Probe camera module and method for compensating optical axis deviation of system in non-normal temperature environment

Abstract

The invention provides a probe camera module and method for compensating system optical axis deviation in a non-normal temperature environment, and relates to the technical field of semiconductor detection, the camera module comprises an overall frame, a light source, a CCD camera, a first line expansion unit, a second line expansion unit, a third line expansion unit, a first pitching dimension, a first sphere, a second sphere and a third sphere, according to the probe camera module, the size of a line expansion end of a first line expansion unit and the size of a line expansion end of a second line expansion unit are increased when the temperature changes, so that a first ball body enters a first pitching angle adjusting opening, a third ball body enters a second pitching angle adjusting opening, the pitching angle of the first pitching dimension is changed, the optical axis offset is compensated, and the pitching angle of the second pitching dimension is adjusted. Even if working condition differences exist under different machine tables, it can be guaranteed that the position coordinate variation of the optical axis object plane of the camera module in the three-dimensional space is reduced to about 3 # imgabs0 #, high-precision measurement is completed, and the problem that under the extreme temperature condition, the three-dimensional space position change of the object plane of an existing probe camera is large is solved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor detection technology, and in particular to a probe camera module and method for compensating for optical axis deviation of a system in an abnormal temperature environment. Background Art

[0002] Under extreme temperature conditions, the three-dimensional spatial position change of the object surface of the current probe camera is usually 30 For high-precision measurement, this deviation is relatively large and has a greater impact on the measurement results. In addition, slight differences in working conditions between different inspection machines will also make the camera module's consistency in this indicator poor. This means that in practical applications, how to improve the stability and consistency of the probe camera in very low temperature environments is a problem that needs to be solved. Summary of the invention

[0003] Therefore, the technical problem to be solved by the present invention is to overcome the defects in the prior art, thereby providing a probe camera module and method for compensating for system optical axis offset in an abnormal temperature environment.

[0004] A probe camera module for compensating the optical axis offset of a non-normal temperature environment comprises: an overall frame, a light source and a CCD camera, wherein the light source and the CCD camera are both arranged on the overall frame, a lens barrel and a first linear expansion and pitching platform are also arranged in the overall frame, the first linear expansion and pitching platform is arranged below the lens barrel, the first linear expansion and pitching platform comprises a main frame, a first linear expansion unit, a second linear expansion unit, a third linear expansion unit and a first pitching dimension, a first pitching angle adjustment port and a second pitching angle adjustment port are provided on the first pitching dimension, a linear expansion end of the first linear expansion unit is arranged on the main frame, a first sphere is arranged at the other end of the first linear expansion unit, and a first sphere sliding device is provided. The first linear expansion unit is arranged on the first pitch angle adjustment port, the diameter of the first sphere is greater than the height of the first pitch angle adjustment port, the linear expansion end of the second linear expansion unit is arranged on the main frame, the other end of the second linear expansion unit is arranged with a second sphere, the second sphere is slidably connected with one end of the third linear expansion unit, the other end of the third linear expansion unit is arranged with a third sphere, the third sphere is slidably arranged on the second pitch angle adjustment port, the diameter of the third sphere is greater than the height of the second pitch angle adjustment port, the first linear expansion unit is arranged with a first spring, the second linear expansion unit is arranged with a second spring, the third linear expansion unit is arranged with a third spring, and a reflector is arranged on the first pitch dimension.

[0005] Furthermore, the first wire expansion unit includes a first wire expansion block and a first telescopic rod, the first wire expansion block is arranged on the main frame, one end of the first telescopic rod is connected to the first wire expansion block, and the first sphere is arranged at the other end of the first telescopic rod.

[0006] Furthermore, the second linear expansion unit includes a second linear expansion block and a second telescopic rod, the second telescopic rod is parallel to the first telescopic rod, the second linear expansion block is arranged on the main frame, one end of the second telescopic rod is connected to the second linear expansion block, and the second sphere is arranged at the other end of the second telescopic rod.

[0007] Furthermore, the third linear expansion unit includes a third telescopic rod, the third telescopic rod is perpendicular to the second telescopic rod, one end of the third telescopic rod is slidably connected to the second sphere, and the third sphere is arranged at the other end of the third telescopic rod.

[0008] Furthermore, the lens barrel is a low-power lens barrel, which is arranged above the first linear expansion and pitch platform. A high-power lens barrel is also arranged in the overall frame, and the high-power lens barrel is parallel to the low-power lens barrel. A second linear expansion and pitch platform is arranged below the high-power lens barrel, and a first beam splitter is arranged on the second linear expansion and pitch platform.

[0009] Furthermore, the camera module also includes a magnification switching device, which is slidably set on the overall frame, the magnification switching device is located between the high-power lens barrel and the first beam splitter, the magnification switching device is connected to the driving end of the driving unit, and the magnification switching device is provided with a high-power light-transmitting port corresponding to the high-power lens barrel and a low-power light-transmitting port corresponding to the low-power lens barrel, and the spacing distance between the high-power light-transmitting port and the low-power light-transmitting port is smaller than the spacing distance between the high-power lens barrel and the low-power lens barrel.

[0010] Furthermore, the driving unit is a pneumatic structure, and the driving end of the pneumatic structure is connected to the ratio switching device.

[0011] Furthermore, the camera module also includes a lower cover and an upper cover, the lower cover is connected to one side of the overall frame, and the upper cover is connected to the other side of the overall frame.

[0012] Furthermore, the first beam splitter is a semi-transparent and semi-reflective mirror.

[0013] The present invention also includes a method for compensating for the optical axis offset of a system in an abnormal temperature environment. The method is implemented based on a probe camera module for compensating for the optical axis offset of a system in an abnormal temperature environment as described in any of the above items. The linear expansion end of the first linear expansion unit and the linear expansion end of the second linear expansion unit increase in size as the temperature changes, so that the first sphere enters the first pitch angle adjustment port, and the second sphere moves toward the direction close to the third linear expansion unit. The third linear expansion unit drives the third sphere to move toward the direction close to the first pitch dimension, and the third sphere enters the second pitch angle adjustment port, changing the pitch angle of the first pitch dimension to compensate for the optical axis offset.

[0014] The technical solution of the present invention has the following advantages: The present invention provides a probe camera module and method for compensating for the optical axis offset of a system in an abnormal temperature environment. While meeting the high-precision technical indicators of the probe camera, it ensures that the relative position of the optical axis of the camera module is consistent under abnormal temperature conditions, so that the relative position of the camera module under abnormal temperature conditions changes very little. This design not only reduces the design difficulty but also maintains the accuracy of the camera module under abnormal temperatures. The probe camera module increases in size through the linear expansion end of the first linear expansion unit and the linear expansion end of the second linear expansion unit as the temperature changes, so that the first sphere enters the first pitch angle adjustment port, and the third sphere enters the second pitch angle adjustment port, so as to change the pitch angle of the first pitch dimension and compensate for the optical axis offset. At the same time, the spatial position of the optical axis at normal temperature is used as the standard. Even if there are differences in working conditions under different machines, it can ensure that the position coordinate change of the object plane of the optical axis of the camera module in three-dimensional space is reduced to 3 Complete high-precision measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 It is a schematic plan view of the overall structure of the present invention; Figure 2 It is a side view of the overall structure of the present invention; Figure 3 It is a schematic plan view of the first-line inflation and pitching platform structure of the present invention; Figure 4 It is a side view of the first-line inflation and pitching platform structure of the present invention; Figure 5 It is a schematic diagram of the structure of the ratio switching device of the present invention; Figure 6 It is a schematic structural diagram of the first pitch dimension and main frame of the present invention.

[0017] Description of reference numerals: 1- overall frame; 2- high-power lens barrel; 3- light source; 4- CCD camera; 5- magnification switching device; 6- first linear expansion and pitching platform; 7- second linear expansion and pitching platform; 8- lower cover; 9- upper cover; 10- pneumatic structure; 11- reflector; 12- first beam splitter; 13- second beam splitter; 14- third beam splitter; 15- first light outlet; 16- second light outlet; 17- third light outlet; 18- fourth light outlet; 19- high-power light transmission port; 20- low-power light transmission port; 21- light source incident port; 22- light source exit port; 23- low-power lens barrel; 24- first linear expansion block; 25- second linear expansion block; 26- first spring; 27- first telescopic rod; 28- first pitch dimension; 29- second telescopic rod; 30- second spring; 31- third telescopic rod; 32- third spring; 33- main frame. DETAILED DESCRIPTION

[0018] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0020] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0021] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0022] like Figure 1 , Figure 3 Figure 4 and Figure 6 A probe camera module for compensating the optical axis offset of a non-normal temperature environment is shown, comprising: an overall frame 1, a light source 3 and a CCD camera 4, wherein the light source 3 and the CCD camera 4 are both arranged on the overall frame 1, and a lens barrel and a first linear expansion and pitching platform 6 are also arranged in the overall frame 1, wherein the first linear expansion and pitching platform 6 is arranged below the lens barrel, and the first linear expansion and pitching platform 6 comprises a main frame 33, a first linear expansion unit, a second linear expansion unit, a third linear expansion unit and a first pitch dimension 28, wherein a first pitch angle adjustment opening and a second pitch angle adjustment opening are provided on the first pitch dimension 28, and a linear expansion end of the first linear expansion unit is arranged on the main frame 33, and a first sphere is arranged at the other end of the first linear expansion unit, and the first The sphere is slidably arranged on the first pitch angle adjustment port, and the diameter of the first sphere is greater than the height of the first pitch angle adjustment port. The linear expansion end of the second linear expansion unit is arranged on the main frame 33, and a second sphere is arranged on the other end of the second linear expansion unit. The second sphere is slidably connected to one end of the third linear expansion unit, and a third sphere is arranged on the other end of the third linear expansion unit. The third sphere is slidably arranged on the second pitch angle adjustment port, and the diameter of the third sphere is greater than the height of the second pitch angle adjustment port. A first spring 26 is arranged on the first linear expansion unit, a second spring 30 is arranged on the second linear expansion unit, a third spring 32 is arranged on the third linear expansion unit, and a reflector 11 is arranged on the first pitch dimension 28.

[0023] The probe camera module of the above-mentioned non-normal temperature environment compensation system optical axis offset not only meets the high-precision technical indicators of the probe camera, but also ensures that the relative position of the optical axis of the camera module is consistent under normal temperature conditions, so that the relative position of the camera module under normal temperature conditions changes very little. This design not only reduces the design difficulty but also maintains the accuracy of the camera module under normal temperatures. The probe camera module increases in size through the linear expansion end of the first linear expansion unit and the linear expansion end of the second linear expansion unit as the temperature changes, so that the first sphere enters the first pitch angle adjustment port, and the third sphere enters the second pitch angle adjustment port, changing the pitch angle of the first pitch dimension 28 to compensate for the optical axis offset. At the same time, the spatial position of the optical axis at normal temperature is used as the standard. Even if there are differences in working conditions under different machines, the position coordinate change of the object plane of the optical axis of the camera module in three-dimensional space can be reduced to 3 Complete high-precision measurement.

[0024] like Figure 3 and Figure 6As shown, in this embodiment, the first pitch dimension 28 is composed of a base and a pitch platform, wherein the base is mounted on the main frame 33, and the pitch platform is mounted on the base, and the base and the pitch platform are connected by a plurality of seventh springs, so the opening between the base and the pitch platform located on the first sphere movement trajectory is a first pitch angle adjustment opening, and the opening between the base and the pitch platform located on the third sphere movement trajectory is a second pitch angle adjustment opening; the purpose of using the seventh spring to connect the base and the pitch platform is that when the first sphere and the third sphere enter the first pitch dimension 28, the pitch platform has space for pitch angle adjustment, and at the same time, after the first sphere and the third sphere leave the first pitch dimension 28, the pitch platform can also be automatically reset; the first linear expansion unit includes a first linear expansion block 24 and The first telescopic rod 27 and the first linear expansion block 24 are arranged on the main frame 33, one end of the first telescopic rod 27 is connected to the first linear expansion block 24, the first sphere is arranged at the other end of the first telescopic rod 27, the main frame 33 is also provided with a first transverse partition, the first telescopic rod 27 is provided with a first spring 26, the first spring 26 is located between the first linear expansion block 24 and the first transverse partition, when the temperature rises, the size of the first linear expansion block 24 increases, the first telescopic rod 27 causes the first sphere to enter the first pitch angle adjustment port under the effect of the increase in the size of the first linear expansion block 24, at this time the first spring 26 is compressed, when the temperature drops, the size of the first linear expansion block 24 returns to its original state, the first spring 26 releases the pressure and automatically rebounds to drive the first telescopic rod 27 and the first sphere to reset;The second linear expansion unit includes a second linear expansion block 25 and a second telescopic rod 29, the second telescopic rod 29 is parallel to the first telescopic rod 27, the second linear expansion block 25 is arranged on the main frame 33, one end of the second telescopic rod 29 is connected to the second linear expansion block 25, and the second sphere is arranged at the other end of the second telescopic rod 29. The third linear expansion unit includes a third telescopic rod 31, the third telescopic rod 31 is perpendicular to the second telescopic rod 29, one end of the third telescopic rod 31 is slidably connected to the second sphere, and the third sphere is arranged at the other end of the third telescopic rod 31. A second spring 30 is arranged on the second telescopic rod 29, and a third spring 32 is arranged on the third telescopic rod 31. A second transverse partition and a first vertical partition are also arranged on the main frame 33. The first transverse partition is parallel to the second transverse partition, and the first vertical partition is perpendicular to the first transverse partition. The second spring 30 is located between the first transverse partition and the second transverse partition, and the third spring 32 is located at the first transverse partition. Between a vertical partition and the limiting boss on the third telescopic rod 31, when the temperature rises, the size of the second linear expansion block 25 increases, and the second telescopic rod 29 moves the second sphere toward the third telescopic rod 31 under the action of the increase in the size of the second linear expansion block 25, and the second spring 30 is compressed. Since the distances at various locations on the second sphere are not equal, during the movement of the second sphere, the third telescopic rod 31 will gradually drive the third sphere into the second pitch angle adjustment port, and the third spring 32 is compressed to achieve the purpose of adjusting the pitch angle of the pitch platform. When the temperature drops, the size of the second linear expansion block 25 is restored, the second spring 30 releases pressure, the second telescopic rod 29 and the second sphere move away from the third telescopic rod 31 to achieve reset, and at the same time, the third spring 32 also releases pressure, the third telescopic rod 31 drives the third sphere out of the second pitch angle adjustment port, and the third telescopic rod 31 also returns to its original position. ;

[0025] like Figure 1 and Figure 4 As shown, in the present embodiment, the lens barrel is a low-power lens barrel 23, which is arranged above the first linear expansion and pitching platform 6. A high-power lens barrel 2 is also arranged in the overall frame 1, and the high-power lens barrel 2 is parallel to the low-power lens barrel 23. A second linear expansion and pitching platform 7 is arranged below the high-power lens barrel 2. The structural composition and working principle of the second linear expansion and pitching platform 7 are consistent with those of the first linear expansion and pitching platform 6, so they are not described in detail here. A first beam splitter 12 is arranged on the pitch dimension of the second linear expansion and pitching platform 7, and the first beam splitter 12 is a semi-transparent and semi-reflective mirror. The semi-transparent and semi-reflective mirror is the prior art and is also not described in detail here. A second beam splitter 13 is arranged in the high-power lens barrel 2, and a third beam splitter 14 is arranged in the low-power lens barrel 23. The second beam splitter 13 and the third beam splitter 14 are also semi-transparent and semi-reflective mirrors.

[0026] like Figure 1 and Figure 5As shown, in this embodiment, the camera module also includes a magnification switching device 5, which is slidably arranged on the overall frame 1, and the magnification switching device 5 is located between the high-power lens barrel 2 and the first beam splitter 12. The magnification switching device 5 is connected to the driving end of the driving unit, and the driving unit is a pneumatic structure 10. The driving end of the pneumatic structure 10 is connected to the magnification switching device 5. A high-power light-transmitting port 19 corresponding to the high-power lens barrel 2 and a low-power light-transmitting port 20 corresponding to the low-power lens barrel 23 are provided on the magnification switching device 5. The spacing distance between the high-power light-transmitting port 19 and the low-power light-transmitting port 20 is smaller than the spacing distance between the high-power lens barrel 2 and the low-power lens barrel 23, so as to ensure that when the magnification switching device 5 is used, only the light path of one of the high-power lens barrel 2 or the low-power lens barrel 23 is unobstructed, and the other lens barrel is blocked by the magnification switching device 5, thereby realizing high and low magnification switching.

[0027] like Figure 1~Figure 3 As shown, in this embodiment, the camera module further includes a lower cover 8 and an upper cover 9. The lower cover 8 is connected to one side of the overall frame 1, and the upper cover 9 is connected to the other side of the overall frame 1. The lower cover 8 and the upper cover 9 protect the interior of the camera module. Figure 2 The direction of arrow A shown is the direction of heat radiation of the camera module, that is, the upper cover 9 is the direction in which the camera module is first subjected to heat radiation. Therefore, the first line expansion block 24 and the second line expansion block 25 are installed to the upper cover 9, so that the first line expansion block 24 and the second line expansion block 25 can sense the temperature change in time, so that the first line expansion block 24 and the second line expansion block 25 can change size in time.

[0028] like Figure 1 , Figure 3 , Figure 4 , Figure 5 and Figure 6 As shown, the present invention also includes a method for compensating for optical axis offset of a non-normal temperature environment system, which is implemented based on a probe camera module for compensating for optical axis offset of a non-normal temperature environment system as described in any one of the above items, and the linear expansion end of the first linear expansion unit and the linear expansion end of the second linear expansion unit increase in size as the temperature changes, so that the first sphere enters the first pitch angle adjustment port, the second sphere moves toward the direction close to the third linear expansion unit, the third linear expansion unit drives the third sphere to move toward the direction close to the first pitch dimension 28, the third sphere enters the second pitch angle adjustment port, changes the pitch angle of the first pitch dimension 28, and compensates for the optical axis offset; Specifically, when the temperature rises, the size of the first linear expansion block 24 increases, and the first telescopic rod 27 causes the first sphere to enter the first pitch angle adjustment port under the effect of the increase in the size of the first linear expansion block 24, thereby changing the pitch angle of the first pitch dimension 28 and compensating for the optical axis offset. At this time, the first spring 26 is compressed, and when the temperature drops, the size of the first linear expansion block 24 returns to its original state, and the first spring 26 releases the pressure and automatically rebounds to drive the first telescopic rod 27 and the first sphere to reset; similarly, when the temperature rises, the size of the second linear expansion block 25 increases, and the second telescopic rod 29 causes the second sphere to move toward the third telescopic rod 31 under the effect of the increase in the size of the second linear expansion block 25, and the second spring 30 is compressed. Since the distances at various locations on the second sphere are not equal, at the first During the movement of the two balls, the third telescopic rod 31 will gradually drive the third ball into the second pitch angle adjustment port, and the third spring 32 will be compressed to achieve the purpose of adjusting the pitch angle of the pitch platform. When the temperature drops, the size of the second linear expansion block 25 is restored, and the second spring 30 releases the pressure. The second telescopic rod 29 and the second ball move away from the third telescopic rod 31 to achieve reset. At the same time, the third spring 32 also releases the pressure, and the third telescopic rod 31 drives the third ball out of the second pitch angle adjustment port, and the third telescopic rod 31 also returns to its original position. Since the structural composition and working principle of the second linear expansion pitch platform 7 are consistent with those of the first linear expansion pitch platform 6, the second linear expansion pitch platform 7 also realizes compensation of the optical axis offset according to the above working process. In addition, in the technical solution provided by the present invention, when the camera module is in high-magnification mode, the light path direction is as follows: the light source 3 emits light, which is incident on the second beam splitter 13 through the light source incident port 21, wherein part of the light is horizontally incident on the third beam splitter 14 through the light source exit port 22, and the remaining part of the light is vertically emitted to the first light exit port 15, and the light emitted from the first light exit port 15 is irradiated to the detection target and then reflected back to the second beam splitter 13 through the first light exit port 15, wherein part of the light is vertically reflected to the light source 3, and the remaining part of the light is directly incident on the first beam splitter 12 through the third light exit port 17 and the high-magnification light transmission port 19, and then incident on the CCD camera 4 after being reflected by the first beam splitter 12; When the camera mode is low magnification mode, the light path is as follows: the light source 3 emits light, which is incident on the second beam splitter 13 through the light source incident port 21, part of which is horizontally incident on the third beam splitter 14 through the light source exit port 22, and the rest of the light is vertically emitted to the first light exit port 15. The light incident on the third beam splitter 14 is emitted to the detection target through the second light exit port 16. After being reflected by the detection target, the light source is incident on the third beam splitter 14 through the second light exit port 16, and then is incident on the reflector 11 through the fourth light exit port 18 and the low magnification light transmission port 20. The reflector 11 reflects the light to the first beam splitter 12, and then the light is horizontally incident on the CCD camera 4 through the first beam splitter 12; the optical axis offset is compensated by the first linear rise and pitch stage 6 and the second linear rise and pitch stage 7. The changes in the first linear rise block 24 and the second linear rise block 25 are exactly equal to the variables between the components after fusion, and the compensation optical axis error range is ±3 .

[0029] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A probe camera module for compensating for system optical axis deviation in an abnormal temperature environment, comprising: An overall frame (1), a light source (3) and a CCD camera (4), characterized in that the light source (3) and the CCD camera (4) are both arranged on the overall frame (1), a lens barrel and a first linear expansion and pitching platform (6) are also arranged in the overall frame (1), the first linear expansion and pitching platform (6) is arranged below the lens barrel, the first linear expansion and pitching platform (6) comprises a main frame (33), a first linear expansion unit, a second linear expansion unit, a third linear expansion unit and a first pitching dimension (28), a first pitching angle adjustment opening and a second pitching angle adjustment opening are provided on the first pitching dimension (28), a linear expansion end of the first linear expansion unit is arranged on the main frame (33), a first sphere is arranged at the other end of the first linear expansion unit, and the first sphere slides The first sphere is arranged on the first pitch angle adjustment opening, the diameter of the first sphere is greater than the height of the first pitch angle adjustment opening, the linear expansion end of the second linear expansion unit is arranged on the main frame (33), the other end of the second linear expansion unit is arranged with a second sphere, the second sphere is slidably connected to one end of the third linear expansion unit, the other end of the third linear expansion unit is arranged with a third sphere, the third sphere is slidably arranged on the second pitch angle adjustment opening, the diameter of the third sphere is greater than the height of the second pitch angle adjustment opening, the first linear expansion unit is arranged with a first spring (26), the second linear expansion unit is arranged with a second spring (30), the third linear expansion unit is arranged with a third spring (32), and the first pitch axis (28) is arranged with a reflector (11).

2. The probe camera module for compensating the optical axis deviation of the system in an abnormal temperature environment according to claim 1, characterized in that: The first linear expansion unit comprises a first linear expansion block (24) and a first telescopic rod (27); the first linear expansion block (24) is arranged on the main frame (33); one end of the first telescopic rod (27) is connected to the first linear expansion block (24); and the first sphere is arranged at the other end of the first telescopic rod (27).

3. The probe camera module for compensating the optical axis deviation of the system in an abnormal temperature environment according to claim 2, characterized in that: The second linear expansion unit comprises a second linear expansion block (25) and a second telescopic rod (29), the second telescopic rod (29) being parallel to the first telescopic rod (27), the second linear expansion block (25) being arranged on the main frame (33), one end of the second telescopic rod (29) being connected to the second linear expansion block (25), and the second sphere being arranged at the other end of the second telescopic rod (29).

4. The probe camera module for compensating the optical axis deviation of the system in an abnormal temperature environment according to claim 3, characterized in that: The third linear expansion unit comprises a third telescopic rod (31), the third telescopic rod (31) being perpendicular to the second telescopic rod (29), one end of the third telescopic rod (31) being slidably connected to the second sphere, and the third sphere being arranged at the other end of the third telescopic rod (31).

5. The probe camera module for compensating the optical axis deviation of the system in an abnormal temperature environment according to claim 1, characterized in that: The lens barrel is a low-power lens barrel (23), which is arranged above a first linear elevation and pitch platform (6). A high-power lens barrel (2) is also arranged in the overall frame (1), the high-power lens barrel (2) is parallel to the low-power lens barrel (23), a second linear elevation and pitch platform (7) is arranged below the high-power lens barrel (2), and a first beam splitter (12) is arranged on the second linear elevation and pitch platform (7).

6. The probe camera module for compensating the optical axis deviation of the system in an abnormal temperature environment according to claim 5, characterized in that: The camera module further comprises a magnification switching device (5), the magnification switching device (5) being slidably arranged on the overall frame (1), the magnification switching device (5) being located between the high-power lens barrel (2) and the first beam splitter (12), the magnification switching device (5) being connected to a driving end of a driving unit, the magnification switching device (5) being provided with a high-power light-transmitting port (19) corresponding to the high-power lens barrel (2) and a low-power light-transmitting port (20) corresponding to the low-power lens barrel (23), the spacing distance between the high-power light-transmitting port (19) and the low-power light-transmitting port (20) being smaller than the spacing distance between the high-power lens barrel (2) and the low-power lens barrel (23).

7. The probe camera module for compensating the optical axis deviation of the system in an abnormal temperature environment according to claim 6, characterized in that: The driving unit is a pneumatic structure (10), and a driving end of the pneumatic structure (10) is connected to the magnification switching device (5).

8. The probe camera module for compensating for optical axis deviation in an abnormal temperature environment according to claim 1, characterized in that: The camera module further comprises a lower cover (8) and an upper cover (9), wherein the lower cover (8) is connected to one side of the overall frame (1), and the upper cover (9) is connected to the other side of the overall frame (1).

9. The probe camera module for compensating for optical axis deviation in an abnormal temperature environment according to claim 5, characterized in that: The first beam splitter (12) is a semi-transparent and semi-reflective mirror.

10. A method for compensating for optical axis deviation of a system in an abnormal temperature environment, the method being implemented based on the probe camera module for compensating for optical axis deviation of a system in an abnormal temperature environment as claimed in any one of claims 1 to 9, characterized in that: The linear expansion end of the first linear expansion unit and the linear expansion end of the second linear expansion unit increase in size as the temperature changes, causing the first sphere to enter the first pitch angle adjustment opening, the second sphere to move toward the third linear expansion unit, the third linear expansion unit drives the third sphere to move toward the first pitch dimension (28), the third sphere enters the second pitch angle adjustment opening, changes the pitch angle of the first pitch dimension (28), and compensates for the optical axis offset.

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