintillator 201 and the second scintillator 202 to prevent high voltage breakdown when high voltage is applied to the scintillators.

[0059] As an example, after the four-quadrant combination, the diameter of the scintillator in each quadrant can be a quarter circle of 0-22mm, the thickness of the isolation layer can be 0.5-6mm, the thickness of the coating can be 70-80nm, and the whole can be a scintillator disk with a diameter of 0-22mm. It should be understood that the aforementioned dimensions are merely exemplary and not restrictive. According to the foregoing, the first scintillator can be placed in the first and second quadrants; the second scintillator can be placed in the third and fourth quadrants. Alternatively, the first scintillator is placed in the second and third quadrants; the second scintillator is placed in the first and fourth quadrants.

[0060] In some embodiments, the present application also provides an electron detector.

[0061] Figure 6 FIG. 6 is a block diagram showing an exemplary structure of an electron detector 600 according to an embodiment of the present application. Figure 6 As shown in , the electronic detector 600 may include a scintillator device 200, a phototube 103, a photomultiplier tube 104, and an amplifier 105. The phototube 103 is used to transmit the first optical signal or the second photoelectric signal generated by the scintillator device 200; the photomultiplier tube 104 is used to convert the first optical signal or the second photoelectric signal into a first electrical signal or a second electrical signal; the amplifier 105 is used to amplify the first electrical signal or the second electrical signal, so that the electronic detector is modulated into the first working mode or the second working mode.

[0062] For more details about the scintillator device 200, please refer to the above Figure 2-Figure 5 The photoelectric tube 103, the photomultiplier tube 104 and the amplifier 105 can refer to Figure 1 Or the description of the prior art, the present application will not repeat it here. In some implementation scenarios, the bottom of the scintillator device of the present application embodiment can be connected to the end of the light guide by, for example, light-conducting glue, transparent silicone or UV glue.

[0063] In some implementation scenarios, when high-quality observation of the surface morphology of the sample is required, the power supply unit supplies power to the first scintillator (e.g., a high-brightness scintillator) separately via the first power supply line through the control of the circuit. At this time, the electrons excited from the sample will hit the high-brightness scintillator, and the high-brightness scintillator generates more light signals, which are transmitted to the photomultiplier tube through the optical guide tube, converted into electrical signals, amplified, and amplified again by the amplifier, and finally modulated into a high-quality image by the terminal. When the observation of the sample needs to be converted from high-quality surface morphology observation to observations that require rapid response such as in-situ stretching, the power supply device stops supplying power to the first scintillator through the control of the circuit, and supplies power to (e.g., a high-speed scintillator) separately via the second power supply line. At this time, the electrons excited from the sample will hit the high-speed scintillator, and the high-speed scintillator generates a small number of light signals but has a good time resolution. The light signal is transmitted through the optical guide tube, converted into electrical signals by the photomultiplier tube, amplified, and amplified again by the amplifier, and finally modulated into a fast-response image by the terminal.

[0064] Fig. 7A and Figure 7B 1 and 2 are exemplary schematic diagrams showing the inner and outer side simulations of the concentric circle nesting according to the embodiment of the present application. Fig. 7A Figures (a), (b) and (c) in the figure respectively show the inner scintillator light source diagram, the inner scintillator light source-phototube-photomultiplier tube transmission simulation diagram and the light window energy illumination distribution diagram after the inner scintillator transmission. Figure 7B Figures (a), (b) and (c) in the figure respectively show the external scintillator light source diagram, the external scintillator light source-phototube-photomultiplier tube transmission simulation diagram and the light window energy illumination distribution diagram after the external scintillator transmission.

[0065] In the above simulation operation, the parameters include: scintillator light source: surface light source-Lambertian scattering 180 degrees-wavelength 530nm-power 100w; light guide: transmittance 99%, reflectivity 1%, n=1.46; photomultiplier tube cross-sectional area: pi*8^2; cut-off light power 0.001w; scintillator inner area pi*18; scintillator outer area pi*(36-18). After switching the simulation working mode, it can be obtained that the transmission efficiency of the inner scintillator to the photomultiplier tube is 97.15%, and the transmission efficiency of the outer scintillator to the photomultiplier tube is 97.22%, which can meet the working requirements of the electronic detector.

[0066] Figure 8 FIG. 8 is an exemplary flow chart showing an electronic detector assembly operation 800 according to an embodiment of the present application. Figure 8As shown in , at step S801, the grid is first welded to the grid seat. Next, at step S802, the scintillator device of the embodiment of the present application is bonded to the phototube. For example, UV glue can be used for connection. Further, at step S803, parts such as feedthroughs and flanges are assembled, and at step S804, the scintillator device is installed using, for example, a pressure ring. At step S805 and at step S806, the housing and the photomultiplier tube module are installed. Finally, at step S807, the machine operation is performed.

[0067] Fig. 9 FIG. 9 is an exemplary structural block diagram of a scanning electron microscope 900 according to an embodiment of the present application. Fig. 9 As shown in FIG. 1 , the scanning electron microscope 900 includes the electron detector 600 of the embodiment of the present application. For more details about the electron detector 600, please refer to the above Figure 6 The description of is not repeated here in this application.

[0068] Based on the foregoing, it can be seen that the embodiments of the present application significantly improve the working performance of the electronic detector by improving the scintillator structure, combining different types of scintillators in a specific manner, and respectively supplying power through the power supply unit to achieve switching of different working modes. For example, the specific combination significantly improves the detection efficiency, sensitivity, response time, etc. of the electronic detector, and can maintain stable detection performance in a complex and changeable radiation environment.

[0069] Furthermore, the electronic detector of the embodiment of the present application is easy to manufacture and simple to install, which greatly saves costs and is suitable for large-scale production. Compared with electronic detectors containing a single type of scintillator, the excellent detection performance of the electronic detector of the embodiment of the present application enables it to be widely used in high-energy physics experiments, nuclear medicine imaging, environmental monitoring, industrial detection and other fields, further expanding the application range of electronic detectors.

[0070] It should be understood that when the terms "first", "second", "third" and "fourth" are used in the claims, the specification and the drawings of the present application, they are only used to distinguish different objects, rather than to describe a specific order. The terms "include" and "comprise" used in the specification and claims of the present application indicate the presence of the described features, wholes, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or their collections.

[0071] It should also be understood that the terms used in this application specification are only for the purpose of describing specific embodiments and are not intended to limit the present application. As used in this application specification and claims, unless the context clearly indicates otherwise, the singular forms of "a", "an" and "the" are intended to include plural forms. It should also be further understood that the term "and / or" used in this application specification and claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes these combinations.

[0072] Although the implementation methods of the present application are as above, the contents described are only examples adopted to facilitate the understanding of the present application, and are not intended to limit the scope and application scenarios of the present application. Any technician in the technical field described in the present application can make any modifications and changes in the form and details of the implementation without departing from the spirit and scope disclosed in the present application, but the scope of patent protection of the present application shall still be subject to the scope defined in the attached claims.

Claims

1. A scintillator device for an electron detector, comprising at least: A first scintillator, a second scintillator and a power supply unit, wherein the first scintillator and the second scintillator are combined in a specific manner, and The first scintillator is used to generate a first light signal after receiving an electron impact, so that the electron detector is modulated into a first operating mode; The second scintillator is used to generate a second light signal after receiving an electron impact, so that the electron detector is modulated into a second operating mode; The power supply unit includes a first power supply line and a second power supply line, and the first power supply line and the second power supply line are respectively connected to the first scintillator and the second scintillator, wherein the power supply unit supplies power to the first scintillator or the second scintillator separately via the first power supply line or the second power supply line, so that the electronic detector switches between the first working mode and the second working mode. 2 . The scintillator device according to claim 1 , wherein the first scintillator comprises a high-brightness scintillator, and the first operating mode is a high-brightness response mode; the second scintillator comprises a high-speed scintillator, and the second operating mode is a high-speed response mode. 3 . The scintillator device according to claim 1 , wherein the specific combination of modes at least includes concentric circle nesting, side by side or four-quadrant mode.

4. The scintillator device according to claim 3, wherein when the specific mode is combined into the concentric circle nesting mode, The first scintillator is nested outside the second scintillator; or, The second scintillator is nested outside the first scintillator.

5. The scintillator device according to claim 4, wherein when the specific mode is combined into the concentric circle nesting, a groove is provided at the bottom of the scintillator nested on the outside, and the groove is used to place the first power supply line or the second power supply line to connect the scintillator on the inside. The scintillator device according to claim 3 , wherein when the specific combination is a side-by-side arrangement, the first scintillator and the second scintillator are arranged in mirror symmetry. 7 . The scintillator device according to claim 3 , wherein when the specific mode combination is the four-quadrant type, the first scintillator and the second scintillator are respectively arranged in diagonal quadrants. 8 . The scintillator device according to claim 1 , wherein surfaces of the first scintillator and the second scintillator are provided with a coating, and the coating is used to connect the first power supply line and the second power supply line so that the power supply unit provides a high voltage. 9 . The scintillator device according to claim 8 , wherein a connection method for connecting the first power supply line and the second power supply line comprises at least one or more of a pressure ring, a probe or a conductive coating.

10. The scintillator device according to claim 8, further comprising: An isolation layer is arranged between the first scintillator and the second scintillator to prevent high voltage breakdown. The scintillator device according to claim 10 , wherein the isolation layer is a polymer material, a ceramic material or a glass material.

12. An electronic detector, comprising at least: The scintillator device according to any one of claims 1 to 11; Phototubes, photomultiplier tubes and amplifiers, The photoelectric tube is used to transmit the first light signal or the second photoelectric signal generated by the scintillator device; The photomultiplier tube is used to convert the first optical signal or the second photoelectric signal into a first electrical signal or a second electrical signal respectively; The amplifier is used to amplify the first electrical signal or the second electrical signal so that the electronic detector is modulated into the first working mode or the second working mode.

13. A scanning electron microscope comprising: The electron detector according to claim 12.

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