Preparation method of polarization nanometer light source based on graphene nanometer roll

Abstract

The embodiment of the invention provides a polarization nanometer light source preparation method based on a graphene nanometer roll. The method comprises the following steps that the graphene nanometer roll is formed on a substrate with an electrode structure and a groove structure; enabling the suspended graphene nanometer roll to stretch across the groove structure of the substrate and to be in contact with electrode structures on two sides of the groove structure; applying a bias voltage between the electrode structures in contact with the graphene nano-roll so as to enable the suspended graphene nano-roll to emit light; and placing a polaroid on a light path of the graphene nano-roll so as to prepare the polarized nano light source based on the graphene nano-roll. According to the preparation method of the polarization nanometer light source based on the graphene nanometer roll, the polarization nanometer light source based on the graphene nanometer roll can be efficiently and accurately prepared. The embodiment of the invention further provides a polarization nanometer light source based on the graphene nanometer roll.

Description

Technical Field

[0001] The present application belongs to the technical field of nano light sources, and in particular, relates to a polarized nano light source based on graphene nanoscrolls and a preparation method thereof. Background Art

[0002] As the demand for science and technology increases, electronic chips encounter bottlenecks in computing speed and power consumption. Photonic Integrated Circuit (PIC) has emerged as the preferred technology in the fields of high-speed data communication, low-power devices, quantum computing and LiDAR. PIC can significantly reduce cost, size and power consumption by reducing the number of independent optical devices and the number of packaging times, while improving performance and reliability.

[0003] However, the size of the laser light source has become a key issue that limits the further development of photonic integrated circuits. Two-dimensional materials, especially graphene, have become the key to solving this problem due to their low-dimensional properties and optoelectronic properties. Although two-dimensional materials have broad application prospects, the realization of nano-light sources based on them is still challenging, especially the development of tunable polarization light sources. Summary of the invention

[0004] In response to the problems existing in the above-mentioned related technologies, the present invention provides a polarized nano-light source based on graphene nanoscrolls and a method for preparing the same, by applying a bias voltage at both ends of the graphene nanoscroll to make the suspended graphene nanoscroll emit light, and by regulating the nano-light source based on the graphene nanoscroll through a polarizer, thereby enabling efficient and precise preparation of a polarized nano-light source based on the graphene nanoscrolls.

[0005] In a first aspect, the present application provides a method for preparing a polarized nano-light source based on graphene nanoscrolls, comprising the following steps:

[0006] forming a graphene nanoscroll on a substrate having an electrode structure and a groove structure;

[0007] The suspended graphene nanoscroll spans the groove structure of the substrate and contacts the electrode structures on both sides of the groove structure;

[0008] Applying a bias voltage between electrode structures in contact with the graphene nanoscroll to make the suspended graphene nanoscroll emit light; and

[0009] A polarizer is placed on the optical path of the graphene nanoscroll to prepare a polarized nano-light source based on the graphene nanoscroll.

[0010] Furthermore, before forming the graphene nanoscroll on the substrate having the electrode structure and the groove structure, the method further includes:

[0011] A graphene nanoscroll (with a width of about 100 nm to 1000 nm) is prepared on a substrate by a solution method, and a graphene nanoscroll with a length exceeding the channel length and capable of touching the electrode is selected.

[0012] Furthermore, the step of forming the graphene nanoscroll on a substrate having an electrode structure and a groove structure comprises:

[0013] forming a PMMA / graphene nanoscroll composite structure on the substrate having the graphene nanoscroll formed thereon;

[0014] Peeling the PMMA / graphene nanoscroll composite structure off the substrate and transferring it to a substrate having the electrode structure and the groove structure; and

[0015] Remove the PMMA layer.

[0016] Furthermore, before peeling the PMMA / graphene nanoscroll composite structure from the substrate and transferring it to the substrate having the electrode structure and the groove structure, the method further includes:

[0017] Etching the groove structure on the surface of the substrate; and

[0018] An electrode structure is fabricated around the trench structure.

[0019] Furthermore, the bias voltage is less than or equal to 10 volts.

[0020] Furthermore, the cross-sectional shape of the holes formed by the groove structure of the substrate is circular, rectangular or square.

[0021] Furthermore, the depth of the hole formed by the groove structure of the substrate is between 1 and 3 μm, the width is between 1 and 5 μm, and the length is greater than or equal to 4 μm; or the diameter of the hole formed by the groove structure of the substrate is between 1 and 5 μm.

[0022] Furthermore, the base or the substrate is made of SiO2 / Si or AlO3.

[0023] Furthermore, the substrate is a wafer-level substrate with a size of 5×5 mm.

[0024] In a second aspect, an embodiment of the present application provides a polarized nano-light source based on graphene nanoscrolls, wherein the polarized nano-light source based on graphene nanoscrolls is made by any of the methods described above.

[0025] In the method for preparing a polarized nano-light source based on a graphene nanoscroll provided in an embodiment of the present application, when a graphene thin layer nanoscroll is formed on a substrate having an electrode structure and a groove structure, and it is ensured that the graphene nanoscroll spans the groove structure of the substrate and that the graphene nanoscroll is in full contact with the electrode structure of the substrate, a bias voltage is applied between the electrode structures in contact with the graphene nanoscroll to make the suspended graphene nanoscroll emit light, and a polarizer is placed in the optical path of the graphene nanoscroll to prepare a polarized nano-light source based on the graphene nanoscroll. Therefore, the method for preparing a polarized nano-light source based on a graphene nanoscroll provided in an embodiment of the present application applies a bias voltage to both ends of the graphene nanoscroll to make the suspended graphene nanoscroll emit light, and regulates the nano-light source based on the graphene nanoscroll through the polarizer, so that a polarized nano-light source based on the graphene nanoscroll can be prepared efficiently and accurately. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the related technologies, the drawings required for use in the embodiments or the related technical descriptions will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0027] Figure 1 A schematic diagram of a process for preparing a polarized nano-light source based on graphene nanoscrolls provided in an embodiment of the present application;

[0028] Figure 2 A schematic diagram of the preparation process of the graphene nanoscroll provided in the embodiment of the present application;

[0029] Figure 3 Schematic diagram of the structure and characteristics of graphene and graphene nanoscrolls provided in the embodiments of the present application;

[0030] Figure 4 A schematic diagram of the actual preparation process of the graphene nanoscroll device provided in the embodiment of the present application;

[0031] Figure 5 A schematic diagram of the graphene nanoscroll device structure and temperature distribution provided in an embodiment of the present application;

[0032] Figure 6 A schematic diagram of a microscope image of a graphene nanoscroll device provided in an embodiment of the present application;

[0033] Figure 7 A schematic diagram of the luminescence characteristics of a graphene nanoscroll device provided in an embodiment of the present application;

[0034] Figure 8A schematic diagram of the polarization characteristics of the graphene nano-light source provided in an embodiment of the present application;

[0035] Fig. 9 A schematic diagram of the correlation between the luminous intensity and polarization characteristics of the graphene nano-light source provided in the embodiment of the present application.

[0036] The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0037] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0038] It should be understood that when used in this specification and the appended claims, the terms "include" and "comprises" indicate the presence of described features, integers, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or combinations thereof.

[0039] It should also be understood that the terms used in this application specification are only for the purpose of describing specific embodiments and are not intended to limit the application. As used in this application specification and the appended claims, the singular forms of "a", "an" and "the" are intended to include plural forms unless the context clearly indicates otherwise. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0040] See also Figure 1 The present application embodiment provides a method for preparing a polarized nano-light source based on graphene nanoscrolls, comprising the following steps:

[0041] S101: forming a graphene nanoscroll on a substrate having an electrode structure and a groove structure;

[0042] S102: making the suspended graphene nanoscroll span the groove structure of the substrate and contact the electrode structures on both sides of the groove structure;

[0043] S103: applying a bias voltage between electrode structures in contact with the graphene nanoscroll to make the suspended graphene nanoscroll emit light; and

[0044] S104: placing a polarizer on the optical path of the graphene nanoscroll to prepare a polarized nano-light source based on the graphene nanoscroll.

[0045] Specifically, when a graphene thin layer nanoscroll is formed on a substrate having an electrode structure and a groove structure, and it is ensured that the graphene nanoscroll spans the groove structure of the substrate and that the graphene nanoscroll is in full contact with the electrode structure of the substrate, a bias voltage is applied between the electrode structures in contact with the graphene nanoscroll to make the suspended graphene nanoscroll emit light, and a polarizer is placed in the optical path of the graphene nanoscroll to prepare a polarized nano-light source based on the graphene nanoscroll. Therefore, the method for preparing a polarized nano-light source based on a graphene nanoscroll provided in an embodiment of the present application applies a bias voltage to both ends of the graphene nanoscroll to make the suspended graphene nanoscroll emit light, and regulates the nano-light source based on the graphene nanoscroll through a polarizer, so that a polarized nano-light source based on the graphene nanoscroll can be prepared efficiently and accurately.

[0046] Further, refer to Figure 2 In some embodiments of the present application, before forming the graphene nanoscroll on the substrate having the electrode structure and the groove structure, the method further includes:

[0047] Graphene nanoscrolls were prepared on substrates by a solution method.

[0048] Specifically, this step is the key step in the preparation process of polarized nano-light sources based on graphene nano-scrolls. The quality and characteristics of graphene nano-scrolls have an important impact on the performance of subsequent polarized nano-light sources. The solution method refers to dispersing graphite powder in a mixed solution of alcohol and water, exfoliating it into graphene sheets by ultrasonic treatment, and then curling the graphene sheets to form graphene nano-scrolls by controlling the solution concentration, temperature and reaction time. Figure 2 Schematic diagram of the preparation process of graphene nanoscrolls provided in the embodiment of the present application. Figure 2In the figure, Figure a is a schematic diagram of the preparation process of graphene nanoscrolls. The preparation steps are: (i) peeling off graphene to obtain graphene sheets for subsequent processing; (ii) curling graphene in a mixed solution of alcohol and water, and the solution environment provides conditions for curling; (iii) successfully preparing graphene nanoscrolls. Figures b to d are images of graphene with different numbers of layers under an optical microscope, where Figure b is a single-layer graphene, Figure c is a double-layer graphene, and Figure d is a triple-layer graphene. The dotted lines in the figure outline the graphene contour, showing its shape and boundaries on the substrate. Figures e to g are images of nanoscrolls prepared from graphene with different numbers of layers under an optical microscope, where Figure e is a nanoscroll prepared from a single-layer graphene, Figure f is a nanoscroll prepared from a double-layer graphene, and Figure g is a nanoscroll prepared from a triple-layer graphene. The arrows in the figure indicate the position of the nanoscrolls, showing the morphology of the nanoscrolls prepared from raw materials with different numbers of layers. The scale in the figure is used to measure the actual size of the object in the image. Reference Figure 2 In steps i to iii of Figure a, graphite powder is dispersed in a mixed solution of alcohol and water, exfoliated into graphene sheets by ultrasonic treatment, and then the graphene sheets are curled to form graphene nanoscrolls by controlling conditions such as solution concentration, temperature and reaction time.

[0049] Reference Figure 3 , Figure 3 Schematic diagram of the structure and characteristics of graphene and graphene nanoscrolls provided in the embodiments of the present application. Figure 3 In the figure, Figure a is an optical microscope image of graphene and graphene nanoscrolls provided in the embodiment of the present application, wherein Figure i shows the state where graphene begins to roll up, and the scale is 5μm; Figure ii presents the prepared graphene nanoscroll, and the white arrow indicates the position of the nanoscroll, showing its morphology on the substrate. Figure b is a Raman spectrum of graphene and graphene nanoscrolls provided in the embodiment of the present application. Among them, the Raman spectra of graphene and graphene nanoscrolls are compared, the horizontal axis is the Raman shift (cm-1), and the vertical axis is the Raman intensity (au). The characteristic peaks such as LBM, G and 2D peaks are marked in the figure to reflect the structural differences between the two. Figure c is a G peak mode Raman imaging diagram of the graphene nanoscroll provided in the embodiment of the present application, wherein the colors represent different intensities, Max and Min indicate the maximum intensity, showing the distribution of the G peak on the nanoscroll, and the scale is used to measure the size of the imaging area. Figure d is an atomic force microscope (AFM) image and height profile diagram of the graphene nanoscroll provided in the embodiment of the present application. Figure e is a transmission electron microscope (TEM) image of a graphene nanoscroll provided in an embodiment of the present application. The left image is a TEM image of the entire graphene nanoscroll, and the right image is an enlarged image of the red box area, showing that the interlayer spacing of the nanoscroll is 0.35nm. The scales represent the size of the entire nanoscroll and the enlarged area, respectively, for analyzing the microstructure of the nanoscroll. Figure 3The atomic force microscope (AFM) and transmission electron microscope (TEM) characterization shown in Figures d and e of the graphene nanoscrolls confirm that the number of graphene nanoscrolls prepared is less than 5 layers to meet subsequent requirements. The number of graphene layers directly determines its physical and chemical properties. Graphene nanoscrolls with different numbers of layers will show different responses during the luminescence process. Therefore, precise control of the number of graphene layers is an important factor in achieving the expected polarized nano-light source effect.

[0050] Further, refer to Figure 4 In some embodiments of the present application, the step of forming a graphene nanoscroll on a substrate having an electrode structure and a groove structure includes:

[0051] forming a PMMA / graphene nanoscroll composite structure on the substrate having the graphene nanoscroll formed thereon;

[0052] Peeling the PMMA / graphene nanoscroll composite structure off the substrate and transferring it to a substrate having the electrode structure and the groove structure; and

[0053] Remove the PMMA layer.

[0054] Specifically, PMMA (Polymethyl Methacrylate) film is a polymer film with the characteristics of high transparency, good mechanical strength, strong weather resistance, etc., and polystyrene film is a film material made of polymer material polystyrene (PS), which has good light transmittance and mechanical properties. PMMA spin coating technology is used to form a PMMA / graphene nanoscroll composite structure on the substrate surface, and the composite structure is completely peeled off from the substrate using wet transfer technology, and accurately transferred to the surface of a pre-prepared substrate (such as SiO2 / Si) with an electrode structure and a groove structure or holes, and then PMMA is removed, so that the graphene thin layer is transferred to the substrate with an electrode structure and a groove structure prepared in advance, thereby preparing for the subsequent nano-light source based on graphene nanoscrolls.

[0055] During the transfer process, a microscopic alignment system is required to align the graphene nanoscroll with the groove structure area and attach it to the groove metal electrode structure. Precise alignment and attachment can ensure good contact between the graphene nanoscroll and the electrode structure, providing a guarantee for applying voltage to achieve luminescence.

[0056] Refer again Figure 4 , Figure 4The present invention provides a schematic diagram of the preparation process of a graphene nanoscroll device, which includes the following steps: (i) graphene curling: preparing a graphene nanoscroll on a substrate by a specific method; (ii) spin coating: spin coating a PMMA adhesive layer on the surface of a substrate with a graphene nanoscroll; (iii) stripping PMMA / graphene nanoscroll: stripping PMMA and graphene nanoscroll from the original substrate together; (iv) transfer: transferring the stripped PMMA / graphene nanoscroll to a pre-prepared substrate with grooves and electrodes; (v) PMMA removal: placing the transferred structure in an acetone solvent to remove the PMMA adhesive layer; (vi) device preparation: obtaining the final suspended graphene nanoscroll device for subsequent experiments and applications.

[0057] Furthermore, in some embodiments of the present application, before peeling the PMMA / graphene nanoscroll composite structure from the substrate and transferring it to the substrate having the electrode structure and the groove structure, the process further includes:

[0058] Etching the groove structure on the surface of the substrate; and

[0059] An electrode structure is fabricated around the trench structure.

[0060] Specifically, the electrode structure on the substrate is designed to make full contact with the graphene thin layer above, while the groove structure or hole structure is to allow the graphene nanoscroll to be suspended in the air, so that when an electric field is applied, the suspended graphene nanoscroll can partially emit light, thereby preparing a nano power source based on the graphene nanoscroll.

[0061] Further, refer to Figure 5 In some embodiments of the present application, the bias voltage is less than or equal to 10 volts. A suitable bias voltage can ensure that the graphene nanoscroll emits light while ensuring the stability and safety of the device. In addition, it is necessary to apply a bias voltage to both ends of the suspended graphene nanoscroll in a high vacuum environment to achieve nanoscroll luminescence. A high vacuum environment and a suitable bias voltage are key factors in achieving stable luminescence. The high vacuum device has a light-emitting optical path system, a visual CCD and a spectrometer, and has a high vacuum device capacity of 10 -9 to 10 -4 These device characteristics can meet the needs of precise observation and analysis of the luminescence of graphene nanoscrolls.

[0062] Specifically, Figure 5 Schematic diagram of the graphene nanoscroll device structure and temperature distribution provided in the embodiment of the present application. Figure 5 In FIG. 1 , FIG. a is a schematic diagram of the graphene nanoscroll device structure provided in an embodiment of the present application. The figure shows the connection structure between the metal electrode and the suspended graphene nanoscroll on the SiO2 / Si substrate, Vds Indicates the applied voltage. The groove structure is used to support the graphene nanoscroll, showing the basic structure and electrical connection method of the device. Figure b is a schematic diagram of the temperature distribution of the graphene nanoscroll device. The three-dimensional view shows the temperature distribution of the device under specific conditions. x, y, and z are the spatial coordinate axes, and the temperature is 10 -3 K is the unit, and the temperature value range is marked by different colors (0.3-1.4×10 -3 K), which reflects the temperature state of the device when it is working.

[0063] Reference Figure 6 , Figure 6 Microscope image of the graphene nanoscroll device provided in the embodiment of the present application. Figure 6 In the figure, Figure a is an optical microscope image of a graphene nanoscroll device provided in an embodiment of the present application, showing the structure of a graphene nanoscroll device located on a SiO2 / Si substrate, wherein one arrow indicates the position of the graphene nanoscroll, and the other arrow points to the groove groove, and the electrode structure can also be seen, with a scale of 3 μm, showing the macroscopic layout of the device. Figure b is a scanning electron microscope (SEM) image of a graphene nanoscroll device provided in an embodiment of the present application, showing a suspended graphene nanoscroll and an electrode structure, with a black arrow pointing to the suspended graphene nanoscroll, and a gray line indicating its position, with a scale of 1 μm, highlighting the suspended state of the nanoscroll and its microscopic details.

[0064] Reference Figure 7 , Figure 7 A schematic diagram of the light-emitting characteristics of a graphene nanoscroll device provided in an embodiment of the present application. Figure 7 In the figure, Figure a is a schematic diagram of the graphene nanoscroll light emission provided in the embodiment of the present application. Figure b is a schematic diagram of the light emission of the graphene nanoscroll at different bias voltages (V ds ) under the luminescence spectrum. The horizontal axis is wavelength (μm), the vertical axis is luminescence intensity (au), and lines of different colors represent experimental data (Exp.) and fitting curves (Fitting) under the bias voltage that changes in steps of 80mV, reflecting the relationship between the luminescence intensity and wavelength and voltage. Figure c is a microscope image of the luminescence of graphene nanoscrolls under different bias voltages. (i) to (iv) of Figure c correspond to the luminescence images under different voltage states, respectively. The white dotted line indicates the position of the gold electrode, and the gray ruler shows the image size, which intuitively shows the change of luminescence intensity and range with voltage. Figure d is a curve of the luminescence temperature and intensity of the graphene nanoscroll provided in an embodiment of the present application as a function of bias voltage, wherein the horizontal axis is the bias voltage (V ds ), the left vertical axis is temperature (K), the right vertical axis is luminous intensity (au), the black circles and gray squares represent the temperature and luminous intensity data points respectively, reflecting the effect of voltage on temperature and luminous intensity.

[0065] By studying the polarization characteristics of the black body radiation luminescence properties of graphene nanoscrolls, the polarized light source of graphene nanoscrolls is studied. This step is the core link in realizing the polarized nano light source and is important for in-depth understanding and application of the optical properties of graphene nanoscrolls. Figure 8 , Figure 8 A schematic diagram of the polarization characteristics of a graphene nano-light source provided in an embodiment of the present application. Figure 8 In the figure, Figure a is a schematic diagram of the measurement of polarization characteristics of the graphene nano-light source provided in the embodiment of the present application, which shows the propagation direction of linear polarized light, and the polarization characteristics of the light emitted by the graphene nano-light source are measured by rotating the polarizer (angle is θ), wherein the positional relationship between the light source, the polarizer and the coordinate axes (x, y, z) is clearly presented, reflecting the principle and light path setting of the experimental measurement. Figure b is a polar coordinate diagram of the change of luminous intensity with polarization angle at different wavelengths of the graphene nano-light source provided in the embodiment of the present application, wherein the abscissa is the polarization angle (0-360°), the ordinate is the luminous intensity (au), and the lines and points of different colors represent the experimental data (points) and the simulation results (lines), respectively, corresponding to wavelengths of 0.60μm, 0.65μm, 0.70μm and 0.75μm, reflecting the distribution of luminous intensity at different polarization angles and wavelengths. Figure c is a graph showing the variation of the polarization degree of the graphene nano-light source provided in an embodiment of the present application with the wavelength, wherein the horizontal axis is the wavelength (μm), the vertical axis is the polarization degree (%), the gray dots represent experimental data, the light gray area is the 95% confidence interval, and the gray line is the simulation result, which shows the variation trend of the polarization degree with the wavelength, reflecting the relationship between the polarization characteristics of the graphene nano-light source and the wavelength.

[0066] Reference Fig. 9 , Fig. 9 This is a graph showing the correlation between the luminous intensity and polarization characteristics of the graphene nano-light source provided in the embodiment of the present application. Fig. 9 In the figure, Figure a is a graph showing the relationship between the luminous intensity and wavelength of a graphene nanolight source at different polarization angles, where the horizontal axis is the wavelength (μm) and the vertical axis is the luminous intensity (au). Lines of different colors represent the variation of the luminous intensity with wavelength when the polarization angles are 0°, 25°, 75°, and 90°, respectively. The figure shows the difference in the variation trend of the luminous intensity with wavelength at different polarization angles. Figure b is a polar coordinate graph of the luminous intensity of a graphene nanolight source under specific conditions, where the horizontal axis is the polarization angle (0-360°) and the vertical axis is the luminous intensity (au). The figure shows the distribution of the luminous intensity at different polarization angles, showing a circular distribution feature, reflecting the polarization characteristics of the luminous intensity of the light source.

[0067] Furthermore, in some embodiments of the present application, the cross-sectional shape of the hole formed by the groove structure of the substrate is circular, triangular or square. Grooves of different shapes will have different effects on the stress distribution, electron transmission and other characteristics of the graphene nanoscroll, thereby affecting the luminescence effect and polarization characteristics.

[0068] Of course, the cross-sectional shape of the hole formed by the groove structure of the substrate may be other shapes, which are not limited here.

[0069] Furthermore, in some embodiments of the present application, the depth of the hole formed by the groove structure of the substrate is between 1 and 3 μm, for example, 2 μm, the width is between 1 and 5 μm, and the length is greater than or equal to 4 μm; or the diameter of the hole formed by the groove structure of the substrate is between 1 and 5 μm. The setting of the above size is based on the in-depth study of the material properties and luminescence principle of graphene nanoscrolls. The appropriate size range helps to optimize the suspended state of the graphene nanoscrolls on the grooves and the interaction effect with the electrodes.

[0070] Furthermore, in some embodiments of the present application, the base or the substrate is made of SiO2 / Si or AlO3. The material of the base or the substrate will have different effects on the interaction between graphene and the substrate due to its own characteristics, and the specific material of the base is selected according to the actual situation.

[0071] Furthermore, in some embodiments of the present application, the substrate is a wafer-level substrate with a size of 5×5 mm. That is, the method for preparing a polarized nano-light source based on graphene nano-scrolls provided in the embodiments of the present application can be applied to wafer-level devices, thereby realizing the stable preparation of polarized nano-light sources based on graphene nano-scrolls, and providing a technical basis for graphene optical applications, the development of new optoelectronic devices, and other aspects. Substrates of different sizes can meet different application scenarios and research needs.

[0072] Refer again Figures 2 to 9 In one embodiment of the present application, a graphene film is prepared on a substrate by a mechanical dissociation method and the number of graphene layers prepared is ensured to be less than 5. A solution is prepared (water: alcohol = 4:1) and the solution temperature is controlled at 60°C. The solution is dripped onto the graphene film to allow the graphene sheets to curl up to form nanoscrolls. Graphene nanoscrolls whose length exceeds the channel length are selected for use.

[0073] SiO2 / Si was selected as the substrate material, and photolithography and etching processes were used to produce a rectangular groove substrate with a depth of 2μm, a width of 3μm, and a length of 5μm to provide support for subsequent operations. In addition, a pair of electrode structures were prepared on both sides of the groove using traditional photolithography technology to facilitate the subsequent application of bias voltage on the graphene roll.

[0074] PMMA was spin-coated as a support layer on the surface of the prepared graphene nanoscroll at a speed of 1500 rpm, and then it was immersed in a 0.5 mol / L NaOH solution for 30 minutes and peeled off from the original substrate. Then, the microscopic alignment system was used to align the peeled nanoscroll with the groove and attached to the metal electrode with the groove.

[0075] The prepared device is placed in a vacuum to a degree of 10 -6 Pa's high vacuum equipment applies a bias voltage of 0-8V across the suspended graphene nanoscroll. When the voltage reaches 4V, the nanoscroll begins to glow, and the luminescence intensity is detected using a spectrometer with a resolution of 0.1nm.

[0076] Using a polarizer and a spectrometer, the luminous intensity was measured and curves were plotted at different polarization angles ranging from 0° to 360° in steps of 10°. It was found that the light emitted by the graphene nanoscroll has significant polarization characteristics in the wavelength range of 500-700nm, and the polarization degree can reach more than 20%.

[0077] In addition, the embodiment of the present application also provides a polarized nano-light source based on graphene nano-scrolls, and the polarized nano-light source based on graphene nano-scrolls is made by any of the methods described above. The specific preparation method of the polarized nano-light source based on graphene nano-scrolls refers to the above embodiments. Since the specific preparation method of the polarized nano-light source based on graphene nano-scrolls adopts all the technical solutions of all the above embodiments, it at least has all the beneficial effects brought by the technical solutions of the above embodiments, which will not be repeated here one by one.

[0078] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in the present application, and these modifications or replacements should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A method for preparing a polarized nano-light source based on graphene nanoscrolls, characterized in that: The following steps are involved: forming a graphene nanoscroll on a substrate having an electrode structure and a groove structure; The suspended graphene nanoscroll spans the groove structure of the substrate and contacts the electrode structures on both sides of the groove structure; Applying a bias voltage between electrode structures in contact with the graphene nanoscroll to make the suspended graphene nanoscroll emit light; and A polarizer is placed on the optical path of the graphene nanoscroll to prepare a polarized nano-light source based on the graphene nanoscroll.

2. The method according to claim 1, characterized in that Before forming the graphene nanoscroll on the substrate having the electrode structure and the groove structure, the method further comprises: Graphene nanoscrolls were prepared on substrates by a solution method.

3. The method according to claim 2, characterized in that The step of forming a graphene nanoscroll on a substrate having an electrode structure and a groove structure comprises: forming a PMMA / graphene nanoscroll composite structure on the substrate having the graphene nanoscroll formed thereon; Peeling the PMMA / graphene nanoscroll composite structure off the substrate and transferring it to a substrate having the electrode structure and the groove structure; and Remove the PMMA layer.

4. The method according to claim 3, characterized in that Before peeling the PMMA / graphene nanoscroll composite structure from the substrate and transferring it to the substrate having the electrode structure and the groove structure, the method further includes: Etching the groove structure on the surface of the substrate; and An electrode structure is fabricated around the trench structure.

5. The method according to any one of claims 1 to 4, characterized in that: The bias voltage is less than or equal to 10 volts.

6. The method according to claim 5, characterized in that The cross-sectional shape of the hole formed by the groove structure of the substrate is circular, triangular or square.

7. The method according to claim 6, characterized in that The depth of the hole formed by the groove structure of the substrate is between 1 and 3 μm, the width is between 1 and 5 μm, and the length is greater than or equal to 4 μm; Alternatively, the diameter of the hole formed by the groove structure of the substrate is between 1 and 5 μm.

8. The method according to claim 2, characterized in that The base or the substrate is made of SiO2 / Si or AlO3.

9. The method according to claim 8, characterized in that The substrate is a wafer-level substrate with a size of 5×5 mm.

10. A polarized nano light source based on graphene nanoscrolls, characterized in that: The polarized nano-light source based on graphene nanoscrolls is made by the method according to any one of claims 1 to 9.

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