Chip defect visual detection equipment with automatic auxiliary detection function

Abstract

The invention discloses chip defect visual inspection equipment capable of automatically assisting in inspection, and particularly relates to the technical field of chip defect optical inspection, which comprises a base, a frame plate, a linkage electric cylinder and an optical closed positioning detection mechanism, the optical closed positioning detection mechanism comprises a push block, a linkage block, an L-shaped strip, a vertical cover plate, a positioning groove strip, a transverse cover plate, a linkage strip and an optical vision sensor, and further comprises a multi-direction light supplementing mechanism and an optical closed positioning assembly. By utilizing the optical closed positioning detection mechanism, the full-closed chip defect visual detection device has the advantages of preventing light rays for supplementing light from being influenced by external light rays, realizing full-closed detection and greatly improving the accuracy of chip defect visual detection, thereby solving the problem that the external light rays can generate irradiation influence in an optical detection process; and meanwhile, light rays for supplementing light can be influenced by external light irradiation, so that the visual detection accuracy of the chip defects is relatively poor.

Description

Technical Field

[0001] The present invention relates to the technical field of optical detection of chip defects, and more specifically, to a chip defect visual detection device with automatic auxiliary detection. Background Art

[0002] Optical vision inspection equipment can quickly scan the chip surface and capture tiny defects such as impurities, scratches, and cracks, thereby improving inspection efficiency. The equipment can accurately identify and classify defects, reduce the possibility of missed inspections and false inspections, and ensure the consistency of product quality.

[0003] In the existing public documents, the patent announcement number CN111721778A discloses a vertical visual inspection device for chip defects. This technology uses the camera of the inspection mechanism to shoot the material strip and detects the gold wire on the material strip through the existing computer image recognition software, replacing the traditional manual gold wire detection, improving the gold wire detection efficiency and detection accuracy of the chip material strip. At the same time, the material strip is on the detection reference plane during visual inspection, and the angle between the detection reference plane and the horizontal plane is 60-70°, which minimizes the bending deformation of the thin material strip under the action of gravity. However, this technology still has the following defects.

[0004] Chip defects need to be detected using optical visual inspection equipment. During the optical inspection process, external light will have an impact on the illumination, and the fill light will also be affected by the external light. This makes the accuracy of visual inspection of chip defects poor. Therefore, a chip defect visual inspection device with automatic auxiliary detection is needed. Summary of the invention

[0005] In order to overcome the above-mentioned defects of the prior art, the present invention provides the following technical solutions: an automatic auxiliary detection chip defect visual inspection device, comprising a base, a frame plate and a linkage electric cylinder, wherein the frame plate is fixed on the upper surface of the base, the linkage electric cylinder is fixedly installed on one side of the frame plate, and an optical closed positioning detection mechanism is provided at the output end of the linkage electric cylinder;

[0006] The optically closed positioning detection mechanism includes a push block fixed at the output end of the linkage electric cylinder, one side of the push block is fixedly connected to a linkage block, the upper surface of the linkage block is fixedly installed with an L-shaped bar, and one side of the linkage block is fixedly connected with a vertical cover plate; the lower surface of the vertical cover plate is fixedly connected with a positioning groove bar, and one side of the linkage block is fixedly installed with a horizontal cover plate, the top of the L-shaped bar is fixedly installed with a linkage bar, and the linkage bar is slidably connected to the frame plate; the bottom end of the linkage bar is fixedly installed with an optical vision sensor; the outer wall of the optical vision sensor is provided with a multi-directional fill light mechanism, and the top of the inner wall of the base is installed with an optically closed positioning component.

[0007] Preferably, the positioning groove and the vertical cover plate are both slidably connected to the frame plate, and the vertical cross-section of the vertical cover plate is rectangular. The vertical cross-section of the L-shaped strip is L-shaped, and the outer wall of the linkage strip and the inner wall of the frame plate are smooth surfaces. A sleeve block is fixedly connected to one side of the transverse cover plate, and a support ring is fixedly installed on the upper surface of the sleeve block; a distance sensor is fixedly connected to the inner wall of the support ring. A controller is installed on one side of the base, and the controller is fixedly connected to the base. A support box is installed on the other side of the frame plate, and the base and the frame plate are fixedly connected to the support box.

[0008] When this technology is in use, the linkage electric cylinder pushes the push block downward, and the linkage block drives the vertical cover plate downward, so that the positioning groove drives the horizontal cover plate downward, the sleeve block causes the support ring to move downward, and the distance sensor senses the distance of the upper surface of the base. When the distance sensed by the distance sensor is zero, the lower surface of the horizontal cover plate fits the upper surface of the base. At the same time, the positioning groove and the vertical cover plate block the right side of the frame plate to block light, the linkage bar moves downward along the inner wall of the frame plate, and the optical vision sensor is located above the chip.

[0009] Preferably, the multi-directional fill light mechanism comprises a sleeve support plate, two vertical fill lights, a support bar, an inclined slot bar and an inclined fill light; the sleeve support plate is fixedly mounted on the outer wall of the optical vision sensor, the two vertical fill lights are plugged into the inner wall of the sleeve support plate, the support bar is fixedly connected to one side of the outer wall of the sleeve support plate, the inclined slot bar is fixed at one end of the support bar, and the inclined fill light is plugged into the inner wall of the inclined slot bar. The two vertical fill lights are symmetrically arranged about the middle of the sleeve support plate, and the inclined slot bar and the support bar are both made of carbon fiber material.

[0010] When this technology is in use, the support plate supports the support bar, the support bar supports the inclined slot bar, the inclined fill light illuminates the chip at an angle, and the two vertical fill lights provide fill light for the chip. The collected optical image is compared with the optical image set by the controller. If they are the same, the chip has no defects. If they are different, the chip has defects.

[0011] Preferably, the optically closed positioning assembly includes a socket support block fixedly mounted on the top of the inner wall of the base; the inner wall of the socket support block is fixedly connected to a pushing electric cylinder, a push column is threadedly connected to the output end of the pushing electric cylinder, one end of the push column is fixedly connected to a slider, a guide groove is provided on one side of the slider, and the slider is slidably connected to the base to which the guide groove belongs.

[0012] The top of the slider is fixedly connected with a linkage plate, and the upper surface of the linkage plate is fixedly connected with a chip positioning plate, and a chip slot is provided inside the chip positioning plate. Sliding blocks are provided on both sides of the slider, and the two sliding blocks are fixedly connected to the linkage plate; each sliding block is slidably connected with a slide rail inside, and the slide rail is fixedly connected to the base. The two sliding blocks are symmetrically arranged with respect to the slider, and the outer wall of the slider is smooth, and the chip slot is used to position the chip.

[0013] When this technology is in use, the electric cylinder pushes the push column to move right, the slider slides right along the inner wall of the guide groove, the linkage plate drives the chip positioning plate to move right, the linkage plate causes the two sliding blocks to move right synchronously, and after the chip positioning plate moves out of the frame plate, the controller starts to push the electric cylinder, the push column causes the slider to move left, and the chip inside the chip positioning plate moves left into the frame plate.

[0014] Technical effects and advantages of the present invention:

[0015] 1. The present invention utilizes an optically closed positioning detection mechanism. The electric cylinder pushes the push block downward, the push block drives the linkage block downward, the vertical cover plate drives the positioning groove bar downward, so that the positioning groove bar drives the horizontal cover plate downward, the sleeve block causes the support ring to move downward, the support ring drives the distance sensor downward, and when the distance sensed by the distance sensor is zero, the lower surface of the horizontal cover plate is attached to the upper surface of the base, the horizontal cover plate seals the upper surface of the base, the positioning groove bar and the vertical cover plate seal and shield the right side of the frame plate to prevent the fill light from being affected by external light, thereby achieving fully closed detection and greatly improving the accuracy of visual detection of chip defects.

[0016] 2. The present invention adopts a multi-directional fill light mechanism. The support bar supports the inclined groove bar, the inclined groove bar supports the inclined fill light, the inclined fill light obliquely illuminates the chip, and at the same time, the sleeve support plate supports two vertical fill lights, and the two vertical fill lights provide illumination fill light for the chip. In this way, multi-directional fill light is realized, the influence of external light is avoided, the optical fill light detection effect is enhanced, and the accuracy of visual detection of chip defects is greatly improved.

[0017] 3. The present invention adopts an optical closed positioning component, which pushes the electric cylinder to push the push column to move right, the slider drives the linkage plate to move right, the linkage plate drives the chip positioning plate to move right, the sliding block slides along the outer wall of the slide rail, and pushes the electric cylinder to drive the push column to move left, the push column causes the slider to move left, the linkage plate drives the chip positioning plate to move left, and the chip inside the chip positioning plate moves left into the frame plate, realizing closed positioning detection of the chip, greatly improving the accuracy of visual detection of chip defects.

[0018] The interaction of the above multiple functions first causes the chip inside the chip positioning plate to move left into the frame plate, then the horizontal cover plate closes the upper surface of the base, the positioning groove and the vertical cover plate close and shield the right side of the frame plate, and finally the inclined fill light illuminates the chip, and the two vertical fill lights provide illumination fill light for the chip. In summary, the fill light is prevented from being affected by external light, fully enclosed detection is achieved, and the accuracy of visual inspection of chip defects is greatly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the main structure of the chip defect visual inspection device with automatic auxiliary inspection of the present invention.

[0020] Figure 2 It is a schematic diagram of the partial structure of the connection between the frame plate and the linkage electric cylinder of the present invention.

[0021] Figure 3 It is a schematic diagram of the vertical cross-section structure of the chip defect visual inspection device with automatic auxiliary inspection according to the present invention when viewed from above.

[0022] Figure 4 It is a schematic diagram of the local structure of the connection between the transverse cover plate and the sleeve block of the present invention.

[0023] Figure 5 It is a schematic diagram of the local structure of the connection between the transverse cover plate and the sleeve block of the present invention.

[0024] Figure 6 For the present invention Figure 3 Enlarged structural diagram at A in the middle.

[0025] Figure 7 It is a schematic diagram of the local structure of the vertical section of the connection between the sleeve support block and the base of the present invention.

[0026] Figure 8 It is a schematic diagram of the local structure of the optical closed positioning of the present invention.

[0027] The accompanying drawings are marked as follows: 1. base; 2. frame plate; 3. linkage electric cylinder; 4. push block; 5. linkage block; 6. L-shaped bar; 7. vertical cover plate; 8. positioning groove bar; 9. horizontal cover plate; 10. linkage bar; 11. optical vision sensor; 12. sleeve block; 13. support ring; 14. distance sensor; 15. controller; 16. support box; 17. sleeve support plate; 18. vertical fill light; 19. support bar; 20. inclined groove bar; 21. inclined fill light; 22. push electric cylinder; 23. push column; 24. slider; 25. guide groove; 26. linkage plate; 27. chip positioning plate; 28. chip groove; 29. ​​sliding block; 30. slide rail; 31. sleeve support block. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] As attached Figure 1 - Attachment Figure 8 An automatic assisted detection chip defect visual inspection device is shown, and the automatic assisted detection chip defect visual inspection device is provided with an optical closed positioning detection mechanism, a multi-directional fill light mechanism, and an optical closed positioning component. The settings of each mechanism and component can prevent the fill light from being affected by external light, realize fully closed detection, and greatly improve the accuracy of chip defect visual inspection. The specific structural settings of each mechanism and component are as follows.

[0030] In this embodiment, as shown in the attached Figure 1 - Attachment Figure 5 As shown, the frame plate 2 is fixed on the upper surface of the base 1, the linkage electric cylinder 3 is fixedly installed on one side of the frame plate 2, and an optical closed positioning detection mechanism is provided at the output end of the linkage electric cylinder 3. The optical closed positioning detection mechanism includes a push block 4 fixed at the output end of the linkage electric cylinder 3, a linkage block 5 is fixedly connected to one side of the push block 4, an L-shaped strip 6 is fixedly installed on the upper surface of the linkage block 5, and a vertical cover plate 7 is fixedly connected to one side of the linkage block 5.

[0031] A positioning groove bar 8 is fixedly connected to the lower surface of the vertical cover plate 7, and a horizontal cover plate 9 is fixedly installed on one side of the linkage block 5. A linkage bar 10 is fixedly installed on the top of the L-shaped bar 6, and the linkage bar 10 is slidably connected to the frame plate 2; an optical vision sensor 11 is fixedly installed on the bottom end of the linkage bar 10; the outer wall of the optical vision sensor 11 is provided with a multi-directional fill light mechanism, and an optical closed positioning component is installed on the top of the inner wall of the base 1.

[0032] In this embodiment, as shown in the attached Figure 1 - Attachment Figure 5As shown, a sleeve block 12 is fixedly connected to one side of the transverse cover plate 9, and a support ring 13 is fixedly installed on the upper surface of the sleeve block 12; a distance sensor 14 is fixedly connected to the inner wall of the support ring 13, so that the transverse cover plate 9 drives the sleeve block 12 to move downward, the sleeve block 12 makes the support ring 13 move downward, the support ring 13 drives the distance sensor 14 to move downward, and the distance sensor 14 performs distance sensing on the upper surface of the base 1. A controller 15 is installed on one side of the base 1, and the controller 15 is fixedly connected to the base 1, so that the base 1 supports the controller 15, and the controller 15 starts the push electric cylinder 22 to realize the driving operation of the push electric cylinder 22. A support box 16 is installed on the other side of the frame plate 2, and the base 1 and the frame plate 2 are both fixedly connected to the support box 16, so that the base 1 is supported by the support box 16, and the support box 16 supports the frame plate 2 to realize the stable support of the frame plate 2.

[0033] In this embodiment, as shown in the attached Figure 6 As shown, the multi-directional fill light mechanism includes a sleeve support plate 17, two vertical fill light lamps 18, a support bar 19, an inclined slot bar 20 and an inclined fill light lamp 21;

[0034] The sleeve support plate 17 is fixedly mounted on the outer wall of the optical vision sensor 11, the two vertical fill lights 18 are plugged into the inner wall of the sleeve support plate 17, the support bar 19 is fixedly connected to one side of the outer wall of the sleeve support plate 17, the inclined groove bar 20 is fixed at one end of the support bar 19, and the inclined fill light 21 is plugged into the inner wall of the inclined groove bar 20. The two vertical fill lights 18 are symmetrically arranged about the middle of the sleeve support plate 17, and the inclined groove bar 20 and the support bar 19 are both made of carbon fiber material.

[0035] In this embodiment, as shown in the attached Figure 7 - Attachment Figure 8 As shown, the optical closed positioning assembly includes a socket support block 31 fixedly mounted on the top of the inner wall of the base 1; the inner wall of the socket support block 31 is fixedly connected with a pushing electric cylinder 22, a push column 23 is threadedly connected to the output end of the pushing electric cylinder 22, one end of the push column 23 is fixedly connected with a slider 24, a guide groove 25 is provided on one side of the slider 24, and the slider 24 is slidably connected with the base 1 to which the guide groove 25 belongs.

[0036] The top of the slider 24 is fixedly connected with a linkage plate 26, and a chip positioning plate 27 is fixedly connected to the upper surface of the linkage plate 26. A chip slot 28 is provided inside the chip positioning plate 27. Sliding blocks 29 are provided on both sides of the slider 24. Both sliding blocks 29 are fixedly connected to the linkage plate 26. Each sliding block 29 is slidably connected with a slide rail 30 inside, and the slide rail 30 is fixedly connected to the base 1. The two sliding blocks 29 are symmetrically arranged with respect to the slider 24. The outer wall of the slider 24 is smooth, and the chip slot 28 is used to position the chip.

[0037] The use principle of the chip defect visual inspection device with automatic auxiliary inspection of the present invention is as follows:

[0038] Step 1: When optically closed and positioned, the base 1 is supported by the support box 16, and the support box 16 supports the frame plate 2, and the base 1 supports the controller 15. The controller 15 starts the push cylinder 22, and the push cylinder 22 pushes the push column 23 to move rightward. The base 1 supports the sleeve support block 31, and the sleeve support block 31 supports the push cylinder 22. The push column 23 makes the slider 24 move rightward, and the slider 24 slides rightward along the inner wall of the guide groove 25. The slider 24 drives the linkage plate 26 to move rightward, and the linkage plate 26 drives the chip positioning plate 27 to move rightward. The linkage plate 26 makes the two sliding blocks 29 move rightward synchronously, and the sliding blocks 29 slide along the outer wall of the slide rail 30. The base 1 supports the two slide rails 30. After the chip positioning plate 27 moves out from the frame plate 2, the chip is positioned and placed inside the chip slot 28. The controller 15 starts the pushing electric cylinder 22, which drives the push column 23 to move left. The push column 23 causes the slider 24 to move left. The slider 24 causes the linkage plate 26 to move left. The linkage plate 26 drives the chip positioning plate 27 to move left. The chip inside the chip positioning plate 27 moves left and enters the frame plate 2.

[0039] Step 2: During the optical closed positioning detection, the controller 15 starts the linkage electric cylinder 3, the linkage electric cylinder 3 pushes the push block 4 to move downward, the push block 4 drives the linkage block 5 to move downward, the linkage block 5 drives the vertical cover plate 7 to move downward, the vertical cover plate 7 drives the positioning groove 8 to move downward, so that the positioning groove 8 drives the horizontal cover plate 9 to move downward, the horizontal cover plate 9 drives the sleeve block 12 to move downward, the sleeve block 12 makes the support ring 13 move downward, the support ring 13 drives the distance sensor 14 to move downward, and the distance sensor 14 performs distance sensing on the upper surface of the base 1. When the distance sensed by the distance sensor 14 is zero, the lower surface of the horizontal cover plate 9 is attached to the upper surface of the base 1. In this way, the horizontal cover plate 9 closes the upper surface of the base 1, and the positioning groove 8 and the vertical cover plate 7 close and shield the right side of the frame plate 2. At the same time, the L-shaped strip 6 drives the linkage strip 10 to move downward, the linkage strip 10 moves downward along the inner wall of the frame plate 2, and the linkage strip 10 drives the optical vision sensor 11 to move downward, and the optical vision sensor 11 is located above the chip.

[0040] Step three, during multi-directional fill light detection, the optical vision sensor 11 supports the sleeve support plate 17, the sleeve support plate 17 supports the support bar 19, the support bar 19 supports the inclined groove bar 20, the inclined groove bar 20 supports the inclined fill light 21, the inclined fill light 21 obliquely illuminates the chip, and at the same time the sleeve support plate 17 supports two vertical fill lights 18, the two vertical fill lights 18 provide illumination fill light for the chip, the optical vision sensor 11 collects optical images of the chip, and the collected optical images are compared with the optical images set by the controller 15. If they are the same, the chip is not defective, and if they are not the same, the chip is defective.

[0041] The contents not described in detail in the specification belong to the prior art known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited, and conventional equipment can be used. In this technical solution, the electrical control components not mentioned are not shown in the figure because they belong to the prior art and will not be described here.

[0042] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An automatic auxiliary chip defect visual inspection device, comprising a base (1), a frame plate (2) and a linkage electric cylinder (3), characterized in that: The frame plate (2) is fixed on the upper surface of the base (1), the linkage electric cylinder (3) is fixedly mounted on one side of the frame plate (2), and an optical closed positioning detection mechanism is provided at the output end of the linkage electric cylinder (3); The optical closed positioning detection mechanism comprises a push block (4) fixed at the output end of the linkage electric cylinder (3), one side of the push block (4) is fixedly connected to a linkage block (5), an L-shaped strip (6) is fixedly mounted on the upper surface of the linkage block (5), and one side of the linkage block (5) is fixedly connected to a vertical cover plate (7); A positioning groove bar (8) is fixedly connected to the lower surface of the vertical cover plate (7), and a transverse cover plate (9) is fixedly installed on one side of the linkage block (5), and a linkage bar (10) is fixedly installed on the top of the L-shaped bar (6), and the linkage bar (10) is slidably connected to the frame plate (2); An optical vision sensor (11) is fixedly mounted on the bottom end of the linkage bar (10); The outer wall of the optical vision sensor (11) is provided with a multi-directional fill light mechanism, and the top end of the inner wall of the base (1) is installed with an optical closed positioning component.

2. The chip defect visual inspection device with automatic auxiliary inspection according to claim 1 is characterized in that: The positioning groove (8) and the vertical cover plate (7) are both slidably connected to the frame plate (2), and the vertical cross-section of the vertical cover plate (7) is rectangular.

3. The chip defect visual inspection device with automatic auxiliary inspection according to claim 1 is characterized in that: The vertical cross-section of the L-shaped strip (6) is L-shaped, and the outer wall of the linkage strip (10) and the inner wall of the frame plate (2) are both smooth surfaces.

4. The chip defect visual inspection device with automatic auxiliary inspection according to claim 1 is characterized in that: A sleeve block (12) is fixedly connected to one side of the transverse cover plate (9), and a support ring (13) is fixedly installed on the upper surface of the sleeve block (12); A distance sensor (14) is fixedly connected to the inner wall of the support ring (13).

5. The chip defect visual inspection device with automatic auxiliary inspection according to claim 1 is characterized in that: A controller (15) is installed on one side of the base (1), and the controller (15) is fixedly connected to the base (1).

6. The chip defect visual inspection device with automatic auxiliary inspection according to claim 1 is characterized in that: A support box (16) is installed on the other side of the frame plate (2), and the base (1) and the frame plate (2) are fixedly connected to the support box (16).

7. The chip defect visual inspection device with automatic auxiliary inspection according to claim 1 is characterized in that: The multi-directional fill light mechanism comprises a sleeve support plate (17), two vertical fill light lamps (18), a support bar (19), an inclined slot bar (20) and an inclined fill light lamp (21); The sleeve support plate (17) is fixedly mounted on the outer wall of the optical vision sensor (11); the two vertical fill lights (18) are plugged into the inner wall of the sleeve support plate (17); the support bar (19) is fixedly connected to one side of the outer wall of the sleeve support plate (17); the inclined groove bar (20) is fixed to one end of the support bar (19); and the inclined fill light (21) is plugged into the inner wall of the inclined groove bar (20).

8. The chip defect visual inspection device with automatic auxiliary inspection according to claim 7 is characterized in that: The two vertical fill lights (18) are symmetrically arranged about the middle of the sleeve support plate (17), and the inclined groove bar (20) and the support bar (19) are both made of carbon fiber material.

9. The chip defect visual inspection device with automatic auxiliary inspection according to claim 1 is characterized in that: The optical closed positioning assembly comprises a sleeve support block (31) fixedly mounted on the top of the inner wall of the base (1); The inner wall of the sleeve support block (31) is fixedly connected to a push cylinder (22), a push column (23) is threadedly connected to the output end of the push cylinder (22), one end of the push column (23) is fixedly connected to a slider (24), a guide groove (25) is provided on one side of the slider (24), and the slider (24) is slidably connected to the base (1) to which the guide groove (25) belongs; The top of the slider (24) is fixedly connected to a linkage plate (26), the upper surface of the linkage plate (26) is fixedly connected to a chip positioning plate (27), a chip slot (28) is provided inside the chip positioning plate (27), both sides of the slider (24) are provided with sliding blocks (29), and the two sliding blocks (29) are fixedly connected to the linkage plate (26); Each sliding block (29) is slidably connected to a sliding rail (30) inside, and the sliding rail (30) is fixedly connected to the base (1).

10. The chip defect visual inspection device with automatic auxiliary inspection according to claim 9 is characterized in that: The two sliding blocks (29) are symmetrically arranged with respect to the slider (24); the outer wall of the slider (24) is smooth; and the chip groove (28) is used for positioning the chip.

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