Vibration actuator control device, vibration actuator control method, driving device, and electronic apparatus

Abstract

In a control device of a vibration actuator, a control unit is configured to control the vibration actuator when a value (first value) of a speed deviation obtained by subtracting a current value from a command value, which is related to a relative speed between a vibrating body and a contact body of the vibration actuator, is positive. When the value (first value) of the speed deviation is positive, control (step S208) for reducing the driving frequency of the AC signal or control (step S204) for increasing the pulse width of the AC signal is executed, and when the value (first value) of the speed deviation is not positive, the control is executed. The control of the drive frequency of the AC signal, or the control of the pulse width of the AC signal, is performed at a time prior to the specific time (step S212) or the control of the pulse width of the AC signal (step S211).

Description

Technical Field

[0001] The invention relates to a control device of a vibration actuator, a control method of the vibration actuator, and a driving device and electronic equipment comprising the control device of the vibration actuator. Background Art

[0002] There is a vibration actuator that generates a vibration by applying an AC signal in a natural vibration mode of the vibration body to the vibration body and obtains a driving force by frictionally driving a contact body pressed into contact with the vibration body, the vibration body being formed by attaching an electro-mechanical energy transducer to a vibration member. Still cameras, video cameras, etc. that use a vibration actuator for AF driving and zoom driving have been commercialized as a driving device including such a vibration actuator.

[0003] Patent document 1 discusses a method for driving and controlling a vibration actuator, wherein pulse width is used to perform control in a low speed region, and drive frequency is used to perform control in a high speed region. In patent document 1, the pulse width is increased with a predetermined gradient (constant change per time) during acceleration until a predetermined speed is reached.

[0004] Patent Document 2 discusses a method of driving and controlling a vibration actuator in which PID control is performed by position feedback or the like using a deviation between a command position and an actual position of a contact body (moving body) and a vibration body.

[0005] Citation List

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent Application Publication No. 2019-198199

[0008] Patent Document 2: Japanese Patent Application Publication No. 2011-234603 Summary of the invention

[0009] Technical issues

[0010] However, in the case where the vibration actuator drives a driving target of high inertia such as a high-power zoom lens, the inventions discussed in the aforementioned Patent Document 1 and Patent Document 2 have the following problems.

[0011] Fig.18A and Fig.18B 1 is a diagram illustrating the relationship between time and speed in the drive control of the vibration actuator discussed in Patent Documents 1 and 2. Specifically, in Patent Document 1, as Fig.18AAs shown in , a sharp increase in speed 1812 occurs immediately after actuation and speed 1812 greatly exceeds target speed 1811. Therefore, in Patent Document 1, there is a problem that the driving of the driven target by the vibration actuator becomes unstable and the driving noise of the vibration actuator is large. In Patent Document 2, as Fig.18B As shown in , a sharp increase in speed 1822 occurs due to a start-up delay, and speed 1822 fluctuates multiple times because the operating parameters are frequently increased and decreased in order to follow the command speed 1821. Therefore, even in Patent Document 2, there is a problem that the driving of the drive target by the vibration actuator becomes unstable and the driving noise of the vibration actuator is large.

[0012] The present invention has been achieved in view of the foregoing problems, and an object thereof is to provide a mechanism that can prevent unstable driving of a driven object by a vibration actuator and reduce driving noise of the vibration actuator.

[0013] Solution to the problem

[0014] According to the present invention, a control device of a vibration actuator, the vibration actuator comprises a vibration body and a contact body, the vibration body comprises an electro-mechanical energy transducer, the contact body is configured to contact the vibration body, the vibration body and the contact body move relative to each other by the vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control device comprises: a control component, for performing a control of reducing the frequency of the AC signal or increasing the effective voltage of the AC signal when a first value is positive at a specific time during the acceleration of the vibration actuator, and performing a control of the frequency of the AC signal or the effective voltage of the AC signal performed at a time before the specific time when the first value is not positive, the first value is a value related to the relative speed between the vibration body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

[0015] According to another aspect of the present invention, a control device for a vibration actuator, the vibration actuator includes a vibration body and a contact body, the vibration body includes an electro-mechanical energy transducer, the contact body is configured to contact the vibration body, the vibration body and the contact body move relative to each other by vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control device includes: a control component for performing control of increasing the frequency of the AC signal or reducing the effective voltage of the AC signal when a first value is positive at a specific time during deceleration of the vibration actuator, and performing control of the frequency of the AC signal or the effective voltage of the AC signal performed at a time before the specific time when the first value is not positive, the first value being a value related to the relative speed between the vibration body and the contact body and being obtained by subtracting a current value from a command value generated to be close to a target value.

[0016] According to another aspect of the present invention, a control device of a vibration actuator, the vibration actuator includes a vibration body and a contact body, the vibration body includes an electro-mechanical energy transducer, the contact body is configured to contact the vibration body, the vibration body and the contact body move relative to each other by the vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control device includes: a control component, for performing a control of reducing the frequency of the AC signal or increasing the phase difference of the AC signal when a first value is positive at a specific time during the acceleration of the vibration actuator, and performing a control of the frequency of the AC signal or the phase difference of the AC signal performed at a time before the specific time when the first value is not positive, the first value is a value related to the relative speed between the vibration body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

[0017] According to another aspect of the present invention, a control device of a vibration actuator, the vibration actuator includes a vibration body and a contact body, the vibration body includes an electro-mechanical energy transducer, the contact body is configured to contact the vibration body, the vibration body and the contact body move relative to each other by the vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control device includes: a control component, for performing a control of increasing the frequency of the AC signal or reducing the phase difference of the AC signal when a first value is positive at a specific time during the deceleration of the vibration actuator, and performing a control of the frequency of the AC signal or the phase difference of the AC signal performed at a time before the specific time when the first value is not positive, the first value is a value related to the relative speed between the vibration body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

[0018] The present invention also includes a method for controlling a vibration actuator using the control device of the vibration actuator, and a driving device and an electronic device including the control device of the vibration actuator.

[0019] Advantageous Effects of the Invention

[0020] According to the present invention, unstable driving of a driving target by a vibration actuator can be prevented, and driving noise of the vibration actuator can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] [ Figure 1 ] Figure 1 is an exploded view of a vibration actuator according to a first exemplary embodiment of the present invention.

[0022] [ Figure 2 ] Figure 2 is a perspective view of an assembled vibration actuator according to a first exemplary embodiment of the present invention.

[0023] [ Figure 3 ] Figure 3 : is a diagram illustrating an example of a hardware configuration of a vibration driven device according to a first exemplary embodiment of the present invention.

[0024] [ Figure 4 ] Figure 4 is a diagram illustrating an example of a functional configuration of a vibration driven device according to a first exemplary embodiment of the present invention.

[0025] [ Figure 5 ] Figure 5 is a flowchart illustrating an example of a processing procedure of a method of controlling a vibration actuator by a control device according to a first exemplary embodiment of the present invention.

[0026] [ Figure 6] Figure 6 is a flowchart illustrating a first exemplary embodiment of the present invention, which illustrates Figure 5 An example of a detailed processing procedure of the acceleration control in step S104 is shown in FIG.

[0027] [ Figure 7 ] Figure 7 is a diagram illustrating a first exemplary embodiment of the present invention, which illustrates Figure 5 The relationship between the speed of the vibration actuator and the pulse width and driving frequency of the AC signal during the acceleration control in step S104.

[0028] [ Figure 8 ] Figure 8 is a flowchart illustrating a second exemplary embodiment of the present invention, which illustrates Figure 5 An example of a detailed processing procedure of the deceleration control in step S108 is shown in FIG.

[0029] [ Fig. 9 ] Fig. 9 is a diagram illustrating a second exemplary embodiment of the present invention, which illustrates Figure 5 The relationship between the speed of the vibration actuator during the deceleration control in step S108 and the pulse width and driving frequency of the AC signal.

[0030] [ Fig.10 ] Fig.10 is a diagram illustrating a modification of the first exemplary embodiment and the second exemplary embodiment of the present invention, which illustrates the relationship between the position, velocity, and acceleration of the vibration actuator and the pulse width of the AC signal.

[0031] [ Fig.11 ] Fig.11 is a flowchart illustrating a third exemplary embodiment of the present invention, which illustrates Figure 6 An example of a detailed processing procedure of the control of increasing the pulse width of the AC signal in step S204 is shown.

[0032] [ Fig.12 ] Fig.12 is a diagram illustrating a third exemplary embodiment of the present invention, which illustrates Figure 5 The relationship between the speed of the vibration actuator and the pulse width and driving frequency of the AC signal during the acceleration control in step S104.

[0033] [ Fig.13 ] Fig.13 is a flowchart illustrating a third exemplary embodiment of the present invention, which illustrates Figure 6 An example of a detailed processing procedure of the control of reducing the driving frequency of the AC signal in step S208 is shown in FIG.

[0034] [ Fig.14 ] Fig.14 is a diagram illustrating a third exemplary embodiment of the present invention, which illustrates Figure 5 The relationship between the speed of the vibration actuator and the pulse width and driving frequency of the AC signal during the acceleration control in step S104.

[0035] [ Fig.15A ] Fig.15A is a diagram illustrating a fourth exemplary embodiment of the present invention, which illustrates the relationship between the pulse width of an AC signal and the speed of a vibration actuator.

[0036] [ Fig. 15B ] Fig. 15B is a diagram illustrating a fourth exemplary embodiment of the present invention, which illustrates the relationship between the phase difference between two-phase AC signals and the speed of a vibration actuator.

[0037] [ Fig.16 ] Fig.16 is a flowchart illustrating a fourth exemplary embodiment of the present invention, which illustrates Figure 5 An example of a detailed processing procedure of the acceleration control in step S104 is shown in FIG.

[0038] [ Fig.17 ] Fig.17 is a diagram illustrating a fifth exemplary embodiment of the present invention, which illustrates a configuration example in which an imaging device is applied as an electronic device including the vibration driving device according to the first exemplary embodiment, the second exemplary embodiment, the third exemplary embodiment, or the fourth exemplary embodiment.

[0039] [ Fig.18A ] Fig.18A is a diagram illustrating the relationship between time and speed in the drive control of the vibration actuator discussed in Patent Document 1.

[0040] [ Fig.18B ] Fig.18B is a diagram illustrating the relationship between time and speed in the drive control of the vibration actuator discussed in Patent Document 2. DETAILED DESCRIPTION

[0041] Modes for carrying out the present invention (exemplary embodiments) will be described below with reference to the drawings.

[0042] (First Exemplary Embodiment)

[0043] First, a first exemplary embodiment of the present invention will be described.

[0044] Figure 1 is an exploded view of a vibration actuator 200 according to a first exemplary embodiment of the present invention.

[0045] like Figure 1As shown in , the vibration actuator 200 includes a vibration body (may be referred to as a “vibrator”) 210 , a rotating body 220 , a coil spring 230 , a gear 240 , a fixing member 250 , and an upper nut 260 .

[0046] like Figure 1 As shown in FIG. 2 , the vibrating body 210 includes a first elastic body 211, a piezoelectric element (electro-mechanical energy transducer) 212, a flexible substrate 213, a lower nut 214, a second elastic body 215, and a shaft 216. The first elastic body 211 is a plate (disk)-shaped elastic body formed of a material with low vibration damping loss such as metal. The piezoelectric element 212 is an electro-mechanical energy transducer. The flexible substrate 213 is a flexible substrate for applying an AC signal supplied from a driving power supply to the piezoelectric element 212. The lower nut 214 is a fastening member that is fitted into a threaded portion formed at the bottom end of the shaft 216. The shaft 216 is inserted into a through hole formed in the center portion of the first elastic body 211, the piezoelectric element 212, the flexible substrate 213, and the second elastic body 215. The shaft 216 has a step midway along its length, and this step is adjacent to the step on the inner wall of the second elastic body 215. The threaded portion is formed at the end (bottom end) of the shaft 216. By fitting and tightening the lower nut 214 to the threaded portion, the second elastic body 215, the first elastic body 211, the piezoelectric element 212, and the flexible substrate 213 can be fixed.

[0047] like Figure 1 As shown in , the rotating body 220 includes a moving body 221 and a contact spring 222. The contact spring 222 fixed to the moving body 221 is pressed into contact with the surface of the first elastic body 211 on the side that is not in contact with the piezoelectric element 212. The contact spring 222 is a contact body that has elasticity and contacts the first elastic body 211 of the vibrating body 210, and is fixed to the moving body 221 and rotates integrally with the moving body 221.

[0048] The coil spring 230 is a pressing member that is disposed between the spring receiving portion of the moving body 221 and the gear 240 and presses the moving body 221 downward toward the first elastic body 211 .

[0049] The gear 240 is an output component and is fitted to the moving body 221 to allow the moving body 221 to move in the rotation axis direction and rotate integrally with the moving body 221. The gear 240 is pivotally supported by a fixing member 250 coupled to the shaft 216. The axial position of the gear 240 is adjusted by the fixing member 250.

[0050] A threaded portion is also formed at the end (top end) of the shaft 216 on the side where the lower nut 214 is not fitted. The upper nut 260 is fitted into this threaded portion to fix the shaft 216 to the fixing member 250. The fixing member 250 has a threaded hole, and by fixing the fixing member 250 to a desired position using a screw, the vibration actuator 200 can be attached to a desired position.

[0051] The piezoelectric element 212 has a driving electrode A (not shown) for generating a first bending vibration. A predetermined AC voltage (AC signal) is applied to this driving electrode A to generate A mode vibration. The piezoelectric element 212 also has a driving electrode B (not shown) for generating a second bending vibration that is phase-shifted by 90 degrees in the rotation direction relative to the first bending vibration. A predetermined AC voltage (AC signal) is applied to this driving electrode B to generate B mode vibration. Applying an AC voltage (AC signal) with a frequency close to the resonant frequency of the vibrating body 210 and different phases to the driving electrodes A and B of the piezoelectric element 212 generates a vibration that generates a force in the rotation direction on the first elastic body 211. Here, at each position of the first elastic body 211 in the driving direction, an elliptical motion consisting of a motion in a vertical direction (axial direction of the vibrating body 210) orthogonal to the rotation direction and a motion in the rotation direction (lateral direction) is generated. When the contact spring 222 is pressed to contact the surface of the first elastic body 211 that excites the elliptical motion, the contact spring 222 and the moving body 221 (rotating body 220) are moved by the driving force from the elliptical motion. In other words, the vibration actuator 200 according to the present exemplary embodiment uses the vibration generated by applying an AC signal to the piezoelectric element (electric-mechanical energy transducer) 212 to make the vibrating body 210 and the contact spring 222 as a contact body move relative to each other.

[0052] In the case of using such a vibration actuator 200 to drive, for example, a camera lens, since the lens needs to be driven smoothly, it is desirable that the vibration actuator 200 has a constant speed control for driving the lens at a constant speed in a stable state.

[0053] Figure 2 2 is a perspective view of an assembled vibration actuator 200 according to a first exemplary embodiment of the present invention. Figure 2 In, with Figure 1 Components similar to those shown in FIG. 1 are denoted by the same reference numerals.

[0054] Figure 3 1 is a diagram illustrating an example of a hardware configuration of a vibration driven device 10 according to a first exemplary embodiment of the present invention. Figure 3 In, with Figure 1 and Figure 2 Components similar to those shown in FIG. 1 are denoted by the same reference numerals. Figure 3As shown in , the vibration driving device 10 includes a vibration actuator control device 100 , a vibration actuator 200 , and a position detection unit 300 .

[0055] like Figure 3 As shown in, the control device 100 of the vibration actuator (hereinafter, referred to as "control device 100") includes a control unit 110 and a drive unit 120. The drive unit 120 includes an AC signal generating unit 121A and 121B, coils 1221A and 1221B, capacitors 1222A and 1222B, a power supply voltage detection unit 123 and a phase difference detection unit 124.

[0056] The control unit 110 includes, for example, a microcomputer, and comprehensively controls the operation of the vibration driven device 10 .

[0057] The AC signal generating unit 121A generates an AC signal as a driving signal under the first mode (A mode) based on the command value from the control unit 110. The AC signal generating unit 121B generates an AC signal as a driving signal under the second mode (B mode) based on the command value from the control unit 110. The AC signal generating units 121A and 121B can change the phase difference between the AC signals in the A mode and the B mode within the range of 0° to 360°. The AC signal generating unit 121A is a switching circuit that uses FET1 to FET4 as a switching element to switch the power supply voltage (Vbat) of the A mode signal. The AC signal generating unit 121A amplifies its switching voltage through the boost effect of the combination of the coil 1221A and the capacitor 1222A, and applies the amplified switching voltage to the A mode drive terminal of the vibration actuator 200. The AC signal generating unit 121B is a switching circuit that uses FET1' to FET4' as a switching element to switch the power supply voltage (Vbat) of the B mode signal. The AC signal generating unit 121B amplifies the switching voltage thereof through a voltage-boosting effect of a combination of the coil 1221B and the capacitor 1222B, and applies the amplified switching voltage to the B-mode driving terminal of the vibration actuator 200 .

[0058] The power supply voltage detection unit 123 detects the magnitude of the power supply voltage (Vbat). A power supply that generates the power supply voltage (Vbat) is connected to the power supply voltage detection unit 123, and generates a switching pulse by switching the power supply voltage (Vbat).

[0059] As used herein, the driving frequency refers to the switching frequency of the AC signal generating units 121A and 121B, and is output as a switching pulse from the A and A' of the AC signal generating units 121A and the B and B' of the AC signal generating units 121B. Pulse width refers to the time width of the switching pulse output from the AC signal generating units 121A and 121B. If the time width of on and off is 1:1, then the pulse width is referred to as a duty cycle of 50%. If the time width of on and off is 1:3, then the pulse width is referred to as a duty cycle of 25%. The control of changing the speed of the vibration actuator 200 by changing this time width will be referred to as pulse width control.

[0060] The phase difference detection unit 124 is a component that detects a phase difference between an applied voltage and a voltage detected from the vibration actuator 200 to monitor a resonance state.

[0061] The position detection unit 300 is a component that detects the rotational position of the rotating body 220 of the vibration actuator 200. Based on the result obtained by the position detection unit 300, information about the position and speed of the rotating body 220 is transmitted to the control unit 110. The control unit 110 controls the rotational position and rotational speed of the vibration actuator 200 based on the received information about the position and speed of the rotating body 220 of the vibration actuator 200.

[0062] Figure 4 1 is a diagram illustrating an example of a functional configuration of a vibration driven device 10 according to a first exemplary embodiment of the present invention. Figure 4 In, with Figure 3 Components similar to those shown in FIG. 1 are denoted by the same reference numerals.

[0063] like Figure 4 As shown in FIG. 1 , the driving unit 120 includes an AC signal generating unit 121 and a voltage boosting unit 122. Here, Figure 4 The AC signal generating unit 121 shown in FIG. 1 includes Figure 3 The AC signal generating units 121A and 121B shown in FIG. Figure 4 The boost unit 122 shown in FIG. 1 includes Figure 3 The coils 1221A and 1221B and the capacitors 1222A and 1222B are shown in FIG. Figure 4 In the driving unit 120 shown in FIG. 1 , the Figure 3 The power supply voltage detection unit 123 and the phase difference detection unit 124 shown in FIG.

[0064] The control device 100 includes a control unit 110 and a drive unit 120 .

[0065] like Figure 4As shown in, the control unit 110 includes a command value generating unit 111, a control amount calculating unit 112, a control amount converting unit 113, a current value calculating unit 114, a deviation determining unit 115, a fixed value increasing / decreasing unit 116, a fixed value determining unit 117 and an output selecting unit 118. The components 111 to 118 constituting the control unit 110 perform specific operations based on the output (control signal). As described above, the control unit 110 includes, for example, a microcomputer. Here, the control unit 110 includes electrical parts such as an arithmetic unit (CPU), a memory storing a program, and a memory used as a working area for loading a program, and generates a signal with information for controlling the drive of the vibration actuator 200.

[0066] The command value generation unit 111 generates a command value to approach the target value. Specifically, as the command value, the command value generation unit 111 generates a command position and a command speed for moving the vibration actuator 200 to the target value. Here, the command position refers to the position information for moving the vibration actuator 200 to the target position that changes over time, and is set to perform position control for moving the vibration actuator 200 to the final stop position. In this exemplary embodiment, the command value generated by the command value generation unit 111 can be interpreted and applied as referring to the target value that changes over time.

[0067] A signal related to the deviation between the command position as the output of the command value generating unit 111 and the position as the output of the position detecting unit 300 is input to the control amount calculating unit 112. Using this deviation related signal, the control amount calculating unit 112 calculates the control amount of the vibration actuator 200 by, for example, PID calculation.

[0068] The control amount output from the control amount calculation unit 112 is input to the control amount conversion unit 113. The control amount conversion unit 113 converts the control amount output from the control amount calculation unit 112 into a pulse width or a driving frequency.

[0069] The position information as the output of the position detection unit 300 is input to the current value calculation unit 114. The current value calculation unit 114 calculates the actual speed from the value obtained from the position detection unit 300 as the current value.

[0070] The command speed as the command value output from the command value generating unit 111 and the actual speed as the current value output from the current value calculating unit 114 are input to the deviation determining unit 115. The deviation determining unit 115 determines the sign (positive or non-positive, etc.) of a signal related to the deviation between the command speed output from the command value generating unit 111 and the actual speed output from the current value calculating unit 114.

[0071] The fixed value increasing / decreasing unit 116 increases or decreases the pulse width or the driving frequency as a fixed value.

[0072] The output of the deviation determination unit 115 and the output of the fixed value increase / decrease unit 116 are input to the fixed value determination unit 117. The fixed value determination unit 117 determines the aforementioned fixed value based on the determination result of the deviation determination unit 115. For example, if the determination made by the deviation determination unit 115 is positive, the fixed value determination unit 117 determines the pulse width or driving frequency increased or decreased by the fixed value increase / decrease unit 116 as a fixed value. For example, if the determination made by the deviation determination unit 115 is not positive, the fixed value determination unit 117 determines the pulse width or driving frequency at a time before the time when the fixed value increase / decrease unit 116 increases or decreases the fixed value as a fixed value. As used herein, the previous time refers to a control cycle before (immediately before) the current control cycle.

[0073] The output of the control amount conversion unit 113 and the output of the fixed value determination unit 117 are input to the output selection unit 118. The output selection unit 118 selects between the outputs according to whether the actual speed as the current value of the vibration actuator 200 reaches the command speed as the command value. For example, if the actual speed does not reach the command speed, the output selection unit 118 inputs the output of the fixed value determination unit 117 to the AC signal generation unit 121. If the target speed has been reached, the output selection unit 118 outputs the output of the control amount conversion unit 113 to the AC signal generation unit 121. Here, in order to ensure the continuity of the pulse width or driving frequency output to the AC signal generation unit 121, the output selection unit 118 can add the difference between the output of the control amount conversion unit 113 and the output of the fixed value determination unit 117 to the output of the control amount conversion unit 113 and output the result.

[0074] The output of the output selection unit 118 is input to the AC signal generating unit 121. This AC signal generating unit 121 is, for example, a driver circuit that generates an AC signal by a switch. Specifically, when the vibration actuator 200 is controlled in a low speed range, the AC signal generating unit 121, for example, generates a two-phase AC signal with a pulse width output from the output selection unit 118 and a driving frequency set to a maximum value. The driving frequency set to a maximum value refers to a frequency set to the highest value in the driving frequency band for driving the vibration actuator 200 or a value near it. On the other hand, when the vibration actuator 200 is controlled in a high speed range, the AC signal generating unit 121, for example, generates a two-phase AC signal with a driving frequency output from the output selection unit 118 and a pulse width (such as 50%) set to a maximum value. The sign of the phase difference between the two-phase AC signals generated by the AC signal generating unit 121 is set based on the driving direction. For example, for the forward direction, the sign is set to +90°, and for the reverse direction, it is set to -90°.

[0075] The output of the AC signal generating unit 121 is input to the boosting unit 122. The boosting unit 122 boosts the two-phase AC signal generated by the AC signal generating unit 121 through the switch and applies the resultant signal to the vibration actuator 200.

[0076] Figure 5 1 is a flowchart illustrating an example of a processing procedure of a method of controlling the vibration actuator 200 by the control device 100 according to the first exemplary embodiment of the present invention. Figure 5 The processing steps of the flowchart shown in are implemented, for example, by the CPU of the control unit 110 loading a predetermined program stored in a memory and controlling the operations of the components of the control device 100 .

[0077] When the vibration drive device 10 is powered on, in step S101, the control unit 110 first sets initial parameters. Specifically, as initial parameters, the control unit 110 sets the phase difference, frequency and pulse width of the AC signal to be applied to the piezoelectric element (electric-mechanical energy transducer) 212 of the vibration actuator 200 to their initial values. Here, the phase difference between the AC signals can be, for example, gradually increased from 0 ° to a maximum value. However, this is not restrictive, and the phase difference can also start from a value other than 0.

[0078] Next, in step S102, the control unit 110 (e.g., command value generating unit 111) is provided with a stop position as the position where the vibration actuator 200 finally stops and a command position for moving the vibration actuator 200 to a target position that changes over time based on the stop position. Here, the command position is, for example, provided for each time interval (e.g., each Δt), to realize the acceleration period in which the vibration actuator 200 is accelerated, the constant speed period in which the vibration actuator 200 remains at the target speed, and the deceleration period in which the vibration actuator 200 is decelerated. However, this is not restrictive. For example, according to the distance, the command position can be set to realize the acceleration period and the deceleration period, and does not realize the constant speed period.

[0079] Next, in step S103 , the control unit 110 determines whether the actual speed calculated by the current value calculation unit 114 is lower than the target speed.

[0080] If, as a result of the determination in step S103 , the actual speed is lower than the target speed (“YES” in step S103 ), the process proceeds to step S104 .

[0081] In step S104, the control unit 110 performs acceleration control of the vibration actuator 200. Details of the acceleration control in this step S104 will be described below.

[0082] Once the single control cycle of the acceleration control in step S104 ends, in step S105, the control unit 110 determines whether the vibration actuator 200 is in the deceleration position (has reached the deceleration position). If, as a result of this determination, the vibration actuator 200 is not in the deceleration position (has not yet reached the deceleration position) ("No" in step S105), the process returns to step S103, and the control unit 110 performs the process after step S103.

[0083] On the other hand, if, as a result of the determination in step S103 , the actual speed is not lower than the target speed (the actual speed has reached the target speed) (“NO” in step S103 ), the process proceeds to step S106 .

[0084] In step S106, the control unit 110 performs constant speed control of the vibration actuator 200. In this constant speed control, the control unit 110, for example, calculates the deviation between the command position of each time (for example, each Δt) set in step S102 and the actual position detected by the position detection unit 300, and for example, calculates the control amount of the driving frequency and pulse width of the AC signal by PID calculation. Then, the control unit 110 performs frequency control with constant pulse width in the high speed range of the vibration actuator 200 or performs pulse width control with constant driving frequency in the low speed range based on the calculated control amount to achieve the target speed. Here, the control of at least one of the driving frequency and pulse width of the AC signal can be performed. In this exemplary embodiment, it is described that the deviation between the command position as the command value related to the position of the vibration actuator 200 and the actual position as the current value is used to perform constant speed control. However, the present invention is not limited to this mode. For example, the mode of performing constant speed control based on the deviation between the command speed as the command value related to the speed of the vibration actuator 200 and the actual speed as the current value is also applicable to the present invention.

[0085] Once the single control cycle of the constant speed control in step S106 ends, in step S107, the control unit 110 determines whether the vibration actuator 200 is in the deceleration position (has reached the deceleration position). If, as a result of this determination, the vibration actuator 200 is not in the deceleration position (has not yet reached the deceleration position) ("No" in step S107), the process returns to step S106, and the control unit 110 performs the process after step S106.

[0086] If the vibration actuator 200 is determined to be in the deceleration position (has reached the deceleration position) in step S105 ("Yes" in step S105) or is determined to be in the deceleration position (has reached the deceleration position) in step S107 ("Yes" in step S107), the processing proceeds to step S108.

[0087] In step S108, the control unit 110 performs deceleration control of the vibration actuator 200. As with the constant speed control in the aforementioned step S106, this deceleration control is performed by, for example, calculating the control amount of the driving frequency and pulse width of the AC signal according to the deviation between the command position and the actual position through PID calculation and controlling the vibration actuator 200 to decelerate toward the stop position set in step S102.

[0088] Next, in step S109, control unit 110 determines whether vibration actuator 200 is in the stop position (arrived the stop position) provided in step S102. If as a result of this determination, vibration actuator 200 is not in the stop position (not yet arrived the stop position) ("No" in step S109), processing returns to step S108 and control unit 110 performs the processing after step S108 so.

[0089] On the other hand, if as the result of the determination of step S109, the vibration actuator 200 is in the stop position (arrived the stop position) ("yes" in step S109), the control unit 110 for example gradually reduces the pulse width of the AC signal towards 0 so, and finishes driving the vibration actuator 200. Thus completed Figure 5 The process of the flowchart shown in .

[0090] Figure 6 is a flowchart illustrating a first exemplary embodiment of the present invention, which illustrates Figure 5 An example of the detailed processing procedure of the acceleration control in step S104 is shown in FIG. Figure 6 Diagram showing the process from start to finish Figure 5 The time of one control cycle of the acceleration control in step S104.

[0091] when Figure 5 When the acceleration control in step S104 starts, then Figure 6 In step S201, the control unit 110 first determines whether the value of the speed deviation obtained by subtracting the actual speed calculated by the current value calculation unit 114 from the command speed generated by the command value generation unit 111 is positive. The processing of this step S201 is performed by, for example, the deviation determination unit 115 of the control unit 110. In the present exemplary embodiment, the value of the speed deviation in step S201 corresponds to a "first value" at a specific time during the acceleration of the vibration actuator 200, and the "first value" is a value related to the relative speed between the vibration body 210 and the contact spring 222 and is obtained by subtracting the current value from the command value generated to be close to the target value.

[0092] If, as a result of the determination in step S201 , the value of the speed deviation is positive (“YES” in step S201 ), the process proceeds to step S202 .

[0093] In step S202 , the control unit 110 determines whether the pulse width of the AC signal in the previous control cycle is less than a maximum value.

[0094] If, as a result of the determination in step S202 , the pulse width of the AC signal in the previous control cycle is smaller than the maximum value (“YES” in step S202 ), the process proceeds to step S203 .

[0095] In step S203 , the control unit 110 sets the driving frequency of the AC signal to an initial value.

[0096] Next, in step S204, the control unit 110 sets a value obtained by adding αp to the pulse width of the AC signal in the previous control cycle as the pulse width of the AC signal. This αp is the amount of increase in the pulse width of the AC signal in one control cycle.

[0097] Next, in step S205 , the control unit 110 determines whether the pulse width of the AC signal is less than or equal to a maximum value.

[0098] If, as a result of the determination in step S205 , the pulse width of the alternating current is not less than or equal to the maximum value (the pulse width is greater than the maximum value) (“NO” in step S205 ), the process proceeds to step S206 .

[0099] In step S206 , the control unit 110 sets the pulse width of the AC signal to a maximum value.

[0100] If, as a result of the determination in step S202, the pulse width of the AC signal in the previous control cycle is not less than the maximum value (the pulse width in the previous control cycle is greater than or equal to the maximum value) ("No" in step S202), then the processing proceeds to step S207.

[0101] In step S207 , the control unit 110 sets the pulse width of the AC signal to a maximum value.

[0102] Next, in step S208, the control unit 110 sets a value obtained by subtracting αf from the driving frequency of the AC signal in the previous control cycle as the driving frequency of the AC signal. This αf is the amount of reduction in the driving frequency of the AC signal in one control cycle.

[0103] Next, in step S209 , the control unit 110 determines whether the driving frequency of the AC signal is higher than or equal to a minimum value.

[0104] If, as a result of the determination in step S209 , the driving frequency of the AC signal is not higher than or equal to the minimum value (the driving frequency is lower than the minimum value) (“NO” in step S209 ), the process proceeds to step S210 .

[0105] In step S210 , the control unit 110 sets the driving frequency of the AC signal to a minimum value.

[0106] If, as a result of the determination in step S201 , the value of the speed deviation is not positive (the value of the speed deviation is not positive) (“NO” in step S201 ), the process proceeds to step S211 .

[0107] In step S211 , the control unit 110 sets the pulse width of the AC signal to the pulse width of the AC signal in the previous control cycle immediately before this control cycle.

[0108] Next, in step S212 , the control unit 110 sets the driving frequency of the AC signal to the driving frequency of the AC signal in the previous control cycle immediately before this control cycle.

[0109] If the determination in step S205 is yes (“Yes” in step S205), if the processing of step S206 ends, if the determination in step S209 is yes (“Yes” in step S209), if the processing of step S210 ends, or if the processing of step S212 ends, then Figure 6 In other words, at a specific time in the acceleration control cycle of the vibration actuator 200, Figure 6 The acceleration control process shown in is ended.

[0110] Figure 7 is a diagram illustrating a first exemplary embodiment of the present invention, which illustrates Figure 5 The relationship between the speed of the vibration actuator 200 and the pulse width and driving frequency of the AC signal during the acceleration control in step S104. Specifically, Figure 7 A command speed 711 and an actual speed 712 related to the speed of the vibration actuator 200 , a pulse width 720 of the AC signal, and a driving frequency 730 of the AC signal are illustrated.

[0111] exist Figure 7 In the period from the start (time 0) to the time t1 of the control cycle after time 0, the value of the speed deviation obtained by subtracting the actual speed 712 from the command speed 711 is positive. In this period, the pulse width 720 of the AC signal gradually increases. This process is similar to Figure 6 The processing corresponds to step S204 in .

[0112] exist Figure 7 In the period from time t1 to time t2 of the control cycle after time t1, the value of the speed deviation obtained by subtracting the actual speed 712 from the command speed 711 is not positive. In this period, the pulse width 720 of the AC signal is maintained at the same value as the pulse width of the AC signal at time t1. This process is similar to Figure 6The processing corresponds to step S211 in .

[0113] exist Figure 7 For example, in the period from time t3 to time t4, the pulse width 720 of the AC signal is at a maximum value. In this period, the driving frequency 730 of the AC signal gradually decreases. This process is similar to Figure 6 The processing of steps S207 and S208 in corresponds to this.

[0114] exist Figure 7 In the period from time t4 to time t5 of the control cycle after time t4, the value of the speed deviation obtained by subtracting the actual speed 712 from the command speed 711 is not positive. In this period, the driving frequency 730 of the AC signal is maintained at the same value as the driving frequency of the AC signal at time t4. This process is similar to Figure 6 The processing corresponds to step S212 in .

[0115] In the present exemplary embodiment, whether the value of the speed deviation is positive is described as Figure 6 However, the value is not limited to a positive value. For example, a range of values ​​previously determined by actual measurement may be used.

[0116] In the control device 100 according to the above-mentioned first exemplary embodiment, the control unit 110 performs the following processing at a specific time during the acceleration of the vibration actuator. If the value (first value) of the speed deviation obtained by deducting the current value from the command value and the relative speed between the vibration body 210 and the contact spring 222 is positive, the control unit 110 performs the control (step S208) of reducing the driving frequency of the AC signal or the control (step S204) of increasing the pulse width of the AC signal. Here, the control (step S204) of increasing the pulse width of the AC signal is equivalent to the control of increasing the effective voltage of the AC signal. If the value (first value) of the aforementioned speed deviation is not positive, the control unit 110 performs the control (step S212) of the driving frequency of the AC signal performed before the specific time or the control (step S211) of the pulse width of the AC signal.

[0117] In this way, the driving frequency and pulse width of the AC signal are controlled according to the sign of the value of the speed deviation, thereby preventing the sharp increase and speed fluctuation of the speed during the acceleration of the vibration actuator 200. This can prevent the vibration actuator 200 from driving the unstable drive of the driving target and reduce the driving noise of the vibration actuator 200.

[0118] In the present exemplary embodiment, the pulse width and driving frequency of the AC signal are used to perform drive control of the vibration actuator 200. However, a similar effect can be obtained by using voltage control for controlling the voltage to be switched instead of the pulse width control of the AC signal.

[0119] (Second exemplary embodiment)

[0120] Next, a second exemplary embodiment will be described. In the following description of the second exemplary embodiment, descriptions of items common to the foregoing first exemplary embodiment will be omitted, and differences from the foregoing first exemplary embodiment will be mainly described.

[0121] The hardware configuration of the vibration driving device according to the second exemplary embodiment is Figure 3 The hardware configuration of the vibration driven device 10 according to the first exemplary embodiment shown in FIG. 1 is similar to that of the vibration driven device 10 according to the second exemplary embodiment. Figure 4 The functional configuration of the vibration driving device 10 according to the first exemplary embodiment shown in FIG. 1 is similar to that of the method for controlling the vibration actuator 200 by the control device 100 according to the second exemplary embodiment. Figure 5 The processing procedure of the method of controlling the vibration actuator 200 by the control device 100 according to the first exemplary embodiment shown in is similar.

[0122] Figure 8 is a flowchart illustrating a second exemplary embodiment of the present invention, which illustrates Figure 5 An example of the detailed processing procedure during the deceleration control in step S108 of FIG. Figure 8 Diagram showing the process from start to finish Figure 5 The time for one control cycle of the deceleration control in step S108.

[0123] when Figure 5 When the deceleration control in step S108 is started, then Figure 8 In step S301, the control unit 110 first determines whether the value of the speed deviation obtained by subtracting the actual speed calculated by the current value calculation unit 114 from the command speed generated by the command value generation unit 111 is positive. The processing of this step S301 is performed by, for example, the deviation determination unit 115 of the control unit 110. In the present exemplary embodiment, the value of the speed deviation in step S301 corresponds to a "first value" at a specific time during the deceleration of the vibration actuator 200, which is a value related to the relative speed between the vibration body 210 and the contact spring 222 and is obtained by subtracting the current value from the command value generated to be close to the target value.

[0124] If, as a result of the determination in step S301 , the value of the speed deviation is positive (“YES” in step S301 ), the process proceeds to step S302 .

[0125] In step S302 , the control unit 110 determines whether the driving frequency of the AC signal in the previous control cycle is lower than an initial value.

[0126] If, as a result of the determination in step S302 , the driving frequency of the AC signal in the previous control cycle is lower than the initial value (“YES” in step S302 ), the process proceeds to step S303 .

[0127] In step S303 , the control unit 110 sets the pulse width of the AC signal to a maximum value.

[0128] Next, in step S304, the control unit 110 sets a value obtained by adding βf to the driving frequency of the AC signal in the previous control cycle as the driving frequency of the AC signal. This βf is the increase amount of the driving frequency of the AC signal in one control cycle.

[0129] Next, in step S305 , the control unit 110 determines whether the driving frequency of the AC signal is lower than or equal to an initial value.

[0130] If, as a result of the determination in step S305 , the driving frequency of the AC signal is not lower than or equal to the initial value (the driving frequency is higher than the initial value) (“NO” in step S305 ), the process proceeds to step S306 .

[0131] In step S306 , the control unit 110 sets the driving frequency of the AC signal to an initial value.

[0132] If, as a result of the determination in step S302, the driving frequency of the AC signal in the previous control cycle is not lower than the initial value (the driving frequency of the AC signal in the previous control cycle is higher than or equal to the initial value) ("No" in step S302), then the processing proceeds to step S307.

[0133] In step S307 , the control unit 110 sets the driving frequency of the AC signal to an initial value.

[0134] Next, in step S308, the control unit 110 sets a value obtained by subtracting βp from the pulse width of the AC signal in the previous control cycle as the pulse width of the AC signal. This βp is the amount of reduction in the pulse width of the AC signal in one control cycle.

[0135] Next, in step S309 , the control unit 110 determines whether the pulse width of the AC signal is greater than or equal to zero.

[0136] If, as a result of the determination in step S309 , the pulse width of the AC signal is not greater than or equal to 0 (the pulse width is smaller than 0) (“NO” in step S309 ), the process proceeds to step S310 .

[0137] In step S310 , the control unit 110 sets the pulse width of the AC signal to zero.

[0138] If, as a result of the determination in step S301 , the value of the speed deviation is not positive (the value of the speed deviation is not positive) (“NO” in step S301 ), the process proceeds to step S311 .

[0139] In step S311 , the control unit 110 sets the driving frequency of the AC signal to the driving frequency of the AC signal in the previous control cycle immediately before this control cycle.

[0140] Next, in step S312 , the control unit 110 sets the pulse width of the AC signal to the pulse width of the AC signal in the previous control cycle immediately before this control cycle.

[0141] If the determination in step S305 is yes (“Yes” in step S305), if the processing of step S306 ends, if the determination in step S309 is yes (“Yes” in step S309), if the processing of step S310 ends, or if the processing of step S312 ends, then Figure 8 In other words, at a specific time in the control cycle during the deceleration period when the vibration actuator 200 is reduced, Figure 8 The process of the deceleration control shown in is completed.

[0142] Fig. 9 is a diagram illustrating a second exemplary embodiment of the present invention, which illustrates Figure 5 The relationship between the speed of the vibration actuator 200 during the deceleration control in step S108 and the pulse width and driving frequency of the AC signal. Specifically, Fig. 9 A command speed 911 and an actual speed 912 related to the speed of the vibration actuator 200 , a pulse width 920 of the AC signal, and a driving frequency 930 of the AC signal are illustrated.

[0143] exist Fig. 9 In the process, the driving frequency 930 of the AC signal gradually increases in the period from time t11 to time t12 of the control cycle after time t11. Figure 8 The processing corresponds to step S304 in .

[0144] exist Fig. 9In the period from time t12 to time t13 of the control cycle after time t12, the driving frequency 930 of the AC signal is maintained at the same value as the driving frequency of the AC signal at time t12. Figure 8 The processing corresponds to step S311 in .

[0145] exist Fig. 9 In the process, for example, in the period from time t14 to time t15, the driving frequency 930 of the AC signal is at the initial value, and the pulse width 920 of the AC signal gradually decreases. Figure 8 The processing of steps S307 and S808 corresponds to this.

[0146] exist Fig. 9 In the period from time t15 to time t16 of the control cycle after time t15, the pulse width 920 of the AC signal is maintained at the same value as the pulse width of the AC signal at time t15. Figure 8 The processing corresponds to step S312 in .

[0147] In the present exemplary embodiment, whether the value of the speed deviation is positive is described as Figure 8 However, the value is not limited to a positive value. For example, a range of values ​​previously determined by actual measurement may be used.

[0148] In the control device 100 according to the above-mentioned second exemplary embodiment, the control unit 110 performs the following processing at a specific time during the deceleration of the vibration actuator. If the value (first value) of the speed deviation obtained by deducting the current value from the command value and the relative speed between the vibration body 210 and the contact spring 222 is positive, the control unit 110 performs the control (step S304) of increasing the driving frequency of the AC signal or the control (step S308) of reducing the pulse width of the AC signal. Here, the control (step S308) of reducing the pulse width of the AC signal is equivalent to the control of reducing the effective voltage of the AC signal. If the value (first value) of the aforementioned speed deviation is not positive, the control unit 110 performs the control (step S311) of the driving frequency of the AC signal performed before the specific time or the control (step S312) of the pulse width of the AC signal.

[0149] In this way, the driving frequency and pulse width of the AC signal are controlled according to the sign of the value of the speed deviation, thereby preventing the sharp drop and speed fluctuation of the speed during the deceleration of the vibration actuator 200. This can prevent the vibration actuator 200 from driving the unstable drive of the driving target and reduce the driving noise of the vibration actuator 200.

[0150] In the present exemplary embodiment, the pulse width and driving frequency of the AC signal are used to perform the drive control of the vibration actuator 200. However, a similar effect can be obtained by using a voltage control for changing the voltage to be switched instead of the pulse width control of the AC signal.

[0151] <Modifications of the First Exemplary Embodiment and the Second Exemplary Embodiment>

[0152] Modifications of the aforementioned first and second exemplary embodiments will now be described.

[0153] In the aforementioned first exemplary embodiment and second exemplary embodiment, whether the value of the speed deviation (first value) is positive is described as Figure 6 Step S201 or Figure 8 . However, the present invention is not limited thereto. For example, it can be determined by combining the value of the velocity deviation (first value) with the value of the position deviation obtained by subtracting the actual position as the current value from the command position as the command value (second value) and the value of the acceleration deviation obtained by subtracting the actual acceleration as the current value from the threshold value (third value). Here, the threshold value is, for example, a value determined by actual measurement and is determined according to the value of the noise level of the vibration actuator 200. Moreover, if it is determined that at least one or more of the values ​​of the velocity deviation, the position deviation, and the acceleration deviation are not positive, then the pulse width or the driving frequency of the AC signal can be controlled to the pulse width or the driving frequency of the AC signal in the previous control cycle as in the first exemplary embodiment and the second exemplary embodiment.

[0154] In the modified examples of the first exemplary embodiment and the second exemplary embodiment, the value of the position deviation (second value) and the value of the acceleration deviation (third value) are not limited to positive values, as in the value of the velocity deviation (first value) in the first exemplary embodiment and the second exemplary embodiment described above. For example, a certain range of values ​​previously determined by actual measurement may be used.

[0155] Fig.10 is a diagram illustrating a modification of the first exemplary embodiment and the second exemplary embodiment of the present invention, which illustrates the relationship between the position, velocity, and acceleration of the vibration actuator 200 and the pulse width of the AC signal. Specifically, Fig.10 A command position 1011 and an actual position 1012 associated with the position of the vibration actuator 200 , and a command speed 1021 and an actual speed 1022 associated with the speed of the vibration actuator 200 are illustrated. Fig.10 Also illustrated are a threshold value 1031 and an actual acceleration 1032 associated with the acceleration of the vibration actuator 200 and a pulse width 1040 of the AC signal. Fig.10The situation during acceleration control of the vibration actuator 200 is illustrated as an example.

[0156] When the acceleration control of the vibration actuator 200 is started, the control unit 110 increases the pulse width 1040 of the AC signal until Fig.10 time t31.

[0157] exist Fig.10 , in the period from time t31 to time t32 of the control cycle after time t31, the actual acceleration 1032 exceeds the threshold value 1031. In other words, in the period from time t31 to time t32, the value (third value) of the acceleration deviation obtained by subtracting the actual acceleration 1032 as the current value from the threshold value 1031 is not positive. In this period, the control unit 110 maintains the pulse width 1040 of the AC signal at the same value as the pulse width of the AC signal at time t31.

[0158] exist Fig.10 , in the period from time t32 to time t33 of the control cycle after time t32, the value (first value) of the speed deviation obtained by subtracting the actual speed 1022 from the command speed 1021 is not positive. In this period, the control unit 110 maintains the pulse width 1040 of the AC signal at the same value as the pulse width of the AC signal at time t32.

[0159] exist Fig.10 In the period from time t33 to time t34 of the control cycle after time t33, the value of the speed deviation (first value), the value of the position deviation (second value) and the value of the acceleration deviation (third value) are all positive values. In this period, the control unit 110 performs control to increase the pulse width 1040 of the AC signal.

[0160] exist Fig.10 , in the period from time t34 to time t35 of the control cycle after time t34, the value (second value) of the position deviation obtained by subtracting the actual position 1012 from the command position 1011 is not positive. In this period, the control unit 110 maintains the pulse width 1040 of the AC signal at the same value as the pulse width of the AC signal at time t34.

[0161] exist Fig.10 In this period, the control unit 110 performs control to increase the pulse width 1040 of the AC signal.

[0162] As mentioned above, if at least one of the value (first value) of velocity deviation, the value (second value) of position deviation and the value (third value) of acceleration deviation is not positive, the pulse width control and the driving frequency control of the AC signal in the previous control cycle can be performed so. This can further prevent the unstable driving of the vibration actuator 200 to the driven target, and can further reduce the driving noise of the vibration actuator 200.

[0163] The foregoing modification of the first exemplary embodiment and the foregoing modification of the second exemplary embodiment will each be described in detail below.

[0164] [Modification of the first exemplary embodiment]

[0165] In the modification of the first exemplary embodiment, the control unit 110 performs the following control according to the value (second value) of the position deviation at a specific time during the acceleration of the vibration actuator 200, and the value of the position deviation is a value related to the relative position of the vibration body 210 and the contact spring 222 and is obtained by subtracting the current value from the command value. If the value (second value) of the position deviation is positive, the control unit 110 performs the control (step S208) of reducing the driving frequency of the AC signal or the control (step S204) of increasing the pulse width of the AC signal. Here, the control (step S204) of increasing the pulse width of the AC signal is equivalent to the control of increasing the effective voltage of the AC signal. If the value (second value) of the aforementioned position deviation is not positive, the control unit 110 performs the control (step S212) of the driving frequency of the AC signal or the control (step S211) of the pulse width of the AC signal performed at the time before the specific time.

[0166] In the modification of the first exemplary embodiment, the control unit 110 performs the following control according to the value (third value) of the acceleration deviation at a specific time during the acceleration of the vibration actuator 200, and the value of the acceleration deviation is a value related to the relative acceleration between the vibration body 210 and the contact spring 222 and is obtained by subtracting the current value from the threshold value. If the value (third value) of the acceleration deviation is positive, the control unit 110 performs the control (step S208) of reducing the driving frequency of the AC signal or the control (step S204) of increasing the pulse width of the AC signal. Here, the control (step S204) of increasing the pulse width of the AC signal is equivalent to the control of increasing the effective voltage of the AC signal. If the value (third value) of the aforementioned acceleration deviation is not positive, the control unit 110 performs the control (step S212) of the driving frequency of the AC signal or the control (step S211) of the pulse width of the AC signal performed at the time before the specific time.

[0167] [Modification of the second exemplary embodiment]

[0168] In the modification of the second exemplary embodiment, the control unit 110 performs the following control according to the value (second value) of the position deviation at a specific time during the deceleration of the vibration actuator 200, and the value of the position deviation is a value related to the relative position between the vibration body 210 and the contact spring 222 and is obtained by subtracting the current value from the command value. If the value (second value) of the position deviation is positive, the control unit 110 performs the control (step S304) of increasing the driving frequency of the AC signal or the control (step S308) of reducing the pulse width of the AC signal. Here, the control (step S308) of reducing the pulse width of the AC signal is equivalent to the control of reducing the effective voltage of the AC signal. If the value (second value) of the aforementioned position deviation is not positive, the control unit 110 performs the control (step S311) of the driving frequency of the AC signal or the control (step S312) of the pulse width of the AC signal performed at the time before the specific time.

[0169] In the modification of the second exemplary embodiment, the control unit 110 performs the following control according to the value (third value) of the acceleration deviation at a specific time during the deceleration of the vibration actuator 200, and the value of the acceleration deviation is a value related to the relative acceleration between the vibration body 210 and the contact spring 222 and is obtained by subtracting the current value from the threshold value. If the value (third value) of the acceleration deviation is positive, the control unit 110 performs the control (step S304) of increasing the driving frequency of the AC signal or the control (step S308) of reducing the pulse width of the AC signal. Here, the control (step S308) of reducing the pulse width of the AC signal is equivalent to the control of reducing the effective voltage of the AC signal. If the value (third value) of the aforementioned acceleration deviation is not positive, the control unit 110 performs the control (step S311) of the driving frequency of the AC signal or the control (step S312) of the pulse width of the AC signal performed at the time before the specific time.

[0170] (Third Exemplary Embodiment)

[0171] Next, a third exemplary embodiment will be described. In the following description of the third exemplary embodiment, descriptions of items common to the foregoing first and second exemplary embodiments will be omitted, and differences from the foregoing first and second exemplary embodiments will be mainly described.

[0172] The hardware configuration of the vibration driving device according to the third exemplary embodiment is Figure 3 The hardware configuration of the vibration driven device 10 according to the first exemplary embodiment shown in FIG. 1 is similar to that of the vibration driven device 10 according to the third exemplary embodiment. Figure 4The functional configuration of the vibration driving device 10 according to the first exemplary embodiment shown in FIG. 1 is similar to that of the method for controlling the vibration actuator 200 by the control device 100 according to the third exemplary embodiment. Figure 5 The processing of the method for controlling the vibration actuator 200 by the control device 100 according to the first exemplary embodiment shown in FIG. Figure 5 The detailed processing during the acceleration control in step S104 is the same as Figure 6 According to the first exemplary embodiment shown in Figure 5 The detailed processing procedure during the acceleration control in step S104 is similar.

[0173] Fig.11 is a flowchart illustrating a third exemplary embodiment of the present invention, which illustrates Figure 6 An example of a detailed processing procedure of increasing the pulse width of the AC signal in step S204. Specifically, Fig.11 The diagram shows the time of one control cycle from start to finish.

[0174] When to start Figure 6 When processing step S204 in Fig.11 In step S401, the control unit 110 first determines whether the actual speed calculated by the current value calculation unit 114 is higher than zero.

[0175] If, as a result of the determination in step S401 , the actual speed calculated by the current value calculation unit 114 is higher than 0 (“YES” in step S401 ), the process proceeds to step S402 .

[0176] In step S402, the control unit 110 increases the pulse width of the AC signal by Xp%, as Figure 6 As an example of increasing the pulse width of the AC signal by Xp%, the control unit 110 increases the pulse width of the AC signal by 1% / ms.

[0177] On the other hand, if the actual speed calculated by the current value calculation unit 114 is not higher than 0 (lower than or equal to 0) as a result of the determination in step S401 (“NO” in step S401 ), the processing proceeds to step S403 .

[0178] In step S403 , the control unit 110 determines whether the actual speed calculated by the current value calculation unit 114 is zero.

[0179] If, as a result of the determination in step S403 , the actual speed calculated by the current value calculation unit 114 is 0 (“YES” in step S403 ), the process proceeds to step S404 .

[0180] In step S404, the control unit 110 increases the pulse width of the AC signal by Yp% as Figure 6 αp in step S204. As an example of increasing the pulse width of the AC signal by Yp%, the control unit 110 increases the pulse width of the AC signal at 3% / ms.

[0181] If as a result of the determination in step S403, the actual speed calculated by the current value calculation unit 114 is not 0 (less than 0) ("No" in step S403), then the process proceeds to step S405.

[0182] In step S405, the control unit 110 increases the pulse width of the AC signal by Zp% as Figure 6 αp in step S204. As an example of increasing the pulse width of the AC signal by Zp%, the control unit 110 increases the pulse width of the AC signal at 5% / ms.

[0183] If the process of step S402 ends, if the process of step S404 ends, or if the process of step S405 ends, then Fig.11 the process of the flowchart shown in ends.

[0184] In the present exemplary embodiment, as described above, the increase amount Xp of the pulse width in step S402, the increase amount Yp of the pulse width in step S404, and the increase amount Zp of the pulse width in step S405 have magnitudes such that Xp < Yp < Zp.

[0185] Fig.12 is a diagram illustrating a third exemplary embodiment of the present invention, which illustrates Figure 5 the relationship between the speed of the vibration actuator 200 and the pulse width and drive frequency of the AC signal during the acceleration control in step S104. Specifically, Fig.12 illustrates the commanded speed 1211 and the actual speed 1212 related to the speed of the vibration actuator 200, the pulse width 1220 of the AC signal, and the drive frequency 1230 of the AC signal.

[0186] In Fig.12 from the start (time 0) to time t21, the actual speed 1212 is 0. During this period, the control unit 110 performs control to increase the pulse width 1220 of the AC signal by Yp% (step S404). Specifically, in the present exemplary embodiment, the control unit 110 performs control to increase the pulse width 1220 of the AC signal at 3% / ms.

[0187] In Fig.12In the period from time t21 to time t22, the actual speed 1212 is lower than 0. In this period, the control unit 110 performs control to increase the pulse width 1220 of the AC signal by Zp% (step S405). Specifically, in the present exemplary embodiment, the control unit 110 performs control to increase the pulse width 1220 of the AC signal by 5% / ms.

[0188] exist Fig.12 In the period after time t22, the actual speed 1212 is higher than 0. In this period, the control unit 110 performs control to increase the pulse width 1220 of the AC signal by Xp% (S402). Specifically, in the present exemplary embodiment, the control unit 110 performs control to increase the pulse width 1220 by 1% / ms.

[0189] In the present exemplary embodiment, when the actual speed 1212 is 0, the control unit 110 sets the amount of change over time (Yp) during the control of increasing the pulse width 1220 of the AC signal to be greater than the amount of change (Xp) when the actual speed 1212 is positive. In the present exemplary embodiment, when the actual speed 1212 is negative, the control unit 110 sets the amount of change over time (Zp) during the control of increasing the pulse width 1220 of the AC signal to be greater than the amount of change (Yp) when the actual speed 1212 is 0.

[0190] Fig.13 is a flowchart illustrating a third exemplary embodiment of the present invention, which illustrates Figure 6 An example of a detailed processing procedure of the control of reducing the driving frequency of the AC signal in step S208. Specifically, Fig.13 The diagram shows the time of one control cycle from start to finish.

[0191] When to start Figure 6 When processing step S208 in Fig.13 In step S501 , the control unit 110 determines whether the actual speed calculated by the current value calculation unit 114 is higher than zero.

[0192] If, as a result of the determination in step S501 , the actual speed calculated by the current value calculation unit 114 is higher than 0 (“YES” in step S501 ), the process proceeds to step S502 .

[0193] In step S502, the control unit 110 reduces the driving frequency of the AC signal by Xf%, as Figure 6 As an example of reducing the driving frequency of the AC signal by Xf%, the control unit 110 reduces the driving frequency of the AC signal by 10 Hz / ms.

[0194] On the other hand, if as a result of the determination in step S501, the actual speed calculated by the current value calculation unit 114 is not higher than 0 (lower than or equal to 0) ("No" in step S501), then the process proceeds to step S503.

[0195] In step S503, the control unit 110 determines whether the actual speed calculated by the current value calculation unit 114 is 0.

[0196] If as a result of the determination in step S503, the actual speed calculated by the current value calculation unit 114 is 0 ("Yes" in step S503), then the process proceeds to step S504.

[0197] In step S504, the control unit 110 reduces the drive frequency of the AC signal by Yf% as Figure 6 αf in step S208. As an example of reducing the drive frequency of the AC signal by Yf%, the control unit 110 reduces the drive frequency of the AC signal at 30 Hz / ms.

[0198] On the other hand, if as a result of the determination in step S503, the actual speed calculated by the current value calculation unit 114 is not 0 (lower than 0) ("No" in step S503), then the process proceeds to step S505.

[0199] In step S505, the control unit 110 reduces the drive frequency of the AC signal by Zf% as Figure 6 αf in step S208. As an example of reducing the drive frequency of the AC signal by Zf%, the control unit 110 reduces the drive frequency of the AC signal at 50 Hz / ms.

[0200] If the process of step S502 ends, if the process of step S504 ends, or if the process of step S505 ends, then Fig.13 the process of the flowchart shown ends.

[0201] In the present exemplary embodiment, as described above, the reduction amount Xf of the drive frequency in step S502, the reduction amount Yf of the drive frequency in step S504, and the reduction amount Zf of the drive frequency in step S505 have magnitudes such that Xf < Yf < Zf.

[0202] Fig.14 is a diagram illustrating a third exemplary embodiment of the present invention, which illustrates Figure 5 the relationship between the speed of the vibration actuator 200 and the pulse width and drive frequency of the AC signal during the acceleration control in step S104. Specifically, Fig.14A command speed 1411 and an actual speed 1412 related to the speed of the vibration actuator 200 , a pulse width 1420 of the AC signal, and a driving frequency 1430 of the AC signal are illustrated.

[0203] exist Fig.14 In the period from time t23 to time t24 when the pulse width 1420 of the AC signal reaches a maximum value (e.g., 50%), the actual speed 1412 is 0. In this period, the control unit 110 performs control to reduce the driving frequency 1430 of the AC signal by Yf% (step S504). Specifically, in the present exemplary embodiment, the control unit 110 performs control to reduce the driving frequency 1430 of the AC signal by 30 Hz / ms.

[0204] exist Fig.14 In the period from time t24 to t25, the actual speed 1412 is lower than 0. In this period, the control unit 110 performs control to reduce the driving frequency 1430 of the AC signal by Zf% (step S505). Specifically, in the present exemplary embodiment, the control unit 110 performs control to reduce the driving frequency 1430 of the AC signal by 50 Hz / ms.

[0205] exist Fig.14 In the period after time t25, the actual speed 1412 is higher than 0. In this period, the control unit 110 performs control to reduce the driving frequency 1430 of the AC signal by Xf% (step S502). Specifically, in the present exemplary embodiment, the control unit 110 performs control to reduce the driving frequency 1430 of the AC signal by 10 Hz / ms.

[0206] In the present exemplary embodiment, when the actual speed 1412 is 0, the control unit 110 sets the amount of change over time (Yf) during the control of reducing the driving frequency 1430 of the AC signal to be greater than the amount of change (Xf) when the actual speed 1412 is positive. In the present exemplary embodiment, when the actual speed 1412 is negative, the control unit 110 sets the amount of change over time (Zf) during the control of reducing the driving frequency 1430 of the AC signal to be greater than the amount of change (Yf) when the actual speed 1412 is 0.

[0207] According to the third exemplary embodiment, a start-up delay of the vibration actuator 200 may be reduced, a sharp increase in speed may be prevented, and a driving noise of the vibration actuator 200 may be reduced.

[0208] (Fourth Exemplary Embodiment)

[0209] Next, a fourth exemplary embodiment will be described. In the following description of the fourth exemplary embodiment, descriptions of items common to the foregoing first to third exemplary embodiments will be omitted, and differences from the foregoing first to third exemplary embodiments will be mainly described.

[0210] Hardware configuration of the vibration driving device according to the fourth exemplary embodiment Figure 3 The hardware configuration of the vibration driven device 10 according to the first exemplary embodiment shown in FIG. 1 is similar to that of the vibration driven device 10 according to the fourth exemplary embodiment. Figure 4 The functional configuration of the vibration driving device 10 according to the first exemplary embodiment shown in FIG. 1 is similar to that of the method for controlling the vibration actuator 200 by the control device 100 according to the fourth exemplary embodiment. Figure 5 The processing procedure of the method of controlling the vibration actuator 200 by the control device 100 according to the first exemplary embodiment shown in is similar.

[0211] The aforementioned first exemplary embodiment to the third exemplary embodiment have dealt with the pulse width control of changing the speed of the vibration actuator 200 using the pulse width of the AC signal in the low speed range when starting and stopping the vibration actuator 200. The present invention is not limited to such a mode. For example, the speed of the vibration actuator 200 in the low speed range can be changed by changing the phase difference between the two-phase AC signal generating vibration under the A and B modes. The control performed according to the deviation of the position or speed of the vibration actuator 200 using the phase difference between the two-phase AC signal generating vibration under the A and B modes will be referred to as AB phase difference control.

[0212] Fig.15A and Fig. 15B is a diagram illustrating a fourth exemplary embodiment of the present invention, which illustrates the relationship between the pulse width of the AC signal and the speed of the vibration actuator 200 and the relationship between the phase difference between the two-phase AC signal and the speed of the vibration actuator 200. Specifically, Fig.15A is a graph illustrating the relationship between the pulse width of the AC signal and the speed of the vibration actuator 200 . Fig. 15B is a diagram illustrating the relationship between the phase difference (AB phase difference) between two-phase AC signals and the speed of the vibration actuator 200 .

[0213] exist Fig.15A In the example, the maximum value of the pulse width of the AC signal is represented by Pmax. Fig.15A and Fig. 15B In , the optimal speed for transitioning from pulse width control to frequency control is represented by Np. Fig. 15B , the maximum value of the phase difference is represented by θmax, and the minimum value of the phase difference is represented by θmin.

[0214] like Fig.15A As shown in , in the case of pulse width control, as the pulse width increases to the maximum value Pmax of the pulse width, the speed increases to Np. Here, Fig. 15B The phase difference shown in AB determines the driving direction of the vibration actuator 200, with the maximum value θmax of the phase difference in the forward direction and the minimum value θmin of the phase difference in the reverse direction. The relationship between the AB phase difference and the driving direction varies depending on the configuration of the vibration actuator 200, and Fig. 15B The relationship shown in is maintained in this exemplary embodiment. More specifically, Fig. 15B As shown in , the relationship is such that as the phase difference increases in the positive direction, the forward speed increases, and as the phase difference increases in the negative direction, the reverse speed increases. In this case, the pulse width of the AC signal is set to, for example, the maximum value Pmax of the pulse width. Fig. 15B The relationship between the phase difference and the speed shown in makes it possible to achieve control similar to pulse width control even with phase difference control.

[0215] Next, as an example of the phase difference control according to the fourth exemplary embodiment, a processing procedure of the acceleration control of the vibration actuator 200 will be described. Fig.16 is a flowchart illustrating a fourth exemplary embodiment of the present invention, which illustrates Figure 5 An example of the detailed processing procedure of the acceleration control in step S104 is shown in FIG. Fig.16 Diagram showing the process from start to finish Figure 5 More specifically, Fig.16 The phase difference is used to replace the pulse width of the AC signal. Figure 6 The flowchart shown in .

[0216] The relationship between the speed of the vibration actuator 200 and the phase difference of the AC signal and the driving frequency is substantially the same as that in the first exemplary embodiment where the pulse width of the AC signal is replaced by the phase difference. Therefore, the description thereof will be omitted.

[0217] When to start Figure 5 During the acceleration control in step S104, then Fig.16In step S601, the control unit 110 first determines whether the value of the speed deviation obtained by subtracting the actual speed calculated by the current value calculation unit 114 from the command speed generated by the command value generation unit 111 is positive. For example, the processing of this step S601 is performed by the deviation determination unit 115 of the control unit 110. In the present exemplary embodiment, the value of the speed deviation in step S601 corresponds to a "first value" at a specific time during the acceleration of the vibration actuator 200, and the "first value" is a value related to the relative speed between the vibration body 210 and the contact spring 222 and is obtained by subtracting the current value from the command value generated to be close to the target value.

[0218] If, as a result of the determination in step S601 , the value of the speed deviation is positive (“YES” in step S601 ), the process proceeds to step S602 .

[0219] In step S602 , the control unit 110 determines whether the driving direction of the vibration actuator 200 is a forward direction.

[0220] If, as a result of the determination in step S602 , the driving direction of the vibration actuator 200 is the forward direction (“YES” in step S602 ), the process proceeds to step S603 .

[0221] In step S603 , the control unit 110 determines whether the phase difference between the AC signals in the previous control cycle is smaller than a maximum value.

[0222] If, as a result of the determination in step S603 , the phase difference between the AC signals in the previous control cycle is smaller than the maximum value (“YES” in step S603 ), the process proceeds to step S604 .

[0223] In step S604, the control unit 110 sets a value obtained by adding αh to the phase difference between the AC signals in the previous control cycle as the phase difference of the AC signals. αh here is the amount of increase in the phase difference between the AC signals in one control cycle.

[0224] Next, in step S605 , the control unit 110 determines whether the phase difference between the AC signals is less than or equal to a maximum value.

[0225] If, as a result of the determination in step S605 , the phase difference between the AC signals is not less than or equal to the maximum value (the phase difference is greater than the maximum value) (“NO” in step S605 ), the process proceeds to step S606 .

[0226] In step S606 , the control unit 110 sets the phase difference between the AC signals to a maximum value.

[0227] If the phase difference between the AC signals is determined to be less than or equal to the maximum value in step S605 (YES in step S605 ) or if the processing of step S606 ends, the processing proceeds to step S607 .

[0228] In step S607, the control unit 110 sets the driving frequency of the AC signal to an initial value. When the process of step S607 is completed, the current control cycle of the acceleration control Fig.16 The processing shown in the flowchart ends.

[0229] If, as a result of the determination in step S603 , the phase difference between the AC signals in the previous control cycle is not less than the maximum value (the phase difference is greater than or equal to the maximum value) (“NO” in step S603 ), the processing proceeds to step S608 .

[0230] In step S608 , the control unit 110 sets the phase difference between the AC signals to a maximum value.

[0231] If the driving direction of the vibration actuator 200 is not the forward direction as a result of the determination in step S602 ("No" in step S602), the process proceeds to step S609.

[0232] In step S609 , the control unit 110 determines whether the phase difference between the AC signals in the previous control cycle is greater than a minimum value.

[0233] If, as a result of the determination in step S609 , the phase difference between the AC signals in the previous control cycle is larger than the minimum value (“YES” in step S609 ), the process proceeds to step S610 .

[0234] In step S610, the control unit 110 sets a value obtained by subtracting αh from the phase difference between the AC signals in the previous control cycle as the phase difference between the AC signals. αh here is the amount of decrease in the phase difference between the AC signals in one control cycle.

[0235] Next, in step S611 , the control unit 110 determines whether the phase difference between the AC signals is greater than or equal to a minimum value.

[0236] If, as a result of the determination in step S611 , the phase difference between the AC signals is not greater than or equal to the minimum value (the phase difference is smaller than the minimum value) (“NO” in step S611 ), the process proceeds to step S612 .

[0237] In step S612 , the control unit 110 sets the phase difference between the AC signals to a minimum value.

[0238] If the phase difference between the AC signals is determined to be greater than or equal to the minimum value in step S611 (Yes in step S611) or if the processing of step S612 ends, the processing proceeds to step S607. In step S607, the control unit 110 sets the driving frequency of the AC signal to an initial value. Fig.16 The processing of the flowchart shown in is completed.

[0239] If, as a result of the determination in step S609 , the phase difference between the AC signals in the previous control cycle is not greater than the minimum value (the phase difference is less than or equal to the minimum value) (“NO” in step S609 ), the process proceeds to step S613 .

[0240] In step S613 , the control unit 110 sets the phase difference between the AC signals to a minimum value.

[0241] If the processing of step S608 ends or the processing of step S613 ends, the process proceeds to step S614.

[0242] In step S614, the control unit 110 sets a value obtained by subtracting αf from the driving frequency of the AC signal in the previous control cycle as the driving frequency of the AC signal. This αf is the amount of reduction in the driving frequency of the AC signal in one control cycle.

[0243] Next, in step S615 , the control unit 110 determines whether the driving frequency of the AC signal is higher than or equal to a minimum value.

[0244] If, as a result of the determination in step S615 , the driving frequency of the AC signal is not higher than or equal to the minimum value (the driving frequency is lower than the minimum value) (“NO” in step S615 ), the process proceeds to step S616 .

[0245] In step S616 , the control unit 110 sets the driving frequency of the AC signal to a minimum value.

[0246] If the driving frequency of the AC signal is determined to be higher than or equal to the minimum value in step S615 ("Yes" in step S615) or if the processing of step S616 ends, the current control cycle of the acceleration control is Fig.16 The processing of the flowchart shown in is completed.

[0247] If, as a result of the determination in step S601 , the value of the speed deviation is not positive (the value of the speed deviation is not positive) (“NO” in step S601 ), the process proceeds to step S617 .

[0248] In step S617 , the control unit 110 sets the phase difference between the AC signals to the phase difference between the AC signals in the previous control cycle immediately before this control cycle.

[0249] Next, in step S618 , the control unit 110 sets the driving frequency of the AC signal to the driving frequency of the AC signal in the previous control cycle immediately before this control cycle.

[0250] When the process of step S618 is completed, the current control cycle of the acceleration control Fig.16 The processing shown in the flowchart ends.

[0251] For example, even for other items, the fourth exemplary embodiment adopts a mode in which “phase difference control of the AC signal” is applied instead of “pulse width control of the AC signal” in the aforementioned first exemplary embodiment.

[0252] In the control device 100 according to the above-mentioned fourth exemplary embodiment, the control unit 110 performs the following processing at a specific time during the acceleration of the vibration actuator. If the speed deviation value (first value) relevant to the relative speed between the vibration body 210 and the contact spring 222, obtained by deducting the current value from the command value, is positive, the control unit 110 performs the control (step S614) of the driving frequency of the AC signal or increases the control (step S604) of the phase difference between the AC signal so. If the value (first value) of the aforementioned speed deviation is not positive, the control unit 110 performs the control (step S618) of the driving frequency of the AC signal performed at the time before the specific time or the control (step S617) of the phase difference between the AC signal so.

[0253] In this way, the driving frequency of the AC signal or the phase difference between the AC signals is controlled according to the sign of the value of the speed deviation, thereby preventing a sharp increase in speed and speed fluctuation during the acceleration of the vibration actuator 200. This can prevent the vibration actuator 200 from driving an unstable target and reduce the driving noise of the vibration actuator 200.

[0254] [Modification of the fourth exemplary embodiment]

[0255] The fourth exemplary embodiment handles the acceleration control of the vibration actuator 200. However, the fourth exemplary embodiment is also applicable to the deceleration control of the vibration actuator 200. Here, as a modification of the fourth exemplary embodiment, the mode of applying the "phase difference control of the AC signal" according to the fourth exemplary embodiment is adopted to replace the "pulse width control of the AC signal" according to the aforementioned second exemplary embodiment.

[0256] Specifically, in the modification of the fourth exemplary embodiment, the following process is performed at a specific time during the deceleration of the vibration actuator 200. If the value (first value) of the speed deviation is positive, the control unit 110 adopts a mode of controlling the control of the driving frequency of the AC signal or reducing the phase difference between the AC signals. If the value (first value) of the aforementioned speed deviation is not positive, the control unit 110 adopts a mode of controlling the driving frequency of the AC signal or the phase difference between the AC signals performed at the time before the specific time.

[0257] Moreover, as a modification of the fourth exemplary embodiment, a mode is adopted in which the “phase difference control of the AC signal” according to the fourth exemplary embodiment is applied instead of the “pulse width control of the AC signal” in the aforementioned [modification of the first exemplary embodiment].

[0258] In the modification of the fourth exemplary embodiment, the control unit 110 performs the following control according to the value (second value) of position deviation at the specific time during the acceleration of the vibration actuator 200, and the value of the position deviation is the value related to the relative position between the vibration body 210 and the contact spring 222 and is obtained by subtracting the current value from the command value. If the value (second value) of the position deviation is positive, the control unit 110 performs the control of reducing the driving frequency of the AC signal or the control of increasing the phase difference between the AC signal. If the value (second value) of the aforementioned position deviation is not positive, the control unit 110 performs the control of the driving frequency of the AC signal performed at the time before the specific time or the control of the phase difference between the AC signal.

[0259] In the modification of the fourth exemplary embodiment, the control unit 110 performs the following control according to the value (third value) of acceleration deviation at a specific time during the acceleration of the vibration actuator 200, and the value of this acceleration deviation is a value related to the relative acceleration between the vibration body 210 and the contact spring 222 and is obtained by subtracting the current value from the threshold value. If the value (third value) of the acceleration deviation is positive, the control unit 110 performs the control of reducing the driving frequency of the AC signal or increases the control of the phase difference between the AC signal. If the value (third value) of the aforementioned acceleration deviation is not positive, the control unit 110 performs the control of the driving frequency of the AC signal performed at the time before the specific time or the control of the phase difference between the AC signal.

[0260] Furthermore, as a modification of the fourth exemplary embodiment, a mode is adopted in which the “phase difference control of AC signal” according to the fourth exemplary embodiment is applied instead of the “pulse width control of AC signal” according to the aforementioned [modification of the second exemplary embodiment].

[0261] In the modification of the fourth exemplary embodiment, the control unit 110 performs the following control according to the value (second value) of position deviation at a specific time during the deceleration of the vibration actuator 200, the value of the position deviation being a value related to the relative position between the vibration body 210 and the contact spring 222 and being obtained by subtracting the current value from the command value. If the value (second value) of the position deviation is positive, the control unit 110 performs the control of increasing the driving frequency of the AC signal or the control of reducing the phase difference between the AC signal. If the value (second value) of the aforementioned position deviation is not positive, the control unit 110 performs the control of the driving frequency of the AC signal performed at the time before the specific time or the control of the phase difference between the AC signal.

[0262] In the modification of the fourth exemplary embodiment, the control unit 110 performs the following control according to the value (third value) of acceleration deviation at a specific time during the deceleration of the vibration actuator 200, the value of the acceleration deviation being a value related to the relative acceleration between the vibration body 210 and the contact spring 222 and being obtained by subtracting the current value from the threshold value. If the value (third value) of the acceleration deviation is positive, the control unit 110 performs the control of increasing the driving frequency of the AC signal or the control of reducing the phase difference between the AC signals. If the value (third value) of the aforementioned acceleration deviation is not positive, the control unit 110 performs the control of the driving frequency of the AC signal performed at the time before the specific time or the control of the phase difference between the AC signals.

[0263] (Fifth Exemplary Embodiment)

[0264] Next, a fifth exemplary embodiment will be described. In the following description of the fifth exemplary embodiment, descriptions of items common to the foregoing first to fourth exemplary embodiments will be omitted, and differences from the foregoing first to fourth exemplary embodiments will be mainly described.

[0265] The fifth exemplary embodiment relates to a mode in which an imaging device (optical device) such as a camera is applied as an example of an electronic device including the vibration driven device 10 according to the aforementioned first fourth exemplary embodiment, second fourth exemplary embodiment, third fourth exemplary embodiment, or fourth exemplary embodiment.

[0266] Fig.17 is a diagram illustrating a fifth exemplary embodiment of the present invention, which illustrates an imaging device 800 applied as a configuration example of an electronic device including the vibration driven device 10 according to the first fourth exemplary embodiment, the second fourth exemplary embodiment, the third fourth exemplary embodiment, or the fourth exemplary embodiment.

[0267] The lens barrel 810 is installed in front of the imaging device 800 (more specifically, the imaging device body 820). A plurality of lenses (not shown) including a focus lens 807 and a camera shake correction optical system 803 are disposed inside the lens barrel 810. The rotation of two-axis coreless motors 804 and 805 is transmitted to the camera shake correction optical system 803, so that the camera shake correction optical system 803 can vibrate in the vertical direction (Y direction) and the horizontal direction (X direction).

[0268] The imaging device body 820 includes an image sensor 808. Light passing through the lens barrel 810 forms an optical image on this image sensor 808. The image sensor 808 is a photoelectric conversion device such as a complementary metal oxide semiconductor (CMOS) sensor or a charge coupled device (CCD) sensor, and converts the optical image into an analog electric signal. The analog electric signal output from the image sensor 808 is converted into a digital signal by an analog-to-digital (A / D) converter not shown, and then undergoes predetermined image processing by an image processing circuit not shown, and is stored as image data (video data) in a storage medium such as a semiconductor memory not shown.

[0269] The imaging device body 820 also includes a gyro sensor 801 that detects camera shake (vibration) in the vertical direction (pitch) and a gyro sensor 802 that detects camera shake (vibration) in the horizontal direction (yaw) as internal components. The coreless motors 804 and 805 are driven in the direction opposite to the direction of the vibration detected by the gyro sensors 801 and 802, so that the optical axis of the camera shake correction optical system 803 extending in the Z direction is vibrated. Therefore, the vibration of the optical axis due to the camera shake is offset, and a good image in which the camera shake is corrected can be captured.

[0270] The vibration actuator 200 is driven by the control method described in one of the aforementioned first to fourth exemplary embodiments, and drives the focusing lens 807 as an optical member disposed in the lens barrel 810 in the optical axis direction (Z direction) via the gear 240. The focusing lens 807 is not restrictive, and the vibration actuator 200 can be used to drive any lens, such as a zoom lens (not shown).

[0271] include Figure 3 and Figure 4 The control device 100 and the driving circuit 809 of the position detection unit 300 shown in FIG. 8 are built in the imaging device body 820 .

[0272] Although the fifth exemplary embodiment is described as being applied to the imaging device 800 as an example of an electronic device including the vibration driven device 10 according to the aforementioned first exemplary embodiment, second exemplary embodiment, third exemplary embodiment, or fourth exemplary embodiment, the present invention is not limited to the imaging device 800. The present invention is widely applicable to electronic devices equipped with a member that needs to be positioned by the driving of the vibration actuator 200. In the fifth exemplary embodiment, the vibration driven device 10 can also be used to drive the image sensor 808 on which light passing through the lens forms an image or to drive the lens during camera shake correction.

[0273] (Other Exemplary Embodiments)

[0274] The present invention can also be implemented by the following process: a program for implementing one or more functions of the aforementioned embodiments is supplied to a system or device via a network or storage medium, and one or more processors in a computer of the system or device read and execute the program. It can also be implemented using a circuit (such as an ASIC) that implements one or more of the functions.

[0275] This program and a computer-readable storage medium storing the program are included in the present invention.

[0276] The foregoing exemplary embodiments of the present invention are all merely examples for implementing the embodiments of the present invention and should not be interpreted as limiting the technical scope of the present invention. In other words, the present invention can be practiced in various forms without departing from its technical concept or main features.

[0277] Disclosure of exemplary embodiments of the present invention includes the following configurations and methods.

[0278] [Configuration 1]

[0279] A control device for a vibration actuator, the vibration actuator comprising a vibration body and a contact body, the vibration body comprising an electro-mechanical energy transducer, the contact body being configured to contact the vibration body, the vibration body and the contact body moving relative to each other by vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control device comprising:

[0280] A control component for performing control of reducing the frequency of the AC signal or increasing the effective voltage of the AC signal when a first value is positive at a specific time during acceleration of the vibration actuator, and for performing control of the frequency of the AC signal or control of the effective voltage of the AC signal performed at a time before the specific time when the first value is not positive, wherein the first value is a value related to the relative speed between the vibration body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

[0281] [Configuration 2]

[0282] According to the control device of the vibration actuator of configuration 1, the control component performs control to reduce the frequency of the AC signal or control to increase the effective voltage of the AC signal when the second value is positive at the specific time during the acceleration of the vibration actuator, and performs control of the frequency of the AC signal or control of the effective voltage of the AC signal performed at a time before the specific time when the second value is not positive, wherein the second value is a value related to the relative position between the vibration body and the contact body and is obtained by subtracting the current value from the command value.

[0283] [Configuration 3]

[0284] A control device for a vibration actuator according to configuration 1 or 2, wherein the control component, when a third value is positive at the specific time during the acceleration of the vibration actuator, performs control to reduce the frequency of the AC signal or control to increase the effective voltage of the AC signal, and when the third value is not positive, performs control of the frequency of the AC signal or control of the effective voltage of the AC signal performed at a time before the specific time, wherein the third value is a value related to the relative acceleration between the vibration body and the contact body and is obtained by subtracting a current value from a threshold value.

[0285] [Configuration 4]

[0286] A control device for a vibration actuator according to any one of configurations 1 to 3, wherein when the current value of the relative velocity reaches the target value, the control component performs control of changing at least one of the frequency of the AC signal and the effective voltage of the AC signal based on a deviation between the command value related to the position or velocity of the vibration actuator and the current value.

[0287] [Configuration 5]

[0288] A control device for a vibration actuator according to any one of configurations 1 to 4, wherein when the current value of the relative velocity is 0, the control component sets the amount of change over time in the frequency of the AC signal during a control period in which the frequency of the AC signal is reduced, or the amount of change over time in the effective voltage of the AC signal during a control period in which the effective voltage of the AC signal is increased, to be greater than the amount of change when the current value is positive.

[0289] [Configuration 6]

[0290] A control device for a vibration actuator according to any one of configurations 1 to 5, wherein when the current value of the relative velocity is negative, the control component sets the amount of change over time in the frequency of the AC signal during a control period in which the frequency of the AC signal is reduced, or the amount of change over time in the effective voltage of the AC signal during a control period in which the effective voltage of the AC signal is increased, to be greater than the amount of change when the current value is 0.

[0291] [Configuration 7]

[0292] A control device for a vibration actuator, the vibration actuator comprising a vibration body and a contact body, the vibration body comprising an electro-mechanical energy transducer, the contact body being configured to contact the vibration body, the vibration body and the contact body moving relative to each other by vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control device comprising:

[0293] A control component for increasing the frequency of the AC signal or reducing the effective voltage of the AC signal when a first value is positive at a specific time during deceleration of the vibration actuator, and for performing the control of the frequency of the AC signal or the control of the effective voltage of the AC signal performed at a time before the specific time when the first value is not positive, wherein the first value is a value related to the relative speed between the vibration body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

[0294] [Configuration 8]

[0295] According to the control device of the vibration actuator of configuration 7, the control component performs control to increase the frequency of the AC signal or control to reduce the effective voltage of the AC signal when the second value is positive at the specific time during the deceleration of the vibration actuator, and performs control of the frequency of the AC signal or control of the effective voltage of the AC signal performed at a time before the specific time when the second value is not positive, wherein the second value is a value related to the relative position between the vibration body and the contact body and is obtained by subtracting the current value from the command value.

[0296] [Configuration 9]

[0297] According to the control device of the vibration actuator of configuration 7 or 8, the control component performs control to increase the frequency of the AC signal or control to reduce the effective voltage of the AC signal when the third value is positive at the specific time during the acceleration of the vibration actuator, and performs control of the frequency of the AC signal or control of the effective voltage of the AC signal performed at the time before the specific time when the third value is not positive, and the third value is a value related to the relative acceleration between the vibration body and the contact body and is obtained by subtracting the current value from the threshold value.

[0298] [Configuration 10]

[0299] A control device for a vibration actuator, the vibration actuator comprising a vibration body and a contact body, the vibration body comprising an electro-mechanical energy transducer, the contact body being configured to contact the vibration body, the vibration body and the contact body moving relative to each other by vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control device comprising:

[0300] A control component for performing control of reducing the frequency of the AC signal or increasing the phase difference of the AC signal when a first value is positive at a specific time during acceleration of the vibration actuator, and for performing control of the frequency of the AC signal or control of the phase difference of the AC signal performed at a time before the specific time when the first value is not positive, wherein the first value is a value related to the relative speed between the vibrating body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

[0301] [Configuration 11]

[0302] According to the control device of the vibration actuator of configuration 10, the control component performs control to reduce the frequency of the AC signal or control to increase the phase difference of the AC signal when the second value at the specific time during the acceleration of the vibration actuator is positive, and performs control of the frequency of the AC signal or control of the phase difference of the AC signal performed at a time before the specific time when the second value is not positive, wherein the second value is a value related to the relative position between the vibration body and the contact body and is obtained by subtracting the current value from the command value.

[0303] [Configuration 12]

[0304] According to the control device of the vibration actuator of configuration 10 or 11, the control component performs control of reducing the frequency of the AC signal or increasing the phase difference of the AC signal when the third value is positive at the specific time during the acceleration of the vibration actuator, and performs control of the frequency of the AC signal or control of the phase difference of the AC signal performed at the time before the specific time when the third value is not positive, and the third value is a value related to the relative acceleration between the vibration body and the contact body and is obtained by subtracting the current value from the threshold value.

[0305] [Configuration 13]

[0306] A control device for a vibration actuator according to any one of configurations 10 to 12, wherein when the current value of the relative velocity reaches the target value, the control component performs control of changing at least one of the frequency of the AC signal and the phase difference of the AC signal based on a deviation between the command value related to the position or velocity of the vibration actuator and the current value.

[0307] [Configuration 14]

[0308] A control device for a vibration actuator according to any one of configurations 10 to 13, wherein when the current value of the relative velocity is 0, the control component sets the amount of change in the frequency of the AC signal over time during a control period of reducing the frequency of the AC signal or the amount of change in the phase difference of the AC signal over time during a control period of increasing the phase difference of the AC signal to be greater than the amount of change when the current value is positive.

[0309] [Configuration 15]

[0310] A control device for a vibration actuator according to any one of configurations 10 to 14, wherein when the current value of the relative velocity is negative, the control component sets the amount of change in the frequency of the AC signal over time during a control period of reducing the frequency of the AC signal or the amount of change in the phase difference of the AC signal over time during a control period of increasing the phase difference of the AC signal to be greater than the amount of change when the current value is 0.

[0311] [Configuration 16]

[0312] A control device for a vibration actuator, the vibration actuator comprising a vibration body and a contact body, the vibration body comprising an electro-mechanical energy transducer, the contact body being configured to contact the vibration body, the vibration body and the contact body moving relative to each other by vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control device comprising:

[0313] A control component for performing control of increasing the frequency of the AC signal or reducing the phase difference of the AC signal when a first value is positive at a specific time during deceleration of the vibration actuator, and for performing control of the frequency of the AC signal or control of the phase difference of the AC signal performed at a time before the specific time when the first value is not positive, wherein the first value is a value related to the relative speed between the vibrating body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

[0314] [Configuration 17]

[0315] According to the control device of the vibration actuator of configuration 16, the control component performs control to increase the frequency of the AC signal or control to reduce the phase difference of the AC signal when the second value at the specific time during the deceleration of the vibration actuator is positive, and performs control of the frequency of the AC signal or control of the phase difference of the AC signal performed at a time before the specific time when the second value is not positive, wherein the second value is a value related to the relative position between the vibration body and the contact body and is obtained by subtracting the current value from the command value.

[0316] [Configuration 18]

[0317] According to the control device of the vibration actuator of configuration 16 or 17, the control component performs control to increase the frequency of the AC signal or control to reduce the phase difference of the AC signal when the third value is positive at the specific time during the acceleration of the vibration actuator, and performs control of the frequency of the AC signal or control of the phase difference of the AC signal performed at a time before the specific time when the third value is not positive, and the third value is a value related to the relative acceleration between the vibration body and the contact body and is obtained by subtracting the current value from the threshold value.

[0318] [Configuration 19]

[0319] A driving device, comprising:

[0320] A control device for a vibration actuator according to any one of configurations 1 to 18;

[0321] a vibration actuator; and

[0322] A position detection unit is configured to detect position information corresponding to a relative position between the vibrating body and the contact body.

[0323] [Configuration 20]

[0324] An electronic device, comprising:

[0325] A drive device according to configuration 19; and

[0326] The component to be driven by the vibration actuator.

[0327] [Method 1]

[0328] A control method for a vibration actuator, the vibration actuator comprising a vibration body and a contact body, the vibration body comprising an electro-mechanical energy transducer, the contact body being configured to contact the vibration body, the vibration body and the contact body moving relative to each other by vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control method comprising:

[0329] A control step, in which, when a first value is positive at a specific time during the acceleration of the vibration actuator, a control of reducing the frequency of the AC signal or a control of increasing the effective voltage of the AC signal is performed, and when the first value is not positive, a control of the frequency of the AC signal or a control of the effective voltage of the AC signal performed at a time before the specific time is performed, wherein the first value is a value related to the relative speed between the vibration body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

[0330] [Method 2]

[0331] A control method for a vibration actuator, the vibration actuator comprising a vibration body and a contact body, the vibration body comprising an electro-mechanical energy transducer, the contact body being configured to contact the vibration body, the vibration body and the contact body moving relative to each other by vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control method comprising:

[0332] A control step, in which, when a first value is positive at a specific time during deceleration of the vibration actuator, a control of increasing the frequency of the AC signal or a control of reducing the effective voltage of the AC signal is performed, and when the first value is not positive, a control of the frequency of the AC signal or a control of the effective voltage of the AC signal performed at a time before the specific time is performed, wherein the first value is a value related to the relative speed between the vibration body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

[0333] [Method 3]

[0334] A control method for a vibration actuator, the vibration actuator comprising a vibration body and a contact body, the vibration body comprising an electro-mechanical energy transducer, the contact body being configured to contact the vibration body, the vibration body and the contact body moving relative to each other by vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control method comprising:

[0335] A control step, in which, when a first value is positive at a specific time during the acceleration of the vibration actuator, a control of reducing the frequency of the AC signal or a control of increasing the phase difference of the AC signal is performed, and when the first value is not positive, a control of the frequency of the AC signal or a control of the phase difference of the AC signal performed at a time before the specific time is performed, wherein the first value is a value related to the relative speed between the vibration body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

[0336] [Method 4]

[0337] A control method for a vibration actuator, the vibration actuator comprising a vibration body and a contact body, the vibration body comprising an electro-mechanical energy transducer, the contact body being configured to contact the vibration body, the vibration body and the contact body moving relative to each other by vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control method comprising:

[0338] A control step, in which, when a first value is positive at a specific time during the deceleration of the vibration actuator, a control of increasing the frequency of the AC signal or a control of reducing the phase difference of the AC signal is performed, and when the first value is not positive, a control of the frequency of the AC signal or a control of the phase difference of the AC signal performed at a time before the specific time is performed, wherein the first value is a value related to the relative speed between the vibration body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

[0339] The present invention is not limited to the above-described exemplary embodiments, and various modifications and changes may be made without departing from the spirit and scope of the present invention.

[0340] This application claims the benefit of Japanese Patent Application No. 2022-141283, filed on September 6, 2022, which is hereby incorporated by reference in its entirety.

[0341] Marking Description

[0342] 10. Vibration drive device

[0343] 100 Control device for vibration actuator

[0344] 110 Control unit

[0345] 111 Command value generation unit

[0346] 112 Control quantity calculation unit

[0347] 113 Control quantity conversion unit

[0348] 114 Current value calculation unit

[0349] 115 Deviation determination unit

[0350] 116 Fixed value increase / decrease units

[0351] 117 Fixed value determination unit

[0352] 118 Output selection unit

[0353] 120 Driver Unit

[0354] 121A, 121B, 121 AC signal generation unit

[0355] 122 booster unit

[0356] 1221A, 1221B Coils

[0357] 1222A, 1222B capacitors

[0358] 123 Power supply voltage detection unit

[0359] 124 Phase difference detection unit

[0360] 200 Controlling Vibration Actuators

[0361] 300 Position detection unit

Claims

1. A control device for a vibration actuator, the vibration actuator comprising a vibration body and a contact body, the vibration body comprising an electro-mechanical energy transducer, the contact body being configured to contact the vibration body, the vibration body and the contact body moving relative to each other by vibration generated by applying an alternating current signal to the electro-mechanical energy transducer, the control device comprising: A control component for performing control of reducing the frequency of the AC signal or increasing the effective voltage of the AC signal when a first value is positive at a specific time during acceleration of the vibration actuator, and for performing control of the frequency of the AC signal or control of the effective voltage of the AC signal performed at a time before the specific time when the first value is not positive, wherein the first value is a value related to the relative speed between the vibration body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

2. The control device of an oscillation actuator according to claim 1 , wherein the control component, when the second value at the specific time during the acceleration of the oscillation actuator is positive, performs a control that reduces the frequency of the AC signal or increases the effective voltage of the AC signal, and when the second value is not positive, performs a control of the frequency of the AC signal or a control of the effective voltage of the AC signal performed at a time before the specific time, wherein the second value is a value related to the relative position between the vibrating body and the contact body and is obtained by subtracting a current value from a command value.

3. The control device of an oscillation actuator according to claim 1, wherein the control component, when the third value at the specific time during the acceleration of the oscillation actuator is positive, performs control to reduce the frequency of the AC signal or increases the effective voltage of the AC signal, and when the third value is not positive, performs control of the frequency of the AC signal or control of the effective voltage of the AC signal performed at a time before the specific time, wherein the third value is a value related to the relative acceleration between the vibrating body and the contact body and is obtained by subtracting a current value from a threshold value.

4. The control device of a vibration actuator according to claim 1, wherein when the current value of the relative velocity reaches the target value, the control component performs a control of changing at least one of the frequency of the AC signal and the effective voltage of the AC signal based on the deviation between the command value and the current value related to the position or velocity of the vibration actuator.

5. The control device of a vibration actuator according to claim 1, wherein when the current value of the relative velocity is 0, the control component sets the amount of change over time of the frequency of the AC signal during a control period that reduces the frequency of the AC signal or the amount of change over time of the effective voltage of the AC signal during a control period that increases the effective voltage of the AC signal to be greater than the amount of change when the current value is positive.

6. The control device of a vibration actuator according to claim 1, wherein when the current value of the relative velocity is negative, the control component sets the amount of change over time of the frequency of the AC signal during a control period that reduces the frequency of the AC signal or the amount of change over time of the effective voltage of the AC signal during a control period that increases the effective voltage of the AC signal to be greater than the amount of change when the current value is 0.

7. A control device for a vibration actuator, the vibration actuator comprising a vibrating body and a contact body, the vibrating body comprising an electro-mechanical energy transducer, the contact body being configured to contact the vibrating body, the vibrating body and the contact body moving relative to each other by vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control device comprising: A control component for increasing the frequency of the AC signal or reducing the effective voltage of the AC signal when a first value is positive at a specific time during deceleration of the vibration actuator, and for performing the control of the frequency of the AC signal or the control of the effective voltage of the AC signal performed at a time before the specific time when the first value is not positive, wherein the first value is a value related to the relative speed between the vibration body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

8. The control device of an oscillation actuator according to claim 7, wherein the control component, when the second value at the specific time during the deceleration of the oscillation actuator is positive, performs control to increase the frequency of the AC signal or reduces the effective voltage of the AC signal, and when the second value is not positive, performs control of the frequency of the AC signal or control of the effective voltage of the AC signal performed at a time before the specific time, wherein the second value is a value related to the relative position between the vibrating body and the contact body and is obtained by subtracting a current value from a command value.

9. The control device of an oscillation actuator according to claim 7, wherein the control component, when the third value at the specific time during the acceleration of the oscillation actuator is positive, performs control to increase the frequency of the AC signal or reduces the effective voltage of the AC signal, and when the third value is not positive, performs control of the frequency of the AC signal or control of the effective voltage of the AC signal performed at a time before the specific time, wherein the third value is a value related to the relative acceleration between the vibrating body and the contact body and is obtained by subtracting a current value from a threshold value.

10. A control device for a vibration actuator, the vibration actuator comprising a vibration body and a contact body, the vibration body comprising an electro-mechanical energy transducer, the contact body being configured to contact the vibration body, the vibration body and the contact body moving relative to each other by vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control device comprising: A control component for performing control of reducing the frequency of the AC signal or increasing the phase difference of the AC signal when a first value is positive at a specific time during acceleration of the vibration actuator, and for performing control of the frequency of the AC signal or control of the phase difference of the AC signal performed at a time before the specific time when the first value is not positive, wherein the first value is a value related to the relative speed between the vibrating body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

11. The control device of an oscillation actuator according to claim 10, wherein the control unit performs a control that reduces the frequency of the AC signal or increases the phase difference of the AC signal when the second value at the specific time during the acceleration of the oscillation actuator is positive, and performs a control that reduces the frequency of the AC signal or increases the phase difference of the AC signal at a time before the specific time or increases the phase difference of the AC signal when the second value is not positive, wherein the second value is a value related to the relative position between the vibrating body and the contact body and is obtained by subtracting a current value from a command value.

12. The control device of an oscillation actuator according to claim 10, wherein the control component, when the third value at the specific time during the acceleration of the oscillation actuator is positive, performs control of reducing the frequency of the AC signal or increasing the phase difference of the AC signal, and when the third value is not positive, performs control of the frequency of the AC signal or control of the phase difference of the AC signal performed at a time before the specific time, wherein the third value is a value related to the relative acceleration between the vibrating body and the contact body and is obtained by subtracting a current value from a threshold value.

13. The control device of a vibration actuator according to claim 10, wherein when the current value of the relative velocity reaches the target value, the control component performs a control of changing at least one of the frequency of the AC signal and the phase difference of the AC signal based on the deviation between the command value and the current value related to the position or velocity of the vibration actuator.

14. The control device of a vibration actuator according to claim 10, wherein when the current value of the relative velocity is 0, the control component sets the amount of change over time of the frequency of the AC signal during a control period that reduces the frequency of the AC signal or the amount of change over time of the phase difference of the AC signal during a control period that increases the phase difference of the AC signal to be greater than the amount of change when the current value is positive.

15. The control device of a vibration actuator according to claim 10, wherein when the current value of the relative velocity is negative, the control component sets the amount of change over time of the frequency of the AC signal during a control period that reduces the frequency of the AC signal or the amount of change over time of the phase difference of the AC signal during a control period that increases the phase difference of the AC signal to be greater than the amount of change when the current value is 0.

16. A control device for a vibration actuator, the vibration actuator comprising a vibration body and a contact body, the vibration body comprising an electro-mechanical energy transducer, the contact body being configured to contact the vibration body, the vibration body and the contact body moving relative to each other by vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control device comprising: A control component for performing control of increasing the frequency of the AC signal or reducing the phase difference of the AC signal when a first value is positive at a specific time during deceleration of the vibration actuator, and for performing control of the frequency of the AC signal or control of the phase difference of the AC signal performed at a time before the specific time when the first value is not positive, wherein the first value is a value related to the relative speed between the vibrating body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

17. The control device of an oscillation actuator according to claim 16, wherein the control component, when the second value at the specific time during the deceleration of the oscillation actuator is positive, performs control to increase the frequency of the AC signal or control to reduce the phase difference of the AC signal, and when the second value is not positive, performs control of the frequency of the AC signal or control of the phase difference of the AC signal performed at a time before the specific time, wherein the second value is a value related to the relative position between the vibrating body and the contact body and is obtained by subtracting a current value from a command value.

18. A control device for an oscillation actuator according to claim 16, wherein the control component, when the third value at the specific time during the acceleration of the oscillation actuator is positive, performs control to increase the frequency of the AC signal or control to reduce the phase difference of the AC signal, and when the third value is not positive, performs control of the frequency of the AC signal or control of the phase difference of the AC signal performed at a time before the specific time, wherein the third value is a value related to the relative acceleration between the vibrating body and the contact body and is obtained by subtracting a current value from a threshold value.

19. A driving device, comprising: A control device for a vibration actuator according to any one of claims 1 to 18; the vibration actuator; as well as A position detection unit is configured to detect position information corresponding to a relative position between the vibrating body and the contact body.

20. An electronic device, comprising: The drive device according to claim 19; as well as The component to be driven by the vibration actuator.

21. A control method for a vibration actuator, the vibration actuator comprising a vibration body and a contact body, the vibration body comprising an electro-mechanical energy transducer, the contact body being configured to contact the vibration body, the vibration body and the contact body moving relative to each other by vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control method comprising: A control step, in which, when a first value is positive at a specific time during the acceleration of the vibration actuator, a control of reducing the frequency of the AC signal or a control of increasing the effective voltage of the AC signal is performed, and when the first value is not positive, a control of the frequency of the AC signal or a control of the effective voltage of the AC signal performed at a time before the specific time is performed, wherein the first value is a value related to the relative speed between the vibration body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

22. A control method for a vibration actuator, the vibration actuator comprising a vibration body and a contact body, the vibration body comprising an electro-mechanical energy transducer, the contact body being configured to contact the vibration body, the vibration body and the contact body moving relative to each other by vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control method comprising: A control step, in which, when a first value is positive at a specific time during deceleration of the vibration actuator, a control of increasing the frequency of the AC signal or a control of reducing the effective voltage of the AC signal is performed, and when the first value is not positive, a control of the frequency of the AC signal or a control of the effective voltage of the AC signal performed at a time before the specific time is performed, wherein the first value is a value related to the relative speed between the vibration body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

23. A control method for a vibration actuator, the vibration actuator comprising a vibration body and a contact body, the vibration body comprising an electro-mechanical energy transducer, the contact body being configured to contact the vibration body, the vibration body and the contact body moving relative to each other by vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control method comprising: A control step, in which, when a first value is positive at a specific time during the acceleration of the vibration actuator, a control of reducing the frequency of the AC signal or a control of increasing the phase difference of the AC signal is performed, and when the first value is not positive, a control of the frequency of the AC signal or a control of the phase difference of the AC signal performed at a time before the specific time is performed, wherein the first value is a value related to the relative speed between the vibration body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

24. A control method for a vibration actuator, the vibration actuator comprising a vibration body and a contact body, the vibration body comprising an electro-mechanical energy transducer, the contact body being configured to contact the vibration body, the vibration body and the contact body moving relative to each other by vibration generated by applying an AC signal to the electro-mechanical energy transducer, the control method comprising: A control step, in which, when a first value is positive at a specific time during the deceleration of the vibration actuator, a control of increasing the frequency of the AC signal or a control of reducing the phase difference of the AC signal is performed, and when the first value is not positive, a control of the frequency of the AC signal or a control of the phase difference of the AC signal performed at a time before the specific time is performed, wherein the first value is a value related to the relative speed between the vibration body and the contact body and is obtained by subtracting a current value from a command value generated to be close to a target value.

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