Liquid discharge head and liquid discharge apparatus

Abstract

A liquid discharge head includes: a common liquid chamber having a plurality of liquid chambers communicating with each other through the common liquid chamber; a diaphragm having a plurality of nozzles; a plurality of vibration generators; and a flexible member. And the common liquid chamber is used for storing liquid. The plurality of nozzles are respectively communicated with the plurality of liquid chambers; the plurality of vibration generators individually vibrate the vibrating membrane around the plurality of nozzles, respectively. A flexible member opposes the plurality of nozzles in the common liquid chamber. The flexible member is deformable by the liquid in the common liquid chamber vibrated by the vibrating membrane.

Description

Technical Field

[0001] Embodiments of the present disclosure relate to a liquid discharge head and a liquid discharge device. Background Art

[0002] Patent document 1 describes a recording device including a cylindrical nozzle and a vibration generator. The cylindrical nozzle holds liquid ink therein and is provided with a vibration generator. The vibration generator vibrates in a direction perpendicular to the surface of the liquid ink to generate surface tension waves in the liquid ink. The surface tension waves interfere with each other so that the wave height is highest in the center of the surface of the liquid ink. As a result, droplets of the liquid ink fly out from the center of the surface of the liquid ink.

[0003] Citation list

[0004] Patent Literature

[0005] [PTL1] Japanese Unexamined Patent Application Publication No. H9-226111 Summary of the invention

[0006] Technical issues

[0007] However, when liquid ink is discharged from a plurality of nozzles simultaneously, the droplet velocity and droplet amount of the liquid ink discharged from the nozzles may vary.

[0008] Solutions to the problem

[0009] According to an embodiment of the present disclosure, a liquid discharge head includes: a common liquid chamber having a plurality of liquid chambers interconnected through the common liquid chamber; a vibration membrane having a plurality of nozzles; a plurality of vibration generators; and a flexible member. The common liquid chamber is used to store liquid. A plurality of nozzles are respectively connected to the plurality of liquid chambers; a plurality of vibration generators respectively vibrate the vibration membranes around the plurality of nozzles individually. The flexible member is opposite to the plurality of nozzles in the common liquid chamber. The flexible member can be deformed by the liquid in the common liquid chamber vibrated by the vibration membrane.

[0010] Effects of the Invention

[0011] According to one aspect of the present disclosure, the droplet velocity and droplet amount of liquid discharged simultaneously from a plurality of nozzles are less likely to vary. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] A more complete understanding of the embodiments of the present disclosure and many of its attendant advantages and features can be readily obtained and understood from the following detailed description with reference to the accompanying drawings.

[0013] [ Figure 1 ]

[0014] Figure 1is a partial cross-sectional perspective view of a nozzle vibration type liquid discharge head according to a comparative example.

[0015] [ Figure 2 ]

[0016] Figure 2 yes Figure 1 An enlarged cross-sectional view of section X.

[0017] [ Figure 3 ]

[0018] Figure 3 is a partial cross-sectional perspective view of a liquid discharge head according to a first embodiment of the present disclosure.

[0019] [ Figure 4 ]

[0020] Figure 4 yes Figure 3 An enlarged cross-sectional view of portion X1.

[0021] [ Figure 5 ]

[0022] Figure 5 is a partial cross-sectional perspective view of a liquid discharge head according to a second embodiment of the present disclosure.

[0023] [ Figure 6 ]

[0024] Figure 6 yes Figure 5 An enlarged cross-sectional view of portion X2.

[0025] [ Figure 7 ]

[0026] Figure 7 is a partial cross-sectional perspective view of a liquid discharge head according to a third embodiment of the present disclosure.

[0027] [ Figure 8 ]

[0028] Figure 8 yes Figure 7 An enlarged cross-sectional view of the X3 portion.

[0029] [ Fig. 9 ]

[0030] Fig. 9 is a partial cross-sectional perspective view of a liquid discharge head according to a fourth embodiment of the present disclosure.

[0031] [ Fig.10 ]

[0032] Fig.10 yes Fig. 9 An enlarged cross-sectional view of the X4 portion.

[0033] [ FIG. 11A to FIG. 11C ]

[0034] FIG. 11A to FIG. 11C is a schematic diagram of a flexible member according to an embodiment of the present disclosure.

[0035] [ FIG. 12A to FIG. 12C ]

[0036] FIG. 12A to FIG. 12C is a schematic diagram of another flexible member according to an embodiment of the present disclosure.

[0037] [ Fig.13 ]

[0038] Fig.13 It is a graph showing the comparison between the first embodiment and the comparative example.

[0039] [ Fig.14 ]

[0040] Fig.14 It is a graph showing the comparison between the second embodiment and the comparative example.

[0041] [ Fig.15 ]

[0042] Fig.15 It is a graph showing the comparison between the third embodiment and the comparative example.

[0043] [ Fig.16 ]

[0044] Fig.16 It is a graph showing the comparison between the fourth embodiment and the comparative example.

[0045] [ Fig.17 ]

[0046] Fig.17 It is a graph showing the comparison between the fifth embodiment and the comparative example.

[0047] [ Fig.18 ]

[0048] Fig.18 It is a graph showing the comparison between the sixth embodiment and the comparative example.

[0049] [ Fig.19 ]

[0050] Fig.19 is a partial cross-sectional view of a liquid discharge head according to a modified example of the embodiment of the present disclosure.

[0051] [ Fig. 20 ]

[0052] Fig. 20is a partial cross-sectional view of a liquid discharge head according to another modified example of the embodiment of the present disclosure.

[0053] [ Fig.21 ]

[0054] Fig.21 is a partial cross-sectional view of a liquid discharge head according to still another modified example of the embodiment of the present disclosure.

[0055] [ Fig. 22 ]

[0056] Fig. 22 is a schematic diagram of a printer as a liquid discharge device according to an embodiment of the present disclosure.

[0057] [ Fig.23 ]

[0058] Fig.23 yes Fig. 22 A plan view of the head unit of the printer is shown.

[0059] [ Fig.24 ]

[0060] Fig.24 is a plan view of another printer as a liquid discharge device according to an embodiment of the present disclosure.

[0061] [ Fig.25 ]

[0062] Fig.25 yes Fig.24 A side view of the printer is shown.

[0063] [ Fig.26 ]

[0064] Fig.26 is a plan view of a liquid discharge unit according to an embodiment of the present disclosure.

[0065] [ Fig. 27 ]

[0066] Fig. 27 is a front view of another liquid discharge unit according to an embodiment of the present disclosure.

[0067] The accompanying drawings are intended to describe embodiments of the present disclosure and should not be interpreted as limiting the scope thereof. Unless explicitly noted, the accompanying drawings should not be considered to be drawn to scale. Moreover, throughout the several views, the same or similar reference numerals represent the same or similar components. DETAILED DESCRIPTION

[0068] In describing the embodiments shown in the drawings, specific terms are used for clarity. However, the disclosure of this specification is not intended to be limited to the specific terms selected, and it should be understood that each specific component includes all technical equivalents having similar functions, operating in a similar manner and achieving similar results.

[0069] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

[0070] Hereinafter, the present embodiment will be described with reference to the accompanying drawings. In the accompanying drawings, the same figure numerals represent the same components, and repeated descriptions may be appropriately simplified or omitted. Hereinafter, embodiments of the present invention will be described, but the present invention is not limited to these embodiments, and various deletions, additions, changes, etc. may be made without departing from the scope of the present invention of other embodiments that can be thought of by those skilled in the art, and as long as the effects and features of the present invention can be exerted, these embodiments are also included in the scope of the present invention.

[0071] Structure of nozzle vibration type liquid discharge head

[0072] Reference Figure 1 A nozzle vibration type liquid discharge head 1X according to a comparative example will be described. Figure 1 1 is a partial cross-sectional perspective view of a nozzle vibration type liquid discharge head 1X according to a comparative example. The liquid discharge head 1X (referred to as head 1X in the following description) is a nozzle vibration type head having a plurality of nozzles 2. Each nozzle 2 vibrates individually to discharge liquid in a liquid chamber 4 from the nozzle 2.

[0073] The head 1X includes a flow path substrate 100, a vibration membrane 103, a plurality of nozzles 2 from which liquid is discharged, an annular piezoelectric element 5 arranged around each of the plurality of nozzles 2, and a frame 120 that supports the flow path substrate 100. The piezoelectric element 5 is an example of a vibration generator. In the flow path substrate 100, a liquid chamber 4 called a separate liquid chamber is provided opposite to the piezoelectric element 5, and the nozzle 2 is connected to the liquid chamber 4.

[0074] A common liquid chamber 3 is formed in the frame 120. A liquid supply port 121 is provided on the frame 120, and liquid is supplied from the liquid supply port 121 to the common liquid chamber 3, and then liquid is supplied from the common liquid chamber 3 to the plurality of liquid chambers 4. A general single-crystal piezoelectric head that vibrates the wall of the liquid chamber opposite to the nozzle surface having the nozzle to discharge the liquid has a closed space in the liquid chamber, but in the nozzle vibration type magnetic head 1X, the liquid chamber 4 does not have such a closed space. One liquid chamber 4 does not necessarily correspond to one nozzle 2, and can also be shared by multiple nozzles 2.

[0075] Generally, in actual normal use of the liquid discharge device, the nozzle face of the head 1X (i.e., the face on which the plurality of nozzles 2 are formed) is used facing downward. Figure 1 The posture shown is used in reverse. In this case, the liquid in the common liquid chamber 3 flows so as to diffuse in the liquid chamber 4, and the liquid flowing into the liquid chamber 4 is retained in the liquid chamber 4 by the inner wall 4a of the liquid chamber 4. The inner wall 4a is an example of a partition. The shape of the inner wall 4a of the liquid chamber 4 is not limited to the plane as shown in the figure. For example, the curved inner wall 4a can define the liquid chamber 4 having a cylindrical shape. In the above description, in order to facilitate the description of how to supply the liquid, the common liquid chamber 3 and the liquid chamber 4 are distinguished from each other. In other words, the liquid chamber 4 can be considered as a part of the common liquid chamber 3.

[0076] The head 1X having the above structure vibrates the periphery of the nozzle 2 by the piezoelectric element 5, and discharges the liquid in the liquid chamber 4 from the nozzle 2 as liquid droplets D. This nozzle vibration type head can discharge the liquid droplets D with a smaller force than the single crystal type piezoelectric head. Therefore, power saving can be achieved.

[0077] The increased density of the nozzles 2 limits the space for arranging the wiring for voltage application. In this case, it is difficult to install the wiring on the surface of the substrate (e.g., the flow path substrate 100), but the wiring and the drive circuit can be installed in the substrate with a high density of nozzles 2. Lead zirconate titanate (PZT) is common in general materials of piezoelectric elements because it has good piezoelectric properties, but the film forming and crystallization temperature of PZT is 600°C or higher. When PZT is used as a material for piezoelectric elements, the drive circuit and wiring in the substrate cannot withstand high temperatures. In this case, a piezoelectric material with a film forming temperature lower than that of PZT can be used. This piezoelectric material has lower piezoelectric properties than PZT.

[0078] However, as described above, since the nozzle vibration type head can discharge liquid droplets with a smaller force than a general single-crystal type piezoelectric head, the nozzle vibration type head can discharge liquid droplets as required even when a piezoelectric material having a lower piezoelectric characteristic than PZT is used, and therefore, a nozzle vibration type head using a piezoelectric material such as a lead-free material, which has a low film formation and crystallization temperature but has a low piezoelectric characteristic, can discharge liquid droplets as required, and as a result, wiring and a driving circuit can be mounted in the substrate, and the nozzles 2 can be arranged at a high density. In addition, the nozzle vibration type head can reduce the volume of the liquid chamber 4, and as a result, the head can be miniaturized.

[0079] Although the plurality of nozzles 2 and the piezoelectric elements 5 are Figure 1 The nozzles 2 and piezoelectric elements 5 are arranged two-dimensionally in rows and columns, but the arrangement of the nozzles 2 and the piezoelectric elements 5 is not limited thereto. For example, the head may include the nozzles 2 and the piezoelectric elements 5 arranged in a row.

[0080] The following describes the Figure 1Part X in. Figure 2 yes Figure 1 An enlarged cross-sectional view of portion X in FIG.

[0081] The flow path substrate 100 is a silicon on insulator (SOI) substrate, and includes a drive circuit 101 and wiring 102 formed on the film-forming side of the vibration film 103. The drive circuit 101 includes, for example, a transistor and a resistor, and the wiring 102 includes wiring for applying a voltage to the first electrode 51 and wiring for applying a voltage to the second electrode 53.

[0082] The wiring 102 is arranged at one end of the vibration film 103 ( Figure 2 The first hole-shaped contact 7a at the right end of the vibrating membrane 103 is electrically connected to the electrical connection sheet 6. Figure 2 The left end (omitted here) also has a hole-shaped second contact, and the wiring 102 is electrically connected to the electrical connection piece 6 arranged at the other end through the second contact.

[0083] The head 1X has a plurality of nozzles 2 and a nozzle forming portion (film) 111 covering the piezoelectric element 5. The nozzle forming portion 111 is shown in FIG. Figure 1 Illustration omitted. The nozzle forming portion 111 may be provided with a liquid-repellent film (waterproof film) on the surface of the nozzle surface having the nozzle. By providing the liquid-repellent film on the nozzle surface, it is possible to prevent the liquid from adhering to the nozzle surface. Due to this structure, the liquid ejected from the nozzle 2 can be ejected without being affected by the liquid adhering to the nozzle surface. In addition, when the solvent of the liquid is aqueous, perfluorodecyltrichlorosilane or perfluorooctyltrichlorosilane can be used as the material of the liquid-repellent film.

[0084] The piezoelectric element 5 includes a first electrode 51, a piezoelectric film 52, and a second electrode 53. The first electrode 51 can be referred to as a lower electrode, and the second electrode 53 can be referred to as an upper electrode. The piezoelectric element 5 is stacked on the vibrating film 103, the piezoelectric element 5 and the liquid chamber 4 are arranged on the opposite side of the vibrating film 103, and the insulating film 8 covers the piezoelectric element 5. The insulating film 8 has a hole-shaped fifth contact 7e that electrically connects the first electrode 51 and the first lead 9a, and a hole-shaped sixth contact 7f that electrically connects the second electrode 53 and the second lead 9b. The first lead 9a is arranged on the insulating film 8, and electrically connects the first electrode 51 and the wiring 102 of the flow path substrate 100, and the second lead 9b is arranged on the insulating film 8, and electrically connects the second electrode 53 and the wiring 102.

[0085] One end of the first lead 9a is electrically connected to the first electrode 51 via the fifth contact 7e of the insulating film 8, and the other end is electrically connected to the wiring 102 via the third contact 7c of the vibration film 103. One end of the second lead 9b is electrically connected to the second electrode 53 via the sixth contact 7f of the insulating film 8, and the other end is electrically connected to the wiring 102 via the fourth contact 7d of the vibration film 103.

[0086] The first lead 9a and the second lead 9b are covered with the moisture-proof film 11. Due to this structure, moisture can penetrate the nozzle forming portion 111 made of resin but does not reach the first lead 9a and the second lead 9b. As a result, corrosion of the first lead 9a and the second lead 9b can be prevented.

[0087] The moisture-proof film 11 is preferably made of a material having electrical insulation. For example, silicon nitride (SiN), which is commonly used in moisture-proof films for semiconductors, is preferred so that the moisture-proof film 11 can have both electrical insulation and moisture-proof properties. In addition to SiN, examples of the following materials for the moisture-proof film 11 include oxides of aluminum (Al), tantalum (Ta), niobium (Nb), titanium (Ti), hafnium (Hf), zirconium (Zr), and tungsten (W), which can be easily formed into a dense film by atomic layer deposition (ALD). Since the moisture-proof film 11 has both electrical insulation and moisture-proof properties, it can be thinned compared to the case where an insulating film is additionally formed under the moisture-proof film. As a result, the vibration film 103 is easily deformed, which improves the vibration efficiency.

[0088] The first electrode 51 and the second electrode 53 of the piezoelectric element 5 are made of a metal having high corrosion resistance such as iridium (Ir) or molybdenum (Mo). As a result, the first electrode 51 and the second electrode 53 are hardly corroded by moisture intruding into the nozzle forming portion 111.

[0089] On the back side of the flow path substrate 100 ( Figure 2 A frame 120 is joined to the lower side of the frame 120, and a common liquid chamber 3 connected to multiple liquid chambers 4 is formed on the inner side of the frame 120.

[0090] In the above structure, the head 1X applies a predetermined driving waveform (voltage) to the first electrode 51 and the second electrode 53 of the piezoelectric element 5, and the piezoelectric film 52 vibrates, and the vibrating film 103 is moved. Figure 2 The vibration of the diaphragm 103 causes a pressure change in the liquid in the liquid chamber 4, and the liquid is discharged from the nozzle 2.

[0091] When multiple nozzles (hereinafter also referred to as channels) are driven simultaneously in the nozzle vibration type head 1X, fluid crosstalk that adversely affects the ejection state between adjacent nozzles may sometimes occur. Fluid crosstalk is the pressure generated by the vibration of the piezoelectric element 5 that is transmitted to the adjacent liquid chamber 4 through the liquid, causing the discharge state (for example, the droplet velocity and droplet volume discharged from the nozzle 2) to change. The more nozzles (channels) are driven simultaneously, the greater the fluid crosstalk through the liquid, and the more obvious the deviation of the discharge state between the channels. As a result, it is impossible to apply the liquid to the object uniformly and with high precision.

[0092] Therefore, in the embodiment of the present invention described below, a component for absorbing the vibration of the liquid is arranged inside the common liquid chamber 3 to reduce the fluid crosstalk. The embodiment of the present invention is described below.

[0093] First embodiment

[0094] Below, refer to Figure 3 and Figure 4 A first embodiment of the present invention will be described. Figure 3 is a partially cutaway perspective view of a liquid discharge head 1 (referred to as head 1 in the following description) according to a first embodiment of the present invention. Figure 4 yes Figure 3 It is an enlarged cross-sectional view of the X1 portion in FIG. In addition, the same reference numerals are given to the same elements as those already described, and duplicate descriptions are omitted.

[0095] In the first embodiment, the elastic membrane 122 is an example of a flexible member, which is arranged inside the common liquid chamber 3. The common liquid chamber 3 is divided into a common liquid chamber 3-1 and a common liquid chamber 3-2 with the elastic membrane 122 as a boundary. Here, for the elastic membrane 122, the surface on the side opposite to the nozzle 2 in the state of being arranged inside the common liquid chamber 3 is defined as a first surface 122-1, and the surface on the opposite side to the first surface 122-1 is defined as a second surface 122-2. Under the above definition, the elastic membrane 122 of the first embodiment is arranged so that both the first surface 122-1 and the second surface 122-2 are in contact with the liquid contained in the common liquid chamber 3. That is, the elastic membrane 122 is arranged in the liquid. In addition, the membrane surface of the elastic membrane 122 does not necessarily have to be parallel to the nozzle surface. The membrane surface can be inclined relative to the nozzle surface as long as it can reduce the change in the droplet velocity and droplet amount of the liquid ejected from the nozzle 2.

[0096] The elastic membrane 122 is fixed to the frame 120 so that it is located Figure 3 The elastic membrane 122 is disposed above the liquid supply port 121 of the frame 120. That is, the elastic membrane 122 is disposed between the liquid chamber 4 in the common liquid chamber 3 and the liquid supply port 121. The elastic membrane 122 does not have a through hole on the membrane surface. Therefore, if the elastic membrane 122 is provided with the same area as the area of ​​the common liquid chamber 3, the interior of the common liquid chamber 3 is divided into an upper section and a lower section with the elastic membrane 122 as a boundary, and the liquid supplied from the liquid supply port 121 to the common liquid chamber 3 cannot be delivered to the liquid chamber 4. Therefore, in the first embodiment, in a portion (in this embodiment) Figure 3 A gap G is provided between the left side portion in the figure (i.e., the elastic membrane 122 and the frame 120), and the liquid in the common liquid chamber 3 is delivered to the liquid chamber 4 side through the gap G.

[0097] The material of the elastic film 122 is not particularly limited as long as it can be deformed according to the vibration generated in the common liquid chamber 3. Examples of the material include plastic materials such as polyimide, polypropylene, polyethylene, and nylon, and metal materials such as SUS (stainless steel), titanium, and nickel.

[0098] The elastic film 122 is disposed so that the first surface 122-1 side thereof is spaced a predetermined distance L1 from the end 4a-1 of the inner wall 4a of the liquid chamber 4. The end 4a-1 is an example of a first end of the partition member.

[0099] The distance L1 is preferably in the range of 10 μm to 600 μm. When the distance L1 is less than 10 μm, the liquid may not be transported satisfactorily from the common liquid chamber 3 to the liquid chamber 4, and when the distance L1 is greater than 600 μm, the vibration absorption effect of the elastic film 122 may be reduced, resulting in insufficient reduction of fluid crosstalk.

[0100] The elastic membrane 122 is not limited to a structure formed by a single sheet. For example, the common liquid chamber 3 may be divided into a plurality of regions, and a plurality of elastic membranes may be provided in the plurality of regions according to the effects of each region. The elastic membrane may be a plurality of elastic membranes configured as a multi-stage configuration, for example, two elastic membranes facing each other to form a two-stage configuration.

[0101] Below, refer to Figures 11A to 11C The structure of the elastic film 122 used in the first embodiment is described in more detail. Figures 11A to 11C is a schematic diagram of a flexible member. Fig.11A is the local plan view of the flexible member, Fig. 11B and 11C is along Fig.11A A cross-sectional view of the flexible member taken along line AA in FIG.

[0102] Fig. 11B The flexible member shown and Fig. 11C The flexures shown have similar appearance in top view, but different cross-sectional structures. Fig. 11B An example of a flexible member shown in FIG. 1 is a cross-section of the elastic membrane 122 which is a solid material. Fig. 11C The cross section of the elastic film 122 shown in FIG. 1 is a hollow material having a hollow portion 122 a. Air is sealed in the hollow portion 122 a, thereby forming an air layer.

[0103] In a first embodiment, one can use Fig. 11B and Fig. 11C The elastic membrane 122 shown in FIG. Fig. 11C In the case of the elastic membrane 122 having an air layer, the vibration of the liquid can be more effectively attenuated.

[0104] As described above, the head 1 according to the present embodiment includes: a common liquid chamber 3 for containing liquid; a plurality of nozzles 2 connected to the common liquid chamber 3; a piezoelectric element 5 for vibrating each of the plurality of nozzles 2; and an elastic film 122 disposed in the common liquid chamber 3 and suppressing the vibration of the liquid. The common liquid chamber 3 has a liquid chamber 4 formed relative to the nozzle 2, and is provided with an elastic film 122 at a position of the liquid chamber 4 facing the nozzle 2.

[0105] As described above, the elastic film 122 has the first surface 122-1 which is opposite to the plurality of nozzles 2 when arranged in the common liquid chamber 3, and the second surface 122-2 which is opposite to the first surface 122-1. The first surface 122-1 and the second surface 122-2 of the elastic film 122 are in contact with the liquid contained in the common liquid chamber 3.

[0106] As described above, examples of the elastic film 122 include a resin film.

[0107] Furthermore, as described above, examples of the elastic film 122 include a metal film.

[0108] Thus, the vibration generated in the liquid by driving the plurality of piezoelectric elements 5 simultaneously is absorbed (attenuated) by the elastic film 122 and is difficult to propagate to the adjacent liquid chamber 4, thereby suppressing the variation of the ejection state between channels caused by fluid crosstalk. As a result, the liquid can be uniformly and accurately applied to the object.

[0109] As described above, the elastic film 122 includes an air layer (the hollow portion 122 a enclosed with air) between the first surface 122 - 1 and the second surface 122 - 2 .

[0110] As described above, on the side of the elastic membrane 122 opposite to the first surface 122-1, there is an inner wall 4a that separates adjacent nozzles of the plurality of nozzles 2, and when the end of the inner wall 4a close to the first surface 122-1 of the elastic membrane 122 is taken as the first end 4a-1, the distance L1 between the first surface 122-1 of the elastic membrane 122 and the first end 4a-1 of the inner wall 4a is set within the range of 10μm to 600μm.

[0111] This makes it possible to more effectively absorb (dampen) the vibration of the liquid.

[0112] Second embodiment

[0113] Below, refer to Figure 5 and Figure 6 A second embodiment of the present invention will be described. Figure 5 is a partial cross-sectional perspective view of a liquid discharge head according to a second embodiment, Figure 6 yes Figure 5 The same reference numerals are given to the same parts or elements that have been described, and repeated descriptions are omitted.

[0114] In the second embodiment, the common liquid chamber 3 is provided with an elastic membrane 123 as an example of a flexible member therein. Here, the surface of the elastic membrane 123 on the side opposite to the nozzle 2 in the state of being arranged in the common liquid chamber 3 is defined as a first surface 123-1, and the surface on the opposite side to the first surface 123-1 is defined as a second surface 123-2. In the case of the above definition, the elastic membrane 123 according to the second embodiment is arranged so that both the first surface 123-1 and the second surface 123-2 (i.e., the membrane surface) are in contact with the liquid contained in the common liquid chamber 3. That is, the elastic membrane 123 is arranged in the liquid.

[0115] The elastic film 123 is fixed to the frame 120 so that it is located at the position of the liquid supply port 121 set in the frame 120. Figure 5 The elastic membrane 123 is as shown in FIG. Figure 6 As shown, a plurality of openings 123b are formed that penetrate the first surface 123-1 and the second surface 123-2. The size of the openings 123b is not particularly limited, but in this embodiment, they are circular holes with a diameter of several tens of μm. In the second embodiment, since the liquid in the common liquid chamber 3 can be sent to the liquid chamber 4 through the openings 123b, it is not necessary to set the gap G as in the first embodiment, and the elastic membrane 123 can be set with the same area as the common liquid chamber 3.

[0116] The elastic film 123 is not particularly limited in material as long as it can be deformed by vibration generated in the common liquid chamber 3. Examples of the material include plastic materials such as polyimide, polypropylene, polyethylene, and nylon, and metal materials such as SUS (stainless steel), titanium, and nickel.

[0117] The first surface 123-1 side of the elastic film 123 is provided at a predetermined distance L2 from the end 4a-1 of the inner wall 4a of the liquid chamber 4. The end 4a-1 is an example of a first end of the partition member.

[0118] The distance L2 is preferably in the range of 10 μm to 600 μm. In this embodiment, the distance L2 is set to 100 μm. When it is less than 10 μm, sometimes the liquid cannot be well fed from the common liquid chamber 3 to the liquid chamber 4. When it is greater than 600 μm, the vibration absorption effect based on the elastic membrane 123 is reduced, and the reduction of fluid crosstalk is insufficient.

[0119] The elastic film 123 is not limited to a structure consisting of a single sheet. For example, the common liquid chamber 3 may be divided into a plurality of regions, and a plurality of elastic films may be provided in the plurality of regions according to the effects of each region.

[0120] Below, refer to Figures 12A to 12C The structure of the elastic film 123 used in the second embodiment is described in more detail. Figures 12A to 12C This is an illustration of a flexible member. Fig. 12Ais the local plan view of the flexible member, Fig. 12B and 12C is along Fig. 12A A cross-sectional view of the flexible member taken along line BB in FIG.

[0121] Fig. 12B The flexible member and Fig. 12C The flexure members shown have similar appearance in plan view but differ in cross-sectional structure. Fig. 12B The elastic film 123 shown as an example of a flexible member is a solid material in cross section except for the opening 123b. Fig. 12C The elastic film 123 shown is a hollow material having a hollow portion 123a in the cross section except for the opening 123b. Air is sealed in the hollow portion 123a to form an air layer.

[0122] As an example of the elastic film 123, a polyimide film with a thickness of 100 μm is used as the elastic film 123, and openings 123b with a diameter of several tens of μm are formed on the film with an opening ratio of 75%. The size, shape, and arrangement of the openings 123b formed on the elastic film 123 can be appropriately changed according to the ejection state of the liquid, etc. The size and shape of the openings 123b formed on the elastic film 123 are not limited to one. For example, two or more openings 123b with different sizes and shapes may be mixed in one elastic film 123.

[0123] In a second embodiment, one can use Fig. 12B Or the elastic membrane 123 shown in 12C. Fig. 12C The elastic membrane 123 of the air layer shown in (ie, the fifth embodiment) can more effectively dampen the vibration of the liquid.

[0124] As described above, the head 1 according to the present embodiment includes: a common liquid chamber 3 for containing liquid; a plurality of nozzles 2 connected to the common liquid chamber 3; a piezoelectric element 5 for vibrating the plurality of nozzles 2 individually; and an elastic film 123 disposed in the common liquid chamber 3 and suppressing the vibration of the liquid. The common liquid chamber 3 has a liquid chamber 4 formed relative to the nozzle 2, and the elastic film 123 is provided at a position of the liquid chamber 4 facing the nozzle 2.

[0125] In addition, as described above, the elastic membrane 123 includes: a first surface 123-1, which is a surface on the side opposite to the plurality of nozzles 2 when arranged in the common liquid chamber 3; and a second surface 123-2, which is a surface on the opposite side to the first surface 123-1. The first surface 123-1 and the second surface 123-2 of the elastic membrane 123 are in contact with the liquid contained in the common liquid chamber 3.

[0126] As described above, examples of the elastic film 123 include a resin film.

[0127] Furthermore, as described above, examples of the elastic film 123 include a metal film.

[0128] Thus, the vibration generated in the liquid by driving the plurality of piezoelectric elements 5 simultaneously is absorbed (attenuated) by the elastic film 123 and is difficult to propagate to the adjacent liquid chamber 4, thereby suppressing the change of the ejection state between channels caused by fluid crosstalk. As a result, the liquid can be applied uniformly and accurately to the object.

[0129] As described above, the elastic membrane 123 includes a plurality of openings 123 b penetrating the first surface 123 - 1 and the second surface 123 - 2 .

[0130] As described above, the elastic film 123 includes an air layer (the hollow portion 123 a filled with air) between the first surface 123 - 1 and the second surface 123 - 2 .

[0131] As described above, the elastic membrane 123 has an inner wall 4a on the side opposite to the first surface 123-1 for separating adjacent nozzles of the plurality of nozzles 2. When the end of the inner wall 4a on the side close to the first surface 123-1 of the elastic membrane 123 is set as the first end 4a-1, the distance L2 between the first surface 123-1 of the elastic membrane 123 and the first end 4a-1 of the inner wall 4a is set in the range of 10μm to 600μm.

[0132] This makes it possible to more effectively absorb (dampen) the vibration of the liquid.

[0133] Third embodiment

[0134] Below, refer to Figure 7 and Figure 8 The third embodiment will be described. Figure 7 is a partial cross-sectional perspective view of a liquid discharge head 1 according to a third embodiment, Figure 8 yes Figure 7 In addition, the same reference numerals are given to the same parts or elements that have been described, and repeated descriptions are omitted.

[0135] The third embodiment is different from the second embodiment in that the elastic film 123 is disposed at a different position: the elastic film 123 may be disposed such that its first surface 123 - 1 contacts the first end 4 a - 1 of the inner wall 4 a forming the liquid chamber 4 .

[0136] In the case of the third embodiment, it is also possible to use Fig. 12B and Fig. 12C The elastic membrane 123 shown in FIG. Fig. 12C In the case of the elastic film 123 with an air layer, the vibration of the liquid can be attenuated more effectively.

[0137] As described above, the head 1 according to the present embodiment has an inner wall 4a for separating adjacent nozzles of a plurality of nozzles 2 on the side opposite to the first surface 123-1 of the elastic membrane 123, and when the end of the inner wall 4a on the side close to the first surface 123-1 of the elastic membrane 123 is taken as the first end 4a-1, the first surface 123-1 of the elastic membrane 123 is in contact with the first end 4a-1 of the inner wall 4a.

[0138] Thus, the vibration generated in the liquid by driving the plurality of piezoelectric elements 5 simultaneously is absorbed (attenuated) by the elastic film 123 and is difficult to propagate to the adjacent liquid chamber 4, thereby suppressing the change of the ejection state between channels caused by fluid crosstalk. As a result, the liquid can be applied uniformly and accurately to the object.

[0139] Fourth embodiment

[0140] Below, refer to Fig. 9 and Fig.10 A fourth embodiment will be described. Fig. 9 is a partial cross-sectional perspective view of a liquid discharge head 1 according to a fourth embodiment, Fig.10 yes Fig. 9 In addition, the same reference numerals are given to the same parts or elements that have been described, and repeated descriptions are omitted.

[0141] The fourth embodiment is different from the first embodiment in the contact mode between the elastic membrane and the liquid. The elastic membrane 122 may be arranged so that only the first surface 122-1 contacts the liquid contained in the common liquid chamber 3, and the second surface 122-2 contacts the air in the common liquid chamber 3. In this case, the elastic membrane 122 is fixed to the frame 120 so that the elastic membrane 210 is located Fig. 9 The liquid is supplied to the first surface 122-1 of the elastic membrane 122 by opening the liquid supply port 121 provided in the frame 120. As long as the pressure in the common liquid chamber 3 can be appropriately maintained, the second surface 122-2 of the elastic membrane 122 may be in contact with any gas other than air.

[0142] According to the above structure, the gap G for conveying the liquid from the second surface 122-2 side to the first surface 122-1 side of the elastic membrane 122 is not required, and the elastic membrane 123 can be provided with the same area as the area of ​​the common liquid chamber 3. In addition, since the second surface 122-2 side of the elastic membrane 122 is in contact with the air, the elastic membrane itself has a simple structure, and can obtain the same effect as an elastic membrane having a hollow portion in which air is sealed.

[0143] In the case of the fourth embodiment, it is also possible to use Fig. 11B and Fig. 11C The elastic membrane 122 shown in FIG. Fig. 11CIn the case of the elastic membrane 122 having an air layer (ie, the sixth embodiment), the vibration of the liquid can be more effectively attenuated.

[0144] As described above, in this embodiment, the first surface 122 - 1 of the elastic membrane 122 is in contact with the liquid contained in the common liquid chamber 3 , and the second surface 122 - 2 is in contact with the gas in the common liquid chamber 3 .

[0145] Thus, the vibration generated in the liquid by driving the plurality of piezoelectric elements 5 simultaneously is absorbed (attenuated) by the elastic film 122 and is difficult to propagate to the adjacent liquid chamber 4, thereby suppressing the change of the ejection state between channels caused by fluid crosstalk. As a result, the liquid can be uniformly and accurately applied to the object.

[0146] Comparison of Examples and Comparative Examples

[0147] the following, Figure 13 to Figure 18 The comparison results of each embodiment and the comparative example are shown. The comparison results show the change in the droplet ejection speed (droplet speed) from the nozzle when the number of nozzles (number of channels) driven simultaneously is increased. The comparative example used as the comparison object is a liquid ejection head 1X having a structure without a flexible member (elastic membrane 122, 123) in the common liquid chamber 3.

[0148] Fig.13 The comparison results of the first embodiment and the comparative example are shown. In the first embodiment, Figure 3 and Figure 4 Use in Fig. 11B The cross section shown is of an elastic membrane 122 of solid material.

[0149] Fig.14 The comparison results of the second embodiment and the comparative example are shown. In the second embodiment, Figure 5 and Figure 6 Use in Fig. 12B The cross section of the elastic membrane 123 shown except for the opening 123 b is a solid material.

[0150] Fig.15 The comparison results of the third embodiment and the comparative example are shown. In the third embodiment, Figure 7 and Figure 8 Use in Fig. 12B The cross section of the elastic membrane 123 shown except for the opening 123 b is a solid material.

[0151] Fig.16 The comparison results of the fourth embodiment and the comparative example are shown. In the fourth embodiment, Fig. 9 and Fig.10 Use in Fig. 11B The cross section shown is of an elastic membrane 122 of solid material.

[0152] Fig.17 The comparison results of the fifth embodiment and the comparative example are shown. In the fifth embodiment, Figure 5 and Figure 6 In, use Fig. 12C The cross section of the elastic membrane 123 shown except the opening 123b is a hollow material.

[0153] Fig.18 The comparison results of the sixth embodiment and the comparative example are shown. In the sixth embodiment, Fig. 9 and Fig.10 In, use Fig. 11C The cross section shown is of an elastic membrane 122 of hollow material.

[0154] In any of the first to sixth embodiments, the elastic membranes 122 and 123 absorb the vibration generated in the liquid chamber 4 and suppress the propagation to the adjacent liquid chamber 4. Therefore, compared with the comparative example, the reduction in droplet velocity accompanying the increase in the number of simultaneously driven channels is greatly alleviated.

[0155] Modifications

[0156] Hereinafter, modified examples of the liquid discharge head 1 will be described. Figure 19 to Figure 21 1 is an explanatory diagram showing a modified example of the liquid discharge head 1 according to the above-described embodiment of the present disclosure. Figures 19 to 21 Relative to Figures 1 to 10 The head 1 (or 1X) is shown upside down. Figure 19 to Figure 21 , the frame 120 is omitted from illustration.

[0157] In the head 1, the electrical connection pads 6 may have various structures. Fig.19 As shown, the following structure can also be adopted: the wiring 102 of the flow path substrate 100 is extended to the end of the side of the head 1, and the electrical connection pad 6 for connecting to an external electrical component such as a power supply is electrically connected to the end of the wiring portion 102. As shown in the figure, the flow path substrate 100 can also be a structure without a built-in drive circuit 101.

[0158] like Fig. 20 As shown, one end of the first lead 9a and the second lead 9b may be exposed to the outside, and the exposed portion may form the electrical connection pad 6. In this case, the flow channel substrate 100 may not have the drive circuit 101 built therein.

[0159] like Fig.21As shown, the first lead 9a and the second lead 9b may be extended to the end of the side surface of the head 1, and the electrical connection pad 6 may be electrically connected to the end of the lead. In this case, the flow path substrate 100 may not have the drive circuit 101 built therein.

[0160] Liquid discharge device

[0161] Hereinafter, an example of a liquid discharge device according to an embodiment of the present invention will be described.

[0162] Example of a line printer

[0163] Fig. 22 FIG. 5 is a schematic diagram showing the structure of a printer 500 as a liquid discharge device according to an embodiment of the present invention. Fig.23 1 is a plan view showing an example of a head unit 550 in the printer 500 according to the present embodiment.

[0164] The printer 500 as an example of a liquid discharge device includes: a feeder 501 that feeds a continuous medium 510 that is a long continuous recording medium to a printing unit 505; and a guide conveyor 503 that guides and conveys the continuous medium 510 supplied from the feeder 501 to the printing unit 505. In addition, the printer 500 includes: the printing unit 505 that prints an image or the like by ejecting liquid onto the continuous body 510; a dryer 507 that dries the continuous medium 510; and a discharger 509 that discharges the continuous medium 510.

[0165] The continuous medium 510 is fed from a conveying roller 511 of the feeder 501, guided and conveyed by rollers of the feeder 501, the guide conveyor 503, the dryer 507, and the discharger 509, and is wound up by a winding roller 591 of the discharger 509. In the printing unit 505, the continuous medium 510 is conveyed on a conveying guide member 559 to face the head unit 550, and an image or the like is printed by liquid ejected from the head unit 550.

[0166] The printer 500 of this embodiment has a head unit 550 equipped with Fig.23 A common base component 552 for the two head modules 100A, 100B is shown.

[0167] In this embodiment, in each of the head modules 100A and 100B, a plurality of liquid discharge heads 1 are arranged in a direction orthogonal to the conveyance direction of the continuous medium 510 to form a line head (also referred to as a full width head).

[0168] When the arrangement direction of the liquid discharge heads 1 in the direction orthogonal to the conveying direction of the head modules 100A and 100B is set as the head arrangement direction, the head arrays 1A1 and 1A2 of the head module 100A discharge liquid of the same color. Similarly, the head arrays 1B1 and 1B2 of the head module 100A are grouped, the head arrays 1C1 and 1C2 of the head module 100B are grouped, and the head arrays 1D1 and 1D2 are grouped, and liquids of required colors are discharged respectively. Moreover, the above-mentioned liquid discharge heads 1 are used in these head arrays 1A1 to 1D2.

[0169] Example of a serial printer

[0170] Fig.24 is a top view of another printer as a liquid discharge device according to an embodiment of the present invention, Fig.25 yes Fig.24 A side view of the printer is shown.

[0171] The printer 500 in this example is a serial printer, and the carriage 403 is reciprocated in the main scanning direction by the main scanning moving mechanism 493. The main scanning moving mechanism 493 includes a guide member 401, a main scanning motor 405, a timing belt 408, etc. The guide member 401 is mounted on the left and right side plates 491A and 491B, and movably holds the carriage 403. Then, the carriage 403 is reciprocated in the main scanning direction by the main scanning motor 405 via the timing belt 408 mounted between the driving pulley 406 and the driven pulley 407.

[0172] The carriage 403 is provided with a liquid discharge unit 440 formed by integrating a head tank 441 and the above-mentioned liquid discharge head 1. The liquid discharge head 1 discharges liquids of various colors, such as yellow (Y), cyan (C), magenta (M), and black (K). The liquid discharge head 1 is installed such that a nozzle row consisting of a plurality of nozzles is arranged in a sub-scanning direction orthogonal to the main scanning direction and the discharge direction faces downward. The liquid discharge head 1 is connected to a supply mechanism having a liquid circulation device to circulate and supply liquid of a desired color.

[0173] The printer 500 includes a conveying mechanism 485 for conveying paper 410. The conveying mechanism 485 includes a conveying belt 412 as a conveying unit, and a sub-scanning motor 416 for driving the conveying belt 412. The conveying belt 412 attracts the paper 410 and conveys the paper to a position opposite to the liquid discharge head 1. The conveying belt 412 is an endless belt extending between a conveying roller 413 and a tension roller 414. Adsorption can be performed by electrostatic adsorption or air adsorption, etc. The conveying roller 413 is driven to rotate by the sub-scanning motor 416 via a timing belt 417 and a timing pulley 418, so that the conveying belt 412 moves around in the sub-scanning direction.

[0174] A maintenance and recovery mechanism 420 for maintaining and recovering the liquid discharge head 1 is arranged on one side of the carriage 403 in the main scanning direction and on the side of the conveyor belt 412. The maintenance and recovery mechanism 420 is composed of, for example, a capping member 421 for capping the nozzle surface of the liquid discharge head 1, a wiping member 422 for wiping the nozzle surface, etc. In addition, the main scanning movement mechanism 493, the maintenance and recovery mechanism 420, and the conveyor mechanism 485 are mounted on a housing including side plates 491A and 491B and a back plate 491C.

[0175] In the printer 500 thus configured, the paper 410 is supplied to and adsorbed on the conveyor belt 412, and the paper 410 is conveyed in the sub-scanning direction by the circling movement of the conveyor belt 412. Therefore, by driving the liquid discharge head 1 according to the image signal while moving the carriage 403 in the main scanning direction, liquid is ejected onto the stopped paper 410, thereby forming an image or the like.

[0176] Liquid discharge unit

[0177] Next, an example of the liquid discharge unit 440 according to the present embodiment will be described.

[0178] Fig.26 is a partial top view of the liquid discharge unit 440 according to an embodiment of the present invention.

[0179] The liquid discharge unit 440 includes: a housing composed of side plates 491A and 491B and a back plate 491C; a main scanning moving mechanism 493; a carriage 403; and a liquid discharge head 1, which are components constituting Fig.24 and Fig.25 Components of the liquid discharge device shown.

[0180] In addition, the liquid discharge unit 440 may be configured such that the above-mentioned maintaining and restoring mechanism 420 is further mounted on, for example, the side plate 491B.

[0181] Fig. 27 is a front view showing another example of the liquid discharge unit 440 according to the embodiment of the present invention.

[0182] The liquid discharge unit 440 includes: a liquid discharge head 1, which is equipped with a flow path member 444; and a tube 456, which is connected to the flow path member 444. In addition, the flow path member 444 is arranged inside the cover 442. Instead of the flow path member 444, a head tank 441 may be included. In addition, a connector 443 electrically connected to the liquid discharge head 1 is provided on the upper part of the flow path member 444.

[0183] In the embodiment of the present invention, the term "liquid discharge device" refers to a device that has a liquid discharge head and drives the liquid discharge head to discharge liquid. The liquid discharge device includes not only a device that can discharge liquid to an object to which liquid can adhere, but also a device that discharges liquid into gas or liquid.

[0184] The "liquid discharge device" may include devices related to the supply, transportation, and discharge of objects to which liquid can adhere, and may also include pre-processing devices, post-processing devices, etc. The "liquid discharge device" may be, for example, an image forming device that discharges ink to form an image on paper, or a three-dimensional molding device (three-dimensional molding device) that discharges molding liquid to a powder layer that forms a powder into a layer in order to mold a three-dimensional molding object (three-dimensional molding object).

[0185] The "liquid discharge device" is not limited to a device that discharges liquid to visualize a meaningful image such as letters or figures. For example, the liquid discharge device also includes a device for forming a pattern that itself has no meaning, or a device for making a three-dimensional image.

[0186] The term "liquid-adhesive material" means a material to which liquid can at least temporarily adhere, a material to which liquid adheres and solidifies, or a material to which liquid adheres and permeates. Specific examples of "liquid-adhesive material" include, but are not limited to, paper, recording paper, recording paper, film, cloth and other recording media, electronic substrates, piezoelectric elements and other electronic components, powder layers (powder layers), organ models, inspection units and other media, and include all objects to which liquid adheres unless otherwise specified.

[0187] Examples of materials of the above-mentioned "liquid-adhesive objects" include paper, thread, fiber, cloth, leather, metal, plastic, glass, wood, ceramics, collectors such as aluminum foil or copper foil, or electrodes with active material layers formed on the collectors, etc., including any material to which liquid can adhere even temporarily.

[0188] In addition, the term "liquid" is not particularly limited as long as it is a liquid with viscosity or surface tension that can be discharged from the discharge head. It is preferably a liquid with a viscosity of 30 MPa·s or less at room temperature and pressure or by heating or cooling. As liquids, for example, solvents such as water and organic solvents, pigments such as dyes and pigments, polymerizable compounds, resins, surfactants and other functional materials, DNA, amino acids, proteins, calcium and other biocompatible materials, edible materials such as natural pigments, active substances, solid electrolytes used as electrode materials, solutions containing conductive materials, insulating materials, inks, etc., suspensions, emulsions, etc. Such solutions, suspensions or emulsions can be used, for example, for inkjet inks, surface treatment liquids, liquids for forming anti-etching patterns of parts of electronic components or light-emitting components or electronic circuits, material solutions for three-dimensional manufacturing, electrodes, or electrochemical components.

[0189] The “liquid discharge device” includes, but is not limited to, a device in which a liquid discharge head and an object to which liquid can adhere move relative to each other. Specific examples include a serial type device in which the liquid discharge head moves, a linear type device in which the liquid discharge head does not move, and the like.

[0190] In addition, as a "liquid discharge device", there is also a treatment liquid coating device that coats the surface of the paper with a treatment liquid for the purpose of modifying the surface of the paper and discharges the treatment liquid onto the paper, and a jet granulation device that granulates particles of the raw material by spraying a combined liquid obtained by dispersing the raw material in a solution through a nozzle, etc.

[0191] "Liquid discharge device" is not limited to fixed type equipment. For example, the liquid discharge device can be a robot equipped with a liquid discharge head and can be moved by remote control or autonomous driving. It can also be used for painting the outer wall of a building or painting road surface markings (crosswalks, stop lines, speed indicators, etc.) on the road by a movable robot. In this case, the building or road is also included in the "object to which liquid can adhere".

[0192] The above-described embodiments of the present disclosure are examples, and the following aspects of the present disclosure can provide advantageous effects such as those described below.

[0193] Aspect 1

[0194] According to aspect 1, a liquid discharge head (e.g., head 1) includes: a common liquid chamber (e.g., common liquid chamber 3) for storing liquid, a plurality of nozzles (e.g., nozzle 2) connected to the common liquid chamber, a vibration generator (e.g., piezoelectric element 5) for individually vibrating the plurality of nozzles, and a flexible member (e.g., elastic film 122 or 123) configured in the common liquid chamber to reduce liquid vibration. The common liquid chamber includes a plurality of liquid chambers (e.g., liquid chamber 4) corresponding to the plurality of nozzles, and the flexible member is arranged at a position of the liquid chamber facing the plurality of nozzles.

[0195] In other words, the liquid discharge head includes: a common liquid chamber having a plurality of liquid chambers interconnected through the common liquid chamber; a vibration membrane having a plurality of nozzles; a plurality of vibration generators; and a flexible member. The common liquid chamber is used to store liquid. A plurality of nozzles are respectively connected to the plurality of liquid chambers; and a plurality of vibration generators respectively vibrate the vibration membrane around the plurality of nozzles individually. The flexible member is opposite to the plurality of nozzles in the common liquid chamber. The flexible member can be deformed by the liquid in the common liquid chamber vibrated by the vibration membrane.

[0196] Aspect 2

[0197] According to aspect 2, in aspect 1, a flexible member (e.g., an elastic membrane 122 or 123) in a common liquid chamber (e.g., a common liquid chamber 3) has a first surface (e.g., a first surface 122-1 or 123-1) opposite to a plurality of nozzles (e.g., nozzle 2) and a second surface (e.g., a second surface 122-2 or 123-2) on the opposite side of the first surface, and at least the first surface is in contact with the liquid in the common liquid chamber.

[0198] Aspect 3

[0199] According to aspect 3, in aspect 2, the first surface (e.g., first surface 122-1 or 123-1) and the second surface (e.g., second surface 122-2 or 123-2) of the flexible member (e.g., elastic membrane 122 or 123) are in contact with the liquid in the common liquid chamber (e.g., common liquid chamber 3).

[0200] Aspect 4

[0201] According to aspect 4, in aspect 2, the first surface (e.g., first surface 122-1 or 123-1) of the flexible member (e.g., elastic membrane 122 or 123) is in contact with the liquid in the common liquid chamber (e.g., common liquid chamber 3), and the second surface (e.g., second surface 122-2 or 123-2) of the flexible member is in contact with the gas in the common liquid chamber.

[0202] Aspect 5

[0203] According to aspect 5, in any one of aspects 1 to 4, the flexible member (eg, elastic film 122 or 123) includes a resin film.

[0204] Aspect 6

[0205] According to aspect 6, in any one of aspects 1 to 4, the flexible member (eg, elastic film 122 or 123) includes a metal film.

[0206] Aspect 7

[0207] According to aspect 7, in any one of aspects 2 to 6, the flexible member (eg, elastic membrane 122 or 123) has a plurality of openings (eg, openings 123b) extending through a first surface (eg, first surface 123-1) and a second surface (eg, second surface 123-2).

[0208] Aspect 8

[0209] According to aspect 8, in any one of aspects 2 to 7, the flexible member (e.g., elastic membrane 122 or 123) has an air layer (e.g., a hollow portion 122a or 123a filled with air) between a first surface (e.g., first surface 122-1 or 123-1) and a second surface (e.g., second surface 122-2 or 123-2).

[0210] Aspect 9

[0211] According to aspect 9, in any one of aspects 2 to 8, the liquid discharge head (e.g., head 1) further includes a partition member (e.g., inner wall 4a of liquid chamber 4) on the side facing the first surface (e.g., first surface 122-1 or 123-1) of the flexible member (e.g., elastic film 122 or 123) to partition adjacent nozzles of the plurality of nozzles. When an end of the partition member on the side close to the first surface of the flexible member is set as the first end (e.g., first end 4a-1), the distance (e.g., distance L1 or L2) between the first surface of the flexible member and the first end of the partition member is in the range of 10 to 600 μm.

[0212] In other words, the liquid discharge head further includes a partition member that partitions the adjacent plurality of liquid chambers. The partition member has a first end facing the first surface of the flexible member and a second end connected to the vibration membrane. The distance between the first surface of the flexible member and the first end of the partition member is in the range of 10 to 600 μm.

[0213] Aspect 10

[0214] According to aspect 10, in any one of aspects 2 to 8, the liquid discharge head (e.g., head 1) further includes a partition member (e.g., inner wall 4a of liquid chamber 4) on one side of the first surface (e.g., first surface 122-1 or 123-1) facing the flexible member (e.g., elastic membrane 122 or 123) to separate adjacent nozzles of the plurality of nozzles. When the end of the partition member on the side close to the first surface of the flexible member is set as the first end (e.g., first end 4a-1), the first surface of the flexible member and the first end of the partition member are in contact, in other words, the liquid discharge head further includes a partition member that separates adjacent plurality of liquid chambers, the partition member having a first end facing the first surface of the flexible member and a second end connected to the vibration membrane, the first surface of the flexible member being in contact with the first end of the partition member.

[0215] The above embodiments are illustrative and do not limit the present invention. Therefore, according to the above teachings, many additional modifications and variations are possible. For example, within the scope of the present invention, the elements and / or features of different illustrative embodiments can be combined and / or replaced with each other.

[0216] This patent application is based on and claims the benefit of priority of Japanese Patent Application No. 2022-170924 filed with the Japan Patent Office on October 25, 2022, and the entire disclosure of which is incorporated herein by reference.

[0217] Reference numerals list

[0218] 1 Liquid discharge head

[0219] 2 Nozzles

[0220] 3 Common liquid chamber

[0221] 4 Liquid chamber

[0222] 4a Inner wall (an example of a partition member)

[0223] 5 Piezoelectric element (an example of a vibration generator)

[0224] 120 Frame

[0225] 121 Liquid supply port

[0226] 122, 123 Elastic membrane (an example of a flexible component)

Claims

1. A liquid discharge head comprising: A common liquid chamber for storing liquid, wherein the common liquid chamber has a plurality of liquid chambers interconnected through the common liquid chamber; A vibrating membrane having a plurality of nozzles respectively connected to the plurality of liquid chambers; a plurality of vibration generators, respectively vibrating the vibration membranes around the plurality of nozzles individually; and A flexible member is opposed to the plurality of nozzles in the common liquid chamber, and the flexible member can be deformed by the liquid in the common liquid chamber vibrated by the vibration film.

2. The liquid discharge head according to claim 1, in, The flexible member in the common liquid chamber has: a first surface opposite the plurality of nozzles; as well as a second surface opposite to the first surface, The first surface is in contact with the liquid in the common liquid chamber.

3. The liquid discharge head according to claim 2, in, The second surface of the flexible member is in contact with the liquid in the common liquid chamber.

4. The liquid discharge head according to claim 2, in, The second surface of the flexible member is in contact with the gas in the common liquid chamber.

5. The liquid discharge head according to any one of claims 1 to 4, in, The flexible member includes a resin film.

6. The liquid discharge head according to any one of claims 1 to 4, in, The flexible member includes a metal film.

7. The liquid discharge head according to any one of claims 2 to 6, in, The flexible member has a plurality of openings, each of which penetrates the flexible member.

8. The liquid discharge head according to any one of claims 2 to 7, in, The flexible member has an air layer between the first surface and the second surface.

9. The liquid discharge head according to any one of claims 2 to 8, further comprising a partition member for partitioning adjacent ones of the plurality of liquid chambers, in, The partition member has a first end facing the first surface of the flexible member and a second end connected to the vibration membrane, A distance between the first face of the flexible member and the first end of the partition component is in a range of 10 to 600 μm.

10. The liquid discharge head according to any one of claims 2 to 8, further comprising a partition member for partitioning adjacent ones of the plurality of liquid chambers, in, The partition member has a first end facing the first surface of the flexible member and a second end connected to the vibration membrane, The first surface of the flexible member is in contact with the first end of the partition component.

11. A liquid discharge device, comprising: A liquid discharge head according to any one of claims 1 to 10, for discharging the liquid to a recording medium; and A conveyor for conveying the recording medium to a position facing the liquid discharge head.

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