Device for measuring or machining lens and operating method

Abstract

The invention relates to a device (1) for measuring and / or processing a lens (7), in particular a scanning microscope, comprising a stage (6) on which the lens (7) can be placed, a working head (9) associated with the stage (6) for measuring or processing the lens (7), and a holder (2), the holder has a support for supporting the stage (6), in particular a working table (3), and an arm lever (4) for holding the working head (9). According to the invention, the stage (6) is provided with a plurality of clamping devices (12) which can be operated independently and are arranged in a distributed manner, and each clamping device (2) is designed to clamp the stage (6) with a predetermined force for local fastening according to the vibration behavior of the stage (6), the lens (7) and / or the working head (9), so that local fastening of the stage (6) is realized. Therefore, the relative vibration between the working head (9) and the lens (7) is minimized.

Description

[0001] This application claims the priority of German patent application No. DE 10 2022 210 368.8 filed on September 30, 2022, the contents of which are incorporated herein by reference in their entirety.

[0002] The present invention relates to a device for measuring and / or processing lenses, in particular a scanning microscope, the device having a stage on which the lens can be placed, the device also having a working head and a support assigned to the stage for measuring or processing the lens, the support having a workbench supporting the stage and an arm for holding the working head.

[0003] The invention also relates to a method for operating such a device.

[0004] Devices of the aforementioned type are known in the prior art. When processing and / or measuring lenses or workpieces, especially optical elements used in microlithography, such as reflectors, lenses or the like, it is very advantageous to have a device that can measure and / or process the lenses with extremely high precision. However, devices with precision in the nanometer or picometer range, such as scanning microscopes, react sensitively to the smallest vibrations of the device itself and to external vibrations, i.e. to interference excitations from the outside, such as the floor on which the device is located or the sound in the air. The resonant frequencies inside the device mainly cause relative movements between the lens and the working head, which is especially designed as a measuring head for measuring the lens or a processing head for processing the lens. If these resonant frequencies are unfavorable or the movement phases between the working head and the lens are opposite, for example the lens and the working head move closer or farther away from each other when approaching their respective resonant frequencies, the result of the measurement or processing will be affected by random or deterministic interference signals, and the quality of the measurement or processing will decrease. In addition, if the interference excitations in the resonant frequency range, such as those generated by the floor, are high, this will lead to considerable displacements between the lens and the working head, which will lead to errors, especially measurement errors or processing errors, which will increase exponentially.

[0005] The object of the present invention is therefore to provide an improved device and an improved method for operating the device, in such a way that machining or measuring errors are reduced to a minimum in an advantageous manner.

[0006] The technical problem is solved according to the invention by a device having the features of claim 1 and a method having the features of claim 10. The advantage of the invention is that by locally fastening the mirror stage, the vibration characteristics of the mirror stage and the vibration characteristics of the lens located on the mirror stage are affected or can be affected, thereby optimizing the processing or measurement results of the device. To this end, according to the device of the invention, the mirror stage is equipped with a plurality of independently operable and distributed clamping devices, wherein each clamping device is configured to clamp the mirror stage with a preset force according to the vibration characteristics of the mirror stage, the lens and / or the working head, thereby achieving local fastening of the mirror stage to minimize the relative vibration between the working head and the lens. In other words, according to the vibration characteristics of the mirror stage, the lens and / or the working head, the mirror stage is fastened with a predetermined force, so that the mirror stage is locally fastened, wherein the local fastening of the mirror stage leads to the minimization of the relative vibration between the working head and the lens or between the working head and the lens. Through the distributedly arranged clamping devices, the mirror stage can therefore be fastened at different points by each clamping device. If the clamping device applies a clamping force to the mirror stage, the mirror stage will be fastened in this area, thereby affecting the vibration characteristics of the mirror stage at least in this area. For example, the vibration mode of the mirror stage is thus specifically affected, thereby the relative vibration of the working head and the lens is reduced to a minimum, for example, in the form of arranging the in-phase vibration of the working head and the lens at the measurement or processing point. By controlling or driving the clamping device separately, the overall measurement or processing effect can be optimized. The working head is preferably fixed relative to the mirror stage by a mechanical arm. The working head is preferably fixed above or below the mirror stage, next to the mirror stage or arranged obliquely next to the mirror stage. The specific arrangement depends in particular on the application. One end of the arm is preferably installed or fixed by a bracket. Alternatively, the two ends of the arm are preferably supported or fixed by a bracket in the form of a gantry or as a part of a gantry. Optionally, the arm is movable, and is preferably movably supported on a guide rail in the case of a gantry. According to another embodiment, the bracket with the arm is preferably movably or displaceably arranged relative to the workbench.

[0007] The clamping devices are preferably evenly distributed on the mirror table. Thus, the vibration characteristics of the mirror table can be adapted to different lenses in an advantageous manner by appropriate control or driving of the clamping devices. It is particularly preferred that a plurality of clamping devices or at least some of the clamping devices are arranged in a matrix form, i.e., distributed in rows and columns, to ensure that the vibration characteristics can be favorably affected at any time. According to another embodiment, a plurality of clamping devices or at least some of the clamping devices are arranged in an annular or circular shape. According to another embodiment of the present invention, the clamping devices are arranged according to the vibration characteristics of the mirror table and / or the lenses to ensure that the vibration characteristics are optimally and appropriately affected.

[0008] According to a preferred embodiment of the present invention, the stage has a plurality of grooves which are open at least in the direction of the stage, and these grooves each have an annular, in particular annular, side wall, wherein one of the clamping devices is arranged at least partially in at least some of the grooves. Thus, the stage has a plurality of grooves, wherein one clamping device is arranged in each groove or at least some of the grooves, respectively, in order to locally fasten the stage when necessary. The clamping device engages in the grooves of the stage, whereby the clamping device can be distributed over the entire length and width of the stage and, for example, can also fasten the stage in an area away from the edge of the stage if necessary. The clamping device is preferably fixed directly to the stage or to the base of the stage, and the base of the stage is fixed or placed on the stage.

[0009] According to a preferred embodiment of the invention, at least one of the clamping devices has at least two claws, which are at least partially located in one of the grooves and can be moved in different directions so that the claws are clamped relative to the side walls of the groove. This allows the stage to be clamped from the inside. The claws abut against the side walls of the groove on the inside of the groove and clamp each other or are subjected to forces in different directions, thereby applying forces to the stage in the groove in different directions, thereby clamping the stage in the groove. The action of the force causes the stage to be tightened in the area around the groove, thereby affecting the above-mentioned vibration mode or vibration characteristic.

[0010] At least one of the clamping devices preferably has two or more claws, in particular three or four claws, which are particularly evenly distributed on the outer circumference of the clamping device, so that the force is evenly applied to the mirror stage by applying the force. The outer contour of the claw is preferably consistent with the inner contour of the side wall, so that the claw is or can be abutted against the side wall of the groove, so as to ensure a favorable force transmission, in particular a large force transmission, in a permanent and reliable manner.

[0011] In addition, it is preferably provided that the corresponding clamping device has at least one controllable actuator assigned to the claw, the actuator is in particular a pneumatic, hydraulic, electromechanical or electromagnetically operated and / or manipulable actuator, and the actuator is designed to move the claw and / or apply or release a force to the claw. According to one embodiment, the clamping force can be set independently for each clamping device by the actuator of each clamping device, for applying a force to the mirror stage, which force is predetermined by the controller as described above in particular according to the vibration characteristics of the mirror stage and / or the working head, for minimizing the relative movement between the working head and the mirror stage or the lens. According to an alternative embodiment, the actuator preferably has at least one spring element, which is preloaded so as to press the claw against the mirror stage so that the mirror stage is partially tightened, and the clamping force can preferably be released by operating the actuator so that it is elastically deformed or preloaded, in particular pneumatically, hydraulically, electromechanically and / or electromagnetically. As a result, even if no force is actively applied, the local tightening of the mirror stage can be maintained, thereby providing an energy-saving solution.

[0012] Preferably, at least one clamping device has a clamping cone or a clamping wedge, wherein the jaw is supported movably in the longitudinal direction on the clamping cone or the clamping wedge, so that during the longitudinal movement, the jaw is displaced in the transverse direction by the clamping cone or the clamping wedge in order to generate or reduce the clamping force or local tightening. The clamping force is thus generated by the wedge-shaped element, in particular by means of an actuator to move the respective clamping element in the longitudinal direction of the wedge, so that the wedge generates a transverse displacement during the longitudinal displacement. Due to the transmission ratio of the wedge, a large transverse force can be generated. The clamping cone or the clamping wedge is preferably arranged in the center of the respective clamping device so that at least two jaws can accommodate the clamping cone or the clamping wedge in the middle. If the two jaws are displaced in the longitudinal direction of the wedge, they can separate from each other or move towards each other in order to generate or contact the clamping force. By means of the particularly symmetrical arrangement of the jaws and the central arrangement of the clamping cone or the clamping wedge, a favorable force distribution on the mirror stage by the clamping device is ensured.

[0013] It is further preferably provided that the device has a controller which is specifically designed to control the clamping device independently of the vibration characteristics of the mirror stage and / or the lens and the working head. Thus, the clamping device can be controlled by the controller to generate or release a clamping force in order to appropriately tighten the mirror stage locally and thereby adapt its vibration characteristics to the vibration characteristics of the working head, thereby minimizing relative vibrations during the processing or measuring operation. The clamping device is automatically controlled by the controller, so that different lenses can be processed or measured in a short time.

[0014] Preferably, the controller is specifically configured to control the clamping device so that the natural frequency of at least one lens and the external interference excitation are in different frequency ranges, thereby preventing the external interference excitation from causing resonance of the mirror stage and / or the lens, thereby adversely affecting the working result.

[0015] The method according to the invention with the features of claim 10 is characterized in that the stage is locally fastened with a preset force by one or more optional clamping devices depending on the vibration characteristics of the stage, the lens and / or the working head. The aforementioned advantages are achieved in this way. By taking into account the vibration characteristics of the stage, the lens and / or the working head, the fastening is carried out at locally selected points on the stage, which ensures that the relative vibrations between the lens and the working head are reduced or optimized during operation. In particular, the vibration characteristics of the stage are influenced by controlling the clamping device so that the lens and the working head vibrate towards each other in the measuring position or working position of the device.

[0016] Preferably, the vibration characteristics of the stage, the lens and / or the working head are determined and / or calculated by experiments. In the calculation, preferably a finite element method is used, by which the vibration mode of the stage is determined, in particular taking into account the lens located on the stage. Thus, by controlling the clamping device, the stage can be locally fastened with high precision, thereby influencing the vibration mode and optimizing the vibration characteristics.

[0017] According to a preferred further development of the invention, the clamping device is controlled as a function of the vibration modes of the mirror table and / or the lens and the working head that are detected or determined. This brings about the advantages mentioned above.

[0018] Preferably, the clamping device is controlled according to the external disturbance excitation detected, obtained or expected. This ensures that the disturbance excitation does not affect the vibration between the working head and the lens. In particular, as described above, by fastening the stage using the clamping device in a suitable position, the vibration characteristics or frequencies of the stage and / or the lens and / or the working head can be moved out of the frequency range of the disturbance excitation.

[0019] In addition, it is preferably provided that the clamping device is controlled according to the resonant frequency of the device. As described above, this can prevent the natural frequency of the device, especially the working head or the stage, from being reached, otherwise the working effect will be seriously affected.

[0020] Preferably, the position of the lens on the mirror table is predetermined according to the shape, size and / or weight of the lens. The position / location of the lens on the mirror table further influences its vibration characteristics. If a favorable position is selected from the outset, the vibration characteristics of the mirror table are also favorably influenced and can be optimized, for example, by controlling only a few clamping devices.

[0021] Further advantages and preferred features and feature combinations are obtained in particular from the above description and claims. The invention is further explained below in conjunction with the accompanying drawings. In the drawings:

[0022] Figure 1 A simplified view of an advantageous device is shown,

[0023] Figure 2 A simplified view showing the operating status of the device,

[0024] Figure 3 A simplified view of the stage showing the apparatus,

[0025] Figure 4A and B each show different embodiments of the clamping device of the device in a simplified view,

[0026] Figure 5A A and B each show in a simplified diagram the vibration characteristics of the device in different operating states.

[0027] Figure 1 A simplified illustration of an advantageous device for measuring lenses is shown. The device 1 has a support 2 or a frame, on which there is at least one support, in particular a table 3, and an arm 4 which is guided upward from the table 3 above the table 3, so that the arm 4 is located above the table 3, but at a certain distance from the table 3. The support, in particular the table 3 itself, can be equipped with feet 5, for example, for supporting the support or the table 3 on a floor, for example a hall floor or a room floor. A mirror table 6 is provided on the support or the table 3, on which a lens 7 to be checked or measured can be placed. According to the present embodiment, the mirror table 6 is plate-shaped and has a rectangular outer contour. The mirror table 6 is located on a base 8, which is located on the table 3. Alternatively, the base 8 can also be omitted.

[0028] A working head 9 is also fixed on the arm 4, which is used for measuring the lens 7 and is therefore designed as a measuring head. The working head 9 is, for example, fixed on a device 10, which is fixed on the arm 4, wherein the device 10 is designed to support the working head 9, in particular to rotate and move the working head 9, so that the lens 7 can be scanned or measured up to its surface.

[0029] exist Figure 2 In the figure, the dotted line represents the device 1 in an ideal vibration-free state, such as Figure 1 As shown; the solid line represents the device under the influence of vibrations, and the size of the vibrations is exaggerated for ease of understanding. The support 2, the stage 6 and the work head 9 can be moved by external disturbances, such as floor disturbances and / or movement disturbances of the work head 9 and the excitation of airborne sound. In this embodiment, the device 1 is designed as a scanning microscope for mechanically scanning the surface of the lens 7 and measuring atomic forces in the nanometer range. Therefore, even small vibrations or swings of the work head 9 and the lens 7 will affect the measurement results. The influence of ground vibrations and sound waves is particularly large for large and heavy measuring machines such as the present device 1, because the relatively soft structure of the measuring machine leads to lower natural frequencies. If the resonant frequency is in an unfavorable position and the movement phase between the lens 7 and the work head 9 is opposite, serious interference will occur, resulting in distorted measurement results. If the ground excitation is also very high in the resonant frequency range, it will cause considerable displacement between the lens 7 and the work head 9, which will increase the measurement error many times.

[0030] In order to achieve good operating results of the device 1 despite the presence of interfering excitations, whether acoustic vibrations or ground vibrations, the stage 6 is equipped with a clamping system 11, by which the stage 6 can be locally tightened at selected points. For this purpose, the clamping system 11 has a plurality of individually controllable clamping devices 12, which can exert a clamping force on the stage 6 so that the stage 6 is locally tightened.

[0031] Figure 3 The bottom side of the stage 6 facing the workbench 3 is shown in a simplified bottom view, which shows the grooves 13 formed on the stage 6. According to this embodiment, the grooves are arranged in a matrix and open toward the workbench 3. The clamping devices 12 are respectively matched with some or all of the grooves 13.

[0032] Figure 4A 1 and 2 show cross-sectional views of different embodiments of such a clamping device. Each clamping device 12 at least partially extends into one of the grooves 13 of the stage 6. A clamping wedge 14 is provided on the base 8 of the clamping device 12, the cross section of which tapers gradually in the direction of the stage 6. Two clamping claws 15 are arranged on the clamping wedge 14 movably in the longitudinal direction. Each clamping claw 15 has a contact surface 16 that abuts against the clamping wedge 14, and the contact surface 16 abuts against the clamping wedge 14 in a planar manner. On the outer side facing away from the clamping wedge 14, the clamping claw 15 has a clamping surface 17, which is designed to abut against the side wall 17 of the groove 13 in a planar manner. Advantageously, the groove 13 has an annular and continuous side wall 17, such as Figure 3 Therefore, the clamping surface 17 of the claw 15 is preferably designed to be an arc-shaped outer contour corresponding to the curvature of the side wall 17 to ensure smooth contact.

[0033] The clamping claw 15 is arranged on the clamping wedge 14 so as to be movable in the longitudinal direction, i.e., in the direction perpendicular to the plane of the stage 6. The actuator 18 connected to the clamping claw 15 has a movable actuating element 19. The actuator 18 can be designed as a pneumatic, hydraulic, electromechanical and / or electromagnetic actuator, and the actuating element 19 is moved as required to generate or release the clamping force of the clamping claw 15. For example, the actuating element 19 engages with the clamping claw 15 from behind, so that when the actuator 18 is activated, the clamping claw 15 moves in the direction of the base 8 and is pushed away by the clamping wedge 14, as shown in FIG. Figure 4A As shown by the arrow in the middle. By pushing the claw 15 apart, the claw is pressed against the side wall 17 in the groove 13, so that the claw 15 is supported on each other or on the clamping wedge 14 and the side wall 17. On the one hand, the stage 6 is clamped on the base 8 or the support or the workbench 3, and on the other hand, the stage 6 is partially tightened in the area of ​​the controlled clamping device 12, especially by the clamping force and the material compression in the area of ​​the tightened side wall 17. Preferably, one or more return springs are provided on the claw 15, which will reset the claw 15 to the initial position once the driving force of the actuator 18 is released or is sufficiently small.

[0034] Alternatively, the actuator 18 does not use a return spring, but at least one spring element with a preload force that can pull the claw to the mirror stage 6, in particular move the actuating element in the direction of the base 8. Therefore, the clamping force is provided by the spring element, so that there is no need to actively maintain the clamping force. The actuator 18 is preferably designed to be pneumatically, hydraulically, electromechanically and / or electromagnetically controllable so that the claw 15 is released and the local tightening is relaxed under the action of the spring element.

[0035] Figure 4B Another embodiment of the clamping device 12 is shown. Figure 4A The embodiment of the present invention is different in that the claw 15 or the clamping element does not cooperate with the clamping wedge 14, but directly bears the clamping force of the actuator 18, so that they are pushed or separated from each other so as to be clamped on the side wall 17 of the relevant groove 13. To this end, the actuator 18 can adopt a shaft transmission device or an electromagnetic drive device that cooperates with the claw 15.

[0036] The controller 19 of the device 1 is designed to control the clamping device 12 individually or appropriately according to the vibration characteristics of the stage 6, the lens 7 and / or the working head 9 to achieve local tightening of the stage 6, thereby minimizing the relative vibration or movement between the working head 9 and the lens 7.

[0037] Figure 5A and 5B The principle is explained in more detail. Figure 5A An example is shown of a working head 9 and a surface of a lens 7 facing the working head 9. If the working head 9 and the lens 7 are swung in anti-phase, the swiveling causes the distance between the working head 9 and the lens 7 to alternately increase and decrease, thereby recording different measurement results depending on the measurement time. Figure 5A The solid line in represents the maximum distance, and the dotted line represents the minimum distance.

[0038] However, if the lens 7 and the working head 9 are swung in phase, as Figure 5B As shown, the working head 9 and the lens 7 are not swung relative to each other, but swung together, so that the distance between the working head 9 and the surface of the lens 7 is the same or almost the same regardless of the measuring time.

[0039] The clamping device 12 acts as a variable fastening element in the middle region between the mirror plate 6 and the working head 9 and can influence the shape of the vibration mode of the mirror plate 6 and the mirror plate 7, so that the relative movement between the working head 9 and the mirror plate 7 is minimized. The equalization of the resonance points of the two vibrating monolithic structures and the resulting optimal control of the clamping device 12 are preferably determined experimentally or calculated, in particular using the finite element method. In this way, the vibration characteristics of the mirror plate 6, for example, can be determined and can be advantageously influenced by controlling the clamping device 12 selected from the clamping devices 12.

[0040] Figure 5A and B show examples of the clamping device 12, in Figure 5A In the embodiment, all the clamping devices 12 are activated, i.e. they locally tighten the stage 6, and according to Figure 5B , in which the two clamping devices 12 shown by the dashed lines are deactivated or uncontrolled, and therefore no additional local tightening of the mirror stage 6 is performed. Depending on the working state of the clamping devices 12, the vibration characteristics of the mirror stage 6 and the lens 7 can be influenced, especially ensuring that the lens 7 and the working head 9 vibrate synchronously.

[0041] Depending on the shape, size and weight of the lens 7, in particular an optical element such as a mirror or a lens, the optimal position of the lens 7 on the mirror table 6 is determined and stored, in particular for each lens 7. As a result, the optimal position of the lens 7 on the mirror table 6 can optimize the vibration characteristics. If the ground vibration coincides with the resonance points of the lens 7, these resonance points are preferably balanced again with each other using a separately activated clamping device 12, so that undesirable resonance peaks are avoided.

[0042] The frequency range sensitive to the measurement range can also be intentionally moved out of the resonant frequency range of the device 1 to improve the measurement result. For example, it is provided that in the roughness measurement technology for the tactile sensation of a specific area, a relevant spatial wavelength range is required, while the process measurement technology is not interested in other areas. Therefore, depending on the measurement process and the lens 7 to be measured, the controller 19 can control the clamping device 12 individually to ensure the best measurement result.

[0043] The present embodiment relates to a measuring device, in particular a scanning microscope, in which the working head 9 is designed as a measuring head, but the technology can also be used for processing devices, such as milling or grinding devices or similar devices, during which undesirable dynamic relative movements may occur between the workpiece (lens 7) and the working head 9, which is designed as a processing head. By means of the advantageously adaptive clamping system 11, these undesirable relative movements can also be avoided or at least reduced.

[0044] As mentioned above, the design of the device 1 is particularly advantageous for solving dynamic problems. However, this advantageous design can also improve the measurement or working results when static problems are encountered. For example, if the processing head or measuring head (working head 9) and the mirror stage 6 have large static relative deformations, the clamping system 11 with the clamping device 12 can ensure a more favorable static support combination, which is better adapted to the nominal shape of the lens 7 and the subsequent application of the lens 7. In this case, the lens 7 is clamped in particular so that it is as consistent as possible with the actual load situation later.

Claims

1. A device (1) for measuring and / or processing a lens (7), in particular a scanning microscope, the device comprising a stage (6) on which the lens (7) can be placed, the device also comprising a working head (9) assigned to the stage (6) for measuring or processing the lens (7) and a support (2), the support comprising a support part, in particular a workbench (3) for supporting the stage (6) and an arm (4) for holding the working head (9), characterized in that: The mirror table (6) is equipped with a plurality of independently operable and distributedly arranged clamping devices (12), wherein each clamping device (2) is constructed to clamp the mirror table (6) with a force preset for local tightening according to the vibration characteristics of the mirror table (6), the lens (7) and / or the working head (9), thereby achieving local tightening of the mirror table (6) to minimize the relative vibration between the working head (9) and the lens (7).

2. The device according to claim 1, characterized in that The clamping devices (12) are evenly distributed on the stage (6).

3. The device according to any one of the preceding claims, characterized in that The mirror stage (6) has a plurality of grooves (13) which are open at least in the direction of the support, each of which has an annular, in particular circular, side wall (17), wherein one of the clamping devices (12) is arranged at least partially in at least some of the grooves (13).

4. The device according to any one of the preceding claims, characterized in that At least one of the clamping devices (12) has at least two claws (15), which are at least partially located in one of the grooves (13) and can be moved in different directions so that the claws are clamped relative to the side walls (17) of the groove (13).

5. The device according to claim 4, characterized in that At least one of the clamping devices (12) has two or more, in particular three or four, claws (15), which are evenly distributed.

6. The device according to claim 4 or 5, characterized in that The jaws (15) are provided with at least one controllable actuator (18), in particular a pneumatically, hydraulically, electromechanically or electromagnetically operated or controllable actuator (18), for applying a force to the jaws (15) or releasing a force.

7. The device according to any one of claims 4 to 6, characterized in that At least one clamping device (12) has a clamping cone or a clamping wedge (14), and the clamping claw (15) is supported on the clamping cone or the clamping wedge (14) so ​​that it can move in the longitudinal direction, so that the clamping claw is displaced in the transverse direction by the clamping cone or the clamping wedge (14) during the longitudinal movement in order to generate or reduce the clamping force.

8. The device according to any one of the preceding claims, characterized in that A controller (19) is provided, which is specifically configured to independently control the clamping device (12) according to the vibration characteristics of the stage (6), the lens (7) and / or the working head (9).

9. The device according to claim 8, characterized in that The controller (19) is specifically configured to independently control the clamping device (12) so that the natural frequency of at least one lens (7) and the external interference excitation are in different frequency ranges.

10. A method for operating a device (1) for measuring and / or processing a lens (7), the device being in particular a device according to one of claims 1 to 9, the device having a mirror table (6) on which a lens (7) can be placed, the device also having a working head (9) assigned to the mirror table (6) for measuring or processing the lens (7) and having a support (2), the support having a support (3) for supporting the mirror table (6) and an arm (4) for holding the working head (9), characterized in that The mirror table (6) is partially fastened with a preset force by one or more optional clamping devices (12) according to the vibration characteristics of the mirror table, the lens (7) and / or the working head (9).

11. The method according to claim 10, characterized in that The vibration characteristics of the mirror table (6), the lens (7) and / or the working head (9) are determined by experiments and / or calculated, in particular, by finite element methods.

12. The method according to any one of the preceding claims, characterized in that The clamping device (12) is controlled according to the vibration mode of the mirror table (6), the lens (7) and / or the working head (9) that is measured or obtained.

13. The method according to any one of the preceding claims, characterized in that The clamping device (12) is controlled as a function of the detected or derived external disturbance excitation.

14. The method according to any of the preceding claims, characterized in that The clamping device is controlled according to the resonant frequency of the device (1).

15. The method according to any of the preceding claims, characterized in that The placement position of the lens (7) on the mirror table (6) is predetermined according to the shape, size and / or weight of the lens (7).

Images