Dispersion support of extreme ultraviolet inner box

Abstract

An apparatus includes: an inner container having a base plate and a cover; the outer container is provided with a box dome and a box door; and a first set of pins and a second set of pins disposed on the box door. The box door has a locking state and an unlocking state. The first set of pins and the second set of pins are configured to support the base plate. And when the box door is in the unlocking state and the first group of pins are in contact with the bottom plate, a gap is formed between the second group of pins and the bottom plate. And when the box door is in the locking state, the first group of pins and the second group of pins are in contact with the bottom plate.

Description

Technical Field

[0001] The present disclosure generally relates to substrate containers, such as mask boxes for masks. More specifically, the present disclosure relates to mask boxes having distributed support for an inner box of the mask box (such as an extreme ultraviolet light (EUV) mask box), and methods of fabricating the mask boxes. Background Art

[0002] Mask boxes are used to hold masks, such as lithography masks used, for example, during semiconductor processing (such as during EUV processing). Mask boxes can be used to store and transport masks. The inner box of a mask box can be disposed and manipulated by one or more tools during processing. The inner box of the mask box includes a bottom plate and a lid, and the bottom plate and the lid accommodate the mask and protect the mask from contamination or physical damage during transportation, storage, and processing. Mask boxes include, for example, EUV boxes for use with EUV lithography tools. A mask box can include an outer box having a box door and a box dome that houses the inner box. Summary of the Invention

[0003] The present disclosure generally relates to substrate containers, such as mask boxes for masks. More specifically, the present disclosure relates to mask boxes having distributed support for an inner box of the mask box (such as an extreme ultraviolet light (EUV) mask box), and methods of fabricating the mask boxes.

[0004] In a mask box, the inner box can be clamped within the outer box for shipping and transportation within a processing facility. The lid clamping in the outer box can be applied at positions around the four corners of the inner box. Support for the bottom plate of the inner box can be at multiple points on the bottom side of the bottom plate, the points being referred to as pins, such as kinematic coupling (KC) pins. Differences in the support and / or clamping positions from the lid of the inner box to the bottom plate can create high-pressure regions above at least one of the KC pins and local deformation on the inner box. This high pressure and deformation can cause accelerated wear between the lid and the bottom plate of the inner box.

[0005] It should be understood that the grooves of the KC pins that interface with the inner box bottom plate can be specified in SEMI (an industry association that includes companies involved in the electronic design and manufacturing supply chain) and ASML (Advanced Semiconductor Materials Lithography) RPDM (Mask Box Design Manual) for proper interfacing with different tools in a wafer fab (i.e., a microchip processing factory). Equally important is having accurate position control of the inner box to allow for accurate docking with the inner box and possibly the mask on the inner box bottom plate. Other pins (such as safety detent pins) can deliberately have a clearance from the bottom plate such that the safety detent pins can minimize tilting during loading and not interfere with the accurate alignment of the inner box on the KC pins.

[0006] The embodiments disclosed herein may provide compliant KC pins such that when the outer case clamps the inner case, most of the support may be supplied by the detent pins. For example, the embodiments disclosed herein may provide a housing of a door of a box that is compliant in the thickness or height direction, and / or provide spring-loaded KC pins. The embodiments disclosed herein may provide movable or actuatable detent pins such that when the door of the box is latched or locked (i.e., when loading is applied), the detent pins may be driven inwardly (i.e., in the direction towards the bottom plate). For example, the detent pins may be driven by a door latch cam and / or a latch arm of the door of the box.

[0007] In an embodiment, an apparatus includes: an inner container having a bottom plate and a lid; an outer container having a box dome and a door of the box; and a first set of pins and a second set of pins disposed on the door of the box. The door of the box has a locked state and an unlocked state. The first set of pins and the second set of pins are configured to support the bottom plate. When the door of the box is in the unlocked state and the first set of pins contact the bottom plate, a gap is formed between the second set of pins and the bottom plate. When the door of the box is in the locked state, the first set of pins and the second set of pins contact the bottom plate.

[0008] In an embodiment, the outer container includes a clamping mechanism. When the door of the box is in the locked state, the clamping force applied to the lid from the clamping mechanism is not aligned with the first set of pins in the height direction of the inner container.

[0009] In an embodiment, the gap is in a range from 0.1 millimeter or about 0.1 millimeter to 0.2 millimeter or about 0.2 millimeter.

[0010] In an embodiment, at least one pin of the first set of pins is compliant in the height direction of the inner container.

[0011] In an embodiment, the at least one pin is a spring-loaded pin.

[0012] In an embodiment, the door of the box includes a compliant base for supporting the at least one pin.

[0013] In an embodiment, the second set of pins is configured to be activated when the door of the box transitions from the unlocked state to the locked state. When the second set of pins is activated, each pin of the second set of pins is pushed towards the bottom plate and brought into contact with the bottom plate.

[0014] In an embodiment, the door of the box includes a latch arm. When the door of the box transitions from the unlocked state to the locked state, the latch arm pushes the second set of pins towards the bottom plate such that the second set of pins contact the bottom plate.

[0015] In an embodiment, the cassette door includes a door cam. When the cassette door transitions from the unlocked state to the locked state, the door cam drives the second set of pins toward the bottom plate such that the second set of pins contact the bottom plate.

[0016] In an embodiment, the device further includes support pins disposed on the cassette door.

[0017] In an embodiment, a device includes: an inner container having a bottom plate and a lid; an outer container having a cassette dome and a cassette door; and a first set of pins and a second set of pins disposed on the cassette door. The cassette door has a locked state and an unlocked state. The first set of pins and the second set of pins are configured to support the bottom plate. A method of manufacturing the device includes: preparing the first set of pins and the second set of pins such that when the cassette door is in the unlocked state and the first set of pins contact the bottom plate, a gap is formed between the second set of pins and the bottom plate, and when the cassette door is in the locked state, the first set of pins and the second set of pins contact the bottom plate.

[0018] In an embodiment, the method includes preparing a clamping mechanism of the outer container such that when the cassette door is in the locked state, a clamping force applied to the lid from the clamping mechanism is not aligned with the first set of pins in the height direction of the inner container.

[0019] In an embodiment, the gap is in the range of 0.1 millimeter or about 0.1 millimeter to 0.2 millimeter or about 0.2 millimeter.

[0020] In an embodiment, the method includes preparing at least one of the first set of pins such that the at least one pin is compliant in the height direction of the inner container.

[0021] In an embodiment, the at least one pin is a spring-loaded pin.

[0022] In an embodiment, the method includes preparing a compliant base of the cassette door to support the at least one pin.

[0023] In an embodiment, the method includes preparing the second set of pins to be activated when the cassette door transitions from the unlocked state to the locked state. When the second set of pins is activated, each pin in the second set of pins is pushed toward the bottom plate and contacts the bottom plate.

[0024] In an embodiment, the method includes preparing a latch arm of the cassette door such that when the cassette door transitions from the unlocked state to the locked state, the latch arm pushes the second set of pins toward the bottom plate such that the second set of pins contact the bottom plate.

[0025] In an embodiment, the method includes fabricating a door cam of the cassette door such that when the cassette door is in the locked state, the door cam drives the second set of pins toward the bottom plate such that the second set of pins contact the bottom plate.

[0026] In an embodiment, the method includes fabricating support pins disposed on the cassette door. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Reference is made to the drawings that form a part of the present disclosure and illustrate embodiments in which the systems and methods described in this specification may be practiced.

[0028] Figure 1 is a perspective view of a photomask cassette according to an embodiment.

[0029] Figure 2A is a front perspective view of a portion of a photomask cassette according to an embodiment.

[0030] Figure 2B is according to an embodiment Figure 2A of a front left perspective view of a photomask cassette.

[0031] Figure 3 is a top view of a cassette door of an outer cassette according to an embodiment.

[0032] Figure 4A is a cross-sectional perspective view of a motion coupling pin according to an embodiment.

[0033] Figure 4B is according to an embodiment Figure 4A of a perspective view of a motion coupling pin.

[0034] Figure 5 is a cross-sectional view of a photomask cassette according to an embodiment.

[0035] Figure 6 is an exploded view of a portion of a cassette door according to an embodiment.

[0036] Like reference numerals throughout the drawings indicate like components. DETAILED DESCRIPTION

[0037] The present disclosure generally relates to substrate containers, such as photomask cassettes for photomasks. More specifically, the present disclosure relates to photomask cassettes (which have discrete support for an inner cassette of a photomask cassette, such as an extreme ultraviolet (EUV) photomask cassette), and methods of fabricating photomask cassettes.

[0038] It will be appreciated that the EUV inner cassette can be supported inside the EUV outer cassette by a plurality of KC pins (e.g., three KC pins). The embodiments described and recited herein are not limited to the number of pins described. That is, the number of pins described and recited herein is provided for descriptive purposes only and is not intended to be limiting. The physical characteristics of these coupling systems have supports located in three positions, and these supports are local supports that may not be aligned with the clamping required for the reticle and are generally used for the outer cassette position. Specifically, the KC pins located "behind" the inner or outer cassette are centered on the bottom plate while the cover clamping is located at the corners. This may result in high pressure on the rear KC pins and deformation that causes a sliding motion between the cover and the bottom plate.

[0039] The embodiments disclosed herein may provide a compliant rear KC pin structure such that, in the case of outer cassette clamping, the inner cassette can move downward and be supported in the corners by additional support features (e.g., detent pins). The embodiments disclosed herein may also cause the additional support features to rise when the outer cassette is latched to support the inner cassette, thereby relieving the pressure on the inner cassette. A compliant (e.g., spring-loaded or the like) KC pin structure may allow for distributed support of the inner cassette. It will be appreciated that if the KC pins are spring-loaded pins, then the KC pins may need to be designed to have a solid stop when not compressed by outer cassette clamping to maintain position accuracy.

[0040] It will be appreciated that, as defined herein, the term "pin" may refer to any suitable support mechanism, including but not limited to pins, pads, posts, ribs, walls, or the like.

[0041] Specific embodiments of the present disclosure are described herein with reference to the accompanying drawings; however, it should be understood that the disclosed embodiments are merely examples of the present disclosure, which may be embodied in various forms. Well-known functions or configurations are not described in detail to avoid obscuring the present disclosure with unnecessary details. Therefore, the specific structural and functional details disclosed herein should not be construed as restrictive, but merely as a basis for the claims and as a representative basis for teaching those skilled in the art to employ the present disclosure in various appropriate detailed structures in various ways. In this description and in the drawings, like reference numerals represent elements that can perform the same, similar, or equivalent functions.

[0042] The scope of the present disclosure should be determined by the appended claims and their legal equivalents rather than by the examples given herein. For example, the steps recited in any method claim can be performed in any order and are not limited to the order presented in the claims. Additionally, no element is essential for the practice of the present disclosure unless specifically described herein as "critical" or "essential".

[0043] Some embodiments of the present application are described in detail with reference to the accompanying drawings, making it easier for those skilled in the art to understand the advantages and features of the present application. The terms "near", "far", "top", "bottom", "left", "right", and the like described in the present application are defined according to the typical observation angles of those skilled in the art and for the convenience of description. These terms are not limited to specific directions.

[0044] Figure 1 is a perspective view of a mask box 100 according to an embodiment. The mask box 100 includes inner boxes (130 and 140) and outer boxes (110 and 120). For example, the mask box 100 can be, but is not limited to, a mask box or the like for EUV processing of a photolithography mask. In an embodiment, the mask box 100 has a length direction (X direction), a width direction (Y direction), and a thickness or height direction (Z direction).

[0045] The inner boxes (130 and 140) have an internal space including a mask accommodation portion for accommodating a mask 150. The inner boxes (130 and 140) include a lid 130 and a bottom plate 140. The lid 130 and the bottom plate 140 are configured to engage together. When engaged together, the lid 130 and the bottom plate 140 define an internal space sized and shaped to accommodate the mask 150. The mask 150 can be, but is not limited to, a photolithography mask or the like to be used for EUV processing.

[0046] The outer boxes (110 and 120) include a box dome 110 and a box door 120. The outer boxes (110 and 120) are configured to accommodate the inner boxes (130 and 140) in an internal space defined by the box dome 110 and the box door 120. For example, during transportation and handling of the mask box 100, the box dome 110 can be fixed to the box door 120 to enclose the internal space and accommodate the inner boxes (130 and 140). The box dome 110 and the box door 120 can each include one or more polymer materials or any other suitable materials or be made entirely of one or more polymer materials or any other suitable materials.

[0047] Figure 2A is a front perspective view of a part of a mask box 200 according to an embodiment. Figure 2B is according to an embodiment Figure 2A of the mask box 200 from the front left.

[0048] As Figure 2A and 2BAs shown, the photomask cassette 200 includes an inner cassette and an outer cassette. The inner cassette (130 and 140) includes a lid 130 and a bottom plate 140. The internal space of the inner cassette (130 and 140) is enclosed (e.g., closed) by placing the lid 130 on the bottom plate 140. The lid 130 is in direct contact with the bottom plate 140. The inner cassette (130 and 140) can be opened by moving the lid 130 away from the bottom plate 140 (e.g., by moving the lid 130 in the Z direction, etc.). For example, an external tool (e.g., a robotic arm, etc.) can open the inner cassette (130 and 140) to access the photomask receiving portion and remove the photomask (e.g., Figure 1 of 150).

[0049] The outer cassette includes a cassette dome (not shown, refer to Figure 1 of 110) and a cassette door 120. The outer cassette can be configured to accommodate the inner cassette (130 and 140) within the internal space defined by the cassette dome and the cassette door 120. The cassette door 120 can have a locked (e.g., latched) state and an unlocked (e.g., unlatched) state. When the cassette door 120 is in the locked state, the cassette door 120 is locked (e.g., latched, which occurs when a loading or clamping pressure is applied to the lid 130), and for example, during transportation and handling of the photomask cassette 200, the cassette dome can be fixed to the cassette door 120 to enclose the internal space and accommodate the inner cassette (130 and 140). When the cassette door 120 is in the unlocked state, the cassette door 120 is unlocked (e.g., unlatched), and the cassette dome can be unfixed from the cassette door 120.

[0050] The inner cassette (130 and 140) and / or the bottom plate 140 can be supported by the cassette door 120. A first set of pins (125, 127, 129, also refer to Figure 3 )(e.g., kinematic coupling (KC) pins or the like) can be disposed on the cassette door 120 to support the inner cassette (130 and 140) and / or the bottom plate 140. That is, the support for the bottom plate 140 of the inner cassette (130 and 140) can be at points on the bottom side of the bottom plate (e.g., three or any suitable number), which are referred to as, for example, KC pins (125, 127, 129). A second set of pins (121 and 123) (e.g., safety detent pins or the like) can also be disposed on the cassette door 120. The second set of pins (121 and 123) can also be configured to support the inner cassette (130 and 140) and / or the bottom plate 140, for example, when the cassette door 120 is in the locked state.

[0051] As Figure 2AAs shown, the cassette door 120 is in the unlocked state, each of the KC pins (125, 127, 129) contacts the bottom plate, and a gap C is formed between each of the safety pawl pins (121 and 123) and the bottom plate 140. In an embodiment, the gap C ranges from 0.1 millimeter or about 0.1 millimeter to 0.2 millimeter or about 0.2 millimeter. It will be appreciated that the weight of the inner cassettes (130 and 140) generally ranges from 1 pound or about 1 pound to 1.5 pounds or about 1.5 pounds, and when the cassette door 120 is in the unlocked state, the pressure caused by the weight of the inner cassettes (130 and 140) may not cause the gap C to decrease.

[0052] It will also be appreciated that when the cassette door 120 is in the unlocked state, for example by ensuring no contact between the bottom plate 140 and the safety pawl pins (121 and 123), the gap C between the safety pawl pins (121 and 123) and the bottom plate 140 can act as an indicator as to whether the KC pins (125, 127, 129) are accurately positioned. For the proper functioning of the arrangement of the KC pins (125, 127, 129), when the cassette door 120 is in the unlocked state, the bottom plate 140 needs to directly and fully contact each of the KC pins (125, 127, 129). If the bottom plate 140 directly contacts the safety pawl pins (121 and 123) when the cassette door 120 is in the unlocked state, then this can be an indication that the bottom plate 140 is not properly centered. That is, when the cassette door 120 is in the unlocked state, the safety pawl pins (121 and 123) must maintain a gap relative to the bottom plate 140 so that the KC pins (125, 127, 129) can properly perform their positional characteristics and / or accuracy. In other words, the safety pawl pins (121, 123) are deliberately in the gap such that the safety pawl pins (121, 123) do not interfere with the accurate alignment of the inner cassettes (130, 140) with the KC pins (125, 127, 129).

[0053] When the cassette door 120 is in the locked state, the inner cassettes (130 and 140) can be clamped in the outer cassettes (110, 120) for shipping and in-plant transportation. As Figure 2BAs shown by the block arrows in the figure, the lid clamping performed by the outer boxes (110, 120) can be located around the four corners of the inner boxes (130, 140). The mask clamping is shown as the vertical arrows near the lid clamping. The filter inlets (or flushing inlets) (122, 124) can be arranged on or in the cassette door 120, or arranged through the cassette door 120. When the outer boxes (110, 120) clamp the inner boxes (130, 140), for example, when the cassette door 120 changes from the unlocked state to the locked state, under the clamping of the outer boxes (110, 120), the inner boxes (130, 140) can move downward (e.g., in the Z direction) and be supported by additional support features (e.g., safety detent pins (121, 123)). That is, when the cassette door 120 is in the locked state, both the KC pins (125, 127, 129) and the safety detent pins (121, 123) are in direct and full contact with the bottom plate 140. In an embodiment, the clamping positions (i.e., Figure 2B each of the block arrows in the figure) can generate a force of 7 pounds or approximately 7 pounds at each corner of the inner boxes (130, 140). It will be appreciated that the KC pins (125, 127, 129) can be designed to have a solid stop when not compressed by the outer box clamping to maintain position accuracy.

[0054] Figure 3 is a top view of the cassette door 120 of the outer box according to an embodiment. The KC pins (125, 127, 129), the safety detent pins (121, 123), and the filter inlets (122, 124) are arranged on the cassette door 120. It will be appreciated that the embodiments described and enumerated herein are not limited to the number and positions of the described pins and / or inlets. That is, the number and positions of the pins and / or inlets described and enumerated herein are provided only for descriptive purposes and are not intended to be restrictive.

[0055] As Figure 3 shown in the figure, in a plan view, the rear KC pin 125 is arranged at a position near the bottom of the cassette door 120 and near or on the center line L of the cassette door 120. In a plan view, the front KC pins (127, 129) are symmetrically arranged along the center line L at positions near the top of the cassette door 120. In a plan view, the safety detent pins (121, 123) are symmetrically arranged along the center line L at positions near the bottom of the cassette door 120. In a plan view, the filter inlets (122, 124) are symmetrically arranged along the center line L at positions near the bottom of the cassette door 120 and near the side of the cassette door 120. The rear KC pin 125 and the safety detent pins (121, 123) can be substantially aligned with each other in the X direction.

[0056] In an embodiment (e.g., refer to Figure 2B and 3), when the cassette door 120 is in the locked state, the clamping force (e.g., refer to Figure 2B the block arrow in the Z direction in) applied to the cover 130 from the clamping mechanism (e.g., the cover clamping of the outer cassette (110, 120) or the like) is not aligned with the KC pins (125, 127, 129) in the Z direction. The difference between the support (from the KC pins) and the clamping position from the cover 130 to the bottom plate 140 (e.g., refer to Figure 2B the block arrow in) can generate a high-pressure area and local deformation at least above the rear KC pin 125. This high pressure and deformation may cause accelerated wear between the cover 130 and the bottom plate 140. The embodiments disclosed herein can help to disperse this pressure to reduce or spread the wear from a specific position (the rear KC pin 125 or other KC pins or the like) to other positions to reduce the erosiveness or severity of the wear in the specific positions that the user can be aware of or care about.

[0057] Figure 4A is a cross-sectional perspective view of the KC pin 400 according to an embodiment. Figure 4B is according to an embodiment of Figure 4A the KC pin 400. The KC pin 400 can be Figures 2A to 3 any one of the KC pins (125, 127, 129).

[0058] It will be understood that the embodiments described and recited herein are not limited to the structures and implementations of the described KC pins. That is, the structures and implementations of the KC pins described and recited herein are provided only for descriptive purposes and are not intended to be restrictive.

[0059] In an embodiment, the KC pin 400 can be a spring-loaded pin. As Figure 4A and 4B shown, the KC pin 400 can include a cap 410, a compressible member (e.g., a wave washer, a spring or the like) 420, and a body 430. The body 430 includes a tip 432, a shoulder 434, and an end 436. The tip 432 can be received in a groove of the cap 410. The wave washer 420 can be disposed around the tip 432 and disposed on the shoulder 434 to support the tip 432.

[0060] In an embodiment, the cap 410 can be made of a polymer (e.g., polyethylene or the like) or any suitable material(s). The wave washer 420 can be made of stainless steel or any suitable material. The cap 410 can slide over the tip 432. It will be appreciated that the tip 432 (along with the wave washer 420) can be configured to be compliant in the Z-direction while maintaining lateral rigidity. The KC pin 400 can be compliant in the Z-direction. When the outer box (110, 120) is clamped down onto the lid 130 of the inner box (130, 140) (e.g., when the box door 120 transitions from an unlocked state to a locked state), the KC pin 400 can be squeezed downward (e.g., by the bottom plate on the cap 410) a certain distance (e.g., in the range from 0.1 mm or about 0.1 mm to 0.2 mm or about 0.2 mm) under a certain amount of force or loading (e.g., in the range from 4 pounds or about 4 pounds to 5 pounds or about 5 pounds). It will be appreciated that this distance can be equal to Figure 2A the gap C such that when the box door 120 is in the locked state, both the KC pins (125, 127, 129) and the safety detent pins (121, 123) directly and fully contact the bottom plate 140 such that the clamping force or pressure (7 pounds or about 7 pounds at each clamping location) can be dispersed from the bottom plate 140 to the KC pins (125, 127, 129) and the safety detent pins (121, 123). That is, at the rear end of the box door 120, the safety detent pins (121, 123) and the rear KC pin 125 can provide support against the clamping pressure (e.g., 14 pounds or about 14 pounds at the rear end of the box door 120).

[0061] When the box door 120 transitions from the locked state to the unlocked state, the wave washer 420 on the shoulder 434 of the KC pin 400 can push the pin 410 back up a certain distance (e.g., in the range from 0.1 mm or about 0.1 mm to 0.2 mm or about 0.2 mm) to the previous position of the KC pin 400 (before being squeezed).

[0062] Figure 5 is a cross-sectional view of a reticle box 500 according to an embodiment. The reticle box 500 can be the reticle box (100 and / or 200) described above. The reticle box 500 includes an inner box (lid 130 and bottom plate 140) and an outer box (box dome 110 and box door 120). The outer shell of the box door 120 includes a base 510 for supporting the KC pins (125, 127, 129) and includes a plurality of rib structures 520 below the base 510. In an embodiment, the minimum thickness of the base 510 can be in the range from 2 mm or about 2 mm to 2.5 mm or about 2.5 mm.

[0063] In an embodiment, the housing of the cassette door 120 (e.g., the base 510 and rib structure 520), which is below the (a plurality of) KC pins, can be configured to be compliant in the Z direction. Some rib structures can be removed and / or additional rib structures can be added to achieve the desired compliance.

[0064] When the outer cassette (110, 120) is clamped down onto the lid 130 of the inner cassette (130, 140) (e.g., when the cassette door 120 transitions from an unlocked state to a locked state), the housing of the cassette door 120 (e.g., via the (a plurality of) KC pins (125, 127, 129)) can be squeezed downward a certain distance (e.g., in the range from 0.1 mm or about 0.1 mm to 0.2 mm or about 0.2 mm) under a certain amount of force or loading (e.g., in the range from 4 pounds or about 4 pounds to 5 pounds or about 5 pounds). It will be appreciated that this distance can be equal to Figure 2A the clearance C such that when the cassette door 120 is in the locked state, both the KC pins (125, 127, 129) and the safety detent pins (121, 123) directly and fully contact the bottom plate 140 such that the clamping force or pressure (7 pounds or about 7 pounds at each clamping location) can be dispersed from the bottom plate 140 to the KC pins (125, 127, 129) and the safety detent pins (121, 123). That is, at the rear end of the cassette door 120, the safety detent pins (121, 123) and the rear KC pin 125 can provide support against the clamping pressure (14 pounds or about 14 pounds at the rear end of the cassette door 120).

[0065] When the cassette door 120 transitions from the locked state to the unlocked state, the housing of the cassette door 120 (e.g., the base 510 and rib structure 520) can push the (a plurality of) KC pins (125, 127, 129) back upward a certain distance (e.g., in the range from 0.1 mm or about 0.1 mm to 0.2 mm or about 0.2 mm) to the previous position of the KC pins (125, 127, 129) (before being squeezed).

[0066] It will be appreciated that the embodiments described and recited herein are not limited to the described housing structure (e.g., the base 510 and rib structure 520) and implementation of the cassette door 120. That is, the described housing structure and implementation of the cassette door 120 herein are provided for descriptive purposes only and are not intended to be limiting.

[0067] Figure 6 is a exploded view of a portion of a cassette door 600 according to an embodiment (in an inverted position relative to Figure 5 the cassette door 120). The cassette door 600 can be the cassette door 120 described above.

[0068] The cassette door 600 includes a door cam 620 and the (a plurality of) latch arms 610 (at Figure 5It is also marked as 610 in the middle). (A plurality of) ramps (not shown) may be provided on the bottom side of the (a plurality of) latch arms 610 such that when the door cam 620 drives the latch arms outward (e.g., when the cartridge door 600 transitions from an unlocked state to a locked state), the (a plurality of) latch arms 610 can move upward along the (a plurality of) ramps to push the safety detent pins (121, 123) upward toward the bottom plate 140. It will be appreciated that in another embodiment, the (a plurality of) ramps may be optional, and when the door cam 620 drives the latch arms outward (e.g., when the cartridge door 600 transitions from an unlocked state to a locked state), the (a plurality of) latch arms 610 can push the safety detent pins (121, 123) upward toward the bottom plate 140. In yet another embodiment, when the cartridge door 600 transitions from an unlocked state to a locked state, the door cam 620 can drive the safety detent pins (121, 123) upward toward the bottom plate 140.

[0069] In an embodiment, when the outer cartridge is clamped downward onto the lid 130 of the inner cartridge (e.g., when the cartridge door 600 transitions from an unlocked state to a locked state), the door cam 620 can drive the (a plurality of) latch arms 610 outward, and the (a plurality of) latch arms 610 can move upward along the (a plurality of) ramps to push the safety detent pins (121, 123) (e.g., via the base 510 under the safety detent pins) upward toward the bottom plate 140 by a certain amount of force or loading (e.g., in the range from 4 pounds or about 4 pounds to 5 pounds or about 5 pounds) by a certain distance (e.g., in the range from 0.1 millimeter or about 0.1 millimeter to 0.2 millimeter or about 0.2 millimeter).

[0070] It will be appreciated that this distance can be equal to Figure 2A the clearance C such that when the cartridge door 600 is in the locked state, both the KC pins (125, 127, 129) and the safety detent pins (121, 123) directly and fully contact the bottom plate 140, so that the clamping force or pressure (7 pounds or about 7 pounds at each clamping position) can be dispersed from the bottom plate 140 to the KC pins (125, 127, 129) and the safety detent pins (121, 123). That is, at the rear end of the cartridge door 600, the safety detent pins (121, 123) and the rear KC pin 125 can provide support against the clamping pressure (e.g., 14 pounds or about 14 pounds at the rear end of the cartridge door 600). When the cartridge door 600 is in the locked state, the safety detent pins (121, 123) are activated (e.g., pushed toward the bottom plate 140 and contacting the bottom plate 140 by the (a plurality of) latch arms 610 or by the door cam 610).

[0071] In an embodiment, when the cassette door 600 transitions from a locked state to an unlocked state, the door cam 620 may drive the latch arm(s) 610 inwardly, and the latch arm(s) 610 may move downward along the ramp(s) to retract the safety detent pins (121, 123) downward (e.g., via the base 510 below the safety detent pins) a certain distance (e.g., in the range from 0.1 mm or about 0.1 mm to 0.2 mm or about 0.2 mm) to the previous position of the safety detent pins (121, 123) (before being pushed upward). It will be appreciated that in another embodiment, the ramp(s) may be optional, and when the door cam 620 drives the latch arm inwardly, the latch arm(s) 610 may retract the safety detent pins (121, 123) downward (e.g., via the base 510 below the safety detent pins) a certain distance to the previous position of the safety detent pins (121, 123) (before being pushed upward). In yet another embodiment, when the cassette door 600 transitions from a locked state to an unlocked state, the door cam 620 may retract the safety detent pins (121, 123) downward a certain distance to the previous position of the safety detent pins (121, 123).

[0072] In an embodiment, one or more of the support pins (not shown in the figures) may be disposed on the cassette door 600. For example, the support pins may be disposed between the front KC pins 127 and 129. The support pins may also be disposed between the KC pins 125 and 127, between the KC pins 125 and 129, or at any suitable location. The support pins (e.g., the height or compliance of the support pins) may be configured to reduce and / or balance the pressure on the front KC pins 127 and 129 when the cassette door 600 is in the locked state.

[0073] It will be appreciated that the embodiments described and recited herein are not limited to the structure and implementation of the described cassette door 600. That is, the structure and implementation of the cassette door 600 described and recited herein are provided for descriptive purposes only and are not intended to be limiting.

[0074] The embodiments disclosed herein may provide a method(s) for fabricating one or more components of a photomask cassette as described above. The fabricated photomask cassette may help to disperse forces (e.g., caused by clamping forces) to prevent wear from occurring within the cycle, for example.

[0075] It will be appreciated that on existing photomask cassettes, FEA (finite element analysis) has been performed to indicate high-pressure areas. Wear studies indicate consistent contact and wear marks above the rear KC pins of the KC pins and / or at other locations. Shim safety detent pins or pads for eliminating spaces or gaps have been tested and the tests have shown wear reduction of a set of bottom plates of the inner cassette that previously wore at locations above the rear KC pins and / or at other locations.

[0076] It will also be appreciated that FEA and testing have shown that high pressures associated with differences in the clamping position from the lid to the base plate of the inner box can cause wear above the rear KC pin of the pin. The embodiments disclosed herein can reduce this high pressure and still accurately restrain the inner box. The embodiments disclosed herein can provide a support structure below the inner box more uniformly in the outer box to reduce local pressure and movement due to bending.

[0077] Aspect :

[0078] Any of the aspects described above can be combined with each other.

[0079] Aspect 1. A device, comprising: an inner container having a base plate and a lid; an outer container having a box dome and a box door, the box door having a locked state and an unlocked state; and a first set of pins and a second set of pins disposed on the box door, the first set of pins and the second set of pins being configured to support the base plate, wherein when the box door is in the unlocked state and the first set of pins contact the base plate, a gap is formed between the second set of pins and the base plate, and when the box door is in the locked state, the first set of pins and the second set of pins contact the base plate.

[0080] Aspect 2. The device according to aspect 1, wherein the outer container includes a clamping mechanism, and when the box door is in the locked state, the clamping force applied from the clamping mechanism to the lid is not aligned with the first set of pins in the height direction of the inner container.

[0081] Aspect 3. The device according to aspect 1 or aspect 2, wherein the gap is in the range from 0.1 millimeter or about 0.1 millimeter to 0.2 millimeter or about 0.2 millimeter.

[0082] Aspect 4. The device according to any one of aspects 1 to 3, wherein at least one of the first set of pins is compliant in the height direction of the inner container.

[0083] Aspect 5. The device according to aspect 4, wherein the at least one pin is a spring-loaded pin.

[0084] Aspect 6. The device according to aspect 4, wherein the box door includes a compliant base for supporting the at least one pin.

[0085] Aspect 7. The device according to any one of aspects 1 to 6, wherein the second set of pins is configured to be activated when the box door transitions from the unlocked state to the locked state, and when the second set of pins is activated, each pin in the second set of pins is pushed towards the base plate and brought into contact with the base plate.

[0086] Aspect 8. The device according to aspect 7, wherein the cartridge door comprises a latch arm that, when the cartridge door transitions from the unlocked state to the locked state, pushes the second set of pins towards the base plate such that the second set of pins contact the base plate.

[0087] Aspect 9. The device according to aspect 7, wherein the cartridge door comprises a door cam that, when the cartridge door transitions from the unlocked state to the locked state, drives the second set of pins towards the base plate such that the second set of pins contact the base plate.

[0088] Aspect 10. The device according to any one of aspects 1 to 9, further comprising: a support pin disposed on the cartridge door.

[0089] Aspect 11. A method of manufacturing a device, the device comprising: an inner container having a base plate and a lid; an outer container having a cartridge dome and a cartridge door, the cartridge door having a locked state and an unlocked state; and a first set of pins and a second set of pins disposed on the cartridge door, the first set of pins and the second set of pins being configured to support the base plate, the method comprising: preparing the first set of pins and the second set of pins such that when the cartridge door is in the unlocked state and the first set of pins contact the base plate, a gap is formed between the second set of pins and the base plate, and when the cartridge door is in the locked state, the first set of pins and the second set of pins contact the base plate.

[0090] Aspect 12. The method according to aspect 11, further comprising: preparing the clamping mechanism of the outer container such that when the cartridge door is in the locked state, the clamping force applied to the lid from the clamping mechanism is not aligned with the first set of pins in the height direction of the inner container.

[0091] Aspect 13. The method according to aspect 11 or aspect 12, wherein the gap is in the range of 0.1 millimeter or about 0.1 millimeter to 0.2 millimeter or about 0.2 millimeter.

[0092] Aspect 14. The method according to any one of aspects 11 to 13, further comprising: preparing at least one of the first set of pins such that the at least one pin is compliant in the height direction of the inner container.

[0093] Aspect 15. The method according to aspect 14, wherein the at least one pin is a spring-loaded pin.

[0094] Aspect 16. The method according to aspect 14, further comprising: preparing a compliant base of the cartridge door to support the at least one pin.

[0095] Aspect 17. The method according to any one of aspects 11 to 16 further comprises: preparing the second set of pins such that they are activated when the cartridge door transitions from the unlocked state to the locked state, wherein when the second set of pins are activated, each pin in the second set of pins is pushed towards the base plate and brought into contact with the base plate.

[0096] Aspect 18. The method according to aspect 17 further comprises: preparing the latch arm of the cartridge door such that when the cartridge door transitions from the unlocked state to the locked state, the latch arm pushes the second set of pins towards the base plate such that the second set of pins contact the base plate.

[0097] Aspect 19. The method according to aspect 17 further comprises: preparing the door cam of the cartridge door such that when the cartridge door is in the locked state, the door cam drives the second set of pins towards the base plate such that the second set of pins contact the base plate.

[0098] Aspect 20. The method according to any one of aspects 11 to 19 further comprises: preparing a support pin disposed on the cartridge door.

[0099] The embodiments disclosed in this application are to be considered illustrative in all respects and not restrictive. The scope of the present invention is indicated by the appended claims rather than by the foregoing description; and all changes within the meaning and equivalent scope of the claims are intended to be embraced therein.

[0100] The terms used in this specification are intended to describe particular embodiments and are not intended to be restrictive. Unless otherwise expressly indicated, the terms "a", "an", and "the" also include the plural forms. The terms "comprises" and / or "comprising", when used in this specification, specify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, and / or components.

[0101] With respect to the foregoing description, it is to be understood that changes may be made in detail without departing from the scope of the present disclosure, particularly in the construction materials employed and in the shape, size, and arrangement of the components. This specification and the described embodiments are merely illustrative, the true scope and spirit of the present disclosure being indicated by the appended claims.

Claims

1. A device, which comprises: an inner container having a bottom plate and a lid; an outer container having a box dome and a box door, the box door having a locked state and an unlocked state; and a first set of pins and a second set of pins disposed on the box door, the first set of pins and the second set of pins being configured to support the bottom plate, wherein when the box door is in the unlocked state and the first set of pins contact the bottom plate, a gap is formed between the second set of pins and the bottom plate, when the box door is in the locked state, the first set of pins and the second set of pins contact the bottom plate.

2. The device according to claim 1, wherein the outer container comprises a clamping mechanism, when the box door is in the locked state, the clamping force applied to the lid from the clamping mechanism is not aligned with the first set of pins in the height direction of the inner container.

3. The device according to claim 1, wherein the gap ranges from 0.1 mm or about 0.1 mm to 0.2 mm or about 0.2 mm.

4. The device according to claim 1, wherein at least one of the first set of pins is compliant in the height direction of the inner container.

5. The device according to claim 4, wherein the at least one pin is a spring-loaded pin.

6. The device according to claim 4, wherein the box door comprises a compliant base for supporting the at least one pin.

7. The device according to claim 1, wherein the second set of pins is configured to be activated when the box door transitions from the unlocked state to the locked state, when the second set of pins is activated, each pin in the second set of pins is pushed towards the bottom plate and contacts the bottom plate.

8. The device according to claim 7, wherein the box door comprises a latch arm, when the box door transitions from the unlocked state to the locked state, the latch arm pushes the second set of pins towards the bottom plate such that the second set of pins contact the bottom plate.

9. The device according to claim 7, wherein the box door comprises a door cam, when the box door transitions from the unlocked state to the locked state, the door cam drives the second set of pins towards the bottom plate such that the second set of pins contact the bottom plate.

10. The device according to claim 1, which further comprises: a support pin disposed on the box door.

11. A method of manufacturing a device, the device comprising: an inner container having a bottom plate and a lid; an outer container having a box dome and a box door, the box door having a locked state and an unlocked state; and a first set of pins and a second set of pins disposed on the box door, the first set of pins and the second set of pins being configured to support the bottom plate, the method comprises: preparing the first set of pins and the second set of pins such that when the box door is in the unlocked state and the first set of pins contact the bottom plate, a gap is formed between the second set of pins and the bottom plate, and when the box door is in the locked state, the first set of pins and the second set of pins contact the bottom plate.

12. The method according to claim 11, which further comprises: The clamping mechanism for preparing the outer container is such that when the cassette door is in the locked state, the clamping force applied from the clamping mechanism to the lid is not aligned with the first set of pins in the height direction of the inner container.

13. The method according to claim 11, wherein the clearance is in the range of 0.1 millimeter or about 0.1 millimeter to 0.2 millimeter or about 0.2 millimeter.

14. The method according to claim 11, which further comprises: Preparing at least one of the first set of pins such that the at least one pin is compliant in the height direction of the inner container.

15. The method according to claim 14, wherein the at least one pin is a spring-loaded pin.

16. The method according to claim 14, which further comprises: Preparing a compliant base of the cassette door to support the at least one pin.

17. The method according to claim 11, which further comprises: Preparing the second set of pins to be activated when the cassette door transitions from the unlocked state to the locked state, wherein when the second set of pins is activated, each pin in the second set of pins is pushed towards the bottom plate and brought into contact with the bottom plate.

18. The method according to claim 17, which further comprises: Preparing a latch arm of the cassette door such that when the cassette door transitions from the unlocked state to the locked state, the latch arm pushes the second set of pins towards the bottom plate so that the second set of pins contact the bottom plate.

19. The method according to claim 17, which further comprises: Preparing a door cam of the cassette door such that when the cassette door is in the locked state, the door cam drives the second set of pins towards the bottom plate so that the second set of pins contact the bottom plate.

20. The method according to claim 11, which further comprises: Preparing a support pin disposed on the cassette door.

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