Contact type leveling and zeroing system based on force feedback, control method and terminal

Abstract

According to the force feedback-based contact type leveling and zeroing system, the control method and the terminal provided by the invention, based on the contact pressure data between the first plane and the second plane detected by the force sensor in real time, the movement of the multi-axis mobile station is controlled to adjust the relative position between the first plane and the second plane; and the first plane and the second plane are leveled and zeroed, and the deviation between the leveled three-dimensional plane coordinate system and the leveled three-dimensional moving system coordinate system is obtained. According to the invention, only one force sensor is used, leveling and zeroing can be realized by combining touch signal sensing and mobile system adjustment, and the device has the advantages of simple structure and low price. According to the invention, the coordinate deviation between the leveling plane and the mobile system can be obtained, and the precise displacement between the two planes can be controlled by using the movement of the mobile station through the deviation. And leveling and zeroing can be carried out on a plane with an extremely small area and a plane with a large area.

Description

Technical Field

[0001] The present invention relates to the field of precision equipment leveling and zeroing, and particularly to a contact leveling and zeroing system based on force feedback, a control method, and a terminal. Background Art

[0002] In precision equipment, especially in the semiconductor field, it is necessary to perform parallel adjustment and zero adjustment on two planes (wafer). The purpose is to adjust the two planes to be absolutely parallel and obtain the distance between the two parallel planes. These two indicators determine the accuracy of subsequent processes, such as polishing, lithography, etc. In the conventional leveling and zeroing design, multiple lasers, capacitive rangefinders, etc. are generally used for multi-point leveling and position acquisition to obtain the spatial positions of the two planes. Multiple sensors are not only expensive but also make the structure appear bloated. Moreover, these methods cannot perform leveling and zeroing on planes with smaller sizes. In addition, after the plane is leveled and zeroed, the coordinates between the planes are not consistent with the coordinates of the movement system. Therefore, the accurate movement value between the planes cannot be obtained by movement. Summary of the Invention

[0003] In view of the above-mentioned disadvantages of the prior art, the purpose of the present invention is to provide a contact leveling and zeroing system based on force feedback, a control method, and a terminal to solve the above-mentioned prior art problems.

[0004] To achieve the above and other related purposes, the present invention provides a contact leveling and zeroing system based on force feedback, including a first plane to be adjusted, a second plane, a force sensor, a multi-axis moving stage, and a control device; wherein, the first plane is disposed on the force sensor, and the second plane is disposed opposite to the first plane; the force sensor is installed on the multi-axis moving stage; the force sensor is used for real-time detecting the contact pressure data between the first plane and the second plane; the multi-axis moving stage is used for adjusting the relative position between the first plane and the second plane disposed on the force sensor by moving in the moving system coordinate system; the control device is connected to the force sensor and the multi-axis moving stage, and is used for controlling the multi-axis moving stage to move and adjust the relative position between the first plane and the second plane based on the contact pressure data detected by the force sensor in real time until the leveling and zeroing operations of the first plane and the second plane are completed, and obtaining the deviation between the three-dimensional plane coordinate system after leveling and the three-dimensional moving system coordinate system.

[0005] In an embodiment of the present invention, the control device includes: a parallel adjustment control unit, configured to perform parallel adjustment control on the multi-axis moving stage based on the contact pressure data real-time feedback by the force sensor, so as to adjust the first plane and the second plane to be parallel; a zero-point adjustment control unit, connected to the parallel adjustment control unit, configured to perform zero-point adjustment control on the multi-axis moving stage after parallel adjustment based on the contact pressure data real-time feedback by the force sensor, so as to adjust the first plane and the second plane to the zero point; a coordinate system deviation calculation control unit, connected to the zero-point adjustment control unit, configured to perform coordinate system deviation calculation control on the multi-axis moving stage after zero-point adjustment control based on the contact pressure data real-time feedback by the force sensor, so as to obtain the deviation angle between the plane coordinate system and the moving system coordinate system.

[0006] In an embodiment of the present invention, the multi-axis moving stage can perform moving operations along the X-axis, Y-axis, and Z-axis directions that are perpendicular to each other in the moving system coordinate system respectively, and can perform rotation operations around at least the X-axis and the Y-axis.

[0007] In an embodiment of the present invention, performing parallel adjustment control on the multi-axis moving stage based on the contact pressure data real-time feedback by the force sensor includes: controlling the multi-axis moving stage to perform a moving operation along the Z-axis direction of the moving system coordinate system to drive the first plane to move towards the second plane until the contact pressure data received from the force sensor is the first standard value, and then controlling the multi-axis moving stage to stop moving; based on the contact pressure data real-time feedback by the force sensor and the first standard value, performing a first leveling control operation and a second leveling control operation on the multi-axis moving stage respectively corresponding to two target axes, so as to adjust the first plane and the second plane to be parallel in the plane formed by the X-axis and the Z-axis and in the plane formed by the Y-axis and the Z-axis; the two target axes include: the X-axis and the Y-axis of the moving system coordinate system.

[0008] In an embodiment of the present invention, the first leveling control operation includes: taking a target axis as the current target axis and performing a first control operation on the multi-axis moving stage for the current target axis; wherein, the first control operation includes: controlling the multi-axis moving stage to rotate forward by a preset small value around the current target axis, and if the contact pressure data currently feedback by the force sensor is greater than a first standard value, then controlling the multi-axis moving stage to rotate reversely around the current target axis; if the contact pressure data feedback by the force sensor continuously decreases during the reverse rotation, then perform a second control operation; wherein, the second control operation includes: controlling the multi-axis moving stage to rotate reversely around the current target axis until the contact pressure data feedback by the force sensor is a second standard value, and controlling the multi-axis moving stage to perform a moving operation along the Z-axis direction of the moving system coordinate system to drive the first plane to move towards the second plane until the contact pressure data feedback by the force sensor is the first standard value, then controlling the multi-axis moving stage to stop moving and re-performing the first control operation; wherein, the second standard value is greater than or equal to 0 and less than the first standard value. If the contact pressure data feedback by the force sensor first decreases and then increases during the reverse rotation, and the minimum force value is the parallel position of the target axis, then stop controlling the multi-axis moving stage to move, and subsequently perform a second leveling control operation for the corresponding other target axis; the second leveling control operation includes: taking the other target axis as the current target axis and performing the first control operation on the multi-axis moving stage for the current target axis; if the contact pressure data feedback by the force sensor continuously decreases during the reverse rotation, then perform the second control operation; if the contact pressure data feedback by the force sensor first decreases and then increases during the reverse rotation, and the minimum force value is the parallel position of the target axis, then stop controlling the multi-axis moving stage to move, and finally complete the parallel adjustment between the first plane and the second plane.

[0009] In an embodiment of the present invention, based on the contact pressure data continuously feedback by the force sensor, zero adjustment control is performed on the multi-axis moving stage after parallel adjustment to adjust the first plane and the second plane to zero, including: controlling the multi-axis moving stage to perform a moving operation along the Z-axis direction of the moving system coordinate system to drive the first plane to move towards the second plane parallel to it until the multi-axis moving stage is controlled to stop moving when the contact pressure data received from the force sensor is 0, so as to complete zero adjustment.

[0010] In an embodiment of the present invention, based on the contact pressure data fed back by the force sensor in real time, coordinate system deviation calculation control is performed on the multi-axis moving stage after zero adjustment control to obtain the deviation angle between the plane coordinate system and the moving system coordinate system, including: controlling the multi-axis moving stage to perform a moving operation along the Z-axis direction of the moving system coordinate system to drive the distance between the first plane and the second plane parallel to it to be a first set distance; controlling the multi-axis moving stage to perform a moving operation along a target axis, and when the contact pressure data received from the force sensor is greater than 0, controlling the multi-axis moving stage to stop moving, and calculating the angle between the leveled plane coordinate system and the moving stage coordinate system on the target plane corresponding to the target axis based on the moving distance and the first set distance; controlling the multi-axis moving stage to perform a moving operation along the Z-axis direction of the moving system coordinate system to drive the distance between the first plane and the second plane parallel to it to be a first set distance; controlling the multi-axis moving stage to perform a moving operation along another target axis, and when the contact pressure data received from the force sensor is greater than 0, controlling the multi-axis moving stage to stop moving, and calculating the angle between the leveled plane coordinate system and the moving stage coordinate system on the target plane corresponding to the target axis based on the moving distance and the first set distance; wherein, when the target axis is the X-axis, the corresponding target plane is the plane formed by the Y-axis and the Z-axis; when the target axis is the Y-axis, the corresponding target plane is the plane formed by the X-axis and the Z-axis.

[0011] In an embodiment of the present invention, the types of the force sensors include: single-axis force sensors, three-axis force sensors, and six-axis force sensors.

[0012] To achieve the above object and other related objects, the present invention provides a contact type leveling and zeroing control method based on force feedback, which is applied to a contact type leveling and zeroing system based on force feedback, including: a first plane and a second plane to be adjusted arranged opposite to each other, a multi-axis moving stage, and a force sensor arranged on the multi-axis moving stage and having the first plane thereon. The method includes: based on the contact pressure data between the first plane and the second plane detected by the force sensor in real time, controlling the multi-axis moving stage to move to adjust the relative position between the first plane and the second plane until the leveling and zeroing operations of the first plane and the second plane are completed, and obtaining the deviation between the leveled three-dimensional plane coordinate system and the three-dimensional moving system coordinate system.

[0013] To achieve the above object and other related objects, the present invention provides a contact type leveling and zeroing control terminal based on force feedback, including: one or more memories and one or more processors; the one or more memories are used to store computer programs; the one or more processors are connected to the memories and are used to run the computer programs to execute the above method.

[0014] As described above, the present invention is a contact leveling and zeroing system, a control method, and a terminal based on force feedback, having the following beneficial effects: By using the contact pressure data between the first plane and the second plane detected in real time by the force sensor, the present invention controls the movement of the multi-axis moving stage to adjust the relative position between the first plane and the second plane until the leveling and zeroing operations of the first plane and the second plane are completed, and obtains the deviation between the three-dimensional plane coordinate system after leveling and the three-dimensional moving system coordinate system. The present invention uses only one force sensor, and can achieve leveling and zeroing through touch signal sensing and combined with the adjustment of the moving system, having the advantages of simple structure and low cost. The present invention can also obtain the coordinate deviation between the leveling plane and the moving system, and can control the precise displacement between the two planes by using the movement of the moving stage. And leveling and zeroing can be performed for both extremely small-area planes and large-area planes. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It shows a schematic structural diagram of a contact leveling and zeroing system based on force feedback in an embodiment of the present invention.

[0016] Figure 2 It shows a schematic structural diagram of a control device in an embodiment of the present invention.

[0017] Figure 3 A shows a schematic diagram of the initial state of a contact leveling and zeroing system based on force feedback in an embodiment of the present invention.

[0018] Figure 3 B shows a schematic diagram of controlling the moving stage to rotate forward around the Y axis in an embodiment of the present invention.

[0019] Figure 3 C shows a schematic diagram of controlling the moving stage to rotate reversely around the Y axis until the force is 0 in an embodiment of the present invention.

[0020] Figure 3 D shows a schematic diagram of the parallel state of two planes in an embodiment of the present invention.

[0021] Figure 3 E shows a schematic diagram of controlling the moving stage to separate the two planes by dz along the Z axis of the moving stage coordinate in an embodiment of the present invention.

[0022] Figure 3 F shows a schematic diagram of controlling the moving stage to translate by a distance of dx along the X axis of the moving stage coordinate in an embodiment of the present invention.

[0023] Figure 4 It shows a schematic structural diagram of a Faraday 3D printer in an embodiment of the present invention.

[0024] Figure 5It shows a schematic structural diagram of a Faraday 3D printer in an embodiment of the present invention.

[0025] Figure 6 It shows a schematic flow diagram of a force-feedback-based contact leveling and zeroing control method in an embodiment of the present invention.

[0026] Figure 7 It shows a schematic structural diagram of a force-feedback-based contact leveling and zeroing control terminal in an embodiment of the present invention. Detailed implementation manners

[0027] The following uses specific specific examples to illustrate the implementation manners of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0028] It should be noted that in the following description, reference is made to the accompanying drawings, which describe several embodiments of the present invention. It should be understood that other embodiments can also be used, and mechanical composition, structure, electrical, and operational changes can be made without departing from the spirit and scope of the present invention. The following detailed description should not be considered restrictive, and the scope of the embodiments of the present invention is only defined by the claims of the published patent. The terms used here are only for describing specific embodiments and are not intended to limit the present invention. Spatially related terms, such as "upper", "lower", "left", "right", "below", "beneath", "lower part", "above", "upper part", etc., can be used in the text to facilitate the description of the relationship between one element or feature shown in the figure and another element or feature.

[0029] Throughout the specification, when it is said that a part is "connected" to another part, this includes not only the case of "direct connection", but also the case of "indirect connection" where other elements are placed in between. Additionally, when it is said that a certain part "includes" a certain constituent element, unless there is a particularly contrary record, it does not exclude other constituent elements, but means that other constituent elements can also be included.

[0030] The first, second, and third terms mentioned therein are used to describe various parts, components, regions, layers, and / or segments, but are not limited thereto. These terms are only used to distinguish one part, component, region, layer, or segment from other parts, components, regions, layers, or segments. Therefore, the first part, component, region, layer, or segment described below can refer to the second part, component, region, layer, or segment without exceeding the scope of the present invention.

[0031] Furthermore, as used herein, the singular forms "a", "an", and "the" are intended to also include the plural forms unless the context clearly dictates otherwise. It should be further understood that the terms "comprises" and "comprising" specify the presence of the stated features, operations, elements, components, items, kinds, and / or groups, but do not preclude the presence, occurrence, or addition of one or more other features, operations, elements, components, items, kinds, and / or groups. The terms "or" and "and / or" used herein are to be construed as inclusive, meaning either or any combination. Thus, "A, B, or C" or "A, B, and / or C" means "any of the following: A; B; C; A and B; A and C; B and C; A, B, and C". Exceptions to this definition occur only when the combination of elements, functions, or operations is inherently mutually exclusive in some manner.

[0032] A contact leveling and zeroing system based on force feedback according to the present invention controls the movement of a multi-axis moving stage to adjust the relative position between a first plane and a second plane based on the contact pressure data between the first plane and the second plane detected in real time by the force sensor until the leveling and zeroing operations of the first plane and the second plane are completed, and obtains the deviation between the three-dimensional plane coordinate system after leveling and the three-dimensional moving system coordinate system. The present invention uses only one force sensor, and can achieve leveling and zeroing through touch signal sensing combined with the adjustment of the moving system, having the advantages of simple structure and low cost. The present invention can also obtain the coordinate deviation between the leveling plane and the moving system, and can control the precise displacement between the two planes by using the movement of the moving stage. And leveling and zeroing can be performed on both extremely small-area planes and large-area planes.

[0033] The following will describe in detail the embodiments of the present invention with reference to the accompanying drawings so that those skilled in the technical field of the present invention can easily implement it. The present invention can be embodied in many different forms and is not limited to the embodiments described herein.

[0034] As Figure 1 shows a schematic structural diagram of a contact leveling and zeroing system based on force feedback in an embodiment of the present invention.

[0035] The system includes: a first plane 1 and a second plane 2 to be adjusted, a force sensor 3, a multi-axis moving stage 4, and a control device 5;

[0036] Wherein, the first plane 1 is disposed on the force sensor 3, and the second plane 1 is disposed opposite to the first plane 1; the force sensor 3 is installed on the multi-axis moving stage 1;

[0037] The first plane 1 and the second plane 2 to be adjusted can be the plate-like structure itself or the two planes of the oppositely arranged plate-like structures, and the materials used can be metals, organic materials, semiconductors, silicon wafers, etc.

[0038] The force sensor 3 uses a pressure sensor to detect the contact pressure data between the first plane 1 and the second plane 2 in real time, so as to detect the contact information between the first plane 1 and the second plane 2.

[0039] The multi-axis moving stage 4 is used to adjust the relative position between the first plane 1 and the second plane 2 arranged on the force sensor 3 by moving in the moving system coordinate system;

[0040] The control device 4 is connected to the force sensor 3 and the multi-axis moving stage 4, and is used to control the movement of the multi-axis moving stage 4 based on the contact pressure data detected by the force sensor 3 in real time to adjust the relative position between the first plane 1 and the second plane 2 until the leveling and zeroing operations of the first plane 1 and the second plane 2 are completed, and the deviation between the three-dimensional plane coordinate system after leveling and the three-dimensional moving system coordinate system is obtained.

[0041] In one embodiment, the types of the force sensor 3 include: a single-axis force sensor, a three-axis force sensor, and a six-axis force sensor.

[0042] In one embodiment, the three-dimensional moving system coordinate system has mutually perpendicular X-axis, Y-axis, and Z-axis; the first plane and the second plane also correspond to a three-dimensional plane coordinate system with mutually perpendicular X-axis, Y-axis, and Z-axis;

[0043] The multi-axis moving stage 5 can perform moving operations along the mutually perpendicular X-axis, Y-axis, and Z-axis directions in the moving system coordinate system and can perform rotation operations around at least the X-axis and the Y-axis.

[0044] In one embodiment, as Figure 2 shown, the control device 5 includes:

[0045] The parallel adjustment control unit 51 is used to perform parallel adjustment control on the multi-axis moving stage 4 based on the contact pressure data real-time feedback by the force sensor 3, so as to adjust the first plane and the second plane to be parallel;

[0046] The zero-point adjustment control unit 52 is connected to the parallel adjustment control unit 51 and is used to perform zero-point adjustment control on the multi-axis moving stage after parallel adjustment based on the contact pressure data real-time feedback by the force sensor 3, so as to adjust the first plane 1 and the second plane 2 adjusted to be parallel to the zero point;

[0047] The coordinate system deviation calculation and control unit 53, connected to the zero-point adjustment control unit 52, performs coordinate system deviation calculation and control on the multi-axis moving stage 4 after zero-point adjustment based on the contact pressure data real-time feedback by the force sensor 3, so as to obtain the deviation angle between the plane coordinate system and the moving system coordinate system.

[0048] In a specific embodiment, the performing parallel adjustment control on the multi-axis moving stage 4 based on the contact pressure data real-time feedback by the force sensor 3 includes:

[0049] Controlling the multi-axis moving stage 4 to perform a moving operation along the Z-axis direction of the moving system coordinate system to drive the first plane 1 to move towards the second plane 2 until the contact pressure data received from the force sensor 3 is a first standard value, and then controlling the multi-axis moving stage 4 to stop moving; specifically, if the positive direction of the Z-axis of the moving system coordinate system is the vertical direction where the force sensor is arranged on the multi-axis moving stage 4, then controlling the multi-axis moving stage 4 to perform a moving operation along the positive direction of the Z-axis of the moving system coordinate system to drive the first plane 1 to move towards the second plane 2; at this time, the force sensor 3 detects the contact pressure data of the two planes in contact, and on this basis, continue to move until a force sensor 3 reaches a set first standard value F0, and this value is used as the standard signal for leveling and zeroing; it should be noted that the first standard value F0 can be set according to requirements.

[0050] Based on the contact pressure data real-time feedback by the force sensor and the first standard value, perform a first leveling control operation and a second leveling control operation on the multi-axis moving stage respectively corresponding to two target axes, so as to adjust the first plane and the second plane to be parallel in the plane formed by the X-axis and the Z-axis and in the plane formed by the Y-axis and the Z-axis; the two target axes include: the X-axis and the Y-axis of the moving system coordinate system.

[0051] In a specific embodiment, the first leveling control operation includes:

[0052] Taking a target axis as the current target axis, perform a first control operation on the multi-axis moving stage 4 corresponding to a target axis (X-axis / Y-axis); wherein, the first control operation includes: controlling the multi-axis moving stage 4 to rotate forward by a preset small value around the current target axis, and if the contact pressure data currently feedback by the force sensor 3 is greater than the first standard value F0, then controlling the multi-axis moving stage 4 to rotate reversely around the current target axis;

[0053] If the contact pressure data feedback by the force sensor 3 continuously decreases during the reverse rotation, it indicates that the planes corresponding to the adjustment of the first plane and the second plane are not parallel, and then the second control operation is executed. Among them, the second control operation includes: controlling the multi-axis moving stage 4 to perform reverse rotation around the current target axis until the contact pressure data feedback by the force sensor 3 is the second standard value F1, and controlling the multi-axis moving stage 4 to perform a moving operation along the Z-axis direction of the moving system coordinate system to drive the first plane 1 to move towards the second plane 2 until the contact pressure data feedback by the force sensor is the first standard value F0. Control the multi-axis moving stage to stop moving, and re-execute the first control operation until the contact pressure data received from the force sensor during the reverse rotation first decreases and then increases. Among them, the second standard value is greater than or equal to 0 and less than the first standard value.

[0054] If the contact pressure data feedback by the force sensor 3 first decreases and then increases during the reverse rotation, the minimum force value is the parallel position of the target axis, then stop controlling the multi-axis moving stage 4 to move, and then perform the second leveling control operation corresponding to another target axis. If the current target axis is the X-axis, after the first leveling control operation is completed, the first plane and the second plane are adjusted to be parallel in the plane formed by the Y-axis and the Z-axis. If the current target axis is the Y-axis, after the first leveling control operation is completed, the first plane and the second plane are adjusted to be parallel in the plane formed by the X-axis and the Z-axis.

[0055] The second leveling control operation includes:

[0056] Taking another target axis as the current target axis, perform the first control operation on the multi-axis moving stage 4 corresponding to the other target axis (Y-axis / X-axis). Among them, the first control operation includes: controlling the multi-axis moving stage 4 to perform a forward rotation by a preset small value around the current target axis. If the contact pressure data currently feedback by the force sensor 3 is greater than the first standard value F0, then control the multi-axis moving stage 4 to perform a reverse rotation around the target axis.

[0057] If the contact pressure data feedback by the force sensor 3 continuously decreases during the reverse rotation, then perform a second control operation; wherein, the second control operation includes: controlling the multi-axis moving stage 4 to perform reverse rotation around the target axis until the contact pressure data feedback by the force sensor 3 reaches a second standard value F1, and controlling the multi-axis moving stage 4 to perform a moving operation along the Z-axis direction of the moving system coordinate system to drive the first plane 1 towards the second plane 2 until the contact pressure data feedback by the force sensor 3 reaches a first standard value F0. Control the multi-axis moving stage 5 to stop moving, and re-perform the second control operation until the contact pressure data received from the force sensor 3 first decreases and then increases during the reverse rotation; wherein, the second standard value is greater than or equal to 0 and less than the first standard value.

[0058] If the contact pressure data feedback by the force sensor 3 first decreases and then increases during the reverse rotation, and the minimum force received is the parallel position of the target axis, then stop controlling the multi-axis moving stage 4 to move, and finally complete the parallel adjustment of the first plane 1 and the second plane 2. If the current target axis is the X-axis, after the second leveling control operation is completed, the first plane and the second plane are adjusted to be parallel in the plane formed by the Y-axis and the Z-axis. If the current target axis is the Y-axis, after the second leveling control operation is completed, the first plane 1 and the second plane 2 are adjusted to be parallel in the plane formed by the X-axis and the Z-axis. After the first leveling control operation and the second leveling control operation are combined and completed, finally complete the parallel adjustment work of the first plane 1 and the second plane 2 in the plane formed by the X-axis and the Z-axis and in the plane formed by the Y-axis and the Z-axis.

[0059] In one embodiment, based on the contact pressure data continuously feedback by the force sensor 3, perform zero adjustment control on the multi-axis moving stage 4 that has undergone parallel adjustment to adjust the first plane and the second plane to zero, including:

[0060] Control the multi-axis moving stage 4 to perform a moving operation along the Z-axis direction of the moving system coordinate system to drive the first plane 1 towards the second plane 2 parallel to it until the contact pressure data received from the force sensor reaches 0, and then control the multi-axis moving stage to stop moving to complete zero adjustment.

[0061] In one embodiment, based on the contact pressure data continuously feedback by the force sensor 3, perform coordinate system deviation calculation control on the multi-axis moving stage 4 that has undergone zero adjustment control to obtain the deviation angle between the plane coordinate system and the moving system coordinate system, including:

[0062] Control the multi-axis moving stage 4 to perform a moving operation along the Z-axis direction of the moving system coordinate system, so that the distance between the first plane and the second plane parallel to it is a first set distance; specifically, control the multi-axis moving stage 4 to separate the two planes by a first set distance dz along the Z-axis direction of the moving system coordinate system;

[0063] Control the multi-axis moving stage 4 to perform a moving operation along a target axis. When the contact pressure data received from the force sensor is greater than 0, calculate the angle between the leveled plane coordinate system and the target plane of the moving stage coordinate system corresponding to this target axis based on the moving distance and the first set distance;

[0064] Control the multi-axis moving stage to perform a moving operation along the Z-axis direction of the moving system coordinate system, so that the distance between the first plane and the second plane parallel to it is a first set distance;

[0065] Control the multi-axis moving stage to perform a moving operation along another target axis. When the contact pressure data received from the force sensor is greater than 0, control the multi-axis moving stage to stop moving, and calculate the angle between the leveled plane coordinate system and the target plane of the moving stage coordinate system corresponding to this target axis based on the moving distance and the first set distance.

[0066] Specifically, there are two implementation methods for controlling the calculation of the deviation angle between the plane coordinate system and the moving system coordinate system:

[0067] The first method:

[0068] If the first target axis is the X-axis, control the multi-axis moving stage 4 to perform a moving operation along the Z-axis direction of the moving system coordinate system, so that the distance between the first plane and the second plane parallel to it is a first set distance dz. Then continue to control the multi-axis moving stage 4 to translate along the X-axis. When the contact pressure data received from the force sensor 3 is greater than 0, that is, the two planes touch, control the multi-axis moving stage 4 to stop moving, and calculate the angle θ between the leveled plane coordinate system and the plane formed by the Y-axis and the Z-axis of the moving stage coordinate system based on the translation distance dx and the first set distance dz:

[0069] θ = arctan(dz / dx); (1)

[0070] If another target axis is the Y-axis, control the multi-axis moving stage 4 to move along the Z-axis direction of the moving system coordinate system, driving the distance between the first plane and the second plane parallel thereto to be a first set distance dz. Then continue to control the multi-axis moving stage 4 to translate along the Y-axis. When the contact pressure data received from the force sensor 3 is greater than 0, control the multi-axis moving stage 4 to stop moving. Based on the translated distance dy and the first set distance dz, calculate the angle β between the leveled plane coordinate system and the moving stage coordinate system in the plane formed by the X-axis and the Z-axis:

[0071] β = arctan(dz / dy); (2)

[0072] The second method:

[0073] If the first target axis is the Y-axis, control the multi-axis moving stage 4 to move along the Z-axis direction of the moving system coordinate system, driving the distance between the first plane and the second plane parallel thereto to be a first set distance dz. Then continue to control the multi-axis moving stage 4 to translate along the Y-axis. When the contact pressure data received from the force sensor 3 is greater than 0, control the multi-axis moving stage 4 to stop moving. Based on the translated distance dy and the first set distance dz, calculate the angle θ between the leveled plane coordinate system and the moving stage coordinate system in the plane formed by the X-axis and the Z-axis:

[0074] θ = arctan(dz / dy); (3)

[0075] If another target axis is the X-axis, control the multi-axis moving stage 4 to move along the Z-axis direction of the moving system coordinate system, driving the distance between the first plane and the second plane parallel thereto to be a first set distance dz. Then continue to control the multi-axis moving stage 4 to translate along the X-axis. When the contact pressure data received from the force sensor 3 is greater than 0, i.e., the two planes touch, control the multi-axis moving stage 4 to stop moving. Based on the translated distance dx and the first set distance dz, calculate the angle β between the leveled plane coordinate system and the moving stage coordinate system in the plane formed by the Y-axis and the Z-axis:

[0076] β = arctan(dz / dx); (4)

[0077] In one embodiment, the rotation center of the rotation operation of the multi-axis moving stage can be located at the moving system itself of the corresponding moving coordinate system, or it can also be located on the upper surface of the second plane.

[0078] In one embodiment, the sizes of the first plane 1 and the second plane 2 are 1 mm 2 -100 m 2 .

[0079] To better describe the force-feedback-based contact leveling and zeroing system, the following specific embodiments will be described for illustration.

[0080] Embodiment 1: A force-feedback-based contact leveling and zeroing system.

[0081] The system includes: a multi-axis moving stage, including movement in the X, Y, and Z axis directions and rotation in at least the X and Y directions; a force sensor. The force sensor is installed on the multi-axis moving stage. One plane is installed on the force sensor, and another plane is fixed opposite this plane. The leveling, zeroing, and obtaining of the coordinate system deviation value are achieved through the following operations:

[0082] Step 1: As Figure 3 A, control the moving stage to move in the positive direction of the z-axis to make the plane installed on the force sensor move towards the other plane until the force sensor shows a reading. At this time, the information of the contact between the two planes is obtained. On this basis, continue to move until a force sensor reaches a slightly larger force value F0, and this value is used as the standard signal for leveling and zeroing.

[0083] Step 2: As Figure 3 B, control the rotating axis of the moving stage to make it rotate positively around the Y-axis by a small value. At this time, if the force on the force sensor is greater than F0, rotate in the reverse direction. If the reading of the force sensor keeps decreasing, rotate in the reverse direction until the force is 0 or becomes extremely small, then as Figure 3 C, execute Step 3; if the reading of the force sensor decreases and then increases, record the current reading F1. At this time, the movement stops, and then execute Step 4;

[0084] Step 3: Stop rotating, control the moving stage to move to make the two planes continue to approach until the force reaches F0. At this time, the movement stops. Then loop back to Step 2 until the reading of the force sensor decreases and then increases after reverse rotation.

[0085] Step 4: Control the rotating axis of the moving stage to make it rotate positively around the Z-axis by a small value. At this time, if the force on the force sensor is greater than F1, rotate in the reverse direction. If the reading of the force sensor keeps decreasing, rotate in the reverse direction until the force is 0 or becomes extremely small and then execute Step 5; if the reading of the force sensor decreases and then increases, execute Step 6;

[0086] Step 5: Stop rotating, control the moving stage to move to make the two planes continue to approach until the force reaches F1. At this time, the movement stops. Then loop back to Step 4 until the reading of the force sensor decreases and then increases after reverse rotation;

[0087] Step 6: As Figure 3 D, the parallel adjustment of the two planes has been completed. Control the movement of the moving stage to make the force between the two planes just 0. At this time, it is recorded as the zero point, and the zeroing of the two planes is completed.

[0088] Step 7: As shown in Figure 3 E, control the mobile station to separate the two planes by a certain distance dz along the Z-axis of the mobile station coordinate system, and then control the mobile station to translate along the X-axis. When it translates a distance dx, the two planes touch. At this time, the angle θ between the leveling plane and the YZ plane of the mobile station coordinate system is θ = arctan(dz / dx), as shown in Figure 3 F.

[0089] Step 8: Control the mobile station to separate the two planes by a certain distance dz along the Z-axis of the mobile station coordinate system, and then control the mobile station to translate along the Y-axis. When it translates a distance dy, the two planes touch. At this time, the angle θ between the leveling plane and the XZ plane of the mobile station coordinate system is θ = arctan(dz / dy). At this time, all the deviations between the two coordinate systems are obtained.

[0090] Embodiment 2: A Faraday 3D printer. As shown in Figure 4 and Figure 5 is a partial structural schematic diagram of the Faraday 3D printer.

[0091] The printer includes: mask101, whose lower surface is the first plane, cavity 102, base table 103, force sensor 104, six-axis nano-mobile station 105, bracket and base 106, base 107, whose upper surface is the second plane, and insulating ceramic 8. Among them, the base 107 is connected to the base table 102 by vacuum suction, mask1 is fixed on the cavity 102 by a spring, and the base table 103, force sensor 104, insulating ceramic 108 and six-axis nano-mobile station 105 are connected by screws.

[0092] The size of the base 107 is 5mm×5mm×500μm, and the size of the mask1 is 10mm×10mm×500μm. By moving the six-axis nano-mobile station 105 and the signal feedback of the force sensor 104, this method can be used to level and zero the two planes, and realize the printing function of this printer.

[0093] Similar to the principle of the above embodiment, the present invention provides a contact leveling and zeroing control method based on force feedback.

[0094] The following provides specific embodiments in conjunction with the drawings:

[0095] The present invention provides a contact leveling and zeroing control method based on force feedback, which is applied to a contact leveling and zeroing system based on force feedback, and includes: a first plane and a second plane to be adjusted that are arranged opposite to each other, a multi-axis moving stage, and a force sensor that is arranged on the multi-axis moving stage and has the first plane thereon. The first plane and the second plane, the multi-axis moving stage, and the force sensor in this contact leveling and zeroing system based on force feedback have the same structures and functions as the first plane and the second plane, the multi-axis moving stage, and the force sensor in the above embodiments, so they will not be described in detail here.

[0096] The method includes:

[0097] Based on the contact pressure data detected in real time by the force sensor, control the movement of the multi-axis moving stage to adjust the relative position between the first plane and the second plane until the leveling and zeroing operations of the first plane and the second plane are completed, and obtain the deviation between the three-dimensional plane coordinate system after leveling and the three-dimensional moving system coordinate system.

[0098] In one embodiment, as Figure 6 , the method includes:

[0099] Step S1: Based on the contact pressure data feedback in real time by the force sensor, perform parallel adjustment control on the multi-axis moving stage to adjust the first plane and the second plane to be parallel.

[0100] Step S2: Based on the contact pressure data feedback in real time by the force sensor, perform zero-point adjustment control on the multi-axis moving stage that has been adjusted in parallel to adjust the first plane and the second plane to the zero point.

[0101] Step S3: Based on the contact pressure data feedback in real time by the force sensor, perform coordinate system deviation calculation control on the multi-axis moving stage that has been adjusted for zero point to obtain the deviation angle between the plane coordinate system and the moving system coordinate system.

[0102] In one embodiment, the multi-axis moving stage can perform moving operations along the X-axis, Y-axis, and Z-axis directions that are perpendicular to each other in the moving system coordinate system respectively, and can perform rotation operations around at least the X-axis and the Y-axis.

[0103] In a specific embodiment, step S1 includes: controlling the multi-axis moving platform to perform a moving operation along the Z-axis direction of the moving system coordinate system to drive the first plane to move towards the second plane until the contact pressure data received from the force sensor is a first standard value, and then controlling the multi-axis moving platform to stop moving; based on the contact pressure data and the first standard value real-time feedback by the force sensor, performing a first leveling control operation and a second leveling control operation on the multi-axis moving platform respectively corresponding to two target axes, so as to adjust the first plane and the second plane to be parallel in the plane formed by the X-axis and the Z-axis and in the plane formed by the Y-axis and the Z-axis; the two target axes include: the X-axis and the Y-axis of the moving system coordinate system.

[0104] In a specific embodiment, the first leveling control operation includes: taking a target axis as the current target axis, and performing a first control operation on the multi-axis moving platform for the current target axis; wherein, the first control operation includes: controlling the multi-axis moving platform to rotate forward around the current target axis by a preset small value, if the contact pressure data currently feedback by the force sensor is greater than the first standard value, then controlling the multi-axis moving platform to rotate reversely around the current target axis; if the contact pressure data feedback by the force sensor continuously decreases during the reverse rotation, then perform a second control operation; wherein, the second control operation includes: controlling the multi-axis moving platform to rotate reversely around the current target axis until the contact pressure data feedback by the force sensor is a second standard value, and controlling the multi-axis moving platform to perform a moving operation along the Z-axis direction of the moving system coordinate system to drive the first plane to move towards the second plane until the contact pressure data feedback by the force sensor is the first standard value, then controlling the multi-axis moving platform to stop moving, and re-performing the first control operation; wherein, the second standard value is greater than or equal to 0 and less than the first standard value. If the contact pressure data feedback by the force sensor first decreases and then increases during the reverse rotation, and the minimum force value is the parallel position of this target axis, then stop controlling the multi-axis moving platform to move, and then perform a second leveling control operation corresponding to the other target axis; the second leveling control operation includes: taking the other target axis as the current target axis, and performing the first control operation on the multi-axis moving platform for the current target axis; if the contact pressure data feedback by the force sensor continuously decreases during the reverse rotation, then perform the second control operation; if the contact pressure data feedback by the force sensor first decreases and then increases during the reverse rotation, and the minimum force value is the parallel position of this target axis, then stop controlling the multi-axis moving platform to move, and finally complete the parallel adjustment of the first plane and the second plane.

[0105] In one embodiment, step S2 includes: controlling the multi-axis moving stage to move along the Z-axis direction of the moving system coordinate system to drive the first plane to move towards the second plane parallel to it, and controlling the multi-axis moving stage to stop moving until the contact pressure data received from the force sensor is 0, so as to complete zero adjustment.

[0106] In one embodiment, step S3 includes: controlling the multi-axis moving stage to move along the Z-axis direction of the moving system coordinate system to make the distance between the first plane and the second plane parallel to it be a first set distance; controlling the multi-axis moving stage to move along a target axis. When the contact pressure data received from the force sensor is greater than 0, controlling the multi-axis moving stage to stop moving, and calculating the angle between the leveled plane coordinate system and the moving stage coordinate system on the target plane corresponding to the target axis based on the moving distance and the first set distance; controlling the multi-axis moving stage to move along the Z-axis direction of the moving system coordinate system to make the distance between the first plane and the second plane parallel to it be a first set distance; controlling the multi-axis moving stage to move along another target axis. When the contact pressure data received from the force sensor is greater than 0, controlling the multi-axis moving stage to stop moving, and calculating the angle between the leveled plane coordinate system and the moving stage coordinate system on the target plane corresponding to the target axis based on the moving distance and the first set distance; wherein, when the target axis is the X-axis, the corresponding target plane is the plane formed by the Y-axis and the Z-axis; when the target axis is the Y-axis, the corresponding target plane is the plane formed by the X-axis and the Z-axis.

[0107] Such as Figure 7 Show the structural schematic diagram of the force feedback-based contact type leveling and zero adjustment control terminal 70 in the embodiment of the present invention.

[0108] The force feedback-based contact type leveling and zero adjustment control terminal 70 includes: a memory 71 and a processor 72. The memory 71 is used to store computer programs; the processor 72 runs the computer programs to implement the force feedback-based contact type leveling and zero adjustment control method described above.

[0109] Optionally, the number of the memories 71 can be one or more, and the number of the processors 72 can be one or more, and Figure 7 one is taken as an example in both cases.

[0110] Optionally, the processor 72 in the force feedback-based contact type leveling and zero adjustment control terminal 70 will, according to the steps such as Figure 5 described above, load the instructions corresponding to the processes of one or more application programs into the memory 71, and the processor 72 runs the application programs stored in the first memory 71, so as to implement various functions in the force feedback-based contact type leveling and zero adjustment control method.

[0111] Optionally, the memory 71 may include, but is not limited to, high-speed random access memory and non-volatile memory. For example, one or more disk storage devices, flash memory devices, or other non-volatile solid-state storage devices; the processor 72 may include, but is not limited to, a central processing unit (CPU), a network processor (NP), etc.; it may also be a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components.

[0112] Optionally, the processor 72 may be a general-purpose processor, including a central processing unit (CPU), a network processor (NP), etc.; it may also be a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components.

[0113] The present invention also provides a computer-readable storage medium storing a computer program, which when running implements the contact leveling and zeroing control method based on force feedback as described above. The computer-readable storage medium may include, but is not limited to, a floppy disk, an optical disk, a CD-ROM (compact disc read-only memory), a magneto-optical disk, a ROM (read-only memory), a RAM (random access memory), an EPROM (erasable programmable read-only memory), an EEPROM (electrically erasable programmable read-only memory), a magnetic card or an optical card, a flash memory, or other types of media / machine-readable media suitable for storing machine-executable instructions. The computer-readable storage medium may be a product not connected to a computer device, or a component already connected to a computer device for use.

[0114] In summary, for the contact type leveling and zeroing system, control method and terminal based on force feedback of the present invention, by using the contact pressure data between the first plane and the second plane detected in real time by the force sensor, the multi-axis moving stage is controlled to move to adjust the relative position between the first plane and the second plane until the leveling and zeroing operations of the first plane and the second plane are completed, and the deviation between the three-dimensional plane coordinate system after leveling and the three-dimensional moving system coordinate system is obtained. The present invention only uses one force sensor, and through the perception of the touch signal and the combination of the moving system adjustment, the leveling and zeroing can be realized, which has the advantages of simple structure and low cost. The present invention can also obtain the coordinate deviation between the leveling plane and the moving system, and through this deviation, the precise displacement between the two planes can be controlled by using the movement of the moving stage. Moreover, the leveling and zeroing can be carried out for both extremely small area planes and large area planes. Therefore, the present invention effectively overcomes various shortcomings in the prior art and has high industrial utilization value.

[0115] The above embodiments are only used to exemplarily illustrate the principles and effects of the present invention, rather than to limit the present invention. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes completed by those with ordinary knowledge in the technical field without departing from the spirit and technical idea disclosed by the present invention should still be covered by the claims of the present invention.

Claims

1. A contact leveling and zeroing system based on force feedback, characterized in that, it includes: a first plane and a second plane to be adjusted, a force sensor, a multi-axis moving stage, and a control device; wherein, the first plane is disposed on the force sensor, and the second plane is disposed opposite to the first plane; the force sensor is mounted on the multi-axis moving stage; the force sensor is used for detecting in real time the contact pressure data between the first plane and the second plane; the multi-axis moving stage is used for adjusting the relative position between the first plane and the second plane disposed on the force sensor by moving in the moving system coordinate system; the control device is connected to the force sensor and the multi-axis moving stage, and is used for controlling the movement of the multi-axis moving stage to adjust the relative position between the first plane and the second plane based on the contact pressure data detected in real time by the force sensor until the leveling and zeroing operations of the first plane and the second plane are completed, and obtaining the deviation between the three-dimensional plane coordinate system and the three-dimensional moving system coordinate system after leveling.

2. The contact leveling and zeroing system based on force feedback according to claim 1, characterized in that, the control device includes: a parallel adjustment control unit, which is used for performing parallel adjustment control on the multi-axis moving stage based on the contact pressure data real-time feedback by the force sensor, so as to adjust the first plane and the second plane to be parallel; a zero-point adjustment control unit, connected to the parallel adjustment control unit, which is used for performing zero-point adjustment control on the multi-axis moving stage after parallel adjustment based on the contact pressure data real-time feedback by the force sensor, so as to adjust the first plane and the second plane to the zero point; a coordinate system deviation calculation control unit, connected to the zero-point adjustment control unit, which is used for performing coordinate system deviation calculation control on the multi-axis moving stage after zero-point adjustment control based on the contact pressure data real-time feedback by the force sensor to obtain the deviation angle between the plane coordinate system and the moving system coordinate system.

3. The contact leveling and zeroing system based on force feedback according to claim 2, characterized in that, the multi-axis moving stage can perform moving operations along the mutually perpendicular X-axis, Y-axis, and Z-axis directions in the moving system coordinate system respectively and can perform rotation operations around at least the X-axis and the Y-axis.

4. The contact leveling and zeroing system based on force feedback according to claim 3, characterized in that, performing parallel adjustment control on the multi-axis moving stage based on the contact pressure data real-time feedback by the force sensor includes: controlling the multi-axis moving stage to perform a moving operation along the Z-axis direction of the moving system coordinate system to drive the first plane to move towards the second plane until the contact pressure data received from the force sensor is the first standard value, and then controlling the multi-axis moving stage to stop moving; Based on the contact pressure data and the first standard value that are real-time fed back by the force sensor, perform a first leveling control operation and a second leveling control operation on the multi-axis moving stage respectively corresponding to two target axes, so as to adjust the first plane and the second plane to be parallel in the plane formed by the X-axis and the Z-axis and in the plane formed by the Y-axis and the Z-axis; the two target axes include: the X-axis and the Y-axis of the moving system coordinate system.

5. The contact type leveling and zeroing system based on force feedback according to claim 4, wherein, the first leveling control operation includes: Taking a target axis as the current target axis, and performing a first control operation on the multi-axis moving stage for the current target axis; wherein, the first control operation includes: controlling the multi-axis moving stage to rotate forward by a preset small value around the current target axis, if the contact pressure data currently fed back by the force sensor is greater than the first standard value, then controlling the multi-axis moving stage to rotate reversely around the current target axis; If the contact pressure data fed back by the force sensor continuously decreases during the reverse rotation, then perform a second control operation; wherein, the second control operation includes: controlling the multi-axis moving stage to rotate reversely around the current target axis until the contact pressure data fed back by the force sensor is the second standard value, and controlling the multi-axis moving stage to perform a moving operation along the Z-axis direction of the moving system coordinate system to drive the first plane to move towards the second plane until the contact pressure data fed back by the force sensor is the first standard value, then controlling the multi-axis moving stage to stop moving, and re-performing the first control operation; wherein, the second standard value is greater than or equal to 0 and less than the first standard value. If the contact pressure data fed back by the force sensor first decreases and then increases during the reverse rotation, and the minimum force value is the parallel position of the target axis, then stop controlling the multi-axis moving stage to move, and subsequently perform a second leveling control operation corresponding to the other target axis; The second leveling control operation includes: Taking the other target axis as the current target axis, and performing the first control operation on the multi-axis moving stage for the current target axis; If the contact pressure data fed back by the force sensor continuously decreases during the reverse rotation, then perform the second control operation; If the contact pressure data fed back by the force sensor first decreases and then increases during the reverse rotation, and the minimum force value is the parallel position of the target axis, then stop controlling the multi-axis moving stage to move, and finally complete the parallel adjustment of the first plane and the second plane.

6. The contact type leveling and zeroing system based on force feedback according to claim 2, wherein, Based on the contact pressure data that is real-time fed back by the force sensor, perform zeroing adjustment control on the multi-axis moving stage after parallel adjustment, so as to adjust the first plane and the second plane to zero points, including: Controlling the multi-axis moving stage to perform a moving operation along the Z-axis direction of the moving system coordinate system to drive the first plane to move towards the second plane parallel to it until the contact pressure data received from the force sensor is 0, then controlling the multi-axis moving stage to stop moving to complete zeroing.

7. The contact type leveling and zeroing system based on force feedback according to claim 4, characterized in that, based on the contact pressure data real-time feedback by the force sensor, performing coordinate system deviation calculation control on the multi-axis moving stage after zero adjustment control to obtain the deviation angle between the plane coordinate system and the moving system coordinate system, including: controlling the multi-axis moving stage to perform a moving operation along the Z-axis direction of the moving system coordinate system to drive the distance between the first plane and the second plane parallel thereto to be a first set distance; controlling the multi-axis moving stage to perform a moving operation along a target axis, when receiving the contact pressure data from the force sensor greater than 0, controlling the multi-axis moving stage to stop moving, and calculating the angle between the leveled plane coordinate system and the moving stage coordinate system on the target plane corresponding to the target axis based on the moving distance and the first set distance; controlling the multi-axis moving stage to perform a moving operation along the Z-axis direction of the moving system coordinate system to drive the distance between the first plane and the second plane parallel thereto to be a first set distance; controlling the multi-axis moving stage to perform a moving operation along another target axis, when receiving the contact pressure data from the force sensor greater than 0, controlling the multi-axis moving stage to stop moving, and calculating the angle between the leveled plane coordinate system and the moving stage coordinate system on the target plane corresponding to the target axis based on the moving distance and the first set distance; wherein, when the target axis is the X-axis, the corresponding target plane is the plane formed by the Y-axis and the Z-axis; when the target axis is the Y-axis, the corresponding target plane is the plane formed by the X-axis and the Z-axis.

8. The contact type leveling and zeroing system based on force feedback according to claim 1, characterized in that, the types of the force sensor include: single-axis force sensor, three-axis force sensor and six-axis force sensor.

9. A contact type leveling and zeroing control method based on force feedback, characterized in that, applied to a contact type leveling and zeroing system based on force feedback, including: a first plane and a second plane to be adjusted arranged opposite to each other, a multi-axis moving stage, and a force sensor arranged on the multi-axis moving stage and having the first plane thereon, the method includes: based on the contact pressure data detected in real time by the force sensor between the first plane and the second plane, controlling the multi-axis moving stage to move to adjust the relative position between the first plane and the second plane until the leveling and zeroing operations of the first plane and the second plane are completed, and obtaining the deviation between the leveled three-dimensional plane coordinate system and the three-dimensional moving system coordinate system.

10. A contact type leveling and zeroing control terminal based on force feedback, characterized in that, including: one or more memories and one or more processors; the one or more memories are used for storing computer programs; the one or more processors, connected to the memories, are used for running the computer programs to execute the method according to claim 9.

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