Test method, device and equipment and computer readable storage medium

Abstract

The invention relates to the technical field of semiconductor testing, and discloses a testing method, device and equipment and a computer readable storage medium, and the testing method comprises the steps: selecting a target vacuum hole from a vacuum hole set on an objective table; testing the target vacuum hole to obtain test data; the test data comprises the aperture of the target vacuum hole and the suction force of the vacuum hole; storing the test data, and marking the test state corresponding to the target vacuum hole as a tested state; when it is detected that the test state of the vacuum hole in the vacuum hole set is an untested state, selecting the vacuum hole in the untested state as a target vacuum hole, and returning to test the target vacuum hole; and in response to the fact that no vacuum hole with the test state being an untested state exists in the vacuum hole set, statistics is performed according to each piece of stored test data, and a comprehensive suction distribution diagram is drawn, so that an analysis means can be provided for the vacuum holes in the objective table.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor testing technology, and in particular to a testing method, device, equipment and computer-readable storage medium. Background Art

[0002] A probe station is a semiconductor testing device, which generally includes a stage for adsorbing semiconductor wafers (such as wafers). A vacuum hole is set on the stage, and the air flow in the vacuum hole is extracted to adsorb and fix the semiconductor wafer placed on the stage.

[0003] With the continuous development of the semiconductor field, semiconductor wafers are becoming thinner and thinner. Due to the influence of factors such as thermal expansion and contraction, processing stress, etc., semiconductor wafers are prone to deformation during the processing, such as edge warping, and deformed semiconductor wafers are prone to abnormal adsorption on the stage. Therefore, it is necessary to analyze the aperture and suction force of the vacuum hole to ensure that the semiconductor wafer can be stably adsorbed and fixed on the stage.

[0004] The current semiconductor testing field lacks effective analysis methods for vacuum holes, so there is an urgent need for an effective analysis method for vacuum holes on the stage to provide a reference for R&D personnel. Summary of the invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a testing method that can provide an effective means for R&D personnel to analyze vacuum holes.

[0006] According to the testing method of the first aspect embodiment of the present invention, the method includes: selecting a target vacuum hole from a set of vacuum holes on a stage; testing the target vacuum hole to obtain test data; the test data includes the aperture of the target vacuum hole and the suction of the vacuum hole; storing the test data, and marking the test state corresponding to the target vacuum hole as a tested state; in response to detecting that there are vacuum holes in the vacuum hole set whose test state is an untested state, selecting the vacuum hole in the untested state as the target vacuum hole, and returning to test the target vacuum hole; and in response to the fact that there are no vacuum holes in the vacuum hole set whose test state is an untested state, performing statistics based on each stored test data to draw a comprehensive suction distribution diagram.

[0007] According to the testing method of the embodiment of the present invention, there are at least the following beneficial effects: the testing method comprises: selecting a target vacuum hole from a set of vacuum holes on a stage; testing the target vacuum hole to obtain test data; the test data comprises the aperture and suction of the target vacuum hole; storing the test data, and marking the test state corresponding to the target vacuum hole as a tested state; in response to detecting that there is a vacuum hole in the set of vacuum holes whose test state is an untested state, selecting the vacuum hole in the untested state as the target vacuum hole, and returning to test the target vacuum hole; and in response to the absence of a vacuum hole in the set of vacuum holes whose test state is an untested state, performing statistics based on each stored test data, and drawing a comprehensive suction distribution diagram, so that the aperture and suction of each vacuum hole in the stored vacuum hole set can be tested in turn, and drawn into a comprehensive suction distribution diagram, so that R&D personnel can easily determine the aperture and suction of each vacuum hole through the comprehensive suction distribution diagram, which helps to provide R&D personnel with an analysis method for abnormal adsorption of semiconductor wafers on the stage during actual production.

[0008] According to some embodiments of the present invention, a target vacuum hole is tested to obtain test data, including: detecting the aperture of the target vacuum hole; controlling the test baffle to move according to a preset displacement amount to gradually approach the target vacuum hole; and in response to the test baffle moving a preset displacement amount, measuring the spacing between the test baffle and the target vacuum hole and the suction force from the target vacuum hole that the test baffle is subjected to, to obtain the vacuum hole suction force corresponding to each spacing.

[0009] According to some embodiments of the present invention, statistics are performed based on each stored test data to draw a comprehensive suction distribution diagram, including: drawing a curve relationship diagram for each target vacuum hole based on the vacuum hole suction corresponding to each spacing; drawing an aperture distribution diagram of the vacuum hole set based on the apertures of all vacuum holes in the vacuum hole set; and drawing a comprehensive suction distribution diagram based on the curve relationship diagram and the aperture distribution diagram.

[0010] According to some embodiments of the present invention, an aperture distribution diagram of the vacuum hole set is drawn based on the apertures of all vacuum holes in the vacuum hole set, including: determining the maximum aperture value and the minimum aperture value in the vacuum hole set to obtain the aperture interval; dividing the aperture interval into a number of aperture sub-intervals; color-coding the several aperture sub-intervals, and drawing the aperture distribution diagram of the vacuum hole set so that the vacuum holes in the same aperture sub-interval display the same color.

[0011] According to some embodiments of the present invention, a comprehensive suction distribution diagram is drawn based on the curve relationship diagram and the aperture distribution diagram, including: determining the vacuum hole suction corresponding to each vacuum hole according to a preset target spacing between the test baffle and the vacuum hole; determining the maximum suction value and the minimum suction value according to the vacuum hole suction corresponding to each vacuum hole to obtain a suction range; dividing the suction range into a number of suction sub-ranges; color-coding the several suction sub-ranges, and drawing a comprehensive suction distribution diagram of the vacuum hole set at the preset target spacing, so that the vacuum holes in the same suction sub-range display the same color.

[0012] According to some embodiments of the present invention, a comprehensive suction distribution diagram is drawn based on the curve relationship diagram and the pore size distribution diagram, including: determining the maximum vacuum hole suction of each vacuum hole based on the curve relationship diagram corresponding to all vacuum holes in the vacuum hole set to obtain a set of maximum vacuum hole suctions; dividing the set of maximum vacuum hole suctions into several subsets of maximum vacuum hole suctions; determining the subset of maximum vacuum hole suctions in which the maximum vacuum hole suction of each vacuum hole in the vacuum hole set is located; color-coding several subsets of maximum vacuum hole suctions, and drawing a comprehensive suction distribution diagram of the vacuum hole set, so that vacuum holes in the same subset of maximum vacuum hole suction display the same color.

[0013] According to some embodiments of the present invention, before the step of testing the target vacuum hole, the testing method further comprises: controlling the diaphragm to cover other vacuum holes in the vacuum hole set except the target vacuum hole.

[0014] According to some embodiments of the present invention, before selecting a target vacuum hole from a set of vacuum holes on a stage, the testing method further includes: determining a coordinate system of a preset drawing and a coordinate system of a testing device; the preset drawing is a distribution drawing of the vacuum holes on the stage; and calibrating the coordinate system of the preset drawing and the coordinate system of the stage until they coincide.

[0015] According to the second aspect of the present invention, the testing device is applied to a probe station, the probe station includes a support frame and a stage, the stage is provided with a plurality of vacuum holes, the testing device includes a storage component, a moving component, a testing component and a control component, the storage component is connected to the support frame, and is used to store a diaphragm; the moving component is connected to the support frame, and is used to move the diaphragm to close or open the vacuum hole on the stage through the diaphragm; the testing component is connected to the support frame and includes a test baffle; the stage can be moved to make the vacuum hole to be tested and the test baffle opposite to each other, the test baffle is suitable for approaching or moving away from the vacuum hole, and the vacuum hole is suitable for generating suction on the test baffle; the testing component is used to measure the suction of the vacuum hole, the distance between the vacuum hole and the test baffle, and the aperture of the vacuum hole; the control component is respectively communicated with the moving component and the testing component, and is used to execute the testing method in any of the above embodiments.

[0016] According to the testing device of the third aspect embodiment of the present invention, which is applied to testing equipment, the testing device includes a selection module, a testing module, a storage module, a first determination module and a second determination module. The selection module is used to select a target vacuum hole from the vacuum hole set on the stage; the testing module is used to test the target vacuum hole to obtain test data; the test data includes the aperture of the target vacuum hole and the vacuum hole suction; the storage module is used to store the test data and mark the test state corresponding to the target vacuum hole as a tested state; the first determination module is used to select the vacuum hole in the untested state as the target vacuum hole in response to detecting that there is a vacuum hole in the vacuum hole set whose test state is an untested state, and return to test the target vacuum hole; the second determination module is used to perform statistics based on each stored test data in response to the absence of a vacuum hole in the vacuum hole set whose test state is an untested state, and draw a comprehensive suction distribution diagram.

[0017] According to an embodiment of the fourth aspect of the present invention, a testing device comprises one or more processors, a memory and one or more applications, wherein the one or more applications are stored in the memory and configured to be executed by one or more processors, and the one or more applications are configured to execute the testing method in any of the above embodiments.

[0018] According to the computer-readable storage medium of the fifth aspect of the present invention, the computer-readable storage medium stores program code, and the program code can be called by a processor to execute the test method in any of the above embodiments.

[0019] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0021] Figure 1 A schematic diagram of the connection structure of a probe station and a test device provided in an embodiment of the present invention is shown;

[0022] Figure 2 A schematic diagram showing the connection structure of the stage and the testing equipment provided by the embodiment of the present invention is shown;

[0023] Figure 3 A schematic diagram showing the connection structure of a stage and a testing device provided by another embodiment of the present invention is shown;

[0024] Figure 4 A schematic diagram of a flow chart of a testing method provided by an embodiment of the present invention is shown;

[0025] Figure 5A graphical schematic diagram of a comprehensive suction distribution diagram provided by an embodiment of the present invention is shown;

[0026] Figure 6 A graphical schematic diagram of a curve relationship diagram provided by an embodiment of the present invention is shown;

[0027] Figure 7 A schematic diagram of the structure of a testing device provided by an embodiment of the present invention is shown;

[0028] Figure 8 A schematic diagram showing the structure of a testing device provided by another embodiment of the present invention is shown;

[0029] Fig. 9 A structural block diagram of a computer-readable storage medium provided by an embodiment of the present invention is shown.

[0030] Reference numerals:

[0031] Testing equipment 100;

[0032] Storage component 110; diaphragm 111; accommodating groove 113;

[0033] Moving assembly 130; first driving member 131; suction nozzle 133;

[0034] Test assembly 150; test baffle 151; second driving member 153; aperture measurement assembly 155; displacement measurement assembly 157; reflector 1571; optical displacement sensor 1573; force detection assembly 159; housing 161;

[0035] Probe station 200 ; support frame 210 ; stage 230 ; vacuum hole 231 . DETAILED DESCRIPTION

[0036] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0037] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0038] In the description of the present invention, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0039] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0040] In the description of the present invention, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0041] See also Figures 1 to 3 An embodiment of the present application provides a testing device 100, which is applied to a probe station 200. The probe station 200 includes a support frame 210 and a stage 230. The stage 230 is provided with a plurality of vacuum holes 231. The testing device 100 can test each vacuum hole 231 individually to obtain complete test data of all vacuum holes 231.

[0042] The testing device 100 includes a storage component 110 , a moving component 130 , a testing component 150 , and a control component.

[0043] The storage component 110 , the moving component 130 , and the testing component 150 may all be connected to the support frame 210 for fixation.

[0044] As an example, the support frame 210 may be provided with a working window, and the probe station 200 may be opposite to the working window and located below the working window. The storage component 110, the moving component 130 and the testing component 150 are distributed around the working window and located above the working window, and their specific distribution positions can be designed according to requirements.

[0045] The storage assembly 110 is used to store the diaphragm 111 , and the diaphragm 111 can be used to cover the remaining vacuum holes 231 except the vacuum hole 231 to be tested, so that the testing device 100 can perform a separate test on the vacuum hole 231 to be tested.

[0046] As an example, the storage component 110 may include a first mounting frame, which may be connected to the support frame 210. The first mounting frame may be provided with a receiving groove 113 with a notch facing upward. The number of diaphragms 111 may be multiple, and they are stacked in sequence in the receiving groove 113 from the bottom of the groove to the notch, so as to facilitate the mobile component 130 to access the diaphragm 111.

[0047] The moving assembly 130 is used to move the diaphragm 111 to close or open the vacuum holes 231 on the stage 230 through the diaphragm 111, so that the remaining vacuum holes 231 except the vacuum holes 231 to be tested can be closed through the diaphragm 111, so that the testing equipment 100 can perform separate tests on the vacuum holes 231 to be tested.

[0048] As an example, the moving assembly 130 includes a second mounting frame, a first driving member 131 and a suction nozzle 133. The second mounting frame can be connected to the support frame 210, the first driving member 131 can be connected to the second mounting frame, the suction nozzle 133 can be connected to the driving end of the first driving member 131, and the first driving member 131 can drive the suction nozzle 133 to move, so as to suck, move and place the membrane 111 through the suction nozzle 133. For example, the moving assembly 130 can also include a vacuum pumping member, which can be connected to the suction nozzle 133 to extract or release the airflow in the suction nozzle 133.

[0049] When the suction nozzle 133 needs to suck the diaphragm 111, the first driving member 131 drives the suction nozzle 133 to move to the top of the receiving groove 113, or extends into the receiving groove 113, and the vacuum device can extract the airflow in the suction nozzle 133 to suck the diaphragm 111 at the top of the receiving groove 113. The first driving member 131 then moves the suction nozzle 133 to the top of the vacuum hole 231 on the stage 230, and the vacuum device stops extracting the airflow in the suction nozzle 133, and the suction nozzle 133 puts down the diaphragm 111 to cover the vacuum hole 231. The vacuum device of the probe station 200 vacuums the vacuum hole 231 on the stage 230, so that the diaphragm 111 is adsorbed on the surface of the stage 230 to cover and close the corresponding vacuum hole 231.

[0050] The first driving member 131 can drive the suction nozzle 133 to move back and forth, so as to drive the membrane 111 to cover and shield the remaining vacuum holes 231 on the stage 230 except the vacuum hole 231 to be tested.

[0051] It should be noted that, after the vacuum hole 231 to be tested is tested by the testing equipment 100, the first driving member 131 can drive the suction nozzle 133 to suck the diaphragm 111 covering the untested vacuum hole 231 to open the vacuum hole 231 (the vacuum hole 231 is the new vacuum hole 231 to be tested), and move the diaphragm 111 to the tested vacuum hole 231 to be tested after the test, so as to cover and close the tested vacuum hole 231 to be tested, thereby facilitating the testing equipment 100 to test the new vacuum hole 231 to be tested.

[0052] The test assembly 150 includes a test baffle 151, and the stage 230 can be moved to make the vacuum hole 231 and the test baffle 151 face each other, that is, the stage 230 can be moved to make the vacuum hole 231 to be tested and the test baffle 151 face each other, so that the test baffle 151 can test the vacuum hole 231 to be tested.

[0053] The test baffle 151 is suitable for approaching or moving away from the vacuum hole 231, and the vacuum hole 231 is suitable for generating suction on the test baffle 151. The test assembly 150 is used to measure the suction of the vacuum hole 231, the distance between the vacuum hole 231 and the test baffle 151, and the aperture of the vacuum hole 231, so that the control device can analyze and process these data.

[0054] The control component is respectively connected to the mobile component 130 and the test component 150 for communication, and can be used to control the mobile component 130 and the test component 150 to achieve intelligent control. The control component can be used to execute the test method in the following embodiments.

[0055] The control device may be a computer, a control panel or other control devices.

[0056] It should be noted that the test device 100 in the embodiment of the present application can be a separate device used in conjunction with the probe station 200 for testing. The test device 100 in this embodiment can also refer to the probe station 200, and the probe station 200 can include a storage component 110, a moving component 130, a test component 150, a support frame 210 and a stage 230.

[0057] In some embodiments, the diaphragm 111 may be a square diaphragm (eg Figure 2 as shown) or a circular diaphragm (as Figure 3 shown).

[0058] In some embodiments, the testing components 150 may each include a third mounting bracket, a second driving member 153 , an aperture measurement component 155 , a displacement measurement component 157 , and a force detection component 159 .

[0059] Among them, the third mounting frame can be connected to the support frame 210, and the second driving member 153, the aperture measurement component 155, the displacement measurement component 157 and the force detection component 159 can all be connected to the support frame 210.

[0060] As an example, the second mounting bracket may be connected to the third mounting bracket.

[0061] The second driving member 153 can be connected to the third mounting bracket, the force detection assembly 159 can be connected to the driving end of the second driving member 153, the test baffle 151 can be connected to the force detection assembly 159, and the second driving member 153 can drive the force detection assembly 159 to move up and down to move away from or close to the vacuum hole 231.

[0062] As an example, the force detection assembly 159 may include a connecting bracket and a force detection sensor, and the connecting bracket may include a first connecting portion and a second connecting portion connected at an angle, for example, the first connecting portion and the second connecting portion may be vertically connected. The first connecting portion may be connected to the driving end of the second driving member 153, the force detection sensor may be connected to the second connecting portion, and the test baffle 151 may be connected to an end of the second connecting portion away from the first connecting portion to form a cantilever beam structure. When the test baffle 151 is subjected to force, the force may be transmitted to the force detection sensor, so that the force detection sensor may detect the force applied to the test baffle 151 to detect the suction force of the vacuum hole 231. The force detection sensor may use a strain gauge or other force detection sensors.

[0063] The aperture measurement component 155 can be used to measure the aperture of the vacuum hole 231 , and the aperture measurement component 155 can have multiple options.

[0064] As an example, the aperture measuring component 155 can be a camera measuring component, a laser measuring instrument, an ultrasonic measuring instrument, an image measuring instrument, or other devices that can measure the aperture. Taking the camera measuring component as an example, the camera measuring component can take a photo of the vacuum hole 231 to detect the aperture of the vacuum hole 231 through the taken photo.

[0065] The displacement measuring assembly 157 can measure the distance between the test baffle 151 and the vacuum hole 231 (ie, the distance between the test baffle 151 and the upper surface of the stage 230 ). The displacement measuring assembly 157 can be selected in a variety of ways.

[0066] As an example, the displacement measuring assembly 157 may be an optical displacement measuring assembly, which may include a reflector 1571 and an optical displacement sensor 1573. The reflector 1571 is connected to the third mounting bracket and may be disposed between the camera assembly and the test patch 151. The camera assembly may take a photo of the vacuum hole 231 through the reflector 1571 and the test patch 151. The optical displacement sensor 1573 may be located beside the reflector 1571. The detection light may be emitted to the reflector 1571 through the optical displacement sensor 1573. The reflector 1571 reflects the detection light to the test patch 151, thereby detecting the distance between the test patch 151 and the reflector 1571. When the test baffle 151 moves to contact and fit with the upper surface of the stage 230, the maximum distance between the reflector 1571 and the test baffle 151 can be obtained. By calculating the difference between the maximum distance and the distance between the test baffle 151 and the reflector 1571, the spacing between the test baffle 151 and the vacuum hole 231 can be calculated.

[0067] The optical displacement sensor 1573 may be a laser triangulation displacement sensor, a spectral confocal principle displacement sensor, or other displacement sensors.

[0068] The reflector 1571 can be a semi-transparent prism or a light-transmitting reflector, so that the camera component can take pictures through the reflector 1571 and reflect the detection light.

[0069] As another example, the displacement measurement component 157 may also directly use a measuring ruler to directly measure the distance between the upper surface of the stage 230 and the test baffle 151 .

[0070] It should be noted that the vacuum holes 231 on the stage 230 are all distributed on the upper surface of the stage 230. In the embodiment of the present application, the distance between the test baffle 151 and the vacuum hole 231 is the distance between the test baffle 151 and the upper surface of the stage 230. Generally speaking, the upper surface of the stage 230 is parallel to the horizontal plane, and the test baffle 151 can move back and forth in the vertical direction.

[0071] As another example, the measuring component may also include an origin detection member, which may be used to detect the origin position of the driving end of the second driving member 153. When it is detected that the driving end of the second driving member 153 is at the origin position, the origin position is used as the zero point, and the travel of the driving end of the second driving member 153 is calculated. It should be noted that, in this example, the second driving member 153 may drive the test baffle 151 to move downward to the surface of the bonding stage 230 to determine the maximum travel of the test baffle 151. The difference between the maximum travel and the travel of each movement of the test baffle 151 may be used to determine the distance between the test baffle 151 and the vacuum hole 231 to be tested.

[0072] It can be understood that in this example, the test component 150 may not need to be provided with the displacement measurement component 157, or the displacement measurement component 157 may be an origin detection component.

[0073] The origin detection element may be a mechanical contact switch, a photoelectric switch or some other detection elements.

[0074] In some embodiments, the testing device may further include a housing 161 , and the displacement measurement component 157 and the aperture measurement component 155 are at least partially located within the housing 161 to reduce the influence of ambient light on the displacement measurement component 157 and the aperture measurement component 155 .

[0075] As an example, the aperture measurement component 155 can adopt a camera measurement component, and the lens of the camera measurement component, as well as the reflector 1571 and the optical displacement sensor 1573 of the optical displacement measurement component can all be arranged in the housing 161.

[0076] In some embodiments, the test baffle 151 may be made of a transparent structure, such as transparent acrylic or other transparent materials, so that the aperture measurement component 151 can photograph the vacuum hole 231 to be tested through the reflector 1571 and the test baffle 151 .

[0077] Please combine Figures 4 to 5 The embodiment of the present application also provides a testing method, which can be executed by the testing device in the above embodiment. The testing method includes steps S010, S020, S030, S040 and S050.

[0078] Step S010: Selecting a target vacuum hole from the set of vacuum holes on the stage.

[0079] A plurality of vacuum holes may be provided on the stage, and the plurality of vacuum holes constitute a vacuum hole set. The stage may move along the first direction and the second direction so that one of the plurality of vacuum holes may be opposite to the test baffle, and the aperture measurement component may take a picture of the vacuum hole facing the test baffle, and determine the vacuum hole under the test baffle as the target vacuum hole. At this time, the stage may stop moving to facilitate the test component to perform the test.

[0080] The first direction and the second direction are both parallel to the horizontal direction and perpendicular to each other.

[0081] It should be noted that the stage can also move along a third direction, which is parallel to the vertical direction, so as to supplement the movement of the test baffle when it moves to the extreme position along the third direction.

[0082] Step S020: testing the target vacuum hole to obtain test data.

[0083] The test data includes the aperture of the target vacuum hole and the suction force of the vacuum hole.

[0084] The control device controls the second driving member to drive the test baffle to approach or move away from the target vacuum hole to detect the vacuum hole suction force corresponding to the required distance between the test baffle and the target vacuum hole. For example, the test baffle can completely cover and close the vacuum hole, and the vacuum hole suction force when the distance between the test baffle and the target vacuum hole is equal to zero.

[0085] When the test baffle is in the stopped state, the control device can control the aperture measurement assembly to measure the target vacuum hole to measure the aperture of the target vacuum hole.

[0086] As an example, the camera measurement component can take a picture of the target vacuum hole under the test baffle through the reflector and the test baffle, and transmit the picture to the control device for analysis to obtain the aperture of the target vacuum hole.

[0087] Step S030: storing the test data, and marking the test state corresponding to the target vacuum hole as a tested state.

[0088] After obtaining the test data of the target vacuum hole, the control device stores the test data for subsequent unified processing and analysis. The control device determines that the target vacuum hole has been tested, determines the target vacuum hole as a tested state, and prepares to test the untested vacuum hole.

[0089] As an example, the control device may pre-store a preset drawing of the vacuum hole on the stage (the rough outline of the preset drawing is similar to the Figure 5The difference is that the preset drawing only shows the distribution of the vacuum holes, but not the filling color inside the holes). The preset drawing is the contour of the upper surface of the stage, which shows the distribution of the vacuum holes on the stage, that is, there are several circular holes distributed on the preset drawing, and each circular hole corresponds to a vacuum hole on the stage. The control device can number the circular holes in the preset drawing, and each number corresponds to a vacuum hole on the stage.

[0090] The control device can also construct a table, wherein the table can have the numbers of the circular holes as a vertical column and the hole diameters and vacuum hole suction as two horizontal columns, so as to ensure that each number has a corresponding hole diameter and vacuum hole suction.

[0091] For example, when the circular hole numbered 1 is the target vacuum hole, after the target vacuum hole is tested, the aperture and vacuum hole suction of the circular hole numbered 1 are obtained and recorded and stored in the table.

[0092] Step S040: in response to detecting that there is a vacuum hole in the vacuum hole set whose test state is an untested state, selecting the vacuum hole in the untested state as a target vacuum hole, and returning to test the target vacuum hole;

[0093] When the control device determines that the target vacuum hole has been tested and the corresponding test data has been obtained, the control device selects an untested vacuum hole as a new target vacuum hole and performs cyclic control until all vacuum holes in the vacuum hole set have been tested.

[0094] As an example, the circular hole numbered 1 is used as the target vacuum hole. When the control device obtains the test data of numbered 1, the circular hole numbered 1 is determined to be in a tested state, and the vacuum hole corresponding to the circular hole numbered 2 is selected as the new target vacuum hole.

[0095] It should be noted that since the number of circular holes in the preset drawing is exactly equal to the number of circular holes on the stage, the table can be numbered in advance according to the quantity. When the aperture or vacuum hole suction in the table is in a blank state, it can be determined that the vacuum hole corresponding to the number in the blank status column is in an untested state, and when the aperture or vacuum hole suction in the table is in a state with data, it is determined that the vacuum hole with the corresponding number is in a tested state.

[0096] Step S050: In response to the fact that there is no vacuum hole in the vacuum hole set whose test state is untested, statistics are collected based on each stored test data to draw a comprehensive suction force distribution diagram (such as Figure 5 shown).

[0097] When the control device determines that all vacuum holes in the vacuum hole set are in a tested state, the control device can draw a comprehensive suction distribution map based on the test data corresponding to all vacuum holes, so that R&D personnel can easily determine the aperture and suction of each vacuum hole through the comprehensive suction distribution map, which helps to provide R&D personnel with an analysis method for abnormal adsorption of semiconductor wafers on the stage during actual production.

[0098] Semiconductor chips may refer to wafers or other semiconductor chips.

[0099] The abnormal adsorption of the semiconductor wafer on the stage may refer to warping of the edge of the semiconductor wafer, loose adsorption of the semiconductor wafer on the stage, or other situations.

[0100] As an example, the graph of the comprehensive suction distribution diagram can be similar to the contour diagram of the upper surface of the stage, and a number of circular holes are distributed in the comprehensive suction distribution diagram, and each circular hole corresponds to a vacuum hole. When drawing the comprehensive suction distribution diagram, the test data can be directly displayed in the circular hole in the form of numerical values ​​(such as Figure 5 As shown, Figure 5 The difference is that in this example the circular hole displays the value, while Figure 5 For example, the circular hole numbered 1 can display “aperture: XXX, vacuum hole suction: XXX”, the circular hole numbered 2 can display “aperture: XXX, vacuum hole suction: XXX”, and so on. R&D personnel can get the test data of each vacuum hole more intuitively.

[0101] As another example, when actually drawing the comprehensive suction distribution diagram, it can also be drawn according to the size and filling color of the circular hole, such as Figure 5 As shown, the specific embodiments are described below.

[0102] In the test method, device, equipment and computer-readable storage medium provided in the embodiments of the present application, the test method includes: selecting a target vacuum hole from a set of vacuum holes on a stage; testing the target vacuum hole to obtain test data; the test data includes the aperture and suction of the target vacuum hole; storing the test data and marking the test state corresponding to the target vacuum hole as a tested state; in response to detecting that there is a vacuum hole in the vacuum hole set whose test state is an untested state, selecting the vacuum hole in the untested state as the target vacuum hole, and returning to test the target vacuum hole; and in response to the absence of a vacuum hole in the vacuum hole set whose test state is an untested state, performing statistics based on each stored test data and drawing a comprehensive suction distribution map, so that the aperture and vacuum hole suction of each vacuum hole in the stored vacuum hole set can be tested in turn, and drawn into a comprehensive suction distribution map, so that R&D personnel can easily determine the aperture and vacuum hole suction of each vacuum hole through the comprehensive suction distribution map, which helps to provide R&D personnel with an analysis method for abnormal adsorption of semiconductor wafers on the stage during actual production.

[0103] In some embodiments, step S020 may include the following steps:

[0104] 1) Detect the aperture of the target vacuum hole.

[0105] 2) Control the test baffle to move according to a preset displacement to gradually approach the target vacuum hole.

[0106] 3) In response to the test baffle moving a preset displacement, the distance between the test baffle and the target vacuum hole and the suction force from the target vacuum hole borne by the test baffle are measured to obtain the vacuum hole suction force corresponding to each distance.

[0107] In this embodiment, the aperture measurement component can first measure the aperture of the target vacuum hole to avoid affecting the accuracy of the measurement during the test movement. After measuring the aperture of the target vacuum hole, the control device can first store the measured aperture data, and then control the second drive member to drive the test baffle to move, and the test baffle gradually approaches the target vacuum hole by moving a preset displacement each time. After the test baffle moves a preset displacement, the test baffle can stop at the current position for a preset time, so that the displacement measurement component can measure the distance between the test baffle and the target vacuum hole. At the same time, the force detection component can measure the vacuum hole suction of the target vacuum hole through the test baffle, and the control device can store the vacuum hole suction corresponding to the data of the distance between the test baffle and the target vacuum hole for subsequent analysis.

[0108] The preset duration may be preset according to the requirements, for example, the preset duration may be 1S, 2S, 3S or other durations.

[0109] As an example, when the test baffle moves a preset displacement and then stops, the displacement measuring component measures the distance between the test baffle and the target vacuum hole to be A1, and the force detection component measures the suction of the vacuum hole to be B1; after the measurement, the test baffle continues to move a preset displacement and then stops, the displacement measuring component measures the distance between the test baffle and the target vacuum hole to be A2, and the force detection component measures the suction of the vacuum hole to be B2, and so on, until it is measured that even if the test baffle moves a preset displacement, the distance between the test baffle and the target vacuum hole no longer changes, then it is determined that the test baffle and the surface of the stage are in contact with each other, and the test baffle can move in the opposite direction to move away from the target vacuum hole, thereby obtaining multiple sets of data such as A1B1, A2B2, A3B3, A4B4...

[0110] It should be noted that, when the test baffle is away from the target vacuum hole, the test assembly may continue to perform the test in the same manner as when the test baffle is close to the target vacuum hole, or may not perform the test any more, which may be specifically set according to the requirements.

[0111] In some embodiments, the above steps of performing statistics based on each stored test data and drawing a comprehensive suction distribution diagram may include the following steps:

[0112] 1) According to the vacuum hole suction force corresponding to each spacing, draw a curve relationship diagram for each target vacuum hole (such as Figure 6 shown).

[0113] 2) According to the apertures of all vacuum holes in the vacuum hole set, draw an aperture distribution diagram of the vacuum hole set.

[0114] 3) According to the curve relationship diagram and pore size distribution diagram, draw a comprehensive suction distribution diagram (such as Figure 5 shown).

[0115] When the control device obtains the vacuum hole suction force corresponding to each spacing, it can store it first or directly draw a curve relationship diagram.

[0116] As an example, the control device may also first construct a table. The method of constructing the table may refer to the above embodiment and will not be described in detail. The data records A1, B1, A2, B2, A3, B3, A4, B4, etc. in the above example are stored in the table. When the test equipment is tested, the control device can draw a coordinate system of the curve relationship diagram according to the table. The curve relationship diagram can use the distance between the test baffle and the target vacuum hole as the horizontal coordinate, and the corresponding vacuum hole suction as the vertical coordinate, so as to obtain the coordinate points of (A1, B1), (A2, B2)... etc. in the coordinate system, so as to draw a curve relationship diagram of the vacuum hole suction corresponding to different distances between the test baffle and the target vacuum hole (such as Figure 6 shown).

[0117] As another example, the control device may not construct a table, but directly draw a curve relationship diagram. Specifically, the control device may first construct a coordinate system of the curve relationship diagram, and the curve relationship diagram may use the distance between the test baffle and the target vacuum hole as the horizontal coordinate, and the corresponding vacuum hole suction as the vertical coordinate, directly determine the coordinate points of (A1, B1), (A2, B2)... etc. in the coordinate system, and then connect all the coordinate points to form the required curve relationship diagram.

[0118] When all vacuum holes in the vacuum hole set are tested, it can be understood that each vacuum hole corresponds to a curve relationship diagram.

[0119] When the control device obtains the aperture of each vacuum hole, it can draw an aperture distribution diagram of the vacuum hole set separately. The graph of the aperture distribution diagram is roughly the same as the distribution graph of the vacuum holes on the stage.

[0120] After obtaining the curve relationship diagram of each vacuum hole and the pore size distribution diagram of the vacuum hole set, different comprehensive suction distribution diagrams can be flexibly drawn to provide R&D personnel with more analysis methods.

[0121] As an example, after obtaining the curve relationship diagram of each vacuum hole and the aperture distribution diagram of the vacuum hole set, the vacuum hole suction corresponding to each vacuum hole when the test baffle and the vacuum hole are at a first spacing can be obtained based on the curve relationship diagram, and then the suction of each vacuum hole is displayed in the aperture distribution diagram, so as to obtain the comprehensive suction distribution diagram corresponding to the first spacing.

[0122] Specifically, assuming that there are 4 vacuum holes on the stage and there are 4 vacuum holes in the vacuum hole set, 4 circular holes are displayed in the aperture distribution diagram, and the 4 circular holes can be drawn according to the actual apertures for distinction, or can be distinguished directly by displaying the aperture values.

[0123] Each of the four vacuum holes corresponds to a curve distribution diagram. If you need to draw a comprehensive suction distribution diagram at the first spacing, you can find the corresponding vacuum hole suction value in each curve distribution diagram through the first spacing, get the suction values ​​of the four vacuum holes, and then display the vacuum hole suction in the four circular holes in the aperture distribution diagram by value, color or other means, so as to get a comprehensive suction distribution diagram of the four vacuum holes at the first spacing.

[0124] It can be understood that comprehensive suction distribution diagrams at the second spacing, third spacing, third spacing, etc. can also be obtained based on the curve distribution diagram and the aperture distribution diagram. R&D personnel can analyze the abnormal adsorption of semiconductor wafers on the stage during actual production based on these suction distribution diagrams.

[0125] It should be noted that, in this embodiment, the curve distribution map, the aperture distribution map and the comprehensive suction distribution map can be stored separately, and the R&D personnel can also analyze the vacuum holes on the stage according to the curve distribution map or the aperture distribution map.

[0126] In addition, Figure 6 There are two curves (named as the first curve O and the second curve P), wherein the first curve O may be a curve formed when the test baffle approaches the vacuum hole, and the second curve P is a curve formed when the test baffle moves away from the vacuum hole. For ease of understanding, the embodiment of the present application only takes the first curve O as an example for explanation.

[0127] In some embodiments, the above steps of drawing a comprehensive suction distribution diagram according to the curve relationship diagram and the pore size distribution diagram include the following steps:

[0128] 1) Determine the vacuum hole suction force corresponding to each vacuum hole according to the preset target distance between the test baffle and the vacuum hole.

[0129] 2) According to the vacuum hole suction corresponding to each vacuum hole, determine the maximum suction value and the minimum suction value to obtain the suction range;

[0130] 3) Divide the suction range into several suction sub-ranges;

[0131] 4) Color-code several suction sub-intervals and draw a comprehensive suction distribution diagram of the vacuum hole set at the preset target spacing (the graphic outline of the comprehensive suction distribution diagram of the vacuum hole set at the preset target spacing can be roughly referred to Figure 5 The vacuum holes in the same suction sub-interval are displayed in the same color.

[0132] Each vacuum hole corresponds to a curve relationship diagram. By determining the preset target spacing, the corresponding vacuum hole suction data can be obtained from the curve relationship diagram of each vacuum hole according to the preset target spacing, and then the maximum suction value and the minimum suction value in the suction data of these vacuum holes are determined to obtain the suction range. The suction range is divided into several suction sub-ranges, and each suction sub-range corresponds to one or more vacuum holes. The suction sub-ranges are then color-coded so that in the comprehensive suction distribution diagram, vacuum holes in the same suction sub-range can display the same color, which helps R&D personnel to conduct unified analysis of vacuum holes in the same suction sub-range, reducing the difficulty of analysis.

[0133] As an example, the vacuum hole set includes 9 vacuum holes, and each vacuum hole can correspond to a curve relationship diagram of suction and spacing after testing. After determining the preset target spacing, the suction data of 9 corresponding vacuum holes can be obtained from the 9 curve relationship diagrams. Based on these data, the maximum suction value and the minimum suction value can be determined to obtain the suction range. The suction range is divided into 3 suction sub-ranges.

[0134] For ease of description, the three suction sub-intervals are named the first interval, the second interval and the third interval respectively. Among the nine vacuum holes, the vacuum hole suction of one vacuum hole is located in the first interval, the vacuum hole suction of two vacuum holes is located in the second interval, and the vacuum hole suction of the remaining six vacuum holes is located in the third interval.

[0135] The first interval, the second interval, and the third interval are color-coded, and then a comprehensive suction distribution diagram is drawn.

[0136] It can be understood that the first interval corresponds to a circular hole in the aperture distribution diagram, and the interior of the circular hole is filled with a color block of the first color; the second interval corresponds to two circular holes in the aperture distribution diagram, and the interiors of the two circular holes are filled with color blocks of the second color; the third interval corresponds to six circular holes in the aperture distribution diagram, and the interiors of the six circular holes are filled with color blocks of the third color, thereby obtaining a comprehensive suction distribution diagram of the vacuum hole set under the preset target spacing. R&D personnel can intuitively distinguish which vacuum holes have suctions in the same suction sub-interval by the filling color in the circular holes, so that R&D personnel can conduct unified analysis without having to analyze each vacuum hole separately, reducing the difficulty of analysis.

[0137] In some embodiments, the above step of drawing an aperture distribution diagram of the vacuum hole set according to the apertures of all vacuum holes in the vacuum hole set includes the following steps:

[0138] 1) Determine the maximum aperture value and the minimum aperture value in the vacuum aperture set to obtain the aperture range.

[0139] 2) Divide the aperture interval into several aperture sub-intervals.

[0140] 3) Color-code several aperture sub-intervals and draw an aperture distribution diagram of the vacuum aperture set (the outline of the aperture distribution diagram can be roughly referred to Figure 5 The vacuum holes in the same aperture sub-interval display the same color.

[0141] After all vacuum holes in the vacuum hole set are tested, the aperture of each vacuum hole is obtained. The maximum aperture value and the minimum aperture value are determined based on all the apertures, so that the aperture range can be obtained. The aperture range is divided into several aperture sub-ranges. Each aperture sub-range corresponds to one or more vacuum holes. The aperture sub-ranges are color-coded so that in the aperture distribution diagram, vacuum holes in the same aperture sub-range can display the same color, which helps R&D personnel to conduct unified analysis of vacuum holes in the same aperture sub-range and reduces the difficulty of analysis.

[0142] For details, please refer to the embodiment of the comprehensive suction distribution diagram drawn based on the preset target distance in the above embodiment, which will not be described in detail.

[0143] In some embodiments, the above steps of drawing a comprehensive suction distribution diagram according to the curve relationship diagram and the pore size distribution diagram include the following steps:

[0144] 1) According to the curve relationship diagram corresponding to all vacuum holes in the vacuum hole set, the maximum vacuum hole suction of each vacuum hole is determined to obtain the set of maximum vacuum hole suction.

[0145] 2) Divide the set of maximum vacuum hole suction into several subsets of maximum vacuum hole suction.

[0146] 3) Determine the subset of maximum vacuum hole suctions where the maximum vacuum hole suction of each vacuum hole in the vacuum hole set is located.

[0147] 4) Color-code several subsets of maximum vacuum hole suction, and draw a comprehensive suction distribution diagram of the vacuum hole set, so that vacuum holes in the same subset of maximum vacuum hole suction are displayed in the same color.

[0148] In this embodiment, the maximum suction value corresponding to the curve relationship diagram can be obtained according to the curve relationship diagram of each vacuum hole. There will also be maximum and minimum values ​​in the maximum suction values ​​of all vacuum holes, so that a set of maximum vacuum hole suctions (i.e., the interval of maximum vacuum hole suctions) can be formed, and the set of maximum vacuum hole suctions can be equally divided into several subsets of maximum vacuum hole suctions (i.e., sub-intervals of maximum vacuum hole suctions), and then the several subsets of maximum vacuum hole suctions are color-coded so that circular holes in the same subset as the maximum vacuum hole suction can be displayed in the same color in the comprehensive suction distribution diagram, so as to facilitate unified analysis by R&D personnel without the need to conduct separate analysis of the entire vacuum hole, thereby reducing the difficulty of analysis.

[0149] For details, please refer to the embodiment of the comprehensive suction distribution diagram drawn based on the preset target distance in the above embodiment, which will not be described in detail.

[0150] In the above embodiment, the specific equal division method can refer to the following calculation method for equal division.

[0151] Assume that the parameter value is C, where C can be the vacuum hole suction force, the vacuum hole suction force at a preset target spacing, or the hole diameter.

[0152] According to the above embodiment, the maximum value C can be obtained. max and minimum value C min , forming the interval [C min , C max ], the interval [C min , C max ] is divided into k intervals, where k>1 and is an integer, and the specific value of k can be pre-set according to requirements.

[0153] Equal value That is, the interval [C min , C max ] can be divided into k sub-intervals according to the equal division value dC.

[0154] Then the value of the nth subinterval is: C min +n*dC <C n ≤C min +(n+1)dC

[0155] As shown in the following table, several sub-intervals are color-coded, and the vacuum holes in the same sub-interval are displayed in the same color on the distribution diagram (i.e., the comprehensive aperture distribution diagram, the aperture distribution diagram, and the comprehensive suction distribution diagram of the vacuum hole set at the preset target spacing in the above embodiment), and different sub-intervals are displayed in different colors, so that the color distribution of the vacuum holes can be intuitively displayed on the distribution diagram.

[0156] Subinterval Interval range Subrange color <![CDATA[C0]]> <![CDATA[C min ~C min +dC]]> red <![CDATA[C1]]> <![CDATA[C min +dC~C min +2*dC]]> orange <![CDATA[C n ]]> <![CDATA[C min +ndC<C≤C min +(n+1)dC]]> yellow ...... ...... ...... <![CDATA[C k-1 ]]> <![CDATA[C min +(k-1)dC~C max ]]> blue

[0157] It should be noted that the colors of the sub-intervals in the above table can be set according to requirements, and the colors in the above table are only used as an example for easy understanding.

[0158] In some embodiments, before step S020, the testing method further includes the step of controlling the diaphragm to cover other vacuum holes in the vacuum hole set except the target vacuum hole.

[0159] After the target vacuum hole is determined, the control device can control the first driving member to move the diaphragm stored in the storage assembly so that the diaphragm can cover other vacuum holes except the target vacuum hole, so that the testing device can test the target vacuum hole alone, thereby obtaining the test data of a single vacuum hole to draw the corresponding comprehensive suction distribution diagram. The specific drawing and placement can refer to the above embodiment and will not be repeated here.

[0160] It should be noted that the shape of the diaphragm can be circular, square or other shapes. When the diaphragm is square, one diaphragm can cover one or more vacuum holes; when the diaphragm is circular, in order to avoid the vacuum hole being missed, each diaphragm can only cover one vacuum hole.

[0161] As an example, when the diaphragm is a square diaphragm, the upper surface of the carrier stage can be divided into equal parts, and each square diaphragm can have a certain position on the carrier stage, so there is no need to consider the distribution of the vacuum holes on the carrier stage.

[0162] As another example, when the diaphragm is a circular diaphragm, each circular diaphragm covers a corresponding vacuum hole. At this time, it is necessary to determine the distribution of the vacuum holes on the stage for subsequent testing. The specific determination method is as shown in the following embodiment.

[0163] In some embodiments, before step S010, the testing method further includes the following steps:

[0164] 1) Determine the coordinate system of the preset drawing and the coordinate system of the test equipment.

[0165] 2) Calibrate the coordinate system of the preset drawing and the coordinate system of the test equipment until they coincide.

[0166] Among them, the preset drawing is a distribution drawing of the vacuum holes on the stage.

[0167] In this way, this embodiment can unify the coordinate system of the preset drawing and the test equipment, so that the moving device can move the diaphragm and the stage can move the target vacuum hole to be tested under the test baffle, thereby improving the accuracy of the test.

[0168] The preset drawing may be distributed with a plurality of holes, each hole corresponding to a vacuum hole on the stage, that is, the preset drawing may be a scaled drawing of the upper surface of the stage.

[0169] It should be noted that the coordinate system of the test equipment and the coordinate system of the probe station can be the same coordinate system, for example, the test equipment and the probe station can be controlled by the same control device. Through the above steps, the coordinate system of the preset drawing, the coordinate system of the test equipment and the coordinate system of the probe station can be unified.

[0170] Specifically, the coordinates of the center of hole 0 and hole 1 can be determined from the preset drawing to be (x0, y0)(x1, y1). Move the center of hole 0 and hole 1 to the center of the test patch (the camera measurement component can be used to observe and obtain the exact position), and the coordinates of the center of hole 0 and hole 1 on the probe station are (x′0, y′0)(x′1, y′1).

[0171] Then connect the two coordinates (x0, y0) (x1, y1) and determine the angle θ between the connecting line and the X-axis in the coordinate system of the preset drawing according to the inverse tangent formula (Formula 1).

[0172] Formula 1:

[0173] Connect the two coordinates (x′0, y′0) (x′1, y′1) and determine the angle θ′ between the connecting line and the X-axis in the coordinate system of the probe station according to the inverse tangent formula (Formula 1).

[0174] Formula 2:

[0175] After the angles θ and θ′ are obtained, the difference between θ and θ′ can be the angle dθ between the coordinate system of the preset drawing and the coordinate system of the probe station.

[0176] By rotating the wafer stage by dθ, the coordinate system of the preset drawing, the coordinate system of the test equipment and the coordinate system of the probe station can be unified.

[0177] After the stage has rotated dθ, the control device can perform the above calculation again to regain the angles θ and θ′. When it is determined that dθ=0, that is, (θ′=θ), the control device determines that the coordinate system calibration is successful. If dθ≠0, that is, (θ′≠θ), recalibration is performed.

[0178] When the coordinate system of the preset drawing, the coordinate system of the test equipment and the coordinate system of the probe station are calibrated and unified, the corresponding coordinate scale coefficient k of the coordinate system of the probe station can be calculated by the following formula 3 and formula 4 respectively: x , k y .

[0179] Formula 3:

[0180] Formula 4:

[0181] Converted to: x′ i =k x (x1-x0)+x′0,y′ i =k y (y1-y0)+y′0.

[0182] Thus, the coordinates (x′ i ,y′ i ), so that the coordinates of each vacuum hole on the stage can be determined, so that the moving device can move the diaphragm, and the stage can move the target vacuum hole to be tested under the test baffle, thereby improving the accuracy of the test.

[0183] Please refer to Figure 7 The embodiment of the present application also provides a testing device 300, which is applied to the testing equipment in the above embodiment. The testing device 300 includes a selection module 310, a testing module 320, a storage module 330, a first determination module 340 and a second determination module 350.

[0184] The selection module 310 is used to select a target vacuum hole from a set of vacuum holes on the stage;

[0185] The test module 320 is used to test the target vacuum hole to obtain test data; the test data includes the aperture of the target vacuum hole and the suction force of the vacuum hole;

[0186] The storage module 330 is used to store the test data and mark the test state corresponding to the target vacuum hole as a tested state;

[0187] The first determination module 340 is used for selecting the vacuum hole in the untested state as the target vacuum hole in response to detecting that there is a vacuum hole in the vacuum hole set whose test state is the untested state, and returning to test the target vacuum hole;

[0188] The second determination module 350 is used for drawing a comprehensive suction force distribution diagram by performing statistics according to each stored test data in response to the absence of a vacuum hole in the vacuum hole set whose test state is an untested state.

[0189] It should be noted that, for the device embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment. Any processing method described in the method embodiment can be implemented by the corresponding processing module in the device embodiment, and will not be described one by one in the device embodiment.

[0190] In addition, each functional module in each embodiment of the present application can be integrated into a processing module, or each module can exist physically separately, or two or more modules can be integrated into one module. The above integrated modules can be implemented in the form of hardware or software functional modules.

[0191] See also Figure 8 The embodiment of the present application further provides a test device 400, the test device 400 includes one or more processors 410 and a memory 420, Figure 8 A processor 410 is taken as an example. The memory 420 stores instructions that can be executed by at least one processor 410, and the instructions are executed by at least one processor 410, so that at least one processor 410 can execute the test method in the above embodiment.

[0192] In some implementations, the processor 410 and the memory 420 may be connected via a bus or other means. Figure 8 The example of connecting through bus is taken in the following.

[0193] In some embodiments, the processor 410 is used to select a target vacuum hole from a vacuum hole set on a stage; test the target vacuum hole to obtain test data; the test data includes the aperture of the target vacuum hole and the vacuum hole suction; store the test data, and mark the test state corresponding to the target vacuum hole as a tested state; in response to detecting that there is a vacuum hole in the vacuum hole set whose test state is an untested state, select the vacuum hole in the untested state as the target vacuum hole, and return to test the target vacuum hole; and in response to the absence of a vacuum hole in the vacuum hole set whose test state is an untested state, perform statistics based on each stored test data and draw a comprehensive suction distribution diagram, so that the aperture and vacuum hole suction of each vacuum hole in the stored vacuum hole set can be tested in turn and drawn into a comprehensive suction distribution diagram.

[0194] In some embodiments, the memory 420 is a non-volatile computer-readable storage medium that can be used to store non-volatile software programs, non-volatile computer executable programs and modules, such as program instructions / modules of the test method in the embodiment of the present application. The processor 410 executes various functional applications and data processing in the test device by running the non-volatile software programs, instructions and modules stored in the memory 420, that is, implementing the test method of the above method embodiment.

[0195] In some embodiments, the memory 420 may include a program storage area and a data storage area, wherein the program storage area may store an operating system, an application required for at least one function; the data storage area may store data created according to the use of the home appliance, etc. In addition, the memory 420 may include a high-speed random access memory, and may also include a non-volatile memory, such as at least one disk storage device, a flash memory device, or other non-volatile solid-state storage device. In some embodiments, the memory 420 may optionally include a memory remotely arranged relative to the processor 410, and these remote memories may be connected to the control module via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0196] In some embodiments, one or more modules are stored in the memory 420, and when executed by one or more processors 410, the test method in any of the above method embodiments is executed, for example, the test method described above is executed. Figure 4 The method comprises steps S010 to S050.

[0197] See also Fig. 9The embodiment of the present application further provides a computer-readable storage medium 500. The computer-readable storage medium 500 stores a computer program 510, which can be called by a processor to execute the test method in any of the above method embodiments.

[0198] The computer-readable storage medium 500 may be an electronic memory such as a flash memory, an electrically erasable programmable read only memory (EEPROM), an erasable programmable read-only memory (EPROM), a hard disk, or a read-only memory (ROM). Optionally, the computer-readable storage medium includes a non-transitory computer-readable storage medium. The computer-readable storage medium 500 has storage space for a computer program that performs any method step in the above-mentioned test method. These computer programs 510 can be read from or written to one or more computer program products. The computer program can be compressed, for example, in an appropriate form.

[0199] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; under the idea of ​​the present invention, the technical features in the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other changes in different aspects of the present invention as above, which are not provided in detail for the sake of simplicity; although the present invention is described in detail with reference to the above embodiments, ordinary technicians in this field should understand that it is still possible to modify the technical solutions recorded in the above embodiments, or to replace some of the technical features therein; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention. Through the description of the above embodiments, ordinary technicians in this field can clearly understand that each embodiment can be implemented by means of software plus a general hardware platform, and of course, it can also be implemented by hardware. Ordinary technicians in this field can understand that all or part of the processes in the above embodiment method can be completed by computer programs to instruct related hardware. The program can be stored in a computer-readable storage medium, and when the program is executed, it can include the processes of the embodiments of the above methods.

Claims

1. A testing method, characterized in that: include: Select a target vacuum hole from a set of vacuum holes on the stage; Testing the target vacuum hole to obtain test data; The test data includes the aperture of the target vacuum hole and the vacuum hole suction; storing the test data, and marking the test state corresponding to the target vacuum hole as a tested state; In response to detecting that there is a vacuum hole in the vacuum hole set whose test state is an untested state, selecting the vacuum hole in the untested state as a target vacuum hole, and returning to the step of testing the target vacuum hole; as well as In response to the fact that there is no vacuum hole in the vacuum hole set whose test state is an untested state, statistics are performed according to each stored test data to draw a comprehensive suction distribution diagram.

2. The testing method according to claim 1, characterized in that: The step of testing the target vacuum hole to obtain test data includes: Detecting the aperture of the target vacuum hole; Controlling the test baffle to move according to a preset displacement to gradually approach the target vacuum hole; and In response to the test baffle moving a preset displacement, the distance between the test baffle and the target vacuum hole and the suction force from the target vacuum hole borne by the test baffle are measured to obtain the vacuum hole suction force corresponding to each of the distances.

3. The testing method according to claim 2, characterized in that: The method of performing statistics based on each stored test data and drawing a comprehensive suction distribution diagram includes: Draw a curve relationship diagram of each target vacuum hole according to the vacuum hole suction force corresponding to each of the intervals; Drawing an aperture distribution diagram of the vacuum hole set according to the apertures of all vacuum holes in the vacuum hole set; and The comprehensive suction distribution diagram is drawn according to the curve relationship diagram and the pore size distribution diagram.

4. The testing method according to claim 3, characterized in that: The step of drawing a pore size distribution diagram of the vacuum hole set according to the pore sizes of all vacuum holes in the vacuum hole set comprises: Determine the maximum aperture value and the minimum aperture value in the vacuum aperture set to obtain an aperture range; Dividing the aperture interval into a plurality of aperture sub-intervals; A plurality of the aperture sub-intervals are color-coded, and an aperture distribution diagram of the vacuum hole set is drawn, so that the vacuum holes in the same aperture sub-interval display the same color.

5. The testing method according to claim 3, characterized in that: The step of drawing the comprehensive suction distribution diagram according to the curve relationship diagram and the pore size distribution diagram comprises: Determining the vacuum hole suction force corresponding to each vacuum hole according to a preset target distance between the test baffle and the vacuum hole; According to the vacuum hole suction corresponding to each of the vacuum holes, a maximum suction value and a minimum suction value are determined to obtain a suction range; Dividing the suction interval into a plurality of suction sub-intervals; A plurality of the suction sub-intervals are color-coded, and a comprehensive suction distribution diagram of the vacuum hole set at the preset target spacing is drawn, so that the vacuum holes in the same suction sub-interval display the same color.

6. The testing method according to claim 3, characterized in that: The step of drawing the comprehensive suction distribution diagram according to the curve relationship diagram and the pore size distribution diagram comprises: Determine the maximum vacuum hole suction of each vacuum hole according to the curve relationship diagram corresponding to all vacuum holes in the vacuum hole set, and obtain a set of maximum vacuum hole suctions; Dividing the set of maximum vacuum hole suction into a plurality of subsets of maximum vacuum hole suction; determining a subset of the maximum vacuum hole suctions at which the maximum vacuum hole suction of each vacuum hole in the set of vacuum holes lies; A plurality of subsets of the maximum vacuum hole suction forces are color-coded, and a comprehensive suction force distribution diagram of the vacuum hole set is plotted, so that the vacuum holes in the same subset of the maximum vacuum hole suction force are displayed in the same color.

7. The testing method according to any one of claims 1 to 6, characterized in that: Before the step of testing the target vacuum hole, the testing method further includes: The control membrane covers other vacuum holes in the vacuum hole set except the target vacuum hole.

8. The testing method according to claim 7, characterized in that: Before selecting the target vacuum hole from the set of vacuum holes on the stage, the testing method further includes: Determine the coordinate system of the preset drawing and the coordinate system of the test equipment; the preset drawing is the distribution drawing of the vacuum holes on the stage; Calibrate the coordinate system of the preset drawing and the coordinate system of the stage until they coincide.

9. A testing device, characterized in that: Applied to a probe station, the probe station includes a support frame and a stage, the stage is provided with a plurality of vacuum holes, and the testing equipment includes: A storage component, the storage component is connected to the support frame and is used to store the diaphragm; A moving component, the moving component is connected to the support frame and is used to move the diaphragm to close or open the vacuum hole on the stage through the diaphragm; a test assembly connected to the support frame and comprising a test baffle; the stage can be moved to make the vacuum hole to be tested face the test baffle, the test baffle is suitable for approaching or moving away from the vacuum hole, and the vacuum hole is suitable for generating suction to the test baffle; the test assembly is used to measure the suction of the vacuum hole, the distance between the vacuum hole and the test baffle, and the aperture of the vacuum hole; and A control component, wherein the control component is communicatively connected with the mobile component and the test component respectively, and is used to execute the test method according to any one of claims 1 to 8.

10. A testing device, characterized in that: Applied to testing equipment, the testing device comprises: A selection module, used for selecting a target vacuum hole from a set of vacuum holes on the stage; A testing module, used to test the target vacuum hole to obtain test data; the test data includes the aperture of the target vacuum hole and the vacuum hole suction; A storage module, used for storing the test data and marking the test state corresponding to the target vacuum hole as a tested state; A first determining module is configured to select the vacuum hole in the untested state as a target vacuum hole in response to detecting that there is a vacuum hole in the vacuum hole set whose test state is an untested state, and return to the step of testing the target vacuum hole; and The second determining module is used for drawing a comprehensive suction distribution diagram by performing statistics according to each stored test data in response to the fact that there is no vacuum hole whose test status is untested in the vacuum hole set.

11. A testing device, characterized in that: include: one or more processors; Memory; as well as One or more application programs, wherein the one or more application programs are stored in the memory and configured to be executed by the one or more processors, and the one or more application programs are configured to execute the testing method according to any one of claims 1 to 8.

12. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores program codes, which can be called by a processor to execute the testing method according to any one of claims 1 to 8.

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