Element drawing method, device and equipment of test photomask, medium and product

Abstract

The invention discloses an element drawing method, device and equipment of a test photomask, a medium and a product, and is applied to the technical field of photoetching. According to the element drawing method of the test photomask provided by the embodiment of the invention, the parameter configuration interface of the element is displayed before element drawing, and the parameter configuration interface comprises the corresponding grid matrix for setting the element, so that a user can customize the parameter information of the element by inputting the grid matrix. In this way, when element drawing is carried out, the elements can be drawn according to the element parameter information defined by the user. And the element information defined by the user is relatively flexible and can meet the requirements of the user, so that the method is not limited to the preset element parameter information to draw the elements any more, the drawing process is more flexible, and the personalized requirements of the user can be met.

Description

Technical Field

[0001] This application belongs to the field of lithography technology, and particularly relates to a method, apparatus, device, medium and product for element drawing of a test reticle. Background Art

[0002] In the production process of semiconductor integrated circuits, it is necessary to draw elements such as graphics and text on a test reticle for simulation in lithography, source-mask optimization, and model calibration. Currently, it is necessary to first construct a canvas panel, and then draw text and graphics on the test reticle based on a third-party font library in the system and set graphic styles.

[0003] However, the elements drawn in this way are all drawn based on the elements preset in the system, lacking flexibility and unable to meet the personalized needs of users. Summary of the Invention

[0004] Embodiments of this application provide a method, apparatus, device, medium and product for element drawing of a test reticle, which can make the drawing process more flexible to meet the personalized needs of users.

[0005] On the one hand, embodiments of this application provide a method for element drawing of a test reticle, including:

[0006] Displaying a parameter configuration interface for an element; the element is used to be set on the test reticle, and the parameter configuration interface is used to set a grid matrix corresponding to the element, and the display points in the grid matrix form the corresponding element;

[0007] Responding to a first input of the user to the grid matrix, determining custom parameter information of the element;

[0008] Displaying an element drawing interface of the test reticle;

[0009] Responding to a second input of the user to the element drawing interface, determining a target element to be pre-drawn on the test reticle;

[0010] Drawing the target element on the element drawing interface according to the parameter information of the target element; the parameter information includes the custom parameter information and / or preset parameter information.

[0011] On the other hand, the element includes a graphic and / or text;

[0012] Correspondingly, the parameter information corresponding to the graphic includes: graphic size and / or graphic style;

[0013] The parameter information corresponding to the text includes any one or any combination of the following: text size, text style, and inter-character spacing.

[0014] On the other hand, the custom parameter information includes the element size;

[0015] Determining the custom parameter information of the element in response to a first input of the user to the grid matrix includes:

[0016] In response to the first input of the user to adjust the grid size of the grid matrix, determining the corresponding element size.

[0017] On the other hand, the custom parameter information includes the element style;

[0018] Determining the custom parameter information of the element in response to a first input of the user to the grid matrix includes:

[0019] In response to the first input of the user to adjust the display position of the grid matrix, determining the corresponding element style.

[0020] On the other hand, the custom parameter information includes the inter-character spacing;

[0021] Determining the custom parameter information of the element in response to a first input of the user to the grid matrix includes:

[0022] In response to the first input of the user to adjust the spacing between two grid matrices corresponding to adjacent texts, determining the corresponding inter-character spacing.

[0023] On the other hand, the preset parameter information includes the preset parameter information of the text style, and the turning angles of the strokes of the text in the preset parameter information of the text style include 90° and 45°.

[0024] On the other hand, after drawing the target element on the element drawing interface according to the parameter information of the target element, the method further includes:

[0025] Generating a layout file based on the drawn target element;

[0026] Merging multiple layout files corresponding to the same test reticle to obtain a target layout file.

[0027] Still on the other hand, an embodiment of the present application provides an element drawing device for a test reticle, including:

[0028] A first display module for displaying a parameter configuration interface of an element; the element is used to be arranged on the test reticle, and the parameter configuration interface is used to set the grid matrix corresponding to the element, and the display positions in the grid matrix form the corresponding element;

[0029] A first determination module, configured to determine custom parameter information of the element in response to a first input of a user to the grid matrix.

[0030] A second display module, configured to display an element drawing interface of the test reticle.

[0031] A second determination module, configured to determine a target element to be pre-drawn on the test reticle in response to a second input of the user to the element drawing interface.

[0032] A drawing module, configured to draw the target element on the element drawing interface according to the parameter information of the target element; the parameter information includes the custom parameter information and / or preset parameter information.

[0033] On the other hand, an embodiment of the present application provides an element drawing device for a test reticle, including: a processor and a memory storing computer program instructions.

[0034] When the processor executes the computer program instructions, the element drawing method of the test reticle as described above is implemented.

[0035] On the other hand, an embodiment of the present application provides a computer-readable storage medium, on which computer program instructions are stored, and when the computer program instructions are executed by a processor, the element drawing method of the test reticle as described above is implemented.

[0036] On the other hand, an embodiment of the present application provides a computer program product, and when the instructions in the computer program product are executed by a processor of an electronic device, the electronic device is enabled to execute the element drawing method of the test reticle as described above.

[0037] In the element drawing method provided by the embodiment of the present application, a parameter configuration interface of the element is displayed before element drawing, and the parameter configuration interface includes a grid matrix for setting the element corresponding thereto, so that the user can customize the parameter information of the element by inputting to the grid matrix. In this way, when element drawing is performed, the element can be drawn according to the element parameter information customized by the user. The element information customized by the user is relatively flexible and can meet the user's needs. Therefore, the embodiment of the present application is no longer limited to the preset element parameter information to draw the element, making the drawing process more flexible and capable of meeting the personalized needs of the user. Description of the Drawings

[0038] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required to be used in the embodiments of the present application. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings without creative efforts.

[0039] Figure 1 The flowchart shows the method for drawing elements of a test reticle provided by an embodiment of the present application;

[0040] Figure 2 The structural diagram shows the device for drawing elements of a test reticle provided by an embodiment of the present application;

[0041] Figure 3 The hardware structure diagram shows the equipment for drawing elements of a test reticle provided by an embodiment of the present application. Detailed implementation manners

[0042] The features and exemplary embodiments of various aspects of the present application will be described in detail below. To make the objectives, technical solutions and advantages of the present application more clear and understandable, the present application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than to limit the present application. For those skilled in the art, the present application can be implemented without some of these specific details. The following description of the embodiments is only intended to provide a better understanding of the present application by showing examples of the present application.

[0043] It should be noted that, in this document, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or sequence between these entities or operations. Moreover, the term "comprises", "comprising" or any other variation thereof is intended to cover a non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements, but also other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, elements defined by the statement "comprising..." do not exclude the presence of additional identical elements in the process, method, article or device comprising such element.

[0044] Model-based optical proximity correction has been widely used since the 90nm node. First, test patterns are designed and test reticles are prepared. Exposure and development are performed using the test reticle, and the line width data of the photoresist pattern on the wafer is collected. A photoresist model is established through the data. Subsequently, the elements are corrected using the photoresist model, and a reticle after optical proximity correction processing is generated. Traditional test reticle layout design is drawn based on preset patterns and texts, which is not flexible enough to meet the personalized needs of users.

[0045] To solve the problems of the traditional solution, the embodiments of the present application provide a method, device, equipment, medium and product for drawing elements of a test reticle. First, the method for drawing elements of the test reticle provided by the embodiments of the present application will be introduced below. Figure 1 Fig. shows a schematic flowchart of a method for drawing elements of a test reticle provided by an embodiment of the present application. As Figure 1 shown, the method includes the following steps:

[0046] S101: Display a parameter configuration interface for the element.

[0047] The element is used to be set on the test reticle and may include graphic elements, text elements, etc. The text elements are mainly numbers and letters. The parameter configuration interface is mainly used to provide a configuration channel for element parameters for the user. During the production process, the user may find that some elements with special requirements need to be drawn. For example, the turning angles of the strokes need to be 90° and 45°. At this time, the user can operate through the parameter configuration interface, so as to be able to draw the required personalized elements, effectively improving the freedom of drawing the test reticle.

[0048] In this embodiment, each element corresponds to a grid matrix. The parameter configuration interface is used to set the grid matrix corresponding to the element. The display points in the grid matrix form the corresponding element. The display points in the grid matrix form the specific element, and the remaining points in the grid matrix except the display points are blank. For example, in a 10*10 grid matrix, set the display points corresponding to the shape of the number "1" to represent the number "1".

[0049] In a specific implementation, specific setting options can be displayed in the parameter configuration interface. Click on the corresponding option to further display a specific element parameter configuration box, such as the "grid size" and "display point area" of the element, etc. By setting the corresponding values in the configuration box, the parameter configuration of the element can be achieved.

[0050] S102: In response to the first input of the user on the grid matrix, determine the custom parameter information of the element.

[0051] In actual operation, the user can send a first input to the grid matrix in the parameter configuration interface to determine the custom parameter information of the element. For example, in order to draw numbers and letters with stroke turning angles of 90° and 45°, the display points in the grid matrix can be determined for each number and letter respectively, so that the stroke turning angles are 90° and 45°. Another example is that if elements of a corresponding size need to be drawn, the grid size of the grid matrix can be adjusted, and elements of the corresponding size can be obtained during drawing.

[0052] S103: Display an element drawing interface of the test reticle.

[0053] After the user sets the custom parameter information, the element drawing interface of the test mask is displayed, so that the user can draw test graphics and text on the element drawing interface. In actual scenarios, a container can be built using software tools, and then a canvas panel can be created. The user can add the elements to be drawn on the created canvas panel.

[0054] S104: In response to a second input of the user to the element drawing interface, determining a target element pre-drawn on the test mask.

[0055] The user may issue a second input to the element drawing interface to draw a target element on the element drawing interface. For example, the user may input corresponding numbers and letters, or drag a corresponding test pattern into the element drawing interface.

[0056] S105: Draw the target element on the element drawing interface according to the parameter information of the target element.

[0057] Finally, after determining the target element input by the user, the target element needs to be drawn on the element drawing interface. Before drawing, the parameter information corresponding to the target element needs to be determined, such as the size and style of the target element.

[0058] The parameter information specifically includes custom parameter information and / or preset parameter information. The custom parameter information is the personalized elements defined by the user as mentioned above, while the preset parameter information is some parameter information that comes with the system. If the user has already set the custom parameter information, the size and style of the target element can be determined based on the custom parameter information. If the user has not set the custom parameter information, the size and style of the target element can be determined based on the preset parameter information that comes with the system. For example, some basic test graphics, preset font libraries, etc.

[0059] After drawing is completed, the generated test graphics and text are generally output as a layout file, such as a Graphic Data System (GDS) file or an Open Artwork System Interchange Standard (OASIS) file. The GDS file details the physical layout information of the chip, including the geometric shapes, dimensions of the circuit, and the relative positions between layers, etc. This information is crucial for subsequent manufacturing processes as it directly affects the performance and functionality of the chip. The OASIS file is used to describe the layout of integrated circuits. It defines the codes required for geometric shapes such as rectangles, trapezoids, and polygons, as well as the type of each attribute, how these shapes are organized into pattern units, and their relative positions. This format is a readable text format designed to replace the GDS file format, providing a smaller file size and a more convenient transmission method.

[0060] In practical applications, the above application can be created based on Python, creating a fast and convenient application environment for users to quickly create a large number of basic test graphics and reasonably place markers and gauges.

[0061] First, create a canvas panel according to the Python script, and add a manager on it to build different graphic settings (pattern setting) to place different types of graphics. For graphic types, a variety of commonly used graphic types are pre-entered in the preset graphic library. In addition, users can also implement custom graphic type settings through scripts. The specific method is to add the definition of new graphic types in the existing graphic library according to geometric logic.

[0062] In addition, with the generation of markers, dummies, and text, text drawing is required. The solution provided by the embodiments of the present application can achieve custom font output, specifically through the control of graphic auxiliary information in the software system. For example, according to the designed text style, control the positions of the display points in the grid matrix to achieve custom text styles.

[0063] The following uses the drawing steps of a specific test reticle to illustrate the solution of the present application.

[0064] First, open the software tool system and set the initialization global parameters: including the settings and saving of outputting GDS files or OAS files, the size of the canvas, and the size of a single graphic and the distance between different graphics, etc.

[0065] Then, when it is necessary to modify the detailed settings of the graphic information, click on "config Settings" to enter the detailed settings of the graphic information, including the position and size information of markers, dummies, and texts. In addition, there are also output settings for the job, custom font library settings, and some other details, which take default values except in special cases. In the job output settings, the user can choose whether to output gauge files, whether to output table files, and set the unit of the numerical values in the file information. In other settings of the software, the user can set the precision information.

[0066] Next, enter the settings interface, add a job and set the graphic parameters. The specific operations are as follows: Click on the graphic type, and its type parameters can be added to the worksheet by dragging. Here, in addition to the default parameters and label settings, there are also some settings for the detailed functions, including initial coordinate settings, description title settings, and graphic sorting method settings, etc. In addition, there are also settings for the numerical values of variable parameters. There are two main categories of ways to add variables. One is the one-to-one input mode; the other is the free combination mode. Regarding the free combination, it is divided into three cases, namely scatter points, input absolute values, and input relative values. When it is necessary to filter variables, a filter can be set to filter out the numerical values that meet the set conditions.

[0067] Finally, click "Run" after the settings are completed. At the same time, other jobs can also be set continuously. Click the shortcut key to run all, and in addition, the merge button can be clicked to merge the results of each job run together to generate the final target layout file.

[0068] The solution proposed in this application is the result of internal development based on the actual user needs. By calling the GDS and Klayout libraries, the defined graphic type information and configured text description information are uniformly called through the manager to realize the drawing of the test mask.

[0069] A method for drawing elements of a test mask provided by an embodiment of this application will display a parameter configuration interface of the element before drawing the element. The parameter configuration interface includes a grid matrix used to set the element corresponding to it, so that the user can customize the parameter information of the element by inputting to the grid matrix. In this way, when drawing the element, the element can be drawn according to the user-defined element parameter information. The user-defined element information is relatively flexible and can meet the user's needs. Therefore, the embodiment of this application is no longer limited to the preset element parameter information to draw the element, making the drawing process more flexible and able to meet the personalized needs of the user.

[0070] As mentioned in the above embodiments, the elements are used to be set on the test reticle. Generally, the elements include some graphics and texts (mainly numbers, letters, etc.). For example, some basic test graphics, and the texts include marker and gauge. The marker is a positioning identifier used to position the test reticle. The gauge is an explanatory information of the test graphics and is a mark of the test graphics, used to measure the cd or space of the test graphics. Correspondingly, the parameter information corresponding to the graphics includes: graphic size and / or graphic style; the parameter information corresponding to the texts includes any one or any combination of the following: text size, text style, and inter-character spacing.

[0071] In the solution provided by the embodiments of the present application, when generating the drawing parameters, for the text, the grid matrix can be determined based on the required text size, inter-character spacing, and text style; for the graphics, the grid matrix can be determined based on the required graphic style and graphic size, so as to obtain the actual required text and graphics of the user, and further meet the actual production needs.

[0072] As mentioned in the above embodiments, the user can determine the custom parameter information of the element based on the first input to the grid matrix. In practical applications, the custom parameter information may include the element size; for example, the size of the test graphics and the size of the text. In the actual production process, the user may need graphics and texts of different sizes to meet the production requirements.

[0073] Therefore, the embodiments of the present application provide a specific determination scheme. In response to the user's first input to the grid matrix, determine the custom parameter information of the element, including: in response to the user's first input to adjust the grid size of the grid matrix, determine the corresponding element size. Because the display points in the grid matrix form the corresponding element. For example, for the number "1", the display points of the corresponding shape can be set in the corresponding grid matrix to obtain the number "1", and by adjusting the grid size of the grid matrix, different sizes of the number "1" can be obtained, so as to meet the actual needs.

[0074] In the embodiments of the present application, the user can adjust the size of the grids in the grid matrix to obtain the corresponding-sized text and graphics to meet the actual needs.

[0075] In practical applications, the custom parameter information may further include the element style, such as the graphic style and the text style. The graphic style represents the specific shape of the graphic, and the text style also represents the shape of the text. In the actual production process, the user may find that certain specific styles of graphics and texts are more beneficial to actual production, so the element style can be defined by the user himself. The embodiments of the present application provide a specific implementation scheme. In response to the user's first input to the grid matrix, determine the custom parameter information of the element, including: in response to the user's first input to adjust the display points of the grid matrix, determine the corresponding element style.

[0076] For example, for each letter and number, the display positions are preset in the grid matrix in advance. Assuming that the black dots are the display positions and the white dots represent blanks, all the black dots combined form the letters or numbers of the corresponding text styles. For example, if the user finds that the turning angles of the text strokes are 90° and 45°, which are more conducive to production, then all text styles can be set according to this rule. By setting the positions of all the black dots, the text with turning angles of 90° and 45° for all strokes can be obtained.

[0077] In the embodiments of the present application, the user can obtain the required graphic styles and text styles by adjusting the display positions in the grid matrix. The user can set the required text styles by himself, so as to meet the personalized needs and improve the convenience of production.

[0078] In addition, for text elements, when actually drawing, the spacing between different texts can also be set. Therefore, the custom parameter information can also include the inter-character spacing. Specifically, in response to the first input of the user to the grid matrix, the custom parameter information of the element is determined, including: in response to the first input of the user to adjust the spacing between two grid matrices corresponding to adjacent texts, the corresponding inter-character spacing is determined.

[0079] In the embodiments of the present application, the user can adjust the corresponding inter-character spacing by adjusting the spacing between the grid matrices corresponding to adjacent texts, and the user can adjust the required inter-character spacing by himself accordingly.

[0080] In actual production, there are difficulties in the production and manufacturing of letters and numbers that are neither 90° nor 45°. Therefore, the preset parameter information in the embodiments of the present application includes text style preset parameter information, and the turning angles of the text strokes in the text style preset parameter information include 90° and 45°.

[0081] In the embodiments of the present application, a preset font library is established in advance. In the text styles of the preset font library, the turning angle of each text stroke only includes 90° and 45°. Drawing with this text style in the test reticle is more conducive to the actual production of the test reticle.

[0082] In specific implementation, multiple tasks can be started simultaneously, and the target elements are drawn on the element drawing interface respectively, and then the corresponding layout files can be obtained respectively. These layout files can belong to the same test reticle. In this way, multi-task parallel execution can be realized, thereby improving the drawing efficiency. Specifically, after drawing the target element on the element drawing interface according to the parameter information of the target element, the method further includes: generating a layout file based on the drawn target element; and then merging multiple layout files corresponding to the same test reticle to obtain a target layout file.

[0083] In the case where the embodiments of the present application run multiple operations to generate multiple operation results (layout files), an operation of merging them together can be achieved. The GDS files or OASIS files generated by running multiple operations are merged into one layout file, the information of different layers is merged one by one, and information overlap is avoided at the same time, which can effectively improve the drawing efficiency of a large number of test patterns.

[0084] To solve the above technical problems, the embodiments of the present application further provide an element drawing device for a test reticle. Figure 2 The structural schematic diagram of the element drawing device for a test reticle provided by the embodiments of the present application is shown. As Figure 2 shown, the device includes the following modules:

[0085] The device provided by the embodiments of the present application is the same as the method in the above embodiments, so the two have the same embodiments and beneficial effects, which will not be elaborated here.

[0086] The first display module 201 is used to display the parameter configuration interface of the element; the element is used to be set on the test reticle, and the parameter configuration interface is used to set the grid matrix corresponding to the element, and the display points in the grid matrix form the corresponding element;

[0087] The first determination module 202 is used to determine the custom parameter information of the element in response to the user's first input to the grid matrix;

[0088] The second display module 203 is used to display the element drawing interface of the test reticle;

[0089] The second determination module 204 is used to determine the target element to be pre-drawn on the test reticle in response to the user's second input to the element drawing interface;

[0090] The drawing module 205 is used to draw the target element on the element drawing interface according to the parameter information of the target element; the parameter information includes custom parameter information and / or preset parameter information.

[0091] In some embodiments, the element includes a graphic and / or text;

[0092] Correspondingly, the parameter information corresponding to the graphic includes: graphic size and / or graphic style;

[0093] The parameter information corresponding to the text includes any one or any combination of the following: text size, text style, and inter-character spacing.

[0094] In some embodiments, the custom parameter information includes the element size;

[0095] The first determination module 202 is specifically used to determine the corresponding element size in response to the user's first input for adjusting the grid size of the grid matrix.

[0096] In some embodiments, the custom parameter information includes element styles;

[0097] The first determination module 202 is specifically configured to determine the corresponding element style in response to a first input for the user to adjust the display position of the grid matrix.

[0098] In some embodiments, the custom parameter information includes inter-character spacing;

[0099] The first determination module 202 is specifically configured to determine the corresponding inter-character spacing in response to a first input for the user to adjust the spacing between two grid matrices corresponding to adjacent characters.

[0100] In some embodiments, the preset parameter information includes preset parameter information for text styles, and the turning angles of the strokes of the text in the preset parameter information for text styles include 90° and 45°.

[0101] In some embodiments, the element drawing device for a test reticle further includes: a generation module, configured to generate a layout file based on the drawn target element after drawing the target element on the element drawing interface according to the parameter information of the target element;

[0102] A merging module, configured to merge multiple layout files corresponding to the same test reticle to obtain a target layout file.

[0103] Figure 3 FIG. shows a schematic hardware structure diagram of an element drawing device for a test reticle provided by an embodiment of the present application. As Figure 3 shown, the element drawing device for a test reticle may include a processor 301 and a memory 302 storing computer program instructions.

[0104] Specifically, the above-mentioned processor 301 may include a central processing unit (CPU), or an application specific integrated circuit (ASIC), or one or more integrated circuits configured to implement the embodiments of the present application.

[0105] The memory 302 may include a mass storage for data or instructions. By way of example and not limitation, the memory 302 may include a hard disk drive (HDD), a floppy disk drive, a flash memory, an optical disk, a magneto-optical disk, a magnetic tape, or a universal serial bus (USB) drive, or a combination of two or more of these. Where appropriate, the memory 302 may include removable or non-removable (or fixed) media. Where appropriate, the memory 302 may be internal or external to the integrated gateway disaster recovery device. In a particular embodiment, the memory 302 is a non-volatile solid-state memory.

[0106] The memory 302 may include a read-only memory (ROM), a random access memory (RAM), a magnetic disk storage media device, an optical storage media device, a flash memory device, an electrical, optical, or other physical / tangible memory storage device. Thus, in general, the memory includes one or more tangible (non-transitory) computer-readable storage media (e.g., memory devices) encoded with software including computer-executable instructions, and when the software is executed (e.g., by one or more processors), it is operable to perform the operations described with reference to the method according to one aspect of the present disclosure.

[0107] The processor 301 reads and executes the computer program instructions stored in the memory 302 to implement any one of the test reticle element drawing methods in the above embodiments.

[0108] In one example, the test reticle element drawing device may further include a communication interface 303 and a bus 304. The processor 301, the memory 302, and the communication interface 303 are connected through the bus 304 to complete communication with each other.

[0109] The communication interface 303 is mainly used to implement communication between the various modules, devices, units, and / or devices in the embodiments of the present application.

[0110] The bus 304 includes hardware, software, or both, and couples components of the element drawing device of the test reticle together. By way of example and not limitation, the bus may include an Accelerated Graphics Port (AGP) or other graphics bus, an Enhanced Industry Standard Architecture (EISA) bus, a Front Side Bus (FSB), a Hyper Transport (HT) interconnect, an Industry Standard Architecture (ISA) bus, an InfiniBand interconnect, a Low Pin Count (LPC) bus, a memory bus, a Micro Channel Architecture (MCA) bus, a Peripheral Component Interconnect (PCI) bus, a PCI-Express (PCI-X) bus, a Serial Advanced Technology Attachment (SATA) bus, a Video Electronics Standards Association Local Bus (VLB) bus, or other suitable buses or a combination of two or more of these. Where appropriate, the bus 304 may include one or more buses. Although embodiments of the present application describe and illustrate specific buses, the present application contemplates any suitable bus or interconnect.

[0111] In addition, in combination with the element drawing method of the test reticle in the above embodiments, an embodiment of the present application can be implemented by providing a computer storage medium. Computer program instructions are stored on the computer storage medium; when the computer program instructions are executed by a processor, any one of the element drawing methods in the above embodiments is implemented.

[0112] An embodiment of the present application also provides a computer program product, including a computer program, which when executed by a processor implements any one of the element drawing methods in the above embodiments.

[0113] It should be clear that the present application is not limited to the specific configurations and processes described above and shown in the figures. For the sake of brevity, detailed descriptions of known methods are omitted here. In the above embodiments, several specific steps are described and shown as examples. However, the method process of the present application is not limited to the specific steps described and shown. Those skilled in the art can make various changes, modifications, and additions, or change the order between steps after understanding the spirit of the present application.

[0114] The functional blocks shown in the above structural block diagrams can be implemented as hardware, software, firmware, or a combination thereof. When implemented in hardware, it can be, for example, an electronic circuit, an ASIC, appropriate firmware, a plug-in, a functional card, and so on. When implemented in software, the elements of the present application are programs or code segments used to perform the required tasks. The program or code segment can be stored in a machine-readable medium or transmitted via a data signal carried in a carrier wave over a transmission medium or a communication link. A "machine-readable medium" can include any medium capable of storing or transmitting information. Examples of machine-readable media include electronic circuits, semiconductor memory devices, ROM, flash memory, erasable ROM (EROM), floppy disks, compact disc read-only memory (CD-ROM), optical discs, hard disks, fiber optic media, radio frequency (RF) links, and so on. The code segment can be downloaded via a computer network such as the Internet, an intranet, and so on.

[0115] It should also be noted that the exemplary embodiments mentioned in the present application describe some methods or systems based on a series of steps or devices. However, the present application is not limited to the order of the above steps, that is, the steps can be executed in the order mentioned in the embodiments, or different from the order in the embodiments, or several steps can be executed simultaneously.

[0116] Aspects of the present disclosure have been described above with reference to the flowcharts and / or block diagrams of a method, apparatus, device, medium, and product for testing element drawing of a photomask according to embodiments of the present disclosure. It should be understood that each block in the flowchart and / or block diagram, and the combination of blocks in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing device to generate a machine, such that the instructions executed by the processor of the computer or other programmable data processing device enable the implementation of the functions / actions specified in one or more blocks of the flowchart and / or block diagram. Such a processor can be, but is not limited to, a general-purpose processor, a special-purpose processor, a special application processor, or a field programmable logic circuit. It should also be understood that each block in the block diagram and / or flowchart, and the combination of blocks in the block diagram and / or flowchart, can also be implemented by dedicated hardware that performs the specified functions or actions, or can be implemented by a combination of dedicated hardware and computer instructions.

[0117] The above content is only the specific implementation manner of the present application. Those skilled in the art can clearly understand that for the convenience and brevity of description, the specific working processes of the above-described systems, modules, and units can refer to the corresponding processes in the foregoing method embodiments, and will not be described herein again. It should be understood that the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of various equivalent modifications or substitutions within the technical scope disclosed in the present application, and these modifications or substitutions should all be covered by the protection scope of the present application.

Claims

1. A method for drawing elements of a test mask, characterized in that: include: Display element parameter configuration interface; The element is used to be set on the test mask, the parameter configuration interface is used to set the grid matrix corresponding to the element, and the display points in the grid matrix form the corresponding elements; In response to a first input of a user to the grid matrix, determining custom parameter information of the element; Displaying an element drawing interface of the test mask; In response to a second input of a user to the element drawing interface, determining a target element pre-drawn on the test mask; The target element is drawn on the element drawing interface according to the parameter information of the target element; the parameter information includes the custom parameter information and / or preset parameter information.

2. The element drawing method of the test mask according to claim 1, characterized in that: The elements include graphics and / or text; Accordingly, the parameter information corresponding to the graphic includes: graphic size and / or graphic style; The parameter information corresponding to the text includes any one or any combination of the following: text size, text style, and spacing between characters.

3. The element drawing method of the test mask according to claim 2, characterized in that: The custom parameter information includes element size; The step of determining the custom parameter information of the element in response to a first input of the user to the grid matrix comprises: In response to the first input of a user adjusting a grid size of the grid matrix, a corresponding element size is determined.

4. The element drawing method of the test mask according to claim 2, characterized in that: The custom parameter information includes element style; The step of determining the custom parameter information of the element in response to a first input of the user to the grid matrix comprises: In response to the first input of the user adjusting the display points of the grid matrix, a corresponding element style is determined.

5. The element drawing method of the test mask according to claim 2, characterized in that: The custom parameter information includes the spacing between characters; The step of determining the custom parameter information of the element in response to a first input of the user to the grid matrix comprises: In response to the first input of the user adjusting the distance between the two grid matrices corresponding to adjacent characters, the corresponding inter-character spacing is determined.

6. The element drawing method of the test mask according to any one of claims 1 to 5, characterized in that: The preset parameter information includes text style preset parameter information, and the turning angles of the text strokes in the text style preset parameter information include 90° and 45°.

7. The element drawing method of the test mask according to claim 1, characterized in that: After drawing the target element on the element drawing interface according to the parameter information of the target element, the method further includes: Generate a layout file based on the drawn target element; The plurality of layout files corresponding to the same test mask are merged to obtain a target layout file.

8. An element drawing device for testing a mask, characterized in that: include: A first display module, used for displaying a parameter configuration interface of an element; The element is used to be set on the test mask, the parameter configuration interface is used to set the grid matrix corresponding to the element, and the display points in the grid matrix form the corresponding elements; A first determining module, configured to determine the custom parameter information of the element in response to a first input of the user to the grid matrix; A second display module, used for displaying an element drawing interface of the test mask; A second determination module, configured to determine a target element pre-drawn on the test mask in response to a second input of a user to the element drawing interface; A drawing module is used to draw the target element on the element drawing interface according to the parameter information of the target element; the parameter information includes the custom parameter information and / or preset parameter information.

9. An element drawing device for testing a mask, characterized in that: include: a processor and a memory storing computer program instructions; When the processor executes the computer program instructions, the element drawing method of the test mask according to any one of claims 1 to 7 is implemented.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores computer program instructions, and when the computer program instructions are executed by a processor, the method for drawing elements of a test mask according to any one of claims 1 to 7 is implemented.

11. A computer program product, characterized in that When the instructions in the computer program product are executed by a processor of an electronic device, the electronic device executes the element drawing method of the test mask according to any one of claims 1 to 7.

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