Automatic silane concentration control system and method

Abstract

The invention relates to an automatic silane concentration control system and method, and the system comprises a fluorescence spectrometer which is used for detecting the silane concentration in a sampling solution and outputting a digital signal related to the silane concentration; the central processing unit is used for receiving the digital signal, comparing the digital signal with a built-in decision mode so as to determine whether the silane concentration in the system needs to be adjusted or not, and outputting a control signal; and the automatic controller is used for receiving the control signal and outputting the control signal to a plurality of peripheral devices so as to timely supplement the silane concentration in the system. The concentration of silane in a water sample is analyzed through the fluorescence spectrometer, then a digital signal is sent to the automatic controller, and the automatic controller processes the digital signal and controls the action of peripheral equipment to adjust the content of silane in a solution in the system, so that the content of silane in the circulating system is ensured to accord with preset process parameters. And meanwhile, silane concentration detection data is preliminarily fitted into a time-varying curve, so that the real-time state of the silane concentration can be intuitively reflected.

Description

Technical Field

[0001] The invention relates to the technical field of automatic control, and in particular to an automatic control system and method for silane concentration. Background Art

[0002] In the copper foil production process, the surface treatment process has very strict process requirements.

[0003] At present, the data control of silane solution in the post-processing section is still in a manual adjustment state, that is, a water sample is taken from the sampling point in the circulation system every day and sent to the chemical laboratory for inspection. The workshop then controls the valve and the liquid replenishment pump to control the silane content in the solution according to the test data. The whole process from sampling to sending the solution to the laboratory for testing and then feeding the data back to the workshop takes about an hour. During this period, if the solution data fluctuates, it cannot be known, which will not only affect the process control, but also directly affect the product quality.

[0004] It can be seen from this that how to synchronize the phased addition of drugs with the actual production process so that the silane content in the circulation system can be automatically controlled is an urgent problem to be solved. Summary of the invention

[0005] In order to solve the above technical problems, the present invention provides a silane concentration automatic control system, comprising: A fluorescence spectrometer, used to detect the concentration of silane in the sampled liquid and output a digital signal related to the concentration of silane; A central processing unit, configured to receive the digital signal, compare the digital signal with a built-in decision-making model to determine whether the silane concentration in the system needs to be adjusted, and output a control signal; and The automatic controller is used to receive the control signal and output the control signal to a plurality of peripheral devices so as to timely supplement the silane concentration in the system.

[0006] Further, it also includes a sampling device and a display, wherein: The sampling device is used to extract the sampling liquid in the system and transmit the sampling liquid to the fluorescence spectrometer; The display is used to receive the digital signal, fit the digital signal into a curve showing the change of silane concentration over time, and output it to a visual interface.

[0007] Furthermore, the central processing unit includes a feedback comparison module, and the feedback comparison module is connected to the fluorescence spectrometer; the fluorescence spectrometer is also connected to the display and storage module respectively; wherein the storage module is connected to the feedback comparison module.

[0008] Furthermore, the peripheral equipment includes a plurality of solenoid valves and a fluid infusion pump.

[0009] A method for automatic control of silane concentration, which is applied to the automatic control system of silane concentration, and comprises the following steps: S1, extracting a sample liquid using the sampling device and transporting the sample liquid to the fluorescence spectrometer; S2, the fluorescence spectrometer detects the silane concentration in the sample solution by chemical absorption method, and outputs a digital signal reflecting the silane concentration; S3, the central processing unit processes the digital signal and compares the digital signal with a built-in decision mode through the feedback comparison module; S4. The central processing unit outputs relevant control signals to the peripheral device according to the comparison result to adjust the silane content in the solution.

[0010] Furthermore, the S2 further includes: S21, adding ammonium molybdate developer to the sample solution to form a silane-molybdate ion complex and a phosphomolybdate complex; S22, adding a masking agent to the S21 solution to destroy the phosphomolybdate complex in the sample solution; S23, adding a reducing agent to the S22 solution, reacting under acidic conditions to reduce the yellow molybdenum silicic acid salt complex to a blue molybdenum silicic acid blue complex; S24, detecting the absorbance of the S23 solution by a dual-wavelength photometer, wherein the relationship between the absorbance and the silane concentration follows the Beer-Lambert law and satisfies the formula:

[0011] Where A represents absorbance, ε represents molar absorption coefficient, c represents solution concentration, and l represents optical path length.

[0012] Furthermore, the S4 further includes: When the central processor determines that the silane concentration detected by the fluorescence spectrometer is lower than a preset parameter, the central processor outputs an opening control signal to the peripheral device, and the peripheral device opens a corresponding valve to supplement the silane concentration; When the central processor determines that the silane concentration detected by the fluorescence spectrometer is higher than the preset parameters, the central processor outputs a closing control signal and an alarm control signal to the corresponding fluorescence spectrometer and alarm module respectively, and the peripheral device closes the corresponding valve.

[0013] Furthermore, the S1 further includes: A plurality of sampling points are arranged in the silane solution circulation system, and the concentration of the sampled liquid extracted from each sampling point is simultaneously detected by the fluorescence spectrometer.

[0014] Compared with the prior art, the present invention has the following beneficial effects: The present invention sets multiple sampling points in the circulation system, analyzes the silane concentration in the water sample by a fluorescence spectrometer, and then sends a digital signal to an automatic controller. After the automatic controller processes the digital signal, it controls the action of peripheral equipment to adjust the silane content in the solution in the system, thereby ensuring that the silane content in the circulation system meets the preset process parameters and remains stable. At the same time, by preliminarily fitting the silane concentration detection data into a time-varying curve and outputting it as a graphical interface through a display, the real-time state of the silane concentration can be intuitively reflected. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 The present invention is a flowchart disclosed in an embodiment of the present invention. DETAILED DESCRIPTION

[0016] In order to make the technical scheme and technical effect of the present invention clearer, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0017] The present invention aims to provide an automatic silane concentration control system to solve the existing manual adjustment of the silane concentration in the circulating system solution, thereby ensuring that the silane content in the circulating system meets the preset process parameters and remains stable at all times.

[0018] The automatic control system provided by the present invention mainly includes a sampling device, a fluorescence spectrometer, a central processing unit, an automatic controller, peripheral equipment, a display and the like.

[0019] The sampling device is arranged at each sampling point in the circulation system, and is used to extract the sample liquid in the system and transmit the sample liquid to the fluorescence spectrometer. Its conveying structure is conventionally arranged in the art, such as conveying by a manipulator, so it will not be described here.

[0020] The fluorescence spectrometer is used to detect the silane concentration in the sample liquid and output a digital signal related to the silane concentration. The fluorescence spectrometer is respectively connected with a display and a storage module.

[0021] The central processing unit is used to receive digital signals and compare the digital signals with the built-in decision-making mode to determine whether the silane concentration in the system needs to be adjusted, and output a corresponding control signal. Specifically, the central processing unit is connected to a display module, a key input module, and a storage module. The central processing unit includes a feedback comparison module, wherein the feedback comparison module is connected to the fluorescence spectrometer, and the storage module is connected to the feedback comparison module.

[0022] The automatic controller is used to receive control signals and output control signals to several peripheral devices to replenish the silane concentration in the system in a timely manner.

[0023] The display is used to receive digital signals, fit the digital signals into a curve showing the change of silane concentration over time, and output it to a visual interface, so as to intuitively reflect the real-time status of silane concentration.

[0024] The peripheral equipment includes several solenoid valves and a refilling pump. The automatic controller drives the related valves and refilling pumps and other peripheral equipment that can be controlled by computer programs to execute specific instructions, thereby realizing intelligent control of the silane content in the circulation system.

[0025] refer to Figure 1 The present invention also provides a method for automatic control of silane concentration, which is applied to the automatic control system of silane concentration, and the method specifically comprises the following steps: S1. Sampling equipment sampling and inspection The sample liquid is extracted by the sampling device and transported to the fluorescence spectrometer. Specifically, multiple sampling points are set in the silane solution circulation system, and the sample liquid extracted from each sampling point is simultaneously tested for concentration by the fluorescence spectrometer, which is conducive to improving the detection accuracy.

[0026] S2. Fluorescence spectrometer to detect absorbance The fluorescence spectrometer detects the silane concentration in the sample solution by chemical absorption method, outputs a digital signal reflecting the silane concentration, and sends the digital signal to the central processor and the display.

[0027] Further: S21, adding ammonium molybdate developer to the sample solution to form a silane-molybdate ion complex and a phosphomolybdate complex; S22, adding a masking agent to the S21 solution to destroy the phosphomolybdate complex in the sample solution; S23, adding a reducing agent to the S22 solution, reacting under acidic conditions to reduce the yellow silicomolybdate complex to a blue silicomolybdate blue complex; S24. The absorbance of the S23 solution is detected by a dual-wavelength photometer, wherein the silane concentration is proportional to the absorbance of the solution, and a standard curve of absorbance and silane concentration is drawn. Specifically, the relationship between the absorbance and the silane concentration follows the Beer-Lambert law, and a series of solutions of known concentrations are prepared, and their absorbance is measured under the condition of controlling the optical path, and the molar absorption coefficient of the solution is calculated by the Beer-Lambert law, which satisfies the formula:

[0028] Where A represents absorbance, ε represents molar absorption coefficient, c represents solution concentration, and l represents optical path length.

[0029] S3, Silane Concentration Comparison The central processing unit processes the digital signal sent by the fluorescence spectrometer and compares the digital signal with the built-in decision-making model through the feedback comparison module.

[0030] S4, peripheral device action The central processing unit outputs relevant control signals to the peripheral device according to the comparison result, so that the peripheral device takes corresponding actions to adjust the silane content in the solution.

[0031] Further: When the central processor determines that the silane concentration detected by the fluorescence spectrometer is lower than the preset parameter, the central processor outputs an opening control signal to the peripheral device, and the peripheral device opens the corresponding valve to supplement the silane concentration; When the central processor determines that the silane concentration detected by the fluorescence spectrometer is higher than the preset parameters, the central processor outputs a closing control signal and an alarm control signal to the corresponding fluorescence spectrometer and alarm module respectively, and the peripheral device closes the corresponding valve.

[0032] Through the above technical solution, the silane content in the circulation system can be accurately controlled, thereby improving the operating efficiency and stability of the system. At the same time, the technical solution can also reduce the need for manual intervention, reduce the probability of human error, and improve the automation and reliability of the system.

[0033] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A silane concentration automatic control system, characterized in that: include: A fluorescence spectrometer, used to detect the concentration of silane in the sampled liquid and output a digital signal related to the concentration of silane; A central processing unit, configured to receive the digital signal, compare the digital signal with a built-in decision-making model to determine whether the silane concentration in the system needs to be adjusted, and output a control signal; as well as The automatic controller is used to receive the control signal and output the control signal to a plurality of peripheral devices to timely supplement the silane concentration in the system.

2. The silane concentration automatic control system according to claim 1, characterized in that: Also included is a sampling device and a display, wherein: The sampling device is used to extract the sampling liquid in the system and transmit the sampling liquid to the fluorescence spectrometer; The display is used to receive the digital signal, fit the digital signal into a curve showing the change of silane concentration over time, and output it to a visual interface.

3. The silane concentration automatic control system according to claim 2, characterized in that: The central processing unit includes a feedback comparison module, and the feedback comparison module is connected to the fluorescence spectrometer; the fluorescence spectrometer is also connected to the display and the storage module respectively; wherein the storage module is connected to the feedback comparison module.

4. The silane concentration automatic control system according to claim 1, characterized in that: The peripheral equipment includes several solenoid valves and a fluid replenishment pump.

5. A method for automatic control of silane concentration, the method being applied to the automatic control system of silane concentration according to any one of claims 1 to 4, characterized in that: The method comprises the following steps: S1, extracting a sample liquid using the sampling device and transporting the sample liquid to the fluorescence spectrometer; S2, the fluorescence spectrometer detects the silane concentration in the sample solution by chemical absorption method, and outputs a digital signal reflecting the silane concentration; S3, the central processing unit processes the digital signal and compares the digital signal with a built-in decision mode through the feedback comparison module; S4. The central processing unit outputs relevant control signals to the peripheral device according to the comparison result to adjust the silane content in the solution.

6. The automatic silane concentration control method according to claim 5, characterized in that: The S2 further includes: S21, adding ammonium molybdate developer to the sample solution to form a silane-molybdate ion complex and a phosphomolybdate complex; S22, adding a masking agent to the S21 solution to destroy the phosphomolybdate complex in the sample solution; S23, adding a reducing agent to the S22 solution, reacting under acidic conditions to reduce the yellow molybdenum silicic acid salt complex to a blue molybdenum silicic acid blue complex; S24, detecting the absorbance of the S23 solution by a dual-wavelength photometer, wherein the relationship between the absorbance and the silane concentration follows the Beer-Lambert law and satisfies the formula: Where A represents absorbance, ε represents molar absorption coefficient, c represents solution concentration, and l represents optical path length.

7. The automatic silane concentration control method according to claim 5, characterized in that: The S4 further comprises: When the central processor determines that the silane concentration detected by the fluorescence spectrometer is lower than a preset parameter, the central processor outputs an opening control signal to the peripheral device, and the peripheral device opens a corresponding valve to supplement the silane concentration; When the central processor determines that the silane concentration detected by the fluorescence spectrometer is higher than the preset parameters, the central processor outputs a closing control signal and an alarm control signal to the corresponding fluorescence spectrometer and alarm module respectively, and the peripheral device closes the corresponding valve.

8. The automatic silane concentration control method according to claim 5, characterized in that: The S1 further comprises: A plurality of sampling points are arranged in the silane solution circulation system, and the concentration of the sampled liquid extracted from each sampling point is simultaneously detected by the fluorescence spectrometer.

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