Single crystal furnace cooling cycle waste heat utilization system

Abstract

The invention discloses a single crystal furnace cooling cycle waste heat utilization system, and relates to the technical field of single crystal furnace waste heat utilization, the single crystal furnace cooling cycle waste heat utilization system comprises a furnace body and a thermal field assembly, and further comprises a plurality of water storage tanks, and a water inlet pipe is fixedly arranged on the outer circumferential surface of the furnace body; the heat transfer assembly is used for transferring heat of the thermal field assembly into the water storage tanks, the heat transfer assembly comprises heat dissipation plates arranged in the water storage tanks in a sliding mode, and heat conduction plates used for abutting against the thermal field assembly are fixedly arranged on the sides, close to the thermal field assembly, of the heat dissipation plates; water is injected into the water inlet pipe to enable the heat dissipation plate to move, and then the heat conduction plate abuts against the heat field assembly, so that waste heat of the heat field assembly can be transmitted to water in the water outlet tank in a heat transmission mode, and the water in the water storage tank can be heated and utilized; the cooling agent in the material storage funnel falls into the cooling water box through water vapor generated by heating water through the thermal field assembly, so that the water in the cooling water box and the water storage tank is cooled, and the heat dissipation efficiency of the heat conduction plate is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of waste heat utilization of single crystal furnaces, and particularly relates to a cooling circulation waste heat utilization system for single crystal furnaces. Background Art

[0002] Silicon is a relatively active non-metallic element and an important component of crystal materials, being at the forefront of the development of new materials. Single crystal silicon, as the raw material for manufacturing semiconductor silicon devices, is mainly used for manufacturing high-power rectifiers, high-power transistors, diodes, switching devices, etc., and is a very promising material in the development of new energy. Single crystal silicon is divided into the Czochralski method, the zone melting method, and the epitaxial method according to different crystal growth methods. Due to cost and performance reasons, Czochralski single crystal silicon materials are the most widely used;

[0003] The process of producing single crystal silicon by the Czochralski method is completed in a single crystal furnace. After the existing single crystal furnace finishes production, it is necessary to stop the furnace to cool the hot field. After the hot field is cooled, the furnace is disassembled to take out the crystal. Finally, devices such as the thermal insulation cover, graphite crucible, and graphite crucible support are taken out for cooling and cleaning.

[0004] After the existing single crystal furnace stops operating, two methods, natural cooling and radiation to circulating water, are used to reduce a large amount of waste heat in the hot field components. Natural cooling and heat radiation have a slow cooling rate. Generally, it takes 6 - 10 hours to cool down before the furnace can be disassembled. The longer the cooling waiting time, the lower the production efficiency. Moreover, during cooling, the excess heat of the hot field components will be directly discharged and consumed, and the waste heat cannot be reused. Summary of the Invention

[0005] The purpose of the present invention is to provide a cooling circulation waste heat utilization system for single crystal furnaces to solve the above deficiencies in the prior art.

[0006] To achieve the above purpose, the present invention provides the following technical solution: A cooling circulation waste heat utilization system for single crystal furnaces, including a furnace body and a hot field component, further including a plurality of water storage tanks fixedly arranged on the outer peripheral surface of the furnace body, and a water inlet pipe fixedly arranged on the outer peripheral surface of the furnace body and fixedly connected to each of the water storage tanks; a heat transfer component for transferring the heat of the hot field component into the water storage tanks, the heat transfer component including heat dissipation plates slidably arranged in each of the water storage tanks, and heat conduction plates fixedly arranged on one side of each heat dissipation plate close to the hot field component for abutting against the hot field component.

[0007] Preferably, a water outlet pipe is fixedly arranged on the outer peripheral surface of the furnace body, and a second connecting pipe is fixedly connected between each water storage tank and the water outlet pipe.

[0008] Preferably, an air guide pipe is fixedly arranged on each of the water storage tanks. A deflation rod is slidably arranged in each of the air guide pipes. An air inlet hole is formed on one side of each deflation rod close to the furnace body. An exhaust hole is formed on the outer peripheral surface of each deflation rod. Each of the exhaust holes is communicated with each of the air inlet holes in a one-to-one correspondence.

[0009] Preferably, a connecting rod is fixedly arranged at one end of each deflation rod away from the furnace body. A top plate is fixedly arranged at one end of each connecting rod away from the deflation rod. A second spring is fixedly arranged between each of the top plates and each of the air guide pipes in a one-to-one correspondence.

[0010] Preferably, a plurality of cooling water boxes are fixedly arranged on the outer peripheral surface of the furnace body. A support is fixedly arranged on each of the cooling water boxes. A storage hopper is fixedly arranged on each of the supports. A coolant for cooling is placed in each of the storage hoppers.

[0011] Preferably, a feeding pipe is fixedly arranged at one end of the storage hopper close to the cooling water box. A feeding plate is slidably arranged on the feeding pipe. A feeding hole is formed in the feeding plate. Each of the feeding plates is fixedly connected with each of the top plates in a one-to-one correspondence.

[0012] Preferably, a stirring rod is fixedly arranged on each of the top plates.

[0013] Preferably, the coolant is saltpeter powder.

[0014] Preferably, a plurality of heat dissipation rods are fixedly arranged on one side of each heat dissipation plate away from the heat conduction plate. A first spring is fixedly arranged between the inner wall of each water storage tank and each heat dissipation plate in a one-to-one correspondence.

[0015] Preferably, each of the heat conduction plates, heat conduction rods, heat dissipation plates, and heat dissipation rods is made of copper.

[0016] In the above technical solution, the present invention provides a single crystal furnace cooling circulation waste heat utilization system, which has the following beneficial effects: By injecting water into the water inlet pipe, the heat dissipation plate moves, so that the heat conduction plate abuts against the hot field assembly, so that the waste heat of the hot field assembly can be transferred to the water in the water outlet tank by heat transfer, and the water in the water storage tank can be heated and utilized; The water vapor generated by heating the water by the hot field assembly increases the pressure in the water storage tank, so that the heat conduction plate tightly abuts against the hot field assembly, ensuring the contact between the heat conduction plate and the hot field assembly; The water vapor generated by heating the water by the hot field assembly pushes the deflation rod to move, thereby driving the feeding plate to move, and then the saltpeter in the storage hopper continuously falls into the cooling water box, thereby cooling the cooling water box and the water in the water storage tank, greatly increasing the heat dissipation efficiency of the heat conduction plate and the heat dissipation plate, and effectively shortening the cooling time of the hot field assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings.

[0018] Figure 1 It is a schematic structural diagram of the whole provided by the embodiment of the present invention;

[0019] Figure 2 It is a schematic structural diagram of the cooling water box provided by the embodiment of the present invention;

[0020] Figure 3 It is a schematic structural diagram of the water storage tank provided by the embodiment of the present invention;

[0021] Figure 4 It is a schematic structural diagram of the first spring provided by the embodiment of the present invention;

[0022] Figure 5 It is a schematic structural diagram of the air release rod provided by the embodiment of the present invention;

[0023] Figure 6 provided by the embodiment of the present invention Figure 5 The enlarged structural view of part A in

[0024] Explanation of reference numerals:

[0025] 1. Furnace body; 2. Thermal field assembly; 11. Water inlet pipe; 12. Vent pipe; 13. Water inlet; 14. Water outlet pipe; 15. Water outlet; 16. First connecting pipe; 17. Second connecting pipe; 21. Water storage tank; 22. Heat dissipation plate; 23. Heat conduction rod; 24. Heat conduction plate; 25. Heat dissipation rod; 26. First spring; 31. Air guide pipe; 32. Air release rod; 33. Air inlet hole; 34. Exhaust hole; 35. Top plate; 36. Connecting rod; 37. Second spring; 38. Stirring rod; 41. Cooling water box; 42. Bracket; 43. Storage hopper; 44. Feeding pipe; 45. Feeding plate; 46. Feeding hole. Detailed implementation manners

[0026] To enable those skilled in the art to better understand the technical solutions of the present invention, the following will further introduce the present invention in detail in conjunction with the drawings.

[0027] Please refer to Figures 1-6, A single crystal furnace cooling cycle waste heat utilization system, including a furnace body 1 and a hot field component 2, further includes a plurality of water storage tanks 21 fixedly arranged on the outer peripheral surface of the furnace body 1, and an inlet pipe 11 fixedly arranged on the outer peripheral surface of the furnace body 1 and fixedly connected to each water storage tank 21; a heat transfer component, which is used to transfer the heat of the hot field component 2 into the water storage tank 21. The heat transfer component includes heat dissipation plates 22 slidably arranged in each water storage tank 21, and a heat conduction plate 24 for abutting against the hot field component 2 is fixedly arranged on one side of each heat dissipation plate 22 close to the hot field component 2.

[0028] Specifically, the heat dissipation plates 22 are attached to the inner wall of the water storage tank 21. A first communication pipe 16 is fixedly connected to each water storage tank 21, and each water storage tank 21 is fixedly connected to the inlet pipe 11 through the first communication pipe 16. As Figure 4 shown, each first communication pipe 16 is fixedly arranged on the side of the corresponding heat dissipation plate 22 away from the heat conduction plate 24. When water is injected into the water storage tank 21 through the first communication pipe 16, the water will first enter the side of the water storage tank 21 away from the heat conduction plate 24. An inlet 13 that can be closed and a vent pipe 12 are fixedly arranged on the inlet pipe 11. Heat conduction rods 23 are fixedly arranged in one-to-one correspondence between each heat dissipation plate 22 and each heat conduction plate 24. Each heat conduction rod 23 is slidably connected to the outer wall of the furnace body 1. Each heat conduction plate 24 is located between the furnace body 1 and the hot field component 2 and abuts against the inner wall of the furnace body 1. After the single crystal furnace stops, the inlet 13 and the vent pipe 12 are opened, water is added into the inlet pipe 11, and the water enters each water storage tank 21 through the inlet pipe 11. The air in the inlet pipe 11 and each water storage tank 21 is discharged through the vent pipe 12. After the air in the water storage tank 21 and the inlet pipe 11 is discharged, the vent pipe 12 is blocked. At this time, water is continuously injected into the inlet pipe 11 through the inlet 13. As the water injected into the inlet pipe 11 increases, the pressure in each water storage tank 21 increases, thereby pushing each heat dissipation plate 22 to move towards the hot field component 2, so that the heat conduction plate 24 tightly abuts against the hot field component 2. When the heat conduction plate 24 abuts against the hot field component 2, the waste heat on the hot field component 2 is transferred to the heat conduction plate 24 by heat transfer, and is transferred to the water in the water storage tank 21 through the heat conduction rod 23 and the heat dissipation plate 22, increasing the heat dissipation efficiency, and heating the water in each cooling tank and the inlet pipe 11. The heated water can be used for industrial production and daily life, thereby utilizing the waste heat after the single crystal furnace stops.

[0029] Furthermore, an outlet pipe 14 is fixedly arranged on the outer peripheral surface of the furnace body 1, and a second communication pipe 17 is fixedly connected between each water storage tank 21 and the outlet pipe 14; a water outlet 15 that can be blocked is fixedly arranged at the bottom of the outlet pipe 14. The second communication pipe 17 is fixedly arranged at the bottom of the water storage tank 21. Each water storage tank 21 is fixedly connected to the outlet pipe 14 through the second communication pipe 17. When the hot field component 2 cools to an appropriate temperature, the hot water in each water storage tank 21 and the inlet pipe 11 is taken out and utilized through the outlet pipe 14 and the water outlet 15.

[0030] In another embodiment of the present invention: An air guide pipe 31 is fixedly arranged on each water storage tank 21. A deflation rod 32 is slidably arranged in each air guide pipe 31. An air inlet hole 33 is formed on one side of each deflation rod 32 close to the furnace body 1. An exhaust hole 34 is formed on the outer peripheral surface of each deflation rod 32. Each exhaust hole 34 is communicated with each air inlet hole 33 in a one-to-one correspondence; In the initial state, the exhaust hole 34 on the deflation rod 32 is located in the air guide pipe 31, so as to prevent the gas and liquid in the water storage tank 21 from flowing out. When the heat field assembly 2 transfers the residual heat after the furnace is stopped to the water in each water storage tank 21, the water in the water storage tank 21 is heated and the temperature rises. When the water temperature rises, more water vapor will be generated, so that the pressure in each water storage tank 21 continues to increase. When there is enough water vapor in each water storage tank 21, the water vapor will push the deflation rod 32 to move, so that the exhaust hole 34 on the deflation rod 32 is exposed from the air guide pipe 31. At this time, the excess water vapor in the water storage tank 21 is discharged through the exhaust hole 34.

[0031] Furthermore, a connecting rod 36 is fixedly arranged at one end of each deflation rod 32 away from the furnace body 1. A top plate 35 is fixedly arranged at one end of each connecting rod 36 away from the deflation rod 32. A second spring 37 is fixedly arranged between each top plate 35 and each air guide pipe 31 in a one-to-one correspondence; When the water vapor in the water storage tank 21 pushes the deflation rod 32 to move away from the furnace body 1, the corresponding second spring 37 is stretched. After the excess water vapor in the water storage tank 21 is discharged, the deflation rod 32 can be restored to its original position by the second spring 37.

[0032] In another embodiment of the present invention: A plurality of cooling water boxes 41 are fixedly arranged on the outer peripheral surface of the furnace body 1. Each cooling water box 41 is fixedly provided with a bracket 42, and each bracket 42 is fixedly provided with a storage hopper 43. A coolant for cooling is placed in each storage hopper 43. Each cooling water box 41 is fixedly arranged corresponding to each water storage tank 21. The cooling water box 41 is used to hold water. In cold winter, due to the low air temperature, when cooling the hot field component 2 of the single crystal furnace by injecting water into the water storage tank 21 after the single crystal furnace stops operating, the low ambient temperature can not only accelerate the natural cooling of the hot field component 2, but also cool the water heated in the water storage tank 21 and the water inlet pipe 11, thereby increasing the cooling effect of heat transfer between the heat conducting plate 24 and the heat dissipating plate 22. When the water in each water storage tank 21, water inlet pipe 11, and water outlet pipe 14 is heated to a relatively high temperature, the temperature of the hot field component 2 can be effectively reduced, thus greatly shortening the cooling time of the hot field component 2. However, in hot summer, due to the relatively high ambient temperature itself, the natural cooling effect of the hot field component 2 of the single crystal furnace is poor, and the water heated in the water storage tank 21 through the heat conducting plate 24 and the heat dissipating plate 22 cannot be cooled in time, resulting in a reduction in the cooling effect of the heat conducting plate 24. At this time, water is injected into each cooling water box 41 so that the water in the cooling water box 41 surrounds the water storage tank 21, thereby cooling the water storage tank 21. When the water in the water storage tank 21 is heated, the temperature of the water in the cooling water box 41 also rises. The coolant in the storage hopper 43 is put into the cooling water box 41, so that the water temperature in the cooling water box 41 is reduced, thereby cooling the hot water in the water storage tank 21, and increasing the heat dissipation efficiency of the heat conducting plate 24, ensuring the heat dissipation effect of the heat transfer component in hot summer.

[0033] Specifically, a blanking pipe 44 is fixedly arranged at one end of the storage hopper 43 close to the cooling water box 41. A blanking plate 45 is slidably arranged on the blanking pipe 44. A blanking hole 46 is formed in the blanking plate 45. Each blanking plate 45 is fixedly connected to each top plate 35 in a one-to-one correspondence. The blanking pipe 44 has a hole for the coolant in the storage hopper 43 to fall through. Move the blanking plate 45. When the blanking hole 46 on the blanking plate 45 intersects with the hole of the blanking pipe 44, the coolant in the discharge funnel falls into the cooling water box 41 through the blanking pipe 44 and the blanking plate 45, thereby cooling the water in the cooling water box 41. In the hot summer, when the water in the water storage tank 21, the water inlet pipe 11, and the water outlet pipe 14 are all heated, the temperature of the thermal field assembly 2 is still very high. At this time, the thermal field assembly 2 makes the water temperature in the water storage tank 21 continue to rise until boiling through the heat conduction plate 24 and the heat dissipation plate 22. The high-temperature water will generate a large amount of water vapor, increasing the pressure in the water storage tank 21. After a certain period of time, a large amount of water vapor will push each air release rod 32 to move, thereby pushing each blanking plate 45 to move through each top plate 35, making the blanking hole 46 on the blanking plate 45 intersect with the hole of the blanking pipe 44, so that the coolant in the storage hopper 43 falls into the water in the cooling water box 41, thereby cooling the water in the cooling water box 41 and the water in the water storage tank 21. As the heat conduction plate 24 and the heat dissipation plate 22 continuously heat the water in the water storage tank 21, water vapor is continuously generated in the water storage tank 21, causing the air release rod 32 to continuously reciprocate in the air duct 31, making the blanking plate 45 also continuously move, and further making the coolant in the storage hopper 43 continuously fall into the cooling water box 41, and then repeatedly cooling the water in the cooling water box 41 and the water storage tank 21, greatly increasing the heat dissipation efficiency of the heat conduction plate 24 and the heat dissipation plate 22, and effectively reducing the cooling time of the thermal field assembly 2.

[0034] A stirring rod 38 is fixedly arranged on each top plate 35. When the top plate 35 moves and the coolant in the storage hopper 43 falls into the cooling water box 41, the stirring rod 38 also moves accordingly, thereby stirring the coolant falling into the cooling water box 41 and mixing the water in the cooling water box 41 with the coolant.

[0035] Further, the coolant is potassium nitrate powder. When the potassium nitrate powder falls from the storage hopper 43 into the cooling water box 41, it will dissolve in the water in the cooling water box 41. Since potassium nitrate absorbs a large amount of heat when dissolving in water, the water in the cooling water box 41 and the water storage tank 21 can be effectively cooled, and the temperature of the surrounding environment can also be reduced. After the water temperature in the water storage tank 21 decreases, the heat dissipation efficiency of the heat conduction plate 24 and the heat dissipation plate 22 increases accordingly, thereby shortening the cooling time of the thermal field assembly 2.

[0036] In another embodiment of the present invention: A plurality of heat dissipation rods 25 are fixedly arranged on one side of each heat dissipation plate 22 away from the heat conduction plate 24, and a first spring 26 is fixedly arranged between the inner wall of each water storage tank 21 and each heat dissipation plate 22 in a one-to-one correspondence; the heat dissipation rods 25 are used to increase the contact area between the heat dissipation plate 22 and water. Thereby, the heat in the heat field assembly 2 can be better transferred to the water in the water storage tank 21. In the initial state, each heat conduction plate 24 is in contact with the inner wall of the furnace body 1, so that the heat conduction plate 24 will not easily contact the heat field assembly 2, preventing the heat conduction plate 24 from affecting the temperature during the production of the heat field assembly 2 and the flow of inert gas in the furnace body 1. When water is injected into the water storage tank 21 through the water inlet pipe 11, each first spring 26 is stretched by water pressure and the heat dissipation plate 22 moves. At this time, the heat conduction plate 24 is brought into contact with the heat field assembly 2 by water pressure. When the water in the water storage tank 21 is heated to generate water vapor, the pressure in the water storage tank 21 increases again. At this time, the heat conduction plate 24 is tightly pressed against the heat field assembly 2 by the pressure of water and the pressure of water vapor. When the temperature of the heat field assembly 2 drops to a level where the furnace can be disassembled, the hot water in each water storage tank 21 is discharged. At this time, the pressure in the water storage tank 21 is released, and the heat dissipation plate 22 and the heat conduction plate 24 are moved by the first spring 26, so that the heat conduction plate 24 returns to its initial position.

[0037] Each heat conduction plate 24, heat conduction rod 23, heat dissipation plate 22, and heat dissipation rod 25 are all made of copper; copper has a relatively low friction coefficient and good heat conduction effect, which is beneficial to transferring the preheat of the heat field assembly 2 to the water storage tank 21.

[0038] Only some exemplary embodiments of the present invention have been described by way of illustration above. Without doubt, for those of ordinary skill in the art, the described embodiments can be modified in various different ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the protection scope of the claims of the present invention.

Claims

1. A single crystal furnace cooling cycle waste heat utilization system, comprising a furnace body (1) and a thermal field component (2), characterized in that: It also includes a plurality of water storage tanks (21) fixedly arranged on the outer peripheral surface of the furnace body (1), and a water inlet pipe (11) fixedly arranged on the outer peripheral surface of the furnace body (1) and connected to each of the water storage tanks (21); A heat transfer component is used to transfer heat from a thermal field component (2) to a water storage tank (21), the heat transfer component comprising a heat sink (22) slidably arranged in each of the water storage tanks (21), and a heat conduction plate (24) for abutting the thermal field component (2) is fixedly arranged on one side of each of the heat sinks (22) close to the thermal field component (2).

2. A single crystal furnace cooling cycle waste heat utilization system according to claim 1, characterized in that: A water outlet pipe (14) is fixedly arranged on the outer peripheral surface of the furnace body (1), and a second connecting pipe (17) is fixedly connected between each of the water storage tanks (21) and the water outlet pipe (14).

3. The single crystal furnace cooling cycle waste heat utilization system according to claim 1, characterized in that: An air guide pipe (31) is fixedly arranged on each of the water storage tanks (21), and an air discharge rod (32) is slidably arranged in each of the air guide pipes (31). An air inlet hole (33) is provided on a side of each of the air discharge rods (32) close to the furnace body (1), and an exhaust hole (34) is provided on the outer peripheral surface of each of the air discharge rods (32). Each of the exhaust holes (34) is connected to each of the air inlet holes (33) in a one-to-one correspondence.

4. A single crystal furnace cooling cycle waste heat utilization system according to claim 3, characterized in that: A connecting rod (36) is fixedly provided at one end of each of the air release rods (32) away from the furnace body (1), a top plate (35) is fixedly provided at one end of each of the connecting rods (36) away from the air release rods (32), and a second spring (37) is fixedly provided between each of the top plates (35) and each of the air guide pipes (31) in a one-to-one correspondence.

5. A single crystal furnace cooling cycle waste heat utilization system according to claim 4, characterized in that: A plurality of cooling water boxes (41) are fixedly arranged on the outer peripheral surface of the furnace body (1), a bracket (42) is fixedly arranged on each cooling water box (41), a material storage funnel (43) is fixedly arranged on each bracket (42), and a coolant for cooling is placed in each material storage funnel (43).

6. A single crystal furnace cooling cycle waste heat utilization system according to claim 5, characterized in that: A discharge pipe (44) is fixedly provided at one end of the storage funnel (43) close to the cooling water box (41), a discharge plate (45) is slidably provided on the discharge pipe (44), a discharge hole (46) is opened on the discharge plate (45), and each discharge plate (45) is fixedly connected to each top plate (35) in a one-to-one corresponding manner.

7. A single crystal furnace cooling cycle waste heat utilization system according to claim 6, characterized in that: A stirring rod (38) is fixedly arranged on each of the top plates (35).

8. The single crystal furnace cooling cycle waste heat utilization system according to claim 5, characterized in that: The coolant is saltpeter powder.

9. The single crystal furnace cooling cycle waste heat utilization system according to claim 1, characterized in that: A plurality of heat dissipation rods (25) are fixedly arranged on one side of each heat dissipation plate (22) away from the heat conducting plate (24), and a first spring (26) is fixedly arranged one-to-one between the inner wall of each water storage tank (21) and each heat dissipation plate (22).

10. A single crystal furnace cooling cycle waste heat utilization system according to claim 9, characterized in that: Each of the heat conducting plates (24), heat conducting rods (23), heat dissipating plates (22) and heat dissipating rods (25) is made of copper.

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