Nano-composite coating material for secondary battery electrode manufacturing equipment roller and preparation system of nano-composite coating material

Abstract

The invention provides a nano composite coating material for a secondary battery electrode manufacturing equipment roller and a preparation system of the nano composite coating material. The purpose of the present invention is to provide a novel coating material which is applied to a base material and has heat resistance, adhesion resistance, durability, chemical resistance, friction resistance, and mold release properties, and a method and system for producing the coating material. The present invention relates to a nano-composite coating material, and more particularly, to a nano-composite coating material for a ternary system, which is applied to a base material and contains C-F-H or C-F-Si, and to a method for producing a nano-composite coating material containing C-F-H or C-F-Si.

Description

Technical Field

[0001] The present invention relates to a nano-composite coating material for a roll of a secondary battery electrode manufacturing device and a preparation system thereof.

[0002] This application claims the priority of Korean Patent Application No. 10-2023-0167831, filed with the Korean Intellectual Property Office on November 28, 2023, the disclosure of which is incorporated herein by reference. Background Art

[0003] Internal combustion engine components such as rolls, dies, ejector pins of dies, pistons, tappets, cylinder heads, shafts, and motor components require anti-adhesion properties. In particular, for dies, when removing a product after high-temperature melting and solidification, the product should be separated from the inner surface of the die without adhesion. Internal combustion engine components are also components that are rubbed at a relatively high temperature, so they need a surface with high-temperature anti-adhesion properties, and motor components also need high-temperature anti-adhesion properties due to frictional heat. In addition, large rolls used in secondary battery electrode manufacturing equipment roll substances in a slurry form, and in this case, durability, chemical resistance, low friction, mold release, anti-adhesion, and heat resistance are required.

[0004] In order to have the above-described properties, Korean Patent No. 10-1709538 proposed a method of coating a diamond-like carbon (DLC) on the surface of a roll. However, since DLC has weak heat resistance, it is difficult to apply to hot-rolling rolls, so there is a need to provide a better coating material that satisfies the above properties.

[0005] In addition, the rolls used in secondary battery electrode manufacturing equipment are large rolls weighing 5 tons, and different from coating small components, there are technical difficulties in achieving uniform coating over a large area. Summary of the Invention

[0006] An object of the present invention is to provide a new coating material having heat resistance, anti-adhesion, durability, chemical resistance, low friction, and mold release properties, and to provide a preparation method and a preparation system for such a coating material.

[0007] According to the above object, the present invention provides a ternary nanocomposite coating material containing C-F-Si or C-F-H.

[0008] That is, the present invention provides a coating material for a roll of a secondary battery electrode manufacturing apparatus. As the coating material for a roll of a secondary battery electrode manufacturing apparatus, it is characterized in that it includes a ternary nano-composite coating layer of C-F-H. The ternary nano-composite coating layer is formed by additionally supplying reducing hydrogen in addition to supplying C component and F component during the formation process. In the coating layer, the F component is 0 at% to 20 at%, and it is a gradient coating layer in which the F component contained is more on the surface side, has a contact angle of more than 90°, and has a high hardness characteristic of 17 GPa to 27 GPa.

[0009] In addition, the present invention provides a coating material for a roll of a secondary battery electrode manufacturing apparatus. As the coating material for a roll of a secondary battery electrode manufacturing apparatus, it is characterized in that it includes a ternary nano-composite coating layer of C-F-Si. The ternary nano-composite coating layer is formed by additionally supplying reducing hydrogen in addition to supplying C component, F component, and Si component during the formation process. In the coating layer, the F component is 0 at% to 20 at%, and it is a gradient coating layer in which the F component contained is more on the surface side, has a contact angle of more than 90°, and has a high hardness characteristic of 17 GPa to 27 GPa.

[0010] In addition, the present invention provides a coating system capable of uniformly coating a large area. For this purpose, it includes: a large chamber in which a base material (coated object) is loaded; an ion source applied to the chamber; a raw material supply unit that supplies C, F, Si or C, F, H as raw materials to the ion source respectively, wherein a ternary nano-composite coating material including C-F-Si or C-F-H is coated on the base material by a chemical vapor deposition (CVD) process.

[0011] In the above, in order to uniformly coat a large area in the large chamber, it is necessary to form a high-density plasma. Therefore, permanent magnets or electromagnets are arranged in the ion source to form a magnetic field, so that the plasma is concentrated in a predetermined space.

[0012] In the above, in order to strongly direct the generated plasma and electrons to the base material side, it includes a power supply device that applies a high bias voltage of 50 V to 500 V to the base material.

[0013] In the above, the fixture for fixing the base material is configured to be rotatable so as to rotate during the coating process.

[0014] In the above, before coating the ternary nano-composite material on the surface of the base material, in order to form a Cr-based buffer layer, a cylindrical sputtering device including a Cr cylindrical target is installed in the above chamber.

[0015] In addition, the present invention provides a method for forming a ternary nanocomposite coating material containing C-F-Si or C-F-H using the coating system, and the method is provided as follows: supplying a hydrocarbon gas, an F gas, and SiH 4 , Si 2 H 6 or SiH 2 Cl 2 or more than one of them to the raw material supply part of the ion source, additionally supplying hydrogen gas (H 2 ) to form a reducing atmosphere, applying a power of 500 V to 2000 V and 0.3 A to 1.8 A to the ion source, and applying a bias voltage of 50 V to 500 V to the base material to form a ternary nanocomposite coating material containing C-F-Si.

[0016] In addition, the present invention provides a method for a ternary nanocomposite coating material as follows: supplying a hydrocarbon gas and an F gas to the raw material supply part of the ion source, additionally supplying hydrogen gas (H 2 ) to further form a reducing atmosphere, applying a power of 500 V to 2000 V and 0.3 A to 1.8 A to the ion source, and applying a bias voltage of 50 V to 500 V to the jig fixing the base material, thereby forming a ternary nanocomposite coating material containing C-F-H.

[0017] In the above, before forming the ternary nanocomposite coating material, plasma cleaning is performed on the base material, an inert gas (such as Ar) is introduced into the raw material supply part of the ion source, a power of 500 V to 2000 V and 0.3 A to 1.8 A is applied to the ion source, and a bias voltage of 50 V to 500 V is applied to the base material.

[0018] In the above, after plasma cleaning and before forming the ternary nanocomposite coating material, a Cr-based buffer layer is formed using a sputtering device including a Cr cylindrical target, a power of 5 A to 20 A and 300 V to 1000 V is applied to the sputtering device, a bias voltage of 80 V to 500 V is applied to the base material, and the process is carried out with the flow of an inert gas and / or nitrogen gas (N 2 ).

[0019] In the above, the plasma cleaning is carried out for 30 minutes to 300 minutes, the buffer layer forming process is carried out for 40 minutes to 200 minutes, and the ternary nanocomposite coating material forming process is carried out for 240 minutes to 780 minutes.

[0020] In the above, the closer the ternary nanocomposite coating material is to the surface side, the higher the content of the F component, thereby enhancing the mold release property and the adhesion resistance.

[0021] The buffer layer is formed with Cr / CrN / CrN 2 / CrN2 Gradient layer of (N component increased) / CrCH

[0022] The ternary nanocomposite coating material containing C-F-Si according to the present invention exhibits a high hardness characteristic of 17 GPa to 27 GPa, the bonding strength of the coating material is more than 20 N, so the durability is excellent, and it exhibits a low friction coefficient of 0.12 or less and a contact angle of more than 90°, so the adhesion resistance, mold release property and chemical resistance are excellent.

[0023] That is, according to the present invention, a ternary nanocomposite coating material is formed on the surface of a base material, and a continuous process can be carried out without maintenance for a long time, thereby improving the productivity of in-line type manufacturing equipment.

[0024] In addition, the ternary nanocomposite coating material according to the present invention exhibits a resistance of 10 5 Ω to 10 8 Ω, thereby preventing the generation of static electricity and arcs during operation or rest, and preventing the adhesion of foreign substances.

[0025] In addition, in the ternary nanocomposite coating material preparation system according to the present invention, defects on the surface of the coating material caused by the generation of arcs, which are problems in existing ion sources, will not occur, so the surface roughness of the product is good and the quality is improved. Brief Description of the Drawings

[0026] Figure 1 It is a layered sectional view showing the structure of the ternary nanocomposite coating material according to the present invention.

[0027] Figure 2 It is a schematic diagram explaining the functionality of the ternary nanocomposite coating material according to the present invention according to the constituent elements.

[0028] Figure 3 It is a diagram and a photograph showing the structure of the ternary nanocomposite coating material preparation system according to the present invention and the high-density plasma generated therefrom.

[0029] Figure 4 It is a photograph showing the problems occurring on the surface of a roller as a base material of the prior art.

[0030] Figure 5 It is a photograph and a schematic diagram showing the structure of the preparation system for simultaneously manufacturing a buffer layer and a ternary nanocomposite coating material according to the present invention.

[0031] Figure 6 The length of the functional surface Lf and the total length Lt of the roller are shown as an example of the roller using the coating material of the present invention.

[0032] Description of Reference Numerals DETAILED DESCRIPTION

[0033] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0034] Nanocomposite coating material of the present invention can present adhesion resistance, heat resistance, chemical resistance, demoulding property, low friction and durability, can be applied to roller, mould, demoulding pin, internal combustion engine parts (piston, tappet, cylinder head, shaft etc.), motor parts, secondary battery manufacturing equipment roller etc.If the above-mentioned physical property is needed, then nanocomposite coating material of the present invention can be applied to multiple articles.In the following embodiments, the secondary battery manufacturing equipment roller is especially described in detail, but when the same coating technology is also applied to other articles of mould etc. as parent material, it is undoubtedly easy technology for those skilled in the art to replace parent material.

[0035] The rollers used in the secondary battery manufacturing equipment include cold rolling rollers, hot rolling rollers and guide rollers. In the equipment for manufacturing electrodes by continuously processing electrode materials using rollers, the durability, adhesion resistance, heat resistance, chemical resistance, demoulding and low friction of the rollers directly affect the maintenance cycle and also affect the performance of the electrode as the final product. Therefore, the physical properties of the rollers as described above ultimately lead to competitive battery prices.

[0036] like Figure 4 As shown in the figure, the existing roller surface is corroded, the relevant material is adhered, and the products produced by this also have wear marks. Figure 1 As shown, the present invention proposes a ternary nanocomposite coating material containing CF—Si as a coating material having enhanced properties compared to conventional nitride-based coating materials. Figure 1 It is a cross-sectional view showing that a buffer layer 2 is formed on a base material 1 and a ternary nanocomposite coating material is formed as a top layer 3 on the buffer layer.

[0037] That is, Figure 2 As shown, a ternary nanocomposite coating material is designed. The ternary nanocomposite coating material is based on a C component that can exhibit high hardness, low friction and chemical resistance, and contains an F component that can enhance mold release, adhesion resistance and corrosion resistance, and an Si component that can enhance amorphousness, heat resistance and corrosion resistance.

[0038] The roller before coating is originally mostly composed of chromium steel. In order to enhance the adhesion of the nano-composite coating material of the present invention, it is beneficial to form a Cr-based buffer layer. The buffer layer includes one or more of Cr, CrN, and Cr-N-C. As long as the base material contains chromium steel, such a buffer layer structure can also be applied to all other articles (such as internal combustion engine components, motor components, stamping dies, die-casting dies, and die components such as ejector pins).

[0039] Preferably, the buffer layer is formed with a thickness of 20 nm to 200 nm, and the ternary nano-composite coating material containing C-F-Si is formed with a thickness of 1 μm to 5 μm.

[0040] For the formation of such a nano-composite coating material for the roller of a secondary battery manufacturing device, since the size of the roller itself is large, a large-scale preparation system is required. As the manufacturing equipment including the chamber becomes larger, a solution for forming a uniform coating over a large area is needed. In addition to the roller of the secondary battery manufacturing device, large-scale dies or rollers also require uniform coating over a large area. For small components such as internal combustion engine components or ejector pins, due to the large quantity loaded, there is also a requirement for uniform coating over a large area.

[0041] Figure 3 Describe a preparation system for a ternary nano-composite coating material for the roller of a secondary battery manufacturing device according to the present invention.

[0042] The roller 20 with a weight of about 5 tons includes a roller with an intermediate functional surface Lf and a shaft extending from its central part to both ends. The chamber 10 that can accommodate a roller with a total length Lt of about 3 m is also enlarged. In order to reduce the manufacturing cost by forming a coating layer on multiple products through one-time coating, a larger chamber is preferably used. Figure 6 The length of the functional surface Lf and the total length Lt of the roller are shown as examples of the roller to which the coating material of the present invention is applied. The length of the functional surface Lf of the roller 20 is 100 - 2500 mm, and the total length Lt is 100 - 3800 mm. The present invention can form a large-area uniform coating layer on the above-mentioned super-large roller 20.

[0043] Both axial ends of the roller are fixed to a rotatable fixture 500. The fixture is composed of a conductor and also has an electrical connection part capable of applying a strong bias voltage to the roller.

[0044] Since the weight of the roller is about 5 tons, it is more stable to support both ends of the shaft on the bottom and top surfaces of the chamber than to support both ends of the shaft in the air. That is, the jigs are arranged on the bottom and top surfaces of the chamber, the rollers are vertically arranged, and rotated by a rotary jig 500 in the process. This fixing structure of the base material is also applied to rolls and dies. In addition, small components are radially fixed to a large rotary jig, and the jig includes components such as buckles.

[0045] As a unit for forming a C-F-Si ternary system nano-composite coating material in a large chamber, an ion source 150 is installed, preferably a linear ion source. A raw material supply unit 100 for the reaction gas to be supplied to the ion source is configured, and a chemical vapor deposition (CVD) process is implemented to ionize the reaction gas, and electrons of the generated ions generate a plasma, thereby forming a coating layer on the surface of the roller. Although it will be described later, in addition to the ion source 150, a sputtering source is added (refer to Figure 5 )

[0046] The chamber space is wide, and ternary system cations are dispersed and generated. If the generated plasma does not have a high density, it is difficult to effectively form a uniform coating layer over a large area. Accordingly, in the present invention, an ion induction device 200 for arranging magnets in the ion source is configured to confine the plasma in a predetermined space by electromagnetic force, thereby achieving high density. The arrangement of the magnets can be a permanent magnet and / or an electromagnet. Preferably, permanent magnets are arranged to generate a constant magnetic force and prevent heat generation. However, it can be configured using an electromagnet, and the electromagnet and the permanent magnet are arranged overlappingly together, and the electromagnet is used to supplement the magnetic field generated by the permanent magnet. That is, in a coating system in which permanent magnets are arranged, in order to analyze the density of the plasma or adjust the plasma distribution by observing the sample coating result, the magnetic field can be supplemented by driving an electromagnet whose position can change the magnetic force. The generated ions and plasma form a low-density plasma region 300 in the initial stage of generation, and a high-density plasma region 400 is formed by the ion induction device 200.

[0047] In addition, since it is necessary to strongly direct the high-density plasma toward the base material roller side, a bias voltage is applied to the base material roller side, and at this time, a very high power bias is applied. In this embodiment, as shown in Table 1, the bias voltage applied to the roller is 50 V to 500 V, and a bias current of 0.3 A to 1.5 A flows. For small base materials other than the roller, a bias voltage is applied to the jig. In the case where the die is the base material, a bias voltage is applied to the die through the die itself or a die fixing member.

[0048] Table 1

[0049] Figure 3A photograph showing the behavior of high-density plasma generated by a magnetic field and a strong bias voltage is illustrated at the upper right end. Even in a wide space within a large chamber, the plasma does not disperse but concentrates in the space where the coating layer is to be formed, thereby forming the coating layer with high energy and a strong gravitational force.

[0050] In addition, as described above, a buffer layer is formed to firmly adhere the ternary nano-composite coating material to the base material, and accordingly, a buffer layer forming system is added. That is, as Figure 5 shown, a sputtering source (sputtering device) 160 is additionally installed in the chamber in addition to the ion source 150. To form a Cr-based buffer layer, a cylindrical sputtering source with a Cr cylindrical target is installed in the chamber.

[0051] The ion source and the sputtering source are respectively arranged in pairs at both ends of the chamber with the base material as the center. Such an arrangement of the ion source and the sputtering source is conducive to forming a uniform coating layer on the roller rotating in the center.

[0052] The preparation process of the ternary nano-composite coating material using the coating system is as follows (refer to Table 1).

[0053] First, the surface of the base material is subjected to plasma cleaning. The inside of the chamber is evacuated so that the process start pressure is 10 -6 torr to 10 -5 torr, preferably 7.0×10 -5 torr or less, and then an inert gas such as Ar is supplied to the chamber at an operating pressure of 8 mtorr to 20 mtorr, and the ion source is driven to clean for 30 minutes to 300 minutes. The voltage applied to the ion source is 500 V to 2000 V, the current is 0.3 A to 1.8 A, the bias voltage applied to the roller is 50 kHz to 150 kHz, 50 V to 500 V, and a bias current of 0.3 A to 1.5 A flows.

[0054] After the plasma cleaning is completed, the sputtering source and the ion source are simultaneously driven to form a Cr-based buffer layer. A bias voltage is applied to the Cr cylindrical target to make an inert gas such as Ar and / or nitrogen (N 2 ) flow, and a power of 300 V to 1000 V and 5 A to 20 A is applied to the sputtering source to form the buffer layer for 40 minutes to 200 minutes. The process temperature is room temperature. The components of the buffer layer can be one or more of Cr, CrN, and Cr-N-C.

[0055] During the initial stage of 20 to 30 minutes for forming the buffer layer, an inert gas such as Ar is supplied to the chamber at an operating pressure of 8 mtorr to 20 mtorr, and a bias voltage of 50 kHz to 150 kHz and 80 V to 500 V and a bias current of 0.5 A to 2 A are applied to the roller to form a Cr layer (the first gradient layer). Then, while maintaining the sputtering source power and the roller bias power, Ar, N 2 , reducing H 2 gas is supplied to the chamber at an operating pressure of 8 mtorr to 20 mtorr, and it is divided into three intervals with each interval being 10 to 30 minutes, the nitrogen supply ratio is increased, and CrN (the second gradient layer), CrN 2 (the third gradient layer), CrN 2 (the fourth gradient layer) are formed as the nitriding and solidifying layer. Then, within 10 to 20 minutes, while maintaining the sputtering source power and the roller bias power, Ar, N 2 , carbon (C), H 2 are supplied, thereby forming a CrCH carbonitriding and solidifying layer as the fifth gradient layer. The carbon source can be a hydrocarbon gas. The buffer layer formed in this way has a thickness of 0.3 μm to 1.0 μm and enhances the adhesion strength and impact resistance.

[0056] Then, the ternary system nano-composite coating material of the present invention is formed.

[0057] Supply one or more of a hydrocarbon gas, CF 4 gas, tetramethylsilane (TMS: Tetramethylsilane), SiH 4 , Si 2 H 6 or SiH 2 Cl 2 to the raw material supply part of the ion source, and in order to form a reducing atmosphere, additional hydrogen (H 2 ) is supplied, a power of 500 V to 2000 V and 0.3 A to 1.8 A is applied to the ion source, and a bias voltage of 50 kHz to 150 kHz and 50 V to 500 V and a bias current of 0.3 A to 1.5 A are applied to the base material to form a ternary system nano-composite coating material containing C-F-Si. Although hydrogen is supplied by the hydrocarbon gas, in the present invention, hydrogen (H 2 ) is supplied separately to further enhance the reducing atmosphere.

[0058] In the formation of the ternary nano-composite coating material as the top coating layer, hydrocarbons, reducing hydrogen, and TMS are supplied for the initial 240 minutes to 780 minutes to form a high-density, high-hardness, wear-resistant nano-substrate coating layer based on CH as the first top coating layer. For the subsequent 240 to 780 minutes, hydrocarbons, CF 4 , reducing hydrogen, and TMS are supplied to form an interfacial continuous layer for the nano-composite carbon containing CFH and the anti-adhesion functional layer as the second top coating layer. Then, during 30 minutes to 180 minutes, hydrocarbons, CF 4 , reducing hydrogen, and TMS are supplied, and the supply ratio of CF 4 is further increased to form an FCH coating layer as the third top coating layer, thereby enhancing the anti-adhesion property of the roller surface. That is, the closer the top coating layer is to the surface side, the more the F component increases, thereby enhancing the anti-adhesion property of the base material surface. When forming the third top coating layer, it is necessary to control the arc discharge of the driving part to avoid damaging the demouldability. The total thickness of the top coating layer is 1 μm to 3 μm. The process temperature is room temperature.

[0059] In addition, when forming the top coating layer, in addition to Si, C-F-H can also form a ternary nano-composite coating material. That is, if necessary, it can be composed of a C-F-H composite coating material. In this case, the required demouldability and high hardness can also be presented. When Si is included, it is more beneficial to improve the low friction property, so the composition of the coating material can be selected according to the required physical property specifications.

[0060] The supply amount of the reactants is controlled so that the composition ratio of F and Si in the ternary nano-composite coating layer of C-F-H or the ternary nano-composite coating layer of C-F-Si is 0 at% to 20 at%. The composition ratio of F is preferably 0.1 at% to 20 at%.

[0061] Since the process temperature is at the room temperature level, there is almost no restriction on the type of the base material.

[0062] By implementing such a process, a ternary nano-composite coating layer with a total thickness of 1 μm to 5 μm including a buffer layer is formed.

[0063] The physical properties of the ternary nano-composite coating layer formed in this way are shown in Table 2.

[0064] Table 2

[0065] The ternary nano-composite coating material containing C-F-Si according to the present invention exhibits a high hardness characteristic of 17 GPa to 27 GPa, the bonding strength of the coating material shows more than 20 N, so the durability is excellent, and it shows a low friction coefficient of 0.12 or less, and shows a contact angle of more than 90°, so the adhesion resistance, release property and chemical resistance are excellent. Compared with the existing nitride-based coating materials, more excellent characteristics are obtained.

[0066] In particular, since the coating material has a contact angle of more than 90°, in the rolling process of the roller, the relevant materials will not be adhered, nor will other contaminants adhere.

[0067] In addition, the resistance of the ternary nano-composite coating material of the present invention is 1×10 5 Ω to 9.9×10 8 Ω, showing a resistance value sufficient to have an anti-static function and a function of preventing foreign matter adhesion in the device. The base materials such as rollers coated with the nano-composite coating material of the present invention not only have a release property during operation, but also have the above-mentioned resistance value during the rest period, thus preventing the generation of static electricity, the generation of arcs, and the adhesion of foreign matter.

[0068] That is, according to the present invention, a ternary nano-composite coating material is formed on the surface of a base material such as a roller, so that a continuous process can be carried out without maintenance for a long time, thereby improving the productivity of the on-line system of the secondary battery manufacturing equipment.

[0069] Unless otherwise defined in the above matters, all technical terms and scientific terms used in this specification have the same meaning as those generally understood by a person skilled in the technical field to which the present invention belongs. In addition, terms defined in commonly used dictionaries shall not be construed ideally or excessively as long as they are not clearly and specifically defined. Throughout the specification, when referring to a certain part "including" a certain component, unless there is a particularly contrary record, it means that other components can also be included, rather than excluding other components. In addition, according to the context, a singular expression form may include a plural expression form.

[0070] And, in this specification, "above, on or over...", "below" or "under..." means located above or below the object part, and does not necessarily mean located on the upper side or the lower side based on the direction of gravity.

[0071] The rights of the present invention are not limited to the embodiments described above, but are defined by the content recorded in the claims. It is obvious that those with general knowledge in the technical field to which the present invention belongs can make various deformations and fabrications within the scope of the rights recorded in the claims.

[0072] Information on the national research and development project supporting this invention is as follows.

[0073] Subject unique number: 020142225 Task number: 20142225 Department name: Small and Medium-sized Venture Business Department Subject management (specialty) organization name: Start-up Promotion Agency, KOREA UNIVERSITY Sejong Industry-Academia Collaboration Center Research project name: 2023 Innovation Field Start-up Package (Cultivating New Industry Start-ups) Research object name: Technology upgrade service for improving the competitiveness of secondary battery manufacturing through a large-area nanocomposite plasma deposition system and coating process technology Subject executing organization name: Innosung Technology Co., Ltd. Research period: April 27, 2023 to December 1, 2023

Claims

1. A coating material for a roller of a secondary battery electrode manufacturing equipment, characterized in that: Including CFH ternary nanocomposite coating, The ternary nanocomposite coating layer is formed by supplying reducing hydrogen in addition to the C component and the F component during the formation process. The F component in the coating layer is 0at% to 20at%, and the coating layer is a gradient coating layer in which the F component is more toward the surface side. It has a contact angle of more than 90° and a high hardness of 17GPa to 27GPa.

2. The coating material for a roller of a secondary battery electrode manufacturing equipment according to claim 1, characterized in that: Also includes: The buffer layer includes a Cr layer, a CrN layer, a CrN2 layer, and a CrCH layer in sequence between the ternary nanocomposite coating layer and the base material.

3. The coating material for a roller of a secondary battery electrode manufacturing equipment according to claim 1, characterized in that: The coating material for a secondary battery electrode manufacturing equipment roller has a low friction coefficient of 0.12 or less and a bonding force of the coating material of 20N or more.

4. The coating material for a roller of a secondary battery electrode manufacturing equipment according to claim 1, characterized in that: Secondary battery electrode manufacturing equipment roller with coating material has 1×10 6 ×10 8 resistance.

5. A coating material for a roller of a secondary battery electrode manufacturing equipment, characterized in that: Including CF-Si ternary nanocomposite coating layer, The ternary nanocomposite coating layer is formed by supplying reducing hydrogen in addition to the C component, the F component and the Si component during the formation process. The F component in the coating layer is 0at% to 20at%, and the coating layer is a gradient coating layer in which the F component is more toward the surface side. It has a contact angle of more than 90° and a high hardness of 17GPa to 27GPa.

6. The coating material for a roller of a secondary battery electrode manufacturing equipment according to claim 5, characterized in that: Also includes: The buffer layer includes a Cr layer, a CrN layer, a CrN2 layer, and a CrCH layer in sequence between the ternary nanocomposite coating layer and the base material.

7. The coating material for a roller of a secondary battery electrode manufacturing equipment according to claim 5, characterized in that: The coating material for a secondary battery electrode manufacturing equipment roller has a low friction coefficient of 0.12 or less and a bonding force of the coating material of 20N or more.

8. The coating material for a roller of a secondary battery electrode manufacturing equipment according to claim 5, characterized in that: Secondary battery electrode manufacturing equipment roller with coating material has 1×10 6 ×10 8 resistance.

9. A nanocomposite coating material preparation system, as a ternary nanocomposite coating material preparation system containing CFH or CF-Si for use in secondary battery electrode manufacturing equipment rollers, characterized in that: include: Large chamber, to hold more than one parent material; an ion source, applied to the chamber; The sputtering source includes a Cr target to form a Cr buffer layer before coating the ternary nanocomposite coating material on the surface of the base material; a raw material supplying part, supplying C, F and H or C, F and Si as raw materials to the ion source; and Power supply unit, The power supply device applies a bias voltage of 50V to 500V to the base material in order to guide the generated plasma and electrons to the base material side. The ion source includes permanent magnets or electromagnets arranged to form a high-density plasma. The sputtering source is used to form a buffer layer including a Cr layer, a CrN layer, a CrN2 layer, and a CrCH layer in sequence on the base material. A ternary nanocomposite coating layer of CFH is formed on the buffer layer by supplying hydrocarbon, CF4, and reducing hydrogen as raw materials to an ion source, or a ternary nanocomposite coating layer of CF-Si is formed on the buffer layer by supplying hydrocarbon, CF4, reducing hydrogen, and Si as supply sources to an ion source and supplying one or more of tetramethylsilane, SiH4, Si2H6, or SiH2Cl2 as raw materials, The nanocomposite coating layer is formed as a gradient coating layer in which the F component contained increases toward the surface side.

10. The nanocomposite coating material preparation system according to claim 9, characterized in that: In order to uniformly coat the surface of the base material in a large chamber, permanent magnets or electromagnets are arranged in the ion source to form a magnetic field, and plasma is concentrated in a predetermined space to form high-density plasma.

11. The system for preparing nanocomposite coating materials according to claim 9, characterized in that: The invention comprises a fixture for fixing the parent material, the fixture is rotatably constructed, and rotates the parent material during the coating process.

12. The system for preparing nanocomposite coating materials according to claim 10, characterized in that: The permanent magnets and electromagnets are arranged at the same time and a magnetic field is formed by the permanent magnets. The electromagnets located at predetermined positions are selectively driven to supplement the magnetic field formed by the permanent magnets with the electromagnets.

13. A method for forming a nanocomposite coating material, as a method for forming a ternary nanocomposite coating material containing CFH using the nanocomposite coating material preparation system according to claim 9, characterized in that: Before forming the ternary nanocomposite coating material, a voltage of 300V to 1000V is applied to a sputtering source including a Cr target, a bias voltage of 80V to 500V is applied to a base material, and a sputtering process is performed by flowing one or more of an inert gas and nitrogen gas, thereby forming a Cr buffer layer; In the process of forming the Cr-based buffer layer, a gradient layer is formed by supplying only an inert gas at the initial stage to form a Cr layer, then supplying an inert gas, nitrogen and reducing hydrogen to form a CrN layer, and increasing the nitrogen supply ratio to form a nitrided solidified layer in which the N component is strengthened, and in the final step of forming the buffer layer, supplying an inert gas, nitrogen, reducing hydrogen and hydrocarbon to form a carbonitrided solidified layer of CrCH; Supplying hydrocarbon gas, CF4 gas and reducing hydrogen gas to the raw material supply part of the ion source; A voltage of 500 V to 2000 V is applied to the ion source, a bias voltage of 50 V to 500 V is applied to the base material to form a ternary nanocomposite coating material containing CFH, and a supply ratio of CF4 gas is gradually increased to a raw material supply part of the ion source to form a gradient layer with an increased F component near the surface side of the ternary nanocomposite coating material; In the process of forming the nanocomposite coating material, hydrocarbons and reducing hydrogen are initially supplied to form a CH-based high-density, high-hardness, wear-resistant nanomatrix coating layer as a first top coating layer; Then, hydrocarbon, CF4 gas and reducing hydrogen are supplied to form an interface continuous layer for forming a nano-composite carbon containing CFH and an anti-adhesion functional layer as a second top coating layer; Thereafter, hydrocarbon, CF4, and reducing hydrogen are supplied, and the supply ratio of CF4 is increased to form an FCH coating layer as a third top coating layer, thereby enhancing the adhesion resistance of the base material surface.

14. The method for forming a nanocomposite coating material according to claim 13, wherein: Before forming the buffer layer, the base material is plasma cleaned, the voltage applied to the ion source is 500V to 2000V, the current is 0.3A to 1.8A, and the bias voltage applied to the base material is 50khz to 150khz and 50V to 500V.

15. A method for forming a nanocomposite coating material, as a method for forming a ternary nanocomposite coating material containing CF-Si using the nanocomposite coating material preparation system according to claim 9, characterized in that: Before forming the ternary nanocomposite coating material, a voltage of 300V to 1000V is applied to a sputtering source including a Cr target, a bias voltage of 80V to 500V is applied to a base material, and a sputtering process is performed by flowing one or more of an inert gas and nitrogen gas, thereby forming a Cr buffer layer; In the process of forming the Cr-based buffer layer, a gradient layer is formed by supplying only an inert gas at the initial stage to form a Cr layer, then supplying an inert gas, nitrogen and reducing hydrogen to form a CrN layer, and increasing the nitrogen supply ratio to form a nitrided solidified layer in which the N component is strengthened, and in the final step of forming the buffer layer, supplying an inert gas, nitrogen, reducing hydrogen and hydrocarbon to form a carbonitrided solidified layer of CrCH; Supplying hydrocarbon gas, CF4 gas and one or more of tetramethylsilane, SiH4, Si2H6 or SiH2Cl2 to the raw material supply part of the ion source, and additionally supplying hydrogen gas; A voltage of 500 V to 2000 V is applied to the ion source, a bias voltage of 50 V to 500 V is applied to the base material to form a ternary nanocomposite coating material containing CF-Si, and a supply ratio of CF4 gas is gradually increased to a raw material supply part of the ion source to form a gradient layer with an increased F component near the surface side of the ternary nanocomposite coating material; In the process of forming the nanocomposite coating material, a high-density, high-hardness, wear-resistant nano-matrix coating layer is formed as a first top coating layer by initially supplying hydrocarbons and one or more of tetramethylsilane, SiH4, Si2H6 or SiH2Cl2 and reducing hydrogen; Then, supplying hydrocarbon, CF4 gas, and one or more of tetramethylsilane, SiH4, Si2H6 or SiH2Cl2 and reducing hydrogen gas to form an interface continuous layer for forming a nano-composite carbon and an anti-adhesion functional layer as a second top coating layer; Thereafter, hydrocarbon, CF4, and one or more of tetramethylsilane, SiH4, Si2H6 or SiH2Cl2 and reducing hydrogen are supplied, and the supply ratio of CF4 is increased to form a third top coating layer, thereby enhancing the adhesion resistance of the base material surface.

16. The method for forming a nanocomposite coating material according to claim 15, characterized in that: Before forming the buffer layer, the base material is plasma cleaned, the voltage applied to the ion source is 500V to 2000V, the current is 0.3A to 1.8A, and the bias voltage applied to the base material is 50khz to 150khz and 50V to 500V.

Images