Camera pulse triggering method and device, equipment and storage medium

Abstract

The embodiment of the invention provides a camera pulse triggering method and device, equipment and a storage medium. The method comprises the following steps: sending first indication information to a machine table, sending a pulse signal to a target camera when the machine table meets a first type of judgment condition, then sending second indication information to the machine table when the machine table moves until the radius of a spiral line where the machine table is located meets a first set condition, and sending a second indication information to the target camera when the machine table meets a second type of judgment condition. And sending a pulse signal to the target camera. According to the technical scheme provided by the embodiment of the invention, the problems of relatively low speed and relatively low scanning efficiency in the wafer surface scanning process in related technologies are solved, the scanning efficiency in the wafer scanning process is remarkably improved, and the scanning quality is ensured.

Description

Technical Field

[0001] The present application relates to the field of semiconductor processing technologies, and particularly to a method, device, equipment, and storage medium for camera pulse triggering. Background Art

[0002] In the field of semiconductor processing technologies, it is usually necessary to use a high-precision delay integration camera (i.e., TDI camera) to photograph the surface state of a wafer to achieve surface defect detection of the wafer. When the TDI camera detects the wafer, usually every time the machine stage drives the wafer to move a set distance (such as one pixel), the TDI camera is triggered to take a photo, and this process is repeated until the photographing of the wafer is completed, and then an image corresponding to the wafer is generated. This process is also the scanning process of the wafer.

[0003] In the related art, the scanning of the wafer is usually a scanning method based on spiral motion. At this time, the relative motion between the TDI camera and the wafer is a motion method with a fixed angular velocity. However, this method has the problem that the linear velocity during the scanning process gradually decreases, resulting in an increasingly long pulse trigger time interval, low scanning efficiency, and insufficient detection efficiency of the wafer. Summary of the Invention

[0004] The present application discloses a method, device, equipment, and storage medium for camera pulse triggering to solve the problems of slow speed and low scanning efficiency during the surface scanning of the wafer in the related art.

[0005] In a first aspect, an embodiment of the present disclosure provides a method for camera pulse triggering. The method for camera pulse triggering includes:

[0006] Sending a first indication message to the machine stage, where the first indication message is used to instruct the machine stage to move along a spiral line based on a set linear velocity;

[0007] Determining that the machine stage meets a first type of judgment condition and sending a pulse signal to the target camera, where the first type of condition includes that the distance moved by the machine stage at the set linear velocity meets the set distance condition, and the pulse signal is used to instruct the target camera to perform a photographing action;

[0008] Determining that the radius of the spiral line where the machine stage is located meets a first set condition and sending a second indication message to the machine stage, where the second indication message is used to instruct the machine stage to move along the spiral line based on a set angular velocity;

[0009] Determining that the machine stage meets a second type of judgment condition and sending a pulse signal to the target camera, where the second type of condition includes that the distance moved by the machine stage is determined according to the set angular velocity and the radius of the spiral line where the machine stage is located and meets the set distance condition.

[0010] Optionally, determining that the machine tool meets the first type of judgment condition and sending a pulse signal to the target camera includes: determining the arc length of the machine tool's moving unit angle based on the real-time radius corresponding to the machine tool in the spiral; determining the real-time linear velocity of the machine tool based on the first duration taken by the machine tool to pass through the unit angle; determining the cumulative movement distance of the machine tool based on the product of the real-time linear velocity and the unit time; determining that the cumulative movement distance meets the set distance condition, and sending a pulse signal to the target camera.

[0011] Optionally, determining the arc length of the machine tool's moving unit angle based on the real-time radius corresponding to the machine tool in the spiral includes: determining the arc length of the machine tool's moving unit angle based on the product of the real-time radius, the unit angle, and the first set coefficient.

[0012] Optionally, the first set coefficient is negatively correlated with the real-time radius.

[0013] Optionally, determining the real-time linear velocity of the machine tool based on the first duration taken by the machine tool to pass through the unit angle includes: if the arc length of the unit angle is the first arc length passed by the machine tool, determining the set linear velocity as the real-time linear velocity of the machine tool; if the arc length of the unit angle is after the first arc length passed by the machine tool, determining the ratio of the arc length of the unit angle to the first duration as the real-time linear velocity of the machine tool.

[0014] Optionally, determining the cumulative movement distance of the machine tool based on the product of the real-time linear velocity and the unit time includes: adding up the products of the real-time linear velocity corresponding to each unit angle arc length after the previous pulse signal and the unit time to obtain the cumulative movement distance of the machine tool.

[0015] Optionally, determining that the machine tool meets the second type of judgment condition and sending a pulse signal to the target camera includes: determining the target angle passed by the machine tool per unit time based on the set angular velocity of the machine tool; determining the real-time movement distance of the machine tool based on the product of the real-time radius, the target angle, and the first set coefficient corresponding to the machine tool; adding up all the real-time movement distances corresponding to the machine tool after the previous pulse signal to obtain the cumulative movement distance of the machine tool; determining that the cumulative movement distance meets the set distance condition, and sending a pulse signal to the target camera.

[0016] Optionally, determining that the cumulative movement distance meets the set distance condition and sending a pulse signal to the target camera includes: determining that the cumulative movement distance is equal to the set distance, or determining that the difference between the cumulative movement distance and the set distance is less than the real-time distance parameter, and sending a pulse signal to the target camera, where the real-time distance parameter is used to represent the product of the most recent real-time linear velocity, the unit time, and the second set coefficient, and the second set coefficient is greater than zero and less than 1.

[0017] Optionally, it is determined that the radius of the machine platform moving on the spiral satisfies the first set condition, and second indication information is sent to the machine platform, including: in response to the radius of the machine platform moving on the spiral being equal to the first set radius, sending the second indication information to the machine platform.

[0018] Optionally, after sending the second indication information to the machine platform in response to the radius of the machine platform moving on the spiral being equal to the first set radius, it further includes: if the difference between the cumulative movement distance of the machine platform after the previous pulse signal and the set distance is less than the set threshold, sending a pulse signal to the target camera, where the set threshold is less than the product of the real-time radius corresponding to the machine platform and the unit angle; or determining that the difference between the cumulative movement distance of the machine platform after the previous pulse signal and the set distance is greater than the set threshold; when the cumulative movement distance of the machine platform after the previous pulse signal and the total real-time movement distance of the machine platform at the set angular velocity satisfy the set distance condition, sending a pulse signal to the target camera.

[0019] In a second aspect, an embodiment of the present disclosure provides a camera pulse triggering device, and the camera pulse triggering device includes:

[0020] A preparation module for sending first indication information to the machine platform, where the first indication information is used to instruct the machine platform to move along a spiral based on a set linear velocity;

[0021] A first triggering module for determining that the machine platform satisfies the first type of judgment condition and sending a pulse signal to the target camera, where the first type of condition includes that the moving distance of the machine platform at the set linear velocity satisfies the set distance condition, and the pulse signal is used to instruct the target camera to perform a photographing action;

[0022] A switching module for determining that the radius of the machine platform moving on the spiral satisfies the first set condition and sending second indication information to the machine platform, where the second indication information is used to instruct the machine platform to move along a spiral based on a set angular velocity;

[0023] A second triggering module for determining that the machine platform satisfies the second type of judgment condition and sending a pulse signal to the target camera, where the second type of condition includes that the moving distance of the machine platform is determined to satisfy the set distance condition according to the set angular velocity and the radius of the spiral where the machine platform is located.

[0024] Optionally, the first triggering module is specifically configured to determine the arc length of the moving unit angle of the machine platform based on the real-time radius corresponding to the machine platform in the spiral; determine the real-time linear velocity of the machine platform based on the first time taken by the machine platform to pass through the unit angle; determine the cumulative movement distance of the machine platform based on the product of the real-time linear velocity and the unit time; determine that the cumulative movement distance satisfies the set distance condition, and send a pulse signal to the target camera.

[0025] Optionally, the first trigger module is specifically configured to determine the arc length of the moving unit angle of the machine platform based on the product of the real-time radius, the unit angle, and the first set coefficient.

[0026] Optionally, the first trigger module specifically includes that the first set coefficient has a negative correlation with the real-time radius.

[0027] Optionally, the first trigger module is specifically configured to, if the arc length of the unit angle is the first arc length passed by the machine platform, determine the set linear velocity as the real-time linear velocity of the machine platform; if the arc length of the unit angle is after the first arc length passed by the machine platform, determine the ratio of the arc length of the unit angle to the first time duration as the real-time linear velocity of the machine platform.

[0028] Optionally, the first trigger module is specifically configured to accumulate the product of the real-time linear velocity corresponding to each unit angle arc length after the previous pulse signal and the unit time to obtain the cumulative movement distance of the machine platform.

[0029] Optionally, the second trigger module is specifically configured to determine the target angle passed by the machine platform per unit time based on the set angular velocity of the machine platform; determine the real-time movement distance of the machine platform based on the product of the real-time radius, the target angle, and the first set coefficient corresponding to the machine platform; accumulate all the real-time movement distances corresponding to the machine platform after the previous pulse signal to obtain the cumulative movement distance of the machine platform; determine that the cumulative movement distance meets the set distance condition, and send a pulse signal to the target camera.

[0030] Optionally, the second trigger module is specifically configured to determine that the cumulative movement distance is equal to the set distance, or determine that the difference between the cumulative movement distance and the set distance is less than the real-time distance parameter, and send a pulse signal to the target camera, where the real-time distance parameter is used to represent the product of the most recent real-time linear velocity, the unit time, and the second set coefficient, and the second set coefficient is greater than zero and less than 1.

[0031] Optionally, the switching module is specifically configured to send a second indication message to the machine platform in response to the radius of the spiral line where the machine platform is located being equal to the first set radius.

[0032] Optionally, after the switching module is further configured to send a second indication message to the machine platform in response to the radius of the spiral line where the machine platform is located being equal to the first set radius, if the difference between the cumulative movement distance of the machine platform after the previous pulse signal and the set distance is less than the set threshold, send a pulse signal to the target camera, where the set threshold is less than the product of the real-time radius corresponding to the machine platform and the unit angle; or determine that the difference between the cumulative movement distance of the machine platform after the previous pulse signal and the set distance is greater than the set threshold; when the cumulative movement distance of the machine platform after the previous pulse signal and all the real-time movement distances of the machine platform at the set angular velocity are accumulated to meet the set distance condition, send a pulse signal to the target camera.

[0033] In a third aspect, an embodiment of the present disclosure further provides a control device, which includes:

[0034] At least one processor;

[0035] And a memory communicatively connected to the at least one processor;

[0036] Wherein, the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor to enable the control device to execute the camera pulse triggering method according to the first aspect of the present disclosure.

[0037] In a fourth aspect, an embodiment of the present disclosure further provides a computer-readable storage medium, in which computer-executable instructions are stored, and when the computer-executable instructions are executed by a processor, they are used to implement the camera pulse triggering method according to the first aspect of the present disclosure.

[0038] In a fifth aspect, an embodiment of the present disclosure further provides a computer program product, which includes computer-executable instructions, and when the computer-executable instructions are executed by a processor, they are used to implement the camera pulse triggering method according to the first aspect of the present disclosure.

[0039] The camera pulse triggering method, device, equipment and storage medium provided by the embodiments of the present disclosure send first indication information to the machine platform, and when the machine platform meets the first type of judgment condition, send a pulse signal to the target camera, and then when the radius of the spiral line where the machine platform moves meets the first set condition, send second indication information to the machine platform, and then when the machine platform meets the second type of judgment condition, and send a pulse signal to the target camera. Thus, when the machine platform moves along the spiral line, it can combine constant linear velocity motion and constant angular velocity motion, so as to ensure that when the radius of the machine platform is relatively large, the motion speed of the machine platform is ensured through constant linear velocity motion, and the angular velocity increases as the radius of the machine platform decreases, and then switches to constant angular velocity motion when the angular velocity reaches the maximum value, so as to ensure the motion speed of the machine platform throughout the process, thereby ensuring the scanning efficiency of the wafer scanning process, and determining when to send a pulse signal to the target camera through different judgment conditions at different stages, ensuring the accuracy and pertinence of the determined photographing moment, thereby ensuring the reliability of the image captured by the camera, and further ensuring the quality of the scanning. Description of the Drawings

[0040] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention, and those of ordinary skill in the art can obtain other drawings without creative efforts based on these drawings.

[0041] Figure 1 An application scenario diagram of the camera pulse triggering method provided by an embodiment of the present disclosure;

[0042] Figure 2 A flowchart of the camera pulse triggering method provided by an embodiment of the present disclosure;

[0043] Figure 3a A flowchart of the camera pulse triggering method provided by another embodiment of the present disclosure;

[0044] Figure 3b For Figure 3a A flowchart of the pulse signal judgment method during state switching provided by the embodiment shown;

[0045] Figure 4 A schematic structural diagram of the camera pulse triggering device provided by another embodiment of the present disclosure;

[0046] Figure 5 A schematic structural diagram of the control device provided by an embodiment of the present disclosure.

[0047] Through the above-mentioned drawings, the clear embodiments of the present disclosure have been shown, and there will be more detailed descriptions hereinafter. These drawings and textual descriptions are not intended to limit the scope of the concept of the present disclosure in any way, but to illustrate the concept of the present disclosure to those skilled in the art by referring to specific embodiments. Detailed implementation manners

[0048] Here, the exemplary embodiments will be described in detail, and the examples are shown in the drawings. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The implementation manners described in the following exemplary embodiments do not represent all implementation manners consistent with the present disclosure. On the contrary, they are merely examples of the devices and methods consistent with some aspects of the present disclosure as detailed in the appended claims.

[0049] Next, the technical solutions of the present disclosure and how the technical solutions of the present disclosure solve the above technical problems will be described in detail with specific embodiments. The following several specific embodiments can be combined with each other, and the same or similar concepts or processes may not be repeated in some embodiments. Next, the embodiments of the present disclosure will be described with reference to the drawings.

[0050] In the field of semiconductor processing technology, it is usually necessary to use a high-precision time-delay integration camera (also known as a TDI camera) to capture the surface state of a wafer in real time to achieve surface defect detection of the wafer. When the TDI camera detects the wafer, usually every time the machine stage drives the wafer to move a set distance (such as one pixel), it triggers a photo of the TDI camera, and this process is repeated until the wafer is completely captured, and then an image corresponding to the wafer is generated. This process is also the scanning process of the wafer.

[0051] In related technologies, the scanning of the wafer is usually a scanning method based on spiral motion, that is, the TDI camera does not move, and the machine stage drives the wafer to move along a spiral (the machine stage includes a translation stage and a rotation stage, and through the combination of the two, the movement along the spiral is achieved). At this time, the machine stage usually moves based on a fixed angular velocity. However, as the radius corresponding to the position of the machine stage in the spiral gradually decreases, the actual linear velocity of the machine stage will gradually decrease, resulting in an increasingly long pulse trigger time interval and an increasingly low scanning efficiency, and the problem of insufficient detection efficiency of the wafer.

[0052] To solve this problem, the embodiments of the present disclosure provide a camera pulse triggering method, which combines the constant linear velocity motion mode and the constant angular velocity motion mode of the machine stage to ensure the speed of the machine stage throughout the process, and at the same time determines the time for generating the pulse signal in different ways at different stages, thereby fully ensuring the efficiency and quality of wafer scanning.

[0053] The application scenario of the embodiments of the present disclosure will be explained below:

[0054] Figure 1 FIG. is an application scenario diagram of the camera pulse triggering method provided by the embodiments of the present disclosure. As Figure 1 shown, in the surface defect detection of the wafer, the TDI camera 100 captures the wafer 120 on the machine stage 110 to obtain the surface image of the wafer. The machine stage 110 drives the wafer 120 to move along the spiral 130 (the arrow in the figure indicates that the right image is used to show the top view structure of the machine stage part corresponding to the left image and the relationship between the machine stage and the spiral), and then cooperates with the shooting of the TDI camera 100, so as to obtain the image of the entire surface of the wafer 120, and perform surface defect detection based on the image.

[0055] It should be noted that Figure 1 in the scenario shown, only one example of the TDI camera, the machine stage, the wafer, and the spiral is used for illustration, but the present disclosure is not limited thereto. That is to say, the number of the TDI camera, the machine stage, the wafer, and the spiral can be arbitrary.

[0056] The camera pulse triggering method provided by the present disclosure will be described in detail below through specific embodiments.

[0057] Figure 2 The flowchart of the camera pulse triggering method provided by an embodiment of the present disclosure. As Figure 2 shown, the camera pulse triggering method provided by this embodiment includes the following steps:

[0058] Step S201: Send a first indication message to the machine platform.

[0059] Among them, the first indication message is used to instruct the machine platform to move along a spiral line based on a set linear velocity.

[0060] Specifically, the execution subject of the embodiment of the present disclosure is the controller (or control system) of the machine platform and the camera. Signals are sent to the machine platform and the camera through the controller to control the movement mode of the machine platform and enable the camera to perform a photographing action. The target camera is also the TDI camera.

[0061] The set linear velocity is the maximum linear velocity that the machine platform can reach during the movement along the spiral line. Therefore, there is a preparatory stage before sending the first indication message to the machine platform.

[0062] In the preparatory stage, the machine platform can move not along the spiral line, but in a straight line, circular motion or other motion modes. And during the movement, the linear velocity is increased from zero to the set linear velocity. When the linear velocity of the machine platform reaches the set linear velocity and it moves to the set starting position, the first indication message can be sent to the machine platform to enable the machine platform to perform the process of moving along the spiral line at the set linear velocity, that is, the constant linear velocity motion.

[0063] Moving along the spiral line is to move from the position of the maximum radius of the spiral line to the position of the minimum radius (or the center of the spiral line). Therefore, in the case of constant linear velocity motion, the angular velocity will increase as the radius of the spiral line gradually decreases. Therefore, first adopting the constant linear velocity motion can, without the need for additional angular velocity control, make the angular velocity naturally increase to the set angular velocity, and then complete the state switch from constant linear velocity motion to constant angular velocity motion, minimizing the impact of the state switch on the motion state of the machine platform, saving energy, and ensuring the stability and reliability of the state switch process.

[0064] Step S202: Determine that the machine platform meets the first type of judgment condition and send a pulse signal to the target camera.

[0065] Among them, the first type of conditions includes that the distance the machine platform moves according to the set linear velocity meets the set distance condition, and the pulse signal is used to instruct the target camera to perform a photographing action.

[0066] Specifically, usually, the target camera takes a picture each time after the machine stage moves a set distance. However, the controller and the camera do not have the function of directly and real-time identifying the moving distance of the machine stage. Therefore, it is necessary to calculate the linear velocity of the machine stage movement (i.e., the set linear velocity), and combine the movement time (the controller can determine the current time in real-time and determine the movement duration of the machine stage). The moving distance of the machine stage can be calculated. When this moving distance reaches the set distance, the controller can control the target camera to take a picture, that is, send a pulse signal to the target camera to make the target camera take a picture.

[0067] In some embodiments, the set distance in the set distance condition is usually the length of one pixel size (corresponding to "pixelsize" in English). Therefore, the set distance condition can be that the moving distance of the machine stage reaches the set distance or the difference from the set distance is extremely small (less than the moving distance of the machine stage per unit time). Because the width of the camera's one-time scan is generally one pixel size, and there may be image overlap, but it is best not to have omissions during scanning to ensure the reliability of the detection of wafer surface defects.

[0068] Step S203, determine that the radius of the spiral line where the machine stage is located satisfies the first set condition, and send the second indication information to the machine stage.

[0069] Among them, the second indication information is used to instruct the machine stage to move along the spiral line based on the set angular velocity.

[0070] Specifically, the controller can obtain the radius of the spiral line corresponding to the position of the machine stage in real-time. Therefore, the position of the machine stage movement can be monitored through the radius. When the machine stage moves to the position corresponding to a certain radius (i.e., the first set condition), it can be considered that its angular velocity reaches the maximum value. At this time, it is necessary to switch the movement state of the machine stage from constant linear velocity movement to constant angular velocity movement, that is, send the second indication information to the machine stage.

[0071] Step S204, determine that the machine stage satisfies the second type of judgment condition, and send a pulse signal to the target camera.

[0072] Among them, the second type of condition includes determining that the moving distance of the machine stage satisfies the set distance condition according to the set angular velocity and the radius of the spiral line where the machine stage is located.

[0073] Specifically, in the state of constant angular velocity movement, the linear velocity of the machine stage is continuously and dynamically decreasing (because the radius of the spiral line corresponding to the machine stage is continuously decreasing). Therefore, at this time, it is necessary to calculate the moving distance of the machine stage based on the angular velocity and the real-time radius corresponding to the machine stage, and when the moving distance reaches the set distance, control the target camera to take a picture (that is, send a pulse signal to the target camera).

[0074] The camera pulse triggering method provided by the embodiments of the present disclosure sends first indication information to the machine platform, and when the machine platform meets the first type of judgment condition, sends a pulse signal to the target camera. Then, when the radius of the spiral line where the machine platform is located meets the first set condition, sends second indication information to the machine platform, and then when the machine platform meets the second type of judgment condition, sends a pulse signal to the target camera. Thus, when the machine platform moves along the spiral line, it can combine constant linear velocity motion and constant angular velocity motion, so as to ensure that when the radius where the machine platform is located is relatively large, the motion speed of the machine platform is ensured by constant linear velocity motion, and the angular velocity increases as the radius where the machine platform is located decreases. Then, when the angular velocity reaches the maximum value, it switches to constant angular velocity motion, so as to ensure the motion speed of the machine platform throughout the process, thereby ensuring the scanning efficiency of the wafer scanning process, and determining when to send a pulse signal to the target camera through different judgment conditions at different stages, ensuring the accuracy and pertinence of the determined photographing moment, thereby ensuring the reliability of the image captured by the camera, and further ensuring the quality of the scanning.

[0075] Figure 3a is a flowchart of the camera pulse triggering method provided by an embodiment of the present disclosure. As Figure 3a shown, the camera pulse triggering method provided in this embodiment includes the following steps:

[0076] Step S301: Send first indication information to the machine platform.

[0077] Among them, the first indication information is used to instruct the machine platform to move along the spiral line based on the set linear velocity.

[0078] Specifically, this embodiment is used to further illustrate the specific process of camera pulse triggering.

[0079] This step is the same as the corresponding step content in the Figure 2 shown embodiment, and will not be elaborated here.

[0080] Step S302: Determine the arc length of the moving unit angle of the machine platform based on the real-time radius corresponding to the machine platform in the spiral line.

[0081] Specifically, since the signal for triggering the camera is determined based on the moving distance of the machine platform, and the motion trajectory of the machine platform is to move along the spiral line, and the length calculation formula of the spiral line is relatively complex, involving a large number of power and square root operations, and the actual triggering signal has a high frequency and a short calculation time. Therefore, to improve the calculation efficiency, parameters such as the real-time radius and the angle of movement of the machine platform are used to calculate the approximate arc length of the movement of the machine platform to replace the actual arc length, which can significantly reduce the calculation difficulty and improve the calculation efficiency. Therefore, the arc length of the machine platform determined in this embodiment is an approximate arc length.

[0082] The controller can obtain the real-time radius of the machine on the spiral line in real time and can obtain the angle of movement of the machine (the controller is connected to a monitoring device that monitors the real-time radius and the rotation angle of the machine. The monitoring device can determine the real-time radius and the rotation angle corresponding to the machine in real time by monitoring the distance between the machine and the center of the spiral line and the position of the machine. The monitoring device can be an FPGA chip, etc.). Thus, the arc length corresponding to the movement of the machine can be calculated by combining the real-time radius and the angle of movement of the machine.

[0083] Further, based on the product of the real-time radius, the unit angle, and the first setting coefficient, the arc length of the unit angle of movement of the machine is determined.

[0084] Specifically, each circle (or each circumference) of the spiral line can be divided into several arc lengths according to the unit angle, and each arc length is the arc length corresponding to the unit angle. The unit angle here can be 1 degree or any other arbitrary angle, which is not limited here.

[0085] For the arc length corresponding to each unit angle, it can be expressed as L = S * R * θ, where L is the arc length of the unit angle, R is the real-time radius corresponding to the machine, θ is the unit angle, and S is the first setting coefficient.

[0086] Because the arc length in the spiral line under the same radius and angle is slightly longer than the arc length on the standard circle, therefore, a first setting coefficient is added to the above formula to make the calculated result as close as possible to the actual arc length.

[0087] In some embodiments, the first setting coefficient is greater than 1. As mentioned above, the arc length in the spiral line under the same conditions is slightly longer than the arc length on the standard circle, so the first setting coefficient is set to be greater than 1 to reflect this feature.

[0088] In some embodiments, the first setting coefficient has a negative correlation with the real-time radius.

[0089] Since the smaller the real-time radius, the more obvious the change in the real-time radius of each circle of the spiral line (the calculation method of the change in the real-time radius can be: the ratio of the difference between the maximum value and the minimum value of the real-time radius in the same circle to the maximum value), therefore, the smaller the real-time radius, the greater the difference in the shape of the spiral line from the shape of the standard circle under the same conditions, and the greater the difference in the arc length in the spiral line from the arc length on the standard circle. Thus, the smaller the real-time radius, the greater the first setting coefficient.

[0090] Step S303, based on the first duration used by the machine to pass through the unit angle, determine the real-time linear velocity of the machine.

[0091] Specifically, the instruction sent by the controller to the machine tool is to move at a constant linear speed according to the set linear speed. However, in actual execution, due to mechanical errors of the equipment, there may be a certain difference between the actual linear speed of the machine tool and the set linear speed. For example, when the set linear speed is 2000 mm / s, the actual linear speeds at different positions of different spiral lines of the machine tool may be values such as 2000.1 mm / s and 1999.8 mm / s. To ensure the accuracy of calculating the generation time of the pulse signal for the machine tool, it is necessary to determine the generation time of the pulse signal based on the actual linear speed rather than the set linear speed.

[0092] Therefore, it is necessary to determine the real-time linear speed of the machine tool here.

[0093] Furthermore, there are two situations for determining the real-time linear speed:

[0094] In one situation: If the arc length of a unit angle is the first arc length passed by the machine tool, the set linear speed is determined as the real-time linear speed of the machine tool.

[0095] Specifically, when the machine tool just starts to move along the spiral line, the machine tool is at the moment of just accelerating to the set linear speed. At this time, the difference between the speed of the machine tool and the set linear speed is usually the smallest. Therefore, the set linear speed can be directly determined as the real-time linear speed of the machine tool.

[0096] In another situation: If the arc length of a unit angle is after the first arc length passed by the machine tool, the ratio of the arc length of a unit angle to the first time period is determined as the real-time linear speed of the machine tool.

[0097] Specifically, after running an arc length of a unit angle based on the set linear speed, the real-time linear speed of the machine tool can be calculated based on the time used to run this unit angle and the arc length, and the moving distance of the machine tool can be calculated based on this real-time linear speed.

[0098] Since the monitoring device can accurately determine the real-time radius and rotation angle corresponding to the machine tool, the first time period can be conveniently determined. Combining the arc length obtained in the previous steps, the real-time linear speed of the machine tool can be conveniently calculated.

[0099] Step S304, determine the cumulative moving distance of the machine tool based on the product of the real-time linear speed and the unit time.

[0100] Specifically, since there may be a difference between the real-time linear speed and the set linear speed, it is necessary to determine the actual moving distance of the machine tool according to the real-time linear speed. Since the unit time is a value that the controller can accurately determine, therefore, the current cumulative moving distance can be calculated once after each unit time and compared with the set distance condition to determine whether a pulse signal needs to be sent.

[0101] Further, the calculation method of the cumulative movement distance includes: accumulating the product of the real-time linear velocity corresponding to each unit angle arc length after the previous pulse signal and the unit time, to obtain the cumulative movement distance of the machine platform.

[0102] Specifically, after each pulse signal is sent, the calculation of the cumulative movement distance will start, and after each unit time, according to the product of the real-time linear velocity and the unit time for accumulation, it will be compared with the set distance condition. When the cumulative movement distance meets the set distance condition, a pulse signal can be sent again, and the cumulative movement distance can be cleared, and then the next calculation can start.

[0103] Step S305, determine that the cumulative movement distance meets the set distance condition, and send a pulse signal to the target camera.

[0104] Specifically, when the cumulative movement distance meets the set distance condition, a pulse signal can be sent to the target camera to make the target camera take a picture once.

[0105] Further, the judgment of the set distance condition may include: determining that the cumulative movement distance is equal to the set distance, or determining that the difference between the cumulative movement distance and the set distance is less than the real-time distance parameter, and sending a pulse signal to the target camera.

[0106] Among them, the real-time distance parameter is used to represent the product of the most recent real-time linear velocity, the unit time and the second set coefficient, and the second set coefficient is greater than zero and less than 1.

[0107] Specifically, ideally, when the cumulative movement distance is equal to the set distance (such as one pixel size), a picture is taken once. However, in actual situations, it is more likely that the cumulative movement distance is less than the set distance, and if the machine platform moves another unit angle arc length, the cumulative movement distance will be greater than the set distance. Therefore, it is only necessary that the difference between the cumulative movement distance and the set distance is less than the real-time distance parameter.

[0108] The real-time distance parameter here can be expressed as m = S 2 *v 1 *t, where m is the implementation distance parameter, S 2 is the second set coefficient, v 1 is the real-time linear velocity, t is the unit time, and the second set coefficient is usually between 0 and 1, such as 0.5, 0.7 or other values.

[0109] When the controller determines that the cumulative movement distance corresponding to the machine platform meets the set distance condition, a pulse signal will be sent to the target camera once.

[0110] Step S306, determine that the radius of the spiral line where the machine platform moves to meets the first set condition, and send a second indication message to the machine platform.

[0111] Specifically, when the machine tool moves to the set switching position, it is necessary to switch the movement of the machine tool from a constant linear velocity movement to a constant angular velocity movement. The judgment condition for setting the switching position can be that the radius satisfies the first set condition.

[0112] For example, in response to the radius of the spiral line where the machine tool is located being equal to the first set radius, the second indication information is sent to the machine tool. That is, when the real-time radius corresponding to the machine tool is the first set radius, the controller controls the machine tool to switch the operating state.

[0113] Since the judgment conditions for generating the pulse signal will be different before and after the machine tool switches states, it is necessary to immediately make a judgment on whether to send the pulse signal after controlling the machine tool to switch states, that is:

[0114] If the difference between the cumulative movement distance of the machine tool after the previous pulse signal and the set distance is less than the set threshold, a pulse signal is sent to the target camera, where the set threshold is less than the product of the real-time radius corresponding to the machine tool and the unit angle.

[0115] Specifically, the judgment condition here is similar to the set distance condition, but the calculation method of the set threshold and the real-time distance parameter here is different, which is ΔL = S 3 *R*θ, where ΔL is the set threshold, and S 3 is the limiting coefficient corresponding to the set threshold, which is a value less than 1 and greater than 0. The value of S 3 has nothing to do with the aforementioned S 2 These two coefficients are independent of each other. Those skilled in the art can choose their corresponding values according to the actual situation, and no limitation is made here.

[0116] In another case, as Figure 3b shown, it is a flowchart of the pulse signal judgment method during state switching, which includes the following steps:

[0117] Step A1: Determine that the difference between the cumulative movement distance of the machine tool after the previous pulse signal and the set distance is greater than the set threshold.

[0118] Specifically, when the difference between the cumulative movement distance after the previous pulse signal and the set distance is large (greater than the set threshold), it is necessary to combine the distance accumulation in the constant angular velocity state to determine the moment to send the pulse signal to the target camera.

[0119] Step A2: When the sum of the cumulative movement distance of the machine tool after the previous pulse signal and the total real-time movement distance of the machine tool at the set angular velocity satisfies the set distance condition, a pulse signal is sent to the target camera.

[0120] Specifically, when the machine tool moves at a set angular velocity, since the angle of rotation of the machine tool can be directly and accurately detected, the corresponding angular velocity can also be accurately obtained. Therefore, the real-time moving distance of the machine tool under the condition of constant angular velocity can be determined by combining the real-time radius and angular velocity of the machine tool. When the sum of all the real-time moving distances and the cumulative movement distance obtained previously meets the set distance condition, a pulse signal is sent to the target camera. The detailed calculation of the real-time moving distance can be referred to the subsequent steps and will not be elaborated here.

[0121] Step S307: Based on the set angular velocity of the machine tool, determine the target angle passed by the machine tool per unit time.

[0122] Specifically, under the condition of constant angular velocity, the angle of rotation of the machine tool per unit time, that is, the target angle, can be calculated based on the set angular velocity.

[0123] Step S308: Based on the product of the real-time radius, target angle, and the first set coefficient corresponding to the machine tool, determine the real-time moving distance of the machine tool.

[0124] Specifically, based on the target angle, the real-time radius of the machine tool, and the first set coefficient, the arc length corresponding to the movement of the machine tool, that is, the real-time moving distance of the machine tool, can be calculated. Since the angle of the machine tool can be accurately monitored at this time, the arc length obtained directly by using the aforementioned approximate arc length calculation formula can be used as the real-time moving distance of the machine tool.

[0125] Step S309: Accumulate all the real-time moving distances corresponding to the machine tool after the previous pulse signal to obtain the cumulative movement distance of the machine tool.

[0126] Specifically, similar to step S304, by accumulating the real-time moving distances corresponding to the machine tool per unit time after the previous pulse signal, the cumulative movement distance corresponding to the machine tool can be obtained.

[0127] Step S310: Determine that the cumulative movement distance meets the set distance condition and send a pulse signal to the target camera.

[0128] Specifically, the principle of this step is the same as that of step S305 and will not be elaborated here.

[0129] During the constant linear velocity movement of the machine tool, since the angular velocity of the machine tool changes continuously, it is necessary to combine its actual linear velocity and the corresponding cumulative movement distance to determine whether to generate a pulse signal; while during the constant angular velocity movement of the machine tool, since the angular velocity of the machine tool is stable, the cumulative movement distance can be calculated based on the angle and arc length corresponding to the unit time, and it can be determined whether to generate a pulse signal. Through different judgment methods, the accuracy and reliability of the judgment of the pulse signal generation moment are effectively guaranteed, and thus the reliability of the wafer scanning is guaranteed.

[0130] Exemplarily, if the radius of a certain wafer is 150 mm, the total length of its corresponding spiral can be obtained as 69127.20477 mm based on the Archimedes spiral formula. Among them, the pitch is 1 mm per turn, and the first set radius is 22.275 mm.

[0131] At this time, the maximum linear velocity in the constant linear velocity stage can be 2332.63 mm / s. Then, the motion duration when reaching the first set radius (i.e., the duration between the first indication information and the second indication information) is 29.63 s. The angular velocity in the constant angular velocity stage is 1000 rpm. Combining with the pitch, the time taken to turn 22.275 mm is 1.34 s (the total angle corresponding to the 22.275 mm spiral is 22.275 * 2π, and the corresponding time can be calculated by combining with the angular velocity). Therefore, the total duration is 30.97 s.

[0132] In contrast, if the constant angular velocity scheme in the prior art is adopted, with the above maximum linear velocity and the wafer radius as the maximum real-time radius, the angular velocity can be obtained as 15.55 rad / s. At this time, the total angle to be rotated is 150 * 2π, so the total time taken is 60.61 s.

[0133] It can be seen from this that this solution can significantly reduce the scanning time, significantly improve the scanning efficiency, and further improve the surface defect detection efficiency of the wafer.

[0134] The camera pulse triggering method provided by the embodiments of the present disclosure can, before the machine platform moves to the first set radius of the spiral, make the machine platform move at a constant linear velocity, and determine the moment to generate a pulse signal based on the real-time linear velocity. After the machine platform passes through the first set radius, make the machine platform move at a constant angular velocity, and determine the moment to generate a pulse signal based on the arc length passed per unit time. Thus, by combining the constant linear velocity motion and the constant angular velocity, the moving efficiency of the machine platform can be significantly improved, and further the scanning time can be significantly reduced, the scanning efficiency can be significantly improved, and further the surface defect detection efficiency of the wafer can be improved.

[0135] Figure 4 It is a schematic structural diagram of a camera pulse triggering device provided by an embodiment of the present disclosure. As Figure 4 shown, the camera pulse triggering device 400 includes: a preparation module 410, a first trigger module 420, a switching module 430, and a second trigger module 440. Among them:

[0136] The preparation module 410 is configured to send first indication information to the machine platform, where the first indication information is used to instruct the machine platform to move along the spiral based on a set linear velocity;

[0137] The first trigger module 420 is configured to determine that the machine tool meets the first type of judgment condition and send a pulse signal to the target camera. The first type of condition includes that the moving distance of the machine tool at a set linear velocity meets the set distance condition, and the pulse signal is used to instruct the target camera to perform a photographing action.

[0138] The switching module 430 is configured to determine that the radius of the spiral line where the machine tool is located meets the first set condition and send second indication information to the machine tool. The second indication information is used to instruct the machine tool to move along the spiral line based on the set angular velocity.

[0139] The second trigger module 440 is configured to determine that the machine tool meets the second type of judgment condition and send a pulse signal to the target camera. The second type of condition includes that the moving distance of the machine tool meets the set distance condition determined according to the set angular velocity and the radius of the spiral line where the machine tool is located.

[0140] Optionally, the first trigger module 420 is specifically configured to determine the arc length of the moving unit angle of the machine tool based on the real-time radius corresponding to the machine tool in the spiral line; determine the real-time linear velocity of the machine tool based on the first time taken by the machine tool to pass through the unit angle; determine the cumulative movement distance of the machine tool based on the product of the real-time linear velocity and the unit time; determine that the cumulative movement distance meets the set distance condition, and send a pulse signal to the target camera.

[0141] Optionally, the first trigger module 420 is specifically configured to determine the arc length of the moving unit angle of the machine tool based on the product of the real-time radius, the unit angle, and the first set coefficient.

[0142] Optionally, the first trigger module 420 specifically includes that the first set coefficient has a negative correlation with the real-time radius.

[0143] Optionally, the first trigger module 420 is specifically configured to, if the arc length of the unit angle is the first arc length passed by the machine tool, determine the set linear velocity as the real-time linear velocity of the machine tool; if the arc length of the unit angle is after the first end arc length passed by the machine tool, determine the ratio of the arc length of the unit angle to the first time as the real-time linear velocity of the machine tool.

[0144] Optionally, the first trigger module 420 is specifically configured to accumulate the product of the real-time linear velocity corresponding to each unit angle arc length after the previous pulse signal and the unit time to obtain the cumulative movement distance of the machine tool.

[0145] Optionally, the second triggering module 440 is specifically configured to determine a target angle passed by the machine platform per unit time based on the set angular velocity of the machine platform; determine the real-time moving distance of the machine platform based on the product of the real-time radius, the target angle, and the first set coefficient corresponding to the machine platform; accumulate all the real-time moving distances of the machine platform after the previous pulse signal to obtain the cumulative movement distance of the machine platform; determine that the cumulative movement distance meets the set distance condition, and send a pulse signal to the target camera.

[0146] Optionally, the second triggering module 440 is specifically configured to determine that the cumulative movement distance is equal to the set distance, or determine that the difference between the cumulative movement distance and the set distance is less than the real-time distance parameter, and send a pulse signal to the target camera, where the real-time distance parameter is used to represent the product of the most recent real-time linear velocity, the unit time, and the second set coefficient, and the second set coefficient is greater than zero and less than 1.

[0147] Optionally, the switching module 430 is specifically configured to send a second indication message to the machine platform in response to the radius of the spiral line where the machine platform is located being equal to the first set radius.

[0148] Optionally, after the switching module 430 is further configured to send a second indication message to the machine platform in response to the radius of the spiral line where the machine platform is located being equal to the first set radius, if the difference between the cumulative movement distance of the machine platform after the previous pulse signal and the set distance is less than the set threshold, send a pulse signal to the target camera, where the set threshold is less than the product of the real-time radius corresponding to the machine platform and the unit angle; or determine that the difference between the cumulative movement distance of the machine platform after the previous pulse signal and the set distance is greater than the set threshold; when the sum of the cumulative movement distance of the machine platform after the previous pulse signal and all the real-time movement distances of the machine platform at the set angular velocity meets the set distance condition, send a pulse signal to the target camera.

[0149] In this embodiment, the camera pulse triggering device solves the problems of slow speed and low scanning efficiency in the related art during the scanning process of the wafer surface through the combination of each module, significantly improves the scanning efficiency during the wafer scanning process, and ensures the scanning quality.

[0150] Figure 5 The structural schematic diagram of the control device provided by an embodiment of the present disclosure is as Figure 5 shown. The control device 500 includes: a memory 510 and a processor 520.

[0151] Wherein, the memory 510 stores a computer program executable by at least one processor 520. The computer program is executed by at least one processor 520 to enable the control device to implement the material taking-out method provided in any one of the above embodiments or the camera pulse triggering method provided in any one of the above embodiments.

[0152] Among them, the memory 510 and the processor 520 can be connected through the bus 530.

[0153] For relevant descriptions, reference can be made to the relevant descriptions and effects corresponding to the method embodiments, which will not be elaborated here.

[0154] For relevant descriptions, reference can be made to the relevant descriptions and effects corresponding to the method embodiments, which will not be elaborated here.

[0155] An embodiment of the present disclosure provides a computer-readable storage medium, on which a computer program is stored. The computer program is executed by a processor to implement the material extraction method provided in any one of the above method embodiments or the camera pulse triggering method provided in any one of the above embodiments.

[0156] Among them, the computer-readable storage medium can be ROM, random access memory (RAM), CD-ROM, magnetic tape, floppy disk, optical data storage device, etc.

[0157] An embodiment of the present disclosure provides a computer program product, which includes computer-executable instructions. When the computer-executable instructions are executed by a processor, they are used to implement the material extraction method in the above method embodiments or the camera pulse triggering method provided in any one of the above embodiments.

[0158] Those of ordinary skill in the art can understand that all or part of the processes in the above method embodiments can be completed by instructing relevant hardware through a computer program. The program can be stored in a computer-readable storage medium. When the program is executed, it can include the processes of the above method embodiments. Among them, the storage medium can be a magnetic disk, an optical disk, a read-only memory (ROM), or a random access memory (RAM), etc.

[0159] Each of the above modules or units can be implemented by software, hardware, or a combination of software and hardware. For example, in a relatively preferred scenario, the above first trigger module, second trigger module, and switching module can all be implemented based on software.

[0160] In this application, "implemented by software" means that the processor reads and executes program instructions stored in the memory to implement the functions corresponding to the above-mentioned modules or units. Herein, the processor refers to a processing circuit with the function of executing program instructions, including but not limited to at least one of the following: central processing unit (CPU), microprocessor, digital signal processor (DSP), microcontroller unit (MCU), or artificial intelligence processor, etc., which are various processing circuits capable of running program instructions. In some other embodiments, the processor may further include circuits with other processing functions (such as hardware circuits for hardware acceleration, bus and interface circuits, etc.). The processor may be presented in the form of an integrated chip. For example, it may be presented in the form of an integrated chip whose processing function only includes the function of executing software instructions, or it may also be presented in the form of an SoC (system on a chip). That is, on one chip, in addition to including a processing circuit capable of running program instructions (usually referred to as a "core"), it also includes other hardware circuits for implementing specific functions (of course, these hardware circuits can also be separately implemented based on ASIC or FPGA). Correspondingly, in addition to the function of executing software instructions, the processing function may also include various hardware acceleration functions (such as AI computing, encoding and decoding, compression and decompression, etc.).

[0161] In this application, "implemented by hardware" means that the functions of the above-mentioned modules or units are implemented by a hardware processing circuit without program instruction processing capabilities. This hardware processing circuit can be composed of discrete hardware components or can be an integrated circuit. To reduce power consumption and size, the integrated circuit form is usually adopted for implementation. The hardware processing circuit can include an ASIC (application-specific integrated circuit), or a PLD (programmable logic device); among them, the PLD can further include an FPGA (field programmable gate array), a CPLD (complex programmable logic device), and so on. These hardware processing circuits can be a separately packaged semiconductor chip (such as packaged as an ASIC); or can be integrated with other circuits (such as a CPU, a DSP) and then packaged into a semiconductor chip. For example, multiple hardware circuits and a CPU can be formed on a silicon substrate and separately packaged into a chip. This kind of chip is also called an SoC, or a circuit for implementing the FPGA function and a CPU can be formed on a silicon substrate and separately enclosed into a chip. This kind of chip is also called an SoPC (system on a programmable chip).

[0162] It should be noted that when this application is implemented in a software, hardware, or software-hardware combination manner, different software and hardware can be used, and it is not limited to only using one kind of software or hardware. For example, one of the modules or units can be implemented using a CPU, and another module or unit can be implemented using a DSP. Similarly, when implemented using hardware, one of the modules or units can be implemented using an ASIC, and another module or unit can be implemented using an FPGA. Of course, it is not limited that some or all of the modules or units are implemented using the same software (such as all through a CPU) or the same hardware (such as all through an ASIC). In addition, for those skilled in the art, it can be known that software is generally more flexible but has lower performance than hardware, while hardware is just the opposite. Therefore, those skilled in the art can choose software or hardware or a combination of both according to actual needs for implementation.

[0163] The above-mentioned preferred embodiments further elaborate on the purpose, technical solutions, and advantages of the present invention. It should be understood that the above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims

1. A camera pulse triggering method, characterized in that: The camera pulse triggering method comprises: Sending first instruction information to the machine, wherein the first instruction information is used to instruct the machine to move along the spiral line based on a set linear speed; Determine that the machine satisfies a first type of judgment condition, and send a pulse signal to a target camera, wherein the first type of condition includes that the machine moves a distance at a set linear speed to satisfy a set distance condition, and the pulse signal is used to instruct the target camera to perform a photo-taking action; Determine that the radius of the spiral line to which the machine moves meets a first set condition, and send second instruction information to the machine, wherein the second instruction information is used to instruct the machine to move along the spiral line based on a set angular velocity; Determine that the platform meets the second type of judgment condition, and send a pulse signal to the target camera, wherein the second type of condition includes determining that the platform movement distance meets the set distance condition according to the set angular velocity and the radius of the spiral line where the platform is located.

2. The method according to claim 1, characterized in that The step of determining that the machine satisfies the first type of judgment condition and sending a pulse signal to the target camera includes: Determine the arc length of the moving unit angle of the machine platform based on the real-time radius corresponding to the machine platform in the spiral line; Determining a real-time linear speed of the machine based on a first time length taken by the machine to pass through the unit angle; Determine the accumulated movement distance of the machine based on the product of the real-time linear velocity and the unit time; It is determined that the accumulated movement distance meets a set distance condition, and a pulse signal is sent to the target camera.

3. The method according to claim 2, characterized in that The step of determining the arc length of the moving unit angle of the machine platform based on the real-time radius corresponding to the machine platform in the spiral line includes: The arc length of the moving unit angle of the platform is determined based on the product of the real-time radius, the unit angle and a first setting coefficient.

4. The method according to claim 2, characterized in that: The first setting coefficient is negatively correlated with the real-time radius.

5. The method according to claim 2, characterized in that: The determining the real-time linear speed of the machine based on the first time length taken by the machine to pass through the unit angle includes: If the arc length of the unit angle is the length of the first arc section that the machine passes through, the set linear speed is determined as the real-time linear speed of the machine; If the arc length of the unit angle is behind the first end arc length of the machine, the ratio of the arc length of the unit angle to the first time length is determined as the real-time linear speed of the machine.

6. The method according to claim 2, characterized in that The determining the accumulated movement distance of the machine based on the product of the real-time linear velocity and the unit time includes: The product of the real-time linear velocity and the unit time corresponding to each unit angle arc length after the previous pulse signal is accumulated to obtain the cumulative movement distance of the machine.

7. The method according to any one of claims 1 to 6, characterized in that The step of determining that the machine satisfies the second type of judgment condition and sending a pulse signal to the target camera includes: Determining a target angle that the machine passes per unit time based on a set angular velocity of the machine; Determine the real-time moving distance of the machine based on the product of the real-time radius corresponding to the machine, the target angle and the first setting coefficient; Accumulate all real-time moving distances of the machine corresponding to the previous pulse signal to obtain the cumulative moving distance of the machine; It is determined that the accumulated movement distance meets a set distance condition, and a pulse signal is sent to the target camera.

8. The method according to claim 7, characterized in that The determining that the accumulated movement distance satisfies a set distance condition and sending a pulse signal to the target camera includes: Determine that the accumulated movement distance is equal to a set distance, or determine that the difference between the accumulated movement distance and the set distance is less than a real-time distance parameter, and send a pulse signal to the target camera, wherein the real-time distance parameter is used to represent the product of the most recent real-time linear velocity, the unit time and a second set coefficient, and the second set coefficient is greater than zero and less than 1.

9. The method according to claim 7, characterized in that: The step of determining that the radius of the spiral line to which the machine moves satisfies a first set condition, and sending second indication information to the machine, includes: In response to the machine moving to a spiral line where the radius is equal to the first set radius, second indication information is sent to the machine.

10. The method according to claim 9, characterized in that In response to the machine moving to a position where the radius of the spiral line is equal to the first set radius, after sending the second indication information to the machine, the method further includes: If the difference between the accumulated movement distance of the machine after the previous pulse signal and the set distance is less than a set threshold, a pulse signal is sent to the target camera, wherein the set threshold is less than the product of the real-time radius corresponding to the machine and the unit angle; or, Determine that the difference between the accumulated movement distance of the machine after the previous pulse signal and the set distance is greater than a set threshold; When the cumulative movement distance of the platform after the previous pulse signal and the total real-time movement distance of the platform at the set angular velocity meet the set distance condition, a pulse signal is sent to the target camera.

11. A camera pulse triggering device, characterized in that: The camera pulse triggering device comprises: A preparation module, used for sending first instruction information to the machine, wherein the first instruction information is used for instructing the machine to move along the spiral line based on a set linear speed; A first trigger module is used to determine that the machine meets the first type of judgment conditions and send a pulse signal to the target camera, wherein the first type of conditions includes that the machine moves a distance at a set linear speed to meet a set distance condition, and the pulse signal is used to instruct the target camera to perform a photo taking action; A switching module, used to determine that the radius of the spiral line to which the machine moves meets a first set condition, and send second indication information to the machine, wherein the second indication information is used to instruct the machine to move along the spiral line based on a set angular velocity; The second trigger module is used to determine whether the machine meets the second type of judgment conditions and send a pulse signal to the target camera, wherein the second type of conditions includes determining that the moving distance of the machine meets the set distance condition according to the set angular velocity and the radius of the spiral line where the machine is located.

12. A control device, characterized in that: include: at least one processor; and a memory communicatively coupled to the at least one processor; The memory stores instructions that can be executed by the at least one processor, and the instructions are executed by the at least one processor to enable the control device to perform the camera pulse triggering method as described in any one of claims 1 to 10.

13. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores computer-executable instructions, which are used to implement the camera pulse triggering method according to any one of claims 1 to 10 when executed by a processor.

14. A computer program product, characterized in that The computer program product comprises computer-executable instructions, which are used to implement the camera pulse triggering method according to any one of claims 1 to 10 when executed by a processor.

Images