Lateral transfer robot

Abstract

The invention discloses a lateral transfer robot, and belongs to the technical field of semiconductor transfer. The lateral transfer robot comprises a movable chassis, a mounting base frame and a working unit, and the mounting base frame is arranged on the movable chassis; the working unit comprises a lifting mechanism, a rotating mechanism, a transverse moving mechanism, a telescopic mechanism and a material taking mechanism, the lifting mechanism is arranged on the mounting base frame, the rotating mechanism is arranged on the lifting mechanism and used for adjusting the angle of the material taking mechanism to enable the material taking mechanism to face the oven, and the transverse moving mechanism is arranged on the rotating mechanism and can move in the first direction; one end of the telescopic mechanism is connected with the transverse moving mechanism, the material taking mechanism is connected with the other end of the telescopic mechanism, the length of the telescopic mechanism can stretch out and retract in the second direction, the stretching length of the telescopic mechanism is not smaller than the depth of a heating cavity of the oven, and the material taking mechanism is used for grabbing a material frame in the oven. According to the invention, the material rack in the oven can be safely and rapidly carried, and collision is avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor handling, and in particular to a lateral handling robot. Background Art

[0002] With the rapid development of the semiconductor industry, the application of ovens is increasing day by day, and the problem of handling the racks inside the ovens is becoming increasingly prominent.

[0003] Currently, most of the racks are transported by manual trolleys, which not only consume time and effort, but also have low safety. There are problems with the parking accuracy (position and angle accuracy) of the trolleys themselves. Currently, the gaps on both sides between the racks inside the ovens and their heating cavities are too small, and there may be a risk of collision between the racks and the heating cavities of the ovens during manual handling.

[0004] Therefore, there is an urgent need to provide a lateral handling robot to solve the above problems. Summary of the Invention

[0005] The purpose of the present invention is to provide a lateral handling robot that can safely and quickly handle the racks inside the ovens and eliminate the risk of collision.

[0006] To achieve the above purpose, the following technical solutions are provided:

[0007] The lateral handling robot includes:

[0008] A mobile chassis that can walk to the opening of the oven;

[0009] An installation base frame provided on the mobile chassis;

[0010] A working unit including a lifting mechanism, a slewing mechanism, a transverse movement mechanism, a telescopic mechanism, and a material taking mechanism. The lifting mechanism is provided on the installation base frame and is used to adjust the height of the material taking mechanism. The slewing mechanism is provided on the lifting mechanism and is used to adjust the angle of the material taking mechanism so that the material taking mechanism faces the oven. The transverse movement mechanism is provided on the slewing mechanism and can move along a first direction. One end of the telescopic mechanism is connected to the transverse movement mechanism, and the material taking mechanism is connected to the other end of the telescopic mechanism. The length of the telescopic mechanism can extend and retract along a second direction, and the extended length of the telescopic mechanism is not less than the depth of the heating cavity of the oven. The material taking mechanism is used to grab the racks inside the oven.

[0011] As an alternative solution of the lateral handling robot, the lifting mechanism includes:

[0012] A height adjustment plate fixedly provided on the installation base frame;

[0013] A lead screw rotatably provided on the height adjustment plate and extending along a third direction;

[0014] Lifting plate, one end of the lifting plate is in threaded driving connection with the lead screw and can move along the third direction.

[0015] As an alternative solution for the side handling robot, the lifting mechanism includes:

[0016] First driving module, the fixed end of the first driving module is arranged on the height adjusting plate, and the output end of the first driving module is in driving connection with the lead screw.

[0017] As an alternative solution for the side handling robot, the lifting mechanism further includes:

[0018] First guiding member, the first guiding member is fixedly arranged on the mounting base frame and extends along the third direction;

[0019] Second guiding member, the second guiding member is fixedly connected with the lifting plate, and the second guiding member is slidably connected with the first guiding member.

[0020] As an alternative solution for the side handling robot, the slewing mechanism includes:

[0021] Adapter plate, fixedly arranged on the lifting plate;

[0022] Second driving module, the second driving module is installed on the adapter plate;

[0023] Angle adjusting plate, the transverse movement mechanism is arranged on the upper end surface of the angle adjusting plate, and the lower end surface of the angle adjusting plate is rotatably connected with the adapter plate;

[0024] Toothed ring, the toothed ring is fixedly arranged on the lower end surface of the angle adjusting plate, and the toothed ring is in meshing transmission with the driving wheel of the second driving module.

[0025] As an alternative solution for the side handling robot, the transverse movement mechanism includes:

[0026] Third driving module, the fixed end of the third driving module is arranged on the angle adjusting plate;

[0027] Transverse movement adjusting plate, the transverse movement adjusting plate is arranged on the angle adjusting plate and is in driving connection with the output end of the third driving module, the third driving module is used to drive the transverse movement adjusting plate to move along the first direction, and one end of the telescopic mechanism is connected with the transverse movement adjusting plate.

[0028] As an alternative solution for the side handling robot, the transverse movement mechanism further includes:

[0029] The third guiding member is disposed on a side of the angle adjusting plate close to the transverse movement adjusting plate, and the third guiding member extends along a first direction;

[0030] The fourth guiding member is disposed on a side of the transverse movement adjusting plate close to the angle adjusting plate, and the fourth guiding member is slidably connected to the third guiding member.

[0031] As an alternative to the side handling robot, at least two laser distance sensors are disposed on a side of the angle adjusting plate close to the material taking mechanism, and the laser distance sensors are used to detect the distance between the side handling robot and the oven; and / or,

[0032] A camera sensor is disposed on a side of the angle adjusting plate close to the material taking mechanism.

[0033] As an alternative to the side handling robot, the material taking mechanism includes:

[0034] A rack tray, which is fixedly connected to the other end of the telescopic mechanism,

[0035] A plurality of tapered positioning pins are arranged on the rack tray at intervals, and the plurality of tapered positioning pins are arranged in one-to-one correspondence with a plurality of positioning grooves of the rack.

[0036] As an alternative to the side handling robot, the installation base frame includes a first side protection beam, a transverse connecting beam and a second side protection beam. The first side protection beam and the second side protection beam are respectively disposed at two ends of the transverse connecting beam. The length of the first side protection beam along a third direction is greater than the length of the second side protection beam along the third direction, and the lifting mechanism is disposed on the first side protection beam.

[0037] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0038] For the side handling robot provided by the present invention, the installation substrate assembled with the working unit is located on the mobile chassis, and the mobile chassis can load the working unit and move it to the opening of the oven. The lifting mechanism of the working unit can adjust the height of the material taking mechanism, which is convenient for the material taking mechanism to grasp racks at different heights and is applicable to ovens with multiple heating cavities. When the material taking mechanism on the mobile chassis is not directly facing the oven, the material taking mechanism can be made to face the oven under the adjustment of the slewing mechanism. By adding a transverse movement mechanism, the position of the material taking mechanism in the first direction can be finely adjusted, improving the parking accuracy of the side handling robot. After the lifting mechanism, the slewing mechanism and the transverse movement mechanism of the side handling robot are adjusted, the telescopic mechanism can take out the rack from the heating cavity of the oven or put the rack into the heating cavity of the oven by changing its own length, which can not only eliminate the risk of collision, but also safely and quickly transport the rack. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments of the present invention. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the content of the embodiments of the present invention and these drawings.

[0040] Figure 1 It is a schematic structural diagram of the side handling robot around the oven in the embodiment of the present invention;

[0041] Figure 2 It is an assembly schematic diagram of the side handling robot in the embodiment of the present invention;

[0042] Figure 3 It is a first perspective assembly schematic diagram of the mounting base frame, lifting mechanism and partial slewing mechanism in the embodiment of the present invention;

[0043] Figure 4 It is a second perspective assembly schematic diagram of the mounting base frame, lifting mechanism and partial slewing mechanism in the embodiment of the present invention;

[0044] Figure 5 It is an exploded schematic diagram of the slewing mechanism, transverse movement mechanism, telescopic mechanism and telescopic mechanism in the embodiment of the present invention.

[0045] Reference numerals:

[0046] 100, side handling robot; 200, oven; 201, heating chamber;

[0047] 1, mobile chassis; 2, mounting base frame; 3, lifting mechanism; 4, slewing mechanism; 5, transverse movement mechanism; 6, telescopic mechanism; 7, material handling mechanism; 8, laser distance sensor; 9, camera sensor;

[0048] 21, first side protection beam; 22, transverse connecting beam; 23, second side protection beam;

[0049] 31, height adjustment plate; 32, lead screw; 33, lifting disc; 34, first drive module; 35, first guide; 36, second guide;

[0050] 41, second drive module; 411, drive wheel; 42, angle adjustment plate; 43, gear ring; 44, adapter plate;

[0051] 51, third drive module; 52, transverse movement adjustment plate; 53, third guide; 54, fourth guide;

[0052] 71, material rack tray; 72, conical positioning pin. Detailed implementation manners

[0053] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Apparently, the described embodiments are some but not all of the embodiments of the present invention. Generally, the components of the embodiments of the present invention described and illustrated herein can be arranged and designed in various different configurations.

[0054] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of the invention is usually placed during use. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and cannot be understood as indicating or implying relative importance. In the description of the present invention, unless otherwise specified, the meaning of "a plurality" is two or more.

[0055] In the description of the present invention, it should also be noted that unless otherwise clearly defined and limited, the terms "arranged" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0056] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions from beginning to end. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation of the present invention.

[0057] In order to be able to safely and quickly carry the rack in the oven and eliminate the risk of collision, this embodiment provides a lateral handling robot. The following combines Figures 1 to 5 to describe the specific content of this embodiment in detail. It should be noted that the first direction mentioned in this embodiment is the X direction in the figure, the second direction mentioned in this embodiment is the Y direction in the figure, and the third direction mentioned in this embodiment is the Z direction in the figure.

[0058] In this embodiment, the lateral handling robot 100 includes a mobile chassis 1, a mounting frame 2, and a working unit. The mobile chassis 1 can travel to the opening of the oven 200. The mobile chassis 1 is additionally provided with electric outriggers, and the addition of electric outriggers can be used to improve the stability of the whole vehicle for lateral loading and unloading of racks. The mounting frame 2 is arranged on the mobile chassis 1. The working unit includes a lifting mechanism 3, a slewing mechanism 4, a transverse movement mechanism 5, a telescopic mechanism 6, and a rack-taking mechanism 7. The lifting mechanism 3 is arranged on the mounting frame 2 and is used to adjust the height of the rack-taking mechanism 7. The slewing mechanism 4 is arranged on the lifting mechanism 3 and is used to adjust the angle of the rack-taking mechanism 7 so that the rack-taking mechanism 7 faces the oven 200. The transverse movement mechanism 5 is arranged on the slewing mechanism 4 and can move along the first direction. One end of the telescopic mechanism 6 is connected to the transverse movement mechanism 5, and the rack-taking mechanism 7 is connected to the other end of the telescopic mechanism 6. The length of the telescopic mechanism 6 can extend and retract along the second direction, and the extended length of the telescopic mechanism 6 is not less than the depth of the heating chamber 201 of the oven 200. The rack-taking mechanism 7 is used to grasp the rack in the oven 200. Optionally, the mobile chassis 1 can be an AGV cart, the full name is Automated Guided Vehicle, that is, an automatic guided vehicle, which is a transport vehicle equipped with automatic guiding devices such as electromagnetic or optical devices, can travel along a specified guiding path, and has safety protection and various loading and unloading functions. Further, electric outriggers are arranged at the bottom of the mobile chassis 1, and the electric outriggers can extend and retract. By installing the electric outriggers, the stability of the whole vehicle during lateral loading and unloading can be enhanced.

[0059] In short, for the lateral handling robot 100 provided in this embodiment, the mounting substrate assembled with the working unit is located on the mobile chassis 1, and the mobile chassis 1 can load the working unit and move to the opening of the oven 200. The lifting mechanism 3 of the working unit can adjust the height of the rack-taking mechanism 7, which is convenient for the rack-taking mechanism 7 to grasp racks at different heights and is applicable to ovens 200 with multiple heating chambers 201. When the rack-taking mechanism 7 on the mobile chassis 1 is not directly facing the oven 200, the rack-taking mechanism 7 can be made to face the oven 200 under the adjustment of the slewing mechanism 4. By adding the transverse movement mechanism 5, the position of the rack-taking mechanism 7 in the first direction can be finely adjusted, improving the parking accuracy of the lateral handling robot 100. After the lifting mechanism 3, the slewing mechanism 4, and the transverse movement mechanism 5 of the lateral handling robot 100 are adjusted, the telescopic mechanism 6 can take out the rack from the heating chamber 201 of the oven 200 or put the rack into the heating chamber 201 of the oven 200 by changing its own length, which can not only eliminate the risk of collision but also safely and quickly transport the rack.

[0060] Furthermore, the lifting mechanism 3 includes a height adjustment plate 31, a lead screw 32 and a lifting plate 33. The height adjustment plate 31 is fixedly arranged on the mounting base 2. The lead screw 32 is rotatably arranged on the height adjustment plate 31 and extends along the third direction. One end of the lifting plate 33 is threadedly connected to the lead screw 32 and can move along the third direction. Since the lead screw 32 is threadedly connected to the lifting plate 33, the lifting plate 33 can be lifted and lowered along the third direction by driving the lead screw 32 to rotate.

[0061] Furthermore, the lifting mechanism 3 includes a first driving module 34, a fixed end of the first driving module 34 is arranged on the height adjustment plate 31, and an output end of the first driving module 34 is transmission-connected with the lead screw 32. In this embodiment, the first driving module 34 is a servo motor, and the first driving module 34 and the lead screw 32 complete the power transmission through the transmission belt.

[0062] Furthermore, the lifting mechanism 3 further includes a first guide member 35 and a second guide member 36, wherein the first guide member 35 is fixedly disposed on the mounting base 2 and extends along the third direction, the second guide member 36 is fixedly connected to the lifting plate 33, and the second guide member 36 is slidably connected to the first guide member 35. The first guide member 35 and the second guide member 36 may be a slide rail and a slider, and by adding the first guide member 35 and the second guide member 36, the lifting plate 33 may be guided to move only along the third direction relative to the height adjustment plate 31.

[0063] Furthermore, the slewing mechanism 4 includes an adapter plate 44, a second driving module 41, an angle adjustment plate 42 and a gear ring 43, the adapter plate 44 is fixedly arranged on the lifting plate 33, the second driving module 41 is installed on the adapter plate 44, the transverse mechanism 5 is arranged on the upper end surface of the angle adjustment plate 42, the lower end surface of the angle adjustment plate 42 is rotatably connected with the adapter plate 44, the gear ring 43 is fixedly arranged on the lower end surface of the angle adjustment plate 42, and the gear ring 43 is meshed with the driving wheel 411 of the second driving module 41. By driving the driving wheel 411 to rotate through the second driving module 41, the gear ring 43, the angle adjustment plate 42, the transverse mechanism 5, the telescopic mechanism 6 and the material taking mechanism 7 can be rotated together within a certain angle range, thereby ensuring that the material taking mechanism 7 can face the box opening of the oven 200.

[0064] Further, the transverse movement mechanism 5 includes a third driving module 51 and a transverse movement adjusting plate 52. The fixed end of the third driving module 51 is arranged on the angle adjusting plate 42. The transverse movement adjusting plate 52 is arranged on the angle adjusting plate 42 and is in transmission connection with the output end of the third driving module 51. The third driving module 51 is used to drive the transverse movement adjusting plate 52 to move along the first direction. One end of the telescopic mechanism 6 is connected to the transverse movement adjusting plate 52. When the mobile chassis 1 moves to the position around the oven 200, the third driving module 51 drives the transverse movement adjusting plate 52 to make a fine adjustment along the first direction, which helps to improve the parking accuracy of the side handling robot 100. When there are multiple heating chambers 201 arranged along the first direction in the oven 200, the material taking and placing mechanism 7 can take and place the material racks between the multiple heating chambers 201, improving the application range of the side handling robot 100.

[0065] Further, the transverse movement mechanism 5 further includes a third guiding member 53 and a fourth guiding member 54. The third guiding member 53 is arranged on the side of the angle adjusting plate 42 close to the transverse movement adjusting plate 52, and the third guiding member 53 extends along the first direction. The fourth guiding member 54 is arranged on the side of the transverse movement adjusting plate 52 close to the angle adjusting plate 42, and the fourth guiding member 54 is slidably connected to the third guiding member 53. By adding the third guiding member 53 and the fourth guiding member 54, the transverse movement adjusting plate 52 can be guided to move only along the first direction relative to the angle adjusting plate 42.

[0066] Further, at least two laser ranging sensors 8 are arranged on the side of the angle adjusting plate 42 close to the material taking and placing mechanism 7. The laser ranging sensors 8 are used to detect the distance between the side handling robot 100 and the oven 200; and / or a camera sensor 9 is arranged on the side of the angle adjusting plate 42 close to the material taking and placing mechanism 7. The specific angle deviation value of the mobile chassis 1 is calculated through the distance deviation feedback by the two laser ranging sensors 8, and then this deviation is eliminated by rotating the angle adjusting plate 42 of the slewing mechanism 4. After measuring the displacement deviation by taking a picture of the oven 200 through the camera sensor 9, this deviation is corrected by the transverse movement mechanism 5.

[0067] Exemplarily, the material taking and placing mechanism 7 includes a material rack tray 71 and a plurality of conical positioning pins 72. The material rack tray 71 is fixedly connected to the other end of the telescopic mechanism 6. The plurality of conical positioning pins 72 are arranged on the material rack tray 71 at intervals, and the plurality of conical positioning pins 72 are arranged in one-to-one correspondence with the plurality of positioning grooves of the material rack. By arranging the conical positioning pins 72 on the material rack tray 71, after the conical positioning pins 72 are inserted into the positioning grooves at the bottom of the material rack, the stability of the material rack on the material rack tray 71 is improved, avoiding falling.

[0068] Furthermore, the installation base frame 2 includes a first side protection beam 21, a transverse connecting beam 22, and a second side protection beam 23. The first side protection beam 21 and the second side protection beam 23 are respectively arranged at both ends of the transverse connecting beam 22. The length of the first side protection beam 21 along the third direction is greater than the length of the second side protection beam 23 along the third direction. The lifting mechanism 3 is arranged on the first side protection beam 21. The control module of the lateral handling robot 100 is arranged on the first side protection beam 21. The mobile chassis 1, the laser ranging sensor 8, the camera sensor 9, the first driving module 34, the second driving module 41, and the third driving module 51 are all electrically connected to the control module.

[0069] Note that the above is only the preferred embodiment of the present invention and the applied technical principle. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described here. Various obvious changes, re-adjustments, and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Without departing from the concept of the present invention, more other equivalent embodiments can be included, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A lateral handling robot, characterized in that: include: The movable chassis (1) is capable of moving to the oven opening of the oven (200); A mounting base (2) is arranged on the mobile chassis (1); The working unit comprises a lifting mechanism (3), a rotating mechanism (4), a transverse mechanism (5), a telescopic mechanism (6) and a material picking mechanism (7); the lifting mechanism (3) is arranged on the mounting base (2) and is used to adjust the height of the material picking mechanism (7); the rotating mechanism (4) is arranged on the lifting mechanism (3) and is used to adjust the angle of the material picking mechanism (7) so that the material picking mechanism (7) faces the oven (200); the transverse mechanism (5) is arranged on the rotating mechanism (4) and can move along a first direction; one end of the telescopic mechanism (6) is connected to the transverse mechanism (5); the material picking mechanism (7) is connected to the other end of the telescopic mechanism (6); the length of the telescopic mechanism (6) can be extended and retracted along a second direction; the extended length of the telescopic mechanism (6) is not less than the depth of the heating chamber (201) of the oven (200); and the material picking mechanism (7) is used to grab the material rack in the oven (200).

2. The lateral handling robot according to claim 1, characterized in that: The lifting mechanism (3) comprises: A height adjustment plate (31), wherein the height adjustment plate (31) is fixedly arranged on the mounting base (2); A lead screw (32), the lead screw (32) being rotatably disposed on the height adjustment plate (31) and extending along a third direction; A lifting plate (33), one end of which is threadedly connected to the lead screw (32) and is movable along the third direction.

3. The lateral handling robot according to claim 2, characterized in that: The lifting mechanism (3) comprises: A first driving module (34), wherein a fixed end of the first driving module (34) is arranged on the height adjustment plate (31), and an output end of the first driving module (34) is drivingly connected to the lead screw (32).

4. The lateral handling robot according to claim 2, characterized in that: The lifting mechanism (3) further comprises: A first guide member (35), the first guide member (35) being fixedly disposed on the mounting base (2) and extending along the third direction; A second guide member (36), wherein the second guide member (36) is fixedly connected to the lifting plate (33), and the second guide member (36) is slidably connected to the first guide member (35).

5. The lateral handling robot according to claim 2, characterized in that: The rotary mechanism (4) comprises: An adapter plate (44) is fixedly arranged on the lifting plate (33); A second driving module (41), the second driving module (41) being mounted on the adapter plate (44); An angle adjustment plate (42), the transverse movement mechanism (5) is arranged on the upper end surface of the angle adjustment plate (42), and the lower end surface of the angle adjustment plate (42) is rotatably connected to the adapter plate (44); A gear ring (43), wherein the gear ring (43) is fixedly arranged on the lower end surface of the angle adjustment plate (42), and the gear ring (43) is meshed with the driving wheel (411) of the second driving module (41) for transmission.

6. The lateral handling robot according to claim 5, characterized in that: The transverse movement mechanism (5) comprises: A third driving module (51), wherein a fixed end of the third driving module (51) is arranged on the angle adjustment plate (42); A transverse adjustment plate (52), wherein the transverse adjustment plate (52) is arranged on the angle adjustment plate (42) and is drivingly connected to the output end of the third driving module (51), the third driving module (51) is used to drive the transverse adjustment plate (52) to move along the first direction, and one end of the telescopic mechanism (6) is connected to the transverse adjustment plate (52).

7. The lateral handling robot according to claim 6, characterized in that: The transverse movement mechanism (5) further comprises: A third guide member (53), the third guide member (53) being arranged on a side of the angle adjustment plate (42) close to the transverse adjustment plate (52), and the third guide member (53) extending along the first direction; A fourth guide member (54), wherein the fourth guide member (54) is arranged on a side of the transverse adjustment plate (52) close to the angle adjustment plate (42), and the fourth guide member (54) is slidably connected to the third guide member (53).

8. The lateral handling robot according to claim 6, characterized in that: At least two laser distance measuring sensors (8) are arranged on a side of the angle adjustment plate (42) close to the material taking mechanism (7), and the laser distance measuring sensors (8) are used to detect the distance between the lateral transfer robot (100) and the oven (200); and / or, A camera sensor (9) is provided on one side of the angle adjustment plate (42) close to the material taking mechanism (7).

9. The lateral handling robot according to any one of claims 1 to 8, characterized in that: The material taking mechanism (7) comprises: a material rack tray (71), wherein the material rack tray (71) is fixedly connected to the other end of the telescopic mechanism (6), A plurality of conical positioning pins (72) are arranged at intervals on the material rack tray (71), and the plurality of conical positioning pins (72) are arranged in one-to-one correspondence with the plurality of positioning grooves of the material rack.

10. The lateral transfer robot according to claim 9, characterized in that: The mounting base (2) comprises a first side protection beam (21), a transverse connecting beam (22) and a second side protection beam (23); the first side protection beam (21) and the second side protection beam (23) are respectively arranged at two ends of the transverse connecting beam (22); the length of the first side protection beam (21) along a third direction is greater than the length of the second side protection beam (23) along the third direction; and the lifting mechanism (3) is arranged on the first side protection beam (21).

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