Object motion state monitoring system and method

Abstract

The invention discloses an object motion state monitoring system and method, and the system comprises a laser unit which is used for providing a required light beam; the light path system comprises a light splitting unit, a 4f system and a focusing unit, the light splitting unit is used for reflecting a light beam emitted by the laser unit to the 4f system at 90 degrees, and an object to be measured is arranged on a light path of the light path system, so that the light beam emitted by the 4f system can be incident to a reflecting surface of the object to be measured; the detection unit is arranged on the light path of the light path system, so that the light beam reflected by the reflecting surface of the object to be detected can form a focusing light spot on the target surface of the detection unit after sequentially passing through the 4f system, the light splitting unit and the focusing unit; and the data processing unit is used for measuring the motion state of the object to be measured according to the acquired voltage data corresponding to different positions of the focusing light spot on the target surface. According to the invention, the 4f system is adopted to build the optical path system for monitoring the motion state of the object, so that the monitoring system can accurately monitor and measure the motion state of the object to be measured at a relatively far position, and the overall structure of the system is simple.

Description

Technical Field

[0001] The present invention belongs to the technical field of optical measurement, and in particular relates to a system and method for monitoring the motion state of an object. Background Art

[0002] An autocollimator can be used to monitor the motion state of an object with high precision. However, since the autocollimator can only monitor a limited angle, it is difficult to monitor an object moving at a large angle. Summary of the invention

[0003] The object of the present invention is to provide a system and method for monitoring the motion state of an object, so as to achieve accurate measurement of the large-angle motion state of the object.

[0004] The present invention is achieved through the following technical solutions:

[0005] Object motion state monitoring system, including:

[0006] A laser unit, wherein the laser unit is used to provide a required light beam;

[0007] An optical path system, the optical path system comprising a beam splitter unit, a 4f system and a focusing unit, the beam splitter unit being used to reflect the light beam emitted by the laser unit to the 4f system at 90°, the object to be measured being arranged on the optical path of the optical path system, so that the light beam emitted by the 4f system can be incident on the reflective surface of the object to be measured;

[0008] A detection unit, wherein the detection unit is arranged on the optical path of the optical path system, so that the light beam reflected by the reflective surface of the object to be measured can form a focused light spot on the target surface of the detection unit after passing through the 4f system, the light splitting unit and the focusing unit in sequence;

[0009] A data processing unit is used to measure the motion state of the object to be measured according to the acquired voltage data corresponding to the focused light spot at different positions on the target surface.

[0010] In some embodiments, the data processing unit calculates the angle data of the object to be measured according to the acquired voltage data to obtain the motion state of the object to be measured.

[0011] In some embodiments, a correction system is also included for correcting the angle data of the object to be measured measured by the data processing unit.

[0012] In some embodiments, the correction system comprises:

[0013] An autocollimator, which is used to measure the angle data of the object to be measured;

[0014] A correction unit calculates the correspondence between the angle data of the autocollimator and the angle data of the data processing unit according to the angle data of the object to be measured measured by the data processing unit and the autocollimator, and corrects the angle data of the object to be measured measured by the data processing unit according to the obtained correspondence.

[0015] In some embodiments, the correction system comprises:

[0016] A reflector, wherein the reflector is arranged on an electric turntable, and the electric turntable is used to drive the reflector to rotate. The reflector is arranged on the optical path of the optical path system, so that the light beam emitted by the 4f system is incident on the reflective surface of the reflector, and the light beam reflected by the reflector forms a focused light spot on the target surface of the detection unit after passing through the 4f system, the spectroscopic unit and the focusing unit in sequence;

[0017] A correction unit calculates the correspondence between the angle change data of the data processing unit and the rotation angle data of the electric turntable based on the rotation angle data of the electric turntable and the angle data of the reflector measured by the data processing unit, and corrects the angle data of the object to be measured measured by the data processing unit based on the obtained correspondence.

[0018] In some embodiments, the focusing unit uses a focusing lens;

[0019] The 4f system includes a first lens disposed close to a side of the object to be measured and a second lens disposed close to a side of a focusing lens, and the distance between the second lens and the focusing lens is the same as the focal length of the focusing lens.

[0020] In some embodiments, the optical path system includes a climbing mirror arranged on the optical path, so that the light beam emitted by the 4f system can be incident on the reflective surface of the object to be measured at different heights.

[0021] In some embodiments, an attenuation plate and a filter are arranged between the target surface of the detection unit and the focusing unit.

[0022] In some embodiments, the optical path system further includes a beam shrinking unit, which is used to adjust the diameter of the incident laser beam so that the diameter of the focused light spot meets the requirement of the target surface of the detection unit for the focused light spot diameter.

[0023] On the other hand, the present invention further provides a method for monitoring the motion state of an object, which uses the object motion state monitoring system to measure the motion state of the object to be measured; comprising:

[0024] Adjust the setting position of the object motion state monitoring system so that the light beam emitted by the 4f system of the optical path system can be incident on the reflective surface of the object to be measured and form a focused light spot on the target surface of the detection unit;

[0025] According to the voltage data corresponding to the focused light spot at different positions on the target surface, the angle data of the object to be measured is calculated to obtain the motion state of the object to be measured.

[0026] In some embodiments, the method further includes the step of correcting the angle data measured by the data processing system, including:

[0027] The autocollimator is used to measure the angle data of the object to be measured;

[0028] According to the angle data of the object to be measured measured by the data processing unit and the autocollimator, the correspondence between the angle data of the autocollimator and the angle data of the data processing unit is calculated, and the angle data of the object to be measured measured by the data processing unit is corrected according to the obtained correspondence.

[0029] In some embodiments, the method further includes the step of correcting the angle data measured by the data processing system, including:

[0030] Setting the reflector on the optical path of the optical path system;

[0031] According to the rotation angle data of the electric turntable and the angle data of the reflector measured by the data processing unit, the correspondence between the angle data of the data processing unit and the rotation angle data of the electric turntable is calculated, and the angle data of the object to be measured measured by the data processing unit is corrected according to the obtained correspondence.

[0032] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0033] The present invention adopts a 4f system to construct an optical path system for monitoring the motion state of an object, so that the monitoring system can accurately monitor and measure the motion state of an object to be measured at a remote position, and the overall structure of the system is simple.

[0034] The present invention monitors the change of the focus spot position on the target surface of the detection unit, calculates the displacement of the focus spot on the target surface according to the voltage values ​​corresponding to the focus spot at different positions on the target surface, obtains the current angle of the object to be measured, and realizes the measurement of the motion state of the object. It can well solve the problem of difficulty in accurately measuring the large-angle motion state of the object.

[0035] The present invention adopts an autocollimator to calibrate and correct the measurement data of the monitoring system under small angle conditions, or adopts an electric turntable and a reflector to calibrate and correct the measurement data of the monitoring system, so as to realize accurate measurement of the large-angle motion state of the object at low cost. The system has low implementation cost and high measurement accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0037] Figure 1 Schematic diagram of the structure of the object motion state monitoring system in an embodiment of the present invention.

[0038] Figure 2 Schematic diagram of the optical path system structure in an embodiment of the present invention.

[0039] Figure 3 This is a curve showing the relationship between angle data collected by the monitoring system and time in an embodiment of the present invention.

[0040] Figure 4 1 is a curve showing the relationship between the angle data collected by the autocollimator and time in an embodiment of the present invention.

[0041] Figure 5 For Figure 3 Schematic diagram of sample data intercepted from the relationship curve.

[0042] Figure 6 for Figure 5 Schematic diagram of sample data captured in .

[0043] Figure 7 For Figure 4 Schematic diagram of sample data intercepted from the relationship curve.

[0044] Figure 8 for Figure 7 Schematic diagram of sample data captured in .

[0045] Fig. 9 This is the relationship curve between the corrected monitoring system angle measurement data and time.

[0046] in:

[0047] 11. laser, 12. beam reduction unit, 13. light splitting unit, 14. 4f system, 141. first lens, 142. second lens, 15. focusing lens, 16. detector, 17. autocollimator;

[0048] 20. Object to be tested. DETAILED DESCRIPTION

[0049] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments.

[0050] When monitoring the motion state of an object, based on the problem that the autocollimator can monitor a limited angle, the present invention proposes a monitoring system capable of measuring the state data of the object in a large-angle motion state.

[0051] In some embodiments of the present invention, the object motion state monitoring system includes:

[0052] A laser unit, which is used to provide a laser beam required for monitoring;

[0053] The optical path system includes a light splitting unit 13, a 4f system 14 and a focusing unit. The light splitting unit 13 is used to reflect the light beam emitted by the laser unit to the 4f system 14 at 90 degrees. The object to be measured 20 is arranged on the optical path of the optical path system so that the light beam emitted by the 4f system can be incident on the reflective surface of the object to be measured;

[0054] The detection unit uses a detector 16, which is arranged on the optical path of the optical path system so that the light beam reflected by the reflective surface of the object to be measured can form a focused light spot on the target surface of the detector after passing through the 4f system 14, the light splitting unit 13 and the focusing unit in sequence;

[0055] The data processing unit measures the motion state of the object to be measured according to the acquired voltage data corresponding to the focused light spot at different positions on the target surface.

[0056] Specifically, in some embodiments, the data processing unit calculates the displacement of the focused light spot on the target surface according to the voltage data corresponding to the focused light spot at different positions, and then calculates the angle change data of the object to be measured to achieve measurement of the motion state of the object.

[0057] The laser unit adopts a laser 11, and the light beam emitted by the laser can be reduced by a beam reduction unit 12 to obtain the light beam required by the monitoring system, so as to reduce the diameter of the light spot formed on the target surface to meet the requirements of the detector target surface for the focus spot diameter.

[0058] The light beam after the beam shrinking process is subjected to a spectroscopic process by the spectroscopic unit 13 , wherein the transmitted light beam can be absorbed by a light trap, and at the same time the reflected light beam can be reflected to the 4f system 14 at 90° with the emitted laser light beam.

[0059] The light splitting unit 13 may be a BS light splitting prism or other optical elements capable of achieving light splitting.

[0060] The 4f system is a special optical system consisting of two lenses with a focal length of f and a distance of 2f, and the object distance and the phase distance are both f.

[0061] Since the object to be measured is arranged on the optical path of the optical path system, the light beam emitted by the 4f system can be incident on the reflective surface of the object to be measured.

[0062] In order to match the heights of different objects to be measured, so that the light beam emitted by the 4f system can be incident on the reflective surface of the object to be measured at different heights, a climbing mirror can be set in the optical path system, for example, a climbing mirror can be set between the 4f system and the object to be measured. The climbing mirror can increase the height of the optical path in the optical path without changing the direction of the original optical path; during measurement, climbing mirrors of different specifications can be matched according to the height of the object to be measured.

[0063] Based on the setting characteristics of the 4f system and the focusing unit in the optical path system, the light beam reflected by the reflective surface of the object to be measured can pass through the 4f system, the spectroscopic unit and the focusing unit in sequence, and form a focused light spot on the target surface of the detector after being processed by the focusing unit.

[0064] The focusing unit may adopt a focusing lens 15, and the target surface of the detector is arranged at the focal plane of the focusing lens.

[0065] In order to prevent the light intensity of the light spot from exceeding the detector threshold, an attenuation plate can be set in front of the detector to ensure that the laser power incident on the detector does not exceed the power threshold that the detector can withstand.

[0066] A filter can be set in front of the detector. The filter matches the laser band emitted by the laser unit to ensure that the detector only receives the light signal emitted by the laser unit in the object motion status monitoring system and filters out interference from light signals in other bands to ensure the accuracy of the detection signal.

[0067] When the position (such as angle) of the object to be measured changes, the angle of the reflective surface of the object to be measured changes, and the position of the light spot formed by the light beam reflected by the reflective surface of the object to be measured on the target surface of the detector will also change accordingly; the change of the light spot position on the target surface will cause the change of the detector output voltage signal. By obtaining the output voltage value of the detector, the change of the light spot position on the target surface can be calculated, and the angle change of the object to be measured can be calculated through the change of the light spot position, thereby realizing the monitoring and measurement of the object's motion state.

[0068] By introducing the 4f system into the optical path system, the monitoring system can accurately monitor and measure the motion state of the object to be measured at a relatively far distance.

[0069] Reference Figure 2, is a schematic diagram of the structure set between the 4f system, the focusing lens and the object to be measured, and the detector target surface in the optical path system; the 4f system 14 includes a first lens 141 arranged near the side of the object to be measured and a second lens 142 arranged near the side of the focusing lens, and the focusing lens 15 is arranged between the second lens 142 and the target surface of the detector 16. The focal lengths of the first lens and the second lens are both f1, and the distance between the first lens and the object to be measured is also f1; the focal length of the focusing lens is f2, and the distance between the second lens and the focusing lens is set to be the same as the focal length of the focusing lens, both of which are f2. Setting the distance between the second lens and the focusing lens to be the same as the focal length of the focusing lens can keep the center of mass offset of the laser beam in the focusing lens and the focus offset on the target surface consistent, so as to ensure the measurement accuracy of the system.

[0070] The system measures the state data of the object in large-angle motion state, and uses the correction system to calibrate the monitoring system to correct the angle measurement data of the monitoring system to improve the accuracy of the monitoring system measurement data.

[0071] In some embodiments, the correction system includes:

[0072] The autocollimator 17 is used to measure the angle data of the object to be measured; in the monitoring system, the autocollimator is arranged on the other side of the object to be measured opposite to the optical path system to measure the angle change of the object to be measured within a small angle range (the measurement range of the autocollimator).

[0073] And a correction unit, which calculates the correspondence between the angle data of the autocollimator and the angle data of the data processing unit according to the angle data of the object to be measured measured by the data processing unit and the autocollimator, and corrects the angle data of the object to be measured measured by the data processing unit according to the obtained correspondence.

[0074] When obtaining the correspondence between the measurement data of the autocollimator and the measurement data of the data processing unit, the measurement data is based on the measurement data obtained when the change angle of the object to be measured changes within the measurement range of the autocollimator.

[0075] The method of correcting the measurement data of the monitoring system by using the correction system includes:

[0076] The object to be measured is controlled to rotate a small angle, and the angle change data of the object to be measured is measured simultaneously by the autocollimator and the data processing unit to obtain the measurement data for the angle change respectively;

[0077] By adopting the above method, the object to be measured is controlled to rotate within the measurement angle range of the autocollimator, and a batch of angle data of the autocollimator and the monitoring system are obtained. The obtained data are fitted to obtain the corresponding relationship between the measurement data of the autocollimator and the measurement data of the monitoring system. Based on the obtained corresponding relationship, the actual measurement value of the monitoring system when the object moves at a large angle is corrected.

[0078] The following describes the process of correcting the angle measurement data of the monitoring system using the correction system described above in conjunction with a specific embodiment.

[0079] Reference Figure 3 and Figure 4 , are the relationship curves between the angle sampling data of the object to be measured and time obtained by the monitoring system and the autocollimator, respectively. Among them, the sampling rate is 1sps, and the monitoring system calculates the angle data according to the theoretical focal length F=60mm.

[0080] Taking the detector using PDP90A lateral effect position sensor as an example, the output signal of the PDP90A lateral effect position sensor includes three voltage signals, namely: X-axis voltage signal (Δx), Y-axis voltage signal (Δy), and total voltage signal (SUM).

[0081] The relationship between the actual displacement of the light spot on the detector target surface and the voltage signal output by the detector can be expressed as:

[0082]

[0083] Among them, L x , L y is the size of the detector target surface in the X and Y directions, L x =L y =10mm; x is the displacement of the light spot along the detector target surface in the X direction, and y is the displacement of the light spot along the detector target surface in the Y direction.

[0084] When a focusing lens (f=60) with a diameter of F=60 mm is set in front of the detector, the relationship between the rotation angle θ of the reflective surface of the object to be measured and the displacement s of the light spot on the target surface of the detector is:

[0085] θ = arctan(s / f) / 2.

[0087] According to the above formula, the angle data of the object to be measured can be obtained.

[0088] Two sets of data from the same period are intercepted in the two curves as sample data for angle data correction. Figure 5 and Figure 6 as well as Figure 7 and Figure 8 shown.

[0089] The sample data obtained by the monitoring system is fitted using the linear expression y=ax+b, with a fitting degree of 99.91%. The fitting results are:

[0090] θ1=-0.03029·x+0.836;……(1)

[0091] Among them, θ1 is the angle data measured by the monitoring system, and x is the time.

[0092] The sample data obtained by the autocollimator are fitted using the linear expression y=ax+b, with a fitting degree of 99.93%. The fitting result is:

[0093] θ2=0.04353·x-1.74;……(2)

[0094] Among them, θ2 is the angle data measured by the autocollimator, and x is the time.

[0095] According to equations (1) and (2), the corresponding relationship between the angle data measured by the monitoring system and the angle data measured by the autocollimator is obtained as follows:

[0096] θ2=-1.4371·θ1-0.5386. ...(3)

[0097] By using formula (3) to correct the measurement data of the monitoring system, the corrected angle data can be obtained. Fig. 9 As shown, the angle measurement data of the monitoring system is corrected, thereby improving the measurement accuracy of the monitoring system.

[0098] The use of an autocollimator to calibrate and correct the measurement data of the monitoring system at small angles can achieve accurate measurement of the large-angle motion state of an object at a low cost.

[0099] In some embodiments, the correction system may also employ:

[0100] A reflector, the reflector is arranged on an electric turntable, and the electric turntable is used to drive the reflector to rotate; when the monitoring system is corrected and calibrated, the reflector is arranged on the optical path of the optical path system, so that the light beam emitted by the 4f system is incident on the reflective surface of the reflector, and the light beam reflected by the reflector forms a focused light spot on the target surface of the detection unit after passing through the 4f system, the spectroscopic unit and the focusing unit in sequence;

[0101] And a correction unit, which calculates the correspondence between the angle data of the data processing unit and the rotation angle data of the electric turntable according to the rotation angle data of the electric turntable and the angle data of the reflector measured by the data processing unit, and corrects the angle data of the object to be measured measured by the data processing unit according to the obtained correspondence.

[0102] During correction, the electric turntable is controlled to rotate, driving the reflector to rotate, so as to simulate the motion state of the object. Since the motion data of the electric turntable is known, the motion state data of the reflector during the rotation process can be obtained at this time;

[0103] At the same time, the motion state data of the reflector is measured through the monitoring system;

[0104] At this time, the corresponding relationship between the motion data of the electric turntable and the motion state data of the reflector measured by the monitoring system is calculated, and the angle data of the object to be measured measured by the monitoring system is corrected based on the corresponding relationship.

[0105] The data processing method for correcting the angle measurement data of the monitoring system using a reflector and an electric turntable is the same as the method using the autocollimator mentioned above, and will not be repeated here. The accuracy of the corrected data in this correction method depends largely on the control accuracy of the electric turntable, and the accuracy of data correction is easy to ensure.

[0106] The monitoring system in the embodiment of the present invention has a simple structure, and the system measurement range can be adjusted according to the target surface size of the detector, the focal length of the focusing lens, the size of the optical elements of the optical path system, and the distance to the object to be measured. It can be applied to the monitoring of object state changes in various scenarios and motion ranges.

[0107] On the other hand, some embodiments of the present invention relate to a monitoring method based on the above-mentioned object motion state monitoring system to achieve measurement of the motion state of the object to be measured, comprising the following steps:

[0108] Adjust the setting position of the object motion state monitoring system so that the light beam emitted by the 4f system of the optical path system can be incident on the reflective surface of the object to be measured and form a focused light spot on the target surface of the detection unit;

[0109] According to the voltage data corresponding to the focused light spot at different positions on the target surface, the angle data of the object to be measured is calculated to obtain the motion state of the object to be measured.

[0110] In some embodiments, the method further includes the step of correcting the angle data measured by the data processing system, including:

[0111] The autocollimator is used to measure the angle data of the object to be measured;

[0112] According to the angle data of the object to be measured measured by the data processing unit and the autocollimator, the correspondence between the angle data of the autocollimator and the angle data of the data processing unit is calculated, and the angle data of the object to be measured measured by the data processing unit is corrected according to the obtained correspondence.

[0113] In some embodiments, the method further includes the step of correcting the angle data measured by the data processing system, including:

[0114] Setting the reflector on the optical path of the optical path system;

[0115] According to the rotation angle data of the electric turntable and the angle data of the reflector measured by the data processing unit, the correspondence between the angle data of the data processing unit and the rotation angle data of the electric turntable is calculated, and the angle data of the object to be measured measured by the data processing unit is corrected according to the obtained correspondence.

[0116] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. used to indicate the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship commonly placed when the product of the invention is used. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0117] In addition, if the terms "horizontal" or "vertical" appear in the description of the present invention, it does not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0118] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood in combination with specific circumstances.

[0119] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Any simple modification or equivalent change made to the above embodiment based on the technical essence of the present invention shall fall within the protection scope of the present invention.

Claims

1. Object motion state monitoring system, characterized in that: include: A laser unit, the laser unit is used to provide a required light beam; An optical path system, the optical path system comprising a beam splitter unit, a 4f system and a focusing unit, the beam splitter unit being used to reflect the light beam emitted by the laser unit to the 4f system at 90°, the object to be measured being arranged on the optical path of the optical path system, so that the light beam emitted by the 4f system can be incident on the reflective surface of the object to be measured; A detection unit, wherein the detection unit is arranged on the optical path of the optical path system, so that the light beam reflected by the reflective surface of the object to be measured can form a focused light spot on the target surface of the detection unit after passing through the 4f system, the light splitting unit and the focusing unit in sequence; A data processing unit is used to measure the motion state of the object to be measured according to the acquired voltage data corresponding to the focused light spot at different positions on the target surface.

2. The object motion state monitoring system according to claim 1, characterized in that: The data processing unit calculates the angle data of the object to be measured according to the acquired voltage data to obtain the motion state of the object to be measured.

3. The object motion state monitoring system according to claim 2, characterized in that: The invention also comprises a correction system for correcting the angle data of the object to be measured measured by the data processing unit.

4. The object motion state monitoring system according to claim 3, characterized in that: The correction system comprises: An autocollimator, which is used to measure the angle data of the object to be measured; A correction unit calculates the correspondence between the angle data of the autocollimator and the angle data of the data processing unit according to the angle data of the object to be measured measured by the data processing unit and the autocollimator, and corrects the angle data of the object to be measured measured by the data processing unit according to the obtained correspondence.

5. The object motion state monitoring system according to claim 3, characterized in that: The correction system comprises: A reflector, wherein the reflector is arranged on an electric turntable, and the electric turntable is used to drive the reflector to rotate. The reflector is arranged on the optical path of the optical path system, so that the light beam emitted by the 4f system is incident on the reflective surface of the reflector, and the light beam reflected by the reflector forms a focused light spot on the target surface of the detection unit after passing through the 4f system, the spectroscopic unit and the focusing unit in sequence; A correction unit calculates the correspondence between the angle data of the data processing unit and the rotation angle data of the electric turntable based on the rotation angle data of the electric turntable and the angle data of the reflector measured by the data processing unit, and corrects the angle data of the object to be measured measured by the data processing unit based on the obtained correspondence.

6. The object motion state monitoring system according to any one of claims 1 to 5, characterized in that: The focusing unit adopts a focusing lens; The 4f system includes a first lens disposed close to a side of the object to be measured and a second lens disposed close to a side of a focusing lens, and the distance between the second lens and the focusing lens is the same as the focal length of the focusing lens.

7. The object motion state monitoring system according to any one of claims 1 to 5, characterized in that: The optical path system includes a climbing mirror arranged on the optical path, so that the light beam emitted by the 4f system can be incident on the reflective surface of the object to be measured at different height positions.

8. The object motion state monitoring system according to any one of claims 1 to 5, characterized in that: An attenuation plate and a filter are arranged between the target surface of the detection unit and the focusing unit.

9. The object motion state monitoring system according to any one of claims 1 to 5, characterized in that: The optical path system further comprises a beam reduction unit, which is used to adjust the diameter of the incident laser beam so that the diameter of the focused light spot meets the requirement of the target surface of the detection unit on the diameter of the focused light spot.

10. A method for monitoring the motion state of an object, characterized in that: Using the object motion state monitoring system described in any one of claims 1 to 9 to measure the motion state of the object to be measured; include: Adjust the setting position of the object motion state monitoring system so that the light beam emitted by the 4f system of the optical path system can be incident on the reflective surface of the object to be measured and form a focused light spot on the target surface of the detection unit; According to the voltage data corresponding to the focused light spot at different positions on the target surface, the angle data of the object to be measured is calculated to obtain the motion state of the object to be measured.

11. The object motion state monitoring method according to claim 1, characterized in that: The method also includes the step of correcting the angle data measured by the data processing system, including: The autocollimator is used to measure the angle data of the object to be measured; According to the angle data of the object to be measured measured by the data processing unit and the autocollimator, the correspondence between the angle data of the autocollimator and the angle data of the data processing unit is calculated, and the angle data of the object to be measured measured by the data processing unit is corrected according to the obtained correspondence.

12. The object motion state monitoring method according to claim 1, characterized in that: The method also includes the step of correcting the angle data measured by the data processing system, including: Setting the reflector on the optical path of the optical path system; According to the rotation angle data of the electric turntable and the angle data of the reflector measured by the data processing unit, the correspondence between the angle data of the data processing unit and the rotation angle data of the electric turntable is calculated, and the angle data of the object to be measured measured by the data processing unit is corrected according to the obtained correspondence.

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