High-low curved rail horizontal distance assembly precision detection method and high-low curved rail assembly method

Abstract

The invention discloses a high-low curved rail horizontal distance assembly precision detection method and a high-low curved rail assembly method. The detection method comprises the following steps: S1, providing a detection device; s2, two rotating bodies and a measuring rod of the detection device are attached to the opposite inner side faces of the to-be-detected high bent rail and the to-be-detected low bent rail respectively; s3, reading the reading of the detection instrument and determining whether the reading is within a preset range; if yes, it is determined that the horizontal distance between the high curved rail and the low curved rail at the current detection position meets the requirement; and if not, determining that the horizontal distance of the high curved rail and the low curved rail at the current detection position does not meet the requirement. Through the special detection device, the horizontal distance detection of the linear section and the bent section of the bent rail with the height difference can be quickly and conveniently carried out, and the preset range in which the reading should be located can be conveniently determined, so that whether the horizontal distance of the bent sections of the high bent rail and the low bent rail meets the requirement or not can be quickly and accurately determined; and effective data support is provided for accurate assembly of high and low curved rails.

Description

Technical Field

[0001] The invention relates to the field of overhead cranes, in particular to a method for detecting the assembly accuracy of horizontal distances of high and low curved rails and a method for assembling high and low curved rails. Background Art

[0002] Overhead crane is a device used to transport workpieces between different processes in semiconductor processing. It needs to move along the hoisting track. In order to make the overhead crane turn more reliably at the turning position, the overhead crane is supported by the combination of high curved rails and low curved rails, that is, a high curved rail is set above two parallel low curved rails, located between the two low curved rails and parallel to the low curved rails.

[0003] In semiconductor processing scenarios such as wafers, since wafers are relatively expensive, strict requirements are placed on the installation accuracy of the high and low curved rails, especially the horizontal distance between the high and low curved rails. Once the horizontal distance between the high and low curved rails exceeds the accuracy requirements, it will cause greater impact and shaking when the overhead crane turns, affecting the safety of the wafers.

[0004] Therefore, during the assembly process of the high curved rail and the low curved rail, the horizontal distance between the high curved rail and the low curved rail needs to be accurately measured. Both the high curved rail and the low curved rail include a curved section and straight sections at both ends of the curved section. For the straight sections of the high curved rail and the low curved rail, the horizontal distance can be measured relatively easily. However, for the curved sections, due to the height difference and the fact that their inner surfaces are arc surfaces, it is difficult to accurately measure the horizontal distance between them. Summary of the invention

[0005] The purpose of the present invention is to solve the above problems existing in the prior art and to provide a method for detecting the horizontal distance assembly accuracy of a high and low curved rail and a method for assembling a high and low curved rail.

[0006] The purpose of the present invention is achieved through the following technical solutions:

[0007] The method for detecting the assembly accuracy of the horizontal distance of high and low curved rails comprises the following steps:

[0008] S1. Provide a detection device, the detection device comprising a bracket, the bracket is provided with two parallel mounting shafts, each mounting shaft is provided with a rotating body, the bracket is provided with a detection instrument, the axis of the measuring rod of the detection instrument is perpendicular to the axis of the mounting shaft, the two mounting shafts are distributed on opposite sides of the measuring rod and the distances between the two mounting shafts and the measuring rod are the same; the sides of the two rotating bodies facing away from the measuring rod can be in contact with the same plane, and when the two rotating bodies are in contact with the plane, the axis of the mounting shaft is parallel to the plane, and the axis of the measuring rod is perpendicular to the plane;

[0009] S2. Make the two rotators and the measuring rod of the detection device respectively fit the opposite inner sides of the high-bend rail and the low-bend rail to be measured.

[0010] S3. Read the reading of the detection instrument and determine whether the reading is within a predetermined range. If so, determine that the horizontal distance between the high-bend rail and the low-bend rail at the current detection position meets the requirements. If not, determine that the horizontal distance between the high-bend rail and the low-bend rail at the current detection position does not meet the requirements.

[0011] Preferably, the bracket includes a carrier plate, a wear-resistant backing plate is provided on the carrier plate, the wear-resistant backing plate and the rotator are on the same side of the carrier plate, and the wear-resistant backing plate and the measuring rod are distributed on opposite sides of the rotator.

[0012] Preferably, the bracket includes a carrier plate and an instrument fixing plate vertically provided on the carrier plate. The instrument fixing plate is connected to the carrier plate in a manner that its position can be adjusted relative to the carrier plate along the length direction of the instrument fixing plate.

[0013] Preferably, the rotator includes a cylinder or a sphere rotatably sleeved on the mounting shaft.

[0014] Preferably, the detection instrument is a micrometer. In S2, first make the two rotators of the detection device fit the inner side of the low-bend rail or the high-bend rail, and then extend the measuring rod of the detection instrument to the inner side of the high-bend rail or the low-bend rail until the front end of the measuring rod fits the inner side of the high-bend rail or the low-bend rail.

[0015] Preferably, when the detection device measures the horizontal distance of the straight section between the high-bend rail and the low-bend rail, the predetermined range is (B - A) ± C or |A - B| ± C;

[0016] When the detection device measures the horizontal distance of the curved section between the high-bend rail and the low-bend rail, the predetermined range is or

[0017] wherein, A is the distance from the front end of the measuring rod to the plane in contact with the two rollers when the reading of the detection instrument is 0; B is the horizontal distance between the high-bend rail and the low-bend rail; C is the tolerance value; R is the radius of the arc of the curved section; L is the distance between the contact points or the contact lines of the two rotators and the curved section.

[0018] Preferably, the detection instrument is a dial indicator or a vernier caliper. In S2, first make the measuring rod of the detection device fit the inner side of the low-bend rail or the high-bend rail, and then make the two rollers of the detection device fit the inner side of the high-bend rail or the low-bend rail.

[0019] Preferably, when the detection device measures the horizontal distance between the straight sections of the high-curved rail and the low-curved rail, the predetermined range is (A - B) ± C or |B - A| ± C;

[0020] When the detection device measures the horizontal distance between the curved sections of the high-curved rail and the low-curved rail, the predetermined range is or

[0021] wherein, A is the distance from the front end of the measuring rod to the plane in contact with the two rollers when the reading of the detection instrument is 0; B is the horizontal distance between the high-curved rail and the low-curved rail; C is the tolerance value; R is the radius of the arc of the curved section; L is the distance between the contact points or the contact lines of the two rotating bodies with the curved section.

[0022] The high-low curved rail assembly method includes the high-low curved rail horizontal distance assembly accuracy detection method described in any one of the above.

[0023] Preferably, when it is determined that the horizontal distance at a certain position of the high-curved rail and the low-curved rail does not meet the requirements, the adjustment components at both ends of the high-curved rail are adjusted so that the horizontal distance between the high-curved rail and the low-curved rail meets the requirements.

[0024] The advantages of the technical solution of the present invention are mainly reflected in:

[0025] The detection method of the present invention can quickly and conveniently detect the horizontal distances of the straight sections and the curved sections of the curved rails with a height difference through a dedicated detection device, and can conveniently determine the predetermined ranges corresponding to the readings in the straight section and the curved section respectively, so as to quickly and accurately determine whether the horizontal distances at different positions of the high-curved rail and the low-curved rail meet the requirements, especially whether the horizontal distance of the curved section meets the requirements, providing effective data support for the accurate assembly of the high-low curved rails.

[0026] The structure of the detection device of the present invention has a self-centering effect, enabling the detection device to fully adapt to the shape of the curved section, thus effectively ensuring the accurate measurement of the detection instrument.

[0027] The structure of the detection device of the present invention is simple, and the type and position of the detection instrument can be conveniently adjusted according to the actual installation conditions of different high-low curved rails, with better applicability. Description of the Drawings

[0028] Figure 1 is a cross-sectional view of the detection device of the present invention;

[0029] Figure 2 is a perspective view of the detection device of the present invention;

[0030] Figure 3 is a flowchart of the detection method of the present invention;

[0031] Figure 4 is a side view of the detection device of the present invention;

[0032] Figure 5 is a schematic diagram of the detection device of the present invention for detecting the horizontal distance of the straight sections of high-bend rails and low-bend rails;

[0033] Figure 6 is a three-dimensional view of the detection device of the present invention for detecting the bending section. The dotted lines in the figure are the partial perspective of the high-bend rail and the partial perspective of the detection device;

[0034] Figure 7 is a schematic diagram of the principle of the detection device of the present invention for detecting the bending section;

[0035] Figure 8 is a bottom view of one end region of the upper-bend rail of the present invention. Detailed implementation manners

[0036] The objectives, advantages and characteristics of the present invention will be illustrated and explained by the following non-restrictive description of the preferred embodiments. These embodiments are only typical examples of applying the technical solutions of the present invention. Any technical solutions formed by equivalent replacement or equivalent transformation fall within the scope of protection required by the present invention.

[0037] In the description of the solution, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of description and simplification of the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0038] Embodiment 1

[0039] The following describes the method for detecting the assembly accuracy of the horizontal distance of high and low bend rails disclosed by the present invention with reference to the drawings. The method for detecting the assembly accuracy of the horizontal distance of high and low bend rails is based on a detection device, as shown in the attached Figure 1 and attached Figure 2As shown, the detection device includes a bracket 100, on which two parallel installation shafts 200 are arranged, each installation shaft 200 is arranged with a rotating body 300, and on the bracket 100, a detection instrument 400 is arranged, the axis of the measuring rod 410 of the detection instrument 400 is perpendicular to the axis of the installation shaft 200, the two installation shafts 200 are located on opposite sides of the measuring rod 410 and the distances from the two installation shafts 200 to the measuring rod 410 are the same; when the side of the two rotating bodies 300 facing away from the side rods is in contact with a plane, the axis of the installation shaft 200 is parallel to the plane, and the axis of the measuring rod 410 is perpendicular to the plane.

[0040] The structure of the bracket 100 can be designed as required. In this embodiment, as shown in the attached Figure 2 As shown, the bracket 100 includes a carrier plate 110, and the mounting shaft 200 can be arranged at the bottom of the carrier plate 110, and can also be arranged at the top of the carrier plate 110. The mounting shaft 200 is arranged at the bottom of the carrier plate 110 as an example for explanation. At this time, the mounting shaft is provided with a screw hole extending downward from its upper end to a certain depth and coaxial with the mounting shaft. The carrier plate 110 is provided with a mounting hole for mounting the mounting shaft, and the mounting hole is I-shaped. The mounting shaft is inserted into the lower hole portion of the mounting hole and is locked with the carrier plate 110 by a bolt screwed in the screw hole at the top of the mounting shaft.

[0041] A rotating body 300 is coaxially arranged on each of the installation shafts 200. The rotating body 300 is a cylinder or a sphere that is rotatably mounted on the installation shaft through a bearing 500. The height of the rotating body 300 can be set as needed and is not limited here. In addition, the two rotating bodies 300 can be of the same size or of different sizes. When the two rotating bodies 300 are of the same size, they are symmetrically distributed on both sides of the detection instrument 400. When the two rotating bodies 300 are of different sizes, they are not symmetrically distributed on both sides of the detection instrument 400. At this time, the side away from the measuring rod 410 is kept flush.

[0042] As attached Figure 2As shown, in order to facilitate the fitting of the two rotating bodies 300 to the inner side surfaces of the high bend rail 600 or the low bend rail 700, wear-resistant pads 120 are further provided at the bottom of the carrier plate 110 on the sides of the two rotating bodies 300. The wear-resistant pads 120 and the measuring rod 410 are located on opposite sides of the rotating body 300. The wear-resistant pads 120 can be made of, for example, polytetrafluoroethylene plates, or of course other feasible materials, which are not limited herein. During detection, the bottom surface of the wear-resistant pad 120 can be placed against the top surface of the low bend rail 700 or the bottom surface of the high bend rail, so that the mounting shaft 200 can be stably maintained in the vertical direction, thereby enabling the circumferential surface or spherical surface of the rotating body 300 to fully and accurately fit the inner side surfaces of the high bend rail 600 or the low bend rail 700.

[0043] As shown in the Figure 2 attachment, the bracket 100 further includes an instrument fixing plate 130 provided on the carrier plate 110 for mounting the detection instrument 400. The instrument fixing plate 130 is perpendicular to the carrier plate 110 and is bolted to the carrier plate 110. The length of the instrument fixing plate 130 can be designed as required, which is not limited herein. The detection instrument 400 is mounted at the top end of the instrument fixing plate 130, and the front end of the measuring rod 410 faces away from the rotating body 300.

[0044] Furthermore, in order to facilitate adaptation to the different height differences between the high bend rail 600 and the low bend rail 700, the instrument fixing plate 130 is connected to the carrier plate 110 in a manner that allows its position to be adjusted relative to the carrier plate 110 along the length direction of the instrument fixing plate 130. Specifically, a notch 111 is provided on the side of the carrier plate 110, and the instrument fixing plate 130 is fixed at the notch 111 by bolts. At the same time, adjustment holes (not shown in the figure) are provided on the instrument fixing plate 130. The length direction of the adjustment holes is the same as the length direction of the instrument fixing plate 130, and screw holes corresponding to the adjustment holes are provided at the notch 111.

[0045] The detection device can use different detection instruments. For example, the detection instrument 400 can be a micrometer, a dial indicator, a vernier caliper, etc., and the specific size of the detection instrument 400 can be selected as required, which is not limited herein.

[0046] Correspondingly, as shown in the Figure 3 attachment, the method for detecting the assembly accuracy of the horizontal distance between the high and low bend rails includes the following steps:

[0047] S1. Provide the detection device;

[0048] S2. Make the two rotating bodies 300 and the measuring rod 410 of the detection device respectively fit the opposite inner side surfaces of the high bend rail 600 and the low bend rail 700 to be measured;

[0049] S3. Read the reading of the detection instrument 400 and determine whether the reading is within a predetermined range; if so, determine that the horizontal distance between the high bend rail 600 and the low bend rail 700 at the current detection position meets the requirements; if not, determine that the horizontal distance between the high bend rail 600 and the low bend rail 700 at the current detection position does not meet the requirements.

[0050] When different detection instruments 400 are used for the detection device, different operation methods can be adopted.

[0051] For example, when the detection instrument 400 is a micrometer, in S2, first make the two rotating bodies 300 of the detection device fit against the inner side surface of the low bend rail 700, and then turn the knob of the detection instrument 400 to extend the measuring rod 410 of the detection instrument 400 towards the inner side surface of the high bend rail 600 until the front end of the measuring rod 410 fits against the inner side surface of the high bend rail 600 or the low bend rail 700. At this time, the reading of the detection device can be taken. Of course, in another embodiment, the rotating body 300 can also be first made to fit against the inner side surface of the high bend rail 600, and then the measuring rod 410 is extended forward until the front end of the measuring rod 410 fits against the inner side surface of the low bend rail 700. And after taking the reading of the detection device at one detection position, the knob needs to be rotated to retract the measuring rod 410. Then, the detection device is moved to or taken to another detection position, and then the measuring rod 410 is extended forward again to abut against the inner side surface of the high bend rail or the low bend rail, so as to detect the horizontal distance at another detection position.

[0052] When determining the predetermined range, as shown in the appendix Figure 4 - appendix Figure 7 shown, we can first determine the distance A from the front end of the measuring rod 410 to the plane that fits against the two rollers when the reading of the detection instrument 400 is 0; the horizontal distance B between the high bend rail 600 and the low bend rail 700, where B is greater than A at this time; the tolerance value C; the arc radius R of the bending section; the distance L between the contact points or contact lines of the two rotating bodies with the bending section.

[0053] When the detection device measures the horizontal distance of the straight section between the high bend rail 600 and the low bend rail 700, as shown in the appendix Figure 4 and appendix Figure 5 shown, the two rotating bodies 300 are in contact with the inner side surface of the straight section of the low bend rail 700, and the measuring rod 410 is in contact with the inner side of the straight section of the high bend rail. At this time, the predetermined range is (B - A) ± C or |A - B| ± C.

[0054] When the detection device measures the horizontal distance of the bending section between the high bend rail 600 and the low bend rail 700, as shown in the appendix Figure 6 and appendix Figure 7As shown, two rotating bodies 300 are in contact with the inner side surface of the bending section of the low bending rail 700, and the measuring rod 410 is in contact with the inner side surface of the bending section of the high bending rail 600; at this time, the predetermined range is or

[0055] When the detection instrument 400 is a micrometer or a ten-thousandth meter, in S2, first make the measuring rod 410 of the detection device fit with the inner side surface of the low bending rail 700 or the high bending rail 600. At this time, since the measuring rod 410 can elastically expand and contract, the two rollers of the detection device can be made to fit with the inner side surface of the high bending rail 600 or the low bending rail 700 by compressing the measuring rod 410, and the measuring rod 410 can maintain the state of fitting with the inner side surface of the high bending rail 600 due to the elastic force. At this time, A is greater than B. Therefore, when the detection device measures the horizontal distance between the straight sections of the high bending rail 600 and the low bending rail 700, the predetermined range is (A - B) ± C or |B - A| ± C;

[0056] When the detection device measures the horizontal distance between the bending sections of the high bending rail 600 and the low bending rail 700, the predetermined range is or

[0057] Moreover, when using a micrometer or a ten-thousandth meter as the detection instrument 400, the detection device can be first located at one end of the high bending rail and the low bending rail, and then the rotating body 300 of the detection device can be moved along the inner side surface of the high bending rail 600 or the low bending rail 700 towards the other end of the high bending rail and the low bending rail. During the movement, it is possible to determine in real time whether the reading of the detection instrument 400 is within the predetermined range. When it is determined that at any position, the reading of the detection instrument is not within the predetermined range, the detection can be stopped.

[0058] Embodiment 2

[0059] This embodiment discloses a method for assembling high and low bending rails, including the method for detecting the assembly accuracy of the horizontal distance between high and low bending rails as described above.

[0060] Moreover, when it is determined that the horizontal distance at a certain position of the high bending rail 600 and the low bending rail 700 does not meet the requirements, the adjusting components 800 at both ends of the high bending rail 600 are adjusted so that the horizontal distance between the high bending rail 600 and the low bending rail 700 meets the requirements. Specifically, as shown in the appendix Figure 8As shown, the high-bending rail 600 is adjustably fixed on the top mounting plate 900. A set of fine-tuning holes 610 are provided on the high-bending rail 600. The length direction of the fine-tuning holes 610 in the straight section of the high-bending rail 600 is perpendicular to the straight section where the fine-tuning holes 610 are located. The length direction of the fine-tuning holes 610 in the bending section of the high-bending rail 600 passes through the center of the bending section. The adjusting assembly 800 is arranged at the bottom of the top mounting plate 900 and corresponds to the two straight sections of the high-bending rail 600. They are located on the protruding side of the high-bending rail 600. They both include an adjusting seat 810. A set screw 820 perpendicular to the straight section and abutting against the side of the straight section is threadedly arranged on the adjusting seat 810. After slightly loosening the screw connecting the top mounting plate and the high-bending rail, the position of the high-bending rail 600 is finely adjusted by adjusting the set screws 820 of the adjusting assemblies 800 at both ends. After adjustment by the adjusting assembly 800, the horizontal distance between the high-bending rail 600 and the low-bending rail 700 is determined again by the above-mentioned detection method for the assembly accuracy of the horizontal distance between the high and low bending rails. If it does not meet the requirements, the position of the high-bending rail 600 can be adjusted again, and through repeated detection and adjustment until the horizontal distance between the high-bending rail 600 and the low-bending rail 700 meets the requirements. After meeting the requirements, the screw connecting the high-bending rail and the top mounting plate is tightened.

[0061] There are still various implementation manners of the present invention. All technical solutions formed by equivalent transformation or equivalent substitution fall within the protection scope of the present invention.

Claims

1. A method for detecting the assembly accuracy of the horizontal distance of high and low curved rails, characterized in that: The steps include: S1. Provide a detection device, the detection device comprising a bracket, the bracket is provided with two parallel mounting shafts, each mounting shaft is provided with a rotating body, the bracket is provided with a detection instrument, the axis of the measuring rod of the detection instrument is perpendicular to the axis of the mounting shaft, the two mounting shafts are distributed on opposite sides of the measuring rod and the distances between the two mounting shafts and the measuring rod are the same; the sides of the two rotating bodies facing away from the measuring rod can be in contact with the same plane, and when the two rotating bodies are in contact with the plane, the axis of the mounting shaft is parallel to the plane, and the axis of the measuring rod is perpendicular to the plane; S2, making the two rotating bodies and the measuring rod of the detection device respectively fit with the opposite inner sides of the high curved rail and the low curved rail to be tested; S3, reading the reading of the detection instrument and determining whether the reading is within a predetermined range; if so, determining that the horizontal distance between the high curved rail and the low curved rail at the current detection position meets the requirements; if not, determining that the horizontal distance between the high curved rail and the low curved rail at the current detection position does not meet the requirements.

2. The method for detecting the horizontal distance assembly accuracy of high and low curved rails according to claim 1 is characterized in that: The bracket comprises a carrier plate, a wear-resistant pad is arranged on the carrier plate, the wear-resistant pad and the rotating body are located on the same side of the carrier plate, and the wear-resistant pad and the measuring rod are distributed on two opposite sides of the rotating body.

3. The method for detecting the horizontal distance assembly accuracy of high and low curved rails according to claim 1 is characterized in that: The bracket includes a carrier plate and an instrument fixing plate vertically arranged on the carrier plate. The instrument fixing plate can be connected to the carrier plate in an adjustable position relative to the carrier plate along the length direction of the instrument fixing plate.

4. The method for detecting the horizontal distance assembly accuracy of high and low curved rails according to claim 1, characterized in that: The rotating body comprises a cylinder or a sphere which is rotatably mounted on the mounting shaft.

5. The method for detecting the assembly accuracy of the horizontal distance of high and low curved rails according to any one of claims 1 to 4, characterized in that: The detection instrument is a micrometer; in S2, the two rotating bodies of the detection device are first made to fit with the inner side of the low curved rail or the high curved rail, and then the measuring rod of the detection instrument is extended toward the inner side of the high curved rail or the low curved rail until the front end of the measuring rod fits with the inner side of the high curved rail or the low curved rail.

6. The method for detecting the horizontal distance assembly accuracy of high and low curved rails according to claim 5, characterized in that: When the detection device measures the horizontal distance between the straight segments of the high curved rail and the low curved rail, the predetermined range is (BA)±C or |AB|±C; When the detection device measures the horizontal distance between the curved sections of the high curved rail and the low curved rail, the predetermined range is or Among them, A is the distance from the front end of the measuring rod to the plane in contact with the two rollers when the reading of the detection instrument is 0; B is the horizontal distance between the high curved rail and the low curved rail; C is the tolerance value; R is the arc radius of the curved section; L is the distance between the contact points or contact lines of the two rotating bodies and the curved section.

7. The method for detecting the assembly accuracy of the horizontal distance of high and low curved rails according to any one of claims 1 to 4, characterized in that: The detection instrument is a micrometer or a multimeter; in S2, the measuring rod of the detection device is firstly made to fit with the inner side surface of the low curved rail or the high curved rail, and then the two rollers of the detection device are made to fit with the inner side surface of the high curved rail or the low curved rail.

8. The method for detecting the horizontal distance assembly accuracy of high and low curved rails according to claim 7, characterized in that: When the detection device measures the horizontal distance between the straight segments of the high curved rail and the low curved rail, the predetermined range is (AB)±C or |BA|±C; When the detection device measures the horizontal distance between the curved sections of the high curved rail and the low curved rail, the predetermined range is or Among them, A is the distance from the front end of the measuring rod to the plane in contact with the two rollers when the reading of the detection instrument is 0; B is the horizontal distance between the high curved rail and the low curved rail; C is the tolerance value; R is the arc radius of the curved section; L is the distance between the contact points or contact lines of the two rotating bodies and the curved section.

9. A method for assembling high and low curved rails, characterized in that: It includes a method for detecting the assembly accuracy of the horizontal distance of high and low curved rails as described in any one of claims 1-8.

10. The high and low curved rail assembly method according to claim 9, characterized in that: When it is determined that the horizontal distance between a certain position of the high curved rail and the low curved rail does not meet the requirement, the adjustment components at both ends of the high curved rail are adjusted to make the horizontal distance between the high curved rail and the low curved rail meet the requirement.

Images